A silicon rod squaring machine that can automatically dock with a portable fixture
By designing a silicon rod squaring machine that can automatically dock with the accompanying fixture, and using a ring-shaped diamond wire cutting head and automatic fixture, the problems of high cost and silicon material loss of existing equipment have been solved, and efficient and economical silicon rod cutting and automated production have been achieved.
Patent Information
- Application Number
- CN202210873093.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-07-21
- Publication Date
- 2025-09-09
- Estimated Expiration
- 2042-07-21
AI Technical Summary
The existing silicon rod squaring machines are fully functional, resulting in high production line investment costs and high energy consumption. In addition, when the squaring process is turned to the grinding process, a reference misalignment error occurs, which increases silicon material loss.
A silicon ingot squaring machine that can automatically dock with a traveling fixture is designed. The machine adopts a ring-shaped diamond wire cutting head, combined with a guide mechanism, a power docking mechanism and an automatic fixture to achieve square cutting of silicon ingots, simplify the machine tool structure and improve the degree of automation.
It reduces equipment costs, reduces energy consumption, avoids secondary clamping errors of silicon materials, and improves production efficiency and silicon material utilization.
Smart Images

Figure CN115351930B_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of silicon rod squaring and photovoltaic solar silicon wafer processing equipment, and relates to a silicon rod squaring machine which can be automatically docked with an accompanying fixture. Background Art
[0002] Existing silicon ingot squaring machines include single- and double-ingot squaring machines, which function essentially the same, including material loading and flipping, warp and centering, upper floating table clamping, wire cutting and squaring, lower edge peeling, and lubrication and cooling. These machines are general-purpose and fully functional, capable of completing silicon ingot squaring requirements on any standard machine tool. However, they are not suitable for mass production on automated production lines. Firstly, the comprehensive functionality of the equipment (each machine tool has the same function) leads to high production line investment costs. Secondly, the production line consumes a lot of energy during operation and requires a lot of maintenance. Most seriously, after squaring, the secondary clamping process for the grinding process can cause datum misalignment errors, resulting in significant silicon material loss and increased grinding workload. Summary of the Invention
[0003] To overcome the shortcomings of the existing technology, the present invention provides a silicon ingot squaring machine that can automatically dock with a portable fixture. The circular diamond wire cutting head of the squaring machine cuts round silicon ingots into squares. The machine features a simple structure, is cost-effective, and is quick and easy to maintain.
[0004] The above-mentioned object of the present invention is achieved through the following technical solutions: a silicon rod squaring machine that can automatically dock with a traveling fixture, comprising a squaring machine base, a column, a left cutting head body, a right cutting head body, a traveling fixture, and a power docking mechanism; the column is installed on the squaring machine base, and the left cutting head body and the right cutting head body are respectively connected to the column through a guide mechanism; a reducer and a servo motor A are connected to the top of each guide mechanism, and a cutting piece is installed on the left cutting head body and the right cutting head body, and the left cutting head body and the right cutting head body are respectively equipped with a cutting wheel drive motor; a skin removal bracket is installed on the upper half of the column, and the traveling fixture is installed in the upper middle part of the squaring machine base and is detachably connected; the power docking mechanism is connected to the column through a linear guide rail G and is located in the middle position of the upper part of the column; the squaring machine base is a U-shaped structure, and a water receiving tray is provided in the central depression.
[0005] The left cutting head body and the right cutting head body are arranged vertically to the plane of the column.
[0006] Each guide mechanism includes two linear guides A and a ball screw. The two linear guides A are installed on either side of one side of the column. A ball screw is installed between the two linear guides A. The ball screw is connected to the screw seat A installed on the top of the column. The upper part of the ball screw is connected to the reducer and servo motor A. The cutting head has the function of moving left and right. Each guide mechanism also includes a cross slide. The cross slide is installed on the linear guide A. The linear guide E and ball screw are installed on the cross slide. One end of the ball screw is connected to the screw seat B, which is installed on the cross slide. The other end of the screw seat B is connected to the servo motor C. The right cutting head body is installed on the linear guide E and connected to the ball screw nut. The connection structure of the left cutting head body is the same as that of the right cutting head body.
[0007] The cutting pieces are four cutting wheels in a rectangular shape; and an annular diamond wire is wound around the cutting wheels.
[0008] The edge skin removing bracket includes an X-axis beam, a Y-axis beam, and a Z-axis beam; the edge skin removing bracket is connected to both sides of the column; an X-axis beam is provided on the front end portion of the edge skin removing bracket, and linear guides C are respectively installed on the upper and lower parts of the front of the X-axis beam, a rack is installed in the middle area in front of the X-axis beam, and the Z-axis beam is connected to the X-axis beam through the linear guide C and the slider, and a servo motor B is provided adjacent to the Z-axis beam, and a gear is installed at the front end of the servo motor B to engage with the rack; the bottom of the Z-axis beam is connected to the Y-axis beam through the linear guide B and the slider, and a cylinder A is installed on the horizontal plane of the Y-axis beam, and the front end of the piston of cylinder A is connected to the Z-axis beam, and two clamping cylinders are installed on the upper and lower front ends of the Y-axis beam, and a vacuum suction cup is installed on each of the two clamping jaws of the clamping cylinder, and the edge skin of the single crystal silicon rod is placed at the front end of the vacuum suction cup.
