A multi-reference-point high-precision mask patch device

Abstract

The present invention relates to the technical field of mask scribing, and proposes a multi-reference-point high-precision mask pasting device, which includes a frame, a first adjustment assembly, a support column and a first pushing member provided on the frame, a camera provided on the first adjustment assembly, a second adjustment assembly provided at the top of the support column, a pressing plate provided on the second adjustment assembly, a support table provided at the top of the first pushing member, a third adjustment assembly provided on the support table, the third adjustment assembly is located below the mask, the mask is located between the pressing plate and the second adjustment assembly, the paste is located between the third adjustment assembly and the mask, the pressing plate and the mask are capable of moving in the XZ directions and rotating about the Y axis, the paste is finely adjusted in the XYZ directions by means of the third adjustment assembly, there are two cameras for positioning the position of the mask, and the paste is attached to the mask by means of the third adjustment assembly. Through the above technical solution, the problem of low fitting accuracy of the equipment in the related art is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of mask scribing, and specifically, to a multi-reference-point high-precision mask patch device. Background Art

[0002] With the continuous improvement of living standards, people's pursuit of various electronic and electrical products is increasingly towards miniaturization for easy carrying and placement. However, the traditional method of using perforated and inserted electronic components can no longer reduce the product volume; for the more complete functions of electronic products, especially large-scale and highly integrated ICs, the precision requirements are getting higher and higher. Among them, for the 3*5 size photomask used in the IC industry, a pair of patches need to be attached to the mask to improve the positioning accuracy. This 3*5 photomask is a future growth point of the company.

[0003] The existing bonding equipment is self-developed by the company, and there are potential problems such as aging, low bonding accuracy, and poor adjustability of the equipment. Therefore, it is necessary to add another device with higher precision and more convenient operation. Summary of the Invention

[0004] The present invention provides a multi-reference-point high-precision mask patch device, which solves the problem of low bonding accuracy of the equipment in the related art.

[0005] The technical solution of the present invention is as follows: A multi-reference-point high-precision mask patch device includes a frame, a first adjustment component, a support column, and a first pushing member provided on the frame, a camera provided on the first adjustment component, a second adjustment component provided at the top of the support column, a pressing plate provided on the second adjustment component, a support table provided at the top of the first pushing member, a third adjustment component provided on the support table, the third adjustment component being located below the mask, the mask being located between the pressing plate and the second adjustment component, the patch being located between the third adjustment component and the mask, the camera being capable of moving in three directions of space XYZ by means of the first adjustment component, the pressing plate and the mask being capable of moving in the XZ direction and rotating around the Y axis by means of the second adjustment component, the patch being capable of performing fine adjustment in the XYZ directions by means of the third adjustment component, the third adjustment component being capable of moving in the Y direction by means of the first pushing member, there being two cameras and they being always at the same height, and the patch being attached to the mask by means of the third adjustment component.

[0006] As a further technical solution, there are two first adjustment components and they are arranged in one-to-one correspondence with the two cameras. The two cameras do not interfere with each other by means of the corresponding first adjustment components. The pressing plate is provided with a groove, and the marking points on the mask are located within the projection of the groove. The camera is adjusted to be directly above the groove and is used to capture the marking points on the mask.

[0007] As a further technical solution, the second adjustment component includes a second clamping member and a second fine adjustment member. The second clamping member includes a second clamping seat and a second pushing member. The mask plate is clamped between the second clamping seat and the second pushing member. The second pushing member is arranged on the second clamping seat. A support column is arranged on the second clamping seat. The mask plate is clamped between the support column and the pressing plate. The second fine adjustment member includes a second bottom plate, a second XZ adjustment structure and a rotating structure. The rotating structure includes a first turntable and a second turntable. The second turntable is rotatably arranged on the first turntable. The first turntable is connected with a turntable pushing member. The second turntable has a convex block. The pushing end of the turntable pushing member pushes the convex block. The second bottom plate is arranged on the support column. The second XZ adjustment structure is arranged on the second bottom plate. The first turntable is arranged on the second XZ adjustment structure. The second clamping seat is arranged on the second turntable.

