A single polarity electrode structure and plasma cleaning apparatus for preventing tip discharge

Abstract

This invention relates to the field of plasma cleaning technology, and provides a unipolar electrode structure and plasma cleaning device with anti-point discharge capability. The anti-point discharge unipolar electrode structure includes a dielectric-free electrode assembly, an insulating tank, and a high-voltage conductive component. The dielectric-free electrode assembly includes two de-pointed electrodes, which are arranged opposite each other and form an electrode space. Both de-pointed electrodes are built into the groove of the insulating tank and are electrically connected to the high-voltage conductive component. Both de-pointed electrodes have anti-point discharge properties, preventing unipolar corona discharge from occurring near the two de-pointed electrodes and helping to suppress arc light caused by the pointed electrodes. The electrode space has the property of expanding the discharge space, supporting the expansion of the discharge space based on the enhanced electric field strength. This breaks through the limitation of using an insulating dielectric barrier layer to suppress arc light caused by pointed electrodes and helps to get rid of the constraint of the insulating dielectric barrier layer on the discharge space.

Description

Technical Field

[0001] This invention relates to the field of plasma cleaning technology, specifically to a unipolar electrode structure and plasma cleaning device that prevents tip discharge. Background Technology

[0002] In related technologies, plasma cleaning devices typically include an AC high-voltage power supply and a dielectric barrier electrode structure. The dielectric barrier electrode structure includes a high-voltage electrode, a ground electrode, and an insulating dielectric barrier layer. A tip with a very small radius of curvature exists on the high-voltage electrode or ground electrode. The high-voltage electrode and ground electrode are positioned opposite each other, forming an electrode space. The insulating dielectric barrier layer is embedded within the electrode space. The insulating dielectric barrier layer and the high-voltage electrode and / or ground electrode form a discharge space smaller than the electrode space. During the process of applying AC high voltage to the high-voltage electrode and ground electrode by the AC high-voltage power supply, an electric field is concentrated around the tip, forming a tip discharge. This easily induces a positive corona near the high-voltage electrode or a negative corona near the ground electrode. The aforementioned positive or negative corona easily develops into localized arcing in the discharge space. The insulating dielectric barrier layer is used to suppress localized arcing. For example, the high-voltage electrode can be a needle-shaped electrode or a thin wire-shaped electrode as the tip electrode.

[0003] In the aforementioned discharge space, the electric field strength increases as the discharge gap between the insulating dielectric barrier layer and the high-voltage electrode or ground electrode decreases. The discharge gap needs to be limited to the millimeter level to ensure the discharge strength, resulting in a relatively narrow discharge space. Therefore, in existing plasma cleaning devices, the dielectric barrier electrode structure is limited by using the insulating dielectric barrier layer to suppress the arc light caused by the pointed electrode. Summary of the Invention

[0004] This invention addresses the limitation of existing technologies in suppressing arcing caused by pointed electrodes using insulating dielectric barrier layers, by providing a unipolar electrode structure and plasma cleaning device that prevents pointed discharge.

[0005] The present invention provides a unipolar electrode structure with protection against tip discharge, the unipolar electrode structure with protection against tip discharge includes a dielectric-free electrode assembly, an insulating tank and a high-voltage conductive assembly;

[0006] The dielectric-free barrier electrode assembly includes a first detent electrode and a second detent electrode, wherein the first detent electrode and the second detent electrode are disposed opposite to each other and form an electrode space for expanding the discharge space.

[0007] The insulating tank is provided with a groove, and the first de-tip electrode and the second de-tip electrode are both disposed in the groove. The first de-tip electrode and the second de-tip electrode are electrically connected to the high voltage conductive component respectively.

[0008] The beneficial effects of the above technical solution are as follows: High voltage is conducted to two de-pointed electrodes via a high-voltage conductive component, ensuring both electrodes exhibit the same unipolarity. Both electrodes are tipless and possess anti-point discharge properties. During the high-voltage conductive component's conduction of high voltage to the two de-pointed electrodes, positive or negative corona discharge is prevented near the electrodes, helping to suppress arcing caused by the pointed electrodes. An electrode space with expanded discharge space properties is formed between the two de-pointed electrodes, increasing the electrode area and widening the electrode spacing, supporting the expansion of the discharge space based on enhanced electric field strength. The electrode space between the two de-pointed electrodes is embedded in the groove of the insulating tank, preventing the insulating tank from forming an insulating dielectric barrier layer in the electrode space between the two de-pointed electrodes. Therefore, it overcomes the limitation of using an insulating dielectric barrier layer to suppress arcing caused by pointed electrodes, helping to break free from the constraint of the insulating dielectric barrier layer on the discharge space.

[0009] Based on the above technical solution, the present invention also makes the following improvements to the anti-point discharge type unipolar electrode structure.

[0010] Optionally, the first tip-removing electrode is a smooth conductive plate in the form of a mesh.

