An oxygen intake self-controlled electric heating water washing exhaust gas processor

Abstract

This invention provides an electrically heated water-washing exhaust gas processor with automatic oxygen intake control, applicable to the field of exhaust gas treatment. It features a spray pipe located outside the burner, with an oxygen supply device connected between the burner and the spray pipe. One output of the oxygen supply device is connected to the burner's inlet, and the other output is connected to the spray pipe. A flow regulating valve connects the burner's output to the spray pipe. Electromagnetic three-way valves are installed at the top of both the burner and the spray pipe. A compensating burner is installed inside the spray pipe. A circulation pump is located outside the spray pipe, with both its input and output connected to the spray pipe. This design allows for functional enhancement of the burner and spray pipe during exhaust gas treatment based on the composition of the treated exhaust gas, improving its waste gas treatment efficiency. When the content of certain components in the waste gas is too high, the equipment makes adaptive adjustments to ensure thorough waste gas treatment.

Description

Technical Field

[0001] This application relates to the field of exhaust gas treatment, and in particular to an electrically heated water-washing exhaust gas treatment with automatic oxygen intake control. Background Technology

[0002] Organic waste gas in the semiconductor industry mainly comes from cleaning, homogenization, resist removal, etching, and developing processes. The solvents used in these processes, such as cleaning agents, developers, photoresists, and etching solutions, contain a large amount of organic components, mainly isopropanol and photoresist. During the process, most of these organic solvents are emitted as waste gas through volatilization.

[0003] Currently, the treatment of semiconductor acid waste gas in semiconductor manufacturing typically employs alkaline liquid spraying, also known as chemical scrubbing. Due to the inherent dissolving properties of liquids, they can better capture, settle, dissolve, and remove pollutants, thus meeting atmospheric emission standards. In contrast, organic waste gas is often treated through combustion.

[0004] Currently, semiconductor waste gas is mostly treated centrally. The components in the waste gas flow are often unevenly distributed. When the content of a certain component in the gas flow is too high during the operation of the exhaust gas treatment equipment, it may lead to insufficient treatment of that component by the equipment. For example, incomplete combustion of waste gas or insufficient neutralization of waste gas spray may result in the exhaust gas failing to meet standards. However, the current exhaust gas treatment equipment does not have an adaptive adjustment method for uneven distribution of components in the waste gas or for some components having excessively high content in the gas section. Summary of the Invention

[0005] The purpose of this application is to provide a waste gas treatment device for semiconductor production. Compared with the prior art, this application provides an electrically heated water-washing exhaust gas processor with automatic oxygen intake control, including a burner, a spray pipe on the outside of the burner, an oxygen supply device connected between the burner and the spray pipe, one output end of the oxygen supply device connected to the air inlet end of the burner, and the other output end of the oxygen supply device connected to the spray pipe; a flow regulating valve is connected between the output end of the burner and the spray pipe, and an electromagnetic three-way valve is installed at the top of both the burner and the spray pipe.

[0006] The spray pipe includes an insulation pipe, a partition ring is installed inside the insulation pipe, an exhaust pipe is installed at the top of the insulation pipe and extends into the partition ring, a multi-layer spray device is installed inside the spray pipe, the spray device includes a spray ring with a liquid supply pipe installed, and the spray ring is located between the partition ring and the insulation pipe, and a compensating burner is connected between the partition ring and the exhaust pipe.

[0007] A circulation pump is installed on the outside of the spray pipe, and both the input and output ends of the circulation pump are connected to the spray pipe.

[0008] This system can enhance the functionality of burners and spray pipes in the exhaust gas treatment equipment by detecting the composition of the treated exhaust gas, thereby improving its waste gas treatment efficiency. When the content of certain components in the waste gas is too high, the equipment can make adaptive adjustments to ensure thorough waste gas treatment.

[0009] Optionally, the spray pipe is provided with multiple packing rings, including activated carbon rings, and the packing rings are installed between two adjacent spray rings.

[0010] Optionally, a drain pipe is installed at the bottom of the spray pipe, and a liquid level sensor is installed at the lower end of the inner wall of the spray pipe.

[0011] Optionally, the oxygen supply equipment is connected to two air inlet pipes, which are used to supply industrial oxygen and clean air respectively. When the organic matter in the waste gas is not fully treated, industrial oxygen can be used as the oxygen source for the combustion reaction to improve combustion efficiency. Clean air is used during normal waste gas treatment to save economic costs.

