Torque calibration method and semiconductor equipment material storage unit

Abstract

The present application relates to the field of semiconductors, and relates to a torque calibration method and a semiconductor equipment material storage unit. The torque calibration method includes: calculating the maximum torque of the flip component: T N =P·L, where P is the gravity of the flip assembly and L is the maximum lever arm length from the center of gravity of the flip assembly to the rotation center of the driven wheel, which is recorded as the calibration position; determine the working torque: T, where T ≥ n·T N , n is a safety factor greater than 1; calibrate the torque of the flip assembly: gradually tighten the driven wheel, and when the flip assembly is in the calibrated position and the driven wheel does not disengage, record the applied pressure value: F = F i , the torque T of the flip assembly i =(F b +P)·L, where i is the number of calibrations, F b The force acting on the center of gravity of the flip assembly in the direction of gravity solves the problem that existing vertical opening and closing devices have no anti-pinch function or sensor-based anti-pinch function, which can easily damage precision machinery and materials and cause false detection.

Description

Technical Field

[0001] The present application relates to the field of semiconductors, and in particular to a torque calibration method and a semiconductor equipment material storage unit. Background Art

[0002] Semiconductor equipment material storage units typically utilize enclosed spaces and air baths to achieve cleanliness control. To address the conflict between cleanliness control (which requires an enclosed space) and horizontal material transfer (which requires an open space), a safe, automatically switching vertical opening and closing device is required. When material transfer is in progress, the vertical opening and closing device opens to allow the robot to transfer the material; when the material transfer is complete, the vertical opening and closing device closes, ensuring the material remains enclosed and maximizing cleanliness, thereby improving production efficiency and yield.

[0003] However, existing vertical opening and closing devices generally do not have an anti-pinch function, or the anti-pinch function is achieved based on sensor detection of the presence or absence of obstacles. The former cannot guarantee the safety of the robot and personnel. Although the latter has an anti-pinch function, the inertial movement from the sensor triggering to the device stopping will also damage precision machinery and materials. Furthermore, there is a risk of sensor misdetection or failure and the anti-pinch function cannot be achieved. Summary of the Invention

[0004] The purpose of this application is to provide a torque calibration method, thereby solving the problem that the existing vertical opening and closing device has no anti-pinch function or a sensor-based anti-pinch function, which easily damages precision machinery and materials and has false detection.

[0005] According to a first aspect of the present application, a torque calibration method is provided for calibrating the torque of an opening and closing device, wherein the opening and closing device includes a driving wheel, a driven wheel, a driven shaft, a flip assembly, and a locking mechanism. The driving wheel can drive the driven wheel to rotate, the driven shaft passes through the driven wheel and is connected to the flip assembly, the driven shaft can drive the flip assembly to move to open or close an opening of an external mechanism, and the locking mechanism can apply axial pressure to the driven wheel to lock the driven wheel. The torque calibration method includes:

[0006] Calculate the maximum torque of the flip assembly: T N =P·L, where P is the gravity of the flip assembly, and L is the maximum lever arm length from the center of gravity of the flip assembly to the rotation center of the driven wheel, which is recorded as the calibration position;

[0007] Determine the working torque: T, where T ≥ n·T N , n is a safety factor greater than 1;

[0008] Calibrate the torque of the flip assembly: gradually tighten the driven wheel. When the flip assembly is in the calibrated position and the driven wheel does not disengage, record the applied pressure value: F = F i , the torque T of the flip assembly i =(F b +P)·L, where i is the number of calibrations, F b It is the force acting at the center of gravity of the flip assembly and in the direction of gravity.

[0009] In any of the above technical solutions, further, the torque calibration method further includes a recording step after calibrating the torque of the flip assembly: recording data (F i , T i ) and draw a graph of the calibration data.

[0010] In any of the above technical solutions, further, the opening and closing device also includes two friction wheels, a driven wheel fixing seat and a pressure sensor, the locking mechanism is an adjusting nut, the driven wheel fixing seat is sleeved on the driven shaft, the driven wheel fixing seat includes a main body and a protrusion, a recess is formed inside the driven wheel, the recess separates the driven wheel into a first side portion and a second side portion, the first side portion is sleeved on the driven shaft, the second side portion is sleeved on the main body, the protrusion is arranged in the recess, the two friction wheels clamp the second side portion, the adjusting nut is sleeved on the main body, the pressure sensor is sleeved on the main body, and is arranged between the adjusting nut and one of the friction wheels located outside the driven wheel.

