Water leak detection apparatus and dicing saw apparatus

Abstract

The embodiment of the present application provides a water leakage detection device and a wafer sawing machine. The device comprises a detection line module, a water leakage detection circuit module and a processing module. The detection line module comprises two detection lines, one end of each of the two detection lines is connected to each other, and the other end of each of the two detection lines is connected to the water leakage detection circuit module, so that the two detection lines and the water leakage detection circuit module form a closed loop. The processing module is used for collecting the voltage of the water leakage detection circuit module at a preset node, judging whether the two detection lines are in an open circuit state of at least one detection line existing an open circuit, and judging whether the two detection lines are in a water leakage state of being short-circuited due to water leakage, the voltage of the preset node being different in the water leakage state and the open circuit state. The technical scheme can simply, conveniently and timely detect the water leakage state and the open circuit state.

Description

Technical Field

[0001] This invention relates to the field of object processing technology, and more specifically to a water leakage detection device and a dicing machine. Background Technology

[0002] In many industries, certain parts require cutting processes. For example, in semiconductor processing, technologies such as wheel cutting or laser cutting are commonly used to cut semiconductor devices. Traditional wheel cutting methods are limited in production efficiency and increase cutting costs due to the hardness of the material (e.g., SiC has a Mohs hardness of 9.5, close to diamond). Furthermore, it suffers from stringent requirements for edge chipping and the potential risk of cracking after cutting, making traditional wheel cutting uneconomical. Therefore, laser cutting has become the optimal solution.

[0003] Traditional laser cutting, mainly using laser stealth cutting technology, focuses a laser beam inside the workpiece to form a modified layer (the area where the explosion point connects). By precisely controlling the distance between the points, micro-cracks are formed inside, and then adjacent grains are separated by using a cleaver or vacuum cleaving.

[0004] Cutting a workpiece can cause the temperature in the cutting area to rise, especially with laser cutting. Because the laser's focused energy is high, the temperature in the cutting area rises rapidly, which can easily damage the workpiece. To address this, existing technologies spray water onto the cutting blade or substrate during cutting to lower the temperature. However, there are electronic components below the cutting module used for cutting control; therefore, it is necessary to detect any water leaks to prevent damage to these components. Summary of the Invention

[0005] The present invention was proposed in view of the above-mentioned problems. The present invention provides a leakage detection device and a dicing machine.

[0006] According to one aspect of the present invention, a water leakage detection device is provided, comprising: a detection line module, a water leakage detection circuit module, and a processing module, wherein the detection line module includes two detection lines, one end of each of the two detection lines is connected to each other, and the other end is respectively connected to the water leakage detection circuit module, so that the two detection lines and the water leakage detection circuit module form a closed loop; the processing module is used to collect the voltage of the water leakage detection circuit module at a preset node, so as to determine whether the two detection lines are in an open circuit state where at least one detection line is open, and to determine whether the two detection lines are in a leakage state where they are short-circuited due to water leakage, wherein the voltage of the preset node is different in the leakage state and the open circuit state.

[0007] For example, the processing module is specifically used to: determine whether the current voltage value of the collected voltage is within the leakage voltage range; when the current voltage value is within the leakage voltage range, determine that the two detection lines are in the leakage state; and when the current voltage value is outside the leakage voltage range, determine that the two detection lines are in the non-leakage state; determine whether the current voltage value of the collected voltage is within the open circuit voltage range; when the current voltage value is within the open circuit voltage range, determine that the two detection lines are in the open circuit state; and when the current voltage value is outside the open circuit voltage range, determine that the two detection lines are in the non-open circuit state; wherein the leakage voltage range and the open circuit voltage range do not overlap.

[0008] For example, the processing module includes a first comparison submodule; the first comparison submodule is used to acquire the voltage of the leakage detection circuit module at the preset node, and compare the current voltage value of the acquired voltage with the preset leakage voltage value, outputting a corresponding leakage result signal when the current voltage value is less than the preset leakage voltage value, and outputting a corresponding non-leakage result signal when the current voltage value is greater than the preset leakage voltage value; wherein, the leakage voltage range is: less than the preset leakage voltage value.

[0009] For example, the processing module further includes a second comparison submodule; the second comparison submodule is used to acquire the voltage of the leakage detection circuit module at the preset node, and compare the current voltage value of the acquired voltage with the preset open circuit voltage value, outputting a corresponding open circuit result signal when the current voltage value is greater than the preset open circuit voltage value, and outputting a corresponding non-open circuit result signal when the current voltage value is less than the preset open circuit voltage value; wherein, the open circuit voltage range is: greater than the preset open circuit voltage value; the leakage preset voltage value is less than the preset open circuit voltage value.

[0010] For example, the processing module is further specifically configured to: continuously determine that the two detection lines are in the leakage state as the current voltage value moves from the leakage voltage range to a preset voltage in the normal voltage range, and determine that the two detection lines are in the non-leakage state when the current voltage value continues to exceed the preset voltage after reaching the preset voltage from the leakage voltage range; wherein the leakage voltage range, the normal voltage range, and the circuit breaker voltage range do not overlap with each other.

[0011] For example, the processing module includes a third comparison submodule, which is used to acquire the voltage of the leakage detection circuit module at the preset node, compare the current voltage value of the acquired voltage with a preset leakage voltage value, output a corresponding leakage result signal when the current voltage value is less than the preset leakage voltage value, and continuously output the leakage result signal as the current voltage value rises from less than the preset leakage voltage value to the preset voltage, and output a corresponding non-leakage result signal when the current voltage value rises to greater than the preset voltage; wherein, the leakage voltage range is: less than the preset leakage voltage value.

[0012] For example, the processing module includes: a fourth comparison submodule; the fourth comparison submodule is used to acquire the voltage of the leakage detection circuit module at the preset node, and compare the current voltage value of the acquired voltage with the preset open circuit voltage value, outputting a corresponding open circuit result signal when the current voltage value is greater than the preset open circuit voltage value, and outputting a corresponding non-open circuit result signal when the current voltage value is less than the preset open circuit voltage value; wherein, the open circuit voltage range is: greater than the preset open circuit voltage value; the normal voltage range is: greater than the leakage preset voltage value and less than the preset open circuit voltage value; the leakage preset voltage value is less than the preset voltage, and the preset voltage is less than the preset open circuit voltage value.

[0013] For example, the processing module further includes a control submodule; the control submodule is configured to determine that the two detection lines are in the leakage state based on the leakage result signal, determine that the two detection lines are in the open circuit state based on the open circuit result signal, and determine that the two detection lines are in the normal state based on the non-leakage result signal and the non-open circuit result signal.

[0014] For example, the processing module further includes: a first isolation transmission module and / or a second isolation transmission module, wherein the first isolation transmission module is connected in series between the input terminal of the control submodule and the output terminal of the first comparison submodule or the third comparison submodule to electrically isolate the control submodule from the first comparison submodule or the third comparison submodule, and simultaneously transmits the leakage result signal and the non-leakage result signal to the input terminal of the control submodule; the second isolation transmission module is connected in series between the input terminal of the control submodule and the output terminal of the second comparison submodule or the fourth comparison submodule to electrically isolate the control submodule from the second comparison submodule or the fourth comparison submodule, and simultaneously transmits the circuit breaker result signal and the non-circuit breaker result signal to the input terminal of the control submodule.

