A matcher motor control method and a semiconductor process apparatus

Abstract

The embodiment of the present application provides a kind of matcher motor control method and a kind of semiconductor process equipment, the method comprises: obtaining the acceleration step number of radio frequency matcher motor at preset acceleration, from start rotating speed to peak rotating speed;According to the acceleration step number, control the radio frequency matcher motor runs to target speed, wherein the target speed is less than or equal to the peak rotating speed;After the radio frequency matcher motor reaches the target speed, input impedance is obtained;When the input impedance is inconsistent with preset characteristic impedance, the start rotating speed is updated using the target speed, and the step of obtaining the acceleration step number of radio frequency matcher motor at preset acceleration, from start rotating speed to peak rotating speed is continued to be executed until the input impedance is consistent with the preset characteristic impedance.The impedance matching time of radio frequency matcher can be shortened, and reflected power is reduced by the embodiment of the present application.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, in particular to a matching motor control method and a semiconductor process equipment. BACKGROUND

[0002] Plasma equipment is widely used in the manufacturing field of semiconductor, solar cell and flat panel display. The reaction chamber using plasma for processing is common, including etching, PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), PECVD (Plasma Enhanced Chemical Vapor Deposition) and the like.

[0003] Radio frequency discharge is a common plasma generation method, which can be referred to as shown in Figure 1 A typical radio frequency discharge plasma system is composed of a radio frequency power supply 1, a radio frequency matching device 2 and a plasma reaction chamber 3. The radio frequency power supply 1 has a characteristic impedance. The impedance of the plasma reaction chamber 3 is not the same as the characteristic impedance of the radio frequency power supply 1. According to the transmission line theory, when the characteristic impedance of the radio frequency power supply 1 is not conjugate to the impedance of the plasma reaction chamber 3, i.e. the impedance is not matched, the output power of the radio frequency power supply 1 cannot be fully loaded into the plasma reaction chamber 3, and there will be a power reflection phenomenon, thereby causing power waste; at the same time, the reflected power will damage the radio frequency power supply 1 itself. Therefore, a radio frequency matching device 2 is usually added between the radio frequency power supply 1 and the plasma reaction chamber 3, and the power emitted by the radio frequency power supply 1 is loaded into the reaction chamber 3 through the radio frequency matching device 2. The radio frequency matching device 2 adjusts the matching network inside to make the impedance from the input end of the matching device 2 to the back match the characteristic impedance, i.e. conjugate to the characteristic impedance of the radio frequency power supply 1, and the radio frequency power is fully loaded into the plasma reaction chamber 3.

[0004] For the radio frequency matching device 2, the impedance of the transmission line to the reaction chamber is adjusted by controlling the internal motor to rotate and adjusting the capacitance reactance in the radio frequency matching device 2. The current step motor control method is uniform speed control, i.e. the pulse frequency of the motor is constant in the whole matching process, and the running speed of the motor is limited by the starting speed of the motor itself, and the limitation of the highest running speed of the motor is large. Further, the rotation speed of the motor is limited by the starting speed of the motor itself, and the limitation of the running speed of the motor also affects the impedance matching time of the radio frequency matching device 2. SUMMARY

[0005] In view of the above problems, embodiments of the present application are proposed to provide a matcher motor control method and a corresponding semiconductor process equipment which overcome the above problems or at least partially solve the above problems.

[0006] To solve the above problems, embodiments of the present application disclose a matcher motor control method applied to a semiconductor process equipment, wherein the semiconductor process equipment comprises a radio frequency matcher motor, and the method comprises:

[0007] obtaining an acceleration step number of the radio frequency matcher motor under a preset acceleration from a starting rotating speed to a peak rotating speed;

[0008] controlling the radio frequency matcher motor to run to a target speed according to the acceleration step number, wherein the target speed is less than or equal to the peak rotating speed;

[0009] after the radio frequency matcher motor reaches the target speed, obtaining an input impedance;

[0010] when the input impedance is inconsistent with a preset characteristic impedance, updating the starting rotating speed by using the target speed, and continuing to execute the step of obtaining the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotating speed to the peak rotating speed until the input impedance is consistent with the preset characteristic impedance.

[0011] Optionally, the step of obtaining the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotating speed to the peak rotating speed comprises:

[0012] calculating the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotating speed to the peak rotating speed;

[0013] obtaining the acceleration step number.

[0014] Optionally, the semiconductor process equipment further comprises a timer corresponding to a clock frequency value; the radio frequency matcher motor corresponds to a step angle; and the step of calculating the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotating speed to the peak rotating speed comprises:

[0015] calculating an initial count value corresponding to the preset acceleration based on the clock frequency value, the step angle and the preset acceleration;

[0016] calculating a ratio of the clock frequency value to the starting rotating speed to obtain a first count value;

[0017] calculating a ratio of the clock frequency value to the peak rotating speed to obtain a second count value.

[0018] determine a first step number according to the first count value and the initial count value;

[0019] determine a second step number according to the second count value and the initial count value;

[0020] calculate a difference between the first step number and the second step number to obtain an acceleration step number.

[0021] Optionally, the calculating the initial count value corresponding to the preset acceleration based on the clock frequency value, the step pitch angle and the preset acceleration comprises:

[0022] substituting the clock frequency value, the step pitch angle and the preset acceleration into a preset initial timer count value formula to obtain the initial count value; the preset initial timer count value formula is:

[0023]

[0024] wherein C0 is the initial count value, a is the step pitch angle, A is the preset acceleration, t t is a preset period.

[0025] Optionally, the determining the first step number according to the first count value and the initial count value comprises:

[0026] determining whether the initial count value is greater than the first count value;

[0027] when the initial count value is greater than the first count value, determining an initial step number corresponding to the initial count value as the first step number;

[0028] when the initial count value is not greater than the first count value, obtaining an iteration count value based on a preset iteration function with a preset iteration number as input;

[0029] determining whether the iteration count value is greater than the first count value;

[0030] when the iteration count value is greater than the first count value, determining the preset iteration number as the first step number;

[0031] when the iteration count value is not greater than the first count value, incrementing the preset iteration number and updating the iteration count value.

[0032] Optionally, the determining the second step number according to the second count value and the initial count value comprises:

[0033] determining whether the initial count value is greater than the second count value;

[0034] determining the initial step number corresponding to the initial count value as a second step number when the initial count value is greater than the second count value;

[0035] obtaining an iteration count value based on a preset iteration function with a preset iteration number as input when the initial count value is not greater than the second count value;

[0036] determining whether the iteration count value is greater than the second count value;

[0037] determining the preset iteration number as a second step number when the iteration count value is greater than the second count value;

[0038] incrementing the preset iteration number and updating the iteration count value when the iteration count value is not greater than the second count value.

[0039] Optionally, the iteration function includes an acceleration state iteration sub-function and a deceleration state iteration sub-function; wherein the acceleration state iteration sub-function is:

[0040]

[0041] the deceleration state iteration sub-function is:

[0042]

[0043] wherein C n is the iteration count value, C n-1 is the previous iteration count value, and n is the preset iteration number.

[0044] Optionally, the preset iteration number is determined as an acceleration sequence value;

[0045] establishing a first mapping relationship between the acceleration step number and the acceleration sequence value and a second mapping relationship between the initial rotation speed and the acceleration sequence value;

[0046] combining the first mapping relationship and the second mapping relationship to generate acceleration sequence information.

[0047] Optionally, the obtaining of the acceleration step number of the radio frequency matching device motor under a preset acceleration from an initial rotation speed to a peak rotation speed includes:

[0048] in the acceleration sequence information, the second mapping relationship is queried according to the initial rotation speed to obtain the acceleration sequence value;

[0049] the first mapping relationship is queried according to the acceleration sequence value to obtain the acceleration step number.

