Hyper optical engine

Abstract

An ultra-photonic engine includes a plurality of light source modules, a collimating and folding module, and a light combining ultra-photonic element. Each light source module is configured to emit a light beam of a different wavelength. The collimating and folding module includes a plurality of collimating and folding ultra-photonic elements, each configured to collimate and fold the light beam of the light source module to a same predetermined location. The light combining ultra-photonic element is located on a side of the collimating and folding module opposite the light source modules and includes a light combining ultra-photonic array located at the predetermined location, configured to fold the collimated light beams by wavelength and angle of incidence to combine the collimated light beams of different directions into a same light beam of a same direction. By using precise semiconductor manufacturing processes to fabricate the ultra-photonic elements, the product size can be greatly reduced and the processing and assembly alignment precision can be greatly improved.

Description

Technical Field

[0001] This invention relates to an optical device, and more particularly to a super-optical engine. Background Technology

[0002] See Figure 1 This is an existing optical engine with three light sources 11, namely red (R), green (G), and blue (B), three collimating lenses 12 located in the optical paths of the light sources 11, and three beam splitters 13 corresponding to the optical paths. The first beam splitter 13 on the left reflects red light (or all light), the second beam splitter 13 reflects green light and allows red light to pass through, and the third beam splitter 13 reflects blue light and allows red and green light to pass through. In this way, red, green, and blue light can be integrated to form white light (W).

[0003] However, the aforementioned collimating lens 12, beam splitter 13, and other components are bulky. To significantly reduce their size, the spacing between the three light sources 11 and each optical element must be correspondingly reduced to a smaller size. However, maintaining the manufacturing precision of a smaller collimating lens 12 is difficult, and the required assembly alignment precision for smaller optical elements also increases significantly, leading to increased assembly difficulty. This makes it difficult to reduce the size of the optical engine. Therefore, with the rise of applications such as AR (Augmented Reality), VR (Virtual Reality), and micro-projection in recent years, significantly reducing the size of the optical engine has become a research goal for the industry. Summary of the Invention

[0004] The purpose of this invention is to provide a super-optimal optical engine that can significantly reduce size and provide better manufacturing and assembly alignment accuracy.

[0005] The super-intelligent optical engine of the present invention includes multiple light source modules, collimation and deflection modules, and light combining modules.

[0006] Each light source module is used to emit a beam of light of a different wavelength.

[0007] The collimation and deflection module includes multiple collimation and deflection super-optical elements located on the path of the light beam of the light source module, which are used to adjust the light beam path of the light source module so that the light beam of the light source module is collimated and deflected to the same predetermined position.

[0008] The beam combining module includes a beam combining super-optical element located on the side opposite to the light source module of the collimation and deflection module. The beam combining super-optical element includes a beam combining super-optical array located at the predetermined position. It receives the collimated beam from the collimation and deflection module and deflects the collimated beam according to the wavelength and incident angle, thereby integrating the collimated beams in different directions into the same beam in the same direction.

[0009] The super-optical engine of the present invention, each of the collimating and deflecting super-optical elements has a substrate and a collimating and deflecting super-optical array.

[0010] The substrate has surfaces extending along the X-axis and Y-axis.

[0011] The collimating and deflecting super-optical array is disposed on the surface for the beam of the corresponding light source module to be incident, and has multiple nanostructures arranged in an array, each of which extends along the Z-axis direction perpendicular to the surface.

[0012] Each nanostructure of the nth collimating and deflecting meta-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0013]

[0014] in, And 2i+2j≥4, i=0,1,2,…,j=0,1,2,…;

[0015] Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements. This represents the phase difference of the nth beam incident on each of the nanostructures of the nth collimating and deflecting meta-optical array relative to the optical axis center. The origin (0,0) of the coordinate system is defined as the optical axis center of the nth collimating and deflecting meta-optical array. Let λ be the X-axis and Y-axis coordinates of each nanostructure in the nth collimating and deflecting meta-optical array, respectively, within the nth collimating and deflecting meta-optical array. n f is the operating wavelength of the nth beam. n θ is the preset focal length corresponding to the nth beam. n Let γ be the angle by which the imaging beam of the nth beam deviates from the X-axis. n Let ΔΦ be the angle by which the imaging beam of the nth beam deviates from the Z-axis. n准直 (x n ,y n ) represents phase difference compensation for higher-order aberrations, a nij This is a predetermined coefficient.

[0016] The super-optical engine of the present invention has a super-optical element having a substrate and a super-optical array.

[0017] The substrate has surfaces extending along the X-axis and Y-axis.

[0018] The super-optical array is disposed on the surface, allowing the light beam, after its path has been adjusted by the collimation and deflection module, to be incident on it. It has multiple nanostructures arranged in an array, each of which extends along the Z-axis direction perpendicular to the surface.

[0019] Each nanostructure of the combined light super-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0020]

[0021] Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements. This represents the phase difference between each of the nanostructures incident on the nth beam of the combining superstructure optical array and the optical axis center of the combining superstructure optical array. The origin (0,0) of the coordinate system is defined as the optical axis center of the combining superstructure optical array. Let λ be the X-axis and Y-axis coordinates of each of the nanostructures in the combined super-optical array, where λ n Let θ be the operating wavelength of the nth beam. n Let γ be the angle by which the incident beam of the nth beam deviates from the X-axis. n Let be the angle by which the incident beam of the nth beam deviates from the Z-axis.

[0022] The super-optical engine of the present invention has the super-optical array of combining light located on the side of the substrate adjacent to the collimation and deflection module.

