Wafer transfer system with temporary storage function

Abstract

The application relates to the technical field of wafer production, in particular to a wafer transmission system with a temporary storage function, which comprises a transmission seat, a feeding mechanism, a discharging mechanism and a plurality of temporary storage tables; the transmission seat is provided with a moving seat and a transmission assembly; the moving seat is provided with a material taking plate and a material taking driving element; the feeding mechanism comprises a feeding seat and a feeding placement plate; the discharging mechanism comprises a discharging seat and a discharging placement plate; and the wafer transmission system further comprises a positioning and supporting assembly. The wafer transmission system is provided with the transmission seat, the feeding mechanism, the discharging mechanism and the positioning and supporting assembly, can drive the wafer to realize automatic transmission among the feeding mechanism, a plurality of work stations, the temporary storage tables and the discharging mechanism, improves work efficiency, and can save cost; meanwhile, the temporary storage tables are arranged between two adjacent work stations, can distinguish and place defective products; and can place the wafer on the temporary storage tables for temporary storage when the next equipment work station is busy with work.

Description

Technical Field

[0001] This invention relates to the field of wafer manufacturing technology, and more specifically to a wafer transport system with temporary storage function. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits; its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single-crystal silicon wafer.

[0003] In the wafer manufacturing process, the wafers need to be processed at multiple equipment stations, such as dicing machines, dicing machines, and probe inspection machines. Therefore, the wafers need to be transferred between multiple equipment stations.

[0004] Currently, there are two main ways to transfer wafers between multiple equipment stations: the first is to transfer the wafers manually, but this method requires continuous human labor, resulting in wasted labor costs and low work efficiency; the second is to set up robotic arms in two adjacent equipment stations, but this method requires multiple robotic arms, which greatly increases costs.

[0005] In addition, if a problem occurs in one of the steps of the wafer production process, it is necessary to promptly unload the defective products, or to stop the wafer transfer of the previous equipment station when the next equipment station is busy. Summary of the Invention

[0006] The purpose of this invention is to address the aforementioned shortcomings in the prior art by providing a wafer transfer system with a temporary storage function, enabling automated transfer between multiple workstations and providing a temporary storage function.

[0007] The objective of this invention is achieved through the following technical solution: a wafer transfer system with temporary storage function, comprising a transfer base, a loading mechanism, a unloading mechanism, and several temporary storage stations; the loading mechanism and the unloading mechanism are respectively located on both sides of the transfer base; the temporary storage stations are located between two adjacent workstations;

[0008] The transmission base includes a movable base and a transmission component for driving the movable base to move; the movable base includes a picking plate and a picking drive component for driving the picking plate to rise and fall.

[0009] The feeding mechanism includes a feeding seat; the feeding seat is provided with multiple feeding placement plates; the unloading mechanism includes an unloading seat; the unloading seat is provided with multiple unloading placement plates;

[0010] The wafer transfer system with temporary storage function also includes several positioning support components; the positioning support components are located in each temporary storage stage and each workstation; the positioning support components include a left clamping plate, a right clamping plate, and a clamping drive component for driving the left clamping plate and the right clamping plate closer or further apart.

[0011] The transmission component is used to drive the moving seat to move between the loading plate, the left clamping plate and the right clamping plate, and the unloading plate.

[0012] The present invention is further configured such that the temporary storage platform is provided with a clearance channel; the transmission seat passes through the clearance channel; and the temporary storage platform is provided with a feeding slot communicating with the clearance channel between the left clamping plate and the right clamping plate.

[0013] The present invention is further configured such that the transmission assembly includes a first synchronous pulley disposed on one side of the transmission base, a second synchronous pulley disposed on the other side of the transmission base, a synchronous belt disposed between the first synchronous pulley and the second synchronous pulley, and a stepper motor for driving the second synchronous pulley to rotate; the movable base is provided with a connecting block connected to the synchronous belt;

[0014] The transmission assembly further includes a guide rail disposed on the transmission base and a guide slider slidably connected to the guide rail; the guide slider is disposed on the movable base.

