High frequency surface acoustic wave device and method of manufacturing the same

By forming submicron ferroelectric domain structures within a piezoelectric superlattice and depositing parallel electrodes, the problem of existing surface acoustic wave devices being unable to achieve high-frequency operation has been solved, improving frequency and tolerance, and simplifying the process.

CN116111977BActive Publication Date: 2026-06-09NANJING UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
NANJING UNIV
Filing Date
2023-02-27
Publication Date
2026-06-09

AI Technical Summary

Technical Problem

Existing surface acoustic wave devices are difficult to operate at high frequencies. When the width of the interdigitated electrodes is less than 400 nm, the loss increases and the power tolerance decreases. Furthermore, they are difficult to manufacture using traditional processes.

Method used

By employing a piezoelectric superlattice and surface electrode structure, a submicron ferroelectric domain structure is formed within the piezoelectric material block using femtosecond laser technology, and parallel electrodes are deposited on the surface. Parameters are then optimized through simulation to improve frequency and tolerance.

Benefits of technology

It achieves higher operating frequencies and improved power tolerance, simplifies the process flow, and reduces transmission losses.

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Abstract

The application discloses a high-frequency surface acoustic wave device and a preparation method thereof. The high-frequency surface acoustic wave device comprises a piezoelectric superlattice and a surface electrode on the surface of the piezoelectric superlattice. The piezoelectric superlattice has a sub-micron ferroelectric domain structure with a period T and a positive-negative alternating arrangement. The surface electrode is two parallel electrodes. In the preparation of the high-frequency surface acoustic wave device, the ferroelectric domain parameters of the piezoelectric superlattice and the surface electrode parameters are obtained through simulation firstly. Then, the piezoelectric superlattice with a sub-micron period is generated through femtosecond laser processing based on the simulation domain structure parameters. And the surface electrode is generated according to the surface electrode parameters. The high-frequency surface acoustic wave device has the advantages of high frequency and simple preparation.
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