Mask layer detection method, detection device, detection equipment and storage medium

Abstract

The present invention provides a method, apparatus, device, and storage medium for inspecting a mask layer. The method comprises obtaining at least one mask layer; dividing the at least one mask layer into a first area and a second area, wherein the first area is a non-inspection area and the second area is an inspection area, and the second area is a special-shaped area; dividing the second area into a plurality of blocks arranged in an array; comparing a first block with at least one second block in the blocks to obtain a comparison result; and determining the defect type of the mask layer based on the comparison result; wherein the first area has a first background color and the second area has a second background color, and the first background color and the second background color are different.

Description

Technical Field

[0001] The present invention relates to a method and apparatus for inspecting a mask layer used in display panel manufacturing, and more particularly to a method, apparatus, device, and storage medium for inspecting a mask layer that can be applied to special-shaped display panels. Background Art

[0002] With the development of technology, display devices are widely used in many electronic products, such as mobile phones, tablets, watches, cars, etc.

[0003] The use of masks is unavoidable during the display panel manufacturing process. The mask's design layer is typically inspected using the eight-neighborhood comparison method to determine if there are any defects. For irregular-shaped display panels, the mask's design layer is also irregular in shape. Irregular design layers can be divided into rectangular and non-rectangular areas. Using the eight-neighborhood comparison method for inspecting non-rectangular areas can generate a large number of false errors.

[0004] Existing inspection methods typically set the base color of a design layer to black and define it as invalid, while the remaining design layers are defined as valid. When using the eight-neighborhood comparison method, if a defect is detected, the method further determines whether the defect and the base color are the same. If the defect and the base color are the same, the defect is ignored. This method can detect defects caused by added layers, but defects caused by missing layers cannot be detected because their color matches the base color.

[0005] Therefore, how to provide a detection method that can simultaneously detect two types of defects, namely layer missing and layer added, in the design layer of a special-shaped mask, reduce production costs, and improve production efficiency, is one of the problems that need to be solved. Summary of the Invention

[0006] Embodiments of the present invention provide a method, apparatus, device, and storage medium for detecting a mask layer, which can simultaneously detect two types of defects, namely, missing layers and added layers, in a special-shaped mask design layer, thereby reducing production costs and improving production efficiency.

[0007] In one embodiment of the present invention, a method for inspecting a mask template layer includes obtaining at least one mask template layer; dividing the at least one mask template layer into a first area and a second area, wherein the first area is a non-inspection area, the second area is an inspection area, and the second area is an irregular-shaped area; dividing the second area into a plurality of blocks arranged in an array; comparing a first block with at least one second block in the blocks to obtain a comparison result; and determining a defect type of the mask template layer based on the comparison result, wherein the first area has a first background color, the second area has a second background color, and the first background color is different from the second background color.

[0008] In the above detection method, the first background color includes black, and the second background color includes gray.

[0009] In the above detection method, an eight-neighborhood comparison method is used to compare the first block with the at least one second block.

[0010] In the above detection method, when the eight-neighborhood comparison method is used to detect the first block, eight reference blocks of the first block are first determined. If some of the eight reference blocks are located in the first area, these reference blocks are not included in the comparison.

[0011] In the above detection method, the defect type includes layer addition or layer loss.

[0012] In the above-mentioned detection method, when comparing the first block with the at least one second block, if it is determined that the first block or one of the second blocks has a defect, it is further confirmed whether the defect is the same color as the second background color. If the color is the same, the defect type is determined to be layer missing.

[0013] In one embodiment of the present invention, a detection device for a mask template layer includes a layer acquisition unit for acquiring at least one mask template layer; an area division unit for dividing the at least one mask template layer into a first area and a second area, and dividing the second area into a plurality of blocks arranged in an array, wherein the first area is a non-detection area, the second area is a detection area, and the second area is an irregular-shaped area; a comparison unit for comparing a first block with at least one second block in the blocks to obtain a comparison result; and a judgment unit for judging the defect type of the mask template layer according to the comparison result, wherein the first area has a first background color, the second area has a second background color, and the first background color is different from the second background color.