[0008] As a further technical solution, the second fine adjustment member further includes a plug cock and a turntable locking member. The plug cock is arranged outside the first turntable and its end contacts the other side of the convex block. The turntable locking member is arranged on the first turntable and its end abuts against the second turntable.

[0009] As a further technical solution, there are two third adjustment components which are symmetrically arranged on both sides of the second adjustment component. The third adjustment component includes a third clamping member and a third fine adjustment member. The third clamping member includes a third clamping seat and a third pushing member. The third clamping seat has a bearing surface for placing the patch. The third pushing member cooperates with the third clamping seat to clamp the patch tightly. The third fine adjustment member includes a third XZ adjustment structure and a Y-direction fine adjustment structure. The Y-direction fine adjustment structure includes a fine adjustment base, a fine adjustment pushing member, a fine adjustment platform and a fine adjustment transmission member. The fine adjustment base is arranged on the third XZ adjustment structure. The fine adjustment platform is slidably arranged on the fine adjustment base along the Y direction. The fine adjustment transmission member is rotatably arranged on the fine adjustment base and makes the fine adjustment platform move by the pushing of the fine adjustment pushing member. The third XZ adjustment structure is arranged on the support table.

[0010] As a further technical solution, the fine adjustment transmission member has guide feet in a V shape. The guide feet are rotatably arranged on the fine adjustment base. The fine adjustment platform has a protrusion. The guide feet respectively contact the protrusion and the pushing end of the fine adjustment pushing member.

[0011] As a further technical solution, the first adjustment component includes a first XZ adjustment structure and a Y-direction adjustment structure. The first XZ adjustment structure is arranged on the frame. The Y-direction adjustment structure is arranged on the first XZ adjustment structure. The camera is arranged on the Y-direction adjustment structure.

[0012] As a further technical solution, the structures of the first XZ adjustment structure, the second XZ adjustment structure, and the third XZ adjustment structure are the same, and the output also moves along the X and Z directions.

[0013] The working principle and beneficial effects of the present invention are as follows: Compared with the prior art, the first adjustment component is arranged on the frame, and the camera is arranged on the first adjustment component. Since the first adjustment component can output movements in the X, Y, and Z directions, the camera can thus achieve movements in the X, Y, and Z directions. The camera is used to capture the marks on the mask plate. Since two cameras are provided, at least two mark points at different positions can be set on the mask plate. The heights of the two cameras are always kept consistent. As long as it is detected that the clarity of the marks captured by the cameras is the same, it can be proved that the plate surface of the mask plate is completely parallel to the horizontal plane. Only when the mask plate is in a completely horizontal state, the position of the patch is the best after it is pasted; the support column is arranged on the frame, the second adjustment component is arranged at the top of the support column, and the second adjustment component can output movements along the XZ direction and rotation around the Y axis. The mask plate is arranged at the output end of the second adjustment component. Therefore, the mask plate can perform movements along the XZ direction and rotation around the Y axis. For the camera to capture the marks on the mask plate, the first adjustment component is used for large adjustment. After the camera captures the marks, in order to further ensure the stability and accuracy of the captured marks, the second adjustment component can be used to adjust the position and posture of the mask plate in space so that the mask plate is in the best patch state. The combination form of the first adjustment component and the second adjustment component reduces the requirements for the position adjustment of the camera; the support table is arranged at the pushing end of the first pushing member, the third adjustment component is placed on the support table, and the patch is placed on the third adjustment component. The third adjustment component can achieve fine adjustment along the X, Y, and Z directions. The pushing end of the first pushing member can move in the vertical direction. Since the patch is located below the mask plate, the patch can quickly approach by means of the first pushing member. After the first pushing member reaches the limit position, the position of the patch is then finely adjusted through the third adjustment component, and then the patch is completely pasted on the mask plate. For the mask plate and the patch of the same specification, as long as the initial adjustment is made, the patch can be attached to the mask plate by controlling the movement of the first pushing member. And when the first adjustment component and the second adjustment component no longer change any position, as long as the mask plate is fixedly clamped, the patch can be attached. During attachment, only the first pushing member needs to be pushed; the pressing plate presses the mask plate on the second adjustment component, the patch is located below the mask plate, and the third adjustment component is located below the patch. Description of the Drawings

[0014] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments.

