Seismic protection of a resonator mechanism with a rotating flexible bearing

By using composite components made of silicon and nickel-phosphorus alloy NiP, the suspension system stiffness and flexibility of the watch resonator are optimized, the problem of fracture of flexible bearings under impact is solved, and the oscillator's shock resistance and stability are improved.

CN116224741BActive Publication Date: 2025-07-25THE SWATCH GRP RES & DEVELONMENT LTD
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Patent Information

Application Number
CN202211089846.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2021-12-06
Filing Date
2022-09-07
Publication Date
2025-07-25
Estimated Expiration
2042-09-07

AI Technical Summary

Technical Problem

When the existing clock resonator mechanism is impacted, the strips of the flexible bearings are prone to break, and the torsional stiffness of the suspension system is insufficient, resulting in poor earthquake protection effect of the oscillator.

Method used

Using composite components made of different materials, the flexible pivot is made of silicon or silicon dioxide, the shock-resistant protection device is made of NiP alloy NiP and combined with it by an elastic assembly system, ensuring that the suspension system has appropriate stiffness and flexibility in five degrees of freedom, especially in rotational freedom and in other degrees of freedom.

Benefits of technology

Improves the shock resistance of the resonator, prevents the strip from breaking under impact, and reduces parasitic motion, improving the stability and durability of the oscillator.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to a clock resonator mechanism (100) comprising a structure (1) which carries an anchoring unit (30) via a flexible suspension system (300), an inertial element (2) being suspended from the anchoring unit (30) and oscillating about a pivot axis (D) extending along a first direction Z with a first rotational degree of freedom RZ under the restoring force of a flexible pivot (200), the flexible pivot (200) comprising longitudinal elastic strips (3), each elastic strip being fixed to the inertial element (2) and the anchoring unit (30), the flexible suspension system (300) allowing the anchoring unit (30) to move in five degrees of freedom, the resonator (100) being a composite assembly made of at least two different materials, the at least two different materials being used on the one hand for the flexible pivot (200) and on the other hand for the flexible suspension system (300).
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Description

Technical Field

[0001] The present invention relates to a clock resonator mechanism, which includes a structure and an anchoring unit, at least one inertial element being suspended on the anchoring unit. The inertial element is configured to oscillate with a first rotational degree of freedom RZ about a pivot axis extending along a first direction Z. The inertial element is subjected to a restoring force exerted by a flexible pivot, which includes a plurality of substantially longitudinal elastic strips. Each elastic strip is fixed to the anchoring unit at a first end and to the inertial element at a second end. Each of the elastic strips can be deformed substantially in a plane XY perpendicular to the first direction Z. The structure carries the anchoring unit through a flexible suspension system, and the flexible suspension system allows the anchoring unit to move in five degrees of freedom.

[0002] The present invention also relates to a clock oscillator including at least one such resonator mechanism.

[0003] The present invention also relates to a clock movement including at least one such oscillator and / or at least one such resonator mechanism.

[0004] The present invention also relates to a watch including such a clock movement and / or such an oscillator and / or such a resonator mechanism.

[0005] The present invention relates to the field of clock resonators, and more particularly to clock resonators including elastic strips serving as a reset device for operating as an oscillator, and to the seismic protection of such mechanisms with flexible bearings (flexure bearings). Background Art

[0006] Using a clock oscillator including elastic strips constituting a flexible bearing, especially a resonator with crossed strips, very good performance can be achieved. Using a flexible bearing pivot allows for the replacement of the pivot of the balance wheel and the hairspring. This has the advantage of eliminating pivot friction and thus increasing the quality factor of the resonator. Since the inertial mass (especially the balance wheel) is suspended on a flexible bearing usually made of silicon but not limited thereto, seismic protection devices must be provided so that the strips do not break during a fall.