[0050] Optionally, the controlling of the radio frequency matching device motor to run to a target speed according to the acceleration step number includes:

[0051] determining whether the acceleration step number is greater than a preset acceleration step number threshold corresponding to a preset control step number;

[0052] when the acceleration step number is greater than the preset acceleration step number threshold, calculating a difference step number between the acceleration step number and the preset control step number, and calculating a third step number corresponding to the preset acceleration step number threshold; the third step number is half of the preset acceleration step number threshold;

[0053] controlling the RF matching device motor to accelerate from the starting rotation speed to the peak rotation speed by the third step number;

[0054] controlling the RF matching device motor to run at the peak rotation speed for the difference step number;

[0055] controlling the RF matching device motor to decelerate from the peak rotation speed to the target speed by the third step number;

[0056] when the acceleration step number is not greater than the preset acceleration step number threshold, calculating a fourth step number corresponding to the acceleration step number; the fourth step number is half of the acceleration step number;

[0057] controlling the RF matching device motor to accelerate from the starting rotation speed to the peak rotation speed by the fourth step number;

[0058] controlling the RF matching device motor to decelerate from the peak rotation speed to the target speed by the fourth step number.

[0059] Optionally, the starting rotation speed is greater than zero.

[0060] The embodiment of the application also discloses a semiconductor process equipment, which comprises a radio frequency power supply, a radio frequency matching device, and a process chamber; the input end of the radio frequency matching device is connected with the radio frequency power supply, and the output end of the radio frequency matching device is connected with the process chamber; the radio frequency matching device comprises a radio frequency matching device motor; and the semiconductor process equipment further comprises:

[0061] a controller, which is used for acquiring an acceleration step number of the radio frequency matching device motor under a preset acceleration from a starting rotation speed to a peak rotation speed, and controlling the radio frequency matching device motor to run to a target speed according to the acceleration step number, wherein the target speed is less than or equal to the peak rotation speed; after the radio frequency matching device motor reaches the target speed, an input impedance is acquired; when the input impedance is inconsistent with a preset characteristic impedance, the starting rotation speed is updated by using the target speed, and the step of acquiring the acceleration step number of the radio frequency matching device motor under the preset acceleration from the starting rotation speed to the peak rotation speed is continuously executed until the input impedance is consistent with the preset characteristic impedance.

[0062] The embodiment of the present application comprises the following advantages:

[0063] The embodiment of the present application comprises the following advantages: BRIEF DESCRIPTION OF DRAWINGS

[0064] Figure 1 is a structural schematic diagram of a prior art radio frequency discharge plasma system;

[0065] Figure 2 is a structural schematic diagram of a prior art radio frequency matching device;

[0066] Figure 3 is a flow chart of a motor control method in the prior art;

[0067] Figure 4 is a flow chart of a motor control method in the prior art;

[0068] Figure 5 is a flow chart of a motor control method in the prior art;

[0069] Figure 6 is a motor speed curve of a motor control method in the embodiment of the present application Figure 1 ;

[0070] Figure 7 is a motor speed curve of a motor control method in the embodiment of the present application Figure 2 ;

[0071] Figure 8 is a flow chart of a motor control method in the embodiment of the present application;

[0072] Figure 9 is a speed curve diagram of a matcher motor model of an embodiment of the present application;

[0073] Figure 10 is an acceleration step number calculation flow chart of a matcher motor control method of an embodiment of the present application;

[0074] Figure 11 is a structure block diagram of a semiconductor process equipment of an embodiment of the present application.

[0075] Legend: 1-RF power supply, 2-RF matcher, 3-Plasma reaction chamber, 4-RF sensor, 5-Control system, 6-Actuator. DETAILED DESCRIPTION

[0076] In order to make the above objectives, features and advantages of the present application more apparent, further specific embodiments of the present application will be described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art belong to the scope of protection of the present application.

[0077] In the prior art, reference can be made to Figure 2As shown, the common RF matching device 2 is composed of three parts: RF sensor 4, controller 5 and actuator 6 (stepping motor driving vacuum variable capacitor C1, C2 rotation). The RF sensor 4 is used to detect and calculate the RF power on the transmission line in real time. The controller 5 is composed of a control chip and various functional modules, wherein the control chip is used for overall operation and logic control. The control chip calculates the output value of the RF sensor through the matching algorithm to obtain the adjustment direction of impedance matching. The controller 5 outputs a pulse signal to control the motor rotation of the actuator 6, and the motor drives the vacuum variable capacitor C1, C2 to rotate, adjusts the capacitance value of the vacuum variable capacitor C1, C2, and further adjusts the impedance of the transmission line to the plasma reaction chamber 3. In the process of impedance matching of the RF matching device 2, the actuator 6 is adjusted constantly, and finally the plasma reaction chamber 3 obtains the maximum power from the RF power supply 1. The same impedance matching path, the shorter the time for the RF matching device 2 to reach the conjugate matching state, the lower the reflected power, and the output power of the RF power supply 1 can be fully loaded into the reaction chamber 3 faster. In this process, the speed control method of the controller 5 to the actuator 6, that is, the rotation speed control method of the matching device motor greatly affects the impedance matching time. The motor used in the actuator 6 of the RF matching device 2 is a stepping motor, and the rotation speed and rotation angle of the stepping motor depend only on the frequency and number of the received pulse signals under no overload condition. The number of received pulse signals is proportional to the stepping rotation angle, and the frequency of received pulse signals is proportional to the stepping rotation speed. In the RF matching device, the controller 5 sends pulse signals to the stepping motor in the actuator 6 to control the rotation speed and rotation angle of the motor.

[0078] Reference can be made to Figure 3 , a motor control method flow chart in the prior art is shown.

[0079] Step S101, after the flow starts, the controller 5 sets the rotation speed V0 of the two stepping motors respectively;

[0080] Step S102, the RF power supply 1 is turned on to start outputting power;

[0081] Step S103, the RF sensor 4 collects the voltage and current values on the transmission line;

[0082] Step S104, the controller 5 receives the data collected by the RF sensor 4 for operation processing, judges whether the input impedance is 50 ohms; if yes, go to step S106; if not, calculate the rotation direction and rotation distance of the motor and execute step S105;

[0083] S105, the control mechanism 5 sends the calculated rotation direction and rotation distance of the motor to the execution mechanism

[0084] S106, the control mechanism judges whether the impedance matching is completed, if not, repeats steps S103-S105, if completed, ends the matching process.

[0085] It can be seen that the existing motor control method is uniform speed control, that is, the pulse frequency sent by the control mechanism 5 to the motor is constant during the entire matching process, and the motor operating speed is limited by the starting speed of the motor itself, that is, limited by the rotation speed V0 of the stepper motor; and the rotation speed V0 is determined according to the no-load starting frequency of the stepper motor. If the pulse frequency is greater than the value, the stepper motor cannot start normally, and the step loss or stall occurs. Therefore, under the current matching motor control method, the rotation speed of the motor is limited by the starting speed of the motor itself, and cannot be further rotated at high speed, resulting in the extension of the impedance matching time and the increase of the reflected power.

[0086] Based on this, the present application provides a matching motor control method and a corresponding semiconductor process equipment to overcome the above problems or at least partially solve the above problems.

[0087] Reference can be made to Figure 4 , a step flow chart of a matching motor control method of an embodiment of the present application is shown. The matching motor control method is applied to a semiconductor process equipment, which includes a radio frequency matching motor, and specifically can include the following steps:

[0088] Step 401, obtaining the acceleration step number of the radio frequency matching motor under a preset acceleration from the starting rotation speed to the peak rotation speed;

[0089] In the embodiment of the present application, the radio frequency matching motor of the radio frequency matching motor of the semiconductor process equipment has a radio frequency matching motor, and the rotation of the radio frequency matching motor can adjust the impedance of the radio frequency matching motor. The radio frequency matching motor can be a stepper motor.