[0015] Figure 1 It is a schematic diagram of the overall structure provided by the present invention;

[0016] Figure 2 Figure 1 Schematic diagram of the structure after hiding the pressing plate;

[0017] Figure 3 Schematic diagram of the structure at the cooperation of the first adjustment component and the camera in the present invention;

[0018] Figure 4 is Figure 3 Schematic diagram of the structure in another direction;

[0019] Figure 5 Schematic diagram of the structure at the cooperation of the second adjustment component, the support column and the mask plate in the present invention;

[0020] Figure 6 is Figure 5 Schematic diagram of the structure in another direction;

[0021] Figure 7 Schematic diagram of the structure at the cooperation of the third adjustment component, the support column and the support table;

[0022] Figure 8 is Figure 7 Schematic diagram of the structure in another direction;

[0023] In the figure:

[0024] 1, frame; 2, first adjustment component; 3, support column; 4, first pushing member; 5, camera; 6, second adjustment component; 7, pressing plate; 8, support table; 9, third adjustment component; 10, mask plate; 11, patch; 12, second clamping seat; 13, second pushing member; 14, support column; 15, second bottom plate; 16, second XZ adjustment structure; 17, first turntable; 18, second turntable; 19, turntable pushing member; 20, convex block; 21, plug cock; 22, turntable locking member; 23, third clamping seat; 24, third pushing member; 25, third XZ adjustment structure; 26, fine adjustment base; 27, fine adjustment pushing member; 28, fine adjustment platform; 29, fine adjustment transmission member; 30, first XZ adjustment structure; 31, Y-direction adjustment structure. Detailed implementation manners

[0025] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0026] Such as Figures 1 to 8As shown in the figure, this embodiment proposes a multi-reference-point high-precision mask 10 patch 11 device, which includes a frame 1, a first adjustment component 2, a support column 3 and a first pushing member 4 provided on the frame 1, a camera 5 provided on the first adjustment component 2, a second adjustment component 6 provided at the top of the support column 3, a pressing plate 7 provided on the second adjustment component 6, a support platform 8 provided at the top of the first pushing member 4, a third adjustment component 9 provided on the support platform 8. The third adjustment component 9 is located below the mask 10, the mask 10 is located between the pressing plate 7 and the second adjustment component 6, and the patch 11 is located between the third adjustment component 9 and the mask 10. The camera 5 realizes movement in the three spatial directions of XYZ with the help of the first adjustment component 2. The pressing plate 7 and the mask 10 realize movement in the XZ direction and rotation around the Y axis with the help of the second adjustment component 6. The patch 11 realizes fine adjustment in the XYZ directions with the help of the third adjustment component 9. The third adjustment component 9 realizes movement in the Y direction with the help of the first pushing member 4. There are two cameras 5 and they are always at the same height. The patch 11 is attached to the mask 10 with the help of the third adjustment component 9.

