Rotation mechanism for X-ray inspection device, X-ray inspection device, and adjustment method of rotation mechanism for X-ray inspection device

Abstract

The present invention provides a rotating mechanism for an X-ray inspection device capable of making the rotation trajectory of a rotating object to be inspected close to a perfect circle; in the rotating mechanism for the X-ray inspection device, a plurality of adjustment components (17) for deforming the outer ring (15) of a bearing (12) to adjust the shape of the outer ring (15) are arranged along the circumferential direction of the bearing (12); the adjustment component (17) can move in the radial direction of the bearing (12) relative to an adjustment component retaining portion (11c) and can contact the outer peripheral surface of the outer ring (15); a gap (S) for deforming the outer ring (15) is formed between the outer peripheral surface of the outer ring (15) in the radial direction of the bearing (12) and the adjustment component retaining portion (11c).

Description

Technical Field

[0001] The present invention relates to a rotation mechanism for an X-ray inspection device used in an X-ray inspection device for inspecting an object to be inspected such as an industrial product in a non-destructive manner. In addition, the present invention relates to an X-ray inspection device having the rotation mechanism for an X-ray inspection device. Furthermore, the present invention relates to an adjustment method for the rotation mechanism for an X-ray inspection device used in the X-ray inspection device. Background Art

[0002] At present, there is known an inspection device for inspecting a flat substrate (for example, refer to Patent Document 1). The inspection device described in Patent Document 1 includes a radiation generator for irradiating radiation such as X-rays to the substrate, a substrate holding portion for holding the substrate, and a detector for capturing an image of the substrate. The substrate is held on the substrate holding portion, for example, in such a manner that the thickness direction of the substrate is consistent with the up-down direction. The radiation generator is arranged on the upper side of the substrate holding portion, and the detector is arranged on the lower side of the substrate holding portion. In addition, the inspection device described in Patent Document 1 includes a substrate holding portion driving portion. The substrate holding portion driving portion includes a parallel movement mechanism for parallel movement of the substrate holding portion and a rotation mechanism for rotating the substrate holding portion.

[0003] In addition, currently, as an inspection device for inspecting a flat plate substrate like the inspection device described in Patent Document 1, for example, Figure 5 The inspection apparatus shown in the figure includes a substrate holding portion 102 for holding a substrate 101, an XY stage 103 for moving the substrate holding portion 102 in two horizontal directions, and a rotation mechanism 104 for carrying the XY stage 103. In the inspection apparatus, a radiation generator is arranged on the upper side of the substrate holding portion 102, and a detector is arranged on the lower side of the rotation mechanism 104.

[0004] The rotating mechanism 104 rotates the XY table 103 in the vertical direction as the axis of rotation. Through holes penetrating in the vertical direction are formed in the substrate holding portion 102, the XY table 103, and the rotating mechanism 104, and the radiation emitted from the radiation generator passes through the through holes. The rotating mechanism 104 includes, for example, a table 105 to which the XY table 103 is fixed, a table holding member 106 that rotatably holds the table 105, and a driving mechanism that rotates the table 105.

[0005] A rolling bearing 107 having a large inner diameter is disposed between the table 105 and the table holding member 106. The outer ring of the rolling bearing 107 is fixed to the table holding member 106, and the inner ring of the rolling bearing 107 is fixed to the table 105. For example, a cylindrical outer ring fixing portion 106a is formed on the table holding member 106, and the outer ring of the rolling bearing 107 is pressed and fixed to the inner peripheral side of the outer ring fixing portion 106a. In this case, the outer ring of the rolling bearing 107 can be fixed to the table holding member 106 with high precision.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2019-60808 Summary of the invention

[0009] like Figure 5 As shown, when the outer ring of the rolling bearing 107 is press-fitted and fixed to the inner peripheral side of the outer ring fixing portion 106a, the outer ring of the rolling bearing 107 and the inner peripheral surface of the outer ring fixing portion 106a may be deformed accordingly. If the outer ring of the rolling bearing 107 is deformed, the rotation trajectory of the inner ring of the rolling bearing 107 and the worktable 105 rotating along the outer ring of the rolling bearing 107 may become a trajectory far from a perfect circle. That is, if the outer ring of the rolling bearing 107 is deformed, the rotation trajectory of the substrate 101 may become a trajectory far from a perfect circle. In addition, if the rotation trajectory of the substrate 101 becomes a trajectory far from a perfect circle, the accuracy of the reconstructed image reconstructed from the multiple images of the substrate 101 obtained by the detector may be reduced.

[0010] Therefore, the subject of the present invention is to provide a rotation mechanism for an X-ray inspection device used in an X-ray inspection device, which can make the rotation trajectory of a rotating object to be inspected close to a perfect circle. In addition, the subject of the present invention is to provide an X-ray inspection device having the rotation mechanism for an X-ray inspection device. Furthermore, the subject of the present invention is to provide an adjustment method for the rotation mechanism for an X-ray inspection device used in an X-ray inspection device, which can make the rotation trajectory of a rotating object to be inspected close to a perfect circle.