[0011] The beneficial effects of the above technical solution are: the first tip-removing electrode has multiple air holes, which facilitates the working gas to enter the electrode space in the groove of the insulating tank through the first tip-removing electrode, and prevents the first tip-removing electrode from blocking the working gas.

[0012] Optionally, the dielectric-free electrode assembly further includes a first tip-free conductive connector, which is electrically connected to the second tip-free electrode via the second tip-free electrode. The first tip-free conductive connector is embedded in the second tip-free electrode and the groove, and is electrically connected to the high-voltage conductive assembly.

[0013] The beneficial effects of the above technical solution are as follows: On the one hand, the second de-tipped electrode is fixedly connected in the insulating tank through the first de-tipped conductive connector; on the other hand, the first de-tipped conductive connector has the property of preventing tip discharge. The two de-tipped electrodes and the high-voltage conductive component are electrically connected in the insulating tank through the first de-tipped conductive connector, which not only prevents positive or negative corona discharge from occurring near the first de-tipped conductive connector, but also prevents the insulating tank from hindering the electrical connection between the dielectric-free electrode assembly and the high-voltage conductive component. This improves the versatility of the first de-tipped conductive connector and reduces the difficulty of electrically connecting the dielectric-free electrode assembly and the high-voltage conductive component.

[0014] Optionally, the dielectric-free electrode assembly further includes a second tip-free conductive connector disposed in the electrode space. One end of the second tip-free conductive connector is electrically connected to the first tip-free electrode, and the other end of the second tip-free conductive connector is electrically connected to the high-voltage conductive assembly through the second tip-free electrode.

[0015] The beneficial effects of the above technical solution are: the second tip-removing conductive connector has anti-tip discharge properties in the electrode space, and the two tip-removing electrodes and the high-voltage conductive component are electrically connected in the electrode space through the second tip-removing conductive connector, preventing positive or negative corona discharge from occurring near the second tip-removing conductive connector, and improving the space utilization rate of the dielectric-free electrode assembly.

[0016] Optionally, the second tip-removing conductive connector is a cylindrical conductive cylinder, with its two ends in contact with the first tip-removing electrode and the second tip-removing electrode, respectively.

[0017] The beneficial effects of the above technical solution are: by electrically connecting two de-pointed electrodes in the electrode space through a conductive cylinder, the weight of the dielectric barrier-free electrode assembly can be reduced, and the structural stability of the dielectric barrier-free electrode assembly can be improved.

[0018] Optionally, the dielectric-free electrode assembly further includes an insulating nail, which is sequentially inserted into the first de-tipped electrode, the second de-tipped electrode, and the conductive cylinder, with the tail of the insulating nail inserted into the groove of the insulating groove.

[0019] The beneficial effects of the above technical solution are as follows: Compared with the electrode space between two de-tipped electrodes, the insulation nail is hidden in the electrode space by the two de-tipped electrodes and the conductive cylinder, which improves the utilization rate of the conductive cylinder, reduces the electric field loss and dielectric loss of the electrode space, and uses the insulation nail to fix the dielectric-free electrode assembly in the insulating tank in a detachable manner, which simplifies the fixing method of the dielectric-free electrode assembly in the insulating tank and takes into account the stability and detachability of the dielectric-free electrode assembly in the insulating tank.

[0020] Optionally, at least three of the conductive cylinders are evenly arranged in the electrode space, the number of insulating nails is equal to the number of conductive cylinders, and each insulating nail is inserted into the corresponding conductive cylinder.

[0021] The beneficial effects of the above technical solution are: by uniformly arranging multiple conductive cylinders in the electrode space between the two de-tipped electrodes, the conductivity uniformity of the dielectric barrier-free electrode assembly is ensured, thereby helping to improve the discharge uniformity. Each insulating nail is aligned with each conductive cylinder, which improves the stability of the dielectric barrier-free electrode assembly in the insulating tank.

[0022] Optionally, the high-voltage conductive component is detachably fixed to the outside of the insulating tank, and the high-voltage conductive component is electrically connected to the first detent electrode through the second detent electrode.

[0023] The beneficial effects of the above technical solution are: the high-voltage conductive component is fixedly connected to the insulating tank in a detachable manner, which takes into account both the detachability and stability between the insulating tank and the high-voltage conductive component, and improves the utilization rate of the insulating tank. The high-voltage conductive component and the first de-tip electrode are electrically connected through the second de-tip electrode, which simplifies the electrical connection method of the anti-de-sparking unipolar electrode structure.

[0024] Optionally, the high-voltage conductive assembly includes a first insulating sleeve, a vacuum sealing ring, a second insulating sleeve, a conductive support, and an AC high-voltage conductive kit. The first insulating sleeve is disposed below the second insulating sleeve and has an accommodating gap between it and the second insulating sleeve. The vacuum sealing ring seals the accommodating gap. The conductive support is sequentially inserted into the first insulating sleeve, the vacuum sealing ring, and the second insulating sleeve. The AC high-voltage conductive kit is fitted onto the second insulating sleeve.

