Phase shifter and antenna

Abstract

This disclosure provides a phase shifter and antenna, belonging to the field of communication technology. The phase shifter of this disclosure includes: a substrate, a signal electrode, a first reference electrode, and a second reference electrode, all disposed on the substrate, with the first and second reference electrodes located on opposite sides of the signal electrode along its length; an interlayer insulating layer disposed on the side of the layer containing the signal electrode facing away from the substrate; at least one phase control unit, each of the at least one phase control unit including a membrane bridge disposed on the side of the interlayer insulating layer facing away from the substrate; at least a portion of the signal electrode is located in the space enclosed by the substrate and the membrane bridge, and both ends of the membrane bridge overlap with the orthographic projections of the first and second reference electrodes on the substrate; wherein the membrane bridge is divided into a first anchor point region, a second anchor point region, and a functional region located between the first and second anchor point regions; the membrane bridge has a hollow pattern located in the functional region.

Description

Technical Field

[0001] This disclosure belongs to the field of communication technology, specifically relating to a phase shifter and an antenna. Background Technology

[0002] Phase shifters are devices that adjust the phase of a wave. They have wide applications in radar, missile attitude control, accelerators, communications, and instrumentation. Traditional phase shifters mainly use ferrite materials, PIN diodes, or field-effect transistors as switches. Ferrite phase shifters offer high power capacity and low insertion loss, but their complex manufacturing process, high cost, and large size limit their large-scale application. Semiconductor phase shifters are small and operate quickly, but have relatively low power capacity, high power consumption, and are difficult to manufacture. Micro-electromechanical systems (MEMS) phase shifters, compared to traditional phase shifters, offer numerous advantages such as small size, light weight, short control time, low insertion loss, and high power handling capacity, making them highly promising for development and application. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art, and to provide a phase shifter and antenna.

[0004] In a first aspect, embodiments of this disclosure provide a phase shifter, comprising:

[0005] Substrate

[0006] The signal electrode, the first reference electrode, and the second reference electrode are all disposed on the substrate, and the first reference electrode and the second reference electrode are disposed on opposite sides of the length direction of the signal electrode.

[0007] An interlayer insulating layer is disposed on the side of the layer containing the signal electrode that is away from the substrate.

[0008] At least one phase control unit, each of the at least one phase control unit including a film bridge disposed on the side of the interlayer insulating layer opposite to the substrate; the signal electrode is located in the space enclosed by at least a portion of the substrate and the film bridge, and the two ends of the film bridge overlap with the orthographic projections of the first reference electrode and the second reference electrode on the substrate, respectively; wherein,

[0009] The membrane bridge is divided into a first anchor point area, a second anchor point area, and a functional area located between the first anchor point area and the second anchor point area; the membrane bridge has a hollow pattern located in the functional area.

[0010] The hollowed-out pattern is symmetrical about the direction of the extension of the wide vertical line that runs through the signal electrode.

[0011] The membrane bridge includes a bridge surface structure, a first connecting arm, and a second connecting arm. The first connecting arm is located in the first anchor point region; the second connecting arm is located in the second anchor point region. The bridge surface structure includes a first functional part, a second functional part, a third functional part, a first connecting part, and a second connecting part. The first functional part and the second functional part are connected by the first connecting part. The first functional part and the third functional part are connected by the second connecting part. The second functional part is also connected to the first connecting arm. The third functional part is also connected to the second connecting arm. The orthographic projection of the first functional part on the substrate is located on the orthographic projection of the signal electrode on the substrate. The orthographic projection of the second functional part on the substrate is located on the orthographic projection of the first reference electrode on the substrate. The orthographic projection of the third functional part on the substrate is located on the orthographic projection of the second reference electrode on the substrate.

[0012] The hollowed-out pattern is located at least on the first functional part.

[0013] The hollow pattern includes at least a first groove and a second groove located on the first functional part, and the first groove and the second groove are located on both sides of the length direction of the first functional part and penetrate through the thickness direction of the first functional part.

[0014] Both the first connecting portion and the second connecting portion include a first end and a second end disposed opposite to each other; the second end of the first connecting portion is connected to the first groove, and the second end of the second connecting portion is connected to the second groove.

[0015] The hollow pattern further includes a third groove and a fourth groove; the third groove is located on the side of the second functional part opposite to the first functional part and extends through the thickness direction of the second functional part; the fourth groove is located on the side of the third functional part opposite to the first functional part and extends through the thickness direction of the third functional part.

[0016] The first end of the first connecting part is connected to the third groove, and the first end of the second connecting part is connected to the fourth groove.

[0017] The membrane bridge includes a bridge surface structure, a first connecting arm, and a second connecting arm. The first connecting arm is located in the first anchor point region; the second connecting arm is located in the second anchor point region. The bridge surface structure includes a first functional part, a second functional part, a third functional part, a first connecting part, and a second connecting part. The first functional part and the second functional part are connected by the first connecting part. The first functional part and the third functional part are connected by the second connecting part. The second functional part is also connected to the first connecting arm. The third functional part is also connected to the second connecting arm. The orthographic projection of the first functional part on the substrate is located on the orthographic projection of the signal electrode on the substrate. The orthographic projection of the second functional part on the substrate is located on the orthographic projection of the first reference electrode on the substrate. The orthographic projection of the third functional part on the substrate is located on the orthographic projection of the second reference electrode on the substrate.

[0018] The hollowed-out pattern is located at least on the first connecting portion and / or the second connecting portion.

[0019] The hollow pattern includes a first sub-hollow pattern and a second sub-hollow pattern;

[0020] The first connecting portion includes a first meandering line and a second meandering line spaced apart along the length direction of the signal electrode; the second connecting portion includes a third meandering line and a fourth meandering line spaced apart along the length direction of the signal electrode.

[0021] The first meandering line and the second meandering line are both connected between the first functional part and the second functional part, and define the first sub-cutout pattern;

[0022] The third and fourth meandering lines are both connected between the first and third functional parts, and define the second sub-cutout pattern.

[0023] The first meandering line and the second meandering line are arranged in a mirror-symmetrical manner with respect to an axis of symmetry perpendicular to the length direction of the signal electrode.

[0024] The third and fourth meandering lines are arranged in a mirror-symmetrical manner with respect to an axis of symmetry perpendicular to the length direction of the signal electrode.

[0025] The first, second, third, and fourth meandering lines each include a first connecting strip, a second connecting strip, and a meandering portion; the first connecting strip, the second connecting strip, and the meandering portion each include a first end and a second end.

[0026] For any one of the first bend line, the second bend line, the third bend line, and the fourth bend line, the second end of the first connecting strip is connected to the first end of the bend portion, and the second end of the bend portion is connected to the first end of the second connecting strip;

[0027] For the first meandering line and the second meandering line, the first end of the first connecting strip of the two is connected to the second functional part, and the second end of the second connecting strip of the two is connected to the first functional part;

[0028] For the third meandering line and the fourth meandering line, the first end of the first connecting strip of the two is connected to the third functional part, and the second end of the second connecting strip of the two is connected to the first functional part;

[0029] The line connecting the first end of the first connecting strip of the first meandering line and the second end of the second connecting strip of the first meandering line is a first line segment; the line connecting the first end of the first connecting strip of the second meandering line and the second end of the second connecting strip of the second meandering line is a second line segment; the orthographic projections of the meandering portions of the first meandering line and the second meandering line on the substrate are both located within the area defined by the orthographic projections of the first line segment and the second line segment on the substrate; and / or,

[0030] The line connecting the first end of the first connecting strip of the third bend line and the second end of the second connecting strip of the third bend line is the third line segment; the line connecting the first end of the first connecting strip of the fourth bend line and the second end of the second connecting strip of the fourth bend line is the fourth line segment; the orthographic projections of the bends of the third bend line and the fourth bend line on the substrate are both located within the area defined by the orthographic projections of the third line segment and the fourth line segment on the substrate.

