An atomizer and a PECVD coating device

Abstract

The present invention is applicable to the technical field of atomizers, and provides an atomizer and a PECVD coating device. The atomizer includes: a valve body with a cavity provided therein, the valve body being provided with a liquid inlet communicating with the cavity; a cover plate covering the valve body and encapsulating the cavity; a connecting seat connected to the valve body, the connecting seat being provided with a mist outlet communicating with the cavity; a plurality of baffles detachably fixed in the cavity, a communication space being formed at intervals between adjacent two baffles, and each communication space being sequentially communicated to form an atomization channel of a corresponding atomization path, the atomization channel communicating the liquid inlet with the mist outlet; a heat-conducting porous filler filled in the atomization channel; and a heating device provided in the cavity. The atomizer provided by the present invention can flexibly disassemble or add baffles as needed to change the atomization path of the atomization channel, facilitating the adjustment of the atomization path, and the implementation cost of the adjustment of the atomization path is low.

Description

Technical Field

[0001] The present invention relates to the technical field of atomizers, and particularly to an atomizer and a PECVD coating device. Background Art

[0002] In a plasma enhanced chemical vapor deposition (PECVD) coating device, a gas containing atoms of thin film components is ionized by microwaves or radio frequency, etc., to form a plasma locally. By utilizing the principle that the plasma has very strong chemical activity and is very easy to react, a required thin film is deposited on a workpiece to be coated.

[0003] In the prior art, during the coating process of a PECVD coating device, an atomizer is required to continuously heat and atomize a coating material. The heated and atomized coating material enters a coating cavity, and the atomized coating material is used to deposit a coating on the workpiece to be coated in the coating cavity to achieve the best coating conditions. However, since the atomization path of the existing atomizer consists of an integrated atomization pipeline, the coating material in the atomization pipeline is atomized by heating the entire atomization pipeline. Since the atomization path of the integrated atomization pipeline is usually fixed, the atomization effect has great limitations. Once the atomization pipeline is processed and formed, the atomization path cannot be adjusted. To change the atomization path for different coating materials, the atomization pipeline must be remade, or even the entire atomizer must be replaced, which is inconvenient for adjusting the atomization path and has a high cost for realizing the adjustment of the atomization path. Summary of the Invention

[0004] The present invention provides an atomizer, aiming to solve the problems that the atomizer in the prior art is inconvenient to adjust the atomization path and has a high cost for realizing the adjustment of the atomization path.

[0005] The present invention is realized as follows. An atomizer is provided, comprising:

[0006] A valve body with a cavity inside, the valve body being provided with a liquid inlet communicating with the cavity;

[0007] A cover plate covering the valve body and encapsulating the cavity;

[0008] A connection seat connected to the valve body, the connection seat being provided with a mist outlet communicating with the cavity;

[0009] A plurality of baffles detachably fixed in the cavity, a communication space is formed by the relative interval between adjacent two of the baffles, and each communication space is sequentially communicated to form an atomization channel with a corresponding atomization path, the atomization channel communicating the liquid inlet with the mist outlet;

[0010] A thermally conductive porous filler filled in the atomization channel; and

[0011] A heating device disposed in the cavity.

[0012] Preferably, it further includes a stop valve for connecting to the liquid inlet pipeline. The inlet of the stop valve is connected to the liquid inlet pipeline, and the outlet of the stop valve is connected to the liquid inlet.

[0013] Preferably, the thermally conductive porous filler is copper foam or aluminum foam.

[0014] Preferably, it further includes:

[0015] A silica gel pad for sealing the cavity. The silica gel pad is disposed on the side of the cover plate facing the cavity and covers the cavity.

[0016] Preferably, a plurality of the baffles are arranged in parallel at equal intervals in the cavity.

[0017] Preferably, a plurality of the baffles are fixed in the cavity by screws.

[0018] Preferably, it further includes:

[0019] A support seat fixed to one side of the valve body. The stop valve is fixed on the support seat and communicates with the liquid inlet through the support seat.

[0020] Preferably, it further includes a first U-shaped frame and a second U-shaped frame. The second U-shaped frame is fixed on the support seat. The first U-shaped frame is detachably connected to the second U-shaped frame. The stop valve is held between the first U-shaped frame and the second U-shaped frame.

[0021] Preferably, the first U-shaped frame is provided with a first positioning groove and a first positioning protrusion. The second U-shaped frame is provided with a second positioning protrusion matching the first positioning groove and a second positioning groove matching the first positioning protrusion. The first positioning protrusion is embedded in the second positioning groove, and the second positioning protrusion is embedded in the first positioning groove.