[0027] In this embodiment, the first adjustment component 2 is arranged on the frame 1, and the camera 5 is arranged on the first adjustment component 2. Since the first adjustment component 2 can output movements in the X, Y, and Z directions, the camera 5 can thus realize movements in the X, Y, and Z directions. The camera 5 is used to capture the marks on the mask plate 10. Since two cameras 5 are provided, at least two mark points at different positions can be arranged on the mask plate 10. The heights of the two cameras 5 are always kept consistent. As long as it is detected that the clarity of the marks captured by the cameras 5 is consistent, it can be proved that the plate surface of the mask plate 10 is completely parallel to the horizontal plane. Only when the mask plate 10 is in a completely horizontal state, the position of the patch 11 is the best after being pasted; the support column 3 is arranged on the frame 1, and the second adjustment component 6 is arranged at the top of the support column 3. The second adjustment component 6 can output movements along the X and Z directions and rotation around the Y axis. The mask plate 10 is arranged at the output end of the second adjustment component 6. Therefore, the mask plate 10 can perform movements along the X and Z directions and rotation around the Y axis. For the capture of the marks on the mask plate 10 by the camera 5, the first adjustment component 2 is used for large adjustment. After the camera 5 captures the marks, in order to further ensure the stability and accuracy of the captured marks, the second adjustment component 6 can be used to adjust the position and posture of the mask plate 10 in space so that the mask plate 10 is in the best state for pasting the patch 11. The combined form of the first adjustment component 2 and the second adjustment component 6 reduces the requirements for adjusting the position of the camera 5; the support table 8 is arranged on the pushing end of the first pushing member 4, the third adjustment component 9 is placed on the support table 8, and the patch 11 is placed on the third adjustment component 9. The third adjustment component 9 can realize fine adjustment in the X, Y, and Z directions. The pushing end of the first pushing member 4 can move in the vertical direction. Since the patch 11 is located below the mask plate 10, the patch 11 can quickly approach by means of the first pushing member 4. After the first pushing member 4 reaches the limit position, the position of the patch 11 is then finely adjusted through the third adjustment component 9, and then the patch 11 is completely pasted on the mask plate 10. For the mask plate 10 and the patch 11 of the same specification, as long as the initial adjustment is made, the patch 11 can be pasted on the mask plate 10 by controlling the movement of the first pushing member 4. And when the first adjustment component 2 and the second adjustment component 6 no longer change any position, as long as the mask plate 10 is fixedly clamped, the patch 11 can be pasted. During pasting, only the first pushing member 4 needs to perform pushing; the pressing plate 7 presses the mask plate 10 on the second adjustment component 6, the patch 11 is located below the mask plate 10, and the third adjustment component 9 is located below the patch 11.

[0028] A multi-reference-point high-precision mask 10 pasting 11 device provided by the present invention can lock the first adjustment component 2 and the second adjustment component 6 after adjusting the position of the mask 10 through the reference points. Then, after adjusting the position of the pasting 11 with the third adjustment component 9, lock the third adjustment component 9. At this time, only the mask 10 and the pasting 11 need to be replaced, and the first ejecting member 4 is used to eject, then the pasting 11 work of the mask 10 can be completed, and the maximum contact area between the pasting 11 and the mask 10 can be ensured. It is applicable to the operation of pasting 11 on a large number of masks 10.

[0029] As Figures 3 to 4 Shown in the figure, based on the same concept as the above-mentioned Embodiment 1, this embodiment also proposes that there are two first adjustment components 2, which are arranged in one-to-one correspondence with two cameras 5. The two cameras 5 do not interfere with each other with the help of the corresponding first adjustment components 2. The pressing plate 7 is provided with a groove, and the marking points on the mask 10 are located within the projection of the groove. The camera 5 is adjusted to be directly above the groove and is used to capture the marking points on the mask 10.

[0030] In this embodiment, since there are two cameras 5, in order to avoid the interference between the two cameras 5, two first adjustment components 2 can be set, and the two cameras 5 are respectively arranged on the corresponding first adjustment components 2. In this way, it is easier to realize the independent operation of the two cameras 5. As long as the two cameras 5 are at the same height, it can be ensured that the clarity of the marks captured by the cameras 5 meets the requirements. Once the clarity of the marks captured by the two cameras 5 meets the requirements, it can be ensured that the mask 10 is in the horizontal plane. The pressing plate 7 is used to press the mask 10 on the second adjustment component 6. In order to avoid the influence of the pressing plate 7 on the capturing action of the camera 5, a groove can be opened on the pressing plate 7, and the marking on the mask 10 is within the projection of the groove, and the groove projects on the mask 10.

