A silicon boat transportation and reinforcement fixture

Abstract

The present invention discloses a silicon boat transport reinforcement jig, the silicon boat includes a groove rod and flanges arranged at both ends of the groove rod; includes a base, the base is provided with an annular groove for axial insertion of the flange; also includes a clamping block, two of the clamping blocks are abutted to form a reinforcement member for sleeved on the groove rod, the clamping block is also provided with a connecting portion, and the connecting portion is fixedly connected to the base. The present invention forms circumferential support for the groove rod by abutting against the clamping blocks to sleeve the groove rod, and avoids as much as possible the tilted extrusion between the groove rod and the flange caused by shaking to cause fragmentation, and can specifically protect the position of the groove rod close to the flange.

Description

Technical Field

[0001] The present invention relates to the field related to silicon product production equipment, and in particular, to a silicon boat transportation reinforcement fixture. Background Art

[0002] In the silicon product production process, a silicon boat is required when performing heat treatment on silicon wafers. The silicon boat is divided into groove bars and flanges / top plates fixed at both ends of the groove bars, and the silicon wafers are loaded in the groove teeth on the groove bars.

[0003] In the prior art, in order to pursue efficiency, manufacturers often increase the length of the silicon boat as much as possible and increase the number of groove teeth as much as possible to increase the number of silicon wafers that can be loaded thereon. Under these two preconditions, the stability and structural strength of the silicon boat will be weakened. Especially at the position close to the connection between the groove bar and the flange / top plate, when the groove bar tilts and shakes at this position, extrusion force will be generated between the groove bar and the flange / top plate, so it is easy to break at the corners or groove teeth, and the longer the groove bar, the greater the extrusion force generated.

[0004] During the transportation of the silicon boat, the shaking of the silicon boat is particularly likely to occur, especially in the traditional situation of transporting the silicon boat upright, which is very likely to cause damage to the silicon boat. Summary of the Invention

[0005] In order to solve at least one technical problem mentioned in the background art, the purpose of the present invention is to provide a silicon boat transportation reinforcement fixture to provide anti-seismic and buffering effects during transportation of the silicon boat and avoid fragmentation of the silicon boat.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A silicon boat transportation reinforcement fixture, the silicon boat includes a groove bar and flanges provided at both ends of the groove bar; it includes a base, and an annular groove for axially inserting the flange is opened on the base; it also includes clamping blocks, and the two clamping blocks abut against each other to form a reinforcement member for sleeving on the groove bar. A connecting portion is further provided on the clamping block, and the connecting portion is fixedly connected to the base.

[0008] Compared with the prior art, the beneficial effects of the present invention are: by the way that the clamping blocks abut against each other to sleeve the groove bar, lateral support is formed for the groove bar, as much as possible to avoid the inclined extrusion between the groove bar and the flange caused by shaking and resulting in fragmentation, and it can specifically protect the position of the groove bar close to the flange;

[0009] By the base supporting the flange, and the clamping blocks are fixedly installed with the base to form a rigid connection to the flange, making the support force of the clamping blocks stable. The clamping blocks and the base integrally form an effective fixation for the groove bar and the flange, avoiding the shaking extrusion between the groove bar and the flange, and effectively avoiding breakage;

[0010] The clamping blocks are in groups of two, with a simple structure and easy to install.

[0011] Furthermore, the connecting part is fixed to the base by screws, and the fixing positions are respectively located inside and outside the annular groove.

[0012] Furthermore, one of the outer peripheral wall of the flange and the inner peripheral wall of the annular groove is provided with a protrusion, and the other is provided with a groove. When the flange is installed with the base, the protrusion is located in the groove.

[0013] Furthermore, it further includes a first foam. The number of the first foams is two and they are respectively arranged at both ends of the quartz boat in the length direction; the first foam is provided with a groove, and the base is accommodated in the groove.

[0014] Furthermore, the first foam is divided into upper and lower parts.

[0015] Furthermore, a filling layer is arranged inside the first foam, and the material of the filling layer is EVA.

[0016] Furthermore, it further includes a second foam, and both ends of the second foam respectively abut against the two first foams.

[0017] Furthermore, it further includes a box body for accommodating the first foam and the second foam.

