Leveling device

Abstract

The embodiment of the present application discloses a leveling device. In the present application, the leveling device comprises a base, a cover which is in a cylindrical shape and connected with the base, and the cover and the base form a containing area, an end cover which is arranged opposite to the base and arranged on the side of the cover away from the base, a flexible hinge which is arranged in the containing area and clamped between the base and the end cover, the flexible hinge is arranged to be elastically deformed between the base and the end cover, at least three ceramic stacks which are arranged in the containing area and clamped between the base and the end cover, each ceramic stack is arranged to be deformed in the axial direction of the end cover after being powered on, wherein at least three of each ceramic stack are arranged along the circumferential direction of the end cover, the cover is used for limiting the movement of the end cover in the preset range in the axial direction thereof, and is also used for limiting the movement of the end cover in the preset range in the radial direction thereof. Compared with the prior art, the leveling device can meet the requirements of bearing high load and large tangential force.

Description

[0001] Cross-referencing related applications

[0002] This patent application claims priority to Chinese Patent Application No. 2020105066621, filed on June 5, 2020, entitled “Leveling Device”, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This invention relates to the field of semiconductor equipment manufacturing technology, and more specifically to a leveling device. Background Technology

[0004] In recent years, with the continuous development of semiconductor technology and precision optics technology, the accuracy and load capacity of precision motion stages have been increasing year by year to adapt to the ever-increasing product demands. Examples include lithography equipment, chip manufacturing mainframes, and electron microscope observation stages. Among these, the technology of piezoelectric ceramic motion stages is also constantly iterating and updating.

[0005] In existing technologies, leveling mechanisms include linear motor drives and piezoelectric motor drives, and pre-tensioning methods include spring pre-tensioning and flexible hinge pre-tensioning. For example, patent CN101004555 uses three sets of adjuster components for adjustment, with the adjusting rod using a linear motor. However, this adjustment method has a complex structure, is not suitable for high load and large tangential force conditions, and cannot withstand impact loads. As another example, patent CN102854751 uses three sets of parallel springs for pre-tensioning. With this pre-tensioning method, it is difficult to maintain consistent initial spring positions, it can only withstand unidirectional pre-tensioning, cannot withstand impact loads, and has poor tangential stiffness.

[0006] Therefore, existing leveling mechanisms have shortcomings such as being unsuitable for working conditions with small loads and small tangential forces, and being unable to withstand impact loads. Summary of the Invention

[0007] The purpose of this invention is to provide a leveling device that can withstand high loads and large tangential forces.

[0008] To solve the above-mentioned technical problems, embodiments of the present invention provide a leveling device, comprising:

[0009] Base;

[0010] The cover is cylindrical and connected to the base, and the cover and the base form a receiving area;

[0011] An end cap is disposed opposite to the base and is located on the side of the cover away from the base;

[0012] A flexible hinge is disposed within the receiving area and clamped between the base and the end cap; the flexible hinge is configured to elastically deform between the base and the end cap.

[0013] At least three ceramic stacks are disposed within the receiving area and sandwiched between the base and the end cap; each of the ceramic stacks is configured to deform axially in the end cap upon energization; wherein at least three of the ceramic stacks are disposed circumferentially in the end cap.

[0014] The cover is used to restrict the end cap from moving within a predetermined range in its axial direction; it is also used to restrict the end cap from moving within a predetermined range in its radial direction.

[0015] Compared with the prior art, the embodiments of the present invention include a base, a cover, an end cap, a flexible hinge, and at least three ceramic stacks. The cover is cylindrical and connected to the base, forming a receiving area. The flexible hinge and ceramic stacks are placed within the receiving area. The cover allows the end cap to move only within a preset range in the radial and axial directions. When the leveling device is subjected to a large tangential force, the end cap transmits the force to the limiting mechanism, which is supported by the cover and base, thereby canceling out the large tangential force on the end cap. Under the action of a large tangential force, the end cap can still work normally. Therefore, the leveling device can withstand a large load and has a wide range of applications. Furthermore, due to the presence of a flexible hinge and at least three ceramic stacks, both the flexible hinge and the ceramic stacks are located within the receiving area and are clamped between the base and the end cap. The flexible hinge provides a preload to the end cap in the axial direction, ensuring that the end cap remains in a stable state under stress. The ceramic stacks, which are arranged circumferentially along the end cap, deform axially, causing the end cap to tilt stably in the direction toward or away from the base, thus enabling the leveling device to operate stably.