[0031] As Figures 5 to 6 Shown in the figure, based on the same concept as the above-mentioned Embodiment 1, this embodiment also proposes that the second adjustment component 6 includes a second clamping member and a second fine adjustment member. The second clamping member includes a second clamping seat 12 and a second ejecting member 13. The mask 10 is clamped between the second clamping seat 12 and the second ejecting member 13. A support column 14 is arranged on the second clamping seat 12, and the mask 10 is clamped between the support column 14 and the pressing plate 7. The second fine adjustment member includes a second bottom plate 15, a second XZ adjustment structure 16 and a rotating structure. The rotating structure includes a first turntable 17 and a second turntable 18. The second turntable 18 is rotatably arranged on the first turntable 17. The first turntable 17 is connected with a turntable ejecting member 19. The second turntable 18 has a convex block 20, and the ejecting end of the turntable ejecting member 19 ejects the convex block 20.

[0032] In this embodiment, the second adjustment assembly 6 includes a second clamping member and a second fine adjustment member. The second clamping member includes a second clamping seat 12 and a second pushing member 13. The mask plate 10 is clamped between the second clamping seat 12 and the second pushing member 13. That is, both the second clamping seat 12 and the second pushing member 13 clamp the vertical side surfaces of the mask plate 10 and are arranged on the symmetric sides. In this way, the movement and rotation of the mask plate 10 on the horizontal plane can be avoided. A support column 14 is arranged on the second clamping seat 12. The bottom surface of the mask plate 10 contacts the support column 14, and the top surface contacts the pressing plate 7. In this way, the mask plate 10 can be completely clamped. In order to achieve fine adjustment of the spatial position of the mask plate 10, the second fine adjustment member includes a second bottom plate 15, a second XZ adjustment structure 16, and a rotation structure. The rotation structure includes a first turntable 17 and a second turntable 18. The second turntable 18 is rotatably arranged on the first turntable 17. The outer edge of the first turntable 17 is connected with a turntable pushing member 19. The second turntable 18 has a convex block 20. The pushing end of the turntable pushing member 19 remains in contact with the convex block 20. When the turntable pushing member 19 pushes the convex block 20, the second turntable 18 rotates relative to the first turntable 17. The first turntable 17 is arranged on the second XZ adjustment structure 16, and the second clamping member is arranged on the second turntable 18.

[0033] As Figures 5 to 6 shown, based on the same concept as the above-mentioned Embodiment 1, this embodiment also proposes that the second fine adjustment member further includes a plug 21 and a turntable locking member 22. The plug 21 is arranged outside the first turntable 17 and the end thereof contacts the other side of the convex block 20. The turntable locking member 22 is arranged on the first turntable 17 and the end thereof abuts against the second turntable 18.

[0034] In this embodiment, in order to enable the second turntable 18 to rotate in the reverse direction, the second fine adjustment member further includes a plug 21 and a turntable locking member 22. The plug 21 is arranged outside the first turntable 17, and the end of the plug 21 also abuts against the outside of the convex block 20. That is, the plug 21 and the turntable pushing member 19 are arranged on the symmetric sides of the convex block 20. The plug 21 and the turntable pushing member 19 cooperate to enable the forward and reverse rotation of the second turntable 18. After the second turntable 18 rotates to a suitable position, the relative locking between the second turntable 18 and the first turntable 17 can be achieved by relying on the turntable locking member 22. The turntable locking member 22 has a threaded portion. A threaded hole is formed on the first turntable 17. The turntable locking member 22 is inserted into the threaded hole. When the turntable locking member 22 rotates, the end of the turntable locking member 22 can abut against the second turntable 18 to achieve the locking of the first turntable 17 relative to the second turntable 18.

