A method of designing a suction cup airway, a suction cup and a design device

Abstract

The disclosure provides a design method of a suction cup air channel, a suction cup and a design device. The design method comprises: discretely arranging M holes on the adsorption surface of the suction cup; randomly selecting N holes from the M holes to load vacuum, mapping the pressure load geometry to the sample, merging the other holes into the adsorption surface, and calculating the deformation difference between the maximum deformation and the minimum deformation of the sample; calculating the deformation difference of the sample when N = 1-M respectively; sorting the deformation difference from small to large, counting the frequency of the selected holes in the top P% deformation difference, and processing the adsorption surface between the top Q holes with the highest frequency as the suction cup air channel. The design method can efficiently and automatically select holes with small influence on the sample adsorption surface shape, reduce the influence of the adsorption force on the sample surface shape after the suction cup adsorbs the sample; and the design method is suitable for samples of different shapes, sizes, materials and weights, and has strong versatility.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical element chuck design, in particular to a design method of a chuck air channel, a chuck and a design device. BACKGROUND

[0002] In the processing and use of optical elements, the loading method has a non-negligible influence on the surface shape of the optical element. In the processing of the optical element, the optical element is mainly fixed on the mounting platform by gluing, which causes the surface shape of the optical element to change, thereby affecting the processing precision of the surface shape of the optical element. In the use of the optical element, the change of the surface shape of the optical element affects the reflected or transmitted light beam wave surface, and has a non-negligible influence on the final imaging quality / focus of the light spot.

[0003] Vacuum adsorption has uniform and stable clamping force, can realize rapid clamping and transmission of workpieces, and is widely used in electronics, medical treatment and machining. At present, chuck holes and ring air channel chucks are mainly used for loading planar optical elements. The chuck hole chuck mainly adjusts the size and interval of the chuck hole to affect the adsorption effect of the chuck, and the ring air channel chuck mainly adjusts the width, interval and radius of the air channel.

[0004] Due to the rationality of the air channel structure design and the influence of various function windows, the surface shape of the optical element after being adsorbed by the current chuck is in the order of hundreds of nanometers or microns, and the influence of the chuck on the surface shape of the optical element during adsorption and mounting of the optical element is rarely considered in the design. SUMMARY

[0005] The present application provides a design method of a chuck air channel, a chuck and a design device, which are used to at least partially solve the technical problems in the prior art that the design process of the chuck air channel is complicated, and the designed chuck cannot realize ultra-flat adsorption and loading of the optical element. The present application aims to efficiently complete the air channel structure design with the minimum surface shape influence under different interface condition restrictions, realize stable and reliable chuck fixing and mounting with small deformation, and finally realize ultra-flat adsorption and loading of the optical element.

[0006] Based on this, the present application provides a design method of a chuck air channel, comprising: discretely arranging M holes on the adsorption surface of the chuck; randomly selecting N holes from the M holes to load vacuum, mapping the pressure load geometry to the sample, merging the other holes into the adsorption surface, calculating the maximum deformation value and the minimum deformation value of the sample The deformation value difference between the maximum deformation value and the minimum deformation value of the sample; respectively calculating the deformation value difference of the sample when N=1~M; sorting the deformation value difference from small to large, counting the frequency of the selected holes in the front P% deformation value difference, and processing the adsorption surface between the top Q holes with the highest frequency as the chuck air channel.

[0007] According to an embodiment of the present disclosure, when the suction surface of the suction cup is a symmetrical structure, a symmetrical unit is selected for hole arrangement.

[0008] According to an embodiment of the present disclosure, from the M holes, N holes are selected to load vacuum, pressure load geometry is mapped to the sample, and the other holes are combined into the suction surface, specifically including: establishing M hole filling geometry blocks, mapping the hole geometry to the sample, establishing a cutting geometry block at the corresponding position of the sample, setting N filling geometry blocks as dead cells through cell birth and death technology, creating pressure load at the sample corresponding to the N holes; the remaining M-N filling geometry blocks are set as live cells, and the corresponding sample has a cutting geometry block, and a contact pair with the sample is created.

