Carrying device, detection apparatus and method of using a carrying device
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SKYVERSE TECH CO LTD
- Filing Date
- 2021-06-30
- Publication Date
- 2026-06-05
Smart Images
Figure CN115541583B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor testing technology, and more specifically, to a carrier device, a testing device, and a method of using the carrier device. Background Technology
[0002] In the semiconductor equipment industry, the thickness of semiconductor workpieces varies from tens to hundreds of micrometers. Some workpieces do not allow for hard contact on their backsides. When optical inspection equipment inspects workpieces, it is desirable for the workpiece to remain stationary on the support device without deformation or vibration to meet inspection requirements. Therefore, only the edges of the workpiece can be supported on the support device. When the workpiece is relatively thin, it will experience significant sagging deformation due to gravity when placed on the support device. Such a support device cannot guarantee the flatness of the workpiece, thus affecting the inspection accuracy of the equipment. Summary of the Invention
[0003] This application provides a carrier device, a testing device, and a method for using the carrier device.
[0004] The supporting device according to this application includes a supporting part and an air blowing part. The supporting part includes a supporting assembly for supporting the edge of a workpiece to fix the workpiece to the supporting surface of the supporting assembly. The air blowing part and the top surface of the workpiece fixed to the supporting surface form a first chamber. The air blowing part is provided with a first air hole for blowing air into the first chamber. The first chamber has an air outlet for discharging the gas in the first chamber, thereby forming a vortex airflow in the central region of the workpiece.
[0005] In some embodiments, the air outlet includes an opening in the first chamber opposite to the workpiece, and / or the air outlet includes a second air hole located on the side wall of the blowing part.
[0006] In some embodiments, the angle formed between the blowing direction of the first air hole and the tangential direction at the first air hole includes an acute angle.
[0007] In some embodiments, the first air hole includes a plurality of holes, which are evenly distributed on the sidewall of the air blowing part.
[0008] In some embodiments, the support assembly includes a clamping member. The clamping member is used to clamp a side edge or top edge surface of the workpiece supported on the support surface. The clamping member is configured to move between a clamping position and a relaxed position. When the clamping member is in the clamping position, the clamping member abuts against the side edge or top edge surface of the workpiece. When the clamping member is in the relaxed position, the clamping member is spaced apart from the side edge and top edge surface of the workpiece. At least when the clamping member is used to clamp the top edge surface of the workpiece supported on the support surface, the support assembly further includes a support member for supporting the bottom surface of the workpiece edge.
[0009] In some embodiments, the support assembly includes a support member. The support member is used to support the bottom surface of the workpiece edge.
[0010] In some embodiments, the supporting part further includes an air flotation assembly. The air flotation assembly forms a second chamber with the bottom surface of the workpiece. The air flotation assembly includes a third air hole and a vent. The third air hole is used to blow air into the second chamber, and the vent is used to discharge gas from the second chamber. The air pressure in the second chamber is lower than the air pressure in the first chamber.
[0011] In some embodiments, the air flotation assembly further includes a connector connected to the support assembly. The connector and the bottom surface of the workpiece form the second chamber. The first chamber and the second chamber are located on opposite sides of the workpiece. The support extends from the side wall of the connector toward the center of the second chamber and protrudes beyond the side wall of the air blowing portion. A third air hole is located on the side wall of the connector and is used to blow air into the second chamber. The air pressure inside the second chamber is lower than the external air pressure of the support assembly, and the air pressure inside the first chamber is higher than the air pressure inside the second chamber.
[0012] In some embodiments, the supporting device further includes an air extraction device in communication with the vent, the air extraction device being used to extract air from the second chamber.
[0013] In some embodiments, the vent includes a fourth vent located on the side wall of the connector, the fourth vent being used to discharge gas from the second chamber to the outside of the second chamber.
[0014] In some embodiments, the vent includes an opening located on the side of the second chamber opposite to the workpiece.
[0015] In some embodiments, the fourth air hole includes multiple fourth air holes, and in a direction perpendicular to the bearing surface, the center of each fourth air hole is offset relative to the center of the third air hole toward a side opposite to the blowing direction of the third air hole.
[0016] In some embodiments, in the direction perpendicular to the bearing surface, the center of each of the fourth vents is on the same straight line as the center of the third vent.
[0017] In some embodiments, the volume of the third pore is smaller than the volume of the fourth pore.
[0018] In some embodiments, the angle formed between the blowing direction of the third air hole and the tangential direction at the third air hole includes an acute angle.
[0019] In some embodiments, the third vent includes a plurality of third vents distributed on the sidewall of the connector, and in a direction perpendicular to the bearing surface, the center of each third vent is on the same straight line as the center of the first vent.
[0020] In some embodiments, the support portion further includes a chassis, the support assembly is connected to the chassis, and the space between the bottom surface of the workpiece and the chassis forms the second chamber.
[0021] In some embodiments, the third air vent is located in the chassis, and the blowing direction of the third air vent intersects the central axis of the chassis.
[0022] In some embodiments, the vent further includes a fourth vent located in the chassis, the vent being used to discharge gas from the second chamber to the outside of the second chamber.
[0023] In some embodiments, the carrier assembly further includes a clamping member. The connector further includes a receiving groove in which the clamping member is located and is movably connected to the chassis or the connector.
[0024] In some embodiments, the support portion further includes a chassis connected to the support assembly, and the support device further includes a drive assembly, which includes a drive member and a lifting rod. The drive member is used to drive the lifting rod to move up and down relative to the chassis so that the workpiece passes through the first chamber and is then fixed to the support surface by the support assembly.
[0025] In some embodiments, the chassis has a through hole, a first end of the lifting rod is connected to the drive member, and a second end of the lifting rod is at least partially received in the through hole, with the first end and the second end opposite to each other. The drive member is used to drive the lifting rod to extend out of the through hole and above the bearing surface, so that the workpiece can be placed on the second end. The drive member is also used to drive the lifting rod to descend, so that the workpiece placed on the second end is supported by the bearing surface. The drive member is also used to drive the lifting rod to continue descending, so that at least a portion of the lifting rod remains within the through hole.
[0026] In some embodiments, the support members include a plurality of them, each of which is located between two adjacent fourth air holes.
[0027] The testing equipment of this application includes a testing device and a support device as described in any of the above embodiments. The testing device corresponds to the support device and is used to test the workpiece fixed on the support surface.
[0028] The method of using the support device according to the embodiments of this application includes: placing a workpiece on a support assembly of a support portion, the support assembly being used to support the edge of the workpiece so that the workpiece is fixed to the support surface of the support assembly; blowing air into a first chamber through a first air hole of an air blowing portion to form a vortex airflow in the central region of the workpiece, the air blowing portion and the top surface of the workpiece supported on the support surface forming the first chamber.
[0029] In some embodiments, the support portion further includes an air flotation assembly. The air flotation assembly forms a second chamber with the bottom surface of the workpiece. The air flotation assembly includes a third air hole and a vent. The third air hole is used to blow air into the second chamber, and the vent is used to discharge gas from the second chamber. After placing the workpiece on the support member of the support portion, the method of use further includes: blowing air into the second chamber through the third air hole and discharging the gas in the second chamber through the vent, so that the air pressure in the second chamber is lower than the air pressure in the first chamber.