[0090] For the radio frequency matching motor in the embodiment of the present application, it is used for L-type radio frequency matching, π-type radio frequency matching and T-type radio frequency matching.

[0091] In the embodiment of the present application, the radio frequency matching motor can be an L-type radio frequency matching motor, that is, the vacuum variable capacitor in the radio frequency matching motor is in an L-type distribution in the matching circuit, one of the vacuum variable capacitors is in series in the matching circuit, and one of the vacuum variable capacitors is in parallel in the matching circuit.

[0092] The radio frequency matcher can also be a π-type radio frequency matcher, that is, two vacuum variable capacitors in the radio frequency matcher are connected in parallel to the matching circuit.

[0093] The radio frequency matcher can also be a T-type radio frequency matcher, that is, two vacuum variable capacitors in the radio frequency matcher are connected in series to the matching circuit.

[0094] In the embodiment of the present application, the initial parameters such as the acceleration, the initial rotation speed and the initial rotation speed of the radio frequency matcher motor can be determined according to the performance parameters of the radio frequency matcher motor. Before starting the radio frequency matcher motor, the initial parameters can be set and stored in a designated storage space. When starting the radio frequency matcher motor, a start instruction containing the initial parameters can be received, and the initial parameters of the radio frequency matcher motor can be received. The initial rotation speed is the initial rotation speed of the radio frequency matcher motor before matching. The peak rotation speed is the highest rotation speed of the radio frequency matcher motor during operation. The acceleration is the rotation acceleration of the radio frequency matcher motor during operation. It should be noted that the designated storage space can be a storage space in the semiconductor process equipment, or a third-party storage space connected to the semiconductor process equipment.

[0095] After obtaining the initial parameters such as the acceleration, the initial rotation speed and the initial rotation speed, the acceleration steps required for the radio frequency matcher motor to accelerate from the initial rotation speed to the peak rotation speed under the preset acceleration can be calculated, or obtained by searching the historical data table. That is, the radio frequency matcher motor needs to accelerate for the corresponding acceleration steps after starting to reach the peak rotation speed. The radio frequency matcher motor has multiple adjustable rotation speeds, and the impedance can be adjusted by varying the speed.

[0096] Step 402, controlling the radio frequency matcher motor to run to a target speed according to the acceleration steps, wherein the target speed is less than the peak rotation speed;

[0097] After determining the acceleration steps, the radio frequency matcher motor is controlled to accelerate rotation, and the radio frequency matcher motor reaches the target rotation speed corresponding to the acceleration steps. Since the peak rotation speed is fixed during the operation of the radio frequency matcher motor, the corresponding acceleration steps are also fixed. When the current obtained acceleration steps are equal to the acceleration steps corresponding to the peak rotation speed, that is, the target rotation speed is equal to the peak rotation speed. When the current obtained acceleration steps are greater than the acceleration steps corresponding to the peak rotation speed, that is, the radio frequency matcher motor runs to the peak rotation speed and then slows down to the target speed, and the target speed is less than the peak rotation speed.

[0098] Step 403, obtaining the input impedance after the radio frequency matcher motor reaches the target speed;

[0099] After the radio frequency matcher motor reaches the target speed, the electrical parameters on the transmission line of the radio frequency matcher can be acquired, the input impedance at this time is determined, and it is judged whether the input impedance can realize impedance matching.

[0100] Step 404, when the input impedance is inconsistent with the preset characteristic impedance, the target speed is used to update the initial rotating speed, and the step of acquiring the acceleration steps of the radio frequency matcher motor under the preset acceleration from the initial rotating speed to the peak rotating speed is continued to be executed until the input impedance is consistent with the preset characteristic impedance.

[0101] When the input impedance is inconsistent with the preset characteristic impedance, that is, the input impedance cannot realize impedance matching, the rotating speed of the radio frequency matcher motor needs to be continued to be controlled to adjust the impedance. Therefore, the initial rotating speed can be updated by using the target speed of the last radio frequency matcher motor, that is, the target speed of the last radio frequency matcher motor is used as the initial rotating speed of this time, the step of acquiring the acceleration steps of the radio frequency matcher motor under the preset acceleration from the initial rotating speed to the peak rotating speed is executed again, the acceleration steps of the new round are calculated, and the rotating speed of the radio frequency matcher motor is adjusted based on the acceleration steps of the new round, so as to adjust the impedance of the radio frequency matcher. Until the input impedance is consistent with the preset characteristic impedance, at this time, the input impedance can realize impedance matching, and the impedance matching control of this time is completed. The size of the preset characteristic impedance is the size of the characteristic impedance of the radio frequency power supply, which can be 50 ohms, 100 ohms, etc. A person skilled in the art can set it according to actual needs, and the embodiments of the present application do not make specific limitation.

[0102] In summary, in the embodiment of the present application, the number of acceleration steps of the radio frequency matching machine from the starting rotation speed to the peak rotation speed under a preset acceleration can be obtained; the radio frequency matching machine is controlled to run to a target speed according to the number of acceleration steps, wherein the target speed is less than or equal to the peak rotation speed; so that the radio frequency matching machine running speed is no longer limited by the no-load starting frequency, and different peak rotation speeds can be selected according to the load, so that the radio frequency matching machine running speed accelerates to the peak rotation speed, the resources of the stepping motor can be maximized, and the motor running speed can be effectively improved. After the radio frequency matching machine reaches the target speed, the input impedance is obtained; when the input impedance is inconsistent with the preset characteristic impedance, the starting rotation speed is updated using the target speed, and the step of obtaining the number of acceleration steps of the radio frequency matching machine from the starting rotation speed to the peak rotation speed under a preset acceleration is continued to be performed until the input impedance is consistent with the preset characteristic impedance; so that the matching machine can accelerate from an initial speed, the motor running time is shortened, the matching time of the radio frequency matching machine is further shortened, and the reflected power is reduced.

[0103] Reference can be made to Figure 5 , a step flow chart of another matching machine control method of the embodiment of the present application is shown. The method is applied to a semiconductor process equipment, the semiconductor process equipment includes a radio frequency matching machine, the semiconductor process equipment also includes a timer, the timer corresponds to a clock frequency value, and the radio frequency matching machine corresponds to a step angle; the matching machine control method can specifically include the following steps:

[0104] Step 501, the number of acceleration steps of the radio frequency matching machine from the starting rotation speed to the peak rotation speed under a preset acceleration is calculated;

[0105] The control mechanism in the radio frequency matching machine can set the starting rotation speed of the radio frequency matching machine, the preset acceleration of the radio frequency matching machine rotation, and the peak rotation speed of the radio frequency matching machine rotation, respectively.

[0106] The starting rotation speed, the peak rotation speed and the acceleration can be received as the initial parameters of the radio frequency matching machine. The starting rotation speed can be set with reference to the motor starting speed, the acceleration A during rotation can be set with reference to the acceleration suggestion value determined by the motor manufacturer according to the physical parameters of the motor, and the peak rotation speed can be selected based on the test value that can normally drive the capacitor to rotate under the acceleration condition. The peak rotation speed changes according to different loads.

[0107] The number of steps required for the starting rotation speed to accelerate to the peak rotation speed under the preset acceleration is calculated.

[0108] Specifically, it can include

[0109] In step S5011, based on the clock frequency value, the step angle and the preset acceleration, an initial count value corresponding to the preset acceleration is calculated.

[0110] In the embodiment of the present application, the semiconductor process equipment further comprises a timer which can determine the current time by counting. Specifically, the timer corresponds to a clock frequency value, which is the count value of the timer in one second. After the preset acceleration is determined, the initial count value corresponding to the acceleration can be calculated based on the clock frequency value and the step angle.