[0007] A method for producing such an anti-shock protection device is proposed in Swiss Patent Application No. 715526 filed by ETA Manufacture Horlogère Suisse, which is incorporated herein by reference. A flexible structure (referred to as an anti-shock protection device) is inserted between the flexible pivot and the movement plate. In addition to the rotation of the balance wheel around the Z axis allowed by the flexible pivot, this flexible structure allows the balance wheel to move in all degrees of freedom (translation along the X, Y, and Z axes and rotation around the X and Y axes), and mechanical stops are added to limit the stroke of the balance wheel. In the event of a significant shock, this anti-shock protection allows the balance wheel to move all the way to the mechanical stops while protecting the silicon flexible pivot from breaking. In the event of a minor shock, the anti-shock protection device is stiff enough to prevent the balance wheel from contacting the mechanical stops. In Swiss Patent Application No. 715526, the anti-shock protection device and the flexible pivot are made of a single monolithic silicon wafer. This has the advantage of simple manufacturing and assembly. However, silicon is a brittle material, so that in the event of a very violent shock, the parts may break due to exceeding the maximum stress.

[0008] Therefore, there is a need to further improve the anti-shock protection device of such an oscillator while ensuring the torsional stiffness of its suspension system. The shock strength also depends on this torsional stiffness; more specifically, during an out-of-plane shock, the stress borne by the strip quickly reaches very high values, which correspondingly reduces the distance that the part can move before breaking. There are various shock absorbers available for clocks. However, their purpose is essentially to protect the brittle pivot of the balance staff, rather than elastic elements such as the hairspring in traditional examples.

[0009] European Patent Document No. 3054357A1 filed by ETA Manufacture Horlogère Suisse SA describes a clock oscillator that includes a structure and different primary resonators that are offset in time and geometry. Each primary resonator includes a mass that is reset towards the structure by elastic restoring means. The oscillator includes coupling means for the interaction of the primary resonators, the coupling means including motor means for a driving wheel train, the motor means including driving and guiding means that are arranged to drive and guide control means articulated to a transmission means, and each transmission means is articulated to a mass of a primary resonator away from the control means. The primary resonators and the wheel train are arranged such that the articulation axes of any two primary resonators are never coplanar with the articulation axis of the control means.

[0010] European Patent Document No. 3035127 A1, filed by SWATCH GROUP RESEARCH&DEVELOPMENT Ltd, describes a clock oscillator that includes a resonator formed by a tuning fork. The tuning fork includes at least two movable oscillating members fixed to a connecting member by a flexible element. The geometry of the flexible element determines a virtual pivot axis having a defined position relative to the main plate, and the corresponding movable member oscillates about it. The center of mass of the movable member coincides with the corresponding virtual pivot axis in the rest position.

[0011] For at least one movable member, the flexible element is formed by crossed elastic strips that extend at a distance from each other in two parallel planes, and the projections of the directions of the elastic strips in one of the parallel planes intersect at the virtual pivot axis of the movable member.

[0012] According to Swiss Patent Application No. 01544 / 16 filed by ETA Manufacture Horlogère Suisse and its derivative applications (the teachings of which can be directly applied to the present invention), by using a flexible bearing and a lever escapement with a very small lift angle, the new mechanism architecture can maximize the quality factor of the resonator, and its resonator can further improve the sensitivity to shock in certain specific directions. Therefore, the aim is to protect the strips from breaking in the event of a shock. Obviously, the anti-seismic protection systems proposed so far for resonators with flexible bearings can only protect the strips from shocks in certain directions, not all directions, or they have the drawback of allowing the flexible pivot setting to move slightly according to its oscillatory rotation, which should be avoided as much as possible.

[0013] Swiss Patent Application No. 00518 / 18 or European Patent Application No. 18168765.8 filed by ETA Manufacture Horlogère Suisse describes a clock resonator mechanism that includes a structure carrying an anchoring unit via a flexible suspension system. An inertial element is suspended on the anchoring unit and oscillates with a first rotational degree of freedom RZ under the action of a restoring force exerted by a flexible pivot. The flexible pivot includes a first elastic strip, each of which is fixed to the inertial element and the anchoring unit. The flexible suspension system is arranged to allow the anchoring unit to have a certain level of mobility in each degree of freedom except the first rotational degree of freedom RZ. In the first rotational degree of freedom, only the inertial element can move to avoid any interference with its oscillation, and the stiffness of the suspension system in the first rotational degree of freedom RZ is significantly higher than the stiffness of the flexible pivot in the same first rotational degree of freedom RZ. Summary of the Invention

[0014] The present invention aims to optimize the seismic protection of such an oscillator while ensuring the torsional stiffness required for the suspension system, in particular for resonator mechanisms according to Swiss Patent No. 00518 / 18 or European Patent Application No. 18168765.8 filed by ETA Manufacture Horlogère Suisse, or for similar resonators with flexible bearings.