[0015] For example, the processing module further includes: a first prompt submodule and / or a second prompt submodule, wherein the first prompt submodule is connected to the output terminal of the first comparison submodule or the third comparison submodule, and is used to issue a first prompt message when the first comparison submodule or the third comparison submodule outputs the leakage result signal; the second prompt submodule is connected to the output terminal of the second comparison submodule or the fourth comparison submodule, and is used to issue a second prompt message when the second comparison submodule or the fourth comparison submodule outputs the circuit breaker result signal.

[0016] For example, the leakage detection device further includes a first voltage divider element, the leakage detection circuit module includes a second voltage divider element, the first end of the first detection line and the first end of the second detection line are connected through the first voltage divider element; the second end of the first detection line is connected to the power supply terminal through at least the second voltage divider element; the second end of the second detection line is grounded; wherein, the preset node is the connection node between the second voltage divider element and the second end of the first detection line.

[0017] For example, the first voltage divider element includes at least one of the following: a voltage regulator and a resistor.

[0018] For example, the two detection lines are arranged parallel to each other or intertwined.

[0019] According to another aspect of the present invention, a dicing machine is provided, including the above-described leakage detection device.

[0020] For example, the dicing machine further includes a drying module, which is used to dry the area where the two detection lines are located when it is determined that the two detection lines are in the leakage state.

[0021] For example, when the leakage detection device is the leakage detection device described above; the control submodule is further configured to determine in real time whether the two detection lines are in the open circuit state, the leakage state, and the normal state when the drying module is drying, and control the drying module to stop working when the two detection lines reach the normal state.

[0022] According to embodiments of the present invention, a leak detection device and a dicing machine are provided, comprising two detection lines that form a closed loop with a leak detection circuit module. An open circuit in the two detection lines or a leak in the area where the two detection lines are located will affect the resistance of the two detection lines, thereby affecting the voltage at a preset node of the leak detection circuit module. Therefore, by measuring the voltage at the preset node, it is possible to detect whether the two detection lines are in a leaking or open-circuit state. This solution provides a simple, convenient, and timely detection of leaks and open circuits. Attached Figure Description

[0023] The above and other objects, features, and advantages of the present invention will become more apparent from the more detailed description of the embodiments of the invention in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same parts or steps.

[0024] Figure 1 A schematic block diagram of a leak detection device according to an embodiment of the present invention is shown;

[0025] Figure 2 A schematic block diagram of a processing module according to an embodiment of the present invention is shown;

[0026] Figure 3 A schematic block diagram of a processing module according to another embodiment of the present invention is shown; and

[0027] Figure 4 It shows Figure 3 The diagram shows a partial circuit diagram of the processing module. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the present invention more apparent, exemplary embodiments according to the present invention will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are merely a part of the embodiments of the present invention, and not all of the embodiments of the present invention. It should be understood that the present invention is not limited to the exemplary embodiments described herein. Based on the embodiments of the present invention described herein, all other embodiments obtained by those skilled in the art without inventive effort should fall within the protection scope of the present invention.

[0029] To at least partially solve the above problems, embodiments of the present invention provide a water leakage detection device. Figure 1 A schematic block diagram of a leak detection device 100 according to an embodiment of the present invention is shown. It should be noted that... Figure 1 The structure of the leak detection device shown is merely an example and not a limitation of the invention. The leak detection device according to the embodiments of the present invention is not limited to... Figure 1 The structure shown. For example, Figure 1 Resistors R1 and R2, as well as the voltage regulator SW, can be omitted or replaced with other electronic components. Furthermore, Figure 1 It can also include other electronic components. For example... Figure 1 As shown, the leak detection device 100 may include a detection line module 110, a leak detection circuit module 120, and a processing module 130.

[0030] The detection line module 110 includes two detection lines, one end of each line is connected to the other, and the other end is connected to the leakage detection circuit module 120, so that the two detection lines and the leakage detection circuit module 120 form a closed loop. Figure 1 In this paper, the two detection lines are represented by their respective equivalent resistances R3 and R4. The two detection lines described herein can be made of any material and can conduct electricity through water.

[0031] Two detection lines can be positioned within a target area to detect water leakage. The target area can be determined as needed. For example, in semiconductor processing, a waterproof sheet can be placed under the cutting table, and below the sheet are numerous electronic devices and equipment used for cutting control. If the waterproof sheet breaks, some water will leak down. Therefore, one or more sets of detection lines can be positioned at the lowest point in the space below the waterproof sheet, with each set consisting of two detection lines. The relative positions of the two detection lines can be set as needed. Exemplarily, and not limitingly, the two detection lines can be arranged parallel to each other. The distance between the two parallel detection lines can be adjusted according to the detection accuracy. The closer the distance between the two detection lines, the less leakage needs to be covered, and the higher the detection accuracy; the farther the distance between the two detection lines, the more leakage needs to be covered, and the lower the detection accuracy. Alternatively, the two detection lines can be intertwined. Compared to parallel arrangement, intertwining reduces the distance between the two detection lines. Consequently, a small amount of leakage is sufficient to make the two detection lines conductive, resulting in higher detection accuracy. Therefore, the two detection lines can preferably be arranged in a way that they are intertwined.

[0032] The processing module 130 is used to collect the voltage of the water leakage detection circuit module 120 at a preset node, so as to determine whether the two detection lines are in an open circuit state where at least one detection line is open, and whether the two detection lines are in a water leakage state where they are short-circuited due to water leakage. The voltage of the preset node is different in the water leakage state and the open circuit state.

[0033] The processing module 130 can acquire the voltage at a preset node A of the leak detection circuit module 120. In one example, the processing module 130 can output the acquired voltage to a display device or other associated device, allowing the user to determine whether the two detection lines are open-circuited or leaking based on the voltage. Associated devices can be personal computers, servers, mobile terminals, etc. In another example, the processing module 130 can determine the state of the two detection lines based on the voltage at the preset node A. In one embodiment, when a leak occurs, the leak covers the two detection lines, causing a short circuit. At this time, the resistance of the two detection lines tends to be infinitesimally small, and the voltage they receive in the circuit decreases. The voltage at the preset node A is lower than the voltage under normal conditions, and the two detection lines are in a short-circuit state, which can also be called a leaking state. That is, when the voltage at the preset node is lower than the voltage under normal conditions, the two detection lines are in a leaking state due to a short circuit caused by the leak. When at least one of the two detection lines is open-circuited, both detection lines are in an open-circuit state, and the closed loop formed by the two detection lines and the leakage detection circuit module 120 is also in an open-circuit state. At this time, the voltage at the preset node A is higher than the voltage under normal conditions. For example, the voltage at the preset node A can be equal to or basically equal to the power supply voltage Vcc.