[0023] The super-optical engine of the present invention further includes a shaping module, which comprises a plurality of shaping super-optical arrays respectively disposed on one side of the collimating and deflecting super-optical element. Each shaping super-optical array receives a beam of light from the corresponding light source module and has a plurality of nanostructures arranged in an array. In the coordinate system of the shaping super-optical array, the X-axis, Y-axis and Z-axis are defined. The side extends along the X-axis and the Y-axis. Each nanostructure extends along the Z-axis direction perpendicular to the side. Each nanostructure of the nth shaping super-optical array conforms to the following phase difference arrangement formula relative to the optical axis center:

[0024]

[0025] in, And 2i+2j≥4, i=0,1,2,…,j=0,1,2,…;

[0026] Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements. This represents the phase difference between each of the nanostructures incident on the nth shaping metamorphic optical array and the optical axis center. The origin (0,0) of this coordinate system is defined as the optical axis center of the nth shaping metamorphic optical array. Let λ be the X-axis and Y-axis coordinates of each nanostructure in the nth shaping metamorphic optical array, respectively, within the nth shaping metamorphic optical array. n f is the operating wavelength of the corresponding nth beam. xn Let f be the focal length of the nth beam along the X-axis. yn Let ΔΦ be the focal length of the nth beam along the Y-axis. n整形 (x n ,y n ) represents phase difference compensation for higher-order aberrations, b nij This is a predetermined coefficient.

[0027] In the super-optical engine of the present invention, each of the shaping super-optical arrays is located on one side of the collimating and deflecting super-optical element adjacent to the light source module, and each of the collimating and deflecting super-optical elements has a collimating and deflecting super-optical array disposed on the other side opposite to the shaping super-optical array and adjacent to the combining super-optical element.

[0028] The purpose of this invention is to provide a super-optimal optical engine that can significantly reduce size and provide better manufacturing and assembly alignment accuracy.

[0029] The super-intelligent optical engine of the present invention includes multiple light source modules, collimation and deflection modules, shaping modules and light combining modules.

[0030] Each light source module is used to emit a beam of light of a different wavelength.

[0031] The collimation and deflection module includes a plurality of collimation and deflection meta-optical elements located on the path of the light beam of the light source module, which are used to adjust the light beam path of the light source module so that the light beam of the light source module is collimated and deflected to the same predetermined position. Each of the collimation and deflection meta-optical elements has a substrate and a collimation and deflection meta-optical array.

[0032] The substrate has surfaces extending along the X-axis and Y-axis.

[0033] The collimating and deflecting super-optical array is disposed on the surface for the beam of the corresponding light source module to be incident, and has multiple nanostructures arranged in an array, each of which extends along the Z-axis direction perpendicular to the surface.

[0034] Each nanostructure of the nth collimating and deflecting meta-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0035]

[0036]

[0037] in, And 2i+2j≥4, i=0,1,2,…,j=0,1,2,…;

[0038] Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements. This represents the phase difference of the nth beam incident on each of the nanostructures of the nth collimating and deflecting meta-optical array relative to the optical axis center. The origin (0,0) of the coordinate system is defined as the optical axis center of the nth collimating and deflecting meta-optical array. Let λ be the X-axis and Y-axis coordinates of each nanostructure in the nth collimating and deflecting meta-optical array, respectively, within the nth collimating and deflecting meta-optical array. n f is the operating wavelength of the nth beam. xcn f is the focal length of the collimating and deflecting meta-optical array along the X-axis. ycn θ is the focal length of the collimating and deflecting meta-optical array along the Y-axis. n Let γ be the angle by which the imaging beam of the nth beam deviates from the X-axis. n Let ΔΦ be the angle by which the imaging beam of the nth beam deviates from the Z-axis. n准直 (x n ,y n ) represents phase difference compensation for higher-order aberrations, a nij This is a predetermined coefficient.

[0039] The shaping module includes multiple shaping super-optical arrays respectively disposed on one side of the collimating and deflecting super-optical element, for adjusting the shape of the beam incident from the light source module.

[0040] The beam combining module deflects the shaped and collimated beams from different directions, integrating them into a single beam in the same direction.

[0041] In the super-optical engine of the present invention, in each corresponding collimating and deflecting super-optical array and shaping super-optical array, the X-axis focal length f of the collimating and deflecting super-optical array is... xcn and Y-axis focal length f ycn The X-axis focal length f of the shaped super-optical array xn and Y-axis focal length f yn The relationship is as follows:

[0042]

[0043]

[0044]

[0045] Among them, f xtn f ytn These are the X-axis focal length and Y-axis focal length synthesized by the collimating and deflecting meta-optical array and the shaping meta-optical array, respectively, and the equivalent air thickness of the collimating and deflecting meta-optical array and the shaping meta-optical array.

[0046] The super-optical engine of the present invention, wherein each of the shaping super-optical arrays receives a beam of light from the corresponding light source module and has multiple nanostructures arranged in an array, wherein in the coordinate system of the shaping super-optical array, the X-axis, Y-axis and Z-axis are defined, the side extends along the X-axis and the Y-axis, and the nanostructures of each of the shaping super-optical arrays extend along the Z-axis direction perpendicular to the side, and each nanostructure of the m-th shaping super-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0047]

[0048] in, And 2i+2j≥4, i=0,1,2,…,j=0,1,2,…;

[0049] Where m is any positive integer not greater than M, and M is the number of the collimating and deflecting super-optical elements. This represents the phase difference between each of the nanostructures incident on the m-th shaping metamorphic optical array and the optical axis center. The origin (0,0) of this coordinate system is defined as the optical axis center of the m-th shaping metamorphic optical array. Let λ be the X-axis and Y-axis coordinates of each nanostructure in the m-th shaping metamorphic optical array, respectively, in the m-th shaping metamorphic optical array. m f is the operating wavelength of the corresponding m-th beam. xm Let f be the focal length of the m-th beam along the X-axis. ym Let ΔΦ be the focal length of the m-th beam along the Y-axis. m整形 (x m ,y m ) represents phase difference compensation for higher-order aberrations, b mij This is a predetermined coefficient.

