Automatic test equipment, handler, and method for testing a device under test using synchronization signaling

Abstract

Embodiments according to the application comprise an automatic test equipment for testing a device under test, comprising a real-time handler interface, wherein the real-time handler interface is configured to provide a trigger signaling to a handler for triggering a temperature control function, and wherein the real-time handler interface is configured to provide a synchronization signaling to the handler for synchronizing a function of the handler other than the triggered temperature control function. Correspondingly, embodiments comprise a corresponding handler and methods for such automatic test equipment and handler.

Description

Technical Field

[0001] Embodiments of the present invention relate to an automated test apparatus, a handler, and a method for testing a device under test using synchronous signaling.

[0002] Further embodiments of the invention relate to active temperature control utilizing rapid synchronization and data exchange (e.g., using trigger (e.g., pre-trigger) signals). Background Technology

[0003] Complex digital devices (e.g., those that can be used as devices under test (DUTs)), such as MPUs (e.g., microprocessors), GPUs (e.g., graphics processing units), and MCUs (e.g., microcontrollers), can consume significant amounts of power. Power consumption and device temperature profiles may vary throughout the testing process (e.g., during testing using automated test equipment (ATE)), or even be site-dependent. In some cases, precise temperature control may be important or even essential for testing these devices, for example, those with “flat” and / or predictable temperature profiles.

[0004] In addition, it may be important to provide test equipment capable of performing tests with good accuracy and low time commitment. For example, limited complexity and workload related to wiring may be beneficial.

[0005] Therefore, there is a desire for a concept that can achieve a better trade-off between temperature control efficiency, testing accuracy, and the complexity of testing equipment.

[0006] This is achieved through the subject matter of the independent claims of this application.

[0007] Further embodiments of the invention are defined by the subject matter of the dependent claims of this application. Summary of the Invention

[0008] According to the invention summary of the first aspect

[0009] An embodiment of the first aspect of the invention includes an automated test apparatus (e.g., a "test machine") for testing a device under test, comprising a bidirectional dedicated real-time sorter interface (e.g., an interface with triggering function, such as a "fixed endpoint interface"), arranged, for example, on a test head, which includes, for example, multiple lines (e.g., communication channels adapted for communication tasks); for example, no separate signal lines.

[0010] The sorter interface is a bidirectional dedicated interface, (for example) specifically adapted for communication between automated testing equipment and the sorter; for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0011] Furthermore, the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can be, for example, directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime), for example, making the latency of signaling provided or received by the interface less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0012] In addition, the real-time sorter interface is configured to provide trigger signals to the sorter to trigger, for example, an active temperature control (e.g., regulation) function, such as the pre-cooling function of active temperature control.

[0013] The sorter can be configured, for example, to load and unload chips onto a device under test (DUT) board or DUT interface, and can be configured, for example, to control one or more (e.g., physical, non-electrical) parameters, such as temperature, when one or more DUTs are being tested. Furthermore, the sorter interface can be configured, for example, to additionally provide signaling to the sorter that influences control operations (control operations controlling the sorter), wherein such signaling is considered to determine the control operations of the sorter. Additionally, the real-time sorter interface is configured to receive signaling from the sorter, for example, via a real-time tester interface. Furthermore, the automated test equipment is configured to consider the signaling received from the sorter (e.g., during test execution or when deriving final test results from test data), for example, to adapt the test flow in response to the signaling received from the sorter.

[0014] A further embodiment of the first aspect of the invention includes a sorting machine for use in conjunction with an automated test apparatus to test a device under test, the sorting machine including a bidirectional dedicated real-time tester interface, for example, an interface with triggering functionality (e.g., a "fixed endpoint interface" (instead of a bus interface)).

[0015] The test machine interface is a bidirectional dedicated interface, (for example) specifically adapted for communication between automated test equipment and sorting machines; for example, an application-specific interface, wherein, for example, the communication protocol is adapted for real-time signaling.

[0016] Furthermore, the test machine interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can be, for example, directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime), for example, making the latency of signaling provided or received by the interface less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0017] Furthermore, the sorter can, for example, load and unload chips onto the device under test (DUT) board or DUT interface, and can, for example, control one or more (e.g., physical, non-electrical) parameters, such as temperature, when one or more DUTs are being tested. The sorter is configured to receive trigger (e.g., pre-trigger) signals from the automated test equipment via the test equipment interface, and is configured to trigger, for example, an active temperature control (e.g., regulation) function, such as a pre-cooling function of active temperature control, in response to the received signals. Additionally, the sorter is configured to provide signals to the automated test equipment via the test equipment interface, for example, for consideration by the automated test equipment.

[0018] A further embodiment of the first aspect of the invention includes a method, for example, for use with an automated test apparatus (e.g., a “test machine”) to test a device under test, wherein the method includes: providing a trigger signal to a sorter via a bidirectional dedicated real-time sorter interface to trigger (e.g., thereby triggering) an active temperature control (e.g., regulation) function, such as a pre-cooling function of an active temperature control.

[0019] The sorter may be configured, for example, to load and unload chips onto a device under test (DUT) board or DUT interface, and may control, for example, one or more (e.g., physical, non-electrical) parameters, such as temperature, when one or more DUTs are being tested. Furthermore, triggering signaling may include signaling directed to the sorter to influence control operations of the sorter, wherein the signaling is considered, for example, to determine control operations of the sorter.

[0020] The sorter interface is a bidirectional dedicated interface, (for example) specifically adapted for communication between automated testing equipment and the sorter; for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0021] Furthermore, the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can be, for example, directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0022] The sorter interface may be, for example, an interface with triggering functionality, such as a "fixed endpoint interface," arranged on a test head that includes multiple lines (e.g., a communication channel adapted for a communication task); for example, without separate signal lines.

[0023] Furthermore, the method includes, for example, receiving signaling from a sorter via a bidirectional dedicated real-time sorter interface (e.g., via a real-time tester interface), and the method includes, for example, taking into account the signaling received from the sorter in an automated test device (e.g., when performing a test or when deriving a final test result from test data), and, for example, adapting the test process in response to the signaling received from the sorter.

[0024] A further embodiment of the first aspect of the invention includes a method, for example, for testing a device under test in conjunction with a sorting machine and / or an automated test apparatus, wherein the method includes: receiving a trigger (e.g., pre-trigger) signal from the automated test apparatus via a bidirectional dedicated real-time test machine interface (e.g., an interface with triggering functionality, such as a "fixed endpoint interface"), wherein the method includes: triggering, in response to the received signal, an active temperature control (e.g., regulation) function, such as a pre-cooling function of active temperature control.

[0025] The tester interface and / or sorter interface are bidirectional dedicated interfaces, (for example) specifically adapted for communication between automated test equipment and sorters; for example, application-specific interfaces, wherein, for example, communication protocols are adapted for real-time signaling.

[0026] Furthermore, the test machine interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. For example, the interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, the interface can, for example, be faster than existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime), for example, making the latency of signaling provided or received by the interface less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can, for example, be an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling. Furthermore, the method includes: providing signaling to automated test equipment via the test machine interface, for example, for consideration by the automated test equipment.

[0027] A further embodiment of the first aspect includes a testing system comprising an automated testing device as defined herein and a sorting machine as defined herein.

[0028] A further embodiment of the first aspect includes a testing system comprising an automated testing device as defined herein and a sorting machine as defined herein.

[0029] A further embodiment of the first aspect includes a computer program, wherein the computer program, when run on a computer, is used to perform the method according to the embodiment.

[0030] A further embodiment of the first aspect includes a testing unit comprising a sorting machine according to the embodiment and an automatic testing device according to the embodiment, wherein the sorting machine interface of the automatic testing device is coupled to the testing machine interface of the sorting machine.

[0031] An embodiment of the first aspect of the invention is based on the idea of ​​providing a bidirectional dedicated real-time interface, wherein a real-time sorter interface is used in embodiments including an automated testing device (e.g., on the automated testing device side), and / or wherein a real-time testing device interface is used accordingly in embodiments including a sorter (e.g., on the sorter side) to trigger a temperature control function.

[0032] The concepts of embodiments of the first aspect of the invention will now be explained in the context of automated testing equipment. This basic idea will be understood as being similar for corresponding sorting machines and methods used in such automated testing equipment and / or sorting machines. Therefore, any features, functions, and details discussed herein with respect to automated testing equipment can be used individually or in combination (e.g., in the same or similar manner) in sorting machines, testing systems, testing units, and / or methods used in automated testing equipment, sorting machines, testing systems, or testing units.

[0033] According to an embodiment, the automated testing equipment includes a bidirectional dedicated real-time sorter interface, wherein the interface is configured to provide trigger signaling to the sorter to trigger a temperature control function.

[0034] Because the interface is a real-time interface, information for temperature control can be sent, enabling immediate responses according to specific specifications (e.g., temperature limits). In other words, runtime data exchange is possible. The latency of such signaling may be below a certain time limit, for example, less than 1 ms. Therefore, due to the increased information transmission speed, temperature control can be performed with greater precision. To provide this real-time capability, the interface could be, for example, an additional interface that can be directly positioned between the test head and the sorter. The inventors recognize that such an interface can be faster than other interfaces (e.g., conventional interfaces) and allows for real-time test adaptation (e.g., at runtime). This can provide testing with improved accuracy and efficiency. Temperature hotspots (even thermal runaway) in the device under test can be identified more quickly, thus allowing countermeasures to be implemented earlier than without such a real-time interface.

[0035] Furthermore, the interface is a dedicated sorting machine interface. For example, to provide the necessary information transmission speed, the interface can be specifically adapted for communication between automated testing equipment and the sorting machine. Alternatively, the interface can be an application-specific interface, which contrasts sharply with a general-purpose interface. Therefore, the communication protocol used by the interface can be adapted to provide, for example, real-time signaling.

[0036] According to a first aspect of the invention, the interface is also a bidirectional interface. The bidirectional nature of the interface enables two-way communication, thus enabling a wide range of test adaptations. For example, the tester can inform the sorter of an impending expected thermal peak in the device under test (e.g., caused by the test procedure). In response, the sorter can inform the tester of the device's current temperature, and the sorter can take this temperature into account to adapt the test procedure, for example, by extending the previous cooling time, to prevent thermal hotspots (or even thermal runaway) in the device under test.

[0037] This innovative real-time bidirectional dedicated interface enables the establishment of an instantaneous (e.g., direct) and rapid communication path between the test machine and the sorter. Furthermore, it should be noted that such an interface can be used, for example, to provide and / or receive other time-critical information useful for the test cycle of the device under test.

[0038] The inventors recognized that a real-time bidirectional dedicated interface allows the computational performance of the test machine to be used for the tasks of the sorting machine. The control loop (e.g., a temperature control loop) can be implemented to include the device under test (DUT), the sorting machine, and the automated test equipment. The real-time interface allows the test machine to participate in the temperature control of the DUT, for example, using input information as temperature control information during sorting machine operation. Conversely, the sorting machine can provide measurement data in real time, allowing the test machine to calculate such temperature control information, for example, including cooling amplitude and / or cooling duration and / or cooling time.

[0039] Therefore, a bidirectional dedicated real-time interface allows for synergies, such as enabling real-time control loops between the tester, sorter, and device, as explained previously. Furthermore, such loops can also be used to adapt test procedures based on the information transmitted (e.g., measurement data provided by the sorter and adaptation information determined and provided by the automated test equipment).

[0040] According to a further embodiment of the first aspect of the present invention, a bidirectional dedicated real-time sorter interface is configured to provide synchronization signaling to the sorter for synchronizing functions of the sorter other than the trigger temperature control function.

[0041] Synchronization can be performed to trigger measurements under a predetermined condition of the device under test. Compared to implementing wait statements, synchronization via a real-time interface can be faster and / or more accurate.

[0042] According to a further embodiment of the first aspect of the invention, a bidirectional dedicated real-time sorter interface is configured to provide test-site specific signaling to the sorter to control temperature control functions.

[0043] For example, some devices (e.g., devices or sites within a test site) may have different test settings (e.g., VDD voltage), which could lead to more heat dissipation. In some cases, it may be advantageous or even necessary to inform the sorter at a trigger point (e.g., a pre-trigger point) which sites subsequently need to be cooled to enable them or (e.g.) to ensure that undercooling or overheating does not occur. Utilizing test site-specific information can increase the flexibility of test routines.

[0044] According to a further embodiment of the first aspect of the invention, the signaling received from the sorter is test site-specific signaling. In the case of multiple devices under test at different test sites, individual information about the specific temperature of the device under test can be sent. Therefore, each device under test can be controlled individually. Thus, temperature hotspots (even thermal runaway) of a single device can be detected, and said device can be shut down without interrupting the test routines of other devices. Therefore, the automated test equipment or sorter according to the invention can provide good test speed and good test flexibility.

[0045] According to a further embodiment of the first aspect of the invention, the bidirectional dedicated real-time sorter interface is configured to provide additional signaling in addition to trigger signaling. This additional signaling includes, for example, real-time control information for the sorter, or for the sorter only, to autonomously determine (e.g., calculate) or modify temperature control curves or perform temperature regulation during operation. This information may include, for example, PMON (e.g., parameters for monitoring real-time DUT power consumption), TJ (e.g., actual DUT junction temperature), SITE (e.g., site-specific control data), DUT (e.g., DUT-specific control data), TEST (e.g., test-specific response data), FLOW (e.g., test subprocess), and / or information regarding upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, and site- and device-specific temperature control data.

[0046] Alternatively or additionally, the additional signaling includes information about one or more measured values ​​(e.g., PMON, TJ) and / or one or more test status parameters (e.g., SITE, DUT, TEST, FLOW) determined by the automated test equipment, such as information about upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, and site- and device-specific temperature control data.

[0047] Alternatively or additionally, additional signaling includes alarm information, such as over- or under-temperature alarms specific to one or more test sites of the device under test. Providing additional signaling enables the use of various functions to work in conjunction with the aforementioned advantages of the interface's bidirectional and real-time nature. Data transmission, as well as test adaptation, test evaluation, and countermeasures for test problems, can be performed faster and more accurately, for example, due to reduced response time and site-specific adaptation.

[0048] According to a further embodiment of the first aspect of the invention, the automated test equipment is configured to adapt to the test process in response to signaling (e.g., signaling from a sorter) by interrupting the test and / or disabling power supply and / or by selecting different tests and / or modifying one or more test parameters (e.g., clock frequency, supply voltage, etc.).

[0049] The response can be executed in real time, for example. For instance, a temperature hotspot (or even thermal runaway) in the device under test can be stopped by disabling its power supply. Furthermore, the test cycle can be adapted based on signaling from the sorter. Devices responding to test stimuli with different behaviors can be categorized into different quality classes and can be further tested, for example, in different ways. Adapting the test flow can improve the efficiency and flexibility of the testing process. Therefore, testing costs can also be reduced.

[0050] According to a further embodiment of the first aspect of the invention, the automated test equipment is configured to interrupt testing (e.g., by deactivating power supply) in response to signaling (e.g., signaling from a sorting machine). The test interruption can be performed individually for a specific device or for testing multiple devices. The test interruption can prevent device damage and allows for rapid handling of malfunctioning devices to restart the testing process for the remaining devices. Thus, test time can be reduced even in the presence of malfunctions, and good test flexibility can be provided.

[0051] According to a further embodiment of the first aspect of the invention, the automatic testing equipment is configured to receive a deactivation signal from the sorting machine, the deactivation signal indicating, for example, an abnormal or erroneous state of the sorting machine, or a state of unreliable or over-temperature (e.g., excessively high temperature) or under-temperature (e.g., insufficient temperature) condition, or receiving a "temperature runaway" condition from the sorting machine (e.g., causing one or more test stations to be "shut down").

[0052] The sorting machine can be configured to assess the condition of the device under test (DUT) and send that assessment to the automated test equipment. If the DUT suffers a malfunction, a shutdown signal can be sent to the automated test equipment. Shutdown can be performed before the DUT is damaged, allowing testing of other DUTs to continue, thus accelerating testing even in the event of a malfunction.

[0053] According to a further embodiment of the first aspect of the invention, the automated test equipment is configured to receive a temperature warning signal from a sorting machine, the temperature warning signal indicating, for example, over-temperature (e.g., excessively high temperature condition) or under-temperature (e.g., insufficient temperature condition). This can, for example, allow the automated test equipment to adapt the test process according to the condition of the device under test. Therefore, embodiments of the invention not only provide the possibility of responding to device failures, but can even prevent or predict device failures. This allows for rapid and efficient adaptation of the test.

[0054] According to a further embodiment of the first aspect of the invention, the automated testing equipment is configured to interrupt testing in response to a signal received from the sorting machine. As a result, equipment damage can be prevented.

[0055] According to a further embodiment of the first aspect of the invention, the automated testing equipment is configured to receive test station-specific signaling from a sorting machine. As previously mentioned, the test cycle for each device can be adapted individually. Furthermore, devices can be classified and sorted according to the test station-specific signaling. Therefore, highly flexible testing can be performed.

[0056] According to a further embodiment of the first aspect of the invention, the automated test equipment is configured to interrupt testing in a test-site-specific manner in response to receiving a test-site-specific signal from a sorting machine. Individual devices can be interrupted so that the test cycles of other devices can continue without interruption. This enables rapid overall testing and thus reduces the testing cost for batches of devices.

[0057] According to a further embodiment of the first aspect of the invention, the automated test equipment is configured to deactivate the power supply of one or more devices under test (e.g., shut off the site-specific power supply) in response to receiving a signal from a sorter (e.g., in response to an optional test site-specific signal indicating an over-temperature condition (e.g., overheating condition) of the device under test or the site of the device under test (e.g., the test site)).

[0058] When only one or a few devices under test malfunction (e.g., overheating), shutting down the power to that specific device prevents the test setup, which includes multiple devices, from failing. Therefore, device damage can be avoided, and testing of devices without functional abnormalities can continue.

[0059] According to a further embodiment of the first aspect of the invention, the automated test equipment is configured to influence data processing of the device under test (e.g., adapting the packaging of the device under test) in response to receiving a signal (e.g., a test site-specific signal) from a sorting machine. For example, in the event of overheating or malfunction of the device under test, data processing of the device may be affected, and the measurement results and responses of the device may no longer be recorded. This can be performed in real time via a real-time interface, allowing erroneous data to be discarded immediately without affecting, for example, the overall evaluation of the batch of devices under test.

[0060] According to a further embodiment of the first aspect of the invention, the automated testing equipment is configured to record signaling received from the sorting machine (e.g., signaling received from the sorting machine) to provide test results, information about the characteristics of the device under test, or information about the reliability of the test results. A real-time interface allows for better synchronization of sorting machine data and test routines, for example, synchronizing the distribution of test stimuli from the testing machine and temperature data from the sorting machine.

[0061] According to a further embodiment of the first aspect of the invention, the automated test equipment is configured to react in real time, for example, such that the reaction of the automated test equipment is faster than the internal thermal changes of the device under test or the time constant of the control loop (e.g., the control loop of a temperature control function). This rapid response can prevent damage to the device under test from overheating. Furthermore, test parameters can be adapted to prevent overheating of the device under test from the outset.

[0062] Further embodiments of the invention according to the first aspect are explained in more detail below. However, the advantages and examples explained in the context of automated testing equipment are to be understood as similar to those for corresponding sorting machines. Therefore, any features, functions, and details discussed above with respect to automated testing equipment can be used, incorporated into, or adapted for corresponding sorting machines. For example, an automated testing equipment configured to provide signaling can be replaced by a corresponding sorting machine configured to receive said signaling, and vice versa. As another example, the automated testing equipment providing signaling to the sorting machine to perform a task can be replaced by the corresponding sorting machine receiving the signaling and being configured to perform said task.

[0063] According to a further embodiment of the first aspect of the invention, the sorting machine is configured to receive synchronization signaling from an automated testing device via a bidirectional dedicated real-time tester interface, and wherein the sorting machine is configured to trigger (e.g., pre-trigger) functions other than temperature control functions in sync with the automated testing device in response to the received synchronization signaling.