[0111] Specifically, the initial count value is obtained by substituting the clock frequency value, the step angle and the preset acceleration into the preset initial timer count value formula.

[0112] The preset initial timer count value formula is:

[0113]

[0114] Wherein, C0 is the initial count value, a is the step angle, A is the acceleration, t t is the preset period.

[0115] In actual application, the rotation of the stepper motor needs the control mechanism to send pulses. If the control mechanism sends pulses at a constant speed, the stepper motor rotates at a constant speed. If the control mechanism sends pulses at an acceleration, the stepper motor moves at an acceleration. Therefore, the change of speed can be changed by changing the sending frequency of the pulses, that is, the time interval between the pulses can be adjusted to change the speed. The control chip in the control mechanism has a pulse sending module, which has a timer function. The clock frequency f of the timer is: f = 22.5 MHz, which is equivalent to counting 22.5M (million) times in one second. The period is inversely proportional to the frequency, so the counting period is = 1 / f. The pulse sending module can control the sending of pulses at an interval of C clock count values. For example, the relationship between the motor speed and the pulse frequency is as follows: the selected stepper motor needs 200 pulses to rotate one circle. If the motor speed is 5 revolutions per second, the corresponding pulse frequency is 1000 per second, i.e. 1000 Hz. Further, the clock count value C of the counter of the pulse sending module is 22500.

[0116] In summary, the smaller the clock count value C of the counter, the higher the pulse sending frequency, and further the faster the motor rotates. The size of the pulse frequency determines the speed change of the motor, so the calculation of the pulse frequency is particularly important. As known from the above, the pulse frequency is further converted into the timer count value C. Under a specified acceleration A, the specific calculation formula of the timer count value C is:

[0117] θ = na (Formula 2)

[0118] Wherein, θ is the rotation angle, n represents the number of pulses, and α represents the step angle of the stepper motor under one pulse.

[0119] In addition, when the initial speed is zero, the distance formula of the uniformly accelerated motion is:

[0120]

[0121] Wherein, S represents displacement, A represents acceleration, t n represents the time point.

[0122] Combining formula 2 and formula 3 can obtain:

[0123]

[0124] Further combining formula 2 and formula 3 can obtain:

[0125]

[0126] That is, the difference between the time points t n and t n+1 of adjacent pulses is the time interval of the pulse, so the time interval formula of the counter is:

[0127]

[0128] Wherein, C n represents the count value of the timer of the n-th pulse control chip

[0129] Further, from formula 6, it can be obtained that:

[0130]

[0131] When the initial operation, that is, when n=0, the count value C0 of the pulse timer generated for the first time is obtained by substituting formula 7 into formula 1, that is, formula 1.

[0132] Therefore, the determined acceleration can be substituted into formula 1 to calculate the initial count value corresponding to the acceleration.

[0133] For example, under the acceleration A=100 revolutions / square, the corresponding initial count value

[0134]

[0135] Step S5012, calculating the ratio of the clock frequency value and the starting rotation speed to obtain a first count value;

[0136] After the initial rotation speed is obtained, a timer count value corresponding to the initial rotation speed, i.e., a first count value, can be calculated. Specifically, a ratio of the clock frequency value to the initial rotation speed can be calculated, the value of the ratio is determined, and the first count value is determined.

[0137] For example, when the initial speed of the motor is set to 1000 Hz and the clock frequency value is 22.5M, the first count value corresponding to the pulse of 1000 Hz frequency is 22.5M / 1000 = 22500.

[0138] Step S5013, a ratio of the clock frequency value to the peak rotation speed is calculated to obtain a second count value;

[0139] Similarly to step S5012, after the peak rotation speed is obtained, a timer count value corresponding to the peak rotation speed, i.e., a second count value, can be calculated. Specifically, a ratio of the clock frequency value to the peak rotation speed can be calculated, the value of the ratio is determined, and the second count value is determined.

[0140] For example, when the peak rotation speed is set to 2000 Hz and the clock frequency value is 22.5M, the counter value corresponding to the pulse of 2000 Hz frequency sent is 22.5M / 2000 = 11250.

[0141] Step S5014, determining a first step number according to the first count value and the initial count value;

[0142] After the first count value is determined, the control step number of the radio frequency matching motor reaching the initial rotation speed corresponding to the first count value, i.e., the first step number, can be determined according to the relationship between the first count value and the initial count value.

[0143] Specifically, the step S5014 can specifically include the following sub-steps:

[0144] Sub-step S50141, judging whether the initial count value is greater than the first count value;

[0145] First, it can be judged whether the initial count value is greater than the first count value. The judgment method can adopt difference method, quotient method, number axis method, etc., and the embodiments of the present application do not make specific limitation thereon.

[0146] Sub-step S50142, when the initial count value is greater than the first count value, determining the initial step number corresponding to the initial count value as the first step number;

[0147] When the initial count value is greater than the first count value, it indicates that the first count value at this time is too small, and if the first step number is determined by the first count value, the radio frequency matching motor can not reach the initial speed at the start. Therefore, the initial step number corresponding to the initial count value can be determined as the first step number.

[0148] Substep S50143, when the initial count value is not greater than the first count value, based on a preset iteration function, taking a preset iteration number as input, obtaining an iteration count value,

[0149] When the initial count value is not greater than the first count value, it indicates that the speed at this time will be greater than the initial speed, and the initial count value corresponding to the initial speed needs to be iteratively calculated. Starting from a preset iteration number of 1, the preset iteration number is substituted into the preset iteration function, and the iteration count value of a single iteration is calculated.

[0150] Substep S50144, judging whether the iteration count value is greater than the first count value;

[0151] After obtaining the iteration count value, further judge the size relationship between the iteration count value and the first count value to determine whether the iteration count value is greater than the first count value. The judging method can be the same as substep S5051 or not, and the present embodiment does not make specific limitation.

[0152] Substep S50145, when the iteration count value is greater than the first count value, determining that the preset iteration number is the first step number;

[0153] When the iteration count value is greater than the first count value, that is, after iterating the corresponding preset iteration number, the speed of the radio frequency matching device motor can reach the requirement, and the movement of the radio frequency matching device motor is uniform variable speed movement, that is, one iteration corresponds to one more step number of the control motor. Therefore, it can be determined that the current preset iteration number is the first step number.

[0154] Substep S50146, when the iteration count value is not greater than the first count value, incrementing the preset iteration number and updating the iteration count value.

[0155] When the iteration count value is not greater than the first count value, that is, the control step number corresponding to the current iteration number cannot reach the initial speed; therefore, the preset iteration number can be iteratively updated, and the iteration count value is updated. Specifically, the preset iteration number can be incremented to update the preset iteration number, the updated preset iteration number is continuously substituted into the iteration function to obtain a new round of iteration count value, and the first count value is continuously compared according to the new round of iteration count value. The first step number is determined by multiple iterations.

[0156] Step S5015, determining a second step number according to the second count value and the initial count value;

[0157] After determining the second count value, the second count value and the initial count value can be used to determine the control step number corresponding to the peak rotation speed of the radio frequency matching device motor, that is, the second step number.

[0158] Specifically, the step S5015 can specifically include the following sub-steps.

[0159] The sub-step S50151 judges whether the initial count value is greater than the second count value.

[0160] Similar to the sub-steps S50141-S50146 for calculating the first step number, first, it can be judged whether the initial count value is greater than the second count value to determine whether the initial count value can reach the peak rotation speed.

[0161] The sub-step S50152 determines that the initial step number corresponding to the initial count value is the second step number when the initial count value is greater than the second count value.

