Gas permeability measurement method, apparatus, device, and medium

Abstract

The application discloses a kind of film gas permeability measurement method, device, equipment and medium, the method comprises: obtaining temperature data detected by temperature sensor and air pressure data detected by air pressure sensor, the temperature sensor and the air pressure sensor are located in the detection chamber that is communicated with the accumulation chamber;The air pressure data is processed based on Gaussian process regression algorithm to obtain predicted air pressure data;According to the predicted air pressure data, control valve opening and closing time, so that the air pressure data is located in the preset air pressure range;Based on the valve opening and closing time and permeability calculation formula, the gas permeability measurement value of the film to be measured is obtained, and the valve is located between the accumulation chamber and the detection chamber. Using the film gas permeability measurement method in the present application, the instrument detection error can be effectively reduced, and the accuracy of the detection signal is improved.

Description

Technical Field

[0001] This application relates to the field of permeability detection technology, and in particular to a method, apparatus, equipment and medium for measuring the gas permeability of a thin film. Background Technology

[0002] With the continuous development of flexible display panels, Organic Light-Emitting Diode (OLED) display devices have been widely used due to their advantages such as self-illumination, short response time, high contrast, wide viewing angle, and low power consumption. However, a major factor restricting its development is the sensitivity of its organic light-emitting layer to water vapor and oxygen in the air, requiring a barrier film to prevent water and oxygen from corroding the organic light-emitting layer. Therefore, for OLED fabrication, preparing a high-barrier barrier film is a key technology. "Without high-precision measurement, there is no high-end manufacturing." To prepare a high-barrier film, high-precision measurement methods are essential. Mass spectrometry, as the most precise instrument for gas molecule measurement, is currently being used in many laboratories for gas permeation measurements.

[0003] However, the measurement cycle for water and oxygen permeability using barrier membranes is relatively long, the ionization efficiency of the mass spectrometer gradually decreases with increasing usage time, and fluctuations in ambient temperature also affect the final water and oxygen permeability measurement. Therefore, measurement errors will occur in actual measurements. Traditional detection techniques amplify the signal by accumulating gas through a thin film over a fixed period of time.

[0004] However, this method is not very effective in improving the accuracy of the measurement signal. In addition, the measurement signal will be further distorted because the filament of the mass spectrometer reacts with oxygen and water vapor. Summary of the Invention

[0005] Therefore, it is necessary to provide a method, apparatus, device, and medium for measuring the gas permeability of thin films, which can effectively improve the accuracy of the measurement signal for detecting gas permeability by a mass spectrometer, addressing the problems mentioned above in the background art.

[0006] To address the aforementioned technical problems, a first aspect of this application proposes a method for measuring the gas permeability of a thin film, wherein the thin film to be tested divides the test chamber into an inlet chamber and an accumulation chamber, and the test gas in the inlet chamber permeates through the thin film into the accumulation chamber. The method includes:

[0007] The temperature data detected by the temperature sensor and the air pressure data detected by the air pressure sensor are acquired. The temperature sensor and the air pressure sensor are located in a detection chamber that is connected to the accumulation chamber.

[0008] The air pressure data is regressed using a Gaussian process regression algorithm to obtain predicted air pressure data.

[0009] Based on the predicted air pressure data, the valve opening and closing time is controlled so that the air pressure data is within a preset air pressure range;

[0010] Based on the valve opening and closing time and the permeability calculation formula, the gas permeability measurement value of the membrane under test is obtained, and the valve is located between the accumulation chamber and the detection chamber.

[0011] In the gas permeability measurement method described in the above embodiments, gas pressure data from a pressure sensor is acquired, and a Gaussian process regression algorithm is used to regress the gas pressure data to obtain predicted gas pressure data. This predictive data is then used to control the valve opening and closing time, ensuring that the gas pressure in the test chamber remains within a preset range. Based on the valve opening time and the permeability calculation formula, the gas permeability measurement value of the membrane under test is obtained. Using the gas permeability measurement method for membranes in this application can effectively reduce instrument detection errors and improve the accuracy of the detection signal.

