Active valve type micro pump with integrated valve and pump, method for regulating fluid, and manufacturing method

Abstract

The present invention proposes an active valve-type micropump with integrated valve and pump, and a method and manufacturing method for regulating fluid, which includes a base layer, a pump body layer, a film layer, a support, a micromotor and a shaft from bottom to top. An array consisting of three radial annular permanent magnets of exactly the same size is integrated on the shaft, wherein the circumferential polarity phases of the three annular permanent magnets have a certain phase difference. Three cavities of the same size are etched on the pump body layer, and the film layer is composed of a magnet array and a film consisting of three cylindrical magnets with the same magnetic pole direction. When the micromotor and the shaft drive the annular permanent magnet array to rotate, a changing magnetic field is generated at three positions, causing the cylindrical magnet array to move up and down, and the cylindrical magnet array drives the film to reciprocate up and down, thereby causing the volume of the pump body layer cavity to change. The present invention has a simple structure and has the advantages of low manufacturing cost, low driving voltage, low power consumption and large flow rate.

Description

Technical Field

[0001] The present invention belongs to the field of microfluid technology, and relates to an active valve-type micropump based on magnetic drive and a manufacturing method thereof, and specifically to an active valve-type micropump with a valve and pump integrated with a rotating permanent magnet array drive and a manufacturing method thereof, which is mainly used for driving and precise control of microfluids in agricultural engineering, aerospace, bioengineering and microelectronics industries. Background Art

[0002] Nowadays, microfluidic systems have great application prospects in the field of fluidics, and microfluidic systems are an important branch of MEMS (micro-electromechanical systems). Microfluidic systems are generally integrated with devices such as micropumps, microvalves, microchannels and microsensors. Among them, micropumps, as the power mechanism in microfluidic systems, are the core components of microsystems and the difficulty in designing and manufacturing microsystems. The performance of micropumps directly affects the performance of the system.

[0003] Domestic and foreign scholars have developed a variety of micropumps using different driving principles to achieve the supply and precise control of trace fluids. For example, according to the presence or absence of mechanical parts, micropumps can be divided into mechanical micropumps and non-mechanical micropumps. According to the driving force, mechanical micropumps can be divided into piezoelectric, electrostatic, pneumatic, thermal drive, magnetic drive, etc., and non-mechanical micropumps can be divided into electro-osmotic, gravity and electrochemical types. However, due to size limitations, most micropumps either have high driving voltage and high power consumption, or have complex structures, large volumes, and are difficult to process and manufacture, which cannot meet the requirements of some equipment in agricultural engineering and aerospace engineering for small size, easy integration, low power consumption, low driving voltage and low cost of micropumps.

[0004] As a type of mechanical micropump, the magnetically driven micropump is generally provided by an electromagnetic coil. It has the advantages of low operating voltage, low energy consumption, high output power, and high reliability, and can be applied to many microfluidic fields. For example, the patent discloses an electromagnetically driven MEMS micropump device (application number: 202110425677.X), which includes an electromagnetic coil, a permanent magnet, a diaphragm, a one-way valve group, and a pump body. When the micropump is working, an alternating magnetic field is generated by supplying alternating current to the electromagnetic coil. The permanent magnet produces mechanical reciprocating motion due to the change in the magnetic field, which causes the displacement of the diaphragm to change repeatedly, thereby causing the internal volume and pressure of the pump body to change to achieve pumping, and the one-way valve group is used to control the direction of movement of the fluid. This type of micropump has the following problems: 1) The coil with more turns is larger in volume, more complex in structure, and difficult to manufacture; 2) The magnetic field generated by the coil is smaller, which makes the diaphragm deform less, the output flow is smaller, the response is slower, and the driving efficiency is low.

[0005] Valves are the main devices that control the size, opening and closing of fluid flow, and the direction of flow in macroscopic flow. Microvalves are usually required in microfluidics to control the flow of liquid in the micropump cavity. According to the opening and closing method of the microvalve, micropumps can be divided into valveless type and valved type. The valved type includes active valve type and passive valve type.

