quartz tuning fork gyroscope

Abstract

The application provides a quartz tuning fork gyroscope, comprising a tuning fork structure, a first cover plate and a second cover plate; the tuning fork structure is clamped between the first cover plate and the second cover plate, and the tuning fork structure comprises a tuning fork body and an outer frame, and the tuning fork body is built in the outer frame; the tuning fork body comprises a pair of driving parts, a pair of detecting parts, a connecting beam and a coupling beam, one end of the coupling beam is connected with the pair of driving parts, the other end is connected with the pair of detecting parts, and the tuning fork body is connected with the outer frame through the connecting beam; the detecting part comprises a detecting fork finger and a detecting hammer head connected with the detecting fork finger; the detecting fork finger has opposite first opposite surfaces, the first opposite surfaces are provided with first detecting electrodes, the detecting hammer head has opposite second opposite surfaces, and the second opposite surfaces are provided with second detecting electrodes; one side of the first cover plate facing the tuning fork structure is provided with third detecting electrodes, and one side of the second cover plate facing the tuning fork structure is provided with fourth detecting electrodes, so that differential capacitance type detection is realized, and the detection precision of the quartz tuning fork gyroscope is improved.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and more particularly to a quartz tuning fork gyroscope. Background Technology

[0002] Micromechanical gyroscopes, due to their advantages such as small size, light weight, low power consumption, mass production capability, and low cost, are widely used in consumer electronics, aerospace, and other technological fields. With continuous performance improvements, micromechanical gyroscopes have become the core of miniaturized inertial systems and a key component driving the miniaturization of navigation systems.

[0003] Traditional quartz micromechanical gyroscopes are driven by the inverse piezoelectric effect of quartz. They use the piezoelectric effect of quartz to convert angular velocity signals into electrical signals at the detection end for detection. The H-type quartz tuning fork gyroscope structure detects Coriolis force by reading the electrical signal generated by the normal stress of vibration. The detection principle limits the detection accuracy of the gyroscope. Summary of the Invention

[0004] This invention provides a quartz tuning fork gyroscope to solve the problem of poor detection accuracy in existing quartz gyroscopes.

[0005] This invention provides a quartz tuning fork gyroscope, comprising: a tuning fork structure, a first cover plate, and a second cover plate;

[0006] The tuning fork structure is sandwiched between the first cover plate and the second cover plate. The tuning fork structure includes a tuning fork body and an outer frame, with the tuning fork body housed within the outer frame. The tuning fork body includes a pair of driving parts, a pair of detection parts, a connecting beam, and a coupling beam. One end of the coupling beam is connected to the pair of driving parts, and the other end is connected to the pair of detection parts. The tuning fork body is connected to the outer frame via the connecting beam. The detection parts include detection fork fingers and detection hammers connected to the detection fork fingers.

[0007] The detection fork has a first opposing surface, on which a first detection electrode is provided; the detection hammer has a second opposing surface, on which a second detection electrode is provided; the first cover plate has a third detection electrode on the side facing the tuning fork structure, and the second cover plate has a fourth detection electrode on the side facing the tuning fork structure.

[0008] According to the present invention, a quartz tuning fork gyroscope is provided, wherein there are two connecting beams, which are disposed on opposite sides of the coupling beam, one end of the connecting beam is connected to the coupling beam, and the other end is connected to the outer frame.

[0009] According to the present invention, a quartz tuning fork gyroscope is provided, wherein the thickness of the tuning fork structure is H and the width of the connecting beam is S, wherein 1H / 3≤S≤2H / 3.

[0010] According to the present invention, a quartz tuning fork gyroscope is provided in which a first thinning groove is provided on the side of the first cover plate facing the tuning fork structure, and the depth of the first thinning groove is 10-30 μm.

[0011] According to the present invention, a quartz tuning fork gyroscope is provided, wherein the second cover plate is provided with a second thinning groove on the side facing the tuning fork structure, and the depth of the second thinning groove is 10-30 μm.

[0012] According to the present invention, in a quartz tuning fork gyroscope, the contact surfaces of the first cover plate and the outer frame are bonded by glass paste.

[0013] According to the present invention, in a quartz tuning fork gyroscope, the contact surface between the second cover plate and the outer frame is bonded by glass paste.

