A fast calibration device and method for detecting optical axis of aspherical mirror
By designing a fast calibration device including interferometer, theodolite, fixed tooling assembly, compensator assembly, spot analyzer and plane reflector, the problem that the optical axis cannot quickly achieve high-precision coaxial calibration in aspherical mirror detection is solved, and fast and accurate installation and adjustment detection is achieved.
Patent Information
- Application Number
- CN202310136775.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-02-20
- Publication Date
- 2025-05-09
- Estimated Expiration
- 2043-02-20
AI Technical Summary
When detecting existing aspherical mirrors, due to the eighteen degrees of freedom present in the interferometer, compensator and aspherical mirror, the three optical axes cannot quickly achieve high-precision coaxial calibration, which makes installation and adjustment inspection time-consuming and labor-intensive.
A fast calibration device including an interferometer, theodolite, a fixed tool assembly, a compensator assembly, a spot analyzer and a plane mirror is designed. By setting a fixed tool assembly and compensator assembly between the interferometer and theodolite, dynamic debugging is performed using the spot analyzer to achieve rapid coaxial calibration of the optical axis.
It realizes the rapid and efficient coaxial calibration of the optical axis of the interferometer, compensator and aspherical mirror, greatly saving installation and adjustment time and improving detection efficiency and accuracy.
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Figure CN116067626B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to an optical axis calibration device and method, and in particular to a fast calibration device and method for detecting an optical axis using an aspherical mirror. Background Art
[0002] During the installation, debugging and testing phase of aspheric mirrors, the size of the aspheric mirror's surface parameters is an important indicator parameter to ensure the image quality and function of the system. The smaller the surface, the better the imaging effect, the closer the system function indicators are to the design indicator requirements, and the better the product quality.
[0003] How to accurately and quickly obtain the surface parameters of the aspheric mirror after processing and after gluing is the focus of the installation personnel. Existing aspheric mirrors are generally equipped with compensators during detection, but when the compensator cannot image an infinitely far object, the return light spot cannot appear on the interferometer. As a result, during the installation and detection stage, the 18 degrees of freedom of the interferometer, compensator and aspheric mirror make it impossible for the three optical axes to quickly achieve high-precision coaxial calibration, making the installation and detection of aspheric mirrors time-consuming and laborious. Summary of the invention
[0004] The purpose of the present invention is to provide a rapid calibration device and method for detecting optical axes of aspheric mirrors, so as to solve the technical problem that when detecting existing aspheric mirrors, the interferometer, compensator and eighteen degrees of freedom of the aspheric mirror make it impossible to quickly achieve high-precision coaxial calibration of the three optical axes, making the installation and detection of the aspheric mirror time-consuming and labor-intensive.
[0005] In order to achieve the above-mentioned object, the present invention provides a rapid calibration device for detecting an optical axis of an aspheric mirror, which is special in that it includes an interferometer and a theodolite located on both sides of the aspheric mirror to be measured and whose action ends are arranged opposite to each other, and a fixed tooling assembly, a compensator assembly, a spot analyzer and a plane reflector arranged between the interferometer and the theodolite;
[0006] The fixed tooling assembly includes a first lifting frame, a support rod, a first cantilever and a second cantilever;
[0007] The support rod is horizontally installed above the first lifting frame, and the length direction of the support rod is parallel to the optical axis of the interferometer; the first cantilever is arranged at one end of the support rod close to the interferometer, one end of the first cantilever is vertically connected to the support rod, and the other end is suspended; the second cantilever is arranged at one end of the support rod close to the theodolite, one end of the second cantilever is vertically connected to the support rod, and the other end is suspended;
[0008] The compensator assembly is arranged on one side of the support rod and is located between the interferometer and the aspheric mirror to be measured, and is used for optical path compensation, so that the light emitted by the interferometer can reach the aspheric mirror to be measured through the compensator assembly and return along the original path;
[0009] The other end of the second cantilever, the other end of the first cantilever and the compensator assembly are all located on the same side of the support rod;
[0010] The light spot analyzer is used to be installed on the other end of the first cantilever or the other end of the second cantilever;
[0011] The plane reflecting mirror is used to be installed on the first cantilever, the second cantilever, the compensator assembly or the aspherical mirror to be measured.
[0012] Furthermore, in order to improve the concentricity of the calibration optical axis, a first notch is provided at the other end of the first cantilever for installing a light spot analyzer;
[0013] A second notch is provided at the other end of the second cantilever for installing a light spot analyzer.
