A dual-bandpass narrowband filter for gas detection and its manufacturing method

Abstract

The present invention relates to a dual-bandpass narrowband filter for gas detection and a manufacturing method thereof. The method includes the following steps: selecting and cleaning an intermediate layer substrate, setting the intermediate layer substrate in a coating vacuum chamber for heating and constant temperature control; pre-melting coating particles, performing ion bombardment on the intermediate layer substrate, and then depositing an upper film structure. After the upper film structure is deposited, a lower film structure is deposited; wherein, during the deposition of the upper film structure and the lower film structure, by dynamically obtaining the performance evaluation parameters corresponding to each film structure composite scheme, the film structure composite scheme in the next deposition process is dynamically adjusted until the film structure composite scheme is the optimal scheme. The filter manufactured by this application can comprehensively improve the comprehensive performance.

Description

Technical Field

[0001] The present invention relates to a dual-bandpass narrowband filter for gas detection and a manufacturing method thereof. Background Art

[0002] Most of the existing filters for gas detection adopt a pre-cured design and then are fabricated and encapsulated. Although this technology can improve the performance of the filter to a certain extent, in application, this kind of filter can generally only improve a single performance and cannot comprehensively improve the comprehensive performance. In particular, for example, the filter disclosed in CN113341492B in the prior art, the structure of this kind of filter is very rigid. For example, the specific parameters of each layer are clearly defined, and the manufacturing process is also very single. The performance of the filter fabricated in this way is also relatively poor. Summary of the Invention

[0003] In order to overcome the deficiencies of the existing technology, the present invention provides a dual-bandpass narrowband filter for gas detection and a manufacturing method thereof.

[0004] The technical solution adopted by the present invention to solve its technical problems:

[0005] A manufacturing method of a dual-bandpass narrowband filter for gas detection includes the following steps:

[0006] Select and clean the intermediate layer substrate, set the intermediate layer substrate in the coating vacuum chamber for heating and constant temperature control; pre-melt the coating particles, perform ion bombardment on the intermediate layer substrate, and then deposit the upper film structure. After the upper film structure is deposited, deposit the lower film structure; wherein, during the deposition of the upper film structure and the lower film structure, the performance evaluation parameters corresponding to each film structure composite scheme are dynamically obtained, and then the film structure composite scheme in the next deposition process is dynamically adjusted until the film structure composite scheme is the optimal scheme.

[0007] Furthermore, both the upper film structure and the lower film structure are multi-layer composite coating film structures. The film structure composite scheme specifically refers to a parameter combination scheme used to determine a unique multi-layer composite coating film structure and mark the coating thickness of each layer. The film structure composite scheme is characterized by a matrix structure; the performance evaluation parameters refer to an array formed by the parameters for evaluating the performance corresponding to the upper film structure or the lower film structure deposited according to the film structure composite scheme after the film structure composite scheme is determined.

[0008] Furthermore, the film structure composite scheme is specifically as follows:

[0009] When the film structure is n layers, then i = j = n, where a ij represents the coating thickness of the i-th layer; the performance evaluation parameter is (b 1 , b 2 , b 3 ……bn ) = B 1 , where b n represents the component corresponding to the performance evaluation parameter on the nth layer of coating; from the performance evaluation parameter B 1 the performance improvement parameter B can also be calculated 2 , specifically B 2 = (b 1 2 , b 2 2 , b 3 2 ... b n 2 ) where b n 2 = b n ·x n + (1 - x n )·b n 1 where x n is the sliding prediction parameter of the corresponding component on the nth layer of coating, and b n 1 is the artificial prediction performance parameter of the corresponding component on the nth layer of coating; the dynamic adjustment of the film structure composite scheme in the next plating process is as follows: for the determined A 1 statistically obtain its corresponding B 1 , then calculate B 1 to B 2 , convert B 2 to matrix form, that is, B 2 = [b 1 2 , b 2 2 , b 3 2 ... b n 2 and then calculate B 2 A 1 = B 3 , then calculate [B 3 T1 B 3 T2 ... B 3 Tj = A 2 , where B 3 T1 , B 3 T2 ... B 3 Tj are all the transposes of B 3 , and A 2 is the film structure composite scheme after dynamic adjustment.