[0025] The bottom of the conductive support is embedded in the groove of the insulating groove, and the AC high voltage conduction kit is electrically connected to the second detent electrode and the first detent electrode respectively through the conductive support.

[0026] The beneficial effects of the above technical solution are as follows: the insulating hollow kit is composed of an insulating groove, a first insulating sleeve, a vacuum sealing ring, and a second insulating sleeve. The AC high-voltage conductive kit and the dielectric-free barrier electrode assembly are detachably electrically connected in the insulating hollow kit through a conductive support. The insulating hollow kit isolates the conductive support and the dielectric-free barrier electrode assembly from the electric field, reduces the electric field interference generated by the conductive support on the dielectric-free barrier electrode assembly, and improves the convenience of electrical connection between the high-voltage conductive kit and the dielectric-free barrier electrode assembly.

[0027] Optionally, the AC high-voltage conduction kit includes a nut, a high-frequency aviation connector, and a protective sleeve. The high-frequency aviation connector is provided with a voltage output section. The nut is nested outside the voltage output section, and the nut and the voltage output section are respectively embedded in the protective sleeve.

[0028] The voltage output section of the high-frequency aviation connector is inserted into the top of the conductive pillar, the protective sleeve is nested outside the second insulating sleeve, and the bottom of the conductive pillar is electrically connected to the first detent electrode through the second detent electrode.

[0029] The beneficial effects of the above technical solution are: by fixing the voltage output part of the high-frequency aviation connector in a detachable manner in the protective sleeve with a nut, the detachability and firmness of the voltage output part of the high-frequency aviation connector in the protective sleeve are effectively balanced. With the help of the pluggability of the high-frequency aviation connector, it provides convenience for the electrical connection of the high-voltage conductive component to the dielectric barrier electrode component and the AC high-voltage power supply.

[0030] In another aspect, the present invention provides a plasma cleaning apparatus, the plasma cleaning apparatus comprising a high-voltage power supply, a grounding electrode, and a unipolar electrode structure for protection against tip discharge as described in the first aspect. The high-voltage power supply is electrically connected to the grounding electrode and a high-voltage conductive component of the unipolar electrode structure for protection against tip discharge. The grounding electrode is disposed outside the insulating tank of the unipolar electrode structure for protection against tip discharge. The grounding electrode is disposed opposite to a first tip-removing electrode of the unipolar electrode structure for protection against tip discharge, and a first discharge space is formed between the grounding electrode and the first tip-removing electrode, thereby expanding the electrode space of the unipolar electrode structure for protection against tip discharge into a second discharge space.

[0031] The beneficial effects of the above technical solution are as follows: In the plasma cleaning device, high voltage is conducted to two de-pointing electrodes through a high-voltage conductive component, making the two de-pointing electrodes exhibit the same unipolarity. Both de-pointing electrodes are tipless and possess anti-point discharge properties. During the process of high voltage conduction to the two de-pointing electrodes, positive or negative corona discharge is prevented near the two de-pointing electrodes, which helps to suppress arc light caused by the pointed electrodes. An electrode space with extended discharge space properties is formed between the two de-pointing electrodes, increasing the electrode area and widening the electrode spacing. This supports the expansion of the discharge space based on enhanced electric field strength. The electrode space between the two de-pointing electrodes is built into the groove of the insulating tank, preventing the insulating tank from forming an insulating dielectric barrier layer in the electrode space between the two de-pointing electrodes. Thus, it breaks through the constraint of using an insulating dielectric barrier layer to suppress arc light caused by the pointed electrodes, helps to get rid of the constraint of the insulating dielectric barrier layer on the discharge space, helps to improve gas discharge efficiency and plasma generation, and helps to improve plasma cleaning efficiency. Attached Figure Description

[0032] Figure 1 This is a schematic diagram showing the disassembled structure of a tip discharge-resistant unipolar electrode structure according to an embodiment of the present invention.

[0033] Figure 2This is a schematic diagram of the assembly structure of another anti-spike discharge unipolar electrode structure according to an embodiment of the present invention;

[0034] Figure 3 for Figure 2 A cross-sectional view of the anti-tip discharge unipolar electrode structure in the image;

[0035] Figure 4 for Figure 3 A magnified view of a portion of point A in the middle;

[0036] Figure 5 for Figure 2 A schematic diagram of the disassembled structure of the dielectric-free barrier electrode assembly;

[0037] Figure 6 for Figure 5 A schematic diagram of the structure of the first tip-free conductive connector in the diagram;

[0038] Figure 7 for Figure 5 A schematic diagram of the structure of the second tip-removing conductive connector;

[0039] Figure 8 for Figure 2 A schematic diagram showing the disassembled structure of the high-voltage conductive components in the diagram;

[0040] Figure 9 This is a schematic diagram of the disassembled structure of another dielectric-free barrier electrode assembly according to an embodiment of the present invention;

[0041] Figure 10 This is a schematic diagram of the structure of an insulating groove according to an embodiment of the present invention;

[0042] Figure 11 This is a schematic diagram of the disassembled structure of another dielectric-free barrier electrode assembly according to an embodiment of the present invention;

[0043] Figure 12 This is a schematic diagram of another insulating groove body according to an embodiment of the present invention;

[0044] Figure 13 This is a schematic diagram showing the split structure of another high-voltage conductive component according to an embodiment of the present invention.

