Testing Method for Electromagnetic Pulse Radiation Interference Characteristics of MEMS Microsensors

Abstract

The present invention provides a method for testing the electromagnetic pulse radiation interference characteristics of a MEMS microsensor, comprising: selecting an L-band microwave power amplifier-filter circuit based on an RF MEMS filter as a test circuit sample; establishing a space electronic coupling characteristics test system; the space electronic coupling characteristics test system comprising a microwave radiation antenna, a nanosecond pulse drive power supply, a first receiving antenna, a second receiving antenna, an oscilloscope disposed within a shielded room, a radio frequency signal generator, and the test circuit sample; determining test parameters, including the type and parameters of the nanosecond pulse drive power supply, a test frequency band, a test frequency point, antenna distance, and the relative orientation of the test circuit sample to the propagation direction of the electromagnetic wave in space; and performing an electromagnetic interference test based on the space electronic coupling characteristics test system and the test parameters. This invention can provide technical support for ensuring the safe and reliable operation of micro-nano systems in power systems.

Description

Technical Field

[0001] The present invention relates to the technical field of electromagnetic interference testing, and in particular to a method for testing electromagnetic pulse radiation interference characteristics of a MEMS microsensor. Background Art

[0002] New power systems are far more vulnerable to strong external electromagnetic pulses than traditional power systems. In the construction of new power systems, power electronics will be used on a wider scale, interaction between power equipment and between power equipment and the system will be further strengthened, the intelligence level of power equipment will be further enhanced, and the trend of integrating primary and secondary equipment will become more pronounced. Grid dispatching and operation will place higher demands on the observability, measurability, and controllability of the entire system, and will also increase reliance on weak current systems such as secondary equipment, sensors, communication systems, and digital devices. At the same time, the distribution of power generation equipment will shift from centralized to distributed, with multiple points and widespread locations, direct exposure, and a lack of effective structural protection. Therefore, timely and effective testing for strong electromagnetic pulse radiation interference is a critical component of the construction and safe and stable operation of new power systems.

[0003] Currently, both domestic and international research is underway on the destructive effects of strong electromagnetic radiation on integrated circuits, micro-nanoelectronic devices, and the like. However, research on testing methods for electromagnetic pulse radiation interference characteristics of MEMS microsensors is relatively limited. Research on electromagnetic pulse breakdown laws and physical damage mechanisms is primarily focused on physical damage effects under direct current and electrostatic discharge. Research targets are concentrated on diodes, transistors, and integrated circuits. The action waveforms are primarily lightning, surge, and electrostatic discharge, and little research has been conducted on protection methods against nanosecond-level steep-front pulses in micro-nano systems. Summary of the Invention

[0004] The purpose of the present invention is to start from the radio frequency front end in the micro-nano system and propose a method for testing the electromagnetic pulse radiation interference characteristics of MEMS microsensors for power systems, so as to provide technical support for ensuring the safe and reliable operation of micro-nano systems in power systems.

[0005] To achieve the above objectives, an embodiment of the present invention provides a method for testing electromagnetic pulse radiation interference characteristics of a MEMS microsensor, comprising:

[0006] An L-band microwave power amplifier-filter circuit based on an RF MEMS filter is selected as a test circuit sample, and a board-level electromagnetic coupling characteristic test is performed on the test circuit sample;

[0007] Build a space electronic coupling characteristics test system; the space electronic coupling characteristics test system includes a microwave radiation antenna, a nanosecond pulse driving power supply, a first receiving antenna, a second receiving antenna, an oscilloscope arranged in a shielded room, a radio frequency signal generator and the test circuit sample; wherein the microwave radiation antenna is used to directionally radiate the output of the pulse power source to generate a high-repetition-rate electromagnetic pulse signal to perform electromagnetic interference on the test circuit sample; the nanosecond pulse driving power supply is connected to the microwave radiation antenna, which faces the test circuit sample; the radio frequency signal generator is connected to the test circuit sample; the radio frequency signal generator inputs an excitation signal to the test circuit sample; the first output port of the test circuit sample is connected to the first receiving antenna to obtain a port inductive coupling waveform; the second output port of the test circuit sample is connected to the second receiving antenna via a measuring cable, and the second receiving antenna transmits the signal output from the second output port of the test circuit sample to the oscilloscope; the oscilloscope obtains the field strength of the test circuit sample and the voltage and current data waveform coupled to the test circuit sample under high-repetition-rate ultra-wide spectrum pulse radiation based on the received signal;

