Touch substrate, manufacturing method thereof, and touch display device

Abstract

Embodiments of the present invention disclose a touch substrate, a method for manufacturing the same, and a touch display device, relating to the field of display technology. The touch substrate is used to reduce the resistance of touch traces and the probability of metal corrosion in the touch traces, thereby improving overall yield. The touch substrate includes: a plurality of first touch electrodes and a plurality of second touch electrodes; at least one of the first touch electrodes and the second touch electrodes includes a double-layer metal wire, the double-layer metal wire including a first layer of metal wire and a second layer of metal wire electrically connected to each other. The touch substrate provided by the present invention can be used in touch display devices.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and in particular to a touch substrate and a manufacturing method thereof, and a touch display device. Background Art

[0002] With the advancement of information and communication technologies, electronic devices with touch functions, such as mobile phones, tablet computers, portable computers, and monitors, have become indispensable equipment in people's daily lives.

[0003] The Flexible Multi-Layer On Cell (FMLOC) design is currently widely used in the OLED touch display field. FMLOC involves fabricating a metal grid electrode layer on the display panel's package driver backplane for touch control, eliminating the need for an external TSP (Touch Screen Panel). This process reduces screen thickness, facilitating foldable displays, while also improving yield and reducing costs.

[0004] However, when touch sensing panels designed using the FMLOC process are applied to large-size touch screens such as automotive touch screens and medical touch screens, the problem of large touch line resistance is prone to occur. Summary of the Invention

[0005] The present invention aims to provide a touch substrate and a manufacturing method thereof, and a touch display device, which are used to reduce the resistance of touch lines and the probability of metal corrosion in the touch lines, thereby improving the overall yield.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] On the one hand, some embodiments of the present invention provide a touch substrate, comprising: a substrate; a plurality of first touch electrodes and a plurality of second touch electrodes located on the same side of the substrate and arranged in an intersecting manner; and an insulating layer, comprising a first insulating portion and a second insulating portion. The first insulating portion is located at the intersection of the plurality of first touch electrodes and the plurality of second touch electrodes, so as to insulate the plurality of first touch electrodes and the plurality of second touch electrodes from each other at the intersection. The second insulating portion is located in an area outside the intersection. At least one of the first touch electrode and the second touch electrode comprises a double-layer metal wire, the double-layer metal wire comprising a first layer metal wire and a second layer metal wire electrically connected to each other, and the second insulating portion is located between the first layer metal wire and the second layer metal wire.

[0008] In some embodiments, the second insulating portion at least covers the first layer of metal wire away from the top surface of the substrate; and the second layer of metal wire completely covers the second insulating portion.

[0009] In some embodiments, the second layer of metal wire is electrically connected to at least a portion of the side surface of the first layer of metal wire connected to the top surface; and / or, at least one via is provided on the second insulating portion, and the first layer of metal wire and the second layer of metal wire are electrically connected through at least one via on the second insulating portion.

[0010] In some embodiments, the second insulating portion also covers the side surface of the first layer of metal wire connected to the top surface; at least one via is provided on the second insulating portion, and the first layer of metal wire and the second layer of metal wire are electrically connected through at least one via on the second insulating portion.

[0011] In some embodiments, the touch substrate further includes a buffer layer located between the substrate and the first layer of metal wires; wherein the buffer layer includes a plurality of opening areas; and two adjacent opening areas are separated by the second layer of metal wires.

[0012] In some embodiments, the touch substrate further includes: an etching protection layer located on a surface of the insulating layer close to the second metal line; wherein the insulating layer is made of an organic material, and the etching protection layer is made of an inorganic material.

[0013] In some embodiments, the first touch electrode includes a first electrode strip located on a first side of the insulating layer, the second touch electrode includes a plurality of electrode blocks located on the first side of the insulating layer, and two adjacent electrode blocks are separated by one first electrode strip; the second touch electrode also includes a plurality of bridging portions located on a second side of the insulating layer, and one bridging portion electrically connects two adjacent electrode blocks to form a second electrode strip.

[0014] In some embodiments, the first touch electrode further includes a first conductive portion located on the second side of the insulating layer, and the first conductive portion is electrically connected to the first electrode strip through at least one via hole on the second insulating portion.

[0015] In some embodiments, the first conductive portion, the first electrode strip, and the portion of the second insulating portion located between the first conductive portion and the first electrode strip are all in a grid shape; the first side of the insulating layer is the side close to the substrate, and the first conductive portion and the portion of the first electrode strip covered by the first conductive portion constitute the double-layer metal wire.

[0016] In some embodiments, the second touch electrode further includes a second conductive portion located on a second side of the insulating layer, and the second conductive portion is electrically connected to the electrode block through at least one via hole on the second insulating portion.

[0017] In some embodiments, the second conductive portion, the electrode block, and the portion of the second insulating portion located between the second conductive portion and the electrode block are all grid-shaped; the first side of the insulating layer is the side close to the substrate, and the second conductive portion and the portion of the electrode block covered by the second conductive portion constitute the double-layer metal wire.

[0018] In some embodiments, the bridging portion is in a grid shape.

[0019] In some embodiments, the first insulating portion is in a grid shape.

[0020] On the other hand, a method for preparing a touch substrate is provided, the method comprising: providing a substrate; forming a plurality of first touch electrodes, an insulating layer and a plurality of second touch electrodes on the substrate; wherein the insulating layer comprises a first insulating portion and a second insulating portion; the first insulating portion is located at the intersection of the plurality of first touch electrodes and the plurality of second touch electrodes, so as to insulate the plurality of first touch electrodes and the plurality of second touch electrodes from each other at the intersection; the second insulating portion is located in an area outside the intersection; at least one of the first touch electrode and the second touch electrode comprises a double-layer metal wire, the double-layer metal wire comprising a first-layer metal wire located on a side of the second insulating portion close to the substrate and a second-layer metal wire located on a side of the second insulating portion away from the substrate; the second insulating portion is provided with at least one via, and the first-layer metal wire and the second-layer metal wire are electrically connected through the at least one via.

