Lower electrode shield box and semiconductor process equipment

Abstract

This invention provides a lower electrode shielding box and semiconductor process equipment. The lower electrode shielding box includes a housing, a first connecting block, and an adapter plate. The first connecting block includes a main body and an auxiliary connecting part. The main body passes through the housing and is fixedly connected to it. The auxiliary connecting part is connected to the main body and to the surface of the housing. The adapter plate is detachably connected to the first connecting block and is used to connect an RF matching device. By providing the first connecting block, this invention increases the connection area between the first connecting block and the housing, thereby improving the connection stability between them. Furthermore, under conditions of frequent disassembly and reassembly of the lower electrode shielding box and the RF matching device, the first connecting block is less likely to detach from the housing.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor process equipment, specifically relating to a lower electrode shielding box and semiconductor process equipment. Background Technology

[0002] Semiconductor process equipment typically has a lower electrode shielding box located at the bottom of the lower electrode and reaction chamber. This box houses radio frequency (RF) components such as RF feed pillars to prevent RF leakage. The RF matching unit (MRT) of the semiconductor process equipment is usually mounted on the lower electrode shielding box. During equipment debugging and hardware verification, the MRT needs to be frequently disassembled and reassembled to measure the semiconductor process equipment's capacitance to ground and impedance under different conditions. To extend the lifespan of both the lower electrode shielding box and the MRT, related technologies often employ a connection between the two to facilitate repeated disassembly and reassembly.

[0003] The lower electrode shielding box and the RF matching unit are typically connected by threads. Since the lower electrode shielding box shell is made of aluminum alloy, a wire thread insert is usually embedded inside the shell to connect with the screws, thereby improving connection strength and extending the lifespan of the lower electrode shielding box. However, the walls of the lower electrode shielding box are usually thin, resulting in insufficient insertion depth of the wire thread insert. During repeated disassembly and assembly over a long period, the wire thread insert will gradually come loose, making it impossible to secure the RF matching unit. Utility Model Content

[0004] This invention provides a lower electrode shielding box and semiconductor process equipment, aiming to solve the problem that existing wire thread sleeves are prone to falling off during repeated disassembly and assembly.

[0005] In a first aspect, this application provides a lower electrode shielding box applicable to semiconductor process equipment, comprising:

[0006] shell;

[0007] The first connecting block includes a main body and an auxiliary connecting part. The main body is inserted through the outer shell and fixedly connected to the outer shell. The auxiliary connecting part is connected to the main body and connected to the surface of the outer shell.

[0008] An adapter board, detachably connected to the first connecting block, is used to connect an RF matching unit.

[0009] Optionally, the housing has a first connection hole; the main body is inserted into the first connection hole, and the end of the main body extends to the outside of the first connection hole;

[0010] The auxiliary connection is located on the outside of the housing and is connected to the end of the main body.

[0011] Optionally, the lower electrode shielding box further includes:

[0012] A second connecting block is disposed inside the outer casing. The second connecting block and the first connecting block form a clamping space on both sides of the side wall of the outer casing. The outer casing is partially located within the clamping space. The second connecting block is connected to the first connecting block to clamp the outer casing together.

[0013] Optionally, the lower electrode shielding box further includes:

[0014] A first connector passes through the auxiliary connecting part, the outer shell, and the second connecting block in sequence, and the auxiliary connecting part and the second connecting block are connected by the first connector.

[0015] Optionally, the outer casing is provided with a second connecting hole, the second connecting block is provided with a third connecting hole, the third connecting hole communicates with the second connecting hole, and the first connecting member passes through the third connecting hole and the second connecting hole;

[0016] The second connecting block has a first positioning part on the side surface facing the outer casing;

[0017] The inner wall surface of the outer casing has a second positioning part that matches the first positioning part. The second connecting block and the outer casing cooperate through the first positioning part and the second positioning part so that the second connecting hole corresponds to the third connecting hole.

[0018] Optionally, the second connecting hole is located at the first positioning part position, and the third connecting hole is located at the second positioning part position.

[0019] Optionally, the adapter plate has a through-hole; when the adapter plate is installed on the housing, the orthographic projection of the first clearance hole on the surface of the housing at least covers the orthographic projection of the second connection hole on the surface of the housing, and the first clearance hole is used to allow the first connector to pass through during the assembly and disassembly of the first connector.

