A feeding and discharging device and detection system

Abstract

The application discloses a feeding and discharging device and a detection system. The feeding and discharging device comprises a rack, a moving and carrying mechanism and a plurality of material box groups. The rack comprises a main body and a plurality of carrying plates. The moving and carrying mechanism comprises a moving and carrying assembly, the moving and carrying assembly comprises a mounting part and a carrying assembly, the carrying assembly comprises a connecting part and a carrying part, the carrying part is connected to the connecting part and can move. The material box group comprises a material box, the material box is further provided with a plurality of carrying parts, and the carrying parts are used for carrying material pieces. The carrying plate can move relative to the main body, and the carrying part can move to partially protrude into a second accommodating cavity. The plurality of material box groups are connected to different carrying plates, the material box is detachably connected to the carrying plate, the material pieces in the material box on the same carrying plate are all detected, the carrying plate can move relative to the main body to move the corresponding material box group out for replacement, at this time, the moving and carrying assembly can take the material pieces in the remaining material boxes, and the detection is not stopped when the material box is replaced, and the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor detection, in particular to a feeding and discharging device and a detection system. BACKGROUND

[0002] In the related art, detecting the wafer is an indispensable step in the semiconductor processing, the wafer is generally placed in the wafer box, and the wafer is taken out from the wafer box by the artificial or mechanical hand for detection, and then is put back after the detection is completed, and in the prior art, after all the wafers in a wafer box are detected, a new wafer box to be detected is replaced, at this time, the mechanical hand and the related detection device need to be stopped, thereby reducing the detection efficiency. SUMMARY

[0003] The present application aims to at least solve one of the technical problems in the prior art. To this end, the present application provides a feeding and discharging device, which can store multiple wafer boxes at the same time, and does not affect the detection when the wafer box that has been detected is taken out, thereby improving the detection efficiency.

[0004] The present application also provides a detection system with the feeding and discharging device.

[0005] According to the feeding and discharging device of the first aspect of the present application, the feeding and discharging device comprises:

[0006] The rack comprises a main body and a plurality of carrier plates arranged in the vertical direction, and the rack is provided with a first accommodating cavity;

[0007] The transfer mechanism is accommodated in the first accommodating cavity, and the transfer mechanism comprises a transfer assembly, the transfer assembly can move in the vertical direction, the transfer assembly comprises a mounting member and a carrying assembly, the carrying assembly comprises a connecting member and a carrying member, the connecting member has a set length, the carrying member is connected to the connecting member and can move along the length direction of the connecting member, and the carrying member is used for carrying the wafer;

[0008] A plurality of wafer box groups correspond to the carrier plates one by one and are installed on the carrier plates, the wafer box group comprises a wafer box, the wafer box is detachably connected to the carrier plate, the wafer box is provided with a second accommodating cavity, and the inner wall of the wafer box is further provided with a plurality of carrying parts distributed in the vertical direction, and the carrying parts are used for carrying the wafer;

[0009] The carrier plate can move relative to the main body to move the wafer box group out of or into the first accommodating cavity, and the carrying member can move in the length direction of the connecting member to partially protrude into the second accommodating cavity.

[0010] According to the feeding and discharging device, the plurality of box groups are connected to different carrier plates which are arranged in the vertical direction, the carrier plates can be moved relative to the main body to move the corresponding box group out of the first accommodating cavity, the box is detachably connected to the carrier plate, therefore, after the material sheets in the box on the same carrier plate are all detected, the carrier plate can be moved relative to the main body to move the corresponding box group out of the first accommodating cavity, the undetected box is replaced with the detected box, at this time, the box loading and unloading assembly can detect the material sheets in the box mounted on the remaining carrier plates, and the detection is not stopped when the box is replaced, and the detection efficiency is improved.

[0011] According to some embodiments of the present application, the box loading and unloading assembly further comprises a mounting member, the carrier assembly is rotationally connected to the mounting member, and the rotation axis of the carrier assembly is arranged vertically. The box group comprises a plurality of boxes, the plurality of boxes are arranged in the circumferential direction of the rotation axis of the carrier assembly and have equal distances from the rotation axis, and the carrier assembly can be rotated relative to the mounting member to correspond to each box.

[0012] According to some embodiments of the present application, the carrier member is provided with a carrier surface, the carrier surface is provided with suction holes, the suction holes are used to communicate with a vacuum source, and the carrier surface is used to carry the material sheets.

