A transflective terahertz measurement system and method

Abstract

The invention discloses a transflective terahertz measurement system and method, and relates to the field of terahertz spectrum measurement; specifically, a transflective terahertz measurement system comprises: a terahertz radiation source, a terahertz beam splitter, a reflective sample stage, a transmission sample stage, and a terahertz detector; wherein the terahertz radiation source emits a terahertz pulse, and the terahertz beam splitter transmits the terahertz pulse to obtain a first transmission pulse or reflects the terahertz pulse to obtain a first reflection pulse; the first transmission pulse is reflected on the surface of the reflective sample to be measured to obtain a second reflection pulse; the second reflection pulse is reflected by the terahertz beam splitter to obtain a third reflection pulse; the terahertz beam splitter is adjusted 90 degrees clockwise, and the first reflection pulse is transmitted through the transmission sample stage to obtain a second transmission pulse; the terahertz detector receives the third reflection pulse or the second transmission pulse, and detection of different samples to be measured is achieved by switching between the transmission mode and the reflection mode.

Description

Technical Field

[0001] The present invention relates to the field of terahertz spectrum measurement, and in particular to a transflective terahertz measurement system and method. Background Art

[0002] There are two main types of terahertz time-domain systems: transmission type and reflection type. In practical applications, different material samples require different detection methods. In the existing technology, the terahertz time-domain systems currently used in experiments are mostly free-space systems with complex structures.

[0003] In order to quickly select transmission or reflection according to the situation, a terahertz transflective time domain system is urgently needed, which is of great significance for terahertz detection of different sample requirements. Summary of the invention

[0004] The purpose of the present invention is to provide a transflective terahertz measurement system and method, which can detect different samples to be tested by switching between transmission and reflection modes.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] A transflective terahertz measurement system, the transflective terahertz measurement system comprising:

[0007] A terahertz radiation source, used for emitting terahertz pulses;

[0008] A terahertz beam splitter is arranged on the transmission path of the terahertz pulse, and is used to transmit the terahertz pulse to obtain a first transmitted pulse or reflect the terahertz pulse to obtain a first reflected pulse. The terahertz beam splitter forms an acute angle of 45 degrees with the terahertz pulse, and the terahertz beam splitter can be adjusted 90 degrees clockwise or counterclockwise;

[0009] A reflective sample stage, arranged on the transmission path of the first transmission pulse, for placing a reflective sample to be measured; the first transmission pulse is reflected on the surface of the reflective sample to be measured to obtain a second reflected pulse;

[0010] The second reflected pulse is reflected by the terahertz beam splitter to obtain a third reflected pulse;

[0011] A transmission sample stage is arranged on the transmission path of the first reflected pulse and is used to place the transmission sample to be measured; the terahertz beam splitter is adjusted 90 degrees counterclockwise, and the first reflected pulse is transmitted through the transmission sample stage to obtain a second transmission pulse;

[0012] The terahertz detector is arranged on the transmission optical path of the third reflected pulse, and is used for receiving the third reflected pulse or the second transmitted pulse.

[0013] Optionally, the transflective terahertz measurement system further includes:

[0014] The first collimating lens L1 is used for collimating the terahertz pulse. The first collimating lens L1 is arranged between the terahertz radiation source and the terahertz beam splitter.

[0015] Optionally, the transflective terahertz measurement system further includes:

[0016] A second collimating lens L2, used for focusing the first reflected pulse, wherein the second collimating lens L2 is arranged between the terahertz beam splitter and the transmission sample stage;

[0017] The third collimating lens L3 is used to focus the third reflected pulse or the second transmitted pulse. The third collimating lens L3 is arranged between the transmission sample stage and the terahertz detector.

[0018] Preferably, the transflective terahertz measurement system further includes:

[0019] A driving unit is connected to the terahertz beam splitter and is used to adjust the placement angle of the terahertz beam splitter.

[0020] Optionally, the focal length of the first collimating lens L1 is 25 mm or 50 mm.

[0021] Preferably, the distance value between the real focus of the terahertz radiation source and the first collimating lens L1 is the focal length value of the first collimating lens L1.