[0016] In one embodiment, the housing includes:

[0017] The housing body is connected to the base and forms the receiving area with the base;

[0018] At least three limiting mechanisms are arranged around the end cap along its periphery, including: a fixing component connected to the housing body, a first limiting component connected to the fixing component, and a second limiting component connected to the fixing component; the first limiting component is used to limit the movement of the end cap within a preset range in its axial direction; the second limiting component is used to limit the movement of the end cap within a preset range in its radial direction.

[0019] In one embodiment, an end cap limiting hole is provided on the side wall of the end cap, and a fixing component limiting hole is provided on the fixing component; the first limiting component has: a first end inserted into the end cap limiting hole and a second end inserted into the fixing component limiting hole, the first end and the second end being disposed opposite to each other.

[0020] In one embodiment, the first end is fixedly connected to the end cap limiting hole, and the second end has a gap with the hole wall of the fixing component limiting hole.

[0021] In one embodiment, there is a gap between the first end and the wall of the end cap limiting hole, and the second end is fixedly connected to the limiting hole of the fixing component.

[0022] In one embodiment, the first limiting component is a pin.

[0023] In one embodiment, the first limiting component is a pin; an end cap limiting hole for inserting the pin is provided on the side wall of the end cap; there is a gap between the pin and the wall of the end cap limiting hole.

[0024] In one embodiment, the second limiting component includes:

[0025] A limiting member is radially inserted into the fixing assembly. One end of the limiting member is located between the cover body and the side wall of the end cap, and is configured to have a gap with the side wall of the end cap.

[0026] In one embodiment, the second limiting component further includes:

[0027] The fastener is inserted into the fixing component in the axial direction and abuts against the limiting member.

[0028] In one embodiment, the end cap is rectangular;

[0029] There are no fewer than four limiting mechanisms, and each side wall of the end cap is disposed opposite to at least one of the limiting mechanisms.

[0030] In one embodiment, each of the limiting mechanisms is arranged at equal angles along the circumferential direction.

[0031] In one embodiment, each of the leveling devices further includes: an initial position adjustment mechanism disposed on the base;

[0032] The initial position adjustment mechanism includes: a support plate disposed opposite to the base and supporting each of the ceramic stacks, and an adjustment component disposed on the base, the adjustment component being used to adjust the distance between the support plate and the base.

[0033] In one embodiment, the side of the support plate facing the base is at least partially inclined;

[0034] The adjustment components include:

[0035] A follower is disposed between the base and the support plate, and the side of the follower facing the support plate is provided with a guide slope that complements the inclined surface;

[0036] A driving member drives the driven member to move along the extension direction of the inclined plane.

[0037] In one embodiment, the base is provided with a guide groove;

[0038] The driven member includes:

[0039] The driven block is connected to the driving member, and the guide slope is disposed on the driven block;

[0040] A driven ball is disposed on the driven block and is used to move along the guide groove when the driven block is driven by the driving member.

[0041] In one embodiment, the adjustment component further includes:

[0042] The connecting plate is connected to the driven member;

[0043] A biasing member, the two ends of which are respectively connected to the connecting plate and the base, and the connecting plate is pulled to bias in a direction away from the movement direction of the driven member.

[0044] In one embodiment, the adjustment components are provided in multiple forms.

[0045] In one embodiment, the flexible hinge is cylindrical, and each of the ceramic stacks is disposed within the flexible hinge.