[0014] Furthermore, in order to facilitate the position adjustment of the spot analyzer and to make the rapid calibration device more widely usable, the support rod includes a guide rod, a first slider and a second slider;
[0015] The guide rod is provided with a guide groove along its length direction;
[0016] The first slider and the second slider are clamped in the guide groove;
[0017] The first cantilever is mounted on the first slider;
[0018] The second cantilever is mounted on the second slider.
[0019] Further, in order to facilitate the adjustment of the compensator, the compensator assembly includes a compensator and a first five-dimensional adjustment frame;
[0020] The first five-dimensional adjustment frame is installed on one side of the support rod and is located at the center of the line connecting the interferometer and the theodolite;
[0021] The compensator is mounted on a first five-dimensional adjustment frame.
[0022] Further, it also includes a supporting tooling;
[0023] The supporting fixture includes a second five-dimensional adjustment frame and a V-shaped block;
[0024] The second five-dimensional adjustment frame is arranged between the compensator assembly and the theodolite;
[0025] The V-shaped block is installed on the second five-dimensional adjustment frame, and the V-shaped block is used to install the aspheric mirror to be tested.
[0026] Further, it also includes at least one second lifting frame;
[0027] The second lifting frame is installed below the interferometer.
[0028] Furthermore, it also includes a horizontally arranged detection platform;
[0029] The first lifting frame, the first five-dimensional adjustment frame, the second five-dimensional adjustment frame, the second lifting frame and the theodolite are all arranged on the detection platform.
[0030] At the same time, the present invention also provides a method for quickly calibrating an optical axis of an aspherical mirror, which is special in that it includes the following steps:
[0031] Step 1: Install a standard plane lens at the exit plane of the interferometer, adjust the interferometer so that the light spot of the standard plane lens is located at the center of the cat's eye of the interferometer, then adjust the theodolite to the ground level and perform self-alignment on the standard plane lens, transfer the interferometer's posture to the theodolite, and remove the standard plane lens;
[0032] Step 2, set the first lifting frame and the support rod between the interferometer and the theodolite, install the first cantilever on the support rod, and install the plane reflector on the back of the first cantilever, adjust the position and posture of the first cantilever so that the image reflected by the plane reflector falls on the cross center of the theodolite, and remove the plane reflector; the back is the side opposite to the theodolite;
[0033] Step 3, install the second cantilever on the support rod, and install the plane reflector on the back of the second cantilever, adjust the position and posture of the second cantilever so that the image reflected by the plane reflector falls on the center of the theodolite cross, and remove the plane reflector;
[0034] Step 4, install a standard spherical lens on the interferometer, adjust the interferometer so that the light spot of the standard spherical lens is located at the center of the cat's eye of the interferometer, install a light spot analyzer on the first cantilever, make the photosensitive surface of the light spot analyzer face the focus of the standard spherical lens, record the center position of the focus, and then remove the light spot analyzer;
[0035] Step 5, install the compensator assembly on one side of the support rod, install the plane reflector on the end face of the compensator opposite to the theodolite, install the spot analyzer on the second cantilever, make the photosensitive surface of the spot analyzer opposite to the focus of the standard spherical lens, adjust the compensator until the focus position measured by the spot analyzer again is the same as the focus position recorded in step 4, and at the same time, the image reflected by the plane reflector is located at the cross center of the theodolite; Step 6, remove the plane reflector, dismantle the spot analyzer, the first lifting frame and the support rod, install the support tooling, install the aspheric mirror to be tested on the support tooling, and install the plane reflector on the back of the aspheric mirror to be tested;
[0036] Step 7: Adjust the tilt posture of the aspheric mirror to be tested by the supporting fixture so that the image reflected by the plane reflector coincides with the cross center of the theodolite. At the same time, the light emitted by the interferometer passes through the compensator and the aspheric mirror to be tested in sequence, and then returns to the interferometer through the compensator. The light spot is located at the center of the cat's eye of the interferometer, and the coaxial calibration of the optical axis is completed.
[0037] Furthermore, in step 5: when installing the compensator assembly, a laser rangefinder is used to measure the distances between the compensator and the interferometer and the aspheric mirror to be measured, respectively, so that the two distances meet preset values.