[0022] Optionally, the focal lengths of the second collimating lens L2 and the third collimating lens L3 are 100 mm, 150 mm or 200 mm.

[0023] Preferably, a distance value between the second collimating lens L2 and the transmission sample stage is equal to a focal length value of the second collimating lens L2.

[0024] Preferably, the distance value between the third collimating lens L3 and the transmission sample stage is the focal length value of the third collimating lens L3.

[0025] To achieve the above object, the present invention also provides the following solution:

[0026] A transflective terahertz measurement method, the transflective terahertz measurement method is applied to the above-mentioned transflective terahertz measurement system, the transflective terahertz measurement method comprises:

[0027] emitting terahertz pulses by a terahertz radiation source;

[0028] The terahertz beam splitter is arranged on the transmission path of the terahertz pulse, and selects transmission to obtain a first transmission pulse or reflection to obtain a first reflection pulse according to the sample to be tested;

[0029] When the sample to be measured is placed on the reflective sample stage, the reflective sample stage is arranged on the transmission path of the first transmission pulse, and the first transmission pulse is reflected on the surface of the reflective sample to be measured to obtain a second reflection pulse;

[0030] The second reflected pulse is reflected by the terahertz beam splitter to obtain a third reflected pulse;

[0031] The terahertz detector is arranged on the transmission path of the third reflected pulse, and the terahertz detector receives the third reflected pulse;

[0032] When the sample to be tested is placed on the transmission sample stage, the transmission sample stage is arranged on the transmission path of the first reflected pulse, and the first reflected pulse is transmitted through the transmission sample stage to obtain a second transmitted pulse;

[0033] The terahertz detector receives the second transmission pulse.

[0034] According to the specific embodiments provided by the present invention, the present invention discloses the following technical effects:

[0035] The transflective terahertz measurement system provided by the present invention emits a terahertz pulse through a terahertz radiation source, and a terahertz beam splitter transmits the terahertz pulse to obtain a first transmission pulse or reflects the terahertz pulse to obtain a first reflection pulse; the first transmission pulse is reflected on the surface of the reflective sample to be measured to obtain a second reflection pulse; the second reflection pulse is reflected by the terahertz beam splitter to obtain a third reflection pulse; the terahertz beam splitter is adjusted 90 degrees clockwise, and the first reflection pulse is transmitted through the transmission sample stage to obtain a second transmission pulse; the terahertz detector receives the second reflection pulse or the second transmission pulse, and the detection of the sample to be measured is realized by switching between the transmission and reflection detection modes. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0037] Figure 1 It is a structural schematic diagram of the terahertz transflective terahertz measurement system of the present invention;

[0038] Figure 2This is a diagram of a first embodiment of a terahertz transflective terahertz measurement system according to the present invention;

[0039] Figure 3 This is a diagram of a second embodiment of the terahertz transflective terahertz measurement system of the present invention.

[0040] Explanation of symbols:

[0041] Terahertz radiation source-1, terahertz beam splitter-2, reflective sample stage-3, transmissive sample stage-4, terahertz detector-5, first collimating lens L1-6, second collimating lens L2-7, third collimating lens L3-8. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] The purpose of the present invention is to provide a transflective terahertz measurement system and method, which can detect different samples to be tested by switching between transmission and reflection modes.

[0044] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0045] like Figure 1 As shown, the transflective terahertz measurement system of the present invention comprises: a terahertz radiation source 1, a terahertz beam splitter 2, a reflective sample stage 3, a transmissive sample stage 4, and a terahertz detector 5.

[0046] The terahertz radiation source 1 is used to emit terahertz pulses. The terahertz radiation source 1 is arranged in an integrated box and has a fixed angle.

[0047] In order to facilitate switching between the transmission and reflection modes, the terahertz beam splitter 2 is arranged on the transmission path of the terahertz pulse. The terahertz beam splitter 2 is used to transmit the terahertz pulse to obtain a first transmission pulse or to reflect the terahertz pulse to obtain a first reflection pulse. The terahertz beam splitter 2 forms an acute angle of 45 degrees with the terahertz pulse; the terahertz beam splitter 2 can be adjusted 90 degrees clockwise or counterclockwise.