[0034] According to the above technical solution, two detection lines are set up, forming a closed loop with the leakage detection circuit module. An open circuit in either of the two detection lines or leakage in the area where the two detection lines are located will affect the resistance of the two detection lines, thus affecting the voltage at a preset node of the leakage detection circuit module. Therefore, by measuring the voltage at the preset node, it is possible to detect whether the two detection lines are in a leaking or open-circuit state. This solution provides a simple, convenient, and timely detection of both leaks and open circuits.

[0035] For example, the processing module is specifically used to: determine whether the current voltage value of the acquired voltage is within the leakage voltage range; if the current voltage value is within the leakage voltage range, determine that the two detection lines are in a leakage state; and if the current voltage value is outside the leakage voltage range, determine that the two detection lines are in a non-leakage state; determine whether the current voltage value of the acquired voltage is within the open circuit voltage range; if the current voltage value is within the open circuit voltage range, determine that the two detection lines are in an open circuit state; and if the current voltage value is outside the open circuit voltage range, determine that the two detection lines are in a non-open circuit state; wherein the leakage voltage range and the open circuit voltage range do not overlap.

[0036] For two detection lines, the resistance between them differs under normal conditions, during leakage / short circuit conditions, and during open circuit conditions, resulting in different voltages at the preset node A under these conditions. Theoretically, for any specific circuit, the voltage at the preset node A should be three different fixed voltage values ​​under these three states. However, different application scenarios, such as changes in detection line length, ambient temperature, and humidity, can cause changes in the resistance of the detection lines, thus affecting the voltage value at the preset node A under different states. Exemplarily, but not limitingly, a voltage range can be set for each state to determine whether the detection line is in that state. This better adapts to various scenarios, thereby expanding the application range of the leakage detection device. For example, assuming a power supply voltage of 12V, 0-12V can be divided into three ranges: 0-6.4V can be set as the leakage voltage range, 6.4V-9.1V as the normal voltage range, and 9.1V-12V as the open circuit voltage range. Of course, three discontinuous voltage ranges can also be set for the above three states for detection.

[0037] In one embodiment, the upper limit of the leakage voltage range can be set lower than or equal to the lower limit of the normal voltage range, and the lower limit of the circuit breaking voltage range can be set higher than or equal to the upper limit of the normal voltage range. This embodiment can be applied to similar... Figure 1 In the case where the potential at the preset node A is not lower than the potential at either end of the two detection lines, the voltage range setting method can be reversed. That is, the lower limit of the leakage voltage range can be set higher than or equal to the upper limit of the normal voltage range, and the upper limit of the circuit breaker voltage range can be set lower than or equal to the lower limit of the normal voltage range. For example, the voltage range setting method can be... Figure 1 When the power supply terminal (Vcc terminal) and the ground terminal are interchanged, the potential of the preset node A is not higher than the potential of either end of the two detection lines.

[0038] For example, the processing module 130 can compare the collected voltage with the leakage voltage range and the open-circuit voltage range respectively, and determine the status of the two detection lines based on the comparison results. This comparison can be achieved using a simple comparator. As mentioned above, in one embodiment, the leakage voltage range is 0–6.4V, the open-circuit voltage range is 9.1–12V, and the normal voltage range is 6.4–9.1V. The status of the two detection lines can be determined by whether the collected voltage falls within the above ranges. For example, if the collected voltage is 3V, this voltage falls within the leakage voltage range, and at this time, both detection lines are in a leakage state.

[0039] According to the above technical solution, by comparing the collected voltage with the leakage voltage range and the open circuit voltage range respectively, the status of the two detection lines can be quickly determined based on the comparison results. This solution is simple and convenient, and can quickly and accurately detect leakage and open circuit conditions.

[0040] For example, the processing module includes a first comparison submodule; the first comparison submodule is used to acquire the voltage of the leakage detection circuit module at a preset node, and compare the current voltage value of the acquired voltage with the preset leakage voltage value, outputting a corresponding leakage result signal when the current voltage value is less than the preset leakage voltage value, and outputting a corresponding non-leakage result signal when the current voltage value is greater than the preset leakage voltage value; wherein, the leakage voltage range is: less than the preset leakage voltage value.

[0041] The preset voltage value for leakage can be set as needed. In one example, the preset voltage value for leakage can be 6.4V. The leakage result signal is used to indicate that the two detection lines are in a leakage state, and the non-leakage result signal is used to indicate that the two detection lines are not in a leakage state.

[0042] The processing module 130 may include a comparison submodule for leak detection, such as the first comparison submodule described above and the third comparison submodule described below. Furthermore, the processing module 130 may also include a comparison submodule for circuit breaker detection, such as the second and fourth comparison submodules described below. Figure 2 A schematic block diagram of a processing module 130 according to an embodiment of the present invention is shown. See also Figure 2 The processing module 130 includes a first comparison submodule 132 and a second comparison submodule 134. The first comparison submodule 132 and the second comparison submodule 134 can be implemented using any comparator module. By way of example and not limitation, the comparator module can be constructed using a comparator or an operational amplifier alone or in combination with other electronic components (e.g., resistors, capacitors, etc.). Figure 2 U in China A This indicates the voltage at a preset node. In the first comparison submodule 132, the current voltage value at the preset node is compared with a preset leakage voltage value. When the current voltage value at the preset node is less than the preset leakage voltage value, the first comparison submodule 132 can output a first level, which can be either a high level or a low level. This first level corresponds to a leakage result signal, indicating that both detection lines are in a leakage state. Conversely, when the current voltage value at the preset node is greater than the preset leakage voltage value, the first comparison submodule 132 can output a second level different from the first level, which can be either a low level or a high level. This second level corresponds to a non-leakage result signal, indicating that the two detection lines are not in a leakage state (or are in a non-leakage state).

[0043] For example, the processing module 130 may further include a control submodule 136, which may directly or indirectly receive the leakage result signal and the non-leakage result signal output by the first comparison submodule 132, so as to determine whether the two detection lines are in a leakage state based on these signals.

[0044] The first comparison submodule can compare the voltage at the preset node with the preset leakage voltage value, thus simply and directly determining whether the detection line is in a leaking state.

[0045] According to an embodiment of the present invention, the processing module further includes a second comparison submodule 134; the second comparison submodule 134 is used to acquire the voltage of the leakage detection circuit module at a preset node, and compare the current voltage value of the acquired voltage with the preset open circuit voltage value, outputting a corresponding open circuit result signal when the current voltage value is greater than the preset open circuit voltage value, and outputting a corresponding non-open circuit result signal when the current voltage value is less than the preset open circuit voltage value; wherein, the open circuit voltage range is: greater than the preset open circuit voltage value; the leakage preset voltage value is less than the preset open circuit voltage value.

[0046] The preset open circuit voltage value can be set as needed; in one example, the preset open circuit voltage value could be 9.1V. The open circuit result signal indicates that the two detection lines are in an open circuit state, while the non-open circuit result signal indicates that the two detection lines are not in an open circuit state.

