Container storage apparatus

Abstract

A container storage apparatus (1) is provided with a container storage rack (10) having a plurality of container placement portions (11) arranged in a first direction (X) and on which a container (4) is placed, and is provided with a first sensor group (31), a second sensor group (32), a third sensor group (33), and a fourth sensor group (34), the first sensor group (31) being composed of a plurality of oxygen concentration sensors (20) arranged in the first direction (X) on a first side (Y1) of the second direction with respect to the container (4), the second sensor group (32) being composed of a plurality of oxygen concentration sensors (20) arranged in the first direction (X) on a second side (Y2) of the second direction with respect to the container (4), the third sensor group (33) being composed of a plurality of oxygen concentration sensors (20) arranged in the first direction (X) on the first side (Y1) of the second direction of the first sensor group (31), and the fourth sensor group (34) being composed of a plurality of oxygen concentration sensors (20) arranged in the first direction (X) on the second side (Y2) of the second direction of the second sensor group (32).

Description

Technical Field

[0001] The present invention relates to a container storage device having a container storage rack and an inactive gas supply device, the container storage rack having a plurality of container holding sections for holding containers respectively, and the inactive gas supply device supplying inactive gas to each container placed in the container holding section. Background Technology

[0002] An example of such a container storage device is disclosed in International Publication No. 2015 / 045582 (Patent Document 1). In the following description of the background art, the symbols and names from Patent Document 1 are referenced in parentheses.

[0003] The purification device described in Patent Document 1 is configured in a storage container (2) installed in a clean room. The internal space (6) of the storage container (2) is divided into a working area (12) and a non-working area (14). A partition (30) is provided at the boundary between the working area (12) and the non-working area (14) to restrict the intrusion of purified gas from the non-working area (14) into the working area (12). When an operator enters the internal space (6), the purification device stops purification in the working area (12). The oxygen concentration in the working area (12) is monitored, and if the oxygen concentration in the working area (12) obtained from the oxygen concentration sensor (54) is below a specified value, the supply of purified gas in the non-working area (14) is also stopped. Summary of the Invention

[0004] In the technology described in Patent Document 1, purification of the work area is stopped when an operator enters the interior space to ensure the operator's safety. Furthermore, purification of non-work areas is stopped when the oxygen concentration in the work area falls below a predetermined value, thereby attempting to restore the oxygen concentration in the work area. However, for example, in container racks, there are racks suspended from the ceiling and supported by multiple container holders arranged in an array. In such container racks, depending on the degree of leakage of inert gases from the containers, there are sometimes areas where the oxygen concentration locally decreases. In such cases, the operator cannot enter these areas where the oxygen concentration has decreased. Therefore, in order for the operator to perform work on such container racks, it is necessary to appropriately detect the presence or absence of areas where the oxygen concentration locally decreases. However, Patent Document 1 does not disclose the detection of localized oxygen concentration decreases around such ceiling-suspended container racks.

[0005] Therefore, it is desirable to realize a container storage device that can properly sense the oxygen concentration around a container storage rack that is suspended from the ceiling, supported, and arranged with multiple container holders.

[0006] Given that the aforementioned container storage equipment has the following structural features,

[0007] A container storage device, comprising:

[0008] A container rack, comprising multiple container holding sections for holding containers; and

[0009] The inactive gas supply device supplies inactive gas to each of the containers placed in the container holding section.

[0010] in,

[0011] The container rack is suspended from the ceiling and supported, and has multiple container holding sections arranged in a first horizontal direction.

[0012] In a vertical view along the vertical direction, the direction orthogonal to the first direction is designated as the second direction; one side of the second direction is designated as the first side of the second direction; the other side of the second direction is designated as the second side of the second direction; and the height by which the container placed on the container mounting portion overlaps with the container is designated as the overlap height.

[0013] The container storage equipment includes:

[0014] The first sensor group consists of a plurality of oxygen concentration sensors arranged at the overlap height and along the first direction on the first side of the second direction relative to the container;

[0015] The second sensor group consists of a plurality of oxygen concentration sensors arranged at the overlap height and on the second side of the second direction relative to the container along the first direction;

[0016] The third sensor group comprises a plurality of oxygen concentration sensors arranged at a first predetermined height below the overlap height and along the first direction on the first side of the second direction of the first sensor group; and

[0017] The fourth sensor group consists of a plurality of oxygen concentration sensors arranged at a second predetermined height below the overlap height and along the first direction on the second side of the second direction of the second sensor group.

[0018] In container storage equipment comprising a container rack with multiple container holding sections and an inert gas supply device for supplying inert gas to each container in the container holding section, the oxygen concentration may locally decrease depending on the degree of leakage of inert gas from the containers. In this case, the operator cannot enter the area where the oxygen concentration has decreased. In particular, in container racks suspended from the ceiling, the oxygen concentration may sometimes locally decrease near the head of an operator approaching the container rack. In such cases, it is necessary to appropriately sense this and issue warnings. According to this structure, it is possible to appropriately sense the oxygen concentration around a container rack suspended from the ceiling, assuming the operator's head approaches from below.

