Single drive type electromagnetic microgripper

Abstract

The application discloses a single-drive electromagnetic micro-gripper, which comprises a fixed side plate, an FPC coil arranged in the fixed side plate, the FPC coil comprising a plurality of planar coils, and a first clamping arm arranged at one end of the fixed side plate; a movable side plate connected to the fixed side plate and arranged opposite to the fixed side plate, a permanent magnet arranged in the movable side plate, and a second clamping arm arranged at one end of the movable side plate; when the FPC coil is electrified, the FPC coil generates a magnetic field and exerts a force on the permanent magnet, the permanent magnet and the movable side plate move together, and the second clamping arm is driven to move towards or away from the first clamping arm. The FPC coil is made by FPC technology, is a planar micro coil, has small size and good reliability, is convenient to assemble in the fixed side plate to control the overall volume of the gripper, can effectively reduce the size of the micro gripper while providing sufficient driving force, realizes miniaturization of the electromagnetic micro gripper, has high displacement precision, can achieve fast response, and improves the accuracy, stability and rapidity of clamping.

Description

Technical Field

[0001] This invention relates to the field of micromanipulation technology, and in particular to a single-drive electromagnetic microgripper. Background Technology

[0002] Microelectromechanical systems (MEMS), as systems that integrate micro-devices with different functions using millimeter- and micrometer-level manipulation platforms, have attracted much attention from experts and scholars worldwide due to their high degree of integration. This makes them highly promising for applications in precision engineering fields such as biomedicine, micro / nano manipulation, and electronic packaging. Currently, they have become one of the most promising leading industries and research hotspots in the 21st century.

[0003] Microelectromechanical systems (MEMS) mainly consist of end effectors, microsensors, peripheral signal receiving and processing devices, and an overall mechanical control system. Microgrids, as end effectors in typical MEMS operation and manufacturing equipment for micro and nano-devices, directly contact the object being manipulated during operation, executing an automatic gripping-holding-releasing process. Therefore, the performance of the microgrid directly affects the quality, efficiency, and precision of micro-operations.

[0004] Currently, micro grippers can be mainly classified into five types based on their driving methods: electrothermal driven, piezoelectric driven, electromagnetic driven, electrostatic driven, and shape memory alloy driven. At present, micro grippers that can be fabricated using MEMS technology are mainly electrothermal driven and electrostatic driven. Electrothermal driven micro grippers are based on the principle of thermal expansion; due to relatively small thermal strain, they can easily generate a large output force to produce large displacement in a specific direction. However, electrothermal micro grippers operate at high temperatures and have slow response speeds. Electrostatic micro grippers utilize the Coulomb force between charges for driving, offering high precision and frequency. However, limited by driving characteristics and material properties, they exhibit drawbacks such as excessively high driving voltage, small stroke, and low clamping force. Piezoelectric driven piezoelectric ceramics have small deformation, requiring additional amplification mechanisms and cannot be fabricated using MEMS technology, resulting in a large size. Electromagnetic micro grippers are driven by coils, offering high resolution and fast response speed, meeting the requirements for precise micromanipulation. However, due to the size of the electromagnetic coil, electromagnetic micro grippers are relatively large, limiting their application range. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the present invention aims to provide a single-drive electromagnetic micro gripper.

[0006] To achieve the above objectives, an embodiment of the present invention provides the following technical solution:

[0007] A single-drive electromagnetic micro gripper, comprising:

[0008] A fixed side plate, wherein an FPC coil is disposed within the fixed side plate, the FPC coil comprising a multilayer planar coil, and a first clamping arm is disposed at one end of the fixed side plate;

[0009] A movable side plate is connected to and opposite to the fixed side plate. A permanent magnet is disposed inside the movable side plate, and a second clamping arm is disposed at one end of the movable side plate.

[0010] When the FPC coil is energized, the FPC coil generates a magnetic field and exerts a force on the permanent magnet. The permanent magnet and the moving side plate move together, causing the second clamping arm to move toward or away from the first clamping arm.

