A fixture for grinding ITO target

Abstract

The present invention discloses a fixture for grinding ITO target materials, comprising a base, a support plate fixedly connected to the top of the base, a placement table installed on the top of the support plate, a fixing plate installed on the top of the base, a fixing device installed on one side of the support plate, an adjustment device installed on the bottom of the placement table, and a device slot opened at the center of the top of the placement table; the fixing device comprises: a pressure rod having a right-angle rod-shaped structure, and an electric push rod arranged at one end of the pressure rod, an end of the pressure rod away from the electric push rod is rotatably connected to an extrusion plate through a rotating seat, and the outer side of the pressure rod is rotatably connected to a limited support frame through a rotating seat; a reset spring, which is arranged inside the device slot, and the present invention relates to the technical field of ITO target materials. The fixture for grinding ITO target materials can control the clamping force according to the weight of the target material, can control the clamping force well, and has better adaptability.

Description

Technical Field

[0001] The invention relates to the technical field of ITO target materials, in particular to a tooling fixture for polishing an ITO target material. Background Art

[0002] ITO target material is a black-gray ceramic semiconductor formed by mixing indium oxide and tin oxide powder in a certain proportion and then processing and shaping through a series of production processes, and then sintering in a high-temperature atmosphere (1600 degrees, sintering with oxygen). ITO film uses ITO target material as raw material, and the ITO target is gasified and sputtered onto a glass substrate or a flexible organic film through magnetron sputtering. ITO film has conductivity and light transmittance, and the thickness is generally 30 nanometers to 200 nanometers. After the ITO target material is sintered, it will be deformed to a certain extent, so it needs to be cut and plane-polished accordingly to achieve the size required by the customer. After the target material is cut, there will be cutting marks on the side, so it needs to be polished. In the polishing process, the ITO target material needs to be clamped and fixed by a fixture.

[0003] The existing device has a fixed clamping force on the target material, and cannot control the clamping force according to the weight of the target material. The clamping force cannot be adjusted, and the adaptability and practicality are poor. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides: a tooling fixture for grinding ITO target materials, comprising a base, a support plate is fixedly connected to the top of the base, a placement table is installed on the top of the support plate, a fixing plate is installed on the top of the base, a fixing device is installed on one side of the support plate, an adjustment device is installed on the bottom of the placement table, and a device groove is opened at the center of the top of the placement table;

[0005] The fixing device comprises:

[0006] A pressure rod having a right-angle rod-shaped structure and an electric push rod arranged at one end of the pressure rod, an end of the pressure rod away from the electric push rod is rotatably connected to an extrusion plate via a rotating seat, and an outer side of the pressure rod is rotatably connected to a limited support frame via a rotating seat;

[0007] A return spring is arranged inside the device groove, an anti-skid device is installed on the top of the return spring, a fixed slide is installed on the inner wall of the device groove, a contact plate is installed on the bottom of the anti-skid device, and a moving slide is installed on the bottom of the contact plate. The target material is placed on the anti-skid device to squeeze the return spring, and the return spring is compressed into the device groove under force. At this time, the anti-skid device moves downward and drives the contact plate to slide down, and the contact plate drives the moving slide to contact the fixed slide and slide down along the fixed slide. The weight of the target material is judged by the distance the moving slide slides on the fixed slide. When the gravity of the placed target material is heavier, the distance the moving slide slides on the fixed slide is longer. At this time, the electric push rod is controlled to increase the thrust through the cooperation of the moving slide and the fixed slide. At this time, the extrusion plate has a greater extrusion force on the target material. When the placed target material is lighter, the distance the moving slide slides on the fixed slide is shorter, and the thrust of the electric push rod is reduced. At this time, the extrusion plate has a smaller extrusion force on the target material. The clamping force can be controlled according to the weight of the target material, the clamping force can be well controlled, and the adaptability is better.

[0008] Preferably, the movable end of the electric push rod is rotatably connected to the bottom of the pressure rod through a connecting frame, and the end of the electric push rod away from the pressure rod is rotatably connected to the support plate through a rotating seat.

[0009] Preferably, the position-limiting support frames are provided in two groups and are symmetrically distributed on both sides of the pressure rod, and the bottom of the position-limiting support frames is fixedly connected to the top of the placement table.

[0010] Preferably, the fixed slide and the movable slide are both arranged on the control circuit of the electric push rod. When the target material to be polished is lighter, the thrust of the electric push rod can be controlled to be reduced, thereby reducing the extrusion pressure on the target material. The thinner and smaller target material can be protected to prevent it from being deformed and damaged due to excessive force. The bottom of the reset spring is fixedly connected to the inner wall of the device groove.