[0038] Beneficial effects of the present invention:
[0039] 1. The present invention sets a fixed tooling assembly between the interferometer and the theodolite. The spatial posture of the interferometer can be transferred to the theodolite by observing the autocollimation image of the interferometer through the theodolite. The optical path between the interferometer and the theodolite is divided into two sections by a compensator. The light spot analyzer is used to ensure the front and rear concentricity of the light of the interferometer through the compensator, so as to calibrate the optical axis of the aspheric mirror detection, and quickly connect the divided optical paths together, so as to quickly and effectively calibrate the coaxial optical axes of the interferometer, the compensator and the aspheric mirror, which greatly saves the installation time.
[0040] 2. The present invention utilizes a spot analyzer for dynamic debugging and uses an optical method to calibrate the optical axis throughout the entire process, and has the technical characteristics of simple installation and detection and high reliability.
[0041] 3. The present invention uses a guide rod plus a slider to adjust the distance between the first cantilever and the second cantilever, so that the position of the spot analyzer can be adjusted forward and backward according to actual conditions during calibration, and has a wide range of applications. BRIEF DESCRIPTION OF THE DRAWINGS
[0042] Figure 1 It is a structural schematic diagram of step 1 to step 2 in a rapid calibration device and method for detecting an optical axis of an aspherical mirror according to the present invention;
[0043] Figure 2 It is a structural schematic diagram of step 4 in a rapid calibration device and method for detecting an optical axis of an aspherical mirror according to the present invention;
[0044] Figure 3 It is a structural schematic diagram of step 5 in a rapid calibration device and method for detecting an optical axis of an aspherical mirror according to the present invention;
[0045] Figure 4 This is the fourth structural schematic diagram of step 6 to step 7 in a rapid calibration device and method for detecting an optical axis of an aspherical mirror according to the present invention;
[0046] Figure 5 It is a structural schematic diagram of the support rod in the present invention.
[0047] Figure Number:
[0048] 1-interferometer, 11-second lifting frame; 2-theodolite; 3-fixed tooling assembly, 31-first lifting frame, 32-support rod, 321-guide rod, 322-first slider, 323-second slider, 33-first cantilever, 331-first notch, 332-first limit plate, 34-second cantilever, 341-second notch, 342-second limit plate; 4-compensator assembly, 41-compensator, 42-first five-dimensional adjustment frame; 5-spot analyzer; 6-plane reflector; 7-aspherical mirror to be tested; 8-support tooling, 81-second five-dimensional adjustment frame, 82-V-block; 9-detection platform; 10-standard spherical lens, 12-core shaft. DETAILED DESCRIPTION
[0049] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0050] A rapid calibration device for detecting an optical axis of an aspheric mirror is used to detect the surface parameters of an aspheric mirror 7 to be tested. Figure 1-Figure 5 As shown, the rapid calibration device includes an interferometer 1 and a theodolite 2 located on both sides of the aspheric mirror 7 to be measured and with the working ends arranged opposite to each other, and a fixed fixture assembly 3, a compensator assembly 4, a spot analyzer 5, a plane reflector 6, a supporting fixture 8 and a detection platform 9 arranged between the interferometer 1 and the theodolite 2;
[0051] At least one second lifting frame 11 is installed below the interferometer 1, and the interferometer 1 can be installed with a standard plane lens and a standard spherical lens 10;
[0052] The fixed tooling assembly 3 includes a first lifting frame 31, a support rod 32, a first cantilever 33 and a second cantilever 34;
[0053] The support rod 32 is horizontally installed above the first lifting frame 31, and the length direction of the support rod 32 is parallel to the optical axis of the interferometer 1; the support rod 32 includes a guide rod 321, a first slider 322 and a second slider 323; the guide groove on the guide rod 321 is arranged along the length direction thereof; the first slider 322 and the second slider 323 are clamped in the guide groove;
[0054] The first cantilever 33 is arranged at one end of the support rod 32 close to the interferometer 1, and the first cantilever 33 is perpendicular to the support rod 32; one end of the first cantilever 33 is mounted on the first slider 322, and the other end is suspended; a first notch 331 is arranged at the other end of the first cantilever 33; the second cantilever 34 is arranged at one end of the support rod 32 close to the theodolite 2, and the second cantilever 34 is perpendicular to the support rod 32, one end of the second cantilever 34 is mounted on the second slider 323, and the other end is suspended; a second notch 341 is arranged at the other end of the second cantilever 34; the first notch 33 1 and the second notch 341 are used to install the spot analyzer 5; the compensator assembly 4 is arranged on one side of the support rod 32 and is located between the interferometer 1 and the aspheric mirror 7 to be measured, and is used for optical path compensation, so that the light emitted by the interferometer 1 can reach the aspheric mirror 7 to be measured through the compensator assembly 4 and return along the original path; specifically, the compensator assembly 4 includes a compensator 41 and a first five-dimensional adjustment frame 42; the first five-dimensional adjustment frame 42 is installed on one side of the support rod 32 and is located at the center of the line connecting the interferometer 1 and the theodolite 2; the compensator 41 is installed on the first five-dimensional adjustment frame 42. The other end of the second cantilever 34, the other end of the first cantilever 33 and the compensator assembly 4 are all located on the same side of the support rod (32). The spot analyzer 5 is installed on the other end of the first cantilever 33 or the other end of the second cantilever 34; the plane reflector 6 is used to be installed on the first cantilever 33 / the second cantilever 34 / the compensator assembly 4 / the aspheric mirror 7 to be measured.
