Transfer device

Abstract

The application provides a transfer device, which comprises a moving placement device, a pressing member and a pushing device. The moving placement device is used for placing a first carrier sheet on a first carrier area and placing a second carrier sheet on a second carrier area, so that the first carrier sheet and the second carrier sheet are oppositely spaced and can be relatively translated. The pressing member is movably arranged on a side of the first carrier area which is away from the second carrier area, and is used for pressing the first carrier sheet along a preset moving direction, so that a setting area of a target object to be pushed of the first carrier sheet is close to the second carrier sheet. The preset moving direction is a direction in which the first carrier area is towards the second carrier area. The pushing device is movably arranged on the side of the first carrier area which is away from the second carrier area, and comprises a pushing member which is used for pushing the target object through the pressing member along the preset moving direction. The pressing member comprises a side wall, and a first gap is formed in the side wall which is away from the first carrier area, and is used for allowing the pushing device to pass through.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular, to a transfer device. BACKGROUND

[0002] In the process of semiconductor manufacturing, a die transfer mechanism is used to pick and sort the cut dies according to their appearance, quality or characteristics. At present, most die transfer mechanisms use a push pin in a push device to transfer the dies from a film to a printed circuit board (PCB). However, in the transfer process, since the film used to carry the dies has a large area and is elastic, if the push device directly pushes the film to push the dies, accurate alignment cannot be achieved, and situations such as die flipping or skewed placement may occur, resulting in a low yield. SUMMARY

[0003] The present application is completed in view of the above problems, and provides a transfer device capable of achieving accurate alignment, avoiding situations such as die flipping or skewed placement, and having a high yield.

[0004] To solve the above problems, the present application provides a transfer device for transferring at least one target object on a first carrier sheet to a second carrier sheet, the transfer device comprising: a moving placement device for placing the first carrier sheet in a first carrier area and placing the second carrier sheet in a second carrier area, such that the first carrier sheet and the second carrier sheet are spaced apart and can be translated relative to each other; a pressing member movably arranged on a side of the first carrier area facing away from the second carrier area, the pressing member being configured to press the first carrier sheet in a predetermined moving direction, such that a setting area of the target object to be pushed on the first carrier sheet is close to the second carrier sheet, the predetermined moving direction being a direction in which the first carrier area faces the second carrier area; and a pushing device movably arranged on a side of the first carrier area facing away from the second carrier area, the pushing device comprising a pushing member, a front end of the pushing member being configured to pass through the pressing member in the predetermined moving direction to push the target object, wherein the pressing member comprises a side wall, a first gap being formed in a side of the side wall facing away from the first carrier area, the first gap being configured to allow the pushing device to pass through.

[0005] In an embodiment, the pressing member forms a second gap, the second gap being arranged on a side of the pressing member close to the first carrier area.

[0006] In an embodiment, the pressing member further comprises a pressing ring and a mounting portion, the pressing ring defines the second notch, and the mounting portion is disposed opposite to the pressing ring, and the mounting portion and the pressing ring are disposed on two sides of the side wall respectively.

[0007] In an embodiment, a bottom surface of the pressing ring is rounded at a junction with a side surface.

[0008] In an embodiment, the second notch is a circular hole.

[0009] In an embodiment, a through hole is further formed on the side wall, and the through hole is disposed opposite to the first notch.

[0010] The transfer device further comprises an image capturing device, which is fixedly disposed on a side of the first carrier area facing away from the second carrier sheet, and is used for capturing an image of the target object to be pushed.

[0011] In an embodiment, when the pushing device pushes the target object, the pushing device, the pressing member, and the image capturing device are coaxial with respect to each other.

[0012] In an embodiment, the pushing device comprises a needle cover, and the pushing member can protrude out of the needle cover.

[0013] In an embodiment, the moving and placing device comprises a first placing portion and a second placing portion, and the first placing portion and the second placing portion are disposed in a facing and spaced manner and can be relatively translated.

[0014] Compared with the prior art, by disposing the pressing member to press the first carrier sheet, when the target object is pushed, the setting area of the target object to be pushed of the first carrier sheet is close to the second carrier sheet, the tension of the setting area of the target object to be pushed can be easily controlled, and the distance between the setting area of the target object to be pushed of the first carrier sheet and the second carrier sheet is adjusted, so that the pushing device can accurately push the target object, and the problems such as crystal turning and skewing when placing are avoided, and the yield is high. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort.

[0016] Figure 1 is a perspective view of a transfer device according to an embodiment of the present application.

[0017] Figure 2 is Figure 1 a front view of the transfer apparatus shown in FIG. 1.

[0018] Figure 3 is Figure 2 a partial enlarged view of the transfer apparatus shown in FIG. 1.

[0019] Figure 4 is Figure 3 a partial enlarged view of the transfer apparatus shown in FIG. 1.

[0020] Figure 5 is Figure 1 a top view of the pressing member in the transfer apparatus shown in FIG. 1.

[0021] Figure 6 is Figure 5 a perspective structural view of the pressing member shown in FIG. 1.

[0022] Figure 7 is Figure 5 a front view of the pressing member shown in FIG. 1.

[0023] Figure 8 is Figure 5 a side view of the pressing member shown in FIG. 1.

[0024] Figure 9 (a) to (d) of FIG. 1 are action flow diagrams of moving and transferring a wafer.