[0006] The valveless micropump has been a research hotspot in recent years. It uses a nozzle / diffuser with a static geometric shape and uses the fluid mechanics principle of the nozzle / diffuser to achieve the purpose of rectification. Its advantage is that the structure is relatively simple. For example, the patent of a valveless electromagnetic micropump and its manufacturing method (application number: 201810155894.X) uses silicon wafers, PDMS and other materials to complete the production of microfluidic chips. The entire structure consists of a pump cavity layer, a film layer and a coil layer. The electromagnetic coil is powered to generate a changing magnetic field. The interaction between the changing magnetic field and the magnet is used to make the magnet drive the film to vibrate back and forth, thereby driving the fluid pumping of the pump cavity layer. The micropump uses a nozzle / diffuser to control the direction of the fluid, and there are the following problems: 1) Since the micropump has no valve control and uses the rectification effect of the nozzle / diffuser to control the direction of the fluid, it can only control the flow direction of the fluid in one direction and cannot control the on and off of the fluid; 2) Compared with active valve type and passive valve type micropumps, its output flow is small and the output efficiency is low.

[0007] Passive valve type micropumps use micropumps with dynamic valves such as check valves and ball valves, and use the fluid pressure inside the pump chamber to control the opening and closing of the valve. For example, the patent for a tubular structure plunger electromagnetic micropump using a permanent magnet one-way valve (application number: 201711128040.4) uses the electromagnetic field generated by the electromagnetic coil to generate an electromagnetic field, and then the electromagnetic field generated by the electromagnetic coil generates an electromagnetic force on the permanent magnet plunger, which drives the permanent magnet plunger to reciprocate, thereby providing driving force for the micropump. The micropump achieves unidirectional pumping of liquid through the directional rectification effect of the ball valve, and there are the following problems: 1) The ball valve is large in size, making it difficult to miniaturize the micropump; 2) The opening and closing of the ball valve requires the pressure of the fluid inside the pump chamber. When the micropump operates at a high frequency, the valve may fail due to low sensitivity.

[0008] Active valve micropumps use an external driving force to control the opening and closing of the valve. Compared with passive valve and valveless micropumps, they have the advantages of high sensitivity, large valve opening, ability to control the on and off of the fluid, and large output flow. However, active valve micropumps require additional driving methods to control the opening and closing of the valve, making the structure of the micropump more complicated. Moreover, for microfluidic platforms, most of the current active valve micropumps separate the micropump from the active valve, use the pump chamber to provide power for the microfluidic, and use the valve to control the direction and on and off of the fluid, which requires the pump chamber and microvalve to be used together. Summary of the invention

[0009] The purpose of the present invention is to provide an active valve type micropump with a valve and pump integrated in one based on a rotating permanent magnet array drive to address the shortcomings of existing magnetically driven micropump technology, such as small driving magnetic field, slow response speed, small output flow, low output efficiency of existing valveless micropumps, low valve sensitivity and difficult processing of existing passive valve type micropumps, and relatively complex structure of existing active valve type micropumps.

[0010] To achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0011] An active valve-type micropump with a valve and pump integrated based on a rotating permanent magnet array drive, comprising, from bottom to top, a base layer (1), a pump body layer (2), a thin film layer (3), a support member (4), a micromotor (5) and a shaft (6); wherein the base layer (1), the pump body layer (2) and the thin film layer (3) serve as the main body of the micropump, the base layer (1) being located at the bottom layer of the entire micropump, the pump body layer (2) being located at the middle layer, and the thin film layer (3) being located at the top layer, and the three being bonded together by a MEMS process; the micromotor (5) and the shaft (6) being located above the thin film layer (3), and the micromotor (5) and its shaft (6) and the base layer (1) being connected together by support members (4) arranged on both sides, and forming the micropump as a whole.

[0012] Furthermore, the pump body layer (2) is a rectangular component, and is etched with a pump chamber (8), a valve chamber I (9), a valve chamber II (10), a microchannel (11), a fluid inlet (12) and a fluid outlet (13); the pump chamber (8), the valve chamber I (9) and the valve chamber II (10) are of the same size and are circular through holes, which are connected through the microchannel (11); the microchannel (11) is a rectangular through hole; the fluid inlet (12) and the fluid outlet (13) are rectangular depressions.

[0013] Furthermore, the base layer (1) is a rectangular component, a locking block (7) is bonded to the base layer, and two rectangular through holes are etched in the length direction of the base layer to serve as assembly holes for connecting the support member (4).