[0035] As Figures 7 to 8As shown in the figure, based on the same concept as in the above-mentioned Embodiment 1, this embodiment further proposes that there are two third adjustment components 9, which are symmetrically arranged on both sides of the second adjustment component 6. The third adjustment component 9 includes a third clamping member and a third fine adjustment member. The third clamping member includes a third clamping seat 23 and a third pushing member 24. The third clamping seat 23 has a bearing surface for placing the patch 11. The third pushing member 24 cooperates with the third clamping seat 23 to tightly clamp the patch 11. The third fine adjustment member includes a third XZ adjustment structure 25 and a Y-direction fine adjustment structure. The Y-direction fine adjustment structure includes a fine adjustment base 26, a fine adjustment pushing member 27, a fine adjustment platform 28, and a fine adjustment transmission member 29. The fine adjustment base 26 is arranged on the third XZ adjustment structure 25. The fine adjustment platform 28 is slidably arranged on the fine adjustment base 26 in the Y direction. The fine adjustment transmission member 29 is rotatably arranged on the fine adjustment base 26 and moves the fine adjustment platform 28 by means of the pushing of the fine adjustment pushing member 27. The third XZ adjustment structure 25 is arranged on the support platform 8.

[0036] In this embodiment, since there are two patches 11 and both patches 11 are attached to the mask 10, in order to ensure simultaneous attachment, the number of the third adjustment components 9 can be set to be the same as the number of the patches 11, that is, the number of the third adjustment components 9 is two, and the two third adjustment components 9 are symmetrically arranged on both sides of the second adjustment component 6. The third adjustment component 9 includes a third clamping member and a third fine adjustment member. The third clamping member includes a third clamping seat 23 and a third pushing member 24. A bearing surface is provided on the third clamping seat 23, and the patch 11 is placed on the bearing surface. The third pushing member 24 is arranged on the third clamping seat 23, and the third clamping member can cooperate with the third clamping seat 23 to clamp the vertical side surface of the patch 11, so as to ensure that the patch 11 will not move or rotate in the horizontal plane. The bearing surface then supports the patch 11, so as to ensure that the patch 11 moves with the third adjustment component 9, and after the patch 11 is attached to the mask 10, the patch 11 will naturally separate from the third adjustment component 9. The third fine adjustment member includes a third XZ adjustment structure 25 and a Y-direction fine adjustment structure. The third XZ adjustment structure 25 is used to output fine adjustment movements in the X and Z directions, and the Y-direction fine adjustment structure is used to output fine adjustment movements in the Y direction. The Y-direction fine adjustment structure includes a fine adjustment base 26, a fine adjustment pushing member 27, a fine adjustment platform 28, and a fine adjustment transmission member 29. The fine adjustment base 26 is arranged on the third XZ adjustment structure 25. The fine adjustment platform 28 is slidably arranged on the fine adjustment base 26 in the Y direction. The fine adjustment pushing member 27 is arranged on the outer edge of the fine adjustment base 26. The fine adjustment transmission member 29 is arranged on the fine adjustment base 26 and is used to transmit power to the fine adjustment platform 28, so that the fine adjustment pushing member 27 can be arranged in other directions, thereby avoiding interference with the attachment operation of the patch 11.

[0037] As Figures 7 to 8As shown, based on the same concept as in the above-mentioned Embodiment 1, this embodiment also proposes that the fine-tuning conduction member 29 has guide feet in a V shape. The guide feet are rotatably arranged on the fine-tuning base 26. The fine-tuning platform 28 has protrusions, and the guide feet are respectively in contact with the protrusions and the pushing end of the fine-tuning pushing member 27.

[0038] In this embodiment, in order to further realize the arrangement of the fine-tuning pushing member 27 in other directions, the fine-tuning conduction member 29 can be selected to have guide feet in a V shape. The guide feet are rotatably arranged on the fine-tuning base 26. The fine-tuning platform 28 is provided with protrusions, and both ends of the guide feet are in contact with the fine-tuning platform 28 and the pushing end of the fine-tuning pushing member 27 respectively. When the included angle of the V-shaped part in the guide feet is relatively large, the fine-tuning pushing member 27 can be placed in a plane with a large included angle in the Y direction.