[0014] In the above detection device, the first background color includes black, and the second background color includes gray.

[0015] In the above detection device, the comparison unit compares the first block with the at least one second block using an eight-neighborhood comparison method.

[0016] In the above-mentioned detection device, when the comparison unit uses the eight-neighborhood comparison method to detect the first block, eight reference blocks of the first block are first determined. If some of the eight reference blocks are located in the first area, these reference blocks do not participate in the comparison.

[0017] In the above-mentioned detection device, the defect type includes layer addition or layer loss.

[0018] In the above-mentioned detection device, if the judgment unit determines that there is a defect in the first block or a certain second block based on the comparison result, it is further confirmed whether the color of the defect is the same as the second background color. If the color is the same, the defect type is judged to be layer missing.

[0019] A detection device according to one embodiment of the present invention includes at least one detection device as described above.

[0020] A storage medium according to an embodiment of the present invention is used to store a computer program, and the computer program is used to execute any one of the detection methods described above.

[0021] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this does not limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a flow chart of a detection method according to an embodiment of the present invention.

[0023] Figure 2 It is a structural diagram of area division according to an embodiment of the present invention.

[0024] Figure 3A 2 is a schematic diagram of an eighth neighborhood comparison method according to an embodiment of the present invention.

[0025] Figure 3B 2 is a schematic diagram of another embodiment 8 of the neighborhood comparison method of the present invention.

[0026] Figure 4 It is a schematic diagram of the defect type of the present invention.

[0027] Figure 5 It is a structural diagram of a detection device according to an embodiment of the present invention.

[0028] Wherein, the reference numerals:

[0029] 100: Detection Method

[0030] S101-S105: Steps

[0031] A1: First Area

[0032] A2: Second Area

[0033] B1, B2: Blocks

[0034] BG: Background layer

[0035] D, D': mask layer

[0036] DP: Defective part

[0037] 200: Detection device

[0038] 201: Layer acquisition unit

[0039] 202: Regional Division Unit

[0040] 203: Comparison unit

[0041] 204: Judgment unit DETAILED DESCRIPTION

[0042] The structural principle and working principle of the present invention are described in detail below with reference to the accompanying drawings:

[0043] Figure 1 FIG. 1 is a flow chart of a detection method according to an embodiment of the present invention. Figure 1 As shown, the method 100 for detecting a mask layer of the present invention includes the following steps:

[0044] S101, obtaining a mask layer. Furthermore, this may involve reading a pre-designed mask layer. During the display panel production process, many different mask layers are typically used, and the corresponding mask layers also consist of multiple layers. When using the inspection method 100 of the present invention for inspection, each mask layer can be inspected, or multiple mask layers can be inspected simultaneously, although the present invention is not limited thereto.

[0045] S102: Divide the mask layer into a first area and a second area. Figure 2 This is a schematic diagram of the regional division structure of an embodiment of the present invention. Figure 2 As shown, based on the initial mask layer D, a background layer BG is set and superimposed on the background layer BG, thereby forming a mask layer D' for detection. As a result, the mask layer D' is divided into a first area A1 and a second area A2. The first area A1 is defined as a non-detection area, and the second area A2 is defined as a detection area. The second area A2 is an irregularly shaped area.

[0046] Based on the initial mask layer D, the background layer BG is set to two background colors: the area corresponding to the first area A1 is set to a first background color, such as black, and the area corresponding to the second area A2 is set to a second background color, such as gray. The present invention uses black and gray as examples only; other background colors may also be used, and the present invention is not limited thereto. It should be noted that both the first and second background colors should be different from the color of the mask layer D.

[0047] It should be noted that, in this embodiment, the pattern in the initial mask layer D is white, for the convenience of drawing and explanation. Figure 2 The middle mask layer D has a black background color. In actual operation, the mask layer D may be a layer having a pattern without a background color.

