Flexible piezoresistive sensor with impact-resistant structure and method of making the same

Abstract

The present application relates to the technical field of piezoresistive functional materials, and particularly relates to a flexible piezoresistive sensor with an anti-impact structure and a preparation method thereof. The flexible piezoresistive sensor with the anti-impact structure comprises a first flexible anti-impact component and a second flexible anti-impact component which are oppositely arranged and have the same structure. The first flexible anti-impact component is provided with a plurality of hollow first tooth-shaped cavities, a first flexible loose layer wrapping one side of the first tooth-shaped cavities, and a first taper angle wrapping the other side of the first tooth-shaped cavities. The first flexible loose layer and the first taper angle surround the first tooth-shaped cavities to form closed and hollow first tooth-shaped cavities. The first flexible anti-impact component is connected with a first electrode. The second flexible anti-impact component has the same structure as the first flexible anti-impact component. The first taper angle is in contact with a second taper angle. The present application realizes a super-sensitive sensing function for subtle load changes. The first flexible loose layer and the second flexible loose layer are extruded, and the tooth-shaped cavities in the interior can greatly absorb the energy of violent loads.

Description

Technical Field

[0001] This invention relates to the technical field of piezoresistive functional materials, specifically to a flexible piezoresistive sensor with an impact-resistant structure and its preparation method. Background Technology

[0002] Energy-absorbing materials and structures have a wide range of applications, from personal protective equipment to military engineering. Structural components in these applications are frequently subjected to extreme load conditions, such as transient shocks, vibrations, and other dynamic loads. Without sufficient protection, these enormous dynamic loads can cause injury to individuals or damage to structural components. This underscores the necessity of developing innovative energy-absorbing materials to mitigate shock-induced damage.

[0003] To reduce the risk of using damaged structures, it is also essential to utilize sensing performance to detect and quantify loads for health assessment and damage prediction of critical structures. Flexible mechanical sensors can precisely meet this need. However, traditional flexible piezoresistive sensors focus only on pursuing sensitivity levels under minor loads, neglecting the problem that flexible piezoresistive sensors can be damaged by large impact loads. Summary of the Invention

[0004] One of the objectives of this invention is to provide a flexible piezoresistive sensor with an impact-resistant structure, solving the problem that traditional sensors cannot withstand huge impact loads.

[0005] The second objective of this invention is to provide a method for fabricating a flexible piezoresistive sensor with an impact-resistant structure, which is simple to fabricate and easy to adjust.

[0006] One of the solutions adopted to achieve the objective of this invention is: a flexible piezoresistive sensor with an impact-resistant structure, wherein the flexible piezoresistive sensor with an impact-resistant structure includes a first flexible impact-resistant component and a second flexible impact-resistant component that are arranged opposite to each other and have the same structure;

[0007] The first flexible impact-resistant component is provided with multiple hollow first tooth-shaped cavities, a first flexible loose layer covering one side of the first tooth-shaped cavity, and a first cone angle covering the other side of the first tooth-shaped cavity. The first flexible loose layer and the first cone angle surround a closed and hollow first tooth-shaped cavity. The first flexible impact-resistant component is connected to a first electrode.

[0008] The second flexible impact-resistant component is provided with multiple hollow second tooth-shaped cavities, a second flexible loose layer covering one side of the second tooth-shaped cavity, and a second cone angle covering the other side of the second tooth-shaped cavity. The second flexible loose layer and the second cone angle form a closed and hollow second tooth-shaped cavity. The second flexible impact-resistant component is connected to a second electrode.

[0009] The first cone angle contacts the second cone angle.

[0010] Preferably, the first electrode is connected to the side of the first flexible impact-resistant component with a first cone angle by silver paste, and the second electrode is connected to the side of the second flexible impact-resistant component with a second cone angle by silver paste.