[0011] In any of the above technical solutions, further, the opening and closing device also includes a pressure wheel and a drum-type washer, and the pressure wheel and the drum-type washer are both sleeved on the main body, the pressure wheel is arranged between the pressure sensor and one of the friction wheels located outside the driven wheel, and the drum-type washer is arranged between the pressure sensor and the adjusting nut.

[0012] In any of the above technical solutions, further, the flip assembly includes two groups of connecting handles and window guards, the driven shaft passes through the driven wheel, and the two ends are respectively connected to the two groups of connecting handles to drive the two groups of connecting handles to move, and the two groups of connecting handles can drive the window guards to move to open or close the opening of the external mechanism.

[0013] In any of the above technical solutions, further, the opening and closing device also includes a frame assembly, the frame assembly includes two side vertical plates, each group of the connecting handles includes a first crank, a second crank and a connecting rod, the driven wheel is arranged at the top of the driving wheel, and the two ends of the driven wheel pass through the two side vertical plates respectively, each end of the driven wheel is rotatably connected to the first end of the first crank through a first rotating assembly, the first end of the second crank is connected to the side vertical plate through a second rotating assembly, the second rotating assembly is located at the top of the first rotating assembly, the second end of the first crank is rotatably connected to the bottom of the connecting rod, the second end of the second crank is rotatably connected to the top of the connecting rod, the side of the connecting rod is connected to the window guard, and the driven shaft can drive the first crank to move to drive the window guard to move.

[0014] In any of the above technical solutions, further, the opening and closing device also includes a position sensor, a control system and a sensor stop wheel, the sensor stop wheel is connected to the driven shaft and is located at the end of the driven shaft away from the driven wheel, the sensor stop wheel is provided with a sensor light-transmitting hole, the position sensor is connected to the inner side of the side plate away from the driven wheel, when the driven wheel drives the sensor stop wheel to rotate, the detection signal of the position sensor passes through the sensor light-transmitting hole, and sends a stop signal or a start signal to the control system.

[0015] In any of the above technical solutions, further, in the step of calibrating the torque of the flip assembly: F b The value is measured by a tensile force gauge.

[0016] According to a second aspect of the present application, a semiconductor equipment material storage unit is provided, wherein the semiconductor equipment material storage unit comprises an opening and closing device, wherein the torque of the opening and closing device is calibrated by the torque calibration method as described above.

[0017] In any of the above technical solutions, further, the semiconductor equipment material storage unit is provided with an opening, and the driven shaft can drive the flip assembly to move to open or close the opening provided in the semiconductor equipment material storage unit.

[0018] According to a first aspect of the present application, a torque calibration method is provided for calibrating the torque of an opening and closing device, wherein the opening and closing device includes a driving wheel, a driven wheel, a driven shaft, a flip assembly, and a locking mechanism, wherein the driving wheel is capable of driving the driven wheel to rotate, the driven shaft passes through the driven wheel and is connected to the flip assembly, the driven shaft is capable of driving the flip assembly to move to open or close an opening of an external mechanism, and the locking mechanism is capable of applying axial pressure to the driven wheel to lock the driven wheel;

[0019] Torque calibration methods include:

[0020] like Figure 5 As shown, calculate the maximum torque of the flip assembly: T N =P·L, where P is the weight of the flip assembly and L is the maximum lever arm length from the rotation center of the driven wheel to the center of gravity of the flip assembly, which is recorded as the calibration position. Here, the maximum torque of the flip assembly is the maximum torque measured before locking the driven wheel.

[0021] Determine the working torque: T, where T ≥ n·T N , n is a safety factor greater than 1; here, the value of T can also be pre-selected according to needs (for example, T can be the torque that needs to be overcome for manual opening and closing, or it can be the torque that does not cause harm to the clamping hand, for example, T is between 2-10Nm).

[0022] Calibrate the torque of the flip assembly: gradually tighten the driven wheel. When the flip assembly is in the calibrated position and the driven wheel does not disengage (indicating that the driven shaft can drive the flip assembly), record the applied pressure value: F = F i , the torque T of the flip assembly i =(F b +P)·L, where i is the number of calibrations, F b It is the force acting at the center of gravity of the flip assembly and in the direction of gravity.

[0023] In this application, the on-site personnel can predetermine the torque to be designed according to the requirements, and then retrieve the pressure value F=F according to the previous measurement records. i (The pressure value is the pressure value applied by the on-site personnel to the driven wheel: F = F i ), and conversely, on-site personnel can apply the same pressure to obtain the ideal torque (the ideal torque can be the torque that will not cause damage to the hands regardless of collision or clamping with external mechanisms during the opening and closing process of the flip component).

