Picker Device Installation Status Inspection System and Method

Abstract

The present invention relates to a picker device installation state inspection system and method. A bar code includes information for identifying various types of picker devices and is formed on a corresponding picker device. A bar code reader is provided on one side of a variable picker module so as to sequentially read each bar code of the picker devices that move along the arrangement direction of the pickers in a state of being installed on the pickers. Based on the information provided by the bar code reader, a system controller identifies each position and type of the corresponding picker device and then compares them with verification criteria to check for incorrect installation and non-installation of the picker devices.

Description

Technical Field

[0001] The present invention relates to a technique for inspecting the installation state of a pick-up device mounted on a pick-up of various structures according to the type and size of an object to be transferred such as a semiconductor element, which is mounted on a variable pick-up module. Background Art

[0002] Generally, semiconductor elements are manufactured through semiconductor processes and inspected before leaving the factory. That is, semiconductor elements not only enclose internal defects, but also have a fatal impact on performance if there are appearance defects. Therefore, not only electrical operation inspections but also multiple inspections including appearance defect inspections are required for semiconductor elements.

[0003] Semiconductor elements are stored in test trays and inspected by inspection equipment. According to the inspection results classified into good products and defective products, they can be transferred to a discharge tray and a reject tray. At this time, the pick-up of the pick-up module picks up the semiconductor elements from the test tray and unloads them into the discharge tray and the reject tray according to good products and defective products.

[0004] The pick-up module can adsorb semiconductor elements by the negative pressure provided to the pick-up and separate the semiconductor elements by the positive pressure provided to the pick-up. Moreover, the pick-up device can be mounted on each pneumatic action end in a state where the pick-ups are arranged in a row. Therefore, the pick-up devices are mounted in a row on the pick-up to adsorb or separate semiconductor elements.

[0005] On the other hand, the size of semiconductor elements can vary depending on the type. Therefore, a Jedec standard tray can be composed of trays for storing semiconductor elements of various sizes. Since the pitch of the tray pockets for storing semiconductor elements changes according to the size of the semiconductor elements, the pick-up module can also be of a variable type to adjust the pitch of the pick-ups according to the pitch of the tray pockets. In addition, the pick-up device can also be replaced according to the type and size of the semiconductor elements for each type configuration.

[0006] However, if the pick-up device is not replaced according to the change in the type of semiconductor element and is incorrectly mounted on the pick-up, the semiconductor element may be damaged due to the improper use of the pick-up device when transferring the semiconductor element.

[0007] In particular, although the semiconductor element changes from a relatively large type to a relatively small type, if the pick-up device for transferring relatively large semiconductor elements is not replaced in time and the pitch of the pick-up is adjusted to be narrow, interference may occur with the surrounding pick-up devices, resulting in damage to the pick-up. In addition, when the pick-up device is not installed, semiconductor element transfer errors may occur between the trays. Summary of the Invention

[0008]

Technical Problem to be Solved by the Invention

[0009] The technical problem to be solved by the present invention is how to provide a picker device installation state inspection system and method. It is characterized in that: before the work of transporting and transferring the object to be transferred, it is necessary to check in advance whether the picker device is correctly installed on the picker, and to prevent damage to the object to be transferred, damage to the picker or transfer error in advance.

[0010]

Technical Solution

[0011] To solve the above technical problem, according to the picker device installation state inspection system of the present invention, as a system for inspecting the installation state of a picker device that is constructed for various types according to the type and size of the object to be transferred and installed on a variable picker module, it includes a bar code, a bar code reader and a system controller.

[0012] Here, the bar code includes information for identifying various types of picker devices and is formed on the corresponding picker device. The bar code reader is arranged on one side of the variable picker module so as to sequentially read each bar code of the picker device that moves along the arrangement direction of the picker in the state of being installed on the picker. The system controller identifies the position and type of each corresponding picker device based on the information provided by the bar code reader, and then compares them with the verification standard to check whether the picker device is in a state of incorrect installation or non-installation.

