Optical system and working method of optical system
By using adjustable mirrors in the optical system to switch optical paths at different incident angles, the problems of optical path complexity and high cost are solved, enabling comprehensive detection and cost reduction.
CN122171555APending Publication Date: 2026-06-09SHENZHEN PLANCK SEMICON TECHNOLOGY CO LTD
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Patent Information
- Application Number
- CN202610646286.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-05-12
- Publication Date
- 2026-06-09
AI Technical Summary
Technical Problem
In existing optical inspection systems, the requirements for detection beams with different incident directions, wavelengths, or polarizations lead to complex optical paths, increasing the number of optical components and costs.
Method used
An adjustable mirror is used to allow the first and second incident lights to be incident on the sample surface along different optical paths at different incident angles. The optical path can be switched by rotating and moving the adjustable mirror, which simplifies the optical path structure and avoids the reuse of similar optical components.
Benefits of technology
It enables omnidirectional detection under different incident angles, preventing missed detections, while also reducing the cost of the optical system.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention provides an optical system and a working method of the optical system. According to the optical system, first incident light is configured to be incident to the surface of a sample at a first incident angle along a first light path; the first adjustable mirror is used for enabling the second incident light to be incident to the surface of the sample along a second light path at a second incident angle, the first adjustable mirror is also used for enabling the second incident light to be incident to the surface of the sample along a first light path at a first incident angle, and the first incident angle is different from the second incident angle.
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