[0012] In one embodiment, prior to acquiring the air pressure data detected by the barometric pressure sensor, the process includes:

[0013] The signal-to-noise ratio and detection time of real-time detection data detected by the mass spectrometer are obtained, wherein the mass spectrometer is located in the detection chamber; if the signal-to-noise ratio is greater than or equal to a first preset threshold, and / or the detection time is greater than or equal to a second preset threshold, then the air pressure data detected by the air pressure sensor are obtained.

[0014] In one embodiment, the method for measuring the gas permeability of the thin film further includes:

[0015] Based on the temperature data, the air pressure data, and the ideal state equation, the predicted gas permeability of the thin film under test is obtained.

[0016] The gas permeability measurement value is filtered based on the Kalman filter algorithm and the predicted gas permeability value to obtain the gas permeability of the film under test.

[0017] In one embodiment, controlling the valve opening and closing time based on the predicted air pressure data to ensure that the air pressure data is within a preset air pressure range includes:

[0018] If the predicted air pressure data is greater than or equal to the third preset threshold, shorten the valve opening time;

[0019] If the predicted air pressure data is less than the third preset threshold, the valve opening time is increased.

[0020] In one embodiment, obtaining the gas permeability measurement value of the membrane under test based on the valve opening and closing time and the permeability calculation formula includes:

[0021] Obtain the cumulative valve opening time;

[0022] Based on the valve opening accumulation time, the temperature data, and the pressure data detected by the pressure sensor, the gas permeability measurement value is calculated according to the following formula:

[0023]

[0024] In the above formula, J S For permeability, Δp s The gas pressure in the detection room, Δp o The initial state is the gas pressure in the detection chamber, V is the volume of the detection chamber, A is the surface area of ​​the film to be measured, R is the gas state constant, T is the temperature data detected by the temperature sensor, and t is the initial state gas pressure. a Accumulated time for the valve to be open.

[0025] In one embodiment, the ideal gas law is:

[0026] PV = nRT;

[0027] In the above formula, P is the air pressure data detected by the air pressure sensor, V is the volume of the detection chamber, n is the amount of substance of the detected gas, R is the gas state constant, and T is the temperature data detected by the temperature sensor.

[0028] In one embodiment, obtaining the predicted gas permeability of the thin film under test based on the temperature data, the gas pressure data, and the ideal gas law includes:

[0029] Based on the temperature data, the air pressure data, and the ideal gas law, the amount of substance of the detected gas is calculated;

[0030] The predicted gas permeability of the membrane under test is obtained based on the amount of gas detected, wherein the predicted gas permeability of the membrane under test = the amount of gas detected / (detection time * surface area of ​​the membrane under test).

[0031] A second aspect of this application discloses a water-oxygen permeability measuring device for a thin film, wherein the thin film to be tested divides the test chamber into an inlet chamber and an accumulation chamber, and the test gas in the inlet chamber permeates through the thin film into the accumulation chamber. The device comprises:

[0032] The detection data acquisition module is used to acquire temperature data detected by the temperature sensor and air pressure data detected by the air pressure sensor. The temperature sensor and the air pressure sensor are located in the detection chamber connected to the accumulation chamber.

[0033] The valve opening and closing time control module is used to perform regression processing on the air pressure data based on the Gaussian process regression algorithm to obtain predicted air pressure data; and to control the valve opening and closing time according to the predicted air pressure data so that the air pressure data is within a preset air pressure range.

[0034] The water-oxygen permeability value acquisition module is used to obtain the gas permeability measurement value of the membrane under test based on the valve opening and closing time and the permeability calculation formula. The valve is located between the accumulation chamber and the detection chamber.