[0011] Preferably, the anti-skid device includes an anti-skid plate, an arc-shaped groove is provided on the top of the anti-skid plate, an anti-skid airbag is installed inside the arc-shaped groove, a friction pad is installed on the top of the anti-skid airbag, a groove is provided at the center of the anti-skid plate, an air storage bag is installed inside the groove, the air storage bag is evenly connected with a control valve, the control valve is opened to discharge the gas inside the air storage bag into the anti-skid airbag, the air pressure inside the anti-skid airbag increases, the gas increases, and the air bag gradually expands and deforms, and the expanded and deformed anti-skid airbag uses the friction pad to squeeze the target material on the top, thereby increasing the friction between the anti-skid airbag and the target material, effectively preventing the target material from slipping and falling off during grinding, and improving the grinding accuracy.

[0012] Preferably, the arc-shaped grooves are provided in multiple groups and are evenly distributed on the anti-slip plate, and the friction pads are provided in multiple groups and are evenly distributed on the anti-slip airbag.

[0013] Preferably, the air outlet end of the control valve away from the air storage bag is connected to the air inlet end of the anti-skid air bag, the anti-skid air bag is provided in multiple groups, and the bottom of the anti-skid plate is fixedly connected to the top of the contact plate.

[0014] Preferably, the adjusting device includes a sliding sleeve, the inner wall of the sliding sleeve is rotatably connected to a fixed sleeve through a bearing, one end of the fixed sleeve is fixedly connected to a support column, the inner wall of the fixed sleeve is slidably connected to a sealing piston, one end of the sealing piston extends to the outside of the fixed sleeve and is fixedly connected to a pressing plate, the inner wall of the sliding sleeve is provided with a limiting hole, the inner wall of the fixed sleeve is connected to an extension tube, the inner wall of the extension tube is slidably connected to a movable piston, one end of the movable piston extends to the outside of the extension tube and is fixedly connected to a block, the sliding sleeve is rotated to rotate along the fixed sleeve through the bearing, when the sliding sleeve drives the placement table to deflect to a required angle, the pressing plate is pushed to drive the sealing piston to slide into the inside of the fixed sleeve, the sealing piston squeezes the hydraulic oil in the fixed sleeve and pushes the movable piston in the extension tube to slide outward, the movable piston drives the block to be stuck in the corresponding limiting hole, the required angle is fixed, the target material to be processed can be fixed on the inclined surface, thereby facilitating the grinding of the inclined surface.

[0015] Preferably, the outer side of the sliding sleeve is fixedly connected to the bottom of the placement table, and one end of the support column away from the fixed sleeve is fixedly connected to the fixed plate.

[0016] Preferably, the interior of the fixed sleeve is filled with hydraulic oil, the limiting holes are arranged in multiple groups and are evenly distributed on the inner wall of the sliding sleeve, the extension tubes are arranged in multiple groups and correspond one-to-one to the limiting holes, and the clamping blocks are adapted to the limiting holes.

[0017] The present invention provides a fixture for grinding ITO targets, which has the following beneficial effects:

[0018] 1. A tooling fixture for grinding ITO target materials, through the installation of a fixing device, the target material is placed on the anti-slip device to squeeze the reset spring, the reset spring is compressed into the device groove by force, at this time the anti-slip device moves downward and drives the contact plate to slide down, the contact plate drives the moving slide to contact the fixed slide and slide down along the fixed slide, the weight of the target material is judged by the distance the moving slide slides on the fixed slide, when the placed target material has a heavier gravity, the moving slide slides on the fixed slide for a longer distance, at this time the electric push rod is controlled to increase the thrust by the cooperation of the moving slide and the fixed slide, at this time the extrusion plate has a greater extrusion force on the target material, when the placed target material is lighter, the moving slide slides on the fixed slide for a shorter distance, the thrust of the electric push rod is reduced, at this time the extrusion plate has a smaller extrusion force on the target material, the clamping force can be controlled according to the weight of the target material, the clamping force can be well controlled, and the adaptability is better.

[0019] 2. This kind of ITO target grinding fixture, through the setting of the moving slide and the fixed slide, can control the thrust of the electric push rod to reduce when the target being ground is lighter, thereby reducing the extrusion pressure on the target, and can protect thinner and smaller targets to prevent them from being deformed and damaged due to excessive force.