[0015] The present invention is further configured such that the material handling drive includes an electric cylinder disposed on the movable base; the output end of the electric cylinder is connected to the material handling plate;

[0016] The material handling drive also includes a guide sleeve disposed on the movable seat and a sliding column slidably disposed within the guide sleeve; the sliding column is connected to the material handling plate.

[0017] The present invention is further configured such that a first fixing block is provided on the top of the material receiving plate;

[0018] The material handling plate is located at the top of the movable base; the electric cylinder is located at the bottom of the movable base.

[0019] The present invention is further configured such that the feeding seat is provided with a feeding lifting plate; the feeding seat is provided with a feeding lifting component for driving the feeding lifting plate to rise and fall; a plurality of feeding placement plates are arranged at intervals along the height direction of the feeding lifting plate; and a feeding opening is provided on one side of the feeding lifting plate.

[0020] The present invention is further configured such that the unloading seat is provided with an unloading lifting plate; the unloading seat is provided with an unloading lifting component for driving the unloading lifting plate to move up and down; a plurality of unloading placement plates are spaced apart along the height direction of the unloading lifting plate; and an unloading opening is provided on one side of the unloading lifting plate.

[0021] The present invention is further configured such that a second fixing block is provided on the top of both the loading plate and the unloading plate.

[0022] The present invention is further configured such that the clamping drive assembly includes a left cylinder and a right cylinder; the output end of the left cylinder is connected to the left clamping plate; and the output end of the right cylinder is connected to the right clamping plate.

[0023] The clamping drive assembly also includes a clamping slide rail; the bottom of the left clamping plate and the bottom of the right clamping plate are both provided with clamping sliders that are slidably connected to the clamping slide rail.

[0024] The present invention is further configured such that a third fixing block is provided at the top of both the left clamping plate and the top of both the right clamping plate.

[0025] The beneficial effects of the present invention are as follows: By setting up a transfer base, a loading mechanism, a unloading mechanism, and a positioning support component, the present invention can drive the automated transfer of wafers between the loading mechanism, multiple workstations, a temporary storage platform, and the unloading mechanism, thereby improving work efficiency and saving costs; at the same time, by setting up a temporary storage platform between two adjacent workstations, defective products can be placed separately; and wafers can be temporarily stored on the temporary storage platform when the next workstation is busy. Attached Figure Description

[0026] The invention will be further described with reference to the accompanying drawings, but the embodiments in the drawings do not constitute any limitation on the invention. For those skilled in the art, other drawings can be obtained based on the following drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of the present invention in conjunction with the equipment station;

[0028] Figure 2 yes Figure 1 A magnified view of part A in the middle;

[0029] Figure 3 This is a schematic diagram of the structure of the present invention after the temporary storage platform is hidden;

[0030] Figure 4 yes Figure 3 A magnified view of part B in the middle;

[0031] Figure 5 This is a schematic diagram of the feeding mechanism of the present invention;

[0032] Figure 6 This is a schematic diagram of the feeding mechanism of the present invention;

[0033] Figure 7 This is a schematic diagram of the wafer structure;

[0034] Figure 8 This is a schematic diagram of the temporary storage platform of the present invention;

[0035] The components include: 1. Transmission seat; 11. First synchronous pulley; 12. Second synchronous pulley; 13. Synchronous belt; 14. Stepper motor; 15. Guide rail; 16. Guide slider; 2. Moving seat; 21. Connecting block; 22. Material picking plate; 23. Electric cylinder; 24. Guide sleeve; 25. Sliding column; 26. First fixing block; 3. Loading seat; 31. Loading placement plate; 32. Loading lifting plate; 33. Loading lifting component; 34. Loading opening; 4. Unloading seat; 4 1. Material placement plate; 42. Material lifting plate; 43. Material lifting component; 44. Material opening; 45. Second fixing block; 5. Workstation; 51. Left clamping plate; 52. Right clamping plate; 53. Left cylinder; 54. Right cylinder; 55. Clamping slide rail; 56. Clamping slider; 57. Third fixing block; 61. Wafer holder; 62. Wafer; 63. First fixing hole; 64. Second fixing hole; 7. Temporary storage platform; 71. Clearing channel; 72. Material feeding slot. Detailed Implementation

[0036] The present invention will be further described in conjunction with the following embodiments.