[0035] In the water and oxygen permeability measuring device of the above embodiments, by setting up a detection data acquisition module, a valve opening and closing time control module and a water and oxygen permeability value acquisition module to cooperate with each other, the acquired air pressure data is regressed based on the Gaussian process regression algorithm to obtain predicted air pressure data, thereby controlling the valve opening and closing time so that the air pressure data is within the preset air pressure range, improving the accuracy of the water and oxygen permeability measurement process and reducing the influence of the detection settings themselves.

[0036] A third aspect of this application provides a computer device including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method described above.

[0037] A fourth aspect of this application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method described above.

[0038] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0039] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained from these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of a gas permeation detection system provided in this application;

[0041] Figure 2This is a schematic diagram of a detection system for measuring gas permeability using a mass spectrometer, as provided in this application.

[0042] Figure 3 This is a schematic diagram illustrating the detection principle of a mass spectrometer based on a fixed accumulation time for measuring gas permeability, as provided in this application.

[0043] Figure 4 This is a schematic diagram showing the change of the permeability measurement signal of a sample to be tested as a function of measurement time, as provided in this application.

[0044] Figure 5 This is a schematic diagram illustrating the relationship between the measurement signal of a mass spectrometer and the accumulation time provided in this application.

[0045] Figure 6 This is a schematic flowchart of a gas permeability measurement method provided in one embodiment of this application;

[0046] Figure 7 This is a schematic diagram illustrating the principle of a Gaussian process regression algorithm provided in this application;

[0047] Figure 8 This is a flowchart illustrating a gas permeability measurement method provided in another embodiment of this application;

[0048] Figure 9 This is a schematic diagram illustrating the principle of a Kalman filter algorithm provided in this application;

[0049] Figure 10 This is a schematic diagram of the principle of a gas permeability detection system based on adjustable accumulation time provided in this application;

[0050] Figure 11 This is a schematic diagram illustrating the effect of using a gas permeability measurement method provided in this application. Detailed Implementation

[0051] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings. Preferred embodiments of this application are shown in the drawings. However, this application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the disclosure of this application.

[0052] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0053] When using the terms “including,” “having,” and “comprising” as described herein, another component may be added unless explicitly qualifying terms such as “only,” “consisting of,” etc. are used. Unless otherwise stated, singular terms may include plural forms and should not be construed as having a quantity of one.

[0054] It should be understood that although the terms “first,” “second,” etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used only to distinguish one element from another. For example, without departing from the scope of this application, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element.

[0055] In this application, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a direct connection or an indirect connection through an intermediate medium, or they can refer to the internal connection of two elements or the interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0056] The basic characteristics of a gas permeation detection system are as follows: Figure 1 As shown, the sample material is placed between the upper and lower chambers. Initially, the upper and lower chambers are close to a vacuum. After the detection begins, high-pressure water vapor or other gas is introduced into the upper chamber to create a large pressure difference between the upper and lower chambers, allowing the gas to slowly permeate through the material and enter the lower chamber. After a period of time, the gas permeation reaches a steady state, at which point the steady-state permeability is J. S The permeability of the material is P, and the pressure in the upper chamber is P. u Where d is the thickness of the material, the relationship between the permeation flow rate and the pressure is: That is, the gas permeability P of the sample material can be expressed as the steady-state gas permeability J under steady-state conditions. S With pressure P u The corresponding relationship is obtained. Based on this principle, the gas permeability of sample materials can be measured.