[0025] Figure 10 is a flow diagram of transferring a target object by the transfer apparatus.

[0026] Figure 11 is a flow diagram of transferring a target object by the transfer apparatus.

[0027] Figure 12 is a flow diagram of transferring a target object by the transfer apparatus.

[0028] Figure 13 is a flow diagram of transferring a target object by the transfer apparatus.

[0029] Figure 14 is a flow diagram of transferring a target object by the transfer apparatus.

[0030] Figure 15 is a flow diagram of transferring a target object by the transfer apparatus.

[0031] Figure 16 is a flow diagram of transferring a target object by the transfer apparatus. DETAILED DESCRIPTION

[0032] The following detailed description includes specific information for exemplary embodiments associated with the present application. The drawings in the present application and its attached detailed description are currently considered an exemplification of the application. However, the present application is not limited to the exemplification. Other variations and embodiments of the present application will occur to those skilled in the art upon consideration of the specification and will fall within the purview of the present application. Like or corresponding elements in the drawings are denoted by like or corresponding reference numerals unless otherwise specified. Furthermore, the drawings in the present application and the illustrations are generally not to scale, and are not intended to correspond to actual relative dimensions.

[0033] For purposes of consistency and ease of understanding, the same reference numbers will be used in the drawings and copending detailed description for like and corresponding parts and components, although not every component can be called out in every drawing. Moreover, the features of the various embodiments can be combined with each other, as well as substituted for each other where appropriate, unless explicitly stated otherwise.

[0034] The terms "first", "second", and "third" and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. Moreover, the terms "include", and "have", and the like, are intended to be inclusive in a manner similar to the term "comprise", and / or "comprising". Furthermore, the terms "another" and "one or more" as used in the present application are defined as at least one and thus include individual as well as plural elements.

[0035] The present application will now be described in detail with reference to the drawings and examples.

[0036] Referring to Figures 1-4 One embodiment of the present application provides a transfer apparatus 100, comprising a base 10, a moving placement device 20, a pushing device 30, a pressing member 40 and an image capturing device 50, wherein the moving placement device 20, the pushing device 30, the pressing member 40 and the image capturing device 50 are disposed on the base 10.

[0037] The transfer apparatus 100 in the present embodiment is used for transferring at least one target object 200. In the present embodiment, the target object 200 is exemplified by a die, and in other embodiments, the transfer apparatus 100 can also be used for transferring other target objects, which are not limited herein. Specifically, the transfer apparatus 100 is used for disposing a first carrier sheet 60 and a second carrier sheet 70 on the moving placement device 20, and transferring the target object 200 on the first carrier sheet 60 to the second carrier sheet 70 by the pushing device 30, the pressing member 40 and the image capturing device 50.

[0038] In the present embodiment, the surface of the first carrier sheet 60 facing the second carrier sheet 70 is used for placing at least one target object 200. Specifically, the first carrier sheet 60 has a carrier surface 61 for carrying the target object 200, and a contact surface 62 opposite to the carrier surface 61, wherein the carrier surface 61 faces the second carrier sheet 70. The second carrier sheet 70 has a placement surface 71 for placing the target object 200, wherein the placement surface 71 faces the first carrier sheet 60.

[0039] It is understood that, in the case where the pushing member 31 pushes the target object 200 without puncturing the first carrier sheet 60, the viscosity of the first carrier sheet 60 can be reduced due to the stretching of the surface of the first carrier sheet 60. In this case, if the viscosity of the carrying surface 61 is lower than that of the setting surface 71, the target object 200 is more likely to be separated from the first carrier sheet 60 and stick to the second carrier sheet 70. Of course, in other cases, for example, when the pressing member 30 is not pressing the first carrier sheet 60 as described later, the viscosity of the carrying surface 61 can not be lower than that of the setting surface 71, which is not limited herein.

[0040] In the present embodiment, the second carrier sheet 70 can be a printed circuit board (PCB), and a layer of adhesive, such as glue, can be formed on the printed circuit board. In the present embodiment, the target object 200, i.e., the die, is exemplified by a light emitting diode die, and the first carrier sheet 60 and the second carrier sheet 70 are exemplified by blue tape. In the present embodiment, the first carrier sheet 60 is fixed by an expand ring 63, which includes an inner ring 631 and an outer ring 632, and the periphery of the first carrier sheet 60 is fixed by the inner ring 631 and the outer ring 632.

[0041] It is understood that, by stretching the periphery of the first carrier sheet 60 by the expand ring 63, the first carrier sheet 60 is expanded to reduce its viscosity, so as to facilitate the subsequent transfer of the target object 200.

[0042] Of course, in other embodiments, the first carrier sheet 60 can also be fixed and stretched by other structures, which are not limited herein.

[0043] The moving placement device 20 includes a first placement portion 21 and a second placement portion 22 which are oppositely spaced and can be relatively translated, and the first placement portion 21 and the second placement portion 22 are respectively used for placing the first carrier sheet 60 and the second carrier sheet 70, so that the first carrier sheet 60 and the second carrier sheet 70 are oppositely spaced and can be relatively translated, and the target object 200 on the first carrier sheet 60 is located between the first carrier sheet 60 and the second carrier sheet 70.