[0011] As a further improvement of the present invention, the fixed side plate is hollow inside and open at the other end.

[0012] As a further improvement of the present invention, a through hole is provided on the side of the fixed side plate away from the moving side plate.

[0013] As a further improvement of the present invention, a bearing plate is provided on the other side of the fixed side plate, and the movable side plate is connected to the bearing plate.

[0014] As a further improvement of the present invention, a flexible hinge is provided between the bearing plate and the moving side plate.

[0015] As a further improvement of the present invention, the side opening of the moving side plate forms a receiving cavity.

[0016] As a further improvement of the present invention, the fixed side plate, the first clamping arm, the movable side plate and the second clamping arm are all formed by micron-level 3D printing.

[0017] As a further improvement of the present invention, the permanent magnet has a size of (2-4)mm×(3-6)mm×(0.5-1.5)mm, and the distance between the permanent magnet and the FPC coil is 0.05-0.15mm.

[0018] As a further improvement of the present invention, the linewidth of each layer of planar coil is 30-80 μm, and the spacing between adjacent turns of each layer of planar coil is 30-80 μm.

[0019] As a further improvement of the present invention, the planar dimensions of the FPC coil are (2-6) mm × (8-12) mm, the total thickness of the FPC coil is 0.10-0.15 mm, and the total number of turns of the FPC coil is 80-110 turns.

[0020] The beneficial effects of this invention are:

[0021] This invention uses the interaction between an FPC coil and a permanent magnet to drive the clamping arm. The FPC coil is made using FPC technology and is a planar micro-coil. It is small in size, flexible, and easy to assemble into a fixed side plate to control the overall volume of the clamp. It is also reliable and not easily damaged. Other structures are printed by a high-precision micron-level 3D printer. While providing sufficient driving force, it can effectively reduce the size of the micro-clamp. The structure is compact and small in size, realizing the miniaturization of the electromagnetic micro-clamp. It also has high displacement accuracy and can achieve fast response, improving the accuracy, stability and speed of clamping, and can significantly expand the application range of the electromagnetic micro-clamp. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of a preferred embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of a preferred embodiment of the present invention without a permanent magnet and an FPC coil.

[0025] Figure 3 This is a bottom view schematic diagram of a preferred embodiment of the present invention;

[0026] Figure 4 This is a side view of a preferred embodiment of the present invention.

[0027] Figure 5 This is a top view of the FPC coil according to a preferred embodiment of the present invention;

[0028] Figure 6 This is a bottom view of the FPC coil structure according to a preferred embodiment of the present invention;

[0029] Figure 7 This is a structural layer diagram of the FPC coil according to a preferred embodiment of the present invention;

[0030] Figure 8 This is a simulation result diagram of the electrothermal effect of the FPC coil according to a preferred embodiment of the present invention;

[0031] Figure 9 This is an electromagnetic simulation result diagram of the FPC coil of a preferred embodiment of the present invention;

[0032] Figure 10This is a graph showing the flexible hinge radius, micro-gripper end displacement, and maximum stress curves of a preferred embodiment of the present invention.

[0033] Figure 11 This is a schematic diagram of the structure of the flexible hinge according to a preferred embodiment of the present invention;

[0034] Figure 12 This is a schematic diagram of the structure of the end of the micro gripper according to a preferred embodiment of the present invention;

[0035] Figure 13 The figure shows the electromagnetic simulation results of the micro gripper according to a preferred embodiment of the present invention.

[0036] Figure 14 The figure shows the static simulation results of the micro-gripper according to a preferred embodiment of the present invention.

[0037] Figure 15 This is a graph showing the relationship between the attractive and repulsive forces of the FPC coil and permanent magnet and the voltage in a preferred embodiment of the present invention.