[0009] According to an embodiment of the present disclosure, the suction surface between the top Q holes with the highest selection frequency is processed into a suction cup air duct, specifically including that the suction force provided by the selected Q holes is not less than the gravity of the sample.

[0010] According to an embodiment of the present disclosure, the deformation variable difference values are sorted from small to large, and the frequency of selection of holes in the top P% deformation variable difference values is counted, specifically including counting the frequency of selection of holes in the top 10% of 2 M -1 deformation variable difference values. M

[0011] According to an embodiment of the present disclosure, by controlling the number of deformation variable difference values 2 M -1, in combination with the area of the suction surface, the hole diameter and the period of the holes are determined.

[0012] According to an embodiment of the present disclosure, the arrangement mode of the M holes is triangular array arrangement or rectangular array arrangement or regular polygon array arrangement or equal-interval concentric circle arrangement, and the cross section of the hole is triangular, circular, rectangular or regular polygon.

[0013] According to an embodiment of the present disclosure, the suction surface is circular, square or other regular shape.

[0014] Further, the present disclosure provides a suction cup, and the air duct of the suction cup is designed by using the above-mentioned suction cup air duct design method.

[0015] Further, the present disclosure provides a design device of a suction cup, including: a discrete module configured to discretely arrange M holes on a suction surface of a suction cup; a calculation module configured to randomly select N holes from the M holes to load vacuum, map pressure load geometry to a sample, combine other holes into the suction surface, and calculate ​The deformation difference between the maximum deformation value and the minimum deformation value of the sample; the deformation difference of the sample is calculated when N=1~M; the design module is used to sort the deformation difference from small to large, count the frequency of the selected holes in the front P% deformation difference, and process the adsorption surface between the top Q holes with the highest frequency as the air duct of the suction cup.

[0016] According to the design method of the air duct of the suction cup provided by the present application, at least the following beneficial effects are achieved:

[0017] The holes with little influence on the optical element adsorption surface shape can be efficiently and automatically selected, and the adsorption surface between the holes is processed into an air duct with little influence on the optical element adsorption surface shape, thereby reducing the influence of the adsorption force on the optical element surface shape after the optical element is adsorbed by the suction cup; and the design method is suitable for optical elements of different shapes, sizes, materials and weights, and has strong versatility. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and other objects, features and advantages of the present disclosure will become more apparent from the following description of embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0019] Figure 1 A flowchart of the design method of the air duct of the suction cup provided by the first embodiment of the present disclosure is schematically shown.

[0020] Figure 2 A front view of the adsorption surface of the suction cup provided by the present disclosure is schematically shown.

[0021] Figure 3 A front view of the adsorption surface of the suction cup provided by the present disclosure is schematically shown.

[0022] Figure 4 A schematic diagram of the filling of the geometric blocks of the holes on the adsorption surface of the suction cup and the cutting of the geometric blocks corresponding to the positions of the samples is schematically shown.

[0023] Figure 5 A weight diagram of the frequency of the holes at different positions on the adsorption surface of the suction cup after the deformation difference is sorted from small to large is schematically shown.

[0024] Figure 6 A position diagram of the holes selected as the air duct of the suction cup is schematically shown.

[0025] Figure 7 A structure diagram of the air duct of the suction cup on the adsorption surface is schematically shown.

[0026] Figure 8 A surface shape diagram of the ceramic suction cup after adsorbing the sample is schematically shown.

[0027] wherein, 1 -suction cup, 1 -1 -suction surface, 1 -2 -hole, 1 -3 -functional area, 1 -4 -vacuum interface, 1 -5 bleed hole, 2 -1 -filling geometry, 2 -2 -cutting geometry, 3 -sample. DETAILED DESCRIPTION

[0028] To make the objects, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below with reference to specific embodiments and drawings. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, but not all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present disclosure.

[0029] The terms used herein are only used to describe specific embodiments, and are not intended to limit the present disclosure. The terms "include", "contain" and the like used herein indicate the existence of the described features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0030] In the present disclosure, unless otherwise explicitly specified and limited, the terms "mount", "connect", "connect", "fix" and other terms should be understood broadly, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected or can communicate with each other; can be directly connected, or can be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present disclosure can be understood according to the specific circumstances.

