A needle type crystal sorting machine

Abstract

This invention relates to a needle-type crystal stacking machine. It includes a frame with a first driving device mounted on it, used to drive a crystal stacking frame to move; a crystal stacking frame mounted on the first driving device, with a second driving device mounted on it, used to drive an ejection mechanism to move; and further includes a blue film clamping mechanism, a blue film loading mechanism, a blue film conveying mechanism, and a substrate carrying platform. The needle-type crystal stacking machine of this invention utilizes the blue film conveying mechanism and the blue film clamping mechanism in conjunction with the first driving device to achieve automatic loading and unloading of blue film, improving processing efficiency. Simultaneously, during processing, the substrate carrying platform remains stationary, while the first driving device drives the crystal stacking frame to move the blue film clamping mechanism a large distance, and the second driving device drives the ejection mechanism to move a small distance, allowing for faster adjustment of the ejection position and further improving processing efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing equipment technology, and in particular to a needle-type crystal stacking machine. Background Technology

[0002] Die bonding equipment is used to bond dies to a substrate, but traditional surface laser die bonding equipment has the problem of low efficiency;

[0003] To address the aforementioned issues, existing technologies utilize a substrate support platform and a die support platform with two degrees of freedom in the horizontal direction, and an ejection mechanism with one degree of freedom in the vertical direction. The substrate support platform and the die support platform respectively support the substrate and the blue film. The substrate support platform and the die support platform are displaced in the horizontal direction to align the die with the substrate, and the ejection mechanism is used to complete the ejection and welding of the die, thereby improving the processing efficiency to a certain extent.

[0004] The technical problems with the above solution are as follows: the screw at the die carrier platform needs to be manually operated to install and remove the blue film, which takes a long time for loading and unloading, reducing the overall processing efficiency. At the same time, since the horizontal position of the ejection mechanism is fixed, the ejection of each die requires the die carrier platform and the substrate carrier platform to move to align with the new ejection position, which also reduces the overall processing efficiency. Summary of the Invention

[0005] Therefore, it is necessary to provide a needle-type crystal stacking machine to address the problems pointed out in the background art.

[0006] A needle-type crystal stacking machine includes a frame, on which are arranged:

[0007] A first driving device, the first driving device being used to drive the crystal rack to move, the first driving device including two degrees of freedom in the horizontal direction;

[0008] A crystal rack is mounted on a first driving device, and a second driving device is mounted on the crystal rack. The second driving device is used to drive the ejection mechanism to move, and the second driving device includes three degrees of freedom.

[0009] A blue film clamping mechanism is disposed on a crystal rack and is used to clamp a blue film loading mechanism.

[0010] A blue film loading mechanism, used for loading blue film;

[0011] A blue film conveying mechanism, which is used to convey the blue film loading mechanism;

[0012] A substrate support platform, which is used to support a substrate.

[0013] The needle-type crystal stacking machine of the present invention utilizes a blue film conveying mechanism and a blue film clamping mechanism in conjunction with a first driving device to achieve automatic loading and unloading of blue film, thereby improving processing efficiency. At the same time, during the processing, the substrate support platform remains stationary, while the first driving device drives the crystal stacking frame to move the blue film clamping mechanism a large distance, and the second driving device drives the ejection mechanism to move a small distance. The ejection position can be adjusted more quickly, further improving processing efficiency.

[0014] In one embodiment, a first visual inspection mechanism is provided between the substrate carrying platform and the blue film conveying mechanism, and the first visual inspection mechanism is directed toward the movement trajectory of the crystal rack.

[0015] The position of the blue film held by the blue film clamping mechanism is inspected by the first visual inspection agency to ensure that the position of the blue film is accurate, which can effectively reduce the product defect rate.

[0016] In one embodiment, the first driving device includes a first driving mechanism and a second driving mechanism, which are respectively used to drive the crystal rack in two horizontal directions.