[0011] In order to solve the above-mentioned problems, a rotating mechanism for an X-ray inspection device of the present invention is used in an X-ray inspection device having an X-ray generator and an X-ray detector, the X-ray detector being arranged so as to sandwich an object to be inspected between the X-ray generator and the X-ray detector, and the rotating mechanism for an X-ray inspection device is characterized in that it comprises: a table; a table holding member rotatably holding the table; a rolling bearing having an annular inner ring and an annular outer ring, the inner ring being fixed to one of the table and the table holding member, and the outer ring being fixed to the other of the table and the table holding member; and a plurality of adjustment members of three or more for deforming the outer ring to adjust the shape of the outer ring; the plurality of adjustment members are arranged in the circumferential direction of the rolling bearing; the table or the table holding member to which the outer ring is fixed comprises an adjustment member holding portion, the adjustment member holding portion being movably holding the adjustment member and being arranged on the outer peripheral side of the outer ring; the adjustment member can move in the radial direction of the rolling bearing relative to the adjustment member holding portion and can contact the outer peripheral surface of the outer ring; and a gap for deforming the outer ring is formed between the outer peripheral surface of the outer ring and the adjustment member holding portion in the radial direction of the rolling bearing. In the present invention, the outer ring is fixed to, for example, a table holding member.

[0012] In the rotating mechanism for an X-ray inspection device of the present invention, three or more adjustment components for deforming the outer ring to adjust the shape of the outer ring are arranged along the circumferential direction of the rolling bearing. In addition, in the present invention, the adjustment component can move in the radial direction of the rolling bearing relative to the adjustment component holding part, and can contact the outer peripheral surface of the outer ring. Furthermore, in the present invention, a gap for deforming the outer ring is formed between the outer peripheral surface of the outer ring in the radial direction of the rolling bearing and the adjustment component holding part. Therefore, in the present invention, the outer ring can be fixed to the workbench or the workbench holding part in a state where the shape of the outer ring is adjusted using the adjustment component so that the rotation trajectory of the inspected object rotated by the rotating mechanism for the X-ray inspection device is close to a perfect circle. Therefore, in the present invention, the rotation trajectory of the inspected object rotated by the rotating mechanism for the X-ray inspection device can be close to a perfect circle.

[0013] In the present invention, the adjustment member is preferably an adjustment screw composed of a screw, and a threaded hole is formed on the adjustment member holding portion, and the threaded hole is engaged with the adjustment screw and penetrates in the radial direction of the rolling bearing. In the case of such a structure, the outer ring can be deformed according to the rotation amount of the adjustment screw. Therefore, the shape of the outer ring can be easily adjusted.

[0014] In the present invention, the rotating mechanism for the X-ray inspection device preferably includes a screw for preventing the adjusting screw from loosening, and the screw for preventing the adjusting screw from loosening is engaged with the threaded hole from the outside of the adjusting screw in the radial direction of the rolling bearing. In such a configuration, the adjusting screw can be prevented from loosening by engaging the screw for preventing the adjusting screw with the threaded hole engaged with the adjusting screw. Therefore, the adjusting screw can be prevented from loosening with a simple configuration.

[0015] In the present invention, the rolling bearing is, for example, a crossed roller bearing. In this case, the rotation accuracy of the object to be inspected that is rotated by the rotation mechanism for the X-ray inspection device can be improved. In addition, in the present invention, for example, the X-ray inspection device includes the above-mentioned rotation mechanism for the X-ray inspection device.

[0016] In addition, in order to solve the above-mentioned problems, the adjustment method of the rotating mechanism for an X-ray inspection device of the present invention is a method for adjusting the rotating mechanism for an X-ray inspection device used in an X-ray inspection device, the X-ray inspection device having an X-ray generator and an X-ray detector arranged in a manner to clamp an object to be inspected, the rotating mechanism for the X-ray inspection device comprising: a worktable; a worktable holding component that rotatably holds the worktable; and a rolling bearing having an annular inner ring and an annular outer ring, the inner ring being fixed to either the worktable or the worktable holding component, and the outer ring being fixed to either the other of the worktable and the worktable holding component; the adjustment method for the rotating mechanism for the X-ray inspection device is characterized in that the outer ring is fixed to the worktable or the worktable holding component in a state in which a plurality of adjustment components are brought into contact with the outer circumferential surface of the outer ring to adjust the shape of the outer ring, the plurality of adjustment components being used to deform the outer ring to adjust the shape of the outer ring and being arranged along the circumferential direction of the rolling bearing.

[0017] In the adjustment method of the rotating mechanism for an X-ray inspection device of the present invention, the outer ring is fixed to a table or a table holding component in a state where the shape of the outer ring is adjusted by bringing a plurality of adjustment components into contact with the outer peripheral surface of the outer ring, and the plurality of adjustment components are used to deform the outer ring to adjust the shape of the outer ring, and are arranged along the circumferential direction of the rolling bearing. Therefore, in the present invention, the outer ring can be fixed to a table or a table holding component in a state where the shape of the outer ring is adjusted using the adjustment components so that the rotation trajectory of the object to be inspected rotated by the rotating mechanism for the X-ray inspection device is close to a perfect circle. Therefore, if the adjustment method of the rotating mechanism for an X-ray inspection device of the present invention is used for adjustment, the rotation trajectory of the object to be inspected rotated by the rotating mechanism for the X-ray inspection device can be close to a perfect circle.

