Chemical agent automatic supply device with open gate

Abstract

The present application relates to a kind of chemical automatic supply device including opening gate, comprising: door, in the state of retaining portion installation hose, the inside of chemical automatic supply device is isolated with outside, and is made of the switch door and isolated portion being arranged in frame;Switch door rotates or moves to frame, and then open the side portion of frame;Hose opening, in the state that switch door is closed, through hose;And opening gate, located in door, and open and close hose opening;Wherein, the opening gate includes opening cover portion and switch operating portion, the switch of opening cover is operated by the switch operating portion, and then can guarantee to be easily and reliably opened and closed.

Description

Technical Field

[0001] The present invention relates to an automatic chemical preparation supply device, and in particular, to an automatic chemical preparation supply device having an opening gate with a switch hose opening. Background Technology

[0002] Typically, companies that manufacture semiconductors, semiconductor devices, LCDs, OLEDs, pharmaceuticals, and paints—all companies that use hazardous chemicals—are using various types of chemical agents, and the ways to safely supply these chemicals are becoming increasingly diverse.

[0003] This chemical agent is transported as follows: from the chemical agent tank in a tank lorry parked outside the building to the chemical storage tank located inside the building, and then from the chemical storage tank to the chamber where the unit process is carried out. Conversely, there are also cases where the chemical agent is transported from the chemical storage tank to the tank lorry.

[0004] Currently, an automated chemical supply system called the ACQC (Automatic Clean Quick Coupler Unit) is available and in use. In this system, chemical storage tanks are typically located inside buildings, and the ACQC unit acts as an intermediary between the chemical tanks in tank trucks located outside the building and the chemical storage tanks inside. Specifically, the ACQC unit includes a male connector holder and a female connector. The male connector holder is moved to the female connector via transfer means, allowing the male connector to automatically insert and secure itself to the female connector and automatically detach from it. Therefore, workers are not exposed to the chemicals, ensuring safe chemical supply.

[0005] The partition doors constituting an automated chemical supply system function to prevent foreign objects from penetrating into the system or to prevent residual chemicals or fumes leaking out during the supply process. If the openings for the chemical supply hoses and nitrogen hoses on the partition doors remain open except when the hoses are inserted, there is a possibility of foreign objects penetrating and even entering the system. Therefore, separate, operable gates are required. However, currently commercially available automated chemical supply systems do not have separate gates, or even if they do, operators cannot easily open and close both the chemical supply hose openings and the nitrogen hose openings simultaneously, leading to reduced chemical supply efficiency.

[0006] The Korean Patent Publication (Grant No.: 10-1572537, Automatic Fastening System between Chemical Agent Tank Truck and ACQC Unit) discloses the opening of the hose for chemical agents and the opening of the hose for nitrogen, but does not disclose the opening gate. Therefore, when the equipment is not in use, foreign objects may enter the equipment, which may cause malfunctions or even abnormal operation.

[0007] Conversely, leaks or residues of chemicals within the system (equipment) can also leak chemicals or fumes to the outside. Summary of the Invention

[0008] (The problem to be solved)

[0009] The purpose of this invention is to easily open and close the hose openings for chemical agents and nitrogen, and to ensure reliable opening and closing, thereby preventing foreign objects from entering or chemical agents or even fumes from leaking.

[0010] (Solutions)

[0011] An automatic chemical supply device, comprising a conveying unit that transports a male connector in a back-to-back direction to connect a chemical reagent tank and a chemical reagent storage tank for supplying chemicals from one side to the other, and for securing the male connector to the female connector, includes:

[0012] The partition door isolates the interior of the automatic chemical supply device from the outside while the hose is installed in the retaining part, and consists of a switch door and an isolation part installed in the frame;

[0013] The door is opened or closed by rotating or moving the frame, thereby opening or closing one side of the frame;

[0014] The hose opening is located on the partition door, allowing the hose to pass through when the door is closed; and

[0015] An open gate, located in the partition, with a switch hose opening;

[0016] The opening gate includes:

[0017] Opening cover; and

[0018] The switch operating unit operates the switch of the opening cover, thereby ensuring easy and reliable opening and closing.

[0019] (The effect of the invention)

[0020] This invention closes the hose opening when the automatic chemical supply device is not in use, thus preventing foreign objects from entering the automatic chemical supply device from the outside or preventing chemical agents or even fumes from leaking to the outside of the device, thereby preventing malfunctions and ensuring the safety of personnel.