[0046] In one embodiment, each of the ceramic stacks is arranged at equal angles along the circumferential direction. Attached Figure Description

[0047] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0048] Figure 1 This is a perspective view of the leveling device in an embodiment of the present invention;

[0049] Figure 2 yes Figure 1 A schematic diagram of the leveling device without its cover;

[0050] Figure 3 yes Figure 1 Sectional view of AA;

[0051] Figure 4 yes Figure 1 Sectional view of BB;

[0052] Figure 5 This is a perspective view of the limiting mechanism in an embodiment of the present invention;

[0053] Figure 6 This is a cross-sectional view of the limiting mechanism in an embodiment of the present invention;

[0054] Figure 7 yes Figure 1 Sectional view of CC;

[0055] Figure 8 This is a schematic diagram of the structure in an embodiment of the present invention, showing the adjustment component mounted on the base.

[0056] Figure 9 This is a cross-sectional view of the adjustment mechanism being mounted on the base in an embodiment of the present invention;

[0057] Figure 10 This is a schematic diagram of the structure with three ceramic stacks in an embodiment of the present invention;

[0058] Figure 11 This is a schematic diagram of a structure with four ceramic stacks in another embodiment of the present invention.

[0059] Illustrations: 1. Base; 2. Cover; 20. Receiving area; 21. Cover body; 22. Limiting mechanism; 221. Fixing component; 222. First limiting component; 223. Second limiting component; 220. Fixing component limiting hole; 2211. Connecting block; 2212. Locking component; 2231. Limiting component; 2232. Fastener; 3. End cap; 30. End cap limiting hole; 5. Flexible hinge; 50. Hollowed-out part; 6. Ceramic stack; 7. Adjusting mechanism; 70. Inclined surface; 71. Support plate; 72. Adjusting component; 721. Follower; 722. Driving component; 7211. Follower block; 7212. Follower ball; 723. Connecting plate; 724. Offset component; 701, First end; 702, Second end; 720, Guide slope; 7201, Third end; 7202, Fourth end; 10, Guide groove. Detailed Implementation

[0060] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been presented in the various embodiments of the present invention to enable the reader to better understand this application. However, the technical solutions claimed in this application can be implemented even without these technical details and various changes and modifications based on the following embodiments.

[0061] In the following description, certain specific details are set forth for the purpose of illustrating various disclosed embodiments in order to provide a thorough understanding of the various disclosed embodiments. However, those skilled in the art will recognize that embodiments may be practiced without one or more of these specific details. In other instances, well-known apparatuses, structures, and techniques associated with this application may not have been shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

[0062] Unless the context requires otherwise, throughout the specification and claims, the word “comprising” and its variations, such as “including” and “having”, shall be understood to have an open, inclusive meaning, that is, to be interpreted as “including, but not limited to”.

[0063] Embodiments of the present invention relate to a leveling device, such as... Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the assembly includes: a base 1, a housing 2, an end cap 3, a flexible hinge 5, and three ceramic stacks 6. The housing 2 is cylindrical and connected to the base 1. The cylindrical shape can be, but is not limited to, a rhomboid, rectangular, or circular cylindrical shape, and the housing 2 and the base 1 form a receiving area 20. The end cap 3 is disposed opposite to the base 1, on the side of the housing 2 away from the base 1, and covers the opening of the receiving area 20. The housing 2 is used to restrict the movement of the end cap 3 within a predetermined range in its axial direction; it is also used to restrict the movement of the end cap 3 within a predetermined range in its radial direction. The end cap 3 has a shape that fits the housing 2, and can be, but is not limited to, rhomboid, rectangular, or circular, but it should be understood that it can also be other regular or irregular shapes. A flexible hinge 5 is disposed within the receiving area 20 and clamped between the base 1 and the end cap 3. The flexible hinge 5 is configured to elastically deform between the base 1 and the end cap 3. The flexible hinge 5 can be fixedly connected, snapped, or contacted with the base 1 and / or the end cap 3, allowing the end cap 3 to be stably subjected to the tension of the flexible hinge 5. Each ceramic stack 6 is disposed within the receiving area 20 and clamped between the base 1 and the end cap 3. Each ceramic stack 6 is configured to deform axially in the end cap 3 after being energized. The end of each ceramic stack 6 facing the end cap 3 is fixed to the end cap 3. Among them, the three ceramic stacks 6 are arranged along the circumference of the end cap 3, that is, the three ceramic stacks 6 are arranged in a triangle in the top view. In actual use, when a voltage is applied to the ceramic stacks 6, the ceramic stacks 6 can produce axial deformation. When different voltages are applied to each ceramic stack 6, each ceramic stack 6 produces different axial deformations, thereby creating different height differences in the end cap 3, allowing the end cap 3 to pitch relative to the base 1. The number of ceramic stacks 6 can also be set to other numbers as needed, such as 4, 5, 6, etc., wherein at least three of each ceramic stack 6 are not located in the same plane, thereby enabling adjustment of the planar position of the end cap 3.