[0031] In the description of the present disclosure, it should be understood that the terms "longitudinal", "length", "circumferential", "front", "back", "left", "right", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present disclosure and simplify the description, and do not indicate or imply that the indicated subsystem or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present disclosure.

[0032] Throughout the drawings, the same elements are denoted by the same or similar reference numerals. When it may cause confusion in understanding the present disclosure, the conventional structure or configuration will be omitted. And the shape, size, positional relationship of each component in the drawing does not reflect the true size, proportion and actual positional relationship. In addition, in the claims, any reference symbol located between parentheses should not be constructed as a limitation on the claims.

[0033] Similarly, to simplify the present disclosure and help understand one or more of the various disclosed aspects, in the above description of exemplary embodiments of the present application, various features of the present disclosure are sometimes grouped together in a single embodiment, figure or description thereof. Descriptions in reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. mean that the particular features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present disclosure. In the present specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described particular features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0034] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present disclosure, the meaning of "multiple" is at least two, for example, two, three, etc., unless otherwise explicitly specified.

[0035] The purpose of the present disclosure is to provide a design method of chuck airway, by taking holes as the basic unit of design, setting holes at different positions of the chuck adsorption surface, selecting different holes to load vacuum, exhaustively calculating the sample deformation difference under different loading vacuum hole quantity and arrangement, finding the position of the hole with small influence on the sample flatness through statistical analysis method, connecting the adsorption surface between the part of the hole as a whole or partition as the airway of the chuck, completing the design of the chuck with small influence on the sample flatness. After designing the chuck, combining with precision machining technology to get the chuck with small influence on the adsorbed sample flatness, realizing the ultra-flat loading of the sample (optical element, etc.).

[0036] Figure 1 The flowchart of the chuck airway design method provided by the embodiment of the present disclosure is schematically shown.

[0037] As Figure 1 shown, the chuck airway design method may, for example, include the following steps:

[0038] Step S101, discretely setting M holes 1-2 on the adsorption surface 1-1 of the chuck 1.

[0039] Step S102, randomly selecting N holes 1-2 from the M holes 1-2 to load vacuum, mapping the pressure load geometry to the sample 3, merging the other holes 1-2 into the adsorption surface, and calculating the deformation difference between the maximum deformation and the minimum deformation of the sample 3; the deformation difference of the sample 3 when N = 1 ~ M;

[0040] Step S103, sort the deformation difference values from small to large, count the frequency of hole 1-2 being selected in the first P% deformation difference values, and process the adsorption surface between the first Q holes 1-2 with the highest selection frequency as the chuck air channel.

[0041] The design method of the chuck air channel provided by the embodiments of the present disclosure can efficiently and automatically select holes with little influence on the sample adsorption surface shape, and process the adsorption surface between the holes as an air channel with little influence on the sample adsorption surface shape, thereby reducing the influence of the adsorption force on the sample surface shape after the sample is adsorbed by the chuck. The design method is suitable for samples with different shapes, sizes, materials and weights, and has strong versatility.

[0042] Figure 2 A front view of the chuck adsorption surface provided by the embodiments of the present disclosure is schematically shown.

[0043] Figure 3 A front view of the symmetric unit of the chuck adsorption surface provided by the embodiments of the present disclosure is schematically shown.

[0044] As shown in Figure 2 , M holes 1-2 are discretely arranged on the adsorption surface 1-1 of the chuck 1. A functional area 1-3 is located in the middle of the chuck 1 and adjacent to the adsorption surface 1-1. The functional area 1-3 is used to perform the function of the sample, for example, when the sample is a mask, the functional area 1-3 is a passage for light to pass through.

[0045] In the embodiments of the present disclosure, when the adsorption surface 1-1 of the chuck 1 is a symmetric structure, a symmetric unit is selected for the arrangement of the holes 1-2.