[0019] Further features and advantages of the technology disclosed herein will become clearer from the following description of exemplary and non-limiting embodiments illustrated in the accompanying drawings. Attached Figure Description

[0020] Figure 1 This is a perspective view of the container storage equipment according to this embodiment;

[0021] Figure 2 The container storage rack is viewed from the first direction to the second side;

[0022] Figure 3 The container storage rack is viewed from the second direction from the first side;

[0023] Figure 4 The container storage rack is viewed from the second direction and second side;

[0024] Figure 5 This is a block diagram showing the functional units related to the output of an alarm generated by the control device;

[0025] Figure 6 This is a configuration diagram of the human body sensing sensor;

[0026] Figure 7 This is an example of setting up a monitoring area;

[0027] Figure 8 This is a diagram illustrating an example of the sensing range of a human body sensing sensor;

[0028] Figure 9 This is an example of a mapping displayed on a display device;

[0029] Figure 10 This is a diagram showing an item conveying device for transporting containers. Detailed Implementation

[0030] The embodiments of the container storage equipment will be described with reference to the accompanying drawings. In this embodiment, an example will be provided where the container storage equipment is installed in a downward-flowing cleanroom where clean air flows downward from the ceiling to the floor.

[0031] like Figure 1 As shown, the container storage device 1 includes a container storage rack 10 and an inactive gas supply device 45. The container storage rack 10 is a rack for storing containers 4. In this embodiment, an open-type rack without a surrounding wall is illustrated for the container storage rack 10. The container storage rack 10 includes a plurality of container holding sections 11 for holding containers 4 respectively. Furthermore, the inactive gas supply device 45 supplies inactive gas to each container 4 placed in the container holding section 11.

[0032] In this embodiment, a specific direction along the horizontal direction (in this embodiment, the length direction of the container storage rack 10 along the horizontal direction) is designated as the first direction X. A direction orthogonal to the first direction X in a vertical view along the vertical direction is designated as the second direction Y. A direction orthogonal to both the first direction X and the second direction Y, i.e., the vertical direction, is designated as the third direction Z. Furthermore, in this embodiment, one side of the first direction X is designated as the first side X1, and the other side of the first direction X is designated as the second side X2. Similarly, in this embodiment, one side of the second direction Y is designated as the first side Y1, and the other side of the second direction Y is designated as the second side Y2.

[0033] The container storage rack 10 is configured to be suspended from the ceiling. The container storage rack 10 includes a pair of suspension portions 10A arranged separately in a first direction X. These suspension portions 10A are connected to a support (not shown) installed, for example, on the ceiling of a cleanroom, thereby suspending the container storage rack 10 from the ceiling. The pair of suspension portions 10A are located above the container holding portion 11 of the container storage rack 10.

[0034] In this embodiment, such as Figure 6 As shown, a positioning pin 11a is provided in the container holding part 11 to engage with the bottom of the container 4 for positioning the container 4. Furthermore, a gas supply part 11b is also provided in the container holding part 11 for connecting to a connection port provided at the bottom of the container 4 to supply inactive gas to the container 4. In addition, a plurality of container holding parts 11 are arranged in a first direction X. The container storage rack 10 of this embodiment has four container holding parts 11. Therefore, a maximum of four containers 4 can be stored in one container storage rack 10.

[0035] In this embodiment, container 4 is a container that can be sealed in a way that makes its internal space airtight. Inside container 4, for example, a semiconductor substrate, a reticle substrate, etc. are housed. In this embodiment, container 4 has a main body and a cover that is detachable from the main body, and is configured such that the internal space of container 4 is airtight when the cover is attached to the main body.

[0036] The inactive gas supply device 45 is configured to supply an inactive gas to the interior of the container 4, which is housed in a plurality of container holding sections 11, via a gas supply section (not shown). An inactive gas is a gas with low reactivity to the contents contained in the container 4 (that does not substantially produce a problematic chemical reaction). In this embodiment, nitrogen is used as the inactive gas. Alternatively, instead of nitrogen, the inactive gas may be carbon dioxide, or rare gases such as helium, neon, argon, krypton, xenon, or radon.

[0037] The inactive gas supply device 45 includes a first pipe 45a connected to a source of inactive gas and a second pipe 45b connecting the first pipe 45a and the container 4. In this embodiment, the first pipe 45a is arranged to extend in a third direction Z, and the second pipe 45b is arranged to branch from the first pipe 45a and extend in a first direction X and a second direction Y. Furthermore, the second pipe 45b is connected to the gas supply section 11b provided in the container holding section 11.

[0038] The inactive gas supply device 45 also includes a flow regulating device 45c, which can regulate the flow rate of the inactive gas in the first pipe 45a and the second pipe 45b. By regulating the flow rate of the inactive gas in the first pipe 45a and the second pipe 45b using the flow regulating device 45c, the supply flow rate of the inactive gas to the container 4 can be regulated. Figure 1 In this configuration, the flow regulating device 45c is installed on the first piping 45a; however, the flow regulating device 45c can also be installed on the second piping 45b. Inactive gas from the inactive gas supply device 45 is supplied to each container 4, creating a positive pressure inside the container 4. Furthermore, when the internal pressure of the container 4 exceeds a certain level, a portion of the inactive gas inside the container 4 is discharged to the outside of the container 4 (the storage space 90 of the container storage equipment 1 in the cleanroom). The air in the storage space 90, including the inactive gas discharged from the container 4, flows downwards from the ceiling side towards the floor side according to the circulation of clean air within the cleanroom.