[0162] When the initial count value is greater than the second count value, that is, the second count value is smaller at this time, the initial step number corresponding to the initial count value can be determined as the second step number.

[0163] The sub-step S50153 obtains an iteration count value based on a preset iteration function with a preset iteration number as an input when the initial count value is not greater than the second count value.

[0164] When the initial count value is not greater than the second count value, iteration can be started from a preset iteration number of 1, and the preset iteration number is substituted into the preset iteration function to calculate the iteration count value of a single iteration. The preset iteration function is the same as the preset iteration function in the step S50143.

[0165] The sub-step S50154 judges whether the iteration count value is greater than the second count value.

[0166] After obtaining the iteration count value, the size relationship between the iteration count value and the second count value is further judged to determine whether the iteration count value is greater than the second count value.

[0167] The sub-step S50155 determines that the preset iteration number is the second step number when the iteration count value is greater than the second count value.

[0168] When the iteration count value is greater than the second count value, that is, after iteration of the corresponding preset iteration number, the speed of the radio frequency matching device motor can reach the requirement, and the iteration number can be determined as the second step number.

[0169] The sub-step S50156 increments the preset iteration number and updates the iteration count value when the iteration count value is not greater than the second count value.

[0170] When the iteration count value is not greater than the second count value, i.e. the number of control steps corresponding to the number of current iterations cannot reach the peak rotation speed; therefore, the preset iteration number can be iteratively updated to determine a new iteration count value. The iterative calculation process is the same as step S50146, and will not be described here.

[0171] In an optional embodiment of the present application,

[0172] The iteration function includes an acceleration state iteration sub-function and a deceleration state iteration sub-function.

[0173] The acceleration state iteration sub-function is:

[0174]

[0175] The deceleration state iteration sub-function is:

[0176]

[0177] wherein C n is the iteration count value, C n-1 is the previous iteration count value, and n is the iteration number.

[0178] In actual application, based on formula 7, the following can be obtained:

[0179]

[0180] As can be seen from formula 8, the count value of the nth pulse interval is only related to the count value of the first time and the number of times.

[0181] Since the square root operation is required in the calculation process, and the computing capacity of the chip is limited, the count value of the nth pulse interval cannot be directly and accurately obtained, therefore, the Taylor series is approximated by using the Maclaurin formula to obtain an approximate value as the count value of the nth pulse interval:

[0182]

[0183] Further, the following can be obtained:

[0184]

[0185]

[0186] By substituting formula 10-3 into formula 8 and simplifying, the acceleration state iteration sub-function is obtained:

[0187]

[0188] When n = 1, the above formula is substituted, and the result is found to be deviated, but the error can be corrected by multiplying the acceleration state iterative function by a parameter of 0.69.

[0189] Conversely, it can be inferred that the timer count value formula of each pulse in the motor deceleration process, that is, the deceleration state iterative function:

[0190]

[0191] Therefore, when calculating the iterative count value, the preset iteration number can be substituted into the acceleration state iterative function and the deceleration state iterative function respectively to obtain the iterative count value of the preset iteration number in the acceleration state and the iterative count value of the preset iteration number in the deceleration state. Then, before using the acceleration state iterative function and the deceleration state iterative function, it can be judged that the running direction of the motor is acceleration or deceleration, and then the corresponding iterative function is used.

[0192] In step S5016, the difference between the first step number and the second step number is calculated to obtain an acceleration step number.

[0193] After the first step number and the second step number are determined, the difference between the first step number and the second step number can be calculated, and the difference is determined as the acceleration step number.

[0194] In step 502, the acceleration step number is obtained.

[0195] After the acceleration step number is calculated, the acceleration step number can be obtained for subsequent impedance matching control.

[0196] In an optional embodiment of the present application, the method further comprises: determining that the preset iteration number is an acceleration sequence value; establishing a first mapping relationship between the acceleration step number and the acceleration sequence value and a second mapping relationship between the starting rotation speed and the acceleration sequence value; and combining the first mapping relationship and the second mapping relationship to generate acceleration sequence information.

[0197] In actual application, the iteration number and the iterative count value corresponding to each iteration can be recorded, and the iteration number corresponding to the iteration, that is, the preset iteration number, is determined as the acceleration sequence value. Then, the acceleration step number calculated this time and the acceleration sequence value are mapped, that is, the first mapping relationship is established. The first mapping relationship can be established by using the specific value of the acceleration sequence value as a key value. Then, the acceleration sequence value and the starting rotation speed calculated this time are mapped, that is, the second mapping relationship is established. The second mapping relationship can be established by using the starting rotation speed as a key value. After the establishment, the first mapping relationship and the second mapping relationship are combined to generate an acceleration sequence information. The acceleration sequence information can be stored so as to be queried subsequently.

[0198] In an optional embodiment of the present application, when there is acceleration sequence information, in the acceleration sequence information, the second mapping relationship is queried according to the starting rotation speed, and the acceleration sequence value is obtained; the first mapping relationship is queried according to the acceleration sequence value, and the acceleration step number is obtained.

[0199] When there is acceleration sequence information, i.e., in a historical matching process, there is a historical calculated acceleration step number. Therefore, the second mapping relationship can be queried by using the current starting rotation speed to determine the second mapping relationship matched therewith, and the acceleration sequence value is obtained from the matched second mapping relationship.

[0200] Then, the first mapping relationship is queried according to the acceleration sequence value, the first mapping relationship matched therewith is determined, and the acceleration step number is obtained from the matched first mapping relationship. This facilitates faster obtaining of the acceleration step number, and further shortens the matching time.

[0201] In step 503, the radio frequency matcher motor is controlled to run to a target speed according to the acceleration step number, wherein the target speed is less than the peak rotation speed.

[0202] After the acceleration step number is determined, the radio frequency matcher motor is controlled to run at a control step number corresponding to the acceleration step number in a rotation direction corresponding to the acceleration step number, and run to a target speed corresponding to the acceleration step number, wherein the target speed is less than or equal to the peak rotation speed.

[0203] In an optional embodiment of the present application, the step 503 comprises:

[0204] In sub-step S5031, it is determined whether the acceleration step number is greater than a preset acceleration step number threshold value, and the preset acceleration step number threshold value corresponds to a preset control step number.

[0205] The preset acceleration step number threshold value can be the total control step number of the acceleration process between the starting rotation speed and the peak rotation speed. The acceleration step number can be determined to determine whether it is greater than the preset acceleration step number threshold value.

[0206] In sub-step S5032, when the acceleration step number is greater than the preset acceleration step number threshold value, a difference step number between the acceleration step number and the preset control step number is calculated, and a third step number corresponding to the preset acceleration step number threshold value is calculated; the third step number is half of the preset acceleration step number threshold value.

[0207] In sub-step S5033, the radio frequency matcher motor is controlled to accelerate from the starting rotation speed to the peak rotation speed by the third step number.

[0208] In sub-step S5034, the radio frequency matcher motor is controlled to run at the peak rotation speed for the difference step number.

[0209] Sub-step S5035, control the radio frequency matching machine to run at the third step number to reach the target speed;

[0210] The preset acceleration step number threshold can be twice the maximum acceleration step number from the starting rotation speed to the peak rotation speed. When the acceleration step number is greater than the preset acceleration step number threshold, that is, after the radio frequency matching machine runs for the acceleration step number, the rotation speed of the radio frequency matching machine will be greater than the peak rotation speed Vm, and the rotation speed of the radio frequency matching machine cannot be higher than the peak rotation speed. Therefore, the third step number corresponding to half of the preset control step number of the preset acceleration step number threshold can be used to control the acceleration of the motor. Then, the radio frequency matching machine can run at the peak rotation speed for the difference step number between the acceleration step number and the preset control step number, and then decelerate by the third step number to reach the target speed.