[0020] Optionally, the main body has a first threaded hole; the adapter plate has a fourth connecting hole; the first threaded hole communicates with the fourth connecting hole;

[0021] The lower electrode shielding box also includes:

[0022] The second connector is used to pass through the fourth connecting hole and threadedly engage with the first threaded hole to detachably connect the adapter plate to the first connecting block.

[0023] Optionally, the auxiliary connecting portion protrudes from the outer wall surface of the housing;

[0024] The adapter plate has a first groove on the side surface facing the outer shell; the first groove is used to cooperate with the auxiliary connecting part so that the auxiliary connecting part and the adapter plate are fixed in an upper limit direction parallel to the surface of the outer shell.

[0025] Optionally, the first threaded hole extends through the first connecting block;

[0026] The second connecting block also has a through-hole, which communicates with the first threaded hole. The second connecting hole is used for the screw of the second connecting member to pass through.

[0027] Secondly, this application also provides a semiconductor process apparatus having a reaction chamber, an RF matching unit disposed at the bottom of the reaction chamber, and a lower electrode shielding box as described above.

[0028] The outer shell of the lower electrode shielding box is detachably connected to the radio frequency matching unit.

[0029] This utility model has the following beneficial effects:

[0030] The lower electrode shielding box and semiconductor process equipment provided in this embodiment of the utility model install a first connecting block on the outer shell of the lower electrode shielding box to install an adapter plate, and then install an RF matching device. Specifically, the first connecting block includes a main body and an auxiliary connecting part that are interconnected; the main body passes through the outer shell and is fixedly connected to the outer shell, and the auxiliary connecting part is connected to the surface of the outer shell. In this way, the first connecting block can simultaneously connect to the holes in the outer shell and to the surface of the outer shell, thereby increasing the connection area between the first connecting block and the outer shell, thereby improving the connection stability between the first connecting block and the outer shell, and making it less likely to fall out of the outer shell under conditions of frequent disassembly and reassembly of the RF matching device. Attached Figure Description

[0031] Figure 1 This is a schematic diagram illustrating the connection state between a lower electrode shielding box and an RF matching device in a related technology.

[0032] Figure 2 for Figure 1 A magnified view of region A in the image;

[0033] Figure 3 This is a schematic diagram showing the connection state between the lower electrode shielding box and the radio frequency matching device provided by this utility model.

[0034] Figure 4 for Figure 3 A magnified view of region B in the image;

[0035] Figure 5A A schematic diagram of step S21 in the process of the lower electrode shielding box and radio frequency matching device provided by this utility model;

[0036] Figure 5B A schematic diagram of step S22 in the disassembly process of the lower electrode shielding box and the radio frequency matching device provided by this utility model;

[0037] Figure 6A A schematic diagram of step S31 of the disassembly process of the lower electrode shielding box and the radio frequency matching device provided by this utility model;

[0038] Figure 6B This is a schematic diagram of step S32 in the disassembly process of the lower electrode shielding box and the radio frequency matching device provided by this utility model. Detailed Implementation

[0039] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] It is understood that the specific embodiments and accompanying drawings described herein are merely for explaining the present invention and are not intended to limit the present invention.

[0041] It is understood that, without conflict, the various embodiments of this utility model and the features thereof can be combined with each other.

[0042] It is understood that, for ease of description, the accompanying drawings of this utility model only show the parts related to the embodiments of this utility model, while the parts unrelated to the embodiments of this utility model are not shown in the drawings.

[0043] It is understood that, without conflict, the functions and steps marked in the flowcharts and block diagrams of the embodiments of this utility model may occur in a different order than that marked in the accompanying drawings.

[0044] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this utility model, and the utility model is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of this utility model, and these modifications and improvements are also considered to be within the protection scope of this utility model.