[0009] The back of the traveling fixture is positioned and connected to the column in the middle through a precision locating pin. There are four corner cylinders on the inner side of the two guide mechanisms. When the traveling fixture is connected to the column, the four corner cylinders on both sides of the traveling fixture are locked. A docking workbench is provided on the base of the square opening machine. A coarse locating pin is provided on the docking workbench. The docking workbench is positioned and connected to the traveling fixture through locating holes and coarse locating pins. The docking workbench is connected to the base of the square opening machine through a linear guide D. An L-shaped push plate is provided under the linear guide D. The cylinder C is installed in the middle of the rear part of the base of the square opening machine. The front end of the piston rod of the cylinder C is connected to the L-shaped push plate.
[0010] A crossbeam is provided on the top of the column, and a cylinder bracket is provided on the crossbeam, and a clamping rod and a reinforcing plate are respectively provided on the two sides of the front end of the crossbeam; a cylinder B is provided on the cylinder bracket, and a floating joint is provided under the piston rod of cylinder B, and the bottom of the floating joint is connected to the clamping rod; when the accompanying clamp is positioned and locked on the column of the square cutting machine, the piston rod of cylinder B extends to drive the floating joint and the clamping rod to extend forward together, and hit the upper circular surface of the silicon rod clamped on the accompanying clamp, and then cylinder B is locked to maintain the clamping force.
[0011] The squarer is also equipped with a skin collecting box for collecting the skin after silicon ingot cutting. The two sides of the water collection tray are movably connected to the squarer base via guide rails and sliders. Two wedge-shaped positioning blocks are installed at each end of the concave surface of the squarer base for flexible connection with the AGV transporting the accompanying fixture.
[0012] Two iron blocks are provided at the front end of the water receiving tray, which are used to be connected to the electromagnet at the front end of the AGV (F4-1000C) trolley support fork.
[0013] Furthermore, cutting wheel drive motors are installed at the lower left corners of the right cutting head body and the left cutting head body respectively, which are used to drive the rotation of the cutting wheel and drive the annular diamond wire to move; heavy hammers are set on the right cutting head body and the left cutting head body respectively.
[0014] Furthermore, the weight is used to adjust the tension of the annular diamond wire.
[0015] The traveling fixture includes a traveling fixture base body, a fixed chuck base and a dynamic chuck base; a fixed chuck base is installed at one end of the traveling fixture base body, and a floating fixed chuck is inserted at the bottom front end of the fixed chuck base; the upper end of the floating fixed chuck is connected to a power docking gear disc A; a linear guide F and a T-shaped screw are installed on the traveling fixture base body, and the dynamic chuck base is movably connected to the traveling fixture base body through the linear guide F, the T-shaped screw and the slider; a floating dynamic chuck is installed on the top of the dynamic chuck base, and a rotary clamping cylinder is installed on the top side of the dynamic chuck base; the front end of the cylinder piston rod is connected to the connecting plate, and a bearing seat A is installed at one end of the traveling fixture base body, and a bearing A is installed inside the bearing seat A, and a clamping docking shaft is passed through the bearing A; the clamping docking shaft is connected to the T-shaped screw through a coupling A, and a pneumatic clamp is installed adjacent to the bearing A.
[0016] Furthermore, the fixed chuck base is fixedly connected to one side of the upper portion of the pallet clamp base. A power docking geared disc A, connected to the floating fixed chuck, forms a power connector, which extends through the front end of the fixed chuck base. The ends of the T-shaped lead screw are mounted on lead screw bases C and D, respectively, which are mounted on the pallet clamp base. A clamping docking shaft is connected to the pallet clamp base via a bearing base A, and is mounted on one side of the fixed chuck base. A locking nut A is mounted on the clamping docking shaft to lock bearing A. A pneumatic clamp is installed adjacent to bearing A to lock the T-shaped lead screw. A floating chuck is mounted on the top of the dynamic chuck base. Rotation of the T-shaped lead screw causes the dynamic chuck base to move and clamp the single crystal silicon ingot. A rotary clamping cylinder is used to clamp the edge of the single crystal silicon ingot during processing. A connecting plate is mounted on the bottom of the dynamic chuck base. Two pallet clamping rods are mounted on the connecting plate. A positioning plate is also provided on the portable clamp seat body, and a plurality of pin holes are provided on the positioning plate; and the positioning plate is arranged below the dynamic clamp seat.
[0017] Furthermore, the side of the portable fixture base is provided with positioning holes, and the number of positioning holes is not limited. Figure 5 Only one is shown for illustration purposes, and it connects to the precision positioning pins of the squarer. The portable clamp can automatically clamp various specifications of crystal ingots with diameters ranging from 200-310mm and lengths from 700-950mm.