[0021] In some embodiments, the second insulating portion completely covers the first layer of metal wires at least in the width direction of the first layer of metal wires; the second layer of metal wires completely covers the second insulating portion at least in the width direction; before the step of forming a plurality of first touch electrodes, an insulating layer and a plurality of second touch electrodes on the substrate, it also includes: forming a buffer layer on the substrate; wherein the buffer layer has a plurality of opening areas; the second layer of metal wires and the plurality of opening areas are formed by a single patterning process.

[0022] In some embodiments, before forming the second layer of metal wires, the manufacturing method further includes: forming an etching protection layer on a surface of the insulating layer on a side away from the substrate.

[0023] In another aspect, a touch display device is provided, comprising the above-mentioned touch substrate.

[0024] The touch substrate, its manufacturing method, and touch display device provided by the present invention have the following beneficial effects:

[0025] The touch substrate provided by the present invention has a double-layer metal wire, in which at least one of the first touch electrode and the second touch electrode comprises a double-layer metal wire, and the first-layer metal wire and the second-layer metal wire are electrically connected, thereby reducing the resistance of the touch wiring. The low-resistance characteristic enables it to be well used in large-size touch screens such as vehicle-mounted touch screens and medical touch screens, so that large-size touch screens still have high sensitivity and excellent display effects.

[0026] The beneficial effects achieved by the method for manufacturing the touch substrate and the touch display device provided by the present invention are similar to the beneficial effects achieved by the display panel provided by the above technical solution, and are not described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 is a structural diagram of a touch display device according to some embodiments;

[0029] Figure 2 is a structural diagram of another touch display device according to some embodiments;

[0030] Figure 3 is a structural diagram of a touch substrate according to some embodiments;

[0031] Figure 4 for Figure 3 Cross-section view along the A-A' direction;

[0032] Figure 5 is a structural diagram of another touch substrate according to some embodiments;

[0033] Figure 6 for Figure 5 Cross-section in the direction of B-B';

[0034] Figure 7 is a structural diagram of another touch substrate according to some embodiments;

[0035] Figure 8 for Figure 7 The structure diagram of the first layer of metal wires at position C in the middle;

[0036] Figure 9 for Figure 7 The structure diagram of the first layer of metal wire and the second insulating part at position C in the middle;

[0037] Figure 10for Figure 7 Structural diagram of the first layer of metal wire, the second insulating portion, and the second layer of metal wire at position C in the middle;

[0038] Figure 11 for Figure 10 Cross-section in the direction D-D';

[0039] Figure 12 for Figure 10 Cross-section in E-E' direction;

[0040] Figure 13 is a cross-sectional view of another touch substrate according to some embodiments;

[0041] Figure 14 is a cross-sectional view of another touch substrate according to some embodiments;

[0042] Figure 15 is a cross-sectional view of another touch substrate according to some embodiments;

[0043] Figure 16 is a flow chart of a method for preparing a touch substrate according to some embodiments. DETAILED DESCRIPTION

[0044] The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions in some embodiments of the present invention. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments provided by the present invention, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of the present invention.

[0045] Unless the context requires otherwise, throughout the specification and claims, the term "comprise" and its other forms, such as the third person singular form "comprises" and the present participle form "comprising", are to be interpreted as open and inclusive, that is, "including, but not limited to". In the description of the specification, the terms "one embodiment", "some embodiments", "exemplary embodiments", "example", "specific example" or "some examples" are intended to indicate that a particular feature, structure, material or characteristic associated with the embodiment or example is included in at least one embodiment or example of the present invention. The schematic representation of the above terms does not necessarily refer to the same embodiment or example. In addition, the particular features, structures, materials or characteristics may be included in any one or more embodiments or examples in any appropriate manner.

[0046] In the following, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present invention, unless otherwise specified, "plurality" means two or more.

[0047] When describing some embodiments, the expressions "coupled" and "connected" and their derivatives may be used. For example, when describing some embodiments, the term "connected" may be used to indicate that two or more components are in direct physical or electrical contact with each other. For another example, when describing some embodiments, the term "coupled" may be used to indicate that two or more components are in direct physical or electrical contact. However, the term "coupled" or "communicatively coupled" may also refer to two or more components that are not in direct contact with each other, but still cooperate or interact with each other. The embodiments disclosed herein are not necessarily limited to the contents of this document.

[0048] Exemplary embodiments are described herein with reference to cross-sectional and / or plan views that are idealized exemplary drawings. In the drawings, the thicknesses of layers and regions are exaggerated for clarity. Therefore, variations in shape relative to the drawings due to, for example, manufacturing techniques and / or tolerances are contemplated. Therefore, the exemplary embodiments should not be construed as limited to the shapes of the regions shown herein, but rather include deviations in shape due to, for example, manufacturing. For example, an etched region shown as a rectangle will typically have curved features. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to illustrate the actual shape of regions of the device and are not intended to limit the scope of the exemplary embodiments.

[0049] See Figure 1 and Figure 2 Some embodiments of the present invention provide a touch display device 200. The type of the touch display device 200 is not limited and may be a liquid crystal display (LCD) or an electroluminescent touch display. If the touch display device 200 is an electroluminescent touch display, the electroluminescent touch display may be an organic light-emitting diode (OLED) or a quantum dot light-emitting diode (QLED).

[0050] The touch display device 200 may be a display, a television, a digital camera, a mobile phone, a tablet computer, an electronic photo frame, or any other product or component with touch and display functions.

[0051] like Figure 1 and Figure 2 As shown, the touch display device 200 may include a housing 1, a cover plate 2, a display panel 3, a circuit board 4, and a touch substrate 100. In the case that the touch display device 200 is a liquid crystal touch display device, the touch display device 200 further includes a backlight assembly. Figure 1 and Figure 2 The backlight assembly is not shown.