[0045] like Figure 1 and Figure 2As shown, in related technologies, the main components between the lower electrode shielding box 05 and the RF matching device 06 include: an adapter plate 01, a wire threaded sleeve 02, a washer 03, and a non-removable screw 04. The wire threaded sleeve 02 is embedded within the outer shell of the lower electrode shielding box 05; the adapter plate 01 has a through hole through which the non-removable screw 04 passes and is tightened with the wire threaded sleeve 02, thus fixing the adapter plate 01 to the outer shell; the washer 03 is located between the screw head of the non-removable screw 04 and the opposing surface of the adapter plate 01 to improve the sealing at the connection between the non-removable screw 04 and the adapter plate 01; the adapter plate 01 is used to connect to the RF matching device 06, thereby mounting the RF matching device 06 onto the lower electrode shielding box 05. Figure 1 As shown, in order to avoid other structures and facilitate the load-bearing of the adapter plate 01, it is usually connected to the side of the lower electrode shielding box 05, so that the matching device can be mounted on the side of the lower electrode shielding box 05 using the adapter plate 01, thereby making the force direction of the adapter plate 01 consistent with its extension direction, reducing the material fatigue risk of the adapter plate 01.

[0046] Since the outer shell of the lower electrode shielding box 05 is made of thin aluminum alloy plate, specifically, aluminum plate with a thickness of 4mm, in order to ensure that the screw 04 can be screwed into the wire thread insert 02 normally without coming out, the wire thread insert 02 must not protrude from the surface of the outer shell. Therefore, the length of the wire thread insert 02 embedded in the outer shell needs to be less than the thickness of the outer shell. This results in the connection area between the wire thread insert 02 and the outer shell being too small and less than the standard embedding depth of the wire thread insert 02. Consequently, during long-term repeated disassembly and assembly, the wire thread insert 02 is prone to coming out of the outer shell due to unstable connection.

[0047] To address the aforementioned technical issues, this embodiment provides a lower electrode shielding box, which can be applied to semiconductor process equipment, specifically for protecting radio frequency components and shielding radio frequency signals radiated outward by the radio frequency components.

[0048] Please refer to Figure 3 and Figure 4 The lower electrode shielding box includes a first connecting block 1, an adapter plate 2, and a housing 3. The first connecting block 1 includes a main body 11 and an auxiliary connecting part 12. The main body 11 passes through the housing 3 and is fixedly connected to it. The auxiliary connecting part 12 is connected to the main body 11 and is attached to the surface of the housing 3. The adapter plate 2 is detachably connected to the first connecting block 1 and is used to connect an RF matching device 4, allowing the RF matching device 4 to be detachably mounted on the lower electrode shielding box.

[0049] The first connecting block 1 proposed in this embodiment can be connected to both the holes in the outer shell 3 and the surface of the outer shell 3. Obviously, the connection area between the first connecting block 1 and the outer shell 3 is much larger than the connection area between the wire thread sleeve and the outer shell 3 in the related technology. Therefore, compared with the related technical solutions, the connection relationship between the first connecting block 1 and the outer shell 3 proposed in this embodiment is more stable. Thus, under the condition of frequent disassembly and assembly of the RF matching device 4, it is less likely to fall out of the outer shell 3, thereby enabling the first connecting block 1, the outer shell 3 of the lower electrode shielding box, and the RF matching device 4 to have a longer service life.

[0050] For example, the first connecting block 1 is made of steel, which has good material strength and wear resistance, thus providing good load-bearing capacity and adapting to multiple disassembly and installation.

[0051] In some embodiments, such as Figure 4 As shown, the outer casing 3 has a first connecting hole 31; the main body 11 is inserted into the first connecting hole 31, and the end of the main body 11 extends to the outside of the first connecting hole 31. The auxiliary connecting part 12 is located outside the first connecting hole 31 and is connected to the end of the main body 11. Specifically, the auxiliary connecting part 12 is connected to the outer peripheral surface of the end of the main body 11.

[0052] like Figure 3 As shown, under the weight of the RF matching unit 4, it exerts a downward force on the adapter plate 2, which in turn causes the first connecting block 1 to be subjected to a bending moment. Through force analysis, it can be seen that this bending moment causes the first connecting block 1 to be subjected to both outward and downward tension. Specifically, the supporting effect of the hole wall structure of the first connecting hole 31 on the main body 11 can offset the downward tension. Moreover, since the auxiliary connecting part 12 is connected to the surface of the outer shell 3, the surface of the outer shell 3 of the lower electrode shielding box will generate a supporting force perpendicular to the surface of the outer shell 3 due to its contact with the auxiliary connecting part 12, thereby offsetting the outward tension on the first connecting block 1. It can be seen that the bending moment of the first connecting block 1 due to the weight of the RF matching unit 4 can be distributed to the main body 11 and the auxiliary connecting part 12, thereby reducing the local pressure generated at the connection between the first connecting block 1 and the outer shell 3. Specifically, it can prevent the inner peripheral wall of the first connecting hole 31 in the outer shell 3 from being damaged due to excessive force.

