Leak detection equipment for vacuum system components

Abstract

The present application relates to a vacuum system component leak detection device, which is used for leak detection of the upper cover group and the lower cover group of a crystal growth furnace. The vacuum system component leak detection device comprises: a simulated quartz tube, the simulated quartz tube is an annular plate, the simulated quartz tube has an upper end face and a lower end face, the upper cover group can be placed on the upper end face of the simulated quartz tube, the lower cover group can be placed on the lower end face of the simulated quartz tube, so that the simulated quartz tube, the upper cover group and the lower cover group form a chamber; and a helium leak detector, the helium leak detector is connected to the chamber, so as to be used for leak detection of the simulated quartz tube, the upper cover group and the lower cover group. In this way, feeding inspection can be carried out and the volume can be reduced.

Description

Technical Field

[0001] The invention relates to a vacuum system component leak detection device, in particular to a leak detection device for performing feeding detection on components such as an upper cover group and a lower cover group used for a quartz tube of a crystal growth furnace. Background Art

[0002] In recent years, the third generation semiconductor SiC and GaN have been attracting attention from the industry and the mass media. Their largest application is in power semiconductor components. In recent years, due to the requirements of energy conservation and carbon reduction, various emerging energy-saving industries such as electric vehicles, solar power generation, DC power grids, charging piles, etc. require power semiconductors with high conversion efficiency. Physical vapor transport (PVT), also known as sublimation, is a commonly used crystal growth technology. Silicon carbide polycrystalline material can be placed at the bottom of a graphite crucible, and the silicon carbide seed crystal is adhered to the upper end of the inner wall of the graphite. The graphite crucible is placed in a vacuum chamber composed of a quartz tube. The growth chamber can control the appropriate vacuum degree and temperature, and accurately control the growth temperature and pressure to ensure the stability and repeatability of the growth of silicon carbide single crystals. The upper and lower ends of the above-mentioned quartz tube are respectively provided with an upper cover group and a lower cover group to seal the upper and lower ends of the quartz tube. The combination of the quartz tube, the upper cover group and the lower cover group must maintain a predetermined airtightness, so a leak test is required. However, the existing technology is unable to perform feeding inspection, and can only perform leak detection after the quartz tube, upper cover assembly and lower cover assembly are installed. When the components are found to have problems, the components must be removed and replaced, which is labor-intensive and time-consuming, causing great inconvenience to practitioners. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a vacuum system component leak detection device in view of the deficiencies in the prior art, wherein the vacuum system component leak detection device can perform feed inspection so as to detect leaking components in a timely manner.

[0004] In order to solve the above technical problems, the present invention provides a vacuum system component leak detection device, which is used for leak detection of an upper cover group and a lower cover group of a crystal growth furnace. The vacuum system component leak detection device comprises: a simulated quartz tube, which is a ring-shaped plate, and has an upper end face and a lower end face. The upper cover group can be placed on the upper end face of the simulated quartz tube, and the lower cover group can be placed on the lower end face of the simulated quartz tube, so that the simulated quartz tube, the upper cover group and the lower cover group form a chamber; and a helium leak detector, which is connected to the chamber and can be used to perform leak detection on the simulated quartz tube, the upper cover group and the lower cover group.

[0005] Preferably, a dimension of a cross section of the simulated quartz tube along an axial direction of the simulated quartz tube is smaller than a dimension along a diameter direction of the simulated quartz tube.

[0006] Preferably, the upper end surface and the lower end surface are both annular planes, and the upper end surface and the lower end surface are parallel to each other.

[0007] Preferably, a first convex body is provided on the upper end surface near the outer edge of the simulated quartz tube, and a second convex body is provided on the lower end surface near the inner edge of the simulated quartz tube.