[0044] Please refer to Figures 1-3In the present embodiment, the first placement portion 21 has a first bearing area 23 for placing the first bearing sheet 60, and the second placement portion 22 has a second bearing area 24 for placing the second bearing sheet 70. In the present embodiment, the first bearing area 23 is an area that coincides with the plane on which the first bearing sheet 60 is placed when the first bearing sheet 60 is placed on the first placement portion 21, and the second bearing area 24 is an area that coincides with the plane on which the second bearing sheet 70 is placed when the second bearing sheet 70 is placed on the second placement portion 22. In other words, the first bearing area 23 and the second bearing area 24 are each defined as a virtual planar area for reflecting the position of the first bearing sheet 60 and the second bearing sheet 70, respectively, when the first bearing sheet 60 and the second bearing sheet 70 are placed on the mobile placement device 20. It can be understood that when the mobile placement device 20 changes the position of the first bearing sheet 60 and / or the second bearing sheet 70, the position of the first bearing area 23 and the second bearing area 24 will also change accordingly.

[0045] Further, the first placement portion 21 is disposed on one side of the base 10, and the first placement portion 21 includes a first base 211 and a bearing disc 212. The first base 211 is movably disposed in the first direction X relative to the base 10, and the bearing disc 212 is movably disposed on the first base 211 in the second direction Y. In this way, the target object 200 on the expansion ring 63 can be moved back and forth in the first direction X and the second direction Y, thereby facilitating the placement, removal, and translation of the expansion ring 63.

[0046] The second placement portion 22 is disposed on the other side of the base 10, and the second placement portion 22 includes a second base 221 and a clamping member 222. The second base 221 is movably disposed in the first direction X relative to the base 10, and the clamping member 222 is used to clamp the second bearing sheet 70. The clamping member 222 is movably disposed on the second base 221 in the second direction Y. In this way, the second bearing sheet 70 can be moved back and forth in the first direction X and the second direction Y, thereby facilitating the placement, removal, and translation of the second bearing sheet 70.

[0047] The pushing device 30 is movably arranged on the side of the first bearing area 23 away from the second bearing sheet 70. In the embodiment, the pushing device 30 is movable in the horizontal plane and / or the vertical plane. Specifically, before pushing the target object 200, the pushing device 30 is located at a pushing preparation position. When the target object 200 is to be pushed, the pushing device 30 is moved from the pushing preparation position to a pushing working position. After the pushing operation is completed, the pushing device 30 is returned to the pushing preparation position from the pushing working position, and thus moves back and forth. In the embodiment, the target object 200 refers to the die on the first bearing sheet 60, the target object 200 to be pushed refers to the die on the first bearing sheet 60 located directly below the pushing piece 31 when the pushing device 30 is located at the pushing working position, the pushing preparation position refers to the default initial position of the pushing device 30, and the pushing working position refers to the position of the pushing device 30 when pushing the target object 200.

[0048] Specifically, the pushing device 30 comprises a pushing piece 31 and a needle cover 32. The pushing piece 31 can protrude into the cavity 320 of the needle cover 32 to push the target object 200, so as to transfer the target object 200 on the first bearing sheet 60 to the second bearing sheet 70. In the embodiment, the pushing piece 31 can be a needle.

[0049] Specifically, when the pushing piece 31 is to push the target object 200, the cavity 320 of the needle cover 32 becomes a vacuum state. Thus, the bottom of the needle cover 32 is adsorbed to the first bearing sheet 60, so that the bottom of the needle cover 32 is in contact with the contact surface 62 of the first bearing sheet 60. Then, the pushing piece 31 protrudes out of the needle cover 32 and pushes the target object 200, so as to transfer the target object 200 from the first bearing sheet 60 to the second bearing sheet 70. Then, the pushing piece 31 returns to the needle cover 32. It can be understood that, by arranging the pushing piece 31 to protrude into the needle cover 32, when the pushing piece 31 pushes the target object 200, the bottom of the needle cover 32 is in contact with the contact surface 62 of the first bearing sheet 60, so as to prevent the first bearing sheet 60 from being offset due to adhesion to the front end of the pushing piece 31. Thus, the pushing efficiency can be effectively improved.

[0050] Further, referring to Figure 5 , the pressing piece 40 is movably arranged on the side of the first bearing area 23 away from the second bearing area 24, for pressing the first bearing sheet 60, so that the target object 200 to be pushed on the first bearing sheet 60 is close to the second bearing sheet 70.

[0051] It can be understood that, in the embodiment, the pressing piece 40 is movable in the vertical plane.

[0052] Specifically, before the target objects 200 are pushed, the pressing member 40 is located at a pressing preparation position, when the target objects 200 are to be pushed, the pressing member 40 moves from the pressing preparation position to a pressing working position, and after all the target objects 200 on the first bearing sheet 60 are transferred to the second bearing sheet 70, the pressing member 40 returns from the pressing working position to the pressing preparation position. Of course, the pressing member 40 can also return from the pressing working position to the pressing preparation position after each target object 200 is pushed, which is not limited herein. The pressing preparation position refers to the default initial position of the pressing member 40, and the pressing working position refers to the position of the pressing member 40 when pressing the first bearing sheet 60.

[0053] Of course, in other embodiments, the pressing member 40 can also move in the horizontal plane and the vertical plane, which is not limited herein.

[0054] It can be understood that in the present embodiment, as long as the area of the first bearing sheet 60 in contact with the pressing member 40 corresponds to the area of the target objects 200 pushed by the pushing device 30 and is close to the second bearing sheet 70 under the pressing action of the pressing member 40, it is not limited herein.