[0031] The first, second, third, and fourth meandering lines each include a first connecting strip, a second connecting strip, and a meandering portion; the first connecting strip, the second connecting strip, and the meandering portion each include a first end and a second end.

[0032] For any one of the first bend line, the second bend line, the third bend line, and the fourth bend line, the second end of the first connecting strip is connected to the first end of the bend portion, and the second end of the bend portion is connected to the first end of the second connecting strip;

[0033] For the first meandering line and the second meandering line, the first end of the first connecting strip of the two is connected to the second functional part, and the second end of the second connecting strip of the two is connected to the first functional part;

[0034] For the third meandering line and the fourth meandering line, the first end of the first connecting strip of the two is connected to the third functional part, and the second end of the second connecting strip of the two is connected to the first functional part;

[0035] The line connecting the first end of the first connecting strip of the first meandering line and the second end of the second connecting strip of the first meandering line is a first line segment; the line connecting the first end of the first connecting strip of the second meandering line and the second end of the second connecting strip of the second meandering line is a second line segment; the orthographic projections of the meandering portions of the first meandering line and the second meandering line on the substrate are both located outside the area defined by the orthographic projections of the first line segment and the second line segment on the substrate; and / or,

[0036] The line connecting the first end of the first connecting strip of the third bend line and the second end of the second connecting strip of the third bend line is the third line segment; the line connecting the first end of the first connecting strip of the fourth bend line and the second end of the second connecting strip of the fourth bend line is the fourth line segment; the orthographic projections of the bends of the third bend line and the fourth bend line on the substrate are both located outside the area defined by the orthographic projections of the third line segment and the fourth line segment on the substrate.

[0037] Wherein, the first connecting arm includes a first sub-connecting arm and a second sub-connecting arm; the second connecting arm includes a third sub-connecting arm and a fourth sub-connecting arm; the second functional part and the third functional part each include a first end and a second end disposed opposite to each other along the length direction of the signal electrode;

[0038] The first sub-connecting arm is connected to the first end of the second functional part, and the second sub-connecting arm is connected to the second end of the second functional part;

[0039] The third sub-connecting arm is connected to the first end of the third functional unit, and the fourth sub-connecting arm is connected to the second end of the third functional unit.

[0040] The length directions of the second functional part and the third functional part are the same as the length direction of the signal electrode.

[0041] The second functional part and the third functional part each include a main body, a first extension and a second extension; the length direction of the main body is the same as the length direction of the signal electrode, and the first extension and the second extension are respectively connected to two opposite ends of the length direction of the main body and extend toward the signal electrode;

[0042] The first extension of the second functional part is connected to the first sub-connecting arm, and the second extension of the second functional part is connected to the second sub-connecting arm;

[0043] The first extension of the third functional unit is connected to the third sub-connecting arm, and the second extension of the third functional unit is connected to the fourth sub-connecting arm.

[0044] The hollow pattern includes a first sub-hollow pattern and a second sub-hollow pattern;

[0045] The first sub-cutout pattern penetrates at least a portion of the structure of the second functional part and the first connecting part along a direction perpendicular to the length of the signal electrode;

[0046] The second sub-cutout pattern penetrates at least a portion of the structure of the third functional part and the second connecting part along a direction perpendicular to the length of the signal electrode.

[0047] The phase shifter further includes a mass loading structure disposed on the side of the first functional structure opposite to the signal electrode.

[0048] The phase shifter further includes a first switching unit disposed on the substrate, the first switching unit being used to provide a bias voltage signal to the membrane bridge when a first control signal is received.

[0049] The first switching unit includes a first switching transistor, the first terminal of which is formed as the bias voltage input terminal of the first switching unit, the second terminal of which is formed as the first output terminal of the first switching unit, and the control terminal of which is formed as the first control terminal of the first switching unit. The first switching transistor can conduct the first terminal and the second terminal when the control terminal receives the first control signal.

[0050] The phase shifter further includes a second switching unit disposed on the substrate, the second switching unit being used to electrically connect the signal electrode to the membrane bridge when a second control signal is received.

[0051] The first switching unit is further configured to electrically connect the signal electrode to the membrane bridge when a second control signal is received.

[0052] The number of membrane bridges in at least some of the phase control units is different.

[0053] Secondly, embodiments of this disclosure provide an antenna that includes the phase shifter described above. Attached Figure Description

[0054] Figure 1 This is an example of a phase shifter structure.

[0055] Figure 2 for Figure 1 A cross-sectional view of phase shifter AA'.

[0056] Figure 3 This is a top view of a phase shifter according to an embodiment of the present disclosure.

[0057] Figure 4 This is a top view of the membrane bridge of the phase shifter according to an embodiment of the present disclosure.

[0058] Figure 5 This is a top view of the membrane bridge of another phase shifter according to an embodiment of the present disclosure.

[0059] Figure 6 This is a schematic diagram of the first meandering line according to an embodiment of the present disclosure.

[0060] Figure 7 This is a top view of the membrane bridge of another phase shifter according to an embodiment of the present disclosure.

[0061] Figure 8 A top view of a membrane bridge of another phase shifter according to an embodiment of this disclosure.

[0062] Figure 9 This is another membrane bridge structure for a phase shifter according to an embodiment of the present disclosure.

[0063] Figure 10 This is another membrane bridge structure for a phase shifter according to an embodiment of the present disclosure.

[0064] Figure 11 This is a top view of the membrane bridge of another phase shifter according to an embodiment of the present disclosure.

[0065] Figure 12 This is a top view of another phase shifter according to an embodiment of the present disclosure.

[0066] Figure 13 This is a top view of another phase shifter according to an embodiment of the present disclosure.

[0067] Figure 14 This is a top view of the membrane bridge of the phase shifter according to an embodiment of the present disclosure.

[0068] Figure 15 This is a top view of another phase shifter according to an embodiment of the present disclosure.

[0069] Figure 16 This is a top view of another phase shifter according to an embodiment of the present disclosure. Detailed Implementation

[0070] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0071] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms “an,” “a,” or “the,” and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms “including,” “comprising,” or “containing,” and similar terms mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. The terms “connected,” “linked,” or similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms “upper,” “lower,” “left,” and “right,” etc., are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described objects changes.

[0072] Figure 1 This is an exemplary phase shifter structure; Figure 2 for Figure 1 A cross-sectional view of phase shifter AA'; as shown Figure 1 and 2 As shown, the phase shifter includes a substrate 01, a first reference electrode, a second reference electrode, a signal electrode 10, an interlayer insulating layer 40, multiple phase control units 100, a control unit 200, and a DC bias line 30.

[0073] Specifically, the signal electrode 10 is disposed on the substrate 01 and extends along the first direction X; the first reference electrode and the second reference electrode are disposed on both sides of the extending direction of the signal electrode 10. The extending directions of the first reference electrode, the second reference electrode, and the signal electrode 10 can be the same or intersect with the extending direction of the signal electrode 10. To minimize the size of the phase shifter, it is preferable to set the extending directions of the first reference electrode and the second reference electrode to be the same as the extending direction of the signal electrode 10. In this embodiment, only the example of the first reference electrode, the second reference electrode, and the signal electrode 10 all extending along the first direction X is described. The signal electrode 10, the first reference electrode, and the second reference electrode can be disposed in the same layer and made of the same material. The first reference electrode and the second reference electrode include, but are not limited to, ground electrodes. In this embodiment, the first reference electrode and the second reference electrode are described as ground electrodes. For ease of description, the first reference electrode is referred to as the first ground electrode 21, and the second reference electrode is referred to as the second ground electrode 22. An interlayer insulating layer 40 is disposed on the side of the layer containing the signal electrode 10, the first ground electrode 21, and the second ground electrode 22 that is away from the substrate 01, and the interlayer insulating layer 40 at least covers the signal electrode 10, the first ground electrode 21, and the second ground electrode 22.