[0045] Explanation of reference numerals in the attached figures:

[0046] 1-Medium-free electrode assembly, 2-Insulating tank, 3-High-voltage conductive assembly, 11-First tip-removed electrode, 12-Second tip-removed electrode, 13-First tip-removed conductive connector, 14-Second tip-removed conductive connector, 15-Insulating nail, 21-Second positioning hole, 22-Fourth positioning hole, 31-First insulating sleeve, 32-Vacuum sealing ring, 33-Second insulating sleeve, 34-Conductive support, 35-AC high-voltage conductive kit, 121-First positioning hole, 122-Third positioning hole, 351-Nut, 352-High-frequency aviation connector, 353-Protective sleeve. Detailed Implementation

[0047] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0048] See Figure 1 The diagram shows a unipolar electrode structure with anti-point discharge in a split state. The unipolar electrode structure with anti-point discharge includes a dielectric-free electrode assembly 1, an insulating tank 2, and a high-voltage conductive assembly 3.

[0049] See Figure 1 The dielectric barrier-free electrode assembly 1 includes a first de-tipped electrode 11 and a second de-tipped electrode 12. The first de-tipped electrode 11 and the second de-tipped electrode 12 are arranged opposite to each other and form an electrode space for expanding the discharge space. For example, the material and structure of the second de-tipped electrode 12 are the same as those of the first de-tipped electrode 11. The first de-tipped electrode 11 can be made of a smooth aluminum alloy plate after being processed by grinding and polishing. The smooth aluminum alloy plate has no tip with a small radius of curvature, so that both the first de-tipped electrode 11 and the second de-tipped electrode 12 have anti-tip discharge properties.

[0050] The insulating tank 2 is provided with a groove, and the first tip removal electrode 11 and the second tip removal electrode 12 are both provided in the groove of the insulating tank 2 to prevent the insulating tank 2 from forming an insulating medium barrier layer in the electrode space between the first tip removal electrode 11 and the second tip removal electrode 12.

[0051] The grooves of the insulating tank 2 can each have an air gap between them and the first de-tip electrode 11 and the second de-tip electrode 12, so that the working gas can enter the electrode space between the first de-tip electrode 11 and the second de-tip electrode 12 through the air gap.

[0052] Both the first detent electrode 11 and the second detent electrode 12 are electrically connected to the high-voltage conductive component 3. For example, the high-voltage conductive component 3 consists of a DC high-voltage power supply, a resistor, and two cables. The positive terminal of the DC high-voltage power supply is electrically connected to the plate-shaped high-voltage electrode. The high-voltage electrode is positioned opposite to the first detent electrode 11 and forms a first discharge space. The high-voltage electrode is positioned opposite to the second detent electrode 12 along with the first detent electrode 11. One end of the resistor is electrically connected to the negative terminal of the DC high-voltage power supply, and the other end of the resistor is connected in parallel with the first detent electrode 11 and the second detent electrode 12 through two cables. The first detent electrode 11 and the second detent electrode 12... The two de-tipped electrodes 12 are grounded respectively, forming a layered grounding electrode. The DC high voltage power supply applies DC high voltage to the high voltage electrode and the layered grounding electrode, making the high voltage electrode positive and the first de-tipped electrode 11 and the second de-tipped electrode 12 negative. The electrode space between the first de-tipped electrode 11 and the second de-tipped electrode 12 is expanded into a second discharge space, preventing negative polarity corona from being generated near the first de-tipped electrode 11 and the second de-tipped electrode 12. This helps to suppress the arc light caused by the de-tipped electrode, expands the electrode area, widens the electrode spacing, and expands the discharge space on the basis of enhancing the electric field strength.

[0053] See Figure 2 This shows another type of tip-discharge-resistant unipolar electrode structure in its assembled state; see [link to documentation]. Figure 3 , showing Figure 2 The overall cross-sectional structure of the anti-tip discharge unipolar electrode structure is shown in the figure. Figure 4 , showed Figure 3 The overall cross-sectional structure and the partial cross-sectional structure at point A are shown in the figure. Figure 5 , showed Figure 2 The dielectric-free barrier electrode assembly 1 is in a disassembled state, see [link / reference]. Figure 6 , showed Figure 5 The first tip-free conductive connector 13 in the middle, see Figure 7 , showed Figure 5 The second tip-deflecting conductive connector 14, see [link / reference]. Figure 8 , showed Figure 2 The high-voltage conductive component 3 is in a split state.