[0064] According to a further embodiment of the first aspect of the invention, the sorting machine is configured to receive test site-specific signaling from an automated testing device via a bidirectional dedicated real-time tester interface, and wherein the sorting machine is configured to control a temperature control function in response to the received test site-specific signaling.

[0065] According to a further embodiment of the first aspect of the present invention, the signaling sent to the automatic test equipment via the test machine interface is test site-specific signaling.

[0066] According to a further embodiment of the first aspect of the invention, the sorter is configured to receive trigger signals via a real-time test machine interface, and in addition to receiving the trigger signals, also receive additional signals, which include real-time control information for the sorter, or only for the sorter to use during operation, to (e.g.) autonomously determine (e.g., calculate) or (e.g., autonomously modify) temperature control curves or perform temperature regulation. This information may (e.g.) include PMON (e.g., parameters for monitoring real-time DUT power consumption), TJ (e.g., actual DUT junction temperature), SITE (e.g., site-specific control data), DUT (e.g., DUT-specific control data), TEST (e.g., test-specific response data), FLOW (e.g., test subprocess), and / or information regarding upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, and site- and device-specific temperature control data.

[0067] Alternatively or additionally, the signaling includes information about one or more measured values ​​(e.g., PMON, TJ) determined by the automated test equipment and / or one or more test status parameters (e.g., SITE, DUT, TEST, FLOW), such as information about upcoming temperature hotspots, the duration of the hotspots, the amplitude of the hotspots, and site- and device-specific temperature control data. Alternatively or additionally, the signaling includes alarm information, such as over- or under-temperature alarms for one or more test sites specific to the device under test.

[0068] In addition, the sorter is configured to use additional signaling to control the temperature of one or more device sites under test, for example, to determine or modify temperature control profiles or temperature regulation.

[0069] Precise temperature control can be achieved using additional signaling via a sorting machine. Information providing up-to-date data for rapid temperature adjustment can be transmitted in real-time via a real-time interface. Furthermore, the temperature controller can consider multiple parameters transmitted via signaling. Predictive temperature control can be implemented based on information about impending events, such as temperature hotspots.

[0070] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide signaling to an automated test device via a tester interface for adapting to the test process, such as for interrupting the test and / or disabling power supply and / or for selecting different tests and / or for modifying one or more test parameters (e.g., clock frequency, supply voltage, etc.).

[0071] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide a shutdown signal to the automated test equipment via a tester interface, for example, to cause one or more test stations to "shut down". Therefore, the sorter can prevent device damage in the event of overheating. Due to the bidirectional real-time interface, immediate feedback from the sorter is possible, thus enabling a control loop from the device to the sorter and then to the automated test equipment. This allows for precise, rapid, and safe temperature control.

[0072] According to a further embodiment of the first aspect of the invention, the sorter is configured to detect (e.g., test site-specific) thermal malfunctions, such as unreliable temperature control, over-temperature conditions, under-temperature conditions, or "temperature runaway" conditions, or an abnormal or erroneous state of the sorter. Furthermore, the sorter is configured to provide a signaling (e.g., a disable signaling or malfunction signaling) to the automated test equipment in response to the detection of a malfunction, (e.g.,) to disable the device power supply in the automated test equipment that powers the device under test.

[0073] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide a temperature warning signal to an automated testing device via a tester interface, for example, to indicate over-temperature (e.g., excessively high temperature) or under-temperature (e.g., insufficient temperature).

[0074] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide an interrupt signal to an automated test apparatus via a test machine interface, for example, to interrupt testing or to interrupt testing of a specific device under test or a site under test.

[0075] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide test site-specific interrupt signaling to an automated test apparatus via a test machine interface, for example, to interrupt testing or to interrupt testing for a specific device under test or a site under test.

[0076] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide test site-specific signaling to an automated test device via a tester interface.

[0077] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide a shutdown signal to an automated test device via a tester interface for disabling power to one or more devices under test, for example, by shutting off test site-specific power in a test site-specific manner.

[0078] According to a further embodiment of the first aspect of the invention, the sorter is configured to influence data processing (e.g., packing and data logging) of the device under test using signaling sent to an automated test equipment via a real-time test machine interface.

[0079] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide signaling to an automated test apparatus via a test machine interface for recording by the automated test apparatus. The sorter can detect specific events or behaviors of the device under test. Through a real-time interface, signals can be provided to the automated test apparatus to record, for example, test data of such devices for further analysis. Therefore, flexible adaptive testing can be provided.

[0080] According to a further embodiment of the first aspect of the invention, the sorter is configured to provide signaling to the automated test equipment in real time (e.g., with low latency, such as less than 1 ms or even less than 1 microsecond) via a test machine interface (e.g., via a congestion-free and / or non-blocking test machine interface) to enable the automated test equipment to respond in real time to the provided signal.

[0081] According to the invention summary of the second aspect

[0082] An embodiment of the second aspect of the invention includes an automated test apparatus (e.g., a "test machine") for testing a device under test, the automated test apparatus including a real-time sorter interface, for example, an interface with triggering function (e.g., a "fixed endpoint interface"), arranged on a test head, the test head including multiple lines (e.g., communication channels adapted for communication tasks); but not, for example, a separate signal line.

[0083] The sorter interface may be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated testing equipment and the sorter; the sorter interface may also be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0084] Furthermore, the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition, this interface can be implemented not only as a bus but also, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, this interface can, for example, be faster than existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0085] In addition, the real-time sorter interface is configured to provide trigger (e.g., pre-trigger) signals to the sorter, which can (e.g.) load and unload chips on the device under test board or device under test interface, and can (e.g.) control one or more (e.g., physical, non-electrical) parameters, such as temperature, of one or more devices under test during testing to trigger (e.g., pre-trigger) (e.g., active temperature control (e.g., regulation) functions, such as temperature control functions prior to expected temperature changes or expected power consumption changes of the device, such as pre-cooling or pre-heating functions of active temperature control.

[0086] In addition, the real-time sorter interface is configured to provide synchronization signaling to the sorter for synchronizing functions other than the sorter's trigger (e.g., pre-trigger) temperature control function.

[0087] A further embodiment of the second aspect of the invention includes a sorting machine for use in conjunction with an automated test apparatus to test a device under test, the sorting machine including a real-time test machine interface, for example, an interface with triggering functionality (e.g., a "fixed endpoint interface").

[0088] The tester interface may be, for example, an optional bidirectional dedicated interface, specifically adapted for communication between the automated test equipment and the sorter; the sorter interface may be, for example, an application-specific interface, wherein, for example, the communication protocol is adapted for real-time signaling.

[0089] Furthermore, the test machine interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, it can, for example, be faster than existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0090] In addition, the sorter (which can load and unload chips on the device under test board or device under test interface and can control one or more (e.g., physical, non-electrical) parameters, such as temperature, when one or more devices under test are being tested) is configured to receive trigger signals from the automated test equipment via the tester interface, and the sorter is configured to trigger (e.g., pre-trigger) a temperature control (e.g., regulation) function in response to the received trigger signals.

[0091] In addition, the sorter is configured to receive synchronization signals from the automated test equipment via the tester interface, and the sorter is configured to trigger (e.g., pre-trigger) functions other than temperature control functions in sync with the automated test equipment in response to the received synchronization signals.

[0092] A further embodiment of the second aspect of the invention includes a method, for example, for use by an automated test apparatus (e.g., a “test machine”) to test a device under test, wherein the method includes providing a trigger (e.g., pre-trigger) signal to a sorter that can, for example, load and unload chips on a device under test board or device under test interface and can, for example, control one or more (e.g., physical, non-electrical) parameters, such as temperature, of one or more devices under test during testing, to trigger (e.g., pre-trigger) (e.g., active temperature control (e.g., regulation) functions via a real-time processor interface, such as temperature control functions prior to anticipated device temperature changes or anticipated device power consumption changes, such as pre-cooling or pre-heating functions of active temperature control.

[0093] The sorter interface can be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated testing equipment and the sorter; the sorter interface can also be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0094] Furthermore, the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, or application-specific interface. In addition, this interface can be implemented not only as a bus but also, for example, faster than a bus. This interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. This interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, this interface can, for example, be faster than existing alternative communication interfaces; enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime), for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. For example, this interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0095] Furthermore, the sorter interface can be, for example, an interface with triggering functionality (e.g., a "fixed endpoint interface"), and can be arranged on the test head, for example, including multiple lines (e.g., communication channels adapted for communication tasks); for example, there is no separate (e.g., a single, dedicated) signal line. In other words, for example, there is one communication channel used for both triggering and communication. Alternatively, there can be multiple communication channels, wherein triggering is performed through a communication channel among these communication channels that is also used for communication (in addition to the triggering function). Furthermore, the method includes providing synchronization signaling to the sorter via the real-time sorter interface, and the method includes functions beyond the triggering (e.g., pre-triggering) temperature control function of the synchronizing sorter.

[0096] A further embodiment of the second aspect of the invention includes a method, for example, for testing a device under test in conjunction with a sorting machine and / or an automated test apparatus, wherein the method includes receiving a trigger signal from the automated test apparatus via a real-time test machine interface (e.g., an interface with triggering functionality, such as a "fixed endpoint interface"), and wherein the method includes triggering (e.g., pre-triggering) a temperature control (e.g., regulation) function in response to the received trigger signal.

[0097] The test machine interface can be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated test equipment and sorting machines; for example, the sorting machine interface can be an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0098] Furthermore, the test interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, it can, for example, be faster than existing alternative communication interfaces; enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime), for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. For example, the interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0099] Furthermore, the method includes receiving synchronization signaling from an automated test device via a test machine interface, and the method includes triggering (e.g., pre-triggered) functions other than temperature control functions in sync with the automated test device in response to the received synchronization signaling.

[0100] A further embodiment of the second aspect includes a testing system comprising an automated testing device as defined herein and a sorting machine as defined herein.

[0101] A further embodiment of the second aspect includes a testing system comprising an automated testing device as defined herein and a sorting machine as defined herein.

[0102] A further embodiment of the second aspect includes a computer program that, when run on a computer, performs the method according to the embodiment.

[0103] A further embodiment of the second aspect includes a testing unit comprising a sorting machine according to the embodiment and an automatic testing device according to the embodiment, wherein the sorting machine interface of the automatic testing device is coupled to the testing machine interface of the sorting machine.

[0104] An embodiment of the second aspect of the invention is based on the idea of ​​synchronizing an automated testing device and a sorting machine, wherein a real-time sorting machine interface is used in an embodiment that includes an automated testing device (e.g., on the automated testing device side), and / or wherein a real-time testing machine interface is correspondingly used in an embodiment that includes a sorting machine (e.g., on the sorting machine side).

[0105] The concepts of embodiments of the invention according to the second aspect will now be explained in the context of automated testing equipment. The basic idea will be understood to be similar for corresponding sorting machines and methods used with such automated testing equipment and / or sorting machines. Therefore, any features, functions, and details discussed herein with respect to automated testing equipment can be used individually or in combination (e.g., in the same or similar manner) in sorting machines, testing systems, testing units, and / or methods used in automated testing equipment, sorting machines, testing systems, or testing units.

[0106] According to an embodiment, the automated test apparatus includes a real-time sorter interface, wherein the interface is configured to provide trigger signaling to the sorter to trigger a temperature control function. However, in addition to this, the real-time sorter interface is also configured to provide synchronization signaling to the sorter for synchronizing functions of the sorter other than triggering temperature control. Using the real-time interface, the test apparatus and the sorter can exchange various types of information. This information may include temperature information about the device under test, device status or condition, or any other information that may be relevant to device testing. Testing the device under test can be the interaction between the automated test apparatus (e.g., the example test apparatus) and the sorter. The test apparatus can provide stimulation to the device under test, and the sorter can monitor the device (e.g., monitor the device's temperature or any other environmental conditions). The synchronization signaling enables synchronization between the test apparatus and the sorter. This is beneficial, or in some cases even necessary, to assign test apparatus data to sorter data. Without precise information, such as accurate timing information, causal relationship information, stimulation and measurement information, test results or evaluations may be inaccurate. The real-time interface allows for rapid synchronization between the test apparatus and the sorter. It eliminates the need for wait statements, thus providing highly accurate synchronization between the test and sorter. Therefore, enhanced testing of the device under test can be performed.

[0107] Furthermore, synchronization between the tester and the sorter allows them to cooperate better. The tester's stimulation of the device under test can be adapted relative to the latest information from the sorter. If the tester and sorter are out of sync, it may be difficult to react to events (e.g., overheating of the device under test detected by the sorter) in sufficient time. Using a real-time interface can potentially prevent device damage, for example, because it may not be necessary to adhere to wait statements used for synchronization between the tester and the sorter.

[0108] Besides adaptation, even simple measurements can be advantageously performed by a synchronized tester and sorter. For example, a sorter might be commanded to measure the device under test under specific conditions (e.g., a specific time after excitation). Such measurements are easily performed when the tester and sorter are synchronized.

[0109] Embodiments of the second aspect of the invention allow for highly flexible and adaptive testing of the device under test. The inventors recognize that the real-time sorter interface allows for the provision of the aforementioned synchronization signaling as additional functionality, such as beyond simply triggering temperature control. Therefore, the automated test equipment can provide additional commands, instructions, or indications to the sorter, such as synchronization measurement instructions. For example, a calibration instruction can be sent to the sorter to initiate a synchronization test or test sequence. Real-time (e.g., instantaneous) transmission of information allows the sorter to be combined with the tester for calibration and extended measurement routines.

[0110] According to a further embodiment of the second aspect of the present invention, the real-time sorter interface is configured to achieve active synchronization with the sorter based on synchronization signaling destined for the sorter, and the active synchronization is a synchronization that does not require waiting for insertion.

[0111] Real-time interfaces allow for synchronization without delay (e.g., delays that take the form of waiting for insertion). Automated test equipment can accurately notify the sorter when to take a measurement. Furthermore, by using a real-time interface, measurement results can be precisely synchronized with the device's excitation or state, which is advantageous over traditional waiting-for-insertion methods (which can lead to uncertainty about the device's state and the precise timing of the measurement). In addition, active synchronization can significantly reduce test time.

[0112] Furthermore, for example, in the case of a bidirectional interface, active synchronization can be performed in a stimulus-response manner. Automated test equipment can send stimuli to a sorter, which can respond using measurements of device characteristics (e.g., temperature).

[0113] According to a further embodiment of the second aspect of the invention, the real-time sorter interface is configured to send calibration timing information (e.g., as synchronization signaling) to the sorter to determine the timing of the sorter's calibration (e.g., self-calibration), wherein the calibration (e.g.) is performed synchronously with a test process (e.g., a predetermined phase in the test process).

[0114] Precise calibration and timing information in measurements can improve the distribution between test stimuli and measurement data (e.g., measurement data from a sorting machine), potentially leading to better (shorter) test times. For example, unnecessary waiting time can be avoided by using timing synchronization.

[0115] According to a further embodiment of the second aspect of the invention, the real-time sorter interface is configured to send, for example, a signaling as a synchronization signaling, instructing the device under test (DUT) to be powered, biased, or initialized in a predetermined manner, for example, in a manner suitable for the calibration (or self-calibration) of the sorter or conditioning loop. This allows the sorter to immediately calibrate, for example, the power supply conditions after the automated test equipment adjusts the signaling for the DUT, which can manipulate the DUT to provide a reference signal, for example, a reference temperature. Using the reference signal, the sorter's measurement results can be further calibrated. The real-time interface allows the sorter to react instantly (e.g., rapidly, in real-time) so that calibration is performed with a very small delay at a point in time when the DUT is in a predetermined state conducive to calibration.

[0116] According to a further embodiment of the second aspect of the invention, the real-time sorter interface is configured to send signaling when different device or test conditions are reached (e.g., when different power-on states, heating states, bias states, or initialization states of the device under test are reached). Such states may apply, for example, to two or more different calibration measurements of the sorter. Furthermore, these states are expected to result in, for example, different current device-under-test temperatures, e.g., different device-under-test temperatures suitable for the calibration of the sorter.

[0117] By sending the aforementioned signaling, the synchronization of automated testing equipment and sorting machines can be advantageously utilized. For accurate measurements, knowing the timing and conditions of the measurement can be helpful. Using a real-time interface, such information can be sent and expire upon arrival at, for example, the sorting machine.

[0118] According to a further embodiment of the second aspect of the invention, the automated test equipment is configured to provide synchronization signaling to trigger one or more temperature readings of the sorter, for example, a first temperature reading after the device under test is biased and before the start of testing of an active device (e.g., during a pre-test phase when the device is biased but has not yet been excited with one or more test modes) and a second temperature reading after the start of testing.

[0119] Synchronization signaling can be used as calibration signaling. The automated test equipment (ATE) can set the device under test (DUT) to calibration mode and then send a synchronization signal from the ATE to the sorter via the sorter interface. The sorter can perform the first temperature reading or measurement for calibration in the predetermined calibration state, and then perform other measurements. Through a real-time interface, sorter measurements can be performed at the correct time when the ATE provides a predetermined signal (e.g., a certain power) to the device. This enables accurate and rapid measurements.

[0120] According to a further embodiment of the second aspect of the invention, the real-time sorter interface is configured to enable thermal diode calibration based on synchronization signaling destined for the sorter. Furthermore, the thermal diode calibration includes incremental temperature measurement, and the real-time sorter interface is configured to send real-time measurement timing information to the sorter for thermal diode calibration.

[0121] The temperature characteristics of a thermal diode are highly process-dependent. This can, for example, be eliminated during testing by incremental temperature measurements. To measure the temperature at the correct point (e.g., a point in time and / or a point on the device under test), rapid and accurate synchronization between the sorter and the ATE (Automatic Test Equipment) can be advantageously utilized. Measurements can be performed under different device or test conditions (e.g., no-power-on or power-off modes) to compensate for, for example, leakage current or device turn-on leakage current, or heating effects that may affect temperature measurements during this calibration step. Therefore, accurate and rapid thermal diode calibration can be performed.

[0122] According to a further embodiment of the second aspect of the invention, the synchronization signaling includes, for example, test site-specific time information for measurements of the sorting machine.

[0123] As mentioned above, by utilizing the specific time information of the test site, accurate and rapid measurements can be performed on multiple devices under test. Synchronization can be performed separately for each device under test to provide precise allocation of device stimulus and measurement data.

[0124] According to a further embodiment of the second aspect of the invention, the synchronization signaling includes, for example, test site-specific test status information or device status information, for example, to notify the sorter of the test process and / or schedule the sorter's measurements and / or trigger predictive temperature control (e.g., "P1" or "P2").

[0125] By utilizing test site-specific test status information, the sorter can adapt to temperature measurement scheduling to focus on devices that may overheat (e.g., because they receive a large amount of power). This enables faster testing and better protection of the devices under test.

[0126] Further embodiments of the invention according to the second aspect are explained in further detail below. However, the advantages and examples explained in the context of automated testing equipment will be understood to be similar for corresponding sorting machines. Therefore, any features, functions, and details discussed above with respect to automated testing equipment can be used, incorporated into, or adapted for corresponding sorting machines. For example, an automated testing equipment configured to provide signaling can be replaced by a corresponding sorting machine configured to receive said signaling, and vice versa. As another example, the automated testing equipment providing signaling to the sorting machine to perform a task can be replaced by the corresponding sorting machine receiving the signaling and being configured to perform said task.

[0127] According to a further embodiment of the second aspect of the invention, the sorting machine is configured to receive signaling for active synchronization with the automatic testing equipment via a tester interface. Furthermore, the sorting machine is configured to perform active synchronization with the automatic testing equipment based on the synchronization signaling, wherein the active synchronization is a synchronization that does not require waiting for insertion.

[0128] According to a further embodiment of the second aspect of the invention, the sorting machine is configured to receive calibration timing information (e.g., as synchronization signaling) from an automated testing device via a test machine interface to determine calibration (e.g., self-calibration) timing, which can be performed synchronously with a testing process (e.g., a predetermined phase in the testing process). Furthermore, the sorting machine is configured to determine the calibration timing based on the calibration timing information.