[0047] See also Figure 2 The diagram illustrates the second comparison submodule 134. In the second comparison submodule 134, the current voltage value at a preset node is compared with a circuit breaker preset voltage value. When the current voltage value at the preset node is greater than the circuit breaker preset voltage value, the second comparison submodule 134 can output a third level, which can be either a high level or a low level. This third level corresponds to a circuit breaker result signal, indicating that the two detection lines are in a circuit breaker state. Conversely, when the current voltage value at the preset node is less than the circuit breaker preset voltage value, the second comparison submodule 134 can output a fourth level, which can be either a low level or a high level. This fourth level corresponds to a non-circuit breaker result signal, indicating that the two detection lines are not in a circuit breaker state (or are in a non-circuit breaker state).

[0048] For example, the processing module 130 may further include a control submodule 136, which may directly or indirectly receive the open circuit result signal and the non-open circuit result signal output by the second comparison submodule 134, so as to determine whether the two detection lines are in an open circuit state based on these signals. Further, the control submodule 136 may also determine whether the two detection lines are in a non-leaking and non-open circuit state (i.e., normal state) based on the non-leakage result signal output by the first comparison submodule 132 and the non-open circuit result signal output by the second comparison submodule.

[0049] The second comparison submodule 134 can compare the voltage at the preset node with the preset open circuit voltage value, thereby simply and directly determining whether the detection line is in an open circuit state.

[0050] Typically, some comparator modules do not allow, or are unlikely to allow, the input signals at the non-inverting and inverting input terminals to be equal. Therefore, the case where the current voltage value at the preset node equals the leakage preset voltage value or the circuit breaker preset voltage value can be disregarded; however, this is only an example. Alternatively, the case where the current voltage value at the preset node equals the leakage preset voltage value or the circuit breaker preset voltage value can be considered. In this case, for the case where the current voltage value equals the leakage preset voltage value, a leakage result signal or a non-leakage result signal can be output. For the case where the current voltage value equals the circuit breaker preset voltage value, a circuit breaker result signal or a non-circuit breaker result signal can be output.

[0051] It should be noted that in the above embodiments, the upper limit of the leakage voltage range is lower than the lower limit of the circuit breaker voltage range (corresponding to the case where the potential at the preset node is not lower than the potential at either end of the two detection lines). In this case, a leakage result signal can be output when the current voltage value at the preset node is less than the leakage preset voltage value, and a non-leakage result signal can be output otherwise. Similarly, a circuit breaker result signal can be output when the current voltage value at the preset node is greater than the circuit breaker preset voltage value, and a non-circuit breaker result signal can be output otherwise. However, when the lower limit of the leakage voltage range is higher than the upper limit of the circuit breaker voltage range (corresponding to the case where the potential at the preset node is not higher than the potential at either end of the two detection lines), the above judgment criteria can be reversed. That is, a leakage result signal can be output when the current voltage value at the preset node is greater than the leakage preset voltage value, and a non-leakage result signal can be output otherwise. Conversely, a circuit breaker result signal can be output when the current voltage value at the preset node is less than the circuit breaker preset voltage value, and a non-circuit breaker result signal can be output otherwise. Accordingly, the input signals of the comparators in the first and second comparator submodules can also be changed (i.e., the non-inverting and inverting input terminals are interchanged), and the connection positions of the power supply Vcc and ground can also be interchanged, which will not be elaborated further.

[0052] For example, the processing module is further specifically configured to: continuously determine that the two detection lines are in a leaking state during the process of the current voltage value reaching a preset voltage within the normal voltage range from the leakage voltage range, and determine that the two detection lines are in a non-leaking state when the current voltage value continues to exceed the preset voltage after reaching the preset voltage from the leakage voltage range; wherein the leakage voltage range, the normal voltage range, and the circuit breaker voltage range do not overlap with each other.

[0053] For example, when water leakage exists in the area where the two detection lines are located (i.e., the aforementioned target area), the leakage can be removed by drying or other methods. During the drying process, the leakage between the two detection lines continuously decreases, and the voltage at the preset node slowly increases or decreases. If the upper limit of the leakage voltage range is lower than the lower limit of the circuit breaker voltage range (corresponding to the case where the potential at the preset node is not lower than the potential at either end of the two detection lines), the voltage at the preset node slowly increases as the leakage decreases. If the lower limit of the leakage voltage range is higher than the upper limit of the circuit breaker voltage range (corresponding to the case where the potential at the preset node is not higher than the potential at either end of the two detection lines), the voltage at the preset node slowly decreases as the leakage decreases. To ensure complete removal of leakage, a preset voltage can be set within the normal voltage range. This means that only when the voltage at the preset node rises above or falls below the preset voltage from the leakage voltage range can not only the leakage be completely removed, but also prevent frequent switching between the drying and cutting modules caused by fluctuations in the preset voltage near the boundary between the leakage and normal voltage ranges due to other reasons, thus improving equipment reliability. A rise above or fall below the preset voltage from the leakage voltage range can be considered as exceeding the preset voltage after it has been reached within the leakage voltage range. In one embodiment, the leakage voltage range is 0–6.4V, the circuit breaker voltage range is 9.1–12V, and the normal voltage range is 6.4–9.1V. The preset voltage within the normal voltage range is 8V. When the voltage at the preset node gradually increases from the leakage voltage range of 0–6.4V to above 6.4V, i.e., entering the normal voltage range, if the voltage at the preset node is still less than 8V, then it is determined that both detection lines are still in a leakage state. If the voltage at the preset node increases to above 8V, then it can be determined that the two detection lines are no longer in a leakage state.

[0054] According to the above technical solution, by comparing the voltage at the preset node with the leakage voltage range and the circuit breaker voltage range, the status of the two detection lines can be quickly determined based on the comparison results. Furthermore, when the voltage value at the preset node moves from the leakage voltage range to the normal voltage range, the status of the two detection lines is not immediately switched. Instead, the two detection lines are only determined to be in a non-leakage state when the voltage value exceeds the preset voltage. This effectively prevents frequent switching between the two determined states, reduces damage to the equipment, and helps ensure that leaks are eliminated as much as possible.

[0055] For example, such as Figure 3 As shown, with Figure 2In contrast, the processing module includes a third comparison submodule 310, which is used to acquire the voltage of the leakage detection circuit module at a preset node, compare the current voltage value of the acquired voltage with the preset leakage voltage value, output the corresponding leakage result signal when the current voltage value is less than the preset leakage voltage value, and continuously output the leakage result signal as the current voltage value rises from less than the preset leakage voltage value to the preset voltage value, and output the corresponding non-leakage result signal when the current voltage value rises to greater than the preset voltage value; wherein, the leakage voltage range is: less than the preset leakage voltage value.

[0056] As described above, the third comparison submodule 310 can be implemented using a hysteresis comparator module. The characteristics of the hysteresis comparator are used to prevent frequent switching between the leakage state and the non-leakage state. Figure 3 and Figure 2 In comparison, it is actually to Figure 2 The first comparison submodule 132 shown can be replaced with the third comparison submodule 310. Furthermore, Figure 2 The second comparison submodule 134 shown can also be replaced by the fourth comparison submodule 320.