[0018] (Effects of the Invention)

[0019] As described above, in the rotating mechanism for the X-ray inspection apparatus of the present invention, the rotation trajectory of the rotating inspection object can be made close to a perfect circle. In addition, if the rotating mechanism for the X-ray inspection apparatus of the present invention is adjusted, the rotation trajectory of the rotating inspection object can be made close to a perfect circle. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a diagram for explaining a schematic configuration of an X-ray inspection apparatus according to an embodiment of the present invention.

[0021] Figure 2 Middle (A) is Figure 1 The worktable holding component shown is a top view, and (B) is an enlarged view of the E portion of (A).

[0022] Figure 3 It is used to illustrate Figure 1 An enlarged view of the structure of section F.

[0023] Figure 4 It is a diagram for explaining the structure of a table holding member and a rolling bearing according to another embodiment of the present invention.

[0024] Figure 5 It is a diagram for explaining the structure of a rotating mechanism for an inspection device according to the prior art.

[0025] (Explanation of symbols)

[0026] 1: X-ray inspection device

[0027] 2: Substrate (object to be inspected)

[0028] 3: X-ray generator

[0029] 4: X-ray detector

[0030] 7: Rotation mechanism (rotation mechanism for X-ray inspection equipment)

[0031] 10: Workbench

[0032] 11: Workbench holding parts

[0033] 11c: Screw holding portion (adjustment member holding portion)

[0034] 11d: threaded hole

[0035] 12: Bearings (rolling bearings)

[0036] 14: Inner circle

[0037] 15: Outer ring

[0038] 17: Adjustment screw (adjustment part)

[0039] 18: Anti-loosening screw

[0040] S: Clearance DETAILED DESCRIPTION

[0041] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0042] (Configuration of X-ray Inspection Device)

[0043] Figure 1 This is a diagram for explaining a schematic configuration of an X-ray inspection apparatus 1 according to an embodiment of the present invention.

[0044] The X-ray inspection device 1 of the present embodiment is a device for inspecting an object 2 to be inspected, such as an industrial product, in a non-destructive manner. The object to be inspected 2 of the present embodiment is a substrate (circuit substrate) such as a glass epoxy substrate formed in a flat plate shape. Therefore, the object to be inspected 2 is referred to as "substrate 2" hereinafter. Electronic components such as IC chips are mounted on the substrate 2. In the X-ray inspection device 1, the joint portion between the substrate 2 and the electronic components is inspected by so-called tilted CT. Therefore, in the inspection using the X-ray inspection device 1, high inspection accuracy, for example, in micrometer units is required.

[0045] The X-ray inspection apparatus 1 includes an X-ray generator 3 for irradiating X-rays to a substrate 2, an X-ray detector 4 that is arranged to sandwich the substrate 2 with the X-ray generator 3 and acquires an X-ray image of the substrate 2, a mounting table 5 for mounting the substrate 2, an XY table 6 on which the mounting table 5 is mounted, and a rotation mechanism (rotation mechanism for the X-ray inspection apparatus) 7 on which the XY table 6 is mounted. The substrate 2 is mounted on the mounting table 5 so that the thickness direction of the substrate 2 coincides with the up-and-down direction.

[0046] The X-ray generator 3 emits conical X-rays toward the substrate 2. The X-ray detector 4 is a two-dimensional X-ray detector (area sensor). The X-ray detector 4 is arranged in such a way that the light receiving surface of the X-ray detector 4 faces the X-ray generator 3 side, and a perspective image of the substrate 2 is reflected in the X-ray detector 4. The X-ray generator 3 and the X-ray detector 4 are arranged to clamp the substrate 2 in the up and down directions. A portion of the substrate 2 is clamped between the X-ray generator 3 and the X-ray detector 4. The mounting table 5 is detachably mounted on the upper end of the XY table 6. The XY table 6 is mounted on the upper end of the rotating mechanism 7 and is arranged on the upper side of the rotating mechanism 7. The X-ray generator 3 is arranged at a position higher than the substrate 2. The X-ray detector 4 is arranged at a position lower than the rotating mechanism 7.

[0047] The XY stage 6 includes: a first movable stage on which the mounting table 5 is mounted, a first stage driving mechanism for moving the first movable stage in the X direction perpendicular to the vertical direction, a second movable stage on which the first movable stage and the first stage driving mechanism are mounted, a second stage driving mechanism for moving the second movable stage in the Y direction perpendicular to the vertical direction and the X direction, and a fixed stage on which the second movable stage and the second stage driving mechanism are mounted. Through holes for passing the X-rays emitted from the X-ray generator 3 are formed on the mounting table 5, the first movable stage, the second movable stage, and the fixed stage.

