A mask plate, a display substrate, and a display device

By designing a mask plate with a shading structure and a connecting structure, the problem of poor GDSH in the evaporation process of OLED display panels is solved, and an undeposited transition zone is formed around the hole-cutting area, blocking water vapor infiltration, and avoiding black spots and display failures.

CN115679254BActive Publication Date: 2025-06-24BOE TECHNOLOGY GROUP CO LTD +1
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Patent Information

Application Number
CN202211093931.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-09-08
Publication Date
2025-06-24
Estimated Expiration
2042-09-08

AI Technical Summary

Technical Problem

The existing OLED display panels are prone to poor GDSH in the evaporation process, resulting in dark spots and display failures.

Method used

A mask plate is designed, wherein a plurality of mask openings are provided on the main body of the mask plate, and a mask structure and a connection structure are provided in at least one mask opening. The shading structure is arranged corresponding to the hole-cutting area on the display substrate, and is used to block the peripheral position of the hole-cutting area on the display substrate in the vapor deposition process, and the connecting structure is used to fix the shading structure.

Benefits of technology

The shading structure blocks the peripheral position of the hole-dig area on the display substrate during the evaporation process, and the deposition of organic luminescent materials around the hole-dig area is avoided, forming an undeposited transition zone, blocking the extension of water vapor along the organic luminescent layer to the display area, thereby largely avoiding GDSH defects.

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Abstract

The embodiments of the present disclosure provide a mask plate, a display substrate, and a display device. The mask plate includes a mask plate body, a plurality of mask openings are provided on the mask plate body, and at least one mask opening is provided with a shielding structure and a connecting structure; the shielding structure is provided corresponding to the hole-digging area on the display substrate, and is used to shield the peripheral position of the hole-digging area on the display substrate during the evaporation process; the connecting structure is connected to the mask plate body and the corresponding shielding structure, and is used to fix the corresponding shielding structure to the mask plate body. The mask plate, display substrate, and display device provided by the embodiments of the present disclosure can largely avoid GDSH defects in the display panel.
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Description

Technical Field

[0001] The embodiments of the present disclosure relate to, but are not limited to, the field of display technology, and specifically relate to a mask plate, a display substrate, and a display device. Background Art

[0002] OLED (Organic Light-Emitting Diode) screens have the advantages of high brightness, good image quality, and energy saving. They have become the development trend of the panel industry and are also high-end products in the panel industry. With the development of display technology, the requirements for OLED screens are getting higher and higher. In the production process of existing organic light-emitting diode (OLED) display substrates, a mask is usually used as a mask to form an organic light-emitting layer using an evaporation (EV) process.

[0003] EV Mask (mask for evaporation deposition) can be divided into FMM Mask (Fine Metal Mask, high-precision metal mask) and Open / Common Mask according to different functions. It can be divided into Slot Mask (slot mask) and Stripe Mask (strip mask) according to different pixel design types.

[0004] The display panel prepared by using Open / Common Mask has the phenomenon of black spots (GDSH). Summary of the invention

[0005] The problem to be solved by the embodiments of the present application is to provide a mask plate, a display substrate, and a display device to solve the technical problem of GDSH failure in a display panel.

[0006] In order to solve the above technical problems, the embodiment of the present disclosure provides a mask plate, the mask plate includes a mask plate body, a plurality of mask openings are provided on the mask plate body, and a shielding structure and a connecting structure are provided in at least one mask opening;

[0007] The shielding structure is arranged corresponding to the hole-digging area on the display substrate, and is used to shield the peripheral position of the hole-digging area on the display substrate during the evaporation process;

[0008] The connection structure is connected to the mask plate main body and the corresponding shielding structure, and is used to fix the corresponding shielding structure to the mask plate main body.

[0009] In an exemplary embodiment, the shape of the shielding structure matches the shape of the corresponding hole-digging area on the display substrate.

[0010] In an exemplary embodiment, the shielding structure is in a circular shape, or a rectangular shape, or an elliptical shape, or a square shape with at least one set of opposite sides being arc-shaped.

[0011] In an exemplary embodiment, the area of ​​the shielding structure is greater than the area enclosed by a first boundary and less than or equal to the area enclosed by a second boundary, the first boundary being a closed-loop boundary formed by a cutting line of a hole-digging area on the display substrate, and the second boundary being a closed-loop boundary of a display area surrounding the hole-digging area on the display substrate.

[0012] In an exemplary embodiment, a middle area of ​​the shielding structure is a hollow structure.

[0013] In an exemplary embodiment, the shielding structure is a circular ring structure with a hollow center or a capsule-shaped ring structure with a hollow center; the ring structure includes an inner boundary and an outer boundary;

[0014] The inner and outer boundaries of the circular ring structure are shaped as concentric circles; the inner and outer boundaries of the capsule-shaped ring structure are shaped as a square with a pair of opposite sides being arc-shaped, and the center of the arc is located between the pair of opposite sides of the arc, and the centers of the two geometric shapes enclosed by the inner and outer boundaries overlap.