[0057] Currently, the steady-state gas permeability J s There are many measurement methods, such as the gravimetric method, storage experiment method, and mass spectrometry method. As the most precise instrument for measuring gas molecules, the mass spectrometer is well-suited for measuring gas permeability. The following example illustrates the process of measuring the steady-state permeability of a gas using a mass spectrometer. Please refer to [link / reference]. Figure 2The device comprises three chambers: an inlet chamber, an accumulation chamber, and a detection chamber. Each chamber is connected to a vacuum pump via a valve. The accumulation chamber is connected to the detection chamber via a valve. A mass spectrometer is connected to the detection chamber to measure the gas pressure. Each chamber can be equipped with a pressure sensor (barometer) and a temperature sensor to obtain relevant data. Before the experiment begins, the sample film is placed between the inlet and accumulation chambers, and each chamber is evacuated to a vacuum state. At the start of the experiment, the gas to be tested is introduced into the inlet chamber through a buffer device. The gas permeates through the sample film and enters the accumulation chamber. After passing through the t... a After a period of time, the gas enters the detection chamber and is detected by a mass spectrometer. The output of the test is the gas pressure p, which is then processed by a mass spectrometer. d After the time test, the gas in the accumulation chamber and the detection chamber was evacuated, and the evacuation time was t. e After the evacuation is completed, the next cycle begins. Each signal acquisition consists of three processes: "vacuuming - accumulation - detection," with each step in each cycle using a consistent time period setting. The output results are as follows: Figure 3 As shown, Δp represents the gas pressure jump detected by the mass spectrometer, at which point the gas steady-state permeability... Where t a V is the accumulated opening time of the valve, A is the volume of the detection chamber, R is the surface area of ​​the film to be tested, T is the gas state constant, and T is the temperature data detected by the temperature sensor.

[0058] However, in actual measurements, the process of measuring gas permeability using the aforementioned mass spectrometer can take a considerable amount of time (up to 60 days). The mass spectrometer's ionization efficiency decreases over time, and fluctuations in ambient temperature also affect the final water-oxygen permeability measurement, leading to inaccurate detection signals. Figure 4 As shown, the solid line represents the curve of gas pressure in the detection chamber changing with time under ideal conditions. As time increases, the gas permeability of the membrane tends to stabilize, and thus the gas pressure in the detection chamber also tends to stabilize. The dotted line represents the curve of gas pressure in the detection chamber changing with time under detection conditions. Because the ionization efficiency of the mass spectrometer decreases over time, signal fluctuations will occur for the same pressure detection; that is, the correspondence between the measured signal and the actual signal is not fixed. Furthermore, because the mass spectrometer filament reacts with oxygen and water vapor, the measured signal does not linearly correspond to the gas pressure concentration in the chamber. Figure 5As shown, the straight line represents the relationship between the mass spectrometer detection signal and accumulation time under ideal conditions, while the broken line represents the relationship between the mass spectrometer detection signal and accumulation time under detection conditions. Clearly, as the accumulation time increases, the gas pressure concentration at the latter three points is higher, corresponding to better signal linearity and closer to the true value. Conversely, when the pressure concentration is low, the linearity is poor, deviating from the true value. Therefore, to improve signal reliability, efforts should be made to ensure the mass spectrometer signal is within the linear range, i.e., maintaining a high level of gas pressure in the detection chamber. However, in existing mass spectrometer measurement methods, the gas accumulation time is always fixed. This time-integration-based method cannot control the gas pressure entering the mass spectrometer, thus introducing significant measurement errors.

[0059] Based on this, this application provides a method for measuring the gas permeability of thin films, which can effectively control the gas pressure entering the mass spectrometer and reduce measurement errors. To illustrate the technical solution of the water-oxygen permeability measurement method of this application, specific embodiments are described below.

[0060] In one embodiment, such as Figure 6 As shown, a method for measuring the gas permeability of a thin film is provided. The thin film under test divides the test chamber into an inlet chamber and an accumulation chamber. The test gas in the inlet chamber permeates through the thin film and enters the accumulation chamber. The method includes the following steps:

[0061] Step S10: Acquire temperature data detected by the temperature sensor and air pressure data detected by the air pressure sensor, wherein the temperature sensor and the air pressure sensor are located in a detection chamber connected to the accumulation chamber;

[0062] The temperature data and the air pressure data can be obtained through, for example... Figure 2 The detection device shown detects, specifically, the process described above.

