Optical path fast adjusting device and adjusting method for laser tracker mirror surface foldover length measurement

Abstract

The application relates to a laser tracker mirror surface foldover length measurement optical path fast adjusting device and adjusting method. The adjusting device comprises a laser transmitter with a circular arc surface, a spherical diaphragm and a four-degree-of-freedom adjusting frame. The laser transmitter is located at one end point of a measured length and is used for transmitting a laser beam. The spherical diaphragm is located at another end point of the measured length and is used for limiting the laser beam so that the laser beam is parallel to the measured length. The four-degree-of-freedom adjusting mirror frame is located on the extension line of the measured length and is close to the spherical diaphragm, is used for mounting a plane mirror and adjusting the position and posture of the plane mirror, and makes the laser beam pass through the original point of the laser tracker after being reflected by the plane mirror. The adjusting method is to realize optical path fast rough adjustment through reproducing the optical path of the laser tracker mirror surface foldover length measurement and to realize optical path quantitative fine adjustment through calculation.

Description

TECHNICAL FIELD

[0001] The present application relates to the optical path adjustment of laser tracker, in particular to a kind of optical path quick adjustment device and adjustment method for laser tracker mirror surface foldover length measurement, belong to the field of precision engineering measurement. BACKGROUND

[0002] The precision of the interference length measurement function of laser tracker is far superior to the precision of the angle measurement function, so laser tracker can be applied to high-precision length measurement such as reference ruler calibration. When measuring, in order to use only the interference length measurement function of the laser tracker, the position of the laser tracker needs to be adjusted so that the origin of the laser tracker and the two endpoints of the measured length are collinear. Considering the fact that laser tracker is relatively bulky and difficult to adjust, a plane mirror is usually used to fold the laser beam to change the laser path, replacing the adjustment of the position of the laser tracker, i.e. laser tracker mirror surface foldover length measurement.

[0003] When laser tracker mirror surface foldover length measurement is performed, the position and attitude of the plane mirror are adjusted so that the horizontal angle and vertical angle of the laser tracker to the two endpoints of the measured length are consistent, and the virtual image of the laser tracker origin in the plane mirror and the two endpoints of the measured length are collinear. Since laser tracker has tracking function, the method of "near adjustment translation and far adjustment angle" of laser interferometer cannot be simply copied, and usually relies on the experience and feeling of the measurement personnel, which needs to be repeated many times, consumes a lot of time and energy, especially when the measured length is in a spatial inclined state, the adjustment difficulty is greatly increased. SUMMARY

[0004] To make up for the low efficiency and high difficulty of the existing optical path adjustment method for laser tracker mirror surface foldover length measurement, the present application provides a kind of optical path quick adjustment device and adjustment method for laser tracker mirror surface foldover length measurement with simple structure and convenient use, which replaces the traditional method of repeated adjustment relying on the experience and feeling of measurement personnel by solving the problems of quick coarse adjustment and quantitative fine adjustment, and realizes the improvement of adjustment efficiency and the reduction of difficulty of optical path adjustment for laser tracker mirror surface foldover length measurement. Specifically, the present application focuses on how to realize the research of optical path quick adjustment, especially the quick coarse adjustment and quantitative fine adjustment of optical path.

[0005] The present application adopts the following technical solutions:

[0006] The application discloses a light path fast adjusting device for mirror folding length measurement of a laser tracker, which comprises a laser emitter 1 with a circular arc surface, a spherical diaphragm 2 and a four-degree-of-freedom adjusting frame 3.

[0007] Preferably, the laser emitter 1 comprises a spherical shell and a laser.

[0008] Further, the spherical shell is made of a stainless steel ball with a diameter consistent with that of a spherical reflective target used for measurement, and is fixed on a target seat; an axis-through-ball-center blind hole or through hole is formed on the spherical shell, the depth of the blind hole is greater than the radius of the spherical shell, the diameter of the blind hole / through hole is consistent with that of a laser installed in the blind hole / through hole; the laser is a visible light point source, is installed in the blind hole / through hole of the spherical shell in an interference fit, and the extension line of the laser beam of the laser passes through the ball center of the spherical shell.

[0009] Further, the spherical diaphragm 2 is made of a stainless steel ball with a diameter consistent with that of a spherical reflective target used for measurement, and is fixed on a target seat; a through hole with an axis passing through the ball center is formed on the spherical diaphragm as a light passing hole.