[0014] According to the present invention, a quartz tuning fork gyroscope is provided in which the circumferential dimension of the first cover plate is larger than the circumferential dimension of the tuning fork structure, and the edge of the first cover plate is provided with a driving electrode lead-out area and a detection electrode lead-out area.

[0015] According to the present invention, a quartz tuning fork gyroscope is provided, wherein the first cover plate, the tuning fork structure and the second cover plate are encapsulated in a tube shell, and the tube shell is made of stainless steel.

[0016] According to the present invention, a quartz tuning fork gyroscope is provided, wherein the driving part includes a driving fork finger and a driving hammer connected to the driving fork finger, and the driving fork finger is provided with a driving electrode.

[0017] The quartz tuning fork gyroscope provided by this invention has a tuning fork structure sandwiched between a first cover plate and a second cover plate. The detection part includes a detection fork finger and a detection hammer. A first detection electrode is provided on the first opposite surface of the detection fork finger, and a second detection electrode is provided on the second opposite surface of the detection hammer. A third detection electrode is provided on the side of the first cover plate facing the tuning fork structure, and a fourth detection electrode is provided on the side of the second cover plate facing the tuning fork structure. The third and fourth detection electrodes are both arranged opposite to the second detection electrode, realizing differential capacitance detection, which is beneficial to improving the detection accuracy of the quartz tuning fork gyroscope. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of the quartz tuning fork gyroscope provided by the present invention;

[0020] Figure 2 This is a schematic diagram of the tuning fork structure provided by the present invention;

[0021] Figure 3 This is a schematic diagram of the structure of the first cover plate provided by the present invention;

[0022] Figure 4 This is a schematic diagram of the structure of the second cover plate provided by the present invention;

[0023] Reference numerals: 100: Tuning fork structure; 11: Driving part; 111: Driving fork finger; 112: Driving hammer head; 12: Detection part; 121: Detection fork finger; 122: Detection hammer head; 1221: Second positive electrode; 13: Coupling beam; 14: Connecting beam; 15: Outer frame; 151: Alignment mark; 200: First cover plate; 21: Third positive electrode; 22: Third positive electrode lead-out area; 23: Third negative electrode; 24: Third negative electrode lead-out area; 25: First thinning groove; 26: First driving electrode lead-out area; 27: Second driving electrode lead-out area; 28: First detection part electrode lead-out area; 29: Second detection part electrode lead-out area; 300: Second cover plate; 31: Fourth positive electrode; 32: Fourth positive electrode lead-out area; 33: Fourth negative electrode; 34: Fourth negative electrode lead-out area; 35: Second thinning groove. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0025] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] The following is combined Figures 1 to 4 This invention describes a quartz tuning fork gyroscope according to an embodiment of the present invention.

[0027] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the quartz tuning fork gyroscope provided in this embodiment of the invention includes: a tuning fork structure 100, a first cover plate 200, and a second cover plate 300; the tuning fork structure 100 is sandwiched between the first cover plate 200 and the second cover plate 300, and the tuning fork structure 100 includes a tuning fork body and an outer frame 15, with the tuning fork body placed inside the outer frame 15; the tuning fork body includes a pair of driving parts 11, a pair of detection parts 12, a connecting beam 14, and a coupling beam 13, with one end of the coupling beam 13 connected to the pair of driving parts 11 and the other end connected to the pair of detection parts 12, and the tuning fork body connected to the outer frame 15 through the connecting beam 14; the detection part 12 includes a detection fork finger 121 and a detection hammer head 122 connected to the detection fork finger 121.

[0028] The detection fork 121 has a first opposing surface with a first detection electrode on the first opposing surface; the detection hammer 122 has a second opposing surface with a second detection electrode on the second opposing surface; the first cover plate 200 has a third detection electrode on the side facing the tuning fork structure 100; and the second cover plate 300 has a fourth detection electrode on the side facing the tuning fork structure 100.

[0029] Specifically, the tuning fork structure 100 is sandwiched between the first cover plate 200 and the second cover plate 300. The dimensions of the first cover plate 200 and the tuning fork structure 100 are matched, that is, the length of the first cover plate 200 is greater than or equal to the length of the tuning fork structure 100, and the width of the first cover plate 200 is greater than or equal to the width of the tuning fork structure 100. The dimensions of the second cover plate 300 and the tuning fork structure 100 are matched, that is, the length of the second cover plate 300 is greater than or equal to the length of the tuning fork structure 100, and the width of the second cover plate 300 is greater than or equal to the width of the tuning fork structure 100.