[0038] Figure 16 This is a state diagram of the end of the micro gripper according to a preferred embodiment of the present invention;

[0039] Figure 17 This is a displacement change curve of the end of the micro gripper according to a preferred embodiment of the present invention;

[0040] In the figure: 1. Fixed side plate, 11. Through hole, 12. Carrier plate, 13. Substrate, 14. Slot, 2. FPC coil, 21. Planar coil, 22. Connecting hole, 23. First electrode, 24. Second electrode, 3. First clamping arm, 4. Moving side plate, 41. Receiving cavity, 5. Permanent magnet, 6. Second clamping arm, 7. Flexible hinge. Detailed Implementation

[0041] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0042] Please see Figures 1-4This application discloses a single-drive electromagnetic micro gripper, comprising: a fixed side plate 1, wherein an FPC coil 2 is disposed within the fixed side plate 1, the FPC coil 2 including a multilayer planar coil 21, and a first gripping arm 3 is disposed at one end of the fixed side plate 1; and a movable side plate 4, which is connected to the fixed side plate 1 and disposed opposite to the fixed side plate 1, wherein a permanent magnet 5 is disposed within the movable side plate 4, and a second gripping arm 6 is disposed at one end of the movable side plate 4; when the FPC coil 2 is energized, the FPC coil 2 generates a magnetic field and exerts a force on the permanent magnet 5, the permanent magnet 5 and the movable side plate 4 move together, driving the second gripping arm 6 to move toward or away from the first gripping arm 3.

[0043] In this embodiment, the fixed side plate 1 is hollow inside and open at the other end. The FPC coil 2 is inserted into the fixed side plate 1 from the other end, which facilitates the assembly of the FPC coil 2 and also makes it easy for the FPC coil 2 to lead out wires from the other end of the fixed side plate 1. Specifically, the FPC coil 2 is glued to the inside of the fixed side plate 1.

[0044] Preferably, a through hole 11 is provided on the side of the fixed side plate 1 away from the moving side plate 4, which facilitates operation by extending into the fixed side plate 1 through the through hole 11, and facilitates the bonding and securing of the FPC coil 2 in the fixed side plate 1.

[0045] Preferably, a support plate 12 protrudes outward from the other side of the fixed side plate 1, and the movable side plate 4 is connected to the support plate 12, which facilitates the setting of the movable side plate 4. At the same time, the distance between the fixed side plate 1 and the movable side plate 2 can be adjusted by the support plate 12, thereby quickly adjusting the distance between the FPC coil 2 and the permanent magnet 5, so that the interaction force between the FPC coil 2 and the permanent magnet 5 reaches the optimal level.

[0046] In this embodiment, a base plate 13 protrudes outward from the other side of the fixed side plate 1, and a slot 14 is formed between the base plate 13 and the support plate 12. The slot 14 facilitates the installation of the micro clamp onto other components.

[0047] Preferably, the side opening of the moving side plate 4 forms a receiving cavity 41, and the permanent magnet 5 is installed in the receiving cavity 41. Specifically, the permanent magnet 5 is secured in the receiving cavity 41 by adhesive.

[0048] Preferably, the fixed side plate 1, the first clamping arm 3, the movable side plate 4, and the second clamping arm 6 are all printed by a micron-level 3D printer to improve the clamping accuracy of the gripper.

[0049] In this embodiment, a flexible hinge 7 is preferably used to connect the bearing plate 12 and the moving side plate 4. The flexible hinge 7 has good bending performance, which can increase displacement and improve the applicability. More preferably, the flexible hinge 7 is a straight-circular shape, which has advantages such as small rotation angle, fixed rotation center, high rotation accuracy, and normal stress concentration. However, it is not limited to a straight-circular shape; it can also be a straight beam shape or an elliptical shape. The design of the flexible hinge 7 was simulated and optimized in the static analysis module of Workbench. The constraint condition was set as the base plate 13 being fixed, the excitation was set as the moving side plate 4 being subjected to a load of 0.02N, and the variable was set as the radius of the flexible hinge 7. The simulation results are shown in Table 1 and plotted as curves. Figure 10 As shown in the figure, the closer the radius of the flexible hinge 7 is to the beam thickness d1 of 0.8 mm, the greater its end displacement and maximum stress, meaning the greater the deformation. Please refer to [link to relevant documentation]. Figure 11 The beam thickness d1 is equal to the sum of the radius of the flexible hinge 7 and the thickness d2 of the connecting beam. Since 3D printing easily encounters bending and other manufacturing problems when producing connecting beams with d2 less than 0.1mm, the maximum radius of hinge 7 is set to 0.7mm. Considering that the design objective does not require a large end displacement, a radius of 0.6mm for the flexible hinge 7 is preferred.