[0064] Preferably, each ceramic stack 6 can be arranged axially symmetrically or at equal angles along the circumference.

[0065] like Figure 10 As shown, the three ceramic stacks 6 are located at the three vertices of the same triangle, preferably an isosceles triangle or an equilateral triangle. Furthermore, the centroid of the arrangement of the three ceramic stacks 6 is located at the geometric center of the base 1.

[0066] In another embodiment, such as Figure 11 As shown, there may be four ceramic stacks 6, which are located at the four vertices of the same quadrilateral, preferably in the shape of a rhombus, rectangle, or square, and the centroid of the arrangement of the four ceramic stacks 6 is located at the geometric center of the base 1.

[0067] In this invention, the device comprises a base 1, a housing 2, an end cap 3, a flexible hinge 5, and at least three ceramic stacks 6. The housing 2 is cylindrical and connected to the base 1, forming a receiving area 20. The flexible hinge and ceramic stacks are placed within this receiving area. The housing 2 restricts the end cap 3's movement to a predetermined range in both the radial and axial directions. When the leveling device is subjected to a large tangential force, the end cap 3 transmits the force to the limiting mechanism 22, which is supported by the housing 2. This effectively cancels out the large tangential force on the end cap 3, allowing it to function normally even under such conditions. Therefore, the leveling device can withstand a large load and has a wide range of applications. Furthermore, since there is a flexible hinge 5 and at least three ceramic stacks 6, both the flexible hinge 5 and the ceramic stacks 6 are located within the receiving area 20 and are clamped between the base 1 and the end cap 3. The flexible hinge 5 provides a preload force on the end cap 3 in the axial direction, keeping the end cap in a stable state under force. At least three ceramic stacks 6 are provided and arranged along the circumference of the end cap 3. When multiple ceramic stacks 6 deform in the axial direction, the end cap 3 can be stably tilted in the direction toward or away from the base 1, thereby enabling the leveling device to work stably.

[0068] like Figure 1As shown, the housing 2 includes: a housing body 21 and four limiting mechanisms 22. In the illustrated embodiment, the end cap 3 and the base 1 are rectangular, and the housing body 21 is rectangular cylindrical. The housing body 21 is connected to the base 1 and forms a receiving area 20 around the base 1. One limiting mechanism 22 is opposite to one side wall of the end cap 3. At this time, all four side walls of the end cap 3 are limited by the limiting mechanism 22, so that any side of the end cap 3 is limited in the radial or axial direction. Thus, when the end cap 3 is pushed by the ceramic stack 6, the range of motion is more precise. The limiting mechanism 22 includes: a fixing component 221, a first limiting component 222, and a second limiting component 223. The fixing component 221 is connected to the housing body 21, the first limiting component 222 is connected to the fixing component 221, and the second limiting component 223 is also connected to the fixing component 221. Thus, the fixing component 221 positions the first limiting component 222 and the second limiting component 223. Furthermore, the first limiting component 222 restricts the end cap 3 to move within a preset range in the axial direction, and the second limiting component 223 restricts the end cap 3 to move within a preset range in the radial direction. However, it should be understood that, as needed, the end cap 3, the base 1, and the cover body 22 can be configured in other shapes, for example, the end cap 3 and the base 1 can be circular, and the cover 2 can be cylindrical. The limiting mechanisms 22 can also be configured in other quantities as needed, such as 3, 5, 6, etc., as long as the movement of the end cap 3 in any radial direction is restricted.

[0069] Ideally, each limiting mechanism 22 is set at an equal angle along the circumference.