[0074] Multiple phase control units 100 are disposed on the side of the interlayer insulating layer 40 facing away from the substrate 01. Each phase control unit 100 includes at least one membrane bridge; each membrane bridge spans between the first ground electrode 21 and the second ground electrode 22. Specifically, each membrane bridge is an arched structure, including a bridge surface structure 11, a first connecting arm 12 and a second connecting arm 13 connecting the two ends of the bridge surface structure. The first connecting arm 12 is located on the interlayer insulating layer above the first reference electrode, and the second connecting arm 13 is located on the interlayer insulating layer 40 above the second reference electrode. The bridge surface structure extends along a second direction Y, wherein the second direction Y intersects with the first direction X, for example, the first direction X and the second direction Y are perpendicular to each other. The signal electrode 10 is located in the space formed between the bridge surface structure and the substrate 01. Each membrane bridge is electrically connected to a corresponding bias current line, and the bias current lines connected to the membrane bridges in each phase control unit 100 are connected together and connected to the control unit 200. When the control unit 200 does not control the bias current line to apply a bias voltage to the membrane bridge, each membrane bridge is suspended above the signal electrode 10 and does not contact the interlayer insulation layer 40 above the signal electrode 10. The bridge surface structure of the membrane bridge has a certain elasticity. The control unit 200 inputs a DC bias voltage to the membrane bridge, which can drive the bridge surface structure of the membrane bridge to move in a direction perpendicular to the signal electrode 10. That is, inputting a DC bias voltage to the membrane bridge can change the distance between the bridge surface structure of the membrane bridge and the signal electrode 10, thereby changing the capacitance of the capacitance formed by the bridge surface structure of the membrane bridge and the signal electrode 10. However, different phase control units 100 include different numbers of membrane bridges, and the distributed capacitance generated by the membrane bridge and the signal electrode 10 after the DC bias voltage is applied is different. Therefore, the corresponding phase shift adjustment is different, that is, each phase control unit 100 adjusts a corresponding phase shift amount. Figure 1 Membrane bridges with the same filling pattern are represented as belonging to the same phase control unit 100. Therefore, when adjusting the phase shift, the voltage applied to the corresponding phase adjustment unit can be controlled according to the magnitude of the phase shift to be adjusted.

[0075] It should be noted that the first direction X mentioned above refers to the length direction of the signal electrode 10, and the second direction Y refers to the width direction of the signal electrode 10.

[0076] The inventors discovered that when an input DC bias voltage of 11 is applied to the membrane bridge, the width of the bridge structure prevents it from moving parallel to the direction where the signal electrode 10 is located, resulting in insufficient phase shift accuracy and poor controllability.

[0077] To address the aforementioned technical problems, the present disclosure provides the following technical solutions.

[0078] Firstly, Figure 3 This is a top view of a phase shifter according to an embodiment of the present disclosure; Figure 4This is a top view of the membrane bridge of the phase shifter according to an embodiment of the present disclosure; as shown Figure 3 and 4 As shown, this embodiment of the present disclosure provides a phase shifter, which includes a substrate 01, a signal electrode 10, a first ground electrode 21, a second ground electrode 22, an interlayer insulating layer 40, and at least one phase control unit. The signal electrode 10, the first ground electrode 21, and the second ground electrode 22 are all disposed on the substrate 01, with the first ground electrode 21 and the second ground electrode 22 located on opposite sides of the length of the signal electrode 10. The interlayer insulating layer 40 is disposed on the side of the layer containing the signal electrode 10 away from the substrate 01. Each phase control unit includes a membrane bridge disposed on the side of the interlayer insulating layer 40 away from the substrate 01. The signal electrode 10 is located in the space enclosed by the substrate 01 and the membrane bridge, and the two ends of the membrane bridge overlap with the orthographic projections of the first ground electrode 21 and the second ground electrode 22 on the substrate 01. In this embodiment, the membrane bridge is divided into a first anchor point area Q2, a second anchor point area Q3, and a functional area Q1 located between the first anchor point area Q2 and the second anchor point area Q3; the membrane bridge has a hollow pattern 116 located in the functional area Q1.

[0079] It should be noted that, in the embodiments of this disclosure, the first anchor point area Q2 refers to the area where the orthographic projections of the membrane bridge and the first ground electrode 21 on the substrate overlap; the second anchor point area Q3 refers to the area where the orthographic projections of the membrane bridge and the second ground electrode 22 on the substrate 01 overlap.

[0080] In the phase shifter of this embodiment, since the membrane bridge has a hollow pattern 116 located in the functional region Q1, which is equivalent to reducing the width of the membrane bridge in the functional region Q1, when a DC bias voltage is applied to the membrane bridge, the functional region Q1 of the membrane bridge can be moved downward in parallel towards the signal electrode 10 as much as possible, thereby ensuring the phase shifting accuracy of the phase shifter.

[0081] In some examples, the cutout pattern 116 on the membrane bridge functional region Q1 is axially symmetrical about the direction of the vertical line extending through the width of the signal electrode 10. This is because the spacing between the signal electrode 10 and the first ground electrode 21 is usually equal to the spacing between the signal electrode 10 and the second ground electrode 22. The distance between the orthographic projection of the membrane bridge and the first ground electrode 21 onto the substrate 01 and the orthographic projection of the signal electrode 10 onto the substrate 01 is equal to the distance between the orthographic projection of the membrane bridge and the second ground electrode 22 onto the substrate 01 and the orthographic projection of the signal electrode 10 onto the substrate 01. Therefore, the axial symmetry of the cutout pattern 116 on the membrane bridge functional region Q1, with the direction of the vertical line extending through the width of the signal electrode 10 as the axis of symmetry, ensures that the electrostatic forces at each position of the membrane bridge are approximately equal when a DC bias voltage is applied. This allows the membrane bridge functional region Q1 to move parallel downwards towards the direction of the signal electrode 10, thereby ensuring the phase shifting accuracy of the phase shifter.

[0082] To better illustrate the structure of the phase shifter according to the embodiments of this disclosure, a detailed description will be provided in conjunction with the accompanying drawings. Furthermore, the structures of the signal electrode 10, the first ground electrode 21, and the second ground electrode 22 are similar to... Figure 1 The structures in the phase shifters shown are roughly the same, so the following mainly focuses on the membrane bridges in the phase shifters.

[0083] The first example, such as Figure 3 and 4 As shown, the membrane bridge structure in the phase shifter includes a bridge deck structure 11, a first connecting arm 12, and a second connecting arm 13; the first connecting arm 12 is located in the first anchor point region Q2; the second connecting arm 13 is located in the second anchor point region Q3; the bridge deck structure 11 includes a first functional part 111, a second functional part 112, a third functional part 113, a first connecting part 114, and a second connecting part 115; the first functional part 111 and the second functional part 112 are connected by the first connecting part 114; the first functional part 111 and the third functional part 113 are connected by the second connecting part 115. 5. Connection; the second functional part 112 is also connected to the first connecting arm 12; the third functional part 113 is also connected to the second connecting arm 13; the orthographic projection of the first functional part 111 on the substrate 01 is located on the orthographic projection of the signal electrode 10 on the substrate 01; the orthographic projection of the second functional part 112 on the substrate 01 is located on the orthographic projection of the first reference electrode on the substrate 01; the orthographic projection of the third functional part 113 on the substrate 01 is located on the orthographic projection of the second reference electrode on the substrate 01; the hollow pattern 116 is located at least on the first functional part 111.