[0013] According to some embodiments of the present application, two first limiting assemblies are further included, the first limiting assemblies are connected to the carrier plates, the first limiting assemblies comprise first limiting members and second limiting members, the first limiting members and the second limiting members are arranged in a first direction, the first direction is parallel to the radial direction of the rotation axis of the carrier assembly, and the two first limiting assemblies are arranged in a second direction, the second direction is perpendicular to the first direction, and the first limiting assemblies are used to fix the boxes.

[0014] According to some embodiments of the present application, the first limiting members are provided with first limiting surfaces and second limiting surfaces which are perpendicular to each other, the second limiting members are provided with third limiting surfaces, the first limiting surfaces and the third limiting surfaces are parallel to each other and have a set distance therebetween, the second limiting surfaces of the two first limiting members are arranged towards each other, the two second limiting surfaces are parallel to each other and have a set distance therebetween, the box has a set length and width, the box comprises a main body and a base, the main body is connected to the base, the main body is provided with the carrier part, the base comprises mounting parts which extend in the width direction of the box and connecting parts which connect the two mounting parts, and the mounting parts abut between the first limiting surfaces and the third limiting surfaces, and the two second limiting surfaces abut to the surfaces of the mounting parts which face each other.

[0015] According to some embodiments of the present application, a third limiting member is further included, which is connected to the carrier plate and is provided with a plurality of positioning grooves in the radial direction of the rotating axis of the carrier assembly, and the connecting portion is accommodated in the positioning grooves and abuts against the groove walls.

[0016] According to some embodiments of the present application, the transfer mechanism includes a first driving member, a second driving member and a third driving member, the first driving member is connected to the rack, the transfer assembly is connected to the first driving member, the first driving member can drive the transfer assembly to move in the vertical direction, the second driving member is connected to the mounting member, the carrier assembly is connected to the second driving member, the second driving member can drive the carrier assembly to rotate relative to the mounting member, and the third driving member is installed between the carrier member and the connecting member, and the third driving member can drive the carrier member to move along the length direction of the connecting member.

[0017] According to some embodiments of the present application, the material box has a set length and width, and includes two first body portions and second body portions which are spaced apart in the width direction, the first body portions are provided with a plurality of first carrier portions in the vertical direction, the second body portions are provided with a plurality of second carrier portions in the vertical direction, each of the first carrier portions corresponds to each of the second carrier portions, the first carrier portions and the second carrier portions are used for carrying the material sheets together, and the corresponding first carrier portion and the second carrier portion define an opening therebetween.

[0018] According to some embodiments of the present application, a sensor is further included, which is connected to the transfer mechanism and faces the material box, and is used for detecting the position and quantity of the material sheets in the material box.

[0019] The detection system according to the second aspect of the embodiments of the present application includes:

[0020] A detection table is used for carrying the material sheets to be detected;

[0021] A camera is arranged above the detection table and faces the detection table;

[0022] The feeding and discharging device provided by the first aspect of the embodiments can move to the detection table for discharging, and can receive the material sheets after detection.

[0023] The detection system according to the embodiments of the present application has at least the following beneficial effects: the detection system uses the feeding and discharging device provided by the above-mentioned embodiments, and has all the advantages of the feeding and discharging device, the carrier member can move the material sheets to be detected to the detection table for photographing and detection by the camera, and can re-adsorb and move the material sheets after detection back to the material box, thereby completing the detection function.

[0024] Additional aspects and advantages of the present application will be partially given in the following description, partially will become apparent from the following description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0025] The present application will be further described with reference to the drawings and examples, wherein:

[0026] Figure 1 It is a schematic view of the feeding and discharging device of the embodiment of the present application;

[0027] Figure 2 It is a schematic view of the transferring mechanism of the embodiment of the present application;

[0028] Figure 3 It is a schematic view of the assembly of the material box and the carrier plate of the embodiment of the present application;

[0029] Figure 4 It is a schematic view of the assembly of the first limiting member, the third limiting member and the carrier plate of the embodiment of the present application;

[0030] Figure 5 It is a schematic view of the material box of the embodiment of the present application.