[0018] The power docking mechanism includes a power docking support and a power docking gear disc B. A linear guide G is installed at the bottom of the power docking support. The power docking mechanism is connected to the column via the linear guide G and a slider. A small oil cylinder CXR-LA40X80 is installed on the power docking support. A bearing seat B is installed at the front end of the power docking support, which houses a bearing B. The power docking gear disc B is mounted on the bearing seat B via the bearing B. The power docking gear disc B is connected to the servo motor D via a coupling B, and the servo motor D is mounted on the power docking support. A gland is installed at one end of the bearing seat B, and the gland contacts the outer ring of the bearing B. A locking nut B is installed on the power docking gear disc B, and the locking nut B contacts the inner ring of the bearing B. The power docking support also has an unlocking pin. A positioning pin hole can also be provided on the adjacent surfaces of the accompanying fixture and the power docking support to enable a movable connection with the unlocking pin.
[0019] The accompanying fixture is moved by an AGV trolley. The AGV trolley is not limited to a specific model, as long as it can achieve its working function. The preferred model is AGV (F4-1000C). The AGV trolley can also be equipped with an accompanying bracket, which is installed on the cargo fork of the AGV trolley. Four universal bearings are installed at the bottom of the accompanying bracket where it contacts the cargo fork, and each universal bearing is respectively set in a limit seat. Two brackets are respectively provided on the four sides of the bottom of the accompanying bracket, and each bracket is provided with a compression spring to play a floating role within a small range; electric cylinders are respectively installed on both sides of the upper part of the accompanying bracket; each electric cylinder is equipped with a latch for locking; it serves to prevent the accompanying fixture from tipping over during transportation. Two wedge-shaped locating pins are provided at the bottom of the contact surface between the accompanying bracket and the square cutter; they are used to dock and position with the two wedge-shaped locating blocks of the square cutter. Coarse locating pins are installed on the contact surface between the accompanying bracket and the accompanying fixture to play a limiting role.
[0020] The square cutter also has a housing with a rolling door in front and a rolling window on the side. The machine is also equipped with an electrical control box containing a PLC system. The PLC system is connected to servo motor A, servo motor B, corner cylinder, cylinder A, cylinder B, cutting wheel drive motor, clamping cylinder, cylinder C, servo motor C, small cylinder, servo motor D, cylinder D, pneumatic clamp, rolling door, and rolling window. The above components are not limited to a specific model; they only need to achieve their specific working functions.
[0021] The square cutting machine provided by the present invention can also be a horizontal structure. The square cutting machine has two structures: vertical and horizontal. When the vertical docking mechanism faces the machine tool, the silicon rod is perpendicular to the ground and the cutting head is above; when the horizontal docking mechanism faces the machine tool, the silicon rod is horizontal to the ground and the cutting head is on the left or right side of the machine tool.
[0022] The beneficial effects of the present invention compared with the prior art are:
[0023] 1. The present invention is a silicon rod squaring machine in a flexible production and manufacturing system. It simplifies the common functions of standard machine tools and provides an efficient, economical, automatic and flexible silicon rod squaring machine.
[0024] 2. The machine tool's water tray prevents cutting fluid from overflowing during machining, which can interfere with the docking and removal of the accompanying fixture. This invention utilizes linkage technology between the water tray and the loading AGV (F4-1000C) to achieve perfect synchronization: the tray retracts when the AGV enters and extends out of the tray when the AGV leaves.
[0025] 3. The present invention can realize the automatic unloading function of the edge skin after the silicon material is cut. Two groups of suction cups are set to form the edge skin unloader, and each group of two sets completes the unloading of the left and right edge skins respectively.
[0026] 4. The squaring machine tool of the present invention is provided with a docking workbench and has no processing fixtures. The machine tool can dock with any set of accompanying fixtures through the docking workbench to achieve gapless and automatic docking. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] The present invention will be further described below with reference to the accompanying drawings and embodiments:
[0028] Figure 1 It is a three-dimensional diagram of a silicon rod squaring machine of the present invention that can automatically dock with an accompanying fixture.
[0029] Figure 2 It is a cross-sectional view of a silicon rod squaring machine of the present invention that can automatically dock with a traveling fixture.
[0030] Figure 3 Schematic diagram of the left-right movement of the cutting headband in the embodiment.
[0031] Figure 4 It is a three-dimensional diagram of the portable fixture.
[0032] Figure 5 It is a cross-sectional view of the portable fixture.
[0033] Figure 6 It is a three-dimensional diagram of the power docking mechanism.
[0034] Figure 7 It is a cross-sectional view of the power docking mechanism.