[0050] In the super-optical engine of the present invention, each of the collimating and deflecting super-optical arrays is located on one side of the collimating and deflecting super-optical element adjacent to the light combining module, and each of the shaping super-optical arrays is located on one side of the corresponding collimating and deflecting super-optical element adjacent to the light source module.

[0051] The beneficial effects of this invention are as follows: By setting the collimating and deflecting meta-optical element, the light beam from the light source module can be collimated and deflected. Furthermore, by combining it with the beam combining module, the collimated beams from different directions are integrated into a single beam in the same direction. Compared to existing technologies, this reduces the number of components, improves production and assembly accuracy, and significantly reduces product size. In addition, the meta-optical element of this invention is manufactured using semiconductor processes, which, compared to existing optical component processing technologies, provides excellent processing and assembly alignment accuracy even for very small optical components. Attached Figure Description

[0052] Figure 1 This is a schematic diagram of an existing optical engine;

[0053] Figure 2 This is a schematic diagram simulating the collimation and beam combining of a beam path according to an embodiment of the super-optical engine of the present invention;

[0054] Figure 3 This is a schematic diagram illustrating the collimation and deflection beam paths of multiple collimating and deflecting meta-optical elements in the embodiment described above.

[0055] Figure 4 This is a schematic diagram illustrating how a beam-combining super-optical element in the embodiment integrates multiple collimated beam paths with different incident angles and combines them into a single beam.

[0056] Figure 5 This is a schematic diagram illustrating how a shaping module of the described embodiment shapes a light beam;

[0057] Figure 6 This is a schematic diagram illustrating the relative relationship between a collimation and deflection module and a shaping module in the embodiment described above.

[0058] Figures 7-9 This is an incomplete perspective view of the shaping module in the embodiment described above, wherein, Figure 8 for Figure 7 Enlarged view of area A in the middle. Figure 9 for Figure 7 Enlarged view of area B in the middle;

[0059] Figures 10-12 This is an incomplete perspective view of another form of the shaping module in the described embodiment, wherein... Figure 11 for Figure 10Enlarged view of area C, Figure 12 for Figure 10 Enlarged view of area D in the middle;

[0060] Figure 13 This is a top view schematic diagram of the embodiment applied to a projection device; and

[0061] Figure 14 This is a three-dimensional schematic diagram of the embodiment applied to the projection device. Detailed Implementation

[0062] See Figure 2 One embodiment of the super-optical engine of the present invention includes multiple light source modules 2, a collimation and deflection module 3, and a light combining module 4, and may also include a shaping module 5 as needed. For example, when this embodiment is applied to the fields of AR (Augmented Reality) or VR (Virtual Reality), the shaping module 5 can be included to shape the light beam, while when this embodiment is applied to projection, the shaping module 5 may not be required.

[0063] Each light source module 2 is used to emit a light beam of a different wavelength. In this embodiment, three light source modules 2 are used for illustration, which emit red (R), green (G), and blue (B) light beams respectively. However, in practice, the required wavelength and number of light source modules 2 can be set according to the color required for the desired imaging light beam, and are not limited to this. The light source modules 2 can be implemented using a laser source to achieve high-frequency modulation and narrow bandwidth.

[0064] See Figure 2 and Figure 3 The collimation and deflection module 3 includes a plurality of collimation and deflection super-optical elements 31 located on the path of the beam of the light source module 2, which are used to collimate and deflect the path of the diverging beam of the light source module 2, so that the beam of the light source module 2 is collimated and deflected to the same predetermined position on the beam combining module 4 behind it.

[0065] Each of the collimating and deflecting meta-optical elements 31 has a substrate 311 and a collimating and deflecting meta-optical array (not shown).

[0066] The substrate 311 has a region along an X-axis ( Figure 3 (X1~X3) and a Y-axis ( Figure 3 The surface 312 extends from Y1 to Y3 in the middle.

[0067] The collimating and deflecting super-optical array is disposed on the surface 312, allowing the diverging beam of the corresponding light source module 2 to be incident, and has multiple nanostructures (not shown) arranged in an array, each of the nanostructures being along a Z-axis perpendicular to the surface 312. Figure 3 Extending in the Z1 to Z3 directions.

[0068] Each nanostructure of the nth collimating and deflecting meta-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0069]

[0070] in, And 2i+2j≥4. i=0,1,2,…,j=0,1,2,…,2i+2j is the power term, and the condition 2i+2j≥4 means that aberrations greater than or equal to the power of 4 can be compensated.

[0071] Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements 31. This represents the phase difference of the nth beam incident on each of the nanostructures of the nth collimating and deflecting meta-optical array relative to the optical axis center. The origin (0,0) of the coordinate system is defined as the optical axis center of the nth collimating and deflecting meta-optical array. Let λ be the X-axis and Y-axis coordinates of each nanostructure in the nth collimating and deflecting meta-optical array, respectively, within the nth collimating and deflecting meta-optical array. n f is the operating wavelength of the nth beam. m For the preset focal length corresponding to the nth beam (e.g.) Figure 3 (as shown in f1, f2, f3), θ n The angle by which the imaging beam of the nth beam deviates from the X-axis (e.g.) Figure 3 θ1, θ2, θ3 shown), γ n The angle by which the imaging beam of the nth beam deviates from the Z-axis (e.g.) Figure 3 As shown in γ1, γ2, γ3), ΔΦ n准直 (x n ,y n ) represents phase difference compensation for high-order terms (in this embodiment, specifically referring to terms not less than the fourth power (2i+2j≥4)), a nij These are predetermined coefficients (i.e., polynomial coefficients).