[0015] By increasing the torsional stiffness of the suspension system, it is also possible to improve the protection of the strip against breakage in the event of an impact. A good rotary resonator with flexible bearings - which form a flexible pivot and define a virtual pivot axis - must be very flexible in the first rotational degree of freedom RZ to enable oscillatory rotation, and very stiff in the other degrees of freedom (X, Y, Z, RX, RY) to avoid spurious movement of the resonator's center of mass. More specifically, if the orientation of the resonator changes in the gravitational field (referred to as a position error), this spurious movement will cause operating errors. The suspension system for pivot mounting must be very stiff in the oscillatory degree of freedom so as not to disturb the isochronism of the resonator and not to dissipate energy due to movement caused by the reaction force.

[0016] The present invention proposes to make an improved seismic protection device for an oscillator with flexible bearings in order to better manage the torsional stiffness of the suspension system and thus limit the out-of-plane displacement of the strip of the strip resonator, thereby providing a more durable system.

[0017] To this end, the present invention relates to a strip resonator mechanism according to claim 1.

[0018] The present invention also relates to a timepiece oscillator comprising at least one such resonator mechanism.

[0019] The present invention also relates to a timepiece movement comprising at least one such resonator mechanism.

[0020] The present invention also relates to a watch comprising such a timepiece movement and / or such a resonator mechanism. Description of the Drawings

[0021] Other features and advantages of the present invention will be better understood after reading the following detailed description given with reference to the accompanying drawings, in which:

[0022] - Figure 1A plan view schematically shows a resonator mechanism with an elastic strip according to Swiss Patent Application No. 00518 / 18 or European Patent Application No. 18168765.8 filed by ETA Manufacture Horlogère Suisse (the teachings of both applications can be used in the context of the present invention). The resonator mechanism includes an inertial mass suspended on an anchoring unit by a flexible pivot. The flexible pivot includes elastic strips on two parallel levels, and the extension directions of these strips intersect at the virtual pivot axis of the inertial element in projection. The resonator mechanism is shown in a specific, non - limiting configuration, in which it includes two translation stages. These two translation stages are arranged to provide a restricted degree of freedom to an intermediate mass located between the anchoring unit and the attachment to the plate within the resonator. It can be noted that each of these translation stages includes an elongated elastic element whose direction is substantially directed towards the pivot axis at the virtual pivot defined by the elastic strips. In this case, the inertial element carries an inertial mass in the form of a balance wheel with an inertial adjustment screw, and also carries a protruding element, such as a pin or a similar component, which is arranged to cooperate with an escapement mechanism (not shown), and in particular with an escapement fork or even directly with an escapement wheel. The mechanism also includes an upper stop and a lower stop to limit the stroke of the inertial mass and protect the strips of the flexible bearing.

[0023] - Figure 2 A perspective view schematically shows an improvement of the resonator mechanism according to the present invention based on Figure 1 . The resonator mechanism shown after removing the elements for the fixed structure for connection to a watch is a composite assembly made of at least two different materials. On the one hand, it includes a flexible pivot made of a first material, and on the other hand, a flexible suspension system made of a second material. The flexible pivot is held in an elastic clamp integrated in the flexible suspension system.

[0024] - Figure 3 A plan view schematically shows Figure 2 an interaction between the elastic clamp of the flexible suspension system and the anchoring unit of the flexible pivot, which is a feature of the mechanism according to the present invention in

[0025] - Figure 4 In a similar way to Figure 2 , a mechanism similar to the one in Figure 1 is shown, which includes two translation stages with straight elastic strips on two superimposed parallel levels.