[0030] In some embodiments, the support member for placing the workpiece on the bearing portion includes: driving a lifting rod to extend out of the through hole of the chassis and above the bearing surface using a driving member; placing the workpiece at a second end of the lifting rod; driving the lifting rod to descend using the driving member so that the workpiece placed at the second end passes through the first chamber and is supported on the bearing surface; and driving the lifting rod to continue descending using the driving member so that the lifting rod disengages from the workpiece and at least a portion of the lifting rod remains within the through hole.
[0031] In the bearing device, testing equipment, and method of using the bearing device of this application, the bearing component supports the edge of the workpiece and fixes the workpiece to the bearing surface of the bearing component. At this time, the air blowing part and the top surface of the workpiece fixed to the bearing surface form a first chamber. Air is blown into the first chamber through the first air hole of the air blowing part, and the gas in the first chamber is discharged from the air outlet, so that a vortex airflow is formed in the central area of the top surface of the workpiece. As a result, the air pressure in the central area is less than the air pressure outside the bearing device. There is an air pressure difference between the top and bottom surfaces of the workpiece, which can prevent the central area of the workpiece from deforming due to its own weight, ensure that the workpiece has good flatness, and improve the detection accuracy of the testing equipment.
[0032] Additional aspects and advantages of embodiments of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of embodiments of this application. Attached Figure Description
[0033] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, wherein:
[0034] Figure 1 This is a three-dimensional structural schematic diagram of the support device according to certain embodiments of this application;
[0035] Figure 2 yes Figure 1 An enlarged schematic diagram of point II in the load-bearing device shown;
[0036] Figure 3 This is a three-dimensional structural schematic diagram of the support device according to certain embodiments of this application;
[0037] Figure 4 This is a schematic diagram of a vortex airflow forming in the central region of the top surface of a workpiece in a carrying device according to certain embodiments of this application;
[0038] Figure 5 This is a schematic diagram of the structure of the clamping member in the carrying device of some embodiments of this application, which abuts against the edge side of the workpiece;
[0039] Figure 6 This is a schematic diagram of the structure of the clamping member abutting the top edge of the workpiece in the carrying device of certain embodiments of this application;
[0040] Figure 7 This is a schematic diagram of the connection between the connector and the air blowing part in the carrier device of some embodiments of this application;
[0041] Figure 8 This is a schematic diagram of the structure of the support device according to certain embodiments of this application;
[0042] Figure 9 yes Figure 8 A schematic cross-sectional view of the load-bearing device along line IX-IX;
[0043] Figure 10 This is a schematic diagram of the structure of the chassis of the support device in some embodiments of this application having a third air hole and a fourth air hole;
[0044] Figure 11 This is a three-dimensional structural schematic diagram of the detection device according to some embodiments of this application;
[0045] Figures 12 to 14 This is a flowchart illustrating the method of using the carrier device according to certain embodiments of this application. Detailed Implementation
[0046] The embodiments of this application will be further described below with reference to the accompanying drawings. The same or similar reference numerals in the drawings denote the same or similar elements or elements having the same or similar functions throughout.
[0047] Furthermore, the embodiments of this application described below in conjunction with the accompanying drawings are exemplary and are only used to explain the embodiments of this application, and should not be construed as limiting this application.
[0048] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0049] Please see Figure 1 and Figure 2 The supporting device 100 of this application embodiment includes a supporting part 10 and an air blowing part 30. The supporting part 10 includes a supporting assembly 11, which supports the edge 201 of the workpiece 200 so that the workpiece 200 is fixed to the supporting surface 111 of the supporting assembly 11. The air blowing part 30 and the top surface 203 of the workpiece 200 supported on the supporting surface 111 form a first chamber 20. The air blowing part 30 is provided with a first air hole 31, which is used to blow air into the first chamber 20. The first chamber 20 has an air outlet 21, which is used to discharge the gas in the first chamber, so that a vortex airflow is formed in the central region of the workpiece 200.
[0050] Please see Figure 5 and Figure 6It should be noted that the bearing surface 111 is a virtual surface used to set the workpiece 200. In this embodiment, the bearing assembly 11 includes a support member 113, which supports the bottom edge 205 of the workpiece 200. The plane where the contact surface between the support member 113 and the bottom edge 205 of the workpiece 200 is located is the bearing surface 111. In other embodiments, the bearing assembly 11 is used to clamp the side edge 207 of the workpiece 200. In this case, the surface where the bottom edge 205 of the workpiece 200 is located after the bearing assembly 11 fixes the workpiece 200 is the bearing surface 111.
[0051] The workpiece 200 includes, but is not limited to, components such as wafers, chips, ceramic substrates, display panels, mobile phone front covers, mobile phone back covers, VR glasses, AR glasses, smartwatch covers, glass, lenses, and housings of any device (e.g., mobile phone cases). This application only uses a wafer as an example for detailed description; the situation is similar when the workpiece 200 is another type of component, and will not be described in detail. The edge 201 of the workpiece 200 can be the outer perimeter of the workpiece 200 that does not require processing, while the remaining portion is the central area of the workpiece 200.
[0052] In the semiconductor equipment industry, the thickness of semiconductor workpieces 200 varies from tens to hundreds of micrometers, and hard contact is not allowed on the back side of some workpieces 200 (such as the bottom surface 205 of workpiece 200). Optical inspection equipment 1000 ( Figure 11 When inspecting workpiece 200 (as shown), it is desirable for workpiece 200 to remain stationary while supported on the support device 100, without deformation or vibration, to meet inspection requirements. Therefore, only the edge 201 of workpiece 200 can be supported on the support device 100. When workpiece 200 is relatively thin, it will experience significant downward deformation due to gravity when placed on the support device 100. Such a support device 100 cannot guarantee the flatness of workpiece 200, thus affecting the inspection accuracy of the inspection equipment 1000.
[0053] Please continue reading. Figure 1 and Figure 2 In the bearing device 100 of this application, the bearing assembly 11 supports the edge 201 of the workpiece 200 and fixes the workpiece 200 to the bearing surface 111 of the bearing assembly 11. At this time, the air blowing part 30 and the top surface 203 of the workpiece 200 fixed to the bearing surface 111 form a first chamber 20. Air is blown into the first chamber 20 by the first air hole 31 of the air blowing part 30, and the gas in the first chamber 20 is discharged from the air outlet 21, so that a vortex airflow is formed in the central region of the top surface 203 of the workpiece 200 (e.g., Figure 4(As shown by the dashed arrow in the image), the air pressure within this central area is lower than the air pressure outside the bearing device 100. This reduces the deformation of the central area of the workpiece 200 due to its own weight, ensuring good flatness of the workpiece 200 and improving the performance of the testing equipment 1000. Figure 11 (As shown) the detection accuracy of workpiece 200.
[0054] The support component 11 of the support part 10 is used to support the edge 201 of the workpiece 200. On the one hand, the support component 11 only contacts the edge part of the bottom surface 205 of the workpiece 200 and does not contact the rest of the bottom surface 205 of the workpiece 200. On the other hand, when the workpiece 200 is supported on the support component 11 of the support part 10, the support component 11 can ensure that the workpiece 200 remains stationary and does not vibrate, so as to meet the testing requirements.