[0055] The supporting fixture 8 includes a second five-dimensional adjustment frame 81 and a V-block 82; the second five-dimensional adjustment frame 81 is arranged between the compensator assembly 4 and the theodolite 2; the V-block 82 is installed on the second five-dimensional adjustment frame 81, and the V-block 82 is used to install the aspheric mirror 7 to be tested.
[0056] The first lifting frame 31 , the first five-dimensional adjustment frame 42 , the second five-dimensional adjustment frame 81 , the second lifting frame 11 and the theodolite 2 are all arranged on the detection platform 9 .
[0057] The rapid calibration device can utilize the theodolite 2 and the spot analyzer 5 to monitor the center of the optical axis in real time, and can realize dynamic adjustment visually, thus greatly shortening the debugging time, improving the adjustment efficiency, and having high accuracy.
[0058] The specific calibration method includes the following steps:
[0059] Step 1, install a standard plane lens at the exit plane of interferometer 1, adjust interferometer 1 so that the light spot of the standard plane lens is located at the center of the cat's eye of interferometer 1, then adjust theodolite 2 to the ground level and perform self-alignment on the standard plane lens, transfer the posture of interferometer 1 to theodolite 2, and remove the standard plane lens;
[0060] Step 2, set the first lifting frame 31 and the support rod 32 between the interferometer 1 and the theodolite 2, install the first cantilever 33 on the support rod 32, and install the plane reflector 6 on the back of the first cantilever 33, adjust the position and posture of the first cantilever 33 so that the image reflected by the plane reflector 6 falls on the cross center of the theodolite 2, and remove the plane reflector 6; the back is the side opposite to the theodolite 2;
[0061] Step 3, install the second cantilever 34 on the support rod 32, and install the plane reflector 6 on the back of the second cantilever 34, adjust the position and posture of the second cantilever 34 so that the image reflected by the plane reflector 6 falls on the cross center of the theodolite 2, and remove the plane reflector 6;
[0062] Step 4, install the standard spherical lens 10 on the interferometer 1, adjust the interferometer 1 so that the light spot on the standard spherical lens 10 is located at the center of the cat's eye of the interferometer 1, install the light spot analyzer 5 on the first cantilever 33, make the photosensitive surface of the light spot analyzer 5 face the focus of the standard spherical lens 10, record the focus center position, and then remove the light spot analyzer 5;
[0063] Step 5, install the compensator assembly 4 on one side of the support rod 32, install the compensator 41 on the first five-dimensional adjustment frame 42, and use a laser rangefinder to measure the distances between the compensator 41 and the interferometer 1 and the theodolite 2, respectively, so that the two distances meet the preset values, and install the plane reflector 6 on the end surface of the compensator 41 opposite to the theodolite 2; adjust the inclination of the compensator 41 through the first five-dimensional adjustment frame 42, so that the image reflected by the plane reflector 6 is located at the cross center of the theodolite 2, install the spot analyzer 5 on the second cantilever 34, so that the photosensitive surface of the spot analyzer 5 is opposite to the focus of the standard spherical lens 10, adjust the position of the compensator 41 until the focal position measured again is the same as the focal position recorded in step 4, and observe whether the image reflected by the plane reflector 6 is located at the cross center of the theodolite 2;
[0064] If the image reflected by the plane reflector 6 is located at the cross center of theodolite 2, then execute step 6;
[0065] If the image reflected by the plane reflector 6 deviates from the cross center of the theodolite 2, the tilt posture of the compensator 41 is adjusted again by the first five-dimensional adjustment frame 42 until the image reflected by the plane reflector 6 is located at the cross center of the theodolite 2, and then step 6 is executed;
[0066] Step 6, remove the plane reflector 6, and dismantle the spot analyzer 5, the first lifting frame 31 and the support rod 32, install the support fixture 8, and install the aspheric mirror 7 to be tested on the support fixture 8, and install the plane reflector 6 on the back of the aspheric mirror 7 to be tested;
[0067] Step 7, adjust the tilt posture of the aspheric mirror to be tested 7 through the supporting fixture 8, so that the image reflected by the plane reflector 6 coincides with the cross center of the theodolite 2, and at the same time, the light emitted by the interferometer 1 passes through the compensator 41 and the aspheric mirror to be tested 7 in sequence, and then returns to the interferometer 1 through the compensator 41, and the light spot is located at the cat's eye center of the interferometer 1, thereby completing the coaxial calibration of the optical axis.
