Dual swing arm device and die bonding apparatus

Abstract

The application provides a double swing arm device, which comprises a mounting base plate, a rotary driving unit, a left swing arm lifting driving unit, a right swing arm lifting driving unit, a left swing arm mechanism, a right swing arm mechanism, a double swing arm central rotary rod, a left swing arm lifting movement connecting rod and a right swing arm lifting movement connecting rod, the double swing arm central rotary rod is provided with a central through hole for the left swing arm lifting movement connecting rod to pass through, the left swing arm lifting movement connecting rod is provided with a central through hole for the right swing arm lifting movement connecting rod to pass through, and the double swing arm central rotary rod, the left swing arm lifting movement connecting rod and the right swing arm lifting movement connecting rod are coaxially arranged. The application also provides a die bonding equipment. The double swing arm device is relatively simple in structure and can be operated relatively silently.

Description

Technical Field

[0001] This invention relates to a swing arm device, and more particularly to a double swing arm device and a die bonding device. Background Technology

[0002] Currently, most automated die bonding machines use a single-arm design. This single-arm die bonding structure has become very stable and reliable after years of improvement and practice. However, due to its single-arm structure and the upper limit of motor speed, it is difficult to make further breakthroughs in the die bonding speed of the single-arm die bonding structure.

[0003] To overcome the speed limit of chip bonding with swing arms, one solution is to use a double swing arm structure. However, in existing double swing arm mechanisms, the Z-axis movement is driven by voice coil motors or servo motors on both sides. The upper servo motor is directly connected to the swing arm by locking the motor shaft with a locking block. The Z-axis movement is achieved by the bottom connector of the voice coil motor or servo motor lifting the bearing of the swing arm downwards. The swing arm is reset by a spring. Since it is difficult to achieve a seamless connection between the bottom connectors of the voice coil motors or servo motors at both ends, gaps are inevitable. Moreover, due to assembly errors, it is difficult to ensure that the bottom planes of the voice coil motor assembly coincide. Therefore, when the swing arm rotates rapidly, the bearings will make a loud noise when passing through the gaps. In addition, due to the existence of gaps, the rotation of the swing arm will also cause some vibration while making noise, which may cause the chip to fall off the swing arm nozzle. Summary of the Invention

[0004] To address the problems in the prior art, the present invention provides a double swing arm device and a die bonding device.

[0005] This invention provides a double-swing arm device, including a mounting base plate, a rotary drive unit, a left swing arm lifting drive unit, a right swing arm lifting drive unit, a left swing arm mechanism, a right swing arm mechanism, a double-swing arm central rotating rod, a left swing arm lifting motion connecting rod, and a right swing arm lifting motion connecting rod. The double-swing arm central rotating rod has a central through hole through which the left swing arm lifting motion connecting rod passes, and the left swing arm lifting motion connecting rod has a central through hole through which the right swing arm lifting motion connecting rod passes. The double-swing arm central rotating rod, the left swing arm lifting motion connecting rod, and the right swing arm lifting motion connecting rod are coaxially arranged. The left swing arm mechanism and the right swing arm mechanism are respectively installed on the outer side of the double-swing arm central rotating rod. The left swing arm mechanism and the double-swing arm central rotating rod are axially movable. The right swing arm mechanism and the central rotating rod of the double swing arm are axially movable but circumferentially fixed. The central rotating rod of the double swing arm is connected to the rotary drive unit, which is mounted on the mounting base plate. The bottom of the left swing arm lifting motion connecting rod is circumferentially movable but axially fixed to the left swing arm mechanism, and the top of the left swing arm lifting motion connecting rod is connected to the left swing arm lifting drive unit, which is mounted on the mounting base plate. The bottom of the right swing arm lifting motion connecting rod is circumferentially movable but axially fixed to the right swing arm mechanism, and the top of the right swing arm lifting motion connecting rod is connected to the right swing arm lifting drive unit, which is mounted on the mounting base plate.

[0006] As a further improvement of the present invention, the top and bottom of the right swing arm lifting motion connecting rod both extend beyond the left swing arm lifting motion connecting rod.

[0007] As a further improvement of the present invention, the double swing arm device further includes an angular contact bearing assembly, an angular contact bearing cover, and a rotation mechanism locking nut. The angular contact bearing assembly is installed in the bearing hole of the mounting base plate. The angular contact bearing cover is locked to the lower end of the bearing hole of the mounting base plate. The central rotating rod of the double swing arm passes through the angular contact bearing assembly from bottom to top and is connected to the rotation drive unit. The rotation mechanism locking nut is locked on the central rotating rod of the double swing arm and pressed against the top of the angular contact bearing assembly.

[0008] As a further improvement of the present invention, the rotary drive unit is a rotary servo motor, and the double swing arm device further includes a rotary servo motor mounting base and a rotary servo motor connector. The rotary servo motor mounting base is fixed on the mounting base plate, and the rotary servo motor is fixed on the rotary servo motor mounting base. The rotary servo motor mounting base is provided with a rotary servo motor connector receiving groove for accommodating the rotary servo motor connector. The bottom of the rotary servo motor connector is fixedly connected to the top of the central rotating rod of the double swing arm, and the top of the rotary servo motor connector is fixedly connected to the rotary servo motor.

[0009] As a further improvement of the present invention, the center of the rotary servo motor connector is provided with a clearance groove to avoid the left swing arm lifting drive unit and the right swing arm lifting drive unit, and the rotary servo motor connector is connected to a rotary limiting shaft.