[0072] First half of Formula 1 This represents the ideal state of an optical system where no other aberrations exist. However, in reality, most optical systems contain other higher-order aberrations. When a high degree of accuracy is required for the intended optical system, ΔΦ can be used. n准直 (x n ,y n Correction is performed for higher-order aberrations.

[0073] For example, if the optical system contains aberrations of degree 4 or higher (2i+2j≥4) that need to be compensated, the polynomial coefficients a can be found using existing automated optimization methods. nij The value of ΔΦ is used to eliminate higher-order aberrations ΔΦ of the optical system. n准直 (x n ,y n If the optical system does not require compensation for higher-order aberrations, then a nij All zero, i.e., ΔΦ n准直 (x n ,y n The value of ) is zero.

[0074] To illustrate with a practical example, consider a parallel flat glass plate of thickness t with a refractive index of... If the image distance of the beam after passing through this flat glass is <, then this flat glass will produce a fourth power term (a n20 x 4 ,a n11 x 2 y 2 ,a n02 y 4 The aberration of (n=1) is such that if this aberration occurs in an optical system, then its coefficient term a 120 ,a 111 , and a 102 The values ​​can be determined from the analysis as follows:

[0075]

[0076] If there are other higher-order aberrations to compensate for, Formula 1 will also generate a corresponding higher-order phase difference ΔΦ. n准直 (x n ,y n This is used for aberration compensation. If there are no higher-order aberrations that need to be compensated in the optical system, then the coefficient a... nij All zeros.

[0077] For details of the collimation and deflection super-optical array of the collimation and deflection super-optical element 31, please refer to Taiwan Patent Application No. 110126860, "Super-optical Element for Collimating and Deflecting Beams", which will not be repeated here.

[0078] It is worth noting that when the super-optical engine also includes the shaping module 5, the phase difference arrangement formula of the collimating and deflecting super-optical array needs to be changed accordingly. The modification of the phase difference arrangement formula will be explained after the shaping module 5 below.

[0079] See Figure 2 and Figure 4 The beam combining module 4 is located on the side opposite to the light source module 2 of the collimation and deflection module 3. It receives the shaped and collimated light beam from the collimation and deflection module 3 and deflects the shaped and collimated light beams in different directions, thus integrating them into a single beam in the same direction. The beam combining module 4 can be implemented using existing optical elements (such as dichroic filters or prisms). In this embodiment, it is implemented using a super-optical element.

[0080] The beam combining module 4 includes a beam combining super-optical element 40 located on the side of the collimation and deflection module 3 opposite to the light source module 2. The beam combining super-optical element 40 has a substrate 41 and a beam combining super-optical array (not shown). The beam combining super-optical array is located at the predetermined position, receives the collimated beam from the collimation and deflection module 3, and deflects the collimated beam according to the wavelength and incident angle, thereby integrating the collimated beams in different directions into a single beam in the same direction.

[0081] The substrate 41 has a surface 411 extending along an X-axis and a Y-axis.

[0082] The combined light super-optical array is disposed on the surface 411, allowing the light beam after being collimated and deflected by the collimation and deflection module 3 to be incident, and has multiple nanostructures (not shown) arranged in an array, each of which extends along a Z-axis direction perpendicular to the surface 411.

[0083] Each nanostructure of the combined light super-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0084]

[0085] Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements 31. Indicates the corresponding nth beam (in Figure 4 The phase difference between each nanostructure (indicated by L1, L2, L3) incident on the optical combining superstructure optical array and the optical axis center of the optical combining superstructure optical array, where the origin (0,0) of the coordinate system is defined as the optical axis center of the optical combining superstructure optical array. Let λ be the X-axis and Y-axis coordinates of each of the nanostructures corresponding to the nth beam in the optical array. n The operating wavelength of the nth beam (e.g.) Figure 4 λ1, λ2, λ3), θ shown n Let γ be the angle by which the incident beam of the nth beam deviates from the X-axis. n Let be the angle by which the incident beam of the nth beam deviates from the Z-axis.

[0086] For details on the setup of the super-optical array of the light-combining module 4, please refer to Taiwan Patent Application No. 110126861, "Super-optical Element for Light Combining," which will not be repeated here.

[0087] See Figure 2 , Figure 5 , Figure 6 and Figures 7-9 The shaping module 5 is used to shape the light beam, for example, by... Figure 5 For example, the elliptical beam at the incident surface is shaped into a circular beam at the exit surface, but the shape can be adjusted according to actual needs and is not limited thereto. The shaping module 5 includes multiple shaping super-optical arrays 51, each disposed on one side of the collimating and deflecting super-optical element 31. Each shaping super-optical array 51 receives the beam from the corresponding light source module 2 and has multiple nanostructures 511 arranged in an array. In the coordinate system of the shaping super-optical array 51, an X-axis, a Y-axis, and a Z-axis are defined. The side extends along the X-axis and the Y-axis, and each nanostructure 511 extends along the Z-axis direction perpendicular to the side. Each nanostructure 511 of the nth shaping super-optical array 51 conforms to the following phase difference arrangement formula relative to the optical axis center:

[0088]

[0089] in, And 2i+2j≥4. i=0,1,2,…,j=0,1,2,…,2i+2j is the power term, and the condition 2i+2j≥4 means that aberrations greater than or equal to the power of 4 can be compensated.