[0008] Preferably, the upper cover group includes an upper cover inner layer, an upper cover outer layer, an upper cover top plate and an upper cover bottom plate. The upper cover outer layer is arranged outside the upper cover inner layer at intervals, the upper cover top plate is connected to the upper end of the upper cover inner layer and the upper end of the upper cover outer layer, the upper cover bottom plate is connected to the lower end of the upper cover inner layer and the lower end of the upper cover outer layer, cooling water can be input and circulated between the upper cover inner layer and the upper cover outer layer, and the upper cover bottom plate of the upper cover group contacts and presses against the upper end surface of the simulated quartz tube.

[0009] Preferably, the lower cover group includes a lower cover inner layer, a lower cover outer layer, a lower cover top plate and a lower cover bottom plate, the lower cover outer layer is arranged outside the lower cover inner layer at intervals, the lower cover top plate is connected to the upper end of the lower cover inner layer and the upper end of the lower cover outer layer, the lower cover bottom plate is connected to the lower end of the lower cover inner layer and the lower end of the lower cover outer layer, cooling water can be input and circulated between the lower cover inner layer and the lower cover outer layer, and the lower cover top plate of the lower cover group contacts and presses against the lower end surface of the simulated quartz tube.

[0010] Preferably, a crucible support assembly is disposed below the lower cover assembly, and the crucible support assembly extends into the lower cover assembly so that the crucible support assembly is located in the chamber.

[0011] Preferably, the crucible support group includes a support inner layer, a support outer layer, a support top plate and a support bottom plate. The support outer layer is arranged outside the support inner layer at intervals. The support top plate is connected to the upper end of the support inner layer and the upper end of the support outer layer. The support bottom plate is connected to the lower end of the support inner layer and the lower end of the support outer layer. Cooling water can be input and circulated between the support inner layer and the support outer layer. The support bottom plate of the crucible support group contacts and abuts against the lower cover bottom plate of the lower cover group.

[0012] Preferably, the simulated quartz tube, the upper cover set and the lower cover set are placed on a work table, so that the simulated quartz tube, the upper cover set and the lower cover set are elevated.

[0013] Preferably, airtight components are respectively arranged between the simulated quartz tube and the upper cover group and the lower cover group.

[0014] The beneficial effect of the present invention is that the vacuum system component leak detection equipment provided by the present invention includes a simulated quartz tube and a helium leak detector. The simulated quartz tube is an annular plate body, and the simulated quartz tube has an upper end face and a lower end face. The upper cover group can be placed on the upper end face of the simulated quartz tube, and the lower cover group can be placed on the lower end face of the simulated quartz tube, so that the interior of the simulated quartz tube, the upper cover group and the lower cover group form a chamber. The helium leak detector is connected to the chamber so that it can be used to perform leak detection on components such as the upper cover group and the lower cover group. The present invention can perform feeding inspection on components such as the upper cover group and the lower cover group of the crystal growth furnace, so that the vacuum system components can be leak tested for liquid and gas before assembly, and the present invention replaces the actual quartz tube with a simulated quartz tube. The simulated quartz tube is an annular plate body, which can greatly reduce the height, thereby reducing the volume and occupying less space.

[0015] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings are only provided for reference and illustration and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a plan view of the vacuum system component leak detection device of the present invention.

[0017] Figure 2 for Figure 1 Detailed view of part II.

[0018] Figure 3 It is a schematic diagram of the use status of the vacuum system component leak detection device of the present invention. DETAILED DESCRIPTION

[0019] [Example]

[0020] See also Figures 1 to 3 The present invention provides a vacuum system component leak detection device, which is used for leak detection of an upper cover group and a lower cover group of a crystal growth furnace and includes a simulated quartz tube 1 and a helium leak detector 4.