[0054] Optionally, see Figures 2 to 7 The dielectric-free electrode assembly 1 also includes a first de-tipped electrode 11, a second de-tipped electrode 12, a first de-tipped conductive connector 13, a second de-tipped conductive connector 14, and an insulating nail 15. For example, the first de-tipped conductive connector 13 is a smooth conductive cavity, and the second de-tipped conductive connector 14 is a smooth iron column. Neither the smooth conductive cavity nor the smooth iron column has a tip with a very small radius of curvature, so that both the first de-tipped conductive connector 13 and the second de-tipped conductive connector 14 have anti-spiking properties.

[0055] Optionally, the first tip-removing conductive connector 13 is electrically connected to the first tip-removing electrode 11 via the second tip-removing electrode 12. The first tip-removing conductive connector 13 is embedded in the groove of the second tip-removing electrode 12 and the insulating groove 2. The first tip-removing conductive connector 13 is electrically connected to the high-voltage conductive component 3. For example, the high-voltage conductive component 3 is electrically connected to one end of an AC high-voltage power supply in a pluggable manner, and the other end of the AC high-voltage power supply is electrically connected to a flat grounding electrode. The grounding electrode is disposed opposite to the first tip-removing electrode 11, and the grounding electrode is connected to the first tip-removing electrode 11 and the second tip-removing electrode. The first detent conductive connector 12 and the first detent conductive connector 13 are arranged opposite to each other. The AC high voltage power supply applies AC voltage to the ground electrode and the high voltage conductive component 3, so that the ground electrode can present a negative polarity. The AC high voltage is conducted from the high voltage conductive component 3 to the second detent electrode 12 and the first detent electrode 11 through the first detent conductive connector 13, so that the first detent conductive connector 13, the second detent electrode 12 and the first detent electrode 11 can all present a positive polarity, forming a layered high voltage electrode, preventing positive polarity corona from being generated near the first detent electrode 11 and near the second detent electrode 12.

[0056] The second de-tipped electrode 12 is fixedly connected in the insulating tank 2 by the first de-tipped conductive connector 13. The first de-tipped electrode 11, the second de-tipped electrode 12 and the high-voltage conductive component 3 are electrically connected in the insulating tank 2 by the first de-tipped conductive connector 13. This prevents positive or negative corona discharge from occurring near the first de-tipped conductive connector 13, and also prevents the insulating tank 2 from obstructing the electrical connection between the dielectric-free electrode assembly 1 and the high-voltage conductive component 3. This improves the versatility of the first de-tipped conductive connector 13 and reduces the difficulty of electrically connecting the dielectric-free electrode assembly 1 and the high-voltage conductive component 3.

[0057] Optionally, a second de-tipped conductive connector 14 is disposed in the electrode space between the first de-tipped electrode 11 and the second de-tipped electrode 12. One end of the second de-tipped conductive connector 14 is electrically connected to the first de-tipped electrode 11, and the other end of the second de-tipped conductive connector 14 is electrically connected to the first de-tipped conductive connector 13 through the second de-tipped electrode 12. High voltage is conducted from the high voltage conductive component 3 to the second de-tipped electrode 12 through the first de-tipped conductive connector 13, and high voltage is conducted from the second de-tipped electrode 12 to the first de-tipped electrode 11 through the second de-tipped conductive connector 14, so that the second de-tipped conductive connector 14 exhibits the same positive or negative polarity as the second de-tipped electrode 12. The second de-tipped conductive connector 14 forms a de-tipped extended electrode in the electrode space. In this way, the first de-tipped electrode 11 is electrically connected to the high voltage conductive component 3 in the insulating tank 2 in sequence through the second de-tipped conductive connector 14, the second de-tipped electrode 12, and the first de-tipped conductive connector 13.

[0058] The first de-tipped electrode 11 and the second de-tipped electrode 12 are electrically connected in the electrode space by the second de-tipped conductive connector 14, which prevents positive or negative corona discharge from occurring near the second de-tipped conductive connector 14. This simplifies the electrical connection method of the dielectric barrier-free electrode assembly 1, improves the space utilization of the dielectric barrier-free electrode assembly 1, expands the electrode area, and helps to enhance the discharge intensity.

[0059] Optionally, the second tip-removing conductive connector 14 is a cylindrical conductive cylinder with a hollow core. The two ends of the conductive cylinder are in contact with the first tip-removing electrode 11 and the second tip-removing electrode 12, respectively. The conductive cylinder electrically connects the first tip-removing electrode 11 and the second tip-removing electrode 12 in the electrode space, which helps to reduce the weight of the dielectric-free electrode assembly 1 and improve the structural stability of the dielectric-free electrode assembly 1.

[0060] Optionally, at least three conductive cylinders are evenly arranged in the electrode space between the first tip-removing electrode 11 and the second tip-removing electrode 12. By uniformly arranging multiple conductive cylinders in the electrode space, the conductivity uniformity of the dielectric-free electrode assembly 1 is ensured, thereby helping to improve the discharge uniformity. For example, six conductive cylinders are arranged in a one-dimensional array and at equal intervals in the aforementioned electrode space.