[0055] Please combine Figure 2 and Figure 3 When the workpiece 200 is fixed on the bearing surface 111, the top surface 203 of the workpiece 200 and the side wall of the air blowing part 30 form a first chamber 20. One side of the first chamber 20 has an air outlet 21 to allow gas inside the first chamber 20 to be discharged from the outlet 21, meaning that one side of the first chamber 20 is connected to the outside; the other side of the first chamber 20 is the top surface 203 of the workpiece 200. The arrangement of the first chamber 20 facilitates the formation of a vortex airflow in the central region of the top surface 203 of the workpiece 200 by the bearing device 100, thereby reducing the deformation of the workpiece 200 fixed on the bearing surface 111 due to its own weight to a certain extent, and increasing the flatness of the workpiece 200.
[0056] In some embodiments, the air blowing part 30 may be annular, specifically annular, triangular, rectangular or polygonal. The specific shape of the air blowing part 30 may be set according to the shape of the workpiece 200 that the bearing part 10 actually needs to support. Specifically, this application describes the air blowing part 30 as an annular structure. When the air blowing part 30 has other shapes, it is similar to the case when the air blowing part 30 has an annular structure, and they will not be listed here.
[0057] Please combine Figure 4The first air hole 31 penetrates the side wall of the blowing part 30. To ensure that when air is blown into the first chamber 20 using the first air hole 31, a vortex airflow can be formed in the central region of the top surface 203 of the workpiece 200, the angle formed by the blowing direction oo1 of the first air hole 31 and the tangent direction oo2 at the first air hole 31 includes an acute angle. Similarly, the angle formed by the blowing direction oo1 of the first air hole 31 and the tangent direction oo2 at the first air hole 31 can also include an obtuse angle. That is to say, the first air hole 31 is an oblique hole, and the length of the first air hole 31 extending from the outer peripheral surface of the blowing part 30 to the inner peripheral surface of the blowing part 30 is greater than the thickness of the blowing part 30. Thus, the bearing device 100 blows air into the first chamber 20 through the first air hole 31 and discharges the gas in the first chamber 20 from the opening of the first chamber 20 to the outside of the bearing device 100, thereby forming a vortex airflow (such as...) within the first chamber 20. Figure 4 (As shown by the dashed arrow in the diagram), to reduce the air pressure in the first chamber 20. In one embodiment, the air pressure on one side of the bottom surface 205 of the workpiece 200 is atmospheric pressure, and the air pressure in the first chamber 20 is less than the air pressure on one side of the bottom surface 205 of the workpiece 200. The workpiece 200 is subjected to an upward force (from the bottom surface 205 of the workpiece 200 to the top surface 203 of the workpiece 200), and the deformed workpiece 200 can become flat to a certain extent, ensuring that the flatness of the workpiece 200 meets the requirements.
[0058] In one embodiment, the number of first air holes 31 may be one. The bearing device 100 controls the airflow speed blowing towards the first air hole 31 to form a vortex airflow in the first chamber 20, thereby enabling the deformed workpiece 200 to become flat to a certain extent and ensuring that the flatness of the workpiece 200 meets the requirements.
[0059] In embodiments of this application, the first air hole 31 may include multiple holes, which are evenly distributed on the sidewall of the blowing section 30. The supporting device 100 uses the multiple first air holes 31 to blow air into the first chamber 20, which can more quickly form a vortex airflow, allowing the deformed workpiece 200 to become flat more quickly, improving the performance of the testing equipment 1000. Figure 11 (As shown) improves the detection efficiency of workpiece 200. Simultaneously, multiple first air holes 31 are evenly distributed on the sidewall of the blowing section 30. When the carrying device 100 blows air into the first chamber 20 using the multiple first air holes 31, a uniform and stable vortex airflow is formed within the first chamber 20, allowing the air pressure in the first chamber 20 to be maintained within a stable range. This is beneficial for the deformed workpiece 200 to reach the detection equipment 1000 (as shown). Figure 11 The required flatness (as shown in the figure).
[0060] In some embodiments, a plurality of first air holes 31 may be unevenly distributed on the sidewall of the blowing part 30. In this case, the airflow speed of each first air hole 31 can be controlled individually so as to form a vortex airflow in the first chamber 20.
[0061] Specifically, the cross-sectional shape of the first vent 31 may include a circle, a rectangle, or a polygon. The cross-sectional shape of the first vent 31 may also be other shapes. This application does not limit the cross-sectional shape of the first vent 31. In addition, this application describes the cross-sectional shape of the first vent 31 as a circle.
[0062] Please see Figure 5 and Figure 6 In some embodiments, the support assembly 11 may include a clamping member 112 for clamping the edge side 207 or edge top surface 203 of the workpiece 200. In one example, see [reference needed]. Figure 5 The clamping member 112 can be used to clamp the edge side 207 of the workpiece 200. See another example. Figure 6 The support assembly 11 also includes a support member 113, which supports the bottom edge surface 205 of the workpiece 200, and a clamping member 112 can be used to clamp the top edge surface 203 of the workpiece 200 that is supported on the bearing surface 111.
[0063] Furthermore, in some embodiments, the clamping member 112 can be configured to move between a clamping position and a relaxed position. When the clamping member 112 is in the clamping position, it abuts against the edge side surface 207 or the edge top surface 203 of the workpiece 200. When the clamping member 112 is in the relaxed position, it is spaced apart from the edge side surface 207 and the edge top surface 203 of the workpiece 200. Wherein, at least when the clamping member 112 is used to clamp the edge top surface 203 of the workpiece 200 supported on the bearing surface 111, the bearing assembly 11 further includes a support member 113, the bearing surface 111 of which supports the bottom surface 205 of the edge of the workpiece 200.
[0064] Specifically, please refer to Figure 5 When the clamping member 112 clamps the edge side 207 of the workpiece 200, the air blowing part 30 may have a mounting hole 32 that penetrates the air blowing part 30, so that the clamping member 112 can be mounted on the side wall of the air blowing part 30 and can move in the radial (X direction) direction of the bearing device 100, so as to selectively clamp the edge side 207 of the workpiece 200 in the clamping position, or release the clamping of the workpiece 200 in the slack position and move it outside the first chamber 20, so as not to hinder the workpiece 200 from moving into the air blowing part 30 or moving to the outside of the air blowing part 30.
[0065] Specifically, please refer to Figure 6When the clamping member 112 clamps the edge top surface 203 of the workpiece 200 supported on the bearing surface 111, the upper surface 33 of the air blowing part 30 may be provided with a mounting hole 32 to mount the clamping member 112 to the air blowing part 30 and abut against the edge top surface 203 of the workpiece 200. In one example, the clamping member 112 can rotate about the central axis of the mounting hole 32 to selectively clamp the edge top surface 203 of the workpiece 200 in the clamping position, or release the clamping of the workpiece 200 in the relaxed position and rotate it out of the first chamber 20, so as not to hinder the workpiece 200 from moving into or out of the air blowing part 30. In another example, the clamping member 112 can move along a direction perpendicular to the support surface (Y direction) or parallel to the support surface 111 to selectively clamp the edge top surface 203 of the workpiece 200 in the clamping position, or release the clamp on the workpiece 200 and rotate it out of the first chamber 20 in the slack position, so as not to hinder the workpiece 200 from moving into or out of the air blowing section 30. In yet another example, the clamping member 112 can both rotate about an axis parallel to the bearing surface 111 and passing through the center of the bearing surface 111, and reciprocate along an X direction perpendicular to the support surface 111 (Y direction) or parallel to the support surface 111, to selectively clamp the edge top surface 203 of the workpiece 200 in the clamping position, or release the clamp on the workpiece 200 and rotate it out of the first chamber 20 in the slack position, so as not to hinder the workpiece 200 from moving into or out of the air blowing section 30. When the clamping member 112 clamps the top edge surface 203 of the workpiece 200, the bearing assembly 11 may further include a support member 113. The support member 113 is mounted on the lower surface 34 of the air blowing section 30 and extends into the first chamber 20 to support the bottom edge surface 205 of the workpiece 200. The upper surface 1131 of the support member 113 is the bearing surface 111. The support member 113 may be a ring connected to the air blowing section 30; or multiple support members 113 may be included, for example, two, three, or more support members 113, each support member 113 being a protrusion. Multiple support members 113 are spaced apart and mounted on the lower surface 34 of the air blowing section 30 to stably support the workpiece 200 on the bearing surface 111. Finally, the clamping member 112 abuts against the top edge surface 203 of the workpiece 200 to fix the workpiece 200 on the bearing surface 111. In other embodiments, the support component 11 may not include the support member 113, and the support device 100 may include the clamping member 112.