[0010] As a further improvement of the present invention, the double swing arm device further includes a left swing arm lifting and mounting angular contact bearing assembly, a left swing arm lifting and mounting angular contact bearing assembly sealing cover, and a left swing arm lifting and moving connecting rod locking nut. The left swing arm lifting and mounting angular contact bearing assembly is installed in the bearing hole of the left swing arm mechanism. The left swing arm lifting and mounting angular contact bearing assembly sealing cover is locked to the bearing hole of the left swing arm mechanism. The left swing arm lifting and moving connecting rod passes through the left swing arm lifting and mounting angular contact bearing assembly. The left swing arm lifting and moving connecting rod locking nut is locked onto the left swing arm lifting and moving connecting rod and is located in the bearing hole of the left swing arm mechanism. Below; the double swing arm device also includes a right swing arm lifting and mounting angular contact bearing assembly, a right swing arm lifting and mounting angular contact bearing assembly sealing cover, and a right swing arm lifting and moving connecting rod locking washer. The right swing arm lifting and mounting angular contact bearing assembly is installed in the bearing hole of the right swing arm mechanism. The right swing arm lifting and mounting angular contact bearing assembly sealing cover is locked to the bearing hole of the right swing arm mechanism. The right swing arm lifting and moving connecting rod passes through the right swing arm lifting and mounting angular contact bearing assembly. The right swing arm lifting and moving connecting rod locking washer is locked to the bottom end face of the right swing arm lifting and moving connecting rod. The right swing arm lifting and moving connecting rod locking washer is located below the bearing hole of the right swing arm mechanism.

[0011] As a further improvement of the present invention, the double swing arm device further includes a motor mounting base for the double swing arm Z-axis lifting motion mechanism; the left swing arm lifting drive unit includes a left swing arm Z-axis lifting motion servo motor, a left swing arm eccentric shaft rotation mechanism that converts rotational motion into Z-axis lifting, a left swing arm Z-axis lifting guide mechanism, a left swing arm lifting motion connecting rod fixing member, and a left swing arm lifting motion connecting rod locking member. The left swing arm lifting motion connecting rod locking member locks and fixes the top end of the left swing arm lifting motion connecting rod to the inner end of the left swing arm lifting motion connecting rod fixing member. The outer end of the left swing arm lifting motion connecting rod fixing member is connected to the left swing arm Z-axis lifting motion servo motor through the left swing arm eccentric shaft rotation mechanism. The left swing arm Z-axis lifting motion servo motor is mounted on the motor mounting base of the double swing arm Z-axis lifting motion mechanism. The outer end of the left swing arm lifting motion connecting rod fixing member is connected to the left swing arm Z-axis lifting drive unit through the left swing arm Z-axis lifting guide mechanism. The dual-arm Z-axis lifting motion mechanism is connected to a motor mounting base. The right arm lifting drive unit includes a right arm Z-axis lifting motion servo motor, a right arm eccentric shaft rotation mechanism that converts rotational motion into Z-axis lifting, a right arm Z-axis lifting guide mechanism, a right arm lifting motion connecting rod fixing component, and a right arm lifting motion connecting rod locking component. The right arm lifting motion connecting rod locking component locks the top end of the right arm lifting motion connecting rod to the inner end of the right arm lifting motion connecting rod fixing component. The outer end of the right arm lifting motion connecting rod fixing component is connected to the right arm Z-axis lifting motion servo motor through the right arm eccentric shaft rotation mechanism. The right arm Z-axis lifting motion servo motor is mounted on the dual-arm Z-axis lifting motion mechanism motor mounting base. The outer end of the right arm lifting motion connecting rod fixing component is connected to the dual-arm Z-axis lifting motion mechanism motor mounting base through the right arm Z-axis lifting guide mechanism.

[0012] As a further improvement of the present invention, the Z-axis is perpendicular to the horizontal plane. The Z-axis lifting servo motor of the left swing arm, the Z-axis lifting servo motor of the right swing arm, the lifting connecting rod fixing component of the left swing arm, and the lifting connecting rod fixing component of the right swing arm are all parallel to the horizontal plane. The rotary drive unit, the central rotating rod of the double swing arm, the lifting connecting rod of the left swing arm, and the lifting connecting rod of the right swing arm are all vertical and perpendicular to the horizontal plane. The left swing arm mechanism and the right swing arm mechanism are symmetrically arranged. Crossed roller guides perpendicular to the horizontal plane are fixed on the left and right sides of the central rotating rod of the double swing arm. The left swing arm mechanism and the right swing arm mechanism are slidably engaged with the crossed roller guides on both sides of the central rotating rod of the double swing arm.

[0013] As a further improvement of the present invention, the right swing arm eccentric shaft rotation mechanism has the same structure as the left swing arm eccentric shaft rotation mechanism. The right swing arm eccentric shaft rotation mechanism includes an eccentric shaft locking member, an eccentric shaft, an eccentric shaft connecting rod assembly, and a Z-axis sliding member connecting shaft. The eccentric shaft is locked to the right swing arm Z-axis lifting motion servo motor through the eccentric shaft locking member. One end of the eccentric shaft connecting rod assembly is connected to the eccentric shaft, and the other end of the eccentric shaft connecting rod assembly is connected to the Z-axis sliding member connecting shaft. The Z-axis sliding member connecting shaft is mounted on the right swing arm lifting motion connecting rod fixing member. The right swing arm Z-axis lifting guide mechanism has the same structure as the left swing arm Z-axis lifting guide mechanism. The right swing arm Z-axis lifting guide mechanism includes a Z-axis guide rail and a Z-axis slider. The Z-axis guide rail and the Z-axis slider are in sliding fit. The Z-axis guide rail is fixed on the motor fixing seat of the double swing arm Z-axis lifting motion mechanism. The Z-axis slider is connected to the outer end of the right swing arm lifting motion connecting rod fixing member.

[0014] The present invention also provides a die bonding device, including the aforementioned double swing arm device.