[0010] Further, in a virtual XYZ space, the four-degree-of-freedom adjusting frame 3 comprises an X-Z two-dimensional gimbal frame and an X-Z two-dimensional displacement platform; a plane mirror used for mirror folding length measurement of the laser tracker is installed in the X-Z two-dimensional gimbal frame, the X-Z two-dimensional gimbal frame can be used for adjusting the attitude of the plane mirror, the X-Z two-dimensional gimbal frame has two differential heads for respectively quantitatively fine-tuning the yaw and pitch of the plane mirror, the X axis and the Z axis of the X-Z two-dimensional gimbal frame intersect at the center of the plane mirror, so that the center of the plane mirror is not translated when the attitude of the plane mirror is adjusted; the X-Z two-dimensional gimbal frame is installed on the X-Z two-dimensional displacement platform, and the Z axis of the X-Z two-dimensional gimbal frame is parallel to the Z axis of the X-Z two-dimensional displacement platform, the X-Z two-dimensional displacement platform can be used for adjusting the translation and lifting of the plane mirror.

[0011] Further, the laser emitter 1 with the circular arc surface is a spherical laser emitter or a hemispherical laser emitter.

[0012] The application discloses a light path quick adjustment method for mirror folding length measurement of a laser tracker.

[0013] Further, the light path quick coarse adjustment comprises the following steps:

[0014] S1, placing a spherical laser emitter at an end point A of a measured length, placing a spherical diaphragm at an end point B of the measured length, rotating the spherical laser emitter and the spherical diaphragm so that a laser beam of the spherical laser emitter passes through a light passing hole of the spherical diaphragm, and at this time, the laser beam of the spherical laser emitter is parallel to the measured length;

[0015] S2, placing a four-degree-of-freedom adjusting frame on an extension line of the measured length and close to the spherical diaphragm, making a Z axis of an X-Z two-dimensional displacement platform parallel to a Z axis of the laser tracker, and making an X axis of the X-Z two-dimensional displacement platform perpendicular to a projection of the measured length on a horizontal plane, adjusting the X-Z two-dimensional displacement platform so that an incident point of the laser beam of the laser emitter on a plane mirror is located at a center of the plane mirror, and adjusting a yaw and a pitch of an X-Z two-dimensional gimbal so that the laser beam of the laser emitter is irradiated to an original point of the laser tracker after being reflected by the plane mirror;

[0016] S3, removing the spherical laser emitter and the spherical diaphragm at the two end points of the measured length, placing a spherical reflective target at the end point B of the measured length, leading a laser beam of the laser tracker to the plane mirror, and making the laser beam of the laser tracker be reflected by the plane mirror and be received by the spherical reflective target at the end point B of the measured length, recording horizontal angles θ B and vertical angles φ B displayed in measurement software, moving the spherical reflective target to the end point A of the measured length, recording horizontal angles θ A and vertical angles φ A displayed in the measurement software, and according to a light path reversibility principle, θ A ≈θ B and φ A ≈φ B , the light path coarse adjustment for mirror folding length measurement of the laser tracker is completed.

[0017] The light path quantitative fine adjustment comprises the following steps:

[0018] S1', calculating Δθ=θ B -θ A and Δφ=φ B -φ A , wherein θ A , θ Brespectively are horizontal angles of the end points A, B of the measured length displayed in the measurement software A , respectively are horizontal angles of the end points A, B of the measured length displayed in the measurement software B ; and

[0019] S2', rotate the two differential heads of the X-Z two-dimensional gimbal of the four-degree-of-freedom adjusting frame by 1 graduation value d respectively; place the spherical reflective target at the end points A, B of the measured length in turn, and record the horizontal angles θ' A , respectively are horizontal angles of the end points A, B of the measured length displayed in the measurement software B ; and A B ;

[0020] S3', calculate Δθ' = θ' B - θ' A , Δφ' = φ' B - φ' A again; rotate the yaw differential head of the X-Z two-dimensional gimbal of the four-degree-of-freedom adjusting frame by D 偏摆 , wherein D 偏摆 = [Δθ' / (Δθ-Δθ')]d, and [] represents rounding; similarly, rotate the pitch differential head of the X-Z two-dimensional gimbal of the four-degree-of-freedom adjusting frame by D 俯仰 , wherein D 俯仰 = [Δφ' / (Δφ-Δφ')]d, and [] represents rounding; the optical path fine adjustment of the mirror folding length measurement of the laser tracker is completed.