[0066] In some embodiments, when the supporting device 100 includes a clamping member 112 for clamping the edge side 207 of the workpiece 200, or when the supporting device 100 does not include a clamping member 112, the supporting assembly 11 may further include a support member 113 for supporting the bottom edge 205 of the workpiece 200. The arrangement of the support member 113 can be consistent with the case where the clamping member 112 clamps the top edge 203 of the workpiece 200, and will not be described further here.
[0067] Please see Figure 7 In some embodiments, the support portion 10 may further include an air flotation assembly 13, which forms a second chamber 40 with the bottom surface 205 of the workpiece 200. The air flotation assembly 13 includes a connector 131, a third air hole 132, and a vent 133. The third air hole 132 is used to blow air into the second chamber 40, and the vent 133 is used to discharge the gas from the second chamber 40. The air pressure in the second chamber 40 is lower than the air pressure in the first chamber 20.
[0068] Specifically, the connector 131 is connected to the support assembly 11. For example, the connector 131 is fixedly connected to the support member 113. The sidewall of the connector 131 and the bottom surface 205 of the workpiece 200 form a second chamber 40. The first chamber 20 and the second chamber 40 are located on both sides of the workpiece 200 (the side where the top surface 203 is located and the side where the bottom surface 205 is located). The support member 113 extends from the sidewall of the connector 131 toward the center of the second chamber 20 and protrudes from the sidewall of the air blowing section 30.
[0069] In one embodiment, the support 113 extends from the outer peripheral surface 1311 of the connector 131 toward the center of the second chamber 40 and protrudes from the side wall of the air blowing part 30. The support 113 is located between the connector 131 and the air blowing part 30 so as to place the workpiece 200 on the support 113 and separate the workpiece 200 from the first chamber 20 and the second chamber 40.
[0070] In another embodiment, the support member 113 extends from the sidewall between the outer peripheral surface 1311 and the inner peripheral surface 1312 of the connector 131 toward the center of the second chamber 40 and protrudes from the sidewall of the air blowing part 30. The support member 113 is located between the connector 131 and the air blowing part 30. On the one hand, it facilitates the placement of the workpiece 200 on the support member 113 and separates the workpiece 200 from the first chamber 20 and the second chamber 40. On the other hand, other components (such as clamping members 112) can be installed in the part between the connector 131 and the air blowing part 30 where the support member 113 is not located.
[0071] In another embodiment, the support member 113 extends from the inner peripheral surface 1312 of the connector 131 toward the center of the second chamber 40 and protrudes from the side wall of the air blowing part 30. The connector 131 is directly connected to the air blowing part 30, which facilitates the placement of the workpiece 200 on the support member 113 and separates the workpiece 200 from the first chamber 20 and the second chamber 40. At the same time, it can effectively reduce the volume of the bearing device 100.
[0072] Please combine Figure 3 In some embodiments, the third air hole 132 penetrates the side wall of the connector 131. To ensure that when air is blown into the second chamber 40 using the third air hole 132, a vortex airflow can also be formed in the central region of the bottom surface 205 of the workpiece 200, the specific structure of the third air hole 132 is the same as that of the first air hole 31. That is, the angle formed between the blowing direction of the third air hole 132 and the tangent direction at the third air hole 132 includes an acute angle, and similarly, the angle formed between the blowing direction of the third air hole 132 and the tangent direction at the third air hole 132 may also include an obtuse angle. In other words, the third air hole 132 is also an oblique hole so that when the bearing device 100 blows air into the second chamber 40 through the third air hole 132, a vortex airflow can be formed in the second chamber 40. The gas in the second chamber 40 is discharged to the outside of the bearing device 100 through the vent 133. Simultaneously, the supporting device 100 adjusts the blowing speed of the third air hole 132 to ensure that the air pressure in the second chamber 40 is less than the air pressure outside the supporting device 100, and that the air pressure inside the first chamber 20 is greater than the air pressure inside the second chamber 40. Assuming the air pressure outside the supporting device 100 is P0, the air pressure inside the first chamber 20 is P1, and the air pressure inside the second chamber 40 is P2, when the workpiece 200 is placed on the supporting surface 111, since P1>P2, the workpiece 200 is ultimately subjected to a downward adsorption force, adsorbing the workpiece 200 onto the support member 113. In addition, the first air hole 31 causes the first chamber 20 to form a vortex airflow, making the air pressure in the central region of the top surface 203 of the workpiece 200 less than the air pressure in the edge region 201. This results in a greater reduction in the downward adsorption force on the central region than on the edge region 201, thereby reducing the deformation in the central region and making the workpiece 200, which deforms due to its own weight, relatively flat.
[0073] In some embodiments, there is one third air hole 132. The bearing device 100 controls the airflow speed blowing towards the third air hole 132 to form a vortex airflow in the second chamber 40, thereby making the workpiece 200, which is deformed due to its own weight, flatten to a certain extent and ensuring that the flatness of the workpiece 200 meets the requirements.
[0074] In the embodiments of this application, multiple third air holes 132 are included, and the multiple third air holes 132 are evenly distributed on the sidewall of the connector 131 or distributed at intervals on the sidewall of the connector 131. The carrying device 100 blows air into the second chamber 40 using the multiple third air holes 132, which can form a vortex airflow more quickly. At the same time, the multiple third air holes 132 are evenly distributed on the sidewall of the connector 131. When the carrying device 100 blows air into the second chamber 40 using the multiple third air holes 132, a uniform and stable vortex airflow can be formed in the second chamber 40, so that the air pressure in the second chamber 40 can be maintained within a stable range, ensuring that the flatness of the workpiece 200 meets the requirements of the testing device 1000. Figure 11 (As shown) requirements.
[0075] Please combine Figure 3 and Figure 7 In the embodiments of this application, in the direction perpendicular to the bearing surface 111, the center of each third air hole 132 is collinear with the center of the first air hole 31. The center of the third air hole 132 can refer to the center of gravity of the first entity when it is completely filled with the third air hole 132, and the center of the first air hole 31 can refer to the center of gravity of the second entity when it is completely filled with the first air hole 31. The interpretation of the centers of other holes follows the same way and will not be elaborated further. That is to say, the opening positions of the third air holes 132 and the first air holes 31 are consistent, thereby forming a stable vortex airflow in both the first chamber 20 and the second chamber 40. This ensures that there is air pressure on the top surface 203 and the bottom surface 205 of a certain area of the workpiece 200 after blowing, reducing the deformation of the workpiece 200 due to its own weight.