[0039] The container storage device 1 includes multiple oxygen concentration sensors 20. Each oxygen concentration sensor 20 detects the oxygen concentration at its respective location. The oxygen concentration sensors 20 can be zirconia type, magnetic type, semiconductor laser spectroscopy type, electrode type, etc., and are not limited to these types; any method is acceptable. In this embodiment, the container storage device 1 includes a first sensor group 31, a second sensor group 32, a third sensor group 33, and a fourth sensor group 34, each composed of multiple oxygen concentration sensors 20.

[0040] The first sensor group 31 consists of a plurality of oxygen concentration sensors 20 arranged at an overlap height S and along a first direction X on a first side Y1 in a second direction relative to the container 4. Figure 2 The image shows the container rack 10 as viewed from the second side X2 in the first direction. Figure 2 As shown, the overlap height S refers to the height at which the container rack 10 overlaps with the container 4 placed on the container placement section 11 when viewed along the first direction X. That is, it is the height along the third direction Z from the lower end 4B to the upper end 4U of the container 4 placed on the container placement section 11. In this embodiment, for example, as... Figure 2 As shown, the second direction, first side Y1 corresponds to the right side of the left and right sides in the second direction Y when observing the container rack 10 towards the first direction, first side X1. The arrangement along the first direction X refers to the arrangement of the plurality of oxygen concentration sensors 20 constituting the first sensor group 31 along the first direction X. Therefore, the first sensor group 31 is positioned such that, when observing the container rack 10 along the first direction X, it is within the height range of the lower end 4B to the upper end 4U of the container 4 placed on the container mounting section 11 in the third direction Z, and, when observing the container rack 10 towards the first direction, first side X1, it is positioned on the right side of the container rack 10 in the second direction Y.

[0041] Here, in Figure 3 The image shows the container storage rack 10 as viewed from the first side Y1 in the second direction. In this embodiment, as... Figure 3 As shown, the first sensor group 31 includes two oxygen concentration sensors 20 arranged along the first direction X. Furthermore, in this example, as... Figure 3 As shown, the oxygen concentration sensor 20 constituting the first sensor group 31 is disposed at the end of the container storage rack 10 on the first side X1 and the end of the container on the second side X2 in the first direction. Furthermore, the first sensor group 31 may also include three or more oxygen concentration sensors 20 arranged along the first direction X. In this case, the spacing between two adjacent oxygen concentration sensors 20 in the first sensor group 31 in the first direction X is greater than... Figure 3 The example shown is short.

[0042] The second sensor group 32 consists of a plurality of oxygen concentration sensors 20 arranged at an overlap height S and along the first direction X on the second side Y2 relative to the container 4 in the second direction. In this embodiment, for example, as Figure 2 As shown, the second direction, second side Y2 corresponds to the left of the left and right sides in the second direction Y when observing the container rack 10 towards the first direction, first side X1. Therefore, the second sensor group 32 is positioned such that, when observing the container rack 10 along the first direction X, it is within the height range of the lower end 4B to the upper end 4U of the container 4 placed on the container mounting section 11 in the third direction Z, and, when observing the container rack 10 towards the first direction, first side X1, it is positioned to the left of the container rack 10 in the second direction Y. Thus, the first sensor group 31 and the second sensor group 32 are arranged separately on both sides of the second direction Y, separated by the container rack 10.

[0043] Here, in Figure 4 The image shows the container storage rack 10 as viewed from the second side Y2 in the second direction. In this embodiment, as... Figure 4 As shown, the second sensor group 32 includes two oxygen concentration sensors 20 arranged along the first direction X. Furthermore, in this example, as... Figure 4 As shown, the oxygen concentration sensor 20 constituting the second sensor group 32 is disposed at the end of the container storage rack 10 on the first side X1 and the end of the container on the second side X2 in the first direction. Furthermore, the second sensor group 32 may also include three or more oxygen concentration sensors 20 arranged along the first direction X. In this case, the spacing between two adjacent oxygen concentration sensors 20 in the second sensor group 32 in the first direction X is greater than... Figure 4 The example shown is short.

[0044] The third sensor group 33 consists of a plurality of oxygen concentration sensors 20 arranged at a first predetermined height T1 below the overlap height S and along the first direction X on the first side Y1 of the second direction of the first sensor group 31. Figure 2 As shown, the first predetermined height T1 is a height set below the lower end 4B of the container 4 placed on the container mounting section 11 in the third direction Z. In this embodiment, the first predetermined height T1 is set such that the distance from the lower end 4B of the container 4 in the third direction Z is less than or equal to the length of the overlap height S. Furthermore, in the illustrated example, the first predetermined height T1 is set as the height from the floor surface U. Figure 2As shown, the first side Y1 of the second direction of the first sensor group 31 refers to the region at the center of the container rack 10 in the second direction Y, which is farther away from the first sensor group 31. Therefore, when the third sensor group 33 observes the container rack 10 along the first direction X, it is positioned at a first predetermined height T1 below the overlap height S set in the third direction Z, at the center of the container rack 10 in the second direction Y, which is farther away from the first sensor group 31.