[0011] Preferably, the first cone angle includes at least two uniformly distributed cone angles, the second cone angle includes at least two uniformly distributed cone angles, the length of each cone angle is 1.2 to 1.8 mm, and the bottom diameter of each cone angle is 0.08 to 0.12 mm.

[0012] Preferably, the thickness of the first flexible porous layer and the second flexible porous layer is 0.8 to 1.2 mm.

[0013] Preferably, the depth of the first toothed cavity and the second toothed cavity is 3.5 to 4.5 mm, and both the first toothed cavity and the second toothed cavity are hemispherical with a diameter of 1.6 to 2.4 mm.

[0014] Preferably, the distance between two adjacent first toothed cavities is 2-3 mm, and the distance between two adjacent second toothed cavities is 2-3 mm.

[0015] Preferably, the matrix material of the first flexible impact-resistant component and the second flexible impact-resistant component is a multi-walled carbon nanotube / polydimethylsiloxane composite material, wherein the mass ratio of multi-walled carbon nanotubes to polydimethylsiloxane is 1:20.

[0016] The solution adopted to achieve the second objective of this invention is: a method for preparing a flexible piezoresistive sensor with an impact-resistant structure, comprising the following steps:

[0017] A1. The base materials of the first flexible impact-resistant component and the second flexible impact-resistant component are laid into the mold and formed to obtain the first flexible impact-resistant component and the second flexible impact-resistant component respectively.

[0018] A2. Place the first flexible impact-resistant component and the second flexible impact-resistant component opposite to each other, with the first cone angle in contact with the second cone angle;

[0019] A3. Apply conductive silver paste to the edge of the first flexible impact-resistant component with the first cone angle and lead out the first electrode; apply conductive silver paste to the edge of the second flexible impact-resistant component with the second cone angle and lead out the second electrode.

[0020] A4. After applying an insulating coating to the silver paste of the first flexible shock-resistant component and the silver paste of the second flexible shock-resistant component respectively, and then encapsulating them, the flexible piezoresistive sensor with the shock-resistant structure is obtained.

[0021] The mold is provided with a plurality of evenly distributed first circular holes, and at least two evenly distributed second circular holes are provided on the bottom wall of the first circular holes. The depth of the second circular holes is greater than that of the first circular holes, and the diameter of the second circular holes is smaller than that of the first circular holes.

[0022] Preferably, in step A1, the method for preparing the matrix material includes the following steps:

[0023] B1. Multi-walled carbon nanotubes are mixed with a dispersant and anhydrous ethanol and then dispersed evenly to obtain a CNT mixture.

[0024] B2. Add the polydimethylsiloxane component to the CNT mixture and mix and stir to obtain the PDMS mixture;

[0025] B3. The PDMS mixture is heated at 40-65°C until the anhydrous ethanol has completely evaporated, and then a curing agent is added and mixed to obtain the matrix material.

[0026] Preferably, in step A1, the specific molding operation is as follows: after laying the flexible matrix material into the mold, a vacuum is drawn to remove air, and then the entire mold containing the matrix material is subjected to a vacuum treatment for 30-50 minutes, with the vacuuming rate set to 2×10⁻⁶. -4 ~4×10 -4 Pa*m 3 The system temperature is 55-80℃ during the evacuation process. After the evacuation is completed, the system is directly heated and cured under vacuum. The curing temperature is 120℃ and the curing time is 30-50 minutes, thus obtaining the first flexible impact-resistant component and the second flexible impact-resistant component.

[0027] Specifically, a method for fabricating a flexible piezoresistive sensor with an impact-resistant structure includes:

[0028] After the substrate material is spin-coated into the mold, vacuum degassing and heat curing are performed to obtain the first flexible impact-resistant component and the second flexible impact-resistant component, respectively.

[0029] The process of processing an acrylic sheet to obtain a mold specifically includes: performing laser drilling pretreatment on the acrylic sheet to obtain a bottom circular hole; and continuing to perform a second drilling process inside the bottom circular hole of the acrylic sheet to obtain a cone angle generating mold, thereby obtaining a flexible impact-resistant component generating mold.