[0057] Figure 4 Show Figure 3 The diagram shows a partial circuit diagram of the processing module. (See attached diagram.) Figure 4 As shown, the third comparator submodule 310 can be constructed using an operational amplifier U5B paired with three resistors R14, R15, and R22. Furthermore, Figure 4 A fourth comparison submodule 320 is also shown, which compares the current voltage value of the acquired voltage with the preset open-circuit voltage value and outputs the corresponding result signal. The fourth comparison submodule 320 can be constructed using a comparator U5A, a resistor R13, and a Zener diode Z3. Resistor R13 and Zener diode Z3 provide a stable reference voltage or reference voltage for comparator U5A. Note that... Figure 4 The circuit structure shown is merely an example and not a limitation of the invention. For example, Figure 4 The comparison submodule for leak detection is shown as a hysteresis comparator module (i.e., the third comparison submodule 310). However, it can also be implemented as a regular single-limit comparator module, similar to the fourth comparison submodule 320. In this case, the comparison submodule for leak detection would be the first comparison submodule 132 mentioned above. Of course, the comparison submodule for circuit breaker detection, such as the second comparison submodule 134 or the fourth comparison submodule 320, can also be implemented as a hysteresis comparator module similar to the third comparison submodule 310. For example... Figure 4 The Zener diode Z3 shown can be replaced with a resistor, using a resistor divider method.

[0058] Figure 4A portion of the leak detection circuit module 120 is shown, namely Figure 4 The resistor R16 shown is... Figure 1 The resistor R1 is shown. Figure 4 The location of the preset node A is also shown. See also Figure 4 The voltage at the preset node A collected can be input to the inverting input (pin 6) of the operational amplifier in the third comparison submodule 310 and the non-inverting input (pin 3) of the comparator in the fourth comparison submodule 320, respectively. In this embodiment of the invention, both the comparison submodule for leak detection and the comparison submodule for open circuit detection can be implemented as ordinary single-limit comparator modules. In this case, the circuit of the third comparison submodule 310 can be replaced with a circuit similar to that of the fourth comparison submodule 320, except that the input of the voltage at the preset node A in the comparator is retained. Figure 3 The input relationship is shown. When the third comparison submodule 310 is replaced by a single-limit comparator module (i.e., the first comparator submodule), the voltage at preset node A can be input to the inverting input of the comparator in the first comparison submodule. At this time, the non-inverting input of the comparator in the first comparison submodule and the inverting input of the comparator in the second comparison submodule (which replaces the fourth comparison submodule 320) can respectively input the preset leakage voltage value and the preset circuit breaker voltage value. In the third comparison submodule 310, the current voltage value at the preset node is compared with the preset leakage voltage value.

[0059] Continue reading Figure 4 A resistor R22 can be added to operational amplifier U5B as positive feedback. The voltage at the preset node is collected and input to the inverting input 6 of operational amplifier U5B in the third comparison submodule 310 and the non-inverting input 3 of comparator U5A in the fourth comparison submodule 320. The non-inverting input 5 of operational amplifier U5B in the third comparison submodule 310 and the negative input 2 of comparator U5A in the fourth comparison submodule 320 are respectively input to the first reference voltage and the second reference voltage. The second reference voltage is equal to the preset voltage value of the circuit breaker. The first reference voltage is not necessarily equal to the preset voltage value of the water leakage. The hysteresis comparator is a dual-limit comparator. In the third comparison submodule 310, the preset voltage value of the water leakage (e.g., 6.4V) is used as its lower limit, and the preset voltage in the normal voltage range (e.g., 8V) is used as its upper limit. The upper and lower limits of the hysteresis comparator can depend on resistor R22 and the first reference voltage. Therefore, the resistance value of R22 and the magnitude of the first reference voltage can be adjusted according to the required threshold voltage (including the upper and lower limits).

[0060] In the third comparison submodule 310, the voltage at the preset node is compared with the preset leakage voltage value. When the voltage at the preset node is less than the preset leakage voltage value, and when the voltage at the preset node rises from less than the preset leakage voltage value to the preset voltage, the third comparison submodule 310 can output a fifth level, which can be either a high level or a low level. This fifth level corresponds to a leakage result signal, indicating that both detection lines are in a leakage state. When the voltage at the preset node rises to greater than the preset voltage, the third comparison submodule 310 can output a sixth level, which can be either a low level or a high level. This sixth level corresponds to a non-leakage result signal, indicating that both detection lines are in a non-leakage state. It can be understood that if the voltage drops from the normal voltage range to the leakage voltage range, and the voltage at the preset node is greater than the preset leakage voltage value but less than the preset voltage, the output is a non-leakage result signal.

[0061] In the fourth comparison submodule 320, the voltage at the preset node is compared with the preset open-circuit voltage value. When the voltage at the preset node is greater than the preset open-circuit voltage value, the fourth comparison submodule 320 outputs a seventh level, which is either a high level or a low level. This seventh level corresponds to the open-circuit result signal, indicating that the two detection lines are in an open-circuit state. Conversely, the fourth comparison submodule 320 outputs an eighth level, which is either a low level or a high level. This eighth level corresponds to the non-open-circuit result signal, indicating that the two detection lines are in a non-open-circuit state.

[0062] Continue reading Figure 4 In the fourth comparator submodule 320, comparator U5A's pin 8 is connected to the power supply, and pin 4 is grounded. To reduce power supply interference, capacitor C6 is also included. One pin of capacitor C6 is connected to the power supply, and the other is grounded, thus filtering the power supply.

[0063] It should be noted that in the above embodiments, the upper limit of the leakage voltage range is lower than or equal to the lower limit of the normal voltage range, and the upper limit of the normal voltage range is lower than or equal to the lower limit of the circuit breaker voltage range (corresponding to the case where the potential at the preset node is not lower than the potential at either end of the two detection lines). In this case, a corresponding leakage result signal can be output when the current voltage value is less than the leakage preset voltage value; and a leakage result signal can be continuously output as the current voltage value rises from less than the leakage preset voltage value to the preset voltage. A corresponding non-leakage result signal is output when the current voltage value rises to greater than the preset voltage, and a circuit breaker result signal is output when the current voltage value at the preset node is greater than the circuit breaker preset voltage value, and a non-circuit breaker result signal is output otherwise. However, when the lower limit of the leakage voltage range is higher than or equal to the upper limit of the normal voltage range, and the lower limit of the normal voltage range is higher than or equal to the upper limit of the circuit breaker voltage range (corresponding to the case where the potential at the preset node is not higher than the potential at either end of the two detection lines), the above judgment criteria can be reversed. That is, a corresponding leakage result signal can be output when the current voltage value is greater than the preset leakage voltage value; and a leakage result signal can be continuously output as the current voltage value decreases from greater than the preset leakage voltage value to the preset voltage value; a corresponding non-leakage result signal can be output when the current voltage value decreases to less than the preset voltage value; and a circuit breaker result signal can be output when the current voltage value at the preset node is less than the preset circuit breaker voltage value, and vice versa. Accordingly, the input signals of the comparators in the third comparison submodule 310 and the fourth comparison submodule 320 can also be changed (i.e., the non-inverting input and the inverting input are interchanged), which will not be elaborated further.