[0070] It should be understood that the base 1 can also be a one-piece molded part, with the end cap being axially and radially limited by the side wall of the base 1.

[0071] Furthermore, such as Figure 1 , Figure 3 , Figure 5 and Figure 6 As shown, the fixing component 221 of the limiting mechanism 22 includes: a connecting block.

[0072] Connecting block 2211 and locking element 2212 have mounting grooves (not shown in the figure) on the housing 2. Connecting block 2211 is embedded in the mounting groove (not shown in the figure). The locking element 2212 is inserted into the housing 2 to fix the connecting block 2211 and the housing 2 together. The locking element 2212 can preferably be a screw, which is inserted into the housing 2 from top to bottom through the connecting block 2211. Multiple locking elements 2212 can be provided. It should be understood that the connecting block 2211 can be installed by gluing, welding or using other fasteners 2232, or the connecting block 2211 can be integrally formed with the housing 2.

[0073] Furthermore, such as Figure 5 and Figure 6As shown, the first limiting component 222 is a pin. An end cap limiting hole 30 is provided on the side wall of the end cap 3 for inserting one end of the pin 222. The pin 222 is fixed in the end cap limiting hole 30, i.e., the pin 222 is fixed to the end cap 3. A fixing component limiting hole 220 is provided on the fixing component 221 for inserting the other end of the pin 222. There is a gap between the pin 222 and the wall of the fixing component limiting hole 220, allowing the pin 222 to be movably connected to the fixing component. The fixing component limiting hole 220 can be a rectangular hole, and the relative movement range of the pin 222 can be adjusted by changing the diameter of the fixing component limiting hole 220. Specifically, the fixing component limiting hole 220 is formed on the connecting block 2211, and the pin 222 passes through the connecting block 2211 along the thickness of the connecting block 2211. One end of the pin 222 passing through the connecting block 2211 is located in the fixing component limiting hole 220 and can move along the length direction of the fixing component limiting hole 220. This allows space to be reserved for the movement of the end cover 3 in the axial direction, so that the end cover 3 can pitch relative to the base 1 when the ceramic stack 6 deforms.

[0074] It is understandable that pin 222 can be fixedly inserted into the fixing component limiting hole 220, with one end of pin 222 facing away from end cap 3 fixed to fixing component 221. There is a gap between the end of pin 222 inserted into end cap limiting hole 30 and the hole wall of end cap limiting hole 30, allowing pin 222 and end cap 3 to move. The pin 222 can move within end cap limiting hole 30, allowing space for end cap 3 to move axially, enabling end cap 3 to tilt relative to base 1 when ceramic stack 6 deforms.

[0075] It should be understood that the first limiting component may also be a long cylindrical part or other connecting mechanical structure.

[0076] Furthermore, such as Figure 1 , Figure 5 and Figure 6 As shown, the second limiting component 223 includes a limiting member 2231 connected to the fixing component 221. One end of the limiting member 2231 is located between the sidewalls of the cover 2 and the end cap 3, and is configured to have a gap with the sidewall of the end cap 3. Specifically, one end of the limiting member 2231 is inserted into the connecting block 2211, and the other end of the limiting member 2231 is outside the connecting block 2211. Preferably, the limiting member 2231 is a set screw, which passes through the connecting block 2211 along the thickness of the connecting block 2211. A gap is left between the end of the set screw passing through the connecting block 2211 and the sidewall of the end cap 3, allowing the end cap 3 to have room to move relative to the base 1. Of course, the limiting member 2231 can also be a screw fixed to the connecting block 2211, partially exposed outside the connecting block 2211.

[0077] In addition, such as Figure 1 , Figure 5 and Figure 6 As shown, the second limiting component 223 further includes a fastener 2232, which is inserted into the fixing component 221 along the axial direction and abuts against the limiting member 2231. The fastener 2232 can be a locking screw, which is inserted into the connecting block 2211 from top to bottom, abutting against the limiting member 2231, thereby fixing the limiting member 2231. When it is necessary to move the limiting member 2231, the fastener 2232 is screwed upward and moved away from the limiting member 2231, allowing the limiting member 2231 to be loosened and its position adjustable. The fastener 2232 can also be other pin components, which can position the limiting member 2231 when it abuts against it. For example, a slot can be provided on the limiting member 2231, and the fastener 2232 can be inserted into the slot, abutting against the bottom of the slot, etc. The limiting component 2231 can also be fixed to the fixing component by means of adhesive or the like.