[0008] Determining test parameters, including the type and parameters of the nanosecond pulse drive power supply, test frequency band, test frequency point, antenna distance, and the relative orientation of the test circuit sample and the propagation direction of the electromagnetic wave in space;

[0009] An electromagnetic interference test is performed according to the space electronic coupling characteristic test system and the test parameters.

[0010] Preferably, the parameters of the nanosecond pulse driving power supply include: pulse leading edge of 0.17ns~20ns, pulse width of 0.5ns~1000ns, pulse amplitude of 1.8kV~2.1kV, and repetition frequency of single / 1kHz / 100kHz;

[0011] The type of the nanosecond pulse driving power supply is: a capacitive energy storage type fast front avalanche transistor source based on avalanche transistor Marx circuit, or an inductive energy storage type fast front DSRD source based on a DSRD fast ionization switch;

[0012] The antenna distance is: 1~8m;

[0013] The relative orientation of the test circuit sample and the propagation direction of the electromagnetic wave in space includes: the propagation direction of the electromagnetic wave is parallel to the PCB and perpendicular to the circuit, the propagation direction of the electromagnetic wave is parallel to the PCB and parallel to the circuit, the propagation direction of the electromagnetic wave is perpendicular to the PCB and perpendicular to the circuit, and the propagation direction of the electromagnetic wave is perpendicular to the PCB and parallel to the circuit.

[0014] Preferably, performing electromagnetic interference testing according to the space electronic coupling characteristic testing system and the test parameters includes:

[0015] Step 1: Use a field strength detector to check and record the radio field on site. If the detected radio field strength changes smoothly from low frequency to high frequency, proceed to step 2; otherwise, turn off the noise source equipment.

[0016] Step 2: calibrate the field strength and fix the position of the microwave radiation system;

[0017] Step 3. Set the distance between the measuring antenna and the microwave radiation antenna;

[0018] Step 4: The interference signal source sets the interference signal from the low frequency band to the high frequency band according to the test frequency points;

[0019] Step 5. Observe and record the voltage and current data waveforms coupled to the test circuit sample under high repetition rate and ultra-wide spectrum pulse radiation through the oscilloscope.

[0020] Preferably, the method further comprises:

[0021] The test results are analyzed, and the voltage and current data waveforms coupled to the test circuit sample under high repetition rate and ultra-wide spectrum pulse radiation are compared with the voltage and current waveforms coupled by the micro-nano system during normal operation. The interference characteristics of electromagnetic radiation on the normal working waveform are determined based on the comparison results.

[0022] Preferably, the analyzing the test results includes:

[0023] For the signal of a switching device, there are only two states. When electromagnetic interference is applied, if the original signal state does not flip, it is considered that no over-limit interference has occurred; if the original signal state flips, it is considered that over-limit interference has occurred.

[0024] For analog device signals, if the analog device signal jump amplitude exceeds 0.5% of the channel range, it is considered that out-of-limit interference exists; otherwise, it is considered that no out-of-limit interference occurs.