[0021] In addition, staff can easily open and close the hose openings for chemical preparations and nitrogen gas with a single action, thus improving the efficiency and productivity of chemical supply. Attached Figure Description

[0022] Figure 1 This is a side view illustrating an embodiment of an automatic chemical preparation supply device.

[0023] Figure 2 This is a diagram illustrating the appearance of an automatic chemical preparation supply device according to an embodiment.

[0024] Figure 3 This is a partial cross-sectional view illustrating an embodiment of an automatic chemical preparation supply device;

[0025] Figure 4 This is a diagram illustrating the opening of the cover.

[0026] Figure 5 This is a diagram illustrating an open gate.

[0027] Figure 6 This is a diagram illustrating an automatic chemical supply device with elastic components arranged on the guide rail.

[0028] Figure 7 This diagram illustrates the process of operating the switch on / off switch for the openings of the chemical reagent hose and the nitrogen hose via the switch control unit.

[0029] (Explanation of reference numerals in the attached diagram)

[0030] 900: Partition

[0031] 901: Framework

[0032] 902: Opening and closing the door

[0033] 903: Isolation Section

[0034] 910: Opening of hoses for chemical preparations

[0035] 911: Rotating Roller

[0036] 920: Nitrogen hose opening

[0037] 930: Open gate

[0038] 931: Opening cover

[0039] 931-1: Open caps for chemical preparations

[0040] 931-2: Open cap for nitrogen gas

[0041] 931-3: Cover connection part

[0042] 932: Switch Operating Unit

[0043] 932-1: Control Panel

[0044] 932-2: Handle

[0045] 932-3: Handle Connector

[0046] 932-4: Handle Clip

[0047] 933: Guide roller

[0048] 934: Buffer component

[0049] 935: Elastic component Detailed Implementation

[0050] The following detailed description, with reference to the accompanying drawings, aims to enable those skilled in the art to readily understand and implement the present invention through the described preferred embodiments. In the description of the present invention, detailed descriptions of known functions or structures may be omitted if they would obscure the essential points of the embodiments of the present invention. Terms used throughout this specification are defined in consideration of their operation in the embodiments of the present invention and are subject to considerable variation based on the intentions, conventions, etc., of the user or operator; therefore, the definitions of these terms should be based on the definitions provided throughout the specification.

[0051] Furthermore, the forms of the above and supplementary inventions will become clear through the embodiments described later. The structures of the forms or embodiments selectively described in this specification are to be understood as follows: even if shown in a single integrated structure in the drawings, they can be freely combined with each other as long as the technical contradictions are not clear to those skilled in the art without different descriptions.

[0052] Therefore, the embodiments described in this specification and the structures shown in the accompanying drawings are only the most preferred embodiments of the present invention and do not represent all the technical ideas of the present invention. It should be understood that various equivalents and modifications may be available at the time of application of the present invention.

[0053] Figure 1 This is a side view illustrating an embodiment of an automatic chemical preparation supply device. As shown, the automatic chemical preparation supply device 1000 (ACQC unit) may include: a male connector holding part 100, a housing body 200, a transport housing 300, a transport unit 400, and a female connector 500.

[0054] In order to connect the chemical agent tank and the chemical agent storage tank to supply chemical agents from one side to the other, the automatic chemical agent supply device transports the male connector 20 in a forward / backward direction via the transport unit 400, so that the male connector 20 can be fastened to the female connector 500.

[0055] One end of the transport unit 400 can be inserted into an opening 601 formed in the wall 600. The wall 600 refers to the wall that constitutes the building, and the opening 601 can be configured as a perforated shape to allow communication between the exterior and interior of the building.

[0056] If an operator installs and secures the chemical hose 700 in the male connector retaining part 100, the retaining part 100 is moved forward by the drive of the transport unit 400, thereby inserting (fastening) the male connector 20 into the female connector 500. The transport unit 400 consists of one or more stages and a drive unit, so the male connector retaining part 100 can slide back and forth on the stage.

[0057] The nitrogen hose 800 is also connected to the chemical agent automatic supply device 1000 together with the chemical agent hose 700 to supply nitrogen (N2) to the liquid tanker, thereby accelerating and smoothing the supply of chemical agents by pressurization.

[0058] The outer casing 200 accommodates the female connector 500, and the transport casing 300 can accommodate the transport unit 400.