[0015] In an exemplary embodiment, the area enclosed by the inner boundary is less than or equal to the area enclosed by the first boundary, or the area enclosed by the inner boundary is greater than the area enclosed by the first boundary and less than the area enclosed by the outer boundary; the area enclosed by the outer boundary is greater than the area enclosed by the first boundary and less than the area enclosed by the second boundary; the first boundary is a closed-loop boundary formed by a cutting line of a hole-punching area on the display substrate, and the second boundary is a closed-loop boundary of a display area on the display substrate surrounding the hole-punching area.

[0016] In an exemplary embodiment, the distance between the inner boundary and the outer boundary is greater than or equal to 50 micrometers.

[0017] In an exemplary embodiment, the connection structure includes one or more connection lines.

[0018] In an exemplary embodiment, the number of connecting lines in the connecting structure is an even number greater than or equal to 2, and on the plane where the mask plate is located, multiple connecting lines are arranged along the direction in which the first center line extends, and are symmetrically arranged with respect to the second center line; the first center line is the center line of the shielding structure extending along the first direction, and the second center line is the center line of the shielding structure extending along the second direction, and the first direction intersects with the second direction.

[0019] In an exemplary embodiment, the shape of the connection line corresponds to a gap of a pixel definition layer in the display substrate.

[0020] In an exemplary embodiment, the shielding structure, the connecting structure and the mask plate body are integrally formed structures.

[0021] In an exemplary embodiment, the shape of the mask opening is rectangular, and the rectangular mask opening is surrounded by four side walls, and the four side walls include a connecting side wall and an opposite side wall opposite to the connecting side wall. The connecting structure is connected to the connecting side wall, and the distance between the shielding structure and the connecting side wall is less than the distance from the opposite side wall.

[0022] The present disclosure also provides a display substrate. In a plane perpendicular to the display substrate, the display substrate includes a substrate, and a driving circuit layer and a light-emitting structure layer sequentially disposed on the substrate. The light-emitting structure layer includes an organic light-emitting layer. In a plane parallel to the display substrate, the display substrate includes a display area, a transition area, and a cut-out area. The transition area is located between the cut-out area and the display area, and there is no overlapping area between the orthographic projection of the transition area on the substrate and the orthographic projection of the organic light-emitting layer on the substrate.

[0023] In an exemplary embodiment, the display substrate further includes a support structure, and the light-emitting structure layer further includes a pixel definition layer. The pixel definition layer is located between the driving circuit layer and the organic light-emitting layer, and the support structure is disposed on a side of the pixel definition layer away from the substrate.

[0024] In an exemplary embodiment, the support structure includes a plurality of support columns, and the heights of the support columns located in the transition area and the support columns located in the display area are kept consistent.

[0025] In an exemplary embodiment, in a plane parallel to the display substrate, a plurality of support columns located in the transition area are symmetrically arranged with respect to a third median line in a second direction and symmetrically arranged with respect to a fourth median line in a first direction. The third median line is the median line of the transition area extending in the first direction, and the fourth median line is the median line of the transition area extending in the second direction, and the first direction intersects with the second direction.

[0026] The present disclosure also provides a display device, including the display substrate according to any one of the above embodiments.

[0027] The mask plate provided in the embodiment of the present disclosure has a shielding structure in the mask opening which is arranged corresponding to the hole area on the display substrate, and is used to shield the peripheral position of the hole area on the display substrate during the evaporation process. In the evaporation process of preparing the organic light-emitting layer of the display substrate, the organic light-emitting material will not be deposited in the area shielded by the shielding structure, and a transition zone without depositing the organic light-emitting material can be formed at the peripheral position of the hole area. At the cutting line position of the hole area, water vapor cannot extend along the organic light-emitting layer to the display area, thereby avoiding GDSH defects to a large extent.

[0028] Other features and advantages of the present application will be described in the following description, and partly become apparent from the description, or be understood by implementing the present application. Other advantages of the present application can be realized and obtained by the schemes described in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings are used to provide a further understanding of the technical solution of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the technical solution of the present disclosure and do not constitute a limitation on the technical solution of the present disclosure. The shapes and sizes of the components in the accompanying drawings do not reflect the actual proportions and are only intended to illustrate the contents of the present disclosure.

[0030] Figure 1 Shown is a schematic structural diagram of a display device;

[0031] Figure 2 Shown is a schematic structural diagram of a display substrate provided by an exemplary embodiment;

[0032] Figure 3 A schematic diagram of the cross-sectional structure of a display area in a display substrate;

[0033] Figure 4 Shown is a schematic structural diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0034] Figure 5 Shown is an enlarged structural schematic diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0035] Figure 6 Shown is an enlarged structural schematic diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0036] Figure 7 Shown is an enlarged structural schematic diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0037] Figure 8 Shown is an enlarged structural schematic diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0038] Figure 9Shown is an enlarged structural schematic diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0039] Figure 10 Shown is an enlarged structural schematic diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0040] Figure 11 Shown is an enlarged structural schematic diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0041] Figure 12 Shown is an enlarged structural schematic diagram of a mask plate provided by an exemplary embodiment of the present disclosure;

[0042] Figure 13 Shown is a schematic diagram of a mask shielding structure provided by an exemplary embodiment of the present disclosure;

[0043] Figure 14 Shown is a schematic diagram of a mask shielding structure provided by an exemplary embodiment of the present disclosure;

[0044] Figure 15 FIG. 1 is a schematic diagram of a planar structure of a display substrate provided by an exemplary embodiment of the present disclosure;