[0053] For example, the auxiliary connection portion 12 may include a plurality of connection ears protruding from the periphery of the main body portion 11.

[0054] For example, the auxiliary connection portion 12 may also include a connection ring portion disposed around the outer periphery of the main body portion 11.

[0055] In some embodiments, such as Figure 4As shown, the lower electrode shielding box also includes a second connecting block 5. The second connecting block 5 is disposed inside the outer shell 3, that is, on the side of the outer shell 3 away from the first connecting block 1. The second connecting block 5 and the first connecting block 1 form a clamping space on both sides of the side wall of the outer shell 3, and the outer shell 3 is partially located within the clamping space; the second connecting block 5 is connected to the first connecting block 1 to jointly clamp the outer shell 3, thereby allowing the first connecting block 1 and the second connecting block 5 to be connected and fixed to the outer shell 3.

[0056] In some embodiments, the lower electrode shielding box further includes a first connector 6. The first connector 6 passes through the auxiliary connecting part 12, the outer shell 3, and the second connecting block 5 in sequence. The auxiliary connecting part 12 and the second connecting block 5 are connected by the first connector 6 so that the first connecting block 1 and the second connecting block 5 can jointly clamp the outer shell 3.

[0057] Furthermore, in some embodiments, the outer casing 3 is provided with a second connecting hole 32, and the second connecting block 5 is provided with a third connecting hole 51, and the third connecting hole 51 communicates with the second connecting hole 32. The first connecting member 6 is used to pass through the second connecting hole 32 and the third connecting hole 51 to connect the outer casing 3 and the second connecting block 5.

[0058] Furthermore, the second connecting block 5 has a first positioning part 53 on the side facing the wall of the outer casing 3, and a second positioning part 33 that matches the first positioning part 53 on the inner wall of the outer casing 3. For example, the second positioning part 33 can correspond in shape to the first positioning part 53. The second connecting block 5 and the outer casing 3 cooperate through the first positioning part 53 and the second positioning part 33 to make the second connecting hole 32 correspond to the third connecting hole 51. Thus, the alignment between the first positioning part 53 and the second positioning part 33 enables the second connecting block 5 to be pre-positioned with the outer casing 3, thereby improving the installation efficiency of the second connecting block 5.

[0059] Furthermore, in some embodiments, the second connecting hole 32 is located at the position of the first positioning part 53, and the third connecting hole 51 is located at the position of the second positioning part 33. This facilitates the manufacturing process of making the first positioning part 53 and the second connecting hole 32 into a structure with high coaxiality. Similarly, it also facilitates the manufacturing process of making the second positioning part 33 and the third connecting hole 51 into a structure with high coaxiality. Thus, after the first positioning part 53 and the second positioning part 33 are connected, the second connecting hole 32 and the third connecting hole 51 can be aligned with each other, thereby facilitating the first connecting member 6 to pass through the second connecting hole 32 and the third connecting hole 51, and avoiding interference between the first connecting member 6 and the second connecting hole 32 and the third connecting hole 51.

[0060] For example, the first positioning part 53 can be a columnar groove coaxially disposed with the second connecting hole 32, and the second positioning part 33 can be a columnar protrusion coaxially disposed with the third connecting hole 51.

[0061] Alternatively, the first positioning part 53 may be a columnar protrusion coaxially disposed with the second connecting hole 32, and the second positioning part 33 may be a columnar groove coaxially disposed with the third connecting hole 51.

[0062] In some embodiments, the main body 11 of the first connecting block 1 has a first threaded hole 111; the adapter plate 2 has a fourth connecting hole 21. The first threaded hole 111 is disposed opposite to the fourth connecting hole 21 and connected to the adapter plate 2 by a screw, that is, the screw can pass through the fourth connecting hole 21 and be threadedly connected to the first threaded hole 111, thereby making the adapter plate 2 detachably connected to the first connecting block 1. Moreover, as Figure 2 and Figure 4 As shown, compared to the wire thread insert used in related technologies, the depth of the first threaded hole 111 in this embodiment is not limited by the thickness of the side wall of the outer shell 3, but depends on the thickness of the first connecting block 1, thereby improving the connection strength between the screw and the first connecting block 1.