[0052] The housing 1 may have a U-shaped longitudinal cross-section, with the display panel 3, circuit board 4, and other components disposed within the housing 1. The circuit board 4 is disposed below the display panel 3, and the cover 2 is disposed on a side of the display panel 3 away from the circuit board 4. If the touch display device 200 is a liquid crystal touch display device including a backlight assembly, the backlight assembly is disposed between the display panel 3 and the circuit board 4.

[0053] In some embodiments, as Figure 1 As shown, the touch substrate 100 is disposed on the light-emitting side surface of the display panel 3. In some examples, the display panel 3 is a liquid crystal display panel, which includes an array substrate and an opposing substrate disposed oppositely. The opposing substrate serves as the substrate for the touch substrate 100. In other examples, the display panel 3 is a self-luminous display panel, which includes a display substrate and an encapsulation layer for encapsulating the display substrate (here, the encapsulation layer can be an encapsulation film or an encapsulation substrate). The encapsulation layer serves as the substrate for the touch substrate 100.

[0054] In other embodiments, Figure 2 As shown, the touch control substrate 100 is disposed on the cover plate 2 and on a surface close to the display panel 3. Exemplarily, the cover plate 2 is reused as a substrate for the touch control substrate 100.

[0055] See also Figure 3 、 Figure 5 and Figure 7 Some embodiments of the present invention provide a touch substrate 100, which can be applied to the above-mentioned touch display device 200. Of course, the touch substrate 100 can also be applied to other touch devices.

[0056] The touch substrate 100 includes a substrate 110 and a plurality of first touch electrodes 111 and a plurality of second touch electrodes 112 located on the same side of the substrate 110 .

[0057] The first touch electrodes 111 and the second touch electrodes 112 are arranged to cross each other, and the crossing positions are insulated from each other by the insulating layer 120 .

[0058] Here, there is no limitation on the shape and quantity of the first touch electrodes 111 and the second touch electrodes 112. The shape and quantity of each first touch electrode 111 and each second touch electrode 112 can be selected according to actual needs, as long as the position of the touch point can be determined by detecting capacitance.

[0059] There is no limitation on the types of the first touch electrode 111 and the second touch electrode 112. The first touch electrode 111 may be a driving electrode Tx (Transmit, touch transmitting electrode) and the second touch electrode 112 may be a sensing electrode Rx (Receive, touch receiving electrode); or the first touch electrode 111 may be Rx and the second touch electrode 112 may be Tx.

[0060] It should be noted that the first touch electrodes 111 and the second touch electrodes 112 are arranged crosswise. The first touch electrodes 111 and the second touch electrodes 112 may be perpendicular to each other, or the angle between the first touch electrodes 111 and the second touch electrodes 112 may be an acute angle. The drawings of the embodiments of the present invention illustrate the first touch electrodes 111 and the second touch electrodes 112 as perpendicular to each other.

[0061] Figure 4 for Figure 3 Cross-section view along the A-A' direction; Figure 6 for Figure 5 Cross-section view along the B-B' direction. Figure 4 and Figure 6 The insulating layer 120 includes a first insulating portion 1201. The first insulating portion 1201 is located at the intersection of the plurality of first touch electrodes 111 and the plurality of second touch electrodes 112, so that the plurality of first touch electrodes 111 and the plurality of second touch electrodes 112 are insulated from each other at the intersection by the first insulating portion 1201.

[0062] See Figure 7 and Figure 9 The insulating layer 120 further includes a second insulating portion 1202 . The second insulating portion 1202 is located in a region other than intersections of the plurality of first touch electrodes 111 and the plurality of second touch electrodes 112 .

[0063] The material of the insulating layer 120 can be selected and set according to actual conditions, and the embodiments of the present disclosure do not limit this. For example, the material of the insulating layer 120 can be an organic material. Since organic materials have better flexibility than inorganic materials, the flexibility of the touch substrate 100 can be effectively improved.

[0064] See also Figure 3 、 Figure 5 ,as well as Figures 7 to 12 At least one of the first touch electrode 111 and the second touch electrode 112 includes a double-layer metal wire 13 , and the double-layer metal wire 13 includes a first-layer metal wire 131 and a second-layer metal wire 132 electrically connected to each other.

[0065] The first layer of metal wires 131 is located on a side of the second insulating portion 1202 close to the substrate 110 ; the second layer of metal wires 132 is located on a side of the second insulating portion 1202 away from the substrate 110 .

[0066] It should be noted that the above “at least one of the first touch electrode 111 and the second touch electrode 112 includes a double-layer metal wire 13” means that in some examples, one or at least two first touch electrodes 111 include a double-layer metal wire 13, that is, Figure 3 In other examples, the second touch electrode 112 includes a double-layer metal wire 13, that is, Figure 5 In some other examples, the first touch electrode 111 and the second touch electrode 112 both include a double-layer metal wire 13, that is, Figure 7 shown.

[0067] In the touch substrate 100 provided by some embodiments of the present invention, since at least one of the first touch electrode 111 and the second touch electrode 112 includes a double-layer metal wire 13, the first metal wire 131 and the second metal wire 132 of the double-layer metal wire 13 are electrically connected, thereby reducing the resistance of the touch wiring. The low resistance characteristic makes the touch substrate well suited for large-size touch screens such as automotive touch screens and medical touch screens, allowing large-size touch screens to still have high sensitivity and excellent display effects.

[0068] In some embodiments, as Figure 3 As shown, the first touch electrode 111 includes a first electrode bar 1111 , and the second touch electrode 112 includes a plurality of electrode blocks 112 a separated by a plurality of first electrode bars 1111 and a plurality of bridge portions 112 b .

[0069] Figure 4 for Figure 3 Cross-section view along the A-A' direction. Figure 4 The first electrode strip 1111 and the electrode block 112a are arranged in the same layer, and the electrode block 112a and the bridge portion 112b are located on both sides of the insulating layer 120. The two electrode blocks 112a are electrically connected through a bridge portion 112b to form a second electrode strip 1121.