[0090] Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements 31. This represents the phase difference between the nth incident light beam and each of the nth shaping metamorphic optical arrays 51 and the optical axis center. The origin (0,0) of the coordinate system is defined as the optical axis center of the nth shaping metamorphic optical array 51. Let λ be the X-axis and Y-axis coordinates of each nanostructure in the nth shaping metamorphic optical array 51, where λ is the coordinate of each nanostructure in the nth shaping metamorphic optical array 51. n f is the operating wavelength of the corresponding nth beam. xn Let f be the focal length of the nth beam along the X-axis. yn Let ΔΦ be the focal length of the nth beam along the Y-axis. n整形 (x n ,y n ) represents phase difference compensation for higher-order aberrations, b nij These are predetermined coefficients (i.e., coefficients of higher-order terms).

[0091] Similarly, if the optical system contains other aberrations of degree 4 or higher (2i+2j≥4) that need to be compensated, the polynomial coefficients b can be found using existing automated optimization methods. nij The value of ΔΦ is used to eliminate higher-order aberrations ΔΦ of the optical system. n整形 (x n ,y n If the optical system does not require compensation for higher-order aberrations, then b nij All zero, i.e., ΔΦ n整形 (x n ,y n The value of ) is zero.

[0092] In this embodiment, there are three light source modules 2 and three corresponding collimating and deflecting super-optical elements 31, so N = 3. Therefore, n is any positive integer not greater than 3 (N), that is, n = 1, 2, 3. The shaping super-optical array 51 conforms to three phase difference arrangement formulas. It is worth noting that in other variations of this embodiment, n can also be any positive integer not greater than other positive integers. For example, when there are two light source modules 2 and two corresponding collimating and deflecting super-optical elements 31, N = 2, and the shaping super-optical array 51 conforms to two phase difference arrangement formulas, where n is any positive integer not greater than 2, that is, n = 1, 2.

[0093] The following details the phase difference arrangement formula for each of the shaping super-optical arrays 51 relative to the center of the optical axis.

[0094] For ease of description, the three shaping super-inflection optical arrays 51 will be named the first shaping super-inflection optical array 51, the second shaping super-inflection optical array 51, and the third shaping super-inflection optical array 51.

[0095] Each nanostructure 511 of the first shaped super-optical array 51 conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0096]

[0097] in, This represents the phase difference between each of the nanostructures 511 of the first shaped metamorphic optical array 51 and the center of the optical axis, corresponding to the first beam of light (red light, R, e.g., 640 nm wavelength). The origin (0,0) of the coordinate system is defined as the center of the optical axis of the first shaped metamorphic optical array 51. The first shaping super-optical array 51 represents the X-axis and Y-axis coordinates of each of the nanostructures 511 in the first shaping super-optical array 51, where λ1 is the operating wavelength of the first beam, and f x1 f is the focal length of the first beam along the X-axis. y1 Let be the focal length of the first beam along the Y-axis.

[0098] Each nanostructure 511 of the second shaping super-optical array 51 conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0099]

[0100] in, This represents the phase difference between each of the nanostructures 511 of the second shaped metamorphic optical array 51 and the center of the optical axis, where the corresponding second beam (green light, G, e.g., 520 nm wavelength) is incident on the second shaped metamorphic optical array 51. The origin (0,0) of the coordinate system is defined as the center of the optical axis of the second shaped metamorphic optical array 51. The coordinates of each of the nanostructures 511 in the second shaping super-optical array 51 along the X and Y axes of the second shaping super-optical array 51 are given, where λ2 is the operating wavelength of the second beam, and f... x2 f is the focal length of the second beam along the X-axis. y2 Let be the focal length of the second beam along the Y-axis.

[0101] Each nanostructure of the third shaped super-optical array 51 conforms to the following phase difference arrangement formula relative to the center of the optical axis:

[0102]

[0103] in, This represents the phase difference of the corresponding third beam (blue light, B, e.g., 450nm wavelength) incident on each of the nanostructures 511 of the third shaping metamorphic optical array 51 relative to the optical axis center. The origin (0,0) of the coordinate system is defined as the optical axis center of the third shaping metamorphic optical array 51. Let λ3 be the X-axis and Y-axis coordinates of each of the nanostructures 511 in the third shaping super-optical array 51, where λ3 is the operating wavelength of the third beam, and f x3f is the focal length of the third beam along the X-axis. y3 Let be the focal length of the third beam along the Y-axis.

[0104] As explained above, when the meta-optical engine also includes the shaping module 5, the phase difference arrangement formula (Formula 1) of the collimating and deflecting meta-optical array needs to be changed accordingly so that collimated light is generated together on the X and Y axes. The modified phase difference arrangement formula is as follows;

[0105]

[0106] in, And 2i+2j≥4. i=0,1,2,…,j=0,1,2,…,2i+2j is the power term, and the condition 2i+2j≥4 means that aberrations greater than or equal to the power of 4 can be compensated.

[0107] Among them, f xcn f is the focal length of the collimating and deflecting meta-optical array along the X-axis. ycn Let a be the focal length of the collimating and deflecting super-optical array along the Y-axis. Similarly, if the optical system does not require compensation for higher-order aberrations, then a... nij All zero, i.e., ΔΦ n准直 (x n ,y n The value of ) is zero.

[0108] The focal length f of each shaping super-intelligence optical array 51 xn f yn The required focal length f of the corresponding collimating and deflecting super-optical array is... xcn f ycn To avoid astigmatism, the focal length f in Formula 1 must be adjusted accordingly. n Divided into different focal lengths f along the X and Y axes xcn and f ycn Only when they work together can they complete the shaping and collimation, and together produce collimated light along the X and Y axes.