[0020] 3. This kind of ITO target grinding fixture, through the installation of anti-skid device and fixing device, opens the control valve to discharge the gas inside the air storage bag into the anti-skid air bag, the air pressure inside the anti-skid air bag increases, the gas increases and gradually expands to produce deformation, the anti-skid air bag after expansion and deformation uses the friction gasket to squeeze the target material on the top, increase the friction between the target material, effectively prevent the target material from slipping and falling off during grinding, and improve the grinding accuracy.

[0021] 4. This kind of ITO target material grinding fixture is installed by adjusting the device, and the sliding sleeve is rotated along the fixed sleeve through the bearing. When the sliding sleeve drives the placement table to deflect to the required angle, the pressing plate is pushed to drive the sealing piston to slide inside the fixed sleeve. The sealing piston squeezes the hydraulic oil in the fixed sleeve and pushes the moving piston in the extension tube to slide outward. The moving piston drives the card block to be inserted into the corresponding limit hole to fix the required angle. The target material to be processed can be fixed on the inclined surface, thereby facilitating the grinding of the inclined surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the tooling fixture for polishing ITO target material of the present invention;

[0023] Figure 2 It is a structural schematic diagram of the support plate of the present invention;

[0024] Figure 3 It is a schematic diagram of the structure of the fixing device of the present invention;

[0025] Figure 4 It is a schematic diagram of the internal structure of the device tank of the present invention;

[0026] Figure 5 It is a structural schematic diagram of the anti-skid device of the present invention;

[0027] Figure 6 It is a schematic diagram of the internal structure of the arc groove of the present invention;

[0028] Figure 7 It is a structural schematic diagram of the regulating device of the present invention;

[0029] Figure 8 It is a schematic diagram of the internal structure of the fixed sleeve of the present invention.

[0030] In the figure: 1. base; 2. support plate; 3. placement table; 4. fixing plate; 5. fixing device; 51. pressure rod; 52. electric push rod; 53. extrusion plate; 54. limit support frame; 55. reset spring; 56. anti-skid device; 561. anti-skid plate; 562. arc groove; 563. anti-skid airbag; 564. friction pad; 565. groove; 567. air storage bag; 568. control valve; 57. fixed slide; 58. contact plate; 59. movable slide; 6. adjustment device; 61. sliding sleeve; 62. bearing; 63. fixed sleeve; 64. support column; 65. sealing piston; 66. pressing plate; 67. limit hole; 68. extension tube; 69. movable piston; 60. block; 7. device groove. DETAILED DESCRIPTION

[0031] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

[0032] Embodiment 1

[0033] See also Figure 1-Figure 6 The present invention provides a technical solution: a fixture for grinding an ITO target, comprising a base 1, a support plate 2 is fixedly connected to the top of the base 1, a placement table 3 is installed on the top of the support plate 2, a fixing plate 4 is installed on the top of the base 1, a fixing device 5 is installed on one side of the support plate 2, an adjusting device 6 is installed on the bottom of the placement table 3, and a device slot 7 is opened at the center of the top of the placement table 3;

[0034] The fixing device 5 comprises:

[0035] A pressure rod 51, which has a right-angle rod-shaped structure, and an electric push rod 52 arranged at one end of the pressure rod 51, an end of the pressure rod 51 away from the electric push rod 52 is rotatably connected to a pressing plate 53 through a rotating seat, and the outer side of the pressure rod 51 is rotatably connected to a limited support frame 54 through a rotating seat;

[0036] The return spring 55 is arranged inside the device groove 7, the top of the return spring 55 is installed with an anti-skid device 56, the inner wall of the device groove 7 is installed with a fixed slide 57, the bottom of the anti-skid device 56 is installed with a contact plate 58, and the bottom of the contact plate 58 is installed with a movable slide 59.

[0037] The moving end of the electric push rod 52 is rotatably connected to the bottom of the pressure rod 51 through a connecting frame, and the end of the electric push rod 52 away from the pressure rod 51 is rotatably connected to the support plate 2 through a rotating seat.

[0038] Two groups of position-limiting support frames 54 are provided and symmetrically distributed on both sides of the pressure rod 51 , and the bottom of the position-limiting support frames 54 is fixedly connected to the top of the placement table 3 .

[0039] The fixed slide 57 and the movable slide 59 are both arranged on the control circuit of the electric push rod 52 , and the bottom of the return spring 55 is fixedly connected to the inner wall of the device groove 7 .