[0045] In this embodiment, as Figure 3 As shown, the third sensor group 33 includes two oxygen concentration sensors 20 arranged along the first direction X. Furthermore, in this example, as... Figure 3 As shown, the oxygen concentration sensor 20 constituting the third sensor group 33 is disposed at the end of the container storage rack 10 on the first side X1 in the first direction and the end of the container storage rack 10 on the second side Y1 in the first direction X1 and the end of the container storage rack 10 on the second side X2 in the first direction, respectively. Moreover, each oxygen concentration sensor 20 constituting the third sensor group 33 is supported on the container storage rack 10 by the support member 12. In this example, each support member 12 has: a first extension 12A extending downward in the third direction Z from the end of the container storage rack 10 on the second side Y1 in the first direction X1 or the end of the container storage rack 10 on the second side X2 in the first direction; and a second extension 12B extending from the lower end of the first extension 12A toward the second side Y1 in the second direction. In this example, the oxygen concentration sensor 20, which constitutes the third sensor group 33, is disposed at the front end of the first side Y1 in the second direction of the second extension 12B.

[0046] The fourth sensor group 34 consists of a plurality of oxygen concentration sensors 20 arranged at a second predetermined height T2 below the overlap height S and along the first direction X on the second side Y2 of the second sensor group 32. For example... Figure 2 As shown, the second predetermined height T2 is a height set below the lower end 4B of the container 4 placed on the container mounting section 11 in the third direction Z. In this embodiment, the second predetermined height T2 is set such that the distance from the lower end 4B of the container 4 in the third direction Z is less than or equal to the length of the overlap height S. Furthermore, in the illustrated example, the second predetermined height T2 is set as the height from the floor surface U. Figure 2As shown, the second direction, second side Y2 of the second sensor group 32 refers to the region further away from the central portion of the container rack 10 in the second direction Y than the second sensor group 32. Therefore, when the fourth sensor group 34 observes the container rack 10 along the first direction X, it is positioned at a second predetermined height T2, which is set below the overlap height S in the third direction Z, at a position further away from the central portion of the container rack 10 in the second direction Y than the second sensor group 32.

[0047] In this embodiment, as Figure 4 As shown, the fourth sensor group 34 includes two oxygen concentration sensors 20 arranged along the first direction X. Furthermore, in this example, as... Figure 4 As shown, the oxygen concentration sensor 20 constituting the fourth sensor group 34 is disposed at the end of the container storage rack 10 on the first side X1 in the first direction and the end of the container storage rack 10 on the second side Y2 in the first direction. In this example, support members 13 are respectively provided at the end of the container storage rack 10 on the second side Y2 in the second direction, the end of the container storage rack 10 on the first side X1 in the first direction, and the end of the container storage rack 10 on the second side X2 in the first direction. Moreover, each oxygen concentration sensor 20 constituting the fourth sensor group 34 is supported on the container storage rack 10 by the support members 13. In this example, each support member 13 has: a first extension 13A extending downward in the third direction Z from the end of the container storage rack 10 on the second side Y2 in the second direction from the end of the container storage rack 10 on the second side Y1 in the first direction or the end of the container storage rack 10 on the second side X2 in the first direction; and a second extension 13B extending from the lower end of the first extension 13A toward the second side Y2 in the second direction. In this example, the oxygen concentration sensor 20, which constitutes the fourth sensor group 34, is disposed at the front end of the second side Y2 in the second direction of the second extension 13B.

[0048] In this embodiment, the first predetermined height T1 and the second predetermined height T2 are set to be the same height as each other. With this configuration, when observing the container storage rack 10 along the first direction X, the first sensor group 31, the second sensor group 32, the third sensor group 33, and the fourth sensor group 34 are arranged in a trapezoidal shape. This results in a structure that easily and appropriately detects the decrease in oxygen concentration caused by inactive gases that are swept away by the airflow from the ceiling of the cleanroom towards the floor after being discharged from the container 4 and diffuse towards the floor surface U.

[0049] Furthermore, the first specified height T1 and the second specified height T2 can also be different heights. In this case, the first specified height T1 can be higher than the second specified height T2, or the second specified height T2 can be higher than the first specified height T1.

[0050] In this embodiment, the container storage device 1 includes a control device 40 and a human body sensor 50. The control device 40 is configured to output an alarm based on the detection results of the oxygen concentration sensor 20 and the human body sensor 50. Figure 5 This is a block diagram showing the functional units related to the alarm output by the control device 40.

[0051] The control device 40 includes a monitoring area setting unit 41, an oxygen concentration estimation unit 42, an alarm output unit 43, and a mapping generation unit 44. These functional units are constructed with hardware or software or both, with the CPU as the core component, in order to perform processing related to the diffusion of oxygen concentration.

[0052] Human body sensor 50 detects the presence of a person within its sensing range. In this example, human body sensor 50 detects infrared light within a pre-set sensing range, and detects the presence of a person within the sensing range based on changes in this infrared light. Of course, as human body sensor 50, for example, a sensor with a structure that emits ultrasonic waves to the surroundings and detects the presence of a person based on the reflected waves can also be used. In this embodiment, a plurality of human body sensors 50 are distributed around the container rack 10.

[0053] exist Figure 6 The diagram shows an example configuration of the oxygen concentration sensor 20 and the human body sensing sensor 50 according to this embodiment. In this example, as... Figure 6 As shown, eight oxygen concentration sensors 20 are provided in the container storage rack 10. Furthermore, in this example, four human body sensors 50 are provided at the lower part of the container storage rack 10. In this embodiment, the human body sensors 50 are configured such that the lower side of the container holding portion 11 is the sensing range. In this example, human body sensors 50 are provided at the front ends of the second extensions 12B of the pair of support members 12 of the oxygen concentration sensor 20 (which is provided with the third sensor group 33) and at the front ends of the second extensions 13B of the pair of support members 13 of the oxygen concentration sensor 20 (which is provided with the fourth sensor group 34), respectively, facing the floor surface U. Therefore, in this example, the human body sensors 50 are configured such that the sensing range overlaps with the container storage rack 10 at the lower side of the container holding portion 11 in a third-direction view (vertical view) along the third direction Z.