[0037] Depend on Figures 1 to 8 As can be seen, the wafer transfer system with temporary storage function described in this embodiment includes a transfer base 1, a loading mechanism, a unloading mechanism, and several temporary storage stations 7; the loading mechanism and the unloading mechanism are respectively located on both sides of the transfer base 1; the temporary storage stations 7 are located between two adjacent workstations 5.

[0038] The transmission base 1 is provided with a movable base 2 and a transmission component for driving the movable base 2 to move; the movable base 2 is provided with a picking plate 22 and a picking drive component for driving the picking plate 22 to rise and fall.

[0039] The feeding mechanism includes a feeding seat 3; the feeding seat 3 is provided with a plurality of feeding placement plates 31; the unloading mechanism includes a unloading seat 4; the unloading seat 4 is provided with a plurality of unloading placement plates 41;

[0040] The wafer transfer system with temporary storage function also includes several positioning support components; the positioning support components are located in each temporary storage stage 7 and each workstation 5; the positioning support components include a left clamping plate 51, a right clamping plate 52 and a clamping drive component for driving the left clamping plate 51 and the right clamping plate 52 to move closer or further apart.

[0041] The transmission component is used to drive the moving seat 2 to move between the loading plate 31, the left clamping plate 51 and the right clamping plate 52, and the unloading plate 41.

[0042] Specifically, the wafer transfer system with temporary storage function described in this embodiment has a transfer base 1 set between multiple workstations 5, and a positioning support component is set at each workstation 5. A temporary storage stage 7 is set between two adjacent workstations 5, and a positioning support component is set at each temporary storage stage 7. The wafer includes a wafer holder 61 and multiple wafer dies 62 disposed on the wafer holder 61. In use, the multiple wafer holders 61 are first placed in the loading plate 31 of the loading base 3. Then, the transfer component drives the moving base 2 to move to the bottom of the loading plate 31. The picking drive unit drives the picking plate 22 to rise, lifting the wafer holder 61 from the loading plate 31 and removing it. The transfer component then moves the moving base 2 and the wafer holder 61 sequentially to each workstation 5. When the transfer component moves the moving base 2 and the wafer holder 61 to one of the workstations 5, the picking drive unit lifts the wafer holder 61 from the loading plate 31 via the picking plate 22. From the left clamping plate 51 and right clamping plate 52 at station 5, the clamping drive assembly clamps the wafer holder 61, and then the material pick-up drive unit drives the loading and placement plate 31 to descend. After the wafer 62 is processed at station 5, the material pick-up drive unit lifts the wafer holder 61 from the loading and placement plate 31 via the material pick-up plate 22 and removes it. If a processing error occurs, the transfer assembly moves the moving seat 2 and the wafer holder 61 to the temporary storage stage 7 between the next station 5. The material pick-up drive unit then moves the moving seat 2 and the wafer holder 61 via the material pick-up plate 22. 2. The wafer holder 61 of the loading and placement plate 31 is lifted between the left clamping plate 51 and the right clamping plate 52 of the temporary storage table 7, thereby placing defective products in the temporary storage table 7 for the user to retrieve. If the processing is normal, the transfer component moves the moving seat 2 and the wafer holder 61 to the next workstation 5. After the wafer 62 of the wafer holder 61 has been processed in all workstations 5, the transfer component moves the moving seat 2 to the unloading and placement plate 41, placing the processed wafers in the unloading and placement plate 41. This embodiment, through the above settings, can drive the automated transfer of wafers between the loading mechanism, multiple workstations 5, and the unloading mechanism, improving work efficiency and saving costs. At the same time, by setting the temporary storage table 7 between two adjacent workstations 5, defective products can be placed separately. Also, when the next equipment workstation 5 is busy, the wafers can be temporarily stored on the temporary storage table 7.