[0030] The present invention has the following advantages and beneficial effects:

[0031] The flexible piezoresistive sensor with an impact-resistant structure of the present invention uses two identical flexible impact-resistant components, with the first cone angle of the first flexible impact-resistant component in contact with the second cone angle of the second flexible impact-resistant component. By bending the first and second cone angles under force, the sensor senses the pressure on the flexible piezoresistive sensor, achieving a super-sensitive function to minute load changes. When the first flexible loose layer of the first flexible impact-resistant component and the second flexible loose layer of the second flexible impact-resistant component are compressed, the toothed cavity inside can absorb a large amount of intense load energy.

[0032] The flexible piezoresistive sensor with an impact-resistant structure of the present invention achieves the functions of high sensitivity and impact resistance of an electromechanical response mechanical sensor. It not only outperforms traditional flexible sensors in terms of sensitivity, but also represents an innovation in the field of impact energy absorption of flexible sensors.

[0033] The preparation method of this invention breaks through the traditional method's reliance on vacuuming. By controlling the pumping rate, closed pores of different sizes, i.e., toothed cavity structures, are formed inside the flexible piezoresistive sensor. Unlike through-hole structures, closed pores not only absorb more energy but also possess strong memory capabilities, able to recover to their original shape before being compressed within a certain range. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the structure of the flexible piezoresistive sensor with impact resistance of the present invention;

[0035] Figure 2 This is a three-dimensional perspective view of the antenna structure of the impact-resistant flexible piezoresistive sensor of the present invention.

[0036] Figure 3 This is a front view of the flexible piezoresistive sensor with impact resistance of the present invention after being subjected to different pressures;

[0037] Figure 4 This is a schematic diagram showing the impact values ​​of the impact-resistant flexible piezoresistive sensor of the present invention and two other flexible sensors.

[0038] Symbol explanation:

[0039] 1—First flexible impact-resistant component, 2—First flexible loose layer, 3—First toothed cavity, 4—First cone angle, 5—Second flexible impact-resistant component, 6—Second flexible loose layer, 7—Second toothed cavity, 8—Second cone angle. Detailed Implementation

[0040] To better understand the present invention, the following embodiments are further illustrations of the present invention, but the content of the present invention is not limited to the following embodiments.

[0041] Example 1:

[0042] like Figure 1 and Figure 2 As shown, this embodiment provides a flexible piezoresistive sensor with impact resistance, comprising two identical flexible impact-resistant components, namely a first flexible impact-resistant component 1 and a second flexible impact-resistant component 5; the first flexible impact-resistant component 1 includes a first flexible porous layer 2, a first toothed cavity 3, and a first cone angle 4; the lower surface of the first flexible porous layer 2 is connected to a first electrode; the upper surface of the second flexible porous layer 6 is connected to a second electrode; the first cone angle 4 contacts the second cone angle 8.

[0043] Specifically, the first flexible porous layer 2 and the first cone angle 4 cover the first toothed cavity 3. The second flexible porous layer 6 and the second cone angle 8 cover the second toothed cavity 7.

[0044] This embodiment achieves ultra-sensitive response to minute load changes by sensing the pressure on the flexible piezoresistive sensor through bending of the first cone angle 4 and the second cone angle 8 under force; and by the first flexible loose layer 2 of the first flexible impact-resistant component 1 and the second flexible loose layer 6 of the second flexible impact-resistant component 5 being compressed and then indented into the toothed cavity, allowing the toothed cavity to store and absorb a large amount of energy, thus achieving an energy absorption effect. Specifically, as shown... Figure 3 As shown in (a), when the flexible piezoresistive sensor with an impact-resistant structure is subjected to pressure, the contact point located at the first cone angle 4 contacts the contact point located at the second cone angle 8; as Figure 3 As shown in (b), when the flexible piezoresistive sensor with an impact-resistant structure is further subjected to a load, the first flexible porous layer 2 and the second flexible porous layer 6 are recessed inward, absorbing part of the energy through the reaction force; as Figure 3 As shown in (c), when the flexible piezoresistive sensor with an impact-resistant structure is subjected to a large load, the first cone angle 4 and the second cone angle 8 are completely compressed and bent, enabling the flexible sensor to transmit more electrical signals and detect larger loads. At the same time, the first flexible loose layer 2 and the second flexible loose layer 6 are respectively embedded in the internal chambers of the first toothed cavity 3 and the second toothed cavity 7, and the compressed internal air can absorb more energy.