[0063] Step S20: Perform regression processing on the air pressure data based on the Gaussian process regression algorithm to obtain predicted air pressure data;

[0064] Gaussian process regression is a nonparametric model that uses Gaussian process priors to perform regression analysis on the data. It includes two parts: noise (regression residuals) and Gaussian process priors, and its solution is obtained using Bayesian inference. If the form of the kernel function is not restricted, Gaussian process regression is theoretically a universal approximation of any continuous function in a compact space. In step S20, the acquired air pressure data is regressed to obtain a predicted value that approximates the actual value using this algorithm. Figure 7 The diagram shows the process of Gaussian process regression processing of existing data points to output a prediction curve, which is then used to obtain predicted air pressure data.

[0065] Step S30: Based on the predicted air pressure data, control the valve opening and closing time so that the air pressure data is within the preset air pressure range;

[0066] Specifically, such as Figure 2 As shown, the valve is located between the accumulation chamber and the detection chamber. Controlling the valve opening and closing time can control the gas pressure in the detection chamber. Based on the predicted gas pressure data in step S20, the valve opening and closing time is controlled so that the gas pressure data is within the preset gas pressure range.

[0067] Step S40: Based on the valve opening and closing time and the permeability calculation formula, obtain the gas permeability measurement value of the membrane to be tested, wherein the valve is located between the accumulation chamber and the detection chamber.

[0068] Specifically, based on the valve opening and closing time and the permeability calculation formula, the permeability under stable gas conditions can be obtained. Combined with the gas pressure data detected by the gas pressure sensor, the gas permeability measurement value of the membrane under test can be calculated.

[0069] In the gas permeability measurement method described in the above embodiments, gas pressure data from a pressure sensor is acquired, and a Gaussian process regression algorithm is used to regress the gas pressure data to obtain predicted gas pressure data. This predictive data is then used to control the valve opening and closing time, ensuring that the gas pressure in the test chamber remains within a preset range. Based on the valve opening time and the permeability calculation formula, the gas permeability measurement value of the membrane under test is obtained. Using the gas permeability measurement method for membranes in this application effectively reduces instrument detection errors and improves the accuracy of the detection signal.

[0070] In one embodiment, prior to acquiring the air pressure data detected by the barometric pressure sensor, the process includes:

[0071] The signal-to-noise ratio and detection time of real-time detection data detected by the mass spectrometer are obtained, wherein the mass spectrometer is located in the detection chamber; if the signal-to-noise ratio is greater than or equal to a first preset threshold, and / or the detection time is greater than or equal to a second preset threshold, then the air pressure data detected by the air pressure sensor are obtained.

[0072] Specifically, a mass spectrometer is a detection instrument that uses mass spectrometry to qualitatively and quantitatively determine the mass and intensity of gas particles, thereby obtaining the real-time detection data. The signal-to-noise ratio (SNR) is the ratio of signal to noise at the instrument's maximum undistorted output power. The SNR is typically not measured directly but calculated by measuring the amplitude of the noise signal. Since the gas permeability measurement method for the thin film in this application obtains the gas permeability of the thin film through prediction and algorithms, only a certain amount of real-time detection data needs to be acquired. Therefore, the SNR and detection time of the detection data can be used as data acquisition conditions. The detection time includes the total detection duration and the interval between acquired signals. For example, if the first preset threshold is set to 2 and the second preset threshold is set to 1 hour, then when the SNR of the acquired detection data is greater than 2 (signal-to-noise ratio greater than 2:1), and / or the interval time is greater than 1 hour, the amount of real-time monitoring data acquired meets the requirements, and a detection data sample can be established based on the real-time detection data.

[0073] In the gas permeability measurement method of the thin film in the above embodiments, the detection data sample is determined by setting a first preset threshold and a second preset threshold, which largely avoids the system's erroneous judgment and improves the system's reliability.

[0074] In one embodiment, such as Figure 8 As shown, the method for measuring the gas permeability of the thin film further includes the following steps:

[0075] Step S50: Obtain the predicted gas permeability of the thin film under test based on the temperature data, the gas pressure data, and the ideal state equation;

[0076] The temperature data and the air pressure data are obtained by temperature sensors and air pressure sensors located in the detection chamber.