[0026] - Figure 5 A perspective view schematically shows Figure 4 a feature of an alternative embodiment in

[0027] - Figure 6 In a manner similar to Figure 5 another alternative embodiment of a similar mechanism is shown, but its translation stage includes a linear flexible rod having a substantially square cross-section;

[0028] - Figure 7 is a block diagram showing a watch including a movement, which movement includes on the one hand such a resonator mechanism and on the other hand an oscillator mechanism, which oscillator mechanism includes such a resonator mechanism. Detailed description

[0029] The present invention relates to a watch resonator mechanism, which constitutes an alternative to the resonator described in Swiss patent application No. 00518 / 18 or European patent application No. 18168765.8 filed by ETA Manufacture Horlogère Suisse or Swiss patent application No. 715526 or European patent application No. 3561607 filed by ETA Manufacture Horlogère Suisse, these applications being incorporated herein by reference, and those skilled in the art know how to combine their features with the features specific to the present invention.

[0030] The present invention is based on the following observation: silicon (or silicon and / or silicon dioxide) is the most suitable material for flexible pivots, but not suitable for seismic protection. More specifically, in order to achieve its seismic protection function, the structure must have the ability to undergo large deformations using high elasticity. Some metal materials are more suitable for this function. For example, NiP is more suitable than silicon. More specifically, the Young's modulus of NiP is 90 GPa, while that of Si is 150 GPa, and the maximum stress of NiP is 1,700 MPa, while that of Si is 1,000 MPa. This means that the maximum allowable deformation of NiP is three times that of Si.

[0031] Therefore, the present invention consists in manufacturing the pivot from a first material, in particular silicon or an equivalent material, and manufacturing the seismic protection device from a second material, in particular nickel-phosphorus alloy (nickel-phosphorus) NiP or an equivalent material, which second material has physical properties very different from those of the first material.

[0032] The difficulty lies in assembling these two parts without adding too much mass during assembly. To achieve this, we propose to use an elastic assembly system with or without an adhesive. A practical exemplary embodiment is shown in Figure 2 and 3 is shown.

[0033] As Figure 1As shown, the clock resonator mechanism 100 includes a structure 1 and an anchoring unit 30. At least one inertial element 2 is suspended on the anchoring unit 30, and the inertial element 2 is arranged to oscillate about a pivot axis D extending along a first direction Z with a first rotational degree of freedom RZ. The inertial element 2 is subjected to a restoring force exerted by a flexible pivot 200, and the flexible pivot 200 includes a plurality of substantially longitudinal elastic strips 3. Each elastic strip is fixed to the anchoring unit 30 at a first end and fixed to the inertial element 2 at a second end. Each elastic strip 3 can be deformed substantially in a plane XY perpendicular to the first direction Z.

[0034] The anchoring unit 30 is suspended on the structure 1 by a flexible suspension system 300, and the flexible suspension system 300 is arranged to allow the anchoring unit 30 to move in five flexible degrees of freedom of the suspension system, and these five flexible degrees of freedom are:

[0035] - A first translational degree of freedom along the first direction Z,

[0036] - A second translational degree of freedom along a second direction X orthogonal to the first direction Z,

[0037] - A third translational degree of freedom along a third direction Y orthogonal to the second direction X and the first direction Z,

[0038] - A second rotational degree of freedom RX about an axis extending along the second direction X,

[0039] - And a third rotational degree of freedom RY about an axis extending along the third direction Y.

[0040] According to the present invention, the resonator mechanism 100 is a composite component made of at least two different materials. On the one hand, it includes a flexible pivot 200 made of a first material characterized by a first Young's modulus E1, a first yield strength σ1, and a first rigidity modulus G1. On the other hand, it includes a flexible suspension system 300 made of a second material characterized by a second Young's modulus E2, a second yield strength σ2, and a second rigidity modulus G2.

[0041] The "rigidity modulus" is defined herein as stiffness G = K1c^2 / E, where K1c is the fracture toughness and E is the Young's modulus. A high rigidity modulus G means that the part can store more elastic energy before fracture.

[0042] More specifically, the value of the second rigidity modulus G2 is more than ten times the value of the first rigidity modulus G1. Even more specifically, the value of the second rigidity modulus G2 is more than eighty times the value of the first rigidity modulus G1. This is the case when the first material is silicon and / or silica and the second material is NiP, and the ratio of G2 / G1 is close to 100;

[0043] More specifically, the ratio σ2 / E2 is at least twice the ratio σ1 / E1.