[0048] The reflective sample stage 3 is arranged on the transmission path of the first transmission pulse, and the reflective sample stage 3 is used to place the reflective sample to be measured; the first transmission pulse is reflected on the surface of the reflective sample to be measured to obtain a second reflection pulse.

[0049] The second reflected pulse is reflected by the terahertz beam splitter 2 to obtain a third reflected pulse.

[0050] The transmission sample stage 4 is arranged on the transmission path of the first reflected pulse. The transmission sample stage 4 is used to place the transmission sample to be measured; the terahertz beam splitter 2 is adjusted 90 degrees counterclockwise, and the first reflected pulse is transmitted through the transmission sample stage 4 to obtain the second transmission pulse.

[0051] The terahertz detector 5 is arranged on the transmission optical path of the third reflected pulse, and is used to receive the third reflected pulse or the second transmitted pulse. The terahertz detector 5 is arranged in an integrated box and has a fixed angle.

[0052] The terahertz radiation source 1 and the terahertz detector 5 are installed horizontally so that the light path can be better received.

[0053] Furthermore, the transflective terahertz measurement system further includes: a first collimating lens L16.

[0054] The first collimating lens L16 is used for collimating the terahertz pulse. The first collimating lens L16 is arranged between the terahertz radiation source 1 and the terahertz beam splitter 2 .

[0055] The focal length of the first collimating lens L16 is 25 mm or 50 mm. The distance value between the real focus of the terahertz radiation source 1 and the first collimating lens L16 is the focal length value of the first collimating lens L16.

[0056] In addition, the transflective terahertz measurement system further includes: a second collimating lens L27 and a third collimating lens L38.

[0057] The second collimating lens L27 is used to focus the first reflected pulse, and the second collimating lens L27 is disposed between the terahertz beam splitter 2 and the transmission sample stage 4 .

[0058] The third collimating lens L38 is used to focus the third reflected pulse or the second transmitted pulse, and the third collimating lens L38 is disposed between the transmission sample stage 4 and the terahertz detector 5 .

[0059] The focal lengths of the second collimating lens L27 and the third collimating lens L38 are 100 mm, 150 mm, or 200 mm. The distance between the second collimating lens L27 and the transmission sample stage 4 is equal to the focal length of the second collimating lens L27. The distance between the third collimating lens L38 and the transmission sample stage 4 is equal to the focal length of the third collimating lens L38.

[0060] In order to facilitate the adjustment of the terahertz beam splitter 2 to switch between the transmission mode and the reflection mode, the transflective terahertz measurement system further includes a driving unit.

[0061] The driving unit is connected to the terahertz beam splitter 2 , and the driving unit is used to adjust the placement angle of the terahertz beam splitter 2 .

[0062] A transflective terahertz measurement method, the transflective terahertz measurement method comprising the following steps:

[0063] S1: emit terahertz pulses through terahertz radiation source 1.

[0064] S2: The terahertz beam splitter 2 is disposed on the transmission path of the terahertz pulse, and transmission is selected to obtain a first transmission pulse or reflection is selected to obtain a first reflection pulse according to the sample to be tested.

[0065] S3: Figure 2 As shown, when the sample to be measured is placed on the reflective sample stage 3, the reflective sample stage 3 is set on the transmission path of the first transmission pulse; the first transmission pulse is reflected on the surface of the reflective sample to be measured to obtain a second reflection pulse.

[0066] S4: the second reflected pulse is reflected by the terahertz beam splitter 2 to obtain a third reflected pulse;

[0067] S5: The terahertz detector 5 is arranged on the transmission path of the third reflected pulse; the terahertz detector 5 receives the third reflected pulse.

[0068] S6: Figure 3 As shown, when the sample to be tested is placed on the transmission sample stage 4, the transmission sample stage 4 is arranged on the transmission path of the first reflected pulse; the first reflected pulse is transmitted through the transmission sample stage 4 to obtain a second transmitted pulse.

[0069] S7: The terahertz detector 5 receives the second transmission pulse.

[0070] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the method disclosed in the embodiment, since it corresponds to the system disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the system part description.