[0050] Table 1. Simulation results of flexible hinges with different radii.

[0051] Flexible hinge radius Apply load End displacement Maximum stress 0.3mm 0.02N 0.0144mm 0.78MPa 0.4mm 0.02N 0.0210mm 1.31MPa 0.5mm 0.02N 0.0368mm 2.19MPa 0.6mm 0.02N 0.0907mm 3.99MPa 0.7mm 0.02N 0.4000mm 11.59MPa

[0052] The FPC coil 2 in this embodiment is a micro-coil manufactured using flexible circuit board technology. Flexible circuit board technology uses polyimide or polyester film as a substrate to create a highly reliable and extremely flexible printed circuit board, characterized by high wiring density, light weight, thinness, and good bendability. This invention uses a multilayer board structure to manufacture the FPC coil 2, which not only allows for a very thin coil, compressing its volume, but also ensures good reliability and bendability, preventing damage and effectively reducing costs.

[0053] Preferably, the linewidth of each layer of planar coil 21 is 30-80μm, and the spacing between adjacent turns of each layer of planar coil 21 is 30-80μm.

[0054] Specifically, the line width of each layer of planar coil 21 of FPC coil 2 is 60μm, and the spacing between adjacent turns of each layer of planar coil 21 is 60μm. This reduces the difficulty of the manufacturing process, improves the consistency of the width of the planar coil 21 in the vertical and horizontal directions, and makes the planar coil 21 fuller and more uniform, with a yield rate of 60%.

[0055] The planar dimensions of the FPC coil are (2-6) mm × (8-12) mm, the total thickness of FPC coil 2 is 0.10-0.15 mm, and the total number of turns is 80-110. Specifically, the planar dimensions of FPC coil 2 are 4 mm × 10 mm, the total thickness is 0.11 mm, and the total number of turns is 90. FPC coil 2 comprises six layers of planar coil 21. Please refer to... Figure 5 , Figure 6 The six planar coils 21 are staggered. Staggered placement means that adjacent planar coils 21 are not aligned and stacked, but rather offset by a distance of 50-60 μm. Please refer to [link / reference]. Figure 7 Each planar coil 21 has a PI (polyimide) layer between it to isolate adjacent planar coils 21. The planar coils 21 are prepared layer by layer, then pressed together, and finally, connection holes 22 are punched to connect each pair of planar coils 21. Specifically, each planar coil 21 includes a Cu coil and an adhesive layer covering the opposite surface of the Cu coil. A PI layer is placed between adjacent planar coils 21, and the connection hole 22 is the connection point between each pair of planar coils 21. In this embodiment, the use of six layers of planar coils 21 increases the wire length, resulting in lower resistance, lower heat generation, and a stronger magnetic field in the FPC coil 2. The FPC coil 2 also has a first electrode 23 and a second electrode 24 to facilitate the introduction of current from the outside.

[0056] The FPC coil 2 model was simulated to determine the magnitude of the current that could flow through the FPC coil 2 and the placement of the permanent magnet 5. The first step was electrothermal simulation, using the Thermal-Electric module in Workbench, applying a current excitation of 0.06A, with the boundary condition being natural air convection on the upper and lower surfaces, meaning only air convection heat dissipation was considered, with a value of 5W / (m²). 2 After solving for the maximum temperature of FPC coil 2 (in °C), the result is 58.9 °C. Figure 8 As shown, this is within an acceptable range. Furthermore, for short-term operation, the current can be appropriately increased, so the current flowing through FPC coil 2 can be adjusted to approximately 0.06A, with a maximum of 0.14A. Increasing the current further would cause the simulation temperature to exceed 100℃.