[0022] The present invention also provides a PECVD coating device, including a coating cavity and the above-mentioned atomizer. The mist outlet of the atomizer is communicated with the coating cavity.

[0023] An atomizer provided by the present invention forms an atomization channel with a corresponding atomization path by arranging a plurality of baffles detachably fixed in a cavity, fills a heat-conducting porous filler in the atomization channel, heats the interior of the cavity by means of a heating device, and uses the heat-conducting porous filler to conduct heat and directly heat a coating material, so that the coating material is rapidly atomized along the atomization channel. Compared with the atomizers in the prior art, the atomization effect is greatly improved. Moreover, since any of the plurality of baffles can be flexibly disassembled and assembled, the baffles can be flexibly disassembled or added according to needs to change the atomization path of the atomization channel, facilitating the realization of different atomization effects. The adjustment of the atomization path is very convenient, and the implementation cost of the adjustment of the atomization path is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a three-dimensional schematic diagram of an atomizer provided by an embodiment of the present invention;

[0025] Figure 2 is an exploded three-dimensional structure diagram of an atomizer provided by an embodiment of the present invention;

[0026] Figure 3 is a schematic structural diagram of an atomizer provided by an embodiment of the present invention after removing the cover plate and the heat-conducting porous filler;

[0027] Figure 4 is a schematic structural diagram of an atomizer provided by an embodiment of the present invention after removing the cover plate;

[0028] Figure 5 is a schematic cross-sectional diagram of an atomizer provided by an embodiment of the present invention;

[0029] Figure 6 is a partial structural schematic diagram of an atomizer provided by an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0031] An atomizer provided by an embodiment of the present invention forms an atomization channel with a corresponding atomization path by arranging a plurality of baffles detachably fixed in a cavity, fills a heat-conducting porous filler in the atomization channel, heats the inside of the cavity by a heating device, and uses the heat-conducting porous filler to conduct heat and directly heat a coating material, so that the coating material is atomized rapidly along the atomization channel. Compared with the atomizer of the prior art, the atomization effect is greatly improved. Moreover, since any of the plurality of baffles can be flexibly disassembled and assembled, the atomization path of the atomization channel can be changed by flexibly disassembling or adding baffles as needed, which is convenient for realizing different atomization effects, the adjustment of the atomization path is very convenient, and the implementation cost of the adjustment of the atomization path is low.

[0032] Please refer to Figures 1 - 5 , an atomizer provided by an embodiment of the present invention includes:

[0033] A valve body 1 with a cavity 11 provided therein, and the valve body 1 is provided with a liquid inlet 12 communicating with the cavity 11;

[0034] A cover plate 2 covering the valve body 1 and encapsulating the cavity 11;

[0035] A connection seat 3 connected to the valve body 1, and the connection seat 3 is provided with a fog outlet 31 communicating with the cavity 11;

[0036] A plurality of baffles 4 detachably fixed in the cavity 11, a communication space 40 is formed by the relative interval between two adjacent baffles 4, and each communication space 40 is sequentially communicated to form an atomization channel (not labeled) with a corresponding atomization path, and the atomization channel communicates the liquid inlet 12 and the fog outlet 31;

[0037] A heat-conducting porous filler 5 filled in the atomization channel; and

[0038] A heating device (not shown in the figure) provided in the cavity 11.

[0039] In the embodiments of the present invention, by providing a plurality of baffles 4 detachably fixed in the cavity 11, a communication space 40 is formed at intervals between two adjacent baffles 4. Each communication space 40 communicates to form an atomization channel of a corresponding atomization path. The liquid inlet 12 is communicated with the mist outlet 31 through the atomization channel formed by the plurality of baffles 4, and a heat-conducting porous filler 5 is filled in the atomization channel. The inside of the cavity 11 is heated by a heating device, and the heat-conducting porous filler 5 conducts heat. The heat-conducting porous filler 5 directly convects and rapidly heats and atomizes the coating material flowing through the atomization channel. The atomized coating material enters the coating cavity of the PECVD device along the atomization channel through the mist outlet 31. Compared with the atomizer of the prior art, the atomization effect is greatly improved. Moreover, since any one of the plurality of baffles 4 can be flexibly disassembled and assembled, the baffles 4 can be flexibly disassembled or added according to needs to change the shape or length of the atomization path of the atomization channel. The change of the atomization path is very convenient, and the implementation cost of adjusting the atomization path is low.