[0068] The rapid calibration device provided by the present invention can also be used for naked mirror frame detection. If it is a naked mirror frame detection, it is necessary to install the core shaft 12 for the aspheric mirror 7 to be tested, and then install the plane reflector 6 on the end face of the core shaft 12 close to one end of the theodolite 2.
[0069] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
Claims
1. A rapid calibration method for detecting an optical axis of an aspherical mirror, characterized in that: The following steps are involved: Step 1, install a standard plane lens on the interferometer (1), adjust the interferometer (1) so that the light spot of the standard plane lens is located at the center of the cat's eye of the interferometer (1), then adjust the theodolite (2) to the ground level and perform self-alignment on the standard plane lens, transfer the posture of the interferometer (1) to the theodolite (2), and remove the standard plane lens; Step 2: arranging the first lifting frame (31) and the support rod (32) between the interferometer (1) and the theodolite (2), installing the first cantilever (33) on the support rod (32), and installing the plane reflector (6) on the back of the first cantilever (33), adjusting the position and posture of the first cantilever (33) so that the image reflected by the plane reflector (6) falls on the cross center of the theodolite (2), and removing the plane reflector (6); the back is the side opposite to the theodolite (2); Step 3, installing the second cantilever (34) on the support rod (32), and installing the plane reflector (6) on the back of the second cantilever (34), adjusting the position and posture of the second cantilever (34) so that the image reflected by the plane reflector (6) falls on the cross center of the theodolite (2), and removing the plane reflector (6); Step 4, installing a standard spherical lens (10) on the interferometer (1), adjusting the interferometer (1) so that the light spot of the standard spherical lens (10) is located at the center of the cat's eye of the interferometer (1), installing a light spot analyzer (5) on the first cantilever (33), making the photosensitive surface of the light spot analyzer (5) face the focus of the standard spherical lens (10), recording the center position of the focus, and then removing the light spot analyzer (5); Step 5, installing the compensator assembly (4) on one side of the support rod (32), installing the plane reflector (6) on the end surface of the compensator (41) opposite to the theodolite (2), installing the spot analyzer (5) on the second cantilever (34), making the photosensitive surface of the spot analyzer (5) opposite to the focus of the standard spherical lens (10), and adjusting the compensator (41) until the focus position measured again by the spot analyzer (5) is the same as the focus position recorded in step 4, and at the same time, the image reflected by the plane reflector (6) is located at the cross center of the theodolite (2); Step 6, remove the plane reflector (6), dismantle the spot analyzer (5), the first lifting frame (31) and the support rod (32), install the support fixture (8), install the aspheric mirror (7) to be tested on the support fixture (8), and install the plane reflector (6) on the back of the aspheric mirror (7) to be tested; Step 7: The tilting posture of the aspheric mirror to be tested (7) is adjusted by the supporting fixture (8) so that the image reflected by the plane reflector (6) coincides with the cross center of the theodolite (2). At the same time, the light emitted by the interferometer (1) passes through the compensator (41), the aspheric mirror to be tested (7) in sequence, and then returns to the interferometer (1) through the compensator (41), and the light spot is located at the center of the cat's eye of the interferometer (1), thereby completing the coaxial calibration of the optical axis.