[0045] Figure 16 FIG. 1 is a schematic cross-sectional structure diagram of a display substrate provided by an exemplary embodiment of the present disclosure;

[0046] Figure 17 Shown is a schematic structural diagram of a hole-digging area and a transition area of ​​a display substrate provided by an exemplary embodiment of the present disclosure;

[0047] Figure 18 Shown is a schematic structural diagram of a hole-digging area and a transition area of ​​a display substrate provided by an exemplary embodiment of the present disclosure;

[0048] Figure 19 Shown is a schematic diagram of a cross-sectional structure of a display substrate;

[0049] Figure 20 Shown is a schematic diagram of a partial cross-sectional structure of a display substrate provided by an exemplary embodiment of the present disclosure. DETAILED DESCRIPTION

[0050] The embodiments of the present disclosure may be implemented in a plurality of different forms. A person skilled in the art may easily understand that the implementation and content may be transformed into various forms without departing from the purpose and scope of the present disclosure. Therefore, the present disclosure should not be interpreted as being limited to the contents described in the following embodiments. In the absence of conflict, the embodiments of the present disclosure and the features in the embodiments may be arbitrarily combined with each other.

[0051] In the drawings, for the sake of clarity, the sizes of components, the thicknesses of layers, or regions may sometimes be exaggerated. Therefore, any implementation of the present disclosure is not necessarily limited to the sizes shown in the figures, and the shapes and sizes of components in the drawings do not reflect the true proportions. In addition, the drawings schematically show ideal examples, and any implementation of the present disclosure is not limited to the shapes or values shown in the drawings, etc.

[0052] The ordinal numbers such as "first", "second", "third", etc. in the present disclosure are provided to avoid confusion of components, rather than to limit the quantity.

[0053] In the present disclosure, for convenience, terms indicating orientation or positional relationship such as "middle", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are used to describe the positional relationship of components with reference to the drawings. This is only for the convenience of describing the embodiments and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present disclosure. The positional relationship of components can be appropriately changed according to the direction of the described components. Therefore, it is not limited to the terms described in the text and can be appropriately replaced according to the situation.

[0054] In the present disclosure, unless otherwise clearly defined and limited, the terms "mounted", "connected", and "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection, an indirect connection through an intermediate member, or the communication inside two elements. For those of ordinary skill in the art, the meanings of the above terms in the present disclosure can be understood according to the situation.

[0055] Figure 1The figure shows a schematic structural diagram of a display device. The display substrate may include a timing controller, a data signal driver, a scan signal driver, a light emission signal driver, and a pixel array. The timing controller is respectively connected to the data signal driver, the scan signal driver, and the light emission signal driver. The data signal driver is respectively connected to a plurality of data signal lines (D1 to Dn), the scan signal driver is respectively connected to a plurality of scan signal lines (S1 to Sm), and the light emission signal driver is respectively connected to a plurality of light emission signal lines (E1 to Eo). The pixel array may include a plurality of sub-pixels Pxij, where i and j may be natural numbers. At least one sub-pixel Pxij may include a circuit unit and a light-emitting device connected to the circuit unit. The circuit unit may include at least one scan signal line, at least one data signal line, at least one light emission signal line, and a pixel driving circuit. In an exemplary embodiment, the timing controller may provide a gray value and a control signal suitable for the specification of the data signal driver to the data signal driver, may provide a clock signal, a scan start signal, etc. suitable for the specification of the scan signal driver to the scan signal driver, and may provide a clock signal, an emission stop signal, etc. suitable for the specification of the light emission signal driver to the light emission signal driver. The data signal driver may use the gray value and the control signal received from the timing controller to generate data voltages to be provided to the data signal lines D1, D2, D3,..., and Dn. For example, the data signal driver may sample the gray value using a clock signal and apply the data voltage corresponding to the gray value to the data signal lines D1 to Dn in units of pixel rows, where n may be a natural number. The scan signal driver may generate scan signals to be provided to the scan signal lines S1, S2, S3,..., and Sm by receiving a clock signal, a scan start signal, etc. from the timing controller. For example, the scan signal driver may sequentially provide scan signals having conductive level pulses to the scan signal lines S1 to Sm. For example, the scan signal driver may be configured in the form of a shift register and may generate scan signals in such a way that the scan start signal provided in the form of a conductive level pulse is sequentially transmitted to the next-stage circuit under the control of a clock signal, where m may be a natural number. The light emission signal driver may generate emission signals to be provided to the light emission signal lines E1, E2, E3,..., and Eo by receiving a clock signal, an emission stop signal, etc. from the timing controller. For example, the light emission signal driver may sequentially provide emission signals having cut-off level pulses to the light emission signal lines E1 to Eo. For example, the light emission driver may be configured in the form of a shift register and may generate emission signals in such a way that the emission stop signal provided in the form of a cut-off level pulse is sequentially transmitted to the next-stage circuit under the control of a clock signal, where o may be a natural number.