[0046] For example, when step S102 is performed on the entire adsorption surface 1-1, i.e., the full model is used for calculation, if the number of holes M is too large, the number of deformation difference values to be calculated is too large, and the calculation efficiency is low. For example, if M is 288 and N is 24, it means that there are (about 6x10 34 ) combinations to be calculated, which is a huge amount of calculation; if the adsorption surface 1-1 of the chuck 1 is a symmetric structure, one can use a one-half, one-fourth, one-eighth, etc. model to replace the full model to reduce the amount of calculation in subsequent analysis.

[0047] As shown in Figure 2 , the adsorption surface of the chuck 1 is an axisymmetric structure, and the entire adsorption surface can be divided into eight Figure 3The diagram shows a symmetrical element. The pore array on each symmetrical element is axially symmetrical to each other. The force adsorbed by each symmetrical element is one-eighth of the force adsorbed by the entire adsorption surface. Considering directly using symmetrical elements to calculate the deformation difference of the sample, not only will it not affect the calculation result of the deformation difference, but it can also reduce the computational load. If symmetrical elements are used to calculate the deformation difference, i.e., using… Figure 3 Calculating using the one-eighth model shown, only... (10660, where M=288 and N=24 on the entire adsorption surface) cases need to be calculated, greatly reducing the computational workload and improving computational efficiency. If the adsorption surface 1-1 of suction cup 1 is a centrosymmetric structure, the above-mentioned symmetric unit form can also be used to reduce the computational workload, which will not be elaborated here.

[0048] In the embodiments of this disclosure, operation S102, randomly selecting N holes 1-2 from M holes 1-2 to apply vacuum, and geometrically mapping the pressure load onto the sample 3, while merging the other holes 1-2 into an adsorption surface, includes: establishing filling geometric blocks 2-1 for the M holes 1-2, geometrically mapping the holes 1-2 onto the sample 3, establishing cutting geometric blocks 2-2 at the corresponding positions on the sample 3, and using the cell birth and death technique, setting the N filling geometric blocks as dead cells, creating pressure loads at the sample positions corresponding to the N holes; setting the remaining MN filling geometric blocks as live cells, with cutting geometric blocks 2-2 present at the corresponding sample positions, and creating a contact pair between the suction cup 1 and the sample 3.

[0049] Figure 4 The illustration shows a schematic diagram of the filling geometry of the hole on the suction cup adsorption surface and the cutting geometry of the corresponding position of the sample provided in the embodiments of this disclosure.

[0050] like Figure 4 As shown, filling geometry blocks for all holes 1-2 (M holes) are established. Based on the relative positions of suction cup 1 and sample 3, the hole geometry on adsorption surface 1-1 is mapped to the corresponding positions on sample 3, and a simulation model of cutting geometry block 2-2 is created at these corresponding positions. Then, birth and death elements are created on filling geometry block 2-1 using element birth and death techniques. At this point, N randomly selected filling geometry blocks are set as dead elements, indicating that these N holes exist. At the positions of these holes, sample 3 is vacuum-adsorbed, therefore a pressure load needs to be created at the corresponding positions of sample 3. The value of this pressure load is proportional to the vacuum level provided by the external vacuum device and the hole diameter. The remaining MN filling geometry blocks are set as live elements, indicating that these MN holes do not exist; that is, the positions of these MN holes are filled by filling geometry block 2-1, becoming part of adsorption surface 1-1. Cutting geometry block 2-2 at the corresponding positions on sample 3 contacts each other, forming a contact pair, and no pressure load exists.

[0051] In the embodiments of this disclosure, step S103 selects the adsorption surface between the top Q holes 1-2 with the highest frequency to process into a suction cup air channel, specifically including that the adsorption force provided by the selected Q holes is not less than the gravity of sample 3.

[0052] The force exerted on sample 3 by the Q holes 1-2 selected as air channels should be no less than the weight of sample 3, ensuring that sample 3 will not fall off the suction cup when it is inverted to adsorb sample 3. To ensure a more stable sample adsorption effect, the force exerted on sample 3 by the selected number of holes 1-2 Q should be greater than or equal to twice the weight of sample 3.

[0053] Q×F≥G

[0054] In the formula, Q represents the number of selected holes 1-2, F represents the adsorption force of each hole on the sample, which is proportional to the vacuum level provided by the external vacuum device, and G represents the sample gravity. Of course, the suction cup 1 can also adsorb sample 3 upright. In this case, the number Q of selected holes 1-2 is not limited, and the designer can choose as needed.