[0035] In the figure, 1. Power docking mechanism, 2. Traveling fixture, 3. Squarer base, 4. Linear guide rail A, 5. Column, 6. Edge skin removal bracket, 7. Floating joint, 8. Right cutting head, 9. Screw seat A, 10. Reducer, 11. Servo motor A, 12. Left cutting head, 13. Ring diamond wire, 14. Cutting wheel, 15. Heavy hammer, 16. Servo motor B, 17. Z-axis beam, 18. Linear guide rail B, 19. Cylinder A, 20. Edge skin box, 21. X-axis beam, 22. Cylinder B, 23. Clamping rod, 24. Reinforcement plate, 25. Water tray, 26. Angle cylinder, 27. Cutting wheel drive motor, 28. Rack, 29. Linear guide C, 30. Monocrystalline silicon rod edge skin, 31. Y-axis crossbeam, 32. Clamping cylinder, 33. Vacuum suction cup, 34. Linear guide D, 35. Coarse positioning pin, 36. Docking workbench, 37. Cylinder C, 38. Fine positioning pin, 39. Cylinder bracket, 40. Cross slide, 41. Linear guide E, 42. Ball screw, 43 Screw seat B, 44. Servo motor C, 45. Iron block, 46. Wedge-shaped positioning block, 47. Crossbeam, 101. Power docking gear plate B, 102. Unlocking pin, 103. Power docking support, 104. Linear guide G, 105. Small cylinder, 106. Servo motor D, 107. Bearing seat B, 108. Bearing B, 109. Gland, 110. Lock nut B, 111. Coupling B, 201. Travel fixture base, 202. Linear guide F, 203. T-shaped screw, 204. Moving chuck seat, 205. Floating moving chuck, 206. Clamping rod of accompanying fixture, 207. Connecting plate, 208. Cylinder D, 209. Monocrystalline silicon rod, 210. Floating fixed chuck, 211. Power docking gear plate A, 212. Fixed chuck seat, 213. Clamping docking shaft, 214. Pneumatic clamp, 215. Bearing A, 216. Bearing seat A, 217. Locking nut A, 218. Coupling A, 219. Screw seat C, 220. Positioning hole, 221. Screw seat D. DETAILED DESCRIPTION
[0036] The present invention is described in detail below through specific embodiments, but this does not limit the scope of protection of the present invention. The AGVs involved in the embodiments are not limited to any specific model, as long as they can achieve their functional functions. A visual robot is used to align, grasp, and move the silicon rods to the accompanying fixture; this visual robot is a robotic visual loading and unloading device, and is the structure disclosed in the applicant's patent CN216613042U. Any model not specifically specified in the embodiments is not limited to any specific model, as long as it can achieve its functional functions.
[0037] Example 1
[0038] A silicon rod squaring machine that can automatically dock with a traveling fixture includes a squaring machine base 3, a column 5, a left cutting head body 12, a right cutting head body 8, a traveling fixture 2, and a power docking mechanism 1; the column 5 is mounted on the squaring machine base 3, and the left cutting head body 12 and the right cutting head body 8 are respectively connected to the column 5 through a guide mechanism; a reducer 10 and a servo motor A11 are connected to the top of each guide mechanism, and a cutting piece is installed on the left cutting head body 12 and the right cutting head body 8, and a cutting wheel drive motor 27 is provided for the left cutting head body 12 and the right cutting head body 8 respectively; a skin removal bracket 6 is installed on the upper half of the column 5, and the traveling fixture 2 is mounted on the upper middle part of the squaring machine base 3 and is detachably connected; the power docking mechanism 1 is connected to the column 5 through a linear guide rail G104 and is located in the middle position of the upper part of the column 5; the squaring machine base 3 is a U-shaped structure, and a water receiving tray 25 is provided in the central recess.
[0039] The left cutting head body 12 and the right cutting head body 8 are arranged perpendicular to the plane of the column 5 .
[0040] Each guide mechanism includes two linear guides A4 and a ball screw. The two linear guides A4 are mounted on either side of one side of the column 5. A ball screw is installed between the two linear guides A4 and connected to the screw holder A9 mounted on the top of the column 5. The upper portion of the ball screw is connected to the reducer 10 and the servo motor A11. The cutting wheel 14 has the function of left and right movement. Each guide mechanism also includes a cross slide 40. The cross slide 40 is mounted on the linear guides A4. A linear guide E41 and a ball screw 42 are mounted on the cross slide 40. One end of the ball screw 42 is connected to the screw holder B43, which is mounted on the cross slide 40. The other end of the ball screw holder B43 is connected to the servo motor C44. The right cutting head body 8 is mounted on the linear guide E41 and connected to the nut of the ball screw 42. The connection structure of the left cutting head body 12 is the same as that of the right cutting head body 8.
[0041] The cutting members are four cutting wheels 14 arranged in a rectangular shape; and an annular diamond wire 13 is wound around the cutting wheels 14 .