[0014] Furthermore, the film layer (3) is composed of a PDMS film and an array of three cylindrical permanent magnets; the three cylindrical permanent magnets are exactly the same in size and magnetic pole direction and are magnetized in the thickness direction; the three cylindrical magnets are correspondingly located in the vertical direction of the center of the pump chamber (8), valve chamber I (9) and valve chamber II (10); the magnet located on the pump chamber (8) is a driving magnet (14) whose function is to provide pressure for the fluid in the pump chamber; the magnet located at the center of the valve chamber I (9) and valve chamber II (10) is a valve magnet I (15) and a valve magnet II (16) which work together with the valve chamber to control the on / off and flow direction of the fluid; the N poles of the three cylindrical magnets are bonded to the film by a PDMS adhesive.

[0015] Furthermore, the shaft (6) is integrated with a rotating permanent magnet array (17) consisting of three radially magnetized annular permanent magnets with different circumferential magnetic pole directions; the three annular permanent magnets are exactly the same in size, the circumferential magnetic poles of the left and right permanent magnets in the annular permanent magnet array have a phase difference of 180°, and the circumferential magnetic poles of the middle permanent magnet and the left and right permanent magnets have a phase difference of 90°.

[0016] The specific method of regulating fluid by the active valve-type micropump with integrated valve and pump driven by a rotating permanent magnet array is as follows:

[0017] When the micro motor shaft rotates, it drives the annular permanent magnet array to rotate and generates a changing magnetic field at three positions. By utilizing the effect of like magnets attracting each other and opposite magnets repelling each other, the cylindrical magnet is subjected to a sinusoidally changing magnetic force, thereby moving up and down. The cylindrical magnet drives the film to reciprocate up and down, thereby driving the fluid in the pump body layer to pump. Due to the different polarity phases of the annular permanent magnet, during one rotation of the micro motor shaft, the cylindrical magnets at three different positions are subjected to different magnetic forces, so that the three different positions of the cylindrical magnets play different roles in the operation of the micro pump.

[0018] During the rotation of the micro motor shaft, when the driving magnet changes from being subjected to the maximum repulsive force to being subjected to the maximum suction force, the driving magnet moves from the lowest position to the highest position, the film deforms so that the pump chamber volume changes from the minimum to the maximum, and the valve magnet I is subjected to the suction force at this stage so that the valve chamber I is opened, and the valve magnet II is subjected to the repulsive force at this stage so that the valve chamber II is locked. At this time, the micro pump is in the pumping mode, and the negative pressure inside the pump chamber sucks the fluid at the inlet into the pump chamber. When the driving magnet changes from being subjected to the maximum suction force to being subjected to the maximum repulsive force, the driving magnet moves from the highest position to the lowest position, and the micro pump works in the opposite mode, in the pumping mode, the film deforms so that the pump chamber volume changes from the maximum to the minimum, the valve chamber I is locked, the valve chamber II is opened, and the positive pressure inside the pump chamber discharges the fluid from the pump chamber to the outlet. The whole cycle is repeated, so as to achieve the purpose of transporting the fluid from the inlet of the micro pump to the outlet, and the flow rate and flow direction of the fluid can be changed by changing the speed and direction of the motor.

[0019] The manufacturing method of the active valve-type micropump with integrated valve and pump driven by a rotating permanent magnet array comprises:

[0020] The pump body layer, base layer and support member are made of PMMA, and microchannels, pump chambers, valve chambers, fluid inlets and outlets and rectangular depressions are etched by laser. The pump body layer and the base layer are bonded by hot pressing, wherein the bonding pressure between the pump body layer and the base layer is 60N, the temperature is 115°C, and the time is 60min. The support member, the base layer and the locking block are bonded by ultraviolet curing glue.

[0021] The film material is PDMS, and the PDMS film is prepared by a mold method. The mold material is PMMA, which is formed by laser etching. The ratio of PDMS prepolymer to curing agent is 5:1, and it is cured at a constant temperature of 75°C for 15 minutes, and the film layer and the pump body layer are bonded together by a plasma surface modification method.

[0022] Compared with the prior art, the present invention has the following advantages:

[0023] The present invention adopts a micro motor to drive the permanent magnet to rotate to provide the micro pump driving force. Compared with the common electromagnetic magnetic force driven micro pump, it overcomes the problems of small driving magnetic field, low output flow rate, slow response speed, etc. In addition, the present invention adopts PMMA as the main body of the micro pump and adopts the laser etching method, which has the characteristics of simple structure, easy processing, low cost and mass production.