[0010] Furthermore, the performance in the construction of the performance evaluation parameters includes detection transmittance, wavelength tolerance, cut-off parameter, and application signal-to-noise ratio.

[0011] Furthermore, the optimal solution in the film structure composite solution refers to the situation where in multiple consecutive dynamic adjustments during dynamic adjustment, the following occurs: the adjusted film structure composite solution A 2 remains unchanged, or the adjusted film structure composite solution A 2 has a change amount less than the threshold. In this situation, the adjusted film structure composite solution A 2 corresponding film structure composite solution is the optimal solution.

[0012] A dual-bandpass narrowband filter for gas detection, characterized in that it is made by the above method and includes an intermediate layer substrate, an upper film structure above the intermediate layer substrate, and a lower film structure below the intermediate layer substrate.

[0013] Beneficial effects

[0014] In this application, during the plating of the upper film structure and the lower film structure, by dynamically obtaining the performance evaluation parameters corresponding to each film structure composite solution and then dynamically adjusting the film structure composite solution in the next plating process until the film structure composite solution is the optimal solution, and the performance in the construction of the performance evaluation parameters includes multiple performances. In this way, the filter made in this application can comprehensively improve the comprehensive performance. Description of the drawings

[0015] Figure 1 It is a flowchart of an embodiment of this application. Detailed implementation manners

[0016] This application discloses a method for manufacturing a dual-bandpass narrowband filter for gas detection, such as Figure 1 , which includes the following steps:

[0017] Select and clean the intermediate layer substrate, set the intermediate layer substrate in the coating vacuum chamber, heat it and control the temperature at a constant level; pre-melt the coating particles, perform ion bombardment on the intermediate layer substrate, and then plate the upper film structure. After the upper film structure is plated, plate the lower film structure; multiple layers of coating need to be performed multiple times during the plating of the upper film structure or the lower film structure. Among them, during the plating of the upper film structure and the lower film structure, by dynamically obtaining the performance evaluation parameters corresponding to each film structure composite solution and then dynamically adjusting the film structure composite solution in the next plating process until the film structure composite solution is the optimal solution.

[0018] The dual-bandpass narrowband filter for gas detection disclosed in this application is made by the above method and includes an intermediate layer substrate, an upper film structure above the intermediate layer substrate, and a lower film structure below the intermediate layer substrate.

[0019] Both the upper film structure and the lower film structure described in the implementation are multi-layer composite plated film structures. The film structure composite scheme specifically refers to a parameter combination scheme used to determine a unique multi-layer composite plated film structure and mark the plating thickness of each layer of film. The film structure composite scheme is characterized by a matrix structure; the performance evaluation parameters refer to an array formed by the parameters for evaluating the performance corresponding to the upper film structure or the lower film structure plated according to the film structure composite scheme after the film structure composite scheme is determined.

[0020] Substantially, the performance evaluation parameters corresponding to each film structure composite scheme are obtained from the result combinations for different performances in the construction of the performance evaluation parameters, and are obtained from the statistical data tested after the corresponding product is made in the specific implementation. The performances in the construction of the performance evaluation parameters include detection transmittance, wavelength tolerance, cut-off parameters, and application signal-to-noise ratio.

[0021] It can be understood that in this application, by dynamically obtaining the performance evaluation parameters corresponding to each film structure composite scheme during the plating process of the upper film structure and the lower film structure, and then dynamically adjusting the film structure composite scheme in the next plating process until the film structure composite scheme is the optimal scheme. Among them, the performances in the construction of the performance evaluation parameters include multiple performances, so that the filter made in this application can comprehensively improve the comprehensive performance.