[0031] Reference signs:

[0032] Rack 100, carrier plate 110, guide rail 111, first accommodating cavity 120, main body 130;

[0033] Transferring mechanism 200, transferring assembly 210, mounting member 211, bearing assembly 212, connecting member 213, bearing member 214, bearing surface 2141, suction hole 2142;

[0034] First driving member 220, second driving member 230, third driving member 240;

[0035] Material box group 300, material box 310, second accommodating cavity 311, bearing part 312, first bearing part 313, second bearing part 314, opening 315, main body part 316, first main body part 3161, second main body part 3162, mounting part 317, connecting part 318, base 319;

[0036] First limiting assembly 400, first limiting member 410, first limiting surface 411, second limiting surface 412, second limiting member 420, third limiting surface 421, third limiting member 430, positioning groove 431;

[0037] Sensor 500, material sheet 600. DETAILED DESCRIPTION

[0038] Embodiments of the present application are described below in the detailed description and illustrated in the accompanying drawings by which like or similar elements, structures and / or functions have been given the same reference numerals and functionalities (which are known to those skilled in the art) are not described in detail. The embodiments described below are exemplary only and are not intended to be limiting of the present application.

[0039] In the description of the present application, if the orientation description, such as up, down, front, back, left, right, and the like, is described, the orientation or position relationship based on the orientation or position relationship shown in the drawings is described for the convenience of describing the present application and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0040] In the description of the present application, if the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, and the like are understood as not including the number, above, below, and the like are understood as including the number. If the first, second, and the like are described, they are only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the order of technical features indicated.

[0041] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, and the like should be broadly understood, and those skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0042] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0043] Reference Figures 1 to 5The first aspect of the present application provides a feeding and discharging device, comprising a rack 100, a moving mechanism 200 and a plurality of box groups 300. The rack 100 comprises a main body and a plurality of loading plates 110 arranged in a vertical direction, and the rack 100 is provided with a first accommodating cavity 120. The moving mechanism 200 is accommodated in the first accommodating cavity 120, and the moving mechanism 200 comprises a moving assembly 210, which can move in the vertical direction. The moving assembly 210 comprises a mounting part 211 and a carrying assembly 212. The carrying assembly 212 comprises a connecting part 213 and a carrying part 214. The connecting part 213 has a set length, and the carrying part 214 is connected to the connecting part 213 and can move along the length direction of the connecting part 213. The carrying part 214 is used for carrying a sheet 600. The plurality of box groups 300 correspond to the loading plates 110 one by one and are installed on the loading plates 110. The box group 300 comprises a box 310, which is detachably connected to the loading plate 110. The box 310 is provided with a second accommodating cavity 311. The inner wall of the box 310 is further provided with a plurality of carrying parts 312 arranged in a vertical direction. The carrying parts 312 are used for carrying the sheet 600.

[0044] The loading plate 110 can move relative to the main body to move the box group 300 out of or into the first accommodating cavity 120, and the carrying part 214 can move in the length direction of the connecting part 213 to partially protrude into the second accommodating cavity 311. Specifically, a guide rail 111 is arranged between the loading plate 110 and the main body. The guide rail 111 can be driven by a motor to enable the box 310 to enter or exit the first accommodating cavity 120.

[0045] The plurality of box groups 300 are connected to different loading plates 110 arranged in a vertical direction. The loading plate 110 can move relative to the main body to move the corresponding box group 300 out of the first accommodating cavity 120. The box 310 is detachably connected to the loading plate 110. Therefore, after the sheets 600 in the boxes 310 on the same loading plate 110 are all detected, the loading plate 110 can move relative to the main body to move the corresponding box group 300 out of the first accommodating cavity 120, so as to replace the undetected box 310 with the detected box 310. At this time, the moving assembly 210 can detect the sheets 600 in the boxes 310 mounted on the remaining loading plates 110, without stopping the detection when the box 310 is replaced, thereby improving the detection efficiency.