[0048] In addition, for a more complex mask layer D or one with multiple non-detection areas, it can also be divided into multiple detection areas or non-detection areas. The present invention is described by taking the first area and the second area as an example and is not limited thereto.

[0049] S103: Divide the second area into a plurality of blocks. In actual operation, for the second area A2, in order to use the eight-neighborhood comparison method for detection, the second area A2 is divided into a plurality of blocks arranged in an array.

[0050] S104: Block comparison to obtain comparison results. Figure 3A is a schematic diagram of an eighth neighborhood comparison method according to an embodiment of the present invention. Figure 3B 2 is a schematic diagram of another embodiment 8 of the neighborhood comparison method of the present invention.

[0051] like Figure 3A As shown, the second area A2 is divided into multiple blocks. During detection, each block needs to be tested. The block to be tested is defined as the first block B1, and the blocks other than the first block B1 are defined as the second blocks. When using the eight-neighborhood comparison method to detect the first block B1, eight reference blocks B2 are first determined for comparison with the first block B1. The eight reference blocks B2 include the second block. In actual operation, some or all of the eight reference blocks B2 are the second block.

[0052] The first block B1 is compared with the eight reference blocks B2 (second blocks) one by one. If they are all the same, it means that the first block B1 has no defects. If they are all different, it means that the first block B1 has defects. If it is different from only one of the reference blocks B2 (second blocks), it means that the reference block B2 (second block) has defects. Figure 3AIn the embodiment shown, the first block B1 and the reference block B2 (second block) are both located in the second area A2 (all eight reference blocks B2 of the first block B1 are second blocks), and the above comparison method can be used.

[0053] like Figure 3B As shown, a portion of the eight reference blocks B2' is located in the first area A1 (in this case, the portion of the eight reference blocks B2 in the first area B1 is the second block). Since the first area A1 is a non-detection area, this portion of the reference blocks B2' is marked as invalid and does not participate in the comparison with the first block B1. Only the first block B1 is compared with the reference blocks B2 located in the second area A2. The specific comparison method can be referred to the method described above.

[0054] in, Figure 3A 、 Figure 3B The block division is only exemplarily shown in a partial area. It can be understood that the entire detection area (the second area A2) is divided into multiple blocks.

[0055] S105, determining the defect type. Generally, defects in the mask layer D include two types of defects, namely, layer addition or layer loss. Figure 4 It is a schematic diagram of the defect type of the present invention. Figure 4 As shown, Figure 4 The upper row indicates the defect types for added layers, and the lower row indicates the defect types for missing layers.

[0056] After using the comparison method described in S104 above, if a block is determined to have a defect, further confirmation of the defect type is required. This can be done by comparing the color of the defect portion DP with the second background color in the second area A2 (i.e., the non-detection area) and determining whether the two are identical. If the color of the defect portion DP is different from the second background color, the defect type is layer addition; if they are identical, the defect type is layer loss.

[0057] Of course, the method for detecting the mask layer also includes other steps, which will not be described in detail here.

[0058] In this invention, the mask layer is divided into inspection and non-inspection areas, and different background colors are used in these areas to accurately detect defects in the mask design layer. Furthermore, if a defect is detected in a certain area of the inspection area, the color of the defective area is compared with the background color of the non-inspection area to further accurately determine the defect type.

[0059] In one embodiment, the mask layer is a mask design layer, that is, a design drawing for a mask. At this point, the corresponding mask is still in the design phase and has not yet been manufactured. In this case, the inspection of the mask layer is focused on the mask design layer, not the physical pattern on the mask. The inspection method of the present invention accurately detects defects in the mask design layer, allowing designers to make timely adjustments and ensure that the design is completely correct before proceeding with the production of the finished mask.

[0060] Figure 5 FIG. 1 is a schematic diagram of the structure of a detection device according to an embodiment of the present invention. Figure 5 As shown, the mask layer detection device 200 of the present invention includes a layer acquisition unit 201 , a region division unit 202 , a comparison unit 203 and a judgment unit 204 .

