An optical path debugging device and a method for debugging an optical path of an excimer laser

Abstract

The application provides an optical path debugging device and a method for debugging an optical path of an excimer laser, and relates to the technical field of debugging the optical path of the excimer laser. The optical path debugging device comprises a body, a first mirror, a second mirror, a double-dial-plate autocollimator system and a self-focusing camera on the body; and a slit, a coupling mirror and the first mirror, the second mirror, the double-dial-plate autocollimator system and the self-focusing camera on the laser are sequentially arranged along an optical path. The self-focusing camera is connected with a display, and is used for capturing and displaying the imaging position of the slit and the coupling mirror. The optical path debugging device is simple in structure, convenient to use, and can quickly and accurately debug the optical path of the laser.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of excimer laser optical path debugging, in particular to an optical path debugging device and an excimer laser optical path debugging method. BACKGROUND

[0002] The excimer laser has a short laser wavelength and does not generate a thermal effect on materials, and therefore has a wide application in the industrial processing field. In particular, in the high-end photolithography field, the excimer laser with the characteristics of high repetition frequency, narrow linewidth and large energy has become an absolutely dominant light source in the current semiconductor photolithography field.

[0003] The excimer laser is generally composed of a discharge cavity, a resonant cavity and a pump source. In general, a linewidth narrowing module is used to obtain a narrow linewidth, and the discharge cavity provides a working substance to excite laser, and the pump source provides high voltage to obtain energy conversion. The collimation of the discharge cavity and the resonant cavity is the only way to obtain a narrow linewidth. The resonant cavity is composed of a linewidth narrowing module and a partial output coupling mirror. The linewidth narrowing module is composed of an expander prism group and a grating, which narrows the laser emitted by the discharge cavity, and then reflects it into the discharge cavity, and is output through the partial coupling mirror. The partial output coupling mirror can reflect part of the light into the discharge cavity and output part of the laser. In order to obtain a laser with a narrower linewidth, a slit needs to be added in the middle of the resonant cavity to obtain the best laser output. Generally, a slit is designed between the partial coupling mirror and the discharge cavity, and a slit is designed in front of the linewidth narrowing module, so that the two slits are on the same optical axis, then the partial coupling mirror is adjusted, the crosshairs are overlapped, the partial coupling mirror is collimated with the two slits, and finally the discharge cavity is placed in the collimated optical path, and the discharge cavity is adjusted to obtain a laser with high repetition frequency, narrow linewidth and large energy.

[0004] At present, the tuning method guided by the excimer laser manufacturer is to use a helium-neon laser for collimation tuning. This tuning method has a large error and poor precision, and a set of helium-neon lasers must be provided, and the helium-neon lasers must be fixed at the mirror end of the excimer laser, which occupies space and is not conducive to the operation of the excimer laser. SUMMARY

[0005] The present application aims to provide an optical path debugging device and an excimer laser optical path debugging method to solve at least one of the above technical problems in the prior art.

[0006] To solve the above technical problems, the present application provides an optical path debugging device, which comprises a body, a first mirror, a second mirror, a double-dial-plate autocollimator system and a self-focusing camera on the body.

[0007] The slit, the coupling mirror, the first mirror, the second mirror, the double reticle autocollimator system and the self-focusing camera are arranged along the optical path in sequence on the laser.

[0008] Further, the light source is arranged near the slit of the laser during the optical path debugging, and the light source is used for illuminating the slit to facilitate clear imaging of the slit on the self-focusing camera.

[0009] Preferably, the number of the light source is consistent with the number of the slit of the laser.

[0010] Further, the laser comprises the first slit and the second slit arranged on both sides of the discharge cavity, and the light source comprises the first light source for illuminating the first slit and the second light source for illuminating the second slit.

[0011] Further, the crosshair is arranged in front of the lens of the double reticle autocollimator system, and is used as a coordinate identification center position during imaging.

[0012] In addition, the self-focusing camera is provided with the focusing mirror, and the crosshair can be clearly displayed on the display screen of the display by adjusting the focusing mirror.

[0013] Further, the pitch angle and the left and right swing angle of the first mirror are adjustably arranged on the body, and are used for adjusting the imaging position of the slit on the self-focusing camera and the display.

[0014] And / or, the pitch angle and the left and right swing angle of the second mirror are adjustably arranged on the body, and are used for adjusting the imaging position of the slit on the self-focusing camera and the display.