[0015] The beneficial effects of the present invention are as follows: Through the above solution, a dual-swing arm device that can operate stably and relatively silently is provided. The dual-swing arm device drives the left and right swing arms to move up and down through two servo motors and controls the left and right swing arms to rotate 180° through a rotary servo motor. This completely solves the problem of large gaps in the rotation of existing dual-swing arms, greatly reduces the noise generated by the movement of the mechanism, and solves the vibration generated when the swing arms rotate rapidly, which occurs when the gaps are transitioned to the connecting parts of the other motor base plate. This reduces the possibility of the chip falling off the swing arm nozzle and improves the stability of the device. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other solutions can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional schematic diagram of a double swing arm device according to the present invention.

[0018] Figure 2 This is an exploded view of a double swing arm device according to the present invention.

[0019] Figure 3 This is a three-dimensional schematic diagram of the rotating motion part of a double swing arm device according to the present invention.

[0020] Figure 4 This is an exploded schematic diagram of the rotational motion part of a double swing arm device according to the present invention.

[0021] Figure 5 This is an exploded schematic diagram of the lifting motion part of a double swing arm device according to the present invention.

[0022] Figure 6 This is an exploded view of the left and right swing arms of a double swing arm device according to the present invention. Detailed Implementation

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other.

[0024] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0025] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0027] like Figures 1 to 6 As shown, a double swing arm device includes a mounting base plate 1, a rotary drive unit, a left swing arm lifting drive unit, a right swing arm lifting drive unit, a left swing arm mechanism 16, a right swing arm mechanism 15, a double swing arm center rotating rod 4, a left swing arm lifting motion connecting rod 7, and a right swing arm lifting motion connecting rod 6.

[0028] The central rotating rod 4 of the double swing arm has a central through hole through which the left swing arm lifting motion connecting rod 7 passes, and the left swing arm lifting motion connecting rod 7 has a central through hole through which the right swing arm lifting motion connecting rod 6 passes. The central rotating rod 4 of the double swing arm, the left swing arm lifting motion connecting rod 7 and the right swing arm lifting motion connecting rod 6 are coaxially arranged.

[0029] The left swing arm mechanism and the right swing arm mechanism are respectively installed on the outside of the double swing arm central rotating rod 4, which is cylindrical.

[0030] The left swing arm mechanism 16 and the double swing arm center rotating rod 4 are axially movable and circumferentially fixed. The right swing arm mechanism 15 and the double swing arm center rotating rod 4 are axially movable and circumferentially fixed. That is, the left swing arm mechanism 16 and the right swing arm mechanism 15 can move up and down along the double swing arm center rotating rod 4 along the Z-axis. When the double swing arm center rotating rod 4 rotates, it will synchronously drive the left swing arm mechanism 16 and the right swing arm mechanism 15 to rotate.

[0031] The central rotating rod 4 of the double swing arm is connected to the rotary drive unit, which is mounted on the mounting base plate 1. The rotary drive unit can drive the central rotating rod 4 of the double swing arm to rotate, thereby synchronously driving the left swing arm mechanism 16 and the right swing arm mechanism 15 to rotate, realizing the switching of the swing arm between the material picking position and the material discharging position.

[0032] The bottom of the left swing arm lifting motion connecting rod 7 is circumferentially movable and axially fixed to the left swing arm mechanism 16. The top of the left swing arm lifting motion connecting rod 7 is connected to the left swing arm lifting drive unit. The left swing arm lifting drive unit is installed on the mounting base plate 1. That is, the left swing arm lifting motion connecting rod 7 can be driven to perform Z-axis lifting motion through the left swing arm lifting drive unit, and the left swing arm lifting motion connecting rod 7 will synchronously drive the left swing arm mechanism 16 to perform Z-axis lifting motion.

[0033] The bottom of the right swing arm lifting motion connecting rod 6 is circumferentially movable and axially fixed to the right swing arm mechanism 15. The top of the right swing arm lifting motion connecting rod 6 is connected to the right swing arm lifting drive unit. The right swing arm lifting drive unit is installed on the mounting base plate 1. That is, the right swing arm lifting motion connecting rod 6 can be driven to perform Z-axis lifting motion through the right swing arm lifting drive unit, and the right swing arm lifting motion connecting rod 6 will synchronously drive the right swing arm mechanism 15 to perform Z-axis lifting motion.

[0034] The top and bottom of the right swing arm lifting motion connecting rod 6 extend beyond the left swing arm lifting motion connecting rod 7.

[0035] The double swing arm device also includes an angular contact bearing assembly 14, an angular contact bearing cover 21, and a rotation mechanism locking nut 13. The angular contact bearing assembly 14 is installed in the bearing hole of the mounting base plate 1. The angular contact bearing cover 21 is locked to the lower end of the bearing hole of the mounting base plate 1. The angular contact bearing cover 21 can prevent the angular contact bearing assembly 14 from coming out of the bearing hole. The central rotating rod 4 of the double swing arm passes through the angular contact bearing assembly 4 from bottom to top and is connected to the rotation drive unit. The rotation mechanism locking nut 13 is locked on the central rotating rod 4 of the double swing arm and pressed on the top of the angular contact bearing assembly 14. Most of the weight can be pressed on the angular contact bearing assembly 14, thereby reducing the axial load and improving the die bonding speed.

[0036] The rotary drive unit is a rotary servo motor 11. The double swing arm device also includes a rotary servo motor mounting base 12 and a rotary servo motor connector 10. The rotary servo motor mounting base 12 is fixed on the mounting base 1. The rotary servo motor 11 is fixed on the rotary servo motor mounting base 12. The rotary servo motor mounting base 12 is provided with a rotary servo motor connector receiving groove 1201 for accommodating the rotary servo motor connector 10. The bottom of the rotary servo motor connector 10 is fixedly connected to the top of the central rotating rod 4 of the double swing arm, and the top of the rotary servo motor connector 10 is fixedly connected to the rotary servo motor 11.