[0078] In addition, each limiting mechanism 22 is set at an equal angle along the circumference.

[0079] In an embodiment, such as Figure 3 , Figure 4 As shown, each leveling device further includes an initial position adjustment mechanism 7 disposed on the base 1. The initial position adjustment mechanism 7 includes a support plate 71 disposed opposite to the base 1 and supporting each ceramic stack 6, and an adjustment component 72 disposed on the base 1. The adjustment component 72 is used to adjust the distance between the support plate 71 and the base 1.

[0080] Furthermore, such as Figure 3 , Figure 4 , Figure 8 and Figure 9 As shown, at least a portion of the side of the support plate 71 facing the base 1 is an inclined surface 70. The adjustment assembly 72 includes a follower 721 and a drive member 722. The follower 721 is disposed between the base 1 and the support plate 71, and the side of the follower 721 facing the support plate 71 has a guide inclined surface 720 that complements the inclined surface 70. The drive member 722 drives the follower 721 to move along the extending direction of the inclined surface 70. Specifically, as... Figure 9As shown, the inclined surface 70 of the support plate 71 includes a first end 701 and a second end 702 opposite to the first end 701. The distance from the first end 701 to the base 1 is greater than the distance from the second end 702 to the base 1. The guide inclined surface 720 of the driven member 721 includes a third end 7201 and a fourth end 7202 opposite to the third end 7201. The distance from the third end 7201 to the base 1 is greater than the distance from the fourth end 7202 to the base 1. The driving member 722 pushes the driven member 721 to move from the third end 7201 to the fourth end 7202, and the third end 7201 of the guide inclined surface 720 moves towards the second end 702 of the inclined surface 70, gradually raising the support plate 71 away from the base 1, thereby adjusting the position of the support plate 71. The ceramic stack 6 is disposed on the support plate 71, and the end of the ceramic stack 6 facing away from the support plate 71 is connected to the end cap 3, thereby adjusting the position of the end cap 3.

[0081] Furthermore, such as Figure 8 As shown, a guide groove 10 is provided on the base 1, and the direction of the guide groove 10 is consistent with the extension direction of the inclined surface 70. The guide groove 10 can be a long groove provided on the base 1, or it can be a track separately installed on the base 1. The driven member 721 includes a driven block 7211 and a driven ball 7212. The driven block 7211 is connected to the driving member 722, and the guide inclined surface 720 is provided on the driven block 7211. The driven block 7211 can be a wedge-shaped block. The driven ball 7212 is provided on the driven block 7211 and is used to move along the guide groove 10 when the driven block 7211 is driven by the driving member 722. The driven ball 7212 is rotatably mounted on the side of the driven block 7211 facing the base 1. When the driven member 722 drives the driven block 7211, the driven ball 7212 rolls on the guide groove 10. The guide groove 10 allows the movement direction of the driven member 721 to be more precise, and the driven ball 7212 also allows the driven block 7211 to move more smoothly.

[0082] Specifically, such as Figure 3 , Figure 8 and Figure 9 As shown, the driving member 722 is an ejector screw, which is arranged along the extension direction of the inclined surface 70. One end of the ejector screw is inserted into the driven member 721. When the ejector screw is rotated toward the second end 702 of the inclined surface 70, it pushes the driven member 721 to move toward the second end 702 of the inclined surface 70. The driving member 722 can also be a cylinder or other components.