[0012] Optionally, the compensating burner includes an annular burner with multiple evenly distributed grid flame-dividing rings on its upper side. These grid flame-dividing rings are staggered, and both the grid flame-dividing rings and the annular burner are fixedly connected to the isolation ring and the exhaust pipe. The compensating burner performs secondary combustion treatment on the sprayed exhaust gas, which can further reduce the organic matter content in the exhaust gas and reduce the moisture content of the exhaust gas flow. In this scheme, the compensating burner is equipped with multiple grid flame-dividing rings to disperse the oxygen flow flow input at its upper end, which can reduce the flame temperature after the combustion burner is ignited and prevent the exhaust gas flow temperature from overheating.

[0013] Optionally, a diversion ring connected to the output end of the oxygen supply equipment is installed at the top of the spray pipe. The gap between the diversion ring and the isolation ring and the exhaust pipe is matched. An airflow nozzle is installed at one end of the diversion ring inside the spray pipe. Oxygen is input to the compensating burner through the airflow nozzle to ensure its combustion efficiency.

[0014] Optionally, a control system is included, on which an exhaust gas component detection device is connected. The control system includes a processor, and the burner, spray pipe, oxygen supply equipment, spray equipment, compensating burner, and circulation pump are all signal-connected to the processor.

[0015] Optionally, the spray ring includes an annular support, a guide ring is installed inside the annular support, and multiple atomizing nozzles are installed on the annular support. The output end of the atomizing nozzles faces the outer wall of the partition ring at a 30° angle. The water mist sprayed by the atomizing nozzles covers the outer wall of the partition ring, thereby assisting in reducing the flame temperature when the compensating burner inside the partition ring is working.

[0016] An electrically heated water-washing exhaust gas processor with automatic oxygen intake control includes a method of use when exhaust gas is insufficiently treated by spraying:

[0017] A1, the exhaust gas components are detected by the exhaust gas component detection device. When the acidity or alkalinity of the exhaust gas is found to be unqualified, the processor can determine that the spray treatment is insufficient.

[0018] A2. At this time, the processor switches the spray pipe to the exhaust gas segmented treatment mode. After a certain amount of exhaust gas is input into the spray pipe, the exhaust end of the spray pipe is closed. At this time, the circulation pump works to make the exhaust gas in the spray pipe circulate within it and perform multiple cyclic filtration treatments for a certain period of time.

[0019] A3. After multiple filtration processes are completed, the exhaust end of the spray pipe is opened, and the oxygen supply equipment inputs pure air into the spray pipe to discharge the treated waste gas. Then, the previous step is repeated until the batch of waste gas is completely treated.

[0020] An electrically heated water-washing exhaust gas processor with automatic oxygen intake control includes a method of use when exhaust gas is incompletely combusted:

[0021] B1. If the exhaust gas composition is detected by the exhaust gas composition detection device and the organic matter content in the exhaust gas exceeds the standard, it is judged as incomplete combustion.

[0022] B2, at this time the processor controls the oxygen supply equipment to increase the oxygen supply to the burner, and performs exhaust gas treatment again;

[0023] B3. If the exhaust gas composition test still detects excessive levels of organic matter in the exhaust gas, then turn on the compensating burner in the spray pipe and supply oxygen to the spray pipe through the oxygen supply equipment, so that the compensating burner can perform secondary combustion treatment on the filtered airflow.

[0024] Compared to existing technologies, the advantages of this application are:

[0025] (1) This solution can enhance the function of the burner and spray pipe in the exhaust gas treatment equipment by detecting the composition of the exhaust gas after treatment during the exhaust gas treatment process, thereby improving its exhaust gas treatment efficiency. When the content of some components in the exhaust gas is too high, the equipment can be adjusted to ensure that the exhaust gas is fully treated.

[0026] (2) The oxygen supply equipment is connected to two air inlet pipes, which are used to provide industrial oxygen and pure air respectively. When the organic matter in the waste gas is not fully treated, industrial oxygen can be used as the oxygen source for combustion reaction to improve combustion efficiency. Pure air is used during normal waste gas treatment to save economic costs.