[0024] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A schematic diagram of the overall cross-sectional structure of an opening and closing device according to an embodiment of the present application is shown;

[0027] Figure 2 A schematic diagram of the overall cross-sectional structure of a power system according to an embodiment of the present application is shown;

[0028] Figure 3 A schematic diagram of the overall cross-sectional structure of a detection unit according to an embodiment of the present application is shown;

[0029] Figure 4 A schematic diagram showing the flipping of a flip assembly according to an embodiment of the present application is shown;

[0030] Figure 5 A schematic diagram illustrating torque calibration according to an embodiment of the present application is shown;

[0031] Figure 6 A diagram showing calibration data according to an embodiment of the present application is shown.

[0032] Icons: 1-frame assembly; 101-base plate; 102-right vertical plate; 103-left vertical plate; 104-first ball bearing; 105-first sleeve; 106-lock nut; 107-second sleeve; 108-third sleeve; 109-locking screw; 110-limit block; 111-top plate; 112-extraction interface; 2-power system; 201-motor assembly; 202-motor seat; 203-driving pulley; 204-second ball bearing; 205-bearing seat; 206-tensioning plate; 207-tensioning screw; 208-synchronous belt; 209-driven shaft; 210-driven wheel fixing seat; 211-driven wheel; 213-friction wheel; 214-pressure wheel; 215-pressure sensor; 216-drum washer; 217-adjusting nut; 3-detection unit; 31-blocking wheel assembly; 311-sensor blocking wheel; 312-blocking wheel closure; 313-fixing screw; 314-setting screw; 32-position sensor; 33-sensor seat; 34-adjusting screw; 4-flipping assembly; 401-first crank; 402-second crank; 403-connecting rod; 404-flipping window; 405-handle; 406-reset plate. DETAILED DESCRIPTION

[0033] The following detailed description is provided to help the reader gain a comprehensive understanding of the methods, devices, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, devices, and / or systems described herein will be apparent upon understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein. Rather, except for operations that must occur in a particular order, changes may be made that will be apparent upon understanding the disclosure of this application. Furthermore, descriptions of features known in the art may be omitted for clarity and brevity.

[0034] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many possible ways to implement the methods, devices, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0035] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being “on,” “connected to,” “coupled to,” “over,” or “overlaying” another element, it may be directly “on,” “connected to,” “coupled to,” “over,” or “overlaying” another element, or one or more other elements may be present between them. In contrast, when an element is described as being “directly on,” “directly connected to,” “directly coupled to,” “directly over,” or “directly covering” another element, there may be no other elements intervening therebetween.

[0036] As used herein, the term "and / or" includes any one of the associated listed items and any combination of any two or more items.

[0037] Although terms such as "first," "second," and "third" may be used herein to describe various members, components, regions, layers, or portions, these members, components, regions, layers, or portions are not limited by these terms. Rather, these terms are used only to distinguish one member, component, region, layer, or portion from another member, component, region, layer, or portion. Thus, a first member, component, region, layer, or portion in the examples described herein may also be referred to as a second member, component, region, layer, or portion without departing from the teachings of the examples.

[0038] For ease of description, spatial relational terms such as "above," "upper," "below," and "lower" may be used herein to describe the relationship of one element to another element as shown in the accompanying drawings. Such spatial relational terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the accompanying drawings. For example, if the device in the accompanying drawings is turned over, an element described as being "above" or "upper" relative to another element would subsequently be "below" or "lower" relative to the other element. Thus, the term "above" includes both the orientations "above" and "below," depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relational terms used herein will be interpreted accordingly.

[0039] The terms used herein are intended only to describe various examples and are not intended to limit the present disclosure. Unless the context clearly indicates otherwise, the singular is intended to include the plural. The terms "comprise," "include," and "have" list the presence of stated features, quantities, operations, components, elements, and / or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0040] Due to manufacturing techniques and / or tolerances, variations in the shapes shown in the drawings may occur. Therefore, the examples described herein are not limited to the specific shapes shown in the drawings but include changes in shapes that occur during manufacturing.

[0041] The features of the examples described herein can be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have various configurations, other configurations are possible as will be apparent after understanding the disclosure of the present application.