[0030] The tuning fork structure 100 includes a tuning fork body and an outer frame 15. The tuning fork body is H-shaped, and the outer frame 15 is a hollow square. The tuning fork body is located within the area enclosed by the outer frame 15. The tuning fork body includes a pair of drive parts 11, a pair of detection parts 12, a connecting beam 14, and a coupling beam 13. The coupling beam 13 has a first end and a second end opposite to each other, and a third end and a fourth end opposite to each other. The first end and the second end are defined to extend along a first direction, and the third end and the fourth end extend along a second direction. The first direction and the second direction are perpendicular to each other.

[0031] A pair of drive units 11 are connected to the first end of the coupling beam 13, and a pair of detection units 12 are connected to the second end of the coupling beam 13. Each drive unit 11 includes drive forks 111 and drive hammers 112. The two drive forks 111 are symmetrical with respect to the central axis of the quartz tuning fork gyroscope, and the two corresponding drive hammers 112 are also symmetrical with respect to the central axis of the quartz tuning fork gyroscope. The drive forks 111 are elongated, and the drive hammers 112 are square. Drive electrodes are provided on the drive forks 111, including a first drive electrode and a second drive electrode, with opposite polarities. When energized, the drive electrodes generate an electric field that drives the tuning fork to vibrate.

[0032] The detection unit 12 includes two detection interdigitates 121 and two detection hammers 122. The two detection interdigitates 121 are symmetrical about the central axis of the quartz tuning fork gyroscope, and the two corresponding detection hammers 122 are also symmetrical about the central axis of the quartz tuning fork gyroscope. The detection interdigitates 121 are elongated, and the detection hammers 122 are square. Each detection interdigitate 121 has two opposing sides and two opposing surfaces. The two opposing sides are defined as the first opposing surfaces. A first detection electrode is provided on the first opposing surface, including a first positive electrode and a first negative electrode. Each detection hammer 122 has two opposing surfaces, defined as the second opposing surfaces. A second detection electrode is provided on the second opposing surface, including a second positive electrode 1221. A second positive electrode 1221 is provided on both surfaces of the detection hammer 122.

[0033] A third detection electrode is provided on the side of the first cover plate 200 facing the tuning fork structure 100. The third detection electrode includes a third positive electrode 21 and a third negative electrode 23. The third positive electrode 21 and the third negative electrode 23 are arranged at intervals along the width direction of the first cover plate 200, and the third positive electrode 21 and the third negative electrode 23 are arranged one-to-one with the two second positive electrodes 1221 provided on the two detection hammers 122. A fourth detection electrode is provided on the side of the second cover plate 300 facing the tuning fork structure 100. The fourth detection electrode includes a fourth positive electrode 31 and a fourth negative electrode 33. The fourth positive electrode 31 and the fourth negative electrode 33 are arranged at intervals along the width direction of the second cover plate 300, and the fourth positive electrode 31 and the fourth negative electrode 33 are arranged one-to-one with the other two second positive electrodes 1221 provided on the two detection hammers 122. The third positive electrode 21 and the fourth negative electrode 33 are located on opposite sides of a detection hammer 122, while the third negative electrode 23 and the fourth positive electrode 31 are located on opposite sides of two pairs of other detection hammers 122.

[0034] The first positive and first negative electrodes are located on the two opposite sides of the detection interdigitator, and are used to connect the detection signals. A second positive electrode 1221 is provided on each of the two opposite surfaces of the detection hammer 122, and the second positive electrode 1221 is connected to the first positive electrode. The third positive electrode 21 and the fourth positive electrode 31 are conductive, and the third negative electrode 23 and the fourth negative electrode 33 are conductive, used to detect capacitance.

[0035] Two detection hammers 122 are defined as the first detection hammer and the second detection hammer, respectively. The first detection hammer vibrates towards the third positive electrode 21 near the first cover plate 200, and the second detection hammer vibrates towards the fourth positive electrode 31 near the second cover plate 300. The first detection hammer vibrates towards the fourth negative electrode 33 near the second cover plate 300, and the second detection hammer 122 vibrates towards the third negative electrode 23 near the first cover plate 200. Changes in the distance between the first detection hammer and the first cover plate 200 or between the first detection hammer and the second cover plate 300 will cause changes in capacitance; changes in the distance between the second detection hammer and the second cover plate 300 or between the second detection hammer and the first cover plate 200 will also cause changes in capacitance. Based on the changes in capacitance, differential capacitance detection is achieved. Compared with traditional piezoelectric effect detection, the detection accuracy is higher, and the size of the tuning fork gyroscope is not increased.