[0076] In other embodiments, in the direction perpendicular to the bearing surface 111, the center of each third air hole 132 may be offset relative to the center of the first air hole 31 in the direction opposite to the air blowing direction of the first air hole 31, or the center of each third air hole 132 may be offset relative to the center of the first air hole 31 in the opposite direction to the air blowing direction of the first air hole 31. That is to say, in the direction perpendicular to the bearing surface 111, the center of each third air hole 132 is not on the same straight line as the center of the first air hole 31. In this case, the bearing device 100 can control the time of blowing air toward the first air hole 31 and the third air hole 132 to ensure that there is vortex airflow on the top surface 203 and the bottom surface 205 of the workpiece 200 at the same location, and to prevent the workpiece 200 from deforming due to its own weight.
[0077] Please combine Figure 3 and Figure 7In some embodiments, the vent 133 may include a fourth vent 1331 located on the sidewall of the connector 131, the fourth vent 1331 being used to discharge gas from the second chamber 40 to the outside of the second chamber 40; and / or, the vent 133 may include an opening 1332 located on the side of the second chamber 40 opposite to the workpiece 200. That is, in one example, please refer to... Figure 3 The vent 133 may consist only of a fourth vent 1331 located on the side wall of the connector 131, through which gas in the second chamber 40 is discharged to the outside of the second chamber 40. In another example, the vent 133 may consist only of an opening 1332 located on the side of the second chamber 40 opposite to the workpiece 200, i.e., the bottom of the second chamber 40 is not sealed, and gas in the second chamber 40 is discharged to the outside of the second chamber 40 through the opening 1332. In yet another example, please refer to... Figure 7 The vent 133 includes a fourth vent 1331 located on the side wall of the connector 131 and an opening 1332 located on the side of the second chamber 40 away from the workpiece 200. The gas in the second chamber 40 can be discharged to the outside of the second chamber 40 simultaneously through the fourth vent 1331 and the opening 1332.
[0078] In some embodiments, there may be one or more fourth air holes 1331. Preferably, there are multiple fourth air holes 1331 distributed on the sidewall of the connector 131. The center of each fourth air hole 1331 is offset relative to the center of the third air hole 132 on the connector 131 in the opposite direction to the blowing direction of the third air hole 132. Alternatively, in the direction perpendicular to the bearing surface 111, the center of each fourth air hole 1331 is on the same straight line as the center of the third air hole 132.
[0079] In one embodiment, in the direction perpendicular to the bearing surface 111, the third air hole 132 and the fourth air hole 1331 are located at different heights on the side wall of the connector 131. Thus, when the bearing device 100 blows air toward the third air hole 132, the gas blown into the second chamber 40 is prevented from being discharged directly from the fourth air hole 1331 before a vortex airflow is formed, which is beneficial to the formation of a vortex airflow in the second chamber 40.
[0080] In other embodiments, the third vent 132 and the fourth vent 1331 are located at the same height on the side wall of the connector 131. In this case, the distance between the fourth vent 1331 and the third vent 132 is larger in the circumferential direction of the bearing surface 111, ensuring that the gas blown in from the third vent 132 can form a vortex airflow in the second chamber 40 before the gas in the second chamber 40 is discharged from the fourth vent 1331.
[0081] In some embodiments, the volume of the third vent 132 is smaller than the volume of the fourth vent 1331, so as to facilitate the rapid discharge of gas in the second chamber 40 to the outside of the carrier device 100.
[0082] The cross-sectional shape of the third vent 132 may include a circle, a rectangle, or a polygon. The cross-sectional shape of the third vent 132 can also be other shapes, and this application does not limit the cross-sectional shape of the third vent 132. Similarly, the cross-sectional shape of the fourth vent 1331 may also include a circle, a rectangle, or a polygon. The cross-sectional shape of the fourth vent 1331 can also be other shapes, and this application does not limit the cross-sectional shape of the fourth vent 1331. Furthermore, in the embodiments of this application, the cross-sectional shape of the third vent 132 is circular, while the cross-sectional shape of the fourth vent 1331 is rectangular.
[0083] In some embodiments, the support device 100 may also include an air extraction device (not shown) connected to the vent 133. The air extraction device (e.g., an air pump) is used to extract air from the second chamber 40 to expel the gas in the second chamber 40 more quickly, thereby improving the flatness adjustment efficiency.
[0084] Please see Figure 8 and Figure 9 The support unit 10 may also include a chassis 15, and the support assembly 11 is connected to the chassis 15. The space between the bottom surface 205 of the workpiece 200 and the chassis 15 forms a second chamber 40. Specifically, the chassis 15 is connected to the support assembly 11 through a connector 131. The chassis 15 can support the connector 131 and the support assembly 11 and seal the second chamber 40.
[0085] Please see Figure 10 In some embodiments, the third air hole 132 may be located in the chassis 15. The blowing direction of the third air hole 132 is parallel to or does not intersect with the central axis oo3 of the chassis 15. Thus, when the bearing device 100 blows air into the second chamber 40 through the third air hole 132 and vents through the vent 133, an air cushion is formed in the second chamber 40. According to the Bernoulli effect, the air pressure in the second chamber 40 is less than the air pressure outside the bearing device 100, thereby adsorbing the workpiece onto the support surface 111.
[0086] In one embodiment, the air pressure in the second chamber 40 is less than the air pressure in the first chamber 20, and the air pressure in the first chamber 20 is less than the external air pressure of the bearing device 100. This can reduce the pressure in the middle region of the top surface 203 of the workpiece 200, reduce the deformation of the middle region, and allow the workpiece 200 to adhere to the support member 113, thereby ensuring the stability of the workpiece 200.
[0087] In other embodiments, both the third vent 132 and the fourth vent 1331 are located on the chassis 15, and the fourth vent 1331 is closer to the side wall of the connector 131 than the third vent 132. Thus, when the bearing device 100 blows air into the second chamber 40 through the third vent 132, the gas blown into the second chamber 40 will not be directly discharged from the fourth vent 1331, which is conducive to the formation of a vortex airflow in the second chamber 40 and reduces the air pressure in the second chamber 40.
[0088] In some other embodiments, the fourth air hole 1331 is located on the side wall of the connector 131, and the third air hole 132 is located on the chassis 15. Similarly, when the bearing device 100 blows air into the second chamber 40 through the third air hole 132, the gas blown into the second chamber 40 stays in the second chamber 40 for a longer time, which is more conducive to the formation of vortex airflow in the second chamber 40 and reduces the air pressure in the second chamber 40.
[0089] In other embodiments of the present invention, the bearing device 100 includes a support member 113 or a clamping member 112 and does not have a third air hole 132. In this case, the air pressure on the bottom surface 205 of the workpiece 200 is atmospheric pressure. The first air hole 31 makes the air pressure in the first chamber 20 lower than atmospheric pressure. Therefore, the air pressure in the first chamber 20 is less than the air pressure on the bottom surface 205 of the workpiece 200. Especially when a vortex airflow is formed in the central region, the air pressure in the central region of the workpiece 200 is lower, so that the central region of the workpiece 200 can be subjected to a force opposite to gravity, thereby further reducing the deformation of the central region.