[0048] The rotating mechanism 7 includes: a table 10 on which a fixed table of the XY table 6 is mounted, a table holding member 11 that rotatably holds the table 10, and a rolling bearing 12 disposed between the table 10 and the table holding member 11. The rotating mechanism 7 rotates the XY table 6 with the vertical direction as the rotation axis. That is, the rotating mechanism 7 rotates the substrate 2 mounted on the mounting table 5 with the vertical direction as the rotation axis. The specific configuration of the rotating mechanism 7 is as follows.

[0049] When the substrate 2 is inspected by the X-ray inspection device 1, the X-ray generator 3 irradiates X-rays to the substrate 2 that is rotated at a constant speed by the rotating mechanism 7. The X-ray detector 4 sequentially acquires a plurality of two-dimensional X-ray images that reflect the perspective image of the substrate 2. Specifically, each time the substrate 2 rotates a certain angle, the X-ray detector 4 continuously acquires X-ray images. For example, the plurality of X-ray images acquired by the X-ray detector 4 are taken into a PC (personal computer). The PC performs prescribed calculations based on the plurality of X-ray images to generate a CT image of the substrate 2. In addition, when the substrate 2 is inspected by the X-ray inspection device 1, the workbench 10 may be temporarily stopped at positions equally divided by 360°, and the X-ray detector 4 sequentially acquires two-dimensional X-ray images that reflect the perspective image of the substrate 2.

[0050] (Configuration of the rotating mechanism)

[0051] Figure 2 Middle (A) is Figure 1 The top view of the workbench holding component 11 shown, Figure 2 (B) is an enlarged view of part E of (A). Figure 3 It is used to illustrate Figure 1 An enlarged view of the structure of section F.

[0052] The rotating mechanism 7 includes a driving mechanism (not shown) for rotating the workbench 10 in addition to the workbench 10, the workbench holding member 11, and the rolling bearing 12. The driving mechanism includes, for example, a motor as a driving source and a power transmission mechanism for transmitting the power of the motor to the workbench 10. The motor is fixed to the workbench holding member 11. The power transmission mechanism includes, for example, a driving gear fixed to the output shaft of the motor and a circular annular large-diameter driven gear fixed to the workbench 10.

[0053] The rolling bearing 12 (hereinafter referred to as "bearing 12") is a cross roller bearing. The bearing 12 includes: an annular inner ring 14 fixed to the worktable 10, an annular outer ring 15 fixed to the worktable holding member 11, and a plurality of rollers 16 arranged between the inner ring 14 and the outer ring 15. The bearing 12 is a relatively large bearing, and the inner diameter of the inner ring 14 is, for example, 500 mm. The outer ring 15 is composed of two outer ring components divided in the vertical direction. The two outer ring components are fixed to each other by screws not shown in the figure. In addition, the outer ring 15 may not be divided into two outer ring components. That is, the outer ring 15 may also be composed of one component. In this case, the inner ring 14 may also be composed of two inner ring components divided in the vertical direction.

[0054] In addition, the rotating mechanism 7 includes three or more adjustment members 17, which are used to deform the outer ring 15 to adjust the shape of the outer ring 15 when assembling the rotating mechanism 7. The adjustment member 17 of the present embodiment is an adjustment screw composed of a screw. Therefore, the adjustment member 17 is hereinafter referred to as "adjustment screw 17". The rotating mechanism 7 of the present embodiment includes, for example, 12 adjustment screws 17. Furthermore, the rotating mechanism 7 includes anti-loosening screws 18 for preventing the adjustment screws 17 from loosening. The rotating mechanism 7 includes the same number of anti-loosening screws 18 as the adjustment screws 17. That is, the rotating mechanism 7 includes 12 anti-loosening screws 18.

[0055] The table 10 is arranged on the inner circumference side of the inner ring 14. The table 10 is composed of an annular first table component 19 and an annular second table component 20, the inner ring 14 is fixed to the first table component 19, the first table component 19 is fixed to the second table component 20, and the fixed table of the XY table 6 is fixed to the second table component 20. The X-rays emitted from the X-ray generator 3 pass through the inner circumference of the first table component 19 and the second table component 20 formed in an annular shape. The inner ring 14 is fixed to the first table component 19 by fixing screws (not shown). The first table component 19 is fixed to the second table component 20 by fixing screws (not shown). The fixed table of the XY table 6 is fixed to the second table component 20 by fixing screws (not shown).

[0056] The table holding member 11 is formed in an annular shape. The X-rays emitted from the X-ray generator 3 pass through the inner circumference of the table holding member 11 formed in an annular shape. A loading surface 11a on which the outer ring 15 is loaded is formed on the table holding member 11. The loading surface 11a is formed in an annular shape with the center of the table holding member 11 formed in an annular shape as the center of curvature. In addition, the loading surface 11a is a plane orthogonal to the up and down direction. The outer ring 15 loaded on the loading surface 11a is fixed to the table holding member 11 by a plurality of fixing screws 23 arranged in the circumferential direction of the bearing 12.

[0057] The outer ring 15 is fixed to the table holding member 11 by, for example, 12 fixing screws 23. The 12 fixing screws 23 are arranged at a certain pitch in the circumferential direction of the bearing 12. That is, the 12 fixing screws 23 are arranged at equal angular pitches (30° pitches) relative to the center of the table holding member 11. The table holding member 11 is provided with a threaded hole 11b for engaging with a male thread formed on the shaft of the fixing screw 23. The threaded hole 11b is recessed downward from the mounting surface 11a.