[0046] Reference Figure 2In some embodiments, the transfer assembly 210 further comprises a mounting member 211, and the carrying assembly 212 is rotationally connected to the mounting member 211, and the rotation axis of the carrying assembly 212 is vertically arranged. The magazine set 300 comprises a plurality of magazines 310, and the plurality of magazines 310 are arranged at equal distances from the rotation axis of the carrying assembly 212 in the circumferential direction of the rotation axis, so that the carrying assembly 212 can correspond to different magazines 310 of the same magazine set 300 by rotation relative to the mounting member 211, thereby improving the space utilization of the feeding and discharging device. After the trays in the plurality of magazines 310 connected to the same carrier plate 110 are all detected and placed back into the magazines 310, the carrier plate 110 needs to be removed from the first accommodating cavity 120 and the plurality of magazines 310 are replaced, thereby effectively improving the magazine 310 replacement efficiency and reducing the number of times of moving the carrier plate 110. In addition, the plurality of magazines 310 are arranged at equal distances from the rotation axis of the carrying assembly 212, so that the carrying member 214 can move the same distance when moving along the length direction of the connecting member 213.

[0047] With reference to Figure 2 In some embodiments, the carrying member 214 is provided with a carrying surface 2141, and the carrying surface 2141 is provided with suction holes 2142 for connecting a vacuum source, and the carrying surface 2141 is used for carrying the wafer 600. When suction is performed, the carrying member 214 is moved to correspond to the wafer 600, and then continues to move in the vertical direction to contact the wafer 600. The wafer 600 is fixed to the carrying surface 2141 by suction of the suction holes 2142, so that the wafer 600 does not fall off due to relative movement between the carrying member 214 and the wafer 600 when the carrying member 214 moves. Then, the carrying member 214 moves relative to the connecting member 213 to move the wafer 600 out of the second accommodating cavity 311, thereby achieving the discharging of the wafer 600 to be detected. After the wafer 600 is detected, the wafer 600 is placed back into the magazine 310 in the reverse order of the above process, that is, the carrying member 214 moves relative to the connecting member 213 to move the wafer 600 into the second accommodating cavity 311 and place the wafer 600 on the idle carrying part 312, and then the suction of the wafer 600 by the suction holes 2142 is removed.

[0048] With reference to Figure 4In some embodiments, the loading and unloading device further includes two first limiting components 400. The first limiting components 400 are connected to the carrier plate 110 and include a first limiting member 410 and a second limiting member 420. The first limiting member 410 and the second limiting member 420 are spaced apart along a first direction, which is parallel to the radial direction of the rotation axis of the carrier component 212. The two first limiting components 400 are spaced apart along a second direction, which is perpendicular to the first direction. The first limiting components 400 are used to fix the material box 310, fixing its position in both the first and second directions to ensure that the position of the material box 310 is determined during loading and unloading. Furthermore, the material box 310 can move from a direction parallel to the rotation axis of the carrier component 212 to separate from the carrier plate 110, facilitating the loading and unloading of the material box 310.

[0049] Reference Figure 4 and Figure 5 Furthermore, the first limiting member 410 is provided with a first limiting surface 411 and a second limiting surface 412 that are perpendicular to each other, and the second limiting member 420 is provided with a third limiting surface 421. The first limiting surface 411 and the third limiting surface 421 are parallel to each other and have a predetermined distance between them. The second limiting surfaces 412 of the two first limiting members 410 face opposite directions, are parallel to each other, and have a predetermined distance between them. The material box 310 has a predetermined length and width, and the material box 310 includes a main body 316 and a base 319. The main body 316 is connected to... The base 319 has a main body 316 with a support part 312. The base 319 includes a mounting part 317 extending along the width direction of the material box 310 and a connecting part 318 connecting the two mounting parts 317. The mounting part 317 abuts between the first limiting surface 411 and the third limiting surface 421, and the two second limiting surfaces 412 abut against the surfaces of the mounting parts 317 facing each other, so as to realize the positioning of the material box 310 in the first direction and the second direction. In addition, multiple limiting surfaces with different set distances can be provided between each limiting member to realize the positioning of material boxes 310 of different sizes.

[0050] Reference Figure 4 In some embodiments, the loading and unloading device further includes a third limiting member 430, which is connected to the carrier plate 110. The third limiting member 430 is provided with a plurality of positioning grooves 431 at intervals along the radial direction of the rotation axis of the bearing assembly 212. The connecting part 318 is accommodated in the positioning groove 431 and abuts against the groove wall of the positioning groove 431. Specifically, the third limiting member 430 is disposed between two first limiting assemblies 400. The connecting part 318 is engaged with the positioning groove 431 to enhance the positioning capability of each limiting member for the material box 310, ensuring that the material box 310 does not shift during use. Furthermore, the connecting parts 318 provided for material boxes 310 of different sizes can be engaged with different positioning grooves 431 to achieve the positioning of the material box 310.