[0129] According to a further embodiment of the second aspect of the invention, the sorter is configured to receive signaling (e.g., as synchronization signaling) from an automated test equipment via a tester interface, the signaling instructing the device under test to be conditioned, powered, biased, or initialized in a predetermined manner (e.g., in a manner suitable for the sorter's calibration or self-calibration).

[0130] According to a further embodiment of the second aspect of the invention, the sorter is configured to receive signaling from an automated test equipment via a test machine interface when different device or test conditions are reached (e.g., when different power-on, heating, bias, or initialization states of the device under test are reached). Such states may apply, for example, to two or more different calibration measurements of the sorter. Furthermore, such states may result in, for example, different current device-under-test temperatures, e.g., different device-under-test temperatures suitable for the sorter's calibration.

[0131] According to a further embodiment of the second aspect of the invention, the sorter is configured to receive signaling from an automated test apparatus via a test machine interface for triggering one or more temperature readings. Furthermore, the sorter is configured to perform one or more temperature measurements based on synchronization signaling, for example, a first temperature reading after the device under test is biased and before the start of active device testing (e.g., during the pre-test phase, when the device is biased but not yet excited with one or more test modes) and a second temperature reading after the start of testing.

[0132] According to a further embodiment of the second aspect of the invention, the sorting machine is configured to perform thermal diode calibration based on synchronization signaling received from an automated test equipment via a test machine interface. Furthermore, the thermal diode calibration includes incremental temperature measurement; the sorting machine is configured to perform the incremental temperature measurement, for example, using timing determined by the synchronization signaling. Additionally, the sorting machine is configured to receive real-time measurement timing information from the automated test equipment via a real-time test machine interface for use in thermal diode calibration.

[0133] According to a further embodiment of the second aspect of the invention, the synchronization signaling includes, for example, test site-specific time information for measurements of the sorting machine.

[0134] According to a further embodiment of the second aspect of the invention, the synchronization signaling includes, for example, test site-specific test status information or device status information, for example, to notify the sorter of the test process and / or schedule the sorter's measurements and / or trigger predictive temperature control (e.g., "P1" or "P2").

[0135] According to the invention summary of the third aspect

[0136] An embodiment of the third aspect of the invention includes an automated test apparatus (e.g., a "test machine") for testing a device under test, including a real-time sorter interface, for example, an interface with triggering functionality (e.g., a "fixed endpoint interface"), arranged on a test head, the test head including multiple lines (e.g., a communication channel adapted for a communication task); for example, without separate signal lines.

[0137] The sorter interface can be, for example, an optional bidirectional dedicated interface, specifically adapted for communication between automated testing equipment and the sorter. The sorter interface can also be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0138] Furthermore, the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can be, for example, directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime), such that the latency of signaling provided or received by the interface is less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0139] In addition, the real-time sorter interface is configured to provide the sorter with test-site specific signaling (e.g., trigger or pre-trigger) for multiple test sites to control (e.g., trigger or pre-trigger) (e.g.) active temperature (e.g., regulation) control, such as temperature control functions prior to expected device temperature changes or expected device power consumption changes, such as pre-cooling or pre-heating functions of active temperature control.

[0140] The sorter can be configured, for example, to load and unload chips on a device under test board or device under test interface, and can be configured, for example, to control one or more (e.g., physical, non-electrical) parameters of one or more devices under test, such as temperature, or (e.g., site ID), via a shared signal link (e.g., a shared signal line or a shared optical link).

[0141] A further embodiment of the third aspect of the invention includes a sorting machine for use in conjunction with an automated test apparatus to test a device under test, the sorting machine including a real-time tester interface, for example, an interface with triggering functionality (e.g., a "fixed endpoint interface").

[0142] The tester interface may be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated test equipment and sorter; the sorter interface may be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0143] Furthermore, the test machine interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can be, for example, directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0144] In addition, the sorter is configured to receive test site-specific signals (e.g., trigger or pre-trigger) from the automated test equipment via a tester interface, and the sorter is configured to control (e.g.) an active temperature control (e.g., regulation) function, such as a pre-cooling function of active temperature control, in response to the received test site-specific signals.

[0145] A further embodiment of the third aspect of the invention includes a method for testing a device under test in conjunction with an automated test apparatus (e.g., a “test machine”), wherein the method includes providing a test site-specific signaling (e.g., triggering or pre-triggering) for multiple different test sites to a sorter via a real-time sorter interface to control (e.g., thereby control) (e.g., triggering or pre-triggering) (e.g., active temperature control) functions, such as temperature control functions prior to expected device temperature changes or expected device power consumption changes, such as pre-cooling or pre-heating functions of active temperature control.

[0146] The sorter can be configured, for example, to load and unload chips on a device under test board or device under test interface, and can be configured, for example, to control one or more (e.g., physical, non-electrical) parameters of one or more devices under test, such as temperature, or including site ID, via a shared signal link (e.g., a shared signal line or a shared optical link) when one or more devices under test are being tested.

[0147] The sorter interface may be, for example, a trigger-enabled interface (e.g., a "fixed endpoint interface") arranged on a test head, wherein the test head includes, for example, multiple lines (e.g., a communication channel adapted for a communication task); for example, no separate signal lines.

[0148] The sorter interface can be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated testing equipment and the sorter; or it can be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0149] Furthermore, the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can be, for example, directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing additional communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. For example, the interface can be an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0150] A further embodiment of the third aspect of the invention includes a method for testing a device under test in conjunction with a sorting machine and / or an automated test apparatus, wherein the method includes receiving test site-specific signaling (e.g., triggering or pre-triggering) from the automated test apparatus via a real-time test apparatus interface (e.g., an interface with triggering functionality, such as a "fixed endpoint interface"). Furthermore, the method includes controlling (e.g., an active temperature control (e.g., regulation) function, such as a pre-cooling function of active temperature control, in response to the received test site-specific signaling.

[0151] The tester interface may be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated test equipment and sorter; the sorter interface may be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0152] Furthermore, the test machine interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can be, for example, directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, other existing communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. For example, the interface can be an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0153] A further embodiment of the third aspect includes a testing system comprising an automated testing device as defined herein and a sorting machine as defined herein.

[0154] A further embodiment of the third aspect includes a test system comprising a sorting machine as defined herein and a sorting machine as defined herein.

[0155] A further embodiment of the third aspect includes a computer program, wherein the computer program, when run on a computer, is used to perform the method according to the embodiment.

[0156] A further embodiment of the third aspect includes a testing unit comprising a sorting machine according to the embodiment and an automatic testing device according to the embodiment, wherein the sorting machine interface of the automatic testing device is coupled to the testing machine interface of the sorting machine.

[0157] The ideas of embodiments of the invention according to the third aspect will now be explained in the context of automated testing equipment. The basic idea will be understood as similar for corresponding sorting machines and methods used in such automated testing equipment and / or sorting machines. Therefore, any features, functions, and details discussed herein with respect to automated testing equipment can be used individually or in combination (e.g., in the same or similar manner) in sorting machines, testing systems, testing units, and / or methods used in automated testing equipment, sorting machines, testing systems, or testing units.

[0158] An embodiment of the third aspect of the present invention is based on the idea of ​​providing test site-specific signaling from an automated test device to a sorter via a real-time sorter interface.

[0159] The real-time sorter interface enables automated test equipment to provide relevant data to the sorter over a certain time span (e.g., a sufficiently short time span) so that the sorter can react based on the provided data. Furthermore, this information can be test site-specific. In addition to enabling real-time interaction between the automated test equipment and the sorter, the sorter can also be provided with different information for multiple devices under test.

[0160] Therefore, test routines can be adapted in real time for specific devices under test (DUTs). For example, to schedule and perform temperature measurements, a sorter can be informed of an impending event (e.g., an increase in power supply) for a specific DUT. Furthermore, temperature control can be performed by the sorter based on information about an upcoming temperature rise. For example, predictive cooling can be triggered via trigger signaling (e.g., pre-trigger signaling). Additionally, test site-specific information can be used to prepare for cooling or even shutting down a specific DUT to prevent damage and allow testing of other DUTs to continue.

[0161] The inventors recognized that using a real-time interface could increase testing flexibility. Because information can be sent and received before it expires, tests can be precisely tailored to each of the multiple devices under test.

[0162] Furthermore, the inventors have recognized that devices in multiple devices under test may exhibit different behaviors or responses in response to stimuli. These devices may be affected by manufacturing variations, so even multiple similar or identical devices under test (e.g., devices identical in terms of their specifications) may provide different output signals even when provided with the same input signal. In addition, some devices may be nondeterministic. Systems may involve high complexity, making it difficult or even impossible to predict test times or thermal dissipation (e.g., for devices under test in the form of a system-on-a-chip (SoC)).

[0163] Therefore, embodiments of the invention allow for test site-specific adaptations to tests, for example, to address the behavior of non-homogeneous devices under test. Tests (e.g., cooling and heating) can be adapted to the individual characteristics of each device under test.

[0164] According to a further embodiment of the third aspect of the invention, the real-time sorter interface is configured to provide test site-specific signaling having one or more of the following information: test site-specific alarm, test site-specific trigger (e.g., pre-trigger), identification information (e.g., ID), test site-specific temperature adjustment (e.g., cooling) information, test site-specific setting information (e.g., VDD voltage information), test site-specific (e.g., expected heat dissipation) information; and test site-specific timing information (e.g., temperature control timing information).

[0165] Signaling can be used to send multiple parameters that can be used to optimize the testing of the device under test (DUT). Therefore, thermal management of individual DUTs can be improved.

[0166] According to a further embodiment of the third aspect of the invention, the test site-specific signaling includes a combination of test site identification information and adjustment information (e.g., timing information, control amplitude information, control duration information). Furthermore, the test site identification information is configured, for example, to enable test site-specific associations of the adjustment information in a sorting machine.

[0167] Specific test sites and (e.g., therefore) specific devices under test (DUTs) can be associated, linked, or related to a specific set of conditioning information. This information can be stored in a sorter and updated periodically or as needed (e.g., when the automated test equipment updates the conditioning information for the DUT or test sites). Based on the conditioning information and test site identification information, the sorter can schedule and / or optimize its interactions with one or more DUTs (e.g., temperature management). Therefore, testing can be performed more efficiently, for example, because testing can be tailored to each DUT.

[0168] According to a further embodiment of the third aspect of the invention, the test site identification information includes a test site ID; and / or the test site ID is modulated onto test site-specific signaling. Using the test site ID provides an easily implemented method for identifying specific test sites or specific devices under test. Modulation of the test site ID can provide good data transmission efficiency between automated test equipment and sorting machines, and can allow for rapid data transmission.

[0169] According to a further embodiment of the third aspect of the invention, the conditioning information includes timing information (e.g., when to cool or heat or delay) and / or control amplitude information (e.g., cooling amplitude) and / or control duration information (e.g., cooling duration). Access to the timing information allows the sorter to synchronize with automated testing equipment or, for example, a test cycle. Therefore, adequate cooling or heating can be performed. Furthermore, specific time points for measurement can be sent to provide, for example, temperature information for conditioning the device under test. This can improve testing efficiency and prevent temperature malfunctions of the device under test.

[0170] According to a further embodiment of the third aspect of the invention, the automated test apparatus is configured to provide a single (e.g., shared) trigger (e.g., pre-trigger) signaling for multiple test sites, as well as different site-specific delay information describing (e.g., the delay between a triggering event defined by the single shared triggering signaling and the commencement of thermal pre-adjustment operations for different test sites.

[0171] Data transmission efficiency can be improved by sending basic signals and test site-specific adaptation signals, or by sending basic information and test site-specific information. A common trigger (e.g., information about the start of a test or test sequence) can be sent, for example, where multiple devices under test are supplied with a power supply voltage. More detailed information, such as peak power or excitation timing information of the devices, can be provided to the sorter via site-specific delay information, for example, enabling the sorter to provide information about when to measure temperature or when to cool or heat a particular device under test.

[0172] According to a further embodiment of the third aspect of the invention, the automated test equipment is configured to perform test processes at different stations by reaching corresponding states at different times within each test process, wherein the automated test equipment is configured to provide station-specific signaling in response to reaching a predetermined state in each test process. This allows for highly independent testing of each device under test. Furthermore, by providing station-specific signaling to the sorting machine, accurate test results can be obtained. Therefore, the sorting machine can schedule device-under-test manipulation (e.g., heating or cooling) or measurement according to the corresponding predetermined state.

[0173] Further embodiments of the invention according to the third aspect are described in further detail below. However, the advantages and examples explained in the context of automated testing equipment are to be understood as similar to those for corresponding sorting machines. Therefore, any features, functions, and details discussed above with respect to automated testing equipment can be used, incorporated into, or adapted for corresponding sorting machines. For example, an automated testing equipment configured to provide signaling can be replaced by a corresponding sorting machine configured to receive said signaling, and vice versa. As another example, the automated testing equipment providing signaling to a sorting machine to perform a task can be replaced by the corresponding sorting machine receiving the signaling and being configured to perform said task.

[0174] According to a further embodiment of the third aspect of the present invention, the real-time test machine interface is configured to receive test site-specific signaling from an automated test device via the test machine interface, the signaling having one or more of the following information: test site-specific alarm, test site-specific trigger (e.g., pre-trigger), identification information (e.g., ID), test site-specific temperature adjustment (e.g., cooling) information, test site-specific setting information (e.g., VDD voltage information), test location-specific (e.g., expected heat dissipation) information, and test site-specific timing information (e.g., temperature control timing information).

[0175] According to a further embodiment of the third aspect of the invention, the test site-specific signaling includes a combination of test site identification information and adjustment information (e.g., timing information, control amplitude information, control duration information), and the test site identification information is configured to enable test site-specific association of the adjustment information in, for example, a sorting machine.

[0176] According to a further embodiment of the third aspect of the present invention, the test site identification information includes a test site ID; and the test site ID is modulated onto test site-specific signaling.

[0177] According to a further embodiment of the third aspect of the invention, the adjustment information includes timing information (e.g., when to cool or heat or delay) and / or control amplitude information (e.g., cooling amplitude) and / or control duration information (e.g., cooling duration).

[0178] According to a further embodiment of the third aspect of the invention, the sorter is configured to receive, via a tester interface, a single (e.g., shared) trigger (e.g., pre-trigger) signaling for multiple test sites, and different site-specific delay information describing, for example, the delay between a triggering event defined by the single shared triggering signaling and the commencement of thermal pre-conditioning operations for different test sites.

[0179] According to the invention summary of the fourth aspect

[0180] An embodiment of the fourth aspect of the invention includes a sorting machine for use in conjunction with an automated test apparatus to test a device under test, the sorting machine including a real-time tester interface, for example, an interface with triggering functionality (“fixed endpoint interface”).

[0181] In addition, the real-time test machine interface is configured to provide test site-specific signaling to the automated test equipment, (for example) to control temperature control functions or influence or adapt the test process (e.g., test site-specific shutdown).

[0182] The tester interface may be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated test equipment and sorter; the sorter interface may be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0183] Furthermore, the test machine interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime), for example, making the latency of signaling provided or received by the interface less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. For example, the interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0184] A further embodiment of the fourth aspect of the invention includes an automated test apparatus (e.g., a “test machine”) for testing a device under test, comprising a real-time sorter interface (e.g., an interface with triggering functionality, such as a “fixed endpoint interface”), arranged, for example, on a test head, which includes, for example, multiple lines (e.g., communication channels adapted for communication tasks); for example, no separate signal lines.

[0185] Furthermore, the automated test equipment is configured to receive test site-specific signaling from the sorter via a sorter interface. Additionally, the automated test equipment may be configured, for example, to control temperature control functions (e.g., site-specific shutdown) in response to received test site-specific signaling, or to consider test site-specific signaling, or to record test site-specific signaling, or to adapt the test process in response to test site-specific signaling.

[0186] The sorter interface can be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated testing equipment and the sorter; or it can be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0187] Furthermore, the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, and / or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0188] A further embodiment of the fourth aspect of the invention includes a method for testing a device under test in conjunction with a sorting machine and / or an automated test apparatus, wherein the method includes providing test site-specific signaling to the automated test apparatus via a real-time test machine interface (e.g., an interface with triggering capabilities, such as a "fixed endpoint interface"), for example, to control temperature control functions or influence or adapt the test process (e.g., test site-specific shutdown).

[0189] The tester interface may be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated test equipment and sorter; the sorter interface may be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0190] Furthermore, the test machine interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, or application-specific interface. In addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus. The interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. The interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, it can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime), for example, making the latency of signaling provided or received by the interface less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. The interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0191] A further embodiment of the fourth aspect of the invention includes a method, for example, for use by an automated test apparatus (e.g., a "test machine") to test a device under test, wherein the method includes receiving test site-specific signaling from a sorter via, for example, a real-time sorter interface (e.g., an interface with triggering functionality, such as a "fixed endpoint interface") arranged on a test head, the test head including, for example, multiple lines (e.g., communication channels adapted for communication tasks); for example, no separate signal lines. Optionally, the automated test apparatus may be configured to, for example, control a temperature control function in response to the received test site-specific signaling, or take into account the test site-specific signaling, or record the test site-specific signaling, or adapt a test procedure in response to the test site-specific signaling.

[0192] The sorter interface can be, for example, an optional bidirectional dedicated interface, such as one specifically adapted for communication between automated testing equipment and the sorter; or it can be, for example, an application-specific interface, wherein, for example, a communication protocol is adapted for real-time signaling.

[0193] Furthermore, the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, or application-specific interface. In addition to being implemented as a bus, this interface can also be implemented as, for example, faster than a bus. This interface can be, for example, a low-latency interface, such as a real-time supporting interface and / or a high-speed interface. This interface can, for example, be directly positioned between the test head and the sorter. As a real-time interface, this interface can be faster than, for example, existing alternative communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling signaling latency provided or received by the interface to be less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond. This interface can be, for example, an application-specific interface, where, for example, a communication protocol is adapted for real-time signaling.

[0194] A further embodiment of the fourth aspect includes a testing system comprising an automated testing device as defined herein and a sorting machine as defined herein.

[0195] A further embodiment of the fourth aspect includes a test system comprising a sorting machine as defined herein and a sorting machine as defined herein.

[0196] A further embodiment of the fourth aspect includes a computer program that, when run on a computer, performs the method according to the embodiment.

[0197] A further embodiment of the fourth aspect includes a testing unit comprising a sorting machine according to the embodiment and an automatic testing device according to the embodiment, wherein the sorting machine interface of the automatic testing device is coupled to the testing machine interface of the sorting machine.

[0198] The ideas of embodiments of the invention according to the fourth aspect will now be explained in the context of a sorting machine. The basic idea will be understood to be similar for the corresponding automated testing equipment and the methods used with such automated testing equipment and / or sorting machines. Therefore, any features, functions, and details discussed herein with respect to a sorting machine can be used, individually or in combination, in (e.g., in the same or similar manner) automated testing systems, testing systems, testing units, and / or methods for automated testing equipment, sorting machines, testing systems, or testing units.

[0199] An embodiment of the fourth aspect of the invention is based on the idea of ​​providing test site-specific signaling to an automated test apparatus via a real-time test machine interface. The sorter can be configured to individually measure the temperature of the device under test (DUT). For example, if a malfunction occurs, a DUT may experience temperature runaway. This could lead to impending damage, for example, during a test cycle where the DUT is powered at high power. The real-time test machine interface can prevent such device damage. Information about temperature rise can be transmitted from the sorter to the automated test apparatus in real time (e.g., within a time span shorter than the time constant of the internal processing of the DUT). The automated test apparatus can shut down the malfunctioning DUT to prevent device damage. This allows testing of other DUTs to continue. Therefore, test time can be shortened, and device damage can be prevented.