[0063] For example, the third connecting hole 51 can be a threaded hole, and correspondingly, the first connecting member 6 can be a screw to be threadedly connected to the third connecting hole 51. In this way, there is no need to create a threaded hole or embed a wire thread insert in the housing 3; only a through hole for the screw to pass through is required, thereby reducing the risk of damage to the housing 3 when assembling or disassembling the first connecting block 1 from the housing 3. Specifically, the length of the first connecting member 6 is at least sufficient to pass through the auxiliary connecting part 12 and the housing 3, and extend to the second connecting block 5.

[0064] For example, the auxiliary connection part 12 has a through-hole 121, which communicates with the second connection hole 32, allowing the first connector 6 to pass through the fifth connection hole 121 and the second connection hole 32. In this way, the auxiliary connection part 12 can be detachably connected to the housing 3 by screws, allowing replacement of the first connector 1 in case of accidental damage. Furthermore, during the assembly and disassembly of the RF matching unit 4 from the housing 3, the screws connecting the adapter plate 2 and the first connector 1 may become stuck due to excessive downward lateral force. In this case, the first connector 1 and the adapter plate 2 can be removed together by unscrewing the screws passing through the fifth connection hole 121 and the second connection hole 32. This allows the matching unit to be removed even if the first connector 1 is stuck with the adapter plate 2, and the damaged first connector 1 can be replaced promptly.

[0065] Furthermore, in some embodiments, the adapter plate 2 has a through-hole 22. When the adapter plate 2 is installed on the housing 3, the orthographic projection of the first clearance hole 22 on the surface of the housing 3 at least covers the orthographic projection of the second connection hole 32 on the surface of the housing 3. In this way, the opening of the second connection hole 32 can be fully exposed through the first clearance hole 22. The first clearance hole 22 is used to allow the first connector 6 to pass through during the assembly and disassembly of the first connector 6, so that the first connector 6 can be removed through the first clearance hole 22 without removing the adapter plate 2.

[0066] In other feasible embodiments, the lower electrode shielding box further includes nuts disposed on the side of the housing 3 away from the first connecting block 1. The nuts are used to be threadedly connected to the first connecting members 6 in a one-to-one correspondence, so as to be clamped together with the first connecting blocks 1 on both sides of the side wall of the housing 3. In other words, the aforementioned second connecting block 5 can be replaced by the same number of nuts as the first connecting members 6.

[0067] In other feasible embodiments, the auxiliary connecting part 12 and the outer shell 3 can also be connected by welding. However, it should be noted that the outer shell 3 of the lower electrode shielding box is usually made of aluminum, while the first connecting block 1 can be made of steel. If the materials of the first connecting block 1 and the outer shell 3 of the lower electrode shielding box are different, welding the two together may result in a weak connection.

[0068] Alternatively, in some other feasible embodiments, the auxiliary connection part 12 and the outer shell 3 can be connected by riveting.

[0069] In some embodiments, the first connecting hole 31 is disposed through the side plate of the housing 3; the first threaded hole 111 is disposed through the first connecting block 1. The second connecting block 5 also has a through-hole 52, which corresponds to and communicates with the first threaded hole 111. The second connecting hole 52 is used for the second connecting member 7 that passes through the first connecting block 1 to pass through it. In this way, if the second connecting member 7 is too long, it can be ensured that the second connecting member 7 will not interfere with the second connecting block 5, and the accuracy requirements for the length of the second connecting member 7 can be reduced, and the assembly difficulty can be reduced.

[0070] In some embodiments, such as Figure 4As shown, the auxiliary connecting part 12 protrudes from the outer wall surface of the housing 3. A first groove is provided on the surface of the adapter plate 2 facing the housing 3. The first groove is used to mate with the auxiliary connecting part 12, so that the auxiliary connecting part 12 and the adapter plate are fixed in a direction parallel to the housing surface. Thus, during assembly, the second connecting block 5 is pre-positioned by the alignment between the auxiliary connecting part 12 and the first groove. Furthermore, the portion of the auxiliary connecting part 12 that abuts against the first groove in the vertical direction can also bear a portion of the weight of the adapter plate. Specifically, the shape of the first groove can correspond to the outer peripheral contour shape of the first connecting block 1, so that the first connecting block 1 can be inserted into the first groove.