[0084] It should be noted that, referring to Figure 4The first connecting part 114 and the second connecting part 115 have the same structure, both adopting a strip-shaped structure and having the same dimensions. However, in actual products, the first connecting part 114 and the second connecting part 115 may also adopt different structures. Figure 4 Taking only the first connecting portion 114 and the second connecting portion 115 as examples. Furthermore, the widths of the first connecting portion 114 and the second connecting portion 115 along the length direction of the signal electrode 10 are smaller than the width of the first functional portion 111 along the length direction of the signal electrode 10. It should also be noted that, in this embodiment, the width of the first functional portion 111 along the length direction of the signal electrode 10 is greater than its length along the width direction of the signal electrode 10. That is, the width of the first functional portion 111 along the length direction of the signal electrode 10 is equal to its length, and the width of the first functional portion 111 along the width direction of the signal electrode 10 is equal to its width. Simultaneously, the length and width directions of the second functional portion 112 and the third functional portion 113 are the same as the length and width directions of the first functional portion 111, respectively.

[0085] Since the hollow pattern 116 is provided on the first functional part 111, it is equivalent to reducing the width of the membrane bridge in the functional area Q1. Therefore, when a DC bias voltage is applied to the membrane bridge, the functional area Q1 of the membrane bridge can be moved down in parallel to the direction of the signal electrode 10 as much as possible, thereby ensuring the phase shifting accuracy of the phase shifter.

[0086] In some examples, continue to refer to Figure 4 The perforated pattern 116 on the phase shifter membrane bridge structure includes a first groove 1161 and a second groove 1162. The first groove 1161 and the second groove 1162 are respectively located on both sides of the length direction of the first functional part 111 and extend through the thickness direction of the first functional part 111. The first connecting part 114 and the second connecting part 115 each include a first end and a second end disposed opposite to each other. The second end of the first connecting part 114 is connected to the first groove 1161, and the second end of the second connecting part 115 is connected to the second groove 1162. That is, the opening of the first groove 1161 and the opening of the second groove 1162 are opposite to each other. For example, the first groove 1161 and the second groove 1162 are mirror-symmetrically arranged with the length direction of the signal electrode 10 as the axis of symmetry. This configuration ensures that when a DC bias voltage is applied to the membrane bridge, the electrostatic forces at each position of the membrane bridge are approximately equal or equal, thereby enabling the bridge structure 11 to move parallel downwards towards the signal electrode 10 as much as possible, thus ensuring the phase shifting accuracy of the phase shifter.

[0087] Further, continue to refer to Figure 4The openwork pattern 116 on the bridge deck structure 11 includes not only the first groove 1161 and the second groove 1162, but also a third groove 1163 and a fourth groove 1164. The third groove 1163 is located on the side of the second functional part 112 opposite to the first functional part 111, and extends through the thickness direction of the second functional part 112. The fourth groove 1164 is located on the side of the third functional part 113 opposite to the first functional part 111, and extends through the thickness direction of the third functional part 113. The first end of the first connecting part 114 is connected within the third groove 1163, and the first end of the second connecting part 115 is connected within the fourth groove 1164. In other words, the first connecting part 114 connects between the first groove 1161 and the third groove 1163; the second connecting part 115 connects between the second groove 1162 and the fourth groove 1164. In some examples, the first groove 1161, the second groove 1162, the third groove 1163, and the fourth groove 1164 have the same shape and size. Furthermore, as... Figure 4 As shown, the widths of the first connecting portion 114 and the second connecting portion 115 in the length direction of the signal electrode 10 are both smaller than the width of the first slot portion 1161 in the length direction of the signal electrode 10. In this case, by providing the first slot portion 1161 and the second slot portion 1162 on the first functional portion 111, providing the third slot portion 1163 on the second functional portion 112, and providing the fourth slot portion 1164 on the third functional portion 113, the overall bridge width of the functional area Q1 of the bridge structure 11 is reduced. Furthermore, the first connecting portion 114 is connected between the first slot portion 1161 and the third slot portion 1163, and the second connecting portion 115 is connected between the second slot portion 1162 and the fourth slot portion 1164. This ensures that when a DC bias voltage is applied to the membrane bridge, the electrostatic forces at each position of the bridge structure 11 are approximately equal or equal. This allows the bridge structure 11 to move downwards in parallel towards the direction of the signal electrode 10, thereby ensuring the phase shifting accuracy of the phase shifter.

[0088] In some examples, the bridge deck structure 11, the first connecting arm 12, and the second connecting arm 13 of the membrane bridge are integrally formed. In this case, the bridge deck structure 11, the first connecting arm 12, and the second connecting arm 13 can be formed in a single patterning process, that is, using the same material, for example, the bridge deck structure 11, the first connecting arm 12, and the second connecting arm 13 are all made of metal. Of course, the materials of the bridge deck structure 11, the first connecting arm 12, and the second connecting arm 13 can also be different, for example, the bridge deck structure 11 is made of metal, and the first connecting arm 12 and the second connecting arm 13 are both made of insulating material.

[0089] In some examples, continue to refer to Figure 3To further improve the phase adjustment capability of the phase shifter, the phase shifter also includes a first switching unit 300 disposed on the substrate 01. The first switching unit 300 is used to provide a bias voltage signal to the membrane bridge when a first control signal is received. Since the phase shifter provided in this embodiment of the present invention also includes a first switching unit 300 disposed on the substrate 01, the first switching unit 300 can perform individual potential control on the membrane bridge of the phase shifter under the control of the first control signal. Thus, when multiple phase shifters provided in multiple embodiments of the present invention are used as multiple phase shifting units to form a complex control circuit (such as an array antenna), a first control signal can be sent to each first switching unit 300 to independently regulate the working state of different phase shifting units, accurately regulate the phase shift degree, and realize circuit-level control of the unit device.

[0090] This disclosure does not specifically limit the circuit structure of the first switching unit 300. For example, as one embodiment of this disclosure, the first switching unit 300 has a bias voltage input terminal, a first output terminal, and a first control terminal. The bias voltage input terminal is used to receive a DC bias voltage signal, and the first output terminal is electrically connected to the membrane bridge through a DC bias line. Furthermore, the first switching unit 300 can connect the first output terminal to the bias voltage input terminal when the first control terminal receives the first control signal. To simplify the process, preferably, the DC bias line and the membrane bridge are disposed in the same layer, that is, formed in the same patterning step.

[0091] In some examples, the circuit structure of the first switching unit 300 can be implemented by a thin film transistor (TFT). For example, the first switching unit 300 includes a first switching transistor, the first terminal of which is formed as the DC bias voltage input terminal of the first switching unit 300, the second terminal of which is formed as the first output terminal of the first switching unit 300 (i.e., the second terminal of the first switching transistor is electrically connected to the film bridge through a DC bias line), and the control terminal of the first switching transistor is formed as the first control terminal of the first switching unit 300. The first switching transistor can conduct the first terminal and the second terminal when the control terminal receives the first control signal.

[0092] The inventors also discovered in their research that existing phase shifters often suffer from hysteresis due to residual charge during frequent charging and discharging, resulting in inconsistent initial capacitance values ​​for each phase shifting unit during operation and a decrease in accuracy.