[0013] According to the present invention, the picker device installation state inspection method, as a method for inspecting the installation state of a picker device that is constructed for various types according to the type and size of the object to be transferred and installed on a variable picker module, first, a preparation bar code is formed on the corresponding picker device, wherein the bar code includes information for identifying various types of picker devices.

[0014] Then, the picker device installed on the picker is moved along the arrangement direction of the picker, and at the same time, each bar code of the picker device is sequentially read by the bar code reader. Then, based on the information provided by the above bar code reader, after the system controller identifies the position and type of each corresponding picker device, it compares them with the verification standard to check whether the picker device is in a state of incorrect installation or non-installation.

[0015]

Advantageous Effects of the Invention

[0016] According to the present invention, before the transfer work of the object to be transferred by the variable picker module, it is necessary to check in advance whether the picker device is correctly installed on the picker, so that the variable picker module can be started for the transfer operation, and damage to the object to be transferred, damage to the picker or transfer error can be prevented in advance. Description of the Drawings

[0017] Figure 1 Is a perspective view of a picker device installation state inspection system according to an embodiment of the present invention.

[0018] Figure 2 Is excerpted from Figure 1 A perspective view of the picker device in

[0019] Figure 3 Shows Figure 1 A perspective view of the front of the picker module in

[0020] Figure 4 Shows Figure 1 A perspective view of the back of the picker module in

[0021] Figure 5 Is a drawing illustrating the process of inspecting the installation state of the picker device during the process of moving the picker module.

[0022] Figure 6 Is a diagram showing an example of an installation error of the picker device.

[0023] Figure 7 Is a diagram showing another example of an installation error of the picker device.

[0024] Figure 8 Is a diagram showing an example where the picker device is not installed. Detailed Description of the Invention

[0025] The present invention will be described in detail with reference to the accompanying drawings. Here, the same reference numerals are used for the same components, and repeated descriptions, as well as detailed descriptions of known functions and components that may unnecessarily obscure the gist of the present invention, are omitted.

[0026] The embodiments of the present invention are provided to provide a more complete description to those of ordinary skill in the art with average knowledge. Therefore, for clearer illustration, the shapes and sizes of elements in the drawings may be exaggerated.

[0027] Figure 1 Is a structural diagram of a picker device installation state inspection system according to an embodiment of the present invention. Figure 2 Is excerpted from Figure 1 A perspective view of the picker device in Figure 3 Shows Figure 1 A perspective view of the front of the picker module in Figure 4 Shows Figure 1 A perspective view of the back of the picker module in Figure 5 Is a drawing illustrating the process of inspecting the installation state of the picker device during the process of moving the picker module.

[0028] Refer to Figures 1 to 5, a picker device installation state inspection system (100) according to an embodiment of the present invention is used to inspect the installation state of a picker device (20) of various types of structures installed on a picker (11) of a variable picker module (10) according to the type and size of a transfer object (1). The picker device installation state inspection system (100) includes a barcode (110), a barcode reader (120), and a system controller (130).

[0029] Here, the transfer object (1) is respectively received in a tray bag (2a) of a tray (2), and may be equivalent to a semiconductor element under inspection. The variable picker module (10) may include a picker (11), a spacing adjustment mechanism (12), a lifting mechanism (13), and a horizontal movement mechanism (14).

[0030] The pickers (11) are arranged in a row. Each picker (11) can be subjected to floating pressure by a pneumatic supply means to adsorb the transfer object (1), and can be subjected to static pressure by a pneumatic supply means to separate the transfer object (1).

[0031] The spacing adjustment mechanism (12) adjusts the spacing of the pickers (11) according to the spacing of the tray bags (2a) when the spacing of the tray bags (2a) changes according to the type and size of the transfer object (1). The spacing adjustment mechanism (12) includes a horizontal moving body (12a), a horizontal screw (12b), and a rotation motor (12c).

[0032] The horizontal moving bodies (12a) are respectively fixed on the pickers (11) that move for spacing adjustment. If the number of pickers (11) is odd, the horizontal moving bodies (12a) can be provided and fixed on the pickers (11) except for one picker (11) in the center.