[0021] The present application has the beneficial effects that: a laser tracker mirror folding length measurement optical path rapid adjustment device and adjustment method with simple structure and convenient use are provided, on one hand, the spherical laser emitter, the spherical diaphragm and the four-degree-of-freedom adjusting frame are used to reproduce the optical path of the mirror folding length measurement of the laser tracker, the rapid coarse adjustment of the optical path of the mirror folding length measurement of the laser tracker is realized, on the other hand, the X-Z two-dimensional gimbal of the four-degree-of-freedom adjusting frame can be quantitatively fine adjusted, the displacement that the differential head needs to travel can be obtained through calculation, the quantitative fine adjustment of the optical path of the mirror folding length measurement of the laser tracker is realized, and the adjustment efficiency of the optical path of the mirror folding length measurement of the laser tracker is improved and the difficulty is reduced finally through cooperation of the two. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 Spherical laser emitter and spherical diaphragm.

[0023] Figure 2 Four-degree-of-freedom adjusting frame.

[0024] Figure 3 Rapid coarse adjustment schematic diagram of the optical path of the mirror folding length measurement of the laser tracker.

[0025] Figure 4 ​is the schematic diagram of the quantitative fine adjustment of the light path of the mirror surface of the laser tracker for the length measurement by folding.

[0026] Figure 5 is the schematic diagram of the horizontal angle and the vertical angle of the mirror surface of the laser tracker for the length measurement by folding.

[0027] Figure 6 is the schematic diagram of the rotation of the differential head.

[0028] In the drawings, the reference signs are as follows:

[0029] 1 - spherical laser emitter

[0030] 101 - spherical housing

[0031] 102 - laser

[0032] 2 - spherical diaphragm

[0033] 201 - light passage hole

[0034] 3 - four-degree-of-freedom adjusting frame

[0035] 301 - X-Z two-dimensional gimbal frame

[0036] 3011 - yaw differential head

[0037] 3012 - pitch differential head

[0038] 302 - X-Z two-dimensional displacement platform

[0039] 303 - plane mirror

[0040] 4 - reference ruler

[0041] 401 - target seat

[0042] 5 - laser tracker

[0043] 6 - spherical reflective target DETAILED DESCRIPTION

[0044] The present application will be further described below in combination with the drawings and specific examples.

[0045] In this embodiment, as shown in Figure 3 and Figure 4 , the measured length refers to the distance between the two target seats A and B installed on the reference ruler.

[0046] Referring to Figures 1-6A rapid adjustment device for the optical path of a laser tracker's mirror-based length measurement includes a spherical laser emitter 1, a spherical aperture 2, and a four-degree-of-freedom adjustment frame 3. The spherical laser emitter 1 is located at endpoint A of a reference scale 4 and is used to emit a laser beam. The spherical aperture 2 is located at endpoint B of the reference scale 4 and is used to confine the laser beam, ensuring it is parallel to the length being measured. The four-degree-of-freedom adjustment frame 3 is located on the extension line of the reference scale 4, approximately 100 mm from the spherical aperture 2. It is used to mount a plane mirror 303 and adjust the position and orientation of the plane mirror 303 so that the laser beam, after being reflected by the plane mirror 303, passes through the origin O of the laser tracker 5, thus reproducing the optical path of the laser tracker's mirror-based length measurement.

[0047] In this embodiment, the spherical laser emitter 1 includes a spherical shell 101 and a laser 102. The base of the spherical shell 101 is a stainless steel sphere with a diameter of 38.1 mm, which is the same as the diameter of the spherical reflective target 6 used for measurement. It can be magnetically fixed on the target holder 401. A through hole with its axis passing through the center of the sphere is machined on the spherical shell 101. The diameter of the through hole is the same as the diameter of the laser 102 installed in the through hole, which is 12 mm. The laser 102 is a visible light point source and is installed in the through hole of the spherical shell 101 with an interference fit. The extension line of the laser beam of the laser 102 passes through the center of the spherical shell 101.