[0064] According to the above technical solution, by setting a preset voltage in the third comparison submodule as the judgment condition for whether the water leakage state ends, the frequent switching between the water leakage state and the non-water leakage state can be effectively prevented, and the damage to the circuit can be reduced.

[0065] According to an embodiment of the present invention, the processing module includes: a fourth comparison submodule; the fourth comparison submodule is used to acquire the voltage of the leakage detection circuit module at a preset node, and compare the current voltage value of the acquired voltage with the preset open circuit voltage value, outputting a corresponding open circuit result signal when the current voltage value is greater than the preset open circuit voltage value, and outputting a corresponding non-open circuit result signal when the current voltage value is less than the preset open circuit voltage value; wherein, the open circuit voltage range is: greater than the preset open circuit voltage value; the normal voltage range is: greater than the leakage preset voltage value and less than the preset open circuit voltage value; the leakage preset voltage value is less than the preset voltage, and the preset voltage is less than the preset open circuit voltage value.

[0066] The implementation of the fourth comparison submodule can be referred to the above embodiments, and will not be repeated here.

[0067] In addition to being implemented using hardware comparator modules, any one or more of the first, second, third, and fourth comparison submodules described above can also be implemented using software algorithms.

[0068] For example, the processing module further includes a control submodule; the control submodule is used to determine that the two detection lines are in a leaking state based on the leakage result signal, to determine that the two detection lines are in an open circuit state based on the open circuit result signal, and to determine that the two detection lines are in a normal state based on the non-leakage result signal and the non-open circuit result signal together.

[0069] For example, the control submodule can be implemented using processor chips such as microcontrollers, microprocessors, digital signal processors (DSPs), field-programmable gate arrays (FPGAs), programmable logic arrays (PLAs), and application-specific integrated circuits (ASICs) and their peripheral circuits. In one embodiment, the control submodule can be directly or indirectly connected to a first comparison submodule or a third comparison submodule, and / or directly or indirectly connected to a second comparison submodule or a fourth submodule. The control submodule can acquire the signals output by the first comparison submodule or the second comparison submodule, and / or the third submodule or the fourth submodule, and determine the state of the two detection lines based on the signals. For example, if the first comparison submodule outputs a high level and the second comparison submodule outputs a low level, the control submodule can determine that the two detection lines are in a leaking state based on the levels output by the two comparison submodules.

[0070] According to the above technical solution, by setting up a control submodule, the status of the two detection lines can be quickly determined based on the signal type obtained by the control submodule.

[0071] For example, the processing module further includes: a first isolation transmission module, configured to be connected in series between the input terminal of the control submodule and the output terminal of the first comparison submodule or the third comparison submodule, to electrically isolate the control submodule from the first comparison submodule or the third comparison submodule, and simultaneously transmit the leakage result signal and the non-leakage result signal to the input terminal of the control submodule; and a second isolation transmission module, configured to be connected in series between the input terminal of the control submodule and the output terminal of the second comparison submodule or the fourth comparison submodule, to electrically isolate the control submodule from the second comparison submodule or the fourth comparison submodule, and simultaneously transmit the circuit breaker result signal and the non-circuit breaker result signal to the input terminal of the control submodule.

[0072] In one embodiment, the first isolated transmission module and / or the second isolated transmission module can be implemented using an optical coupler. (Continue reading...) Figure 3In the third comparison submodule 310, the output pin 7 of operational amplifier U5B is connected to pin 1 of the first isolation transmission module U15 via resistor R18. Pins 3 and 4 of the first isolation transmission module U15 are connected to multiple pins of the control submodule. In the fourth comparison submodule 320, the output pin 1 of comparator U5A is connected to pin 1 of the second isolation transmission module U16 via resistor R17. Pins 3 and 4 of the first isolation transmission module U15 are connected to multiple pins of the control submodule to transmit leakage and non-leakage result signals to the control submodule. Similarly, pins 3 and 4 of the second isolation transmission module U16 are connected to multiple pins of the control submodule to transmit circuit breaker and non-circuit breaker result signals to the control submodule. Figure 3 As shown, the first isolation transmission module U15 and the second isolation transmission module U16 also have pin 2, which is directly grounded.

[0073] According to the above technical solution, by setting a first isolation transmission module and / or a second isolation transmission module, the front-end circuit and the back-end circuit can be effectively isolated while realizing signal transmission, preventing them from affecting each other, thereby ensuring the accuracy of the detection results.

[0074] For example, the processing module further includes: a first prompt submodule and / or a second prompt submodule; the first prompt submodule is connected to the output terminal of the first comparison submodule or the third comparison submodule, and is used to issue a first prompt message when the first comparison submodule or the third comparison submodule outputs a water leakage result signal; the second prompt submodule is connected to the output terminal of the second comparison submodule or the fourth comparison submodule, and is used to issue a second prompt message when the second comparison submodule or the fourth comparison submodule outputs a circuit breaker result signal.

[0075] Either the first prompt submodule or the second prompt submodule can be implemented using any module capable of outputting prompt information, including but not limited to one or more of the following: a display screen, a speaker, a communication device, an alarm light, and a buzzer. Either the first prompt information or the second prompt information can be implemented using any suitable information format, such as one or more of the following: image information, video information, audio information, light information, and digital information. In one embodiment, such as... Figure 3 As shown, the first prompt submodule can be implemented using LED D6, and the second prompt submodule can be implemented using LED D5. For example, see [link to example]. Figure 3LED D6 can be connected in series between the output pin 7 of operational amplifier U5B in the third comparator submodule 310 (which can also be replaced by the first comparator submodule) and pin 1 of the first isolation transmission module U15. LED D5 can be connected in series between the output pin 1 of comparator U5A in the fourth comparator submodule 320 (which can also be replaced by the second comparator submodule) and pin 1 of the second isolation transmission module U16.

[0076] According to the above technical solution, by setting a first prompt submodule and / or a second prompt submodule, corresponding prompt information can be output in a timely manner when the two detection lines are in an open circuit or leaking state, prompting the user to carry out maintenance as soon as possible. This technical solution can effectively and promptly notify the user of the status of the two detection lines, resulting in a better user experience.

[0077] For example, the water leakage detection device further includes a first voltage divider element, the water leakage detection circuit module includes a second voltage divider element, the first end of the first detection line and the first end of the second detection line are connected through the first voltage divider element; the second end of the first detection line is connected to the power supply terminal through at least the second voltage divider element; the second end of the second detection line is grounded; wherein, the preset node is the connection node between the second voltage divider element and the second end of the first detection line.