[0056] Figure 2 is a schematic plan view of a display substrate. As Figure 2As shown, the display substrate may include a plurality of pixel units P arranged in a matrix. At least one of the plurality of pixel units P includes a first sub-pixel P1 that emits light of a first color, a second sub-pixel P2 that emits light of a second color, and a third sub-pixel P3 that emits light of a third color. The first sub-pixel P1, the second sub-pixel P2, and the third sub-pixel P3 each include a pixel driving circuit and a light-emitting device. The pixel driving circuits in the first sub-pixel P1, the second sub-pixel P2, and the third sub-pixel P3 are respectively connected to a scan signal line, a data signal line, and a light-emitting signal line. The pixel driving circuit is configured to receive a data voltage transmitted by the data signal line under the control of the scan signal line and the light-emitting signal line, and output a corresponding current to the light-emitting device. The light-emitting devices in the first sub-pixel P1, the second sub-pixel P2, and the third sub-pixel P3 are respectively connected to the pixel driving circuits of the corresponding sub-pixels. The light-emitting device is configured to emit light of a corresponding brightness in response to the current output by the pixel driving circuit of the corresponding sub-pixel.

[0057] In an exemplary embodiment, the pixel unit P may include a red (R) sub-pixel, a green (G) sub-pixel, and a blue (B) sub-pixel. In an exemplary embodiment, the shape of the sub-pixels in the pixel unit may be rectangular, diamond-shaped, pentagonal, or hexagonal. The three sub-pixels may be arranged in a horizontal side-by-side, vertical side-by-side, or staggered manner. The present disclosure does not limit this here.

[0058] Figure 3 It is a schematic cross-sectional structure diagram of a display substrate, showing the structures of three sub-pixels of an OLED display substrate. As Figure 3 shown, in a plane perpendicular to the display substrate, the display substrate may include a driving circuit layer 102 disposed on a substrate 101, a light-emitting structure layer 103 disposed on a side of the driving circuit layer 102 away from the substrate 101, and a packaging layer 104 disposed on a side of the light-emitting structure layer 103 away from the substrate 101. In some possible implementation manners, the display substrate may include other film layers, such as spacer columns, etc. The present disclosure does not limit this here.

[0059] In an exemplary embodiment, the substrate 101 may be a flexible substrate or a rigid substrate. The driving circuit layer 102 of each sub-pixel may include a plurality of transistors and storage capacitors that constitute a pixel driving circuit. The light-emitting structure layer 103 may include an anode 301, a pixel definition layer 302, an organic light-emitting layer 303, and a cathode 304. The anode 301 is connected to the drain electrode of the driving transistor 210 through a via hole. The organic light-emitting layer 303 is connected to the anode 301, and the cathode 304 is connected to the organic light-emitting layer 303. The organic light-emitting layer 303 emits light of a corresponding color under the drive of the anode 301 and the cathode 304. The encapsulation layer 104 may include a stacked first encapsulation layer 401, a second encapsulation layer 402, and a third encapsulation layer 403. The first encapsulation layer 401 and the third encapsulation layer 403 may be made of inorganic materials, and the second encapsulation layer 402 may be made of organic materials. The second encapsulation layer 402 is disposed between the first encapsulation layer 401 and the third encapsulation layer 403, which can ensure that external moisture cannot enter the light-emitting structure layer 103.

[0060] In an exemplary embodiment, as Figure 3 shown, the pixel definition layer (PDL) 302 may form an opening 3020 corresponding to each sub-pixel according to the sub-pixel arrangement structure. The pixel definition layer 302 may include a plurality of openings 3020 to define the effective light-emitting regions of a plurality of sub-pixels. The shape of the effective light-emitting region of each sub-pixel may be defined by the opening 3020 of the pixel definition layer 302. The width of the pixel definition layer 302 between adjacent sub-pixels may also be the gap (PDL GAP) between the pixel definition layers 302 between adjacent sub-pixels. In the case where the display substrate includes a touch layer (TSP), the touch traces of the touch layer may be disposed at the center position of the PDL GAP, so as to avoid the opening 3020 position of the pixel definition layer 302 and prevent the effective light-emitting region from being blocked, so as to avoid affecting the display effect.

[0061] In an exemplary embodiment, the organic light emitting layer 303 may include a stacked hole injection layer (HIL), a hole transport layer (HTL), an electron blocking layer (EBL), an emitting layer (EML), a hole blocking layer (HBL), an electron transport layer (ETL), and an electron injection layer (EIL). In an exemplary embodiment, the hole injection layers of all sub-pixels may be a common layer connected together, the electron injection layers of all sub-pixels may be a common layer connected together, the hole transport layers of all sub-pixels may be a common layer connected together, the electron transport layers of all sub-pixels may be a common layer connected together, the hole blocking layers of all sub-pixels may be a common layer connected together, the emitting layers of adjacent sub-pixels may have a small overlap, or may be isolated, and the electron blocking layers of adjacent sub-pixels may have a small overlap, or may be isolated.

[0062] With the continuous development of display technology, people are paying more and more attention to improving the screen-to-body ratio of displays. At present, in order to achieve a higher screen-to-body ratio, some hole areas (such as openings) are generally reserved on the display for some additional components (such as cameras, sensors, etc.). However, near the hole area in the screen, water and oxygen will penetrate into the interior of the display along the light-emitting functional layer in the display at the cutting line of the hole boundary, causing erosion inside the display, thereby causing black spots (GDSH) and even display failure.