[0045] Furthermore, the first flexible impact-resistant component 1 is connected to the first electrode via silver paste; the second flexible impact-resistant component 5 is connected to the second electrode via silver paste. In this embodiment, the first electrode and the second electrode are connected to a resistance measuring device, thereby enabling real-time sensing of changes in external mechanical loads by monitoring the resistance value change of the flexible piezoresistive sensor.

[0046] In this embodiment, both the first and second electrodes are copper electrodes; in other embodiments, the first and second electrodes may be other optional electrodes. Specifically, the copper electrodes are bonded to the surface of the impact-resistant structure using silver paste.

[0047] In this embodiment, the first cone angle includes at least two uniformly distributed cone angles, the second cone angle includes at least two uniformly distributed cone angles, the length of each cone angle is 1.2 to 1.8 mm, and the bottom diameter of each cone angle is 0.08 to 0.12 mm.

[0048] In this embodiment, the thickness of the first flexible porous layer and the second flexible porous layer is 1 ± 0.2 mm.

[0049] In this embodiment, the depth of the first toothed cavity and the second toothed cavity is 4±0.5 mm, and both the first toothed cavity and the second toothed cavity are hemispherical with a diameter of 2±0.4 mm.

[0050] In this embodiment, the distance between two adjacent first toothed cavities is 2 to 3 mm, and the distance between two adjacent second toothed cavities is 2 to 3 mm.

[0051] In this embodiment, the matrix materials of the first flexible impact-resistant component and the second flexible impact-resistant component are both multi-walled carbon nanotube / polydimethylsiloxane composite materials, wherein the mass ratio of multi-walled carbon nanotubes to polydimethylsiloxane is 1:20.

[0052] Example 2:

[0053] This embodiment provides a method for fabricating a flexible piezoresistive sensor with an impact-resistant structure, comprising:

[0054] Step S1: Based on the impact-resistant structural form, a flexible impact-resistant component forming mold is obtained by processing the acrylic sheet. In this embodiment, the acrylic sheet is laser-processed to obtain the flexible impact-resistant component forming mold.

[0055] The process of obtaining a flexible impact-resistant component molding die by processing a template according to the structural form of the impact-resistant component specifically includes:

[0056] Pre-drill holes in the acrylic sheet to create bottom round holes;

[0057] In this embodiment, the pre-drilling process of the template to obtain the bottom circular hole specifically includes: using drawing software to draw the hole diameter, number of holes, and hole arrangement to obtain a drilling drawing; using a laser processing device with preset power (5W) and number of turns, pre-drilling the template according to the drilling drawing to obtain the bottom circular hole. Further, the holes in the pre-drilling process are arranged in a uniform square pattern, and the number of holes can be manually controlled; in this embodiment, 8*8 holes are used as an example.

[0058] A second drilling process is performed on the original bottom circular hole of the acrylic sheet to obtain a cone angle generating mold, thereby obtaining a flexible impact-resistant component generating mold.

[0059] Preferably, the diameter of the hole in the first drilling process is 1 mm, the diameter of the hole in the second drilling process is 0.08 mm, and the drilling depth of the second drilling process is greater than the drilling depth of the first drilling process. The laser processing device is preset to a power of 3 W during the second drilling process.

