Platinum resistance temperature sensor with floating platinum member

Abstract

The invention is entitled "Platinum Resistance Temperature Sensor with Floating Platinum Member". A platinum resistance temperature sensor is disclosed having a housing containing a platinum member. The housing includes a first substrate having a first support and a second support spaced apart from an upper surface of the first substrate. The first support of the first substrate supports a first portion of the platinum member and the second support supports a second portion of the platinum member. An intermediate portion of the platinum member is suspended above the upper surface of the first substrate between the first support and the second support.

Description

[0001] This application is a divisional application of Chinese patent application No. 202010587810.7, entitled "Platinum Resistance Temperature Sensor with Floating Platinum Component", filed on June 24, 2020. Technical Field

[0002] This disclosure relates to temperature sensor devices, and more particularly, to temperature sensor devices comprising platinum resistance elements. Background Technology

[0003] Because platinum resistance temperature sensors are among the most accurate temperature measurement devices available, they are the preferred choice in many academic and industrial applications. Figure 1 A previously implemented platinum resistance temperature sensor 100 is shown, comprising a platinum wire 102 wound around a spacer 104 made of ceramic, glass, or the like. The platinum wire 102 and the spacer 104 are typically housed within a sheath 106, and the interior 108 of the sheath 106 is vacuum-sealed or filled with an inert material. The resistance of the platinum wire 102 is measured across a pair of leads 110 electrically connected to the platinum wire. While platinum resistance temperature sensors 100 are highly accurate, they are also highly sensitive to shock or vibration. As a result of shock, for example, the platinum in the platinum resistance temperature sensor 100 may need to be annealed, and the system for measuring the resistance of the platinum wire 102 at the leads 110 may need to be recalibrated. The sensitivity of platinum resistance temperature sensors 100 to shock and vibration limits their applicability.

[0004] The wire-wound platinum resistance temperature sensor 100 also has other drawbacks. Relatively small metals and elements (e.g., Na, K, Mg) can diffuse through the sheath 106 and contaminate the sensor 100. Manufacturing the platinum resistance temperature sensor 100 is also costly and labor-intensive, and may be difficult to mass-produce due to its sensitivity.

[0005] Figure 2Another known platinum resistance temperature sensor 200 is shown, which is less sensitive to shock and vibration compared to platinum resistance temperature sensor 100. The platinum resistance temperature sensor 200 includes a platinum thin film layer 202 deposited (e.g., via sputtering) onto a non-platinum substrate 204. The platinum thin film layer 202 is fixed to the substrate 204 abutting against a glass layer 206. A set of connecting pads 208 of conductive wires 210 are electrically and physically connected to leads 212 of the platinum thin film layer 202 via apertures 214 in the glass layer 206. A layer 216 for strain relief and / or insulation secures the connection between the pads 208 and the leads 212. While more robust against vibration and shock than the platinum resistance temperature sensor 100, the platinum resistance temperature sensor 200 is less accurate than the platinum resistance temperature sensor 100, at least in part due to the difference in the coefficient of thermal expansion between the platinum thin film layer 202 and the substrate 204, which causes errors and hysteresis in the temperature measurements obtained by the device. Furthermore, since the platinum thin film layer 202 is deposited on the substrate 204, the stress in the platinum thin film layer 202 may be inherent and may not be suitable for annealing.

[0006] The platinum resistance temperature sensor 200 is designed to offer several advantages over the platinum resistance temperature sensor 100. The platinum resistance temperature sensor 200 is more robust to vibration and shock than the platinum resistance temperature sensor 100, and is also less expensive and easier to manufacture. While the platinum resistance temperature sensor 200 can be annealed, effects associated with strain and / or the coefficient of thermal expansion may continue to contribute to hysteresis and errors in the device. Therefore, annealing the platinum resistance temperature sensor 200 does not necessarily improve its performance. Furthermore, the platinum resistance temperature sensor 100 offers better accuracy and a wider temperature range compared to the platinum resistance temperature sensor 200.

[0007] The challenges presented by designing and manufacturing platinum resistance temperature sensors, which offer high accuracy and temperature range as provided by platinum resistance temperature sensor 100 and robustness as provided by platinum resistance temperature sensor 200, pose a challenge to those skilled in the art. Furthermore, those skilled in the art are unable to design relatively inexpensive platinum resistance temperature sensors that combine the aforementioned characteristics with mass production capabilities. Summary of the Invention

[0008] The embodiment of the platinum resistance temperature sensor disclosed herein includes: a first substrate having a first support surface and a second support surface; a platinum member having a set of forked arms extending from a base portion; and a first post extending from the first support surface. The base portion of the platinum member is located on the first support surface, and the first post restricts movement of the base portion relative to the first support surface. The set of forked arms extends from the base portion to the second support surface and is suspended above the upper surface of the first substrate.

[0009] In some embodiments, the platinum resistance temperature sensor includes a second substrate having a lower surface opposite to the upper surface of the first substrate and enclosing the platinum member within the platinum resistance temperature sensor. The lower surface of the second substrate may be adjacent to the end of the set of forks and may also be adjacent to the upper surface of the base portion. The end of the set of forks may contact and be supported by a second support surface. The base portion of the platinum member may have a receiving portion with a post extending therein, and the receiving portion may have a size and shape that allows the base portion to move relative to the first support surface. In some embodiments, the platinum resistance temperature sensor may include a support structure that limits the deflection of the set of forks.

[0010] In some embodiments, the platinum resistance temperature sensor may have a body having a circumferential surface extending along an axis between the ends of the body. The platinum component of the platinum resistance temperature sensor may have a length extending along the body and be supported by a set of support structures arranged along the body. This set of support structures may project laterally from the circumferential surface. The platinum resistance temperature sensor may include a sleeve having a cavity defined by sidewalls extending between a first end and a second end. The body may be enclosed within the cavity.

[0011] Advantageously, the platinum resistance temperature sensor disclosed herein is robust to vibration and / or shock and is configured to facilitate temperature measurement with high accuracy. The platinum resistance temperature sensor can be used in high-end equipment. Furthermore, the platinum resistance temperature sensor requires low maintenance and can be used in settings where there may be long periods between calibrations. The platinum resistance temperature sensor can be configured to reduce the possibility of contamination of the platinum components. Attached Figure Description

[0012] Figure 1 This illustrates a previously implemented wire-wound platinum resistance temperature sensor;

[0013] Figure 2 This illustrates a previously implemented thin-film platinum resistance temperature sensor;

[0014] Figure 3 An exploded view of a platinum resistance temperature sensor according to one or more embodiments is shown;

[0015] Figure 4 Show Figure 3 An isometric view of a portion of a platinum resistance temperature sensor;

[0016] Figure 5A A side view of a platinum temperature sensor according to one or more embodiments is shown;

[0017] Figure 5B A top plan view of a platinum temperature sensor according to one or more embodiments is shown;

[0018] Figure 6 A first cross-sectional top view of a platinum temperature sensor according to one or more embodiments is shown;

[0019] Figure 7 A first cross-sectional side view of a platinum temperature sensor according to one or more embodiments is shown;

[0020] Figure 8 A second cross-sectional side view of a platinum temperature sensor according to one or more embodiments is shown;

[0021] Figure 9 A third cross-sectional side view of a platinum temperature sensor according to one or more embodiments is shown;

[0022] Figure 10 A second cross-sectional top view of a platinum temperature sensor according to one or more embodiments is shown;

[0023] Figure 11 A third cross-sectional top view of a platinum temperature sensor according to one or more embodiments is shown;

[0024] Figure 12 A fourth cross-sectional top view of a platinum temperature sensor according to one or more embodiments is shown;

[0025] Figure 13 A fifth cross-sectional top view of a platinum temperature sensor according to one or more embodiments is shown;

[0026] Figure 14 A sixth cross-sectional top view of a platinum temperature sensor according to one or more embodiments is shown;

[0027] Figure 15 A first partial isometric view of the platinum component of a platinum temperature sensor according to one or more embodiments is shown;

[0028] Figure 16 A second partial isometric view of the platinum component of a platinum temperature sensor according to one or more embodiments is shown;

[0029] Figure 17 A partial exploded view of a platinum resistance temperature sensor with a linearly wound platinum component according to one or more embodiments is shown.

[0030] Figure 18 Show Figure 17 A cross-sectional view of a platinum resistance temperature sensor;

[0031] Figure 19A partial exploded view of a platinum resistance temperature sensor with a helically wound platinum component according to one or more embodiments is shown.

[0032] Figure 20A A side view of the support structure showing a platinum resistance temperature sensor located in an orifice in one side of the support structure.

[0033] Figure 20B A side view of the support structure for a platinum resistance temperature sensor located in an orifice at the end of a support structure, showing a platinum component.

[0034] Figure 20C A side view of the support structure showing a platinum resistance temperature sensor located in an orifice within the middle section of the support structure, and...

[0035] Figure 21 An exploded view of a platinum resistance temperature sensor is shown, showing multiple support structures extending around the periphery of the sensor's body. Detailed Implementation

[0036] The following description, together with the accompanying drawings, sets forth certain specific details to provide a thorough understanding of the various disclosed embodiments. However, those skilled in the art will recognize that the disclosed embodiments can be implemented in various combinations without one or more of these specific details, or using other methods, components, apparatus, materials, etc. In other instances, well-known structures or components that may be associated with implementing this disclosure, including but not limited to measurement systems, are not shown or described to avoid unnecessarily obscuring the description of the embodiments.