[0070] Here, the connection method between the electrode block 112a and the bridge portion 112b can be selected and set according to actual conditions, and the embodiments of the present disclosure do not limit this. In some examples, the two ends of the bridge portion 112b are electrically connected to the electrode block 112a respectively. In other examples, a plurality of vias T2 are provided on the first insulating portion 1201, and the bridge portion 112b electrically connects two adjacent electrode blocks through at least two vias T2. It will be understood by those skilled in the art that the above two electrical connection methods can exist simultaneously in the same embodiment, that is, Figure 4 shown.

[0071] It should be noted that the above-mentioned “plurality” refers to two or more; similarly, “plurality” refers to two or more.

[0072] Since two adjacent electrode blocks 112a separated by the first electrode strip 1111 are connected by a bridge portion 112b, and since the first touch electrode 111 and the bridge portion 112b are insulated from each other, a capacitor is formed in the area where the first touch electrode 111 and the bridge portion 112b intersect. When a conductor (such as a finger) touches the intersection area, the original capacitance of the area is changed; by detecting the change in capacitance, the position of the touch point is obtained.

[0073] Furthermore, "same-layer arrangement" refers to a layer structure formed by using the same film-forming process to form a film layer with a specific pattern, and then using the same mask through a single patterning process. Depending on the specific pattern, the same patterning process may include multiple exposure, development, or etching processes, and the specific pattern in the resulting layer structure may be continuous or discontinuous, and these specific patterns may also be at different heights or have different thicknesses.

[0074] In some embodiments of the present invention, continue to refer to Figure 3 The first touch electrode 111 further includes a first conductive portion 1112 located on the second side of the insulating layer 120 .

[0075] The first conductive portion 1112 is electrically connected to the first electrode strip 1111 .

[0076] The first conductive portion 1112 and the bridge portion 112b may be provided in the same layer.

[0077] Here, there is no limit on the number of first conductive portions 1112. For example, the first touch electrode 111 may include multiple first conductive portions 1112, and the first conductive portion 1112 may be disposed between two adjacent bridge portions 112b along the extending direction of the first electrode strip 1111. That is, two adjacent first conductive portions 1112 are separated by one bridge portion 112b.

[0078] It should be noted that the first side of the insulating layer 120 is the side close to the substrate 110 .

[0079] The first conductive portion 1112 and the portion of the first electrode strip 1111 covered by the first conductive portion 1112 constitute a double-layer metal wire 13. In this case, the first conductive portion 1112 serves as the second-layer metal wire 132, and the portion of the first electrode strip 1111 covered by the first conductive portion 1112 serves as the first-layer metal wire 131.

[0080] Here, the connection method of the first layer metal wire 131 and the second layer metal wire 132 can be selected and set according to actual conditions, and the embodiments of the present disclosure are not limited to this. Exemplarily, at least one via T11 is provided on the second insulating portion 1202, and the first layer metal wire 131 and the second layer metal wire 132 are electrically connected through the at least one via T11.

[0081] In other embodiments, Figure 5 As shown, the second touch electrode 112 further includes a second conductive portion 1122 located on the second side of the insulating layer 120 .

[0082] The second conductive portion 1122 is electrically connected to the electrode block 112 a .

[0083] The second conductive portion 1122 and the bridge portion 112b may be provided in the same layer.

[0084] Here, there is no limit on the number of second conductive portions 1122. For example, the second touch electrode 112 may include multiple second conductive portions 1122, and the second conductive portion 1122 may be arranged between two bridge portions 112b connected along the extension direction of the second electrode strip 1121. That is, two adjacent second conductive portions 1122 may be separated by a bridge portion 112b. Of course, in other examples, the second conductive portion 1122 may be connected to one or two bridge portions 112b adjacent to the second conductive portion 1122 to form an integrated structure. This embodiment of the present invention does not impose any restrictions on this.

[0085] Here, the orthographic projection of the electrode block 112 a on the substrate 110 may be located within the orthographic projection range of the second conductive portion 1122 and the bridge portion 112 b on the substrate 110 .

[0086] It should be noted that the first side of the insulating layer 120 is the side close to the substrate 110 .

[0087] The second conductive portion 1122 and the portion of the electrode block 112a covered by the second conductive portion 1122 constitute a double-layer metal wire 13. In this case, the second conductive portion 1122 serves as the second-layer metal wire 132, and the portion of the electrode block 112a covered by the second conductive portion 1122 serves as the first-layer metal wire 131.

[0088] Here, the connection method of the first layer metal wire 131 and the second layer metal wire 132 can be selected and set according to actual conditions, and the embodiments of the present disclosure are not limited to this. Exemplarily, at least one via T12 is provided on the second insulating portion 1202, and the first layer metal wire 131 and the second layer metal wire 132 are electrically connected through the at least one via T12.

[0089] In some other embodiments, Figure 7 As shown, the first touch electrode 111 further includes a first conductive portion 1112 located on the second side of the insulating layer 120 , and the second touch electrode 112 further includes a second conductive portion 1122 located on the second side of the insulating layer 120 .

[0090] Figure 7 is a structural diagram of a touch substrate according to some embodiments; Figure 8 for Figure 7 The structure diagram of the first layer of metal wires at position C in the middle; Figure 9 for Figure 7 The structure diagram of the first layer of metal wire and the second insulating part at position C in the middle; Figure 10 for Figure 7 Structural diagram of the first layer of metal wire, the second insulating part and the second layer of metal wire at position C in the middle.

[0091] See Figures 8 to 10 The first conductive portion 1112 is electrically connected to the first electrode strip 1111 through at least one via T11 on the second insulating portion 1202. The second conductive portion 1122 is electrically connected to the electrode block 112a through at least one via T12 on the second insulating portion 1202.

[0092] In this case, for the first touch electrode 111, the first conductive portion 1112 can serve as the second layer of metal wire 132, and the portion of the first electrode strip 1111 covered by the first conductive portion 1112 can serve as the first layer of metal wire 131. The first conductive portion 1112 and the portion of the first electrode strip 1111 covered by the first conductive portion 1112 constitute a double-layer metal wire 13, and the first layer of metal wire 131 and the second layer of metal wire 132 are electrically connected through at least one via T11 on the second insulating portion 1202.