[0015] Further, the laser comprises the first slit and the second slit arranged on both sides of the discharge cavity,

[0016] The first mirror is adjustably arranged on the body through the hinge assembly, and is used for adjusting the imaging position of the first slit on the self-focusing camera and the display.

[0017] The second mirror is adjustably arranged on the body through the hinge assembly, and is used for adjusting the imaging position of the second slit on the self-focusing camera and the display.

[0018] Further, the double reticle autocollimator system comprises a sleeve, a lens barrel and an adjusting knob; the lens barrel is arranged in the sleeve in a rotatable manner, and the adjusting knob is used to rotate the lens barrel to adjust the focal length so that the slits and the coupling mirror are clearly imaged respectively.

[0019] Preferably, the focal length adjustment range of the double reticle autocollimator system is 2-3 meters.

[0020] Further, a red light source is arranged between the second mirror and the double reticle autocollimator system, and is used to preliminarily adjust and calibrate the angles of the second mirror and the first mirror.

[0021] During adjustment, the angles of the second mirror and the first mirror are adjusted respectively, so that the light beams emitted by the red light source are reflected by the second mirror and the first mirror and then are shot at the center of the same slit or different slits on the laser, thereby preliminarily determining the angles of the second mirror and the first mirror during light path adjustment.

[0022] Further, the red light source is a helium-neon laser, a semiconductor laser or a laser serving as an indicating light source.

[0023] Further, the red light source can be arranged on the body in a manner that the red light source can be moved out of and into the light path between the second mirror and the double reticle autocollimator system.

[0024] During preliminary calibration of the second mirror and the first mirror, the red light source is moved into the light path between the second mirror and the double reticle autocollimator system, and the light beams of the red light source are used to irradiate the slits, thereby quickly coarsely adjusting the two mirrors; when the coarse adjustment is completed, the red light source is moved out of the light path between the second mirror and the double reticle autocollimator system, so as to facilitate subsequent laser light path adjustment.

[0025] Further, the body is a box body (or a case body), and the first mirror, the second mirror, the double reticle autocollimator system, the self-focusing camera and the red light source are arranged in the box body; a side plate of the box body is provided with a window (or a perspective window) for light path in and out.

[0026] Further, the red light source is arranged in the box body in a horizontally slidable manner.

[0027] A push rod is further arranged, one end of the push rod is connected with the red light source in the box body, and the other end of the push rod is arranged outside the box body, and the push rod is used to move the red light source out of and into the light path between the second mirror and the double reticle autocollimator system.

[0028] Preferably, the adjustment knob of the dual-vernier autocollimator system extends through the through hole on the box body; thus facilitating manual adjustment of the focal length of the dual-vernier autocollimator system outside the box body.

[0029] The collimation system of the application has simple structure, is convenient to use, and can quickly and accurately debug the optical path of the laser.

[0030] In addition, the application further discloses a method for debugging the optical path of an excimer laser based on the optical path debugging device, which comprises the following steps:

[0031] S10. Moving away the discharge cavity of the laser, and avoiding the optical path between the first slit and the second slit of the laser;

[0032] S20. Adjusting the first mirror and the second mirror, so that the first slit, the second slit, the first mirror, the second mirror, the dual-vernier autocollimator system and the self-focusing camera are on the same optical path;

[0033] S30. Adjusting the focusing mirror on the self-focusing camera, so that the image of the cross indicating line of the autocollimator system is clearly presented on the display screen of the display;

[0034] S40. Adjusting the focal length of the dual-vernier autocollimator system, so that the image of the second slit is clearly presented on the display, the image of the cross center line of the second slit is clearly visible, the pitch angle and / or the left-right swing angle of the second mirror are adjusted, so that the image of the cross center line of the second slit coincides with the image of the cross indicating line of the autocollimator system;

[0035] S50. Adjusting the focal length of the dual-vernier autocollimator system, so that the image of the first slit is clearly presented on the display, the image of the cross center line of the first slit is clearly visible, the pitch angle and / or the left-right swing angle of the first mirror are adjusted, so that the image of the cross center line of the first slit coincides with the image of the cross indicating line of the autocollimator system;

[0036] S60. Repeating steps 40 and 50 until the images of the cross center lines of the first slit and the second slit and the cross indicating line of the autocollimator system coincide;

[0037] S70. Adjusting the focal length of the dual-vernier autocollimator system, and adjusting the left-right swing angle and / or the pitch angle of the laser coupling mirror, until the image of the concentric circle ring of the dual-vernier autocollimator system appears on the display screen;

[0038] S80. Adjusting the left-right swing angle and / or the pitch angle of the laser coupling mirror, so that the center of the image of the concentric circle ring on the display screen moves to coincide with the center of the image of the cross indicating line;

[0039] S90. Move the discharge cavity between the first slit and the second slit, adjust the discharge cavity, and observe the position of the discharge cavity on the display screen until the center of the crosshair image approximately coincides with the center position between the upper electrode image and the lower electrode image on the discharge cavity.