[0048] In this embodiment, the spherical aperture 2 is based on a stainless steel ball with a diameter of 38.1 mm, which is the same as the diameter of the spherical reflective target 6 used for measurement. It can be magnetically fixed on the target base 401. A through hole with the axis passing through the center of the ball is machined on it as the light-passing hole 201 of the aperture.

[0049] In this embodiment, the four-degree-of-freedom adjustment frame 3 includes an XZ two-dimensional universal mirror frame 301 and an XZ two-dimensional displacement platform 302. The plane mirror 303 used for laser tracker mirror rotation and length measurement is installed in the XZ two-dimensional universal mirror frame 301. The XZ two-dimensional universal mirror frame 301 can be used to adjust the attitude of the plane mirror 303. The XZ two-dimensional universal mirror frame 301 has two micro-heads 3011 and 3012, which respectively quantitatively fine-tune the yaw and pitch of the plane mirror. The X-axis and Z-axis of the XZ two-dimensional universal mirror frame 301 intersect at the center of the plane mirror 303, ensuring that the center of the plane mirror 303 does not translate when the attitude of the plane mirror 303 is adjusted. The XZ two-dimensional universal mirror frame 301 is installed on the XZ two-dimensional displacement platform 302, and the Z-axis of the XZ two-dimensional universal mirror frame 301 is parallel to the Z-axis of the XZ two-dimensional displacement platform 302. The XZ two-dimensional displacement platform 302 can be used to adjust the translation and lifting of the plane mirror 303.

[0050] Taking the measurement of the length between two endpoints A and B on a reference ruler as an example, the optical path of the laser tracker for mirror-based length measurement is quickly and coarsely adjusted as follows: Figure 3 As shown, it includes the following steps:

[0051] Step 1: Place the spherical laser emitter 1 at end point A of the reference ruler 4 and place the spherical aperture 2 at end point B of the reference ruler 4. Rotate the spherical laser emitter 1 and the spherical aperture 2 so that the laser beam of the spherical laser emitter 1 passes through the light-transmitting hole 201 of the spherical aperture 2. At this time, the laser beam of the spherical laser emitter 1 is parallel to the length being measured.

[0052] The second step is to place the four-degree-of-freedom adjustment frame 3 on the extension line of the length to be measured, and about 100mm away from the spherical aperture 2, so that the Z-axis of the XZ two-dimensional displacement platform 302 is parallel to the Z-axis of the laser tracker 5, and the X-axis of the XZ two-dimensional displacement platform 302 is perpendicular to the projection of the length to be measured on the horizontal plane; adjust the XZ two-dimensional displacement platform 302 so that the incident point of the laser beam of the spherical laser emitter 1 on the plane mirror 303 is located at the center of the plane mirror 303; adjust the yaw and pitch of the XZ two-dimensional universal mirror frame 301 so that the laser beam of the spherical laser emitter 1 is reflected by the plane mirror 303 and illuminates the origin O of the laser tracker 5.

[0053] Third step: Remove the spherical laser emitter 1 and spherical aperture 2 from both ends of the length to be measured, and place the spherical reflective target 6 at end point B of the reference ruler 4; guide the laser beam of the laser tracker 5 to the plane mirror 303, and after being reflected by the plane mirror 303, the spherical reflective target 6 at end point B of the reference ruler 4 receives the light, and record the horizontal angle θ displayed in the laser tracker measurement software. B Vertical angle φ B The geometric meaning of horizontal angle θ is as follows: Figure 5 As shown; move the spherical reflective target 6 to point A on the reference ruler 4, and record the horizontal angle θ displayed in the laser tracker measurement software. A Vertical angle φ A According to the principle of reversibility of light paths, θ A ≈θ B , φ A ≈φ B The coarse adjustment of the optical path for the laser tracker's mirror refraction length measurement is complete. It should be noted that the application of the spherical reflective target 6 is existing technology, therefore it will not be described in detail in this embodiment.

[0054] Taking the measurement of the length between two endpoints A and B on a reference ruler as an example, the quantitative fine-tuning of the optical path for laser tracker mirror refraction length measurement is as follows: Figure 4 As shown, combined with Figure 5 and Figure 6 This includes the following steps:

[0055] Step 1: Calculate Δθ = θ B -θ A Δφ=φ B -φ A , where θA , θ B are the horizontal angles of the end points A, B of the reference ruler 4 shown in the laser tracker measurement software, respectively. A , φ B are the vertical angles of the end points A, B of the reference ruler 4 shown in the laser tracker measurement software, respectively.