[0042] The first aspect of the present application provides a torque calibration method, thereby solving the problem that the existing vertical opening and closing device has no anti-pinch function or a sensor-based anti-pinch function, which easily damages precision machinery and materials and has false detection.

[0043] Semiconductor equipment material storage units typically utilize enclosed spaces and air baths to achieve cleanliness control. To address the conflict between cleanliness control (which requires an enclosed space) and horizontal material transfer (which requires an open space), a safe, automatically switching vertical opening and closing device is required. When material transfer is in progress, the vertical opening and closing device opens to allow the robot to transfer the material; when the material transfer is complete, the vertical opening and closing device closes, ensuring the material remains enclosed and maximizing cleanliness, thereby improving production efficiency and yield.

[0044] Before this application was submitted, existing vertical opening and closing devices generally did not have an anti-pinch function, or achieved the anti-pinch function based on sensor detection of the presence or absence of obstacles. The former cannot guarantee the safety of the manipulator and personnel. Although the latter has an anti-pinch function, the inertial movement from the sensor triggering to the device stopping will also damage precision machinery and materials. Furthermore, there is a risk of sensor misdetection or failure and the anti-pinch function cannot be achieved.

[0045] In addition, the working torque of the existing vertical opening and closing device cannot be adjusted. The working torque of the existing vertical opening and closing device (provided by the motor brake) is generally a fixed value and cannot be adjusted in real time according to changes in design requirements, load torque, manipulator strength, and personnel safety requirements. There is a risk of insufficient working torque safety factor, which leads to safety hazards during the material handover process.

[0046] In view of this, according to a first aspect of the present application, a torque calibration method is provided for calibrating the torque of an opening and closing device, wherein the opening and closing device includes a driving wheel 203, a driven wheel 211, a driven shaft 209, a flip assembly 4, and a locking mechanism. The driving wheel 203 can drive the driven wheel 211 to rotate. The driven shaft 209 passes through the driven wheel 211 and is connected to the flip assembly 4. The driven shaft 209 can drive the flip assembly 4 to move to open or close the opening of the external mechanism. The locking mechanism can apply axial pressure to the driven wheel 211 to lock the driven wheel 211.

[0047] Torque calibration methods include:

[0048] like Figure 5 As shown, the maximum torque of the flip assembly 4 is calculated: T N =P·L, where P is the gravity of the flip assembly 4, and L is the maximum lever arm length of P acting at the center of gravity of the flip assembly 4 from the rotation center of the driven wheel 211, which is recorded as the calibration position; Q is the center of gravity of the flip assembly 4 (assessed using UG software after the part is loaded). Here, the maximum torque of the flip assembly 4 is the maximum torque measured before locking the driven wheel 211;

[0049] Determine the working torque: T, where T ≥ n·T N , n is a safety factor greater than 1; here, the value of T can also be pre-selected according to needs (for example, T can be the torque that needs to be overcome for manual opening and closing, or it can be the torque that does not cause harm to the clamping hand, for example, T is between 2-10Nm).

[0050] Calibrate the torque of the flip assembly 4: gradually tighten the driven wheel 211. When the flip assembly 4 is in the calibrated position and the driven wheel 211 does not disengage (indicating that the driven shaft 209 can drive the flip assembly 4), record the applied pressure value: F = F i , the torque T of the flip component 4 i =(F b +P)·L, where i is the number of calibrations, F b is the force acting on the center of gravity of the flip assembly 4 and in the direction of gravity (F b The value can be measured by a dynamometer, that is, record the reading of the dynamometer acting at the center of gravity Q at this time, with the direction vertical O2Q downward).

[0051] In this application, the on-site personnel can predetermine the torque to be designed according to the requirements, and then retrieve the pressure value F=F according to the previous measurement records. i (The pressure value is the pressure value applied by the on-site personnel to the driven wheel 211: F = F i), and conversely, on-site personnel can apply the same pressure to obtain the ideal torque (the ideal torque can be the torque that will not cause damage to the hand regardless of collision or clamping with external mechanisms during the opening and closing process of the flip assembly 4).

[0052] Furthermore, the recorded data (F i , T i ), when F b =0, the data is (F N , T N ), and then gradually increase the dynamometer reading until Ti>1.5T1 to end the calibration to ensure that the measurement range value can meet the requirements.

[0053] Further, such as Figure 6 As shown, the torque calibration method also includes a recording step after calibrating the torque of the flip assembly 4: recording the data (Fi, Ti) and plotting the calibration data graph. Based on the calibration data graph, the operating torque can be quickly adjusted to adapt to complex and changing working conditions, which is convenient and fast. Subsequent changes in load parameters can be adjusted quickly by simply interpolating and looking up the graph.