[0042] The side skin bracket 6 includes an X-axis crossbeam 21, a Y-axis crossbeam 31, and a Z-axis crossbeam 17; the side skin bracket 6 is connected to both sides of the column 5; the front end of the side skin bracket 6 is provided with an X-axis crossbeam 21, and the upper and lower parts of the front of the X-axis crossbeam 21 are respectively installed with linear guide rails C 29, and the middle area in front of the X-axis crossbeam 21 is provided with a rack 28. The Z-axis crossbeam 17 is connected to the column 5 by the linear guide rail C 29 and the slider are connected to the X-axis beam 21, and a servo motor B16 is set adjacent to the Z-axis beam 17. The front end of the servo motor B16 is equipped with a gear and meshes with a rack; the bottom of the Z-axis beam 17 is connected to the Y-axis beam 31 through a linear guide B18 and a slider, and a cylinder A19 is installed on the horizontal plane of the Y-axis beam 31. The front end of the piston of the cylinder A19 is connected to the Z-axis beam 17. Two clamping cylinders 32 are installed on the upper and lower front ends of the Y-axis beam 31, and a vacuum suction cup 33 is installed on each of the two clamping claws of the clamping cylinder 32. The front end of the vacuum suction cup 33 is used to place the edge skin 30 of the single crystal silicon rod.
[0043] The back of the traveling fixture 2 is positioned and connected to the column 5 in the middle through the fine positioning pin 38. A total of four corner cylinders 26 are arranged on the inner side of the two guide mechanisms. When the traveling fixture 2 is connected to the column 5, the four corner cylinders 26 on both sides of the traveling fixture 2 are locked. A docking workbench 36 is provided on the square opening machine base 3. The docking workbench 36 is positioned and connected to the traveling fixture 2 through the positioning hole 220 and the coarse positioning pin 35. The docking workbench 36 is connected to the square opening machine base 3 through the linear guide D 34. An L-shaped push plate is arranged under the linear guide D34. The cylinder C 37 is installed in the middle of the rear part of the square opening machine base 3. The front end of the piston rod of the cylinder C 37 is connected to the L-shaped push plate.
[0044] A crossbeam 47 is provided on the top of the column 5, and a cylinder bracket 39 is provided on the crossbeam 47. A clamping rod 23 and a reinforcing plate 24 are respectively provided on the two side surfaces of the front end of the crossbeam 47; a cylinder B 22 is provided on the cylinder bracket 39, and a floating joint 7 is provided below the piston rod of the cylinder B 22, and the bottom of the floating joint 7 is connected to the clamping rod 23; when the accompanying clamp 2 is positioned and locked on the square cutting machine column 5, the piston rod of the cylinder B22 extends to drive the floating joint 7 and the clamping rod 23 to extend forward together, and press against the upper circular surface of the silicon rod clamped on the accompanying clamp 2, and then the cylinder B 22 is locked to maintain the clamping force.
[0045] The square cutting machine is also equipped with an edge collecting box 20 for collecting the edge skins of the silicon rods after cutting.
[0046] The front end of the water receiving tray 25 is provided with two iron blocks 45 for connecting to the electromagnet at the front end of the AGV (F4-1000C) trolley support fork.
[0047] Furthermore, a cutting wheel drive motor 27 is installed at the lower left corner of the right cutting head body 8 and the lower right corner of the left cutting head body 12, respectively, for driving the rotation of the cutting wheel 14 and driving the annular diamond wire 13 to move; a heavy hammer 15 is set on the right cutting head body 8 and the left cutting head body 12 respectively.
[0048] Furthermore, the weight 15 is used to adjust the tension of the annular diamond wire 13 .
[0049] The portable fixture 2 includes a portable fixture base 201, a fixed chuck base 212, and a dynamic chuck base 204; a fixed chuck base 212 is installed at one end of the portable fixture base 201, and a floating fixed chuck 210 is inserted at the bottom of the front end of the fixed chuck base 212; the upper end of the floating fixed chuck 210 is connected to a power docking gear disc A 211; a linear guide F 202 and a T-shaped lead screw 203 are installed on the portable fixture base 201, and the dynamic chuck base 204 is movably connected to the portable fixture base 201 through the linear guide F 202, the T-shaped lead screw 203 and the slider; a floating dynamic chuck 205 is installed on the top of the dynamic chuck base 204, and a rotary clamping cylinder D208 is installed on the top side of the dynamic chuck base 204; the cylinder D The front end of the piston rod 208 is connected to the connecting plate 207. A bearing seat A216 is installed at one end of the portable clamp base body 201. A bearing A 215 is installed inside the bearing seat A216. A clamping docking shaft 213 is passed through the bearing A 215. The clamping docking shaft 213 is connected to the T-shaped screw 203 through a coupling A218. A pneumatic clamp 214 is installed adjacent to the bearing A 215.