[0061] Specifically, the layer acquisition unit 201 is used to acquire at least one mask layer. Furthermore, it can read a pre-designed mask layer. During the display panel production process, many different mask layers are typically used, and the corresponding mask layers also consist of multiple layers. When using the detection device 200 of the present invention for testing, each mask layer can be tested, or multiple mask layers can be tested simultaneously, although the present invention is not limited thereto.

[0062] The area division unit 202 is used to divide at least one mask layer into a first area and a second area, and divide the second area into a plurality of blocks arranged in an array, wherein the first area is a non-detection area, the second area is a detection area, and the second area is a special-shaped area.

[0063] Specifically, Figure 2 This is a schematic diagram of the regional division structure of an embodiment of the present invention. Figure 2 As shown, a background layer BG is set based on the acquired mask layer D, and mask layer D is superimposed on background layer BG, thereby forming a mask layer D' for detection. As a result, mask layer D' is divided into a first area A1 and a second area A2. First area A1 is defined as a non-detection area, and second area A2 is defined as a detection area. Second area A2 is an irregularly shaped area.

[0064] Here, based on the mask layer D, the background layer BG is set to two background colors: the area corresponding to the first area A1 is set to a first background color, such as black, and the area corresponding to the second area A2 is set to a second background color, such as gray. The present invention uses black and gray as examples only; other background colors may also be used, and the present invention is not limited thereto. It should be noted that both the first and second background colors should be different from the color of the mask layer D.

[0065] In addition, for a more complex mask layer D or one with multiple non-detection areas, it can also be divided into multiple detection areas or non-detection areas. The present invention is described by taking the first area and the second area as an example and is not limited thereto.

[0066] The area division unit 202 is further configured to divide the second area A2 into a plurality of blocks. In actual operation, in order to use the eight-neighborhood comparison method to perform detection on the second area A2, the second area A2 is divided into a plurality of blocks arranged in an array.

[0067] The comparison unit 203 is configured to compare a first block with at least one second block in the blocks to obtain a comparison result. Figure 3A is a schematic diagram of an eighth neighborhood comparison method according to an embodiment of the present invention. Figure 3B 2 is a schematic diagram of another embodiment 8 of the neighborhood comparison method of the present invention.

[0068] like Figure 3A As shown, the second area A2 is divided into multiple blocks. During detection, each block needs to be tested. The block to be tested is defined as the first block B1, and the blocks other than the first block B1 are defined as the second blocks. When using the eight-neighborhood comparison method to detect the first block B1, eight reference blocks B2 are first determined for comparison with the first block B1. The eight reference blocks B2 include the second block. In actual operation, some or all of the eight reference blocks B2 are the second block.

[0069] The first block B1 is compared with the eight reference blocks B2 (second blocks) one by one. If they are all the same, it means that the first block B1 has no defects. If they are all different, it means that the first block B1 has defects. If it is different from only one of the reference blocks B2 (second blocks), it means that the reference block B2 (second block) has defects. Figure 3A In the embodiment shown, the first block B1 and the reference block B2 (second block) are both located in the second area A2 and the above comparison method can be used.

[0070] like Figure 3B As shown, a portion of the eight reference blocks B2' is located in the first area A1. Since the first area A1 is a non-detection zone, this portion of the reference block B2' is marked as invalid and does not participate in the comparison with the first block B1. Only the first block B1 is compared with the reference block B2 located in the second area A2. The comparison method with other reference blocks B2 can be similar to the method described above.

[0071] in, Figure 3A 、 Figure 3BThe block division is only exemplarily shown in a partial area. It can be understood that the entire detection area (the second area A2) is divided into multiple blocks.

[0072] The judging unit 204 is used to judge the defect type of the mask layer according to the comparison result. Generally, the defects in the mask layer D include two types of defects, namely, layer addition or layer loss. Figure 4 It is a schematic diagram of the defect type of the present invention. Figure 4 As shown, Figure 4 The upper row indicates the defect types for added layers, and the lower row indicates the defect types for missing layers.