[0024] The present invention uses a rotating permanent magnet array to provide driving force to control the pumping of a micropump and the opening and closing of a valve, integrates a micropump with two microvalves, provides pumping power for microfluids through a pump cavity, and controls the direction and on-off of the fluid through two valve cavities. Compared with passive valve micropumps and valveless micropumps, the active valve micropump based on the rotating permanent magnet array drives a valve-pump integration, which overcomes the problems of being unable to control the on-off of fluids, low valve sensitivity, and low output efficiency. Compared with other active valve micropumps, it has a compact structure, a small size, and is easy to manufacture. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 Schematic diagram of the three-dimensional structure of the present invention

[0026] Figure 2 Schematic diagram of the combination of base layer, pump body layer, film layer and micro motor

[0027] Figure 3 Cross-sectional view of the base layer, pump body layer, film layer, and micro motor after assembly

[0028] Figure 4 Schematic diagram of the initial working state of the micropump (state I, shaft rotation 0°)

[0029] Figure 5 Schematic diagram of the micro pump in pumping mode (state II, shaft rotated 90°)

[0030] Figure 6 Schematic diagram of the critical transition of the micropump pumping-in and pumping-out modes (state III, the shaft rotates 180°)

[0031] Figure 7 Schematic diagram of the micro pump pumping mode (state IV axis rotated 270°)

[0032] Figure 8Schematic diagram of the micro pump's end-of-work state (state V axis rotates 360°)

[0033] Fig. 9 Schematic diagram of the magnetic force variation curve of valve magnet I14, valve magnet II15 and driving magnet 13

[0034] Fig.10 Schematic diagram of the deformation displacement curve of the PDMS film at three different positions

[0035] In the figure, 1 is a substrate layer, 2 is a pump body layer, 3 is a film layer, 4 is a support member, 5 is a micro motor, 6 is a shaft body, 7 is a locking block, 8 is a pump chamber, 9 is a valve chamber I, 10 is a valve chamber II, 11 is a microchannel, 12 is a fluid inlet, 13 is a fluid outlet, 14 is a driving magnet, 15 is a valve magnet I, 16 is a valve magnet II, and 17 is a rotating permanent magnet array; DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0037] like Figure 1 , Figure 2 and Figure 3 As shown. An active valve type micro pump with integrated valve and pump driven by a rotating permanent magnet array comprises, from bottom to top, a base layer 1, a pump body layer 2, a film layer 3, a support 4, a micro motor 5 and a shaft 6. The base layer 1, the pump body layer 2 and the film layer 3 are the main body of the micro pump, the base layer 1 is located at the bottom layer of the entire micro pump, the pump bottom layer 2 is located in the middle layer, and the film layer 3 is located at the top layer, and the three are bonded together by MEMS technology; the micro motor 5 and the shaft 6 are located above the film layer 3, the shaft 6 is fixed to the motor shaft, and rotates with the motor shaft, the micro motor 5 and the shaft 6 are fixed by the support 4 and together with the base layer, forming the whole micro pump.

[0038] The pump body layer 2 is a rectangular component with a length of 36-50mm, a width of 20mm and a height of 2mm. The pump body layer 2 is etched with a pump cavity 8, a valve cavity I9 and a valve cavity II10, a microchannel 11, a fluid inlet 12 and a fluid outlet 13; the pump cavity 8, the valve cavity I9 and the valve cavity II10 are of the same size and are circular through holes with a diameter of 6-10mm; the microchannel 11 is a rectangular through hole with a width of 2mm, which is used to connect the pump cavity and the valve cavity; the fluid inlet 12 and the fluid outlet 13 are rectangular depressions with a width of 2mm and a depth of 1mm.

[0039] The film layer 3 is composed of an array of PDMS film and three cylindrical permanent magnets. The three cylindrical permanent magnets are exactly the same in size and magnetic pole direction, with a diameter of 2 to 4 mm and a thickness of 1 to 3 mm, and are magnetized in the thickness direction. The three cylindrical magnets are located in the vertical direction of the center of the pump chamber and the valve chamber. The driving magnet 14 is located in the center of the pump chamber 8, the valve magnet I15 is located in the center of the valve chamber I, and the valve magnet II16 is located in the center of the valve chamber II. The N poles of the three cylindrical magnets are bonded to the film through the PDMS adhesive, and work together with the valve chamber to control the on / off and flow direction of the fluid. The N poles of the three cylindrical magnets are bonded to the film through the PDMS adhesive.