[0017] In one embodiment, the second driving device includes a third driving mechanism, a fourth driving mechanism, and a fifth driving mechanism. The third driving mechanism is used to drive the ejector mechanism in the height direction, and the fourth and fifth driving mechanisms are used to drive the ejector mechanism in two horizontal directions, respectively.

[0018] In one embodiment, the blue film loading mechanism includes an upper loading frame and a lower loading frame. The upper loading frame and the lower loading frame each have holes for crystal discharge in the middle. The upper loading frame and the lower loading frame have annular loading grooves on opposite sides. The loading grooves are respectively opened at the edges of the holes in the upper loading frame and the lower loading frame.

[0019] By using the loading slot to hold the blue film between the upper and lower loading frames, the position of the blue film is more stable. The upper and lower loading frames themselves also provide a certain degree of protection for the blue film and facilitate the movement of the blue film by clamping the upper and lower loading frames. Furthermore, the upper and lower loading frames will not come into contact with the blue film when clamping the upper and lower loading frames, thus enhancing the safety of the blue film.

[0020] In one embodiment, the blue film clamping mechanism includes a clamping frame, one side of which has an opening for clamping the blue film loading mechanism, a clamping block is provided on the side inside the opening, and a clamping drive mechanism is provided between the clamping block and the clamping frame.

[0021] The clamping blocks are used to hold the upper and lower loading frames, which is efficient and stable, and does not affect the movement and ejection of the ejection mechanism.

[0022] In one embodiment, the shape of the clamping block matches the shape of the outer surface of the upper and lower loading racks after they are stacked and loaded.

[0023] The shape of the clamping block matches the shapes of the upper and lower loading frames, resulting in better stability during clamping and improved motion stability of the blue membrane.

[0024] In one embodiment, the clamping block has a clamping groove, the shape of which matches the outer surface shape of the upper and lower loading frames after they are stacked and loaded.

[0025] By setting up clamping slots, the clamping blocks not only apply clamping force to the upper and lower loading frames from the side during clamping, but also lock the upper and lower loading frames into the clamping slots. This limits the height of the upper and lower loading frames, preventing them from coming loose and resulting in better and more stable clamping.

[0026] In one embodiment, the upper loading frame and the lower loading frame are respectively provided with limit grooves on their sides, and the clamping block is correspondingly provided with limit blocks.

[0027] The limiting groove and limiting block further improve the clamping effect of the clamping block on the upper and lower loading frames, and further limit the relative position between the upper and lower loading frames, thereby further improving the stability of the blue film being clamped.

[0028] In one embodiment, a second visual inspection mechanism is provided on the crystal rack, and the second visual inspection mechanism faces the substrate support platform.

[0029] The second visual inspection mechanism is used to inspect the position of the substrate on the substrate carrier platform to ensure that the die ejected by the ejection mechanism corresponds to the position on the substrate, thereby further improving the processing quality. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the overall structure of the needle-type crystal stacking machine of the present invention;

[0031] Figure 2 This is a partial structural schematic diagram of the crystal rack of the needle-type crystal racking machine of the present invention;

[0032] Figure 3 This is a top view of the blue film clamping mechanism of the needle-type crystal stacking machine of the present invention before loading;

[0033] Figure 4 This is a top view of the blue film clamping mechanism of the needle-type crystal stacking machine of the present invention reaching the feeding position;

[0034] Figure 5 This is a top view of the blue film clamping mechanism of the needle-type crystal stacking machine of the present invention after loading;

[0035] Figure 6 This is a schematic diagram showing the cooperation between the blue film loading mechanism and the clamping block of the needle-type crystal stacking machine of the present invention.