[0051] Referring to Figure 2 In some embodiments, the transferring mechanism 200 comprises a first driving member 220, a second driving member 230 and a third driving member 240, the first driving member 220 is connected to the rack 100, the transferring assembly 210 is connected to the first driving member 220, the first driving member 220 is capable of driving the transferring assembly 210 to move in the vertical direction, the second driving member 230 is connected to the mounting member 211, the carrying assembly 212 is connected to the second driving member 230, the second driving member 230 is capable of driving the carrying assembly 212 to rotate relative to the mounting member 211, the third driving member 240 is installed between the carrying member 214 and the connecting member 213, the third driving member 240 is capable of driving the carrying member 214 to move along the length direction of the connecting member 213. The first driving member 220 can be selected as a motor cooperating with a ball screw to realize the accurate positioning of the transferring assembly 210 in the vertical direction, the second driving member 230 can be selected as a motor, and the third driving member 240 can be selected as a linear motor module.

[0052] Referring to Figure 2 In some embodiments, the carrying mechanism comprises a plurality of carrying members 214, the plurality of carrying members 214 are arranged in the vertical direction. Specifically, two carrying members 214 are arranged in the embodiment, one carrying member 214 carries and adsorbs the to-be-detected tablet 600 to move to the detection table, and the other empty carrying member 214 adsorbs the tablet 600 on the carrying table which has been detected to realize the unloading of the detected tablet 600 and the feeding of the to-be-detected tablet 600, then the carrying mechanism moves the carrying member 214 carrying the detected tablet 600 back to the magazine 310 to unload, and the other idle carrying member 214 adsorbs the to-be-detected tablet 600, which is reciprocated, compared with the use of only one carrying member 214 to reciprocate between the detection table and the magazine 310 multiple times, the detection efficiency is improved.

[0053] Referring to Figure 3 In some embodiments, the magazine 310 has a set length and width, the magazine 310 comprises two first main body parts 3161 and second main body parts 3162 arranged in the width direction, the first main body part 3161 is provided with a plurality of first carrying parts 313 in the vertical direction, the second main body part 3162 is provided with a plurality of second carrying parts 314 in the vertical direction, each first carrying part 313 corresponds to each second carrying part 314, the first carrying part 313 and the second carrying part 314 are used to carry the tablet 600 together, and the opening 315 is defined between the corresponding first carrying part 313 and the second carrying part 314. When unloading, the carrying member 214 penetrates into the second accommodating cavity 311 from the gap between two tablets 600, then moves upward to penetrate through the opening 315 and lift and adsorb the tablet 600, and then the carrying member is driven by the second driving member 230 to move out of the second accommodating cavity 311 to realize the unloading of the tablet 600.

[0054] Referring to Figure 2 In some embodiments, the feeding and discharging device further comprises a sensor 500 connected to the moving mechanism 200 and facing the magazine 310, the sensor 500 being configured to detect the position and quantity of the sheet 600 in the magazine 310, so as to ensure that the carrier 214 can carry the sheet 600 to be detected. Specifically, the sensor 500 is connected to the connecting member 213, the second driving member 230 drives the carrier assembly 212 to rotate to drive the sensor 500 to correspond to different magazines 310, the carrier 214 is controlled by the third driving member 240, after determining that the corresponding carrier portion 312 carries the sheet 600, the third driving member 240 drives the carrier 214 to move a distance to correspond to the sheet 600, and then discharges the sheet 600.

[0055] The second aspect of the embodiments of the present application provides a detection system (not shown in the figure), which comprises a detection table, a camera and the feeding and discharging device provided in the first aspect of the embodiments. The detection table is configured to carry the sheet 600 to be detected. The camera is arranged above the detection table and faces the detection table. The carrier 214 can be moved to the detection table for discharging and receiving the sheet 600 after detection.