[0093] For the second touch electrode 112, the second conductive portion 1122 can serve as the second-layer metal wire 132, and the portion of the electrode block 112a covered by the second conductive portion 1122 can serve as the first-layer metal wire 131. The second conductive portion 1122 and the portion of the electrode block 112a covered by the second conductive portion 1122 constitute a double-layer metal wire 13. The first-layer metal wire 131 and the second-layer metal wire 132 are electrically connected through at least one via T12 in the second insulating portion 1202.

[0094] It should be noted that any layer of metal wires may be a single-layer structure or a multi-layer structure.

[0095] When the metal wire is a single-layer structure, the material of the single-layer structure can be a metal element or a metal alloy, for example, at least one of Ag (silver), Cu (copper), Al (aluminum), or AlNb (aluminum-niobium alloy).

[0096] When the metal wire has a multi-layer structure, for example, it may include three metal sub-layers. In this case, the material of the metal sub-layer located in the middle may be Al (aluminum), and the material of the metal sub-layers located on both sides may be Ti (titanium). This structure is referred to as a Ti / Al / Ti structure. Of course, the metal wire can also have a multi-layer structure composed of other materials, such as an ITO / Ag / ITO structure.

[0097] In the touch substrate 100 provided by some embodiments of the present invention, since at least one of the first touch electrode 111 and the second touch electrode 112 includes a double-layer metal wire 13, the first metal wire 131 and the second metal wire 132 of the double-layer metal wire 13 are electrically connected, thereby reducing the resistance of the touch wiring. The low resistance characteristic makes the touch substrate well suited for large-size touch screens such as automotive touch screens and medical touch screens, allowing large-size touch screens to still have high sensitivity and excellent display effects.

[0098] Figure 7 is a structural diagram of a touch substrate according to some embodiments; Figure 8 for Figure 7 The structure diagram of the first layer of metal wires at position C in the middle; Figure 9 for Figure 7 The structure diagram of the first layer of metal wire and the second insulating part at position C in the middle; Figure 10 for Figure 7 Structural diagram of the first layer of metal wire, the second insulating part and the second layer of metal wire at position C in the middle.

[0099] In some embodiments, as Figure 7 、 Figure 8 and Figure 10 As shown, the first conductive portion 1112 and the first electrode strip 1111 are a metal mesh structure, and the meshes in the metal mesh structure may correspond to the sub-pixel regions P in the display panel 3 .

[0100] In this embodiment, since the first conductive portion 1112 and the first electrode strips 1111 are formed into a metal mesh structure, portions of the metal mesh structure of the first conductive portion 1112 correspond one-to-one with portions of the metal mesh structure of the first electrode strips 1111. Furthermore, the meshes of the metal mesh structure correspond to sub-pixel regions P in the display panel 3. Therefore, on the one hand, the entire touch substrate 100 can have a high light transmittance, which can also ensure screen clarity when used in the above-mentioned touch display device. On the other hand, using the metal mesh as the touch electrode of the touch substrate 100 has a low touch electrode resistance and good conductivity, which can sensitively obtain the position information of the touch point, thereby achieving high sensitivity of the touch substrate 100.

[0101] In some embodiments, as Figure 9 As shown, the portion of the second insulating portion 1202 located between the first conductive portion 1112 and the first electrode strip 1111 (ie Figure 9 The portion on the left side of the second insulating portion 1202 is in a grid shape.

[0102] In this embodiment, the portion of the second insulating portion 1202 located between the first conductive portion 1112 and the first electrode strip 1111 is in a grid shape, and some areas in the grid structure of the second insulating portion 1202 correspond one-to-one with some areas in the metal grid structure of the first conductive portion 1112 and the first electrode strip 1111, which can improve the light transmittance of the entire touch substrate 100.

[0103] In some embodiments, as Figure 7 、 Figure 8 and Figure 10 As shown, the second conductive portion 1122 and the electrode block 112a are a metal mesh structure, and the meshes in the metal mesh structure may correspond to the sub-pixel region P in the display panel 3.

[0104] In this embodiment, since the second conductive portion 1122 and the electrode block 112a are formed of a metal mesh structure, and the meshes of the metal mesh structure correspond to the sub-pixel regions P in the display panel 3, the entire touch substrate 100 can have a high light transmittance, thereby ensuring screen clarity when used in the aforementioned touch display device. Furthermore, the use of a metal mesh as the touch electrode of the touch substrate 100 provides low resistance and good conductivity, enabling sensitive acquisition of touch point position information, resulting in high sensitivity of the touch substrate 100.

[0105] In some embodiments, as Figure 9 As shown, the portion of the second insulating portion 1202 located between the second conductive portion 1122 and the electrode block 112a (ie Figure 9The portion on the right side of the second insulating portion 1202 is in a grid shape.

[0106] In this embodiment, the portion of the second insulating portion 1202 located between the first conductive portion 1112 and the first electrode strip 1111 is in a grid shape, and some areas in the grid structure of the second insulating portion 1202 correspond one-to-one with some areas in the metal grid structure of the first conductive portion 1112 and the first electrode strip 1111, thereby improving the light transmittance of the entire touch substrate 100.

[0107] In some embodiments, as Figures 3 to 7 As shown, the bridge portion 112 b is in a grid shape, which can improve the light transmittance of the entire touch substrate 100 .

[0108] In some embodiments, the first insulating portion 1201 is in a grid shape, and some areas of the grid of the first insulating portion 1201 correspond one-to-one with some areas of the metal grid structure of the bridge portion 112 b , thereby improving the light transmittance of the entire touch substrate 100 .

[0109] See also Figures 11 to 14 In some embodiments, the second insulating portion 1202 at least covers the top surface of the first layer metal line 131 away from the substrate 110 , and the second layer metal line 132 completely covers the second insulating portion 1202 .