[0050] Furthermore, the fixed chuck seat 212 is fixedly connected to one side of the upper portion of the pallet clamp body 201. A power docking geared disc A 211, connected to the floating fixed chuck 210, forms a power connector, which extends through the front end of the fixed chuck seat 212. The ends of the T-shaped lead screw 203 are respectively mounted on lead screw seats C 219 and D 221, which are mounted on the pallet clamp body 201. A clamping docking shaft 213 is connected to the pallet clamp body 201 via a bearing seat A 216 and is located on one side of the fixed chuck seat 212. A locking nut A 217 is mounted on the clamping docking shaft 213 to lock the bearing A 215. A pneumatic clamp 214 is installed adjacent to the bearing A 215 to lock the T-shaped lead screw 203. A floating dynamic chuck 205 is mounted on the top of the dynamic chuck base 204. Rotation of the T-screw 203 moves the dynamic chuck base 204 and clamps the single crystal silicon ingot 209. A rotary clamping cylinder D 208 is used to clamp the edge of the single crystal silicon ingot 209 during processing. A connecting plate 207 is mounted on the bottom of the dynamic chuck base 204. Two pallet clamping rods 206 are mounted on this connecting plate. The pallet clamp base 201 also has a positioning plate with several pin holes. This positioning plate is located below the dynamic chuck base 204.
[0051] Furthermore, the side of the portable clamp body 201 is provided with positioning holes 220, and the number of the positioning holes 220 is not limited. Figure 5 Only one is shown for explanation, and is used to connect to the precision positioning pin 38 of the square cutting machine. The accompanying clamp 2 can automatically clamp various specifications of crystal rods with a diameter of 200-310 mm and a length of 700-950 mm.
[0052] The power docking mechanism 1 includes a power docking support 103 and a power docking gear disc B101. A linear guide G104 is provided at the bottom of the power docking support 103. The power docking mechanism 1 is connected to the column 5 through the linear guide G104 and the slider. A small oil cylinder 105 is provided on the power docking support 103; a bearing seat B107 is provided at the front end of the power docking support 103, and a bearing B108 is installed inside the bearing seat B107. The power docking gear disc B101 is installed on the bearing seat B107 through the bearing B108. The power docking gear disc B101 is connected to the servo motor D106 through a coupling B111. The servo motor D106 is installed on the power docking support 103; a pressure cover 109 is installed at one end of the bearing seat B107, and the pressure cover 109 is in contact with the outer ring of the bearing B108; a locking nut B110 is installed on the power docking gear disc B101, and the locking nut B111 is installed on the outer ring of the bearing B108. 110 contacts the inner ring of bearing B 108. The power docking support 103 is also provided with an unlocking pin 102, and a positioning pin hole can be further provided on the adjacent surface of the portable fixture 2 and the power docking support 103, which can be movably connected with the unlocking pin 102.
[0053] The working process of the silicon rod squaring machine that can automatically dock with the accompanying fixture is as follows: the AVG trolley carries the accompanying fixture 2 and the single crystal silicon rod 209 to the squaring machine, the front end of the AGV trolley docks with the water receiving tray 25, and continues to move into the squaring machine while driving the water receiving tray 25 forward. After entering a certain depth, the AVG trolley rises (exceeding the height of the coarse positioning pin) and continues to move forward. When the two wedge-shaped positioning pins on the accompanying bracket on the AVG trolley contact the two wedge-shaped positioning blocks 46 on the squaring machine, the accompanying bracket can be moved to the right position by the support bracket 206. The support bracket 207 is connected to the lifting fork 21 and the lifting fork 22. The traveling bracket and the traveling fixture 2 deflect. When the AGV trolley continues to move forward, the traveling bracket and the traveling fixture 2 deflect due to the restriction of the wedge-shaped positioning block 46, ensuring that the horizontal center of the traveling fixture 2 coincides with the center between the two wedge-shaped positioning blocks 46 on the square cutting machine. After docking and positioning, the electric cylinder on the traveling bracket on the AGV trolley is actuated to pull out the locking pin, and then the AGV trolley descends, and the traveling fixture 2 docks with the docking workbench 36, and is positioned by the coarse positioning pin 35. The AGV trolley continues to descend to its original position, and then exits the square cutting machine and pulls the water receiving tray 25 back to its original position; then the cylinder C 37 is actuated to pull the docking workbench 36 backward, and at the same time, the traveling fixture 2 is pulled closer to the column 5, and is positioned by the fine positioning pin 38, and the corner cylinder 26 is pressurized and locked; the cylinder B 22 is actuated, and the clamping rod 23 clamps the edge of the upper end of the single crystal silicon rod 209, and the cylinder D on the lower traveling fixture 2 is actuated. 208 moves, the clamping rod 23 clamps the edge skin of the lower end of the single crystal silicon rod 209, and at the same time the power docking mechanism 1 docks with the end face gear disk of the accompanying fixture 2, and the rolling shutter protective door is set at the front end of the concave cutting machine base 3. After the accompanying fixture 2 and the column 5 are installed and docked, when the processing is ready, the rolling shutter protective door is dropped and closed; the processing begins, the left cutting head body 12 and the right cutting head body 8 are processed from top to bottom, and when the processing is completed, the left cutting head body 12 and the right cutting head body 8 are raised to their original positions, the protective door is opened, and the vacuum suction cup 33 on the edge skin bracket 6 moves to the single crystal silicon rod 209, and the vacuum suction cup 33 absorbs the edge skin, the cylinder B 22 and the cylinder D 208 at the lower end of the accompanying fixture 2 move, open the clamping rod 23, the edge skin bracket 6 moves, the edge skin is taken out, and the protective door is closed, and then the servo motor D on the power docking mechanism 1 is turned on. 106 rotates 90°, and at the same time drives the accompanying fixture 2 to rotate, so that the single crystal silicon rod 209 also rotates 90° to process the edge skins on the other two sides. After processing, the left cutting head body 12 and the right cutting head body 8 are raised back to their original positions, and the edge skin bracket 6 is taken out. The servo motor D 106 of the power docking mechanism 1 rotates to restore the original position of the single crystal silicon rod 209, and then the power docking mechanism 1 is disengaged and restored to its original position; the corner cylinder 26 is released, and the cylinder C37 at the bottom pushes out the docking workbench 36 and the accompanying fixture 2. At the same time, the AVG trolley enters the square cutting machine, rises to dock with the accompanying fixture 2 and takes it out, and transports it to the next process, the square grinding machine. Then another AVG trolley enters with the accompanying fixture 2 to process the next single crystal rod.