[0073] After the comparison, if a block is determined to have a defect, further confirmation of the defect type is required. This can be done by comparing the color of the defect portion DP with the second background color in the second area A2 and determining whether the two are identical. If the color of the defect portion DP is different from the second background color, the defect type is layer addition; if they are identical, the defect type is layer loss.

[0074] Of course, the specific structure of the detection device and the connection relationship therebetween will not be described in detail here.

[0075] The present invention also provides a detection device, comprising at least one detection device as described above.

[0076] The present invention also provides a storage medium for storing a computer program, wherein the computer program is used to execute any one of the detection methods described above.

[0077] According to an embodiment of the present invention, for layer-missing defects, the inspection area uses a different background color than the non-inspection area. When the background color matches the defect area, the defect type can be determined as layer-missing. When the background color differs from the defect area, the defect type can be determined as layer-added. This allows for simultaneous determination of different defect types, saving production costs and improving efficiency.

[0078] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art may make various corresponding changes and modifications based on the present invention, but these corresponding changes and modifications should all fall within the scope of protection of the claims attached to the present invention.

Claims

1. A method for detecting a mask layer, characterized in that: include: Obtain at least one mask layer; Dividing the at least one mask layer into a first area and a second area, wherein the first area is a non-inspection area, the second area is a detection area, and the second area is a special-shaped area; Dividing the second area into a plurality of blocks arranged in an array; Comparing a first block with at least a second block in the blocks to obtain a comparison result; Determining the defect type of the mask layer according to the comparison result; The first area has a first background color, the second area has a second background color, and the first background color is different from the second background color.

2. The detection method according to claim 1, wherein The first background color includes black, and the second background color includes gray.

3. The detection method according to claim 1, wherein An eight-neighborhood comparison method is used to compare the first block with the at least one second block.

4. The detection method according to claim 3, wherein When the eight-neighborhood comparison method is used to detect the first block, eight reference blocks of the first block are first determined. If some of the eight reference blocks are located in the first area, these reference blocks are not included in the comparison.

5. The detection method according to claim 1, wherein The defect types include added layers or missing layers.

6. The detection method according to claim 5, wherein When comparing the first block with the at least one second block, if it is determined that the first block or one of the second blocks has a defect, it is further confirmed whether the defect is the same color as the second background color. If the color is the same, the defect type is determined to be layer missing.

7. A detection device for a mask layer, characterized in that: include: A layer acquisition unit, configured to acquire at least one mask layer; an area division unit, configured to divide the at least one mask layer into a first area and a second area, and to divide the second area into a plurality of blocks arranged in an array, wherein the first area is a non-detection area, the second area is a detection area, and the second area is a special-shaped area; a comparison unit, configured to compare a first block with at least one second block in the blocks to obtain a comparison result; a judging unit, configured to judge the defect type of the mask layer according to the comparison result; The first area has a first background color, the second area has a second background color, and the first background color is different from the second background color.

8. The detection device according to claim 7, characterized in that The first background color includes black, and the second background color includes gray.

9. The detection device according to claim 7, wherein: The comparison unit compares the first block with the at least one second block using an eight-neighborhood comparison method.

10. The detection device according to claim 9, wherein: When the comparison unit detects the first block using the eight-neighborhood comparison method, eight reference blocks of the first block are first determined. If some of the eight reference blocks are located in the first area, these reference blocks do not participate in the comparison.

11. The detection device according to claim 7, wherein: The defect types include added layers or missing layers.

12. The detection device according to claim 11, wherein: If the judgment unit determines that there is a defect in the first block or one of the second blocks according to the comparison result, it further confirms whether the color of the defect is the same as the second background color. If the color is the same, it determines that the defect type is layer missing.

13. A detection device, characterized in that: The method comprises at least one detection device according to any one of claims 7 to 12.

14. A storage medium for storing a computer program, characterized in that: The computer program is used to execute any one of the detection methods according to claims 1-6.

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