[0056] Second step, rotate the two differential heads 3011, 3012 of the X-Z two-dimensional gimbal frame 301 by 1 d scale value clockwise respectively; place the spherical reflecting target 6 at the end points A, B of the reference ruler 4 in turn, and record the horizontal angles θ' A , θ' B and the vertical angles φ' A , φ' B shown in the laser tracker measurement software.

[0057] Third step, calculate Δθ' = θ' B - θ' A , Δφ' = φ' B - φ' A again; rotate the yaw differential head 3011 of the X-Z two-dimensional gimbal frame 301 by D 偏摆 , where D 偏 yaw = [Δθ' / (Δθ-Δθ')]d, [] represents rounding; similarly, rotate the pitch differential head 3012 of the X-Z two-dimensional gimbal frame 301 by D 俯仰 , where D 俯仰 pitch = [Δφ' / (Δφ-Δφ')]d, [] represents rounding; the optical path fine adjustment of the laser tracker mirror folding length measurement is completed.

[0058] The above is the preferred embodiment of the present application, and various transformations or improvements can be made by those skilled in the art on the basis of the above, and these transformations or improvements shall belong to the scope of protection of the present application without departing from the general concept of the present application.

Claims

1. A method for fast adjustment of the optical path of a laser tracker mirror foldover length measurement, characterized in that: the method for fast adjustment of the optical path of the laser tracker mirror foldover length measurement uses a device for fast adjustment of the optical path of the laser tracker mirror foldover length measurement; the device for fast adjustment of the optical path of the laser tracker mirror foldover length measurement comprises a laser emitter (1) with a circular arc surface, a spherical diaphragm (2), and a four-degree-of-freedom adjusting frame (3); the laser emitter (1) is located at one end of the length to be measured and is used to emit a laser beam; the spherical diaphragm (2) is located at the other end of the length to be measured and is used to limit the laser beam so that the laser beam is parallel to the length to be measured; the four-degree-of-freedom adjusting frame (3) is located on the extension line of the length to be measured and is close to the spherical diaphragm (2) and is used to mount a plane mirror and adjust the position and attitude of the plane mirror so that the laser beam is reflected by the plane mirror and passes through the origin of the laser tracker, reproduces the optical path of the laser tracker mirror foldover length measurement, and quantitatively adjusts the optical path. The device for fast adjustment of the optical path of the laser tracker mirror foldover length measurement reproduces the optical path of the laser tracker mirror foldover length measurement, realizes fast coarse adjustment of the optical path of the laser tracker mirror foldover length measurement, uses the quantitative fine adjustment of the X-Z two-dimensional gimbal of the four-degree-of-freedom adjusting frame, calculates the displacement to be traveled by the differential head, and realizes quantitative fine adjustment of the optical path of the laser tracker mirror foldover length measurement. The laser emitter (1) comprises a spherical shell and a laser. The spherical shell is a stainless steel ball with a diameter consistent with the diameter of the spherical reflective target used for measurement and is fixed on the target seat; a blind hole or a through hole with an axis passing through the ball center is processed on the spherical shell; if it is a blind hole, the depth of the hole is greater than the radius of the spherical shell; the diameter of the blind hole / through hole is consistent with the diameter of the laser installed in the blind hole / through hole; the laser is a visible light point source and is installed in the blind hole / through hole of the spherical shell in an interference fit; the extension line of the laser beam of the laser passes through the ball center of the spherical shell. The spherical diaphragm (2) is a stainless steel ball with a diameter consistent with the diameter of the spherical reflective target used for measurement and is fixed on the target seat; a through hole with an axis passing through the ball center is processed on the spherical diaphragm as a light hole of the diaphragm.