[0110] In some examples, the second insulating portion 1202 covers the first layer metal line 131 away from the top surface of the substrate 110, and the second layer metal line 132 completely covers the second insulating portion 1202, that is, Figure 14 In this case, the second-layer metal line 132 can be electrically connected to at least a portion of the side surface of the first-layer metal line 131 connected to the top surface; alternatively, at least one via T1 is provided on the second insulating portion 1302, and the first-layer metal line 131 and the second-layer metal line 132 are electrically connected through the at least one via T1 on the second insulating portion 1302. It will be understood by those skilled in the art that the above two electrical connection methods can coexist in the same embodiment.

[0111] In some examples, the second insulating portion 1202 also covers the side surface of the first layer metal line 131 connected to the top surface, that is, the second insulating portion 1202 completely covers the first layer metal line 131. Figure 12 and Figure 13 In this case, at least one via T1 is provided on the second insulating portion 1302 , and the first layer metal line 131 and the second layer metal line 132 are electrically connected via the at least one via T1 on the second insulating portion 1302 .

[0112] It should be noted that the above-mentioned “complete coverage” means covering both the top surface and the side surfaces of the metal wires.

[0113] In some examples, such as Figure 11 As shown, Figure 11 for Figure 10 Cross-sectional view along the D-D' axis. The first conductive portion 1112 and the portion of the first electrode strip 1111 covered by the first conductive portion 1112 constitute a double-layer metal wire 13. The first conductive portion 1112 can serve as the second-layer metal wire 132, and the portion of the first electrode strip 1111 covered by the first conductive portion 1112 can serve as the first-layer metal wire 131. In the width direction of the first-layer metal wire 131, the second insulating portion 1202 completely covers the portion of the first electrode strip 1111 covered by the first conductive portion 1112, and the first conductive portion 1112 completely covers the second insulating portion 1202.

[0114] In other examples, continue to refer to Figure 11 The second conductive portion 1122 and the portion of the electrode block 112a covered by the second conductive portion 1122 constitute a double-layer metal wire 13. The second conductive portion 1122 is a second-layer metal wire 132, and the portion of the electrode block 112a covered by the second conductive portion 1122 is a first-layer metal wire 131. In the width direction of the first-layer metal wire 131, the second insulating portion 1202 completely covers the portion of the electrode block 112a covered by the second conductive portion 1122, and the second conductive portion 1122 completely covers the second insulating portion 1202.

[0115] In some other examples, such as Figure 11 As shown, the first conductive portion 1112 and the portion of the first electrode strip 1111 covered by the first conductive portion 1112 constitute a double-layer metal wire 13, while the second conductive portion 1122 and the portion of the electrode block 112a covered by the second conductive portion 1122 constitute a double-layer metal wire 13. The first conductive portion 1112 and the second conductive portion 1122 serve as a second-layer metal wire 132, and the portion of the first electrode strip 1111 covered by the first conductive portion 1112 and the portion of the electrode block 112a covered by the second conductive portion 1122 serve as a first-layer metal wire 131. In the width direction of the first-layer metal wire 131, the second insulating portion 1202 completely covers the portion of the first electrode strip 1111 covered by the first conductive portion 1112, and the first conductive portion 1112 completely covers the second insulating portion 1202. At the same time, the second insulating portion 1202 completely covers the portion of the electrode block 112a covered by the second conductive portion 1122, and the second conductive portion 1122 completely covers the second insulating portion 1202.

[0116] In summary, in the touch substrate 100 provided by some embodiments of the present invention, since the second-layer metal wires 132 completely cover the second insulating portion 1202 at least in the width direction, during the process of forming the second-layer metal wires 132, the chlorine gas (Cl2) in the etching gas used in the process completely covers at least the portion of the second-layer metal wires 132 that completely covers the second insulating portion 1202 and does not contact the second insulating portion 1202. This can avoid the problem in the prior art where the chlorine gas contacts the second insulating portion 1202 and then reacts with water in the second insulating portion 1202 to generate hydrogen chloride (HCl). The hydrogen chloride then reacts with the metal (e.g., Al) in the second-layer metal wires 132 to cause corrosion, which greatly reduces the overall yield.

[0117] In some embodiments, as Figure 13 As shown, the touch substrate 100 further includes a buffer layer 130 disposed between the substrate 110 and the first layer of metal wires 131. When the plurality of first touch electrodes 111 and the plurality of second touch electrodes 112 are disposed on the surface of the encapsulation layer of the display panel 3, the buffer layer 130 can prevent the encapsulation layer of the display panel 3 from being damaged when the first layer of metal wires 131 are formed.

[0118] On this basis, for example, Figure 14 As shown, the buffer layer 130 may include a plurality of opening regions; two adjacent opening regions are separated by a second-layer metal line 132 .

[0119] Here, there is no limitation on the location of the opening area. In some examples, the opening area can be set in the gap between the first touch electrode 111 and the second touch electrode 112; in other examples, the opening area can be set as follows: Figures 8 to 10 As shown in the sub-pixel region P, the entire touch substrate 100 can be guaranteed to have better light transmittance.

[0120] The above-mentioned opening area and the second metal layer 132 are formed through a single patterning process without the need for an additional mask. Furthermore, by providing the buffer layer 130, damage to the packaging layer of the display panel 3 can be prevented when the first metal wire 131 is formed. On this basis, multiple opening areas are provided on the buffer layer 130, and stress release areas can be further provided to enhance the bending performance of the touch substrate 100.

[0121] In some embodiments, as Figure 15As shown, the touch control substrate 100 includes an etching protection layer 140 located on a surface of the insulating layer 120 on a side adjacent to the second metal line 132. The etching protection layer 140 and the insulating layer 120 are both integral layers. When etching to form the second metal layer 132, the main etching gas, chlorine, does not come into contact with the insulating layer 120. This avoids the problem in the prior art where the main etching gas, chlorine, comes into contact with the insulating layer 120 during the etching process to form the second metal line 132, reacting with water in the insulating layer 120 to generate hydrogen chloride (HCl). The HCl then reacts with the metal (e.g., Al) in the second metal line 132, causing corrosion and significantly reducing the overall yield.