[0054] The above-described embodiments are only preferred embodiments of the present invention, and are not intended to be all feasible embodiments of the present invention. Any obvious modifications made by a person skilled in the art without departing from the principles and spirit of the present invention should be considered to be included within the scope of protection of the claims of the present invention.
Claims
1. A silicon rod squaring machine that can automatically dock with a portable fixture, characterized by: The invention comprises a square machine base (3), a column (5), a left cutting head body (12), a right cutting head body (8), an accompanying clamp (2), and a power docking mechanism (1); the column (5) is mounted on the square machine base (3); the left cutting head body (12) and the right cutting head body (8) are connected to the column (5) through guide mechanisms; the top of each guide mechanism is connected to a reducer (10) and a servo motor A (11); a cutting piece is installed on each of the left cutting head body (12) and the right cutting head body (8). The left cutting head body (12) and the right cutting head body (8) are respectively equipped with a cutting wheel drive motor (27); a skin removal bracket (6) is installed on the upper half of the column (5); the accompanying clamp (2) is installed in the upper middle part of the squarer base (3) and is detachably connected; the power docking mechanism (1) is connected to the column (5) through a linear guide rail G (104) and is located in the middle position of the upper part of the column (5); the squarer base (3) is a U-shaped structure, and a water receiving tray (25) is provided in the central depression thereof; The cutting members are four cutting wheels (14) arranged in a rectangular shape; and the cutting wheels (14) are wound with an annular diamond wire (13); The side skin bracket (6) includes an X-axis crossbeam (21), a Y-axis crossbeam (31), and a Z-axis crossbeam (17); the side skin bracket (6) is connected to both sides of the column (5); an X-axis crossbeam (21) is provided on the front end of the side skin bracket (6), and linear guide rails C (29) are respectively installed on the upper and lower parts of the front of the X-axis crossbeam (21), and a rack (28) is installed in the middle area in front of the X-axis crossbeam (21). The Z-axis crossbeam (17) is connected to the X-axis crossbeam (21) through the linear guide rail C (29) and the slider, and a servo motor B (16) is provided adjacent to the Z-axis crossbeam (17). , the front end of the servo motor B (16) is equipped with a gear meshing with a rack; the bottom of the Z-axis beam (17) is connected to the Y-axis beam (31) through a linear guide B (18) and a slider, a cylinder A (19) is installed on the horizontal plane of the Y-axis beam (31), the front end of the piston of the cylinder A (19) is connected to the Z-axis beam (17), and two clamping cylinders (32) are installed on the front end of the Y-axis beam (31), and a vacuum suction cup (33) is installed on each of the two clamping claws of the clamping cylinder (32). The front end of the vacuum suction cup (33) is used to place the edge skin (30) of the single crystal silicon rod; The left cutting head body (12), the right cutting head body (8) and the plane of the column (5) are arranged vertically; Each guide mechanism includes two linear guide rails A (4) and a ball screw; the two linear guide rails A (4) are installed on both sides of one side of the column (5), and a ball screw is installed in the middle of the two linear guide rails A (4). The ball screw is connected to the screw seat A (9) set on the top of the column (5), and the upper part of the ball screw is connected to the reducer (10) and the servo motor A (11); the cutting wheel (14) has the function of moving left and right. Each guide mechanism also includes a cross slide (40); the cross slide (40) is installed on the linear guide rails A (4), a linear guide rail E (41) and a ball screw (42) are installed on the cross slide (40), one end of the ball screw (42) is connected to the screw seat B (43), the screw seat B (43) is set on the cross slide (40), and the other end of the screw seat B (43) is connected to the servo motor C (44). The right cutting head body (8) is installed on the linear guide rail E (41) and is connected to the nut of the ball screw (42). The connection structure of the left cutting head body (12) is the same as the connection structure of the right cutting head body (8); The back of the accompanying fixture (2) is positioned and connected to the column (5) through a fine positioning pin (38). Four corner oil cylinders (26) are arranged on the inner side of the two guide mechanisms. When the accompanying fixture (2) is connected to the column (5), the four corner oil cylinders (26) on both sides of the accompanying fixture (2) are locked. A docking workbench (36) is provided on the square opening machine base (3). The docking workbench (36) is positioned and connected to the accompanying fixture (2) through a positioning hole (220) and a coarse positioning pin (35). The docking workbench (36) is connected to the square opening machine base (3) through a linear guide D (34). An L-shaped push plate is arranged below the linear guide D (34). The cylinder C (37) is installed in the middle of the rear part of the square opening machine base (3). The front end of the piston rod of the cylinder C (37) is connected to the L-shaped push plate.