[0200] In addition to malfunctions, automated test equipment can also adapt test routines using sorter information (e.g., temperature) or other information (e.g., device condition determined by the sorter). Devices can be classified in real time according to quality based on test results, and tests can be adapted according to device category.

[0201] Furthermore, individual temperature information from multiple devices under test can be used to adapt the test, for example, by adjusting cooling times or a short delay before sending new stimuli to the device. This can improve test efficiency because it prevents the device under test from overheating.

[0202] According to a further embodiment of the fourth aspect of the invention, the sorter is configured to detect (e.g., a temperature malfunction of the device under test, e.g., temperature runaway) or (e.g., a disconnection of a temperature signal), or the sorter is no longer able to cool the device. Furthermore, the test site-specific signaling is a test site-specific alarm, and the sorter is configured to enable test site-specific alarm processing and / or test site-specific shutdown (e.g., test site-specific power supply shutdown).

[0203] Real-time interfaces enable rapid responses, such as shutting down power in the event of temperature runaway. Therefore, the sorter can be configured to detect any temperature malfunctions of the device under test (e.g., test site specific). The sorter can signal automated test equipment to prevent device damage, for example, to allow for cooling of the device with an additional delay before, for example, the next stimulus. This can improve test efficiency.

[0204] According to a further embodiment of the fourth aspect of the invention, the sorting machine is configured to influence data processing (e.g., packing and data logging) of the device under test using signaling sent to an automated test apparatus via a real-time test machine interface. The sorting machine may, for example, be configured to detect abnormal behavior of the device under test, and thus may initiate data logging (e.g., logging in the automated test apparatus or logging within the device under test) for event analysis. Alternatively, malfunction of the device under test may be detected by the sorting machine, thus stopping data logging, for example, without compromising the statistical data of a batch of devices. Therefore, test accuracy and data acquisition can be improved.

[0205] According to a further embodiment of the fourth aspect of the present invention, the test site-specific signaling includes a combination of test site identification information and regulation information (e.g., timing information, control amplitude information, control duration information). Furthermore, the test site identification information is configured to enable (e.g., in a sorting machine) test site-specific associations of the regulation information.

[0206] Specific test sites, and therefore specific devices under test (DUTs), can be associated with, linked to, or related to a specific set of conditioning information. This information can be stored in an automated test apparatus and updated periodically or as needed (e.g., when a sorting machine updates the conditioning information for the DUT or test sites). Based on the conditioning information and test site identification information, the automated test apparatus can be adapted for testing specific DUTs. Therefore, testing can be performed more efficiently, for example, because testing can be adapted for each DUT.

[0207] According to a further embodiment of the fourth aspect of the present invention, the test site identification information includes a test site ID; and / or the test site ID is modulated onto test site-specific signaling. Using the test site ID provides an easily implemented method for identifying specific test sides or specific devices under test. Modulation of the test site ID can provide good data transmission efficiency between the sorting machine and automated test equipment, and allows for rapid data transmission.

[0208] According to a further embodiment of the fourth aspect of the invention, the adjustment information includes timing information (e.g., when to cool or heat or delay) and / or control amplitude information (e.g., cooling amplitude) and / or control duration information (e.g., cooling duration).

[0209] Access to timing information allows automated test equipment to synchronize with the sorter. This enables adequate cooling or heating. This improves test efficiency and prevents temperature-related malfunctions in the device under test.

[0210] Further embodiments of the invention according to the fourth aspect are explained in further detail below. However, the advantages and examples explained in the context of sorting machines are to be understood as being similar to those of corresponding automated testing equipment. Therefore, any features, functions, and details discussed above with respect to automated testing equipment can be used, incorporated into, or adapted for corresponding sorting machines. For example, a sorting machine configured to provide signaling can be replaced by a corresponding automated testing equipment configured to receive said signaling. As another example, the sorting machine providing signaling to the automated testing equipment to perform a task can be replaced by the corresponding automated testing equipment receiving the signaling and being configured to perform said task.

[0211] According to a further embodiment of the fourth aspect of the invention, the test site-specific signaling is a test site-specific alarm; and the automated test equipment is configured to process the test site-specific alarm and / or (for example) perform a test site-specific shutdown based on the test site-specific alarm (e.g., test site-specifically deactivating the device power supply that powers the device under test).

[0212] According to a further embodiment of the fourth aspect of the invention, the automated test equipment is configured to influence data processing (e.g., packing and data logging) of the device under test in response to a signal (e.g., a test site-specific signal) received from a sorting machine. The automated test equipment can be configured to detect abnormal behavior of the device under test and thus initiate data logging for event analysis. Alternatively, the automated test equipment can determine a malfunction of the device under test and therefore stop data logging, for example, without compromising the statistical data of a batch of devices. Therefore, test accuracy can be improved and data acquisition enhanced.

[0213] According to a further embodiment of the fourth aspect of the present invention, the test site-specific signaling includes a combination of test site identification information and adjustment information (e.g., timing information, control amplitude information, control duration information), and the test site identification information is configured to enable test site-specific association of the adjustment information (e.g., in a sorting machine).

[0214] According to a further embodiment of the fourth aspect of the present invention, the test site identification information includes a test site ID and / or the test site ID is modulated onto test site-specific signaling.

[0215] According to a further embodiment of the fourth aspect of the invention, the adjustment information includes timing information (e.g., when to cool or heat or delay) and / or control amplitude information (e.g., cooling amplitude) and / or control duration information (e.g., cooling duration).

[0216] Another embodiment of the invention includes a method, for example, for use by an automated test apparatus (e.g., a test machine) to test a device under test, the automated test apparatus including a sorter interface, which may be, for example, a bidirectional dedicated interface, for example, specifically adapted for communication between the automated test apparatus and the sorter; for example, using a specific interface.

[0217] For example, the communication protocol is adapted for real-time signaling; the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, or application-specific interface; in addition to being implemented as a bus, the interface can also be implemented as (e.g.) faster than a bus; the interface can be (e.g.) a low-latency interface, a real-time supporting interface, or a fast interface; the interface can be (e.g.) directly positioned between the test head and the sorter; the interface can be faster than (e.g.) other existing communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, enabling the interface to provide or receive... The signaling latency is less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond; the sorter interface (e.g., an interface with triggering functionality, such as a "fixed endpoint interface") is arranged on a test head, which includes multiple lines (e.g., communication channels adapted for communication tasks); for example, there is no separate signaling line, wherein the method includes receiving test site-specific signaling from the sorter via the sorter interface, which may be, for example, a bidirectional dedicated interface, e.g., specifically adapted for communication between automated test equipment and the sorter; for example, an application-specific interface, wherein, for example, The communication protocol is adapted for real-time signaling; the sorter interface is a real-time interface, such as a point-to-point, end-to-end, non-bus, non-standard, or application-specific interface; in addition to being implemented as a bus, the interface can also be implemented as, for example, faster than a bus; the interface can be, for example, a low-latency interface, a real-time supporting interface, or a fast interface; the interface can, for example, be directly positioned between the test head and the sorter; the interface can be faster than, for example, existing other communication interfaces; for example, enabling runtime data exchange; for example, enabling data exchange to achieve real-time test adaptation (e.g., at runtime); for example, reducing the latency of signaling provided or received by the interface. Less than 1 ms or even less than 100 microseconds, or even less than 10 microseconds or even less than 1 microsecond; the sorter interface (e.g., an interface with triggering function, such as a "fixed endpoint interface") is arranged on the test head, which includes multiple lines (e.g., communication channels adapted for communication tasks); for example, there is no separate signaling line, such as in which the automatic test equipment is configured to control temperature control functions (e.g., site-specific shutdown) in response to received test site-specific signaling, or to consider test site-specific signaling, or to record test site-specific signaling, or to adjust the test procedure in response to test site-specific signaling.

[0218] According to the invention summary of the fifth aspect

[0219] An embodiment of the fifth aspect of the invention includes an automated test apparatus (e.g., a "test machine") for testing a device under test, comprising, for example, a dedicated real-time (e.g., "fast") sorter interface, wherein, for example, the dedicated real-time sorter interface (e.g., a fast pre-trigger and communication channel between the sorter and the test machine) is configured to provide trigger signaling (e.g., pre-trigger signaling) to the sorter to trigger (e.g., pre-trigger) a temperature control function. Furthermore, for example, the dedicated real-time sorter interface is configured to provide additional signaling in addition to the trigger signaling, the additional signaling including, for example, real-time control information for the sorter to use, or only for the sorter to use during operation, to autonomously determine (e.g., calculate) or (e.g., autonomously modify a temperature control curve or perform temperature regulation. The control information may include, for example, PMON (e.g., parameters for monitoring real-time DUT power consumption), TJ (e.g., actual DUT junction temperature), SITE (e.g., site-specific control data), DUT (e.g., DUT-specific control data), TEST (e.g., test-specific response data), FLOW (e.g., test subprocess), and / or may include information about upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, and / or site and device-specific temperature control data.

[0220] Alternatively or additionally, the additional signaling may include information about one or more measured values ​​determined by the automated test equipment (e.g., PMON, TJ) or information about one or more measured values ​​extracted by the automated test equipment from the data stream of the device under test.

[0221] Alternatively or additionally, the additional signaling includes one or more test status parameters (e.g., SITE, DUT, TEST, FLOW) and information about upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, site-specific and device-specific temperature control data.

[0222] Alternatively or additionally, additional signaling may include alarm information, such as over- or under-temperature alarms specific to the test site for one or more devices under test.

[0223] A further embodiment of the fifth aspect of the invention includes a sorting machine for use in conjunction with an automated test apparatus to test a device under test (DUT). The sorting machine includes, for example, a bidirectional real-time tester interface, wherein, for example, the sorting machine is configured to receive trigger signals via the bidirectional real-time tester interface and, in addition to receiving the trigger signals, to receive supplementary signals. These supplementary signals include, for example, real-time control information for the sorting machine to use, or solely for use by the sorting machine during operation, to autonomously determine (e.g., calculate) or (e.g., autonomously modify) temperature control curves or to perform temperature regulation. For example, the control information may include, for example, PMON (e.g., a parameter for monitoring real-time DUT power consumption), TJ (e.g., actual DUT junction temperature), SITE (e.g., site-specific control data), DUT (e.g., DUT-specific control data), TEST (e.g., test-specific response data), FLOW (e.g., test sub-process), and / or information regarding upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, and / or site- or device-specific temperature control data.

[0224] Alternatively or additionally, the additional signaling may include information about one or more measured values ​​determined by the automated test equipment (e.g., PMON, TJ), or information about one or more measured values ​​extracted by the automated test equipment from the data stream of the device under test.

[0225] Alternatively or additionally, the additional signaling includes one or more test status parameters (e.g., SITE, DUT, TEST, FLOW) and information about upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, site-specific and device-specific temperature control data.

[0226] Alternatively or additionally, additional signaling may include alarm information, such as over- or under-temperature alarms specific to the test site for one or more devices under test.

[0227] In addition, the sorter is configured to use additional signaling to control (e.g., regulate) the temperature of one or more sites of the device under test, (e.g.) to determine or modify temperature control profiles or temperature regulation.

[0228] A further embodiment of the fifth aspect of the invention includes a method, for example, for use by an automated test apparatus (e.g., a “test machine”) to test a device under test, wherein the method includes providing a trigger signal (e.g., a pre-trigger signal) to a sorter via, for example, a dedicated real-time sorter interface (e.g., a fast pre-trigger communication channel between the sorter and the test machine) to trigger (e.g., thereby trigger, e.g., pre-trigger) a temperature control function.

[0229] Furthermore, the method also includes providing additional signaling beyond the trigger signaling via, for example, a dedicated real-time sorter interface. This additional signaling includes, for example, real-time control information for the sorter to use, or for the sorter to use only during operation, to autonomously determine (e.g., calculate) or (e.g., autonomously modify) the temperature control curve or perform temperature regulation. The control information may include, for example, PMON (e.g., a parameter for monitoring real-time DUT power consumption), TJ (e.g., actual DUT junction temperature), SITE (e.g., site-specific control data), DUT (e.g., DUT-specific control data), TEST (e.g., test-specific response data), FLOW (e.g., test subprocess), and / or information about upcoming temperature hotspots, the duration of the hotspot, the magnitude of the hotspot, and / or site- and period-specific temperature control data.

[0230] Alternatively or additionally, the additional signaling may include information about one or more measured values ​​determined by the automated test equipment (e.g., PMON, TJ) or information about one or more measured values ​​extracted by the automated test equipment from the data stream of the device under test.

[0231] Alternatively or additionally, the additional signaling includes one or more test status parameters (e.g., SITE, DUT, TEST, FLOW) and information about upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, site-specific and device-specific temperature control data.

[0232] Alternatively or additionally, additional signaling may include alarm information, such as over- or under-temperature alarms specific to the test site for one or more devices under test.

[0233] A further embodiment of the fifth aspect of the invention includes a method, for example, used in conjunction with a sorting machine and / or automated test equipment to test a device under test (DUT), wherein the method includes receiving trigger signals via, for example, a bidirectional real-time test machine interface, and receiving additional signals in addition to receiving the trigger signals. These additional signals include, for example, real-time control information for the sorting machine, or for the sorting machine only, to autonomously determine (e.g., calculate) or autonomously modify temperature control curves or perform temperature regulation during operation. The control information may include, for example, PMON (e.g., a parameter for monitoring real-time DUT power consumption), TJ (e.g., actual DUT junction temperature), SITE (e.g., site-specific control data), DUT (e.g., DUT-specific control data), TEST (e.g., test-specific response data), FLOW (e.g., test sub-flow), and information regarding upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, and / or site- and device-specific temperature control data.

[0234] Alternatively or additionally, the additional signaling may include information about one or more measured values ​​determined by the automated test equipment (e.g., PMON, TJ) or information about one or more measured values ​​extracted by the automated test equipment from the data stream of the device under test.

[0235] Alternatively or additionally, the additional signaling includes one or more test status parameters (e.g., SITE, DUT, TEST, FLOW) and information about upcoming temperature hotspots, the duration of the hotspots, the magnitude of the hotspots, site-specific and device-specific temperature control data.

[0236] Alternatively or additionally, additional signaling may include alarm information, such as over- or under-temperature alarms specific to the test site for one or more devices under test.

[0237] In addition, the method includes using additional signaling to control (e.g., regulate, thereby control) the temperature of one or more device sites under test, (e.g.) to determine or modify temperature control profiles or temperature regulation.

[0238] A further embodiment of the fifth aspect includes a testing system comprising an automated testing device as defined herein and a sorting machine as defined herein.

[0239] A further embodiment of the fifth aspect includes a test system comprising a sorting machine as defined herein and a sorting machine as defined herein.

[0240] A further embodiment of the fifth aspect of the invention includes a computer program that, when run on a computer, performs the method according to the embodiment.

[0241] A further embodiment of the fifth aspect of the present invention includes a testing unit comprising a sorting machine according to an embodiment and an automatic testing device according to an embodiment, wherein the sorting machine interface of the automatic testing device is coupled to the testing machine interface of the sorting machine.

[0242] The concepts of embodiments of the invention according to the fifth aspect will now be explained in the context of automated testing equipment. The basic idea will be understood as similar for corresponding sorting machines and methods used in such automated testing equipment and / or sorting machines. Therefore, any features, functions, and details discussed herein with respect to automated testing equipment can be used individually or in combination (e.g., in the same or similar manner) in sorting machines, testing systems, testing units, and / or methods used in automated testing equipment, sorting machines, testing systems, or testing units.

[0243] An embodiment of the fifth aspect of the present invention is based on the idea of ​​providing additional signaling (in addition to providing trigger signaling) from an automated test device to a sorter via a real-time sorter interface, wherein the additional signaling includes control information for the sorter to determine or modify a temperature control curve or to perform temperature regulation, and information regarding one or more measured values ​​determined by the automated test device or extracted by the automated test device from the data stream of the device under test, one or more test status parameters, and at least one of alarm information.

[0244] The inventors recognized that, in addition to triggering signaling, a variety of information could be provided in real time (e.g., over a shorter time span compared to the internal processing of the device under test) using a real-time interface for temperature control functions. This ability to provide such information in real time allows for real-time test adaptation and evaluation, thereby improving test efficiency and accuracy.

[0245] Based on this information, automated test equipment can be configured to predict and adjust temperature hotspots of the device under test. Special algorithms within automated test equipment (e.g., test machines) or sorting machines, or both, can use this data (e.g., parameters) to make early or predictive determinations regarding, for example, the cooling amplitude, duration, and intensity of each test site.

[0246] For example, triggering signals (e.g., signals indicating that the device under test is in a specific state, such as a test-ready state) can be used to send additional information. For example, based on such signals (e.g., including the additional information), calibration or reference measurements can be performed. Thus, the device under test can be appropriately biased by automated test equipment to allow a sorting machine to perform a reference temperature measurement.

[0247] Therefore, the sorting machine can begin performing temperature measurements during the corresponding test or test sequence. Further triggering (e.g., pre-triggering) signaling can be used to send additional information. The sorting machine can interpret the further triggering signaling or trigger pulse as a pre-triggering signal, for example, to activate cooling before the temperature rises. For example, automated test equipment can predict the temperature rise based on estimated power consumption associated with the current test or test sequence.

[0248] For example, the sorter can perform a reference temperature measurement in response to a first trigger pulse, and then can perform further temperature measurements continuously (or repeatedly). For example, the sorter can use the reference temperature measurement results for calibration purposes, such as to eliminate the influence of temperature measurement structural characteristics on the device under test from further temperature measurement results.

[0249] According to a further embodiment of the fifth aspect of the invention, the automated test equipment is configured to extract measured values ​​or parameters (e.g., junction temperature information) from the digital data stream (or analog data stream) of the device under test; and the real-time sorter interface is configured to periodically (e.g., at a sampling rate of at least 500 Hz or at least 1 kHz, or at least 10 kHz or at least 5 kHz) send the measured values ​​or parameters to a sorter via the real-time sorter interface to, for example, support the sorter in performing temperature regulation, wherein, for example, the values ​​or parameters may dynamically or in real-time influence or flow into the regulation.

[0250] Based on digital data streams (or analog data streams), automated test equipment can be configured to analyze, determine, or evaluate information (e.g., condition) about the device under test. The results can be device parameters, which may include information about the device's characteristics. Based on the parameters or measured values ​​sent by the automated test equipment to the sorting machine, the sorting machine can adapt its temperature control strategy. Furthermore, the automated test equipment can adapt its test procedures or test cycles based on the parameters or measured values. The sampling rate of information transmission can be selected based on the speed of internal processing and / or computation time of the device under test. The sampling rate can be selected so that the sorting machine and / or tester can react in a sufficiently short time to prevent undesirable events such as temperature hotspots (or even thermal runaway).

[0251] According to a further embodiment of the fifth aspect of the invention, the automated test equipment is configured to periodically (e.g., at a sampling rate of at least 500 Hz, at least 10 kHz, or at least 5 kHz) send values ​​or parameters measured by the instruments of the automated test equipment (e.g., analog values ​​or parameters, such as power consumption values ​​describing the power consumed by the device under test, or current values ​​describing the current flowing into the device under test) to the sorter via a sorter interface (e.g., in real time) to support the sorter in performing temperature regulation, wherein, for example, the values ​​or parameters dynamically or in real time affect the regulation or inflow regulation.

[0252] As previously mentioned, the sampling rate can be selected based on the characteristics of the device under test (DUT), such as the estimated time span between normal power consumption and critical overheating. Since any sufficient information (e.g., parameters or values) can be sent to the sorter to improve testing, automated test equipment can be configured to, for example, measure such values ​​or parameters via instruments. Additional measurements by automated test equipment can provide more parameters to optimize the testing and monitoring of the DUT.

[0253] According to a further embodiment of the fifth aspect of the invention, the real-time sorter interface is configured to provide the additional signaling and / or triggering signaling with a delay of less than 1 ms, less than 100 microseconds, less than 10 microseconds, or less than 1 microsecond (e.g., a delay between 1 s and 1 ms).