[0055] Specifically, please refer to Figures 5-8 , the pressing member 40 forms a second notch 411, which is provided on the side of the pressing member 40 close to the first bearing area 23, for the front end of the pushing member 31 of the pushing device 30 to pass through in a predetermined moving direction to push at least one target object 200. In the present embodiment, the second notch 411 is used for the bottom of the push pin cover 32 and the pushing member 31 to pass through. In the present embodiment, the predetermined moving direction is the third direction Z described below, which can also be said to be the direction of the first bearing area 23 towards the second bearing area 24. Of course, in other embodiments, corresponding adjustments can be made according to needs, which are not limited herein.

[0056] Further, the second notch 411 can be a closed notch, such as an "O" shape, a "mouth" shape, etc. In other embodiments, the second notch 411 can also be an open notch, such as a "C", a "F" shape, etc. In the present embodiment, the second notch 411 is a round hole, i.e. an "O" shape. In some embodiments, although the second notch 411 is generally a round hole or other closed notch, the edge of the second notch 411 can include one or more notches. Further, taking the case that the edge of the second notch 411 has one notch as an example, the second notch 411 will be in the shape of "C", and so on. Of course, in other embodiments, the second notch 411 can also have other shapes, which are not limited herein.

[0057] Further, the pressing member 40 comprises a pressing ring 41, a side wall 42 and a mounting portion 43, the pressing ring 41 defines a second gap 411.

[0058] It can be understood that the diameter of the second gap 411 is not particularly limited as long as it can allow at least part of the pushing device 30 to pass through. In the present embodiment, the second gap 411 allows the bottom of the ejector pin cover 32 of the pushing device 30 to pass through without interfering with the pushing of the target object 200 by the pushing member 31. More specifically, the diameter of the second gap 411 is 6 mm or more, and in a preferred embodiment, the diameter of the second gap 411 is 16 mm. In addition, in a specific embodiment, the inner diameter D1 of the pressing ring 41 is 13.5 mm, and the outer diameter D2 is 16.0 mm. In some embodiments, the inner diameter ranges from about 8 mm to about 20 mm, and the ring width D3 of the pressing ring 41 ranges from about 1 mm to about 2 mm.

[0059] It can be understood that by setting the diameter of the second gap 411 to allow the bottom of the ejector pin cover 32 to pass through, the friction between the first carrier sheet 60 and the pressing ring 41 when the expansion ring 63 moves horizontally can be reduced, and the tension of the area of the first carrier sheet 60 that contacts the pressing member 40 can be more stable. Of course, the diameter of the pressing ring 41 can be adjusted accordingly according to requirements, which is not limited here.

[0060] Further, the junction of the bottom surface 412 and the side surface 413 of the pressing ring 41 is formed with a rounded corner (R corner), and the arc angle of the R corner is, for example, 0.5 mm, to prevent the bottom surface 412 of the pressing ring 41 from contacting the first carrier sheet 60 and scratching the first carrier sheet 60 when it moves horizontally. In other embodiments, if the first carrier sheet 60 can withstand the friction of the pressing ring 41 moving on it without being scratched, the junction of the bottom surface 412 and the side surface 413 of the pressing ring 41 can also be formed in other shapes, such as an obtuse angle.

[0061] In the present embodiment, the side wall 42 is provided on the pressing ring 41, and the side wall 42 is a hollow structure. Specifically, the side wall 42 is provided with a first gap 420 on the side away from the first carrier area 23, and the first gap 420 is for the pushing device 30 to pass through. Specifically, the pushing device 30 passes through the first gap 420 to move back and forth between the pushing preparation position and the pushing working position.

[0062] It can be understood that the size of the first gap 420 is not limited as long as it does not interfere with the pushing device 30 passing through the first gap 420 to move back and forth between the pushing preparation position and the pushing working position. In the present embodiment, the first gap 420 extends through both sides of the side wall 42, i.e., the first gap 420 extends from the side of the side wall 42 away from the pressing ring 41 to the pressing ring 41.

[0063] In the embodiment, the preset moving direction is the longitudinal direction (or the length direction of the pushing member 31), and of course, in other embodiments, the preset moving direction can be adjusted according to requirements, which is not limited herein.

[0064] Further, the side wall 42 is provided with a through hole 422.

[0065] In the embodiment, the mounting portion 43 is substantially in the shape of a "C", and the mounting portion 43 is opposite to the pressing ring 41 and is arranged on both sides of the side wall 42.

[0066] Further, the mounting portion 43 is provided with a plurality of mounting holes 430, so as to be mounted on the base 10 by a fixing mechanism (not shown). In the embodiment, the thickness of the mounting portion 43 increases away from the side wall 42, so as to facilitate the mounting holes 430 being arranged on the mounting portion 43, thereby being mounted on the base 10.

[0067] It can be understood that, by arranging the mounting portion 43 in the shape of a "C", the pressing member 40 is provided with the side wall 42 on one side and is not provided with the first gap 420 on the other side, so as to be moved to the pushing working position, i.e. the position directly above the target object 200 to be pushed by the pushing device 30. In addition, the first gap 420 is opposite to the through hole 422 in the side wall 42, so as to facilitate the light sources (not shown) on both sides to pass through the first gap 420 and the through hole 422 respectively, thereby facilitating the lighting when taking pictures.