[0025] The embodiments of the present invention have the following beneficial effects:

[0026] (1) Currently, research on the breakdown laws and physical damage mechanisms of electromagnetic pulses mainly focuses on the physical damage effects under DC and electrostatic discharge, with the action waveforms mainly being lightning, surge, and electrostatic discharge. The embodiments of the present invention are based on an effect test method under the action of steep pulses, which fills this gap and provides support for the research on anti-electromagnetic pulse protection methods for micro-nano systems;

[0027] (2) At present, the exploration of electromagnetic pulse protection for power systems is mainly concentrated in the effect mechanism research stage, and the research targets are concentrated on diodes, transistors and integrated circuits. The embodiment of the present invention combines the advantages of the unit, starts from the RF front end in the micro-nano system, and designs a method for testing the electromagnetic pulse radiation interference characteristics of MEMS microsensors for power systems. It deeply studies the breakdown law and microscopic damage mechanism under the action of nanosecond and sub-nanosecond steep pulses, analyzes its coupling path through experiments and simulations, and masters a variety of protection circuit models through testing, providing support for the research of anti-electromagnetic pulse protection methods for micro-nano systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] FIG1 is a schematic diagram of a space electron coupling characteristic testing system constructed according to an embodiment of the present invention.

[0030] FIG2 is a schematic diagram of the structure of a MEMS nanosecond pulse electric shock test platform constructed according to an embodiment of the present invention. DETAILED DESCRIPTION

[0031] An embodiment of the present invention provides a method for testing the electromagnetic pulse radiation interference characteristics of a MEMS microsensor, which is applicable to a MEMS microsensor for a power system. The method of this embodiment specifically includes the following steps:

[0032] Step S1: selecting an L-band microwave power amplifier-filter circuit based on an RF MEMS filter as a test circuit sample, and performing a board-level electromagnetic coupling characteristic test on the test circuit sample;

[0033] Specifically, current power systems integrate not only electrical characteristics but also mechanical functions, capable of performing complex electromechanical functions. Therefore, we selected RF front-end micro-nano systems as the research object to investigate their coupling methods and protection methods. Specifically, we selected an L-band microwave power amplifier-filter circuit based on an RF MEMS filter as the research object for board-level electromagnetic coupling characteristic testing. It is particularly important to emphasize that this embodiment uses a capacitive RF MEMS switch structure.

[0034] The specific parameters of the test circuit sample of this embodiment are shown in Table 1 below:

[0035] Table 1 - L-band microwave power amplifier-filter circuit parameters

[0036]

[0037] Step S2: Building a space electron coupling characteristic test system; Figure 1 As shown, the space electronic coupling characteristics test system includes a microwave radiation antenna, a nanosecond pulse driving power supply, a first receiving antenna, a second receiving antenna, an oscilloscope arranged in a shielded room, a radio frequency signal generator and the test circuit sample; wherein the microwave radiation antenna is used to directionally radiate the output of the pulse power source to generate a high repetition rate electromagnetic pulse signal to perform electromagnetic interference on the test circuit sample; the nanosecond pulse driving power supply is connected to the microwave radiation antenna, which faces the test circuit sample; the radio frequency signal generator is connected to the test circuit sample; the radio frequency signal generator inputs an excitation signal to the test circuit sample; the first output port of the test circuit sample is connected to the first receiving antenna to obtain a port inductive coupling waveform; the second output port of the test circuit sample is connected to the second receiving antenna via a measuring cable, and the second receiving antenna transmits the signal output from the second output port of the test circuit sample to the oscilloscope; the oscilloscope obtains the field strength of the test circuit sample and the voltage and current data waveform coupled to the test circuit sample under high repetition rate ultra-wide spectrum pulse radiation based on the received signal;

[0038] Specifically, in the present embodiment, the nanosecond pulse driving power supply can adopt a capacitive energy storage type fast-front avalanche tube source based on an avalanche transistor Marx circuit, or an inductive energy storage type fast-front DSRD source based on a DSRD fast ionization switch, wherein the capacitive energy storage type fast-front avalanche tube source based on the avalanche transistor Marx circuit has a rising edge of approximately 170ps (10% ~ 90%), a half-height width of approximately 0.5ns, and an output with a repetition frequency of 1kHz, and an amplitude of 2.1kV; the inductive energy storage type fast-front DSRD source based on the DSRD fast ionization switch has a rising edge of approximately 700ps (10% ~ 90%), a half-height width of approximately 1.5ns, and an output with a repetition frequency of 100kHz, and an amplitude of 1.8kV, both of which meet the fastest pulse front requirements of the project technical indicators;

[0039] In this embodiment, the microwave radiation antenna is capable of generating a high repetition rate ultra-wide spectrum signal with a center frequency of 350 MHz and a signal bandwidth of 17 MHz to 2.5 GHz (-20 dB), which can perform broadband electromagnetic interference on the communication system.