[0021] The simulated quartz tube 1 is an annular plate body, and the simulated quartz tube 1 can be a circular annular plate body corresponding to the upper cover group 2 and the lower cover group 3. The simulated quartz tube 1 has an upper end face 11 and a lower end face 12, and the upper end face 11 and the lower end face 12 are located on two opposite sides of the simulated quartz tube 1. The height of the simulated quartz tube 1 is greatly reduced relative to the actual quartz tube, so that the volume can be reduced and the occupied space can be reduced. Preferably, the height of the simulated quartz tube 1 is smaller than the width, that is, the cross section of the simulated quartz tube 1 is a flat rectangle, and the size of the cross section of the simulated quartz tube 1 along an axial direction A of the simulated quartz tube 1 is smaller than the size along a diameter direction B of the simulated quartz tube 1, so that the height space occupied by the simulated quartz tube 1 is reduced.

[0022] In this embodiment, the upper end surface 11 and the lower end surface 12 are both annular planes, and the upper end surface 11 and the lower end surface 12 are parallel to each other. A first convex body 13 may be provided at the outer edge of the upper end surface 11 close to the simulated quartz tube 1, and the first convex body 13 may be an annular protrusion. A second convex body 14 may be provided at the inner edge of the lower end surface 12 close to the simulated quartz tube 1, and the second convex body 14 may be an annular protrusion. The first convex body 13 and the second convex body 14 can provide a stop limit function to facilitate assembly.

[0023] The upper end face 11 and the lower end face 12 of the simulated quartz tube 1 are similar to the upper end face and the lower end face of the actual quartz tube, respectively, and can be used to cooperate with the upper cover group 2 and the lower cover group 3, respectively. The upper cover group 2 and the lower cover group 3 can be respectively placed on the upper end face 11 and the lower end face 12 of the simulated quartz tube 1, so that the interior of the simulated quartz tube 1, the upper cover group 2 and the lower cover group 3 forms a chamber 100, and the chamber 100 is a closed space. The simulated quartz tube 1, the upper cover group 2 and the lower cover group 3 can also be fixed by means of screws (not shown) to firmly connect the simulated quartz tube 1, the upper cover group 2 and the lower cover group 3.

[0024] The upper cover assembly 2 may include an upper cover inner layer 21, an upper cover outer layer 22, an upper cover top plate 23 and an upper cover bottom plate 24, the upper cover outer layer 22 is arranged outside the upper cover inner layer 21 at intervals, the upper cover top plate 23 is connected to the upper ends of the upper cover inner layer 21 and the upper cover outer layer 22, the upper cover bottom plate 24 is connected to the lower ends of the upper cover inner layer 21 and the upper cover outer layer 22, the upper cover inner layer 21 and the upper cover outer layer 22 may form a double-layer wall, and cooling water can be input and circulated between the upper cover inner layer 21 and the upper cover outer layer 22, so as to assist heat dissipation by water cooling. The upper cover bottom plate 24 of the upper cover assembly 2 may contact and abut against the upper end surface 11 of the simulated quartz tube 1, so that the upper cover assembly 2 and the upper end surface 11 of the simulated quartz tube 1 maintain airtightness.

[0025] The lower cover assembly 3 may include a lower cover inner layer 31, a lower cover outer layer 32, a lower cover top plate 33 and a lower cover bottom plate 34. The lower cover outer layer 32 is arranged outside the lower cover inner layer 31 at intervals. The lower cover top plate 33 is connected to the upper ends of the lower cover inner layer 31 and the lower cover outer layer 32. The lower cover bottom plate 34 is connected to the lower ends of the lower cover inner layer 31 and the lower cover outer layer 32. The lower cover inner layer 31 and the lower cover outer layer 32 may form a double-layer wall. Cooling water can be input and circulated between the lower cover inner layer 31 and the lower cover outer layer 32 so as to assist heat dissipation by water cooling. The lower cover top plate 33 of the lower cover assembly 3 may contact and abut against the lower end surface 12 of the simulated quartz tube 1, so that the lower cover assembly 3 and the lower end surface 12 of the simulated quartz tube 1 maintain airtightness.