[0071] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A transflective terahertz measurement system, characterized in that: The transflective terahertz measurement system comprises: A terahertz radiation source, used for emitting terahertz pulses; A terahertz beam splitter is arranged on the transmission path of the terahertz pulse, and is used to obtain a first transmission pulse by transmission or a first reflection pulse by reflection according to the sample to be tested. The terahertz beam splitter forms an acute angle of 45 degrees with the terahertz pulse, and the terahertz beam splitter can be adjusted 90 degrees clockwise or counterclockwise; A reflective sample stage, arranged on the transmission path of the first transmission pulse, for placing a reflective sample to be measured; the first transmission pulse is reflected on the surface of the reflective sample to be measured to obtain a second reflected pulse; The second reflected pulse is reflected by the terahertz beam splitter to obtain a third reflected pulse; A transmission sample stage is arranged on the transmission path of the first reflected pulse and is used to place the transmission sample to be measured; the terahertz beam splitter is adjusted 90 degrees counterclockwise, and the first reflected pulse is transmitted through the transmission sample stage to obtain a second transmission pulse; The terahertz detector is arranged on the transmission optical path of the third reflected pulse, and is used for receiving the third reflected pulse or the second transmitted pulse.

2. The transflective terahertz measurement system according to claim 1, characterized in that: The transflective terahertz measurement system further includes: The first collimating lens L1 is used for collimating the terahertz pulse. The first collimating lens L1 is arranged between the terahertz radiation source and the terahertz beam splitter.

3. The transflective terahertz measurement system according to claim 1, characterized in that: The transflective terahertz measurement system further includes: A second collimating lens L2, used for focusing the first reflected pulse, wherein the second collimating lens L2 is arranged between the terahertz beam splitter and the transmission sample stage; The third collimating lens L3 is used to focus the third reflected pulse or the second transmitted pulse. The third collimating lens L3 is arranged between the transmission sample stage and the terahertz detector.

4. The transflective terahertz measurement system according to claim 1, characterized in that: The transflective terahertz measurement system further includes: A driving unit is connected to the terahertz beam splitter and is used to adjust the placement angle of the terahertz beam splitter.

5. The transflective terahertz measurement system according to claim 2, characterized in that: The focal length of the first collimating lens L1 is 25 mm or 50 mm.

6. The transflective terahertz measurement system according to claim 5, characterized in that: The distance value between the real focus of the terahertz radiation source and the first collimating lens L1 is the focal length value of the first collimating lens L1.

7. The transflective terahertz measurement system according to claim 3, characterized in that: The focal lengths of the second collimating lens L2 and the third collimating lens L3 are 100 mm, 150 mm or 200 mm.

8. The transflective terahertz measurement system according to claim 7, characterized in that: The distance between the second collimating lens L2 and the transmission sample stage is equal to the focal length of the second collimating lens L2.

9. The transflective terahertz measurement system according to claim 7, characterized in that: The distance value between the third collimating lens L3 and the transmission sample stage is the focal length value of the third collimating lens L3.

10. A transflective terahertz measurement method, characterized in that: The transflective terahertz measurement method uses the transflective terahertz measurement system according to any one of claims 1 to 9, and the transflective terahertz measurement method comprises: emitting terahertz pulses by a terahertz radiation source; The terahertz beam splitter is arranged on the transmission path of the terahertz pulse, and selects transmission to obtain a first transmission pulse or reflection to obtain a first reflection pulse according to the sample to be tested; When the sample to be measured is placed on the reflective sample stage, the reflective sample stage is arranged on the transmission path of the first transmission pulse, and the first transmission pulse is reflected on the surface of the reflective sample to be measured to obtain a second reflection pulse; The second reflected pulse is reflected by the terahertz beam splitter to obtain a third reflected pulse; The terahertz detector is arranged on the transmission path of the third reflected pulse, and the terahertz detector receives the third reflected pulse; When the sample to be tested is placed on the transmission sample stage, the transmission sample stage is arranged on the transmission path of the first reflected pulse, and the first reflected pulse is transmitted through the transmission sample stage to obtain a second transmitted pulse; The terahertz detector receives the second transmission pulse.

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