[0040] In this embodiment, the microwave signal generator is an Agilent 83732B synchronous signal generator, whose output signal frequency range is 10 MHz to 20 GHz and can generate a 5 V sinusoidal excitation signal.

[0041] Step S3, determining test parameters, including the type and parameters of the nanosecond pulse driving power supply, test frequency band, test frequency point, antenna distance, and the relative orientation of the test circuit sample and the propagation direction of the electromagnetic wave in space;

[0042] Furthermore, in this embodiment, the parameters of the nanosecond pulse driving power supply include: a pulse front of 0.17ns~20ns, a pulse width of 0.5ns~1000ns, a pulse amplitude of 1.8kV~2.1kV, and a repetition frequency of single / 1kHz / 100kHz; the type of the nanosecond pulse driving power supply is: a capacitive energy storage fast-front avalanche transistor source based on an avalanche transistor Marx circuit, or an inductive energy storage fast-front DSRD source based on a DSRD fast ionization switch; the antenna distance is: 1~8m; the relative orientation of the test circuit sample and the propagation direction of the electromagnetic wave in space includes: the propagation direction of the electromagnetic wave is parallel to the PCB and perpendicular to the circuit, the propagation direction of the electromagnetic wave is parallel to the PCB and parallel to the circuit, the propagation direction of the electromagnetic wave is perpendicular to the PCB and perpendicular to the circuit, and the propagation direction of the electromagnetic wave is perpendicular to the PCB and parallel to the circuit;

[0043] Step S4, performing electromagnetic interference testing according to the space electronic coupling characteristic testing system and the test parameters;

[0044] Furthermore, if Figure 2 As shown, the electromagnetic interference test is performed according to the space electronic coupling characteristic test system and the test parameters, including:

[0045] Step 1: Use a field strength detector to check and record the radio field on site. If the detected radio field strength changes smoothly from low frequency to high frequency, proceed to step 2; otherwise, turn off the noise source equipment.

[0046] Step 2: calibrate the field strength and fix the position of the microwave radiation system;

[0047] Step 3. Set the distance between the measuring antenna and the microwave radiation antenna;

[0048] Step 4: The interference signal source sets the interference signal from the low frequency band to the high frequency band according to the test frequency points;

[0049] Step 5. Observe and record the voltage and current data waveforms coupled to the test circuit sample under high repetition rate and ultra-wide spectrum pulse radiation through the oscilloscope.

[0050] Furthermore, the method further comprises:

[0051] Step S5: Analyze the test results, compare the voltage and current data waveforms coupled to the test circuit sample under high repetition rate and ultra-wide spectrum pulse radiation with the voltage and current waveforms coupled to the micro-nano system during normal operation, and determine the interference characteristics of electromagnetic radiation on the normal operating waveform based on the comparison results.

[0052] Furthermore, determining the interference characteristics of electromagnetic radiation on the normal working waveform according to the comparison result includes:

[0053] For the signal of a switching device, there are only two states. When electromagnetic interference is applied, if the original signal state does not flip, it is considered that no over-limit interference has occurred; if the original signal state flips, it is considered that over-limit interference has occurred.

[0054] For analog device signals, if the analog device signal jump amplitude exceeds 0.5% of the channel range, it is considered that out-of-limit interference exists; otherwise, it is considered that no out-of-limit interference occurs.