[0068] Further, before the pressing member 40 presses the first carrier sheet 60, the distance between the first carrier sheet 60 and the second carrier sheet 70 is a predetermined value, for example, 1.5 mm. The pressing member 40 can be moved along the third direction Z and press the first carrier sheet 60, so as to further finely adjust the distance between the first carrier sheet 60 and the second carrier sheet 70. For example, when the pressing member 40 presses the first carrier sheet 60, the pressing member 40 can be pressed downward along the third direction Z, so that the distance between the arrangement region of the target object 200 to be pushed of the first carrier sheet 60 and the second carrier sheet 70 is shortened to a specific value, for example, 0.5 mm or below, for example, 0.2 mm, 0.4 mm, etc.

[0069] Of course, in other embodiments, the pressing member 40 can also adopt other structures, as long as it can press the first carrier sheet 60, so that the arrangement region of the target object 200 to be pushed of the first carrier sheet 60 is close to the second carrier sheet 70, and the specific structure is not limited.

[0070] The image capturing device 50 is fixedly arranged on the base 10 by the fixing assembly 51 and is located on the side of the first bearing area 23 facing away from the second bearing area 24, and is used for taking images of the target objects 200 to be pushed. The fixing assembly 51 can adopt a known fixing structure, which will not be described here.

[0071] The arrangement of the image capturing device 50 is not particularly limited, as long as it can correspond to the arrangement of the target objects 200 and take images of the target objects 200. In the embodiment, the image capturing device 50 can be a camera (CCD), but is not limited thereto.

[0072] When the target objects 200 are pushed, the relative positions of the image capturing device 50 and the pushing device 30 are coaxial, and before the pushing device 30 pushes the target objects 200, the image capturing device 50 can take pictures and images to accurately calculate the positions of the target objects 200, so as to move the target objects 200 to be pushed to the center of the pushing device 30, i.e., the relative positions of the target objects 200 to be pushed, the pushing device 30, the pressing member 40 and the image capturing device 50 are coaxial, which ensures the position accuracy of each target object 200 to be pushed and the pushing member 31 in the pushing device 30 can push the target objects 200 to the center. Since the target objects 200 are crystal grains, the volume is small, about 0.08-0.15mm cuboid, if the pushing member 31 deviates by more than 0.01mm, it is easy to cause the crystal to be turned over or placed in an inclined position during the pushing process.

[0073] Preferably, in the embodiment, the image capturing device 50 takes images of the target objects 200 by direct and front view imaging.

[0074] In the embodiment, the pushing device 30, the pressing member 40 and the image capturing device 50 are located on the same side, of course, in other embodiments, the pushing device 30, the pressing member 40 and the image capturing device 50 can be located on different sides, as long as the pushing device 30 and the pressing member 40 are arranged on the same side. For example, the pushing device 30 and the pressing member 40 are located on a side different from the image capturing device 50, at this time, the image capturing device 50 is located on the side of the second bearing area 24 facing away from the first bearing area 60, and the pushing device 30 and the pressing member 40 are located on the side of the first bearing area 60 facing away from the second bearing area 24.

[0075] It can be understood that when the pushing device 30 is located at the pushing preparation position, the pushing device 30 will not affect the image capturing device 50 to capture the images of the target objects 200 in the pressing member 40. The purpose of moving the pushing device 30 between the pushing preparation position and the pushing working position is that the image capturing device 50 can easily capture the images of the target objects 200 without the need for additional optical reflection.

[0076] Please refer to Figure 9 (a)-(d) for further description of the operation flow of the transferring device 100 to move and transfer the dies.

[0077] Please refer to Figure 9 (a), the image capturing device 50 takes an image and calculates the positional deviation dl between the die 1 and the pushing position O, and the positional deviation d2 between the die 1 and the die 2. It is understood that the pushing position O is always kept unchanged, the positional deviation dl is the distance between the center of the die 1 and the pushing position O, and the positional deviation d2 is the distance between the center of the die 1 and the center of the die 2. The positional deviation d2 can also be referred to as the pitch.

[0078] Next, please refer to Figure 9 (b), according to dl, the die 1 is moved to the pushing position O. It is understood that moving the die 1 to the pushing position O means that the first carrier sheet 60 is moved so that the die 1 overlaps the pushing position O, and the following moving of the die 2 to the pushing position O is the same.

[0079] Next, the pushing device 30, which is moved from the pushing preparation position to the pushing working position, pushes the die 1 to transfer the die 1 from the first carrier sheet 60 to the second carrier sheet 70.

[0080] Please refer to Figure 9 (c), after the die 1 is pushed to the second carrier sheet 70, the placing device 20 is moved according to d2 to move the first carrier sheet 60 to move the die 2 to the pushing position O. However, since the pushing device 30 pushes the die 1, whether the first carrier sheet 60 is punctured or not, it is possible to change the tension or other characteristics of the first carrier sheet 60, so that the positions of other dies (such as the die 2 and the die 3) on the first carrier sheet 60 are changed. Therefore, if the die 2 is only moved according to d2, it is likely that the die 2 cannot be accurately moved to the pushing position O. As shown in Figure 9 (c), the die 2 is only moved according to d2, and cannot be accurately aligned with the pushing position O.