[0040] In the embodiments of the present invention, the fixing manner of the cover plate 2 and the valve body 1 is not limited. Preferably, the cover plate 2 is connected to the valve body 1 by screws, which is convenient for disassembling and assembling the cover plate 2 and convenient for disassembling and assembling the baffles 4 according to needs to adjust the atomization path of the atomization channel.

[0041] In the embodiments of the present invention, the connecting seat 3 is used to connect the coating cavity of the PECVD device. The coating material enters the atomization channel formed by the plurality of baffles 4 from the liquid inlet 12 and flows along the atomization channel towards the mist outlet 31. By the heating action of the heating device, the heat-conducting porous filler 5 convects and rapidly heats and atomizes the coating material flowing through the atomization channel. The atomized coating material enters the coating cavity of the PECVD device along the atomization channel through the mist outlet 31, and the atomized coating material is used to deposit a coating on the workpiece to be coated in the coating cavity.

[0042] In the embodiments of the present invention, the connection manner between the connecting seat 3 and the valve body 1 is not limited, and specifically, it can be a screw fixed connection.

[0043] In the embodiments of the present invention, the specific number of the baffles 4 is not limited, and the number of the baffles 4 can be increased or decreased or the arrangement manner of the baffles 4 can be adjusted according to the length or shape of the atomization path required by the atomization channel. For example, when it is necessary to increase the length of the atomization path of the atomization channel, the distribution density of the baffles 4 can be set larger, so that the coating material can enter the coating cavity of the PECVD device along a longer atomization path through the mist outlet 31. When it is necessary to reduce the length of the atomization path of the atomization channel, the distribution density of the baffles 4 can be set smaller, so that the coating material can enter the coating cavity of the PECVD device along a shorter atomization path through the mist outlet 31. Among them, Figure 2 and Figure 3 the number of the baffles 4 shown in is five arranged in parallel at intervals, and the five baffles 4 form a "snake-shaped" atomization channel.

[0044] As an embodiment of the present invention, a plurality of baffles 4 are arranged in parallel at equal intervals in the cavity 11 in sequence, so that the coating material is uniformly heated and atomized in the atomization channel, and the atomization effect is better. Among them, in any two adjacent baffles 4, one end of one baffle 4 abuts against the first inner wall of the cavity 11, and the other end is spaced from the second inner wall of the cavity 11, and one end of the other baffle 4 is spaced from the first inner wall of the cavity 11, and the other end abuts against the second inner wall of the cavity 11, so that the atomization channels formed by the plurality of baffles 4 are arranged in a zigzag manner, increasing the atomization path length of the atomization channel, ensuring sufficient atomization, and improving the atomization effect. Among them, the first inner wall of the cavity 11 and the second inner wall of the cavity 11 are arranged opposite to each other. The arrangement manner of the plurality of baffles 4 can also be flexibly set according to actual needs, so as to realize the corresponding atomization path of the atomization channel.

[0045] As an embodiment of the present invention, a plurality of baffles 4 are fixed in the cavity 11 by screws.

[0046] In this embodiment, a plurality of baffles 4 are fixed in the cavity 11 by screws, which facilitates the disassembly and assembly of the plurality of baffles 4, and enables the plurality of baffles 4 to be flexibly disassembled and assembled. The baffles 4 can be flexibly disassembled or added according to needs to change the atomization path, which is convenient for changing the atomization path, and the implementation cost is low.

[0047] In the embodiment of the present invention, the thermally conductive porous filler 5 is filled in the atomization channel for quickly heating and atomizing the coating material flowing through the atomization channel. The atomized coating material enters the coating cavity of the PECVD device along the atomization channel through the mist outlet 31; moreover, the thermally conductive porous filler 5 can reduce the flow rate of the coating material in the atomization channel, so that the coating material can be fully heated and atomized, greatly improving the atomization effect.

[0048] In the embodiment of the present invention, the thermally conductive porous filler 5 is specifically filled in the communication space 40 formed between two adjacent baffles 4. In order to further improve the thermal conductivity effect, the thermally conductive porous filler 5 is also filled in the area in the cavity 11 other than the communication space 40.

[0049] As an embodiment of the present invention, the thermally conductive porous filler 5 is copper foam or aluminum foam.