[0040] Thus, the laser coupling output mirror, the slit, the discharge cavity and the linewidth narrowing module are in one collimated light path, and consistency and repeatability of the debugging light path are achieved.

[0041] Further, in steps S40 to S80, further comprising:

[0042] S41. Disposing the light supplement source near the first slit and the second slit for illuminating the first slit and the second slit to make them clearly imaged; after step 80 is completed, moving away the light supplement source to facilitate the placement of the discharge cavity.

[0043] Further, in step S20 specifically comprising:

[0044] S21. Moving the red light source between the second mirror and the double reticle autocollimator system; the red light emitted by the red light source is reflected by the second mirror and the first mirror, passes through the coupling mirror and the second slit, and reaches the first slit;

[0045] S22. Adjusting the pitch or left-right angle of the first mirror until the red light spot irradiates the center position of the first slit;

[0046] S23. Adjusting the pitch or left-right angle of the second mirror until the red light spot irradiates the center position of the second slit;

[0047] S24. Repeating steps S22 and S23 until the red light spot irradiates the center positions of the first slit and the second slit at the same time;

[0048] S25. Turning off and moving away the red light source.

[0049] The method disclosed in the present application has the advantages of simple operation, fast and accurate debugging of the light path of the laser, and high debugging precision of the light path of the corrected laser. BRIEF DESCRIPTION OF DRAWINGS

[0050] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the following specific embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0051] Figure 1 The schematic diagram of the light path debugging device provided for Embodiment 1 of the present application;

[0052] Figure 2 The working principle diagram when the left end of the discharge cavity is adjusted in the embodiment 2 of the application;

[0053] Figure 3 The working principle diagram when the right end of the discharge cavity is adjusted in the embodiment 2 of the application.

[0054] Reference signs:

[0055] 1-body; 2-double scale plate autocollimator system; 3-display; 7-first mirror; 8-second mirror; 9-red light source; 10-mounting seat; 11-push rod; 16-adjusting knob; 18-self-focusing camera; 19-mounting platform; 21-coupling mirror; 22-second slit; 23-second light supplementing light source; 24-first light supplementing light source; 25-brightness adjusting switch; 26-first slit; 27-line width narrowing module; 28-discharge cavity; 29-upper electrode; 30-lower electrode. DETAILED DESCRIPTION

[0056] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0057] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "transverse", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0058] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0059] The present application will be further explained and described below in conjunction with specific embodiments.

[0060] Example 1

[0061] like Figure 1 As shown, this embodiment provides an optical path debugging device, including: a main body 1; and a first reflecting mirror 7, a second reflecting mirror 8, a double-reticle autocollimating telescope system 2, and a self-focusing camera 18 disposed on the main body 1. Specifically, the double-reticle autocollimating telescope system 2 and the self-focusing camera 18 are fixedly disposed on a mounting platform 19 inside the main body 1. The self-focusing camera 18 is connected to a display 3 via a signal line.

[0062] The excimer laser includes a slit and a coupling mirror 21. The slit generally includes a first slit 26 and a second slit 22 respectively disposed on both sides of the discharge cavity 28. The first slit 26 is attached to the linewidth narrowing module 27.

[0063] The first slit 26, the second slit 22, the coupling mirror 21, the first reflector 7, the second reflector 8, the double-reticle autocollimating telescope system 2, and the autofocusing camera 18 are arranged sequentially along the optical path on the laser. The first slit 26 and the second slit 22 are marked with crosshairs. The autofocusing camera 18 is connected to the display 3 and is used to capture and display the imaging positions of the slits and the coupling mirror 21.

[0064] More preferably, a supplementary light source is set near the slit of the laser to illuminate the slit during optical path adjustment so that the slit can be clearly imaged on the self-focusing camera 18.