[0037] The rotary servo motor connector 10 has a clearance groove 1001 in the middle to avoid the left swing arm lifting drive unit and the right swing arm lifting drive unit. The rotary servo motor connector 10 is connected to a rotary limiting shaft 19. The side of the rotary servo motor connector receiving groove 1201 is provided with a limiting groove 1202 to limit the rotary limiting shaft 19.

[0038] The double swing arm device further includes a left swing arm lifting and mounting angular contact bearing assembly 28, a left swing arm lifting and mounting angular contact bearing assembly sealing cover 29, and a left swing arm lifting motion connecting rod locking nut 30. The left swing arm lifting and mounting angular contact bearing assembly 28 is installed in the bearing hole of the left swing arm mechanism 16. The left swing arm lifting and mounting angular contact bearing assembly sealing cover 29 is locked to the lower end of the bearing hole of the left swing arm mechanism 16 to prevent the left swing arm lifting and mounting angular contact bearing assembly 28 from coming out. The left swing arm lifting motion connecting rod 7 passes through the left swing arm lifting and mounting angular contact bearing assembly 28, and the left swing arm lifting motion connecting rod locking nut 30 is locked to the left swing arm lifting motion connecting rod 7. The locking nut 30 of the left swing arm lifting motion connecting rod is located below the bearing hole of the left swing arm mechanism 16. The locking nut 30 can be used to fix the left swing arm mechanism 16 and the left swing arm lifting motion connecting rod 7 axially, so that when the left swing arm lifting motion connecting rod 7 is lifting in the Z-axis, it can drive the left swing arm mechanism 16 to lift in the Z-axis. The circumferential movement of the left swing arm mechanism 16 and the left swing arm lifting motion connecting rod 7 can be realized by the left swing arm lifting angular contact bearing assembly 28. That is, when the left swing arm mechanism 16 rotates, the left swing arm lifting motion connecting rod 7 can remain stationary under the action of the left swing arm lifting angular contact bearing assembly 28.

[0039] The double swing arm device further includes a right swing arm lifting and mounting angular contact bearing assembly 31, a right swing arm lifting and mounting angular contact bearing assembly sealing cover 32, and a right swing arm lifting and moving connecting rod locking washer 33. The right swing arm lifting and mounting angular contact bearing assembly 31 is installed in the bearing hole of the right swing arm mechanism 15. The right swing arm lifting and mounting angular contact bearing assembly sealing cover 32 is locked to the lower end of the bearing hole of the right swing arm mechanism 15 to prevent the right swing arm lifting and mounting angular contact bearing assembly 31 from coming out. The right swing arm lifting and moving connecting rod 6 passes through the right swing arm lifting and mounting angular contact bearing assembly 31, and the right swing arm lifting and moving connecting rod locking washer 33 is locked to the bottom of the right swing arm lifting and moving connecting rod 6. On the end face, the locking washer 33 of the right swing arm lifting motion connecting rod is located below the bearing hole of the right swing arm mechanism 15. The locking washer 33 can be used to fix the right swing arm mechanism 16 and the right swing arm lifting motion connecting rod 6 axially, so that when the right swing arm lifting motion connecting rod 6 is lifting in the Z-axis, it can drive the right swing arm mechanism 15 to lift in the Z-axis. The circumferential movement of the right swing arm mechanism 15 and the right swing arm lifting motion connecting rod 6 can be achieved by the right swing arm lifting angular contact bearing assembly 31. That is, when the right swing arm mechanism 15 rotates, the right swing arm lifting motion connecting rod 6 can remain stationary under the action of the right swing arm lifting angular contact bearing assembly 31.

[0040] The double swing arm device also includes a motor mounting base 5 for the double swing arm Z-axis lifting motion mechanism.

[0041] The left swing arm lifting drive unit includes a left swing arm Z-axis lifting motion servo motor 2, a left swing arm eccentric shaft rotation mechanism that converts rotational motion into Z-axis lifting, a left swing arm Z-axis lifting guide mechanism, a left swing arm lifting motion connecting rod fixing member 17, and a left swing arm lifting motion connecting rod locking member 18. The left swing arm lifting motion connecting rod locking member 18 locks and fixes the top end of the left swing arm lifting motion connecting rod 7 to the inner end of the left swing arm lifting motion connecting rod fixing member 17. The outer end of the left swing arm lifting motion connecting rod fixing member 17 is connected to the left swing arm Z-axis lifting motion servo motor 2 through the left swing arm eccentric shaft rotation mechanism. The left swing arm Z-axis lifting motion servo motor 2... The left swing arm lifting motion connecting rod fixing member 17 is installed on the motor fixing base 5 of the double swing arm Z-axis lifting motion mechanism. The outer end of the left swing arm lifting motion connecting rod fixing member 17 is connected to the motor fixing base 5 of the double swing arm Z-axis lifting motion mechanism through the left swing arm Z-axis lifting guide mechanism. The left swing arm Z-axis lifting motion servo motor 2 can drive the left swing arm eccentric shaft rotation mechanism, thereby driving the left swing arm lifting motion connecting rod fixing member 17 to perform Z-axis lifting motion. The left swing arm lifting motion connecting rod fixing member 17 drives the left swing arm mechanism 16 to perform Z-axis lifting motion through the left swing arm lifting motion connecting rod 7. The left swing arm Z-axis lifting guide mechanism is used to guide the Z-axis lifting motion of the left swing arm lifting motion connecting rod fixing member 17.