[0037] Throughout the specification, claims, and drawings, unless the context clearly specifies otherwise, the following terms have the meanings explicitly relevant herein. The term “this” refers to the specification, claims, and drawings associated with the current invention application. The phrases “in one embodiment,” “in another embodiment,” “in various embodiments,” “in some embodiments,” “in other embodiments,” and their other variations refer to one or more features, structures, functions, limitations, or characteristics of this disclosure and are not limited to the same or different embodiments unless the context clearly specifies otherwise. As used herein, the term “or” is inclusive and equivalent to the phrases “A or B, or both” or “A or B or C, or any combination thereof,” and lists with additional elements are treated similarly. The term “based on” is not exclusive and allows for reliance on additional features, functions, aspects, or limitations not described, unless the context clearly specifies otherwise. Furthermore, throughout the specification, the meanings of “a,” “an,” and “the” include both singular and plural references.

[0038] Unless the context otherwise requires or there is a contradiction, as used herein, reference to the term “set” (e.g., “set of items”) should be interpreted as a non-empty set comprising one or more components or instances.

[0039] Unless the context otherwise indicates or there is a contradiction, as used herein, reference to the term “subgroup” (e.g., “subgroup of the group of items”) should be interpreted as including a non-empty set of one or more components or instances from a group or of components or instances.

[0040] Furthermore, as used herein, the term "subgroup" refers to an appropriate subgroup, which is a collection of one or more components or instances that, when combined, is smaller in number than the group or multiple components or instances to which the subgroup is included. For example, a subgroup of ten items would include fewer than ten items and include at least one item.

[0041] Figure 3 An exploded view of a platinum resistance temperature sensor 300 according to one or more embodiments of the present disclosure is shown. The platinum resistance temperature sensor 300 includes a first substrate 302, a platinum member 304, and a second substrate 306. The first substrate 302 is formed of non-porous Al2O3, also known as aluminum oxide or alumina. The alumina forming the first substrate 302 may have a very high purity, for example, equal to or greater than 99.96%. That is, the first substrate 302 may be formed of 99.96% pure Al2O3. Figure 3 The first substrate 302 shown has a body portion 308 with an upper surface 310. Compared to other materials currently used in platinum resistance temperature sensor applications, such as fused silica, alumina has lower permeability and subsequent metal ion release. Therefore, alumina may be a more suitable material for forming substrate 302.

[0042] The first substrate 302 has a first platform 312 and a second platform 314, wherein the first platform 312 protrudes upward from the upper surface 310 near a first end of the body 308, and the second platform 314 protrudes upward from the upper surface 310 at a second end of the body 308. The first platform 312 and the second platform 314 are spaced apart from each other along the length direction of the platinum resistance temperature sensor 300 (i.e., along the X-axis shown). In the illustrated embodiment, the first platform 312 has a rectangular cross-sectional shape in a horizontal plane (e.g., in a plane parallel to the XY axes), wherein a first support surface 316 is formed on the upper portion of the first platform. The second platform 314 also has a rectangular cross-sectional shape in a horizontal plane, wherein a second support surface 318 is formed on the upper portion of the second platform. In other embodiments, the first platform 312 and the second platform 318 may have non-rectangular cross-sections. The first support surface 316 and the second support surface 318 may be coplanar with each other and located above the upper surface 310.

[0043] The first substrate 302 may also include a first pillar 320 extending upward from the first support surface 316. Figure 3 The first column 320 in the illustrated embodiment has a circular cross-sectional shape in a horizontal plane, but may have different cross-sectional shapes depending on the configuration of the platinum member 304.

[0044] Platinum component 304 is formed from high-purity platinum, for example, platinum with a purity equal to or greater than 99%. In some applications, platinum with a purity of 99.99% in platinum component 304 may be required to achieve high levels of accuracy and precision. Platinum component 304 can be formed by laser ablation of high-purity platinum foil, by deposition (e.g., sputtering onto a sacrificial portion of the first substrate 302), by ion milling, by focused ion beam milling, or by other suitable forming processes. Platinum component 304 has a base portion 322 having a length (i.e., along the x-axis) and a width (i.e., along the y-axis) sized to fit onto and supported by a first support surface 316. The base portion 322 of platinum component 304 is thinner (i.e., along the z-axis) relative to its length and width. Platinum component 304 has a first fork 324 and a second fork 326 extending parallel (in this embodiment) from the base portion 322 in the length direction (i.e., in a direction parallel to the X-axis shown). The first fork arm 324 and the second fork arm 326 are spaced apart from each other in the width direction. The first fork arm 324 has a length terminating at an end portion 328, and the second fork arm 326 has a length terminating at an end portion 330. (The following text is about...) Figure 4As described elsewhere herein, the first fork arm 324 and the second fork arm have corresponding lengths such that, when the base portion 322 contacts and is supported by the first support surface 320, the ends 328 and 330 can contact and be supported by the second support surface 318. The first fork arm 324 and the second fork arm 326 may be uniform in width and / or thickness along their respective lengths. In at least some embodiments, the first fork arm 324 and the second fork arm 326 may have equal widths (i.e., along the Y-axis). The base portion 322 also has a receiving portion 332 sized and shaped to receive the first post 320.

[0045] The second substrate 306 is configured to engage with the body portion 308 of the first substrate 302 and encapsulate or encapsulate the platinum member 304 therein. As implemented in the platinum resistance temperature sensor 300, the second substrate 306 has a sidewall 334 that extends downward from the upper portion 336 and forms a cavity 338 for receiving and encapsulating the platinum member 304 between the upper portion 336 and the body portion 308.

[0046] The second substrate 306 can be attached to the body portion 308 of the first substrate 304 via a gasket or seal 340 to encapsulate and seal the platinum component 304 within the cavity 338. The seal 340 is spaced apart from the platinum component 304, the first platform 312, and the second platform 314 to prevent contamination of the platinum component 304. The seal 340 can be glass, molten silica, or another material that does not undergo a phase change at high temperatures (e.g., above 1000°C).

[0047] Exposure to metal ions or O2 may damage the platinum component 304, which readily absorbs and becomes contaminated by metal ions. In the platinum resistance temperature sensor 300, the platinum component 304 is spaced apart from the seal 340 to reduce the likelihood of contamination by metal ions. The materials of the first substrate 302 and / or the second substrate 306 (e.g., Al2O3) are less permeable to metal ions than fused silica or glass, which can form the seal 340. Therefore, the first substrate 302 and the second substrate 306 can block or otherwise inhibit the transfer of metal ions, oxygen (O2), and other substances that may be potentially harmful to the temperature-dependent resistance of the platinum component 304. The first substrate 302 and / or the second substrate 306 may form a lip or raised barrier 342 to prevent the seal 340 from contacting or being exposed to metal ions or other harmful substances outside the platinum resistance temperature sensor 300, thereby reducing or preventing the absorption of such substances by the seal 340.

[0048] To assemble the platinum resistance temperature sensor 300, in which the platinum component 304 is housed, a seal 340 can be placed on the lower surface of the sidewall 334 of the second substrate 306 or inside the lip 342 of the first substrate 302. In some embodiments, the seal 340 can be placed in a liquid state. The lower edge of the sidewall 334 can then engage with the body 308 of the first substrate 302 and allow cooling, thereby causing the seal 340 to change from a liquid to a solid state and attaching the first substrate 302 and the second substrate 306 together. When the platinum resistance temperature sensor 300 is sealed at a high temperature, such as the maximum rated temperature of the platinum resistance temperature sensor 300, the internal pressure increases, reducing or eliminating the risk of sudden failure of the platinum resistance temperature sensor 300 due to excessive pressure.

[0049] Figure 4 An isometric view of a platinum resistance temperature sensor 300, according to one or more embodiments, is shown, with a platinum component 304 located on a first substrate 302. A base portion 322 of the platinum component 304 is disposed on and supported by a first support surface 316 of a first platform 312. A first post 320 is located within the sidewall of a receiving portion 332 of the platinum component 304. End portions 328 and 330 of a first fork arm 324 and a second fork arm 326 are respectively disposed on and supported by a second support surface 318 of a second platform 314. A middle portion 402 of the first fork arm 324 and a middle portion 404 of the second fork arm 326 are suspended above and spaced apart from an upper surface 310 of the first substrate 302. The base portion 322 of the platinum component 304 may include a first edge portion 406 extending from the first support surface 316 toward the second support surface 318 and suspended above the upper surface 310. The size of the first edge portion 406 can be set (e.g., width and / or thickness) to impart structural stiffness to the first fork arm 324 and the second fork arm 326, thereby preventing strain on the platinum member 304 that might otherwise be caused by an impact on the sensor 300.

[0050] The first substrate 302 and / or the second substrate 306 may be, for example, aluminum oxide or aluminum oxide deposited by sputtering an aluminum target in an oxygen environment, which may include an inert gas such as argon. Photolithography can be used to generate the features of the first substrate 302 and / or the second substrate 306 described herein. Very high-purity platinum foil can be applied to the first substrate 302, and photolithography and / or electrochemical polishing can be used to shape and size the platinum foil on the first substrate 302 as shown and described herein.

[0051] In some embodiments, a barrier layer (not shown) may be provided on the platinum member 304 and / or between the platinum member 304 and the first substrate 302 to help prevent diffusion into or from the platinum member 304. This barrier layer may have a coefficient of thermal expansion (CTE) similar to that of platinum, such that changes in temperature will not affect the stress and strain on the platinum member 304. The barrier layer may also impart additional structural strength and / or increase local conductivity to the platinum member, which may help reduce or eliminate strain on the platinum member 304. The barrier layer may be sputtered or otherwise deposited on the platinum member 304. The barrier layer does not necessarily coat the entire outer surface of the platinum member 304, but may be applied to certain areas of the platinum member 304 (e.g., on the bottom surface of the base portion 322) or to certain areas of the first substrate 302 or the second substrate 306, such as on the first support surface 316 or the second support surface 318. As an example, a layer of SiO2 or silicon dioxide may be deposited on the surface to form a spacer separating the platinum portion from the adjacent support structure.