[0027] (3) The compensating burner includes an annular burner with multiple evenly distributed grid flame distribution rings on the upper side of the annular burner. The multiple grid flame distribution rings are staggered. Both the grid flame distribution rings and the annular burner are fixedly connected to the partition ring and the exhaust pipe. The compensating burner performs secondary combustion treatment on the sprayed exhaust gas. On the one hand, it can further reduce the organic matter content in the exhaust gas, and on the other hand, it can reduce the moisture content of the exhaust gas. The compensating burner in this scheme is equipped with multiple grid flame distribution rings to disperse the oxygen gas flow input at its upper end, which can reduce the flame temperature after the combustion burner is ignited and avoid the exhaust gas temperature from being too high.

[0028] (4) A diversion ring connected to the output end of the oxygen supply equipment is installed at the top of the spray pipe. The gap between the diversion ring and the isolation ring and the exhaust pipe is matched. An airflow nozzle is installed at one end of the diversion ring inside the spray pipe. Oxygen is input to the compensating burner through the airflow nozzle to ensure its combustion efficiency.

[0029] (5) The spray ring includes an annular support, a guide ring is installed inside the annular support, and multiple atomizing nozzles are installed on the annular support. The output end of the atomizing nozzles faces the outer wall of the partition ring at a 30° angle. The water mist sprayed by the atomizing nozzles covers the outer wall of the partition ring, thereby assisting the reduction of flame temperature when the compensation burner inside the partition ring is working. Attached Figure Description

[0030] Figure 1 This is a perspective view of the present application;

[0031] Figure 2 This is a schematic diagram of the system in this application;

[0032] Figure 3 This is a cross-sectional view of the spray pipe in this application;

[0033] Figure 4 This is a flowchart illustrating the enhanced use of the spray pipes in this application;

[0034] Figure 5 This is a flowchart illustrating the enhanced use of the burner in this application;

[0035] Figure 6 This is a partial perspective view of the partition ring of this application;

[0036] Figure 7 This is a partial perspective view of the compensated burner in this application;

[0037] Figure 8 This is a half-sectional view of the compensated burner in this application.

[0038] Explanation of the labels in the diagram:

[0039] 1. Burner, 2. Spray pipe, 201. Heat insulation pipe, 202. Isolation ring, 203. Exhaust pipe, 3. Oxygen supply equipment, 4. Spray ring, 5. Compensation burner. Detailed Implementation

[0040] The embodiments will be described clearly and completely with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments in this application without creative effort are within the scope of protection of this application.

[0041] Example 1:

[0042] This invention provides an electrically heated water-washing exhaust gas processor with automatic oxygen intake control. Please refer to [link / reference]. Figure 1-3 It includes burner 1, which is installed by a person skilled in the art using a suitable burner, such as a TO direct-fired furnace;

[0043] A spray pipe 2 is provided on the outside of the burner 1. An oxygen supply device 3 is connected between the burner 1 and the spray pipe 2. One output end of the oxygen supply device 3 is connected to the air inlet end of the burner 1, and the other output end of the oxygen supply device 3 is connected to the spray pipe 2. A flow regulating valve is connected between the output end of the burner 1 and the spray pipe 2. Solenoid three-way valves are installed at the top of both the burner 1 and the spray pipe 2.

[0044] The oxygen supply device 3 is used to input clean air or industrial oxygen into the burner 1 and the spray pipe 2. The oxygen supply device 3 is connected to two air inlet pipes, which are used to supply industrial oxygen and clean air respectively. When the organic matter in the waste gas is not fully treated, industrial oxygen can be used as the oxygen source for the combustion reaction to improve the combustion efficiency. Clean air is used during normal waste gas treatment to save economic costs.

[0045] Please see Figure 2-3 The spray pipe 2 includes a heat insulation pipe 201, a partition ring 202 installed inside the heat insulation pipe 201, an exhaust pipe 203 installed at the top of the heat insulation pipe 201, the exhaust pipe 203 extending into the partition ring 202, and a multi-layer spraying device installed inside the spray pipe 2. The spraying device includes a spray ring 4 with a liquid supply pipe installed. The liquid supply pipe is connected to an external liquid supply system, and an acid-base neutralizing agent is introduced into the spraying device through the liquid supply pipe. The spray ring 4 is located between the partition ring 202 and the heat insulation pipe 201.