[0018] Furthermore, the box body is provided with a protruding part. Description of the Drawings

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 It is a schematic diagram of the structure of the quartz boat;

[0021] Figure 3 It is a schematic diagram of the structure of the quartz boat when installing the clamping blocks and the base;

[0022] Figure 4 It is Figure 3 a schematic diagram of the structure of the base in

[0023] Figure 5 It is Figure 3 a schematic diagram of the structure when two clamping blocks are combined in

[0024] Figure 6 a schematic diagram of the structure of a single clamping block;

[0025] Figure 7 a schematic diagram of the structure of the foam;

[0026] Figure 8 a schematic diagram of the structure of the lower half part of the first foam.

[0027] In the figure: 11 is a groove rod; 12 is a flange; 2 is a base; 21 is an annular groove; 22 is a protrusion; 3 is a clamping block; 31 is a connecting part; 32 is a gap; 41 is a first foam; 411 is a first abutting surface; 412 is a second abutting surface; 42 is a second foam; 43 is a filling layer. Specific embodiments

[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] Please refer to Figure 1 , this embodiment provides a silicon boat transportation reinforcement fixture, including a clamping block 3, a base 2, a foam, and a box body, which is used to provide protection for the connection part between the groove rod 11 and the flange 12 on the silicon boat to avoid fracture and breakage, and at the same time provide effective seismic resistance for the entire silicon boat to avoid excessive shaking during transportation.

[0030] Specifically, in this embodiment, the silicon boat includes two parallel flanges 12. Refer to Figure 2 , the flange 12 is a hollow annular structure, and a plurality of groove rods 11 are arranged between the two flanges 12. In this embodiment, there are three groove rods 11. The two ends of the groove rod 11 in the length direction are respectively connected to the two flanges 12. Since a plurality of groove teeth are provided on the groove rod 11, structural weakness will occur at the groove teeth near the flange 12, so it is easy to break at this position during transportation.

[0031] The base 2 adopted in this embodiment, refer to Figure 3 , 4 , which is used to provide fixation and axial support for the flange 12. The base 2 is disc-shaped, and an adapted annular groove 21 is provided thereon for the flange 12 to be inserted axially. Correspondingly, a notch is provided on the circumferential wall of the flange 12, and a protrusion 22 extending into the notch is provided on the circumferential wall of the annular groove 21, so as to prevent the flange 12 from rotating relative to the base 2 when the flange 12 is inserted into the annular groove 21, and improve stability.

[0032] The clamping block 3 adopted in this embodiment, refer to Figure 3 , 5, 6, which is used to provide support for the end of the groove rod 11. Two of the clamping blocks 3 form a group. When the two are combined, they form a reinforcement member with a gap 32 inside for the axial passage of the groove rod 11. During installation, by moving two clamping blocks 3 towards each other and abutting them from both sides of the groove rod 11, the clamping blocks 3 clamp the part of the groove rod 11 close to the flange 12 to form a sleeve-type protection, providing lateral support for the circumferential side of the groove rod 11.

[0033] The clamping block 3 further includes a connecting portion 31. After the clamping block 3 is installed on the groove rod 11, the connecting portion 31 of the clamping block 3 abuts against the base 2, and then it is firmly installed on the base 2 through screws, so that the clamping block 3 and the base 2 are integrated, ensuring the stability of the clamping block 3 and enhancing the support and protection effect.

[0034] In the connection relationship between the clamping block 3 and the base 2, a part of the connecting portion 31 is fastened to the part of the base 2 located outside the annular groove 21 through screws, and the other part of the connecting portion 31 is fastened to the part of the base 2 located inside the annular groove 21. The connecting portion 31 fixed on both sides straddles the opening of the annular groove 21 to limit the flange 12 in the annular groove 21 and press it tightly in the annular groove 21, improving the fit between the silicon boat and the base 2 and avoiding relative movement.

[0035] And in this embodiment, the connecting portion 31 of the clamping block 3 abuts at the middle position of the base 2, thereby forming a support in the radial direction of the base 2 and improving the overall support strength.