[0036] In this embodiment of the invention, the tuning fork structure 100 is sandwiched between the first cover plate 200 and the second cover plate 300. The detection unit 12 includes a detection fork finger 121 and a detection hammer head 122. A first detection electrode is provided on the first opposite surface of the detection fork finger 121, and a second detection electrode is provided on the second opposite surface of the detection hammer head 122. A third detection electrode is provided on the side of the first cover plate 200 facing the tuning fork structure 100, and a fourth detection electrode is provided on the side of the second cover plate 300 facing the tuning fork structure 100. The third and fourth detection electrodes are arranged opposite to the second detection electrode to realize differential capacitance detection, which is beneficial to improving the detection accuracy of the quartz tuning fork gyroscope.

[0037] like Figure 2 As shown, in an optional embodiment, there are two connecting beams 14, which are located on opposite sides of the coupling beam 13. One end of the connecting beam 14 is connected to the coupling beam 13, and the other end is connected to the outer frame 15.

[0038] Specifically, one end of the connecting beam 14 is connected to the coupling beam 13, and the other end of the connecting beam 14 is provided with a base anchor point, which is bonded and fixed to the outer frame 15 with conductive silver glue. There are two connecting beams 14, positioned along the second direction on opposite sides of the coupling beam 13, connecting the tuning fork body to the outer frame 15. Using two connecting beams 14, while ensuring the connection between the tuning fork body and the outer frame 15, helps reduce resistance and facilitates the transmission of vibration from the coupling beam 13 to the detection unit 12. Drive signals and detection signals are led out via leads on the connecting beams 14.

[0039] In an optional embodiment, the thickness of the tuning fork structure 100 is H, and the width of the connecting beam 14 is S, wherein 1H / 3≤S≤2H / 3.

[0040] Specifically, the thickness of the tuning fork structure 100 is H, for example, the thickness of the tuning fork structure 100 is 300-400 micrometers. The width S of the connecting beam 14 needs to meet certain dimensional requirements. The tuning fork body is connected to the outer frame 15 through two connecting beams 14. If the width of the connecting beam 14 is too narrow, the connecting beam 14 is prone to breakage; if the width of the connecting beam 14 is too large, the rigidity of the connecting beam 14 is too large, resulting in large energy loss and reduced sensitivity. The width range of the connecting beam 14 is 1H / 3≤S≤2H / 3. For example, if the thickness of the tuning fork structure 100 is 300 micrometers, the width range of the connecting beam 14 is 100-200 micrometers. Within this dimensional range, both connection strength and detection sensitivity can be guaranteed.

[0041] like Figure 3 As shown, in an optional embodiment, the first cover plate 200 has a first thinning groove 25 on the side facing the tuning fork structure 100, and the depth of the first thinning groove 25 is 10 to 30 μm.

[0042] Specifically, the first cover plate 200 has a first thinning groove 25 on the side facing the tuning fork structure 100. At least a portion of the first thinning groove 25 corresponds to the area of ​​the two detection sections 12. A third positive electrode 21 and a third negative electrode 23 are spaced apart on the bottom surface of the first thinning groove 25. The first thinning groove 25 can also correspond to the entire area of ​​the tuning fork body, or the area enclosed by the inner wall of the outer frame 15. This allows for lightweight design while facilitating the connection between the tuning fork structure 100 and the first cover plate 200. The depth of the first thinning groove 25 is 10-30 micrometers. The first thinning groove 25 prevents interference between the detection hammer 122 and the detection fork finger 121 and the first cover plate 200 when the detection section 12 vibrates, providing vibration space for the detection section 12 and contributing to the lightweight design of the quartz tuning fork gyroscope.

[0043] like Figure 4As shown, in an optional embodiment, the second cover plate 300 has a second thinning groove 35 on the side facing the tuning fork structure 100, and the depth of the second thinning groove 35 is 10 to 30 μm.