[0033] If the number of pickers (11) is even, the horizontal moving bodies (12a) can be respectively provided and fixed on all the pickers (11). The pickers (11) can be horizontally moved to a picker bracket (11b) through a linear slide rail (11a).

[0034] The horizontal screw (12b) is long and horizontally arranged in the arrangement direction of the pickers (11), and the picker bracket (11b) rotatably supports it. The horizontal screw (12b) is respectively threadedly connected to the horizontal moving bodies (12a) fixed on the pickers (11). The horizontal screw (12b) widens or narrows the horizontal moving bodies (12a) with the same pitch according to the rotation direction, so that the spacing of the pickers (11) widens or narrows.

[0035] The rotation motor (12c) can provide forward and reverse rotation forces to the horizontal screw (12b). The forward and reverse rotation forces of the rotation motor (12c) can be transmitted to the horizontal screw (12b) through the power transmitter (12d). The power transmitter (12d) may include a drive belt coaxially fixed to the drive shaft of the rotation motor (12c), a driven belt coaxially fixed to the horizontal screw (12b), and a belt that is placed over the drive belt and the driven belt and transmits the rotation of the drive belt to the driven belt.

[0036] The spacing adjustment mechanism (12) and the power transmitter (12d) can also be composed of various known components. Any position in the horizontal moving body (12a) can be sensed by the position sensor, and the rotation motor (12c) can be driven and controlled according to the information provided by the position sensor so as to adjust the picker (11) at a set interval.

[0037] The lifting mechanism (13) moves the picker support (11b) up and down with respect to the module base (10a) to lift and lower the picker (11), so that the transfer object (1) can be picked up or discarded. The lifting mechanism (13) may include a lifting module (13a) and a lifting actuator (13b).

[0038] The lifting module (13a) can be lifted and lowered to the module base (10a) through a linear slide rail while being fixed to the picker support (11b). The lifting actuator (13b) lifts and lowers the lifting module (13a) on the module base (10a). The lifting module (13a) may include a vertical screw and a rotation motor.

[0039] The vertical screw is arranged in a vertically long arrangement and can rotate under the support of the module base (10a). The vertical screw is threadedly engaged with the lifting module (13a). The vertical screw can lift and lower the lifting module (13a) according to the rotation direction to lift and lower the picker (11). The rotation motor provides forward and reverse rotation forces to the vertical screw. The actuator (13b) can be composed of various known actuators such as a linear motor.

[0040] The horizontal moving mechanism (14) reciprocates the module base (10a) in the horizontal direction so that the picker (11) reciprocates in the horizontal direction. The horizontal moving mechanism (14) includes a column (14a) and a linear actuator (14b). The column (14a) supports the module base (10a) in a state of being fixed to the equipment base (10b) such as an inspection equipment so as to slide in the horizontal direction through a linear slide rail.

[0041] The linear actuator (14b) reciprocates the module base (10a) in the horizontal direction. The linear actuator (14b) can be composed of various known actuators, such as a screw and a rotation motor or a linear motor.

[0042] The pick-up device (20) is replaceable because its upper part is detachably mounted on the pneumatic action end of the pick-up (11). The pick-up device (20) can be coupled to the pneumatic action end of the pick-up (11) in a threaded connection or the like. The lower part of the pick-up device (20) has a plurality of nozzles (21).

[0043] The pick-up device (20) transfers the negative pressure or positive pressure supplied to the pick-up (11) to the nozzle (22) through the upper part of the device body (21) and through the flow path in the device body (21). Therefore, the pick-up device (20) can adsorb and transfer the object (1) by the negative pressure acting on the nozzle (22), and separate and transfer the object (1) by the positive pressure acting on the nozzle (22). These pick-up devices (20) can be composed of types because the dimensions of the rest except the upper part are set according to the various types of dimensions of the object (1) transferred between the trays (2).