[0055] In the embodiments of this disclosure, step S103 involves sorting the deformation difference values ​​from smallest to largest and counting the frequency of selection of holes 1-2 among the top P% deformation difference values. Specifically, this includes counting the frequency of selection of holes 1-2. M Of the -1 deformation difference values, the first 10% × (2 M -1) The frequency at which holes 1-2 are selected among the smallest deformation differences.

[0056] When M holes are set on the adsorption surface, 2 can be calculated. M -1. Deformation difference of sample 3. If we statistically analyze the frequency of selection of all pores corresponding to all deformation differences, the statistical volume will be huge and the frequency of each pore will be the same. In addition, since the deformation difference is sorted from smallest to largest, the later the value, the larger the deformation difference. Therefore, the selected vacuum-loaded pores 1-2 have a greater impact on the deformation. Statistically analyzing their frequency of occurrence may lead to design errors, and the final selected vacuum-loaded pores will affect the adsorption surface shape of sample 3. In order to reduce the statistical volume and more accurately select pores with less impact on the adsorption surface shape of sample 3 for vacuum loading, only pores 2 can be statistically analyzed. M Of the -1 deformation differences, the first P% × (2 M -1) The frequency of selection of holes 1-2 among the minimum deformation differences, and selecting holes from these frequently selected holes for vacuum loading. The top 10% is selected here because the deformation difference is relatively small within this range, and the selected holes will have a smaller impact on the surface shape of the sample after vacuum loading. In practical applications, the specific proportion P can be determined according to the number Q of holes 1-2 selected as air channels.

[0057] In embodiments of the present disclosure, the number of deformation variable difference values 2 M -1, in combination with the area of the adsorption surface, to determine the pore diameter and the arrangement period of the pores.

[0058] The pore diameter and arrangement period of the pores on the adsorption surface can be determined by controlling the number of calculation results of the deformation variable. In detail, when M number of pores 1-2 are discretely arranged on the adsorption surface of the suction pad 1, the distance between adjacent pores 1-2 is L, i.e. the arrangement period of the pores is L. N number of pores 1-2 are randomly selected from the M number of pores 1-2 to load vacuum, and the deformation variable difference values of the sample 3 are calculated The deformation variable difference values of the sample 3 are grouped; the deformation variable difference values of the sample 3 corresponding to N = 1 ~ M are calculated respectively, and there are 2 M -1 groups of results; illustratively, the number M of pores 1-2 can be controlled according to the number of calculation results. According to the computing power of the computer, the number of deformation variable difference values that can be accepted can be set, such as the number of deformation variable difference values corresponding to different numbers of pores is less than or equal to 1 million, 2 M -1≤1000000, M≤log2 1000001, at this time M≤19.9, in this range, the more the number of pores, the more the number of deformation variable difference values obtained, therefore, M is selected as 19. When the adsorption area of the required design of the suction pad is S, the area occupied by a single pore is S / 19, and when M number of pores are arranged in the simplest square manner, the distance L between adjacent pores is The pore diameter R < 2L, wherein the adsorption area S is determined by the size of the sample to be adsorbed, the larger the size of the sample to be adsorbed, the larger the corresponding adsorption area S, and the specific size of the adsorption area S can be selected according to the actual application scene, which is not limited by the present disclosure. In addition, the M number of pores on the adsorption surface can also adopt other arrangement modes such as triangular array, regular polygon array, etc., when the pores on the adsorption surface are arranged in other array modes, the distance between the pores and the pore diameter are combined to calculate the corresponding geometric formula, which will not be described here.