[0054] In the embodiments of the present application, Figure 1 and Figure 2 As shown, the opening and closing device includes a power system 2, which includes a motor assembly 201 (including a reducer), a motor seat 202, a driving wheel 203 (small pulley), a second ball bearing 204, a bearing seat 205, a tensioning plate 206, a tensioning screw 207, a synchronous belt 208, a driven shaft 209, a driven wheel fixing seat 210, a driven wheel 211 (large pulley), a third bearing, a friction wheel 213, a pressure wheel 214, a first sensor, a drum washer 216, an adjusting nut 217, etc. The motor assembly 201 (including the reducer) is responsible for providing the original power, the synchronous belt 208 system is responsible for transmitting power, and the friction clutch assembly (parts 210-216) is responsible for adjusting the working torque.

[0055] Specifically, if Figure 2As shown, the driven wheel fixing seat 210 is sleeved on the driven shaft 209. The driven wheel fixing seat 210 includes a main body and a raised portion. A recess is formed inside the driven wheel 211. The recess separates the driven wheel 211 into a first side portion and a second side portion. The first side portion is sleeved on the driven shaft 209, and the second side portion is sleeved on the main body. The raised portion is arranged in the recess. Two friction wheels 213 clamp the second side portion. The adjusting nut 217 is sleeved on the main body. The pressure sensor 215 is sleeved on the main body and is arranged between the adjusting nut 217 and one of the friction wheels 213 located outside the driven wheel 211. In the torque step of the mark flip assembly 4: gradually tighten the driven wheel 211, that is, gradually screw the adjusting nut 217 toward the driven wheel 211. At this time, the pressure value detected by the pressure sensor 215 is: F=F i , that is, the F value can be determined by the reading of the pressure sensor 215.

[0056] In addition, the pressure wheel 214 is sleeved on the main body and is arranged between the pressure sensor 215 and one of the friction wheels 213 located outside the driven wheel 211. The pressure wheel 214 can make the force on the driven wheel 211 more uniform.

[0057] In the embodiments of the present application, Figure 1 and Figure 4 As shown, the flip assembly 4 includes two sets of connecting handles and a window guard, the driven shaft 209 passes through the driven wheel 211, and the two ends are respectively connected to the two sets of connecting handles to drive the two sets of connecting handles to move. The two sets of connecting handles can drive the window guard to move to open or close the opening of the external mechanism. The opening and closing device can also include a frame assembly 1, which includes two side vertical plates. Each group of connecting handles includes a first crank 401, a second crank 402 and a connecting rod 403. The driven wheel 211 is arranged at the top of the driving wheel 203. The two ends of the driven wheel 211 pass through the two side vertical plates respectively. Each end of the driven wheel 211 is rotatably connected to the first end of the first crank 401 through a first rotating assembly. The first end of the second crank 402 is connected to the side vertical plate through a second rotating assembly. The second rotating assembly is located at the top of the first rotating assembly. The second end of the first crank 401 is rotatably connected to the bottom of the connecting rod 403. The second end of the second crank 402 is rotatably connected to the top of the connecting rod 403. The side of the connecting rod 403 is connected to the window guard. The driven shaft 209 can drive the first crank 401 to move to drive the window guard to move.

[0058] Specifically, if Figure 1As shown, the frame assembly 1 may include a base plate 101, a right vertical plate 102, a left vertical plate 103, a first ball bearing 104, a first sleeve 105, a lock nut 106, a second sleeve 107, a third sleeve 108, a locking screw 109, a limit block 110, a top plate 111, an exhaust interface 112, etc. Here, the first sleeve 105 is sleeved on the driven shaft 209, the hole opened at the first end of the first crank 401 is sleeved on the first sleeve 105, the lock nut 106 is sleeved on the end of the driven shaft 209 to play a tightening role, the locking screw 109 passes through the side vertical plate, the second sleeve 107 and the third sleeve 108 are both sleeved on the locking screw 109, and the first ball bearing 104 is arranged between the hole at the first end of the second crank 402 and the recess formed by the second sleeve 107 and the third sleeve 108. The function of the frame assembly 1 is to provide support and fixation for other parts of the device, and is provided with a particle extraction interface 112 to ensure that its own mechanical movement does not pollute the surrounding environment.