[0254] To perform transmissions in real time (e.g., at runtime), as described above, a real-time sorter interface can be designed or configured accordingly. This allows for rapid data transmission and, for example, prevents the sorter and / or automated testing equipment from overheating.

[0255] According to a further embodiment of the fifth aspect of the invention, the real-time sorter interface is configured to provide bandwidth such that the delay of the additional signaling and / or the triggering signaling provided by the real-time sorter interface is lower than the time constant of the control loop of the temperature control function.

[0256] This allows for rapid adaptation of temperature control, thereby reducing control failures. When the interface has a faster time constant than the control loop, (for example) the control can be adapted before the effects of initial temperature hotspots (or even thermal runaway) might interfere with testing.

[0257] According to a further embodiment of the fifth aspect of the invention, the temperature control function includes a control loop that includes a sorter interface; and the temperature control function is configured to take into account real-time information (e.g., trigger signaling and / or additional signaling) sent through the sorter interface, for example, causing control loop signals or control loop information to be sent through the sorter interface and the tester interface, for example, causing control loop signals or control loop information to be sent directly between the sorter and the automatic test equipment (e.g., point-to-point transmission).

[0258] Although additional information is sent between the automated testing equipment and the sorting machine, the real-time sorting machine interface can achieve temperature regulation in real time due to its transmission speed. Therefore, temperature control can be efficient, accurate, and fast.

[0259] According to a further embodiment of the fifth aspect of the invention, the control loop includes an automatic testing device, and the automatic testing device is configured as part (e.g., a component) of an integrated regulation (e.g., temperature control (regulation) function) performed in conjunction with the sorting machine.

[0260] Automated test equipment can be, for example, a feedforward control element for temperature control. For instance, the manipulated variable of the automated test equipment can be, for example, the power supply to the device under test (DUT). Precise temperature control can be achieved by the sorting machine changing its cooling / heating and / or the automated test equipment changing its power supply. Alternatively or additionally, the automated test equipment can determine parameters or measured values ​​of the DUT and provide said parameters or values ​​to the rest of the control loop (e.g., control elements). Furthermore, the automated test equipment can, for example, calculate the control input of the regulation loop (e.g., the control input of the sorting machine). Therefore, temperature control can include good stability characteristics and a short response time.

[0261] According to a further embodiment of the fifth aspect of the invention, the real-time sorter interface is configured to provide the triggering and / or additional signaling for the temperature control function to consider in real time. The design of the control algorithm and the real-time sorter interface that meets real-time requirements enable the temperature control function to efficiently control the temperature of the device under test. A fast adjustment loop allows for rapid adjustment of control errors. Therefore, the desired device temperature can be maintained.

[0262] According to a further embodiment of the fifth aspect of the invention, the real-time sorter interface is part of a temperature control loop. As described above, since the sorter interface is a real-time interface, it can be part of a control loop without slowing down the control algorithm, thus enabling a fast control or control loop.

[0263] According to a further embodiment of the fifth aspect of the invention, the automated test equipment is configured to implement integrated regulation, wherein the regulation function is distributed between the automated test equipment and the sorter, and the regulation data is transmitted via the sorter interface. The sorter may be a control element or a calibration element of a control loop. The sorter may be configured to manipulate variables, for example, by cooling or heating the device under test. Furthermore, the sorter may, for example, be part of the feedback loop of the control loop by providing, for example, a measurement of the temperature of the device under test.

[0264] As described above, automated test equipment can be, for example, a feedforward control element for temperature control. For instance, a second manipulated variable of the automated test equipment can be, for example, the power supply to the device under test (DUT) or a test sequence (wherein the test sequence can, for example, define the “stress” of the DUT by defining which blocks in the DUT are active or by influencing the clock frequency of the DUT). Precise temperature control can be achieved by the sorting machine changing its cooling / heating and / or the automated test equipment changing its power supply.

[0265] In addition, the sorting machine can provide temperature control functionality, and the sorting machine interface can provide additional information for temperature control. This additional information may include information about upcoming temperature peaks (e.g., due to increased power supply) or other parameters and values ​​determined by automated testing equipment.

[0266] Therefore, temperature control can include good stability characteristics and a short response time.

[0267] According to a further embodiment of the fifth aspect of the invention, the automatic testing equipment is configured to use a pattern provided by the pattern generator of the automatic testing equipment to influence a conditioning function (e.g., an integrated conditioning function jointly provided by the automatic testing equipment and the sorting machine), wherein the pattern provided by the pattern generator of the automatic testing equipment can be sent in real time, for example, via the sorting machine interface.

[0268] Further embodiments of the invention according to the fifth aspect are explained in further detail below. However, the advantages and examples explained in the context of the automated testing equipment should be understood to be similar for the corresponding sorting machine. Therefore, any features, functions, and details discussed above with respect to the automated testing equipment can be used, incorporated into, or adapted for the corresponding sorting machine. For example, an automated testing equipment configured to provide signaling can be replaced by a corresponding sorting machine configured to receive said signaling, and vice versa. As another example, the automated testing equipment sending signaling to the sorting machine to perform a task can be replaced by the corresponding sorting machine receiving the signaling and being configured to perform said task.

[0269] According to a further embodiment of the fifth aspect of the invention, the sorting machine is configured to determine a temperature control curve or a temperature regulation curve (e.g., during operation); the sorting machine is configured to determine the cooling amplitude and / or duration and / or cooling intensity for (e.g.) the determination of the temperature control curve or temperature regulation curve for each test site (e.g., during operation).

[0270] Based on measurements from the sorter and (optionally) further information from automated testing equipment (e.g., additional signaling), the sorter can determine an accurate prediction of the device temperature. Therefore, a temperature control profile or temperature conditioning profile (e.g., during operation) can be determined by the sorter. To maintain the desired device temperature, the sorter can determine the appropriate cooling and / or heating amplitudes, their duration, and intensity. Thus, the desired device temperature can be achieved with a small tolerance band and rapid control error compensation.

[0271] According to a further embodiment of the fifth aspect of the invention, the temperature control function includes a control loop that includes a tester interface, and the temperature control function is configured to take into account real-time information received through the tester interface (e.g., trigger signaling and / or additional signaling), for example, causing control loop signals or control loop information to be transmitted through the sorter interface and the tester interface, for example, causing control loop signals or control loop information to be transmitted directly between the sorter and the automatic test equipment (e.g., point-to-point transmission), for example, the signal delay is negligible compared to the time constant of the temperature control function or the calculation time of the temperature control function.

[0272] According to a further embodiment of the fifth aspect of the invention, the control loop includes a sorter, and the sorter is configured as part (e.g., a component) of an integrated regulator (e.g., a temperature control (regulation) function) formed in conjunction with an automated testing device.

[0273] According to a further embodiment of the fifth aspect of the invention, the real-time test machine interface is configured to provide the trigger signaling and / or additional signaling for real-time consideration in the temperature control function. The design of the control algorithm and the real-time test machine interface for real-time requirements enable the temperature control function to efficiently control the temperature of the device under test. A fast adjustment loop allows for rapid adjustment of control errors. Therefore, the desired device temperature can be maintained.

[0274] According to a further embodiment of the fifth aspect of the present invention, the sorting machine includes a temperature control function.

[0275] As previously mentioned, the sorting machine can be a control element or a calibration element of a control loop. The sorting machine can be configured to manipulate variables, for example, by cooling or heating the device under test. Furthermore, the sorting machine can become part of the feedback loop of the control loop by providing, for example, a measurement of the temperature of the device under test.

[0276] According to a further embodiment of the fifth aspect of the invention, the real-time test machine interface is part of a temperature regulation loop. As described above, since the test machine interface is a real-time interface, it can be part of a control loop without slowing down the control algorithm, thus enabling a fast control or regulation loop.

[0277] According to a further embodiment of the fifth aspect of the invention, (for example) the sorter is configured to implement integrated regulation, wherein the regulation function is distributed between the automatic testing equipment and the sorter, and wherein the regulation data is optionally sent through the testing equipment interface. Attached Figure Description

[0278] The accompanying drawings are not necessarily drawn to scale; rather, the emphasis is usually on illustrating the principles of the invention. In the following description, various embodiments of the invention are described with reference to the following drawings, wherein:

[0279] Figure 1 A schematic top view of an embodiment of the automatic testing apparatus and sorting machine according to the first aspect of the present invention is shown;

[0280] Figure 2 A schematic top view of an embodiment of the automatic testing apparatus and sorting machine according to a second aspect of the present invention is shown;

[0281] Figure 3 A schematic top view of an embodiment of the automatic testing apparatus and sorting machine according to a third aspect of the present invention is shown;

[0282] Figure 4 A schematic top view of an embodiment of an automatic testing apparatus and sorting machine according to a fourth aspect of the present invention is shown;

[0283] Figure 5A schematic top view of an embodiment of an automatic testing apparatus and sorting machine according to a fifth aspect of the present invention is shown;

[0284] Figure 6 A schematic block diagram of a first method according to an embodiment of the first aspect of the present invention is shown;

[0285] Figure 7 A schematic block diagram of a second method according to an embodiment of the first aspect of the present invention is shown;

[0286] Figure 8 A schematic block diagram of a first method according to an embodiment of a second aspect of the present invention is shown;

[0287] Figure 9 A schematic block diagram of a second method according to an embodiment of the second aspect of the present invention is shown;

[0288] Figure 10 A schematic block diagram of a first method according to an embodiment of a third aspect of the present invention is shown;

[0289] Figure 11 A schematic block diagram of a second method according to an embodiment of a third aspect of the present invention is shown;

[0290] Figure 12 A schematic block diagram of a first method according to an embodiment of a fourth aspect of the present invention is shown;

[0291] Figure 13 A schematic block diagram of a second method according to an embodiment of a fourth aspect of the present invention is shown;

[0292] Figure 14 A schematic block diagram of a first method according to an embodiment of the fifth aspect of the present invention is shown;

[0293] Figure 15 A schematic block diagram of a second method according to an embodiment of the fifth aspect of the present invention is shown;

[0294] Figure 16 A schematic example of an automated testing device and a sorting machine according to an embodiment of the present invention is shown;

[0295] Figure 17 A schematic example of temperature control (e.g., device temperature control) according to an embodiment of the present invention is shown;

[0296] Figure 18 A schematic example of temperature control related to a test site according to an embodiment of the present invention is shown;

[0297] Figure 19 A schematic example of a test site-specific test process branch according to an embodiment of the present invention is shown;

[0298] Figure 20 A schematic example of alarm processing according to an embodiment of the present invention is shown; and

[0299] Figure 21 A schematic example of calibration according to an embodiment of the present invention is shown. Detailed Implementation

[0300] In the following description, identical or equivalent elements having the same or equivalent functions are indicated by the same or equivalent reference numerals even if they appear in different figures.

[0301] In the following description, numerous details are set forth to provide a more comprehensive explanation of embodiments of the invention. However, it will be apparent to those skilled in the art that embodiments of the invention may be practiced without these specific details. In other instances, well-known structures and devices are not shown in detail in block diagram form to avoid obscuring embodiments of the invention. Furthermore, unless otherwise specifically stated, features of the different embodiments described below may be combined with each other.

[0302] Figure 1 A schematic top view of an embodiment of an automatic testing apparatus and sorting machine according to a first aspect of the present invention is shown. Figure 1 An automated testing device 110 and a sorting machine 130 are shown. The automated testing device 110 includes a two-way dedicated real-time sorting machine interface 120, and the sorting machine 130 includes a two-way dedicated real-time testing machine interface 140. Furthermore, Figure 1 The test devices 152, 154, 156, and 158, for example, are arranged on the sorter 130.

[0303] Interfaces 120 and 140 are dedicated interfaces; for example, sorter interface 120 is configured to communicate with tester interface 140, and vice versa, because these interfaces are also bidirectional. Furthermore, interfaces 120 and 140 are real-time interfaces. Therefore, the data transmission time between interfaces (e.g., the time span between the start of a message transmission process from one interface and the end of a message arrival process from another interface) can be of an order of magnitude or dimension, allowing for a large time constant for the temperature control of devices under test 152, 154, 156, and 158. Therefore, the information exchanged between automated test equipment 110 and sorter 130 can be used for real-time temperature control or for other purposes, such as test adaptation or test evaluation, as described above.

[0304] The real-time sorter interface 120 is configured to provide a trigger signal 122 to the sorter 130 to trigger a temperature control function. Conversely, the sorter 130 is configured to receive the trigger signal 122 from the automatic testing equipment 110 via the tester interface 140, and the sorter 130 is configured to trigger the temperature control function in response to the received signal 122.

[0305] The sorter 130 may be configured, for example, to cool and / or heat the devices under test 152, 154, 156, 158 to prevent overheating. The trigger signal 122 may include information about an upcoming temperature peak of the device under test so that the sorter can resist thermal hotspots (or even thermal runaway) of the devices under test 152, 154, 156, 158.

[0306] Furthermore, the sorter 130 is configured to provide signaling 142 to the automated test equipment 110 via the tester interface 140, and the real-time sorter interface 120 is configured to receive signaling 142 from the sorter 130. The automated test equipment 110 is configured to take into account the signaling 142 received from the sorter.

[0307] The sorting machine can send the temperature information of devices under test 152, 154, 156, and 158 to the automated testing equipment 110 in real time. The automated testing equipment 110 can take this information into account, for example, by adapting the testing process to prevent the devices under test from overheating. For example, the testing flow can be adapted to increase the cooling time of devices under test 152, 154, 156, and 158 between two sub-tests. In addition, the trigger signaling 122 can be adapted based on the received signal 142, for example, to instruct the sorting machine 130 to adapt a temperature management strategy.

[0308] Optionally, the bidirectional dedicated real-time sorter interface 120 can be configured to provide synchronization signaling to the sorter 130. The sorter 130 can be configured to receive synchronization signaling via the bidirectional dedicated real-time tester interface 140. Based on the synchronization signaling, the sorter 130 can synchronously trigger functions other than temperature control functions with the automated test equipment 110. Synchronization can be performed to perform measurements (e.g., the sorter 130 performs temperature measurements on the devices under test 152, 154, 156, 158 at a specific time or, for example, with a time difference relative to the excitation of the devices under test 152, 154, 156, 158 by the automated test equipment 110). Signaling 122 can include, for example, synchronization signaling, or the synchronization signaling can be a separate signaling.

[0309] Optionally, the bidirectional dedicated real-time sorter interface 120 can be configured to provide test site-specific signaling to the sorter 130. The sorter can be configured to receive test site-specific signaling from the automated test equipment 110 via the bidirectional dedicated real-time tester interface 140. The sorter can control temperature control functions, such as cooling a specific device under test 152, based on or in response to the test site-specific signaling.

[0310] Optionally, the signaling 142 from the sorter 130 to the automatic test equipment 110 can be test site-specific signaling, for example, for temperature measurement of a specific test site or device under test 152.

[0311] Optionally, the bidirectional dedicated real-time sorter interface 120 is configured to provide additional signaling in addition to the trigger signaling 122. The sorter 130 can be configured to receive additional signaling via the real-time tester interface 140 in addition to receiving the trigger signaling 122. The additional signaling may include at least one of the following: control information for the sorter 130 to determine or modify a temperature control profile or to regulate the temperature; information about one or more measured values ​​determined by the automatic test equipment 110; one or more test status parameters; and / or alarm information. The sorter 130 can be configured to use the additional signaling to control the temperature of one or more device-under-test (DUT) sites or DUTs 152, 154, 156, 158, respectively. The additional signaling may include any suitable information to improve the testing of the DUTs.

[0312] Test status parameters may include timing information regarding impending power supply changes for devices under test 152, 154, 156, and 158. Based on this information, the sorter 130 can adapt its cooling strategy for these devices. Furthermore, the sorter can be configured to evaluate this information to determine how to adapt temperature management. However, additional signaling could be a direct temperature management strategy (e.g., processed information based on the aforementioned timing information), simply informing the sorter when and where cooling should occur (e.g., in the form of control information). For example, in the event of a device under test malfunction, an alarm message could prompt the sorter 130 to immediately cool the device under test to prevent damage or test interruption.

[0313] Optionally, the automated test equipment 110 can be configured to adapt the test procedure in response to signaling 142 from the sorter. The sorter can provide information about the devices under test 152, 154, 156, and 158 (e.g., temperature information). This information can indicate beneficial test adaptations. For example, if the temperature of the device under test rises, the automated test equipment 110 can extend the delay between two tests for the device to allow the device to cool down before reaching a critical temperature.

[0314] Optionally, the automated test equipment 110 can be configured to interrupt testing in response to signaling 142 from the sorter. Therefore, signaling 142 provided by the sorter can be an interrupt signaling. The automated test equipment 110 can interrupt testing in response to or in response to signaling 142 (e.g., an interrupt signaling, such as a signaling based on the sorter's evaluation of its temperature measurement, or, for example, an alarm message or over-temperature information provided by the sorter). As another optional feature, the sorter 130 can be configured to provide a test site-specific interrupt signaling to the automated test equipment via a tester interface, (e.g.) causing a separate test of a particular device under test to be interrupted. Therefore, testing of other devices under test can continue. Thus, optionally, the automated test equipment can be configured to interrupt testing in a test site-specific manner in response to receiving a test site-specific signaling from the sorter.

[0315] Optionally, the signaling 142 provided by the sorter 130 may be a disable signaling, for example, to disable the power supply to one or more devices under test. For example, in some cases, the sorter 130 may be unable to prevent the device under test from overheating (e.g., in the event of a malfunction). Therefore, the sorter may evaluate measurement data and may send a disable signaling to the automated test equipment 110 to stop the power supply to the device under test. Typically, the sorter may be configured to detect malfunctions (e.g., malfunctions of the device under test, or, for example, malfunctions of a temperature control function) and may provide this information to the automated test equipment 110 via signaling 142 (e.g., in the form of a disable signaling). Therefore, optionally, the automated test equipment may be configured to disable the power supply to one or more devices under test in response to receiving a signaling from the sorter.

[0316] Optionally, for example, to prevent shutdown, the sorter 130 can be configured to provide a temperature warning signal to the automated test equipment 110 via the tester interface 140. The automated test equipment can be configured to receive the temperature warning signal. Based on this, the automated test equipment can be adapted to prevent overheating of the devices under test 152, 154, 156, 158. Therefore, the sorter 130 can be configured to evaluate the behavior or temperature measurements of the devices under test.

[0317] Optionally, the automated test equipment 110 can be configured to receive test site-specific signaling from the sorter 130. The sorter can be configured to provide test site-specific signaling to the automated test equipment via the tester interface 140. Therefore, for a specific device under test or test site, any of the functions explained above can be performed individually, such as adapting cooling strategies, power-off, or delay time adaptation.

[0318] Optionally, the sorter 130 can be configured to influence data processing on the device under test (DUT) using signaling 142 sent to the automated test equipment 110 via the real-time test machine interface 140. The automated test equipment 100 can be configured to influence data processing on the DUT in response to receiving signaling 142 from the sorter 130. The sorter can trigger the start or end of data recording. For example, if an event (e.g., malfunction) is detected, data for that event can be recorded for fault analysis. Alternatively, data recording can be stopped in the event of malfunction or overheating, for example, when the power supply to the device is turned off, rendering any subsequent measurement data useless.

[0319] Optionally, the sorter 130 can be configured to provide signaling to the automated testing equipment 110 via the testing machine interface 140 for recording. The automated testing equipment 100 can be configured to record the signaling received from the sorter 130. This signaling may include measurement data (e.g., temperature information), which will be stored by the automated testing equipment. Based on this data, test evaluation can be performed.

[0320] Optionally, the sorter 130 is configured to provide signaling to the automated test equipment 110 in real time via a tester interface, enabling the automated test equipment 110 to react in real time to the provided signal. For example, signaling 142 can be provided in real time. As an example, the automated test equipment 110 can be configured to react in real time, for example, in response to signaling received by the sorter 130. Providing sorter information in real time and reacting in real time enables efficient testing, for example, because real-time test adaptation and test evaluation can be performed based on the availability of real-time signals.