[0065] In this embodiment, the number of supplementary light sources is the same as the number of slits in the laser. The supplementary light sources include a first supplementary light source 24 for illuminating the first slit 26 and a second supplementary light source 23 for illuminating the second slit 22. The first supplementary light source 24 and the second supplementary light source 23 are disposed between the two slits and are connected to a power supply via a brightness adjustment switch 25.

[0066] The dual-reticle autocollimating telescope system 2 contains two reticles: one with crosshairs and the other with concentric rings. The crosshairs serve as coordinate markers for the reference center during imaging, while the concentric rings project the image formed by the projection coupling mirror 21. The autofocusing camera 18 is equipped with a focusing lens. By adjusting the focusing lens, the image of the crosshairs from the dual-reticle autocollimating telescope system 2 can be clearly displayed on the screen of the display 3, and the image formed by the concentric ring projection coupling mirror 21 can also be clearly displayed on the display 3.

[0067] In order to make the first mirror 7, the second mirror 8, the double reticle autocollimator system 2, the self-focusing camera 18 and the first slit 26, the second slit 22 and the coupling mirror 21 in the same optical path, the reflection angles of the first mirror 7 and the second mirror 8 need to be adjusted. For this purpose, the pitch angles and the left-right swing angles of the first mirror 7 and the second mirror 8 are adjustably arranged on the body 1, which is used to adjust the imaging positions of the slits on the self-focusing camera 18 and the display 3.

[0068] In the embodiment, the body 1 is a box body (or a case body), and the first mirror 7, the second mirror 8, the double reticle autocollimator system 2 and the self-focusing camera 18 are arranged in the box body. The box body is composed of four side plates, a bottom plate and an upper cover plate. The box body is provided with a window or a perspective window for the entry and exit of light on the side plate at the side of the laser.

[0069] The side plate close to the first mirror 7 and the second mirror 8 is preferably provided with a through hole for the extension of a wrench or the like into the box body to adjust the reflection angles of the first mirror 7 and the second mirror 8. In addition, the upper cover plate can be made of an acrylic plate with a thickness of about 1-2 mm, which can reduce the weight and can also observe the internal structure of the box.

[0070] More preferably, the first mirror 7 and the second mirror 8 can also be arranged on the body 1 through a hinge assembly such as a spherical hinge joint. The spherical hinge joint is provided with an adjusting rod which extends out of the box body. The reflection angle of the first mirror 7 can be adjusted by wrenching the adjusting rod, and then the imaging positions of the first slit 26 and the second slit 22 on the self-focusing camera 18 and the display 3 are adjusted.

[0071] The double reticle autocollimator system 2 further comprises an adjusting knob 16 which is used to adjust the focal length so that the slits and the coupling mirror 21 are clearly imaged. The focal length adjustment range of the double reticle autocollimator system 2 is preferably 2-3 meters. Preferably, the adjusting knob 16 of the double reticle autocollimator system 2 extends out through the through hole on the bottom plate of the body; so as to facilitate the manual adjustment of the focal length of the double reticle autocollimator system 2 outside the body.

[0072] The embodiment can further comprise a red light source 9 which is arranged between the second mirror 8 and the double reticle autocollimator system 2; which is used to preliminarily and quickly adjust and calibrate the angles of the second mirror 8 and the first mirror 7.

[0073] When adjusting, the light beam emitted by the red light source 9 is made to irradiate the center of the first slit 26 on the laser after being reflected by the second mirror 8 and the first mirror 7 by adjusting the pitch or left-right angle of the first mirror 7, and the light beam emitted by the red light source 9 is made to irradiate the center of the second slit 22 on the laser after being reflected by the second mirror 8 and the first mirror 7 by adjusting the pitch or left-right angle of the second mirror 8, so that the angles of the second mirror 8 and the first mirror 7 during the light path adjustment are quickly and preliminarily determined.

[0074] The red light source 9 can be a helium-neon laser, a semiconductor laser, or a laser serving as an indicating light source.

[0075] The red light source 9 can be arranged on the body 1 outside the light path between the second mirror 8 and the dual-vernier self-collimating telescope system 2. When preliminarily calibrating the second mirror 8 and the first mirror 7, the red light source 9 is arranged in the light path between the second mirror 8 and the dual-vernier self-collimating telescope system 2, and the light beam of the red light source 9 is used to irradiate the slit, so that the two mirrors can be quickly and coarsely adjusted. After the coarse adjustment is completed, the red light source 9 is removed from the light path between the second mirror 8 and the dual-vernier self-collimating telescope system 2, so as to facilitate the subsequent laser light path adjustment.