[0040] The base layer 1 is a rectangular component with a length of 36-50 mm, a width of 20 mm and a height of 2 mm. A locking block 7 is bonded to the base layer. The locking block 7 is 7.6 mm long, 2 mm wide and 2 mm high. The function of the locking block 7 is to limit the displacement of the valve magnet I15 and the valve magnet II16, so that the valve magnet I15 and the valve magnet II16 can control the on-off and flow direction of the fluid. Two rectangular through holes are etched in the length direction of the base layer 1 as assembly holes to connect the support 4.

[0041] The shaft body 6 is connected to the micro motor 5 by welding. The shaft body 6 has a diameter of 2 to 3 mm and is integrated with an array 16 composed of three radially magnetized annular permanent magnets with different circumferential magnetic pole directions. The three annular permanent magnets are exactly the same size, with an outer diameter of 6 to 8 mm, an inner diameter of 2 mm, and a thickness of 2 to 3 mm. The phase difference between the circumferential magnetic poles of the left and right permanent magnets in the annular permanent magnet array 16 is 180°, and the phase difference between the circumferential magnetic poles of the middle permanent magnet and the left and right permanent magnets is 90°. The three annular permanent magnets are aligned with the center of the driving magnet 14, valve magnet I15, and valve magnet II16 in the vertical direction. The support 4 is bonded to the assembly hole of the base layer 1 by ultraviolet curing glue, and connected to the micro motor 5 and the shaft body 6 to form the micro pump as a whole.

[0042] like Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 As shown, a specific method for regulating fluid of an active valve-type micropump with a valve-pump integrated with a rotating permanent magnet array is as follows:

[0043] During the rotation of the shaft 6, when the repulsive force on the driving magnet 14 is the largest, the magnetic force on the valve magnet I15 and the valve magnet II16 is zero, and the film is deformed to minimize the volume of the pump chamber 8. Figure 4 As shown, this time is set as the starting position of the shaft body 6 after one rotation. During the process of the shaft body 6 rotating 180° from the starting position, the micro pump is Figure 4 Medium state I works to Figure 6 In the middle state III, the driving magnet 13 changes from being subjected to the maximum repulsive force to being subjected to the maximum attractive force, and the driving magnet 13 moves from the lowest position to the highest position. The film deforms so that the volume of the pump chamber changes from the minimum to the maximum, and the valve magnet I15 is subjected to the attractive force at this stage, so that the valve chamber I9 is ​​opened, and the valve magnet II16 is subjected to the repulsive force at this stage, so that the valve chamber II10 is locked. At this time, the micro pump is in the pumping mode, sucking the fluid at the inlet into the driving chamber. In the process of the shaft body 6 rotating from 180° to 360°, the micro pump is Figure 6 State III works to Figure 7 In state V, the driving magnet 13 changes from being subjected to the maximum suction force to being subjected to the maximum repulsion force, and the driving magnet 13 moves from the highest position to the lowest position. The membrane deforms so that the volume of the pump chamber changes from the maximum to the minimum. At this time, the micro pump is in the pump-out mode, the valve chamber I9 is ​​locked, the valve chamber II10 is opened, and the fluid is discharged from the pump chamber 8 to the outlet. The whole cycle is repeated, so as to achieve the purpose of transporting the fluid from the inlet of the micro pump to the outlet. The flow rate and flow direction of the fluid can be changed by changing the speed and direction of the micro motor.

[0044] As an example, the maximum suction force is 150 mN, and the maximum repulsion force is 135 mN.

[0045] like Fig. 9 As shown, the simulation analysis is performed in COMSOL finite element analysis software, and the magnetic force exerted on the driving magnet 14, the valve magnet I15 and the valve magnet II16 during one rotation of the shaft body 6;

[0046] like Fig.10 As shown, the deformation displacement of the PDMS film at three different positions under the action of the driving magnet 14, the valve magnet I15 and the valve magnet II16.