[0077] Step S60: Filter the measured gas permeability value based on the Kalman filter algorithm and the predicted gas permeability value to obtain the gas permeability of the film to be tested.

[0078] Specifically, Kalman filtering applies statistics to filtering algorithms. Its core idea is to calculate the optimal estimate based on the current instrument "measurement value" and "measurement error" compared to the previous "prediction value" and "prediction error." A key feature of this algorithm is its inclusion of errors in the calculation, specifically dividing them into prediction error and measurement error, collectively referred to as noise. For example, ... Figure 9 The image shows an example of calculating the optimal driving position of a car based on the Kalman filter algorithm. Assume the currently obtained data signal is X. k-1 According to X k-1 The value of X is used to predict X.k Meanwhile, the signal we can actually measure is Y. k Both signals have corresponding uncertainties. Considering the above information, the Kalman filter algorithm is used to analyze the X signal. k and Y k By making revisions, the optimal value for the vehicle's position can be obtained. Similarly, in steps S40 and S50, given the measured and predicted gas permeability values, the optimal predicted gas permeability value can be obtained by processing the data using a Kalman filter algorithm, and output as the gas permeability of the film under test.

[0079] In one embodiment, controlling the valve opening and closing time based on the predicted air pressure data to ensure that the air pressure data is within a preset air pressure range includes:

[0080] If the predicted air pressure data is greater than or equal to the third preset threshold, shorten the valve opening time;

[0081] If the predicted air pressure data is less than the third preset threshold, the valve opening time is increased.

[0082] Specifically, such as Figure 10 As shown, in order to keep the gas pressure data within the preset gas pressure range, that is, to keep the Δp value stable during each cycle of detection, a third preset threshold should be set based on the mass spectrometer signal and past detection data. When the obtained gas pressure data is greater than the third preset threshold, the valve opening time t should be shortened. a This ensures that the gas pressure value Δp accumulated in the next indoor test is close to the third preset threshold. When the obtained gas pressure data is less than the third preset threshold, the valve opening time t is increased. a This allows the gas pressure value detected in the next accumulated indoor test to approach the third preset threshold. By setting the valve opening time, the monitoring data of the mass spectrometer fluctuates within a certain range, ensuring that the signal is within the linear segment of the mass spectrometer's detection range, thereby improving the accuracy of the signal.

[0083] In one embodiment, obtaining the gas permeability measurement value of the membrane under test based on the valve opening and closing time and the permeability calculation formula includes:

[0084] Obtain the cumulative valve opening time;

[0085] Based on the valve opening accumulation time, the temperature data, and the pressure data detected by the pressure sensor, the gas permeability measurement value is calculated according to the following formula:

[0086]

[0087] In the above formula, J S For the stable gas permeability, Δps The gas pressure in the detection room, Δp o The initial state is the gas pressure in the detection chamber, V is the volume of the detection chamber, A is the surface area of ​​the film to be measured, R is the gas state constant, T is the temperature data detected by the temperature sensor, and t is the initial state gas pressure. a Accumulated time for the valve to be open.

[0088] Specifically, the quality control instrument can detect the pressure value Δp of the gas being tested. s This application controls the valve opening time to make Δp s The value remains essentially constant, Δp o To detect the initial indoor gas pressure, the gas permeation detected by the mass spectrometer is related to the valve opening time t. a As a function of temperature T, the effect of gas pressure on permeability detection decreases.

[0089] In one embodiment, the ideal gas law is:

[0090] PV = nRT;

[0091] In the above formula, P is the air pressure data detected by the air pressure sensor, V is the volume of the detection chamber, n is the amount of substance of the detected gas, R is the gas state constant, and T is the temperature data detected by the temperature sensor.

[0092] The ideal gas law describes the relationship between pressure, volume, and temperature when an ideal gas is in equilibrium. In this embodiment, P is the pressure data detected by the pressure sensor, V is the volume of the detection chamber, R is the gas state constant, and T is the temperature data detected by the temperature sensor, all of which are known quantities. n is the amount of substance of the gas being detected, which is the quantity to be determined. Therefore, the amount of substance of the gas being detected can be solved based on the ideal gas state.