[0060] Step S2: Prepare a flexible matrix material; the flexible matrix material is the material used to manufacture flexible impact-resistant components;

[0061] The preparation of the flexible matrix material specifically includes:

[0062] Multi-walled carbon nanotubes were mixed with a dispersant and anhydrous ethanol to obtain a CNT mixture.

[0063] The process of mixing multi-walled carbon nanotubes (CNTs) with a dispersant and anhydrous ethanol to obtain a CNT mixture specifically includes: mixing CNTs and a dispersant at a mass ratio of 10:1, then adding anhydrous ethanol and mixing to obtain a first mixture; wherein the mass ratio of CNTs to anhydrous ethanol is 1:60. Further, the CNTs and the dispersant are placed in a small beaker, anhydrous ethanol is added, the beaker is sealed with aluminum foil, and the beaker is placed in a magnetic stirrer and stirred for 5-6 hours to obtain the CNT mixture. Specifically, to prepare 1 gram of CNTs, the required mass of dispersant is 0.1 gram, and the mass of anhydrous ethanol is 60 grams.

[0064] To avoid aggregation of multi-walled carbon nanotubes (CNTs), the CNT mixture is subjected to ultrasonic cleaning. Specifically, the ultrasonic cleaning time is half an hour to ensure complete dispersion of the CNTs, and the temperature during the ultrasonic treatment process should not be too high, with the water level at the same level as the liquid surface. To avoid overheating, the cleaning process should be paused every ten minutes and completed in three stages.

[0065] Add the polydimethylsiloxane component to the CNT mixture and mix and stir to obtain a PDMS mixture;

[0066] In this embodiment, the step of adding polydimethylsiloxane (PDMS) component to the CNT mixture and mixing to obtain a PDMS mixture specifically includes: adding PDMS component to the CNT mixture, sealing it with aluminum foil, and continuously stirring for 24 hours to obtain the PDMS mixture. Further, to ensure that some multi-walled carbon nanotubes are exposed on the outer surface of the flexible matrix material after the obtained multi-walled carbon nanotube / polydimethylsiloxane flexible PDMS mixture is cured, thereby obtaining a conductive path that can change the sensor resistance value during compression, the multi-walled carbon nanotubes constitute 5% of the PDMS component by mass, the mass ratio of PDMS component to multi-walled carbon nanotubes is 20:1, and the mass of PDMS component added to the first mixture is 20 grams.

[0067] The PDMS mixture is stirred until the anhydrous ethanol is completely evaporated. A polydimethylsiloxane curing agent component is then added to the PDMS mixture, and the mixture is stirred to obtain a flexible matrix material. Specifically, the second mixture is heated and stirred at 60°C for 2-3 days until the anhydrous ethanol is completely evaporated. Then, the polydimethylsiloxane curing agent component is added and stirred evenly to obtain the flexible matrix material. The mass ratio of the polydimethylsiloxane curing agent component to the polydimethylsiloxane matrix component is 1:10, i.e., 2 grams of the polydimethylsiloxane curing agent component is added.

[0068] Step S3: After the flexible matrix material is laid into the mold for generating the flexible impact-resistant component, vacuum heating treatment is performed to obtain the first flexible impact-resistant component 1; specifically, this includes: after uniformly laying the flexible matrix material into the mold for generating the flexible impact-resistant component, vacuum degassing and heat curing treatment are performed, and the cured flexible matrix material is removed from the mold for generating the flexible impact-resistant component to obtain the first flexible impact-resistant component 1; specifically, the flexible matrix material is first placed in a petri dish and vacuumed to remove air, and then the mold for generating the flexible impact-resistant component coated with the flexible matrix material is placed in a vacuum drying oven and vacuumed for 40 minutes, with the evacuation rate set to 3×10 -4 Pa*m 3 / min, after the time is up, do not open the vacuum chamber door, directly heat and cure, set the temperature to 120° and the time to 30 minutes, after taking it out, remove the cured flexible matrix material from the generation mold to obtain the first flexible impact-resistant component 1.