[0052] In some embodiments, the platinum component 304 may be coated with a barrier layer using a material having a similar CTE. The barrier layer coating the platinum component 304 can provide additional properties such as increased stiffness and / or protection against contamination. The barrier layer may be applied after a set of wires has been attached to the platinum component 304.

[0053] Figure 5A A side view of the assembled platinum resistance temperature sensor 500 corresponding to the platinum resistance temperature sensor 300 is shown. Figure 5B A top plan view of an assembled platinum resistance temperature sensor 500 according to one or more embodiments is shown. The platinum resistance temperature sensor 500 includes a first substrate 302 attached to a second substrate 306, in which a platinum member 304 is encapsulated. As described elsewhere herein, the first substrate 302 and the second substrate 306 are attached to each other via a seal 340.

[0054] A set of wires 502 is electrically and physically connected to the platinum element 304 in the platinum resistance temperature assembly 500. The set of wires 502 extends from the interior of the platinum resistance temperature assembly 500, passes through the seal 340, and extends outward to the exterior of the platinum resistance temperature assembly 500. The set of wires 502 can be connected to circuitry and / or measuring devices to measure the resistance of the platinum element 304 at a given temperature; for example, the set of wires 502 can serve as a sensing arm connection for a Wheatstone bridge. In some embodiments, the set of wires 502 may include four wires for performing four-terminal sensing measurements, also known as a Kelvin connection. However, in some embodiments, exactly two wires may be present in the set of wires 502. The number of wires in the set of wires 502 may depend on the number of platinum elements included in the platinum resistance temperature sensor 500; for example, for a total of eight wires in the set of wires 502, each platinum element in the platinum resistance temperature sensor 500 may have four wires.

[0055] In the accompanying drawings, the connection of the set of wires 502 is shown for illustrative purposes and is not intended to be limiting. In some drawings, the set of wires 502 has been omitted for clarity.

[0056] In some embodiments, the outer surface of the platinum resistance temperature sensor 500 may be coated with a housing or barrier layer 504 to capture contaminants that might otherwise migrate into the platinum resistance temperature sensor 500 and contaminate the platinum component 300. The barrier layer 504 may be platinum or another material that absorbs and / or retains contaminants that may migrate through the first substrate 302, the second substrate 306, or the seam between them. The platinum resistance temperature sensor 500 may be coated with the barrier layer 504 after the first substrate 302 and the second substrate 306 are assembled, with the platinum component 304 located therein.

[0057] Figure 6 The following is shown according to one or more embodiments. Figure 5AThe image shows a top plan view of a cross-section of the platinum resistance temperature sensor 500 taken from line AA. A platinum component 304 is located on a first substrate 304, with a base portion 322 on a first support surface 316 and end portions 328 and 330 on a second support surface 318. Intermediate portions 402 and 404 of a first fork arm 324 and a second fork arm 326, respectively, span between a first platform 312 and a second platform 314. A first subgroup 502A of the set of conductors 502 is attached to the end portion 328 of the first fork arm 324, and a second subgroup 502B of the set of conductors 502 is attached to the end portion 330 of the second fork arm 326. The first subgroup 502A may include a single conductor or a pair of conductors, and the second subgroup 502B may also include a single conductor or a pair of conductors. Platinum pads can be used to connect or attach the first subgroup 502A to the end portion 328 and the second subgroup 502B to the end portion 330. The first subgroup 502A can be connected to a point on the end portion 328 of the first fork arm 324 via platinum pads. The second subgroup 502B can be connected to a point on the end portion 330 of the second fork arm 326 via platinum pads.

[0058] The first post 320 is received within a receiving portion 332, which has a shape corresponding to the first post 320, but with a cross-sectional size in a horizontal plane larger than that of the first post 320. For example, in Figure 6 In the cross-sectional view, the first column 320 has a circular shape with a first cross-sectional area. Figure 6 In a cross-sectional view, the receiving portion 332 has a circular shape with a second cross-sectional area larger than the first cross-sectional area. When the first post 320 and the receiving portion 332 are coaxially aligned, the side of the first post 320 is spaced apart from the sidewall of the receiving portion 332 by a certain distance. The distance d1 between the first post 320 and the receiving portion 332 can be, for example, 15 µm or greater. The distance d1 between the first post 320 and the receiving portion 332 allows for relative thermal expansion between the platinum member 304 and the first substrate 302 due to the difference in CTE between their respective materials. This also allows the platinum member 304 to move relative to the first substrate 304. In some cases, the force exerted against the sidewall of the receiving portion 332 as a result of the thermal expansion / contraction of the first post 320 can lead to strain-induced errors sufficient to invalidate the calibration. As a result of providing a gap between the first post 320 and the sidewall of the receiving portion 332, the platinum member 304 can thermally expand or contract within a certain temperature range (e.g., about 1000°C) without being subjected to strain that could adversely affect the performance of the platinum resistance temperature sensor 500.

[0059] In this embodiment, the platinum component 304 has exactly two forks, namely the first fork 324 and the second fork 326, but in some embodiments it may have more than two forks. For example, the platinum component 304 may have three forks, two or more pairs of forks, or even dozens of forks. Each of the forks may have a corresponding subgroup of the set of leads 502 for external measurement.

[0060] Figure 7 The following is shown according to one or more embodiments. Figure 5B A side view of a cross-section of the platinum resistance temperature sensor 500 taken from line BB. The vertical axis of the first column 320 is coaxially aligned with the vertical axis of the receiving portion 332. The sidewall 704 of the receiving portion 322 extends vertically through the entire base portion 322 to form a cylindrical cavity, wherein orifices are provided on the upper and lower surfaces of the base portion 322. As shown above relative to... Figure 6 The vertically extending side 702 of the first post 320 is laterally spaced from the sidewall 704 by a distance d1, which can be 15µm or greater, to allow relative movement and / or thermal expansion between the platinum member 304 and the first substrate 302. In some embodiments, the receiving portion 332 may have a single orifice opening only on the lower side of the base portion 322 and form a closed cavity terminating within the base portion 322 (i.e., without an upper orifice). In such embodiments, the height of the first post 320 (i.e., along the z-axis) is less than the thickness of the base portion 322. It should be noted that... Figure 7 Features shown elsewhere are not necessarily drawn to scale. For example, smaller dimensions may appear relatively large to facilitate the description of a feature.

[0061] The base portion 320 may be secured between the first support surface 316 and the lower surface 706 of the upper portion 336 of the second substrate 306. The distance between the lower surface 706 and the base portion 320, if present, should be small enough that the base portion 320 cannot be removed from or separated from the first platform 312 without removing the second substrate 306 from the platinum resistance temperature sensor 300. In some embodiments, the end portions 328 and 330 of the first fork 324 and the second fork 326 may be secured between the second support surface 318 of the second platform 314 and the lower surface 706 of the second substrate 306 to prevent or limit vertical movement of the end portions 328 and 330. For example, the distance between the lower surface 706 and the upper surface of the end portions 328 and 330 may be less than the thickness of the end portions 328 and 330. In some embodiments, the lower surface 706 may be uneven and may be higher than the intermediate portions 402 and 404 in the central portion, as described elsewhere herein.

[0062] The middle portion 402 of the first fork arm 324 and the middle portion 404 of the second fork arm 326 are suspended on or separated from the upper surface 310 of the first substrate 302 by a distance d2. Figure 7 The distance d2 shown is equal to the height of the first platform 312 and the second platform 314 (i.e., along the z-axis). Suspending the first fork arm 324 and the second fork arm 326 above the upper surface 310 allows the platinum member 304 to flex and reduces or prevents strain induction on the platinum member 304. Such induced strain can introduce errors into the resistance measurements of the platinum member 304. In at least some embodiments, as described elsewhere herein, the intermediate portions 402 and 404 of the first fork arm 324 and the second fork arm 326 may be spaced apart from the lower surface 706 of the second substrate 306.

[0063] Figure 8 The following is shown according to one or more embodiments. Figure 5B Another side view of the cross-section of the platinum resistance temperature sensor 800, taken from line BB. As shown above relative to... Figure 6 and Figure 7 The platinum resistance temperature sensor 800 includes a platinum member 304 disposed between a first substrate 304 and a second substrate 306. Figure 7 As shown in the configuration, the intermediate portions 402 and 404 of the platinum member 304 are suspended above the upper surface 310 of the first substrate 302 by a distance d2. This allows the platinum member 304 to deflect or shift by an amount a1 from a straight state due to gravity, vibration, impact, etc. The distance d2 can be chosen such that the deflection a1 is insufficient to induce strain error in the platinum member 304. That is, the contact between the intermediate portions 402 and 404 and the upper surface 310 due to the deflection a1 prevents or reduces strain-induced error in the platinum member 304. In contrast, without the upper surface 310 restricting the deflection, the platinum member 304 may be allowed to deflect by an amount a2 greater than the deflection a1, which would be sufficient to induce strain error in the platinum member 304.

[0064] In the platinum resistance temperature sensor 800, the second substrate 306 has an intermediate lower surface 802 spaced apart by a distance d3, which is greater than the distance between the lower surface 706a of the second substrate 306 and the upper surface of the base portion 322, or the distance between the lower surface 706b of the second substrate 306 and the upper surfaces of the end portions 328 and 330. In some embodiments, the distance d3 may be equal to the distance d2. The distance d3 allows the intermediate portions 402 and 404 to deflect towards the second substrate 306 by an amount a3, which is insufficient to introduce strain error into the platinum member 304.

[0065] Figure 9 The following is shown according to one or more embodiments. Figure 5BAn additional side view of the cross-section of the platinum resistance temperature sensor 900, taken from line BB. (As shown relative to...) Figure 7 , Figure 8 As described elsewhere herein, the platinum resistance temperature sensor 900 includes a platinum member 304 having a base portion 322 disposed between a first support surface 316 and a first surface 902 of a second substrate 306. (As relative to...) Figure 7 , Figure 8 As described elsewhere in this document, the end portions 328 and 330 of the platinum component 304 in the platinum resistance temperature sensor 900 are disposed between the second support surface 318 and the second surface 904 of the second substrate 306.