[0057] Next, electromagnetic simulation was performed on the FPC coil 2 model to determine the magnetic field distribution of FPC coil 2 and the arrangement of permanent magnet 5. Maxwell simulation software was used, and a current excitation of 0.06A was applied to the cross-section of FPC coil 2. The simulation results are as follows: Figure 9 As shown, the range with a relatively large magnetic field strength is within 1 mm of the surface of FPC coil 2, and its value is 4e-3T, where T is the unit of magnetic flux density. Therefore, the permanent magnet 5 should be arranged within 1 mm of FPC coil 2.

[0058] The length, width, and distance between the permanent magnet 5 and the FPC coil 2 were optimized through simulation. The width, length, and distance between the permanent magnet 5 and the FPC coil 2 were set as variables to simulate the interaction force between them. Table 2 shows some of the simulated data. It can be seen from the table that when the width of the permanent magnet 5 changes from 2.8mm to 3.6mm, the interaction force does not change significantly, but when the width increases to 5mm, the interaction force decreases. When the length changes from 10mm to 5mm, the change in interaction force is not obvious. The closer the permanent magnet 5 is to the FPC coil 2, the greater its interaction force. The preferred dimensions of the permanent magnet 5 are (2-4)mm × (3-6)mm × (0.5-1.5)mm, and the distance between the permanent magnet 5 and the FPC coil 2 is 0.05-0.15mm. Based on the data in the table, the permanent magnet 5 was ultimately selected to have a width of 3mm, a length of 5mm, and a thickness of 1mm, that is, the size of the permanent magnet 5 is 3mm×5mm×1mm. The permanent magnet 5 is arranged 0.1mm away from the FPC coil 2 to ensure a large interaction force between the permanent magnet 5 and the FPC coil 2.

[0059] Table 2. Numerical simulation results of permanent magnets with different parameters

[0060] width length Distance from FPC coil Interaction forces 2.8mm 10mm 1mm 6.37mN 2.8mm 10mm 0.1mm 13.95mN 3mm 10mm 1mm 6.5mN 3mm 10mm 0.1mm 14.22mN 3.6mm 10mm 1mm 6.6mN 3.6mm 10mm 0.1mm 14.27mN 5mm 10mm 1mm 5.47mN 5mm 10mm 0.1mm 12.16mN 3mm 6mm 1mm 7.06mN 3mm 6mm 0.1mm 17.98mN 3mm 5mm 1mm 7.6mN 3mm 5mm 0.1mm 19.10mN 3mm 4mm 1mm 7.5mN 3mm 4mm 0.1mm 18.84mN

[0061] Besides the FPC coil 2 and the permanent magnet 5, the other structures of the microgripper are all formed using photosensitive resin printed by a micron-level 3D printer. The photosensitive resin is mainly composed of polymer monomers and prepolymers, doped with photosensitizers. Under ultraviolet light with a wavelength of 250–300 nm, it immediately undergoes a polymerization reaction, completing the solidification transformation. The microgripper in this embodiment uses photosensitive resin as the material, which, after curing, has high hardness, is not easily broken, and possesses a certain degree of flexibility, allowing it to operate in complex and harsh environments. Thus, the ends of the microgripper can also be designed into different complex shapes to suit different objects being gripped, such as… Figure 12 As shown. Figure 12 (a) The ends of the first clamping arm 3 and the second clamping arm 6 shown are both vertical, suitable for clamping objects from 100μm to 400μm. Preferably, the first clamping arm 3 and the second clamping arm 6 are 200μm apart. Figure 12 (b) The ends of the first clamping arm 3 and the second clamping arm 6 shown are both hollowed out, the clamping surface is arc-shaped and has a hollowed-out drainage structure, which is suitable for clamping objects in liquid. Figure 12 (c) The ends of the first clamping arm 3 and the second clamping arm 6 shown are both arc-shaped, which is suitable for clamping spherical objects. Preferably, the distance between the first clamping arm 3 and the second clamping arm 6 is 140 μm. Figure 12(d) The ends of the first clamping arm 3 and the second clamping arm 6 shown are both serrated, and multiple serrations with a pitch of 20μm are provided on the clamping surface to increase the roughness of the clamping surface and clamp the object more stably. Figure 12 (e) The ends of the first clamping arm 3 and the second clamping arm 6 shown are both specially shaped, enabling them to clamp objects of special shapes. Different end shapes can be designed for different objects to be clamped. Combined with the convenience of high-precision 3D printing, micro grippers for different objects can be easily manufactured.