[0059] When the adsorption surface of the suction pad 1 is an axisymmetric structure, the entire adsorption surface can be divided into A number of symmetric units. Similarly, the number M1 of pores on the symmetric unit and the arrangement period can be determined by controlling the number of calculation results of the deformation variable. The deformation variable difference values of the sample 3 corresponding to a single symmetric unit are calculated M1 -1 groups of results; according to the computing power of the computer, the number of deformation variable difference values that can be accepted can be set, such as the number of deformation variable difference values corresponding to different numbers of pores is less than or equal to 100,000, 2 M1-1≤100000, the calculated M≤log2 100001, at this time M1≤16.6, in this range, the more the number of holes, the more the number of deformation difference values obtained, therefore, M1 is selected as 16. When the adsorption area of the required design chuck is S, the area occupied by a single hole is S / (16*A), and when M1 holes are arranged in the simplest square mode, the distance L1 between adjacent holes is

[0060]

[0061] In the embodiments of the present disclosure, the arrangement mode of the M holes is a triangular array arrangement or a rectangular array arrangement or a regular polygon array arrangement or an equal-interval concentric circle arrangement, and the cross section of the hole can be triangular, circular, rectangular or regular polygonal.

[0062] On the basis of the above-mentioned embodiments, the arrangement mode of the M holes is a triangular array arrangement or a rectangular array arrangement or a regular polygon array arrangement or an equal-interval concentric circle arrangement, etc. Generally, in order to facilitate processing and layout and form a regular chuck air channel, the arrangement mode of the M holes is preferably rectangular.

[0063] On the basis of the above-mentioned embodiments, the cross-sectional shape of the hole is triangular, rectangular, regular polygonal or circular, etc. Generally, in order to facilitate processing, the cross section of the hole is selected to be circular. The product of the cross-sectional area of the hole and the vacuum degree is equal to the adsorption force of the hole on the sample.

[0064] In the embodiments of the present disclosure, the adsorption surface is circular, square or other regular shape.

[0065] On the basis of the above-mentioned embodiments, the adsorption surface is circular, square or other regular shape, etc. The shape of the adsorption surface does not affect the shape of the chuck air channel obtained after subsequent design. After the above-mentioned design process, the holes on the adsorption surface that have little effect on the sample surface shape are selected and finally connected to form a chuck air channel. In order to ensure that the outermost edge of the required sample surface shape control area can be adsorbed, the position of the outermost hole arranged on the adsorption surface needs to exceed or be located at the edge of the required sample surface shape control area. In order to prevent air leakage of the hole located at the edge of the required sample surface shape control area, it is preferred that the sample can completely cover the hole.

[0066] Based on the same inventive concept, the embodiments of the present disclosure also provide a chuck, which is designed based on the design method of the chuck air channel described above.

[0067] The chuck provided by the embodiments of the present disclosure is suitable for the adsorption and installation of samples of different shapes, sizes, materials and weights, because it is designed for sample deformation difference. At the same time, the adsorption force of the chuck on the sample has little effect on the surface shape of the sample, so that the sample is stably and reliably fixed and installed with small deformation.

[0068] Based on the same inventive concept, the embodiments of the present disclosure further provide a design device of a suction cup, which is used to design a gas channel of the suction cup based on the design method of the gas channel of the suction cup described above.

[0069] The design device of the suction cup for designing the gas channel of the suction cup includes a discretization module, a calculation module and a design module.

[0070] The discretization module is used to discretely arrange M holes 1-2 on the suction surface of the suction cup 1. In an embodiment, the discretization module can be used to perform the step S101 described above, and thus no further description is given here.

[0071] The calculation module is used to load vacuum into N holes 1-2 selected randomly from the M holes 1-2, map the pressure load geometry onto the sample 3, combine other holes 1-2 into the suction surface, and calculate the deformation difference between the maximum deformation and the minimum deformation of the sample 3. The calculation module is used to load vacuum into N holes 1-2 selected randomly from the M holes 1-2, map the pressure load geometry onto the sample 3, combine other holes 1-2 into the suction surface, and calculate the deformation difference between the maximum deformation and the minimum deformation of the sample 3.

[0072] The design module is used to sort the deformation differences from small to large, count the frequency of the holes 1-2 selected in the first P% of the deformation differences, and process the first Q holes 1-2 with the highest frequency as the gas channel of the suction cup. In an embodiment, the design module can be used to perform the step S103 described above, and thus no further description is given here.