[0066] The first substrate 302 may include a set of supports 906 projecting upward from the upper surface 310. These supports 906 support the intermediate portions 402 and 404 from below to prevent or limit the amount of downward deflection of the platinum member 304 in the direction toward the upper surface 310. The set of supports 906 may include one or more taller supports 906a with a height (i.e., along the z-axis) equal to that of the first support surface 316 and the second support surface 318 to prevent the platinum member 304 from deflecting at the supports(one or more) 906a. The set of supports 906 may also include relatively shorter supports 906b with a height less than that of the first support surface 316 and the second support surface 318 to limit downward deflection of the platinum member 304. In some embodiments, the one or more taller supports 906a may be positioned closer to the base portion 322 and / or the end portions 328 and 330 than the one or more shorter supports 906b. Each of the support members 906 may have a width (i.e., along the y-axis) sufficient to support one or both of the first fork arm 324 or the second fork arm 326. The support members 906 may be spaced apart from the first platform 312 and the second platform 314 along the X-axis.

[0067] The second substrate 306 may include a set of spacers 908 projecting downward from the lower surface 910 of the second substrate 306, the set of spacers being spaced apart from the platinum member 304. This set of second support members 908 spacees the intermediate portions 402 and 404 from the lower surface 910 to prevent or limit the amount of upward deflection of the platinum member 304 in the direction toward the lower surface 910. The set of spacers 908 may include one or more taller spacers 908a with a height equal to that of the first surface 902 and / or the second surface 904 to prevent deflection of the platinum member 304 at the spacers 908a. The set of spacers 908 may also include relatively shorter spacers 908b with a height less than that of the first surface 902 and the second surface 904 to limit upward deflection of the platinum member 304. In some embodiments, the taller spacers 908a may be positioned closer to the base portion 322 and / or the end portions 328 and 330 than the shorter spacers 908b. Each of the spacers in the set of spacers 908 may have a width (i.e., along the y-axis) sufficient to contact one or both of the first fork 324 or the second fork 326. The set of spacers 908 may be spaced apart from the first surface 902 and the second surface 904 along the X-axis.

[0068] The set of supports 906 and / or the set of spacers 908 can help limit the bending of intermediate portions 402 and 404 in the height direction (along the z-axis) of the platinum resistance temperature sensor 900. In some embodiments, the platinum resistance temperature sensor 900 may include a set of supports and / or a set of spacers projecting from the inner surface (along the y-axis) of the first or second substrate to limit the bending of intermediate portions 402 and / or 404 in the width direction of the platinum resistance temperature sensor 900. In some embodiments, the supports or spacers may extend between intermediate portions 402 and 404 to limit the bending of intermediate portions 402 and 404 along the y-axis. In some embodiments, the size, shape, and position of some of the set of supports 906 and / or the set of spacers 908 may be configured to extend between adjacent forks to limit the deflection of the forks along the Y-axis.

[0069] According to one or more embodiments, the platinum member 304 may be located within a sealed cavity 912 of the platinum resistance temperature sensor 900. A first substrate 302 may have a peripheral portion 914 whose size and shape are configured to abut a corresponding peripheral portion 916 of a second substrate 306 to facilitate sealing the cavity 912. One or both of peripheral portions 914 and 916 may include a recess 918 in which a seal 920 formed of glass, fused silica, etc., is provided to seal the cavity 912. The seal 918 corresponds to and may be formed according to the method described herein with respect to seal 340. One of the peripheral portions 914 and 916 may form a lip relative to an external portion of the platinum resistance temperature sensor 900 to prevent or reduce the possibility of contamination or damage to the seal 918. Peripheral portions 914 and 916 may extend around the periphery of the cavity 912 (e.g., along a plane coplanar with the x and y axes) to seal the cavity 912 and the platinum member 304 therein. The cavity 912 can be vacuum sealed or pressurized using inert gas.

[0070] A set of wires 920 may be connected at the end opposite to the base portion 322 to the end portions 328 and 330 of the platinum member 304. A channel 922 may be provided through the peripheral portion of the platinum resistance temperature sensor 900 to allow the set of wires 920 to reach the exterior 924 of the platinum resistance temperature sensor 900. The size and shape of the channel 922 may be configured to allow the set of wires 920 to extend from the cavity 912 to the exterior 924 without compressing or damaging the wires 922. Although not shown, a recess 918 and a seal 920 may surround the entire periphery of the cavity 912 and extend along the channel 924 to seal the cavity 912. As described herein, a seal 928 may be provided at or near the exit of the channel 924 at the exterior 916 to further seal the cavity 912. In some embodiments, a lip or other barrier may be provided above or at least partially around the seal 928 to prevent contamination of the seal 928. The platinum resistance temperature sensor 900 may include features similar to those of the previously described and illustrated embodiments, the description of which has been omitted for the sake of brevity.

[0071] Figure 10 The following is shown according to one or more embodiments. Figure 5AThe image shows a top plan view of a cross-section of a platinum resistance temperature sensor 1000 taken by line AA. The platinum resistance temperature sensor 1000 includes a first platinum member 1002 in the width direction (i.e., along the y-axis) and a second platinum member 1004 arranged adjacent to the first platinum member 1002. The first platinum member 1002 and the second platinum member 1004 may be identical to or substantially similar to the platinum member 304 described above. The first platinum member 1002 has a first pair of forked arms 1006 extending parallel in the length direction (i.e., along the x-axis) transverse to the width direction, and the second platinum member 1004 has a second pair of forked arms 1008 extending parallel in the length direction.

[0072] The first platinum component 1002 has a first substrate 1010 having a first platform 1012 and a second platform 1014 spaced apart from each other in the longitudinal direction and extending upward from an upper surface 1016 of the first substrate 1010. A base portion 1018 of the first platinum component 1002 and a base portion 1020 of the second platinum component 1004 are located on a support surface 1022 of the first platform 1012. The base portions 1018 and 1020 may be adjacent to each other in the width direction of the platinum resistance temperature sensor 1000. The base portions 1018 and 1020 may be spaced apart from each other in the width direction. In some embodiments, the first platform 1012 may include a spacer 1026 extending upward from the upper surface of the first platform 1012 between the base portions 1018 and 1020 to prevent contact between the base portions 1018 and 1020 that could affect resistance measurement. The end portions 1028a and 1028b of the first pair of forks 1006 and the end portions 1030a and 1030b of the second pair of forks 1008 are located on and supported by the support surface of the second platform 1014.

[0073] In some embodiments, the first platinum member 1002 and the second platinum member 1004 may be a single integral platinum member connected by a length of platinum. For example, the end portion 1028b of the first platinum member 1002 may be connected to the end portion 1030a of the second platinum member 1004 by a length of platinum extending between the end portions 1028b and 1030a.

[0074] In some embodiments, the platinum resistance temperature sensor 1000 may include a set of supports and / or a set of spacers, the size, shape, and position of which are configured to extend between adjacent forks to limit fork deflection in the width direction. For example, an intermediate support 1032 may be provided having a support surface supporting a middle portion of a first pair of forks 1006 and a second pair of forks 1008 between a first platform 1012 and a second platform 1014. The support surface of the intermediate support 1032 may limit downward deflection of the forks. In some embodiments, the height of the intermediate support 1032 may be less than the height of the first platform 1012 and / or the second platform 1014.

[0075] In some embodiments, the intermediate support 1032 may include a portion extending between the forks of the first pair of forks 1006 and the second pair of forks 1008 to limit lateral deflection of the forks (e.g., in a direction parallel to the Y-axis). A first portion 1034 of the intermediate support may extend upward from a support surface of the intermediate support 1032 between the first pair of forks 1006, a second portion 1036 of the intermediate support may extend upward between adjacent forks of the first pair of forks 1006 and the second pair of forks 1008, and a third portion 1038 of the intermediate support may extend upward between the second pair of forks 1008. The first portion 1034, the second portion 1036, and the third portion 1038 of the intermediate support 1032 facilitate the limitation of lateral deflection of the forks.

[0076] In some embodiments, more than two platinum components may be present. Having two or more platinum components provides redundancy in the event of failure of one platinum component, or provides a way to verify measurement results. In some embodiments, the platinum components may be different from each other. For example, the first platinum component 1002 may have forks spaced apart from each other at different distances compared to the fork arms of the second platinum component 1004.

[0077] In some implementations, the shape of various parts of the platinum resistance temperature sensor can be changed. Figure 11 A top plan view of a cross-section of a platinum resistance temperature sensor 1100 according to one or more embodiments is shown. The platinum resistance temperature sensor 1100 is substantially similar to... Figure 6 And the platinum resistance temperature sensor 300 described elsewhere herein, but with some exceptions. The platinum resistance temperature sensor 1100 has a platinum member 1102 having a base portion 1104 from which a pair of forks 1106 extend. The base portion 1104 has a rectangular receiving portion 1108 for receiving a corresponding rectangular post 1110 extending upward from a first platform 1112 of a first substrate 1114 of the platinum resistance temperature sensor 1100.

[0078] The size and shape of the rectangular post 1110 are set such that when the rectangular post 1110 is engaged within the rectangular receiving portion 1108, it is spaced apart from the rectangular receiving portion 1108. For example, relative to... Figure 6 As described elsewhere herein, the engagement of the rectangular post 1110 with the rectangular receiving portion 1008 restricts potential movement and / or thermal expansion of the platinum member 1104 relative to the first substrate 1114. Additionally, as shown, the corresponding rectangular shapes of the receiving portion 1108 and the post 1110 restrict rotation of the platinum member 1104 relative to the first substrate 1114, such that the end portions 1116 of the pair of forks 1106 remain supported by the support surface 1118 of the second platform 1120. In some embodiments, the corresponding shapes of the post and the receiving portion may be different; for example, in some embodiments, the corresponding shapes may be hexagonal or triangular.