[0063] In the process of manufacturing an OLED display panel, a mask plate is used to shield the surface of the display substrate. Through the evaporation process, the coating material passes through the mask openings on the mask plate to obtain a patterned organic light-emitting film layer, that is, an OLED device is formed on the substrate by evaporation. Multiple rectangular mask openings are provided on the Open / Common Mask (open / common mask plate) for preparing the OLED display panel. The mask openings are usually set in a rectangular structure. During the evaporation process, each mask opening corresponds to a display substrate, so that multiple display substrates can be prepared simultaneously using one Open / Common Mask, thereby realizing the mass production of the display substrate. Since a cutout area is usually provided on the display substrate, such as a cutout area corresponding to the position of the camera, during the evaporation of the organic light-emitting layer (for example, the organic light-emitting layer may include organic film layers such as HTL / HBL / ETL / CPL / LiF / Cathode) using the Open / Common Mask, the organic light-emitting layer will cover the position of the cutout area. Because the organic film layer has water absorption, after the organic light-emitting layer covers the position of the cutout area, the cutting line position at the boundary of the cutout area provides a path for water vapor intrusion, which also causes GDSH defects to often occur at the position of the cutout area and the positions near the cutout area of the display panel, seriously affecting the quality of the display panel.

[0064] To solve the technical problem of GDSH defects in existing display panels, an embodiment of the present disclosure provides a mask plate, as Figures 4 to 12 shown. The mask plate may include a mask plate body 10, and a plurality of mask openings 11 are provided on the mask plate body 10. At least one of the mask openings 11 is provided with a shielding structure 12 and a connecting structure 13;

[0065] The shielding structure 12 is correspondingly arranged with the cutout area on the display substrate and is used to shield the peripheral position of the cutout area on the display substrate during the evaporation process;

[0066] The connecting structure 13 is connected to the mask plate body 10 and the corresponding shielding structure 12 and is used to fix the corresponding shielding structure 12 to the mask plate body 10.

[0067] For the mask plate provided by the embodiment of the present disclosure, a shielding structure corresponding to the cutout area on the display substrate is provided in the mask opening and is used to shield the peripheral position of the cutout area on the display substrate during the evaporation process. During the evaporation process of preparing the organic light-emitting layer of the display substrate, the area shielded by the shielding structure will not deposit organic light-emitting material, and a transition area without deposited organic light-emitting material can be formed at the peripheral position of the cutout area. At the cutting line position of the cutout area, water vapor cannot extend along the organic light-emitting layer to the display area, and GDSH defects can be avoided to a great extent.

[0068] In an exemplary embodiment, the shape of the shielding structure 12 matches the shape of the corresponding hole-digging area on the display substrate.

[0069] In an exemplary embodiment, Figure 5 As shown, the shape of the shielding structure 12 is circular; or Figure 6 As shown, the shape of the shielding structure 12 is rectangular; or Figure 7 As shown, the shielding structure 12 is elliptical; or Figure 8 As shown, the shielding structure 12 is in the shape of a square with at least one set of opposite sides being arc-shaped. Figure 8 In the illustrated shielding structure 12 , the shape of the shielding structure 12 may also be referred to as a capsule shape.

[0070] In an exemplary embodiment, Figures 5 to 8 In the shielding structure 12 shown, the area of ​​the shielding structure 12 is larger than the area enclosed by the first boundary and less than or equal to the area enclosed by the second boundary, the first boundary is a closed-loop boundary formed by the cutting line of the hole-digging area on the display substrate, and the second boundary is a closed-loop boundary of the display area surrounding the hole-digging area on the display substrate, so that in the evaporation process, the orthographic projection of the shielding structure 12 on the mask plate can cover the orthographic projection of the hole-digging area corresponding to the shielding structure 12 on the mask plate, and the orthographic projection of the geometric figure enclosed by the boundary of the cutting line of the hole-digging area on the mask plate falls within the range of the orthographic projection of the shielding structure 12 on the mask plate, so as to form a transition zone where no organic light-emitting material is deposited between the hole-digging area and the display area of ​​the display substrate. The absence of organic light-emitting material in the transition zone can block water vapor from penetrating into the display panel along the organic light-emitting material from the cutting line position, thereby avoiding GDSH defects on the display panel.

[0071] In an exemplary embodiment, a boundary of the hole-digging area formed after cutting along the hole-digging area cutting line on the display substrate may overlap a boundary of the cutting line of the hole-digging area.

[0072] In an exemplary embodiment, during the evaporation process, the distance between the orthographic projection of the boundary of the shielding structure 12 on the mask plate and the orthographic projection of the first boundary on the mask plate is greater than or equal to 50 microns, so that a transition zone greater than or equal to 50 microns without deposited organic light-emitting material is formed between the hole area and the display area on the display substrate.

[0073] In an exemplary embodiment, Figures 9 to 12 As shown, the middle area of ​​the shielding structure 12 is a hollow structure.

[0074] In an exemplary embodiment, Figure 9 As shown, the shielding structure 12 is a circular ring structure with a hollow middle portion; or Figure 10 As shown, the shielding structure 12 is a rectangular ring structure with a hollow middle portion; or Figure 11As shown, the shielding structure 12 is an elliptical ring structure with a hollow middle portion; or Figure 12 As shown, the shielding structure 12 is a capsule-shaped annular structure with a hollow middle portion.