[0054] The monitoring area setting unit 41 sets a monitoring area A by dividing the space including the container storage rack 10, the first sensor group 31, the second sensor group 32, the third sensor group 33, and the fourth sensor group 34 into multiple monitoring areas. "Divided into multiple" means divided into multiple areas according to a predetermined size. In this embodiment, the monitoring area setting unit 41 divides the entire space including the container storage rack 10, the first sensor group 31, the second sensor group 32, the third sensor group 33, and the fourth sensor group 34 (hereinafter referred to as the "storage rack perimeter space") into multiple areas according to a predetermined size. Each area obtained from this division is treated as monitoring area A. In this example, as... Figure 7 As shown, the monitoring area setting unit 41 divides the space surrounding the storage rack into two along the first direction X and two along the second direction Y. Furthermore, in this example, there is one division along the third direction Z. Therefore, in... Figure 7 In the example, there are 4 monitoring areas A.

[0055] The human body sensor 50 is configured to detect the presence or absence of a person who is about to intrude into each monitored area A. For example... Figure 8 As shown, in this embodiment, the human body sensor 50 is configured such that the lower side of the container holding portion 11 of the container storage rack 10 is the sensing range. Therefore, the human body sensor 50 can detect a person approaching the container holding portion 11 from below. Since the container storage rack 10 is suspended from the ceiling, in most cases, a person intending to intrude into the monitoring area A approaches the container holding portion 11 from below. Therefore, it can be determined that the person detected by the human body sensor 50 is someone intending to intrude into the monitoring area A. Furthermore, in this embodiment, multiple human body sensors 50 are configured corresponding to each of the multiple monitoring areas A. That is, each of the multiple human body sensors 50 is configured such that the lower side of each of the multiple monitoring areas A is the sensing range. In this example, one human body sensor 50 is configured for each of the four monitoring areas A. Moreover, each human body sensor 50 is configured to detect a person approaching the corresponding monitoring area A from below.

[0056] The oxygen concentration estimation unit 42 estimates the oxygen concentration of each of the plurality of monitoring areas A based on the detection values ​​of each of the plurality of oxygen concentration sensors 20. The plurality of oxygen concentration sensors 20 refers to the two oxygen concentration sensors 20 constituting the first sensor group 31, the two oxygen concentration sensors 20 constituting the second sensor group 32, the two oxygen concentration sensors 20 constituting the third sensor group 33, and the two oxygen concentration sensors 20 constituting the fourth sensor group 34. Detection values ​​are transmitted from these oxygen concentration sensors 20 to the oxygen concentration estimation unit 42. In this example, the detection values ​​of the oxygen concentration sensors 20 are transmitted to the oxygen concentration estimation unit 42 in real time or at certain time intervals. The oxygen concentration estimation unit 42 estimates the oxygen concentration of the plurality of monitoring areas A based on the transmitted detection values ​​of the oxygen concentration sensors 20. In this example, it is set such that two oxygen concentration sensors 20 are included in each of the plurality of monitoring areas A; however, for each monitoring area A, the lowest value of the two oxygen concentration detection values ​​can be used, or the average value can be used. Alternatively, for example, the oxygen concentration gradient (concentration gradient) can be calculated using the detection values ​​of two adjacent oxygen concentration sensors 20, and the oxygen concentration can be estimated for each of the multiple monitoring areas based on the calculated result.

[0057] Within a monitoring area A, i.e., an oxygen concentration reduction area A1, where the estimated oxygen concentration is below the prescribed threshold (refer to...), Figure 9 If the human body sensor 50 detects that a person is about to enter the oxygen concentration reduction area A1, the alarm output unit 43 outputs an alarm. The estimated oxygen concentration refers to the oxygen concentration of each monitored area estimated by the oxygen concentration estimation unit 42. The judgment threshold is, for example, a lower limit value of the oxygen concentration at which an operator in the container storage equipment 1 can work without causing obstruction. The detection result is transmitted from the human body sensor 50 to the alarm output unit 43. The alarm output unit 43 determines in real time whether the oxygen concentration of each monitored area estimated by the oxygen concentration estimation unit 42 is below the judgment threshold. Moreover, in this determination, if there is a monitored area A with an oxygen concentration below the judgment threshold, the alarm output unit 43 designates monitored area A as oxygen concentration reduction area A1, and outputs an alarm if the detection result of the human body sensor 50 indicates that a person is about to enter oxygen concentration reduction area A1 with an oxygen concentration below the judgment threshold. Here, the alarm may be an alarm indicating to the person who is about to enter oxygen concentration reduction area A1 that the oxygen concentration of the monitored area A is reduced, or it may be an alarm prompting the person to leave the monitored area A. Furthermore, a speaker can be installed, for example, in the container rack 10 or the cleanroom, to output the warning. Alternatively, the alarm can be output using a terminal owned by the cleanroom manager. Such an alarm can be output using sound, image display, text display, etc. Alternatively, the alarm can simply be a buzzer sound.