[0044] Specifically, the second cover plate 300 has a second thinning groove 35 on the side facing the tuning fork structure 100. At least a portion of the second thinning groove 35 corresponds to the area of ​​the two detection sections 12. A fourth positive electrode 31 and a fourth negative electrode 33 are spaced apart on the bottom surface of the second thinning groove 35. The second thinning groove 35 can also correspond to the entire area of ​​the tuning fork body, or the area enclosed by the inner wall of the outer frame 15. This allows for lightweight design while facilitating the connection between the tuning fork structure 100 and the second cover plate 300. The depth of the second thinning groove 35 is 10-30 micrometers. The second thinning groove 35 prevents interference between the detection hammer 122 and the detection fork finger 121 and the second cover plate 300 when the detection section 12 vibrates, providing vibration space for the detection section 12 and contributing to the lightweight design of the quartz tuning fork gyroscope.

[0045] In an optional embodiment, the contact surfaces of the first cover plate 200 and the outer frame 15 are bonded by glass paste.

[0046] Specifically, the outer frame 15 has two opposing surfaces, defined as the surface facing the first cover plate 200 as the first surface and the surface facing the second cover plate 300 as the second surface. The contact surface between the first surface of the outer frame 15 and the first cover plate 200 is bonded by glass paste. Glass paste bonding is an hermetically sealed packaging technology that uses low-melting-point glass as the bonding intermediate layer, and has advantages such as excellent airtightness, low bonding temperature, and easy bonding interface wire connection.

[0047] In an optional embodiment, the contact surfaces of the second cover plate 300 and the outer frame 15 are bonded by glass paste.

[0048] Specifically, after the first surface of the outer frame 15 and the contact surface of the first cover plate 200 are bonded together with glass paste, the second surface of the outer frame 15 and the contact surface of the second cover plate 300 are also bonded together with glass paste. Since both opposite surfaces of the outer frame 15 are bonded to the first cover plate 200 and the second cover plate 300 with glass paste, the sealing of the tuning fork body is fully guaranteed, which in turn helps to ensure the accuracy of the test.

[0049] like Figure 1 and Figure 3 As shown, in an optional embodiment, the circumferential dimension of the first cover plate 200 is larger than the circumferential dimension of the tuning fork structure 100, and the edge of the first cover plate 200 is provided with a driving electrode lead-out area and a detection electrode lead-out area.

[0050] Specifically, the circumferential dimension of the first cover plate 200 is greater than the circumferential dimension of the tuning fork structure 100, and the tuning fork body is located in the area enclosed by the inner wall surface of the outer frame 15. That is, the circumferential dimension of the first cover plate 200 is greater than the circumferential dimension of the outer frame 15, the length of the first cover plate 200 is greater than the length of the outer frame 15, and the width of the first cover plate 200 is greater than the width of the outer frame 15.

[0051] The outer frame 15 is a hollow cuboid, and the first cover plate 200 is also a cuboid. The area on the first cover plate 200 between the area in contact with the outer frame 15 and the end face of the first cover plate 200 is defined as the edge area of ​​the first cover plate 200 along the width direction. The first cover plate 200 has a first edge area and a second edge area.

[0052] For example, a first driving electrode lead-out area 26 and a second driving electrode lead-out area 27 are provided at intervals corresponding to a connecting beam 14 in the first edge region. The driving fork 111 is provided with a first driving electrode and a second driving electrode, which have opposite polarities. Lead-out lines are provided on opposite sides of the connecting beam 14. The first driving electrode is connected to the first driving electrode lead-out area 26 via the lead-out lines on the connecting beam 14. The second driving electrode is connected to the second driving electrode lead-out area 27 via the lead-out lines on the connecting beam 14. The first driving electrode lead-out area 26 and the second driving electrode lead-out area 27 are used to extract the driving signal.

[0053] The second edge region, corresponding to another connecting beam 14, has a first detection electrode lead-out area 28 and a second detection electrode lead-out area 29 spaced apart. One of the first detection electrode lead-out areas 28 and 29 is connected to the first positive electrode of the first detection electrode, and the other is connected to the first negative electrode of the first detection electrode. For example, the first detection electrode lead-out area 28 is connected to the first positive electrode, and the second detection electrode lead-out area 29 is connected to the first negative electrode, to realize the extraction of detection signals.