[0078] For example, the voltage at the preset node can be positioned in different ranges under different conditions by setting a first voltage divider element and a second voltage divider element. In one embodiment, the first voltage divider element can be implemented as a voltage regulator and / or a resistor. When the power supply terminal Vcc is directly connected to the second end of the first detection line, if there is a leak between the first and second detection lines, the theoretical voltage at the preset node A is 0. When at least one of the two detection lines is open-circuited, the theoretical voltage at the preset node A is equal to the power supply voltage Vcc. Under normal conditions, the theoretical voltage at the preset node A is the regulated voltage of the voltage regulator or the voltage obtained by voltage division by the resistor (referring to the resistor in the first voltage divider element). If there is no first voltage divider element and the two detection lines are directly connected together, then under open-circuit conditions, the voltage at the preset node A is Vcc; under short-circuit conditions and under normal conditions, if the resistance of the detection lines is not considered, the voltage at the preset node A is 0, but if the resistance of the detection lines is considered, there should actually be a certain voltage value, and they should be slightly different. The function of the first voltage divider element is to widen the voltage difference between short-circuit and normal conditions.

[0079] For example, the second voltage divider element can be a resistor. For instance... Figure 1As shown, the second voltage divider can be a series connection of resistor R1 (which can be called the first resistor) and resistor R2 (which can be called the second resistor). The first terminal of resistor R1 is connected to the power supply terminal Vcc, and the second terminal is connected to the first terminal of resistor R2. The second terminal of resistor R2 is connected to the second terminal of the first detection line. By setting the second voltage divider, the leakage voltage range, normal voltage range, and open-circuit voltage range can be made to not overlap. In this way, the processing module can determine the status of the two detection lines based on the voltage range of the preset node.

[0080] According to the above technical solution, by setting the first voltage divider element and the second voltage divider element, the voltage ranges corresponding to different states can be made to not overlap with each other, thereby enabling the state between the two detection lines to be quickly determined based on the voltage of the preset node.

[0081] According to another aspect of this application, a dicing machine is also provided, which includes the leakage detection device 100 described in any of the above embodiments.

[0082] For example, the dicing machine also includes a drying module. The drying module is used to dry the area where the two detection lines are located when it is determined that the two detection lines are leaking.

[0083] The drying module can be communicatively connected to the processing module 130, such as the control submodule within the processing module 130. This communicative connection can be achieved, for example, via any wired or wireless communication method. The processing module 130 can generate corresponding control signals based on the currently determined states of the two detection lines to control the operation of the drying module. In one example, when the processing module 130 receives a leakage result signal, it can generate a first control signal to control the drying module to perform a drying operation. The first control signal can be, for example, a high level. When the processing module 130 receives a non-leakage result signal, it can generate a second control signal to control the drying module to stop performing the drying operation. The second control signal can be, for example, a low level.

[0084] The drying module can dry the two detection lines in time when they are leaking, thereby reducing the damage to electronic components or equipment caused by the leak.

[0085] For example, when the water leakage detection device is the water leakage detection device including the control submodule mentioned above; the control submodule is also used to determine in real time whether the two detection lines are in an open circuit state, a water leakage state, or a normal state when the drying module is drying, and to control the drying module to stop working when the two detection lines reach the normal state.

[0086] For example, in the embodiment described above that determines whether there is a leak based solely on the leak voltage range, upon determining a leak, the drying module can be controlled to dry the device, causing the voltage at the preset node to gradually rise until it exceeds the preset leak voltage value. Once the voltage at the preset node exceeds the preset leak voltage value, the control submodule receives a non-leakage result signal, confirming a non-leakage state. If it is also not in an open-circuit state, it can be determined to be in a normal state, at which point drying can be stopped, and the cutting operation can continue normally. This approach directly sets the control submodule to determine no leak after the voltage exceeds the preset leak voltage value, and then controls the cutting module of the dicing machine to start working. In practical applications, when the voltage at the preset node fluctuates slightly around the preset leak voltage value (e.g., 6.4V), it will frequently trigger the opening and closing of the cutting module, adversely affecting the dicing machine. Therefore, a more preferable approach is to combine the leak voltage range with a preset voltage within the normal voltage range to determine whether there is a leak. In the embodiment described above, which combines the leakage voltage range with a preset voltage within the normal voltage range to determine whether a leakage is occurring, upon determining a leakage, the drying module can be controlled to dry the device, causing the voltage at the preset node to gradually rise until it exceeds the preset leakage voltage value. Drying continues until the voltage at the preset node rises above the preset voltage within the normal voltage range. At this point, the control submodule receives a non-leakage result signal, confirming a non-leakage state. If it is also in a non-open-circuit state, it can be determined to be in a normal state. At this point, drying can be stopped, and the cutting operation can continue normally.

[0087] Since the resistance in the circuitry (which can be referred to as the downstream circuitry) of the drying module is typically high, for example, greater than 5MΩ, the resistance value can change in a humid environment. Therefore, optionally, the circuit board containing the drying module can be coated with a waterproof, moisture-proof, and anti-static material. For example, at least some of the electronic components in the leakage detection device can also be arranged on the aforementioned circuit board.

[0088] Those skilled in the art can understand the specific implementation scheme of the above-mentioned dicing machine equipment by reading the relevant description of the water leakage detection device 100 above, and will not be described in detail here for the sake of brevity.

[0089] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of the invention. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of the invention. All such changes and modifications are intended to be included within the scope of the invention as claimed in the appended claims.

[0090] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementations should not be considered beyond the scope of this invention.

[0091] It should be noted that the above embodiments are illustrative of the invention and not restrictive, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The invention can be implemented by means of hardware comprising several different elements and by means of a suitably programmed computer. In the unit claims enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

[0092] The above description is merely a specific embodiment of the present invention or an explanation of that embodiment. The scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. The scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A leak detection device, characterized in that, include: The module consists of a detection line module, a leak detection circuit module, and a processing module. The detection line module includes two detection lines, one end of each of the two detection lines is connected to each other, and the other end is respectively connected to the water leakage detection circuit module, so that the two detection lines and the water leakage detection circuit module form a closed loop. The processing module is used to collect the voltage of the water leakage detection circuit module at a preset node, so as to determine whether the two detection lines are in an open circuit state where at least one detection line is broken, and to determine whether the two detection lines are in a water leakage state where they are short-circuited due to water leakage. The voltage of the preset node is different in the water leakage state and the open circuit state. The processing module is specifically used for: Determine whether the current voltage value of the collected voltage is within the leakage voltage range. If the current voltage value is within the leakage voltage range, determine that the two detection lines are in the leakage state. If the current voltage value is outside the leakage voltage range, determine that the two detection lines are in the non-leakage state. Determine whether the current voltage value of the collected voltage is within the open circuit voltage range. If the current voltage value is within the open circuit voltage range, determine that the two detection lines are in the open circuit state. If the current voltage value is outside the open circuit voltage range, determine that the two detection lines are in the non-open circuit state. Wherein, the leakage voltage range and the circuit breaker voltage range do not overlap; The processing module is also specifically used for: During the process of the current voltage value moving from the leakage voltage range to a preset voltage within the normal voltage range, it is continuously determined that the two detection lines are in the leakage state. When the current voltage value continues to exceed the preset voltage after moving from the leakage voltage range to the preset voltage, it is determined that the two detection lines are in the non-leakage state. The leakage voltage range, the normal voltage range, and the circuit breaker voltage range do not overlap with each other.