[0073] According to the embodiments of the present disclosure, any of the discretization module, the calculation module and the design module can be combined in one module, or any of the modules can be split into multiple modules. Alternatively, at least part of the function of one or more of the modules can be combined with at least part of the function of the other modules, and implemented in one module. According to the embodiments of the present disclosure, at least one of the discretization module, the calculation module and the design module can be at least partially implemented as a hardware circuit, such as a field programmable gate array (FPGA), a programmable logic array (PLA), a system on chip, a system on board, a system on package, an application specific integrated circuit (ASIC), or any other reasonable way of integrating or packaging a circuit, etc. hardware or firmware, or any one of software, hardware and firmware or a proper combination of any of them. Alternatively, at least one of the discretization module, the calculation module and the design module can be at least partially implemented as a computer program module which can perform corresponding functions when the computer program module is run.

[0074] The design device of the suction cup provided by the embodiment of the present disclosure can efficiently and automatically select the holes with little influence on the sample adsorption surface shape, and process the adsorption surface between the holes into an air channel with little influence on the sample adsorption surface shape, so as to reduce the influence of the adsorption force on the sample surface shape after the sample is adsorbed by the suction cup. Moreover, the design device is suitable for the design of samples with different shapes, sizes, materials and weights, and has strong versatility.

[0075] In order to verify the advantages of the suction cup air channel design method provided by the embodiment of the present disclosure, some specific examples and experimental data are provided below for illustration.

[0076] The present example adopts the suction cup air channel design method described above to design a Ф40mm sample suction cup, including sequentially performing the following steps:

[0077] Step 1: As shown in Figure 2 , M independent holes 1-2 are discretely arranged on the adsorption surface 1-1 of the suction cup 1 to replace the possible any air channel structure. The arrangement mode of the holes 1-2 is a rectangular array arrangement, and the cross section of the holes is circular.

[0078] Step 2: Since the adsorption surface of the suction cup 1 is a symmetrical structure, in order to reduce the calculation amount of subsequent analysis, a symmetrical unit is used to replace the full model for the subsequent design process. In the present embodiment, an eighth model is used to replace the full model. In the full model, M is 288, as shown in Figure 3 , M1 is 41 in the eighth model.

[0079] Step 3: As shown in Figure 4 , 41 filling geometry blocks 2-1 of the holes 1-2 are established in the eighth model, the geometry of the holes 1-2 is mapped to the sample 3, and the cutting geometry block 2-2 is established at the corresponding position of the sample 3. In the eighth model, N holes 1-2 are randomly selected from the 41 holes 1-2 to load vacuum, the N filling geometry blocks are set as dead units by the unit birth-death technology, the pressure load is created at the sample corresponding to the N holes, and the pressure load geometry is mapped to the sample 3; the remaining 41-N filling geometry blocks are set as live units, the cutting geometry block exists at the corresponding sample, and the contact pair with the sample is created. These holes are combined into an adsorption surface, and the deformation difference between the maximum deformation and the minimum deformation of the sample 3 is calculated. The deformation difference of the sample 3 is calculated when N=1~41.

[0080] Step 4: The deformation difference is sorted from small to large, and the frequency of the selection of the hole 1-2 in the first 1000 groups of calculation results of the deformation difference is counted, as shown in Figure 5As shown, after counting the frequency of the selected hole 1-2, it is converted into the weight of the selected hole in 1000 groups of calculation results, that is, weight = frequency / 1000. The adsorption surface between the top 20 holes 1-2 with the highest selection weight is processed into a suction cup air duct, and the positions of the 20 holes are respectively as shown in Figure 6 As shown, ①, ②, ③ in the figure respectively represent the positions of each hole. As shown Figure 7 As shown, the selected holes 1-2 are connected as a whole or in zones on the adsorption surface, and the air guiding hole 1-5 is connected with the vacuum interface 1-4.

[0081] According to the foregoing steps 1-4, a ceramic suction cup is designed.

[0082] Figure 8 The surface shape of the ceramic suction cup after adsorbing the sample in Example 2 is schematically shown.