[0093] In one embodiment, obtaining the predicted gas permeability of the thin film under test based on the temperature data, the gas pressure data, and the ideal gas law includes:

[0094] Based on the temperature data, the air pressure data, and the ideal gas law, the amount of substance of the detected gas is calculated;

[0095] The predicted gas permeability of the membrane under test is obtained based on the amount of gas detected, wherein the predicted gas permeability of the membrane under test = the amount of gas detected / (detection time * surface area of ​​the membrane under test).

[0096] Specifically, by acquiring the temperature data from the temperature sensor and the pressure data from the pressure sensor, the mass (moles) of the detected gas can be obtained based on the ideal state equation. Since gas permeability is the amount of gas flowing through a unit area per unit time, the steady-state gas permeability can be calculated and used as a predicted value. Specifically, the predicted gas permeability of the film under test = the amount of gas detected / (detection time * surface area of ​​the film under test).

[0097] In the gas permeability measurement method of the thin film in the above embodiments, by setting a sensor in the detection device to acquire corresponding parameter data, the predicted value of the gas permeability of the sample thin film can be calculated based on the parameter data and the ideal state equation. This predicted value serves as correction data, which can correct the mass spectrometer detection signal and improve the accuracy of the mass spectrometer detection signal. Specifically, for example... Figure 11 As shown, the gas permeability measurement method of this application significantly reduces the random error fluctuation of the instrument and greatly improves the accuracy of gas permeability measurement data.

[0098] A second aspect of this application discloses a water-oxygen permeability measuring device for a thin film, wherein the thin film to be tested divides the test chamber into an inlet chamber and an accumulation chamber, and the test gas in the inlet chamber permeates through the thin film into the accumulation chamber. The device comprises:

[0099] The detection data acquisition module is used to acquire temperature data detected by the temperature sensor and air pressure data detected by the air pressure sensor. The temperature sensor and the air pressure sensor are located in the detection chamber connected to the accumulation chamber.

[0100] The valve opening and closing time control module is used to perform regression processing on the air pressure data based on the Gaussian process regression algorithm to obtain predicted air pressure data; and to control the valve opening and closing time according to the predicted air pressure data so that the air pressure data is within a preset air pressure range.

[0101] The water-oxygen permeability value acquisition module is used to obtain the gas permeability measurement value of the membrane under test based on the valve opening and closing time and the permeability calculation formula. The valve is located between the accumulation chamber and the detection chamber.

[0102] In the water and oxygen permeability measuring device described in the above embodiments, the detection data acquisition module, the valve opening and closing time control module, and the water and oxygen permeability value acquisition module work together to perform regression processing on the acquired air pressure data based on the Gaussian process regression algorithm to obtain predicted air pressure data, thereby controlling the valve opening and closing time so that the air pressure data is within the preset air pressure range, thus improving the accuracy of the water and oxygen permeability measurement process.

[0103] A third aspect of this application provides a computer device including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method described above.

[0104] A fourth aspect of this application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method described above.

[0105] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0106] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, or optical storage, etc. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc.

[0107] Please note that the above embodiments are for illustrative purposes only and do not imply any limitation on the present invention.

[0108] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0109] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A method for measuring the gas permeability of a thin film, characterized in that, The test chamber is divided into an inlet chamber and an accumulation chamber by the thin film under test. The test gas in the inlet chamber permeates through the thin film and enters the accumulation chamber. The method includes: The temperature data detected by the temperature sensor and the air pressure data detected by the air pressure sensor are acquired. The temperature sensor and the air pressure sensor are located in a detection chamber that is connected to the accumulation chamber. The air pressure data is regressed using a Gaussian process regression algorithm to obtain predicted air pressure data. Based on the predicted air pressure data, the valve opening and closing time is controlled so that the air pressure data is within a preset air pressure range; Obtain the valve opening accumulation time; Based on the valve opening accumulation time, the temperature data, and the pressure data detected by the pressure sensor, the gas permeability measurement value is calculated according to the following formula: ； In the above formula, For penetration rate, The indoor gas pressure is to be detected. The initial state is determined by the gas pressure in the detection chamber, where V is the volume of the detection chamber, A is the surface area of ​​the film to be measured, R is the gas state constant, and T is the temperature data detected by the temperature sensor. The valve is located between the accumulation chamber and the detection chamber, and the valve is used for the accumulation time.