[0058] The outer ring 15 is provided with an insertion hole 15a through which the shaft of the fixing screw 23 is inserted. The insertion hole 15a is a circular hole that passes through the outer ring 15 in the up-down direction. In the present embodiment, the inner diameter of the insertion hole 15a is larger than the outer diameter of the shaft of the fixing screw 23 so that the outer ring 15 can be deformed by the adjustment screw 17. That is, the insertion hole 15a is a so-called loose hole. The shaft of the fixing screw 23 is inserted into the insertion hole 15a from the upper side of the outer ring 15, and the head of the fixing screw 23 is arranged on the upper side of the outer ring 15.

[0059] A screw retaining portion 11c serving as an adjustment component retaining portion is formed on the outer peripheral side of the loading surface 11a of the workbench retaining component 11, and the screw retaining portion 11c movably retains the adjustment screw 17. That is, the workbench retaining component 11 has a screw retaining portion 11c arranged on the outer peripheral side of the outer ring 15. The screw retaining portion 11c is formed in a cylindrical shape that protrudes more upward than the loading surface 11a. In addition, the screw retaining portion 11c is formed in a cylindrical shape with the center of the workbench retaining component 11 as the axis. In addition, the screw retaining portion 11c of the present embodiment is formed integrally with the main body of the workbench retaining component 11 on which the loading surface 11a is formed, but the screw retaining portion 11c formed separately from the main body of the workbench retaining component 11 may also be fixed to the main body of the workbench retaining component 11.

[0060] A threaded hole 11d for engaging the adjustment screw 17 is formed on the screw retaining portion 11c. In the present embodiment, 12 threaded holes 11d are formed on the screw retaining portion 11c. The threaded hole 11d penetrates the screw retaining portion 11c in the radial direction of the screw retaining portion 11c. That is, the threaded hole 11d penetrates the screw retaining portion 11c in the radial direction of the bearing 12. The 12 threaded holes 11d are arranged at a certain pitch in the circumferential direction of the bearing 12. That is, the 12 threaded holes 11d are arranged at equal angular pitches (30° pitches) relative to the center of the workbench retaining component 11. The threaded hole 11d is formed at a position slightly offset from the threaded hole 11b in the circumferential direction of the bearing 12, and is formed near the threaded hole 11b in the circumferential direction of the bearing 12.

[0061] like Figure 3 As shown, a gap S for deforming the outer ring 15 is formed between the outer ring 15 and the screw holding portion 11c in the radial direction of the bearing 12. That is, a gap S for deforming the outer ring 15 is formed between the outer peripheral surface of the outer ring 15 in the radial direction of the bearing 12 and the inner peripheral surface of the screw holding portion 11c. The gap S is formed in the entire circumferential direction of the bearing 12. For example, the gap S is a gap smaller than 1 mm.

[0062] For example, the adjustment screw 17 is a fixing screw with a hexagonal hole without a head. The adjustment screw 17 engages with the threaded hole 11d and is arranged on the outer peripheral side of the outer ring 15. Twelve adjustment screws 17 are arranged along the circumferential direction of the bearing 12. Specifically, the 12 adjustment screws 17 are arranged at a certain interval in the circumferential direction of the bearing 12, and are arranged at equal angular intervals (30° intervals) relative to the center of the workbench holding component 11. In addition, the adjustment screw 17 can move in the radial direction of the bearing 12 relative to the screw holding portion 11c. That is, the 12 adjustment screws 17 are radially arranged relative to the center of the workbench holding component 11. One end of the adjustment screw 17 can contact the outer peripheral surface of the outer ring 15.

[0063] The anti-loosening screw 18 is a fixing screw with a hexagonal hole similar to the adjusting screw 17. The anti-loosening screw 18 engages with the threaded hole 11d. Specifically, the anti-loosening screw 18 engages with the threaded hole 11d from the outside of the adjusting screw 17 in the radial direction of the bearing 12. The anti-loosening screw 18 contacts the other end of the adjusting screw 17 with a predetermined contact pressure, thereby preventing the adjusting screw 17 from loosening.

[0064] (Adjustment method of the rotating mechanism)

[0065] In the X-ray inspection device 1, in order to make the rotation trajectory of the substrate 2 rotated by the rotating mechanism 7 close to a perfect circle, when assembling the rotating mechanism 7, the outer ring 15 is fixed to the table holding member 11 in a state where the shape of the outer ring 15 is adjusted by making the adjustment screw 17 contact the outer peripheral surface of the outer ring 15. Specifically, first, the mounting table for mounting the cylindrical ruler is fixed to the upper surface of the second table member 20, and the cylindrical ruler is mounted on the mounting table. In this state, the table 10 is rotated, and the displacement of the outer peripheral surface of the cylindrical ruler is detected by a micrometer or the like, and the position of the cylindrical ruler mounted on the mounting table is adjusted based on the detection result of the displacement of the outer peripheral surface of the cylindrical ruler, so that the rotation center of the table 10 is roughly consistent with the axis of the cylindrical ruler. At this time, the adjustment screw 17 does not contact the outer peripheral surface of the outer ring 15. In addition, the anti-loosening screw 18 is removed.