[0062] The feasibility of this microgripper is verified through simulation analysis. First, an electromagnetic simulation analysis of the microgripper is performed using Maxwell simulation software. An excitation current of 0.1A is applied to FPC coil 2. The simulation results show that the electromagnetic force of FPC coil 2 is 9.2mN. Figure 13 As shown. Next, static simulation of the micro-gripper was performed. The electromagnetic force obtained from the electromagnetic simulation was applied as an excitation to the moving side plate 4. The simulation showed that the maximum displacement of the end of the second gripping arm 6 was 181 μm. Figure 14 As shown, the maximum strain occurs at the flexible hinge 7, at 9.98 MPa, which is less than the yield strength of the photosensitive resin. The simulation results meet the expected target.

[0063] An experiment was conducted on the fabricated FPC coil 2 to measure the attractive and repulsive forces between the FPC coil 2 and the permanent magnet 5. The FPC coil 2 was fixed on an electronic balance, and the 3mm × 5mm NdFe35 permanent magnet 5 was fixed on a fine-tuning stage. The height of the fine-tuning stage was adjusted to ensure a distance of 150μm between the FPC coil 2 and the permanent magnet 5. The force between the FPC coil 2 and the permanent magnet 5 was changed by altering the magnitude and direction of the voltage applied to the FPC coil 2, and the force values ​​were obtained from the readings of the electronic balance. The electronic balance used had a resolution of 0.01%. The experimentally measured data were plotted as a curve, as shown below. Figure 15 As shown, Figure 15 (a) is a graph showing the relationship between suction force and voltage. Figure 15 (b) is a graph showing the relationship between repulsive force and voltage. When the driving current is 0.1A, that is, the driving voltage is 2.5V, the experimentally measured value is about 8mN, while the simulation result is 9.2mN. The difference between the two is 15%, indicating that the simulation result is reliable.

[0064] Different voltages were applied to the microgripper, and the opening and closing amounts at the ends of the microgripper were observed under a microscope.

[0065] Tension-opening experiments were conducted on vertical, sawtooth, and special types of microgrippers, respectively. The experimental procedures are as follows: Figure 16 As shown, Figure 16 (a) is a closed state. Figure 16(b) represents the natural state. Figure 16 (c) is the open state. When a positive voltage is applied, the first clamping arm 3 and the second clamping arm 6 are in a closed state; when no voltage is applied, the first clamping arm 3 and the second clamping arm 6 are in a natural state; when a negative voltage is applied, the first clamping arm 3 and the second clamping arm 6 are in an open state.

[0066] Applying different voltages will change the opening and closing amounts of the microgrip. Record the values ​​and plot them as curves, such as... Figure 17 As shown. Figure 17 (a) shows the displacement curve of the end of the vertical second clamping arm 6. Figure 17 (b) shows the displacement curve of the end of the special type of second clamping arm 6. Figure 17 (c) shows the curve of the displacement change at the end of the serrated second clamping arm 6.