[0081] Next, similar to the operation of Figure 9 (a), the image capturing device 50 takes an image of the die 2 and calculates the positional deviation between the die 2 and the pushing position O, and the positional deviation (i.e. pitch) between the die 2 and the next die to be pushed (for example, the die 3). It should be noted that after the pushing device 30 completes the pushing of the die 1, it returns from the pushing working position to the pushing preparation position to avoid blocking the image capturing device 50 from taking an image of the die 2.

[0082] After that, please refer to Figure 9 (d), similar to Figure 9In the action of (b) in the above-mentioned (b), the moving placing device 20 moves the first carrier sheet 60 to fine-tune the position of the die 2 according to the position deviation between the die 2 and the pushing position O calculated in advance, so that the die 2 is accurately positioned at the pushing position O. The pushing device 30 then enters the pushing working position from the pushing preparation position again to push the die 2.

[0083] The above-mentioned Figure 9 The actions of (a)-(d) above generally include an "image capturing stage" in which the image capturing device 50 captures images of the dies, a "center positioning stage" in which the dies are accurately moved to the pushing position O according to the image capturing results, a "pushing stage" in which the dies are pushed to the second carrier sheet 70, and a "pitch positioning stage" in which the next die is moved according to the pitch obtained in the image capturing stage. In some embodiments, the above-mentioned four stages can be sequentially and repeatedly performed to transfer the dies on the first carrier sheet 60 to the second carrier sheet 70 one by one.

[0084] The transfer device 100 further comprises a first driving device 80 for controlling the movement of the pressing member 40 in the vertical plane. More specifically, the first driving device 80 is configured to control the movement of the pressing member 40 in the third direction Z (i.e. the preset movement direction).

[0085] Further, the pressing member 40 can also move in the horizontal plane and the vertical plane under the control of the first driving device 80. It can be understood that the pressing member 40 can move in the horizontal plane to facilitate maintenance or replacement of the pressing member 40. In other words, in addition to moving in the vertical plane (i.e. the plane containing the first movement direction), the pressing member 40 is also allowed to move in the horizontal plane (e.g. from the maintenance position to the pressing preparation position, or from the pressing preparation position back to the maintenance position) to facilitate maintenance or replacement of the pressing member 40 by personnel.

[0086] More specifically, after the expansion ring 63 is placed on the carrier disc 212, when the target object 200 on the first carrier sheet 60 is to be pushed, the pressing member 40 is moved to the first carrier sheet 60 and presses the first carrier sheet 60 under the control of the first driving device 80, so that the setting area of the target object 200 to be pushed on the first carrier sheet 60 is close to the second carrier sheet 70, and the pressing of the first carrier sheet 60 is continuously maintained until all the target objects 200 on the first carrier sheet 60 are transferred to the second carrier sheet 70, and then the pressing member 40 is moved to the pressing preparation position under the control of the first driving device 80. After the working personnel replace the next expansion ring 63, the above-mentioned actions are repeated.

[0087] The transfer apparatus 100 further includes a second driving device 90 for controlling the movement of the pushing device 30 along a specific trajectory. The specific trajectory can correspond to the position change of the pushing device 30 in the first direction X, the second direction Y, and / or the third direction. For example, the specific trajectory can be substantially arcuate. However, the present disclosure is not limited thereto, and the specific trajectory can also be linear or of other shapes, as long as the specific trajectory can be used for the pushing device 30 to move back and forth between different specific positions (e.g., a pushing preparation position, a pushing working position, etc.).

[0088] It can be understood that, after the image capturing device 50 takes an image of the target object 200 to be pushed, the second driving device 90 controls the pushing device 30 to move from the pushing preparation position to the pushing working position, and after the pushing member 31 pushes the target object 200 through the pressing member 40, the pushing device 30 returns from the pushing working position to the pushing preparation position. After the image capturing device 50 takes an image of the next target object 200 to be pushed, the second driving device 90 again controls the pushing device 30 to move from the pushing preparation position to the pushing working position, and the above process is repeated, so that the target objects 200 on the first carrier sheet 60 are transferred to the second carrier sheet 70.

[0089] The first carrier sheet 60 for placing the target objects 200 has a large area, and when the pushing member 31 directly pushes the target objects 200 on the first carrier sheet 60, the tension is not easy to control and can easily affect the entire first carrier sheet 60. In the present embodiment, when the target objects 200 are pushed, the pressing member 40 moves to contact the contact surface 62 of the first carrier sheet 60 and presses the first carrier sheet 60, so that the setting area of the target objects 200 to be pushed on the first carrier sheet 60 is close to the second carrier sheet 70. In this way, the change of the tension does not easily affect the entire first carrier sheet 60, so that the tension of the setting area of the target objects 200 to be pushed is easy to control.

[0090] Further, due to the material, processing, etc., the distance between the first carrier sheet 60 and the second carrier sheet 70 is large, generally, the distance between the first carrier sheet 60 and the second carrier sheet 70 is more than 1.5 mm, and in the preferred operation distance, i.e. in the preferred scheme, the distance between the first carrier sheet 60 and the second carrier sheet 70 needs to be less than 0.5 mm. In the present embodiment, by arranging the pressing piece 40 to press the first carrier sheet 60, the arrangement area of the target object 200 to be pushed of the first carrier sheet 60 is close to the second carrier sheet 70, so that the distance between the arrangement area of the target object 200 to be pushed of the first carrier sheet 60 and the second carrier sheet 70 is within a predetermined range, for example, less than 0.5 mm, so as to facilitate the pushing piece 31 to push the target object 200. In this way, by arranging the pressing piece 40, the distance between the first carrier sheet 60 and the second carrier sheet 70 can be effectively controlled. Of course, the distance between the arrangement area of the target object 200 to be pushed of the first carrier sheet 60 and the second carrier sheet 70 can be adjusted according to the requirements, which is not limited herein.