[0109] In each corresponding collimating and deflecting super-optical array and shaping super-optical array 51, the X-axis focal length f of the collimating and deflecting super-optical array is... xcn and Y-axis focal length f ycn The X-axis focal length f of the shaping super-sensitive optical array 51 xn and Y-axis focal length f yn The relationship is as follows:

[0110]

[0111]

[0112]

[0113]

[0114] Among them, f xtn f ytn These are the X-axis focal length and Y-axis focal length synthesized by the collimating and deflecting metamorphic optical array and the shaping metamorphic optical array 51, respectively, and d is the equivalent air thickness between the collimating and deflecting metamorphic optical array and the shaping metamorphic optical array 51. g Let n be the distance between the two meta-optical arrays. g The refractive index of the medium sandwiched between the two meta-optical arrays. Since the collimating and deflecting meta-optical array and the shaping meta-optical array 51 must work together to simultaneously complete shaping and collimation along the X and Y axes, when the combined focal length f of the two meta-optical arrays is determined... xtn and f ytn After determining the specifications, if the focal length of one axis of the collimating and deflecting super-optical array (e.g., f) is first determined... xcn If we can use formulas 9 to 11, we can calculate the other three focal lengths, thus completing the shaping and collimation of the X and Y axes together.

[0115] The following provides a detailed description of the functions, characteristics, and fabrication method of the super-intelligent optical element provided by this invention.

[0116] I. Nanostructures

[0117] In this embodiment, the substrate material is SiO2, and the nanostructures of each super-optical array are multiple rectangular nanopillars with XY cross-sections made of TiO2. The size of each nanostructure corresponds to the working wavelength of the nth beam, and its length is... Width is Height is

[0118] It is worth noting that in other variations of this embodiment, the XY cross section of each nanostructure can be a square, circular, or polygonal (e.g., triangular, pentagonal, or hexagonal) nanopillar, and can be hollow or solid. As long as it conforms to the aforementioned phase difference arrangement formula, the purpose of this invention can be achieved.

[0119] II. Relationship between phase shift and nanostructure (substrate material SiO2, nanostructure material TiO2, the height of each nanostructure along the Z-axis is 750nm, and the period of the optical array in the XY plane (center-to-center distance between adjacent pillars) is 210nm).

[0120]

[0121]

[0122] It should be noted that the above is merely an example, and those skilled in the art can prepare nanostructures of other sizes based on the above content.

[0123] See Figures 7-9 The relationship between the aforementioned phase shift and the nanostructure is presented using the properties of X and Y polarization, defined by the column widths in the X and Y directions. The phase difference is specific to X-polarized and Y-polarized light. Please refer to [link / reference]. Figures 10-12 Additionally, the phase shift between left-handed and right-handed polarized light can be defined using the Pancharatnam-Berry phase. This phase shift is defined by the geometry of the pillar plus its rotation angle, taking the phase difference between left-handed and right-handed polarized light. However, this phase difference applies to X-polarized light, Y-polarized light, left-handed polarized light, and right-handed polarized light. Formula (in the following description, hereinafter referred to as formula) (Unified terminology)

[0124] III. Fabrication of the Super-Optical Element of the Present Invention

[0125] <Step (1)>

[0126] See Figure 2 First, the phase difference at each position on each meta-optical array is calculated using the phase difference arrangement formulas corresponding to the collimation and deflection module 3, the light combining module 4, and the shaping module 5, respectively. And determine the phase shift of the origin (optical axis center) of each meta-optical array. This allows us to determine the phase shift at each position. Then, based on Table 1, create the corresponding... Nanostructures.

[0127] For example: a phase offset of the optical axis center created by the user according to Table 1. nanostructures The result calculated by the formula is b, then

[0128] <Step 2>

[0129] Prepare the SiO2 substrates required for the collimation and deflection module 3, the light combining module 4, and the shaping module 5 (in this embodiment, the collimation and deflection module 3 uses three substrates, the light combining module 4 uses one substrate, and the shaping module 5 shares a substrate with the collimation and deflection module 3, so a total of four substrates are used). Then, based on the calculated dimensions, fabricate the corresponding TiO2 nanostructures on the substrates using semiconductor etching technology to form the super-optical array. This fabrication method is a common semiconductor manufacturing process and will not be described in detail here.

[0130] Each collimating and deflecting meta-optical element 31 has a first side 313 adjacent to the light source module 2 and a second side 314 opposite to the first side 313 and adjacent to the combining meta-optical element 40. The shaping meta-optical array 51 of the shaping module 5 is formed on the first side 313 of the collimating and deflecting meta-optical element 31, and the collimating and deflecting meta-optical array of the collimating and deflecting meta-optical element 31 is formed on the second side 314. The combining meta-optical array of the combining meta-optical element 40 can be formed on any side of the substrate 41; in this embodiment, it is formed on the side adjacent to the collimating and deflecting module 30 as an example.

[0131] See Figure 2 , Figure 13 and Figure 14 This embodiment describes a direct-projection projector 9, which includes a microelectromechanical (MEMS) mirror 91 and a control circuit (not shown). The MEMS mirror 91 reflects the light beam emitted by the light combining module 4 under the control of the control circuit, projecting the light beam 92 onto a predetermined position to obtain a preset projected image. Multiple light beams 92 are used to indicate various possible projection positions. Since the control method of the direct-projection projector 9 and the MEMS mirror 91 is well-known in the industry, it will not be described in detail here.