[0211] The running speed of the motor can refer to Figure 6 After the radio frequency matching machine runs at the third step number to reach the peak rotation speed, the radio frequency matching machine can run at a constant speed, and then decelerate by the third step number to reduce the speed to the target speed point.

[0212] Sub-step S5036, when the acceleration step number is not greater than the preset acceleration step number threshold, calculate a fourth step number corresponding to the acceleration step number, the fourth step number being half of the acceleration step number;

[0213] Sub-step S5037, control the radio frequency matching machine to accelerate from the starting rotation speed by the fourth step number;

[0214] Sub-step S5038, control the radio frequency matching machine to decelerate by the fourth step number to reach the target speed.

[0215] When the acceleration step number is not greater than the preset acceleration step number threshold, the matching machine cannot run to the peak rotation speed Vm. Therefore, half of the acceleration step number can be calculated for acceleration and deceleration, that is, a fourth step number corresponding to the acceleration step number is calculated. After the radio frequency matching machine accelerates by the fourth step number, the radio frequency matching machine is controlled to decelerate by the fourth step number to reach the target speed.

[0216] The running speed of the motor can refer to Figure 7 The radio frequency matching machine can first accelerate by the fourth step number, and then decelerate by the fourth step number to the target speed point.

[0217] Step 504, after the radio frequency matching machine reaches the target speed, the input impedance is obtained;

[0218] After the radio frequency matching machine reaches the target speed, the voltage and current values on the transmission line can be collected, and the input impedance can be determined according to the voltage and current values on the transmission line.

[0219] In an optional embodiment of the present application, the starting rotation speed is greater than zero.

[0220] In practical applications, the initial rotation speed can be greater than zero, so that the matcher motor can perform the acceleration process from a non-zero initial rotation speed, thereby saving the time for the matcher motor to start rotating from zero, shortening the motor operation time, further shortening the matching time of the radio frequency matcher, and reducing the reflected power.

[0221] In step 505, when the input impedance is inconsistent with the preset characteristic impedance, the initial rotation speed is updated using the target speed, and the step of obtaining the number of acceleration steps of the radio frequency matcher motor under a preset acceleration from the initial rotation speed to the peak rotation speed is continued to be performed until the input impedance is consistent with the preset characteristic impedance.

[0222] When the input impedance is inconsistent with the preset characteristic impedance, that is, the input impedance cannot achieve impedance matching, the speed of the radio frequency matcher motor needs to be continuously controlled to adjust the impedance. The target speed is used as the new initial rotation speed, and the step of obtaining the number of acceleration steps of the radio frequency matcher motor under a preset acceleration from the initial rotation speed to the peak rotation speed is performed until the input impedance, that is, the impedance corresponding to the radio frequency matcher, is consistent with the preset characteristic impedance, and impedance matching is achieved.

[0223] In summary, the method for controlling the motor based on motor acceleration and deceleration proposed in the embodiments of the present application can effectively improve the motor operation speed, so that the operation speed of the matcher motor is no longer limited by the no-load starting frequency. Acceleration experiments based on different loads can maximize the use of stepper motor resources, so that the motor can perform the acceleration process from a non-zero speed, thereby saving the time for the motor to start rotating from zero, shortening the motor operation time, further shortening the matching time of the radio frequency matcher, and reducing the reflected power.

[0224] In order for those skilled in the art to better understand the embodiments of the present application, the embodiments of the present application are described below through an example:

[0225] Figure 8 A step flowchart of a matcher motor control method according to an example of the present application is shown. In this example, the control mechanism 5 sends different frequency pulses to the stepper motor in the execution mechanism 6, further controlling the variable speed movement of the stepper motor. The highest starting frequency of the motor can be understood as that due to the change of the stepping pulse being too fast, the motor rotor cannot follow the change of the pulse signal due to inertia. Therefore, acceleration and deceleration are used to solve the problem of low starting frequency, and a lower pulse frequency is used at the start, and then the frequency is gradually increased to achieve a higher running speed. The specific operation model is as follows: Figure 9As shown, the horizontal axis is time, and the vertical axis is the motor speed. The motor is in three states during operation, namely, the AB segment, DE segment, the motor accelerates, and the BC segment runs at a constant speed after reaching the maximum speed. The CD segment and the EF segment decelerate to the target position.

[0226] The example specifically includes the following steps:

[0227] After the flow starts, the control mechanism sets the initial rotation speed V0 of the stepper motor, the motor rotation acceleration A, and the maximum rotation speed Vm of the motor. The initial rotation speed V0 refers to the motor start speed, the rotation acceleration A refers to the recommended value of the motor manufacturer, and the maximum rotation speed Vm is a test value based on the acceleration condition that can normally drive the capacitor to rotate. The maximum rotation speed will also be different depending on the load;

[0228] The current speed value of the motor is determined by the counter clock count value C, and according to formulas 1 to 11, the count value C is calculated iteratively step by step. Therefore, in the control mechanism 5, an iterative function is established to determine the timer count value corresponding to the initial speed and the value of n, and further n is named as the acceleration sequence value, and n is used as the initial data for subsequent motor rotation. According to the preset initial speed V0, acceleration A, and maximum speed Vm, the motor acceleration step number S from V0 to Vm is calculated. The technical diagram for the acceleration step number can be referred to Figure 10 ,

[0229] The initial speed v0 is converted into a counter value Cs, and the maximum speed Vm is converted into Cm;

[0230] According to the preset initial timer count value, the value of the counter C0 at the current acceleration A is calculated;

[0231] Determine whether the value of C0 or Cn is greater than Cs. If it is not greater than, continue to the next step, if it is greater than, calculate the next counter value according to the formula (preset iterative function) and record the current iteration number (iteration number) n, until the value of Cn is not greater than Cs;

[0232] Determine whether the value of C0 or Cn is greater than Cm. If it is not greater than, continue to the next step, if it is greater than, calculate the next counter value according to the formula (preset iterative function) and record the current iteration number n1, until the value of Cn is not greater than Cm;

[0233] Then calculate the difference between n and n1, and determine that the difference is the acceleration step number S

[0234] After determining the acceleration step number S, the voltage and current values on the transmission line can be collected by the radio frequency sensor;

[0235] Receive the data collected by the radio frequency sensor and perform operation processing to calculate the input impedance;

[0236] determining whether the input impedance is 50 ohms (characteristic impedance), if yes, determining that the impedance matching is completed, if no, calculating the rotating direction and rotating steps ST according to formulas 11 and 12;

[0237] determining whether the rotating steps ST calculated by the control mechanism is greater than twice of the acceleration steps S, if yes, the acceleration steps is S, the motor runs at the highest speed VM, then runs at a constant speed, and then decelerates to V0 to run to the target point, if no, the motor cannot run at the highest speed VM, in this process, the motor accelerates and decelerates for ST / 2 steps, that is, the motor first accelerates for ST / 2 steps, and then decelerates for ST / 2 steps to the target point.

[0238] when the impedance matching is completed, the control for the matching motor is completed.

[0239] It should be noted that, for the method embodiments, in order to simply describe, they are all expressed as a series of action combinations, but those skilled in the art should know that the embodiments of the present application are not limited by the action sequence described, because according to the embodiments of the present application, certain steps can be performed in other sequences or simultaneously. Secondly, those skilled in the art should know that the embodiments described in the specification all belong to preferred embodiments, and the actions involved are not necessarily necessary for the embodiments of the present application.