[0066] Then, the displacement of the outer circumferential surface of the cylindrical ruler is detected while the table 10 is rotated, and the outer ring 15 is deformed to adjust the shape of the outer ring 15 according to the detection result of the displacement of the outer circumferential surface of the cylindrical ruler, so that the rotation trajectory of the cylindrical ruler is close to a perfect circle. Specifically, according to the detection result of the displacement of the outer circumferential surface of the cylindrical ruler, the fixing screw 23 closest to the portion to be deformed of the outer ring 15 is loosened, and the adjustment screw 17 closest to the fixing screw 23 is rotated to move the adjustment screw 17 toward the radial inner side of the bearing 12, and the adjustment screw 17 is pressed against the outer circumferential surface of the outer ring 15. Since a gap S is formed between the outer circumferential surface of the outer ring 15 and the inner circumferential surface of the screw holding portion 11c, the outer ring 15 is deformed according to the rotation amount of the adjustment screw 17.

[0067] Then, after tightening the loosened fixing screws 23, the displacement of the outer circumference of the cylindrical ruler is detected again while rotating the table 10. In addition, based on the detection result of the displacement of the outer circumference of the cylindrical ruler, the fixing screws 23 closest to the portion to be deformed of the outer ring 15 are loosened, and the adjusting screws 17 closest to the fixing screws 23 are turned to press the adjusting screws 17 against the outer circumference of the outer ring 15. Then, the loosened fixing screws 23 are tightened.

[0068] These operations are repeated to adjust the shape of the outer ring 15 so that the rotation trajectory of the cylindrical ruler is close to a perfect circle. When adjusting the shape of the outer ring 15, the adjustment screw 17 is sometimes rotated according to the detection result of the displacement of the outer peripheral surface of the cylindrical ruler so that the adjustment screw 17 in contact with the outer peripheral surface of the outer ring 15 moves toward the radial outside of the bearing 12. When the adjustment of the shape of the outer ring 15 is completed, the anti-loosening screw 18 is installed to prevent the adjustment screw 17 from loosening. In addition, when the adjustment of the shape of the outer ring 15 is completed, all the fixing screws 23 are firmly tightened, and the outer ring 15 is formally fixed to the table holding member 11 by the fixing screws 23.

[0069] When the shape of the outer ring 15 is adjusted so that the rotation trajectory of the cylindrical ruler is close to a perfect circle, the rotation trajectory of the substrate 2 rotated by the rotating mechanism 7 is also close to a perfect circle. In addition, when the shape adjustment of the outer ring 15 is completed, there may be adjustment screws 17 that are not in contact with the outer peripheral surface of the outer ring 15. In this case, before installing the anti-loosening screws 18, the adjustment screws 17 that are not in contact with the outer peripheral surface of the outer ring 15 are gently brought into contact with the outer peripheral surface of the outer ring 15.

[0070] (Main Effects of the Present Embodiment)

[0071] As described above, in the present embodiment, the 12 adjustment screws 17 are arranged along the circumferential direction of the bearing 12, and can contact the outer peripheral surface of the outer ring 15 from the outer peripheral side of the outer ring 15. In addition, in the present embodiment, a gap S for deforming the outer ring 15 is formed between the outer peripheral surface of the outer ring 15 and the inner peripheral surface of the screw holding portion 11c. Therefore, in the present embodiment, as described above, the outer ring 15 can be fixed to the table holding member 11 in a state where the shape of the outer ring 15 is adjusted using the adjustment screws 17 so that the rotation trajectory of the substrate 2 rotated by the rotating mechanism 7 is close to a perfect circle. Therefore, in the present embodiment, the rotation trajectory of the substrate 2 rotated by the rotating mechanism 7 can be close to a perfect circle.

[0072] In the present embodiment, the shape of the outer ring 15 is adjusted by the adjusting screw 17, and the outer ring 15 is deformed according to the rotation amount of the adjusting screw 17. Therefore, in the present embodiment, the shape of the outer ring 15 can be easily adjusted. In addition, in the present embodiment, the adjusting screw 17 is prevented from loosening by engaging the anti-loosening screw 18 with the threaded hole 11d engaged with the adjusting screw 17, so that the adjusting screw 17 can be prevented from loosening with a simple structure.

[0073] (Modification of table holding member and rolling bearing)

[0074] Figure 4 1 is a diagram for explaining the structure of a table holding member 11 and a bearing 12 according to another embodiment of the present invention. Figure 4 In the present invention, the same symbols are given to the same structures as those in the above-mentioned embodiment.