[0039] As Figures 3 to 4 shown, based on the same concept as in the above-mentioned Embodiment 1, this embodiment also proposes that the first adjustment assembly 2 includes a first XZ adjustment structure 30 and a Y-direction adjustment structure 31. The first XZ adjustment structure 30 is arranged on the frame 1, the Y-direction adjustment structure 31 is arranged on the first XZ adjustment structure 30, and the camera 5 is arranged on the Y-direction adjustment structure 31.

[0040] In this embodiment, in order to realize the position adjustment of the camera 5, the first adjustment assembly 2 includes a first XZ adjustment structure 30 and a Y-direction adjustment structure 31. The Y-direction adjustment structure 31 can output a movement along the Y direction. The camera 5 is arranged at the output end of the Y-direction adjustment structure 31. The first XZ adjustment structure 30 can output movements along the X and Z directions. The Y-direction adjustment structure 31 is arranged on the first XZ adjustment structure 30, and the movements in the X, Y, and Z directions do not interfere with each other.

[0041] As Figures 3 to 8 shown, based on the same concept as in the above-mentioned Embodiment 1, this embodiment also proposes that the structures of the first XZ adjustment structure 30, the second XZ adjustment structure 16, and the third XZ adjustment structure 25 are the same and output movements along the X and Z directions as well.

[0042] In this embodiment, in order to reduce the complexity of the entire device, and since the movements output by the first XZ adjustment structure 30, the second XZ adjustment structure 16, and the third XZ adjustment structure 25 are all the same non-interfering X-direction and Z-direction movements, therefore, the internal structures of the first XZ adjustment structure 30, the second XZ adjustment structure 16, and the third XZ adjustment structure 25 can be set in exactly the same form, and appropriate sizes can be selected according to different stressed members. That is, the movement in the X direction is realized by the pushing member and can be self-locked, and the movement in the Z direction is also realized by the pushing member and can be self-locked. Since the movements in the X and Z directions do not interfere with each other, therefore, in terms of spatial orientation, there are no restrictions on the corresponding structures of the two.

[0043] It should be noted that in the present invention, the first ejecting member 4 is selected in the form of a cylinder, and all the remaining ejecting members and the moving and adjusting members in the XYZ directions are selected in the manual form because manual operation is easier to control.

[0044] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A multi-reference-point high-precision mask patch device, comprising a frame (1), a first adjustment component (2), a support column (3) and a first pushing member (4) disposed on the frame (1), a camera (5) disposed on the first adjustment component (2), a second adjustment component (6) disposed at the top of the support column (3), a pressing plate (7) disposed on the second adjustment component (6), a support platform (8) disposed at the top of the first pushing member (4), a third adjustment component (9) disposed on the support platform (8), the third adjustment component (9) being located below the mask (10), the mask (10) being located between the pressing plate (7) and the second adjustment component (6), and the patch (11) being located between the third adjustment component (9) and the mask (10), characterized in that, The camera (5) is moved in the three directions of space XYZ by means of the first adjustment assembly (2). The pressing plate (7) and the mask plate (10) are moved in the XZ directions and rotated about the Y axis by means of the second adjustment assembly (6). The patch (11) is finely adjusted in the XYZ directions by means of the third adjustment assembly (9). The third adjustment assembly (9) is moved in the Y direction by means of the first ejecting member (4). There are two cameras (5) which are always at the same height. The patch (11) is attached to the mask plate (10) by means of the third adjustment assembly (9). The pressing plate (7) is provided with a groove, and the marking points on the mask plate (10) are located within the projection of the groove. The camera (5) is adjusted to be directly above the groove and is used to capture the marking points on the mask plate (10).