[0083] In addition, such as Figure 3 , Figure 8 and Figure 9As shown, the adjustment assembly 72 further includes a connecting plate 723 and a biasing member 724. The connecting plate 723 is connected to the driven member 721, and the two ends of the biasing member 724 are connected to the plate 723 and the base 1, respectively. The biasing member 724 pulls the connecting plate 723 to bias it away from the direction of movement of the driven member 721. After the driving member 722 removes its pushing force on the driven member 721, the biasing member 724 pulls the connecting plate 723, causing the driven member 721 to move towards the first end of the inclined plane 70, thereby lowering the height of the support plate 71. The biasing member 724 can be a spring, and multiple springs are provided. Preferably, each adjustment assembly 72 has two biasing members 724, which are respectively provided on both sides of the driven member 721. One end of the spring is connected to the flexible hinge 5, and the other end is connected to the connecting plate 723. The extension direction of the spring is the extension direction of the inclined plane 70, that is, the direction from the first end 701 to the second end 702 of the inclined plane 70. After the force of the driving member 722 is removed, the connecting plate 723 is pulled back towards the first end 701 of the inclined plane 70 under the elastic force of the spring, thereby pulling the driven member 721 back in the same direction. In this embodiment, the flexible hinge 5 includes a rigid part and an elastic part. The rigid part is one end facing the base 1, and the elastic part is one end facing the end cap 3. The rigid part of the flexible hinge 5 is connected to the base 1, and one end of the biasing member 724 is connected to the rigid part. Therefore, one end of the biasing member 724 is connected to the rigid part of the flexible hinge 5, which is equivalent to being connected to the base 1. Even when the flexible hinge 5 undergoes elastic deformation, it will not affect the biasing member 724. In addition to providing two biasing members, the biasing member 724 can also be provided in different quantities such as one or three. The biasing member 724 can also be an elastic band or include an elastic member and a mechanical structural member.

[0084] Furthermore, the adjustment component 72 is provided with multiple components. Preferably, such as... Figure 8 As shown, there can be three adjustment components 72, all positioned between the base 1 and the support plate 71. The base 1 has three guide grooves 10, each corresponding to one adjustment component 72. This allows the support plate 71 to be supported from different angles, ensuring that each position of the support plate 71 can be adjusted accordingly, resulting in more precise positional adjustments. It should be understood that the adjustment components 72 can also be provided in one, two, or other quantities.

[0085] In addition, such as Figure 2 and Figure 3As shown, the flexible hinge 5 is cylindrical, and each ceramic stack 6 is disposed within the flexible hinge 5. The side of the flexible hinge 5 facing the base 1 is fixed to the base 1, and the side of the flexible hinge 5 facing the end cap is fixed to the end cap, thereby achieving the positioning of the flexible hinge 5. The support plate 71 is also located within the flexible hinge 5. In actual use, to facilitate the driving of the driven member 721, the operating part of the driving member 722 can pass through the flexible hinge 5 and be located outside the flexible hinge 5. Thus, each ceramic stack 6 is surrounded by flexible hinges 5, and the end cap 3 at the top periphery of each ceramic stack 6 is subjected to the preload of the flexible hinge 5, making the force on the end cap 3 more uniform.

[0086] Furthermore, such as Figure 2 and Figure 3 As shown, the flexible hinge 5 has multiple circumferentially extending hollow portions 50. Some of these hollow portions 50 are spaced apart in the circumferential direction, while others are spaced apart in the axial direction. Alternatively, the hollow portions 50 may be spaced apart only in the circumferential direction or also in the axial direction. The flexible hinge 5 can be made of stainless steel or flexible steel. This flexible hinge 5 can withstand certain tensile and compressive forces, improving axial stiffness. Compared to traditional spring preload, the flexible hinge 5 has a backlash-free structure, higher precision, and better structural reliability. It overcomes the lack of tangential stiffness in springs and can provide tangential protection for the ceramic stack 6 during application.

[0087] It should be understood that the flexible hinge 5 can be replaced by other structures with elasticity or resilience, such as springs of the prior art. Using several springs instead of the flexible hinge 5 in this embodiment, and allowing the adjustment assembly 72 to be linked to the housing 2, does not depart from the concept and essence of the invention.

[0088] Those skilled in the art will understand that the above embodiments are specific examples of implementing the present invention, and in practical applications, various changes in form and detail may be made without departing from the spirit and scope of the present invention.