[0026] The present invention can stack the simulated quartz tube 1, the upper cover group 2 and the lower cover group 3 for leak detection, and can also stack all the vacuum system components for leak detection. In this embodiment, the simulated quartz tube 1, the upper cover group 2 and the lower cover group 3 can also be placed on a work table 10, so that the simulated quartz tube 1, the upper cover group 2 and the lower cover group 3 are elevated. In addition, the bottom of the lower cover group 3 can be sealed so that the chamber 100 inside the simulated quartz tube 1, the upper cover group 2 and the lower cover group 3 can maintain airtightness. In this embodiment, a crucible support group 5 is arranged below the lower cover group 3. The crucible support group 5 is a crucible receiving structure. The crucible support group 5 extends into the lower cover group 3 so that the crucible support group 5 can be located in the chamber 100.

[0027] The crucible support assembly 5 may include a support inner layer 51, a support outer layer 52, a support top plate 53 and a support bottom plate 54. The support outer layer 52 is arranged outside the support inner layer 51 at intervals. The support top plate 53 is connected to the upper ends of the support inner layer 51 and the support outer layer 52. The support bottom plate 54 is connected to the lower ends of the support inner layer 51 and the support outer layer 52. The support inner layer 51 and the support outer layer 52 can form a double-layer wall. Cooling water can be input and circulated between the support inner layer 51 and the support outer layer 52 so as to assist heat dissipation by water cooling. The support bottom plate 54 of the crucible support assembly 5 can contact and abut against the lower cover bottom plate 34 of the lower cover assembly 3, so that the bottom of the lower cover assembly 3 is sealed.

[0028] In addition, an upper window 25 and a lower window 55 may be respectively disposed on the upper cover assembly 2 and the crucible support assembly 5 , so that an external detector can observe through the upper window 25 and the lower window 55 .

[0029] In addition, airtight components (such as O-rings) 200, 300, 400 may be respectively disposed between the simulated quartz tube 1 and the upper cover assembly 2, the lower cover assembly 3, and between the lower cover assembly 3 and the crucible support assembly 5 to increase airtightness. Similarly, airtight components (such as O-rings) 500, 600 may also be respectively disposed between the components of the upper cover assembly 2 and the crucible support assembly 5 to increase airtightness.

[0030] The helium leak detector 4 is connected to the chamber 100 and can be connected to the flange (not shown) of the upper cover assembly 2, so that the helium leak detector 4 can evacuate the chamber 100. In addition, helium is applied to the outside of the simulated quartz tube 1, the upper cover assembly 2 and the lower cover assembly 3. For example, the helium in the helium bottle 6 can be sprayed on the outside of the simulated quartz tube 1, the upper cover assembly 2 and the lower cover assembly 3, so that the pressure difference between the inside and the outside can be used according to the vacuum exhaust, and whether there is a leak can be detected according to the amount of helium flowing into the chamber 100. In this way, leak detection can be performed on components such as the upper cover assembly 2 and the lower cover assembly 3.

[0031] [Beneficial Effects of Embodiments]

[0032] The beneficial effect of the present invention is that the vacuum system component leak detection equipment provided by the present invention includes a simulated quartz tube and a helium leak detector. The simulated quartz tube is an annular plate body, and the simulated quartz tube has an upper end face and a lower end face. The upper cover group can be placed on the upper end face of the simulated quartz tube, and the lower cover group can be placed on the lower end face of the simulated quartz tube, so that the interior of the simulated quartz tube, the upper cover group and the lower cover group form a chamber. The helium leak detector is connected to the chamber so that it can be used to perform leak detection on components such as the upper cover group and the lower cover group. The present invention can perform feeding inspection on components such as the upper cover group and the lower cover group of the crystal growth furnace, so that the vacuum system components can be leak tested for liquid and gas before assembly, and the present invention replaces the actual quartz tube with a simulated quartz tube. The simulated quartz tube is an annular plate body, which can greatly reduce the height, thereby reducing the volume and occupying less space.