[0055] Specifically, according to the test plan determined in the above steps, interference tests are performed on the field test circuit samples selected in step S1 one by one; during the test, the electric field strength of each standard and frequency point on the device surface is recorded, and the operating status of the device and the value of the observation signal are also recorded for judgment and analysis;

[0056] The test execution steps are briefly described as follows:

[0057] ① Ensure that both the test equipment and test circuit samples are in normal working order. Use a field strength detector to check and record the radio field on site. If the detected radio field strength changes smoothly from low frequency to high frequency (noise floor), proceed to the next step. If the detected radio field strength increases significantly, check for nearby wireless devices operating in that frequency band and temporarily shut down any noise source equipment to avoid interference with the test.

[0058] ② According to the antenna distance determined in step S3 and the relative position of the test circuit sample and the propagation direction of the electromagnetic wave in space, determine the positions of the nanosecond pulse drive power supply, antenna, and test circuit sample, fix them at the points, and record the position data truthfully; the interference signal source sets the interference signal from the low frequency band to the high frequency band;

[0059] ③ Turn on the nanosecond pulse drive power supply, and the microwave radiation antenna will directional radiate the pulse power source output, generating a high-repetition-rate electromagnetic pulse signal to interfere with the test circuit sample; the tester observes the waveform signal on the oscilloscope in the shielded room. If the interference signal field strength reading appears, it means that the interference signal is being continuously emitted. Maintain the test state for 30 to 300 seconds;

[0060] ④ Finally, the voltage and current waveforms obtained by coupling the sample under high repetition rate ultra-wideband pulse radiation are obtained, and compared with the waveform diagram of the normal operation of the test circuit sample to obtain its electromagnetic pulse radiation interference characteristics.

[0061] It can be seen from the description of the above embodiments that the embodiments of the present invention have the following advantages:

[0062] (1) Currently, research on the breakdown laws and physical damage mechanisms of electromagnetic pulses mainly focuses on the physical damage effects under DC and electrostatic discharge, with the action waveforms mainly being lightning, surge, and electrostatic discharge. The embodiments of the present invention are based on an effect test method under the action of steep pulses, which fills this gap and provides support for the research on anti-electromagnetic pulse protection methods for micro-nano systems;

[0063] (2) At present, the exploration of electromagnetic pulse protection for power systems is mainly concentrated in the effect mechanism research stage, and the research targets are concentrated on diodes, transistors and integrated circuits. The embodiment of the present invention combines the advantages of the unit, starts from the RF front end in the micro-nano system, and designs a method for testing the electromagnetic pulse radiation interference characteristics of MEMS microsensors for power systems. It deeply studies the breakdown law and microscopic damage mechanism under the action of nanosecond and sub-nanosecond steep pulses, analyzes its coupling path through experiments and simulations, and masters a variety of protection circuit models through testing, providing support for the research of anti-electromagnetic pulse protection methods for micro-nano systems.

[0064] The above is a further detailed description of the present invention in conjunction with specific preferred embodiments, and the specific implementation of the present invention should not be considered to be limited to these descriptions. For those skilled in the art of the present invention, without departing from the concept of the present invention, several simple deductions or substitutions can be made, which should be considered to fall within the scope of protection of the present invention.