[0036] Explanation of reference numerals in the attached figures:

[0037] 10. First driving device; 11. First driving mechanism; 20. Crystal rack; 30. Second driving device; 31. Third driving mechanism; 32. Fourth driving mechanism; 33. Fifth driving mechanism; 40. Ejection mechanism; 50. Blue film clamping mechanism; 51. Clamping frame; 52. Clamping block; 521. Clamping groove; 522. Limiting block; 53. Clamping driving mechanism; 60. Substrate carrying platform; 70. Blue film conveying mechanism; 80. Blue film loading mechanism; 81. Upper loading frame; 82. Lower loading frame; 83. Loading groove; 84. Limiting groove; 90. First visual inspection mechanism. Detailed Implementation

[0038] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to limit the invention. The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described; however, any combination of these technical features that does not contradict each other should be considered within the scope of this specification.

[0040] A needle-type crystal stacking machine, such as Figure 1 As shown, it includes a rack (not shown), on which are mounted:

[0041] The first driving device 10 is used to drive the crystal rack 20 to move. The first driving device 10 includes two degrees of freedom in the horizontal direction.

[0042] In this embodiment, the two degrees of freedom of the first driving device 10 are the first direction and the second direction, where the first direction is... Figure 1The direction indicated by the middle arrow is the second direction, which is perpendicular to the first direction on the horizontal plane.

[0043] A crystal rack 20 is mounted on a first driving device 10. A second driving device 30 is mounted on the crystal rack 20. The second driving device 30 is used to drive the ejection mechanism 40 to move. The second driving device 30 includes three degrees of freedom.

[0044] In this embodiment, the three degrees of freedom of the second driving device 30 are the first direction, the second direction, and the height direction.

[0045] Blue film clamping mechanism 50 is disposed on crystal rack 20 and is used to clamp blue film loading mechanism 80.

[0046] Blue film loading mechanism 80, used for loading blue film;

[0047] Blue film conveying mechanism 70, used to convey blue film loading mechanism 80;

[0048] In this embodiment, the blue film conveying mechanism 70 is a conveyor belt.

[0049] The substrate carrier platform 60 is used to carry the substrate.

[0050] The aforementioned needle-type crystal assembly machine utilizes a blue film conveying mechanism 70 to transport a blue film loading mechanism 80 loaded with blue film. During loading, the blue film loading mechanism 80 moves from the blue film conveying mechanism 70 toward the loading position. The crystal assembly rack 20 drives the blue film clamping mechanism 50 to move toward the loading position under the drive of the first driving device 10. Finally, at the loading position, the blue film clamping mechanism 50 clamps the blue film loading mechanism 80 on the blue film conveying mechanism 70 and, under the drive of the first driving device 10, enters the crystal assembly welding position. The substrate is positioned on the substrate support platform 60, which remains in the crystal assembly welding position. The crystal assembly rack 20 is in... After the crystal arrangement welding position is determined, crystal arrangement welding can begin. During the crystal arrangement welding process, the first driving device 10 and the second driving device 30 drive the crystal arrangement frame 20 and the ejection mechanism 40 to move horizontally, respectively. The ejection mechanism 40 is finely adjusted based on the movement of the crystal arrangement frame 20 using the second driving device 30. After the position is adjusted, the ejection mechanism 40 ejects the crystals on the blue film held by the blue film clamping mechanism 50 to complete the welding. After the welding is completed, the blue film clamping mechanism 50, driven by the first driving device 10, transports the blue film loading mechanism 80 toward the unloading position. At the unloading position, the blue film clamping mechanism 50 releases the blue film loading mechanism 80 to complete the unloading.

[0051] In this embodiment, the conveying direction of the blue film conveying mechanism 70 is perpendicular to the horizontal direction. Figure 1As shown by the arrow, and with the loading and unloading positions at the same location, the blue film conveying mechanism 70 transports the blue film loading mechanism 80, which contains the blue film, to the loading position. Then, the blue film clamping mechanism 50 removes the blue film loading mechanism 80, which is the loading process. After processing is completed, the blue film clamping mechanism 50 sends the blue film loading mechanism 80 back to the unloading position, which is the same as the loading position, also above the blue film conveying mechanism 70. Then, the blue film loading mechanism 80 is released, the blue film clamping mechanism 50 is reset, and the blue film conveying mechanism 70 continues to transport the used blue film loading mechanism 80 downwards, which is the unloading process.