[0054] At the bottom of the first cover plate 200, corresponding to the two detection hammers 122, a third positive electrode 21 and a third negative electrode 23 are spaced apart. The relative positions of the third positive electrode 21 and the third negative electrode 23 on the first cover plate 200 are set according to actual needs. For example, the third positive electrode 21 is close to the second edge region, and a third positive electrode lead-out area 22 is provided at the second edge region corresponding to the third positive electrode 21. The third positive electrode 21 is connected to the third positive electrode lead-out area 22 through a lead wire. The third negative electrode 23 is close to the first edge region, and a third negative electrode lead-out area 24 is provided at the first edge region corresponding to the third negative electrode 23. The third negative electrode 23 is connected to the third negative electrode lead-out area 24 through a lead wire.

[0055] At the bottom of the second cover plate 300, corresponding to the two detection hammers 122, a fourth positive electrode 31 and a fourth negative electrode 33 are spaced apart. The relative positions of the fourth positive electrode 31 and the fourth negative electrode 33 on the second cover plate 300 are set according to actual needs. Along the width direction of the second cover plate 300, a fourth positive electrode lead-out area 32 and a fourth negative electrode lead-out area 34 are respectively provided on the two edges of the second cover plate 300. The fourth positive electrode lead-out area 32 is located close to the fourth negative electrode 33, and the fourth negative electrode lead-out area 34 is located close to the fourth positive electrode 31. The fourth positive electrode 31 is connected to the fourth positive electrode lead-out area 32 through a lead wire, and the fourth negative electrode 33 is connected to the fourth negative electrode lead-out area 34 through a lead wire.

[0056] The third positive electrode lead-out region 22 and the fourth positive electrode lead-out region 32 are connected, enabling the third positive electrode 21 and the fourth positive electrode 31 to conduct; the third negative electrode lead-out region 24 and the fourth negative electrode lead-out region 34 are connected, enabling the third negative electrode 23 and the fourth negative electrode 33 to conduct. This allows a differential capacitor to be formed between the detection hammer 122, the first cover plate 200 and the second cover plate 300, in order to detect changes in capacitance.

[0057] After the first cover plate 200, tuning fork structure 100, and second cover plate 300 are assembled, they are encapsulated in the tube shell. The first driving electrode lead-out area 26 and the second driving electrode lead-out area 27 are led out to the test pin of the tube shell by gold wire bonding, and the first detection electrode lead-out area 28 and the second detection electrode lead-out area 29 are led out to the test pin of the tube shell by gold wire bonding.

[0058] In this embodiment of the invention, the circumferential dimension of the first cover plate 200 is larger than the circumferential dimension of the tuning fork structure 100, and the driving electrode lead-out area and the detection electrode lead-out area are located in the two edge areas of the first cover plate 200, which is beneficial to the rational layout of the circuit.

[0059] In an optional embodiment, the first cover plate 200, the tuning fork structure 100, and the second cover plate 300 are encapsulated in a housing, the housing being made of stainless steel.

[0060] Specifically, after the first cover plate 200, tuning fork structure 100, and second cover plate 300 are assembled, they are encapsulated in a tube shell. The first cover plate 200, tuning fork body, outer frame 15, and second cover plate 300 are all made of quartz, with matching coefficients of thermal expansion. The tube shell is made of materials such as stainless steel, ceramic, or Kovar alloy. Kovar alloy refers to nickel-based high-temperature corrosion-resistant alloys. For example, if the tube shell is made of stainless steel, the coefficient of thermal expansion of stainless steel is close to that of quartz, which is beneficial for optimizing the full-temperature performance of the quartz tuning fork gyroscope and ensuring measurement accuracy.

[0061] like Figure 2 , Figure 3 and Figure 4As shown, in an optional embodiment, alignment marks 151 are provided between the tuning fork structure 100, the first cover plate 200, and the second cover plate 300. During installation, this facilitates accurate alignment of the detection electrodes of the first cover plate 200 and the second cover plate 300 with the detection electrodes of the detection hammer head 122. For example, alignment marks 151 are provided at the two edges of the bottom of the outer frame 15 along the width direction of the outer frame 15. The alignment marks 151 cover the surface area and side area of ​​the outer frame 15, and the two alignment marks 151 correspond one-to-one with the third positive electrode lead-out area 22 and the third negative electrode lead-out area 24 on the first cover plate 200, respectively. When assembling the tuning fork structure 100 and the first cover plate 200, the two alignment marks 151 are first aligned with the third positive electrode lead-out area 22 and the third negative electrode lead-out area 24, respectively. Thus, after the tuning fork structure 100 and the first cover plate 200 are assembled, it can be ensured that the second positive electrode 1221 on the two detection hammers 122 on the tuning fork body corresponds to the third positive electrode 21 and the third negative electrode 23 on the first cover plate 200.