[0047] The manufacturing method of the active valve-type micropump with integrated valve and pump driven by a rotating permanent magnet array is as follows:

[0048] The base layer 1, pump body layer 2 and support member 4 are made of PMMA, and patterns such as driving cavity 8, valve cavity I9, valve cavity II10, microchannel 11, fluid inlet 12, and fluid outlet 13 are etched by femtosecond laser processing, which has the advantages of simple processing technology and low cost. The base layer 1 and pump body layer 2 are bonded by hot pressing method, and the specific process is as follows: first, the processed base layer 1 and pump body layer 2 are washed and dried with anhydrous ethanol and deionized water in turn, and then placed on the auxiliary fixture device after mechanical positioning, and then a pressure of 60N is applied to the pump body layer 1 and the base layer 2 through the clamping bolts of the auxiliary fixture, and finally, the base layer 1, pump body layer 2 and the auxiliary fixture are placed in a drying box, and are bonded at a constant temperature of 115°C for 60 minutes, and then taken out, and placed in a drying dish for use after cooling.

[0049] The film layer 3 is formed by a mold method, and the specific process is as follows: first prepare PDMS and curing agent in a ratio of 5:1; use a magnetic stirrer to mix for about 10 minutes and then put it in a vacuum dryer for degassing for 30 minutes; inject PMDS into the mold made of PMMA and put it in a constant temperature oven at 75°C for constant temperature curing for 15 minutes; apply a layer of PDMS colloid thin layer on the bottom of the cylindrical permanent magnet, adhere to the PDMS film after positioning, and then continue to cure at 75°C for 15 minutes; demold the cured film layer 3 and cut it into a suitable shape. After the film layer 3 is prepared, use an oxygen plasma cleaning machine to treat the surface of the pump body layer 2 and the film layer 3 for 2 to 3 minutes, and finally bond the film layer 3 and the pump body layer 2 together by pressing.

[0050] The locking block 6 is cut by femtosecond laser; after the support member 10 and the locking block 6 are positioned with the base layer 1, they are bonded to the base layer 1 by ultraviolet curing glue.

[0051] In summary, the present invention proposes an active valve-type micropump with integrated valve and pump, and a method and manufacturing method for regulating fluid, which includes a base layer, a pump body layer, a film layer, a support, a micromotor and a shaft body from bottom to top. An array composed of three radial annular permanent magnets of exactly the same size is integrated on the shaft body, wherein the circumferential polarity phases of the three annular permanent magnets have a certain phase difference, three cavities of the same size are etched on the pump body layer, and the film layer is composed of a magnet array and a film composed of three cylindrical magnets with the same magnetic pole direction. When the micromotor and the shaft body drive the annular permanent magnet array to rotate, a changing magnetic field will be generated at three positions, causing the cylindrical magnet array to move up and down, and the cylindrical magnet array drives the film to reciprocate up and down, thereby causing the volume of the pump body layer cavity to change. At the same time, during the process of the shaft body rotating one circle, due to the different polarity phases of the annular permanent magnet, the cylindrical magnets at three different positions are subjected to different magnetic forces, so that the cylindrical magnets at different positions play different roles when working. The left and right cylindrical magnets act as valves to control the on / off and direction of the fluid, and the middle cylindrical magnet provides power for the fluid. The three cylindrical magnets work together to enable the micropump to achieve the function of directional pumping of the fluid. The invention has a simple structure, low manufacturing cost, low driving voltage, low power consumption, and large flow rate, and can be widely used in driving microfluids in agricultural engineering, aerospace engineering, and microelectronics.

Claims

1. An active valve-type micropump with integrated valve and pump driven by a rotating permanent magnet array, characterized in that: From bottom to top, it includes a base layer (1), a pump body layer (2), a thin film layer (3), a support member (4), a micro motor (5) and a shaft body (6); wherein the base layer (1), the pump body layer (2) and the thin film layer (3) serve as the main body of the micro pump, the base layer (1) is located at the bottom layer of the entire micro pump, the pump body layer (2) is located at the middle layer, and the thin film layer (3) is located at the top layer, and the three are bonded together by a MEMS process; the micro motor (5) and the shaft body (6) are located above the thin film layer (3), and the micro motor (5) and its shaft body (6) and the base layer (1) are connected together by support members (4) arranged on both sides, and form the micro pump as a whole; The pump body layer (2) is a rectangular component, and is etched with a pump chamber (8), a valve chamber I (9), a valve chamber II (10), a microchannel (11), a fluid inlet (12), and a fluid outlet (13); the pump chamber (8), the valve chamber I (9), and the valve chamber II (10) are of the same size and are circular through holes, and are connected through the microchannel (11); the microchannel (11) is a rectangular through hole; the fluid inlet (12) and the fluid outlet (13) are rectangular depressions; The film layer (3) is composed of a PDMS film and an array of three cylindrical permanent magnets; the three cylindrical permanent magnets are completely the same in size and magnetic pole direction and are magnetized in the thickness direction; the three cylindrical magnets are correspondingly located in the vertical direction of the center of the pump chamber (8), valve chamber I (9) and valve chamber II (10); the magnet located on the pump chamber (8) is a driving magnet (14) whose function is to provide pressure for the fluid in the pump chamber; the magnet located at the center of the valve chamber I (9) and valve chamber II (10) is a valve magnet I (15) and a valve magnet II (16) which work together with the valve chamber to control the on / off and flow direction of the fluid; the N poles of the three cylindrical magnets are bonded to the film by a PDMS adhesive.