[0059] Figure 2 This is a diagram illustrating the appearance of an automatic chemical agent supply device according to an embodiment. The automatic chemical agent supply device, which connects a chemical agent tank and a chemical agent storage tank to supply chemical agents from one side to the other, and transports a male connector in a back-and-forth direction via a transport unit to secure the male connector to a female connector, may include: a partition that isolates the interior of the automatic chemical agent supply device from the outside when a hose is installed in the retaining part, and is composed of a switch door 902 and a partition part 903 provided in the frame 901; a hose opening disposed in the partition and through which the hose passes when the switch door is closed; and an opening gate 930 for opening and closing the hose opening. The opening gate may include an opening cover and a switch operation part, the switch operation part operating the opening and closing of the opening cover.

[0060] According to one embodiment, the hose is divided into a hose for chemical preparations and a hose for nitrogen, and the hose opening can be divided into a hose opening 910 for chemical preparations and a hose opening 920 for nitrogen.

[0061] To connect chemical reagent tanks and chemical reagent storage tanks for supplying chemicals from one side to the other, an automatic chemical reagent supply device 1000 (ACQC unit) may include: a partition 900, a chemical reagent hose opening 910, a nitrogen hose opening 920, and an opening gate 930. The housing body 200 houses the female connector, and the transport housing 300 houses the transport unit. The automatic chemical reagent supply device may also have the chemical reagent hose opening 910 but not the nitrogen hose opening 920.

[0062] The partition 900 functions to isolate the interior of the automatic chemical supply device from the outside when the chemical agent hose and nitrogen hose are installed in the retaining part, and can be composed of a switch door 902 and an isolation part 903 provided in the frame 901. The switch door 902 is located in the upper part of the partition 900, and the isolation part 903 can be located in the lower part.

[0063] The opening / closing door 902 rotates or moves relative to the frame 901, thereby opening or closing one side of the frame. Rotation can be achieved via a hinge structure or a sliding structure. The opening / closing door 902 is equipped with a viewing window 902-1, allowing personnel to inspect the internal status of the automatic chemical supply device even when the door is closed.

[0064] The isolation section 903 may or may not be switched on. The partition door 900 prevents the chemical agents inside the automatic chemical supply device from leaking to the outside and prevents foreign objects from entering the interior.

[0065] The opening 910 for the chemical reagent hose and the opening 920 for the nitrogen hose are respectively located on a partition door, allowing the chemical reagent hose and the nitrogen hose to pass through when the door is closed. The opening 910 for the chemical reagent hose and the opening 920 for the nitrogen hose are arranged adjacent to each other, and the area of ​​the opening 910 for the chemical reagent hose can be larger than the area of ​​the opening 920 for the nitrogen hose.

[0066] The opening gate 930 is located at the partition gate 900 and can also simultaneously open and close the opening of the hose for chemical preparations and the opening of the hose for nitrogen.

[0067] Figure 3 This is a partial cross-sectional view illustrating an embodiment of an automatic chemical preparation supply device; Figure 4 This is a diagram illustrating the opening of the cover. Figure 5 This is a diagram illustrating an open gate. In Figure 5 In the diagram, A, B, and C represent the various parts of the enlarged opening gate.

[0068] The opening gate 930 may be located at the partition gate 900. The opening gate 930 may include an opening cover 931 and a switch operation part 932, the switch operation part 932 operating the opening cover 931.

[0069] Rotating rollers 911 are arranged around the opening 910 of the chemical agent hose and the opening 920 of the nitrogen hose, thereby allowing the hose to move smoothly and gently back and forth.

[0070] The opening cover 931 may include: a chemical agent opening cover 931-1, which moves up and down along a first cover track to open and close the opening of the chemical agent hose; and a nitrogen opening cover 931-2, which moves up and down along a second cover track to open and close the opening of the nitrogen hose.

[0071] In addition to the opening cap 931-1 for chemical reagents and the opening cap 931-2 for nitrogen, the opening cap portion 931 also includes a cap connecting portion 931-3. These may or may not be integrated into a single sheet, but... Figure 4 Ideally, the parts should be integrated into a single sheet. The chemical reagent opening cover 931-1 slides vertically along the first cover track R1, thereby opening and closing the chemical reagent hose opening. The nitrogen opening cover 931-2 slides vertically along the second cover track R2, thereby opening and closing the nitrogen hose opening. Figure 5 The diagram shows the closed state of the opening cap 931-1 for chemical preparations and the opening cap 931-2 for nitrogen.