[0069] Step S4: The steps are the same as in S3. The first flexible impact-resistant component 5 is obtained by vacuum heating and curing.

[0070] Step S5: Assemble the first flexible impact-resistant component 1 and the first flexible impact-resistant component 5 to obtain a flexible piezoresistive sensor with impact resistance. Specifically, this includes placing the first flexible impact-resistant component 1 and the first flexible impact-resistant component 5 vertically, with the first cone angle 4 of the first flexible impact-resistant component 1 in contact with the second cone angle 8 of the first flexible impact-resistant component 5.

[0071] Conductive silver paste is applied to the edge of the first flexible impact-resistant component 1 with a conical angle, and a first electrode is led out; silver paste is applied to the edge of the first flexible impact-resistant component 5 without a conical angle structure, and a second electrode is led out.

[0072] An insulating coating is applied to the silver paste of the first flexible shock-resistant component 1 and the silver paste of the first flexible shock-resistant component 5, respectively, and then an encapsulation process is performed to obtain a flexible piezoresistive sensor with an shock-resistant structure.

[0073] Example 3:

[0074] like Figure 4 As shown in the figure, this embodiment provides an application demonstration of a flexible piezoresistive sensor with an impact-resistant structure:

[0075] Specifically, the first flexible impact-resistant component 1 and the second flexible impact-resistant component 2 are installed, wherein the first cone angle 4 of the first flexible impact-resistant component 1 contacts the second cone angle 8 of the second flexible impact-resistant component 5; and the first flexible impact-resistant component 1 is connected to the first electrode by silver paste; the second flexible impact-resistant component 5 is connected to the second electrode by silver paste.

[0076] In this embodiment, the impact pendulum strikes the impact-resistant flexible piezoresistive sensor of the present invention to specifically demonstrate the specific energy absorption value of the present invention. To achieve a comparative effect, two flexible sensor components with the same material ratio are specially prepared in this embodiment: a structureless flexible component and a porous flexible component. Together with the impact-resistant flexible component of the present invention, the three different sensors are impacted by the impact pendulum to demonstrate their different energy absorption values.

[0077] Specifically, the unstructured flexible component, the porous flexible component, and the impact-resistant flexible component are placed in the clamp of the impact pendulum; to ensure the sensor is clamped securely and does not fall off, the thickness of the clamp is 5% of the sensor component's deformation; after clamping the sensor component, the corresponding impact pendulum hammer blade is selected, and the impact pendulum hammer blade is pulled up to its highest point. The start button on the control panel is pressed, and after the hammer blade completely breaks the flexible component and stabilizes, the relevant values ​​are recorded and used in the calculation, such as... Figure 4 As shown; where Figure 4 (a) Simplified structure for impact pendulum; Figure 4(b) shows the energy absorption values ​​of three different flexible sensor components; Figure 4 (c) and (d) show the current change of the sensor when it is hit by an impact pendulum. (d) is a magnified view of a part. It can be seen that the current change of the present invention is significantly higher than that of the other two when it is subjected to impact load, which shows the high sensitivity of the present invention. At the same time, the energy absorbed by the present invention after impact is also significantly higher than that of the other two, which is enough to illustrate the advantages of the present invention in buffering and vibration reduction performance.

[0078] This invention improves the sensitivity of flexible piezoresistive materials to minute loads by setting a curved first cone angle 4 and a second cone angle 8. It also solves the problem that traditional flexible piezoresistive sensors cannot withstand large impact loads by utilizing the upper first flexible loose layer 2 and the second flexible loose layer 6, and the middle first toothed cavity 3 and the second toothed cavity 7. Specifically, when the invention is subjected to a minute load compression, the slight change in contact area caused by the compression and bending deformation of the easily bendable cone angle leads to a change in the resistance value of the piezoresistive sensor, thus allowing it to sense minute stress changes. When subjected to a significant load, the upper flexible loose layer indents inward to absorb some energy in the form of a reaction force, while the air inside the toothed cavity absorbs most of the energy, achieving a buffering and shock-absorbing effect.