[0040] The anti-skid device 56 includes an anti-skid plate 561, an arc-shaped groove 562 is provided on the top of the anti-skid plate 561, an anti-skid airbag 563 is installed inside the arc-shaped groove 562, a friction pad 564 is installed on the top of the anti-skid airbag 563, a groove 565 is provided at the center of the anti-skid plate 561, an air storage bag 567 is installed inside the groove 565, and the air storage bag 567 is evenly connected to a control valve 568.

[0041] There are multiple groups of arc-shaped grooves 562 evenly distributed on the anti-slip plate 561 , and there are multiple groups of friction pads 564 evenly distributed on the anti-slip airbags 563 .

[0042] The air outlet end of the control valve 568 away from the air storage bag 567 is connected to the air inlet end of the anti-skid air bag 563. The anti-skid air bag 563 is provided with multiple groups. The bottom of the anti-skid plate 561 is fixedly connected to the top of the contact plate 58.

[0043] When in use, the ITO target to be polished is placed on the placement table 3, the electric push rod 52 drives the pressure rod 51 to move, and the placed target is squeezed and fixed by the squeezing plate 53. The target is placed on the anti-skid device 56 to squeeze the reset spring 55, and the reset spring 55 is compressed into the device groove 7 by force. At this time, the anti-skid device 56 moves downward and drives the contact plate 58 to slide down. The contact plate 58 drives the moving slide 59 to contact the fixed slide 57 and slide down along the fixed slide 57. The sliding distance of the moving slide 59 on the fixed slide 57 is used to judge the position of the target. The weight of the target material is determined by the sliding distance of the movable slide 59 on the fixed slide 57. When the target material is heavy, the movable slide 59 slides for a longer distance on the fixed slide 57. At this time, the electric push rod 52 is controlled to increase the thrust through the cooperation of the movable slide 59 and the fixed slide 57. At this time, the extrusion plate 53 exerts a greater extrusion force on the target material. When the target material is light, the movable slide 59 slides for a shorter distance on the fixed slide 57. The thrust of the electric push rod 52 is reduced. At this time, the extrusion plate 53 exerts a smaller extrusion force on the target material. The clamping force can be controlled according to the weight of the target material, the clamping force can be well controlled, and the adaptability is better.

[0044] Open the control valve 568 to discharge the gas inside the air storage bag 567 into the anti-skid air bag 563. The air pressure inside the anti-skid air bag 563 increases, and the gas increases, gradually expanding and deforming. After the expansion and deformation, the anti-skid air bag 563 uses the friction gasket 564 to squeeze the target material on the top, increasing the friction between the target material and the target material, effectively preventing the target material from slipping and falling off during grinding, thereby improving the grinding accuracy.

[0045] Embodiment 2

[0046] See also Figure 1-Figure 8 The present invention provides a technical solution: on the basis of the first embodiment, the adjusting device 6 includes a sliding sleeve 61, the inner wall of the sliding sleeve 61 is rotatably connected to the fixed sleeve 63 through a bearing 62, one end of the fixed sleeve 63 is fixedly connected to a support column 64, the inner wall of the fixed sleeve 63 is slidably connected to a sealing piston 65, one end of the sealing piston 65 extends to the outside of the fixed sleeve 63 and is fixedly connected to a pressing plate 66, a limiting hole 67 is provided on the inner wall of the sliding sleeve 61, the inner wall of the fixed sleeve 63 is connected to an extension tube 68, the inner wall of the extension tube 68 is slidably connected to a moving piston 69, one end of the moving piston 69 extends to the outside of the extension tube 68 and is fixedly connected to a clamping block 60.

[0047] The outer side of the sliding sleeve 61 is fixedly connected to the bottom of the placement table 3 , and one end of the support column 64 away from the fixing sleeve 63 is fixedly connected to the fixing plate 4 .

[0048] The interior of the fixed sleeve 63 is filled with hydraulic oil, multiple groups of limiting holes 67 are arranged and evenly distributed on the inner wall of the sliding sleeve 61, multiple groups of extension tubes 68 are arranged and correspond one-to-one with the limiting holes 67, and the clamping block 60 and the limiting holes 67 are adapted to each other.

[0049] When in use, the rotating sliding sleeve 61 rotates along the fixed sleeve 63 through the bearing 62. When the sliding sleeve 61 drives the placement table 3 to deflect to the required angle, the pressing plate 66 is pushed to drive the sealing piston 65 to slide into the fixed sleeve 63. The sealing piston 65 squeezes the hydraulic oil in the fixed sleeve 63 and pushes the moving piston 69 in the extension tube 68 to slide outward. The moving piston 69 drives the clamping block 60 to be clamped into the corresponding limiting hole 67 to fix the required angle. The target material to be processed can be fixed on the inclined surface, thereby facilitating the grinding of the inclined surface.