[0076] The red light source 9 is preferably slidably arranged in the body 1 through the mounting seat 10. A slide is arranged in the body 1, and the mounting seat 10 can slide horizontally along the slide. In addition, a push rod 11 is arranged, one end of the push rod 11 is connected with the mounting seat 10 and extends into the body 1, and the other end extends out through a through hole on the bottom plate or the side plate of the body. The red light source 9 can be removed from and arranged in the light path between the second mirror 8 and the dual-vernier self-collimating telescope system 2 by pushing and pulling the push rod 11.

[0077] The light path adjustment device has the advantages of simple structure, convenient use, and quick and accurate adjustment of the light path of the laser.

[0078] Embodiment 2

[0079] The embodiment discloses a method for adjusting the light path of an excimer laser based on the light path adjustment device in embodiment 1, and the specific steps are as follows:

[0080] S10. Refer to Figure 1 Fig. 1, the laser discharge cavity 28 is removed, and the light path between the first slit 26 and the second slit 22 of the laser is avoided;

[0081] S20. Adjust the first mirror 7 and the second mirror 8, so that the first slit 26, the second slit 22, the first mirror 7, the second mirror 8, the dual-vernier self-collimating telescope system 2 and the self-focusing camera 18 are on the same light path; the adjusting step specifically includes:

[0082] S21. Move the red light source 9 between the second reflector 8 and the double reticle autocollimating telescope system 2; the red light emitted from the red light source 9 is reflected by the second reflector 8 and the first reflector 7, passes through the coupling mirror 21 and the second slit 22 and reaches the first slit 26.

[0083] S22. Adjust the pitch or lateral angle of the first reflecting mirror 7 until the red light spot illuminates the center of the first slit 26;

[0084] S23. Adjust the pitch or lateral angle of the second reflector 8 until the red light spot illuminates the center of the second slit 22;

[0085] S24. Repeat steps S22 and S23 until the red light spot simultaneously illuminates the center positions of the first slit 26 and the second slit 22.

[0086] S25. Turn off and remove the red light source 9.

[0087] S30. Focus the autofocusing camera 18 so that the image of the crosshair of the autocollimating telescope system 2 is clearly displayed on the screen of the display 3.

[0088] S40. Reference Figure 1 As shown, the first supplementary light source 24 is placed at the center of the first slit 26, and the second supplementary light source 23 is placed at the center of the second slit 22;

[0089] Turn on the second supplementary light source 23, adjust the focal length of the double reticle autocollimating telescope system 2 so that the image of the second slit 22 is clearly displayed on the display 3 and the image of the crosshair center line of the second slit 22 is clearly visible. Adjust the pitch angle and / or yaw angle of the second reflector 8 so that the image of the crosshair center line of the second slit 22 coincides with the image of the crosshair indicator line inside the double reticle autocollimating telescope system.

[0090] S50. Turn off the second supplementary light source 23, turn on the first supplementary light source 24, adjust the focal length of the double reticle autocollimating telescope system 2 so that the image of the first slit 26 is clearly displayed on the display 3 and the image of the crosshair center line of the first slit 26 is clearly visible. Adjust the pitch angle and / or left and right tilt angle of the first reflector 7 so that the image of the crosshair center line of the first slit 26 coincides with the image of the crosshair indicator line of the autocollimating telescope system 2.

[0091] S60. Repeat steps 40 and 50 until the image of the cross center line of the first slit 26, the image of the cross center line of the second slit 22, and the image of the cross indicator line of the autocollimating telescope system 2 are superimposed; then turn off the first supplementary light source 24.

[0092] S70. Continue to adjust the focal length of the double reticle autocollimator system 2 until a concentric circle ring appears on the display screen 3 (the concentric circle ring is the image formed by the reflection of the light source of the double reticle autocollimator system 2 by the coupling mirror 21 and the projection of the light after passing through the double reticle autocollimator system 2);

[0093] S80. Adjust the left and right swing angle and / or the pitch angle of the laser coupling mirror 21 so that the image of the concentric circle ring on the display screen moves to the center of the image of the crosshair line; as shown in the dashed concentric circle ring in Figure 1 moves to the position of the solid concentric circle ring.