[0079] Compared with the prior art, the present invention has the following advantages:

[0080] (1) In terms of performance, this invention utilizes a simple laser processing method and a low-cost multi-walled carbon nanotube / polydimethylsiloxane composite material to prepare a flexible matrix material with an impact-resistant structure, achieving both high sensitivity and impact resistance in an electromechanical response sensor. The impact-resistant flexible piezoresistive sensor proposed in this invention not only outperforms traditional flexible sensors in terms of sensitivity but also achieves innovation in the field of impact energy absorption. Furthermore, it is superior to traditional flexible sensor manufacturing because the mold manufacturing process can be set independently.

[0081] (2) In terms of structural features, this invention breaks through the traditional method of utilizing the vacuuming process. By controlling the pumping rate, closed holes of different aperture sizes are formed inside the flexible piezoresistive sensor. Unlike through-hole structures, closed holes can not only absorb more energy, but also have a strong memory ability, and can recover to the shape before being squeezed within a certain range.

[0082] (3) In terms of manufacturing cost, while possessing a high strain sensitivity coefficient for minute loads and the ability to absorb impact energy, the present invention has a simple laser processing method and low material cost, which makes the mechanical sensor of the present invention have an order-of-magnitude advantage in cost performance compared with other traditional mechanical sensors.

[0083] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. The above descriptions are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the invention, and these improvements and modifications are also considered within the scope of protection of the present invention.

Claims

1. A flexible piezoresistive sensor with an impact-resistant structure, characterized in that: The flexible piezoresistive sensor with an impact-resistant structure includes a first flexible impact-resistant component and a second flexible impact-resistant component that are arranged opposite to each other and have the same structure. The first flexible impact-resistant component has multiple hollow first tooth-shaped cavities, a first flexible loose layer covering one side of the first tooth-shaped cavity, and a first cone angle covering the other side of the first tooth-shaped cavity. The first flexible loose layer and the first cone angle form a closed and hollow first tooth-shaped cavity. The first flexible impact-resistant component is connected to a first electrode. The second flexible impact-resistant component has multiple hollow second tooth-shaped cavities, a second flexible loose layer covering one side of the second tooth-shaped cavity, and a second cone angle covering the other side of the second tooth-shaped cavity. The second flexible loose layer and the second cone angle form a closed and hollow second tooth-shaped cavity. The second flexible impact-resistant component is connected to a second electrode. The first cone angle is in contact with the second cone angle. By bending under force at the first cone angle and the second cone angle, the pressure on the flexible piezoresistive sensor is sensed, realizing an ultra-sensitive function for minute load changes. The first cone angle includes at least two uniformly distributed cone angles, the second cone angle includes at least two uniformly distributed cone angles, the length of each cone angle is 1.2 to 1.8 mm, and the bottom diameter of each cone angle is 0.08 to 0.12 mm.

2. The flexible piezoresistive sensor with an impact-resistant structure according to claim 1, characterized in that: The first electrode is connected to the side of the first flexible impact-resistant component with a first cone angle via silver paste, and the second electrode is connected to the side of the second flexible impact-resistant component with a second cone angle via silver paste.

3. The flexible piezoresistive sensor with an impact-resistant structure according to claim 1, characterized in that: The thickness of the first flexible porous layer and the second flexible porous layer is 0.8 to 1.2 mm.

4. The flexible piezoresistive sensor with an impact-resistant structure according to claim 1, characterized in that: The depth of the first toothed cavity and the second toothed cavity is 3.5 to 4.5 mm, and both the first toothed cavity and the second toothed cavity are hemispherical with a diameter of 1.6 to 2.4 mm.

5. The flexible piezoresistive sensor with an impact-resistant structure according to claim 1, characterized in that: The distance between two adjacent first toothed cavities is 2-3 mm, and the distance between two adjacent second toothed cavities is 2-3 mm.

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