[0052] The needle-type crystal stacking machine of the present invention utilizes the blue film conveying mechanism 70 and the blue film clamping mechanism 50 in conjunction with the first driving device 10 to realize the automatic loading and unloading of blue film, thereby improving the processing efficiency. At the same time, during the processing, the substrate carrying platform 60 remains stationary, while the first driving device 10 drives the crystal stacking frame 20 to move the blue film clamping mechanism 50 by a large distance, and the second driving device 30 drives the ejection mechanism 40 to move by a small distance. The ejection position can be adjusted more quickly, further improving the processing efficiency.

[0053] Regarding the difference in ejection efficiency, in the prior art, the positions of the blue film support platform and the substrate support platform need to be adjusted before each blue film is ejected. In this invention, the substrate support platform 60 remains stationary, and for some grains, the blue film clamping mechanism 50 can also remain stationary, with ejection completed only by the movement of the ejection mechanism 40, thus improving the overall processing efficiency.

[0054] In one embodiment, such as Figure 1 As shown, a first visual inspection mechanism 90 is provided between the substrate carrying platform 60 and the blue film conveying mechanism 70, and the first visual inspection mechanism 90 moves toward the crystal rack 20.

[0055] The first visual inspection mechanism 90 inspects the position of the blue film held by the blue film clamping mechanism 50 to ensure the accuracy of the blue film's position, which can effectively reduce the product defect rate.

[0056] In one embodiment, such as Figure 1 As shown, the first driving device 10 includes a first driving mechanism 11 and a second driving mechanism (not shown), which are used to drive the crystal rack 20 in two horizontal directions, respectively.

[0057] In this embodiment, the first driving mechanism 11 drives the crystal rack 20 to move in a first direction, which is the direction of movement. Figure 1 The direction indicated by the middle arrow.

[0058] In one embodiment, such as Figure 2As shown, the second drive device 30 includes a third drive mechanism 31, a fourth drive mechanism 32 and a fifth drive mechanism 33. The third drive mechanism 31 is used to drive the ejector mechanism 40 in the height direction, and the fourth drive mechanism 32 and the fifth drive mechanism 33 are used to drive the ejector mechanism 40 in two horizontal directions, respectively.

[0059] In this embodiment, the third driving mechanism 31 drives the ejection mechanism 40 to move in the height direction, the fifth driving mechanism 33 drives the ejection mechanism 40 to move in the first direction, and the fourth driving mechanism 32 drives the ejection mechanism 40 to move in the second direction.

[0060] In this embodiment, the third driving mechanism 31 is disposed on the crystal rack 20, the fourth driving mechanism 32 is disposed at the output end of the third driving mechanism 31, the fifth driving mechanism 33 is disposed at the output end of the fourth driving mechanism 32, and the ejection mechanism 40 is disposed at the output end of the fifth driving mechanism 33.

[0061] In one embodiment, such as Figure 6 As shown, the blue film loading mechanism 80 includes an upper loading frame 81 and a lower loading frame 82. The upper loading frame 81 and the lower loading frame 82 are both provided with holes for crystal discharge in the middle. The upper loading frame 81 and the lower loading frame 82 are provided with annular loading grooves 83 on opposite sides. The loading grooves 83 are respectively provided at the edges of the holes in the upper loading frame 81 and the lower loading frame 82.

[0062] By using the loading slot 83 to hold the blue film between the upper loading frame 81 and the lower loading frame 82, the position of the blue film is more stable. The upper loading frame 81 and the lower loading frame 82 themselves also provide a certain degree of protection for the blue film. It is also convenient to move the blue film by clamping the upper loading frame 81 and the lower loading frame 82. Moreover, the upper loading frame 81 and the lower loading frame 82 will not come into contact with the blue film when clamping, thus making the blue film safer.