[0044] The barcode (110) has information for identifying various types of pick-up devices (20) and is formed on the corresponding pick-up device (20). That is, the barcode (110) can be read by the barcode reader (120) to identify the type of the pick-up device (20). The barcode (11) can be a two-dimensional barcode. A two-dimensional barcode is made of a two-dimensional matrix and is also used as the name of a QR code (Quick Response code).

[0045] The barcode (110) can be formed by laser engraving on the arranged pick-up device (20). The barcode (110) can be formed on the side surface exposed in the same direction when the pick-up device (20) is mounted on the pick-up (11). Therefore, the barcode (110) can be read by the barcode reader (120) during the process of moving in the arrangement direction of the pick-up (11) in the state where the corresponding pick-up device (20) is mounted on the pick-up (11).

[0046] The barcode reader (120) is mounted around the deformable pick-up module (10) to sequentially read each barcode (110) of the pick-up device (20) that moves along the arrangement direction of the pick-up (11) in the state of being mounted on the pick-up (11). Since the position of the barcode reader (120) is fixed on the equipment base (10b), the barcodes (110) of the relatively moving pick-up devices (20) can be sequentially read.

[0047] A barcode reader (120) can optically read the form of a barcode (110) and provide it to the system controller in the form of digital data. If the barcode (110) is a two-dimensional barcode, the barcode reader (120) is configured to read the two-dimensional barcode.

[0048] Based on the information provided by the barcode reader (120), the system controller (130) identifies the positions and types of the corresponding picker devices (20), compares them with the verification criteria, and checks whether the picker devices are incorrectly installed or not installed. Here, the verification criteria are data that define the types of picker devices (20) that must be installed on the picker (11) according to the type of the object to be transferred (1).

[0049] The system controller (130) can, when it has obtained the initial position data of the picker (11) of the barcode reader (120) in advance, identify the positions and types of the picker devices (20) based on the information provided by the barcode reader (120) according to the moving position of the picker (11). The system controller (130) can classify by picker (11), identify the installation status and type of the corresponding picker device (20), and store the identified information in the data.

[0050] The system controller (130) can compare the identified position and type data of the picker device (20) with the pre-entered inspection verification criteria to check for incorrect installation or non-installation of the picker (11). The system controller (130) can, before the object to be transferred (1) is transferred by the deformable picker module (10), if it checks for incorrect installation or non-installation of the picker device, output an error message using the picker controller (not marked on the drawing) of the deformable picker module (10), stop the operation of the deformable picker module (10), and notify the operator.

[0051] Here, the system controller (130) can, when an incorrect installation of the picker device (20) occurs, issue an alarm to the operator through an alarm or a monitoring screen, or contact the communication service to send the error content of the terminal device to the operator so that the operator can correct the error.

[0052] The system controller (130) can check in advance whether the type of the picker device (20) installed on the picker (11) is incorrect and then notify the staff of the error information so that the error can be corrected. Therefore, when the deformable picker module (10) transports the object to be transferred (1), it can prevent in advance the problem of damaging the object to be transferred (1) due to the improper use of the picker device (20).

[0053] In particular, as Figure 6As shown, even when the object to be transferred (1) changes from a relatively large type to a relatively small type, the system controller (130) can check in advance the state where the picker device (20) used for transferring the relatively large object to be transferred (1) fails to be replaced in time, and notify the staff of an error message to correct the error.

[0054] Therefore, it is possible to prevent in advance the problem that when the picker device (20) used in the transfer of the relatively large object to be transferred (1) is not replaced in time, the interval between the pickers (11) is reduced, interference occurs with the surrounding picker devices (20), and the pickers (11) are damaged.

[0055] In addition, as Figure 7 shown, when the picker device (20) is intermittently installed on the picker (11) and arranged according to the type of the object to be transferred (1), for example, when the picker device (20) is installed in every two grids of the picker (11) each time, the system controller (130) can check the installation of the picker device (20) that should not exist. In this way, the system controller (130) can check in advance whether there is an error in the arrangement state of the picker device (20) and notify the staff of an error message to correct the error.