[0036] The base 2 and the clamping block 3 provide structural strength support for the silicon boat, and the foam is used to provide buffering and wrap the silicon boat to avoid the silicon boat from bumping against other hard objects. Specifically, referring to Figure 7 , the foam is divided into two parts. One part is two first foams 41 respectively arranged at the left and right ends of the silicon boat. The first foam 41 is recessed with a groove, and the shape of the groove is adapted to the base 2. The bottom wall of the groove forms a first abutting surface 411 for the bottom wall of the base 2 to abut against, and the peripheral wall of the groove forms a second abutting surface 412 for the peripheral wall of the base 2 to abut against. The two first foams 41 fully wrap the base 2 and the clamping block 3 parts installed at the two ends of the silicon boat, playing the role of anti-collision and anti-vibration.

[0037] The other part of the foam is the second foam 42. The second foam 42 is arranged between the two first foams 41 on the left and right. The second foam 42 is rectangular and its two ends respectively abut against the two first foams 41 on the left and right, providing lateral support. The second foam 42 includes two upper and lower blocks.

[0038] Since the two first foams 41 need to be buckled at the left and right ends of the silicon boat, the first foam 41 and the silicon boat need to be carried together during packing. Since the size of the box body fits that of the foam, this method is not convenient for putting them in and is likely to cause the silicon boat to fall off and break during handling. Therefore, for the convenience of packing, referring to Figure 8 , in this embodiment, the first foam 41 is divided into upper and lower parts along the horizontal direction, so that the grooves are also evenly divided into upper and lower parts. Then, during the packing process, first lay the left and right first foams 41 and the second foam 42 of the lower part, then place the silicon boat on them, and finally lay the first foam 41 and the second foam 42 of the upper part to complete the packing.

[0039] It should be added that in order to improve the overall damping characteristics of the foam, the foam is a multi-layer structure, and a filling layer 43 made of EVA is laminated inside. The EVA material has high resilience, high tensile strength and high toughness, so that the foam will not undergo large deformation under long-term load-bearing.

[0040] The box body in this embodiment is used to load the silicon boat and the foam. An X-shaped reinforcement strip is installed on the outer wall of the box body to reduce the deformation occurring when the box body shakes and enhance the structural strength of the box body. Moreover, in order to prevent the box body from being stacked by other heavy objects during transportation, resulting in the box body being deformed under pressure and the internal silicon boat being damaged, a protrusion is provided at the top of the box body in this embodiment to prevent other heavy objects from being stacked.

[0041] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, in any regard, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to embrace all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention.

Claims

1. A silicon boat transportation and reinforcement fixture, the silicon boat comprising groove rods (11) and flanges (12) provided at both ends of the groove rods (11); characterized in that, It includes a base (2) with an annular groove (21) formed thereon for the axial insertion of the flange (12); it further includes clamping blocks (3), and two of the clamping blocks (3) are abutted against each other to form a reinforcement member for sleeving on the groove rod (11). A connecting portion (31) is further provided on the clamping block (3), and the connecting portion (31) is fixedly connected to the base (2); it further includes a first foam (41), and the number of the first foams (41) is two and they are respectively arranged at both ends of the quartz boat in the length direction; the fixed positions of the connecting portion (31) are respectively located inside and outside the annular groove (21), and the first foam (41) is split into upper and lower parts.

2. The silicon boat transportation and reinforcement fixture according to claim 1, wherein The connecting portion (31) is fixed to the base (2) by screws.

3. A silicon boat transportation and reinforcement fixture according to claim 1, characterized in that, A protrusion (22) is provided on one of the outer peripheral wall of the flange (12) and the inner peripheral wall of the annular groove (21), and a groove is provided on the other. When the flange (12) is installed with the base (2), the protrusion (22) is located in the groove.

4. A silicon boat transportation and reinforcement fixture according to claim 1, characterized in that, A groove is provided on the first foam (41), and the base (2) is accommodated in the groove.

5. The silicon boat transportation and reinforcement fixture according to claim 4, characterized in that, A filling layer (43) is provided inside the first foam (41), and the material of the filling layer (43) is EVA.

6. A silicon boat transportation and reinforcement fixture according to claim 4 or 5, characterized in that It further includes a second foam (42), and both ends of the second foam (42) are respectively abutted against the two first foams (41).

7. The silicon boat transportation and reinforcement fixture according to claim 6, characterized in that, It further includes a box body for accommodating the first foam (41) and the second foam (42).

8. A silicon boat transportation and reinforcement fixture according to claim 7, characterized in that, A protruding portion is provided on the box body.

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