2. The active valve-type micropump with integrated valve and pump based on rotating permanent magnet array drive according to claim 1, characterized in that: The base layer (1) is a rectangular component, a locking block (7) is bonded to the base layer, and two rectangular through holes are etched in the length direction of the base layer to serve as assembly holes for connecting the support member (4).

3. The active valve-type micropump with integrated valve and pump based on rotating permanent magnet array drive according to claim 2, characterized in that: The shaft (6) is integrated with a rotating permanent magnet array (17) consisting of three radially magnetized annular permanent magnets with different circumferential magnetic pole directions; the three annular permanent magnets are exactly the same in size, the circumferential magnetic poles of the left and right permanent magnets in the annular permanent magnet array have a phase difference of 180°, and the circumferential magnetic poles of the middle permanent magnet and the left and right permanent magnets have a phase difference of 90°.

4. A method for regulating fluid using an active valve-type micropump based on a rotating permanent magnet array-driven valve-pump integration as claimed in claim 3, characterized in that: The steps include: During the process of the micro motor (5) driving the shaft (6) to rotate, when the driving magnet (14) changes from being subjected to the maximum repulsive force to being subjected to the maximum suction force, the membrane deforms so that the volume of the pump chamber (8) changes from the minimum to the maximum, and the valve magnet I (15) is subjected to the suction force at this stage so that the valve chamber I (9) is opened, and the valve magnet II (16) is subjected to the repulsive force at this stage so that the valve chamber II (10) is locked. At this time, the micro pump is in the pumping mode, and the negative pressure inside the pump chamber sucks the fluid at the inlet into the pump chamber (8); when the driving magnet (14) changes from being subjected to the maximum suction force to being subjected to the maximum suction force When the repulsive force is at its maximum, the working mode of the micropump is exactly the opposite, and it is in the pumping mode. The membrane is deformed so that the volume of the pump chamber (8) changes from the maximum to the minimum, the valve chamber I (9) is locked, the valve chamber II (10) is opened, and the positive pressure inside the pump chamber (8) discharges the fluid from the pump chamber (8) to the fluid outlet (13) of the micropump. The whole cycle is repeated, thereby achieving the purpose of transporting the fluid from the fluid inlet (12) of the micropump to the fluid outlet (13) of the micropump. The flow rate and flow direction of the fluid can be changed by changing the rotation speed and direction of the micromotor (5).

5. A method for manufacturing an active valve-type micropump with integrated valve and pump driven by a rotating permanent magnet array as claimed in claim 3, characterized in that: Includes steps: The pump body layer (2), the base layer (1) and the support member (4) are made of PMMA, and a microchannel, a pump cavity, a valve cavity, a fluid inlet and outlet, and a rectangular depression are etched by femtosecond laser. The pump body layer (2) and the base layer (1) are bonded together by hot pressing. The support member (4), the base layer (1) and the locking block (7) are bonded by ultraviolet curing glue. The film material is PDMS, and the PDMS film is prepared by a mold method. The mold material is PMMA, which is formed by laser etching. The film layer (3) and the pump body layer (2) are bonded together by a plasma surface modification method.

6. The method for manufacturing the active valve-type micropump integrated with a valve and a pump driven by a rotating permanent magnet array as claimed in claim 5, characterized in that: The bonding pressure between the pump body layer (2) and the base layer (1) is 60N, the temperature is 115°C, and the time is 60 minutes.

7. The method for manufacturing the active valve-type micropump integrated with a valve and a pump driven by a rotating permanent magnet array as claimed in claim 5, characterized in that: The ratio of PDMS prepolymer to curing agent was 5:1, and the curing was carried out at a constant temperature of 75 °C for 15 min.

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