[0321] It should be noted that, Figure 1 The components shown may be test units or test systems, including the automatic test equipment 110 and sorting machine 130 according to embodiments of the present invention. However, the automatic test equipment 110 and sorting machine 130 may be used separately according to the present invention.

[0322] As an additional note, it should be noted that signaling 122 and 142 can be made, for example, via a shared wire or via a separate wire.

[0323] Figure 2 A schematic top view of an embodiment of an automatic testing apparatus and sorting machine according to a second aspect of the present invention is shown. Figure 2 An automated testing device 210 and a sorting machine 230 are shown, wherein the automated testing device 210 includes a real-time sorting machine interface 220, and the sorting machine 230 includes a real-time testing machine interface 240. Furthermore, Figure 2Also shown are, for example, the test devices 152, 154, 156, and 158 arranged on the sorter 230.

[0324] Interfaces 220 and 240 are real-time interfaces. Therefore, the data transmission time between the interfaces (e.g., the time span from the start of message transmission at the sorter interface 220 to the end of message arrival at the test interface 240) can be of an order of magnitude or dimension, so the time constant for temperature control of the devices under test 152, 154, 156, and 158 can be relatively large. Therefore, information sent from the automatic test equipment 210 to the sorter 230 can be used for real-time temperature control.

[0325] The real-time sorter interface 220 is configured to provide a trigger signal 122 to the sorter 230 to trigger a temperature control function. Conversely, the sorter 230 is configured to receive the trigger signal 122 from the automatic testing equipment 210 via the tester interface 240, and the sorter 230 is configured to trigger the temperature control function in response to the received signal 122.

[0326] The sorter 230 can be configured to, for example, cool and / or heat the devices under test 152, 154, 156, 158 to prevent overheating. The trigger signal 122 may include information about an upcoming temperature peak of the device under test, enabling the sorter to resist temperature hotspots (or even thermal runaway) of the devices under test 152, 154, 156, 158.

[0327] Furthermore, the real-time sorter interface 220 is configured to provide a synchronization signal 222 to the sorter 230 for synchronizing functions of the sorter 230 other than the temperature control function. The sorter 230 is configured to receive the synchronization signal 222 from the automatic testing equipment 210 via the tester interface 240, and is configured to synchronize with the automatic testing equipment 210 to trigger functions other than the temperature control function in response to the received synchronization signal 222.

[0328] Some applications (e.g., thermal diode calibration) may require rapid and accurate synchronization timing between the sorter 230 and the automated test equipment 210 to measure temperature at the correct point in time. Synchronization signaling 222 can be used to precisely notify the sorter 230 when to perform a measurement. This can allow for accurate testing, for example, due to the accurate allocation of events (e.g., the stimulation of the device under test by the automated test equipment 210 and the corresponding measurement by the sorter 230).

[0329] Optionally, the real-time sorter interface 220 can be configured to enable active synchronization with the sorter based on synchronization signaling 222 directed to the sorter. Active synchronization can be a synchronization without waiting for insertion. The sorter 230 can be configured to receive signaling (e.g., synchronization signaling 222 for active synchronization with the automatic test equipment 210) from the tester interface 240. Furthermore, the sorter can be configured to perform active synchronization with the automatic test equipment based on synchronization signaling. This allows for fast and accurate testing because, as described above, the sorter 230 and the automatic test equipment 210 can be synchronized without executing wait statements to achieve synchronization. This can reduce testing time. The real-time interface allows synchronization to be performed with very limited latency.

[0330] Optionally, the real-time sorter interface 220 can be configured to send calibration timing information to the sorter 230 to determine the timing of calibration for the sorter 230. The sorter 230 can be configured to receive calibration timing information (e.g., synchronization signaling 222) from the automated test equipment 210 via the test machine interface 240 to determine the calibration timing. Furthermore, the sorter 230 can be configured to determine the calibration timing based on the calibration timing information. Calibration can be performed to compensate for errors. For example, a first measurement can be performed in a first state of the device under test to compensate for offsets in subsequent measurements. This can improve measurement and / or test accuracy.

[0331] Optionally, the real-time sorter interface 220 can be configured to send a signal instructing the device under test (DUT) to be powered, biased, or initialized in a predetermined manner (e.g., as synchronization signal 222). The sorter 230 can be configured to receive, via the tester interface 240, a signal instructing the DUT to be adjusted, powered, biased, or initialized in a predetermined manner from the automated test equipment 210. As previously described, information indicating that the DUT is powered, biased, or initialized in a predetermined manner can be used to calibrate (e.g.,) subsequent measurements.

[0332] Optionally, the real-time sorter interface 220 can be configured to send signaling when different device or test conditions are met. The sorter can be configured to receive signaling from the automated test equipment 210 via the tester interface 240. This is done to synchronize the automated test equipment 210 and the sorter 230. Therefore, this information can be part of the synchronization signaling 222. However, this information can also be sent separately, for example.

[0333] Optionally, the automated test equipment 210 can be configured to provide synchronization signaling 222 to trigger the sorter 230 to read one or more temperature readings. The sorter 230 can be configured to receive signaling (e.g., synchronization signaling 222) from the automated test equipment 210 via the test machine interface 240, and can be configured to perform one or more temperature measurements based on the synchronization signaling for, for example, calibration of temperature measurements. The automated test equipment can execute test routines and can provide excitation to the device under test. For testing, the temperature of the device may need to be measured when the device is in a predetermined state. For example, based on a test routine and current excitation, the automated test equipment can, for example, instruct the sorter 230 to perform a measurement to initiate synchronization by instructing it via synchronization signaling 222. Because the interface is a real-time interface, this instruction can be sent quickly enough to perform synchronous measurements, for example, so that measurements can be performed as required by the test routine when the corresponding device is in its predetermined state.

[0334] Optionally, the real-time sorter interface 220 can be configured to enable thermal diode calibration based on synchronization signaling to sorter 230. Thermal diode calibration may include incremental temperature measurement, and the real-time sorter interface 220 can be configured to send real-time measurement timing information to sorter 230 for thermal diode calibration.

[0335] The sorter 230 can be configured to perform thermal diode calibration, for example, based on synchronization signaling 222 received from the automated test equipment 210 via the test machine interface 240. Thermal diode calibration may include incremental temperature measurement, and the sorter 230 can be configured to perform incremental temperature measurement. Furthermore, the sorter can be configured to receive real-time measurement timing information from the automated test equipment via a real-time test machine interface for use in thermal diode calibration.

[0336] Optionally, the synchronization signaling 222 may include, for example, test site-specific time information for measurements performed by the sorter 230. Optionally, the synchronization signaling may include, for example, test site-specific test status information or device status information. The automated test equipment 210 may notify the sorter 230 of upcoming events, which may require the sorter 230 to perform measurements.

[0337] It should be noted that, Figure 2 The components shown may be test units or test systems, including the automatic test equipment 210 and sorting machine 230 according to embodiments of the present invention. However, according to the present invention, the automatic test equipment 210 and sorting machine 230 may be used independently.

[0338] As an additional note, it should be noted that signaling 122 and 142 can be made, for example, via a shared wire or via a separate wire.

[0339] Figure 3 A schematic top view of an embodiment of an automatic testing apparatus and sorting machine according to a third aspect of the present invention is shown. Figure 3 An automatic testing device 310 and a sorting machine 330 are shown, wherein the automatic testing device 310 includes a real-time sorting machine interface 320, and the sorting machine 330 includes a real-time testing machine interface 340. Furthermore, Figure 3 Also shown are, for example, test devices 152, 154, 156, and 158 arranged on sorter 330.

[0340] Interfaces 320 and 340 are real-time interfaces. Therefore, the data transmission time between these interfaces (e.g., the time span from the start of message transmission at sorter interface 320 to the arrival of a message at test interface 340) can be of an order of magnitude or dimension, thus allowing for a relatively large time constant for temperature control of devices under test 152, 154, 156, and 158. Therefore, information sent from automatic test equipment 310 to sorter 330 can be used for real-time temperature control.

[0341] The real-time sorter interface 320 is configured to provide test site-specific signaling 322 to the sorter 330 to control the temperature control function. Conversely, the sorter 330 is configured to receive signaling 322 from the automatic test equipment 310 via the tester interface 340, and the sorter 330 is configured to control the temperature control function in response to the received test site-specific signaling 322.

[0342] Devices under test 152, 154, 156, and 158 may exhibit different behaviors during testing, such as different temperature trends. Therefore, the automated test equipment 310 can provide test site-specific information for adapting temperature regulation to the devices under test. The sorting machine can, for example, adapt the cooling sequence and magnitude of each device or test site based on said information. Thus, individual test adaptations can be performed to improve test efficiency.

[0343] For example, signaling 322 may include information about an upcoming temperature peak for a particular device under test so that the sorter can resist the device’s temperature hotspots (or even thermal runaway).

[0344] Optionally, the test site-specific signaling 322 may include one or more of the following: test site-specific alarms, test site-specific trigger identification information, test site-specific temperature adjustment information, test site-specific setting information, test site-specific heat dissipation information, and / or test site-specific timing information. Any information suitable for improving test efficiency and accuracy can be sent. For example, an alarm may be sent to the sorter when the automated test equipment 310 determines a temperature hotspot (or even thermal runaway) or device malfunction. Based on the test site-specific setting information, the sorter 330 can schedule cooling operations to optimally cool each device under test 152, 154, 156, 158 according to its settings. Similarly, the heat dissipation and timing information may include information about estimated or anticipated heat that the device may dissipate, which can be made based on scheduled tests or test stimuli, such as when this heat is dissipated or when the sorter must cool a device. This can improve thermal management during testing and increase test efficiency.

[0345] Optionally, the test site-specific signaling includes a combination of test site identification information and conditioning information, and the test site identification information is configured to enable test site-specific associations of the conditioning information. Therefore, temperature management strategies can be implemented separately for each test site or device under test 152, 154, 156, and 158. This can improve testing efficiency.

[0346] Optionally, the test site identification information may include a test site ID; and / or the test site ID may be modulated onto test site-specific signaling. The test site ID can be sent to identify specific test sites or devices under test. Modulation of the test site ID allows the use of a single transmission line (e.g., a single trigger line), thus reducing wiring. This ID informs the sorter 330 which test site should respond to the trigger signal or signaling 322.

[0347] Optionally, the adjustment information may include timing information and / or control amplitude information. Based on this, the sorter 330 can perform sufficient cooling / heating so that the device under test can be maintained within the desired temperature range.

[0348] Optionally, the automated test equipment 310 can be configured to provide a single trigger signaling to multiple test stations, along with different station-specific delay information describing the delay between the triggering event and the start of thermal preconditioning operations performed for different test stations. The sorter 330 can be configured to receive the single trigger signaling from the automated test equipment 310 via the tester interface 320. This reduces signaling transmission workload, enabling faster signaling delivery. The automated test equipment 310 can assess or predict upcoming temperature trends for multiple devices under test 152, 154, 156, 158, and based on this, determine sufficient delays (e.g., cooling delays) to prevent thermal runaway of the devices under test. This can be achieved by delaying the start of subsequent test operations or triggering events (e.g., power supply increases and thermal preconditioning operations). For example, sufficient time can be given for the devices to cool to the desired temperature between tests.

[0349] Optionally, the automated test equipment 310 can be configured to execute test procedures at different sites in such a way that corresponding states are reached at different times within different test procedures. Furthermore, the automated test equipment 310 can be configured to provide site-specific signaling in response to reaching predetermined states in each test procedure. Therefore, the sorter 330 can clearly understand the current state of each device under test 152, 154, 156, 158, and can, for example, schedule adequate cooling operations based on this. Additionally, the sorter can be configured to begin cooling the devices under test before a temperature rise, for example, based on trigger signaling including information about a anticipated upcoming temperature rise, such as information about the current or upcoming predetermined test state in the test sequence. Furthermore, to prevent overheating, devices under test receiving high power can be selected for more frequent temperature measurements.

[0350] It should be noted that, Figure 3 The components shown may be test units or test systems, including the automatic test equipment 310 and sorting machine 330 according to embodiments of the present invention. However, according to the present invention, the automatic test equipment 310 and sorting machine 330 may be used separately.

[0351] Figure 4 A schematic top view of an embodiment of an automatic testing apparatus and sorting machine according to a fourth aspect of the present invention is shown. Figure 4 An automated testing device 410 and a sorting machine 430 are shown, wherein the automated testing device includes a real-time sorting machine interface 420, and the sorting machine 430 includes a real-time testing machine interface 440. Furthermore, Figure 4 Also shown are, for example, devices 152, 154, 156, and 158 arranged on sorter 430.

[0352] Interfaces 420 and 440 are real-time interfaces. Therefore, the data transmission time between these interfaces (e.g., the time span from the start of message transmission at test machine interface 440 to the arrival of a message at sorting machine interface 420) can be of a certain order of magnitude or dimension, allowing for a larger time constant for temperature control of devices under test 152, 154, 156, and 158. Thus, information sent from sorting machine 430 to automatic testing equipment 410 can be used for real-time temperature control.

[0353] The real-time test machine interface 440 is configured to provide test site-specific signaling 442 to the automatic test equipment 410. Conversely, the automatic test equipment 410 is configured to receive signaling 442 from the sorter 430 via the sorter interface 420.

[0354] Devices under test (DUTs) 152, 154, 156, and 158 may exhibit different behaviors during testing, such as different temperature trends. Therefore, the sorter 430 can provide test site-specific information to adapt the temperature regulation or test scheduling of the DUTs. For example, the sorter can provide the automated test equipment 410 with the individual temperatures of DUTs 152, 154, 156, and 158. For example, the automated test equipment 410 can adapt the delays between different tests for different devices or test sites based on this information. Therefore, individual test adaptations can be performed to improve test efficiency.

[0355] Optionally, the sorter 430 can be configured to detect temperature malfunctions. For example, this might be detected when the temperature gradient exceeds a certain gradient. Furthermore, test-site specific signaling could be, for example, a test-site specific alarm. Optionally, the sorter 430 can be configured to enable test-site specific alarm processing and / or test-site specific shutdown. The automated test equipment 410 can be optionally configured to process test-site specific alarms and / or perform test-site specific shutdowns based on test-site specific alarms. For example, the sorter might detect a large temperature difference between measurements of device 152 under test. This difference might exceed a threshold, and the sorter could generate or announce an alarm for device 152 or its test side respectively. This test-site specific alarm can be sent to the automated test equipment 410 via signaling 442. The automated test equipment 410 can shut down the specific test site including device 152 to prevent device damage and can continue testing the remaining devices 154, 156, and 158 under test.

[0356] Optionally, the sorter 430 can be configured to influence data processing (e.g., packing and data logging) of the device under test using signaling 442 sent to the automated test equipment 410 via the real-time tester interface 440. The automated test equipment 410 can be configured to influence data processing of the device under test in response to receiving, for example, test station-specific signaling from the sorter 430. For example, the sorter 430 may detect a malfunction of the device under test and may therefore instruct the automated test equipment to stop recording data for that device, as this data may be erroneous.

[0357] Optionally, the test site-specific signaling 442 may include a combination of test site identification information and conditioning information, and the test site identification information may be configured to enable test site-specific associations with the conditioning information. For example, signaling 442 may include syntax elements that identify a specific test site or device under test and associated information about the thermal management to be performed (including information about how long and when to cool, such as cooling amplitude and timing information). Therefore, testing can be performed for each device under test at a desired temperature process.

[0358] Optionally, the test site identification information may include a test site ID; and / or the test site ID may be modulated onto a test site-specific signaling 442. Modulation of the test site ID may allow for a single trigger line, thereby reducing wiring work (especially for multiple test sites).

[0359] Optionally, the conditioning information includes timing information, such as when to cool or heat or delay, and / or control amplitude information. This can improve the thermal management of the device under test.

[0360] It should be noted that, Figure 4 The components shown may be test units or test systems, including the automatic test equipment 410 and sorting machine 430 according to embodiments of the present invention. However, according to the present invention, the automatic test equipment 410 and sorting machine 430 may be used independently.

[0361] Figure 5 A schematic top view of an embodiment of an automatic testing apparatus and sorting machine according to a fifth aspect of the present invention is shown. Figure 5 An automatic testing device 510 and a sorting machine 530 are shown, wherein the automatic testing device 510 includes a real-time sorting machine interface 520, and the sorting machine 530 includes a real-time testing machine interface 540. Furthermore, Figure 5 Also shown are, for example, test devices 152, 154, 156, and 158 arranged on sorter 530.

[0362] Interfaces 520 and 540 are real-time interfaces. Therefore, the data transmission time between these interfaces (e.g., the time span from the start of message transmission at sorter interface 520 to the arrival of a message at test interface 540) may have a certain magnitude or dimension, thus the time constants for temperature control of devices under test 152, 154, 156, and 158 can be relatively large. Therefore, information sent from automatic test equipment 510 to sorter 530 can be used for real-time temperature control.

[0363] The real-time sorter interface 520 is configured to provide a trigger signal 122 to the sorter 530 to trigger a temperature control function. Conversely, the sorter 530 is configured to receive the trigger signal 122 from the automatic testing equipment 510 via the tester interface 540, and the sorter 530 is configured to trigger the temperature control function in response to the received signal 122.

[0364] The sorter 530 can be configured to, for example, cool and / or heat the devices under test 152, 154, 156, 158 to prevent overheating. The trigger signal 122 may include information about an upcoming temperature peak of the device under test, so that the sorter can resist temperature hotspots (or even thermal runaway) of the devices under test 152, 154, 156, 158.

[0365] In addition, the real-time sorter interface 520 is configured to provide additional signaling 522 in addition to trigger signaling 122. The sorter 530 can be configured to receive additional signaling 522 in addition to trigger signaling 122 via the real-time tester interface 540. The additional signaling may include control information used by the sorter to determine or modify the temperature control curve or to perform temperature regulation; information about one or more measured values ​​determined by the automatic test equipment or extracted by the automatic test equipment from the data stream of the device under test; one or more test status parameters; and / or alarm information, or more of these.

[0366] Based on the test to be performed, the automated test equipment 510 can determine, predict, or evaluate additional signaling 522 to adapt the interaction between the sorter 530 and the devices under test 152, 154, 156, 158. The automated test equipment 510 can, for example, predict a rise in the temperature of the device under test (e.g., due to an expected increase in the supplied power), and therefore can determine control information for the sorter to resist the temperature rise of the device under test to an undesirable level. This may include, for example, adapting the cooling amplitude and / or cooling duration. Furthermore, the automated test equipment 510 can, for example, determine information about one or more measured variables and / or one or more test state parameters. The automated test equipment 510 can, for example, determine or evaluate the current or predicted behavior of the device under test and provide information to the sorter 530 to allow the sorter to manipulate the device under test in a desired manner for testing. For example, if the data evaluation of the automated test equipment 510 determines that the device under test is in a critical state (e.g., over-temperature), an alarm message can be provided to the sorter 530 so that the sorter can adapt its device management (e.g., thermal management).

[0367] Optionally, the sorter 530 can be configured to determine a temperature control profile or a temperature regulation profile, and the sorter 530 can be configured to determine the cooling amplitude and / or duration and / or cooling intensity to determine the temperature control profile or temperature regulation profile. The sorter can evaluate information provided by the automated test equipment 510 (e.g., in the form of trigger signaling 122 or additional signaling 522) to determine the aforementioned temperature management characteristics. Alternatively, this information can be evaluated and sent directly by the automated test equipment, (e.g.) without requiring the sorter to determine this information.

[0368] Optionally, the automated test equipment can be configured to extract measured values ​​or parameters from the digital data stream of the device under test, and the real-time sorter interface is configured to send the measured values ​​or parameters to a sorter via the real-time sorter interface. Optionally, the automated test equipment can be configured to send values ​​or parameters measured by the instruments of the automated test equipment to the sorter via the sorter interface. As previously described, the sorter 530 can assess the state of the device under test or the cooling range and / or cooling intensity based on the measured values. This can improve thermal management during testing.