[0093] To solve the above-mentioned technical problems and improve the control accuracy of the phase shifter, as a preferred embodiment of this disclosure, such as... Figure 3As shown, the phase shifter includes not only the structure described above but also a second switching unit 400 disposed on the substrate 01. The second switching unit 400 is used to electrically connect the signal line to the membrane bridge when a second control signal is received. Specifically, as shown... Figure 3 As shown, the second switching unit 400 can be electrically connected to the signal line via a connecting line and to the membrane bridge via a DC bias line.

[0094] In the phase shifter provided in this embodiment, the second switching unit 400 can electrically connect the signal line to the membrane bridge when receiving the second control signal, thereby forming a residual charge release circuit between the signal line and the membrane bridge. This solves the hysteresis effect caused by residual charge during frequent charging and discharging of the phase shifter, improves the consistency of the initial capacitance value of each phase shifter during operation, and thus improves the control accuracy of the phase shifter on the phase of the radio frequency signal.

[0095] To improve the process compatibility of the phase shifter, as another preferred embodiment of this disclosure, such as... Figure 3 As shown, the first switching unit 300 not only has the above-mentioned functions, but can also be directly used to electrically connect the signal line to the membrane bridge when the second control signal is received.

[0096] In some examples, the circuit structure of the first switching unit 300 can be a MEMS single-pole double-throw switch, which is used to select the working circuit, switch the working state, and select between the external driving circuit and the residual charge release circuit.

[0097] The second example, Figure 5 This is a top view of the membrane bridge of another phase shifter according to an embodiment of this disclosure; as shown Figure 5 As shown, the structure of this phase shifter is similar to... Figure 3The phase shifter structure in the first example shown is largely the same, differing only in the membrane bridge. The membrane bridge of this phase shifter will be described in detail below. The membrane bridge includes a bridge deck structure 11, a first connecting arm 12, and a second connecting arm 13. The first connecting arm 12 is located in the first anchor point region Q2; the second connecting arm 13 is located in the second anchor point region Q3. The bridge deck structure 11 includes a first functional part 111, a second functional part 112, a third functional part 113, a first connecting part 114, and a second connecting part 115. The first functional part 111 and the second functional part 112 are connected by the first connecting part 114; the first functional part 111 and the third functional part 113 are connected by the second connecting part 115. The second functional part 111... 2 is also connected to the first connecting arm 12; the third functional part 113 is also connected to the second connecting arm 13; the orthographic projection of the first functional part 111 on the substrate 01 is located on the orthographic projection of the signal electrode 10 on the substrate 01; the orthographic projection of the second functional part 112 on the substrate 01 is located on the orthographic projection of the first reference electrode on the substrate 01; the orthographic projection of the third functional part 113 on the substrate 01 is located on the orthographic projection of the second reference electrode on the substrate 01; the hollow pattern 116 is located at least on the first connecting part 114 and / or the second connecting part 115. It should be noted that... Figure 5 The illustration uses the example of the hollowed-out pattern 116 located on the first connecting portion 114 and the second connecting portion 115, but this does not constitute a limitation on the scope of protection of the embodiments disclosed herein. In the following description, the example of the hollowed-out pattern 116 located on the first connecting portion 114 and the second connecting portion 115 will be used for illustration.

[0098] Since a hollow pattern 116 is formed on the first connecting part 114 and the second connecting part 115, the overall width of the bridge structure 11 can be reduced. This ensures that when a DC bias voltage is applied to the membrane bridge, the electrostatic force at each position of the bridge structure 11 is approximately equal or equal. This enables the bridge structure 11 to move downward in parallel towards the direction of the signal electrode 10, thereby ensuring the phase shifting accuracy of the phase shifter.

[0099] In some examples, Figure 6 This is a schematic diagram of the first meandering line 116a1 according to an embodiment of this disclosure; as shown Figure 5 and 6As shown, the cutout pattern 116 includes a first sub-cutout pattern 116a and a second sub-cutout pattern 116b; the first connecting portion 114 includes a first meandering line 116a1 and a second meandering line 116a2 spaced apart along the length direction of the signal electrode 10; the second connecting portion 115 includes a third meandering line 116b1 and a fourth meandering line 116b2 spaced apart along the length direction of the signal electrode 10. The first meandering line 116a1 and the second meandering line 116a2 are both connected between the first functional portion 111 and the second functional portion 112, and define the first sub-cutout pattern 116a. The third meandering line 116b1 and the fourth meandering line 116b2 are both connected between the first functional portion 111 and the third functional portion 113, and define the second sub-cutout pattern 116b. In this case, the overall width of the bridge deck structure 11 can be effectively reduced, ensuring that the electrostatic forces at each position of the bridge deck structure 11 are approximately equal when a DC bias voltage is applied to the membrane bridge. This allows the bridge deck structure 11 to move downwards in parallel towards the signal electrode 10, thereby ensuring the phase shifting accuracy of the phase shifter. Furthermore, the use of a meandering line structure for both the first connecting portion 114 and the second connecting portion 115 further ensures the toughness of the bridge deck structure 11 during the downward pull-down process, thus guaranteeing the stability of the bridge deck structure 11.

[0100] In some examples, continue to refer to Figure 5 The first and second meandering lines 116a1 and 116a2 are arranged in mirror symmetry about an axis of symmetry perpendicular to the length direction of the signal electrode 10 (i.e., the width of the signal electrode 10). The third and fourth meandering lines 116b1 and 116b2 are also arranged in mirror symmetry about an axis of symmetry perpendicular to the length direction of the signal electrode 10. In this case, when a DC bias voltage is applied to the membrane bridge, the first connection portion 114 and the second connection portion 115 of the membrane bridge structure can be subjected to uniform force under the action of electrostatic force, thereby ensuring the accuracy of phase shifting.

[0101] In some examples, continue to refer to Figure 5The first meandering line 116a1, the second meandering line 116a2, the third meandering line 116b1, and the fourth meandering line 116b2 all include a first connecting strip 1165, a second connecting strip 1166, and a meandering portion 1167; the first connecting strip 1165, the second connecting strip 1166, and the meandering portion 1167 all include a first end and a second end. Specifically, for the first meandering line 116a1, the first end of the first connecting strip 1165 is connected to the second functional part 112, the second end of the first connecting strip 1165 is connected to the first end of the meandering portion 1167, the second end of the meandering portion 1167 is connected to the first end of the second connecting strip 1166, and the second end of the second connecting strip 1166 is connected to the first functional part 111. For the second meandering line 116a2, the first end of the first connecting strip 1165 is connected to the second functional part 112, the second end of the first connecting strip 1165 is connected to the first end of the meandering part 1167, the second end of the meandering part 1167 is connected to the first end of the second connecting strip 1166, and the second end of the second connecting strip 1166 is connected to the first functional part 111. For the third meandering line 116b1, the first end of the first connecting strip 1165 is connected to the third functional part 113, the second end of the first connecting strip 1165 is connected to the first end of the meandering part 1167, the second end of the meandering part 1167 is connected to the first end of the second connecting strip 1166, and the second end of the second connecting strip 1166 is connected to the first functional part 111. For the fourth meandering line 116b2, the first end of the first connecting strip 1165 is connected to the third functional part 113, the second end of the first connecting strip 1165 is connected to the first end of the meandering part 1167, the second end of the meandering part 1167 is connected to the first end of the second connecting strip 1166, and the second end of the second connecting strip 1166 is connected to the first functional part 111. For example... Figure 6 As shown, the extension directions of the first connecting strip 1165 and the second connecting strip 1166 in the first meandering line 116a1, the second meandering line 116a2, the third meandering line 116b1, and the fourth meandering line 116b2 all intersect with the length direction of the signal electrode 10, for example, perpendicular to the length direction of the signal electrode 10. The meandering portion 1167 in the first meandering line 116a1, the second meandering line 116a2, the third meandering line 116b1, and the fourth meandering line 116b2 all include at least two line segments with different extension directions. For example, the meandering portion 1167 can be any shape such as a square wave, a sharp corner, a wave, or a "bottle" shape. Figure 6 Taking the meandering part 1167 as an example, which is "bottle-shaped", this does not constitute a limitation on the scope of protection of the embodiments disclosed herein.