[0046] The spray ring 4 includes an annular support, a guide ring is installed inside the annular support, and multiple atomizing nozzles are installed on the annular support. The output end of the atomizing nozzles faces the outer wall of the partition ring 202 at a 30° angle. The water mist sprayed by the atomizing nozzles covers the outer wall of the partition ring 202, thereby assisting in reducing the flame temperature when the compensating burner 5 inside the partition ring 202 is working.

[0047] A circulation pump is installed on the outside of the spray pipe 2, with its input and output ends connected to the air inlet and exhaust ends of the spray pipe 2, respectively. Multiple packing rings, including activated carbon rings, are installed inside the spray pipe 2, and these packing rings are installed between adjacent spray pipes 2. A drain pipe and a liquid level sensor are installed at the bottom of the spray pipe 2. The liquid level sensor detects the liquid level at the bottom of the spray pipe 2, and can promptly issue an alarm or increase the efficiency of the liquid pump connected to the drain pipe when excessive liquid accumulates at the bottom of the spray pipe 2.

[0048] Please see Figure 6-8 A compensating burner 5 is connected between the isolation ring 202 and the exhaust pipe 203. The compensating burner 5 includes an annular burner. Multiple evenly distributed grid flame-dividing rings are provided on the upper side of the annular burner. The multiple grid flame-dividing rings are staggered. Both the grid flame-dividing rings and the annular burner are fixedly connected to the isolation ring 202 and the exhaust pipe 203. The compensating burner 5 performs secondary combustion treatment on the sprayed exhaust gas. On the one hand, it can further reduce the organic matter content in the exhaust gas. On the other hand, it can reduce the moisture content of the exhaust gas. The compensating burner 5 in this scheme is equipped with multiple grid flame-dividing rings to disperse the oxygen gas flow input at its upper end, which can reduce the flame temperature after the combustion burner is ignited and avoid the exhaust gas temperature from overheating.

[0049] The top of the spray pipe 2 is equipped with a diversion ring that is connected to the output end of the oxygen supply device 3. The gap between the diversion ring and the isolation ring 202 and the exhaust pipe 203 is matched. An airflow nozzle is installed at one end of the diversion ring inside the spray pipe 2. Oxygen is input to the compensating burner 5 through the airflow nozzle to ensure its combustion efficiency.

[0050] It also includes a control system, on which exhaust gas composition detection equipment is connected. The control system includes a processor, and burner 1, spray pipe 2, oxygen supply equipment 3, spray equipment, compensating burner 5 and circulation pump are all connected to the processor by signal. The processor is also equipped with a communication module, an alarm module and a detection module. A pressure sensor, a flow sensor and a temperature sensor are installed on the spray pipe 2, and the pressure sensor, flow sensor and temperature sensor are all connected to the detection module by signal.

[0051] The pressure sensor is used to detect the air pressure inside the spray pipe 2, the temperature sensor is used to detect the flame temperature when the compensating burner 5 is working, and the flow sensor is used to detect the air intake of the spray pipe 2 after the flow regulating valve is adjusted.

[0052] In normal use, this solution uses burner 1 to burn the exhaust gas and oxygen supply equipment 3 to supply oxygen to burner 1. The exhaust gas after being treated by burner 1 enters the spray pipe and is treated by spraying.

[0053] When the airflow flows in the spray pipe 2, it first flows through the channel between the heat insulation pipe 201 and the isolation ring 202 and is sprayed by the spraying equipment. Then the airflow flows into the exhaust pipe through the channel between the isolation ring 202 and the exhaust pipe 203 and is finally discharged through the exhaust pipe.

[0054] Please see Figure 4 When the exhaust gas is not adequately treated by the spray, the enhanced usage method of spray pipe 2 is as follows:

[0055] A1. When the acidity or alkalinity of the exhaust gas is found to be unqualified in the exhaust gas detection of the exhaust gas treatment system, it can be judged that the spray treatment is insufficient.

[0056] A2. At this time, the processor switches the spray pipe 2 to the exhaust gas segmented treatment mode. The electromagnetic three-way valve at the exhaust end of the spray pipe 2 switches the exhaust branch, so that the exhaust end of the spray pipe 2 is connected to the circulating pump. The flow regulating valve at the air supply end of the spray pipe 2 adjusts the air intake rate of the spray pipe 2. After a certain amount of exhaust gas is input into the spray pipe 2, the flow regulating valve is closed to stop the air intake of the spray pipe 2. Then, the air supply end of the circulating pump is connected to the bottom end of the spray pipe 2. At this time, the circulating pump works, so that the exhaust gas in the spray pipe 2 undergoes multiple circulation filtration treatments for a certain period of time (the working parameters of the circulating pump and the circulation filtration time are set by those skilled in the art according to actual needs).