[0050] In this embodiment, by using the good thermal conductivity of copper foam or aluminum foam, the heat generated by the heating device can be fully conducted to the coating material in the atomization channel. The setting of the thermally conductive porous filler 5 can ensure the rapid atomization of the coating material and ensure a good atomization effect. In addition, the thermally conductive porous filler 5 can also be some non-metallic fillers, such as thermally conductive silica gel.

[0051] In an embodiment of the present invention, a heating device is arranged inside the cavity 11 for heating the entire interior of the cavity 11. Specifically, the heating device generates heat, and the thermally conductive porous filler 5 absorbs the heat and fully heats and atomizes the coating material in the atomization channel. The atomized coating material enters the coating cavity of the PECVD device along the atomization channel through the mist outlet 31, and the coating is deposited on the workpiece to be coated in the coating cavity by using the atomized coating material.

[0052] In an embodiment of the present invention, the heating device may specifically be an electric heating rod, and the specific number of the heating devices is not limited. Preferably, the number of electric heating rods is two, which can ensure good heating effect and good atomization effect. Among them, a wire passing hole 13 is provided at the top of the valve body 1, and the wire connecting the heating device passes through the wire passing hole 13 and extends into the cavity 11.

[0053] As an embodiment of the present invention, it further includes a stop valve 6 for connecting with a liquid inlet pipeline (not shown in the figure). The inlet of the stop valve 6 is connected to the liquid inlet pipeline, and the outlet of the stop valve 6 is connected to the liquid inlet 12.

[0054] In this embodiment, the stop valve 6 can open or close the valve regularly, thereby controlling the flow rate of the coating material entering the liquid inlet 12, enabling the dosage of the coating material to be accurately controlled to achieve a better coating effect. Among them, the switching frequency of the stop valve 6 can be set according to actual needs. Besides this embodiment, the stop valve 6 can also be replaced by a flow meter, and the flow rate of the coating material entering the liquid inlet 12 can also be controlled through the flow meter.

[0055] As an embodiment of the present invention, it further includes:

[0056] A support seat 8 fixed to one side of the valve body 1. The stop valve 6 is fixed on the support seat 8 and communicates with the liquid inlet 12 through the support seat 8.

[0057] In this embodiment, the interior of the support seat 8 is connected to the stop valve 6. The coating material enters through the inlet of the stop valve 6, flows out from the outlet of the stop valve 6, enters the liquid inlet 12 through the support seat 8, and then is atomized through the atomization channel and discharged from the mist outlet 31. Among them, the support seat 8 is fixed on one side of the valve body 1, and the stop valve 6 is fixed on the support seat 8, which is convenient for the arrangement of the stop valve 6; moreover, the stop valve 6 is fixedly installed by using the support seat 8, which is convenient for the fixed installation of the stop valve 6. Among them, the support seat 8 is generally in a T shape. Of course, the support seat 8 can also be set in other shapes.

[0058] As an embodiment of the present invention, it further includes a first U-shaped frame 9 and a second U-shaped frame 10. The second U-shaped frame 10 is fixed on the support seat 8. The first U-shaped frame 9 is detachably connected to the second U-shaped frame 10, and the stop valve 6 is held between the first U-shaped frame 9 and the second U-shaped frame 10.

[0059] In this embodiment, by arranging the first U-shaped frame 9 and the second U-shaped frame 10 to clamp the package stop valve 6, the installation of the stop valve 6 is made more stable. Among them, the first U-shaped frame 9 and the second U-shaped frame 10 are specifically fixedly connected by screws.

[0060] Please refer to Figure 6 , as an embodiment of the present invention, the first U-shaped frame 9 is provided with a first positioning groove 91 and a first positioning protrusion 92, the second U-shaped frame 10 is provided with a second positioning protrusion 101 that cooperates with the first positioning groove 91 and a second positioning groove 102 that cooperates with the first positioning protrusion 92, the first positioning protrusion 92 is embedded in the second positioning groove 102, and the second positioning protrusion 101 is embedded in the first positioning groove 91.

[0061] In this embodiment, the first U-shaped frame 9 and the second U-shaped frame 10 are pre-positioned by using the cooperation of the positioning groove and the positioning protrusion, which facilitates the assembly and fixation of the first U-shaped frame 9 and the second U-shaped frame 10. Moreover, by using the cooperation of the positioning groove and the positioning protrusion, the connection between the first U-shaped frame 9 and the second U-shaped frame 10 can be made more stable. Specifically, the first U-shaped frame 9 and the second U-shaped frame 10 are fixedly connected by screws.