[0122] The material of the etching protection layer 140 is an inorganic material. For example, the material of the etching protection layer 140 can be any one of silicon dioxide (SiO2), silicon nitride (SiNx), silicon carbide (SiC), and silicon carbonitride (SiCN).

[0123] It will be understood by those skilled in the art that Figure 15 In the example of FIG, the buffer layer 130 as described above may also be provided. In this case, the insulating layer 120 and the buffer layer 130 are both integral layer structures, and there is no need to provide an opening region on the buffer layer 130 .

[0124] In some embodiments, as Figure 13 、 Figure 14 and Figure 15 As shown, the touch substrate 100 further includes a protection layer 150 covering the side of the second metal line 132 away from the first metal line 131 . The protection layer 150 can protect the first touch electrode 111 and the second touch electrode 112 and can be made of an organic material.

[0125] See also Figure 16 The present invention further provides a method for preparing a touch substrate 100, which is used to prepare the above-mentioned touch substrate 100. The method for preparing the touch substrate 100 includes:

[0126] S1. Provide a substrate 110.

[0127] The substrate 110 may refer to the description in some of the above embodiments, and may be an encapsulation layer or a cover plate 2 of the display panel 3 , which will not be described in detail here.

[0128] S2 , forming a plurality of first touch electrodes 111 , an insulating layer 120 , and a plurality of second touch electrodes 112 on the substrate 110 .

[0129] Among them, see Figures 3 to 15The insulating layer 120 includes a first insulating portion 1201 and a second insulating portion 1202; the first insulating portion 1201 is located at the intersection of the plurality of first touch electrodes 111 and the plurality of second touch electrodes 112, so that the plurality of first touch electrodes 111 and the plurality of second touch electrodes 112 are insulated from each other at the intersection; the second insulating portion 1202 is located in an area outside the intersection.

[0130] At least one of the first touch electrode 111 and the second touch electrode 112 includes a double-layer metal wire 13. The double-layer metal wire 13 includes a first-layer metal wire 131 located on the side of the second insulating portion 1202 close to the substrate 110, and a second-layer metal wire 132 located on the side of the second insulating portion 1202 away from the substrate 110. At least one via T is provided on the second insulating portion 1202, and the first-layer metal wire 131 and the second-layer metal wire 132 are electrically connected through the at least one via T.

[0131] The preparation method provided in an embodiment of the present invention is used to manufacture the above-mentioned touch substrate 100. In this touch substrate 100, since at least one of the first touch electrode 111 and the second touch electrode 112 includes a double-layer metal wire 13, the first-layer metal wire 131 and the second-layer metal wire 132 are connected in parallel through the via T. This can reduce the resistance of the touch wiring. The low resistance characteristic makes it suitable for large-scale touch screens such as automotive touch screens and medical touch screens, so that large-scale touch screens still have high sensitivity and excellent display effects.

[0132] In some embodiments, as Figure 11 and Figure 12 As shown, the second insulating portion 1202 completely covers the first layer metal wire 131 at least in the width direction of the first layer metal wire 131; the second layer metal wire 132 completely covers the second insulating portion 1202 at least in the width direction.

[0133] The preparation method provided in an embodiment of the present invention is used to manufacture the touch control substrate 100. Since the second metal wire 132 completely covers the second insulating portion 1202 at least in the width direction, during the formation of the second metal wire 132, the chlorine gas (Cl2) in the etching gas used in the process completely covers at least the portion of the second metal wire 132 that completely covers the second insulating portion 1202 and does not contact the second insulating portion 1202. This avoids the problem in the prior art where the chlorine gas contacts the second insulating portion 1202 and then reacts with water in the second insulating portion 1202 to generate hydrogen chloride (HCl). The hydrogen chloride then reacts with the metal (e.g., Al) in the second metal wire 132, causing corrosion and significantly reducing the overall yield.

[0134] In some embodiments, before forming the plurality of first touch electrodes 111 , the insulating layer 120 and the plurality of second touch electrodes 112 on the substrate 110 , the step further includes forming a buffer layer 130 on the substrate 120 .

[0135] The specific structure can be found in Figure 14 , the buffer layer 130 has a plurality of opening areas; the second layer of metal lines 132 and the plurality of opening areas are formed by a single patterning process.

[0136] In some embodiments of the present invention, a buffer layer 130 is provided and multiple opening areas are provided on the buffer layer 130. This can prevent the packaging layer of the display panel 3 from being damaged or scratched when the first layer of metal wires 131 is formed. On this basis, multiple opening areas are provided on the buffer layer 130, and stress release areas can be further provided to enhance the bending performance of the touch substrate 100. Moreover, the opening areas and the second metal layer 132 are formed through a single patterning process without the need for an additional mask, which has the advantages of simple process, convenient production, and low cost.

[0137] In some other embodiments, before forming the second-layer metal line 132 , the method further includes forming an etching protection layer 140 on a surface of the insulating layer 120 that is away from the substrate 110 .

[0138] The specific structure can be found in Figure 15 At least in the area other than the intersection of the first touch electrode 111 and the second touch electrode 112 , the etching protection layer 140 and the insulating layer 120 are both integral structures, and the second metal layer 132 does not contact the insulating layer 120 .

[0139] The material of the etching protection layer 140 is an inorganic material. For example, the material of the etching protection layer 140 can be any one of silicon dioxide (SiO2) and silicon nitride (SiNx).

[0140] In some embodiments of the present invention, the method for preparing the touch substrate 100 further includes, before forming the second-layer metal wires 132, forming an etching protection layer 140 on the surface of the insulating layer 120 away from the substrate 110. As a result, at least in the region outside the intersection of the first touch electrode 111 and the second touch electrode 112, the etching protection layer 140 and the insulating layer 120 are formed as a single layer. This avoids the problem in the prior art where, during the etching process to form the second-layer metal wires 132, the main etching gas, chlorine, contacts the insulating layer 120, reacts with water in the insulating layer 120, and generates hydrogen chloride (HCl). The HCl then reacts with the metal (e.g., Al) in the second-layer metal wires 132, causing corrosion and significantly decreasing the overall yield.