2. The method for measuring the gas permeability of a thin film according to claim 1, characterized in that, Before acquiring the air pressure data detected by the barometer, the following steps are included: The signal-to-noise ratio and detection time of real-time detection data obtained by the mass spectrometer are located in the detection chamber; If the signal-to-noise ratio is greater than or equal to a first preset threshold, and / or the detection time is greater than or equal to a second preset threshold, then the air pressure data detected by the air pressure sensor is acquired.

3. The method for measuring the gas permeability of a thin film according to claim 2, characterized in that, Also includes: The predicted gas permeability of the thin film under test is obtained based on the temperature data, the gas pressure data, and the ideal gas law. The gas permeability measurement value is filtered based on the Kalman filter algorithm and the predicted gas permeability value to obtain the gas permeability of the film under test.

4. The method for measuring the gas permeability of a thin film according to claim 3, characterized in that, The step of controlling the valve opening and closing time based on the predicted air pressure data to ensure that the air pressure data is within a preset air pressure range includes: If the predicted air pressure data is greater than or equal to the third preset threshold, shorten the valve opening time; If the predicted air pressure data is less than the third preset threshold, the valve opening time is increased.

5. The method for measuring the gas permeability of a thin film according to claim 3 or 4, characterized in that, The ideal gas law is: PV = nRT; In the above formula, P is the air pressure data detected by the air pressure sensor, V is the volume of the detection chamber, n is the amount of substance of the test gas, R is the gas state constant, and T is the temperature data detected by the temperature sensor.

6. The method for measuring the gas permeability of a thin film according to claim 3 or 4, characterized in that, The process of obtaining the predicted gas permeability of the thin film under test based on the temperature data, the gas pressure data, and the ideal gas law includes: Based on the temperature data, the air pressure data, and the ideal gas law, the amount of substance of the test gas is calculated; The predicted gas permeability of the membrane under test is obtained based on the amount of test gas, wherein the predicted gas permeability of the membrane under test = the amount of test gas / (detection time * surface area of ​​the membrane under test).

7. A gas permeability measuring device for a thin film, characterized in that, The test membrane divides the test chamber into an inlet chamber and an accumulation chamber. The test gas in the inlet chamber permeates through the membrane and enters the accumulation chamber. The device includes: The detection data acquisition module is used to acquire temperature data detected by the temperature sensor and air pressure data detected by the air pressure sensor. The temperature sensor and the air pressure sensor are located in the detection chamber connected to the accumulation chamber. The valve opening and closing time control module is used to perform regression processing on the air pressure data based on the Gaussian process regression algorithm to obtain predicted air pressure data; and to control the valve opening and closing time according to the predicted air pressure data so that the air pressure data is within a preset air pressure range. The water-oxygen permeability acquisition module is used to acquire the valve opening accumulation time; based on the valve opening accumulation time, the temperature data, and the air pressure data detected by the air pressure sensor, the gas permeability measurement value is calculated according to the following formula: ； In the above formula, For penetration rate, The indoor gas pressure is to be detected. The initial state is determined by the gas pressure in the detection chamber, where V is the volume of the detection chamber, A is the surface area of ​​the film to be measured, R is the gas state constant, and T is the temperature data detected by the temperature sensor. The valve is located between the accumulation chamber and the detection chamber, and the valve is used for the accumulation time.

8. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it implements the steps of the method according to any one of claims 1 to 6.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the steps of the method according to any one of claims 1 to 6.

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