[0369] Optionally, the real-time sorter interface 520 can be configured to provide the additional signaling 522 and / or trigger signaling 122 with a delay of less than 1 ms, less than 100 microseconds, less than 10 microseconds, or less than 1 microsecond. For example, these interfaces can have low latency to quickly adapt to test routines (e.g., adapt to the sorter's thermal management). Therefore, the data can arrive sufficiently fresh to resist unwanted events (e.g., overheating) that may occur with the device under test.

[0370] Optionally, the real-time sorter interface 520 can be configured to provide bandwidth such that the delay of the additional signaling and / or the triggering signaling provided by the real-time sorter interface is lower than the time constant of the control loop of the temperature control function. Since data or signaling transmission is faster than the time constant of the control loop, the transmitted information can be used to improve or adapt temperature regulation.

[0371] Optionally, the temperature control function may include a control loop comprising a sorter interface 520 and / or a tester interface 540. Furthermore, the temperature control function can be configured to take into account real-time information sent via the sorter interface 520 and / or received via the tester interface 540. For example, to provide robust and fast temperature control, a variety of information can be provided to the control loop. Therefore, the sorter interface 520 and / or the tester interface 540 can be part of a control loop that provides measurement data and / or evaluation parameters, which may be advantageous for control. Thus, the state of the device under test can be calculated, and the temperature of the device under test can be adjusted based on a spatial state model. This model can be used for any type of control. Utilizing such a large amount of information, predictive control concepts can be implemented, for example, based on estimated states similar to those of an entity associated with the temperature of the device under test. This enables robust and accurate temperature control.

[0372] Optionally, the control loop may include an automated test device 510, which may be configured as part of an integrated regulator combined with a sorting machine. As another optional feature, the control loop may include a sorting machine, which may be configured as part of an integrated regulator formed in conjunction with the automated test device. As previously described, the temperature control concept may include all elements, such as the automated test device and / or the sorting machine, and optional interfaces, to fuse data from all available information channels, including, for example, measurement data from the sorting machine, upcoming tests during the test cycle (e.g., stored in the test machine), any kind of parameters or conditions of the device under test, and evaluation information based on them. Therefore, testing efficiency can be improved, and thermal management can be enhanced.

[0373] Optionally, the real-time sorter interface 520 and / or the real-time tester interface 540 can be configured to provide the trigger signaling 122 and / or additional signaling 522 for real-time consideration by the temperature control function. For example, if interfaces 520 and 540 are bidirectional, both can be configured to provide signaling 122 and 522. The information flow can be selected according to any constraints of a particular application.

[0374] Optionally, the sorter 530 may include temperature control functionality. The sorter may be configured to cool and / or heat the devices under test 152, 154, 156, and 158. Therefore, the sorter may be, or may include, a control element of a control loop. Furthermore, using information sent from the automated test equipment 510 to the sorter 530 via trigger signaling 122 and trigger signaling 522, input variables for a controller (e.g., a temperature controller) can be determined within the sorter.

[0375] Optionally, the real-time sorter interface is part of the temperature control loop, and / or the real-time tester interface is part of the temperature control loop.

[0376] Optionally, the automatic testing device 510 and / or the sorting machine 530 can be configured to implement integrated regulation, wherein the regulation function is distributed between the automatic testing device and the sorting machine. The calculation of input variables for the regulator and / or the scheduling of temperature control inputs can be performed by the automatic testing device and / or the sorting machine. Therefore, the regulation function can be distributed between the two; for example, calculations can be performed in the corresponding element (e.g., the automatic testing device or the sorting machine) when the necessary data for calculation is available. In other words, the calculation of regulation data can be distributed in a time-efficient manner, for example, by minimizing data transmission between the automatic testing device and the sorting machine, thus requiring only the transmission of the final result or the results required by other corresponding elements.

[0377] Optionally, the automatic test device 510 can be configured to use patterns provided by the pattern generator of the automatic test device to influence the adjustment function.

[0378] It should be noted that, Figure 5 The components shown may be test units or test systems, including the automatic test equipment 510 and the sorting machine 530 according to embodiments of the present invention. However, according to the present invention, the automatic test equipment 510 and the sorting machine 530 may be used independently.

[0379] As an additional note, it should be noted that signaling 122 and 522 can be made, for example, via a shared wire or via a separate wire.

[0380] Figure 6 A schematic block diagram of a first method 600 according to an embodiment of a first aspect of the present invention is shown. Method 600 includes: providing (610) a trigger signaling to a sorter via a bidirectional dedicated real-time sorter interface to trigger a temperature control function; receiving (620) a signaling from the sorter via the bidirectional dedicated real-time sorter interface; and considering (630) the signaling received from the sorter.

[0381] Figure 7A schematic block diagram of a second method 700 according to an embodiment of the first aspect of the present invention is shown. Method 700 includes: receiving (710) a trigger signaling from an automated test device via a bidirectional dedicated real-time test machine interface; triggering (720) a temperature control function in response to the received signaling; and providing (730) a signaling to the automated test device via the test machine interface.

[0382] Figure 8 A schematic block diagram of a first method 800 according to an embodiment of a second aspect of the present invention is shown. Method 800 includes: providing (810) a trigger signal to a sorter via a real-time sorter interface to trigger a temperature control function; providing (820) a synchronization signal to the sorter via the real-time sorter interface; and synchronizing (830) functions of the sorter other than the triggering temperature control function.

[0383] Figure 9 A schematic block diagram of a second method 900 according to an embodiment of a second aspect of the present invention is shown. Method 900 includes: receiving (910) a trigger signaling from an automated test device via a real-time test machine interface; triggering (920) a temperature control function in response to the received trigger signaling; receiving (930) a synchronization signaling from the automated test device via the test machine interface; and triggering functions other than the temperature control function in sync with the automated test device in response to the received synchronization signaling.

[0384] Figure 10 A schematic block diagram of a first method 1000 according to an embodiment of a third aspect of the present invention is shown. Method 1000 includes: providing (1010) test site-specific signaling to a sorter via a real-time sorter interface to control a temperature control function.

[0385] Figure 11 A schematic block diagram of a second method 1100 according to an embodiment of a third aspect of the present invention is shown. Method 1100 includes: receiving (1110) test site-specific signaling from an automated test apparatus via a test machine interface; and controlling (1120) a temperature control function in response to the received test site-specific signaling.

[0386] Figure 12 A schematic block diagram of a first method 1200 according to an embodiment of a fourth aspect of the present invention is shown. Method 1200 includes: providing (1210) test site-specific signaling to an automated test device via a real-time test machine interface.

[0387] Figure 13 A schematic block diagram of a second method 1300 according to an embodiment of a fourth aspect of the present invention is shown. Method 1300 includes: receiving (1310) test site-specific signaling from a sorter via a real-time sorter interface.

[0388] Figure 14 A schematic block diagram of a first method 1400 according to an embodiment of a fifth aspect of the present invention is shown. Method 1400 includes: providing (1410) a trigger signal to a sorter via a real-time sorter interface to trigger a temperature control function; and providing (1420) additional signaling in addition to the trigger signaling via the real-time sorter interface, the additional signaling including: control information for the sorter to determine or modify a temperature control curve or to perform temperature regulation, and / or information regarding one or more measured values ​​determined by an automated test device or extracted by the automated test device from a data stream of the device under test, and / or one or more test status parameters, and / or alarm information.

[0389] Figure 15 A schematic block diagram of a second method 1500 according to an embodiment of a fifth aspect of the present invention is shown. Method 1500 includes: receiving additional signaling (1510) in addition to receiving trigger signaling via a real-time test machine interface, the additional signaling including: control information for a sorting machine to determine or modify a temperature control curve or to perform temperature regulation, and / or information about one or more measured values ​​determined by an automated test device or extracted by the automated test device from the data stream of the device under test, and / or one or more test status parameters, and / or alarm information; and using (1520) the additional signaling to control the temperature of one or more device under test sites.

[0390] Other different embodiments and aspects of the invention will now be described. Furthermore, the appended claims will define additional embodiments. It should be noted that any embodiment defined in the claims may be supplemented by any details (features and functions) described herein. Moreover, the embodiments described herein may be used alone or supplemented by any features included in the claims.

[0391] Furthermore, it should be noted that the various aspects described herein can be used individually or in combination. Therefore, details can be added to each of the individual aspects without needing to add details to the other aspect.

[0392] It should also be noted that this disclosure explicitly or implicitly describes features that can be used in automated test systems or test units. Therefore, any feature described herein can be used in the context of automated test equipment or sorting machines for testing one or more devices under test, or in automated test systems or test units for testing one or more devices under test (e.g., testing one or more devices under test simultaneously or in a time-overlapping manner at different sites).

[0393] Furthermore, the features and functions disclosed herein related to the method can also be used in an apparatus (configured to perform this function). Additionally, any features and functions disclosed herein regarding the apparatus can also be used in the corresponding method. In other words, the method disclosed herein can optionally be supplemented by any features and functions described with respect to the apparatus.

[0394] Furthermore, any features and functions described herein can be implemented in hardware or software, or using a combination of hardware and software (as described in the "Implementation Alternatives" section).

[0395] Alternative implementation methods:

[0396] While some aspects have already been described in the context of the apparatus, and many more will be described in the context of the apparatus, it is clear that these aspects also represent descriptions of the corresponding methods, where blocks or devices correspond to method steps or features of method steps. Similarly, aspects described in the context of method steps also represent descriptions of corresponding blocks, items, or features of the corresponding apparatus. Some or all of the method steps may be performed by (or using) hardware devices, such as microprocessors, programmable computers, or electronic circuits. In some embodiments, such devices may perform one or more of the most important method steps.

[0397] Depending on the requirements of certain implementations, embodiments of the present invention can be implemented in hardware or software. This implementation can be performed using a digital storage medium (e.g., floppy disk, DVD, Blu-ray, CD, ROM, PROM, EPROM, EEPROM, or FLASH memory) that stores electronically readable control signals that cooperate with a programmable computer system to execute the corresponding methods. Therefore, the digital storage medium can be computer-readable.

[0398] Some embodiments of the invention include a data carrier having electronically readable control signals, which is capable of cooperating with a programmable computer system to perform one of the methods described herein.

[0399] Typically, embodiments of the present invention can be implemented as a computer program product having program code, wherein, when the computer program product is run on a computer, the program code is operable to perform a method. The program code may, for example, be stored on a machine-readable medium.

[0400] Other embodiments include a computer program for performing one of the methods described herein, the program being stored on a machine-readable medium.

[0401] In other words, an embodiment of the method of the present invention is a computer program having program code, wherein, when the computer program is run on a computer, the program code is used to perform one of the methods described herein.

[0402] Therefore, a further embodiment of the method of the present invention is a data carrier (or digital storage medium or computer-readable medium) having a computer program recorded thereon for performing one of the methods described herein. The data carrier, digital storage medium, or recording medium is generally tangible and / or non-transitory.

[0403] Therefore, a further embodiment of the method of the present invention represents a data stream or signal sequence for performing one of the methods described herein. This data stream or signal sequence may, for example, be configured to be transmitted via a data communication connection (e.g., via the Internet).

[0404] Further embodiments include a processing apparatus, such as a computer or programmable logic device, configured or adapted to perform one of the methods described herein.

[0405] Further embodiments include a computer having a computer program installed thereon for performing one of the methods described herein.

[0406] Further embodiments of the invention include an apparatus or system configured to transmit (e.g., electronically or optically) a computer program for performing one of the methods described herein to a receiver. The receiver may be, for example, a computer, a mobile device, a memory device, etc. The apparatus or system may include, for example, a file server for transmitting the computer program to the receiver.

[0407] In some embodiments, a programmable logic device (e.g., a field-programmable gate array) may be used to perform some or all of the functions of the methods described herein. In some embodiments, the field-programmable gate array may cooperate with a microprocessor to perform one of the methods described herein. Generally, the methods are preferably performed by any hardware device.

[0408] The apparatus described herein can be implemented using hardware devices, using a computer, or using a combination of hardware devices and a computer.

[0409] The apparatus described herein, or any component thereof, may be implemented, at least in part, in hardware and / or software.

[0410] The methods described herein can be performed using hardware devices, computers, or a combination of hardware devices and computers.

[0411] The methods described herein or any component of the apparatus described herein may be performed, at least in part, by hardware and / or software.

[0412] The embodiments described herein are merely illustrative of the principles of the invention. It should be understood that modifications and variations of the arrangements and details described herein will be apparent to those skilled in the art. Therefore, its intent is limited only by the scope of the forthcoming patent claims, and not by the specific details presented by the description and interpretation of the embodiments herein.

[0413] Below is a summary of the additional explanations:

[0414] -Active temperature control utilizing rapid synchronization and data exchange

[0415] -background

[0416] -situation

[0417] Value proposition

[0418] - Fast, low-latency communication channels or trigger extensions, such as the PRE-TRIGGER extension: Fast, low-latency communication channels (according to one aspect of the invention).

[0419] - Trigger extension, e.g., pre-triggered extension: fast and accurate automated test equipment, e.g., test machine-sorter-automated test equipment synchronization (according to one aspect of the invention).

[0420] - Expand ATC functionality to ensure more precise temperature control (according to one aspect of the invention).

[0421] - Various viewpoints and aspects of the present invention

[0422] background

[0423] Connected images

[0424] The following describes examples of testing apparatus (or testing systems) that may optionally be used in embodiments of the invention. However, it should be noted that embodiments of the invention may include an automated testing device alone, a sorting machine alone, or a combination of an automated testing device and a sorting machine. Furthermore, it should be noted that the features, functions, and details disclosed in the "Background" section may optionally be used alone or in combination in any embodiment. Additionally, the features, functions, and details disclosed herein may be incorporated, alone or in combination, into the automated testing device and / or sorting machine shown in this section.

[0425] What is ATC?

[0426] Active temperature control (ATC) is, for example, hardware and software. For example, hardware for measuring temperature and software for controlling temperature. ATC is (or includes) a control loop, for example, from a sorter to an automated test facility or from a test facility to a device and back. It allows, for example, a sorter to measure the device's DIE temperature directly within the device.

[0427] Typically, sorters measure the temperature outside the device. However, ATC measures the template (or temperature) through thermal diodes in the DUT (e.g., the device under test). ATC is, for example, feedforward or feedback control.

[0428] The following is about Figure 16 The explanation relates to optional features of the embodiments. Figure 16 A schematic example of an automated testing device and sorting machine according to an embodiment of the present invention is shown. Figure 16 An automated test device 1610 and a sorter 1630 are shown, wherein the automated test device 1610 optionally includes a main frame 1612 and a test head 1614. The automated test device 1610 and the sorter 1670 are optionally connected via a first connection 1660 (e.g., an Ethernet connection) and a second connection 1670 (e.g., a GPIB connection). Figure 16 The device under test (DUT) 1650 (which optionally includes a thermal diode) is shown positioned between the automated test equipment 1610 or test head 1614 and the sorter 1630. Furthermore, the sorter 1630 and the automated test equipment 1610 or test head 1614 are coupled to a trigger signal line 1680 (e.g., a pre-trigger signal line). The corresponding interfaces, such as a tester interface and a sorter interface, are not explicitly shown. The trigger signal line 1680 can be configured to allow unidirectional or bidirectional data exchange between the automated test equipment 1610 and the sorter 1630. The trigger signal line 1680 can be configured to, for example, provide and / or receive trigger signaling and / or signaling from the sorter to the automated test equipment and / or synchronization signaling and / or any test site-specific signaling and / or additional signaling, as previously described.

[0429] Situation and aspects

[0430] The following will describe situations and aspects that may optionally be incorporated (individually and in combination) according to any embodiment of the invention.

[0431] Complex digital devices (e.g., those that can be used as Device Under Test (DUTs), such as MPUs (e.g., microprocessors), GPUs (e.g., graphics processing units), and MCUs (e.g., microcontrollers), can consume significant amounts of power. Power consumption and device temperature profiles can vary throughout the testing process, and may even be site-specific. In some cases, precise temperature control can be important or even essential for testing these devices, for example, those with “flat” and / or predictable temperature profiles. To achieve this, test units (e.g., testers and sorters) can, for example, analyze and combine different types of source data in real time. Unlike conventional testing (where sorters control temperature solely by measuring the test chamber temperature), Active Thermal Control (ATC) can, for example, provide sorters with additional device and / or tester information to, for example, precisely control and / or predict potential temperature “hot spots.”

[0432] The following is about Figure 17 The explanation relates to optional features of the embodiments. Figure 17 A schematic example of temperature control (e.g., device temperature control) according to an embodiment of the present invention is shown. Figure 17 Displayed are device 1750 (e.g., device under test), automated test equipment 1710, and sorter 1730. Automated test equipment 1710 may, for example, receive and / or determine and / or evaluate information 1760 from or based on device 1750, such as test parameters (e.g., control information and / or test status parameters). This information may be further processed and provided to sorter 1730. The information provided by automated test equipment 1710 to sorter 1730 may be any information suitable for improving testing and / or thermal conditioning efficiency, such as device state or condition of device 1750, predicted temperature processes (e.g., based on test cycles), such as any information explained above. The sorter may then, for example, control (1770) the temperature of device 1750 based on the information provided by the automated test equipment and temperature measurements performed on device 1750 by sorter 1730.

[0433] Alternatively or additionally, in some cases, temperature calibration of the thermal diodes for a device may be advantageous or even necessary to eliminate the silicon manufacturing dependency of each device (e.g., during testing).

[0434] Alternatively or additionally, in certain situations, if the sorting machine detects (for example) temperature runaway, site-specific alarm handling and shutdown may be beneficial or even necessary to alert automated testing equipment or testing machines.

[0435] In some cases, this may require rapid (e.g., real-time) synchronization between sorters, devices, and automated test equipment or testing machines to enable real-time data exchange. A current limitation is the reliance on slow communication interfaces, primarily dependent on slow GPIB communication.

[0436] According to one aspect, the purpose of this proposal is to extend triggering capabilities, such as the pre-triggering capability introduced by Advantest for Active Thermal Control (ATC) control loops. According to another aspect, triggering (e.g., pre-triggering, e.g., advance triggering) can be extended not only to a technique for controlling heating and cooling cycles in sorters, but also to allow precise, rapid synchronization and / or data exchange between testers (e.g., automated test equipment) and sorters, and vice versa. As ATC control is likely to become increasingly important in the future, for example, by using simple, low-latency interfaces to synchronize equipment, customers will benefit, for example, from saving valuable test time.

[0437] Value positioning of various aspects of the embodiments of the present invention

[0438] Below, some advantages that can be achieved, for example, using embodiments and aspects of the present invention will be described.

[0439] Currently, many manufacturers of traditional test machines or automated test equipment lack triggering (e.g., pre-triggering) interfaces. For example, while WAIT statements can be used to synchronize sorting machines and automated test equipment (e.g., test machines performing calibration), WAIT statements can be unreliable and carry risks. In some cases, data exchange between sorting and test equipment, and real-time synchronization of the equipment, may be advantageous or even mandatory. Alternatively or additionally, for these applications, the number of sites may expand to 32 in the near future. In some cases, this may necessitate reducing hardware interface cabling to achieve bidirectional synchronization (e.g., bidirectional synchronization per site).

[0440] 1. Triggered Extension (e.g., Pre-triggered Extension): Fast, low-latency communication channel (example; optional feature; any details are optional)

[0441] • Trigger extensions (e.g., pre-trigger extensions) utilize Advantest test triggering (e.g., pre-trigger) technology to enable, for example, fast (e.g., low-latency (e.g., real-time)) and / or bidirectional communication between automated test equipment (e.g., testers) and sorters. Trigger lines or wires (e.g., pre-trigger lines or wires) can be used, for example, to modulate and / or transmit data between automated test equipment (e.g., testers) and sorters, and vice versa. Data or information, such as “per-site alarm (ALARM)”, “per-site power off”, “site-specific pre-trigger ID” (e.g., required for test process branches), and / or “site-related cooling information”, can be sent between devices in real time. This fast interface (e.g., trigger interface or pre-trigger interface) can, for example, reduce the amount of hardware required for per-site pre-trigger and / or alarm processing interfaces to, for example, existing single-line or wire triggering (e.g., pre-trigger) interfaces.