[0141] The above is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or replacements within the technical scope disclosed in the present application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A touch substrate, characterized in that: include: substrate; a plurality of first touch electrodes and a plurality of second touch electrodes located on the same side of the substrate and arranged crosswise; as well as, an insulating layer comprising a first insulating portion and a second insulating portion; wherein the first insulating portion is located at an intersection of the plurality of first touch electrodes and the plurality of second touch electrodes, so as to insulate the plurality of first touch electrodes from the plurality of second touch electrodes at the intersection; and the second insulating portion is located in an area other than the intersection; At least one of the first touch electrode and the second touch electrode includes a double-layer metal wire, the double-layer metal wire including a first-layer metal wire and a second-layer metal wire electrically connected to each other, and the second insulating portion is located between the first-layer metal wire and the second-layer metal wire; The first touch electrode includes a first electrode strip located on a first side of the insulating layer; the second touch electrode includes a plurality of electrode blocks located on the first side of the insulating layer, with two adjacent electrode blocks separated by one of the first electrode strips; the second touch electrode also includes a plurality of bridge portions located on a second side of the insulating layer, with one bridge portion electrically connecting two adjacent electrode blocks to form a second electrode strip; The first touch electrode further includes a first conductive portion located on the second side of the insulating layer, the first conductive portion being electrically connected to the first electrode strip through at least one via on the second insulating portion; the first conductive portion, the first electrode strip, and a portion of the second insulating portion located between the first conductive portion and the first electrode strip all form a grid; the first side of the insulating layer is a side close to the substrate, and the first conductive portion and a portion of the first electrode strip covered by the first conductive portion constitute the double-layer metal wire; or The second touch electrode also includes a second conductive portion located on the second side of the insulating layer, and the second conductive portion is electrically connected to the electrode block through at least one via on the second insulating portion; the second conductive portion, the electrode block and the portion of the second insulating portion located between the second conductive portion and the electrode block are all in a grid shape; the first side of the insulating layer is the side close to the substrate, and the second conductive portion and the portion of the electrode block covered by the second conductive portion constitute the double-layer metal wire.

2. The touch substrate according to claim 1, wherein: The second insulating portion at least covers the top surface of the first layer of metal wire away from the substrate; and the second layer of metal wire completely covers the second insulating portion.

3. The touch substrate according to claim 2, wherein: The second layer of metal wires is electrically connected to at least a portion of the side surface of the first layer of metal wires connected to the top surface; and / or, At least one via hole is provided on the second insulating portion, and the first layer of metal wires and the second layer of metal wires are electrically connected through the at least one via hole on the second insulating portion.

4. The touch substrate according to claim 2, wherein: The second insulating portion further covers a side surface of the first layer of metal wire connected to the top surface; At least one via hole is provided on the second insulating portion, and the first layer of metal wires and the second layer of metal wires are electrically connected through the at least one via hole on the second insulating portion.

5. The touch substrate according to claim 1, wherein: Also includes: a buffer layer, located between the substrate and the first layer of metal wires; The buffer layer includes a plurality of opening areas; two adjacent opening areas are separated by the second layer of metal wires.

6. The touch substrate according to claim 1, wherein: Also includes: an etching protection layer located on a surface of the insulating layer on a side close to the second metal wire layer; The insulating layer is made of an organic material, and the etching protection layer is made of an inorganic material.

7. The touch substrate according to claim 1, wherein: The bridging portion is in a grid shape.

8. The touch panel substrate according to any one of claims 1 to 6, wherein: The first insulating portion is in a grid shape.

9. A method for manufacturing a touch substrate, characterized in that: The production method comprises: providing a substrate; forming a plurality of first touch electrodes, an insulating layer, and a plurality of second touch electrodes on the substrate; The insulating layer includes a first insulating portion and a second insulating portion; the first insulating portion is located at the intersection of the plurality of first touch electrodes and the plurality of second touch electrodes, so as to insulate the plurality of first touch electrodes and the plurality of second touch electrodes from each other at the intersection; and the second insulating portion is located in an area outside the intersection. At least one of the first touch electrode and the second touch electrode includes a double-layer metal wire, the double-layer metal wire including a first-layer metal wire located on a side of the second insulating portion close to the substrate and a second-layer metal wire located on a side of the second insulating portion away from the substrate; at least one via is provided on the second insulating portion, and the first-layer metal wire and the second-layer metal wire are electrically connected through the at least one via; The first touch electrode includes a first electrode strip located on a first side of the insulating layer; the second touch electrode includes a plurality of electrode blocks located on the first side of the insulating layer, with two adjacent electrode blocks separated by one of the first electrode strips; the second touch electrode also includes a plurality of bridge portions located on a second side of the insulating layer, with one bridge portion electrically connecting two adjacent electrode blocks to form a second electrode strip; The first touch electrode further includes a first conductive portion located on the second side of the insulating layer, the first conductive portion being electrically connected to the first electrode strip through at least one via on the second insulating portion; the first conductive portion, the first electrode strip, and a portion of the second insulating portion located between the first conductive portion and the first electrode strip all form a grid; the first side of the insulating layer is a side close to the substrate, and the first conductive portion and a portion of the first electrode strip covered by the first conductive portion constitute the double-layer metal wire; or The second touch electrode also includes a second conductive portion located on the second side of the insulating layer, and the second conductive portion is electrically connected to the electrode block through at least one via on the second insulating portion; the second conductive portion, the electrode block and the portion of the second insulating portion located between the second conductive portion and the electrode block are all in a grid shape; the first side of the insulating layer is the side close to the substrate, and the second conductive portion and the portion of the electrode block covered by the second conductive portion constitute the double-layer metal wire.

10. A touch display device, characterized in that: The touch control substrate comprises the touch control substrate according to any one of claims 1 to 8.

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