[0044] More specifically, the value of the first Young's modulus E1 is 1.5 times or more the value of the second Young's modulus E2.

[0045] More specifically, the value of the second yield strength σ2 is 1.5 times or more the value of the first yield strength σ1.

[0046] More specifically, at least one inertial element 2 is integral with the flexible pivot 200.

[0047] More specifically, the flexible suspension system 300 is integral with the structure 1.

[0048] More specifically, the flexible pivot 200 can be removed from the flexible suspension system 300.

[0049] More specifically, the flexible suspension system 300 includes clamping elements, in particular jaws 939, for fixing the flexible pivot 200. Advantageously, these jaws 939 form the gripping elements of the elastic clamp 930. Figure 3 The resting position / abutting position of this clamp, denoted by reference numeral 938, is shown.

[0050] More specifically, the flexible suspension system 300 includes at least one bladder 933 that can receive an adhesive to fix the flexible pivot 200.

[0051] More specifically, the joint between the flexible suspension system 300 and the flexible pivot 200 is formed on the anchoring unit 30, which preferably includes a boss 309 whose shape is complementary to the contour of the element 939.

[0052] In a particular manner, the clamp 930 is suspended from the intermediate mass 305, which in turn is suspended from the structure 1 or another intermediate mass 303.

[0053] This elastic assembly has the advantage of minimizing the added mass.

[0054] More specifically, the ratio σ2 / E2 is at least three times the ratio σ1 / E1.

[0055] More specifically, the first material is silicon and / or silica.

[0056] More specifically, the second material is the nickel-phosphorus alloy NiP.

[0057] In particular, the rigidity modulus of silicon is almost one percent of the rigidity modulus of all nickel alloys. The combination of the first material (silicon and / or silica) and the second material (nickel-phosphorus alloy NiP) is particularly advantageous for the desired seismic protection applications, and the dissipation (loss) of NiP is greater than that of silicon, which is an additional advantage.

[0058] Of course, alloys other than the nickel-phosphorus alloy NiP may also have a ratio of yield strength σ to Young's modulus E that is high enough to meet the conditions of the present invention. In this case, the main advantage of the nickel-phosphorus alloy NiP lies in its ability to be precisely formed using the "LIGA" (Lithography Galvano-Abformung) method, with perfect geometry and narrow tolerances that are perfectly compatible with the requirements of a watch. For the specific application shown in the figure, the flexible suspension system 300 is advantageously but not restrictively made of a nickel-phosphorus alloy NiP plate with a thickness between 180 and 420 micrometers.

[0059] Figure 3 The assembly of the flexible pivot 200 and the flexible suspension system 300 is described, the assembly area is shown in detail, and the assembly process is described. The assembly is carried out in three stages: first, the elastic clamp 930 (which is especially made of NiP) is opened so that the anchoring unit 30 (which is especially made of silicon) can be inserted into the jaws 939; then the clamp 930 is released so that its jaws 939 grip and block the convex part 309 of the anchoring unit 30; finally, only if necessary, an adhesive is inserted into at least one pocket 933 between the clamp 930 and the anchoring unit 30.

[0060] The elastic clamp 930 is designed to provide a high clamping force. Therefore, it is important to ensure that the Hertz pressure does not exceed the maximum stress at the contact between the jaws 939 and the convex part 309 of the silicon anchoring unit 30. For this reason, the shape of the jaws 939 closely fits the shape of the convex part 309 so that the difference in the radius of curvature is as small as possible. By imparting a certain flexibility to the jaws 939, the jaws 939 are allowed to deform slightly to accommodate any geometric errors between the clamp 930 and the anchoring unit 30.

[0061] The pocket 933 provided for the adhesive includes on the one hand at least one wider area into which the adhesive can be easily injected, and on the other hand at least one narrower area that helps to distribute the adhesive by capillary action.

[0062] By utilizing the torsional flexibility of the translation stage, the torsional stiffness of the suspension system can be better managed. This is achieved by orienting the strips of the XY stage such that the direction of maximum torsional flexibility is towards the axis of rotation of the resonator. Its torsional flexibility is managed by moving these strips closer together.