2. The multi-reference-point high-precision mask patch device according to claim 1, wherein There are two first adjustment assemblies (2), which are arranged in one-to-one correspondence with the two cameras (5), and the two cameras (5) do not interfere with each other by means of the corresponding first adjustment assemblies (2).

3. The multi-reference-point high-precision mask patch device according to claim 2, characterized in that, The second adjustment assembly (6) includes a second clamping member and a second fine adjustment member. The second clamping member includes a second clamping seat (12) and a second ejecting member (13). The mask plate (10) is clamped between the second clamping seat (12) and the second ejecting member (13). The second ejecting member (13) is arranged on the second clamping seat (12). A support column (14) is arranged on the second clamping seat (12). The mask plate (10) is clamped between the support column (14) and the pressing plate (7). The second fine adjustment member includes a second base plate (15), a second XZ adjustment structure (16) and a rotating structure. The rotating structure includes a first turntable (17) and a second turntable (18). The second turntable (18) is rotatably arranged on the first turntable (17). The first turntable (17) is connected with a turntable ejecting member (19). The second turntable (18) has a convex block (20), and the ejecting end of the turntable ejecting member (19) ejects the convex block (20). The second base plate (15) is arranged on the support column (3). The second XZ adjustment structure (16) is arranged on the second base plate (15). The first turntable (17) is arranged on the second XZ adjustment structure (16). The second clamping seat (12) is arranged on the second turntable (18).

4. A multi-reference-point high-precision mask patch device according to claim 3, characterized in that The second fine adjustment member further includes a plug (21) and a turntable locking member (22). The plug (21) is arranged outside the first turntable (17) and the end contacts the other side of the convex block (20). The turntable locking member (22) is arranged on the first turntable (17) and the end abuts against the second turntable (18).

5. A multi-reference-point high-precision mask patch device according to claim 4, characterized in that, There are two of the third adjustment components (9), which are symmetrically arranged on both sides of the second adjustment component (6). The third adjustment component (9) includes a third clamping member and a third fine-tuning member. The third clamping member includes a third clamping seat (23) and a third pushing member (24). The third clamping seat (23) has a bearing surface for placing the patch (11). The third pushing member (24) cooperates with the third clamping seat (23) to clamp the patch (11). The third fine-tuning member includes a third XZ adjustment structure (25) and a Y-direction fine-tuning structure. The Y-direction fine-tuning structure includes a fine-tuning base (26), a fine-tuning pushing member (27), a fine-tuning platform (28), and a fine-tuning conduction member (29). The fine-tuning base (26) is arranged on the third XZ adjustment structure (25). The fine-tuning platform (28) is slidably arranged on the fine-tuning base (26) in the Y direction. The fine-tuning conduction member (29) is rotatably arranged on the fine-tuning base (26) and moves the fine-tuning platform (28) by the pushing of the fine-tuning pushing member (27). The third XZ adjustment structure (25) is arranged on the support table (8).

6. The multi-reference-point high-precision mask patch device according to claim 5, characterized in that, The fine-tuning conduction member (29) has V-shaped guide feet, which are rotatably arranged on the fine-tuning base (26). The fine-tuning platform (28) has protrusions, and the guide feet are respectively in contact with the protrusions and the pushing end of the fine-tuning pushing member (27).

7. A multi-reference-point high-precision mask patch device according to claim 6, characterized in that, The first adjustment component (2) includes a first XZ adjustment structure (30) and a Y-direction adjustment structure (31). The first XZ adjustment structure (30) is arranged on the frame (1). The Y-direction adjustment structure (31) is arranged on the first XZ adjustment structure (30). The camera (5) is arranged on the Y-direction adjustment structure (31).

8. A multi-reference-point high-precision mask patch device according to claim 7, wherein, The structures of the first XZ adjustment structure (30), the second XZ adjustment structure (16), and the third XZ adjustment structure (25) are the same and output movements along the X and Z directions as well.

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