[0022] Specifically, the film structure composite scheme is specifically as follows:

[0023] When the film structure is n layers, then i = j = n, where a ij represents the plating thickness of the i-th layer; the performance evaluation parameter is (b 1 , b 2 , b 3 ... b n ) = B 1 , where b n represents the component corresponding to the performance evaluation parameter on the n-th layer of plating; from the performance evaluation parameter B 1 , the performance improvement parameter B 2 can also be calculated. Specifically, B 2 = (b 1 2 , b 2 2 , b 3 2 ... b n 2 ), where b n 2 = b n ·x n + (1 - x n )·b n 1 where x nis the sliding prediction parameter for the corresponding component on the nth layer coating, where b n 1 is the artificial prediction performance parameter for the corresponding component on the nth layer coating; the dynamic adjustment of the film structure composite scheme in the next plating process, that is: for the determined A 1 statistically obtain its corresponding B 1 , and then from B 1 calculate to B 2 , convert B 2 to matrix form, that is B 2 = [b 1 2 , b 2 2 , b 3 2 ... b n 2 , and then calculate B 2 A 1 = B 3 , and then calculate [B 3 T1 B 3 T2 ... B 3 Tj = A 2 , where B 3 T1 , B 3 T2 ... B 3 Tj are all the transposes of B 3 , and A 2 is the film structure composite scheme after dynamic adjustment.

[0024] The optimal scheme in the specific film structure composite scheme refers to the situation where in continuous multiple dynamic adjustments during dynamic adjustment: the adjusted film structure composite scheme A 2 remains unchanged, or the change amount of the adjusted film structure composite scheme A 2 is less than the threshold value. In this situation, the film structure composite scheme corresponding to the adjusted film structure composite scheme A 2 is the optimal scheme.

[0025] In a specific implementation, the present application discloses a method for manufacturing a dual-bandpass narrowband filter for gas detection, which includes the following steps:

[0026] Select and clean the intermediate layer substrate, set the intermediate layer substrate in the coating vacuum chamber and heat it with constant temperature control; pre-melt the coating particles, perform ion bombardment on the intermediate layer substrate, and then deposit the upper film structure. After the upper film structure is deposited, deposit the lower film structure; both the upper film structure and the lower film structure are multi-layer composite coating film structures;

[0027] During the deposition process of the upper film structure and the lower film structure, performance evaluation parameters corresponding to each film structure composite scheme are dynamically obtained; the film structure composite scheme specifically refers to a parameter combination scheme used to determine a unique multi-layer composite deposited film structure and mark the deposition thickness of each layer of film, and the film structure composite scheme is characterized by a matrix structure; specifically, the film structure composite scheme is as follows:

[0028] When the film structure is n layers, then i = j = n, where a ij represents the deposition thickness of the i-th layer; the performance evaluation parameter refers to an array formed by the parameters for evaluating the performance corresponding to the upper film structure or the lower film structure deposited according to the film structure composite scheme after the film structure composite scheme is determined; the performance evaluation parameter is (b 1 , b 2 , b 3 ... b n ) = B 1 , where b n represents the component of the performance evaluation parameter corresponding to the n-th layer of deposited film;

[0029] Then, the film structure composite scheme in the next deposition process is dynamically adjusted until the film structure composite scheme is the optimal scheme. Specifically, from the performance evaluation parameter B 1 The performance improvement parameter B 2 can also be calculated. Specifically, B 2 = (b 1 2 , b 2 2 , b 3 2 ... b n 2 ) where b n 2 = b n ·x n +(1 - x n )·b n 1 where x n is the sliding prediction parameter of the corresponding component on the n-th layer of deposited film, and b n 1 is the artificial prediction performance parameter of the corresponding component on the n-th layer of deposited film; the dynamic adjustment of the film structure composite scheme in the next deposition process is as follows: for the determined A 1 Statistically obtain its corresponding B 1 , and then calculate B 1 from B 2 , convert B 2 to matrix form, i.e., B 2 = [b 12 , b 2 2 , b 3 2 …… b n 2 Then calculate B 2 A 1 = B 3 , and then calculate [B 3 T1 B 3 T2 ……B 3 Tj = A 2 , where B 3 T1 , B 3 T2 ……B 3 Tj are all the transposes of B 3 , A 2 That is, the membrane structure composite scheme after dynamic adjustment. The optimal scheme in the specific membrane structure composite scheme refers to the situation where continuous multiple dynamic adjustments in the dynamic adjustment all show that: the membrane structure composite scheme A 2 remains unchanged, or the change amount of the membrane structure composite scheme A 2 is less than the threshold value. In this case, the membrane structure composite scheme corresponding to the adjusted membrane structure composite scheme A 2 is the optimal scheme.