[0075] In an exemplary embodiment, Figures 9 to 14 As shown, the annular structure includes an inner boundary L1 and an outer boundary L2, and the center of a geometric shape enclosed by the inner boundary L1 and the outer boundary L2 overlaps.

[0076] In an exemplary embodiment, Figure 9 and Figure 14 In the structure shown, the inner boundary L1 and the outer boundary L2 of the circular ring structure are concentric circles; Figure 12 and Figure 13 In the structure shown, the inner boundary L1 and the outer boundary L2 of the capsule-shaped annular structure are both in the shape of a square with a pair of arc-shaped opposite sides, and the center of the arc is located between the pair of opposite sides of the arc, and the centers of the two geometric shapes enclosed by the inner boundary L1 and the outer boundary L2 overlap.

[0077] In an exemplary embodiment, Figures 9 to 14 As shown, the area enclosed by the inner boundary L1 is smaller than or equal to the area enclosed by the first boundary, or the area enclosed by the inner boundary L1 is larger than the area enclosed by the first boundary and smaller than the area enclosed by the outer boundary L2; the area enclosed by the outer boundary L2 is larger than the area enclosed by the first boundary and smaller than the area enclosed by the second boundary; the first boundary is a closed-loop boundary formed by the cutting line of the hole area on the display substrate, and the second boundary is a closed-loop boundary of the display area surrounding the hole area on the display substrate.

[0078] In an exemplary embodiment, Figures 9 to 14 As shown, the distance D1 between the inner boundary L1 and the outer boundary L2 is greater than or equal to 50 microns, so that in the evaporation process of preparing the organic light-emitting layer of the display substrate, a transition zone of at least 50 microns is formed around the hole-digging area (between the hole-digging area and the display area) without depositing the organic light-emitting material. The distance D1 is not limited to being greater than 50 microns, for example, it can be less than 50 microns, and it can block the passage of water vapor penetrating into the cutting line position of the hole-digging area along the organic light-emitting layer. For example, the value of the distance D1 can be 20 microns, 30 microns, 50 microns, 60 microns, 100 microns, etc.

[0079] In an exemplary embodiment, Figures 8 to 12 As shown, the connection structure 13 includes one or more connection lines 131 .

[0080] In an exemplary embodiment, Figures 8 to 12As shown, the number of connection lines 131 in the connection structure 13 is an even number greater than or equal to 2. On the plane where the mask plate is located, multiple connection lines 131 are arranged along the extending direction of the first median line Q1-Q1, and are symmetrically arranged with respect to the second median line Q2-Q2; the first median line Q1-Q1 is the median line along which the shielding structure 12 extends in the first direction X, and the second median line Q2-Q2 is the median line along which the shielding structure 12 extends in the second direction Y, and the first direction X intersects with the second direction Y. For example, the number of connection lines 131 connecting the same shielding structure 12 can be 2, 4, 6, 8, etc.

[0081] In an exemplary embodiment, in order to increase the supporting force on the shielding structure 12, prevent the shielding structure 12 from deforming during the evaporation process, and improve the evaporation accuracy and stability, multiple connection lines 131 can be provided for the same shielding structure 12, and the symmetrical arrangement of multiple connection lines 131 can prevent uneven stress.

[0082] In an exemplary embodiment, the shape of the connection line 131 corresponds to the gap PDL GAP of the pixel definition layer in the display substrate, so as to avoid the connection line 131 from blocking the effective light-emitting area of the display substrate, and prevent the deposition of organic light-emitting materials on the effective light-emitting area from being blocked due to the existence of the connection line 131 during the evaporation process. In an exemplary embodiment, the connection line 131 in the connection structure 13 corresponds to the touch trace of the touch layer in the display substrate. For example, the orthographic projection of the connection line 131 in the connection structure 13 on the display substrate may overlap with the orthographic projection of the touch trace of the touch layer in the display substrate on the display substrate.

[0083] In an exemplary embodiment, as Figure 4 shown, the shielding structure 12, the connection structure 13 and the mask plate main body 10 are integrally formed structures.

[0084] In an exemplary embodiment, as Figures 4 to 12 shown, the shape of the mask opening 11 is rectangular, and the rectangular mask opening 11 is surrounded by four side walls, and the four side walls include a connecting side wall R1 and an opposite side wall R2 opposite to the connecting side wall. The connection structure 13 is connected to the connecting side wall R1, and the distance M1 between the shielding structure 12 and the connecting side wall R1 is less than the distance M2 between the shielding structure 12 and the opposite side wall R2, so as to reduce the length of the connection line and improve the supporting strength of the connection line.

[0085] The embodiments of the present disclosure also provide a display substrate, as Figure 15 and Figure 16As shown, in a plane perpendicular to the display substrate, the display substrate includes a substrate 101, and a driving circuit layer 102 and a light-emitting structure layer 103 sequentially disposed on the substrate. The light-emitting structure layer 103 includes an organic light-emitting layer 303. In a plane parallel to the display substrate, the display substrate includes a display area 21, a transition area 22, and a cutout area 23. The transition area 22 is located between the cutout area 23 and the display area 21, and there is no overlapping area between the orthographic projection of the transition area 22 on the substrate 101 and the orthographic projection of the organic light-emitting layer 303 on the substrate 101.