[0094] S90. Refer to Figure 3 , move the discharge cavity 28 to the position between the first slit 26 and the second slit 22, so that the discharge cavity 28 is located between the first light supplement source 24 and the second light supplement source 23 on both sides, and the gap between the two slits.

[0095] S100. Turn on the first light supplement source 24 and the second light supplement source 23 to illuminate the inside of the discharge cavity;

[0096] The light outlet of the discharge cavity can also serve as the observation port for the front and rear positions of the upper and lower electrodes inside the discharge cavity.

[0097] S110. After turning on the left light supplement source of the discharge cavity, adjust the focal length of the double reticle autocollimator system, and observe the left end position of the upper and lower electrodes of the discharge cavity on the display screen through the telescope focusing on the left end position of the upper and lower electrodes of the discharge cavity.

[0098] The upper and lower electrodes of the discharge cavity are installed at the center position in the left-right direction of the discharge cavity, so whether the left-right position of the discharge cavity is adjusted or not is related to the position of the upper and lower electrodes. Observing the electrode position of the discharge cavity is also achieved by adjusting the method of aligning the cross center line of the slit in the optical path. Generally, the discharge cavity is installed on parallel guide rails, and the left and right limit rods and the adjusting device for adjusting the transverse position of the discharge cavity are installed on the parallel guide rails.

[0099] As shown in the following Figure 2 , the left end of the discharge cavity appears on the display: the dashed line is the left end window of the discharge cavity, the solid square is the slit 19, and the solid triangle is the upper and lower electrodes.

[0100] S120. When the telescope is focused on the left end electrode position of the discharge cavity, if the image of the upper and lower electrodes on the display screen is found to be left or right of the image center of the crosshair line, the left end adjusting knob of the discharge cavity needs to be adjusted so that the image center position of the upper and lower electrodes of the left end of the discharge cavity is roughly coincided with the image center of the crosshair line. If the brightness presented on the display is low, the image of the upper and lower electrodes of the discharge cavity presented on the display can be made clearer by adjusting the light supplement source.

[0101] Turning off the left second light supplement source 23 and turning on the right first light supplement source 24, the right end of the discharge cavity is shown as follows: Figure 3

[0102] S130. Continue to adjust the telescope, when the image of the upper and lower electrodes at the right end of the discharge cavity is found to be deviated left or right from the image center of the cross line on the display screen when the telescope is focused on the position of the electrode at the right end of the discharge cavity, adjust the adjusting knob at the right end of the discharge cavity to make the image center of the upper and lower electrodes at the right end of the discharge cavity substantially coincide with the image center of the cross line. If the brightness presented on the display is low, the electrodes of the discharge cavity presented on the display can be made more clear by adjusting the light supplement source.

[0103] S140. Repeat S120 and S130 to make the image centers of the upper and lower electrodes at the left and right ends of the discharge cavity substantially coincide with the center of the image of the cross line. Here, only the positions in the left and right directions of the discharge cavity are adjusted, and the positions in the up and down directions are not adjusted.

[0104] In this way, it is ensured that the slit and the optical path of the discharge cavity are on one optical axis.

[0105] Therefore, the laser coupling output mirror, the slit, the discharge cavity 28 and the linewidth narrowing module are in one collimated optical path, and the consistency and repeatability of the optical path are achieved.

[0106] The method disclosed in the application is simple to operate, can quickly and accurately debug the optical path of the laser, and has high debugging precision of the optical path of the corrected laser.

[0107] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the application, and not to limit them; although the application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the application.​