[0061] Optionally, the insulating nail 15 is sequentially inserted into the first tip-removing electrode 11, the second tip-removing electrode 12, and the conductive cylinder. The insulating nail 15 is hidden in the electrode space by the first tip-removing electrode 11, the second tip-removing electrode 12, and the conductive cylinder. Compared with the insulating nail 15 being exposed in the electrode space between the first tip-removing electrode 11 and the second tip-removing electrode 12, the utilization rate of the conductive cylinder is improved, and the electric field loss and dielectric loss of the electrode space are reduced.

[0062] Optionally, the tail of the insulating nail 15 is inserted into the groove of the insulating tank 2. The insulating nail 15 is used to fix the dielectric-free blocking electrode assembly 1 in the insulating tank 2 in a detachable manner, which simplifies the fixing method of the dielectric-free blocking electrode assembly 1 in the insulating tank 2 and takes into account the detachability and stability of the dielectric-free blocking electrode assembly 1 in the insulating tank 2.

[0063] Optionally, the number of insulating nails 15 is equal to the number of conductive cylinders, and each insulating nail 15 is inserted into the corresponding conductive cylinder. Each insulating nail 15 is aligned with each conductive cylinder, which improves the stability of the dielectric-free electrode assembly 1 in the insulating tank 2. For example, the six insulating nails 15 are plastic screws, and the tail of the plastic screw is threadedly connected to the groove of the insulating tank 2.

[0064] Optionally, see Figures 2 to 4 The high-voltage conductive component 3 is detachably fixed to the outside of the insulating tank 2, forming a tower-like structure. This balances the detachability and stability between the insulating tank 2 and the high-voltage conductive component 3, improving the utilization rate of the insulating tank 2. The high-voltage conductive component 3 is electrically connected to the first de-tip electrode 11 through the second de-tip electrode 12, simplifying the electrical connection method of the anti-de-point discharge type unipolar electrode structure.

[0065] Optionally, see Figure 3 and Figure 8 The high-voltage conductive component 3 includes a first insulating sleeve 31, a vacuum sealing ring 32, a second insulating sleeve 33, a conductive support 34, and an AC high-voltage conductive kit 35. The first insulating sleeve 31 is disposed below the second insulating sleeve 33 and has a receiving gap between it and the second insulating sleeve 33. The vacuum sealing ring 32 seals the receiving gap. The conductive support 34 is sequentially inserted into the first insulating sleeve 31, the vacuum sealing ring 32, and the second insulating sleeve 33. The AC high-voltage conductive kit 35 is nested on the second insulating sleeve 33.

[0066] Optionally, the bottom of the conductive support 34 is embedded in the groove of the insulating groove 2, and the AC high voltage conduction kit 35 is electrically connected to the second tip-removing electrode 12 and the first tip-removing electrode 11 respectively through the conductive support 34. For example, the first tip-removing conductive connector 13 is hollow, and the bottom of the conductive support 34 is inserted into the first tip-removing conductive connector 13, so that the bottom of the conductive support 34 is embedded in the groove of the insulating groove 2 through the first tip-removing conductive connector 13 and is detachably electrically connected to the second tip-removing electrode 12.

[0067] The insulating hollow kit is composed of the insulating groove 2, the first insulating sleeve 31, the vacuum sealing ring 32, and the second insulating sleeve 33. The AC high voltage conduction kit 35 and the dielectric-free electrode assembly 1 are detachably electrically connected in the insulating hollow kit through the conductive support 34. The insulating hollow kit isolates the conductive support 34 and the dielectric-free electrode assembly 1 from the electric field, reduces the electric field interference generated by the conductive support 34 on the dielectric-free electrode assembly 1, and improves the convenience of electrical connection between the high voltage conduction assembly 3 and the dielectric-free electrode assembly 1.

[0068] Optionally, see Figure 4 and Figure 8 The AC high-voltage conduction kit 35 includes a nut 351, a high-frequency aviation connector 352, and a protective sleeve 353. The nut 351 is nested outside the voltage output part of the high-frequency aviation connector 352. The nut 351 and the voltage output part of the high-frequency aviation connector 352 are respectively embedded in the protective sleeve 353. For example, the nut 351 is made of conductive or insulating material, the voltage output part of the high-frequency aviation connector 352 is a conductive rod, and the protective sleeve 353 is made of insulating material. There are two nuts 351, which are stacked and nested in the protective sleeve 353 to form a double-layer nut. The double-layer nut is threadedly connected to the voltage output part of the high-frequency aviation connector 352. The voltage output part of the high-frequency aviation connector 352 is detachably fixed in the protective sleeve 353 by the nut 351, which effectively balances the detachability and firmness of the voltage output part of the high-frequency aviation connector 352 in the protective sleeve 353.