[0062] The fourth positive electrode lead-out area 32 and the fourth negative electrode lead-out area 34 on the second cover plate 300 correspond one-to-one with the two alignment marks 151. When assembling the second cover plate 300 and the tuning fork structure 100, the fourth positive electrode lead-out area 32 and the fourth negative electrode lead-out area 34 are first aligned one-to-one with the alignment marks 151 areas on the side of the outer frame 15. Thus, after the second cover plate 300 and the tuning fork structure 100 are assembled, it can be ensured that the second positive electrode 1221 on the two detection hammers 122 on the tuning fork body corresponds to the fourth positive electrode 31 and the fourth negative electrode 33 on the second cover plate 300.

[0063] like Figure 2 As shown, in an optional embodiment, the driving unit 11 includes a driving fork 111 and a driving hammer 112 connected to the driving fork 111, and the driving fork 111 is provided with a driving electrode.

[0064] Specifically, the driving fork 111 is elongated, and the driving hammer 112 is square. The driving fork 111 is equipped with driving electrodes, including a first driving electrode and a second driving electrode, which have opposite polarities. The driving fork 111 has two opposing surfaces and two opposing side surfaces. One of the first and second driving electrodes is located on the two opposing surfaces of the driving fork 111, and the other is located on the two opposing side surfaces. When the driving electrodes are energized, they form an electric field that reliably drives the tuning fork to vibrate.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A quartz tuning fork gyroscope, characterized in that, include: Tuning fork structure, first cover plate and second cover plate; The tuning fork structure is sandwiched between the first cover plate and the second cover plate. The tuning fork structure includes a tuning fork body and an outer frame, with the tuning fork body housed within the outer frame. The tuning fork body includes a pair of driving parts, a pair of detection parts, a connecting beam, and a coupling beam. One end of the coupling beam is connected to the pair of driving parts, and the other end is connected to the pair of detection parts. The tuning fork body is connected to the outer frame via the connecting beam. The detection parts include detection fork fingers and detection hammers connected to the detection fork fingers. The detection fork has a first opposing surface, on which a first detection electrode is provided; the detection hammer has a second opposing surface, on which a second detection electrode is provided; the first cover plate has a third detection electrode on the side facing the tuning fork structure, and the second cover plate has a fourth detection electrode on the side facing the tuning fork structure.

2. The quartz tuning fork gyroscope according to claim 1, characterized in that, The number of connecting beams is two, and the two connecting beams are located on opposite sides of the coupling beam. One end of the connecting beam is connected to the coupling beam, and the other end is connected to the outer frame.

3. The quartz tuning fork gyroscope according to claim 1, characterized in that, The thickness of the tuning fork structure is H, and the width of the connecting beam is S, wherein 1H / 3≤S≤2H / 3.

4. The quartz tuning fork gyroscope according to claim 1, characterized in that, The first cover plate has a first thinning groove on the side facing the tuning fork structure, and the depth of the first thinning groove is 10 to 30 μm.

5. The quartz tuning fork gyroscope according to claim 1, characterized in that, The second cover plate has a second thinning groove on the side facing the tuning fork structure, and the depth of the second thinning groove is 10-30 μm.

6. The quartz tuning fork gyroscope according to claim 1, characterized in that, The contact surfaces of the first cover plate and the outer frame are bonded together with glass paste.

7. The quartz tuning fork gyroscope according to claim 1, characterized in that, The contact surfaces of the second cover plate and the outer frame are bonded together with glass paste.

8. The quartz tuning fork gyroscope according to claim 1, characterized in that, The circumferential dimension of the first cover plate is larger than the circumferential dimension of the tuning fork structure, and the edge of the first cover plate is provided with a driving electrode lead-out area and a detection electrode lead-out area.

9. The quartz tuning fork gyroscope according to claim 1, characterized in that, The first cover plate, the tuning fork structure, and the second cover plate are encapsulated in a tube shell, the tube shell being made of stainless steel.

10. The quartz tuning fork gyroscope according to claim 1, characterized in that, The driving unit includes a driving fork finger and a driving hammer head connected to the driving fork finger, and the driving fork finger is provided with a driving electrode.

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