[0063] Thus, the flexible suspension system 300 advantageously includes a lateral translation stage 32 with flexible bearings between the anchoring unit 30 and the first intermediate mass 303, the first intermediate mass 303 being attached to the structure 1 directly or by means of a plate 301 that is flexible in the first direction Z. The lateral translation stage 32 includes lateral strips 320 or lateral flexible rods 1320, which are straight and extend symmetrically along the second direction X with respect to a lateral axis D2 that intersects the pivot axis D.

[0064] In a particular non - limiting embodiment, as shown, the flexible suspension system 300 further includes a longitudinal translation stage 31 with flexible bearings between the anchoring unit 30 and the second intermediate mass 305. The longitudinal translation stage 31 includes longitudinal strips 310 or longitudinal flexible rods, which are straight and extend symmetrically along the third direction Y with respect to a longitudinal axis D1 that intersects the pivot axis D. Additionally, between the second intermediate mass 305 and the first intermediate mass 303, the lateral translation stage 32 with flexible bearings includes lateral strips 320 or lateral flexible rods, which are straight and extend symmetrically along the second direction X with respect to a lateral axis D2 that intersects the pivot axis D.

[0065] More specifically, the longitudinal axis D1 intersects the lateral axis D2, and in particular, the longitudinal axis D1, the lateral axis D2, and the pivot axis D are intersecting / concurrent.

[0066] In a more particular way, each of the longitudinal translation stage 31 and the lateral translation stage 32 includes at least two flexible strips or rods, each strip or rod being characterized by: its thickness in the second direction X when the strip or rod extends along the third direction Y, or its thickness in the third direction Y when the strip or rod extends along the second direction X; its height in the first direction Z; and its length in its extension direction, the length being at least five times the height, the height being at least as large as the thickness, more specifically, the height being at least five times the thickness, and even more specifically, the height being at least seven times the thickness.

[0067] More specifically, the lateral translation stage 32 includes at least two lateral flexible strips or rods that are parallel to each other and have the same length. Figure 1 and 4 A non - limiting alternative embodiment with four parallel lateral strips is shown. More specifically, each lateral strip consists of two half - strips arranged on two stacked levels, the two half - strips extending continuously from each other along the first direction Z. These half - strips are either completely separated / completely free from each other, or are made integral with each other by bonding or a similar means, or in the case of a silicon construction, by SiO2 growth, or by other means. Naturally, the longitudinal translation stage 31 (if present, since it is optional) can follow the same construction principle. Figure 6An alternative embodiment with flexible rods is shown, where the flexible rods are grouped into two levels with two rods each, and the rods have a substantially square cross-section; another alternative embodiment includes circular flexible rods. Without departing from the scope of the present invention, the number, arrangement, and cross-section of these strips or rods can vary.

[0068] More specifically, the lateral strips or rods of the lateral translation stage 32 have a first plane of symmetry that is parallel to the lateral axis D2 and passes through the pivot axis D.

[0069] More specifically, the lateral strips or rods of the lateral translation stage 32 have a second plane of symmetry that is parallel to the lateral axis D2 and orthogonal to the pivot axis D.

[0070] More specifically, the lateral strips or rods of the lateral translation stage 32 have a third plane of symmetry that is perpendicular to the lateral axis D2 and parallel to the pivot axis D.

[0071] More specifically, the lateral strips or rods of the lateral translation stage 32 extend on at least two levels parallel to each other, and each level is perpendicular to the pivot axis D.

[0072] More specifically, the arrangement of the lateral strips or rods of the lateral translation stage 32 is the same on each level.

[0073] More specifically, the straight flexible rod or lateral strip 320 is a flat strip whose height is at least five times its thickness.

[0074] More specifically, the straight flexible rod or lateral strip 320 is a rod with a square or circular cross-section, and its height is equal to its thickness.

[0075] More specifically, the longitudinal translation stage 31 includes at least two longitudinal flexible strips or rods that are parallel to each other and have the same length.

[0076] More specifically, the longitudinal strips or rods of the longitudinal translation stage 31 have a first plane of symmetry that is parallel to the longitudinal axis D1 and passes through the pivot axis D.

[0077] More specifically, the longitudinal strips or rods of the longitudinal translation stage 31 have a second plane of symmetry that is parallel to the longitudinal axis D1 and orthogonal to the pivot axis D.