2. The silicon ingot squaring machine capable of automatically docking with a portable fixture according to claim 1, wherein: A crossbeam (47) is provided on the top of the column (5), a cylinder bracket (39) is provided on the crossbeam (47), and a clamping rod (23) and a reinforcing plate (24) are provided on two side surfaces of the front end of the crossbeam (47). A cylinder B (22) is provided on the cylinder bracket (39), a floating joint (7) is provided below the piston rod of the cylinder B (22), and the bottom of the floating joint (7) is connected to the clamping rod (23). The square cutting machine is also equipped with an edge connection box (20).
3. The silicon rod squaring machine capable of automatically docking with a portable fixture as claimed in claim 2, characterized in that: Right cutting head body (8) A cutting wheel drive motor (27) is installed at the lower left corner and the lower right corner of the left cutting head body (12), and a heavy hammer (15) is installed on the right cutting head body (8) and the left cutting head body (12).
4. The silicon rod squaring machine capable of automatically docking with a portable fixture as claimed in claim 3, characterized in that: The accompanying fixture (2) comprises an accompanying fixture base (201), a fixed chuck base (212), and a movable chuck base (204); a fixed chuck base (212) is installed at one end of the accompanying fixture base (201), and a floating fixed chuck (210) is inserted at the bottom of the front end of the fixed chuck base (212); the upper end of the floating fixed chuck (210) is connected to a power docking gear disc A (211); a linear guide F (202) and a T-shaped lead screw (203) are installed on the accompanying fixture base (201), and the movable chuck base (204) is movable with the accompanying fixture base (201) through the linear guide F (202) and the T-shaped lead screw (203) and the slider. Connection; a floating movable chuck (205) is installed on the top of the movable chuck seat (204), and a rotary clamping cylinder D (208) is installed on the side of the top of the movable chuck seat (204); the front end of the piston rod of the cylinder D (208) is connected to the connecting plate (207), and a bearing seat A (216) is installed at one end of the portable clamp seat body (201), and a bearing A (215) is installed inside the bearing seat A (216), and a clamping docking shaft (213) is passed through the bearing A (215); the clamping docking shaft (213) is connected to the T-shaped screw (203) through a coupling A (218), and a pneumatic clamp (214) is installed adjacent to the bearing A (215).
5. The silicon rod squaring machine capable of automatically docking with a portable fixture as claimed in claim 4, characterized in that: The power docking mechanism (1) includes a power docking support (103) and a power docking gear disc B (101). A linear guide rail G (104) is provided at the bottom of the power docking support (103). The power docking mechanism (1) is connected to the column (5) through the linear guide rail G (104) and the slider. A small oil cylinder (105) is provided on the power docking support (103). A bearing seat B (107) is provided at the front end of the power docking support (103). A bearing B (108) is installed inside the bearing seat B (107). The power docking gear disc B (101) is installed on the bearing seat B (107) through the bearing B (108). The power docking gear disc B (101) is installed on the bearing seat B (107) through the bearing The coupling B (111) is connected to the servo motor D (106), and the servo motor D (106) is installed on the power docking support (103); a pressure cover (109) is installed on one end of the bearing seat B (107), and the pressure cover (109) is in contact with the outer ring of the bearing B (108); a locking nut B (110) is installed on the power docking gear disc B (101), and the locking nut B (110) is in contact with the inner ring of the bearing B (108); an unlocking pin (102) is also provided on the power docking support (103), and a positioning pin hole can be provided on the adjacent surface of the accompanying clamp (2) and the power docking support (103), which can be movably connected with the unlocking pin (102).
6. The silicon rod squaring machine capable of automatically docking with a portable fixture as claimed in claim 5, characterized in that: A cutting wheel drive motor (27) is installed at the lower left corner of the right cutting head body (8) and the lower right corner of the left cutting head body (12), respectively, for driving the rotation of the cutting wheel (14) and simultaneously driving the annular diamond wire (13) to move; a weight (15) is provided on the right cutting head body (8) and the left cutting head body (12), respectively; the weight (15) is used to adjust the tension of the annular diamond wire (13).
Citation Information
Patent Citations
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