[0075] In the above embodiment, if Figure 4As shown, the worktable holding member 11 can also be composed of two parts: an annular first holding member 25 and an annular second holding member 26. In this modified example, a loading surface 11a is formed on the first holding member 25. On the outer peripheral side of the loading surface 11a, a cylindrical cylindrical portion 25a is formed that protrudes upward more than the loading surface 11a. The first holding member 25 and the second holding member 26 are fixed to each other by fixing screws 27. For example, the first holding member 25 and the second holding member 26 are fixed to each other by 12 fixing screws 27 arranged at a certain interval in the circumferential direction of the bearing 12.

[0076] In this modification, the outer ring 15 is fixed to the table holding member 11 by the fixing screws 28 that are in contact with the upper end surface of the outer ring 15. Specifically, the outer ring 15 is fixed to the table holding member 11 by pressing the outer ring 15 against the mounting surface 11a by the fixing screws 28. For example, the outer ring 15 is fixed to the table holding member 11 by 12 fixing screws 28 arranged at a certain pitch in the circumferential direction of the bearing 12. The fixing screws 28 are arranged at a position further inward than the fixing screws 27 in the radial direction of the bearing 12. In addition, the fixing screws 28 are arranged at the same position as the fixing screws 27 in the circumferential direction of the bearing 12, for example. In this modification, the insertion hole 15a is not formed in the outer ring 15, and the outer diameter of the outer ring 15 is smaller than the outer diameter of the outer ring 15 in the above-mentioned embodiment.

[0077] For example, the fixing screw 28 is a fixing screw with a hexagonal hole. A threaded hole 26a is formed on the second holding member 26 for engaging the fixing screw 28. In addition, a threaded hole 11d is formed on the second holding member 26 for engaging the adjustment screw 17 and the anti-loosening screw 18. The threaded hole 26a is formed near the threaded hole 11b in the circumferential direction of the bearing 12. The second holding member 26 is composed of a cylindrical cylindrical portion 26b formed with the threaded hole 11d and an annular annular portion 26c formed with the threaded hole 26a. The annular portion 26c protrudes from the upper end of the cylindrical portion 26b to the inner circumferential side of the cylindrical portion 26b. The lower end surface of the cylindrical portion 26b contacts the upper end surface of the cylindrical portion 25a.

[0078] In this modification, the cylindrical portion 25a and the cylindrical portion 26b constitute a screw holding portion 11c as an adjustment member holding portion, and the screw holding portion 11c movably holds the adjustment screw 17 and is arranged on the outer peripheral side of the outer ring 15. In this modification, a gap S for deforming the outer ring 15 is also formed between the outer ring 15 and the screw holding portion 11c in the radial direction of the bearing 12. That is, a gap S for deforming the outer ring 15 is formed between the outer peripheral surface of the outer ring 15 in the radial direction of the bearing 12 and the inner peripheral surface of the cylindrical portions 25a and 26b. The gap S is formed in the entire region of the circumferential direction of the bearing 12.

[0079] In this modification, when deforming the outer ring 15 to adjust the shape of the outer ring 15, the fixing screw 28 closest to the portion of the outer ring 15 to be deformed is loosened, and the adjustment screw 17 closest to the fixing screw 28 is turned to press the adjustment screw 17 against the outer peripheral surface of the outer ring 15. Then, the loosened fixing screw 28 is tightened. In this modification, the same effect as that of the above embodiment can be obtained.

[0080] (Other Embodiments)

[0081] In the above-mentioned embodiment, the anti-loosening screw 18 may also contact the outer peripheral surface of the adjusting screw 17 from a direction orthogonal to the axial direction of the adjusting screw 17, thereby preventing the adjusting screw 17 from loosening. In this case, in addition to the threaded hole 11d, a threaded hole for engaging the anti-loosening screw 18 is formed on the screw holding portion 11c. In addition, in this case, the adjusting screw 17 may also be a headed screw having a head. In addition, the rotating mechanism 7 may not have the anti-loosening screw 18. In this case, for example, the adjusting screw 17 may be prevented from loosening by injecting an adhesive into the threaded hole 11d after adjusting the shape of the outer ring 15.

[0082] In the above-mentioned embodiment, the number of the adjustment screws 17 of the rotating mechanism 7 may be more than 3 and less than 11, or more than 13. For example, the number of the adjustment screws 17 of the rotating mechanism 7 may be 24. In the case where the number of the adjustment screws 17 of the rotating mechanism 7 is small, the screw retaining portion 11c may not be formed into a cylindrical shape. For example, the screw retaining portion 11c may also be a curved plate in an arc shape having a threaded hole 11d. In this case, the plurality of screw retaining portions 11c are arranged at a certain interval in the circumferential direction of the bearing 12. In addition, in this case, the plurality of screw retaining portions 11c may be formed integrally with the main body of the workbench holding component 11 having the loading surface 11a, or the plurality of screw retaining portions 11c formed separately from the main body of the workbench holding component 11 may be fixed to the main body of the workbench holding component 11.

[0083] In the above embodiment, an insertion hole for inserting the shaft of the fixing screw 23 may be formed in the table holding member 11, and a threaded hole for engaging the male thread formed on the shaft of the fixing screw 23 may be formed in the outer ring 15. In addition, in the above embodiment, the inner ring 14 may be fixed to the table holding member 11, and the outer ring 15 may be fixed to the table 10. In this case, the table 10 includes a screw holding portion corresponding to the screw holding portion 11c, and the threaded hole 11d is formed in the screw holding portion.