[0058] Furthermore, the oxygen concentration estimation unit 42 can also be configured such that, based on the detection values ​​of all the oxygen concentration sensors 20 constituting the first sensor group 31, the second sensor group 32, the third sensor group 33, and the fourth sensor group 34, spatial interpolation is used to estimate the minimum oxygen concentration value for each of the plurality of monitoring areas A. That is, for example, instead of estimating the oxygen concentration for each monitoring area A, the detection values ​​of the plurality of adjacent oxygen concentration sensors 20 are used to estimate the gradient of oxygen concentration at each location (concentration gradient), and the oxygen concentration distribution in each of the plurality of monitoring areas A is estimated based on this estimate. Moreover, the oxygen concentration estimation unit 42 estimates the minimum oxygen concentration value among the oxygen concentration distributions of each monitoring area A thus estimated as the minimum oxygen concentration value for that monitoring area A. Such a method of estimating oxygen concentration using spatial interpolation is not limited to a structure that includes two oxygen concentration sensors 31 in each of multiple monitoring areas A as described above. It can also be used to appropriately estimate oxygen concentration in a structure that includes monitoring areas A containing oxygen concentration sensors 20 and monitoring areas A that do not contain oxygen concentration sensors 20, or in a structure that includes one or more oxygen concentration sensors 20 in one monitoring area A.

[0059] The alarm output unit 43 can determine the monitoring area A with a minimum value of oxygen concentration estimated by the oxygen concentration estimation unit 42 below the determination threshold as an oxygen concentration reduction area A1, and can be configured to output an alarm when the human body sensing sensor 50 senses that a person is about to enter such an oxygen concentration reduction area A1.

[0060] Furthermore, when the container storage equipment 1 is equipped with a display device 60, the mapping generation unit 44 can display the estimated oxygen concentration for each of the multiple monitoring areas A as an oxygen concentration mapping associated with the position of the container storage rack 10 on the display device 60. The estimated oxygen concentration for each of the multiple monitoring areas A refers to the oxygen concentration estimated by the oxygen concentration estimation unit 42. Therefore, the mapping generation unit 44 can obtain the estimation result of the oxygen concentration estimated by the oxygen concentration estimation unit 42. The oxygen concentration mapping associated with the position of the container storage rack 10 refers to a mapping that shows the oxygen concentration corresponding to the monitoring area A where the oxygen concentration is estimated and the image of the container storage rack 10. That is, it is a mapping that shows a model of a cleanroom equipped with the container storage rack 10 and divides the oxygen concentration into multiple corresponding monitoring areas A in the model. The mapping generation unit 44 can generate such an oxygen concentration mapping and display it on the display device 60. Furthermore, the display device 60 can utilize the monitor of the control device 40.

[0061] exist Figure 9An example of an oxygen concentration map displayed on the display device 60 is shown. By displaying such an oxygen concentration map on the display device 60, the operator can easily visually assess the oxygen concentration within the storage space 90 of the container storage equipment 1. Furthermore, in Figure 9 In the example, the division showing the levels of oxygen concentration is set to 6 levels, but it can be further refined. Furthermore, as... Figure 9 As shown, to facilitate easy understanding for operators who have confirmed the oxygen concentration map, it is preferable to overlay an image of the container storage rack 10 onto the oxygen concentration map. Furthermore, in Figure 9 In the above, the monitoring area A where the oxygen concentration is below the specified threshold is shown as the oxygen concentration reduction area A1.

[0062] For example, such as Figure 10 As shown, sometimes multiple container storage devices 1 are installed in a cleanroom, and a conveying device 91 is provided to move containers 4 along a movement path R that connects them. The conveying device 91 is, for example, a conveyor vehicle that travels along the movement path R connecting the container transfer point, which will become the source and destination of the container 4. The container storage devices 1 are arranged along this movement path R. Preferably, in such a configuration, the conveying device 91 is controlled in such a way that if at least one of the multiple monitoring areas A set around the container storage rack 10 is an oxygen concentration reduction area A1, and a human body sensor 50 senses that a person is about to enter the oxygen concentration reduction area A1, the container storage device 1 that is set as the monitoring area A that becomes the oxygen concentration reduction area A1 will not be conveyed. Figure 10 In this design, a “○” is marked on the movement path of the container storage equipment 1 when the conveying device 91 is transporting the container 4, and a “☓” is marked on the movement path of the container storage equipment 1 when the conveying device 91 is not transporting the container 4. This prevents contact between the person (operator) approaching the container storage equipment 1 and the conveying device 91, and further avoids a situation where, after the container 4 is placed in the container storage equipment 1, which is set as a monitoring area A1 for oxygen concentration reduction, the operator cannot approach the container 4 when necessary.

[0063] [Other implementation methods]

[0064] Next, other embodiments of the container storage device 1 will be described.

[0065] (1) In the above embodiment, the container rack 10 was described as an open type without a surrounding wall portion. However, it is not limited to such a structure; for example, the container rack 10 may also be a closed type with a surrounding wall portion. Furthermore, in this example, a single-level container placement section 11 is illustrated, but multiple levels of container placement sections 11 may also be used. In addition, in this example, a structure in which four container placement sections 11 are provided along the first direction X in one container rack 10 is illustrated; however, there may be one container placement section 11, or multiple sections other than four. In such a case, by providing an oxygen concentration sensor 20 in the container rack 10, the surrounding oxygen concentration can also be appropriately sensed.