[0086] In an exemplary embodiment, as Figure 16 shown, the display substrate further includes a support structure 50. The light-emitting structure layer 103 further includes a pixel definition layer 302. The pixel definition layer 302 is located between the driving circuit layer 102 and the organic light-emitting layer 303. The support structure 50 is disposed on a side of the pixel definition layer 302 away from the substrate 101.

[0087] In an exemplary embodiment, the support structure 50 includes a plurality of support posts 501. The height H of the support posts 501 located in the transition area 22 is the same as that of the support posts 501 located in the display area 21. That is, the surfaces of the support posts 501 located in the transition area 22 and the support posts 501 located in the display area 21 on the side away from the substrate 101 are flush, so as to better support the mask plate. Under the support of the plurality of support posts 501, the mask plate can be accurately aligned, the evaporation accuracy can be improved, and thus the quality of the display substrate can be improved.

[0088] In an exemplary embodiment, the support post 501 can also be referred to as a spacer (PS), which is used to support the mask plate in the evaporation process of evaporating the organic light-emitting layer. The arrangement of the support posts 501 can reduce the deformation amount of the corresponding shielding structure in the cutout area 23 and improve the evaporation accuracy of the mask plate.

[0089] In an exemplary embodiment, as Figure 17 and Figure 18 shown, in a plane parallel to the display substrate, a plurality of support posts 501 located in the transition area 22 are symmetrically arranged along the second direction Y with respect to the third median line Q3-Q3, and are symmetrically arranged along the first direction X with respect to the fourth median line Q4-Q4. The third median line Q3-Q3 is the median line of the transition area 22 extending along the first direction X, and the fourth median line Q4-Q4 is the median line of the transition area 22 extending along the second direction Y. The first direction X intersects the second direction Y. In an exemplary embodiment, the number of the support posts 501 located in the transition area 22 can be 2, 4, 6, 8, etc.

[0090] In an exemplary embodiment, as Figure 17 and Figure 18 shown, the shape of the cutout area 23 can be circular, capsule-shaped, but is not limited to Figure 17 and18 The structure shown may be, for example, rectangular, elliptical, etc. The shape of the transition zone may be an annular structure, for example, the transition zone may be a circular annular structure, a capsule annular structure, a square annular structure, an elliptical annular structure, etc.

[0091] In the embodiment of the present disclosure, since the display substrate is provided with a transition zone 22 where no organic light-emitting material is deposited, it can effectively block external water vapor, and there is no need to set a blocking dam and isolation column around the hole area 23, which greatly reduces the border of the hole area 23 and is conducive to the realization of a narrow border in the hole area.

[0092] like Figure 19 As shown, it is a schematic diagram of the structure of setting isolation columns 601 and barrier dams 602 in the hole-digging area 23 in the prior art. In the prior art, four isolation columns 601 are usually set on the side of the barrier dam 602 close to the hole-digging area 23, and seven isolation columns 601 are set on the side of the barrier dam 602 away from the hole-digging area 23. In actual applications, the size of C1 is about 40 microns, the sizes of C2 and C3 are about 30 microns, the size of C4 is about 120 microns, and the size of C5 is about 100 microns. The space of the isolation columns 601 and the barrier dam 602 is saved in the embodiment of the present disclosure, which can save about 320 microns, thereby greatly reducing the border of the hole-digging area.

[0093] In an exemplary embodiment, in order to further block external water vapor, two barrier dams 602 and two isolation columns 601 may be provided around the hole-digging area in the embodiment of the present disclosure, such as Figure 20 As shown, the size of C6 is about 40 microns, and the sizes of C7 and C9 are about 30 microns. Figure 20 The total length ratio of C6 to C10 Figure 19 The total length of C1 to C5 is reduced by about 200 microns, which greatly reduces the border size of the hole area.

[0094] In an exemplary embodiment, the display substrate provided in the embodiment of the present disclosure may be prepared using the mask plate described in any of the above embodiments.

[0095] The embodiment of the present disclosure further provides a display device, which may include: a display substrate.

[0096] The display substrate is the display substrate provided by any of the aforementioned embodiments, and the implementation principle and effect are similar, which will not be repeated here.

[0097] In an exemplary embodiment, the display device can be an organic light emitting diode (OLED), electronic paper, an active-matrix organic light emitting diode (AMOLED) panel, a mobile phone, a tablet computer, a television, a monitor, a laptop computer, a digital photo frame, a navigator, or any other product or component with a display function.

[0098] The mask plate, display substrate and display device provided by the embodiments of the present disclosure have a mask opening on the mask plate provided with a shielding structure arranged corresponding to the hole area on the display substrate, which is used to shield the peripheral position of the hole area on the display substrate during the evaporation process. In the evaporation process of preparing the organic light-emitting layer of the display substrate, the organic light-emitting material will not be deposited in the area shielded by the shielding structure, and a transition zone where the organic light-emitting material is not deposited can be formed at the peripheral position of the hole area. At the cutting line position of the hole area, water vapor cannot extend along the organic light-emitting layer to the display area, thereby avoiding GDSH defects in the display panel to a large extent.