[0102] Continue to refer to Figure 5The line connecting the first end of the first connecting strip 1165 of the first meandering line 116a1 and the second end of the second connecting strip 1166 of the first meandering line 116a1 is a first line segment; the line connecting the first end of the first connecting strip 1165 of the second meandering line 116a2 and the second end of the second connecting strip 1166 of the second meandering line 116a2 is a second line segment; the orthographic projection of the meandering portion 1167 of the first meandering line 116a1 and the second meandering line 116a2 on the substrate 01 is located within the area defined by the orthographic projection of the first line segment and the second line segment on the substrate 01. The line connecting the first end of the first connecting strip 1165 of the third bend line 116b1 and the second end of the second connecting strip 1166 of the third bend line 116b1 is the third line segment; the line connecting the first end of the first connecting strip 1165 of the fourth bend line 116b2 and the second end of the second connecting strip 1166 of the fourth bend line 116b2 is the fourth line segment; the orthographic projections of the bend portions 1167 of the third bend line 116b1 and the fourth bend line 116b2 on the substrate 01 are both located within the area defined by the orthographic projections of the third line segment and the fourth line segment on the substrate 01. In this case, the first connecting portion 114, which is composed of the first meandering line 116a1 and the second meandering line 116a2, and the second connecting portion 115, which is composed of the third meandering line 116b1 and the fourth meandering line 116b2, balance the electrostatic forces on the first connecting portion 114 and the second connecting portion 115 when a DC bias voltage is applied to the membrane bridge, so as to ensure that the bridge structure 11 moves down parallel to the side where the signal electrode 10 is located as much as possible.

[0103] It should be noted that in some examples, only the orthographic projections of the bend portions 1167 of the first bend line 116a1 and the second bend line 116a2 onto the substrate 01 may be located within the area defined by the orthographic projections of the first line segment and the second line segment onto the substrate 01. Alternatively, only the orthographic projections of the bend portions 1167 of the third bend line 116b1 and the fourth bend line 116b2 onto the substrate 01 may be located within the area defined by the orthographic projections of the third line segment and the fourth line segment onto the substrate 01. These will not be listed and described in detail in the embodiments of this disclosure.

[0104] In some examples, Figure 7 This is a top view of the membrane bridge of another phase shifter according to an embodiment of the present disclosure; as shown Figure 7 As shown, the structure of this phase shifter is similar to... Figure 5The structures are largely the same, the only difference being that the orthographic projections of the bends 1167 of the first bend 116a1 and the second bend 116a2 onto the substrate 01 are both outside the area defined by the orthographic projections of the first and second line segments onto the substrate 01. Similarly, the orthographic projections of the bends 1167 of the third bend 116b1 and the fourth bend 116b2 onto the substrate 01 are also outside the area defined by the orthographic projections of the third and fourth line segments onto the substrate 01. In this case, the first connecting portion 114, formed by the first bend 116a1 and the second bend 116a2, and the second connecting portion 115, formed by the third bend 116b1 and the fourth bend 116b2, balance each other's electrostatic forces when a DC bias voltage is applied to the membrane bridge, thereby ensuring that the bridge structure 11 moves parallel downwards towards the side where the signal electrode 10 is located.

[0105] It should be noted that in some examples, only the orthographic projections of the bend portions 1167 of the first bend line 116a1 and the second bend line 116a2 onto the substrate 01 may be located outside the area defined by the orthographic projections of the first line segment and the second line segment onto the substrate 01. Alternatively, only the orthographic projections of the bend portions 1167 of the third bend line 116b1 and the fourth bend line 116b2 onto the substrate 01 may be located outside the area defined by the orthographic projections of the third line segment and the fourth line segment onto the substrate 01. These will not be listed and described in detail in the embodiments of this disclosure.

[0106] The third example, Figure 8 Another phase shifter membrane bridge top view according to an embodiment of this disclosure; as shown in the figure. Figure 8 As shown, the structure of this phase shifter is similar to... Figure 5 The structures shown are largely the same, differing only in the structure of the first connecting arm 12 and the second connecting arm 13; as follows Figure 8As shown, the first connecting arm 12 of this type of phase shifter includes a first sub-connecting arm 121 and a second sub-connecting arm 122; the second connecting arm 13 includes a third sub-connecting arm 131 and a fourth sub-connecting arm 132. Both the second functional unit 112 and the third functional unit 113 include a first end and a second end disposed opposite to each other along the length direction of the signal electrode 10. The first sub-connecting arm 121 is connected to the first end of the second functional unit 112, and the second sub-connecting arm 122 is connected to the second end of the second functional unit 112; the third sub-connecting arm 131 is connected to the first end of the third functional unit 113, and the fourth sub-connecting arm 132 is connected to the second end of the third functional unit 113. In this case, the phase shifter fixes the bridge structure 11 through the first sub-connecting arm 121, the second sub-connecting arm 122, the third sub-connecting arm 131, and the fourth sub-connecting arm 132, that is, it fixes the bridge structure 11 through a four-point fixing method, which can successively reduce the driving voltage of the phase shifter, improve stability, and reduce power consumption.

[0107] akin, Figure 9 Another membrane bridge structure for a phase shifter according to an embodiment of this disclosure, such as... Figure 9 As shown, the bridge structure 11 of the phase shifter and Figure 8 The bridge deck structure 11 shown is the same, and the first connecting arm 12 and the second connecting arm 13 are the same. Figure 8 The structure shown is the same, that is, the bridge deck structure 11 is fixed using the same four-point fixing method. However, the line connecting the centers of the first sub-connecting arm 121 and the second sub-connecting arm 122 is parallel to the extension direction of the second functional unit 112, but not on the same straight line; similarly, the line connecting the centers of the third sub-connecting arm 131 and the fourth sub-connecting arm 132 is parallel to the extension direction of the third functional unit 113, but not on the same straight line. This can reduce the driving voltage of the phase shifter, improve stability, and reduce power consumption. The specific structure of this type of phase shifter is the same as described above. Figure 8 The structures are largely the same, so I will not repeat them here.

[0108] akin, Figure 10 Another membrane bridge structure for a phase shifter according to an embodiment of this disclosure, such as... Figure 10 As shown, the bridge structure 11 of the phase shifter and Figure 7 The bridge deck structure 11 shown is the same, and the first connecting arm 12 and the second connecting arm 13 are the same. Figure 8 The structure shown is the same, that is, the bridge deck structure 11 is also fixed using the four-point fixing method, which can reduce the driving voltage of the phase shifter, improve stability, and reduce power consumption. The specific structure of this type of phase shifter is the same as described above. Figure 7 The structures are largely the same, so I will not repeat them here.