[0078] More specifically, the longitudinal strips or rods of the longitudinal translation stage 31 have a third plane of symmetry that is perpendicular to the longitudinal axis D1 and parallel to the pivot axis D.

[0079] More specifically, the lateral strips or rods of the longitudinal translation stage 31 extend on at least two levels parallel to each other, and each level is perpendicular to the pivot axis D.

[0080] More specifically, the arrangement of the transverse strips or rods of the longitudinal translation stage 31 is the same at each level.

[0081] More specifically, the straight flexible rods or longitudinal strips 310 are flat strips whose height is at least five times their thickness.

[0082] More specifically, the straight flexible rods or longitudinal strips 310 are rods with a square or circular cross-section, whose height is equal to their thickness.

[0083] In particular, the resonator mechanism 100 includes an axial stop device that includes at least one first upper axial stop and at least one second lower axial stop to limit the translational travel of the inertial element 2 at least in the first direction Z. The axial stop device is arranged to cooperate with the inertial element 2 in a butting manner to protect the longitudinal strip 3 at least from axial impacts in the first direction Z, and the second symmetry plane is substantially equidistant from the first axial stop 7 and the second axial stop 8.

[0084] In a particular alternative embodiment, the resonator mechanism 100 includes a plate attached to or integral with the structure 1. The plate includes at least one flexible strip 302 that extends in a plane perpendicular to the pivot axis D and is attached to the first intermediate mass 303 and is arranged to allow the first intermediate mass 303 to move in the first direction Z. More specifically, the plate 301 includes at least two such coplanar flexible strips. However, if the height of the strips of the XY translation stage is smaller than the height of the flexible strip 3, especially less than one-third of the height of the flexible strip 3, and especially if these translation stages include flexible rods as shown Figure 6 then such a plate 301 is optional.

[0085] As explained above, the techniques used in the manufacturing process allow two separate strips to be obtained in the height of the silicon wafer, which enhances the torsional flexibility of the (translation) stage without making its translational flexibility greater. In addition, the resonator mechanism 100 can thus advantageously include at least two stacked basic components, each component bringing together the following elements of one level: the anchoring unit 30 and / or the base of the at least one inertial element 2, and the flexible pivot 200 or the flexible suspension system 300 (which always form a composite component), and / or the first intermediate mass 303, and / or the transverse translation stage 32, and / or the breakable elements used only during assembly and destroyed before the oscillator is put into use; each basic component can be assembled with at least one other basic component by gluing or similar means, by mechanical assembly, or in the case of a silicon structure by SiO2 growth, or by other means.

[0086] More specifically, such a basic component further includes at least one level of a second intermediate mass 305 and / or a longitudinal translation stage 31.

[0087] The invention also relates to a clock oscillator mechanism 500, which includes such a clock resonator mechanism 100 and an escapement mechanism 400 that are arranged to cooperate with each other.

[0088] The invention also relates to a watch movement 1000, which includes at least one such oscillator mechanism 500 and / or at least one resonator mechanism 100.

[0089] The invention also relates to a watch 2000, which includes at least one such movement 1000 and / or at least one oscillator mechanism 500 and / or includes at least one such resonator mechanism 100.

Claims

1. A resonator mechanism (100) for a timepiece, comprising a structure (1) and an anchoring unit (30), at least one inertial element (2) being suspended from said anchoring unit (30), said inertial element (2) being arranged to oscillate with a first rotational degree of freedom RZ about a pivot axis (D) extending along a first direction Z, said inertial element (2) being subjected to a restoring force exerted by a flexible pivot (200), said flexible pivot (200) comprising a plurality of substantially longitudinal elastic strips (3), each elastic strip being fixed at a first end to said anchoring unit (30) and at a second end to said inertial element (2), each said elastic strip (3) being capable of deforming substantially in a plane XY perpendicular to said first direction Z, wherein said anchoring unit (30) is suspended from said structure (1) by a flexible suspension system (300), said flexible suspension system (300) being arranged to allow said anchoring unit (30) to move in five flexible degrees of freedom of said flexible suspension system, said five flexible degrees of freedom being a first translational degree of freedom along said first direction Z, a second translational degree of freedom along a second direction X orthogonal to said first direction Z, a third translational degree of freedom along a third direction Y orthogonal to said second direction X and said first direction Z, a second rotational degree of freedom RX about an axis extending along said second direction X, and a third rotational degree of freedom RY about an axis extending along said third direction Y, characterized in that, The resonator mechanism (100) is a composite component made of at least two different materials. The composite component includes, on the one hand, the flexible pivot (200) and, on the other hand, the flexible suspension system (300). The flexible pivot (200) is made of a first material characterized by a first Young's modulus E1, a first yield strength σ1, and a first rigidity modulus G1. The flexible suspension system (300) is made of a second material characterized by a second Young's modulus E2, a second yield strength σ2, and a second rigidity modulus G2.