[0079] In some implementations, the base portion of the platinum component may not include a receiving portion. Figure 12 A top plan view of a cross-section of a platinum resistance temperature sensor 1200 according to one or more embodiments is shown. The platinum resistance temperature sensor 1200 includes a base portion 1202 of a platinum member 1204, the movement of which is limited by a plurality of posts projecting upward from a first support surface 1206. As described elsewhere herein, the first support surface 1206 is disposed on a first platform 1208 extending upward from the upper surface of a first substrate 1210.

[0080] The base portion 1202 includes a first segment 1212 and a second segment 1214 extending laterally (i.e., along the y-axis) from the central segment 1216 of the platinum member 1204. A first corner or bend 1220 is formed in the platinum member 1204 at the intersection of the first segment 1212 and the central segment 1216, and a second corner or bend 1224 is formed in the platinum member 1204 at the intersection of the second segment 1214 and the central segment 1216.

[0081] The first post 1218 extends upward from a first support surface 1206 adjacent to the first corner 1220 or in the first support surface 1206 of the first corner 1220, and the second post 1222 extends upward from a first support surface 1206 adjacent to the second corner 1224 or in the second corner 1224. The third post 1228 extends upward from the first support surface 1206 of the rear side 1230 of the platinum member 1204. In a static state or in a non-thermally contracted or stretched state, the base portion 1202 may be spaced apart from each of the plurality of posts. For example, the first post 1218 may be spaced apart from the first segment 1212 in the length direction (i.e., along the x-axis), the second post 1222 may be spaced apart from the second segment 1214 in the length direction, and the third post 1228 may be spaced apart from the rear side 1230 in the length direction. Furthermore, the first post 1218 may be spaced apart from the central section 1216 in the width direction (i.e., along the y-axis), and the second post 1222 may be spaced apart from the central section 1216 in the width direction on the opposite side of the central section 1216 and the first post 1218. The distance between the base portion 1202 and each of the plurality of posts may be, for example, 15µm or greater.

[0082] The relative positions of the multiple pillars with respect to the base portion 1202 allow but also restrict longitudinal movement or thermal expansion (i.e., along the x-axis) of the platinum member 1204 relative to the first substrate 1210. The relative positions of the first pillar 1218 and the second pillar 1222 with respect to the base portion 1202 allow but also restrict lateral movement or thermal expansion (i.e., along the y-axis) of the platinum member 1204 relative to the first substrate 1210. This provides the benefit of allowing the platinum member 1204 to thermally expand or contract within a certain temperature range (e.g., approximately 1000°C) without inducing strain that could adversely affect the performance of the platinum resistance temperature sensor 1200. As a result of omitting the receiving portion from the base portion 1202, the arrangement of the platinum resistance temperature sensor 1200 also improves the efficiency and / or cost associated with the production of the platinum member 1204.

[0083] In some embodiments, as described herein, the rear side 1230 of the base portion 1202 may include a notch into which the third post 1228 is fitted and spaced apart from the base portion 1202. In some embodiments, the first corner portion 1220 and the second corner portion 1224 have rounded edges, and the first post 1218 and the second post 1222 each have a circular cross-sectional shape corresponding to the rounded edges of the corner portions. A pair of forks 1226 extend from the central section 1216 and extend above the upper surface of the first substrate 1210. In the embodiment of the illustrated platinum resistance temperature sensor 1200, the central section 1216 extends outward in the longitudinal direction above the upper surface 1232 of the first substrate 1210 to form the first corner portion 1220 and the second corner portion 1224. In some embodiments, the central section 1216 may not extend outward, and the pair of forks 1226 may form the first corner portion 1220 and the second corner portion 1224.

[0084] In some implementations, platinum components can form the mesh of the base portion and the fork arms. Figure 13 The following is shown according to one or more embodiments. Figure 5A The image shows a top plan view of a cross-section of a platinum resistance temperature sensor 1300 taken by line AA. The platinum resistance temperature sensor 1300 includes a first substrate 1302 and a platinum member 1304, the platinum member including a plurality of base portions and a fork arm network connecting the base portions. The platinum member 1304 includes a first base portion 1306 located on a first support surface 1308 of a first platform 1310 of the first substrate 1302. As described herein, a first fork arm 1312 and a second fork arm 1314 extend outwardly from the first base portion 1306 and have corresponding intermediate portions suspended above an upper surface 1316 of the first substrate 1304.

[0085] The end portion 1318 of the first fork arm 1312 contacts and is supported by the second support surface 1320 on the top of the second platform 1322, which extends upward from the upper surface 1316. The second base portion 1324 of the platinum member 1304 is located on and supported by the second support surface 1320. The second base portion 1324 is positioned adjacent to the end portion 1318 in the width direction of the second platform 1322. The second fork arm 1314 extends between the first base portion 1306 and the second base portion 1324, connecting the first base portion 1306 to the second base portion 1324. The middle portion of the second fork arm 1314 is suspended above the upper surface 1316.

[0086] The platinum component 1304 includes a third base component 1326, which is located on and supported by a first support surface 1308. The third base portion 1326 is positioned adjacent to the first base portion 1306 in the width direction of the platinum resistance temperature sensor 1300. A third fork arm 1328 extends between the second base portion 1324 and the third base portion 1326, connecting the second base portion 1324 to the third base portion 1326. A middle portion of the third fork arm 1328 is suspended above the upper surface 1316.

[0087] The fourth fork arm 1330 extends outward from the third base portion 1326 and has a middle portion suspended above the upper surface 1310. The end portion 1332 of the fourth fork arm 1330 contacts and is supported by the second support surface 1320 of the second platform 1322.

[0088] The base portion and fork of the platinum member 1304 are formed in a network of segments extending back and forth on the first substrate 1302. The movement and / or thermal expansion / contraction of the platinum member 1304 relative to the first substrate 1302 can be limited by a plurality of pillars extending upward from the first platform 1310 and / or the second platform 1322. As described above relative to... Figure 12 The first post 1334 extends upward from the first support surface 1308 at a position adjacent to the first corner or bend 1336 of the first base portion 1306. The second post 1338 extends upward from the first support surface 1308 at a position adjacent to the second corner or bend 1340 of the first base portion 1306 opposite to the first corner. (As described above...) Figure 12 The first column 1334 is spaced apart from the first corner portion 1336, and the second column 1338 is spaced apart from the second corner portion 1340. The first corner portion 1336 and the second corner portion 1340 are located on the side of the first base portion 1306 facing the second base portion 1324.

[0089] The third column 1342 extends upward from the second support surface 1320 at a position adjacent to the third corner or bend 1344 of the second base portion 1324. The fourth column 1346 extends upward from the second support surface 1320 at a position adjacent to the fourth corner or bend 1348 of the second base portion 1324 opposite to the third corner 1344. As described above... Figure 12 The third column 1342 is spaced apart from the third corner portion 1344, and the fourth column 1346 is spaced apart from the fourth corner portion 1348. The third corner portion 1344 and the fourth corner portion 1348 are located on the side of the second base portion 1324 facing the first base portion 1306.

[0090] The first post 1336 and the second post 1338 help limit the lateral displacement (e.g., movement, thermal expansion / contraction) of the platinum member 1304 (i.e., in a direction parallel to the y-axis). The third post 1342 and the fourth post 1346 help limit the lateral displacement of the platinum member 1304. The surfaces of the corner portions 1336 and 1340 of the first base portion 1306 are opposite to the surfaces of the corner portions 1344 and 1348 of the second base portion 1324, which helps limit the longitudinal displacement (e.g., movement, thermal expansion / contraction) of the platinum member 1304. That is, the first post 1336 and the second post 1338 limit the displacement of the platinum member 1304 in a first longitudinal direction, and the third post 1342 and the fourth post 1346 limit the displacement in a second longitudinal direction opposite to the first longitudinal direction. Therefore, it may not be necessary to provide a column on the first platform 1310 at a position adjacent to the rear side 1350 of the first base portion 1306, or on the second platform 1322 at a position adjacent to the rear side 1352 of the second base portion 1324. The first platform 1310 may also include a set of columns adjacent to the corner of the third base portion 1326, similar to the first base portion 1306.

[0091] In the illustrated platinum resistance temperature sensor 1300, the first fork arm 1312, the second fork arm 1314, the third fork arm 1328, and the fourth fork arm 1330 extend parallel to each other in the longitudinal direction. However, in some embodiments, one or more of the first fork arm 1312, the second fork arm 1314, the third fork arm 1328, and the fourth fork arm 1330 may not all extend parallel to each other. For example, the first fork arm 1312 may extend at an angle relative to the x-axis, and / or the second fork arm 1314 may extend at an angle relative to the x-axis.

[0092] The illustrated platinum component 1304 includes three base portions connected by forks; however, the platinum component 1304 may include more than three base components connected by forks. In the platinum resistance temperature sensor 1300, two of the forks have a single end portion not connected to the base portions, namely, end portion 1318 of the first fork 1312 and end portion 1332 of the fourth fork 1330. As described herein, a first set of wires may be connected to end portion 1318, and a second set of wires may be connected to end portion 1332, to obtain resistance measurements of the platinum component 1304 using a device external to the platinum resistance temperature sensor 1300. In some embodiments, the platinum resistance temperature sensor 1300 may have two base portions and does not include a third base portion 1326 or a fourth fork 1330. In such embodiments, an end portion of the third fork 1328 may be provided for connecting a set of wires.

[0093] In some implementation schemes, such as relative to Figure 4 and Figure 6As described elsewhere herein, the platinum resistance temperature sensor 1300 may alternatively have one or more receiving portions that limit the displacement of the platinum member 1304. For example, the first base portion 1306 may include a receiving portion for receiving a corresponding post projecting upward from the first support surface 1308. The second base portion 1324 and / or the third base portion 1326 may also include a receiving portion for receiving a corresponding post projecting upward from the second support surface 1320 or the first support surface 1308.