[0067] As shown in the figure, the opening and closing amount increases linearly with increasing voltage; the closing amount, however, increases linearly to a certain threshold and then remains unchanged. This lack of change is achieved by adding a limiting protrusion at the clamping face of the micro-gripper end to restrict further closure, or by omitting the limiting protrusion to increase the closing amount for gripping smaller objects. The displacement of the special type end is larger than the other two types due to its longer end structure. All three types exhibit good linearity, and the fitting parameter R... 2 They all reached 0.99 and responded quickly to input signals.

[0068] The experimental platform was used to conduct experiments on the micro-assembly of a microgripper. The platform included an operating platform, an installation platform, a microscope, a monitor, and a power supply. The operating platform contained two three-axis motion platforms; the installation platform was responsible for installing the microgripper; a camera was connected to the microscope and transmitted signals to the monitor; the power supply could be connected to a computer, and the computer could control the voltage changes. The power supply communicated with a host computer or PLC via RS232 or RS485 serial ports. The host computer could control the power supply's switching, voltage, and current through the serial interface, and could also receive information from the power supply. The communication protocol used was the MODBUS-RTU protocol. To simplify operation, the power supply would execute the corresponding operation after receiving a write register command from the host computer, but would not send a response to the host computer.

[0069] When in use, the FPC coil 2 is energized, the fixed side plate 1 and the FPC coil 2 remain stationary, the FPC coil 2 generates an attractive force on the permanent magnet 5, the permanent magnet 5 and the moving side plate 4 move, thereby driving the second clamping arm 6 to move toward the first clamping arm 3; when not clamping, the moving side plate 4 and the permanent magnet 5 are reset through the flexible hinge 7; when the FPC coil 2 is energized with a reverse current, the FPC coil 2 generates a repulsive force on the permanent magnet 5, thereby driving the second clamping arm 6 to move away from the first clamping arm 3.

[0070] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0071] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A single-drive electromagnetic micro gripper, characterized in that, include: A fixed side plate is provided, wherein an FPC coil is provided inside the fixed side plate. The FPC coil is made using flexible circuit board technology and includes multiple planar coils. A first clamping arm is provided at one end of the fixed side plate. A movable side plate is connected to and opposite to the fixed side plate. A permanent magnet is disposed inside the movable side plate, and a second clamping arm is disposed at one end of the movable side plate. The fixed side plate, the first clamping arm, the movable side plate, and the second clamping arm are all printed by a micron-level 3D printer. When the FPC coil is energized, the FPC coil generates a magnetic field and exerts a force on the permanent magnet. The permanent magnet and the moving side plate move together, causing the second clamping arm to move toward or away from the first clamping arm.

2. The single-drive electromagnetic micro-gripper according to claim 1, characterized in that, The fixed side plate is hollow inside and open at the other end.

3. The single-drive electromagnetic micro-gripper according to claim 1, characterized in that, The fixed side plate has a through hole on the side away from the moving side plate.

4. The single-drive electromagnetic micro-gripper according to claim 1, characterized in that, A support plate protrudes outward from the other side of the fixed side plate, and the movable side plate is connected to the support plate.

5. The single-drive electromagnetic micro-gripper according to claim 4, characterized in that, A flexible hinge connects the support plate and the moving side plate.

6. The single-drive electromagnetic micro-gripper according to claim 1, characterized in that, The opening on the side of the moving side plate forms a receiving cavity.

7. The single-drive electromagnetic micro-gripper according to claim 1, characterized in that, The permanent magnet has dimensions of (2-4)mm × (3-6)mm × (0.5-1.5)mm, and the distance between the permanent magnet and the FPC coil is 0.05-0.15mm.

8. The single-drive electromagnetic micro-gripper according to claim 1, characterized in that, The linewidth of each layer of the planar coil is 30-80 μm, and the spacing between adjacent turns of each layer of the planar coil is 30-80 μm.

9. The single-drive electromagnetic micro-gripper according to claim 1 or 8, characterized in that, The planar dimensions of the FPC coil are (2-6) mm × (8-12) mm, the total thickness of the FPC coil is 0.10-0.15 mm, and the total number of turns of the FPC coil is 80-110 turns.

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