[0062] As an embodiment of the present invention, a first connecting pipe 93 communicating with the liquid inlet pipe is arranged on the first U-shaped frame 9, the first connecting pipe 93 connects the inlet of the high-frequency stop valve 6 and the liquid inlet pipe, a second connecting pipe 103 is arranged on the second U-shaped frame 10, and the second connecting pipe 103 connects the outlet of the stop valve 6 and the support seat 8.

[0063] In this embodiment, the coating material sequentially passes through the first U-shaped frame 9, the stop valve 6, the second U-shaped frame 10, and the support seat 8 from the liquid inlet pipe and enters the liquid inlet 12, and then passes through the atomization channel from the liquid inlet 12 and is discharged from the mist outlet 31 after atomization.

[0064] As an embodiment of the present invention, it further includes:

[0065] A silica gel pad 7 for sealing the cavity 11, and the silica gel pad 7 is arranged on one side of the cover plate 2 facing the cavity 11 and covers the cavity 11. In this embodiment, by arranging the silica gel pad 7, the sealing effect of the cavity 11 is further improved by using the silica gel pad 7 to prevent the escape of the coating material.

[0066] The embodiment of the present invention also provides a PECVD coating device, including a coating cavity (not shown in the figure), and the atomizer of the above embodiment, and the mist outlet 31 of the atomizer is communicated with the coating cavity.

[0067] In this embodiment, the coating material enters the atomization channel of the atomizer from the liquid inlet 12, and after being atomized in the atomization channel, it enters the coating cavity of the PECVD device from the mist outlet 31. The atomized coating material is deposited on the workpiece to be coated in the coating cavity. Since the multiple baffles 4 of the atomizer can be flexibly disassembled and assembled, the baffles 4 can be flexibly disassembled or added as needed to change the atomization path. The change of the atomization path is very convenient, and the cost of adjusting the atomization path is low, which is convenient for flexibly changing the atomization path of the atomizer according to the coating requirements of the PECVD coating device.

[0068] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An atomizer, characterized in that, Comprising: A valve body with a cavity therein, the valve body being provided with a liquid inlet communicating with the cavity; A cover plate covering the valve body and encapsulating the cavity; A support seat fixed to one side surface of the valve body; A connection seat connected to the valve body, the connection seat being provided with a mist outlet communicating with the cavity; A plurality of baffles detachably fixed in the cavity, a communication space being formed by relative intervals between adjacent two of the baffles, and the communication spaces are sequentially communicated to form an atomization channel of a corresponding atomization path, the atomization channel communicating the liquid inlet and the mist outlet; A heat-conducting porous filler filled in the atomization channel; and A heating device arranged in the cavity.

2. The atomizer according to claim 1, characterized in that, Further comprising a stop valve for connecting with a liquid inlet pipeline, an inlet of the stop valve being connected to the liquid inlet pipeline, and an outlet of the stop valve being connected to the liquid inlet.

3. The atomizer according to claim 1, characterized in that The heat-conducting porous filler is copper foam or aluminum foam.

4. The atomizer according to claim 1, characterized in that, Further comprising: A silica gel pad for sealing the cavity, the silica gel pad being arranged on a surface of the cover plate facing the cavity and covering the cavity.

5. The atomizer according to claim 1, characterized in that, The plurality of baffles are sequentially arranged in parallel at equal intervals in the cavity.

6. The atomizer according to claim 1, wherein, The plurality of baffles are fixed in the cavity by screws.

7. The atomizer according to claim 2, characterized in that, The stop valve is fixed on the support seat and communicates with the liquid inlet through the support seat.

8. The atomizer according to claim 7, characterized in that, Further comprising a first U-shaped frame and a second U-shaped frame, the second U-shaped frame being fixed on the support seat, the first U-shaped frame being detachably connected to the second U-shaped frame, and the stop valve being held between the first U-shaped frame and the second U-shaped frame.

9. The atomizer according to claim 8, characterized in that, The first U-shaped frame is provided with a first positioning groove and a first positioning protrusion, the second U-shaped frame is provided with a second positioning protrusion matching with the first positioning groove and a second positioning groove matching with the first positioning protrusion, the first positioning protrusion is embedded in the second positioning groove, and the second positioning protrusion is embedded in the first positioning groove.

10. A PECVD coating device, characterized in that, Comprising a coating cavity and an atomizer according to any one of claims 1 to 9, the mist outlet of the atomizer being communicated with the coating cavity.

Images