[0043] This embodiment describes a wafer transfer system with temporary storage function. The temporary storage stage 7 is provided with a clearance channel 71; the transfer seat 1 passes through the clearance channel 71; the temporary storage stage 7 has a feeding slot 72 communicating with the clearance channel 71 between the left clamping plate 51 and the right clamping plate 52. Specifically, by passing the transfer seat 1 through the clearance channel 71 of the temporary storage stage 7, space can be effectively saved. In addition, by providing the feeding slot 72, it is convenient for the material picking drive to lift the wafer seat 61 of the loading placement plate 31 from the feeding slot 72 to the space between the left clamping plate 51 and the right clamping plate 52 of the temporary storage stage 7 via the material picking plate 22.

[0044] The wafer transfer system with temporary storage function described in this embodiment includes a first synchronous pulley 11 on one side of the transfer base 1, a second synchronous pulley 12 on the other side of the transfer base 1, a synchronous belt 13 between the first synchronous pulley 11 and the second synchronous pulley 12, and a stepper motor 14 for driving the second synchronous pulley 12 to rotate; the moving base 2 is provided with a connecting block 21 connected to the synchronous belt 13.

[0045] Specifically, in this embodiment, a stepper motor 14 is used to control the movement of the moving seat 2, which can effectively control the movement position of the moving seat 2, thereby enabling the wafer to be accurately transferred between the loading mechanism, multiple workstations 5, temporary storage stage 7 and unloading mechanism.

[0046] The transmission assembly also includes a guide rail 15 disposed on the transmission base 1 and a guide slider 16 slidably connected to the guide rail 15; the guide slider 16 is disposed on the movable base 2. This configuration enables the movable base 2 to drive the wafer for stable movement and transmission.

[0047] The wafer transfer system with temporary storage function described in this embodiment includes a picking drive component comprising an electric cylinder 23 disposed on a movable base 2; the output end of the electric cylinder 23 is connected to the picking plate 22; by setting the electric cylinder 23 to drive the picking plate 22 to rise and fall, space can be saved and sufficient range can be provided.

[0048] The material handling drive also includes a guide sleeve 24 disposed on the movable base 2 and a sliding column 25 slidably disposed within the guide sleeve 24; the sliding column 25 is connected to the material handling plate 22. This configuration enables the material handling plate 22 to drive the wafer to move up and down stably.

[0049] The wafer transfer system with temporary storage function described in this embodiment has a first fixing block 26 on the top of the pick-up plate 22. Specifically, a first fixing hole 63 corresponding to the first fixing block 26 is provided on the wafer holder 61. When the transfer component drives the moving seat 2 to move to the bottom of the loading plate 31, the pick-up plate 22 is driven to rise by the pick-up drive component, thereby inserting the first fixing block 26 into the first fixing hole 63 and lifting the wafer holder 61 of the loading plate 31, so that the loading plate 31 is separated from the wafer holder 61. At this time, the transfer component can drive the moving seat 2, the pick-up plate 22 and the wafer holder 61 to transfer.

[0050] The material handling plate 22 is located on the top of the movable base 2; the electric cylinder 23 is located at the bottom of the movable base 2. This arrangement effectively saves space.

[0051] This embodiment describes a wafer transfer system with temporary storage function. The loading base 3 is equipped with a lifting loading plate 32; the loading base 3 is provided with a loading lifting component 33 for driving the lifting loading plate 32 to move up and down; multiple loading placement plates 31 are spaced apart along the height direction of the lifting loading plate 32; and a loading opening 34 is provided on one side of the lifting loading plate 32. The loading lifting component 33 can be a motor lead screw or a linear module, etc.