[0059] In addition, if Figure 4 As shown, the flip assembly 4 includes a first crank 401, a second crank 402, a connecting rod 403, a flip window 404, a handle 405, a reset plate 406, etc., wherein the first crank 401, the second crank 402 and the connecting rod 403 form a parallelogram mechanism, and the two connecting rods 403 located on the sides of the right vertical plate 102 and the left vertical plate 103 are both connected to the baffle, and the driven shaft 209 can drive the first crank 401 to drive the connecting rod 403 to move, so as to drive the baffle to move. In addition, as an example, a flip window 404 can be opened in the middle of the larger baffle, and the flip window 404 can be opened manually, which is convenient for on-site personnel to observe the internal situation of the semiconductor equipment material storage unit, and the two connecting rods 403 located on the sides of the right vertical plate 102 and the left vertical plate 103 can be connected to the flip window 404 (connected by screws), and the baffle can be driven to move by driving the flip window 404.

[0060] In addition, reset plates 406 are respectively provided at both ends of the side of the baffle window facing the opening of the semiconductor device material storage unit, and the two reset plates 406 are perpendicular to the baffle window. Figure 4 As shown, the flip assembly 4 ensures that the A side of the end flip window 404 moves parallel and the B side of the reset plate 406 moves horizontally. The parallel movement of the A side of the flip window 404 realizes the closing and opening of the material storage unit, and the horizontal movement of the reset plate 406 realizes the reset function of the material (that is, the two reset plates 406 can push the material storage devices on both sides of the opening of the semiconductor device material storage unit back to their original positions).

[0061] In addition, the bottom of the window shield and the flip window 404 can be provided with a raised handle 405.

[0062] In the embodiments of the present application, Figure 1 and Figure 3 As shown, the opening and closing device can also include a position sensor 32, a control system and a sensor stop wheel 311. The sensor stop wheel 311 is connected to the driven shaft 209 and is located at the end of the driven shaft 209 away from the driven wheel 211. The sensor stop wheel 311 is provided with a sensor light-transmitting hole. The position sensor 32 is connected to the inner side of the side plate away from the driven wheel 211. When the driven wheel 211 drives the sensor stop wheel 311 to rotate, the detection signal of the position sensor passes through the sensor light-transmitting hole, that is, it is not blocked, and a stop signal or a start signal is sent to the control system. The control system controls the flip component 4 to start or stop. The position of the sensor light-transmitting hole can be set according to needs. For example, the specific position or angle of the flip component 4 hovering can be determined according to needs, and then the position of the sensor light-transmitting hole is determined.

[0063] Specifically, if Figure 3 As shown, the detection unit 3 includes a stop wheel assembly 31, a position sensor 32, a sensor base 33, an adjustment screw 34, etc. The function of the detection unit 3 is to detect the operating status of the vertical opening and closing device and feed back the status signal to the whole machine control unit. As an example, the two sensor bases are connected to the inner side of the side plate. Each sensor base is connected to the side facing the sensor stop wheel 311. A position sensor 32 (which can be a photoelectric switch) is connected. When the driven wheel 211 drives the sensor stop wheel 311 to rotate, when the detection signal of the first position sensor passes through the sensor light-transmitting hole, a stop signal is sent. When the detection signal of the other position sensor passes through the sensor light-transmitting hole, a start signal is sent. In other words, the opening and closing angle of the flip assembly 4 can be determined according to the rotation angle of the sensor stop wheel 311 (the distance between the two position sensors 32).

[0064] In addition, the wheel stop assembly 31 can also include a sensor wheel stop 311, a wheel stop closure 312, a fixing screw 313, a locking screw 314, a sensor light-transmitting hole, etc. The function of the wheel stop assembly 31 is to detect the operating status of the device through the position change of the light-transmitting hole. The advantage is that it is convenient for later installation and position adjustment.

[0065] According to a second aspect of the present application, a semiconductor equipment material storage unit is provided. The semiconductor equipment material storage unit includes an opening and closing device, and the torque of the opening and closing device is calibrated by the torque calibration method described above.

[0066] Furthermore, the semiconductor device material storage unit is provided with an opening, and the driven shaft can drive the flip assembly to move to open or close the opening provided in the semiconductor device material storage unit.

[0067] This application addresses the defects of poor safety and inertial clamping in existing vertical opening and closing devices. This application adopts a friction clutch + detection unit to ensure continuous and stable operation of safety. By limiting the working torque at the end of the power system, the safety of personnel and materials is guaranteed. There is no safety failure situation, and the safety effect is stable and reliable.