[0072] The cover connecting part 931-3 is disposed between the chemical reagent opening cover 931-1 and the nitrogen gas opening cover 931-2, thereby fixing and connecting the chemical reagent opening cover and the nitrogen gas opening cover. To ensure sufficient space for the configuration (installation) of the switch operation part 932, such as... Figure 4 As shown, the cover connecting portion 931-3 may also protrude downwards. The switch operating portion 932 may be disposed on the cover connecting portion 931-3.

[0073] like Figure 3 and 5 As shown, the switch operation unit 932 may include: an operation plate 932-1, a handle 932-2, a handle connection part 932-3, and a handle latch 932-4.

[0074] The operation panel 932-1 is disposed in the isolation section and may have a pair of guide rails r1 and r2.

[0075] The handle 932-2 is mounted on the control panel 932-1 so that the operator can slide it up and down along the guide rail.

[0076] The handle connecting part 932-3 is disposed on the guide rails r1 and r2, and can fix and connect the handle 932-2 and the cover connecting part 931-3. The handle 932-2 and the handle connecting part 932-3 are hinged, and the handle can also be rotated. Thus, the handle 932-2 can also be horizontally pressed against the operation plate 932-1, or it can rotate vertically protruding from the operation plate 932-1.

[0077] The switch operating unit 932 may also include a handle latch 932-4. The handle latch 932-4 is located on the upper part of the operating plate 932-1 and can latch and support the handle 932-2. Thus, if the operator grasps the handle 932-2 and raises it to be positioned on the handle latch 932-4, the handle 932-2 can be prevented from falling, thereby maintaining the state in which the opening cover 931 for chemical preparations and the opening cover 931-2 for nitrogen are closed by the opening cover 931.

[0078] In addition, if the operator separates the handle 932-2 from the handle clip 932-4, the handle 932-2 and the opening cover 931 can be lowered by gravity, so the opening cover 931-1 for chemical preparations and the opening cover 931-2 for nitrogen can be kept open.

[0079] According to one embodiment, such as Figure 3 As shown, the insulating portion 903 is composed of an inner insulating portion 903-1 and an outer insulating portion 903-2, and the cover connecting portion 931-3 can be disposed between the inner insulating portion 903-1 and the outer insulating portion 903-2. Therefore, it is beneficial for the support and guidance of the cover connecting portion 931-3, and it can prevent the cover connecting portion from being exposed to the outside. The inner insulating portion 903-1 can have a space to accommodate the open cover portion 931.

[0080] According to one embodiment, such as Figure 5 As shown, the chemical reagent opening cap 931-1 and the nitrogen gas opening cap 931-2 are provided with guide rollers 933 on their sides that respectively contact the first cap track R1 and the second cap track R2. Therefore, the chemical reagent opening cap 931-1 and the nitrogen gas opening cap 931-2 can slide smoothly along the cap tracks R1 and R2. The cap tracks R1 and R2 can be disposed in the inner insulating portion 903-1.

[0081] According to one embodiment, a buffer member 934 may be provided in the inner insulating portion 903-1 below the opening cover 931-1 for chemical preparations and the opening cover 931-2 for nitrogen. The buffer member 934 may be composed of a spring, a cylinder, or a shock absorber. Therefore, the impact caused by the forceful descent of the opening cover 931-1 for chemical preparations and the opening cover 931-2 for nitrogen is mitigated, and damage is prevented.

[0082] According to one embodiment, the guide rails r1 and r2 are also equipped with multiple permanent magnets, which are arranged facing each other with different polarities (S pole, N pole) to form a predetermined attraction. Figure 5 (B). Therefore, the friction between the handle connection 932-3 and the guide rails r1 and r2 is increased, and the permanent magnet performs a buffering function, thereby preventing the opening cap 931-1 for chemical preparations and the opening cap 931-2 for nitrogen from falling down forcefully. In addition, the permanent magnets adhere to each other at the locations where the handle connection has passed, thus sealing the gaps.

[0083] According to one embodiment, the automatic chemical agent supply device does not require the handle, handle connector, or handle latch. Instead, it uses a cylinder or motor or other drive unit to slide the opening cover 931 in the vertical direction, which can also automatically open and close the opening 910 of the chemical agent hose and the opening 920 of the nitrogen hose.

[0084] Figure 6 This diagram illustrates an automatic chemical dispensing device with elastic components arranged on the guide rails. According to one embodiment, the guide rails r1 and r2 may also be equipped with multiple elastic components 935, and these elastic components may be arranged facing each other. Therefore, the friction between the handle connection 932-3 and the guide rails r1 and r2 is increased, and the elastic components perform a cushioning function, thereby preventing the chemical dispensing cap 931-1 and the nitrogen dispensing cap 931-2 from falling forcefully. Furthermore, the elastic components can adhere to each other at the points where the handle connection has passed, thus sealing any gaps. Various other methods can be adapted to achieve these additional effects.