[0099] Although the embodiments disclosed in the present disclosure are as above, the contents described are only embodiments adopted to facilitate understanding of the present disclosure and are not intended to limit the present disclosure. Any technician in the field to which the present disclosure belongs can make any modifications and changes in the form and details of implementation without departing from the spirit and scope disclosed in the present disclosure, but the scope of patent protection of this application shall still be subject to the scope defined in the attached claims.

Claims

1. A display substrate is prepared by a mask plate, characterized in that, In a plane perpendicular to the display substrate, the display substrate includes a substrate, and a driving circuit layer and a light-emitting structure layer sequentially disposed on the substrate. The light-emitting structure layer includes an organic light-emitting layer and a pixel definition layer, and the pixel definition layer is located between the driving circuit layer and the organic light-emitting layer; in a plane parallel to the display substrate, the display substrate includes a display area, a transition area, and a cutout area. The transition area is located between the cutout area and the display area, and a positive projection of the transition area on the substrate does not overlap with a positive projection of the organic light-emitting layer on the substrate; the display substrate further includes a support structure disposed on a side of the pixel definition layer away from the substrate, and the support structure includes a plurality of support posts corresponding to the transition area; no barrier dam and isolation posts are provided around the cutout area, which can reduce the border of the cutout area. The mask plate includes a mask plate body, and a plurality of mask openings are provided on the mask plate body. At least one mask opening is provided with a shielding structure and a connecting structure; the shielding structure is correspondingly arranged with the cutout area on the display substrate, and is used to shield the peripheral position of the cutout area on the display substrate during the evaporation process. The plurality of support posts located in the transition area are arranged to support the shielding structure; the connecting structure is connected to the mask plate body and the corresponding shielding structure, and is used to fix the corresponding shielding structure to the mask plate body. A middle area of the shielding structure is a hollow structure. The shielding structure includes an inner boundary and an outer boundary, and an area enclosed by the outer boundary is larger than an area enclosed by a first boundary. The first boundary is a closed-loop boundary formed by a cutting line of the cutout area on the display substrate; an area enclosed by the inner boundary is smaller than or equal to the area enclosed by the first boundary, or the area enclosed by the inner boundary is larger than the area enclosed by the first boundary and smaller than the area enclosed by the outer boundary. A distance between the inner boundary and the outer boundary is greater than or equal to 50 micrometers, so that a transition area of not less than 50 micrometers without deposited organic light-emitting material is formed between the cutout area and the display area on the display substrate; no organic light-emitting material is provided in the transition area, which can block the passage of water vapor from infiltrating into the position of the cutting line of the cutout area along the organic light-emitting layer.

2. The display substrate according to claim 1, wherein The support structure further includes a plurality of support posts located in the display area, and heights of the support posts located in the transition area and the support posts located in the display area are kept consistent.

3. The display substrate according to claim 2, wherein In a plane parallel to the display substrate, the plurality of support posts located in the transition area are symmetrically arranged with respect to a third median line in a second direction and symmetrically arranged with respect to a fourth median line in a first direction; the third median line is a median line of the transition area extending in the first direction, the fourth median line is a median line of the transition area extending in the second direction, and the first direction intersects with the second direction.

4. The display substrate according to claim 1, wherein The area enclosed by the outer boundary is smaller than or equal to an area enclosed by a second boundary, and the second boundary is a closed-loop boundary of a display area surrounding the cutout area on the display substrate.

5. The display substrate according to claim 4, wherein The shape of the shielding structure matches the shape of the corresponding cutout area on the display substrate.

6. The display substrate according to claim 5, wherein The shape of the shielding structure is circular, rectangular, oval, or a square with at least a pair of opposite sides being arc-shaped.

7. The display substrate according to claim 5, wherein The shielding structure is an annular structure with a hollow center or a capsule-shaped annular structure with a hollow center; the annular structure includes an inner boundary and an outer boundary. The inner boundary and the outer boundary of the annular structure are concentric circles; the inner boundary and the outer boundary of the capsule-shaped annular structure are both squares with a pair of opposite sides being arc-shaped, and the center of the arc is located between the pair of opposite sides of the arc, and the centers of the two geometric shapes enclosed by the inner boundary and the outer boundary overlap.

8. The display substrate according to claim 4, wherein The connecting structure includes one or more connecting lines.

9. The display substrate according to claim 8, wherein, The number of connecting lines in the connecting structure is an even number greater than or equal to 2. In the plane where the mask plate is located, the multiple connecting lines are arranged along the extending direction of the first median line and are symmetrically arranged with respect to the second median line; the first median line is the median line along which the shielding structure extends in the first direction, the second median line is the median line along which the shielding structure extends in the second direction, and the first direction intersects with the second direction.

10. The display substrate according to claim 8 or 9, characterized in that, The shape of the connecting line corresponds to the gap of the pixel definition layer in the display substrate.

11. The display substrate according to claim 4, wherein, The shielding structure, the connecting structure, and the mask plate body are an integrally formed structure.

12. The display substrate according to claim 4, wherein The shape of the mask opening is rectangular. The rectangular mask opening is surrounded by four side walls, and the four side walls include a connecting side wall and an opposite side wall opposite to the connecting side wall. The connecting structure is connected to the connecting side wall, and the distance between the shielding structure and the connecting side wall is less than the distance from the opposite side wall.

13. A display device, characterized in that, A display substrate includes any one of claims 1 to 12.

Citation Information

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