[0063] In one embodiment, such as Figures 3-5 As shown, the blue film clamping mechanism 50 includes a clamping frame 51. One side of the clamping frame 51 is provided with an opening for clamping the blue film loading mechanism 80. A clamping block 52 is provided on the side inside the opening. A clamping drive mechanism 53 is provided between the clamping block 52 and the clamping frame 51.

[0064] The clamping block 52 is used to clamp the upper loading frame 81 and the lower loading frame 82, which is efficient and stable, and does not affect the movement and ejection of the ejection mechanism 40.

[0065] Those skilled in the art will understand that the clamping drive mechanism 53 can be a hydraulic rod, an electric telescopic rod, a cylinder, etc. In this embodiment, the clamping drive mechanism 53 is a cylinder.

[0066] Before loading materials, such as Figure 3As shown, the blue film loading mechanism 80 is located on the blue film conveying mechanism 70. Figure 1 The position where it is located is the feeding position. At this time, the blue film conveying mechanism 70 stops conveying, and the first drive mechanism 11 drives the clamping frame 51 of the blue film clamping mechanism 50 to move toward the blue film loading mechanism 80, as shown. Figure 4 As shown, the clamping frame 51 is now in the loading position, and the blue film loading mechanism 80 is located within the opening of the clamping frame 51. Figure 5 As shown, the clamping drive mechanism 53 on the clamping frame 51 drives the clamping block 52 to clamp the blue film loading mechanism 80. Then, the first drive mechanism 11 drives the clamping frame 51 to move toward the substrate support platform 60 to perform crystal arrangement welding, and the loading process ends.

[0067] The process of feeding materials is the reverse of that of feeding materials, and will not be described in detail here.

[0068] It is understandable that the loading position can be different from the unloading position, that is, different blue film conveying mechanisms 70 are used to convey the blue film loading mechanism 80 before processing and the blue film loading mechanism 80 after processing respectively.

[0069] In one embodiment, such as Figures 3-6 As shown, the shape of the clamping block 52 matches the shape of the outer surface of the upper loading frame 81 and the lower loading frame 82 after they are stacked and loaded.

[0070] In this embodiment, the outer surfaces of the upper loading rack 81 and the lower loading rack 82 are both rectangular, and the rectangle has straight sides, so the outer surface of the clamping block 52 is also a straight surface.

[0071] In other embodiments, the overall shape of the upper loading frame 81 and the lower loading frame 82 is annular, that is, the outer surfaces of the upper loading frame 81 and the lower loading frame 82 are both circumferential surfaces, and the outer surface of the corresponding clamping block 52 is also an arc surface.

[0072] The shape of the clamping block 52 matches the shapes of the upper loading frame 81 and the lower loading frame 82, which makes the clamping stability better and the movement stability of the blue film better.

[0073] In one embodiment, such as Figure 6 As shown, the clamping block 52 has a clamping groove 521, the shape of which matches the outer surface shape of the upper loading frame 81 and the lower loading frame 82 after they are stacked and loaded.

[0074] By setting the clamping groove 521, during clamping, the clamping block 52 not only applies clamping force to the upper loading frame 81 and the lower loading frame 82 from the side, but also locks the upper loading frame 81 and the lower loading frame 82 into the clamping groove 521. That is, the height direction of the upper loading frame 81 and the lower loading frame 82 is also limited, which prevents the upper loading frame 81 and the lower loading frame 82 from loosening, resulting in a better and more stable clamping effect.

[0075] In one embodiment, such as Figure 6 As shown, the upper loading frame 81 and the lower loading frame 82 are respectively provided with limit grooves 84 on their sides, and the clamping block 52 is provided with a corresponding limit block 522.