2. The resonator mechanism (100) according to claim 1, characterized in that, The value of the second rigidity modulus G2 is more than ten times the value of the first rigidity modulus G1.

3. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The ratio σ2 / E2 is at least twice the ratio σ1 / E1.

4. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The value of the first Young's modulus E1 is 1.5 times or greater than the value of the second Young's modulus E2.

5. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The value of the second yield strength σ2 is 1.5 times or greater than the value of the first yield strength σ1.

6. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The at least one inertial element (2) is integral with the flexible pivot (200).

7. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The flexible suspension system (300) is integral with the structure (1).

8. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The flexible pivot (200) can be removed from the flexible suspension system (300).

9. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The flexible suspension system (300) includes a clamping element (939) for fixing the flexible pivot (200).

10. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The flexible suspension system (300) includes at least one bladder (933) capable of receiving an adhesive to fix the flexible pivot (200).

11. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The joint between the flexible suspension system (300) and the flexible pivot (200) is formed on the anchoring unit (30).

12. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The ratio σ2 / E2 is at least three times the ratio σ1 / E1.

13. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The first material is silicon and / or silica.

14. The resonator mechanism (100) according to claim 13, characterized in that, The second material is nickel-phosphorus alloy NiP.

15. The resonator mechanism (100) according to claim 1 or 2, characterized in that, The flexible suspension system (300) includes a lateral translation stage (32) with flexible bearings between the anchoring unit (30) and a first intermediate mass (303). The first intermediate mass (303) is attached to the structure (1) directly or by means of a plate that is flexible in the first direction Z. The lateral translation stage (32) includes lateral strips or lateral flexible rods (320, 1320) that are straight and symmetrically extend along the second direction X about a lateral axis (D2) intersecting the pivot axis (D).

16. The resonator mechanism (100) according to claim 15, characterized in that, The flexible suspension system (300) includes a longitudinal translation stage (31) with flexible bearings between the anchoring unit (30) and a second intermediate mass (305). The longitudinal translation stage (31) includes longitudinal strips or longitudinal flexible rods (310, 1310) that are straight and symmetrically extend along the third direction Y about a longitudinal axis (D1) intersecting the pivot axis (D). And the flexible suspension system (300) includes the lateral translation stage (32) between the second intermediate mass (305) and the first intermediate mass (303).

17. The resonator mechanism (100) according to claim 16, characterized in that, The longitudinal axis (D1) intersects the lateral axis (D2).

18. The resonator mechanism (100) according to claim 15, characterized in that, The longitudinal translation stage (31) and the transverse translation stage (32) each include at least two flexible strips or rods, and each of the flexible strips or rods is characterized by the following parameters: the thickness of the flexible strip or rod in the second direction X when the flexible strip or rod extends in the third direction Y, or the thickness of the flexible strip or rod in the third direction Y when the flexible strip or rod extends in the second direction X; the height of the flexible strip or rod in the first direction Z; and the length of the flexible strip or rod in its extending direction, the length being at least five times the height, and the height being at least as large as the thickness.

19. A watch movement (1000) includes at least one resonator mechanism (100) according to any one of claims 1 to 18, and / or at least one watch oscillator mechanism (500), the watch oscillator mechanism (500) including a resonator mechanism (100) and an escapement mechanism (400) according to any one of claims 1 to 18 that are arranged to cooperate with each other.

20. A watch (2000) includes at least one watch movement (1000) according to claim 19 and / or at least one resonator mechanism (100) according to any one of claims 1 to 18.

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