[0240] Reference Figure 11 , a structural block diagram of a semiconductor process equipment is shown, the semiconductor process equipment 1101 comprises a radio frequency matching motor, and further comprises:

[0241] a controller 11011, configured to acquire an acceleration step of the radio frequency matching motor under a preset acceleration from a starting rotating speed to a peak rotating speed, and control the radio frequency matching motor to run to a target speed according to the acceleration step, wherein the target speed is less than or equal to the peak rotating speed; after the radio frequency matching motor reaches the target speed, acquire an input impedance; when the input impedance is inconsistent with a preset characteristic impedance, update the starting rotating speed by using the target speed, and continue to execute the step of acquiring the acceleration step of the radio frequency matching motor under the preset acceleration from the starting rotating speed to the peak rotating speed until the input impedance is consistent with the preset characteristic impedance.

[0242] In an optional embodiment of the present application, the controller 11011 is configured to calculate the acceleration step of the radio frequency matching motor under the preset acceleration from the starting rotating speed to the peak rotating speed, and acquire the acceleration step.

[0243] In an optional embodiment of the present application, the semiconductor process equipment further comprises a timer corresponding to a clock frequency value; the RF matching device motor corresponds to a step angle; the controller 11011 is configured to calculate an initial count value corresponding to the preset acceleration based on the clock frequency value, the step angle and the preset acceleration; calculate the ratio of the clock frequency value and the starting rotation speed to obtain a first count value; calculate the ratio of the clock frequency value and the peak rotation speed to obtain a second count value; determine a first step number according to the first count value and the initial count value; determine a second step number according to the second count value and the initial count value; calculate the difference between the first step number and the second step number to obtain an acceleration step number.

[0244] In an optional embodiment of the present application, the controller 11011 is configured to substitute the clock frequency value, the step angle and the preset acceleration into a preset initial timer count value formula to obtain the initial count value; the preset initial timer count value formula is:

[0245]

[0246] wherein C0 is the initial count value, a is the step angle, A is the preset acceleration, t t is a preset period.

[0247] In an optional embodiment of the present application, the controller 11011 is configured to determine whether the initial count value is greater than the first count value; when the initial count value is greater than the first count value, determine that the initial count value corresponds to a first step number; when the initial count value is not greater than the first count value, obtain an iteration count value based on a preset iteration function with a preset iteration number as input; determine whether the iteration count value is greater than the first count value; when the iteration count value is greater than the first count value, determine that the preset iteration number is the first step number; when the iteration count value is not greater than the first count value, increment the preset iteration number and update the iteration count value.

[0248] In an optional embodiment of the present application, the controller 11011 is configured to determine whether the initial count value is greater than the second count value; when the initial count value is greater than the second count value, determine that the initial count value corresponds to a second step number; when the initial count value is not greater than the second count value, obtain an iteration count value based on a preset iteration function with a preset iteration number as input; determine whether the iteration count value is greater than the second count value; when the iteration count value is greater than the second count value, determine that the preset iteration number is the second step number; when the iteration count value is not greater than the second count value, increment the preset iteration number and update the iteration count value.

[0249] In an optional embodiment of the present application, the iteration function comprises an acceleration state iteration sub-function and a deceleration state iteration sub-function.

[0250] The acceleration state iteration sub-function is:

[0251]

[0252] The deceleration state iteration sub-function is:

[0253]

[0254] wherein C n is an iteration count value, C n-1 is a previous iteration count value, and n is the preset iteration number.

[0255] In an optional embodiment of the present application, the controller 11011 is further configured to determine that the preset iteration number is an acceleration sequence value; establish a first mapping relationship between the acceleration step number and the acceleration sequence value and a second mapping relationship between the starting rotation speed and the acceleration sequence value; and generate acceleration sequence information by combining the first mapping relationship and the second mapping relationship.

[0256] In an optional embodiment of the present application, the controller 11011 is further configured to, in the acceleration sequence information, query the second mapping relationship according to the starting rotation speed to obtain the acceleration sequence value; and query the first mapping relationship according to the acceleration sequence value to obtain the acceleration step number.

[0257] In an optional embodiment of the present application, the controller 11011 is configured to determine whether the acceleration step number is greater than a preset acceleration step number threshold value, the preset acceleration step number threshold value corresponding to a preset control step number; when the acceleration step number is greater than the preset acceleration step number threshold value, calculate a difference step number between the acceleration step number and the preset control step number, and calculate a third step number corresponding to the preset acceleration step number threshold value; the third step number is half of the preset acceleration step number threshold value; control the radio frequency matching device motor to accelerate from the starting rotation speed by the third step number to reach the peak rotation speed; control the radio frequency matching device motor to run at the peak rotation speed for the difference step number; control the radio frequency matching device motor to decelerate by the third step number to reach the target speed; when the acceleration step number is not greater than the preset acceleration step number threshold value, calculate a fourth step number corresponding to the acceleration step number, the fourth step number being half of the acceleration step number; control the radio frequency matching device motor to accelerate from the starting rotation speed by the fourth step number; and control the radio frequency matching device motor to decelerate by the fourth step number to reach the target speed.

[0258] In an optional embodiment of the present application, the initial rotation speed is greater than zero.

[0259] In summary, in the embodiments of the present application, the motor running speed can be effectively improved, so that the running speed of the matcher motor is no longer limited by the no-load starting frequency. The acceleration experiment based on different loads can maximize the use of the resources of the stepper motor, so that the motor can accelerate from a fixed speed, shorten the motor running time, further shorten the matching time of the radio frequency matcher, and reduce the reflected power.

[0260] For the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts refer to the part of the method embodiment.

[0261] The embodiments of the present application also provide an electronic device, including a processor, a memory, and a computer program stored in the memory and capable of running on the processor, when the computer program is executed by the processor, each process of the above-mentioned one matcher motor control method embodiment is realized, and the same technical effect can be achieved, to avoid repetition, which will not be repeated here.

[0262] The embodiments of the present application also provide a computer readable storage medium, and a computer program is stored in the computer readable storage medium, when the computer program is executed by the processor, each process of the above-mentioned one matcher motor control method embodiment is realized, and the same technical effect can be achieved, to avoid repetition, which will not be repeated here.

[0263] For the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts refer to the part of the method embodiment.

[0264] Each embodiment in the specification is described in a progressive manner, and each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to.

[0265] Those skilled in the art should understand that the embodiments of the embodiments of the present application can be provided as a method, a device, or a computer program product. Therefore, the embodiments of the present application can adopt a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Moreover, the embodiments of the present application can adopt the form of a computer program product implemented on one or more computer usable storage media (including but not limited to disk memory, CD-ROM, optical memory, etc.) containing computer usable program code.

[0266] The embodiments of the present application are described with reference to the flowchart illustrations and / or block diagrams of the methods, terminal devices (systems) and computer program products according to the embodiments of the present application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing terminal devices to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal devices, create means for implementing the functions specified in the flowchart illustrations and / or block diagrams. Figure 1 one or more functions specified in the flowchart illustrations and / or block diagrams. Figure 1 one or more functions specified in the flowchart illustrations and / or block diagrams.

[0267] These computer program instructions can also be stored in a computer-readable memory that can direct a computer or other programmable data processing terminal devices to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instructions which implement the function specified in the flowchart illustrations and / or block diagrams. Figure 1 one or more functions specified in the flowchart illustrations and / or block diagrams. Figure 1 one or more functions specified in the flowchart illustrations and / or block diagrams.

[0268] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal devices, such that a series of operational steps are performed on the computer or other programmable terminal devices to produce a computer implemented process so that the instructions which execute on the computer or other programmable terminal devices provide steps for implementing the functions specified in the flowchart illustrations and / or block diagrams. Figure 1 one or more functions specified in the flowchart illustrations and / or block diagrams. Figure 1 one or more functions specified in the flowchart illustrations and / or block diagrams.

[0269] Although preferred embodiments of the present application have been described, those skilled in the art will be able to make additional modifications and variations to the embodiments without departing from the scope of the present application. Accordingly, the appended claims are intended to encompass all such modifications and variations as falling within the scope of the embodiments of the present application.