[0132] See Figure 2 Based on the above explanation, the advantages of the aforementioned embodiments can be summarized as follows:

[0133] First, by setting the collimating and deflecting meta-optical element 31 to collimate and deflect the light beam of the light source module 2, and then combining it with the beam combining module 4 to integrate the collimated beams in different directions into a single beam in the same direction, compared with the prior art, the number of components can be reduced, production and assembly accuracy can be improved, and product size can be significantly reduced. Furthermore, the meta-optical element of this invention is manufactured using semiconductor processes, which provides excellent processing accuracy and assembly alignment accuracy compared to existing optical components.

[0134] Second, by setting the shaping module 5, a beam shaping function can be further provided, and by using the super-intelligent optical array to implement the shaping function, the product volume can be further reduced.

[0135] In conclusion, the super-intelligent optical engine of this invention does indeed achieve the purpose of this invention.

[0136] The above description is merely an embodiment of the present invention and should not be construed as limiting the scope of the present invention. Any simple equivalent changes and modifications made in accordance with the claims and description of the present invention shall still fall within the scope of the present invention.

Claims

1. A novel optical engine, comprising: multiple light source modules; Each light source module is used to emit a beam of light at a different wavelength; Its features are: The super-intelligent optical engine also includes a collimation and deflection module and a light combining module; The collimation and deflection module includes multiple collimation and deflection super-optical elements located on the path of the light beam of the light source module, which are used to adjust the light beam path of the light source module so that the light beam of the light source module is collimated and deflected to the same predetermined position. Each of the collimating and deflecting meta-optical elements has a substrate and a collimating and deflecting meta-optical array; The substrate has surfaces extending along the X-axis and Y-axis; The collimating and deflecting super-optical array is disposed on the surface for the beam of the corresponding light source module to be incident, and has multiple nanostructures arranged in an array, each of the nanostructures extending along the Z-axis direction perpendicular to the surface; Each nanostructure of the nth collimating and deflecting meta-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis: ； in, ,and ; Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements. This represents the phase difference of the nth beam incident on each of the nanostructures of the nth collimating and deflecting meta-optical array relative to the optical axis center. The origin (0,0) of the coordinate system is defined as the optical axis center of the nth collimating and deflecting meta-optical array. , Let X and Y be the coordinates of each nanostructure in the nth collimating and deflecting meta-optical array on the nth collimating and deflecting meta-optical array, respectively. Let be the operating wavelength of the nth beam. This corresponds to the preset focal length of the nth beam. Let be the angle by which the imaging beam of the nth beam deviates from the X-axis. Let n be the angle by which the imaging beam of the nth beam deviates from the Z-axis. For phase difference compensation of higher-order aberrations, The predetermined coefficient; The beam combining module includes a beam combining super-optical element located on the side opposite to the light source module of the collimation and deflection module. The beam combining super-optical element includes a beam combining super-optical array located at the predetermined position. It receives the collimated beam from the collimation and deflection module and deflects the collimated beam according to the wavelength and incident angle, thereby integrating the collimated beams in different directions into the same beam in the same direction.

2. A super-intelligent optical engine, comprising: multiple light source modules; Each light source module is used to emit a beam of light at a different wavelength; Its features are: The super-intelligent optical engine also includes a collimation and deflection module and a light combining module; The collimation and deflection module includes multiple collimation and deflection super-optical elements located on the path of the light beam of the light source module, which are used to adjust the light beam path of the light source module so that the light beam of the light source module is collimated and deflected to the same predetermined position. The beam combining module includes a beam combining super-optical element located on the side of the collimation and deflection module opposite to the light source module. The beam combining super-optical element includes a beam combining super-optical array located at the predetermined position. It receives the collimated beam from the collimation and deflection module and deflects the collimated beam according to the wavelength and incident angle, thereby integrating the collimated beams in different directions into the same beam in the same direction. The combined light super-innovative optical element also has a substrate; The substrate has surfaces extending along the X-axis and Y-axis; The super-optical array is disposed on the surface, allowing the light beam after its path has been adjusted by the collimation and deflection module to be incident on it, and has multiple nanostructures arranged in an array, each of which extends along the Z-axis direction perpendicular to the surface. Each nanostructure of the combined light super-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis: ； Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements. This represents the phase difference between each of the nanostructures incident on the nth beam of the combining superstructure optical array and the optical axis center of the combining superstructure optical array. The origin (0,0) of the coordinate system is defined as the optical axis center of the combining superstructure optical array. , Let X and Y coordinates be the coordinates of each of the nanostructures in the combined super-optical array, where... Let be the operating wavelength of the nth beam. Let be the angle by which the incident beam of the nth beam deviates from the X-axis. Let be the angle by which the incident beam of the nth beam deviates from the Z-axis.

3. The super-intelligent optical engine according to claim 2, characterized in that: The combined light super-optical array is located on the side of the substrate adjacent to the collimation and deflection module.