[0094] Similar to Figure 9 and Figure 10 The implementation scheme shown, Figure 13 The platinum resistance temperature sensor 1300 may include a set of supports and / or a set of spacers to limit the deflection of the first fork 1312, the second fork 1314, the third fork 1328, and / or the fourth fork 1330 in one or more directions. In some embodiments, such supports or spacers may have surfaces that facilitate limiting vertical deflection of the fork arms. In some embodiments, such supports or spacers may have portions extending between or on the lateral sides of the fork arms to facilitate limiting lateral deflection of the fork arms. However, for simplicity, Figure 13 Such support components and / or spacers are omitted.

[0095] Figure 14 The following is shown according to one or more embodiments. Figure 5A The image shows a top plan view of a cross-section of a platinum resistance temperature sensor 1400 taken from line AA. The platinum resistance temperature sensor 1400 includes a first substrate 1402 and a platinum member 1404. The platinum member has a first base portion 1406 and a second base portion 1410, wherein the first base portion 1406 is supported by a first support surface 1408 of the first substrate 1402, and the second base portion 1410 is supported by a second support surface 1412 of the first substrate 1402. The first support surface 1408 is defined by an upper portion of a first platform 1414 projecting upward from an upper surface 1416 of the first substrate 1402, and the second support surface 1412 is defined by an upper portion of a second platform 1418 projecting upward from the upper surface 1416 and spaced apart from the first platform 1414 in the length direction. The first platform 1414 and the second platform 1418 may have the same height as each other.

[0096] The platinum member 1404 has a bridging portion 1418 that extends between and connects the first base portion 1406 and the second base portion 1410. The bridging portion 1420 of the platinum member 1404 is suspended above the upper surface 1416 at a distance equal to the height of the first platform 1414 and the second platform 1418. The bridging portion 1420, in the width direction (i.e., along the y-axis) of the platinum resistance temperature sensor 1400, is comparable to the fork arm of the platinum resistance temperature sensor 300 relative to the base portion 406 (see example...). Figure 4 Wider. In some embodiments, the width of the bridging portion 1420 may be equal to or greater than the width of the first base portion 1406 or the second base portion 1410. A wider bridging portion 1420 can provide greater structural integrity (e.g., resilience, resistance to deformation or flexure) than the fork arm described herein.

[0097] The first base portion 1406 shown has a first recess 1422 for receiving a first post 1424 protruding upward from a first support surface 1408. The second base portion 1410 has a second recess 1426 for receiving a second post 1428 protruding upward from a second support surface 1412. The first recess 1422 is a notch or recess in a first end portion 1430 of the platinum member 1404, and the second recess 1422 is a notch or recess in a second end portion 1432 of the platinum member 1404 opposite to the first end portion 1430. The shapes of the first recess 1422 and the second recess 1426 correspond to the cross-sectional shapes of the first post 1424 and the second post 1428, respectively. The sizes of the first recess 1422 and the second recess 1426 are larger than the cross-sectional areas of the first post 1424 and the second post 1428, respectively, to allow the platinum member 1404 to shift relative to the first substrate 1402 (e.g., movement, thermal expansion / contraction). For example, when the first post 1424 is located at the center of the first recess 1422, the peripheral edge of the first post 1424 may be spaced 15µm or more from the sidewall of the first recess 1422. Figure 14 The first post 1424 and the second post 1428 shown have a circular cross-sectional shape, but in some embodiments they may have different cross-sectional shapes, such as triangular, rectangular, or polygonal shapes. In some embodiments, one or both notches may have a different shape than the corresponding post. The first notch 1422 may, for example, have a rectangular shape, and the first post 1424 may have a circular cross-sectional shape.

[0098] In some embodiments, the first base portion 1406 and / or the second base portion 1410 may have receiving portions (e.g., recesses, through-holes) instead of notches. The platinum member 1404 can be held to the first substrate 1402 via an opposing second substrate (see example...). Figure 9 ).

[0099] As described herein, wires can be connected to or attached to the first base portion 1406 and the second base portion 1410 to obtain resistance measurements of the platinum component 1404. For example, a first set of wires can be attached to the first base portion 1406 via platinum pads, and a second set of wires can be attached to the second base portion 1410 via platinum pads. (As opposed to...) Figure 9 As described elsewhere in this document, the first set of wires and the second set of wires can extend to the outside of the platinum resistance temperature sensor 1400 to electrically connect to the measuring device.

[0100] The arrangement of the platinum resistance temperature sensor 1400 may have characteristics similar to other platinum resistance temperature sensors described herein, therefore further description of these characteristics is omitted.

[0101] The dimensions of the platinum components described herein can be selected to provide appropriate mechanical support. Figure 15 An isometric view of the base portion 1502 of a platinum member 1504 supported by a platform 1506 of a first substrate 1508 is shown. As previously described, a first fork arm 1510 and a second fork arm 1512 extend outward from the base portion 1502. The width of the base portion 1502 can be selected to adjust the moment of inertia, thereby limiting stress at the support location of the platinum member 1504. For example, the width w1 of the base portion 1502 is greater than the width w2 of the first fork arm 1510. The width w1 of the base portion 1502 may be equal to or greater than the width w3 between the lateral sides of the first fork arm 1510 and the second fork arm 1512. A segment 1514 of the base portion 1502 may be suspended above the upper surface 1516 of the first substrate 1508. The width w4 of the segment 1514 can be selected to adjust the moment of inertia. In some embodiments, the segment 1514 may have a tapered shape that gradually narrows toward the pair of forks in the width direction.

[0102] Figure 16 Another isometric view is shown of the base portion 1602 of the platinum member 1604 supported by the platform 1606 of the first substrate 1608. The thickness t of the base portion 1602 can be adjusted to regulate the structural integrity of the platinum member 1604. The thickness t of the base portion 1602 is greater than the thickness of the fork arm 1610 extending from the base portion. In some embodiments, the thickness t of the base portion may be the same as the thickness of the fork arm 1610. In some embodiments, the thickness t of the base portion 1602 may gradually narrow along the length of the platinum member 1604.

[0103] In some embodiments, the platinum resistance temperature sensor described herein may not include pillars extending upward from the support surface of the first substrate. For example, a material having a CTE similar to platinum can be used to adhere the platinum component to the support surface of the first substrate. The adhesive may include or be mixed with a filler material having a CTE similar to platinum, such as silica.

[0104] Platinum has a CTE of approximately 9 ppm / ℃, which increases to over 10 ppm / ℃ at high temperatures. Materials considered to have similar CTEs will have a CTE distribution within ±0.5 ppm / ℃ of platinum's CTE distribution over a wider temperature range (e.g., -100℃ to 1000℃).

[0105] The various embodiments described above relate to platinum resistance temperature sensors having a rectangular geometry; however, the technology represented by this disclosure is not limited thereto. Platinum resistance temperature sensors may have other geometries. For example, a platinum resistance temperature sensor may include a platinum member suspended above a body located within a sleeve.

[0106] Figure 17 A partial exploded view of a platinum resistance temperature sensor 1700 according to one or more embodiments is shown. The platinum resistance temperature sensor 1700 includes a body 1702 having a first end 1708 and a second end 1710 extending along an axis 1706 to define the body 1702 (see [link to relevant documentation]). Figure 18 The circumferential surface 1704 is the body length between the first substrate 302 and the first substrate 302. As described above with respect to the first substrate 302, the body 1702 may be formed of alumina and may have very high purity. In this embodiment, the body 1702 has a cylindrical shape and a circular cross-section extending along the first axis 1706.

[0107] The platinum resistance temperature sensor 1700 also includes a plurality of support structures arranged along the body 1702 and projecting radially outward from the circumferential surface 1704 in a direction transverse to the axis 1706. In this embodiment, the support structure 1712 is an elongated member such as a column, rod, or fin, each elongated member having a length projecting outward from a different location on the circumferential surface 1704. The support structure 1712 may be formed of the same or similar material as the body 1702, for example, alumina.

[0108] Multiple support structures may be symmetrically arranged on the circumferential surface 1704. As an example, the multiple support structures may include support structures 1712 arranged in a ring configuration around an axis 1706. Each ring configuration is located at a different position along the length of the body 1702, and each ring configuration includes a subgroup of multiple support structures arranged around the axis 1706. The support structures 1712 of each ring configuration are circumferentially spaced apart from each other at equal distances around the axis 1706. Adjacent support structures 1712 along the length of the body 1702 may be aligned with each other in a direction parallel to the axis 1706. For example, a first support structure of a first ring configuration of the multiple support structures may be aligned with a second support structure 1712b of a second ring configuration adjacent to the first ring configuration in a direction parallel to the axis 1706. However, in some embodiments, the support structures 1712 of adjacent ring configurations may be radially offset from each other around the axis 1706.

[0109] The platinum resistance temperature sensor 1700 includes a platinum member 1714 extending along the length of a body 1702 and suspended above a circumferential surface 1704 by a set of a plurality of support structures. This set of support structures suspending the platinum member 1714 may be a suitable subgroup of the plurality of support structures. The platinum member 1714 is a thin, elongated member formed of platinum with a high purity, for example, equal to or greater than 99% platinum purity. In some embodiments, the platinum member 1714 may be a platinum wire of a given length. In some embodiments, the platinum member 1714 may be a platinum foil of a given length having a width and a thickness relatively thin compared to its width. As described elsewhere herein, the platinum member 1714 may be flexible to allow it to bend around a support structure or flex in the radial direction of the body 1702.