[0270] Finally, it is to be understood that the phraseology or terminology such as "first" and "second" etc. used herein is merely intended to differentiate one entity or operation from another entity or operation, without necessarily requiring or implying any actual such relationship or order between such entities or operations. Moreover, the terms "comprising", "including", or any other closure, are intended to cover the non-exclusive inclusion such that a process, method, article, or apparatus that comprises a list of elements does not include those elements alone but can include other elements not expressly listed or even include elements inherent in such process, method, article, or apparatus. Without more limitations, the element defined by the statement "comprising a" does not exclude the presence of additional identical elements in the process, method, article, or apparatus including the element.

[0271] The above describes in detail the matching motor control method and the semiconductor process equipment provided by the present application. The principles and implementation modes of the present application are described by using specific examples. The above description of the embodiments is only used to help understand the method of the present application and its core idea. Meanwhile, for those skilled in the art, the specific implementation modes and application ranges can be changed according to the idea of the present application. In summary, the content of the specification should not be understood as a limitation of the present application.

Claims

1. A method of controlling a matcher motor, characterized by, The application is applied to a semiconductor process equipment, the semiconductor process equipment includes a radio frequency matcher, a timer, the radio frequency matcher includes a radio frequency matcher motor, the timer corresponds to a clock frequency value, the method includes: Obtaining the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotation speed to the peak rotation speed; According to the acceleration step number, the radio frequency matcher motor is controlled to run to the target speed, wherein the target speed is less than or equal to the peak rotation speed; After the radio frequency matcher motor reaches the target speed, the input impedance is obtained; When the input impedance is inconsistent with the preset characteristic impedance, the starting rotation speed is updated using the target speed, and the step of obtaining the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotation speed to the peak rotation speed is continued to be executed until the input impedance is consistent with the preset characteristic impedance; Wherein, the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotation speed to the peak rotation speed includes: The acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotation speed to the peak rotation speed is calculated, and the acceleration step number is calculated according to the clock frequency value; Obtaining the acceleration step number.

2. The method of claim 1, wherein, The radio frequency matcher motor corresponds to a step angle;The calculation of the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotation speed to the peak rotation speed includes: Based on the clock frequency value, the step angle and the preset acceleration, the initial count value corresponding to the preset acceleration is calculated; The ratio of the clock frequency value and the starting rotation speed is calculated to obtain a first count value; The ratio of the clock frequency value and the peak rotation speed is calculated to obtain a second count value; According to the first count value and the initial count value, a first step number is determined; According to the second count value and the initial count value, a second step number is determined; The difference between the first step number and the second step number is calculated to obtain the acceleration step number.

3. The method of claim 2, wherein, The calculation of the initial count value corresponding to the preset acceleration based on the clock frequency value, the step angle and the preset acceleration includes: The clock frequency value, the step angle and the preset acceleration are substituted into the preset initial timer count value formula to obtain the initial count value;The preset initial timer count value formula is: Wherein, C0 is the initial count value, α is the step angle, A is the preset acceleration, and tt is the preset period.

4. The method of claim 2, wherein, The determination of the first step number according to the first count value and the initial count value includes: Determine whether the initial count value is greater than the first count value; When the initial count value is greater than the first count value, the initial step number corresponding to the initial count value is determined as the first step number; When the initial count value is not greater than the first count value, the iteration count value is obtained based on the preset iteration function with the preset iteration number as the input; Determine whether the iteration count value is greater than the first count value; determining the preset iteration number as the first step number when the iteration count value is greater than the first count value; incrementing the preset iteration number and updating the iteration count value when the iteration count value is not greater than the first count value.

5. The method of claim 2, wherein, The determining a second step number according to the second count value and the initial count value comprises: determining whether the initial count value is greater than the second count value; determining the initial step number corresponding to the initial count value as the second step number when the initial count value is greater than the second count value; obtaining an iteration count value based on a preset iteration function with the preset iteration number as input when the initial count value is not greater than the second count value; determining whether the iteration count value is greater than the second count value; determining the preset iteration number as the second step number when the iteration count value is greater than the second count value; incrementing the preset iteration number and updating the iteration count value when the iteration count value is not greater than the second count value.

6. The method according to claim 4 or 5, characterized in that, The iteration function comprises an acceleration state iteration sub-function and a deceleration state iteration sub-function. The acceleration state iteration sub-function is: The deceleration state iteration sub-function is: wherein Cn is an iteration count value, Cn-1 is a previous iteration count value, and n is the preset iteration number.

7. The method according to claim 4 or 5, characterized in that, The method further comprises: determining the preset iteration number as an acceleration sequence value; establishing a first mapping relationship between the acceleration step number and the acceleration sequence value and a second mapping relationship between the initial rotation speed and the acceleration sequence value; generating acceleration sequence information in combination with the first mapping relationship and the second mapping relationship.

8. The method of claim 7, wherein, The obtaining of the acceleration step number of the radio frequency matching device motor under a preset acceleration from the initial rotation speed to the peak rotation speed comprises: querying the second mapping relationship according to the initial rotation speed in the acceleration sequence information to obtain the acceleration sequence value; querying the first mapping relationship according to the acceleration sequence value to obtain the acceleration step number.

9. The method of claim 1, wherein, The controlling of the radio frequency matching device motor to run to the target speed according to the acceleration step number comprises: determining whether the acceleration step number is greater than a preset acceleration step number threshold value, the preset acceleration step number threshold value corresponding to a preset control step number; calculating a difference step number of the acceleration step number and the preset control step number and calculating a third step number corresponding to the preset acceleration step number threshold value when the acceleration step number is greater than the preset acceleration step number threshold value, the third step number being half of the preset acceleration step number threshold value; controlling the radio frequency matching device motor to accelerate to run the third step number from the initial rotation speed to the peak rotation speed; controlling the radio frequency matching device motor to run the difference step number at the peak rotation speed; controlling the radio frequency matching device motor to decelerate to run the third step number to reach the target speed; calculating a fourth step number corresponding to the acceleration step number when the acceleration step number is not greater than the preset acceleration step number threshold value, the fourth step number being half of the acceleration step number; controlling the radio frequency matching device motor to accelerate to run the fourth step number from the initial rotation speed; controlling the radio frequency matching device motor to decelerate to run the fourth step number to reach the target speed.

10. The method according to any one of claims 1 to 5, characterized in that, The initial rotation speed is greater than zero.

11. A semiconductor process apparatus, characterized by comprising: The semiconductor process equipment comprises a radio frequency power source, a radio frequency matcher, a process chamber, and a timer, an input end of the radio frequency matcher is connected with the radio frequency power source, and an output end of the radio frequency matcher is connected with the process chamber; The radio frequency matcher comprises a radio frequency matcher motor; The timer corresponds to a clock frequency value; The semiconductor process equipment further comprises: A controller is configured to acquire an acceleration step number of the radio frequency matcher motor under a preset acceleration from a starting rotating speed to a peak rotating speed, control the radio frequency matcher motor to run to a target speed according to the acceleration step number, wherein the target speed is less than or equal to the peak rotating speed, acquire an input impedance after the radio frequency matcher motor reaches the target speed, and update the starting rotating speed by using the target speed when the input impedance is inconsistent with a preset characteristic impedance, and continue to execute the step of acquiring the acceleration step number of the radio frequency matcher motor under the preset acceleration from the starting rotating speed to the peak rotating speed until the input impedance is consistent with the preset characteristic impedance; The controller is configured to calculate the acceleration step number of the radio frequency matcher motor from the starting rotating speed to the peak rotating speed under the preset acceleration, and the acceleration step number is calculated according to the clock frequency value, and acquire the acceleration step number.

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