[0090] like Figure 2 As shown, it should be noted that the first chamber 20 has an air outlet 21, which is used to discharge the gas in the first chamber 20. In the above embodiment, the air outlet 21 is an opening 211 between the first chamber and the workpiece 200, and the workpiece 200 is placed on the support part 10 through the opening 211.
[0091] like Figure 5 As shown, in another embodiment of the present invention, the air outlet 21 further includes a second air hole 211 located on the side wall of the air blowing section 30.
[0092] In some embodiments, the air outlet 21 includes an opening 211 in the first chamber 20 opposite to the workpiece 200 and a second air hole 212 located on the side wall of the blowing section 30. This accelerates the exhaust speed into the first chamber 20, allowing the supporting device 100 to more quickly form a vortex airflow in the central region of the top surface 203 of the workpiece 200. Specifically, the volume of the second air hole 212 can be larger than the volume of the first air hole 31 to further accelerate the exhaust speed into the first chamber 20.
[0093] Please see Figure 7In some embodiments, the connector 131 may further include a receiving groove 1313, in which the clamping member 112 is located, and the clamping member 112 is movably connected to the chassis 15 or the connector 131. For example, the clamping member 112 is mounted on the chassis 15 sequentially via the air blowing part 30 and the receiving groove 1313 of the connector 131, and the clamping member 112 is movable in a direction perpendicular to the bearing surface 111. As another example, the clamping member 112 is mounted on the connector 131 sequentially via the air blowing part 30 and the receiving groove 1313 of the connector 131, and the clamping member 112 is movable in a direction perpendicular to the bearing surface 111.
[0094] Please combine Figure 7 In some embodiments, when the fourth air hole 1331 is located on the side wall of the connector 131, the support member 113 includes multiple members, each of which is located between two adjacent fourth air holes 1331. Thus, when the support member 113 extends from the outer peripheral surface 1311 of the connector 131 toward the inner peripheral surface 1312 of the connector 113 and protrudes from the air blowing part 30, it does not obstruct the fourth air hole 1331 from communicating with the second chamber 40 and the outside.
[0095] In one embodiment, the air blowing section 30, support member 113, connector 131, and chassis 15 are integrated into one unit, simplifying the connection structure of the supporting device 100. In another embodiment, the air blowing section 30, support member 113, connector 131, and chassis 15 are separate units, with the air blowing section 30 sequentially connected to the support member 113, connector 131, and chassis 15. This allows for easy replacement of any one or more of the air blowing section 30, support member 113, connector 131, or chassis 15.
[0096] Please see Figure 9 The supporting device 100 may also include a drive assembly 50, which may include a drive member 51 and a lifting rod 53. The drive member 51 is used to drive the lifting rod 53 to rise and fall relative to the chassis 15 so that the workpiece 200 passes through the first chamber 20 and is then fixed to the supporting surface 111 by the supporting assembly 11.
[0097] Specifically, the driving component 51 can be a motor, cylinder or other driving element, used to drive the lifting rod 53 to rise and fall relative to the chassis 15, so as to place the workpiece 200 transferred to the bearing device 100 on the bearing surface 111.
[0098] In some embodiments, the chassis 15 includes a first side 151 and a second side 152 facing away from each other. A through hole 153 is provided on the chassis 15, and the drive member 51 is mounted on the second side 152. The first end 531 of the lifting rod 53 is connected to the drive member 51, and the second end 533 of the lifting rod 53 is at least partially received in the through hole 153. The first end 531 and the second end 533 are opposite to each other, and the second end 533 is used to support the workpiece 200. The fact that the second end 533 of the lifting rod 53 is at least partially received in the through hole 153 can seal the through hole 153 to a certain extent, thereby preventing most of the gas blown into the second chamber 40 from being directly discharged from the through hole 153, so as to form a vortex airflow in the second chamber 40. The fact that the second end 533 of the lifting rod 53 is at least partially received in the through hole 153 may include: the end face of the second end 533 being flush with either side of the through hole 153, or the end face of the second end 533 being completely received in the through hole 153.
[0099] In some embodiments, the number of lifting rods 53 includes multiple ones, and the contact points formed by the second ends 533 of the multiple lifting rods 53 and the workpiece 200 form a polygon, thereby enabling the workpiece 200 to be stably placed on the bearing surface 111. Specifically, the number of lifting rods 53 includes at least three, and the contact points formed by the second ends 533 of the three lifting rods 53 and the workpiece 200 form a triangle to prevent the workpiece 200 from falling off during the movement of the lifting rods 53.
[0100] Furthermore, the second end 533 may also be equipped with a suction cup (not shown in the figure). The suction cup may be circular and made of rubber. The lifting rod 53 contacts the workpiece 200 through the suction cup to prevent the workpiece 200 from being scratched on its bottom surface 205 due to direct contact with the lifting rod 53. The lifting rod 53 may also be equipped with an air extraction hole (not shown in the figure). One end of the air extraction hole is connected to the suction cup, and the other end is connected to an air extraction device. The air extraction device extracts air from the suction cup through the air extraction hole to adsorb the workpiece 200 onto the suction cup. Specifically, the driving member 51 drives the lifting rod 53 to rise, so that the lifting rod 53 extends out of the through hole 153 and is higher than the bearing surface 111 to carry the conveyed workpiece 200, that is, the workpiece 200 is placed on the suction cup of the second end 533. At this time, the air extraction device extracts air from the suction cup through the air extraction hole to stably adsorb the workpiece 200 onto the suction cup. Next, the drive unit 51 drives the lifting rod 53 to descend, so that the workpiece 200 placed at the second end 533 is smoothly supported on the bearing surface 111. Then the suction device is turned off so that the suction cup releases the bottom surface 205 of the workpiece 200. The drive unit 51 continues to drive the lifting rod 53 to descend until the second end 533 of the lifting rod 53 is received in the through hole 153, thereby sealing the through hole 153 to a certain extent.
[0101] In some embodiments, the diameter of the through hole 153 is slightly larger than the diameter of the lifting rod 53, with a difference ranging from 0 mm to 1 mm. For example, the difference between the diameter of the through hole 153 and the diameter of the lifting rod 53 is any one of 0.1 mm, 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, or 0.9 mm, in order to seal the through hole 153 to the greatest extent possible without hindering the lifting rod 53 from moving up and down within the through hole 153.
[0102] In some embodiments, the drive assembly 50 may further include a connecting plate 55. The first end 531 of the lifting rod 53 is connected to the drive member 51 through the connecting plate 55. The drive member 51 drives the connecting plate 55 to raise and lower, thereby driving the lifting rod 53 to rise and fall relative to the chassis 15. The drive assembly 50 drives multiple lifting rods 53 to rise and fall through the connecting plate 55, which can reduce the use of the drive member 51. At the same time, it allows the drive member 51 to drive the lifting rods 53 to rise and fall more smoothly, ensuring the stability of the workpiece 200 during the process of placing it on the bearing surface 111.
[0103] In some embodiments, the support device 100 may further include a base 60, which is mounted on the second side 152 of the chassis 15 and is used to mount the drive member 51. The base 60 can serve to support the drive member 51 so as to facilitate the mounting of the drive member 51 to other components in the support device 100.