[0052] Specifically, by setting up a loading opening 34, the material picker 22 can lift the wafer base 61 of the loading placement plate 31, and then the material picker 22 can drive the wafer base 61 to be transported from the loading opening 34 and leave the loading placement plate 31.

[0053] This embodiment describes a wafer transfer system with a temporary storage function. The unloading base 4 is equipped with a lifting plate 42. The unloading base 4 has a lifting component 43 for driving the lifting plate 42 to move up and down. Multiple unloading placement plates 41 are spaced apart along the height direction of the lifting plate 42. An unloading opening 44 is provided on one side of the lifting plate 42. The lifting component 43 can be a motor lead screw or a linear module, etc.

[0054] Specifically, by setting the unloading opening 44, after the wafer 62 of the wafer holder 61 has been processed at all stations 5, the transfer component drives the moving seat 2 to move to the bottom of the unloading placement plate 41, and drives the picking plate 22 and the wafer holder 61 from the unloading opening 44 into the top of the unloading placement plate 41. Then the picking drive unit drives the picking plate 22 to descend, so that the wafer holder 61 is placed on the unloading placement plate 41. At the same time, the first fixing block 26 separates from the first fixing hole 63, thereby completing the unloading of the wafer.

[0055] In this embodiment, a wafer transfer system with temporary storage function is provided, and both the top of the loading plate 31 and the top of the unloading plate 41 are provided with second fixing blocks 45. Specifically, a second fixing hole 64 corresponding to the second fixing block 45 is provided on the wafer holder 61; through the above arrangement, the wafer holder 61 can be fixed.

[0056] The wafer transfer system with temporary storage function described in this embodiment includes a clamping drive assembly comprising a left cylinder 53 and a right cylinder 54. The output end of the left cylinder 53 is connected to the left clamping plate 51, and the output end of the right cylinder 54 is connected to the right clamping plate 52. Specifically, when the material picking drive unit drives the material picking plate 22 to rise, thereby raising the wafer holder 61 between the left clamping plate 51 and the right clamping plate 52, the left cylinder 53 and the right cylinder 54 work, thereby bringing the left clamping plate 51 and the right clamping plate 52 closer together and fixing the wafer holder 61 between the left clamping plate 51 and the right clamping plate 52.

[0057] The clamping drive assembly also includes a clamping slide rail 55; the bottom of the left clamping plate 51 and the bottom of the right clamping plate 52 are both provided with clamping sliders 56 that are slidably connected to the clamping slide rail 55. The above-mentioned arrangement guides the movement of the left clamping plate 51 and the right clamping plate 52.

[0058] In this embodiment, a wafer transfer system with temporary storage function is provided with a third fixing block 57 on the top of the left clamping plate 51 and the top of the right clamping plate 52. The third fixing block 57 has the same structure as the second fixing block 45, meaning that the second fixing hole 64 of the wafer holder 61 can engage with the third fixing block 57.

[0059] Specifically, when the material picking drive unit drives the material picking plate 22 to rise, thereby raising the wafer holder 61 between the left clamping plate 51 and the right clamping plate 52, the left cylinder 53 and the right cylinder 54 work, so that the left clamping plate 51 and the right clamping plate 52 are close together. Then, the material picking drive unit drives the material picking plate 22 to descend, thereby fixing the second fixation of the wafer holder 61 in the third fixing block 57, thus completing the transfer of the wafer holder 61.

[0060] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the essence and scope of the technical solutions of the present invention.