[0085] Figure 7 This diagram illustrates the process of operating the switch on / off mechanism to open the hoses for chemical reagents and nitrogen gas. (See diagram for example.) Figure 7 As shown in (a), by raising the handle 932-2, the handle rotates in the direction of the arrow and engages with the handle latch 932-4, thereby closing the opening of the chemical agent hose and the nitrogen hose of the opening cover 931, and keeping them closed. Therefore, foreign objects cannot enter the automatic chemical agent supply device through the opening of the chemical agent hose or the nitrogen hose.

[0086] In order to use automatic chemical agent supply devices, such as Figure 7 As shown in (b), the operator further raises handle 932-2 in the direction of the arrow, and then... Figure 7As shown in (c), the handle 932-2 is rotated in the direction of the arrow and pressed downwards, thereby opening the opening of the chemical agent hose and the nitrogen hose at the opening cover 931, and keeping them open. Therefore, the chemical agent hose and the nitrogen hose are connected through the opening of the chemical agent hose and the nitrogen hose, and with the switch door 902 closed, the chemical agent hose and the nitrogen hose move forward and backward, thereby allowing the male connector to be fastened to and separated from the female connector.

Claims

1. A chemical agent automatic supply apparatus for connecting between a chemical agent tank and a chemical agent storage tank to supply the chemical agent from one side to the other side, by transporting a male connector in a forward and backward direction by a transport unit to fasten the male connector with a female connector, comprising: a door for isolating an inside of the chemical agent automatic supply apparatus from an outside in a state that a hose is installed to the holding part, and being composed of a switch door and an isolation part provided to a frame; the switch door rotating or moving with respect to the frame to open and close a side part of the frame; a hose opening provided to the door to pass through the hose in a state that the switch door is closed; and an opening gate provided to the door to open and close the hose opening; the hose being divided into a chemical agent hose and a nitrogen gas hose; the hose opening being divided into a chemical agent hose opening and a nitrogen gas hose opening; wherein the opening gate comprises: a chemical agent opening cover moving in an up and down direction along a first cover rail to open and close the chemical agent hose opening; a nitrogen gas opening cover moving in an up and down direction along a second cover rail to open and close the nitrogen gas hose opening; a cover connecting part integrally connecting the chemical agent opening cover and the nitrogen gas opening cover; and a switch operating part installed to the cover connecting part and operated by a worker, wherein the switch operating part is configured to operate the cover connecting part to simultaneously open and close the chemical agent opening cover and the nitrogen gas opening cover.

2. The chemical agent automatic supply apparatus according to claim 1, wherein: the isolation part is composed of an inner isolation part and an outer isolation part; and the cover connecting part is provided between the inner isolation part and the outer isolation part of the door, and configured to guide and support simultaneous movement of the chemical agent opening cover and the nitrogen gas opening cover.

3. The chemical agent automatic supply apparatus according to claim 1, wherein: the switch operating part comprises: an operating plate provided to the isolation part and formed with a pair of guide rails; a handle provided to the operating plate and slidable in an up and down direction along the guide rails by the worker; and a handle connecting part provided to the guide rails to fix and connect the handle and the cover connecting part.

4. The chemical agent automatic supply apparatus according to claim 3, wherein: the switch operating part further comprises a handle holder, the handle holder being provided to an upper part of the operating plate to hold and support the handle.

5. The chemical agent automatic supply apparatus according to claim 1, wherein: the chemical agent opening cover and the nitrogen gas opening cover are provided with guide rollers on side surfaces contacting the first cover rail and the second cover rail, respectively.

6. The chemical agent automatic supply apparatus according to claim 3, wherein: the handle and the handle connecting part are hingedly connected to rotate the handle.

7. The chemical agent automatic supply apparatus according to claim 3, wherein: the guide rails are further provided with a plurality of permanent magnets, the permanent magnets being provided to face each other with different magnetic properties to form a predetermined attractive force. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 8. The chemical agent automatic supply device according to claim 3, wherein the guide rail is further provided with a plurality of elastic members, the elastic members being arranged to face each other.

9. The chemical agent automatic supply device according to claim 8, wherein the elastic members are arranged to be pressed against each other by the chemical agent container.

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