[0109] akin, Figure 11 This is a top view of the membrane bridge of another phase shifter according to an embodiment of the present disclosure; as shown Figure 11 As shown, the bridge structure 11 of the phase shifter and Figure 10 The bridge deck structure 11 shown is the same, and the first connecting arm 12 and the second connecting arm 13 are the same. Figure 9 The structure shown is the same, that is, the bridge deck structure 11 is also fixed using the four-point fixing method. This can reduce the driving voltage of the phase shifter, improve stability, and reduce power consumption. The specific structure of this type of phase shifter is the same as described above. Figure 10 The structures are largely the same, so I will not repeat them here.

[0110] The fourth example, Figure 12 This is a top view of another phase shifter according to an embodiment of this disclosure; as shown Figure 12 As shown, the first connecting arm 12 and the second connecting arm 13 of the phase shifter are connected to... Figure 8 The structure shown is the same, that is, the bridge deck structure 11 is also fixed using the four-point fixing method. The difference is that in this phase shifter, the perforated pattern 116 includes a first sub-perforated pattern 116a and a second sub-perforated pattern 116b. The first sub-perforated pattern 116a penetrates part of the structure of the second functional part 112 and the first connecting part 114; the second sub-perforated pattern 116b penetrates part of the structure of the third functional part 113 and the second connecting part 115. In other words, openings are formed in the second functional part 112 and the first connecting part 114, and openings are formed in the third functional part 113 and the second connecting part 115. This reduces the driving voltage of the phase shifter, improves stability, and reduces power consumption. The specific structure of this type of phase shifter is the same as described above. Figure 8 The structures are largely the same, so I will not repeat them here.

[0111] It should be noted that, Figure 12 The phase shifter shown in the diagram exhibits a membrane bridge that instantly engages upon application of the driving voltage without oscillation, reaching stability after approximately 0.4 μs. This indicates that the response time of this type of phase shifter is 0.4 μs, which is about ten times faster than that of traditional phase shifters, demonstrating a significant improvement.

[0112] The fifth example, Figure 13 This is a top view of another phase shifter according to an embodiment of this disclosure; as shown Figure 13 As shown, this membrane bridge structure is largely the same as the membrane bridge structure shown in Figure 12, except that a mass loading structure is added. This mass loading structure is located on the side of the first functional unit 111 away from the signal electrode 10. By setting the mass loading structure, deformation is minimized when a voltage is applied to the membrane bridge structure, thereby improving the transient response stability of the membrane bridge. It should be noted that this type of phase shifter can also be used in... Figure 3-12 Any of the methods can be used to add a mass loading structure, which will not be listed here.

[0113] It should be noted that, Figure 13The phase shifter shown exhibits a membrane bridge that instantly engages upon application of the driving voltage without oscillation, reaching stability after approximately 0.4 μs. This indicates that the response time of this phase shifter structure is 0.4 μs. Furthermore, by increasing the mass loading structure, the membrane bridge has a larger engagement area and greater stability, ensuring better operational stability of the entire device during the initial stage of driving voltage application.

[0114] In some examples, Figure 14 This is a top view of the membrane bridge of the phase shifter according to an embodiment of the present disclosure; as shown Figure 14 As shown, the width and depth of the first sub-cutout pattern 116a and the second sub-cutout pattern 116b are W1 and L1, respectively; the maximum width and length of the bridge structure 11 are W2 and L2, respectively. To ensure response speed while reducing device instability, certain requirements are placed on the ratios of W1 and W2 and L1 and L2. For example: 0.2 <L1 / L2<0.4,0.1<W1 / W2<0.3。

[0115] In some examples, Figure 15 This is a top view of another phase shifter according to an embodiment of this disclosure; as shown Figure 15 As shown, the mass loading structure may include multiple sub-mass loading blocks. For example, multiple sub-mass loading blocks are evenly distributed on the first functional unit 111. Figure 15 Taking the mass loading structure comprising 5 sub-mass loading blocks as an example, one sub-mass loading block is set at each of the four corners and the center of the first functional unit 111.

[0116] In some examples, Figure 16 This is a top view of another phase shifter according to an embodiment of this disclosure; as shown Figure 16 As shown, the phase shifter and Figure 13 The phase-shifting structures shown are largely the same, the only difference being the shapes of the first sub-cutout pattern 116a and the second sub-cutout pattern 116b. Figure 16 The first sub-cutout pattern 116a and the second sub-cutout pattern 116b of the phase shifter have trapezoidal openings, and the rest of the structure is the same as... Figure 13 The phase shifters shown are the same, so they will not be described again here. Of course, 16 only shows an exemplary shape of the first sub-cutout pattern 116a and the second sub-cutout pattern 116b. In actual products, the shapes of the first sub-cutout pattern 116a and the second sub-cutout pattern 116b are not limited to this, and will not be listed one by one here.

[0117] Secondly, embodiments of this disclosure provide an antenna that includes any of the phase shifters described above.

[0118] Since the antenna in this embodiment includes the phase shifter described above, and since the membrane bridge of the phase shifter has a hollow pattern 116 formed on the functional area Q1, which is equivalent to reducing the width of the membrane bridge in the functional area Q1, when a DC bias voltage is applied to the membrane bridge, the functional area Q1 of the membrane bridge can be moved downward in parallel towards the direction of the signal electrode 10 as much as possible, thereby ensuring the phase shifting accuracy of the phase shifter and improving the performance of the antenna.

[0119] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A phase shifter comprising: Substrate The signal electrode, the first reference electrode, and the second reference electrode are all disposed on the substrate, and the first reference electrode and the second reference electrode are disposed on opposite sides of the length direction of the signal electrode. An interlayer insulating layer is disposed on the side of the layer containing the signal electrode that is away from the substrate. At least one phase control unit, each of the at least one phase control unit including a film bridge disposed on the side of the interlayer insulating layer opposite to the substrate; At least a portion of the signal electrode is located within the space enclosed by the substrate and the membrane bridge, and both ends of the membrane bridge overlap with the orthographic projections of the first reference electrode and the second reference electrode onto the substrate, respectively; wherein, The membrane bridge is divided into a first anchor point area, a second anchor point area, and a functional area located between the first anchor point area and the second anchor point area; the membrane bridge has a hollow pattern located in the functional area; The membrane bridge includes a bridge structure, a first connecting arm, and a second connecting arm. The first connecting arm is located in the first anchor point region, and the second connecting arm is located in the second anchor point region. The bridge structure includes a first functional part, a second functional part, a third functional part, a first connecting part, and a second connecting part. The first functional part and the second functional part are connected by the first connecting part. The first functional part and the third functional part are connected by the second connecting part. The second functional part is also connected to the first connecting arm. The third functional part is also connected to the second connecting arm. The orthographic projection of the first functional part on the substrate is located on the orthographic projection of the signal electrode on the substrate. The orthographic projection of the second functional part on the substrate is located on the orthographic projection of the first reference electrode on the substrate. The orthographic projection of the third functional part on the substrate is located on the orthographic projection of the second reference electrode on the substrate.

2. The phase shifter of claim 1, wherein, The hollowed-out pattern is symmetrical about the direction of the extension of the wide vertical line that runs through the signal electrode.

3. The phase shifter according to claim 1, wherein, The hollowed-out pattern is located at least on the first functional part.

4. The phase shifter of claim 3, wherein, The hollow pattern includes at least a first groove and a second groove located on the first functional part, and the first groove and the second groove are located on both sides of the length direction of the first functional part and penetrate through the thickness direction of the first functional part. Both the first connecting portion and the second connecting portion include a first end and a second end disposed opposite to each other; the second end of the first connecting portion is connected to the first groove, and the second end of the second connecting portion is connected to the second groove.