[0066] (2) In the above embodiment, it is explained that the control device 40 outputs an alarm when a monitoring area A, i.e., an oxygen concentration reduction area A1, exists where the estimated oxygen concentration is below a predetermined threshold and the human body sensor 50 senses that a person is about to enter the oxygen concentration reduction area A1. However, the embodiment of the container storage device 1 is not limited to this structure. For example, the control device 40 can also control the flow rate of the inactive gas supplied to the container storage rack 10 by using the flow regulating device 45c provided by the inactive gas supply device 45 when a monitoring area A, i.e., an oxygen concentration reduction area A1, exists where the estimated oxygen concentration is below a predetermined threshold. In this case, the container storage device 1 may not be equipped with the human body sensor 50.

[0067] (3) In the above embodiment, a case in which a human body sensor 50 is provided in a monitoring area A is illustrated. However, the embodiment of the container storage device 1 is not limited to such a structure. For example, a human body sensor 50 may be provided for multiple monitoring areas A. In this case, it may be configured such that a human body sensor 50 has a sensing range corresponding to multiple monitoring areas A, and is capable of sensing that a person is about to enter any of the multiple monitoring areas A. For example, instead of two human body sensors 50 on the first side X1 of the first direction, a human body sensor 50 may be provided at the center of the container storage rack 10 on the first side X1 of the first direction in the second direction Y, and instead of two human body sensors 50 on the second side X2 of the first direction, a human body sensor 50 may be provided at the center of the container storage rack 10 on the second side X2 of the first direction in the second direction Y. Alternatively, the container storage device 1 may not have a human body sensor 50.

[0068] (4) In the above embodiments, the case where the display device 60 is a monitor of the control device 40 was described. However, the embodiments of the container storage device 1 are not limited to such a structure. The display device 60 may be a monitor of a portable terminal held by the operator, or it may be smart glasses if the operator is equipped with smart glasses (a display device integrated with the glasses).

[0069] (5) In the above embodiment, the control device 40 is described as being configured with a monitoring area setting unit 41, an oxygen concentration estimation unit 42, an alarm output unit 43, and a mapping generation unit 44. However, the embodiment of the container storage device 1 is not limited to this structure. The functional units constituting the control device 40 are examples, and the division of functional units can be appropriately changed. Furthermore, the control device 40 can also be configured to have other functional units.

[0070] (6) Furthermore, the structures disclosed in the above embodiments can be combined with structures disclosed in other embodiments, provided that they do not create contradictions. Regarding other structures, the embodiments disclosed in this specification are merely illustrative in all respects. Therefore, various modifications can be made appropriately without departing from the spirit of this disclosure.

[0071] [Summary of the above embodiments]

[0072] The following is a summary of the container storage equipment described above.

[0073] A container storage device, comprising:

[0074] A container rack, comprising multiple container holding sections for holding containers; and

[0075] The inactive gas supply device supplies inactive gas to each of the containers placed in the container holding section.

[0076] in,

[0077] The container rack is suspended from the ceiling and supported, and has multiple container holding sections arranged in a first horizontal direction.

[0078] In a vertical view along the vertical direction, the direction orthogonal to the first direction is designated as the second direction; one side of the second direction is designated as the first side of the second direction; the other side of the second direction is designated as the second side of the second direction; and the height by which the container placed on the container mounting portion overlaps with the container is designated as the overlap height.

[0079] The container storage equipment includes:

[0080] The first sensor group consists of a plurality of oxygen concentration sensors arranged at the overlap height and along the first direction on the first side of the second direction relative to the container;

[0081] The second sensor group consists of a plurality of oxygen concentration sensors arranged at the overlap height and on the second side of the second direction relative to the container along the first direction;

[0082] The third sensor group comprises a plurality of oxygen concentration sensors arranged at a first predetermined height below the overlap height and along the first direction on the first side of the second direction of the first sensor group; and

[0083] The fourth sensor group consists of a plurality of oxygen concentration sensors arranged at a second predetermined height below the overlap height and along the first direction on the second side of the second direction of the second sensor group.

[0084] In container storage equipment comprising a container rack with multiple container holding sections and an inert gas supply device for supplying inert gas to each container in the container holding section, the oxygen concentration may locally decrease depending on the degree of leakage of inert gas from the containers. In this case, the operator cannot enter the area where the oxygen concentration has decreased. In particular, in container racks suspended from the ceiling, the oxygen concentration may sometimes locally decrease near the head of an operator approaching the container rack. In such cases, it is necessary to appropriately sense this and issue warnings. According to this structure, it is possible to appropriately sense the oxygen concentration around a container rack suspended from the ceiling, assuming the operator's head approaches from below.

[0085] Here, the preferred option is,

[0086] It also has a control device and a human body sensing sensor to detect people.

[0087] The space comprising the container storage rack, the first sensor group, the second sensor group, the third sensor group, and the fourth sensor group is divided into multiple monitoring zones. The human body sensing sensors are configured to detect the presence or absence of a person attempting to intrude into each of the monitoring zones.

[0088] The control device estimates the oxygen concentration of each of the plurality of oxygen concentration sensors constituting the first sensor group, the second sensor group, the third sensor group, and the fourth sensor group. If there is a monitoring area (i.e., an oxygen concentration reduction area) where the estimated oxygen concentration is below a predetermined threshold and the human body sensing sensor detects that a person is about to enter the oxygen concentration reduction area, the control device outputs an alarm.