4. A super-intelligent optical engine, comprising: multiple light source modules; Each light source module is used to emit a beam of light at a different wavelength; Its features are: The super-intelligent optical engine also includes a collimation and deflection module, a light combining module, and a shaping module; The collimation and deflection module includes multiple collimation and deflection super-optical elements located on the path of the light beam of the light source module, which are used to adjust the light beam path of the light source module so that the light beam of the light source module is collimated and deflected to the same predetermined position. The beam combining module includes a beam combining super-optical element located on the side of the collimation and deflection module opposite to the light source module. The beam combining super-optical element includes a beam combining super-optical array located at the predetermined position. It receives the collimated beam from the collimation and deflection module and deflects the collimated beam according to the wavelength and incident angle, thereby integrating the collimated beams in different directions into the same beam in the same direction. The shaping module includes multiple shaping meta-optical arrays respectively disposed on one side of the collimating and deflecting meta-optical element. Each shaping meta-optical array receives the beam from the corresponding light source module and has multiple nanostructures arranged in an array. In the coordinate system of the shaping meta-optical array, the X-axis, Y-axis, and Z-axis are defined. The side extends along the X-axis and the Y-axis, and each nanostructure extends along the Z-axis direction perpendicular to the side. Each nanostructure of the nth shaping meta-optical array conforms to the following phase difference arrangement formula relative to the optical axis center: ； in, ,and ; Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements. This represents the phase difference between each of the nanostructures incident on the nth shaping metamorphic optical array and the optical axis center. The origin (0,0) of this coordinate system is defined as the optical axis center of the nth shaping metamorphic optical array. , Let X and Y be the coordinates of each nanostructure in the nth shaping metamorphic optical array on the nth shaping metamorphic optical array, respectively. This represents the operating wavelength of the corresponding nth beam. Let be the focal length of the nth beam along the X-axis. Let be the focal length of the nth beam along the Y-axis. For phase difference compensation of higher-order aberrations, This is a predetermined coefficient.

5. The super-intelligent optical engine according to claim 4, characterized in that: Each of the shaping meta-optical arrays is located on one side of the collimating and deflecting meta-optical element adjacent to the light source module, and each of the collimating and deflecting meta-optical elements has a collimating and deflecting meta-optical array disposed on the other side opposite to the shaping meta-optical array and adjacent to the combining meta-optical element.

6. A super-intelligent optical engine, comprising: multiple light source modules; Each light source module is used to emit a beam of light at a different wavelength; Its features are: The super-intelligent optical engine also includes a collimation and deflection module, a shaping module, and a light combining module; The collimation and deflection module includes a plurality of collimation and deflection meta-optical elements located on the path of the light beam of the light source module, which are used to adjust the light beam path of the light source module so that the light beam of the light source module is collimated and deflected to the same predetermined position. Each of the collimation and deflection meta-optical elements has a substrate and a collimation and deflection meta-optical array. The substrate has surfaces extending along the X-axis and Y-axis; The collimating and deflecting super-optical array is disposed on the surface for the beam of the corresponding light source module to be incident, and has multiple nanostructures arranged in an array, each of the nanostructures extending along the Z-axis direction perpendicular to the surface; Each nanostructure of the nth collimating and deflecting meta-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis: ； in, ,and Where n is any positive integer not greater than N, and N is the number of the collimating and deflecting super-optical elements. This represents the phase difference of the nth beam incident on each of the nanostructures of the nth collimating and deflecting meta-optical array relative to the optical axis center. The origin (0,0) of the coordinate system is defined as the optical axis center of the nth collimating and deflecting meta-optical array. , Let X and Y be the coordinates of each nanostructure in the nth collimating and deflecting meta-optical array on the nth collimating and deflecting meta-optical array, respectively. Let be the operating wavelength of the nth beam. Let be the focal length of the collimating and deflecting super-optical array along the X-axis. Let be the focal length of the collimating and deflecting meta-optical array along the Y-axis. Let be the angle by which the imaging beam of the nth beam deviates from the X-axis. Let n be the angle by which the imaging beam of the nth beam deviates from the Z-axis. For phase difference compensation of higher-order aberrations, The predetermined coefficient; The shaping module includes multiple shaping super-optical arrays respectively disposed on one side of the collimating and deflecting super-optical element, used to adjust the shape of the beam incident from the light source module; The beam combining module deflects the shaped and collimated beams from different directions, integrating them into a single beam in the same direction.

7. The super-intelligent optical engine according to claim 6, characterized in that: In each corresponding collimating and deflecting super-optical array and the shaping super-optical array, the X-axis focal length of the collimating and deflecting super-optical array is... and Y-axis focal length The X-axis focal length of the shaped super-niche optical array and Y-axis focal length The relationship is as follows: in, , These are the X-axis focal length and Y-axis focal length synthesized by the collimating and deflecting metamorphic optical array and the shaping metamorphic optical array, respectively. The equivalent air thickness of the collimating and deflecting meta-optical array and the shaping meta-optical array.

8. The super-intelligent optical engine according to claim 6, characterized in that: Each of the shaping meta-optical arrays receives the beam from the corresponding light source module and has multiple nanostructures arranged in an array. In the coordinate system of the shaping meta-optical array, the X-axis, Y-axis, and Z-axis are defined. The side extends along the X-axis and the Y-axis. The nanostructures of each of the shaping meta-optical arrays extend along the Z-axis direction perpendicular to the side. Each nanostructure of the m-th shaping meta-optical array conforms to the following phase difference arrangement formula relative to the center of the optical axis: ； in, ,and ; Where m is any positive integer not greater than M, and M is the number of the collimating and deflecting super-optical elements. This represents the phase difference between each of the nanostructures incident on the m-th shaping metamorphic optical array and the optical axis center. The origin (0,0) of this coordinate system is defined as the optical axis center of the m-th shaping metamorphic optical array. , Let X and Y be the coordinates of each nanostructure in the m-th shaping metamorphic optical array on the m-th shaping metamorphic optical array, respectively. This represents the operating wavelength of the corresponding m-th beam. Let be the focal length of the m-th beam along the X-axis. Let be the focal length of the m-th beam along the Y-axis. For phase difference compensation of higher-order aberrations, This is a predetermined coefficient.

9. The super-intelligent optical engine according to claim 6, characterized in that: Each of the collimating and deflecting meta-optical arrays is located on one side of its corresponding collimating and deflecting meta-optical element adjacent to the light combining module, and each of the shaping meta-optical arrays is located on one side of its corresponding collimating and deflecting meta-optical element adjacent to the light source module.

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