[0091] In the present embodiment, since the expansion ring 63 is generally placed manually and fixed by the fixing structure, in addition, there may be tolerances in the inner ring 631 and the outer ring 632 of the expansion ring 63 when combined, if the height control is realized by the expansion ring 63 itself to fine-tune the distance between the first carrier sheet 60 and the second carrier sheet 70, higher cost is required.

[0092] This is because in addition to the large area of the entire expansion ring 63 being difficult to control, it is difficult to ensure that the positions of the manually placed expansion ring 63 are uniform, i.e. there are differences in the placement positions of the expansion ring 63 at each stage, it is difficult to adjust the height of the first carrier sheet 60 to be consistent, so it is difficult to ensure the distance between the first carrier sheet 60 and the second carrier sheet 70. In the present embodiment, the first carrier sheet 60 is pressed by the pressing piece 40, since the pressing position of the pressing piece 40 is fixed, even if there are differences in the placement positions of the expansion ring 63 at each stage, by pressing with the pressing piece 40, the distance between the arrangement area of the target object 200 to be pushed of the first carrier sheet 60 and the second carrier sheet 70 can be consistent, i.e. the height control can be easily realized.

[0093] For example, without the pressing member 40, if the first carrier sheet 60 is not parallel to the second carrier sheet 70 at the initial manual placement, for example, the left side of the first carrier sheet 60 is higher than the right side, thus, when transferring the target object 200 on the left side of the first carrier sheet 60, the distance between the first carrier sheet 60 on the left side and the second carrier sheet 70 is larger, and vice versa, when transferring the target object 200 on the right side, the distance between the first carrier sheet 60 on the right side and the second carrier sheet 70 is smaller, thus, even if the pushing device 30 pushes the target object 200 at the same position, that is, the pushing path is the same, the pushing results are different, that is, the distances that the target object 200 moves to the second carrier sheet 70 after being pushed are different in the two cases. By pressing the first carrier sheet 60 through the pressing member 40, even if the above-mentioned situation occurs, the distances that the target object 200 moves to the second carrier sheet 70 when pushing the target object 200 on the left side and the right side are the same.

[0094] Moreover, since the CCD used in industry needs to take images at high speed, it usually does not have an automatic focusing function. By pressing the first carrier sheet 60 through the pressing ring 41, the setting area of the target object 200 to be pushed on the first carrier sheet 60 is kept at a fixed position, a fixed focal length can be maintained, so that the CCD can take images quickly and clearly.

[0095] In addition, after pushing the target object 200, the pushing device 30 moves to the pushing preparation position to allow the image capturing device 50 to take images to position the next target object 200 to be pushed. Since the first carrier sheet 60 is a flexible film, it is easy to cause position deviation of the first carrier sheet 60 with time and different number of target objects 200. In the present embodiment, by pressing the first carrier sheet 60 through the pressing member 40, the first carrier sheet 60 can be effectively moved smoothly on the horizontal plane, so as to avoid the above-mentioned situation.

[0096] Hereinafter, the method for transferring the target object 200 by the transfer device 100 will be described in combination with Figures 10-16 The method for transferring the target object 200 by the transfer device 100 will be described in combination with

[0097] When the transfer device 100 as shown in Figure 1 is used to perform the target object 200 picking process, an embodiment of the method for transferring the target object 200 of the present application includes the following steps. It should be noted that the preparation and placement of the target object can be performed by known techniques, and thus will not be described here.

[0098] First, please refer to Figure 10The first carrier sheet 60 provided with the target objects 200 is placed on the first placement portion 21, and the second carrier sheet 70 is placed on the second placement portion 22, and the target objects 200 are located between the first carrier sheet 60 and the second carrier sheet 70. At this time, the pushing device 30 is located at the pushing preparation position, and the pressing member 40 is located at the maintenance position. In the embodiment, the pushing device 30 and the pressing member 40 are located on both sides of the axis A. In other words, the pushing preparation position and the maintenance position are located on both sides of the axis A. In some embodiments, the pushing preparation position and the maintenance position can be other positions not on the axis A.

[0099] Next, please refer to Figure 11 , the first placement portion 21 and the second placement portion 22 are translated, so that the target objects 200 on the first carrier sheet 60 are correspondingly moved to the axis A of the image capturing device 50, and the target objects 200 are detected by the image capturing device 50. At this time, the pushing device 30 is located at the pushing preparation position, and the pressing member 40 is located at the pressing preparation position, i.e. the pressing member 40 is coaxial with the image capturing device 50.

[0100] Next, please refer to Figure 12 The pressing member 40 is moved to the first carrier sheet 60 and presses the first carrier sheet 60, so that the setting area of the target objects 200 to be pushed on the first carrier sheet 60 is close to the second carrier sheet 70. At this time, the pushing device 30 is located at the pushing preparation position.