[0056] The embodiments of the present application are described in detail above in combination with the drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A loading and unloading device, characterized in that, include: The frame includes a main body and a plurality of carrier plates spaced apart along a vertical direction, and the frame is provided with a first receiving cavity; A transfer mechanism is housed within the first accommodating cavity. The transfer mechanism includes a transfer component that can move vertically. The transfer component includes a support component. The support component includes a connector and a support member. The connector has a set length. The support member is connected to the connector and can move along the length of the connector. The support member is used to support the sheet material. Multiple material box groups, each of the material box groups corresponding to and installed on the carrier plate, each material box group includes a material box, the material box is detachably connected to the carrier plate, the material box is provided with a second receiving cavity, and the inner wall of the material box is also provided with multiple support parts distributed at intervals along the vertical direction, the support parts being used to support the material sheet; The carrier plate is movable relative to the main body to move the material box assembly out of or into the first receiving cavity, and the carrier is movable along the length direction of the connector to partially protrude into the second receiving cavity; After all the sheets in the boxes on the same carrier plate have been tested, the carrier plate can move relative to the main body to move the corresponding box group out of the first receiving cavity and replace the untested boxes with the tested boxes. At this time, the transfer assembly can pick up and test the sheets in the boxes installed on the other carrier plates. It also includes two first limiting components, which are connected to the carrier plate. Each first limiting component includes a first limiting member and a second limiting member. Along a first direction, the first limiting member and the second limiting member are spaced apart. The first direction is parallel to the radial direction of the rotation axis of the bearing component. The two first limiting components are spaced apart along a second direction, which is perpendicular to the first direction. The first limiting components are used to fix the material box. The first limiting member is provided with a first limiting surface and a second limiting surface that are perpendicular to each other. The second limiting member is provided with a third limiting surface. The first limiting surface and the third limiting surface are parallel to each other and are separated by a predetermined distance. The second limiting surfaces of the two first limiting members face opposite directions. The two second limiting surfaces are parallel to each other and are separated by a predetermined distance. The material box has a predetermined length and width. The material box includes a main body and a base. The main body is connected to the base. The main body is provided with a supporting part. The base includes a mounting part extending along the width direction of the material box and a connecting part connecting the two mounting parts. The mounting part abuts between the first limiting surface and the third limiting surface. The two second limiting surfaces abut against the mutually facing surfaces of the mounting parts. It also includes a third limiting member, which is connected to the carrier plate. The third limiting member is provided with a plurality of positioning grooves at intervals along the radial direction of the rotation axis of the bearing assembly. The connecting part is accommodated in the positioning groove and abuts against the groove wall of the positioning groove.

2. The loading and unloading device according to claim 1, characterized in that, The transfer assembly further includes a mounting component, and the bearing assembly is rotatably connected to the mounting component. The rotation axis of the bearing assembly is vertically arranged. The material box group includes a plurality of material boxes, which are spaced apart in the circumferential direction around the rotation axis of the bearing assembly and are equidistant from the rotation axis. The bearing assembly can rotate relative to the mounting component to correspond to each of the material boxes.

3. The loading and unloading device according to claim 1, characterized in that, The carrier is provided with a bearing surface, and the bearing surface is provided with an adsorption hole. The adsorption hole is used to connect to a vacuum source, and the bearing surface is used to support the material sheet.

4. The loading and unloading device according to claim 2, characterized in that, The transfer mechanism includes a first driving member, a second driving member, and a third driving member. The first driving member is connected to the frame, and the transfer assembly is connected to the first driving member. The first driving member can drive the transfer assembly to move in a vertical direction. The second driving member is connected to the mounting member, and the load-bearing assembly is connected to the second driving member. The second driving member can drive the load-bearing assembly to rotate relative to the mounting member. The third driving member is installed between the load-bearing assembly and the connecting member, and the third driving member can drive the load-bearing assembly to move along the length direction of the connecting member.

5. The loading and unloading device according to claim 1, characterized in that, The material box has a set length and width. The material box includes two first main body parts and second main body parts that are spaced apart along the width direction. The first main body parts are provided with a plurality of first support parts along the vertical direction. The second main body parts are provided with a plurality of second support parts along the vertical direction. Each first support part corresponds to each second support part. The first support parts and the second support parts are used together to support the material sheet. An opening is defined between the corresponding first support parts and the second support parts.

6. The loading and unloading device according to claim 1, characterized in that, It also includes a sensor connected to the transfer mechanism and facing the material box, the sensor being used to detect the position and quantity of the material pieces in the material box.

7. A detection system, characterized in that, include: The testing station is used to hold the sample pieces to be tested; A camera is positioned above the detection platform and facing the detection platform; The loading and unloading device according to any one of claims 1 to 6, wherein the carrier is movable to the detection table for unloading and for receiving the detected sheet.

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