[0089] According to this structure, when an operator approaches a container storage rack suspended from the ceiling and supported by it, and the oxygen concentration near the operator's head locally decreases, it can be appropriately sensed and an alarm can be output.

[0090] Furthermore, it is preferred that,

[0091] Each of the plurality of monitoring areas is provided with a plurality of human body sensing sensors.

[0092] Based on this structure, it is possible to appropriately sense the presence or absence of a person intruding into each of multiple surveillance areas.

[0093] Furthermore, it is preferred that,

[0094] The control device estimates the minimum oxygen concentration of each of the plurality of monitoring areas based on the detection values ​​of all the oxygen concentration sensors constituting the first sensor group, the second sensor group, the third sensor group, and the fourth sensor group using spatial interpolation, and determines the monitoring area whose minimum value is below the determination threshold as the oxygen concentration reduction area.

[0095] According to this structure, even when the number of oxygen concentration sensors arranged around the container storage rack is relatively small, it is possible to determine with high accuracy whether there is an area of ​​decreased oxygen concentration.

[0096] Furthermore, it is preferred that,

[0097] It also has a display device.

[0098] The control device displays the estimated oxygen concentration for each of the plurality of monitoring areas as an oxygen concentration map associated with the location of the container storage rack on the display device.

[0099] According to this structure, the oxygen concentration is estimated for each of the multiple monitoring areas obtained by dividing the area around the container storage rack, and the results are displayed on the display device as an oxygen concentration map. Therefore, the oxygen concentration at various locations around the container storage rack can be easily understood and communicated to the operator.

[0100] Industrial availability

[0101] The technology disclosed herein can be used in container storage equipment having a container rack having a plurality of container holding sections for holding containers and an inactive gas supply device for supplying inactive gas to each of the containers placed in the container holding sections.

[0102] Explanation of reference numerals in the attached figures

[0103] 1: Container storage equipment

[0104] 4: Container

[0105] 10: Container storage rack

[0106] 11: Container placement section

[0107] 20: Oxygen concentration sensor

[0108] 31: First sensor group

[0109] 32: Second sensor group

[0110] 33: Third sensor group

[0111] 34: Fourth sensor group

[0112] 40: Control device

[0113] 45: Inactive gas supply device

[0114] 50: Human body sensing sensor

[0115] 60: Display device

[0116] A: Surveillance area

[0117] A1: Region with decreased oxygen concentration

[0118] S: Overlap height

[0119] T1: First specified height

[0120] T2: Second specified height

[0121] X: First direction

[0122] Y: Second direction

[0123] Y1: Second direction, first side

[0124] Y2: Second direction, second side.

Claims

1. A container storage device, comprising: A container rack, comprising multiple container holding sections for holding containers; and The inactive gas supply device supplies inactive gas to each of the containers placed in the container holding section. Its features are, The container rack is suspended from the ceiling and supported, and has multiple container holding sections arranged in a first horizontal direction. In a vertical view along the vertical direction, the direction orthogonal to the first direction is designated as the second direction; one side of the second direction is designated as the first side of the second direction; the other side of the second direction is designated as the second side of the second direction; and the height by which the container placed on the container mounting portion overlaps with the container is designated as the overlap height. The container storage equipment includes: The first sensor group consists of a plurality of oxygen concentration sensors arranged at the overlap height and along the first direction on the first side of the second direction relative to the container; The second sensor group consists of a plurality of oxygen concentration sensors arranged at the overlap height and on the second side of the second direction relative to the container along the first direction; The third sensor group comprises a plurality of oxygen concentration sensors arranged at a first predetermined height below the overlap height and along the first direction on the first side of the second direction of the first sensor group; and The fourth sensor group consists of a plurality of oxygen concentration sensors arranged at a second predetermined height below the overlap height and along the first direction on the second side of the second direction of the second sensor group.

2. The container storage equipment according to claim 1, wherein, It also has a control device and a human body sensing sensor to detect people. The space comprising the container storage rack, the first sensor group, the second sensor group, the third sensor group, and the fourth sensor group is divided into multiple monitoring zones. The human body sensing sensors are configured to detect the presence or absence of a person attempting to intrude into each of the monitoring zones. The control device estimates the oxygen concentration of each of the plurality of oxygen concentration sensors constituting the first sensor group, the second sensor group, the third sensor group, and the fourth sensor group. If there is a monitoring area (i.e., an oxygen concentration reduction area) where the estimated oxygen concentration is below a predetermined threshold and the human body sensing sensor detects that a person is about to enter the oxygen concentration reduction area, the control device outputs an alarm.

3. The container storage equipment according to claim 2, wherein, Each of the plurality of monitoring areas is provided with a plurality of human body sensing sensors.

4. The container storage equipment according to claim 2 or 3, wherein, The control device estimates the minimum oxygen concentration of each of the plurality of monitoring areas based on the detection values ​​of all the oxygen concentration sensors constituting the first sensor group, the second sensor group, the third sensor group, and the fourth sensor group using spatial interpolation, and determines the monitoring area whose minimum value is below the determination threshold as the oxygen concentration reduction area.

5. The container storage equipment according to claim 2 or 3, wherein, It also has a display device. The control device displays the estimated oxygen concentration for each of the plurality of monitoring areas as an oxygen concentration map associated with the location of the container storage rack in the display device.

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