[0056] As Figure 8 shown, the system controller (130) can pre-check the presence or absence of the picker device (20) that should be installed on the corresponding picker (11) and notify the operator of an error message to correct the error. Therefore, when the object to be transferred (1) is transported by the deformable picker module (10), it is possible to prevent in advance the problem that the transfer error of the object to be transferred (1) occurs between the pallets (2) due to the picker device (20) that should be installed on the corresponding picker (11) not being installed.

[0057] As described above, according to the picker device installation state inspection system (100) of the present embodiment, before the transfer operation of the object to be transferred (1) by the deformable picker module (10), it is pre-checked whether there is a properly installed picker device (20) in the picker (11), and the deformable picker module (10) is started for the transfer work, so that it is possible to prevent in advance the breakage of the object to be transferred (1), the breakage of the picker, or the transfer error.

[0058] According to an embodiment of the present invention, the inspection of the picker device installation state is as follows.

[0059] First, a barcode (110) is formed and prepared on the corresponding picker device (20), where the barcode (110) contains information for identifying various types of picker devices (20). These picker devices (20) are installed or replaced according to the type of the object to be transferred (1) carried between the pallets (2).

[0060] In this state, before the deformable picker module (20) for handling and transferring the object to be transferred (1) operates, the picker device (20) mounted on the picker (11) is moved along the arrangement direction of the pickers (11), and at the same time, each barcode (110) of the picker device (20) is sequentially read by the barcode reader (120).

[0061] Then, based on the information provided by the barcode reader (120), the system controller (130) identifies the positions and types of the corresponding picker devices (20), compares them with the verification criteria, and checks for installation errors or non-installation of the picker devices (20).

[0062] When the system controller (130) checks for installation errors or non-installation of the picker devices (20), the error information can be output by the picker controller of the deformable picker module (10), the operation of the deformable picker module (10) can be stopped, and the staff can be notified to appropriately correct the error.

[0063] The present invention is described with reference to one embodiment shown in the drawings, but this is merely illustrative. Those with ordinary knowledge in the relevant technical field can understand that various modifications and equivalent other embodiments can be achieved therefrom. Therefore, the true scope of protection of the present invention can only be defined by the appended claims.

Claims

1. A picker device installation status inspection system, as a system for inspecting the installation status of a picker device that is configured for various types according to the type and size of the transfer object and is installed on a picker of a variable picker module, the picker device installation status inspection system includes the following components: A barcode, which has information for identifying picker devices of each type and is formed on the corresponding picker device; A barcode reader, which is installed around the above-mentioned variable picker module so as to sequentially read each barcode of the picker device that moves along the arrangement direction of the pickers in the state of being installed on the picker; and A system controller, which obtains in advance the initial position data of the picker of the barcode reader, and based on the information provided by the barcode reader according to the moving position of the picker, after identifying the respective positions and types of the corresponding picker devices, compares them with pre-entered verification criteria to check for incorrect installation and non-installation of the picker devices, wherein in the variable picker module, the spacing between the pickers can be adjusted according to the type and size of the transfer object.

2. The picker device installation state inspection system according to claim 1, characterized in that The above barcode is a two-dimensional barcode, and the above barcode reader is formed for reading two-dimensional barcodes.

3. A picker device installation status inspection method, as a method for inspecting the installation status of a picker device that is configured for various types according to the type and size of the transfer object and is installed on a picker of a variable picker module, the picker device installation status inspection method includes the following steps: Form and prepare a barcode on the corresponding picker device, wherein the barcode includes information for identifying picker devices of various types; When moving the picker device installed on the picker along the arrangement direction of the pickers, sequentially read each barcode of the picker device with a barcode reader; and The system controller obtains in advance the initial position data of the picker of the barcode reader, The system controller, based on the information provided by the barcode reader according to the moving position of the picker, after identifying the respective positions and types of the corresponding picker devices, compares them with pre-entered verification criteria to check whether the picker device is in a state of incorrect installation or non-installation, wherein in the variable picker module, the spacing between the pickers can be adjusted according to the type and size of the transfer object.

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