[0042] The right swing arm lifting drive unit includes a right swing arm Z-axis lifting motion servo motor 3, a right swing arm eccentric shaft rotation mechanism that converts rotational motion into Z-axis lifting, a right swing arm Z-axis lifting guide mechanism, a right swing arm lifting motion connecting rod fixing component 8, and a right swing arm lifting motion connecting rod locking component 9. The right swing arm lifting motion connecting rod locking component 9 locks the top end of the right swing arm lifting motion connecting rod 6 to the inner end of the right swing arm lifting motion connecting rod fixing component 8. The outer end of the right swing arm lifting motion connecting rod fixing component 8 is connected to the right swing arm Z-axis lifting motion servo motor 3 through the right swing arm eccentric shaft rotation mechanism. The right swing arm Z-axis lifting motion servo motor 3... The right swing arm lifting motion connecting rod fixing member 8 is installed on the motor fixing base 5 of the double swing arm Z-axis lifting motion mechanism. The outer end of the right swing arm lifting motion connecting rod fixing member 8 is connected to the motor fixing base 5 of the double swing arm Z-axis lifting motion mechanism through the right swing arm Z-axis lifting guide mechanism. The right swing arm Z-axis lifting motion servo motor 3 can drive the right swing arm eccentric shaft rotation mechanism, thereby driving the right swing arm lifting motion connecting rod fixing member 8 to perform Z-axis lifting motion. The right swing arm lifting motion connecting rod fixing member 8 drives the right swing arm mechanism 15 to perform Z-axis lifting motion through the right swing arm lifting motion connecting rod 6. The right swing arm Z-axis lifting guide mechanism is used to guide the Z-axis lifting motion of the right swing arm lifting motion connecting rod fixing member 8.

[0043] The Z-axis is perpendicular to the horizontal plane. The left swing arm Z-axis lifting servo motor 2, the right swing arm Z-axis lifting servo motor 3, the left swing arm lifting connecting rod fixing part 8, and the right swing arm lifting connecting rod fixing part 17 are all parallel to the horizontal plane. The rotary drive unit, the double swing arm center rotating rod 4, the left swing arm lifting connecting rod 7, and the right swing arm lifting connecting rod 6 are all vertical and perpendicular to the horizontal plane. The left swing arm mechanism 16 and the right swing arm mechanism 15 are symmetrically arranged. The left and right sides of the double swing arm center rotating rod 4 are respectively fixed with cross roller guide rails 20 perpendicular to the horizontal plane. The left swing arm mechanism 16 and the right swing arm mechanism 15 are slidably engaged with the cross roller guide rails 20 on both sides of the double swing arm center rotating rod 4. The cross roller guide rails 20 can provide guidance for the Z-axis lifting motion of the left swing arm mechanism 16 and the right swing arm mechanism 15.

[0044] The left swing arm Z-axis lifting motion servo motor 2 and the right swing arm Z-axis lifting motion servo motor 3 are arranged vertically in parallel.

[0045] The right swing arm eccentric shaft rotation mechanism has the same structure as the left swing arm eccentric shaft rotation mechanism.

[0046] The right swing arm eccentric shaft rotation mechanism includes an eccentric shaft locking member 24, an eccentric shaft 25, an eccentric shaft connecting rod assembly 26, and a Z-axis sliding member connecting shaft 27. The eccentric shaft 25 is locked to the right swing arm Z-axis lifting motion servo motor 3 through the eccentric shaft locking member 24. One end of the eccentric shaft connecting rod assembly 26 is connected to the eccentric shaft 25, and the other end of the eccentric shaft connecting rod assembly 26 is connected to the Z-axis sliding member connecting shaft 27. The Z-axis sliding member connecting shaft 27 is mounted on the right swing arm lifting motion connecting rod fixing member 8.

[0047] The right swing arm Z-axis lifting guide mechanism has the same structure as the left swing arm Z-axis lifting guide mechanism.

[0048] The right swing arm Z-axis lifting guide mechanism includes a Z-axis guide rail 22 and a Z-axis slider 23. The Z-axis guide rail 22 and the Z-axis slider 23 are in sliding fit. The Z-axis guide rail 22 is fixed on the motor mounting base 5 of the double swing arm Z-axis lifting motion mechanism. The Z-axis slider 23 is connected to the outer end of the right swing arm lifting motion connecting rod fixing member 8.

[0049] The present invention provides a double swing arm device, the assembly process of which is as follows:

[0050] The rotary servo motor 11 is fixed on the rotary servo motor mounting base 12, the angular contact bearing assembly 14 is mounted on the mounting base plate 1, the central rotating rod 4 of the double swing arm passes through the angular contact bearing assembly 14, and is locked and fixed on the mounting base plate 1 by the rotating mechanism locking nut 13, and then connected to the rotary servo motor 11 through the rotary servo motor connector 10, thereby realizing the rotation action of the double swing arm mechanism.

[0051] The angular contact bearing assembly 14 is pressed into the mounting base plate 1, and the angular contact bearing cover 21 is locked in place to prevent it from falling downwards during movement. Then, the double swing arm center rotating rod 4 is passed through the angular contact bearing assembly 14 from bottom to top and installed and tightened. It is then locked in place with the rotating mechanism locking nut 13. At the same time, the left swing arm mechanism 16 and the right swing arm mechanism 15 are respectively locked to the cross roller guide rail 20. Then, the cross roller guide rail 20 is locked onto the double swing arm center rotating rod 4, so that the entire rotating mechanism is fixed on the mounting base plate 1. The double swing arm center rotating rod 4 is then connected to the rotating servo motor 11 through the rotating servo motor connector 10, and then the screws are tightened. A rotary servo motor 11 is fixed to a rotary servo motor mounting base 12, which is locked onto a mounting base plate 1, forming the rotating part of the double swing arm device. When the rotary servo motor 11 is working, the rotary servo motor connector 10 locks the central rotating rod 4 of the double swing arm, driving the left swing arm mechanism 16 and the right swing arm mechanism 15 to rotate simultaneously. A rotary limit shaft 19 is installed on the rotary servo motor connector 10, allowing the left swing arm mechanism 16 and the right swing arm mechanism 15 to move within the limit groove 1202 of the rotary servo motor mounting base 12, preventing damage to the entire swing arm mechanism due to incorrect direction during manual adjustment. Since the angular contact bearing assembly 14 is installed in the bearing hole of the mounting base plate 1 and then sealed by the angular contact bearing end cover 21, the angular contact bearing assembly 14 is prevented from coming out of the bearing hole. The entire swing arm mechanism is formed by the double swing arm center rotating rod 4 passing from bottom to top through the angular contact bearing assembly 14 and then being locked by the rotating mechanism locking nut 13. In this way, the weight of the swing arm mechanism is pressed on the angular contact bearing assembly 14, thereby reducing the axial load on the rotary servo motor 11 and the rotary servo motor connector 10. The problem of insufficient locking strength of the rotary servo motor connector 10 is also solved, and the die bonding speed is improved.