[0071] Based on the lower electrode shielding box provided above, this application also provides an installation process for the lower electrode shielding box and the RF matching unit, which specifically includes:

[0072] S11: Place the first connecting block 1 and the second connecting block 5 on the outer and inner sides of the outer casing 3, respectively;

[0073] S12: Insert the first positioning part 53 on the second connecting block 5 into the second positioning part 33 on the surface of the outer casing 3 to position the second connecting block 5, so that the second connecting hole 32 in the outer casing 3 and the third connecting hole 51 in the second connecting block 5 can be aligned and communicate with each other.

[0074] S13: Insert the main body 11 of the first connecting block 1 into the first connecting hole 31, and align the fifth connecting hole 121 in the auxiliary connecting part 12 and the second connecting hole 32 in the outer shell 3;

[0075] S14: Obtain screws in the same number as the second connecting holes 32, use them as first connectors 6, and make the first connectors 6 pass through the second connecting holes 32 one by one. Tighten the first connectors 6 to connect them with the third connecting holes 51 to connect and lock the second connecting block 5 and the first connecting block 1, so that the second connecting block 5 and the first connecting block 1 are clamped on both sides of the side wall of the housing 3; for example, two 7M4 countersunk screws can be used.

[0076] S15: Connect and fix the RF matching unit 4 to the adapter board 2 with screws;

[0077] S16: Align the first groove of the adapter plate 2 with the first connecting block 1, and insert the first connecting block 1 into the first groove to align the adapter plate 2 and the first connecting block 1, so that the fourth connecting hole 21 in the adapter plate 2 is aligned with the first threaded hole 111 in the first connecting block 1 and they communicate with each other, and the first clearance hole 22 is aligned with the fifth connecting hole 121 and they communicate with each other.

[0078] S17: Obtain a long screw to be used as the second connector 7; and make the second connector 7 pass through the fourth connecting hole 21, and screw the second connector 7 into the first threaded hole 111 to fix the adapter plate 2 onto the first connecting block 1; for example, a 6M5×16 screw can be used.

[0079] Furthermore, this application also provides a disassembly process for the adapter board under normal conditions and a disassembly process for the adapter board under fault conditions. Please refer to... Figure 5A and Figure 5B Under normal circumstances, the disassembly process of the adapter board includes:

[0080] S21: Loosen and remove the second connector 7 that passes through the fourth connecting hole 21;

[0081] S22: Remove the adapter board 2 from the first connecting block 1 to detach the adapter board 2 from the RF matching unit 4 connected to the adapter board 2.

[0082] After repeated disassembly and assembly, or after incorrect operation, the second connector 7 may experience excessive downward lateral force, causing excessive friction between it and the inner surface of the first threaded hole 111. This can lead to the second connector 7 becoming stuck in the first threaded hole 111, preventing the adapter plate 2 and the first connecting block 1 from being separated. In this state, please refer to... Figure 6A and Figure 6B The disassembly process of the adapter board includes:

[0083] S31: Loosen and remove the first connector 6 in the fifth connecting hole 121 through the first clearance hole 22, so that the second connecting block 5 is disconnected from the first connecting block 1, while the first connecting block 1 and the adapter plate 2 remain fixed.

[0084] S32: Remove the first connector block 1 and the adapter board 2 together to remove the RF matching unit 4.

[0085] Furthermore, after step S32 is completed, i.e. after the RF matching unit 4 is removed, the operator can replace the first connecting block 1 or replace the first connecting block 1 and the adapter board 2 as a whole to continue the subsequent disassembly and assembly work between the lower electrode shielding box and the RF matching unit.

[0086] As another technical solution, this embodiment also provides a semiconductor process apparatus, which includes a reaction chamber, an RF matching unit 4, and a lower electrode shielding box as described above. The outer shell 3 of the lower electrode shielding box is detachably connected to the RF matching unit 4. Specifically, the lower electrode shielding box is used to house RF components, and it plays a role in protecting the RF components and preventing RF leakage in the semiconductor process apparatus.