[0104] Please see Figure 11 This application also provides a testing device 1000, which includes a testing device 300 and a support device 100 according to any of the above embodiments. The testing device 300 corresponds to the support device 100 and is used to test a workpiece 200 fixed on a support surface 111. The testing device 300 can be a testing instrument, which can detect defects on the surface of the workpiece 200 by acquiring images of the workpiece 200 supported on the support surface 111. The support device 100 only contacts the edge portion of the workpiece 200, and does not contact the central region of the top surface 203 or the central region of the bottom surface 205 of the workpiece 200. Furthermore, the workpiece 200 can be fixed stationary on the support surface 111, thus meeting the testing requirements of the testing device 300. At the same time, the bearing device 100 blows air into the first chamber 20 through the first air hole 31, so that the workpiece 200, which is deformed due to its own gravity, becomes flat to a certain extent, ensuring the flatness of the workpiece 200 and improving the detection accuracy of the detection equipment 1000 on the workpiece 200.
[0105] Please see Figure 11 and Figure 12 This application also provides a method of using the support device 100 of any of the above embodiments. Please refer to the following: Figure 1The usage method includes:
[0106] 01: The workpiece 200 is placed on the support component 11 of the support part 10. The support component 11 is used to support the edge 201 of the workpiece 200 so that the workpiece 200 is fixed to the support surface 111 of the support component 11.
[0107] 03: Air is blown into the first chamber 20 by the first air hole 31 of the air blowing part 30. The first chamber 20 has an air outlet 21, which is used to discharge the gas in the first chamber 20, so that a vortex airflow is formed in the central area of the workpiece 200. The air blowing part 30 and the top surface 203 of the workpiece 200 fixed on the bearing surface 111 form the first chamber 20.
[0108] The method of using the carrier device 100 according to this application embodiment can be achieved through the following steps: The top surface 203 of the workpiece 200 is adsorbed using an adsorption element to transport the workpiece 200 above the carrier device 100, and the bottom surface 205 of the workpiece 200 is placed on the carrier assembly 11 of the carrier part 10 with the first chamber 20 facing it. By using an adsorption element to adsorb the top surface 203 of the workpiece 200, damage to the top surface 203 of the workpiece 200 can be avoided when using other elements to transport the workpiece 200 to the carrier part 10, thus ensuring the good condition of the workpiece 200. After the workpiece 200 is placed on the carrier surface 111, as... Figure 5 As shown, the edge side 207 of the workpiece 200 can be clamped by the clamping member 112; or, as shown Figure 6 As shown, workpiece 200 is placed on support member 113, and clamping member 112 clamps the top edge 203 of workpiece 200, thereby fixing workpiece 200 to bearing surface 111. After workpiece 200 remains stationary on bearing surface 111, the top surface 203 of workpiece 200 and air blowing part 30 form a first chamber 20. The bearing device 100 blows air into the first chamber 20 through the first air hole 31 of air blowing part 30, and the gas in the first chamber 20 is discharged from the air outlet, so that a vortex airflow is formed in the first chamber 20. At this time, the air pressure in the first chamber 20 is less than the air pressure around the bottom surface 205 of workpiece 200. Workpiece 200 will be subjected to an upward force (from the bottom surface 205 of workpiece 200 to the top surface 203 of workpiece 200), which prevents workpiece 200 from deforming due to gravity and ensures that the flatness of workpiece 200 meets the requirements.
[0109] Please see Figure 11 and Figure 13In some embodiments, the supporting portion 10 may further include an air flotation assembly 13, which forms a second chamber 40 with the bottom surface 205 of the workpiece 200. The air flotation assembly 13 includes a third air hole 132 and a vent 133. The third air hole 132 is used to blow air into the second chamber 40, and the vent 133 is used to discharge the gas from the second chamber 40. After placing the workpiece 200 on the support member 113 of the supporting portion 10, the method of using the supporting device 100 may further include:
[0110] 05: Air is blown into the second chamber 40 through the third air hole 132 and the gas in the second chamber 40 is discharged through the air vent 133, so that the air pressure in the second chamber 40 is less than the air pressure in the first chamber 20.
[0111] Furthermore, after the bearing device 100 blows air into the first chamber 20 through the first air hole 31, it blows air into the second chamber 40 through the third air hole 132. The gas in the second chamber 40 will be discharged from the vent 133, and the gas blown into the second chamber 40 through the third air hole 132 will also form an air cushion. By controlling the speed of blowing air into the third air hole 132, the bearing device 100 makes the air pressure in the second chamber 40 less than the air pressure in the first chamber 20. At the same time, the air pressure around the second chamber 40 is greater than the air pressure in the second chamber 40 and the air pressure in the first chamber 20, so that the flatness of the deformed workpiece 200 meets the requirements of the testing equipment 1000.
[0112] Please see Figure 9 and Figure 14 In some embodiments, 01: the support member 113 that places the workpiece 200 on the support portion 10 may include:
[0113] 011: The lifting rod 53 is driven by the driving component 51 to extend out of the through hole 153 of the chassis 15 and be higher than the bearing surface 111;
[0114] 013: Place workpiece 200 at the second end 533 of lifting rod 53;
[0115] 015: The lifting rod 53 is driven to descend by the driving component 51 so that the workpiece 200 placed at the second end 533 passes through the first chamber 20 and is supported on the bearing surface 111;
[0116] 017: Drive the lifting rod 53 to continue descending using the drive component 51, so that the lifting rod 53 is disengaged from the workpiece 200 and at least part of the lifting rod 53 remains within the through hole 153.
[0117] In addition to using an adsorption element to place the top surface 203 of the workpiece 200 onto the support member 113 of the support part 10, the workpiece 200 can also be placed on the support member 113 of the support device 100 via a drive assembly 50. Specifically, the support device 100 uses a drive member 51 to drive a lifting rod 53 to extend out of the through hole 153 of the chassis 15 and above the support surface 111, and then places the workpiece 200 on the second end 533 of the lifting rod 53. The number of lifting rods 53 is at least three, and the contact points formed by the second end 533 of the lifting rod 53 and the workpiece 200 form a polygon, thereby stably placing the workpiece 200 on the second end 533. Then, the support device 100 uses the drive member 51 to drive the lifting rod 53 to descend, and the workpiece 200, supported on the second end 533, passes through the first chamber 20 and is supported on the support surface 111. At this time, the workpiece 200 can be fixed by clamping the top edge 203 or the side edge 207 of the edge with a clamping member 112. After the workpiece 200 is fixed on the bearing surface 111 and remains stationary, the drive member 51 continues to drive the lifting rod 53 to descend so that the workpiece 200 is removed from the workpiece 200. When at least part of the lifting rod 53 remains in the through hole 153, the operation of the drive member 51 is stopped, thereby sealing the through hole 153 to the greatest extent and preventing the gas blown into the second chamber 40 from being directly discharged from the through hole 153.
[0118] Please see Figure 11 In the bearing device 100 of this application, the bearing assembly 11 supports the edge 201 of the workpiece 200 and fixes the workpiece 200 to the bearing surface 111 of the bearing assembly 11. At this time, the air blowing part 30 and the top surface 203 of the workpiece 200 fixed to the bearing surface 111 form a first chamber 20. Air is blown into the first chamber 20 by the first air hole 31 of the air blowing part 30, so that a vortex airflow is formed in the central region of the top surface 203 of the workpiece 200 (e.g., Figure 4 As shown by the dashed arrow in the diagram, the air pressure within the central area is lower than the air pressure outside the bearing device 100. A pressure difference exists between the top surface 203 and the bottom surface 205 of the workpiece 200, thus preventing deformation of the central area of the workpiece 200 due to its own weight, ensuring good flatness of the workpiece 200, and improving the performance of the testing equipment 1000. Figure 11 (As shown) the detection accuracy of workpiece 200.