2. The method of claim 1, wherein the method further comprises: adjusting the optical path length of the laser tracker by rotating the mirror about the first axis to a second angle. In a virtual XYZ space, the four-degree-of-freedom adjusting frame (3) comprises an X-Z two-dimensional gimbal and an X-Z two-dimensional displacement platform; the plane mirror used for the laser tracker mirror foldover length measurement is mounted in the X-Z two-dimensional gimbal, the X-Z two-dimensional gimbal can be used to adjust the attitude of the plane mirror, the X-Z two-dimensional gimbal has two differential heads that quantitatively fine adjust the yaw and pitch of the plane mirror, the X axis and the Z axis of the X-Z two-dimensional gimbal intersect at the center of the plane mirror, and the intersection ensures that the center of the plane mirror does not translate during attitude adjustment of the plane mirror; 3. The method for rapid adjustment of the optical path of a laser tracker mirror refraction measurement as described in claim 2, characterized in that: The X-Z two-dimensional gimbal is mounted on the X-Z two-dimensional displacement platform, and the Z axis of the X-Z two-dimensional gimbal is parallel to the Z axis of the X-Z two-dimensional displacement platform; the X-Z two-dimensional displacement platform can be used to adjust the translation and lifting of the plane mirror.

4. The method for rapid adjustment of the optical path of a laser tracker mirror refraction measurement as described in claim 1, characterized in that: The laser emitter (1) with a circular arc surface is a spherical laser emitter or a hemispherical laser emitter.

5. The method for rapid adjustment of the optical path of a laser tracker mirror refraction measurement as described in claim 1, characterized in that:

7. The method for fast adjustment of the optical path of the laser tracker mirror foldover length measurement according to any one of claims 1-6, characterized in that: ​ 6. The method for rapid adjustment of the optical path of a laser tracker mirror refraction measurement as described in claim 1, characterized in that: ​ ​ The light path fast coarse adjustment comprises the following steps: S1, placing the spherical laser emitter at the end point A of the measured length, placing the spherical diaphragm at the end point B of the measured length, rotating the spherical laser emitter and the spherical diaphragm, so that the laser beam of the spherical laser emitter passes through the light hole of the spherical diaphragm, at this time the laser beam of the spherical laser emitter is parallel to the measured length; S2, placing the four-degree-of-freedom adjusting frame on the extension line of the measured length and close to the spherical diaphragm, so that the Z axis of the X-Z two-dimensional displacement platform is parallel to the Z axis of the laser tracker, the X axis of the X-Z two-dimensional displacement platform is perpendicular to the projection of the measured length on the horizontal plane; adjusting the X-Z two-dimensional displacement platform so that the incident point of the laser beam of the laser emitter on the plane mirror is located at the center of the plane mirror; adjusting the yaw and pitch of the X-Z two-dimensional gimbal frame so that the laser beam of the laser emitter is irradiated to the origin of the laser tracker after being reflected by the plane mirror; S3, remove the spherical laser emitter and spherical diaphragm of the two end points of the measured length, place the spherical reflective target at the end point B of the measured length; the laser beam of the laser tracker is led to the plane mirror, and the spherical reflective target at the end point B of the measured length is lighted through the reflection of the plane mirror, and the horizontal angle θ shown in the measurement software is recorded B , the vertical angle φ B ; move the spherical reflective target to the end point A of the measured length, and record the horizontal angle θ shown in the measurement software A , the vertical angle φ A ; according to the reversible principle of the light path, θ A ≈θ B , φ A ≈φ B , and the rough adjustment of the light path of the mirror folding length measurement of the laser tracker is completed; The light path quantitative fine adjustment comprises the following steps: S1 ', calculate Δθ = θ B - θ A , Δφ = φ B - φ A where θ A , θ B are the horizontal angles at the ends A, B of the measured length shown in the measurement software, φ A , φ B are the vertical angles at the ends A, B of the measured length shown in the measurement software; S2', rotate the two differential heads of the X-Z two-dimensional gimbal frame by 1 graduation value d; place the spherical reflecting target at the end points A and B of the measured length in turn, and record the horizontal angles θ' A , θ' B and the vertical angles φ' A , φ' B displayed in the measurement software. S3', recalculate Δθ' = θ' B - θ' A ; φ' B - φ' A ; rotate the yaw differential head of the X-Z two-dimensional gimbal frame so that it travels D 偏摆 , where D 偏摆 = [Δθ' / (Δθ - Δθ')] d, [] represents rounding off; similarly, rotate the pitch differential head of the X-Z two-dimensional gimbal frame so that it travels D 俯仰 , where D 俯仰 = [Δφ' / (Δφ - Δφ')] d, [] represents rounding off; the optical path fine adjustment of the laser tracker mirror folding range finding is completed.

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