[0069] Optionally, the voltage output section of the high-frequency aviation connector 352 is inserted into the top of the conductive pillar 34, so that the conductive pillar 34 is electrically connected to the high-frequency aviation connector 352. The protective sleeve 353 is nested outside the second insulating sleeve 33. The bottom of the conductive pillar 34 is electrically connected to the first de-tipped electrode 11 through the second de-tipped electrode 12. By means of the pluggability of the high-frequency aviation connector 352, it is convenient to electrically connect the high-voltage conductive component 3 to the dielectric-free electrode assembly 1 and the AC high-voltage power supply.

[0070] Optionally, see Figure 9 The diagram shows another dielectric-free electrode assembly 1 in a split state. The dielectric-free electrode assembly 1 includes a first de-tipped electrode 11, a second de-tipped electrode 12, and a first de-tipped conductive connector 13. The structure of the first de-tipped electrode 11 is different from that of the second de-tipped electrode 12. The first de-tipped electrode 11 is a smooth conductive plate with a mesh-like structure. The first de-tipped electrode 11 has multiple pores to facilitate the working gas to enter the electrode space in the groove of the insulating tank through the first de-tipped electrode 11, and to prevent the first de-tipped electrode 11 from blocking the working gas. The second de-tipped electrode 12 is a smooth conductive plate with a first positioning hole 121.

[0071] Optionally, see Figure 10An insulating groove 2 is shown, and a second positioning hole 21 is provided on the groove of the insulating groove 2. A first de-tipped conductive connector 13 is sequentially inserted into the first positioning hole 121 and the second positioning hole 21.

[0072] Optionally, see Figure 11 The diagram shows another dielectric-free electrode assembly 1 in a disassembled state. The dielectric-free electrode assembly 1 includes a first tip-removing electrode 11, a second tip-removing electrode 12, and a plurality of second tip-removing conductive connectors 14. The first tip-removing electrode 11 has a mesh structure. The second tip-removing electrode 12 has a plurality of third positioning holes 122. The number of third positioning holes 122 is the same as the number of second tip-removing conductive connectors 14. Each third positioning hole 122 is aligned with each second tip-removing conductive connector 14. For example, the number of third positioning holes 122 is six.

[0073] Optionally, see Figure 12 An insulating groove 2 is shown, and a plurality of fourth positioning holes 22 are provided on the groove of the insulating groove 2. The number of fourth positioning holes 22 is equal to the number of insulating nails 15. Each insulating nail 15 is inserted into the corresponding third positioning hole 122, and the nail tail of each insulating nail 15 is threaded into the aligned fourth positioning hole 22. For example, the number of fourth positioning holes 22 is six.

[0074] Optionally, see Figure 13 The diagram shows another high-voltage conductive component 3 in a split state. In the high-voltage conductive component 3, the AC high-voltage conduction kit 35 includes a cable and a conductive rod electrically connected to one end of the cable. The conductive rod is inserted into the second insulating sleeve 33 and the conductive support 34 in sequence, so that the cable is electrically connected to the conductive support 34 through the conductive rod. For example, the positive terminal of the DC high-voltage power supply is electrically connected to the other end of the cable, and the negative terminal of the DC high-voltage power supply is electrically connected to the ground electrode. The DC high-voltage power supply applies DC high voltage to the high-voltage conductive component 3 and the ground electrode, and conducts DC high voltage to the dielectric-free barrier electrode assembly 1 through the high-voltage conductive component 3, so that the dielectric-free barrier electrode assembly 1 presents a positive polarity.

[0075] The present invention also provides a plasma cleaning device, which includes a high-voltage power supply, a grounding electrode, and the above-described anti-point discharge unipolar electrode structure. The high-voltage power supply is electrically connected to the grounding electrode and the high-voltage conductive component 3 of the anti-point discharge unipolar electrode structure. The grounding electrode is disposed outside the insulating tank 2 of the anti-point discharge unipolar electrode structure. The grounding electrode is disposed opposite to the first de-pointing electrode 11 of the anti-point discharge unipolar electrode structure, and a first discharge space is formed between the grounding electrode and the first de-pointing electrode 11, thereby expanding the electrode space of the anti-point discharge unipolar electrode structure into a second discharge space.

[0076] This invention breaks through the limitation of using an insulating dielectric barrier layer to suppress the arc light caused by the pointed electrode in the dielectric barrier electrode structure, and gets rid of the constraint of the insulating dielectric barrier layer on the discharge space. This allows the discharge spacing in the discharge space to break through the millimeter-level limitation, thereby expanding the discharge space, which helps to improve gas discharge efficiency and plasma generation, and helps to improve plasma cleaning efficiency.

[0077] While the disclosure is as stated above, its scope of protection is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of this disclosure, and all such changes and modifications will fall within the protection scope of this invention.