[0033] The above description is only a preferred embodiment of the present invention and is not intended to limit the patent protection scope of the present invention. Therefore, any equivalent changes made using the contents of the present invention's description and drawings are included in the scope of protection of the present invention.

Claims

1. A vacuum system component leak detection device, characterized in that: Used for leak detection of the upper cover assembly and the lower cover assembly of the crystal growth furnace, the vacuum system component leak detection equipment includes: a simulated quartz tube, the simulated quartz tube is an annular plate, the simulated quartz tube has an upper end surface and a lower end surface, the upper cover assembly can be placed on the upper end surface of the simulated quartz tube, and the lower cover assembly can be placed on the lower end surface of the simulated quartz tube, so that the simulated quartz tube, the upper cover assembly and the lower cover assembly form a chamber inside; and a helium leak detector, the helium leak detector being connected to the chamber so as to be used for leak testing the simulated quartz tube, the upper cover assembly and the lower cover assembly; Wherein, the dimension of the cross section of the simulated quartz tube along an axial direction of the simulated quartz tube is smaller than the dimension along a diameter direction of the simulated quartz tube; Wherein, a first convex body is provided on the upper end surface near the outer edge of the simulated quartz tube, and a second convex body is provided on the lower end surface near the inner edge of the simulated quartz tube.

2. The vacuum system component leak detection device according to claim 1, characterized in that: The upper end surface and the lower end surface are both annular planes, and the upper end surface and the lower end surface are parallel to each other.

3. The vacuum system component leak detection device according to claim 1, characterized in that: The upper cover group includes an upper cover inner layer, an upper cover outer layer, an upper cover top plate and an upper cover bottom plate. The upper cover outer layer is arranged outside the upper cover inner layer at intervals. The upper cover top plate is connected to the upper end of the upper cover inner layer and the upper end of the upper cover outer layer. The upper cover bottom plate is connected to the lower end of the upper cover inner layer and the lower end of the upper cover outer layer. Cooling water can be input and circulated between the upper cover inner layer and the upper cover outer layer. The upper cover bottom plate of the upper cover group contacts and abuts against the upper end surface of the simulated quartz tube.

4. The vacuum system component leak detection device according to claim 1, characterized in that: The lower cover group includes a lower cover inner layer, a lower cover outer layer, a lower cover top plate and a lower cover bottom plate. The lower cover outer layer is arranged outside the lower cover inner layer at intervals. The lower cover top plate is connected to the upper end of the lower cover inner layer and the upper end of the lower cover outer layer. The lower cover bottom plate is connected to the lower end of the lower cover inner layer and the lower end of the lower cover outer layer. Cooling water can be input and circulated between the lower cover inner layer and the lower cover outer layer. The lower cover top plate of the lower cover group contacts and abuts against the lower end surface of the simulated quartz tube.

5. The vacuum system component leak detection device according to claim 4, characterized in that: A crucible support assembly is disposed below the lower cover assembly, and the crucible support assembly extends into the lower cover assembly so that the crucible support assembly is located in the chamber.

6. The vacuum system component leak detection device according to claim 5, characterized in that: The crucible support assembly includes a support inner layer, a support outer layer, a support top plate and a support bottom plate. The support outer layer is arranged outside the support inner layer at intervals. The support top plate is connected to the upper end of the support inner layer and the upper end of the support outer layer. The support bottom plate is connected to the lower end of the support inner layer and the lower end of the support outer layer. Cooling water can be input and circulated between the support inner layer and the support outer layer. The support bottom plate of the crucible support assembly contacts and abuts against the lower cover bottom plate of the lower cover assembly.

7. The vacuum system component leak detection device according to claim 1, characterized in that: The simulated quartz tube, the upper cover group and the lower cover group are placed on a work table, so that the simulated quartz tube, the upper cover group and the lower cover group are elevated.

8. The vacuum system component leak detection device according to claim 1, characterized in that: Airtight components are respectively arranged between the simulated quartz tube and the upper cover group and the lower cover group.

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