[0057] A3. After multiple filtration treatments are completed, the electromagnetic three-way valve at the exhaust end of spray pipe 2 switches the exhaust branch of spray pipe 2, and the oxygen supply equipment 3 inputs pure air into spray pipe 2, so that the treated waste gas in spray pipe 2 is discharged. Then the flow regulating valve is opened to repeat the previous step (when spray pipe 2 is performing segmented waste gas treatment, burner 1 is simultaneously performing intermittent combustion to ensure that the rate of segmented waste gas treatment in spray pipe 2 matches the exhaust efficiency of burner 1) until the batch of waste gas is completely treated.

[0058] Please see Figure 5 When the exhaust gas is not fully combusted, the enhanced usage method for burner 1 is as follows:

[0059] B1. If the organic matter content in the exhaust gas is found to be excessive during the exhaust gas detection of the exhaust gas treatment system, it is judged as incomplete combustion.

[0060] B2, at this time the processor controls the oxygen supply device 3 to increase the oxygen supply to the burner 1 (using industrial oxygen supply);

[0061] B3. If the exhaust gas composition test still detects that the organic matter content in the exhaust gas exceeds the standard, the compensating burner 5 in the spray pipe 2 is turned on, and the oxygen supply equipment 3 supplies oxygen (using pure air) into the spray pipe 2, so that the compensating burner 5 performs secondary combustion treatment on the filtered airflow.

[0062] When the acidity, alkalinity, and organic matter content in the exhaust gas are all unqualified, the enhanced usage method for the equipment is as follows:

[0063] C1, In the exhaust gas detection of the waste gas treatment system, it was found that the organic matter content and acidity / alkalinity of the waste gas exceeded the standard;

[0064] C2. At this time, after the processor adjusts the spray pipe 2 to the exhaust gas segmentation treatment mode, it turns on the compensation burner 5. At this time, the oxygen supply device 3 uses industrial oxygen to supply oxygen to the spray pipe 2, and at the same time adjusts the working efficiency of the circulation pump. The air pressure sensor monitors the air pressure inside the spray pipe 2. When the air pressure inside the spray pipe 2 exceeds the set value, the processor controls the equipment to perform step A3.

[0065] If the composition of the discharged gas still fails to meet the standards after the above steps, the equipment will trigger a maintenance alarm.

[0066] This solution enables the burner 1 and spray pipe in the exhaust gas treatment equipment to be functionally enhanced based on the composition detection of the treated exhaust gas during the exhaust gas treatment process, thereby improving their exhaust gas treatment efficiency. When the content of some components in the exhaust gas is too high, the equipment can be adaptively adjusted to ensure that the exhaust gas is fully treated.

[0067] The above description is only the best implementation method adopted in this application in combination with current practical needs, but the scope of protection of this application is not limited thereto.

Claims

1. An oxygen-amount self-controlling electric heating water washing type tail gas treater, comprising a burner (1), wherein a waste gas inlet pipe is connected to the burner (1), characterized in that, The burner (1) is provided with a spray pipe (2) outside, the burner (1) and spray pipe (2) are connected with oxygen supply equipment (3), one output end of the oxygen supply equipment (3) is connected with the air inlet end of the burner (1), the other output end of the oxygen supply equipment (3) is connected with the spray pipe (2), the output end of the burner (1) and the spray pipe (2) are connected with flow regulating valve, the top end of the burner (1) and the spray pipe (2) are all installed with electromagnetic three-way valve. The spray pipe (2) comprises a heat insulation pipe (201), a partition ring (202) is installed in the heat insulation pipe (201), an exhaust pipe (203) is installed at the top end of the heat insulation pipe (201), the exhaust pipe (203) extends into the partition ring (202), a plurality of layers of spray equipment are installed in the spray pipe (2), the spray equipment comprises a spray ring (4) provided with a liquid supply pipe, and the spray ring (4) is located between the partition ring (202) and the heat insulation pipe (201), the partition ring (202) and the exhaust pipe (203) are connected with a compensation burner (5). The outer side of the spray pipe (2) is provided with a circulating pump, the input end and the output end of the circulating pump are connected with the air inlet end and the exhaust end of the spray pipe (2) respectively, the top end of the spray pipe (2) is installed with a shunt ring connected with the output end of the oxygen supply equipment (3), the shunt ring is matched with the gap position between the partition ring (202) and the exhaust pipe (203), and the shunt ring is located in one end of the spray pipe (2) and is installed with an airflow nozzle.