Claims

1. A tip discharge prevention monopolar electrode structure characterized by comprising: The anti-point discharge unipolar electrode structure includes a dielectric-free electrode assembly (1), an insulating tank (2), and a high-voltage conductive assembly (3). The dielectric-free electrode assembly (1) includes a first detent electrode (11) and a second detent electrode (12), wherein the first detent electrode (11) and the second detent electrode (12) are disposed opposite to each other and form an electrode space for expanding the discharge space; The insulating groove (2) is provided with a groove, and the first tip-removing electrode (11) and the second tip-removing electrode (12) are both provided in the groove. The first tip-removing electrode (11) and the second tip-removing electrode (12) are both electrically connected to the high voltage conductive component (3). The high-voltage conductive component (3) includes a first insulating sleeve (31), a vacuum sealing ring (32), a second insulating sleeve (33), a conductive support (34), and an AC high-voltage conductive kit (35). The first insulating sleeve (31) is disposed below the second insulating sleeve (33) and has a receiving gap between it and the second insulating sleeve (33). The vacuum sealing ring (32) seals the receiving gap. The conductive support (34) is inserted sequentially into the first insulating sleeve (31), the vacuum sealing ring (32), and the second insulating sleeve (33). The AC high-voltage conductive kit (35) is nested on the second insulating sleeve (33). The bottom of the conductive support (34) is embedded in the groove. The AC high-voltage conductive kit (35) is electrically connected to the second de-tipped electrode (12) and the first de-tipped electrode (11) through the conductive support (34).

2. The point discharge prevention monopolar electrode structure according to claim 1, wherein The first tip-removing electrode (11) is a smooth conductive plate in the form of a mesh.

3. The anti-point discharge unipolar electrode structure as described in claim 1, characterized in that, The dielectric-free electrode assembly (1) further includes a first tip-removing conductive connector (13), which is electrically connected to the first tip-removing electrode (11) through the second tip-removing electrode (12). The first tip-removing conductive connector (13) is embedded in the second tip-removing electrode (12) and the groove, and is electrically connected to the high-voltage conductive assembly (3).

4. The anti-point discharge unipolar electrode structure as described in claim 1, characterized in that, The dielectric-free electrode assembly (1) further includes a second tip-free conductive connector (14), which is disposed in the electrode space. One end of the second tip-free conductive connector (14) is electrically connected to the first tip-free electrode (11), and the other end of the second tip-free conductive connector (14) is electrically connected to the high-voltage conductive assembly (3) through the second tip-free electrode (12).

5. The anti-point discharge unipolar electrode structure as described in claim 4, characterized in that, The second tip-removing conductive connector (14) is a cylindrical conductive tube, and the two ends of the conductive tube are in contact with the first tip-removing electrode (11) and the second tip-removing electrode (12), respectively.

6. The anti-point discharge unipolar electrode structure as described in claim 5, characterized in that, The dielectric-free electrode assembly (1) further includes an insulating nail (15), which is sequentially inserted into the first de-tipped electrode (11), the second de-tipped electrode (12), and the conductive cylinder, with the tail of the insulating nail (15) inserted into the groove.

7. The anti-point discharge unipolar electrode structure as described in claim 6, characterized in that, At least three of the conductive cylinders are evenly arranged in the electrode space, and the number of insulating nails (15) is equal to the number of conductive cylinders. Each of the insulating nails (15) is inserted into the corresponding conductive cylinder.

8. The anti-point discharge unipolar electrode structure as described in any one of claims 1-7, characterized in that, The high-voltage conductive component (3) is detachably fixed outside the insulating tank (2), and the high-voltage conductive component (3) is electrically connected to the first de-tipped electrode (11) through the second de-tipped electrode (12).

9. The anti-point discharge unipolar electrode structure as described in claim 1, characterized in that, The AC high voltage conduction kit (35) includes a nut (351), a high frequency aviation plug (352), and a protective sleeve (353). The high frequency aviation plug (352) is provided with a voltage output section. The nut (351) is nested outside the voltage output section. The nut (351) and the voltage output section are respectively embedded in the protective sleeve (353). The voltage output section is inserted into the top of the conductive support (34), the protective sleeve (353) is nested outside the second insulating sleeve (33), and the bottom of the conductive support (34) is electrically connected to the first detent electrode (11) through the second detent electrode (12).

10. A plasma cleaning apparatus, characterized in that, The plasma cleaning device includes a high-voltage power supply, a grounding electrode, and a unipolar electrode structure for preventing tip discharge as described in any one of claims 1-9. The high-voltage power supply is electrically connected to the grounding electrode and the high-voltage conductive component (3) of the unipolar electrode structure for preventing tip discharge. The grounding electrode is disposed outside the insulating tank (2) of the unipolar electrode structure for preventing tip discharge. The grounding electrode is disposed opposite to the first tip-removing electrode (11) of the unipolar electrode structure for preventing tip discharge. A first discharge space is formed between the grounding electrode and the first tip-removing electrode (11), thereby expanding the electrode space of the unipolar electrode structure for preventing tip discharge into a second discharge space.

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