[0052] The left swing arm lifting motion connecting rod fixing part 17 and the left swing arm lifting motion connecting rod locking part 18 are installed with the left swing arm lifting motion connecting rod 7, and then connected to the left swing arm mechanism 16. The left swing arm lifting motion is realized by the motion control of the left swing arm Z-axis lifting motion servo motor 2. Similarly, the right swing arm lifting motion connecting rod fixing part 8 and the right swing arm lifting motion connecting rod locking part 9 are installed with the right swing arm lifting motion connecting rod 6, and then connected to the right swing arm mechanism 15. The right swing arm lifting motion connecting rod 6 and the left swing arm lifting motion connecting rod 7 are installed with the right swing arm mechanism 15 and the left swing arm mechanism 16 respectively using bearings, so that the double swing arm mechanism can realize the independent lifting motion of the left and right swing arms during rotation.

[0053] The left swing arm Z-axis lifting motion servo motor 2 is fixed to the motor mounting base 5 of the double swing arm Z-axis lifting motion mechanism, and then connected to the eccentric shaft. It is locked by the eccentric shaft locking component. After locking, one end of the eccentric shaft connecting rod assembly is inserted into the eccentric shaft for installation and secured with a snap ring. The other end is inserted into the Z-axis sliding component connecting shaft for installation and secured with a snap ring. The Z-axis sliding component connecting shaft is assembled on the left swing arm lifting motion connecting rod fixing component 17, which is locked onto the Z-axis slider. The Z-axis slider is installed with the Z-axis guide rail, which is screwed onto the motor mounting base 5 of the double swing arm Z-axis lifting motion mechanism. The left swing arm lifting mounting angular contact bearing assembly 28 is pressed into the left swing arm mechanism 16, and the sealing cover 29 of the left swing arm lifting mounting angular contact bearing assembly is locked to prevent it from falling off. The left swing arm lifting motion connecting rod 7 passes through the left swing arm lifting mounting angular contact bearing assembly 28, and its lower end is connected to the left swing arm lifting motion connecting rod assembly 7. The connecting rod is locked with the locking nut 30, and then passes through the hollow double swing arm center rotating rod 4. It is then installed with the left swing arm lifting motion connecting rod fixing part 17 and locked with the left swing arm lifting motion connecting rod locking part 18. Thus, when the left swing arm Z-axis lifting motion servo motor 2 starts to rotate, it connects to the left swing arm lifting motion connecting rod fixing part 17 through the eccentric shaft connecting rod group. The Z-axis slider and Z-axis guide rail are connected to the left swing arm lifting motion connecting rod fixing part 17, and then the left swing arm lifting motion connecting rod 7 is connected, driving the entire left swing arm mechanism to complete the lifting motion.

[0054] Similarly, the right swing arm Z-axis lifting motion servo motor 3 is fixed on the motor mounting base 5 of the double swing arm Z-axis lifting motion mechanism, and then connected to the eccentric shaft 25. It is locked by the eccentric shaft locking member 24. After locking, one end of the eccentric shaft connecting rod assembly 26 is inserted into the eccentric shaft for installation and secured with a snap ring; the other end is inserted into the Z-axis sliding member connecting shaft 27 for installation and secured with a snap ring. The Z-axis sliding member connecting shaft 27 is assembled on the right swing arm lifting motion connecting rod fixing member 8, which is locked onto the Z-axis slider 23. The Z-axis slider 23 is installed in conjunction with the Z-axis guide rail 22. The right swing arm lifting mounting angular contact bearing assembly 31 is pressed into the right swing arm mechanism 15, and the right swing arm lifting mounting angular contact bearing assembly sealing cover 32 locks it to prevent it from falling off. The right swing arm lifting motion connecting rod 6 passes through the left swing arm lifting mounting angular contact bearing assembly 31, and its lower end is locked with the right swing arm lifting motion connecting rod locking washer 33 and screws. The entire mechanism passes through the hollow left swing arm lifting motion connecting rod 7 and is then installed in conjunction with the right swing arm lifting motion connecting rod fixing part 8. It is then locked with the right swing arm lifting motion connecting rod locking part 9. Thus, when the right swing arm Z-axis lifting motion servo motor 3 starts to rotate, it connects to the right swing arm lifting motion connecting rod fixing part 8 through the eccentric shaft 25 and the eccentric shaft connecting rod group 26. The Z-axis slider 23 and the Z-axis guide rail 22 are connected to the right swing arm lifting motion connecting rod fixing part 8, and then the right swing arm lifting motion connecting rod 6 is connected, driving the entire right swing arm mechanism to complete the lifting motion.

[0055] A die bonding apparatus, comprising the aforementioned double swing arm device.

[0056] Based on the traditional double swing arm, this invention designs a double swing arm device with a relatively simple mechanism and relatively silent operation, which has the following advantages:

[0057] 1. The left swing arm Z-axis lifting motion servo motor 2 and the right swing arm Z-axis lifting motion servo motor 3 are arranged vertically. The mechanism connecting the left swing arm lifting motion connecting rod 7 and the right swing arm lifting motion connecting rod 6 can be designed to be relatively simple, and the mechanical assembly is also relatively convenient.