[0050] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A fixture for polishing an ITO target, comprising a base (1), characterized in that: The top of the base (1) is fixedly connected to a support plate (2), a placement table (3) is installed on the top of the support plate (2), a fixing plate (4) is installed on the top of the base (1), a fixing device (5) is installed on one side of the support plate (2), an adjustment device (6) is installed on the bottom of the placement table (3), and a device groove (7) is opened at the center of the top of the placement table (3); The fixing device (5) comprises: A pressure rod (51), the pressure rod (51) having a right-angle rod-shaped structure, and an electric push rod (52) arranged at one end of the pressure rod (51), one end of the pressure rod (51) away from the electric push rod (52) being rotatably connected to an extrusion plate (53) via a rotating seat, and the outer side of the pressure rod (51) being rotatably connected to a limited support frame (54) via a rotating seat; a return spring (55), the return spring (55) being arranged inside the device groove (7), an anti-slip device (56) being installed on the top of the return spring (55), a fixed slide plate (57) being installed on the inner wall of the device groove (7), a contact plate (58) being installed on the bottom of the anti-slip device (56), and a movable slide plate (59) being installed on the bottom of the contact plate (58); The fixed slide (57) and the movable slide (59) are both arranged on the control circuit of the electric push rod (52), and the bottom of the return spring (55) is fixedly connected to the inner wall of the device groove (7); The anti-skid device (56) comprises an anti-skid plate (561), an arc-shaped groove (562) is provided on the top of the anti-skid plate (561), an anti-skid airbag (563) is installed inside the arc-shaped groove (562), a friction pad (564) is installed on the top of the anti-skid airbag (563), a groove (565) is provided at the center of the anti-skid plate (561), an air storage bag (567) is installed inside the groove (565), and the air storage bag (567) is evenly connected to a control valve (568); The arc-shaped grooves (562) are provided in a plurality of groups and are evenly distributed on the anti-slip plate (561); and the friction pads (564) are provided in a plurality of groups and are evenly distributed on the anti-slip airbag (563); The adjusting device (6) comprises a sliding sleeve (61), the inner wall of the sliding sleeve (61) is rotatably connected to a fixed sleeve (63) via a bearing (62), one end of the fixed sleeve (63) is fixedly connected to a support column (64), the inner wall of the fixed sleeve (63) is slidably connected to a sealing piston (65), one end of the sealing piston (65) extends to the outside of the fixed sleeve (63) and is fixedly connected to a pressing plate (66), a limiting hole (67) is provided on the inner wall of the sliding sleeve (61), the inner wall of the fixed sleeve (63) is connected to an extension tube (68), the inner wall of the extension tube (68) is slidably connected to a movable piston (69), one end of the movable piston (69) extends to the outside of the extension tube (68) and is fixedly connected to a clamping block (60).

2. The ITO target grinding fixture according to claim 1, characterized in that: The movable end of the electric push rod (52) is rotatably connected to the bottom of the pressure rod (51) via a connecting frame, and the end of the electric push rod (52) away from the pressure rod (51) is rotatably connected to the support plate (2) via a rotating seat.

3. The ITO target grinding fixture according to claim 1, characterized in that: The position-limiting support frames (54) are provided in two groups and are symmetrically distributed on both sides of the pressure rod (51); the bottom of the position-limiting support frames (54) is fixedly connected to the top of the placement platform (3).

4. The ITO target grinding fixture according to claim 1, characterized in that: The air outlet end of the control valve (568) away from the air storage bag (567) is communicated with the air inlet end of the anti-skid air bag (563), a plurality of groups of the anti-skid air bags (563) are provided, and the bottom of the anti-skid plate (561) is fixedly connected to the top of the contact plate (58).

5. The ITO target grinding fixture according to claim 1, characterized in that: The outer side of the sliding sleeve (61) is fixedly connected to the bottom of the placement table (3), and one end of the support column (64) away from the fixed sleeve (63) is fixedly connected to the fixed plate (4).

6. The ITO target grinding fixture according to claim 1, characterized in that: The interior of the fixed sleeve (63) is filled with hydraulic oil, the limiting holes (67) are provided in multiple groups and are evenly distributed on the inner wall of the sliding sleeve (61), the extension tubes (68) are provided in multiple groups and correspond one-to-one with the limiting holes (67), and the clamping blocks (60) and the limiting holes (67) are adapted to each other.

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