[0030] As is known by common technical knowledge, the present invention can be implemented by other embodiments that do not depart from its spiritual essence or essential features. The above-disclosed embodiments are illustrative in all aspects.

Claims

1. Manufacturing method of double-bandpass narrowband filter for gas detection, characterized in that, The steps include: selecting and cleaning the intermediate layer substrate, setting the intermediate layer substrate in a coating vacuum chamber for heating and constant temperature control; pre-melting the coating particles, performing ion bombardment on the intermediate layer substrate, and then depositing the upper film structure. After the upper film structure is deposited, the lower film structure is deposited; wherein, during the deposition of the upper film structure and the lower film structure, the performance evaluation parameters corresponding to each film structure composite scheme are dynamically obtained to dynamically adjust the film structure composite scheme in the next deposition process until the film structure composite scheme is the optimal scheme; the specific film structure composite scheme is: ; When the film structure is n layers, then i = j = n, where a ij represents the coating thickness of the i-th layer; the performance evaluation parameter is (b 1 , b 2 , b 3 ……b n ) = B 1， where b n represents the component corresponding to the performance evaluation parameter on the n-th layer coating; from the performance evaluation parameter B 1 the performance improvement parameter B 2 can also be calculated, specifically B 2 = (b 1 2 , b 2 2 , b 3 2 ……b n 2 ) where b n 2 = b n ·x n +(1-x n )·b n 1 where x n is the sliding prediction parameter of the corresponding component on the n-th layer coating, where b n 1 is the artificial prediction performance parameter of the corresponding component on the n-th layer coating; the dynamic adjustment of the film structure composite scheme in the next plating process is as follows: for the determined A 1 statistically obtain its corresponding B 1 , then calculate B 1 to B 2 , convert B 2 to matrix form, i.e., B 2 = [b 1 2 , b 2 2 , b 3 2 ……b n 2 and then calculate B 2 A 1 = B 3 , then calculate [B 3 T1 B 3 T2 ……B 3 Tj = A 2 , where B 3 T1 , B 3 T2 ……B 3 Tj Both are B 3 is the transpose of A 2 That is, the film structure composite scheme after dynamic adjustment.

2. The manufacturing method of double-bandpass narrowband filter for gas detection according to claim 1, characterized in that, both the upper film structure and the lower film structure are multi-layer composite plated film structures. The film structure composite scheme specifically refers to a parameter combination scheme for determining a unique multi-layer composite plated film structure and marking the plating thickness of each layer of film. The film structure composite scheme is characterized by a matrix structure; the performance evaluation parameters refer to an array formed by the parameters for evaluating the performance corresponding to the upper film structure or the lower film structure plated according to the film structure composite scheme after the film structure composite scheme is determined.

3. The manufacturing method of double-bandpass narrowband filter for gas detection according to claim 1, characterized in that, the performance in the construction of the performance evaluation parameters includes detection transmittance, wavelength tolerance, cut-off parameter and application signal-to-noise ratio.

4. The manufacturing method of double-bandpass narrowband filter for gas detection according to claim 1, characterized in that, The optimal solution in the membrane structure composite solution refers to the situation where in successive dynamic adjustments during dynamic adjustment, the adjusted membrane structure composite solution A 2 remains unchanged, or the change amount of the adjusted membrane structure composite solution A 2 is less than the threshold value. In this case, the adjusted membrane structure composite solution A 2 corresponding membrane structure composite solution is the optimal solution.

5. A double-bandpass narrowband filter for gas detection, characterized in that, manufactured by the method of claim 1, and includes an intermediate layer substrate, an upper film structure above the intermediate layer substrate, and a lower film structure below the intermediate layer substrate.

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