[0119] In the description of this specification, the references to "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples" refer to specific features, structures, materials, or characteristics described in connection with the described embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0120] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the stated features. In the description of this application, "multiple" means at least two, such as two or three, unless otherwise explicitly specified.
[0121] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application, the scope of which is defined by the claims and their equivalents.
Claims
1. A supporting device, characterized in that, include: The support portion includes a support assembly for supporting the edge of the workpiece to fix the workpiece to the support surface of the support assembly; and When the workpiece is fixed on the bearing surface, the top surface of the workpiece and the side wall of the air blowing part form a first chamber. The air blowing part is provided with a first air hole for blowing air into the first chamber. The first chamber has an air outlet for discharging the gas in the first chamber, so that a vortex airflow is formed in the central area of the workpiece. The supporting part further includes an air flotation component, which forms a second chamber with the bottom surface of the workpiece. The air flotation component includes a third air hole and a vent. The third air hole is used to blow air into the second chamber, and the vent is used to discharge the gas from the second chamber. The air pressure in the second chamber is lower than the air pressure in the first chamber.
2. The bearing device according to claim 1, characterized in that, The air outlet includes an opening in the first chamber opposite to the workpiece, and / or the air outlet includes a second air hole located on the side wall of the blowing part.
3. The bearing device according to claim 1, characterized in that, The angle formed between the blowing direction of the first air hole and the tangent direction at the first air hole includes an acute angle. The first air hole includes multiple holes, which are evenly distributed on the sidewall of the air blowing part.
4. The bearing device according to claim 1, characterized in that, The carrier component includes: A clamping member is provided for clamping the edge side surface or edge top surface of the workpiece supported on the bearing surface; the clamping member is configured to move between a clamping position and a slack position, wherein when the clamping member is in the clamping position, the clamping member abuts against the edge side surface or edge top surface of the workpiece; and when the clamping member is in the slack position, the clamping member is spaced apart from the edge side surface and edge top surface of the workpiece. At least when the clamping member is used to clamp the top edge of the workpiece supported on the bearing surface, the bearing assembly further includes a support member for supporting the bottom edge of the workpiece.
5. The bearing device according to claim 1, characterized in that, The bearing assembly includes a support member, and the air flotation assembly further includes a connector connected to the bearing assembly. The connector and the bottom surface of the workpiece form a second chamber. The first chamber and the second chamber are located on opposite sides of the workpiece. The support member extends from the side wall of the connector toward the center of the second chamber and protrudes beyond the side wall of the air blowing part. The third air hole is located on the side wall of the connector and is used to blow air into the second chamber. The air pressure inside the second chamber is lower than the external air pressure of the bearing device, and the air pressure inside the first chamber is greater than the air pressure inside the second chamber.
6. The bearing device according to claim 1 or 5, characterized in that, The supporting device also includes an air extraction device connected to the vent, which is used to extract air from the second chamber.
7. The bearing device according to claim 5, characterized in that, The vent includes a fourth vent located on the side wall of the connector, the fourth vent being used to discharge gas from the second chamber to the outside of the second chamber; or, The vent includes an opening located on the side of the second chamber opposite to the workpiece.
8. The bearing device according to claim 7, characterized in that, The bearing assembly includes multiple support members, and the fourth air hole includes multiple fourth air holes. Each support member is located between two adjacent fourth air holes. In the direction perpendicular to the bearing surface, the center of each fourth air hole is offset relative to the center of the third air hole towards the side opposite to the blowing direction of the third air hole; or, in the direction perpendicular to the bearing surface, the center of each fourth air hole is on the same straight line as the center of the third air hole.
9. The bearing device according to claim 5, characterized in that, The angle formed between the blowing direction of the third air hole and the tangent direction at the third air hole includes an acute angle. There are multiple third air holes distributed on the side wall of the connector. In the direction perpendicular to the bearing surface, the center of each third air hole is on the same straight line as the center of the first air hole.
10. The bearing device according to claim 1, characterized in that, The air flotation assembly further includes a connector connected to the bearing assembly, the bearing part further includes a chassis, the bearing assembly is connected to the chassis, and the space between the bottom surface of the workpiece and the chassis forms the second chamber; the bearing assembly further includes a clamping member, the connector further includes a receiving groove, the clamping member is located in the receiving groove, and the clamping member is movably connected to the chassis or the connector.
11. The bearing device according to claim 10, characterized in that, The third air vent is located in the chassis, and the air blowing direction of the third air vent intersects the central axis of the chassis.
12. The bearing device according to claim 10, characterized in that, The vent also includes a fourth vent located in the chassis, which is used to discharge gas from the second chamber to the outside of the second chamber.
13. The bearing device according to claim 1, characterized in that, The supporting part further includes a chassis, which is connected to the supporting assembly. The supporting device further includes a driving assembly, which includes a driving component and a lifting rod. The driving component is used to drive the lifting rod to move up and down relative to the chassis, so that the workpiece is fixed to the supporting surface by the supporting assembly after passing through the first chamber.
14. The bearing device according to claim 13, characterized in that, The chassis has a through hole. The first end of the lifting rod is connected to the driving member. The second end of the lifting rod is at least partially received in the through hole. The first end and the second end are opposite to each other. The driving member is used to drive the lifting rod to extend out of the through hole and above the bearing surface so that the workpiece can be placed on the second end. The driving member is also used to drive the lifting rod to descend so that the workpiece placed on the second end is supported on the bearing surface. The driving member is also used to drive the lifting rod to continue to descend so that at least a portion of the lifting rod remains within the through hole.
15. A testing device, characterized in that, include Detection device, and The bearing device according to any one of claims 1-14, wherein the detection device corresponds to the bearing device and is used to detect the workpiece fixed on the bearing surface.
16. A method of using the bearing device according to any one of claims 1-14, characterized in that, include: A support assembly for placing a workpiece on a support portion, the support assembly being used to support the edge of the workpiece so that the workpiece is fixed to the support surface of the support assembly; Air is blown into the first chamber through the first air hole of the blowing part. The first chamber has an air outlet for discharging the gas in the first chamber, so that a vortex airflow is formed in the central area of the workpiece. When the workpiece is fixed on the bearing surface, the top surface of the workpiece and the side wall of the blowing part form the first chamber.
17. The method of using the bearing device according to claim 16, characterized in that, The supporting part further includes: an air flotation assembly, which forms a second chamber with the bottom surface of the workpiece. The air flotation assembly includes a third air hole and a vent, the third air hole being used to blow air into the second chamber, and the vent being used to discharge the gas from the second chamber. After placing the workpiece on the support of the bearing part, the method of use further includes: blowing air into the second chamber through the third air hole and discharging the gas in the second chamber through the air vent, so that the air pressure in the second chamber is less than the air pressure in the first chamber.
18. The method of using the bearing device according to claim 16, characterized in that, The support assembly for placing the workpiece on the support portion includes: The lifting rod is driven by a drive component to extend out of the through hole in the chassis and rise above the bearing surface; Place the workpiece at the second end of the lifting rod; The lifting rod is driven to descend by the driving component, so that the workpiece placed at the second end passes through the first chamber and is supported on the bearing surface; The lifting rod is driven to continue descending using the drive component, so that the lifting rod disengages from the workpiece and at least a portion of the lifting rod remains within the through hole.