[0083] As shown Figure 8 In the range of Ф40mm, Ф20mm and Ф10mm, the PV of the adsorbed sample surface is 21.7nm, 5.1nm and 1.2nm respectively. Compared with the traditional suction cup adsorbing the sample, the sample surface PV in the corresponding area is more than 100nm, and the design method of the present disclosure can realize the super-flat adsorption and loading of the optical element.

[0084] The above-described specific embodiments further illustrate the purpose, technical solutions and beneficial effects of the present disclosure. It should be understood that the above-described is only a specific embodiment of the present disclosure and is not used to limit the present disclosure. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A method for designing a suction cup air passage, characterized in that, The method comprises the following steps: Discrete M holes (1-2) are arranged on the adsorption surface (1-1) of the suction cup (1); Load vacuum from M holes (1-2) randomly select N holes (1-2) to load vacuum, map the pressure load geometry to the sample (3), and merge the other holes (1-2) into the adsorption surface to calculate The difference in deformation between the maximum deformation of the group sample (3) and the minimum deformation. The deformation difference of the sample (3) is calculated when N=1~M respectively; The deformation difference is sorted from small to large, the frequency of the holes (1-2) selected in the first P% deformation difference is counted, and the adsorption surface between the first Q holes (1-2) with the highest selection frequency is processed into a suction cup air duct. Wherein P is 1~10, and the adsorption force provided by the selected Q holes is not less than the gravity of the sample.

2. The design method of the suction cup air duct according to claim 1, wherein when the adsorption surface of the suction cup (1) is a symmetrical structure, a symmetrical unit is selected for hole arrangement.

3. The design method of the suction cup air duct according to claim 1, wherein the N holes (1-2) are selected from the M holes (1-2) to load vacuum, and the pressure load geometry is mapped onto the sample (3), and the other holes (1-2) are combined into an adsorption surface, which specifically comprises: M hole (1-2) filling geometry blocks (2-1) are established, the hole (1-2) geometry is mapped onto the sample (3), and a cutting geometry block (2-2) is established at the corresponding position of the sample (3), N filling geometry blocks (2-1) are set as dead units by the unit birth-death technology, and a pressure load is created at the sample corresponding to the N holes; M-N filling geometry blocks (2-1) are set as live units, and the corresponding sample has a cutting geometry block, and a contact pair with the sample is created.

4. The design method of the suction cup air duct according to claim 1, wherein the deformation difference is sorted from small to large, and the frequency of the holes (1-2) selected in the first P% deformation difference is counted, which specifically comprises:

5. The design method of the suction cup air duct according to claim 1, wherein 6. The design method of the suction cup air duct according to claim 1, wherein The arrangement mode of the M holes is a triangular array arrangement or a rectangular array arrangement or a regular polygon array arrangement or an equal-interval concentric circle arrangement, and the cross section of the hole is a triangle, a circle, a rectangle or a regular polygon. Statistics 2 M - The frequency of the hole (1-2) selected in the 10% of the smallest deformation variable difference in the 2 M -1) deformation variable difference.

7. The design method of the suction cup air duct according to claim 1, wherein By controlling the number of difference values 2 of the deformation variable M -1, the area of the adsorbing surface, to determine the pore diameter and the period of the pores. The adsorption surface is circular or square. The air duct of the suction cup is designed by the suction cup air duct design method of any one of claims 1-7. The method comprises the following steps: The discrete module is used for arranging M holes (1-2) on the adsorption surface of the suction cup (1); 8. A suction cup, characterized in that The design module is used for sorting the deformation difference from small to large, counting the frequency of the holes (1-2) selected in the first P% deformation difference, and processing the adsorption surface between the first Q holes (1-2) with the highest selection frequency into a suction cup air duct, wherein P is 1~10, and the adsorption force provided by the selected Q holes is not less than the gravity of the sample. ​ 9. A design device for a suction cup, characterized in that ​ ​ A computing module for randomly selecting N holes (1-2) from M holes (1-2) to load vacuum, mapping pressure loading geometry to the sample (3), and merging other holes (1-2) into an adsorption surface, and calculating The difference between the maximum deformation and the minimum deformation of the sample (3); and calculating the deformation difference of the sample (3) when N = 1 ~ M, respectively. ​

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