[0101] Next, please refer to Figures 13-14 The pushing device 30 is moved from the pushing preparation position to the pushing working position, i.e. the pushing member 31 pushes the first carrier sheet 60 through the pressing ring 41, and the corresponding target objects 200 are pushed up to directly transfer the target objects 200 to be pushed to the second carrier sheet 70, so as to complete the target object 200 picking process.

[0102] Next, please refer to Figure 15 The pushing member 31 is returned to the position, so that the pushing member 31 is retracted into the thimble cover 32. At this time, the pushing device 30 is located at the pushing working position, and the pressing member 40 presses the first carrier sheet 60.

[0103] Next, please refer to Figure 16 The pushing device 30 returns to the pushing preparation position, and the pressing member 40 presses the first carrier sheet 60, and the first carrier sheet 60 and the second carrier sheet 70 are translated to facilitate the process of pushing the next target object 200.

[0104] Particularly, when the light emitting surface of each target object 200 is covered and arranged on the carrying surface of the first carrying sheet 60 with the aid of the initial carrying sheet of the pre-processing step, the light emitting surface of the target object 200 can be exposed to the arrangement surface of the second carrying sheet 70 when the target object 200 is transferred from the first carrying sheet 60 to the second carrying sheet 70. In addition, since the light emitting surface of the target object 200 is first arranged on the first carrying sheet 60 in reverse, the position of the target object 200 on the first carrying sheet 60 is also arranged in reverse with respect to the position on the initial carrying sheet. Therefore, before the transfer of the target object 200, the position of the target object 200 is flipped according to the flipped arrangement of the target object 200, and the control software is adjusted accordingly.

[0105] The present application is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present application. Further, new technical features can be formed by combining the technical means disclosed in each of the embodiments.

[0106] Explanation of Reference Numerals

[0107] 100: transfer apparatus

[0108] 200: target object

[0109] 10: base

[0110] 20: moving placement device

[0111] 21: first placement portion

[0112] 211: first base

[0113] 212: carrying disc

[0114] 22: second placement portion

[0115] 221: second base

[0116] 222: clamping member

[0117] 23: first carrying area

[0118] 24: second carrying area

[0119] 30: pushing device

[0120] 31: pushing member

[0121] 32: needle cover

[0122] 320: cavity

[0123] 40: pressing member

[0124] 41: pressing ring

[0125] 411: second notch

[0126] 42: side wall

[0127] 420: first notch

[0128] 422: perforation

[0129] 43: mounting portion

[0130] 430: mounting hole

[0131] 50: image capturing device

[0132] 51: fixing assembly

[0133] 60: first carrier sheet

[0134] 61: carrier surface

[0135] 62: contact surface

[0136] 63: expansion ring

[0137] 631: inner ring

[0138] 632: outer ring

[0139] 70: second carrier sheet

[0140] 71: setting surface

[0141] 80: first drive device

[0142] 90: second drive device

[0143] A: axis

[0144] X: first direction

[0145] Y: second direction

[0146] Z: third direction

[0147] D1: inner diameter of pressing ring

[0148] D2: outer diameter of pressing ring

[0149] D3: ring width of pressing ring

[0150] O: pushing position

[0151] d1: positional deviation

[0152] d2: positional deviation

[0153] 1: crystal grain

[0154] 2: crystal grain

[0155] 3: crystal grain

Claims

1. A transfer device for transferring at least one target object from a first carrier plate to a second carrier plate, characterized in that, The transfer device includes: A movable placement device for placing the first carrier piece in a first carrier area and the second carrier piece in a second carrier area, such that the first carrier piece and the second carrier piece face each other and are relatively movable; A pressing member, movably disposed on the side of the first bearing area opposite to the second bearing area, is used to press the first bearing piece along a preset moving direction, causing the area of ​​the target object to be pushed on the first bearing piece to move closer to the second bearing piece. The preset moving direction is the direction from the first bearing area to the second bearing area. A pushing device is movably disposed on the side of the first bearing area opposite to the second bearing area. The pushing device includes a pushing member, the front end of which is used to pass through the pressing member along the preset moving direction to push the target object. The pressing component includes a sidewall, and a first notch is provided on the side of the sidewall away from the first bearing area. The first notch is for the pushing device to pass through. The pressing member forms a second notch, which is located on the side of the pressing member near the first bearing area. The pressing component further includes a pressing ring and a mounting portion, the pressing ring defining the second notch, the mounting portion being disposed opposite to the pressing ring, and the mounting portion and the pressing ring being respectively disposed on both sides of the side wall. A perforation is also formed on the side wall, and the perforation is positioned opposite to the first notch.

2. The transfer device according to claim 1, characterized in that, The bottom surface and side surface of the pressing ring form a rounded corner.

3. The transfer device according to claim 1, characterized in that, The second notch is a circular hole.

4. The transfer device according to claim 1, characterized in that, The transfer device also includes an image capturing device, which is fixedly disposed on the side of the first bearing area away from the second bearing area, for capturing an image of the target object to be pushed.

5. The transfer device according to claim 4, characterized in that, When the pushing device pushes the target object, the relative positions of the pushing device, the pressing member, and the image capturing device are coaxial.

6. The transfer device according to claim 1, characterized in that, The pushing device also includes a push pin cover, and the pushing member can protrude from the push pin cover.

7. The transfer device according to claim 1, characterized in that, The mobile placement device includes a first placement part and a second placement part, which are arranged in a way that is spaced apart from each other and can be moved relative to each other.

Images