2. The leakage detection device according to claim 1, characterized in that, The processing module includes a first comparison submodule; The first comparison submodule is used to collect the voltage of the leakage detection circuit module at the preset node, and compare the current voltage value of the collected voltage with the leakage preset voltage value. When the current voltage value is less than the leakage preset voltage value, the corresponding leakage result signal is output, and when the current voltage value is greater than the leakage preset voltage value, the corresponding non-leakage result signal is output. The leakage voltage range is defined as being less than the preset leakage voltage value.

3. The leakage detection device according to claim 2, characterized in that, The processing module further includes a second comparison submodule; The second comparison submodule is used to collect the voltage of the leakage detection circuit module at the preset node, and compare the current voltage value of the collected voltage with the circuit breaker preset voltage value. When the current voltage value is greater than the circuit breaker preset voltage value, the corresponding circuit breaker result signal is output, and when the current voltage value is less than the circuit breaker preset voltage value, the corresponding non-circuit breaker result signal is output. The circuit breaker voltage range is: greater than the preset circuit breaker voltage value; the water leakage preset voltage value is less than the preset circuit breaker voltage value.

4. The leakage detection device according to claim 3, characterized in that, The processing module also includes a control submodule; The control submodule is used to determine that the two detection lines are in the leakage state based on the leakage result signal, to determine that the two detection lines are in the open circuit state based on the open circuit result signal, and to determine that the two detection lines are in the normal state based on the non-leakage result signal and the non-open circuit result signal.

5. The leakage detection device according to claim 4, characterized in that, The processing module further includes: a first isolation transmission module and / or a second isolation transmission module. The first isolation transmission module is used to be connected in series between the input terminal of the control submodule and the output terminal of the first comparison submodule to electrically isolate the control submodule from the first comparison submodule, and at the same time transmit the leakage result signal and the non-leakage result signal to the input terminal of the control submodule. The second isolation transmission module is connected in series between the input terminal of the control submodule and the output terminal of the second comparison submodule to electrically isolate the control submodule from the second comparison submodule, and simultaneously transmit the circuit breaker result signal and the non-circuit breaker result signal to the input terminal of the control submodule.

6. The leakage detection device according to claim 4, characterized in that, The processing module further includes: a first prompt submodule and / or a second prompt submodule. The first prompting submodule is connected to the output terminal of the first comparison submodule and is used to issue a first prompt message when the first comparison submodule outputs the leakage result signal; The second prompting submodule is connected to the output terminal of the second comparison submodule and is used to issue a second prompting message when the second comparison submodule outputs the circuit breaker result signal.

7. The leakage detection device according to claim 1, characterized in that, The processing module includes a third comparison submodule. The third comparison submodule is used to collect the voltage of the leakage detection circuit module at the preset node, compare the current voltage value of the collected voltage with the preset leakage voltage value, and output the corresponding leakage result signal when the current voltage value is less than the preset leakage voltage value. And during the process of the current voltage value rising from less than the preset leakage voltage value to the preset voltage, the leakage result signal is continuously output, and when the current voltage value rises to greater than the preset voltage, the corresponding non-leakage result signal is output; The leakage voltage range is defined as being less than the preset leakage voltage value.

8. The leakage detection device according to claim 7, characterized in that, The processing module includes: a fourth comparison submodule; The fourth comparison submodule is used to collect the voltage of the leakage detection circuit module at the preset node, and compare the current voltage value of the collected voltage with the circuit breaker preset voltage value. When the current voltage value is greater than the circuit breaker preset voltage value, the corresponding circuit breaker result signal is output, and when the current voltage value is less than the circuit breaker preset voltage value, the corresponding non-circuit breaker result signal is output. Wherein, the circuit breaker voltage range is: greater than the circuit breaker preset voltage value; the normal voltage range is: greater than the water leakage preset voltage value and less than the circuit breaker preset voltage value; the water leakage preset voltage value is less than the preset voltage, and the preset voltage is less than the circuit breaker preset voltage value.

9. The leakage detection device according to claim 8, characterized in that, The processing module also includes a control submodule; The control submodule is used to determine that the two detection lines are in the leakage state based on the leakage result signal, to determine that the two detection lines are in the open circuit state based on the open circuit result signal, and to determine that the two detection lines are in the normal state based on the non-leakage result signal and the non-open circuit result signal.

10. The leakage detection device according to claim 9, characterized in that, The processing module further includes: a first isolation transmission module and / or a second isolation transmission module. The first isolation transmission module is used to be connected in series between the input terminal of the control submodule and the output terminal of the third comparison submodule to electrically isolate the control submodule from the third comparison submodule, and at the same time transmit the leakage result signal and the non-leakage result signal to the input terminal of the control submodule. The second isolation transmission module is connected in series between the input terminal of the control submodule and the output terminal of the fourth comparison submodule to electrically isolate the control submodule from the fourth comparison submodule, and simultaneously transmit the circuit breaker result signal and the non-circuit breaker result signal to the input terminal of the control submodule.

11. The leakage detection device according to claim 9, characterized in that, The processing module further includes: a first prompt submodule and / or a second prompt submodule. The first prompting submodule is connected to the output terminal of the third comparison submodule and is used to issue a first prompting message when the third comparison submodule outputs the leakage result signal; The second prompt submodule is connected to the output terminal of the fourth comparison submodule and is used to issue a second prompt message when the fourth comparison submodule outputs the circuit breaker result signal.

12. The leakage detection device according to any one of claims 1-5, characterized in that, The leakage detection device further includes a first voltage divider element, and the leakage detection circuit module includes a second voltage divider element. The first end of the first detection line and the first end of the second detection line are connected through the first voltage divider element. The second end of the first detection line is connected to the power supply terminal at least through the second voltage divider element; The second end of the second detection line is grounded; The preset node is the connection node between the second voltage divider element and the second end of the first detection line.

13. The leakage detection device according to claim 12, characterized in that, The first voltage divider element includes at least one of the following: a voltage regulator and a resistor.

14. The leakage detection device according to any one of claims 1-5, characterized in that, The two detection lines are arranged parallel to each other or intertwined.

15. A dicing machine, characterized in that, Including the leakage detection device as described in any one of claims 1-14.

16. The dicing machine according to claim 15, characterized in that, The dicing machine also includes a drying module. The drying module is used to dry the area where the two detection lines are located when it is determined that the two detection lines are in the leaking state.

17. The dicing machine according to claim 16, characterized in that, When the leakage detection device is the leakage detection device according to claim 4 or 9; The control submodule is also used to determine in real time whether the two detection lines are in the open circuit state, the water leakage state, and the normal state when the drying module is drying, and to control the drying module to stop working when the two detection lines reach the normal state.

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