2. The rapid calibration method for detecting the optical axis of an aspherical mirror according to claim 1, characterized in that: In step 5: when installing the compensator assembly (4), a laser rangefinder is used to measure the distances between the compensator (41) and the interferometer (1) and the aspheric mirror (7) to be measured, respectively, so that the two distances meet preset values.
3. A rapid calibration device for detecting an optical axis of an aspherical mirror, used in the rapid calibration method for detecting an optical axis of an aspherical mirror according to claim 1 or 2, characterized in that: It comprises an interferometer (1) and a theodolite (2) located on both sides of an aspheric mirror (7) to be measured and arranged with their action ends facing each other, and a fixed fixture component (3), a compensator component (4), a light spot analyzer (5) and a plane reflector (6) arranged between the interferometer (1) and the theodolite (2); The fixed tooling assembly (3) comprises a first lifting frame (31), a support rod (32), a first cantilever (33) and a second cantilever (34); The support rod (32) is horizontally mounted above the first lifting frame (31), and the length direction of the support rod (32) is parallel to the optical axis of the interferometer (1); the first cantilever (33) is arranged at one end of the support rod (32) close to the interferometer (1), one end of the first cantilever (33) is vertically connected to the support rod (32), and the other end is suspended in the air; the second cantilever (34) is arranged at one end of the support rod (32) close to the theodolite (2), one end of the second cantilever (34) is vertically connected to the support rod (32), and the other end is suspended in the air; The compensator assembly (4) is arranged on one side of the support rod (32) and is located between the interferometer (1) and the aspheric mirror (7) to be tested, and is used for optical path compensation, so that the light emitted by the interferometer (1) can reach the aspheric mirror (7) to be tested through the compensator assembly (4) and return along the original path; The other end of the second cantilever (34), the other end of the first cantilever (33) and the compensator assembly (4) are all located on the same side of the support rod (32); The light spot analyzer (5) is used to be installed on the other end of the first cantilever (33) or the other end of the second cantilever (34); The plane reflector (6) is used for being mounted on the first cantilever (33), the second cantilever (34), the compensator assembly (4) or the aspheric mirror (7) to be measured.
4. The rapid calibration device for detecting the optical axis of an aspherical mirror according to claim 3, characterized in that: A first notch (331) is provided at the other end of the first cantilever (33) for mounting a light spot analyzer (5); A second notch (341) is provided at the other end of the second cantilever (34) and is used for installing a light spot analyzer (5).
5. A rapid calibration device for detecting an optical axis of an aspherical mirror according to claim 3 or 4, characterized in that: The support rod (32) comprises a guide rod (321), a first sliding block (322) and a second sliding block (323); The guide rod (321) is provided with a guide groove along its length direction; The first sliding block (322) and the second sliding block (323) are clamped in the guide groove; The first cantilever (33) is mounted on the first slider (322); The second cantilever (34) is mounted on the second sliding block (323).
6. The rapid calibration device for detecting the optical axis of an aspherical mirror according to claim 4, characterized in that: The compensator assembly (4) comprises a compensator (41) and a first five-dimensional adjustment frame (42); The first five-dimensional adjustment frame (42) is installed on one side of the support rod (32) and is located at the center of the line connecting the interferometer (1) and the theodolite (2); The compensator (41) is mounted on a first five-dimensional adjustment frame (42).
7. The rapid calibration device for detecting an optical axis of an aspherical mirror according to claim 6, characterized in that: Also included is a support tooling (8); The supporting tool (8) comprises a second five-dimensional adjustment frame (81) and a V-shaped block (82); The second five-dimensional adjustment frame (81) is arranged between the compensator assembly (4) and the theodolite (2); The V-shaped block (82) is mounted on the second five-dimensional adjustment frame (81), and the V-shaped block (82) is used to mount the aspheric mirror (7) to be tested.
8. The rapid calibration device for detecting the optical axis of an aspherical mirror according to claim 7, characterized in that: Also includes at least one second lifting frame (11); The second lifting frame (11) is installed below the interferometer (1).
9. The rapid calibration device for detecting an optical axis of an aspherical mirror according to claim 8, characterized in that: Also included is a horizontally arranged detection platform (9); The first lifting frame (31), the first five-dimensional adjustment frame (42), the second five-dimensional adjustment frame (81), the second lifting frame (11) and the theodolite (2) are all arranged on the detection platform (9).
Citation Information
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