5. The phase shifter of claim 4, wherein, The hollow pattern also includes a third groove and a fourth groove; the third groove is located on the side of the second functional part opposite to the first functional part and extends through the thickness direction of the second functional part; the fourth groove is located on the side of the third functional part opposite to the first functional part and extends through the thickness direction of the third functional part. The first end of the first connecting part is connected to the third groove, and the first end of the second connecting part is connected to the fourth groove.

6. The phase shifter according to claim 1, wherein, The hollowed-out pattern is located at least on the first connecting portion and / or the second connecting portion.

7. The phase shifter of claim 6, wherein, The hollow pattern includes a first sub-hollow pattern and a second sub-hollow pattern; The first connecting portion includes a first meandering line and a second meandering line spaced apart along the length direction of the signal electrode; the second connecting portion includes a third meandering line and a fourth meandering line spaced apart along the length direction of the signal electrode. The first meandering line and the second meandering line are both connected between the first functional part and the second functional part, and define the first sub-cutout pattern; The third and fourth meandering lines are both connected between the first and third functional parts, and define the second sub-cutout pattern.

8. The phase shifter according to claim 7, wherein, The first meandering line and the second meandering line are arranged in a mirror symmetrical manner with respect to an axis of symmetry perpendicular to the length direction of the signal electrode; The third and fourth meandering lines are arranged in a mirror-symmetrical manner with respect to an axis of symmetry perpendicular to the length direction of the signal electrode.

9. The phase shifter according to claim 7, wherein, The first meandering line, the second meandering line, the third meandering line, and the fourth meandering line all include a first connecting strip, a second connecting strip, and a meandering portion; the first connecting strip, the second connecting strip, and the meandering portion all include a first end and a second end; For any one of the first bend line, the second bend line, the third bend line, and the fourth bend line, the second end of the first connecting strip is connected to the first end of the bend portion, and the second end of the bend portion is connected to the first end of the second connecting strip; For the first meandering line and the second meandering line, the first end of the first connecting strip of the two is connected to the second functional part, and the second end of the second connecting strip of the two is connected to the first functional part; For the third meandering line and the fourth meandering line, the first end of the first connecting strip of the two is connected to the third functional part, and the second end of the second connecting strip of the two is connected to the first functional part; The line connecting the first end of the first connecting strip of the first meandering line and the second end of the second connecting strip of the first meandering line is a first line segment; the line connecting the first end of the first connecting strip of the second meandering line and the second end of the second connecting strip of the second meandering line is a second line segment; the orthographic projections of the meandering portions of the first meandering line and the second meandering line on the substrate are both located within the area defined by the orthographic projections of the first line segment and the second line segment on the substrate. And / or, The line connecting the first end of the first connecting strip of the third bend line and the second end of the second connecting strip of the third bend line is the third line segment; the line connecting the first end of the first connecting strip of the fourth bend line and the second end of the second connecting strip of the fourth bend line is the fourth line segment; the orthographic projections of the bends of the third bend line and the fourth bend line on the substrate are both located within the area defined by the orthographic projections of the third line segment and the fourth line segment on the substrate.

10. The phase shifter according to claim 7, wherein, The first meandering line, the second meandering line, the third meandering line, and the fourth meandering line all include a first connecting strip, a second connecting strip, and a meandering portion; the first connecting strip, the second connecting strip, and the meandering portion all include a first end and a second end; For any one of the first bend line, the second bend line, the third bend line, and the fourth bend line, the second end of the first connecting strip is connected to the first end of the bend portion, and the second end of the bend portion is connected to the first end of the second connecting strip; For the first meandering line and the second meandering line, the first end of the first connecting strip of the two is connected to the second functional part, and the second end of the second connecting strip of the two is connected to the first functional part; For the third meandering line and the fourth meandering line, the first end of the first connecting strip of the two is connected to the third functional part, and the second end of the second connecting strip of the two is connected to the first functional part; The line connecting the first end of the first connecting strip of the first meandering line and the second end of the second connecting strip of the first meandering line is a first line segment; the line connecting the first end of the first connecting strip of the second meandering line and the second end of the second connecting strip of the second meandering line is a second line segment; the orthographic projections of the meandering portions of the first meandering line and the second meandering line on the substrate are both located outside the area defined by the orthographic projections of the first line segment and the second line segment on the substrate. And / or, The line connecting the first end of the first connecting strip of the third bend line and the second end of the second connecting strip of the third bend line is the third line segment; the line connecting the first end of the first connecting strip of the fourth bend line and the second end of the second connecting strip of the fourth bend line is the fourth line segment; the orthographic projections of the bends of the third bend line and the fourth bend line on the substrate are both located outside the area defined by the orthographic projections of the third line segment and the fourth line segment on the substrate.

11. The phase shifter according to any one of claims 6-10, wherein, The first connecting arm includes a first sub-connecting arm and a second sub-connecting arm; the second connecting arm includes a third sub-connecting arm and a fourth sub-connecting arm; both the second functional part and the third functional part include a first end and a second end disposed opposite to each other along the length direction of the signal electrode; The first sub-connecting arm is connected to the first end of the second functional part, and the second sub-connecting arm is connected to the second end of the second functional part; The third sub-connecting arm is connected to the first end of the third functional unit, and the fourth sub-connecting arm is connected to the second end of the third functional unit.

12. The phase shifter according to claim 11, wherein, The length directions of the second functional part and the third functional part are the same as the length direction of the signal electrode.

13. The phase shifter according to claim 11, wherein, Both the second functional part and the third functional part include a main body, a first extension and a second extension; the length direction of the main body is the same as the length direction of the signal electrode, and the first extension and the second extension are respectively connected to two opposite ends of the length direction of the main body and extend toward the signal electrode; The first extension of the second functional part is connected to the first sub-connecting arm, and the second extension of the second functional part is connected to the second sub-connecting arm; The first extension of the third functional unit is connected to the third sub-connecting arm, and the second extension of the third functional unit is connected to the fourth sub-connecting arm.

14. The phase shifter according to claim 11, wherein, The hollow pattern includes a first sub-hollow pattern and a second sub-hollow pattern; The first sub-cutout pattern penetrates at least a portion of the structure of the second functional part and the first connecting part along a direction perpendicular to the length of the signal electrode; The second sub-cutout pattern penetrates at least a portion of the structure of the third functional part and the second connecting part along a direction perpendicular to the length of the signal electrode.

15. The phase shifter according to claim 3, wherein, It also includes a mass loading structure, which is disposed on the side of the first functional unit away from the signal electrode.

16. The phase shifter according to claim 1, wherein, The phase shifter further includes a first switching unit disposed on the substrate, the first switching unit being used to provide a bias voltage signal to the membrane bridge when a first control signal is received.

17. The phase shifter according to claim 16, wherein, The first switching unit includes a first switching transistor, the first terminal of the first switching transistor is formed as the bias voltage input terminal of the first switching unit, the second terminal of the first switching transistor is formed as the first output terminal of the first switching unit, and the control terminal of the first switching transistor is formed as the first control terminal of the first switching unit. When the first switching transistor receives the first control signal at the control terminal, the first switching transistor can turn on the first terminal and the second terminal.

18. The phase shifter according to claim 16, wherein, The phase shifter further includes a second switching unit disposed on the substrate, the second switching unit being used to electrically connect the signal electrode to the membrane bridge when a second control signal is received.

19. The phase shifter according to claim 16, wherein, The first switching unit is also configured to electrically connect the signal electrode to the membrane bridge when a second control signal is received.

20. The phase shifter according to claim 1, wherein, The number of membrane bridges in at least some of the phase control units is different.

21. An antenna comprising the phase shifter according to any one of claims 1-20.

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