[0084] In the above embodiment, the adjustment member 17 for deforming the outer ring 15 to adjust the shape of the outer ring 15 may be a rod-shaped or cylindrical member other than the adjustment screw. For example, the adjustment member 17 may be a rod of a hydraulic cylinder. In this case, the table holding member 11 includes a cylinder holding portion that fixes the main body of the hydraulic cylinder. The cylinder holding portion is an adjustment member holding portion that movably holds the rod of the hydraulic cylinder as the adjustment member 17.

[0085] In addition, in the above-mentioned embodiment, the adjustment member 17 may also be an eccentric cam. In this case, the worktable holding member 11 includes a cam holding portion as an adjustment member holding portion that rotatably holds the eccentric cam. The eccentric cam is movable in the radial direction of the bearing 12 relative to the cam holding portion. Specifically, when viewed from the top and bottom directions, the outer peripheral surface of the eccentric cam is movable in the radial direction of the bearing 12 relative to the cam holding portion.

[0086] In the above embodiment, as long as the shape of the outer ring 15 after shape adjustment can be maintained, the adjustment screw 17 may be removed after the shape of the outer ring 15 is adjusted. For example, as long as the shape of the outer ring 15 after shape adjustment can be maintained by injecting an adhesive into the gap S, the adhesive may be injected into the gap S in a state where the shape of the outer ring 15 is adjusted, and then the adjustment screw 17 may be removed from the threaded hole 11d. That is, the completed rotating mechanism 7 may not have the adjustment screw 17.

[0087] In the above embodiment, the bearing 12 may be a roller bearing (roller bearing) other than a cross roller bearing, or a ball bearing (ball bearing). In addition, in the above embodiment, the X-ray inspection device 1 may not include the XY table 6. In this case, the mounting table 5 is mounted on the rotating mechanism 7. Furthermore, in the above embodiment, the object to be inspected by the X-ray inspection device 1 may be an object other than the substrate 2.

Claims

1. A rotating mechanism for an X-ray inspection device, used in an X-ray inspection device having an X-ray generator and an X-ray detector, wherein the X-ray detector is arranged to sandwich an object to be inspected between the X-ray generator and the X-ray detector; The rotating mechanism for the X-ray inspection device is characterized by comprising: Workbench; A workbench holding component, rotatably holding the workbench; a rolling bearing having an annular inner ring and an annular outer ring, wherein the inner ring is fixed to one of the table and the table holding member, and the outer ring is fixed to the other of the table and the table holding member; and more than three adjustment components, used to deform the outer ring to adjust the shape of the outer ring; A plurality of the adjustment components are arranged along the circumferential direction of the rolling bearing; The table or the table holding member to which the outer ring is fixed has an adjustment member holding portion, the adjustment member holding portion movably holds the adjustment member and is arranged on the outer peripheral side of the outer ring; The adjustment member is movable in the radial direction of the rolling bearing relative to the adjustment member holding portion and is in contact with the outer peripheral surface of the outer ring; A gap for deforming the outer ring is formed between the outer peripheral surface of the outer ring in the radial direction of the rolling bearing and the adjustment member holding portion.

2. The rotation mechanism for an X-ray inspection device according to claim 1, wherein: The outer ring is fixed on the workbench holding component.

3. The rotation mechanism for an X-ray inspection device according to claim 1, wherein: The adjustment component is an adjustment screw composed of a screw; The adjustment member holding portion has a threaded hole formed therein, the threaded hole being engaged with the adjustment screw and penetrating in the radial direction of the rolling bearing.

4. The rotation mechanism for an X-ray inspection device according to claim 3, wherein: A locking screw is provided for preventing the adjusting screw from loosening; The anti-loosening screw engages with the threaded hole from the outer side of the adjusting screw in the radial direction of the rolling bearing.

5. The rotating mechanism for an X-ray inspection device according to any one of claims 1 to 4, characterized in that: The rolling bearing is a crossed roller bearing.

6. An X-ray inspection device, characterized in that: A rotating mechanism for an X-ray inspection apparatus according to any one of claims 1 to 4.

7. A method for adjusting a rotating mechanism for an X-ray inspection device, the rotating mechanism for an X-ray inspection device being used in an X-ray inspection device having an X-ray generator and an X-ray detector arranged in a manner to sandwich an object to be inspected; The rotating mechanism for the X-ray inspection device comprises: Workbench; a workbench holding member for rotatably holding the workbench; and A rolling bearing having an annular inner ring and an annular outer ring, wherein the inner ring is fixed to one of the table and the table holding member, and the outer ring is fixed to the other of the table and the table holding member; The method for adjusting a rotating mechanism for an X-ray inspection device is characterized in that: The outer ring is fixed to the workbench or the workbench holding component while a plurality of adjustment components are brought into contact with the outer peripheral surface of the outer ring to adjust the shape of the outer ring. The plurality of adjustment components are used to deform the outer ring to adjust the shape of the outer ring and are arranged along the circumferential direction of the rolling bearing.

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