[0110] Platinum member 1704 can be wound back and forth along the length of body 1702 and is supported by the set of multiple support structures. In this embodiment, platinum member 1714 may have a first end 1716 located at or near a first end 1708 of body 1702. Platinum member 1704 extends in a first direction from the first end 1708 of body 1702 toward a second end 1710 opposite to the first end 1708. A first length 1714a of platinum member 1714 is supported by a first set of support structures 1718 of a plurality of support structures arranged along the length of body 1702 and is suspended above circumferential surface 1704. A second length 1714b of platinum member 1714 extends laterally from the end of the first set of support structures 1718 to a second set of support structures 1720, which is laterally offset from the first set of support structures 1718 about axis 1706 along circumferential surface 1704.

[0111] The platinum member 1714 may then be wound back toward the first end 1708. A third length 1714c of the platinum member 1714 extends back toward the first end 1708 of the body 1702 in a second direction different from the first direction. The third length 1714c is supported by a second set of support structures 1720 arranged along the length of the body 1702 and suspended above the circumferential surface 1704. The platinum member 1714 may include an additional length that is wound back and forth continuously along the length of the body 1702 in this manner. The platinum member 1714 terminates at a second end 1722, which is located at or near the first end 1708 of the body 1702.

[0112] The platinum resistance temperature sensor 1700 may further include a first terminal 1724 attached to a first end 1716 of the platinum member 1714, and may include a second terminal 1726 attached to a second end 1722 of the platinum member 1714. The first terminal 1724 and the second terminal 1726 may be electrically and physically connected to the first end 1716 and the second end 1722, respectively. The first terminal 1724 and the second terminal 1726 may be conductive elements, providing the conductive elements for measuring the resistance of the platinum member 1714. Figure 17 The first terminal 1724 and the second terminal 1726 shown are each conductors that may have one or more forms. For example, the first terminal 1724 and the second terminal 1726 may each include a pair of wires connected to ends 1716 and 1722. However, in some embodiments, the first terminal 1724 and the second terminal 1726 may each include one or more rigid conductive members, such as plates, forks, or pins, with a rigidity higher than that of the platinum member 1704. The first terminal 1724 and the second terminal 1726 may have similar characteristics to those described above relative to... Figure 5A The characteristics of a set of conductors 502 as described elsewhere in this document.

[0113] Figure 18 A cross-sectional side view of a platinum resistance temperature sensor 1700 according to one or more embodiments is shown. The platinum resistance temperature sensor 1700 may also include a sleeve 1728 having a cavity 1730 sized and shaped to receive a body 1702 within the cavity 1730. The cavity 1730 is defined by a sidewall 1732 extending between an open first end 1734 and a closed second end 1736 of the sleeve 1728. The sidewall 1732 generally extends from the closed second end 1736 in a direction parallel to axis 1706. The length of the sidewall 1732 is longer than the length of the body 1702 to enclose the circumferential surface 1704 of the body 1702. Therefore, the body 1702 can be fully inserted into the cavity 1730.

[0114] The cavity 1730 has a shape that generally corresponds to the cross-sectional shape of the body 1702, but in other embodiments, the shape of the cavity may be different. In this embodiment, the cavity 1730 has a circular cross-sectional shape that corresponds to the cylindrical shape of the body 1702. The sidewalls 1732 are spaced apart from each other such that, when the body 1702 is located within the cavity 1730, the ends 1738 of the plurality of support structures are adjacent to or immediately adjacent to the opposing sidewalls 1732.

[0115] Multiple support structures support and suspend the body 1702 within the cavity, such that the circumferential surface 1704 is spaced apart from and laterally fixed between the sidewalls 1732. The body 1702 may also be longitudinally fixed within the cavity 1730, preventing movement of the body 1702 relative to the sleeve 1728. For example, the second end 1710 of the body 1702 may contact the closed second end 1736. In some embodiments, the second end 1710 of the body 1702 may be secured to the second closed end 1736 (e.g., via adhesive, via fasteners, via threaded connection).

[0116] The platinum resistance temperature sensor 1700 also includes a sealing member 1740 that extends between sidewalls 1732 to seal the body 1702 and the platinum member 1714 within the cavity 1730. A first terminal 1724 and a second terminal 1726 extend through the sealing member 1740 to the outside of the platinum resistance temperature sensor 1700. The first terminal 1724 and the second terminal 1726 can be used to obtain a temperature resistance measurement of the platinum member 1714. (As relative to...) Figure 5A , Figure 5B , Figure 9 As described elsewhere in this document, sealing the platinum component 1714 within a cavity 1730 suspended above the body 1702 helps prevent contaminants from migrating into the cavity 1730 and reaching the platinum component 1714.

[0117] In some embodiments, the sealing member 1740 may be formed of alumina or other similar materials with low permeability and subsequent metal ion release, relative to other materials currently used in platinum resistance temperature sensor applications. The sealing member 1740 may have a size and shape corresponding to the size and shape of the sidewall 1732, such that the sealing member 1740 may be tightly located within the cavity 1730 at the open first end 1734. The sealing member 1740 may have an orifice 1742 extending through it to allow the first terminal 1724 and the second terminal 1726 to extend from the cavity 1730 to the outside of the platinum resistance temperature sensor 1700. The sealing member 1740 may be attached (e.g., via adhesive) to the sidewall 1732 or the first end 1708 to secure the body 1702 and the platinum member 1714 within the cavity 1730. An adhesive material may also be included at the junction of the orifice 1742 with the first terminal 1724 and the second terminal 1726 to facilitate sealing the body 1702 and the platinum component 1714 within the cavity 1730.

[0118] Platinum member 1714 is spaced apart from circumferential surface 1704 and is suspended above circumferential surface 1704 by a set of support structures among a plurality of support structures. Platinum member 1714 extends through an aperture in this set of support structures. Platinum member 1714 is also spaced apart from sidewall 1732 by this set of support structures. As described elsewhere herein, spaced platinum member 1714 from body 1702 and sleeve 1736 allows platinum member 1714 to flex. Furthermore, the distance at which the plurality of support structures are spaced in a direction parallel to axis 1706 can be selected to achieve a desired level of support for platinum member 1714.

[0119] In this embodiment, the circular cross-section of the body 1702 is symmetrical (e.g., the cross-sectional dimension along the first axis is equal to the cross-sectional dimension along the second axis, which is orthogonal to the first axis); however, in other embodiments, the circular cross-section may be asymmetrical (e.g., the cross-sectional dimension along the first axis is not equal to the cross-sectional dimension along the second axis, which is orthogonal to the first axis). In some embodiments, the body 1702 may have cross-sections of different shapes. For example, the body 1702 may have a rectangular shape, and a plurality of support structures 1712 may be arranged peripherally on two or more sides of the circumferential surface 1704. Other cross-sectional shapes of the body 1702, such as triangles, are considered to be within the scope of this disclosure. The cavity 1730 may have a shape corresponding to the shape of the body 1702.

[0120] In some embodiments, the platinum member 1714 may be laterally supported by the support structure 1712 without the support structure 1712 suspending the platinum member 1714. For example, the first length 1714a of the platinum member 1714 may be laterally supported on a first side by a first set of support structures 1718, may have a second length 1714b extending around an adjacent support structure as shown, and a third length 1714c extending back to a first end 1708 and laterally supported on a second side by a second set of support structures 1720 opposite to the first side. The platinum member 1714 may be loosely supported in the radial direction of the body 1702 by the circumferential surface 1728 and sidewall 1732 of the body 1702. In such embodiments, as described below with respect to Figure 20A , Figure 20B and Figure 20C The platinum member 1714 may not extend through the orifice in the support structure 1712.

[0121] Figure 19 A platinum resistance temperature sensor 1900 is shown, having a helically wound platinum component 1902. The platinum resistance temperature sensor 1900 has a body 1904, which, as described with respect to platinum resistance temperature sensor 1700, has a plurality of support structures 1906 projecting outward from the body. The platinum component 1902 of the platinum resistance temperature sensor 1900 is concentrically wound around an axis 1908 extending through the center of the body 1904. As described above with respect to platinum resistance temperature sensor 1700, the platinum component 1902 is supported by a set of a plurality of support structures 1906.

[0122] Platinum member 1902 is spirally wound around body 1904. Specifically, platinum member 1902 is concentrically wound around body 1904 and wound along the length of body 1904 to form a spiral wound shape. Multiple support structures 1906 may be arranged alternately or asymmetrically along the length of body 1904, corresponding to the desired spiral wound shape of platinum member 1902.

[0123] In some embodiments, the platinum member 1902 is spirally wound from a first end 1910 of the body 1904 to a second end 1912 of the body through a first set of support structures among the plurality of support structures 1906. The platinum member 1902 then spirally wound back from the second end 1912 to the first end 1910 through a second set of support structures among the plurality of support structures 1906. The first set of support structures may be radially and / or longitudinally offset from the second set of support structures to facilitate spiral winding back and forth along the length of the body 1904. In some embodiments, the platinum member 1902 is spirally wound from the first end 1910 of the body 1904 to the second end 1912 of the body through a first set of support structures among the plurality of support structures 1906. The platinum member 1902 then extends linearly back from the second end 1912 to the first end 1910.

[0124] The platinum resistance temperature sensor 1900 is substantially similar to the platinum resistance temperature sensor 1700 in at least some other respects, and therefore further description of these respects is omitted for the sake of brevity.

[0125] In some embodiments, the platinum member 1902 may be wound around the body 1904 between the support structures 1906. For example, the platinum member 1902 may be spirally wound around the body 1904 between the support structures 1906, which support the platinum member 1902 by restricting its movement in the longitudinal direction (i.e., in the direction along axis 1908). Movement of the platinum member 1902 in the radial direction of the body 1904 (i.e., in the direction orthogonal to axis 1908) may be restricted by the circumferential surface of the body and the surface of the sidewall 1732 of the sleeve 1728 (see [reference]). Figure 17 For example, platinum member 1902 may be loosely constrained between the peripheral surface of body 1904 and sidewall 1732, preventing platinum member 1902 from moving in the radial direction of body 1904 beyond the height of support structure 1906. In some embodiments, support platforms may extend longitudinally between adjacent support structures in support structure 1906, supporting platinum member 1902 and suspending it above body 1902. In some embodiments, platinum member 1902 may extend along... Figure 19 The spiral path shown bends and extends back and forth between the support structures 1906.