[0068] In addition, the existing vertical opening and closing device cannot be manually opened and closed without disassembling parts, which does not meet the needs of abnormal handling and maintenance, and has poor human-computer interaction. The present application solution can not only meet the needs of hovering at any position and keeping still after power failure, but also quickly realize the manual opening / closing function, greatly improving the convenience and reliability of abnormal handling and maintenance, and better meeting the needs of human-computer interaction; in other words, the present application solution uses a friction clutch + handle to meet the needs of hovering at any position and keeping still after power failure, but also realize quick manual opening / closing, greatly improving the convenience and reliability of abnormal handling and maintenance, and better meeting the needs of human-computer interaction.

[0069] This application addresses the problem that existing products are unable to make real-time adjustments based on changes in design requirements, load torque, manipulator strength, and personnel safety requirements. This application uses a pressure sensor 215 + friction clutch + dynamometer to calibrate the working torque and form a calibration result data graph. Based on the principle of linear interpolation, the working torque can be quickly adjusted to adapt to complex and changing working conditions.

[0070] Based on the movement characteristics of the parallelogram mechanism, this application provides a reset plate 406 at the end of the flip assembly. The B surface of the reset plate 406 provides a horizontal reset function for the material, ensuring the horizontal position accuracy of the material.

[0071] The detection unit of this application adopts a movable stop wheel + proximity switch structure. The stop wheel assembly is adjusted to accurately detect the closed state of the flip assembly. Adjusting the position of the proximity switch can control the opening and closing angle of the flip assembly. The stop wheel assembly has the advantages of easy disassembly and assembly, and no restrictions on installation order.

[0072] According to a first aspect of the present application, a torque calibration method is provided for calibrating the torque of an opening and closing device, wherein the opening and closing device includes a driving wheel, a driven wheel, a driven shaft, a flip assembly, and a locking mechanism, wherein the driving wheel is capable of driving the driven wheel to rotate, the driven shaft passes through the driven wheel and is connected to the flip assembly, the driven shaft is capable of driving the flip assembly to move to open or close an opening of an external mechanism, and the locking mechanism is capable of applying axial pressure to the driven wheel to lock the driven wheel;

[0073] Torque calibration methods include:

[0074] like Figure 5 As shown, calculate the maximum torque of the flip assembly: T N=P·L, where P is the weight of the flip assembly and L is the maximum lever arm length from the rotation center of the driven wheel to the center of gravity of the flip assembly, which is recorded as the calibration position. Here, the maximum torque of the flip assembly is the maximum torque measured before locking the driven wheel.

[0075] Determine the working torque: T, where T ≥ n·T N , n is a safety factor greater than 1; here, the value of T can also be pre-selected according to needs (for example, T can be the torque that needs to be overcome for manual opening and closing, or it can be the torque that does not cause harm to the clamping hand, for example, T is between 2-10Nm).

[0076] Calibrate the torque of the flip assembly: gradually tighten the driven wheel. When the flip assembly is in the calibrated position and the driven wheel does not disengage (indicating that the driven shaft can drive the flip assembly), record the applied pressure value: F = F i , the torque T of the flip assembly i =(F b +P)·L, where i is the number of calibrations, F b is the force acting on the center of gravity of the flip assembly and in the direction of gravity (F b The value can be measured by a tensile gauge).

[0077] In this application, the on-site personnel can predetermine the torque to be designed according to the requirements, and then retrieve the pressure value F=F according to the previous measurement records. i (The pressure value is the pressure value applied by the on-site personnel to the driven wheel: F = F i ), and conversely, on-site personnel can apply the same pressure to obtain the ideal torque (the ideal torque can be the torque that will not cause damage to the hands regardless of collision or clamping with external mechanisms during the opening and closing process of the flip component).