[0442] Optional: "Power off at each site":

[0443] In some cases, disconnecting the device under test from the power supply may be advantageous or even necessary when the sorter can no longer cool the device or obtain temperature from the device's thermal diodes. Otherwise, it could disrupt the test setup. Some devices may reach 500-800W.

[0444] According to embodiments of the present invention, for example, examples (which may be used alone or in combination):

[0445] a) Site-related ATC (Active Thermal Control):

[0446] In some cases, applications need to send test site-specific information to the sorter in real time. For example, some devices (e.g., devices or sites at test sites) have different test settings (e.g., VDD voltage), which may result in more heat dissipation. In some cases, it may be advantageous or even necessary to notify the sorter at a trigger point (e.g., a pre-trigger point) which sites need to be cooled later to enable them or to ensure that undercooling or overheating does not occur.

[0447] The following is about Figure 18 The explanation relates to optional features of the embodiments. Figure 18 A schematic example of temperature control related to a test site according to an embodiment of the present invention is shown. Figure 18Two test sites are shown: a first test site 1810 (site 1) and a second test site 1820 (site N). For example, as part of a test routine, a test suite burst 1830 is applied to the test sites. Optionally, test sites 1810 and 1820 may receive trigger signaling 1840 (e.g., shared triggering), such as pre-triggering, trigger A, or trigger point A. For each test site 1810, 1820, an example graph of DIE temperature changing over time is shown. At the start time (e.g., 0 seconds), the first site 1810 may include a lower DIE temperature than the second site 1820. Typically, alternatively, embodiments may be configured to take site-specific temperatures into account. As described above, for example, a sorting machine or temperature control (e.g., in a sorting machine) may be notified at a trigger point (e.g., close to 0 seconds, as shown by trigger signaling 1840) with site characteristics (e.g., the second site 1820 is hotter). Therefore, the delay at the hotter second site 1820 may be less or shorter to allow for a longer "cooling" time. Based on this, as... Figure 18 As shown, compared to the warmer (at 0s) second station 1820, which receives a shorter delay (e.g., 100ms), the cooler (at 0s) first station 1810 may receive a longer delay (e.g., 120ms). Simply put, as regarding... Figure 18 As an example of the scenario shown, in the case of a hotter test site, the sorter can delay cooling for a shorter period to allow for a longer cooling time before the next stimulus. In this way, for example, the cooling of the devices under test can be scheduled to keep all devices under test within the desired temperature range.

[0448] For example, in addition to triggering signaling, there may be additional site-specific information (e.g., modulation data).

[0449] b) Site-specific testing process branches

[0450] During testing, some test sites may be executed in different branches. In some cases, this may require hardware trigger lines, such as pre-trigger lines per test site, which can be complex for test setups with 16 or 32 sites.

[0451] Alternatively, a single trigger line (e.g., a pre-trigger line) can be used, for example, by identifying the trigger (e.g., pre-trigger) using modulated test station ID (identification) information. The ID informs the sorter which test station or short "station" should respond to the trigger signal (e.g., the pre-trigger signal). Other test stations can ignore the trigger (e.g., the pre-trigger). Figure 19 In this test, test site 1 ignores triggers (e.g., pre-trigger #2).

[0452] The following is about Figure 19 The explanation relates to optional features of the embodiments. Figure 19 A schematic example of a test site-specific test process branch according to an embodiment of the present invention is shown. Figure 19 Examples of optional test processes are shown, such as a test process with a test suite. Figure 19 The first triggering signaling 1910 is shown, for example, triggering (e.g., pre-triggering #1). First triggering signaling 1910 may affect or be considered by first and second test sites 1920 (e.g., test sites 1 and 2). For example, second triggering signaling 1930, for example, triggering (e.g., pre-triggering #2), may affect second test site 1940, or may only be considered by second test site 1940. Third triggering signaling 1950, for example, triggering (e.g., pre-triggering #3), may affect or be considered by first and second test sites 1920. In summary, for example, test site (e.g., test site 1) is triggered (e.g., pre-triggering: 1, 3), and test site (e.g., site 2) is triggered (e.g., pre-triggering 1, 2, and 3).

[0453] c) Alarm Handling

[0454] In some situations, such as to protect test setups, sorters may need to be configured to detect so-called “temperature runaway.” This can occur, for example, if temperature readings in the ATC loop are corrupted (e.g., by a faulty thermal diode or cable). In such cases, the sorter may need to immediately shut down, for example, a specific test station while executing a test procedure, potentially affecting data processing of the device (e.g., packing and / or data logging). Instead of using a hardware interface with ALARM wires (e.g., ALARM wires per test station), a fast (e.g., low-latency) interface can perform this task, for example, by modulating station information onto an exit trigger signal (e.g., a pre-trigger signal). This information can be decoded on the automated test equipment side or the tester side, and can shut down, for example, station-specific power supplies.

[0455] It should be noted that such alarm handling is not possible in today's interfaces (e.g., GPIB), at least not within a reasonable response time.

[0456] Figure 20 An example is shown. The following is about... Figure 20 The explanation relates to optional features of the embodiments. Figure 20 A schematic example of alarm processing according to an embodiment of the present invention is shown; Figure 20The device 1750, the automated test equipment 1710 (e.g., a tester), and the sorter 1730 are shown. Figure 20 This illustrates various malfunctions that may occur individually or in combination and may be resolved by embodiments of the invention. For example, device 1750 may suffer from malfunction 2010 (e.g., thermal malfunction) or may be a defective device. In this case, automated test equipment 1710 may detect the malfunction, or may not receive any further data from the device and thus determine that the device under test is malfunctioning, as indicated by arrow 2020. As another example, the signaling 2030 between automated test equipment 110 and the sorter may be interfered with and suffer from malfunction 2040. For example, a wire may be broken. As another example, the device temperature may "go out of control" at 2050, or the sorter may detect a temperature "go out of control" at 2060. As previously mentioned, for example, in the event of a malfunction at 2010 or 2050, the automated test equipment and / or the sorter may detect such a malfunction based on, for example, temperature measurements. The sorter may cool the device, or the automated test equipment may shut down the corresponding test station. For example, to coordinate adequate countermeasures, the sorter may be configured to trigger an alarm. In some cases, the sorter 1730 may trigger, or even require, a device shutdown in real time. This signaling is indicated by arrow 2070.

[0457] 2. Trigger Extension (e.g., pre-triggered extension): Fast and accurate synchronization of automated test equipment (e.g., test machine-sorter-automated test equipment) (example; optional feature; any details are optional)

[0458] The concept of triggering (e.g., pre-triggering) enables precise device synchronization. For example, in some cases, thermal diode calibration is required. The temperature characteristics of a thermal diode can be highly process-dependent (e.g., diode reverse current). This can, for example, be eliminated during testing by incremental temperature measurements. However, in some cases, this may require rapid and accurate synchronization timing between the sorter and automated test equipment or tester to measure the temperature at the correct point (e.g., a point in time and / or a point on the device under test). Measurements can be performed under different device or test conditions (e.g., unpowered and powered-on modes), for example, to compensate for leakage current or device turn-on leakage current or heating effects that may affect temperature measurements during this calibration step.

[0459] The most favorable trigger (e.g., pre-trigger) signal can be used to precisely notify the sorter (e.g.) when to measure (e.g., calibrate the baseline) (e.g., P1 below). The baseline can be used as a reference for subsequent temperature measurements, for example, to compensate for errors. Alternatively or additionally, active synchronization can help achieve, for example, a significant reduction in test time. In some cases, it can eliminate or reduce WAIT insertion (as suggested by other solutions) and / or reduce or eliminate uncertainty in measurements under incorrect test conditions, thereby, for example, eliminating or reducing erroneous test results or part shipments due to (e.g.,) potentially difficult-to-trace erroneous temperature calculations.

[0460] Note: This concept can be a significant contribution compared to other methods that use WAIT time. Since there is no waiting time, test time can be greatly reduced. This can be a huge economic advantage.

[0461] Figure 21 An example is shown. The following is about... Figure 21 The explanation relates to optional features of the embodiments. Figure 21 A schematic example of calibration according to an embodiment of the present invention is shown. Figure 21 Timing information is shown for examples of optional device status 2110, test execution 2120, and trigger signaling 2130 (e.g., triggering (e.g., pre-triggering)). For example, a device can be inserted, and optionally, the sorter can provide sorter information 2140, such as sorter test start (StartOfTest), or device status 2110 where the device is in place (e.g., at a predetermined test station), so that testing can begin. Therefore, in the pre-test phase 2150 of test execution, the pre-test temperature 2160 (e.g., the temperature triggered by trigger signaling 2130 (e.g., trigger P1)) can be measured as a reference. It should be noted that a fast, real-time interface can avoid waiting statements, for example, so that the sorter can be notified in real time (e.g., by triggering P1) that the device under test is ready for calibration measurement. After calibration, tests can be performed, such as active device test 2170 of test execution 2120, in which a further expected temperature rise during the test is signaled using further trigger signaling or trigger pulses (P2, P3, Pn) provided by trigger signaling 2130.

[0462] According to one aspect, the first trigger signal or trigger pulse P1 can signal that the device under test (DUT) is ready for a reference measurement. In other words, the first trigger signal or first trigger pulse P1 after the start of the test can indicate that the DUT is ready for a reference temperature measurement and can be interpreted by the sorting machine, for example, as triggering such a reference temperature measurement (this can be based, for example, on an evaluation of the signal provided by a temperature-measuring diode on the DUT). Alternatively, the first trigger signal or first trigger pulse after the start of the test can instruct the DUT to be inserted into the test position and (optionally) properly biased to allow the sorting machine to perform a reference temperature measurement (e.g., using a temperature-measuring structure on the DUT).

[0463] Further triggering signals or trigger pulses (e.g., after the first triggering signal or trigger pulse in a test or test sequence) can be pre-triggering signals indicating an expected upcoming temperature rise. Therefore, further triggering signals or trigger pulses can be interpreted by the sorter as pre-triggering signals, for example, to activate cooling before the temperature rises.

[0464] Optionally, the second trigger pulse (P2) may indicate that the device is in an active state (e.g., fully powered on). However, the second trigger pulse (after the first trigger pulse) may, for example, already be a pre-trigger signal.

[0465] For example, a sorter can perform a reference temperature measurement in response to a first trigger pulse, and then can perform further temperature measurements continuously (or repeatedly). For example, the sorter can use the reference temperature measurement for calibration purposes, such as to eliminate the influence of the characteristics of the temperature measurement structure on the device under test from further temperature measurements.

[0466] 3. Expand ATC capabilities to ensure more precise temperature control (example; optional feature; any details are optional)

[0467] In addition to thermal diode information, other test parameters can also help, for example, to better predict and regulate the behavior of device temperature hotspots. Special algorithms in automated test equipment (e.g., testers or sorters, or both) can use this data (e.g., parameters) to make early or predictive determinations, for example, of the cooling amplitude, duration, and intensity of each test site. In some cases, rapid triggering (e.g., pre-triggering) and the communication channel between the sorter and the automated test equipment (e.g., tester) may be necessary or advantageous for transmitting such data (e.g., parameter data or control parameters).

[0468] Example of parameter data: (but not limited to) (one or more or all parameters may be used):

[0469] a.PMON: Monitors real-time DUT power consumption

[0470] b.Tj: Actual DUT junction temperature

[0471] c. SPT: Synchronous Trigger (e.g., Pre-triggered) signal, which warns of an impending power hotspot.

[0472] d.SITE: Site-specific control data

[0473] e.DUT: DUT-specific control data

[0474] f.TEST: Test specific response data

[0475] g.FLOW: Control data specific to the test subprocess

[0476] Control parameters

[0477] h. Information on upcoming temperature hotspots

[0478] i. Duration of the hotspot

[0479] j. The magnitude of the hot topic

[0480] k. Site- and device-specific temperature control data.

[0481] Various viewpoints and aspects of the present invention

[0482] The following describes various aspects and points of view of the present invention, which may be used individually or in combination and may be part of embodiments of the present invention.

[0483] 1. By using triggering (e.g., pre-triggering) capabilities, precise and rapid synchronization between automated test equipment or test machines other than ATC and sorting machines is achieved.

[0484] 2. A fast (e.g., real-time) communication channel, such as a trigger line or additional signaling, for example, using embedded protocols to transmit data between automated test equipment or testers and sorters, and vice versa (e.g., by modulating existing triggering (e.g., pre-triggering) hardware). This can further simplify complex hardware interfaces to support numerous test sites for site-dependent triggering (e.g., pre-triggering) and / or alarm handling.

[0485] 3. Extend Active Thermal Control (ATC) to other parameters that allow for more precise temperature regulation (e.g., parameter data or control parameters).

[0486] Conclusion

[0487] Although examples and embodiments of the invention have been described within various aspects of the invention, it should be noted that any embodiment of any aspect of the invention may be incorporated into or added to any other aspect of the invention, or practiced together with any other aspect of the invention. The organization and description chosen to be divided into multiple aspects is intended to highlight features and aspects so that those skilled in the art can better understand the invention.

[0488] However, for example, any interface (e.g., a tester interface and / or a sorter interface) can be bidirectional and / or dedicated real-time interfaces. The direction of information transmission can be selected depending on the specific application (e.g., only in one direction or in both directions). Furthermore, any signals and information provided can be specific to the test station of the sorter from the automated test equipment, and vice versa. Signaling can be provided or received in any configuration of the tester and sorter interfaces. Moreover, signaling can include various types of information, such as triggering information, synchronization information, and / or additional information. However, this information can also be provided or received as different signaling, for example, providing or receiving a signaling for specific information. Furthermore, for example, any signaling or a combination thereof can be transmitted via a single channel.

Claims

1. An automatic test apparatus for testing a device under test, comprising: Real-time sorting machine interface, The real-time sorting machine interface is configured to provide a trigger signal to the sorting machine to trigger the temperature control function; and The real-time sorting machine interface is configured to provide synchronization signaling to the sorting machine for synchronizing functions of the sorting machine other than the temperature control function. The real-time sorting machine interface is specifically adapted to a bidirectional interface for communication between the automatic testing equipment and the sorting machine. The real-time sorter interface is also configured to receive signaling from the sorter in response to adapt the test process.

2. The automatic testing equipment according to claim 1, wherein, The real-time sorting machine interface is configured to enable active synchronization with the sorting machine based on the synchronization signaling sent to the sorting machine; and The synchronization mentioned here is a synchronization that does not require waiting for insertion.

3. The automatic testing equipment according to claim 1 or 2, wherein, The real-time sorter interface is configured to provide calibration timing information to the sorter to determine the timing of the sorter's calibration.

4. The automatic testing equipment according to claim 1 or 2, wherein, The real-time sorter interface is configured to send signals indicating that the device under test is powered on, biased, or initialized in a predetermined manner.

5. The automatic testing equipment according to claim 1 or 2, wherein, The real-time sorter interface is configured to send signaling when different devices or test conditions are met.

6. The automatic testing equipment according to claim 1 or 2, wherein, The automated testing equipment is configured to provide the synchronization signal to trigger one or more temperature readings by the sorting machine.

7. The automatic testing equipment according to claim 1 or 2, wherein, The real-time sorter interface is configured to enable thermal diode calibration based on the synchronization signal sent to the sorter; and The thermal diode calibration includes incremental temperature measurement, and The real-time sorter interface is configured to send real-time measurement timing information to the sorter for use in the thermal diode calibration.

8. The automatic testing equipment according to claim 1 or 2, wherein, The synchronization signaling includes timing information for measurements taken by the sorting machine.

9. The automatic testing equipment according to claim 1 or 2, wherein, The synchronization signaling includes test status information or device status information.

10. A sorting machine for use in conjunction with automated test equipment to test a device under test, the sorting machine comprising: Real-time test machine interface, The sorting machine is configured to receive a trigger signal from the automatic testing equipment via the testing machine interface, and the sorting machine is configured to trigger a temperature control function in response to the received trigger signal; and The sorting machine is configured to receive synchronization signaling from the automatic testing equipment via the testing machine interface, and The sorting machine is configured to synchronize with the automatic testing equipment in response to the received synchronization signaling, and this function triggers a function other than the temperature control function. The real-time testing machine interface is specifically adapted to be a bidirectional interface for communication between the automatic testing equipment and the sorting machine. The sorting machine is also configured to send signaling to the automated testing equipment via the real-time test machine interface so that the automated testing equipment responds to the signaling to adapt to the test process.

11. The sorting machine according to claim 10, wherein, The sorting machine is configured to receive signaling from the automatic testing equipment via the testing machine interface for active synchronization with the automatic testing equipment; and The sorting machine is configured to perform active synchronization with the automatic testing equipment based on the synchronization signaling; and The active synchronization mentioned above is a synchronization that does not require waiting for insertion.

12. The sorting machine according to claim 10 or 11, wherein, The sorting machine is configured to receive calibration timing information from the automatic testing equipment via the testing machine interface, so as to determine the calibration timing based on the calibration timing information.

13. The sorting machine according to claim 10 or 11, wherein, The sorter is configured to receive, via the tester interface, a signal from the automated test equipment instructing the device under test to be adjusted, powered, biased, or initialized in a predetermined manner.

14. The sorting machine according to claim 10 or 11, wherein, The sorter is configured to receive signaling from the automated test equipment via the tester interface when different device or test conditions are met.

15. The sorting machine according to claim 10 or 11, wherein, The sorting machine is configured to receive signals from the automated testing equipment via the testing machine interface to trigger one or more temperature readings; and The sorting machine is configured to perform one or more temperature measurements based on the synchronization signaling.

16. The sorting machine according to claim 10 or 11, wherein, The sorter is configured to perform thermal diode calibration based on the synchronization signal received from the automated test equipment via the tester interface; and The thermal diode calibration includes incremental temperature measurement; and The sorting machine is configured to perform the incremental temperature measurement; and The sorting machine is configured to receive real-time measurement timing information from the automatic testing equipment via the real-time testing machine interface for use in the thermal diode calibration.

17. The sorting machine according to claim 10 or 11, wherein, The synchronization signaling includes timing information for measurements taken by the sorting machine.

18. The sorting machine according to claim 10 or 11, wherein, The synchronization signaling includes test status information or device status information.

19. A testing system comprising an automatic testing device according to any one of claims 1 to 9 and a sorting machine according to any one of claims 10 to 18.

20. A method for testing a device under test, wherein, The method includes: providing a trigger signal to the sorting machine via a real-time sorting machine interface to trigger a temperature control function; and The method includes: providing synchronization signaling to the sorting machine through the real-time sorting machine interface; and The method includes: synchronizing the functions of the sorting machine other than the temperature control function; The real-time sorting machine interface is specifically adapted to a bidirectional interface for communication between the automatic testing equipment and the sorting machine. The method further includes: receiving signaling from the sorter via the real-time sorter interface to adapt the test process in response to the signaling.

21. A method for testing a device under test, wherein, The method includes: receiving a trigger signal from an automated testing device via a real-time testing machine interface, and wherein the method includes: triggering a temperature control function in response to the received trigger signal; and The method includes: receiving synchronization signaling from the automatic testing equipment through the testing machine interface, and The method includes: synchronizing with the automatic testing equipment, in response to the received synchronization signaling, a function that triggers a function other than the temperature control function. The real-time testing machine interface is specifically adapted to be a bidirectional interface for communication between the automatic testing equipment and the sorting machine. The method includes: sending a signaling message to the automatic testing device through the test machine interface so that the automatic testing device responds to the signaling message to adapt to the test process.

22. A computer program, which, when run on a computer, performs the method according to claim 20 or 21.

23. A testing unit comprising an automatic testing device according to any one of claims 1 to 9 and a sorting machine according to any one of claims 10 to 18, wherein, The sorting machine interface of the automatic testing equipment is coupled to the testing machine interface of the sorting machine.

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