[0087] It should be noted that the shape and volume of the lower electrode shielding box significantly affect the lower electrode's capacitance to ground and impedance, thus impacting the actual output power of the lower electrode. This application, therefore, uses... Figure 2 Based on the relevant technical solutions shown, the shape of the lower electrode shielding box has been modified. Therefore, the technicians tested and compared the ground capacitance and impedance of the RF components in the relevant technologies and the RF components of the semiconductor process equipment proposed in this application, and obtained the data results shown in Table 1 below. As can be seen from the data results shown in Table 1, the ground capacitance and impedance of the RF components proposed in this application are almost unchanged compared with the relevant technical solutions. Accordingly, the impact of the lower electrode shielding box of this application on the power output performance of existing RF components is negligible. Therefore, it can be directly applied to existing lower electrode shielding boxes without redesigning the lower electrode shielding box or RF components, and without adjusting the existing RF parameters.

[0088] Table 1. Detection data of ground capacitance and impedance of the RF components of the relevant technical solutions and this utility model.

[0089]

[0090] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this utility model, and the utility model is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of this utility model, and these modifications and improvements are also considered to be within the protection scope of this utility model.

Claims

1. A lower electrode shield box applied to a semiconductor process equipment; characterized in that, include: shell; The first connecting block includes a main body and an auxiliary connecting part. The main body is inserted through the outer shell and fixedly connected to the outer shell. The auxiliary connecting part is connected to the main body and connected to the surface of the outer shell. An adapter board, detachably connected to the first connecting block, is used to connect an RF matching unit.

2. The lower electrode shielding box according to claim 1, characterized in that, The outer casing has a first connection hole; the main body is inserted into the first connection hole, and the end of the main body extends to the outside of the first connection hole; The auxiliary connection is located on the outside of the housing and is connected to the end of the main body.

3. The lower electrode shield canister of claim 2, wherein, The lower electrode shielding box also includes: A second connecting block is disposed inside the outer casing. The second connecting block and the first connecting block form a clamping space on both sides of the side wall of the outer casing. The outer casing is partially located within the clamping space. The second connecting block is connected to the first connecting block to clamp the outer casing together.

4. The lower electrode shield canister of claim 3, wherein, The lower electrode shielding box also includes: A first connector passes through the auxiliary connecting part, the outer shell, and the second connecting block in sequence, and the auxiliary connecting part and the second connecting block are connected by the first connector.

5. The lower electrode shielding box according to claim 4, characterized in that, The outer shell is provided with a second connecting hole, the second connecting block is provided with a third connecting hole, the third connecting hole communicates with the second connecting hole, and the first connecting member passes through the third connecting hole and the second connecting hole; The second connecting block has a first positioning part on the side surface facing the outer casing; The inner wall surface of the outer casing has a second positioning part that matches the first positioning part. The second connecting block and the outer casing cooperate through the first positioning part and the second positioning part so that the second connecting hole corresponds to the third connecting hole.

6. The lower electrode shielding box according to claim 5, characterized in that, The second connecting hole is located at the position of the first positioning part, and the third connecting hole is located at the position of the second positioning part.

7. The lower electrode shielding box according to claim 5, characterized in that, The adapter plate has a through-hole; when the adapter plate is installed on the housing, the orthographic projection of the first clearance hole on the surface of the housing at least covers the orthographic projection of the second connection hole on the surface of the housing, and the first clearance hole is used to allow the first connector to pass through during the assembly and disassembly of the first connector.

8. The lower electrode shielding box according to claim 3, characterized in that, The main body has a first threaded hole; the adapter plate has a fourth connecting hole; the first threaded hole communicates with the fourth connecting hole. The lower electrode shielding box also includes: The second connector is used to pass through the fourth connecting hole and threadedly engage with the first threaded hole to detachably connect the adapter plate to the first connecting block.

9. The lower electrode shielding box according to claim 7, characterized in that, The auxiliary connection portion protrudes from the outer wall surface of the outer casing; The adapter plate has a first groove on the side surface facing the outer shell; the first groove is used to cooperate with the auxiliary connecting part so that the auxiliary connecting part and the adapter plate are fixed in an upper limit direction parallel to the surface of the outer shell.

10. The lower electrode shield canister of claim 8, wherein, The first threaded hole is provided to penetrate the first connecting block; The second connecting block also has a through-hole, which communicates with the first threaded hole. The second connecting hole is used for the screw of the second connecting member to pass through.

11. A semiconductor process apparatus, characterized by comprising: It has a reaction chamber, an RF matching unit disposed at the bottom of the reaction chamber, and a lower electrode shielding box as described in any one of claims 1-10; The outer shell of the lower electrode shielding box is detachably connected to the radio frequency matching unit.

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