Claims

1. A leveling device, characterized in that, include: Base; The cover is cylindrical and connected to the base, and the cover and the base form a receiving area; An end cap is disposed opposite to the base and is located on the side of the cover away from the base; A flexible hinge is disposed within the receiving area and clamped between the base and the end cap; the flexible hinge is configured to elastically deform between the base and the end cap. At least three ceramic stacks are disposed within the receiving area and sandwiched between the base and the end cap; each of the ceramic stacks is configured to deform axially in the end cap upon energization; wherein at least three of the ceramic stacks are disposed circumferentially in the end cap. The cover is used to restrict the end cap from moving within a predetermined range in its axial direction; it is also used to restrict the end cap from moving within a predetermined range in its radial direction. The flexible hinge is cylindrical, and each of the ceramics is stacked inside the flexible hinge; the flexible hinge has multiple hollowed-out portions extending circumferentially.

2. The leveling device according to claim 1, characterized in that, The housing includes: The housing body is connected to the base and forms the receiving area with the base; At least three limiting mechanisms are arranged around the end cap along its periphery, including: a fixing component connected to the housing body, a first limiting component connected to the fixing component, and a second limiting component connected to the fixing component; the first limiting component is used to limit the movement of the end cap within a preset range in its axial direction; the second limiting component is used to limit the movement of the end cap within a preset range in its radial direction.

3. The leveling device according to claim 2, characterized in that, An end cap limiting hole is provided on the side wall of the end cap, and a fixing component limiting hole is provided on the fixing component; the first limiting component has: a first end inserted into the end cap limiting hole and a second end inserted into the fixing component limiting hole, the first end and the second end being arranged opposite to each other.

4. The leveling device according to claim 3, characterized in that, The first end is fixedly connected to the end cap limiting hole, and the second end has a gap with the hole wall of the fixing component limiting hole.

5. The leveling device according to claim 3, characterized in that, There is a gap between the first end and the wall of the end cap limiting hole, and the second end is fixedly connected to the limiting hole of the fixing component.

6. The leveling device according to claim 3, characterized in that, The first limiting component is a pin.

7. The leveling device according to claim 3, characterized in that, The second limiting component includes: A limiting member is radially inserted into the fixing assembly. One end of the limiting member is located between the cover body and the side wall of the end cap, and is configured to have a gap with the side wall of the end cap.

8. The leveling device according to claim 7, characterized in that, The second limiting component also includes: The fastener is inserted into the fixing component in the axial direction and abuts against the limiting member.

9. The leveling device according to any one of claims 2-8, characterized in that, The end cap is rectangular; There are no fewer than four limiting mechanisms, and each side wall of the end cap is disposed opposite to at least one of the limiting mechanisms.

10. The leveling device according to claim 2, characterized in that, Each of the aforementioned limiting mechanisms is set at equal angles along the circumference.

11. The leveling device according to claim 1, characterized in that, Each of the leveling devices further includes: an initial position adjustment mechanism disposed on the base; The initial position adjustment mechanism includes: a support plate disposed opposite to the base and supporting each of the ceramic stacks, and an adjustment component disposed on the base, the adjustment component being used to adjust the distance between the support plate and the base.

12. The leveling device according to claim 11, characterized in that, The side of the support plate facing the base is at least partially inclined; The adjustment components include: A follower is disposed between the base and the support plate, and the side of the follower facing the support plate is provided with a guide slope that complements the inclined surface; A driving member drives the driven member to move along the extension direction of the inclined plane.

13. The leveling device according to claim 12, characterized in that, The base is provided with a guide groove; The driven member includes: The driven block is connected to the driving member, and the guide slope is disposed on the driven block; A driven ball is disposed on the driven block and is used to move along the guide groove when the driven block is driven by the driving member.

14. The leveling device according to claim 12, characterized in that, The adjustment component also includes: The connecting plate is connected to the driven member; A biasing member, the two ends of which are respectively connected to the connecting plate and the base, and the connecting plate is pulled to bias in a direction away from the movement direction of the driven member.

15. The leveling device according to claim 11, characterized in that, The adjustment components are provided in multiple ways.

16. The leveling device according to claim 1, characterized in that, Each of the ceramic stacks is arranged at equal angles along the circumference.

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