[0126] Some or all of the multiple support structures may include orifices through which platinum components may extend for support. For example... Figure 20A , Figure 20B and Figure 20C As shown, the openings in the support structure can have different orientations and / or locations within the support structure.

[0127] Figure 20A A support structure 2002a is shown protruding from the circumferential surface 2000 of a body extending along axis 1706, according to one or more embodiments. The support structure 2002a has an aperture 2004a, appearing as a recess, on its side 2006a. The aperture 2004a has a recessed shape with an opening at side 2006a for receiving and supporting a platinum member 2008 within the support structure 2002a. The size and shape of the aperture 2004a are set according to the cross-sectional size and shape of the platinum member 2008, such that the platinum member 2008 fits snugly within the aperture 2004a. For example, the size and shape of the aperture 2004a are set to a horizontally oriented cross-section for receiving the platinum member 2008.

[0128] Figure 20BA support structure 2002b protruding from the circumferential surface 2000 of a body extending along axis 1706 is shown according to one or more embodiments. The support structure 2002b has an aperture 2004b, appearing as a recess, on its end portion 2006b away from the circumferential surface 2000. The aperture 2004b has a recessed shape with an opening at the end portion 2006b for receiving and supporting a platinum member 2008 within the support structure 2002b. The size and shape of the aperture 2004b are set according to the cross-sectional size and shape of the platinum member 2008, such that the platinum member 2008 fits snugly within the aperture 2004b. For example, the size and shape of the aperture 2004b are set for a vertically oriented cross-section for receiving the platinum member 2008.

[0129] Figure 20C A support structure 2002c protruding from a circumferential surface 2000 of a body extending along axis 1706, according to one or more embodiments, is shown. The support structure 2002c has an aperture 2004c, which extends through a central portion of the support structure 2002b. The aperture 2004c extends from a first side 2010 of the support structure 2002c through the support structure 2002c to a second side (not shown) of the support structure 2002b, in a direction along or parallel to axis 1706. The size and shape of the aperture 2004c are determined according to the cross-sectional size and shape of a platinum member 2008, such that the platinum member 2008 fits snugly within the aperture 2004c. The size, shape, location, and / or orientation of apertures 2004a, 2004b, and 2004c are non-limiting examples of various ways in which the platinum member can be supported by the support structure. Other configurations utilizing the support structure to support the platinum member are considered to be within the scope of this disclosure.

[0130] Figure 21 A partial exploded view of a platinum resistance temperature sensor 2100 according to one or more embodiments is shown. The platinum resistance temperature sensor 2100 has a body 2102 having a circumferential surface 2104 extending along an axis 2106 to define a body length between opposite ends of the body 2102. The platinum resistance temperature sensor 2100 also includes a set of support structures 2108 arranged along the length of the body 2102. As described herein, a platinum member 2110 is supported by this set of support structures 2108 such that the platinum member 2110 is suspended above the circumferential surface 2104.

[0131] In this embodiment, the set of support structures 2108 consists of a plurality of ridges, each ridge projecting radially outward from the circumferential surface 2104 and extending around the axis 2106. The set of support structures 2108 are spaced apart from each other along the body 2102 in the direction along the axis 2106. Figure 21The multiple ridges shown are annular rings located at different points along the length of the body 2102 and continuous along its circumference. In some embodiments, each annular ring may be formed by multiple ridge portions spaced apart from each other around the circumferential surface 2104, such that each support structure is formed by a set of discontinuous structures.

[0132] Each of the support structures 2108 has a set of orifices 2112 for receiving and supporting the platinum member 2110 in the support structure 2108. The orifices 2112 can be recesses or holes in the support structure 2108, similar to those relative to... Figure 20A , Figure 20B and / or Figure 20C The aforementioned apertures 2112 may be located at different angular positions around each support structure 2108 to receive and support corresponding portions of the platinum member 2110.

[0133] The platinum member 2110 extends from a first end of the body 2102 toward a second end of the body 2102 and passes through an orifice in the set of orifices 2108 of each support structure 2108. The platinum member 2110 can then be wound through the different orifices in the set of orifices 2108 of each support structure 2108 and return toward the first end of the body 2102. The body 2102 may include a feature 2114, such as a rod or column, positioned toward the second end of the body 2102, around which the platinum member 2110 can be bent to return to the first end of the body 2102.

[0134] The platinum resistance temperature sensor 2100 also includes a sleeve 2116 in which a cavity 2118 is formed for receiving a body 2102 having a wound platinum member 2110. The cavity 2118 may have a size and shape corresponding to the spacing between the sidewalls defining the cavity 2118. Thus, the circumferential surface 2104 of the body 2102 is spaced from the sidewalls by a distance equal to the circumferential width (e.g., circumferential thickness) of the set of support structures 2108. Therefore, the platinum member 2110 is spaced from the circumferential surface 2104, and the body 2102 remains fixed relative to the sleeve 2116. Other aspects of the platinum resistance temperature sensor 2100 are substantially similar to those of the platinum resistance temperature sensors 1700 and / or 1900, and therefore, further description of these aspects is omitted for brevity.

[0135] In some embodiments, the set of support structures 2108 may include a single ridge spirally wound around the length of the body 2102. Platinum member 2110 may be supported at the location along the spirally wound ridge.

[0136] The aforementioned embodiments of the platinum resistance temperature sensor include features that provide improved accuracy and robustness against shock and / or vibration. Compared to the wire-wound platinum resistance temperature sensor 100, the embodiments described herein may have relatively lower construction and maintenance costs, and can be used in high-end equipment and environments where temperature measurement accuracy is critical, and in locations and settings where there may be long periods between calibrations.

[0137] The various embodiments described above can be combined to provide other embodiments. One or more features of the platinum resistance temperature sensor described and illustrated in the accompanying drawings may be modified based on features of other platinum resistance temperature sensors or combinations thereof.

[0138] In light of the detailed description above, these and other changes may be made to these embodiments. Generally, the terminology used in the following claims should not be construed as limiting the claims to the specific embodiments disclosed in this specification and claims, but rather as encompassing all possible embodiments and the full scope of equivalents conferred by such claims. Therefore, the claims are not limited by this disclosure.

Claims

1. A temperature sensor, comprising: A body having a circumferential surface extending along an axis between the ends of the body; Multiple support structures are arranged along the body and protrude transversely to the axis from the circumferential surface of the body; A cannula having a cavity defined by a sidewall extending between a first end and a second end, wherein the body is located within the cavity; and A platinum component, supported by a set of one of the plurality of support structures, wherein the platinum component has a length extending along the body. The platinum component is spaced apart from the circumferential surface of the body.

2. The temperature sensor according to claim 1, further comprising: A sealing member extends between the sidewalls at the first end of the sleeve and seals the body and the platinum member within the cavity; and A measuring terminal is connected to the end of the platinum component within the cavity, wherein the measuring terminal extends through the sealing component to the outside of the temperature sensor.

3. The temperature sensor according to claim 1, wherein, The main body has a cylindrical shape, and the plurality of supporting structures are arranged circumferentially on the main body.

4. The temperature sensor according to claim 1, wherein, The main body has a rectangular shape, and the plurality of support structures are arranged peripherally on two or more sides of the main body.

5. The temperature sensor according to claim 1, wherein, The size of the plurality of support structures is set to support the body in a suspended state, wherein the circumferential surface of the body is spaced apart from the sidewall of the sleeve.

6. The temperature sensor according to claim 1, wherein, The plurality of support structures are spaced apart from each other along the length of the main body.

7. The temperature sensor according to claim 1, wherein, The set of support structures includes a set of elongated members that extend along the length of the body in a direction transverse to the axis.

8. The temperature sensor according to claim 1, wherein, The set of support structures includes a set of ridges that project outward from the circumferential surface of the body and are spaced apart from each other along the body.

9. The temperature sensor according to claim 1, wherein, The platinum member extends through an opening in each of the set of support structures, the opening being formed as a hole spaced apart from the circumferential surface of the body.

10. The temperature sensor according to claim 1, wherein, The platinum component is a platinum wire of a certain length.

11. The temperature sensor according to claim 1, wherein, The platinum component is a platinum foil of a certain length.

12. The temperature sensor according to claim 1, wherein, A platinum member of a certain length is fixed to the set of support structures, and the platinum member of the specified length is wound back and forth along the body between the ends of the body.

13. The temperature sensor according to claim 1, wherein, A platinum member of a certain length is fixed to the set of support structures and spirally wound around the axis of the body.

14. The temperature sensor according to claim 1, wherein, The body and the sleeve are formed of alumina.

15. The temperature sensor according to claim 1, wherein, The set of support structures suspends the platinum component above the circumferential surface of the body.

16. The temperature sensor according to claim 1, wherein, The platinum member bends around one or more of the set of support structures.

17. The temperature sensor according to claim 1, wherein, The plurality of support structures are symmetrically arranged on the circumferential surface of the main body.

18. The temperature sensor according to claim 1, wherein, The set of support structures is configured to suspend the platinum component between the circumferential surface of the body and the sidewall of the sleeve.

19. The temperature sensor according to claim 1, wherein, The platinum member extends through an opening in each of the set of support structures, the opening being formed as a recess, the recess being spaced apart from the circumferential surface of the body.

20. The temperature sensor according to claim 1, wherein, The set of support structures are arranged in two or more annular configurations around the body, and the support structures of adjacent annular configurations are radially offset from each other about the axis of the body.

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