[0076] The limiting groove 84 and the limiting block 522 further improve the clamping effect of the clamping block 52 on the upper loading frame 81 and the lower loading frame 82, and further limit the relative position between the upper loading frame 81 and the lower loading frame 82, thereby further improving the stability of the blue film being clamped.

[0077] In one embodiment, such as Figure 6 As shown, the cross-sectional shape of the limiting groove 84 is trapezoidal, and the cross-sectional shape of the limiting block 522 is also trapezoidal. The trapezoidal structure has two inclined sides. Even if there is a slight deviation in height during clamping, it will automatically align under the guidance of the inclined sides, and at the same time, it avoids collision between the limiting block 522 and the opening edge of the limiting groove 84.

[0078] In one embodiment, a second visual inspection mechanism is provided on the crystal rack 20, and the second visual inspection mechanism faces the substrate support platform 60.

[0079] The position of the substrate on the substrate carrier platform 60 is inspected by a second visual inspection mechanism to ensure that the die ejected by the ejection mechanism 40 corresponds to the position on the substrate, thereby further improving the processing quality.

[0080] The first visual inspection unit 90, together with the second visual inspection unit, inspects the position of the blue film on the blue film clamping mechanism 50 and the position of the substrate on the substrate carrying platform 60, respectively, to ensure that the positions of the two correspond to each other during the crystal assembly and soldering process, which can effectively reduce the product defect rate.

[0081] The above embodiments merely illustrate several implementation methods of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A needle-type crystal stacking machine, characterized in that, Includes a rack, on which are provided: A first driving device, the first driving device being used to drive the crystal rack to move, the first driving device including two degrees of freedom in the horizontal direction; A crystal rack is mounted on a first driving device, and a second driving device is mounted on the crystal rack. The second driving device is used to drive the ejection mechanism to move, and the second driving device includes three degrees of freedom. A blue film clamping mechanism is mounted on a crystal rack and used to clamp a blue film loading mechanism. The blue film clamping mechanism includes a clamping frame, one side of which has an opening for clamping the blue film loading mechanism. A clamping block is provided on the side inside the opening. A clamping drive mechanism is provided between the clamping block and the clamping frame. The shape of the clamping block matches the outer surface shape of the upper and lower loading frames after stacking. A clamping groove is formed on the clamping block, the shape of which matches the outer surface shape of the upper and lower loading frames after stacking. Limiting grooves are respectively provided on the sides of the upper and lower loading frames, and corresponding limiting blocks are provided on the clamping block. A blue film loading mechanism is used to load blue film. The blue film loading mechanism includes an upper loading frame and a lower loading frame. The upper loading frame and the lower loading frame are both provided with holes for crystal discharge in the middle. The upper loading frame and the lower loading frame are provided with annular loading grooves on opposite sides. The loading grooves are respectively provided on the edges of the holes in the upper loading frame and the lower loading frame. A blue film conveying mechanism, which is used to convey the blue film loading mechanism; A substrate support platform, which is used to support a substrate.

2. The needle-type crystal stacking machine according to claim 1, characterized in that, A first visual inspection mechanism is provided between the substrate carrying platform and the blue film conveying mechanism, and the first visual inspection mechanism moves toward the crystal rack.

3. The needle-type crystal stacking machine according to claim 1, characterized in that, The first driving device includes a first driving mechanism and a second driving mechanism, which are respectively used to drive the crystal rack in two horizontal directions.

4. The needle-type crystal stacking machine according to claim 1, characterized in that, The second driving device includes a third driving mechanism, a fourth driving mechanism, and a fifth driving mechanism. The third driving mechanism is used to drive the ejector mechanism in the height direction, and the fourth and fifth driving mechanisms are used to drive the ejector mechanism in two horizontal directions, respectively.

5. The needle-type crystal stacking machine according to claim 2, characterized in that, The crystal rack is equipped with a second visual inspection mechanism, which faces the substrate support platform.

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