[0058] 2. The left swing arm lifting motion connecting rod 7 and the right swing arm lifting motion connecting rod 6 are interwoven, and then interwoven with the double swing arm center rotation rod 4 to form a three-rod nested structure, which can greatly save space and make the entire swing arm structure extremely compact, realizing the rotation and lifting motion of the double arms.

[0059] 3. The rotary limiting structure consists of a rotary limiting shaft 19 and a limiting groove 1202 on the side of the rotary servo motor mounting base 12. The structure is simple and effective, and the design of the rotary limiting structure can effectively protect the connecting mechanism from impact damage.

[0060] 4. The double swing arm rotation mechanism is fixed to the angular contact bearing assembly 14 by the rotation mechanism locking nut 13, which reduces the axial load on the rotary servo motor 1 and the rotary servo motor connector 10 and solves the problem of insufficient strength of the middle connection part of the locking mechanism.

[0061] 5. The Z-axis motion of the swing arm is realized by two sets of identical eccentric shaft mechanisms, which can convert the rotational motion of the left swing arm Z-axis lifting servo motor 2 and the right swing arm Z-axis lifting servo motor 3 into the Z-axis lifting motion of the left swing arm lifting connecting rod 7 and the right swing arm lifting connecting rod 6. The structure is simple and reliable, and the operation is fast and stable.

[0062] 6. A dual-arm die bonding system is implemented. The two arms, namely the left arm mechanism 16 and the right arm mechanism 15, are driven by the left arm Z-axis lifting motion servo motor 2 and the right arm Z-axis lifting motion servo motor 3, respectively, to perform Z-axis lifting motion. The left arm mechanism 16 and the right arm mechanism 15 are driven to rotate synchronously by the rotary servo motor 11, which can greatly improve the die bonding speed.

[0063] 7. Two sets of identical eccentric shaft mechanisms are used, each controlled by a servo motor to move one swing arm up and down. A rotary servo motor 11 drives the two swing arms to rotate 180° synchronously. This completely solves the problem of gaps in the rotation of existing double swing arms, greatly reduces the noise generated by the movement of the mechanism, and solves the vibration generated when the swing arms rotate rapidly, which is caused by the transition from the gap to the connecting part of the other motor base plate. This reduces the possibility of the chip falling off the swing arm nozzle and improves the stability of the equipment.

[0064] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A double-swing arm device, characterized in that: The system includes a mounting base plate, a rotary drive unit, a left swing arm lifting drive unit, a right swing arm lifting drive unit, a left swing arm mechanism, a right swing arm mechanism, a double swing arm central rotating rod, a left swing arm lifting motion connecting rod, and a right swing arm lifting motion connecting rod. The double swing arm central rotating rod has a central through hole through which the left swing arm lifting motion connecting rod passes, and the left swing arm lifting motion connecting rod has a central through hole through which the right swing arm lifting motion connecting rod passes. The double swing arm central rotating rod, the left swing arm lifting motion connecting rod, and the right swing arm lifting motion connecting rod are coaxially arranged. The left swing arm mechanism and the right swing arm mechanism are respectively mounted on the outer side of the double swing arm central rotating rod. The left swing arm mechanism and the double swing arm central rotating rod are axially movable and circumferentially fixed. The right swing arm mechanism and the central rotating rod of the double swing arm are axially movable and circumferentially fixed. The central rotating rod of the double swing arm is connected to the rotary drive unit, which is mounted on the mounting base plate. The bottom of the left swing arm lifting motion connecting rod is circumferentially movable and axially fixed to the left swing arm mechanism. The top of the left swing arm lifting motion connecting rod is connected to the left swing arm lifting drive unit, which is mounted on the mounting base plate. The bottom of the right swing arm lifting motion connecting rod is circumferentially movable and axially fixed to the right swing arm mechanism. The top of the right swing arm lifting motion connecting rod is connected to the right swing arm lifting drive unit, which is mounted on the mounting base plate.

2. The double swing arm device according to claim 1, characterized in that: The top and bottom of the right swing arm lifting motion connecting rod both extend beyond the left swing arm lifting motion connecting rod.

3. The double swing arm device according to claim 1, characterized in that: The double swing arm device also includes an angular contact bearing assembly, an angular contact bearing cover, and a rotating mechanism locking nut. The angular contact bearing assembly is installed in the bearing hole of the mounting base plate. The angular contact bearing cover is locked to the lower end of the bearing hole of the mounting base plate. The central rotating rod of the double swing arm passes through the angular contact bearing assembly from bottom to top and is connected to the rotating drive unit. The rotating mechanism locking nut is locked on the central rotating rod of the double swing arm and pressed against the top of the angular contact bearing assembly.

4. The double swing arm device according to claim 3, characterized in that: The rotary drive unit is a rotary servo motor. The double swing arm device also includes a rotary servo motor mounting base and a rotary servo motor connector. The rotary servo motor mounting base is fixed to the mounting base plate, and the rotary servo motor is fixed to the rotary servo motor mounting base. The rotary servo motor mounting base is provided with a rotary servo motor connector receiving groove to accommodate the rotary servo motor connector. The bottom of the rotary servo motor connector is fixedly connected to the top of the central rotating rod of the double swing arm, and the top of the rotary servo motor connector is fixedly connected to the rotary servo motor.

5. The double swing arm device according to claim 4, characterized in that: The rotary servo motor connector has a clearance groove in the middle to avoid the left swing arm lifting drive unit and the right swing arm lifting drive unit, and the rotary servo motor connector is connected to a rotary limit shaft.