Claims

1. A wafer transfer system with temporary storage function, characterized in that: It includes a transfer base (1), a feeding mechanism, a discharging mechanism, and several temporary storage platforms (7); the feeding mechanism and the discharging mechanism are respectively located on both sides of the transfer base (1); the temporary storage platforms (7) are located between two adjacent workstations (5); The transmission base (1) is provided with a movable base (2) and a transmission component for driving the movable base (2) to move; the movable base (2) is provided with a picking plate (22) and a picking drive component for driving the picking plate (22) to rise and fall; The feeding mechanism includes a feeding seat (3); the feeding seat (3) is provided with a plurality of feeding placement plates (31); the unloading mechanism includes a unloading seat (4); the unloading seat (4) is provided with a plurality of unloading placement plates (41); The wafer transfer system with temporary storage function also includes several positioning support components; the positioning support components are located on each temporary storage stage (7) and each workstation (5); the positioning support components include a left clamping plate (51), a right clamping plate (52) and a clamping drive component for driving the left clamping plate (51) and the right clamping plate (52) to move closer or further apart; The transmission component is used to drive the moving seat (2) to move at the loading plate (31), between the left clamping plate (51) and the right clamping plate (52), and at the unloading plate (41); The temporary storage platform (7) is provided with a clearance channel (71); the transmission seat (1) passes through the clearance channel (71); the temporary storage platform (7) is provided with a feeding slot (72) communicating with the clearance channel (71) between the left clamping plate (51) and the right clamping plate (52); The transmission assembly includes a first synchronous pulley (11) on one side of the transmission base (1), a second synchronous pulley (12) on the other side of the transmission base (1), a synchronous belt (13) between the first synchronous pulley (11) and the second synchronous pulley (12), and a stepper motor (14) for driving the second synchronous pulley (12) to rotate; the moving base (2) is provided with a connecting block (21) connected to the synchronous belt (13); The transmission assembly further includes a guide rail (15) disposed on the transmission base (1) and a guide slider (16) slidably connected to the guide rail (15); the guide slider (16) is disposed on the movable base (2).

2. The wafer transfer system with temporary storage function according to claim 1, characterized in that: The material handling drive includes an electric cylinder (23) disposed on the movable base (2); the output end of the electric cylinder (23) is connected to the material handling plate (22); The material handling drive also includes a guide sleeve (24) disposed on the movable seat (2) and a sliding column (25) slidably disposed in the guide sleeve (24); the sliding column (25) is connected to the material handling plate (22).

3. A wafer transfer system with temporary storage function according to claim 2, characterized in that: The top of the material receiving plate (22) is provided with a first fixing block (26); The material handling plate (22) is located on the top of the movable seat (2); the electric cylinder (23) is located at the bottom of the movable seat (2).

4. A wafer transfer system with temporary storage function according to claim 1, characterized in that: The loading seat (3) is equipped with a loading lifting plate (32) for lifting and lowering; the loading seat (3) is equipped with a loading lifting component (33) for driving the loading lifting plate (32) to lift and lower; multiple loading placement plates (31) are spaced apart along the height direction of the loading lifting plate (32); a loading opening (34) is provided on one side of the loading lifting plate (32).

5. A wafer transfer system with temporary storage function according to claim 1, characterized in that: The unloading seat (4) is equipped with an unloading lifting plate (42) for lifting and lowering; the unloading seat (4) is equipped with an unloading lifting component (43) for driving the unloading lifting plate (42) to lift and lower; multiple unloading placement plates (41) are spaced apart along the height direction of the unloading lifting plate (42); the unloading lifting plate (42) is provided with an unloading opening (44) on one side.

6. A wafer transfer system with temporary storage function according to claim 1, characterized in that: The top of the loading plate (31) and the top of the unloading plate (41) are both provided with a second fixing block (45).

7. A wafer transfer system with temporary storage function according to claim 1, characterized in that: The clamping drive assembly includes a left cylinder (53) and a right cylinder (54); the output end of the left cylinder (53) is connected to the left clamping plate (51); the output end of the right cylinder (54) is connected to the right clamping plate (52); The clamping drive assembly also includes a clamping slide rail (55); the bottom of the left clamping plate (51) and the bottom of the right clamping plate (52) are both provided with clamping sliders (56) that are slidably connected to the clamping slide rail (55).

8. A wafer transfer system with temporary storage function according to claim 1, characterized in that: The top of the left clamping plate (51) and the top of the right clamping plate (52) are both provided with a third fixing block (57).

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