Claims

1. A method for testing electromagnetic pulse radiation interference characteristics of a MEMS microsensor, characterized in that: include: An L-band microwave power amplifier-filter circuit based on an RF MEMS filter is selected as a test circuit sample, and a board-level electromagnetic coupling characteristic test is performed on the test circuit sample; Build a space electromagnetic coupling characteristics test system; the space electromagnetic coupling characteristics test system includes a microwave radiation antenna, a nanosecond pulse driving power supply, a first receiving antenna, a second receiving antenna, an oscilloscope arranged in a shielded room, a radio frequency signal generator and the test circuit sample; wherein the microwave radiation antenna is used to directionally radiate the output of the pulse power source to generate a high-repetition-rate electromagnetic pulse signal to perform electromagnetic interference on the test circuit sample; the nanosecond pulse driving power supply is connected to the microwave radiation antenna, which faces the test circuit sample; the radio frequency signal generator is connected to the test circuit sample; the radio frequency signal generator inputs an excitation signal to the test circuit sample; the first output port of the test circuit sample is connected to the first receiving antenna to obtain a port inductive coupling waveform; the second output port of the test circuit sample is connected to the second receiving antenna via a measuring cable, and the second receiving antenna transmits the signal output from the second output port of the test circuit sample to the oscilloscope; the oscilloscope obtains the field strength of the test circuit sample and the voltage and current data waveform coupled to the test circuit sample under high-repetition-rate ultra-wide spectrum pulse radiation based on the received signal; Determining test parameters, including the type and parameters of the nanosecond pulse drive power supply, test frequency band, test frequency point, antenna distance, and the relative orientation of the test circuit sample and the propagation direction of the electromagnetic wave in space; An electromagnetic interference test is performed according to the spatial electromagnetic coupling characteristic test system and the test parameters.

2. The method for testing electromagnetic pulse radiation interference characteristics of a MEMS microsensor according to claim 1, characterized in that: The parameters of the nanosecond pulse driving power supply include: pulse leading edge of 0.17ns~20ns, pulse width of 0.5ns~1000ns, pulse amplitude of 1.8kV~2.1kV, and repetition frequency of 1kHz or 100kHz; The type of the nanosecond pulse driving power supply is: a capacitive energy storage type fast front avalanche transistor source based on avalanche transistor Marx circuit, or an inductive energy storage type fast front DSRD source based on a DSRD fast ionization switch; The antenna distance is: 1~8m; The relative orientation of the test circuit sample and the propagation direction of the electromagnetic wave in space includes: the propagation direction of the electromagnetic wave is parallel to the PCB and perpendicular to the circuit, the propagation direction of the electromagnetic wave is parallel to the PCB and parallel to the circuit, the propagation direction of the electromagnetic wave is perpendicular to the PCB and perpendicular to the circuit, and the propagation direction of the electromagnetic wave is perpendicular to the PCB and parallel to the circuit.

3. The method for testing electromagnetic pulse radiation interference characteristics of a MEMS microsensor according to claim 2, characterized in that: The performing of electromagnetic interference testing according to the spatial electromagnetic coupling characteristic testing system and the test parameters includes: Step 1: Use a field strength detector to check and record the radio field on site. If the detected radio field strength changes smoothly from low frequency to high frequency, proceed to step 2; otherwise, turn off the noise source equipment. Step 2: calibrate the field strength and fix the position of the microwave radiation system; Step 3. Set the distance between the measuring antenna and the microwave radiation antenna; Step 4: The interference signal source sets the interference signal from the low frequency band to the high frequency band according to the test frequency points; Step 5. Observe and record the voltage and current data waveforms coupled to the test circuit sample under high repetition rate and ultra-wide spectrum pulse radiation through the oscilloscope.

4. The method for testing electromagnetic pulse radiation interference characteristics of a MEMS microsensor according to claim 2, characterized in that: The method further comprises: The test results are analyzed, and the voltage and current data waveforms coupled to the test circuit sample under high repetition rate and ultra-wide spectrum pulse radiation are compared with the voltage and current waveforms coupled by the micro-nano system during normal operation. The interference characteristics of electromagnetic radiation on the normal working waveform are determined based on the comparison results.

5. The method for testing the electromagnetic pulse radiation interference characteristics of a MEMS microsensor according to claim 4, characterized in that: The test result analysis includes: For the signal of a switching device, there are only two states. When electromagnetic interference is applied, if the original signal state does not flip, it is considered that no over-limit interference has occurred; if the original signal state flips, it is considered that over-limit interference has occurred. For analog device signals, if the analog device signal jump amplitude exceeds 0.5% of the channel range, it is considered that out-of-limit interference exists; otherwise, it is considered that no out-of-limit interference occurs.

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