2. The oxygen-amount self-controlled electric heating water washing type tail gas treater according to claim 1, characterized in that, A plurality of filler rings are arranged in the spray pipe (2), the filler ring comprises an activated carbon ring, and the filler ring is installed between two adjacent spray rings (4).

3. The oxygen-amount self-controlled electric heating water washing type tail gas treater according to claim 1, characterized in that, A liquid discharge pipe is installed at the bottom end of the spray pipe (2), and a liquid level sensor is installed at the bottom end of the spray pipe (2).

4. The oxygen-amount self-controlled electric heating water washing type tail gas treater according to claim 1, characterized in that, Two air inlet pipes are connected to the oxygen supply equipment (3), and the two air inlet pipes are used to provide industrial oxygen and pure air respectively.

5. The oxygen-amount self-controlled electrically heated water scrubbing type tail gas treater according to claim 1, characterized in that, The compensation burner (5) comprises a ring-shaped fire row, the ring-shaped fire row comprises a fixed ring, a plurality of circumferentially distributed electric igniters are installed on the fixed ring, a plurality of evenly distributed grid flame dividing rings are arranged on the upper side of the ring-shaped fire row, the plurality of grid flame dividing rings are staggered, and the grid flame dividing rings and the ring-shaped fire row are fixedly connected with the partition ring (202) and the exhaust pipe (203).

6. The oxygen-amount self-controlled electrically heated water scrubbing type tail gas treater according to claim 1, characterized in that, A control system is arranged, the control system is connected with tail gas component detection equipment, the control system comprises a processor, and the burner (1), the spray pipe (2), the oxygen supply equipment (3), the spray equipment, the compensation burner (5) and the circulating pump are signal connected with the processor.

7. The oxygen-amount self-controlled electrically heated water scrubbing type tail gas treater according to claim 1, characterized in that, The spray ring (4) comprises a ring-shaped support, a flow guide ring is installed in the ring-shaped support, a plurality of atomizing nozzles are installed on the ring-shaped support, and the output end of the atomizing nozzle is inclined at an angle of 30° to the outer wall of the partition ring (202).

8. The use of the oxygen supply amount self-controlling type electrically heated water scrubbing type exhaust gas processor according to claim 6, characterized by, The use method when the exhaust gas is not fully sprayed: A1, the tail gas components discharged by the detection device are detected by the tail gas component detection equipment, when it is detected that the waste gas is not qualified in terms of acid-base property, the processor can judge that the spraying treatment is insufficient; A2, at this time the processor will spray pipe (2) switching to exhaust gas section processing mode, a certain amount of exhaust gas input in the spray pipe, the exhaust end of the spray pipe (2) closed, at this time the circulating pump, the exhaust gas in the spray pipe (2) in the circulation flow, a certain time of multiple cycle leaching treatment; A3, multiple leaching treatment end, the exhaust end of the spray pipe (2) open, oxygen supply equipment (3) to the input of the spray pipe (2) in the pure air, the exhaust gas in the spray pipe (2) after treatment, then repeat the previous step, until the batch of exhaust gas completely end.

9. The method of use of claim 8, wherein, Including the use of the method when the exhaust gas is not fully combusted: B1, through the exhaust composition detection equipment detection device exhaust composition, detection of organic matter content in the exhaust gas exceeds the standard, then judge for combustion is not sufficient; B2, at this time the processor control oxygen supply equipment (3) increase the oxygen supply to the burner (1), again for exhaust gas treatment work; B3, if the exhaust composition detection still detect the organic matter content in the exhaust gas exceeds the standard, open the compensation burner (5) in the spray pipe (2) again, and make the oxygen supply equipment (3) to the input of the spray pipe, make the compensation burner (5) to the leaching after the airflow secondary combustion treatment.

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