[0078] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The scope of protection of the present application is not limited thereto. Although the present application has been described in detail with reference to the above-mentioned embodiments, those skilled in the art should understand that any person skilled in the art can modify or easily conceive of changes to the technical solutions described in the above-mentioned embodiments within the technical scope disclosed in the present application, or perform equivalent replacements for some of the technical features thereof. These modifications, changes, or replacements do not deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A torque calibration method, characterized in that: Used to calibrate the torque of the opening and closing device, The opening and closing device includes a driving wheel, a driven wheel, a driven shaft, a flip assembly and a locking mechanism. The driving wheel can drive the driven wheel to rotate, the driven shaft passes through the driven wheel and is connected to the flip assembly, the driven shaft can drive the flip assembly to move to open or close the opening of the external mechanism, and the locking mechanism can apply axial pressure to the driven wheel to lock the driven wheel. The torque calibration method includes: Calculate the maximum torque of the flip assembly: T N =P·L, where P is the gravity of the flip assembly, and L is the maximum lever arm length from the center of gravity of the flip assembly to the rotation center of the driven wheel, which is recorded as the calibration position; Determine the working torque: T, where T ≥ n·T N , n is a safety factor greater than 1; Calibrate the torque of the flip assembly: gradually tighten the driven wheel. When the flip assembly is in the calibrated position and the driven wheel does not disengage, record the applied pressure value: F = F i , The torque T of the flip assembly i =(F b +P)·L, where i is the number of calibrations, F b It is the force acting at the center of gravity of the flip assembly and in the direction of gravity.

2. The torque calibration method according to claim 1, characterized in that: The torque calibration method further includes a recording step after calibrating the torque of the flip assembly: Record data (F i , T i ) and draw a graph of the calibration data.

3. The torque calibration method according to claim 1, characterized in that: The opening and closing device also includes two friction wheels, a driven wheel fixing seat and a pressure sensor, and the locking mechanism is an adjusting nut. The driven wheel fixing seat is sleeved on the driven shaft, and the driven wheel fixing seat includes a main body and a raised portion. A recess is formed inside the driven wheel, and the recess separates the driven wheel into a first side portion and a second side portion. The first side portion is sleeved on the driven shaft, and the second side portion is sleeved on the main body portion. The protrusion is arranged in the recess, and the two friction wheels clamp the second side portion. The adjusting nut is sleeved on the main body, and the pressure sensor is sleeved on the main body and arranged between the adjusting nut and one of the friction wheels located outside the driven wheel.

4. The torque calibration method according to claim 3, characterized in that: The opening and closing device also includes a pressure wheel and a drum-type washer, The pressure wheel and the drum-shaped washer are both sleeved on the main body, the pressure wheel is arranged between the pressure sensor and one of the friction wheels located outside the driven wheel, and the drum-shaped washer is arranged between the pressure sensor and the adjusting nut.

5. The torque calibration method according to claim 1, characterized in that: The flip assembly includes two sets of connecting handles and window barriers. The driven shaft passes through the driven wheel, and its two ends are respectively connected to two groups of connecting handles to drive the two groups of connecting handles to move. The two groups of connecting handles can drive the window guard to move to open or close the opening of the external mechanism.

6. The torque calibration method according to claim 5, characterized in that: The opening and closing device further includes a frame assembly, the frame assembly including two side panels, each set of connecting handles including a first crank, a second crank and a connecting rod, The driven wheel is arranged on the top of the driving wheel, and both ends of the driven wheel pass through the two side vertical plates respectively. Each end of the driven wheel is rotatably connected to the first end of the first crank through a first rotating assembly. The first end of the second crank is connected to the side plate through a second rotating assembly, and the second rotating assembly is located on top of the first rotating assembly. The second end of the first crank is rotatably connected to the bottom of the connecting rod, the second end of the second crank is rotatably connected to the top of the connecting rod, and the side of the connecting rod is connected to the window guard. The driven shaft can drive the first crank to move, thereby driving the window shield to move.

7. The torque calibration method according to claim 1, characterized in that: The opening and closing device also includes a position sensor, a control system and a sensor stop wheel. The sensor stop wheel is connected to the driven shaft and is located at one end of the driven shaft away from the driven wheel. The sensor stop wheel is provided with a sensor light-transmitting hole. The position sensor is connected to the inner side of the side plate away from the driven wheel. When the driven wheel drives the sensor blocking wheel to rotate, when the detection signal of the position sensor passes through the sensor light-transmitting hole, a stop signal or a start signal is sent to the control system.

8. The torque calibration method according to claim 1, characterized in that: In the step of calibrating the torque of the flip assembly: F b The value is measured by a tensile force gauge.

9. A semiconductor equipment material storage unit, characterized in that: The semiconductor device material storage unit includes an opening and closing device, and the torque of the opening and closing device is calibrated by the torque calibration method described in any one of claims 1-8.

10. The semiconductor equipment material storage unit according to claim 9, characterized in that: The semiconductor equipment material storage unit is provided with an opening, and the driven shaft can drive the flip assembly to move so as to open or close the opening provided in the semiconductor equipment material storage unit.

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