6. The double swing arm device according to claim 1, characterized in that: The double swing arm device further includes a left swing arm lifting and mounting angular contact bearing assembly, a left swing arm lifting and mounting angular contact bearing assembly sealing cover, and a left swing arm lifting and moving connecting rod locking nut. The left swing arm lifting and mounting angular contact bearing assembly is installed in the bearing hole of the left swing arm mechanism. The left swing arm lifting and mounting angular contact bearing assembly sealing cover is locked to the bearing hole of the left swing arm mechanism. The left swing arm lifting and moving connecting rod passes through the left swing arm lifting and mounting angular contact bearing assembly. The left swing arm lifting and moving connecting rod locking nut is locked onto the left swing arm lifting and moving connecting rod, and the left swing arm lifting and moving connecting rod locking nut is located below the bearing hole of the left swing arm mechanism. The double swing arm device also includes a right swing arm lifting and mounting angular contact bearing assembly, a right swing arm lifting and mounting angular contact bearing assembly sealing cover, and a right swing arm lifting and moving connecting rod locking washer. The right swing arm lifting and mounting angular contact bearing assembly is installed in the bearing hole of the right swing arm mechanism. The right swing arm lifting and mounting angular contact bearing assembly sealing cover is locked to the bearing hole of the right swing arm mechanism. The right swing arm lifting and moving connecting rod passes through the right swing arm lifting and mounting angular contact bearing assembly. The right swing arm lifting and moving connecting rod locking washer is locked to the bottom end face of the right swing arm lifting and moving connecting rod. The right swing arm lifting and moving connecting rod locking washer is located below the bearing hole of the right swing arm mechanism.

7. The double swing arm device according to claim 1, characterized in that: The double-swing arm device further includes a motor mounting base for the double-swing arm Z-axis lifting motion mechanism; the left-swing arm lifting drive unit includes a left-swing arm Z-axis lifting motion servo motor, a left-swing arm eccentric shaft rotation mechanism that converts rotational motion into Z-axis lifting, a left-swing arm Z-axis lifting guide mechanism, a left-swing arm lifting motion connecting rod fixing component, and a left-swing arm lifting motion connecting rod locking component. The left-swing arm lifting motion connecting rod locking component locks the top end of the left-swing arm lifting motion connecting rod to the inner end of the left-swing arm lifting motion connecting rod fixing component. The outer end of the left-swing arm lifting motion connecting rod fixing component is connected to the left-swing arm Z-axis lifting motion servo motor through the left-swing arm eccentric shaft rotation mechanism. The left-swing arm Z-axis lifting motion servo motor is mounted on the motor mounting base of the double-swing arm Z-axis lifting motion mechanism. The outer end of the left-swing arm lifting motion connecting rod fixing component is connected to the double-swing arm Z-axis lifting motion mechanism through the left-swing arm Z-axis lifting guide mechanism. The lifting motion mechanism motor mounting base is connected; the right swing arm lifting drive unit includes a right swing arm Z-axis lifting motion servo motor, a right swing arm eccentric shaft rotation mechanism that converts rotational motion into Z-axis lifting, a right swing arm Z-axis lifting guide mechanism, a right swing arm lifting motion connecting rod fixing component, and a right swing arm lifting motion connecting rod locking component. The right swing arm lifting motion connecting rod locking component locks and fixes the top end of the right swing arm lifting motion connecting rod to the inner end of the right swing arm lifting motion connecting rod fixing component. The outer end of the right swing arm lifting motion connecting rod fixing component is connected to the right swing arm Z-axis lifting motion servo motor through the right swing arm eccentric shaft rotation mechanism. The right swing arm Z-axis lifting motion servo motor is mounted on the double swing arm Z-axis lifting motion mechanism motor mounting base. The outer end of the right swing arm lifting motion connecting rod fixing component is connected to the double swing arm Z-axis lifting motion mechanism motor mounting base through the right swing arm Z-axis lifting guide mechanism.

8. The double swing arm device according to claim 7, characterized in that: The Z-axis is perpendicular to the horizontal plane. The Z-axis lifting servo motors of the left and right swing arms, the left and right swing arms lifting connecting rod fixing parts, and the right swing arm lifting connecting rod fixing parts are all parallel to the horizontal plane. The rotary drive unit, the double swing arm central rotating rod, the left and right swing arm lifting connecting rods are all vertical and perpendicular to the horizontal plane. The left and right swing arm mechanisms are symmetrically arranged. Crossed roller guides perpendicular to the horizontal plane are fixed on both sides of the double swing arm central rotating rod. The left and right swing arm mechanisms slide with the crossed roller guides on both sides of the double swing arm central rotating rod.

9. The double swing arm device according to claim 7, characterized in that: The right swing arm eccentric shaft rotation mechanism has the same structure as the left swing arm eccentric shaft rotation mechanism. The right swing arm eccentric shaft rotation mechanism includes an eccentric shaft locking member, an eccentric shaft, an eccentric shaft connecting rod assembly, and a Z-axis sliding member connecting shaft. The eccentric shaft is locked to the right swing arm Z-axis lifting motion servo motor through the eccentric shaft locking member. One end of the eccentric shaft connecting rod assembly is connected to the eccentric shaft, and the other end of the eccentric shaft connecting rod assembly is connected to the Z-axis sliding member connecting shaft. The Z-axis sliding member connecting shaft is mounted on the right swing arm lifting motion connecting rod fixing member. The right swing arm Z-axis lifting guide mechanism has the same structure as the left swing arm Z-axis lifting guide mechanism. The right swing arm Z-axis lifting guide mechanism includes a Z-axis guide rail and a Z-axis slider. The Z-axis guide rail and the Z-axis slider are in sliding fit. The Z-axis guide rail is fixed on the motor fixing seat of the double swing arm Z-axis lifting motion mechanism, and the Z-axis slider is connected to the outer end of the right swing arm lifting motion connecting rod fixing member.

10. A die bonding apparatus, characterized in that: Includes the double swing arm device as described in any one of claims 1 to 9.

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