Claims

1. An excimer laser optical path adjustment method based on an optical path adjustment device, characterized by, The light path debugging device comprises a body (1), a first mirror (7), a second mirror (8), a double-dial self-collimating telescope system (2) and a self-focusing camera (18) arranged on the body (1); The slit, the coupling mirror (21) and the first mirror (7), the second mirror (8), the double-dial self-collimating telescope system (2) and the self-focusing camera (18) are sequentially arranged along the light path on the laser; the self-focusing camera (18) is connected with a display (3) and is used for capturing and displaying the imaging positions of the slit and the coupling mirror (21); The laser comprises a first slit (26) and a second slit (22) arranged on both sides of a discharge cavity (28); The debugging method comprises the following steps: S10. Moving away the discharge cavity (28) of the laser to avoid the light path between the first slit (26) and the second slit (22) of the laser; S20. Adjusting the first mirror (7) and the second mirror (8) so that the first slit (26), the second slit (22), the first mirror (7), the second mirror (8), the double-dial self-collimating telescope system (2) and the self-focusing camera (18) are on the same light path; S30. Adjusting the focusing mirror on the self-focusing camera (18) so that the image of the cross indicating line of the self-collimating telescope system (2) is clearly presented on the display screen of the display (3); S40. Adjusting the focal length of the double-dial self-collimating telescope system (2) so that the image of the second slit (22) is clearly presented on the display (3), the image of the cross center line of the second slit (22) is clearly visible, the pitch angle and / or the left-right swing angle of the second mirror (8) is adjusted so that the image of the cross center line of the second slit (22) coincides with the image of the cross indicating line of the self-collimating telescope system (2); S50. Adjusting the focal length of the double-dial self-collimating telescope system (2) so that the image of the first slit (26) is clearly presented on the display (3), the image of the cross center line of the first slit (26) is clearly visible, the pitch angle and / or the left-right swing angle of the first mirror (7) is adjusted so that the image of the cross center line of the first slit (26) coincides with the image of the cross indicating line of the self-collimating telescope system (2); S60. Repeating steps 40 and 50 until the images of the cross center line of the first slit (26) and the cross center line of the second slit (22) coincide with the image of the cross indicating line of the self-collimating telescope system (2); S70. Adjusting the focal length of the double-dial self-collimating telescope system (2) and adjusting the left-right swing angle and / or the pitch angle of the coupling mirror (21) of the laser until the image of the concentric circle ring of the double-dial self-collimating telescope system (2) appears on the display screen; S80. Adjusting the left-right swing angle and / or the pitch angle of the coupling mirror (21) of the laser so that the center of the image of the concentric circle ring on the display screen moves to coincide with the center of the image of the cross indicating line. S90. Moving the discharge cavity (28) between the first slit (26) and the second slit (22), adjusting the discharge cavity (28), observing the position of the discharge cavity (28) on the display screen until the center of the image of the crosshair coincides with the center position between the images of the upper electrode (29) and the lower electrode (30) on the discharge cavity (28).

2. The excimer laser optical path adjustment method according to claim 1, characterized by, In steps S40 to S80, further comprising: S41. Disposing a light source near the first slit (26) and the second slit (22) for illuminating the first slit (26) and the second slit (22) to clearly image on the self-focusing camera (18).

3. The excimer laser optical path alignment method according to claim 1, characterized by, In step S20, specifically comprising: S21. Moving the red light source (9) between the second mirror (8) and the double reticle autocollimator system (2); the red light emitted by the red light source (9) is reflected by the second mirror (8) and the first mirror (7), passes through the coupling mirror (21), the second slit (22), and reaches the first slit (26); S22. Adjusting the pitch or left-right angle of the first mirror (7) until the red light spot is irradiated on the center position of the first slit (26); S23. Adjusting the pitch or left-right angle of the second mirror (8) until the red light spot is irradiated on the center position of the second slit (22); S24. Repeating steps S22 and S23 until the red light spot is irradiated on the center position of the first slit (26) and the second slit (22) at the same time; S25. Turning off and moving away the red light source (9).

4. The excimer laser optical path alignment method according to claim 1, characterized by, The pitch and left-right swing angle of the first mirror (7) are adjustably arranged on the body (1) for adjusting the imaging position of the slit on the self-focusing camera (18) and the display (3); And / or, the pitch and left-right swing angle of the second mirror (8) are adjustably arranged on the body (1) for adjusting the imaging position of the slit on the self-focusing camera (18) and the display (3).

5. The excimer laser optical path adjustment method according to claim 4, characterized by, Further comprising a red light source (9) arranged between the second mirror (8) and the double reticle autocollimator system (2) for preliminarily adjusting and calibrating the angles of the second mirror (8) and the first mirror (7).

6. The excimer laser optical path adjustment method according to claim 5, characterized by, The red light source (9) can be arranged on the body (1) to move in and out of the light path between the second mirror (8) and the double reticle autocollimator system (2).

7. The excimer laser optical path adjustment method according to claim 5, characterized by, The body (1) is a box body, and the first mirror (7), the second mirror (8), the double reticle autocollimator system (2), the self-focusing camera (18), and the red light source (9) are arranged in the box body, and the side plate of the box body is provided with a window for light path in and out.

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