Motion pattern control storage device and control method for an EUV light source target droplet

Abstract

The application discloses a kind of EUV light source target drop motion form control storage device and control method.Sn target drop ejection cavity is connected with liquid drop storage component, and liquid drop induction charging component is installed at the junction of nozzle and liquid drop storage component;Liquid drop biasing component is installed in liquid drop storage component.The method comprises: through liquid drop biasing component control device is in liquid drop storage mode, liquid drop use mode and liquid drop frequency conversion mode, realize the storage, use and frequency conversion of charged liquid drop.The application realizes the buffering and state adjustment of target drop after charging, realizes the temporary access of target drop, more accurately adjusts the spatial position and motion state of liquid drop, realizes the uninterrupted supply of target drop during raw material heating and rapid start after shutdown.Realize liquid drop frequency conversion, can satisfy the generation of high-frequency liquid drop due to the defect of low-frequency liquid drop, improve light source energy conversion efficiency and output power, reduce fragment pollution, improve light source system reliability.

Description

Technical Field

[0001] This invention relates to a motion shape control storage device, specifically to a motion shape control storage device and control method for an EUV light source target droplet. Background Technology

[0002] Currently, in LPP (Lithium-Ion Photolithography) technology for generating extreme ultraviolet (EUV) light, the EUV light source target droplet generation system requires the use of the Rayleigh instability principle based on jet flow to produce high-throughput droplets. Due to the combined effects of high-frequency disturbances generated within the cavity during the operation of the raw material tin target droplet supply system and external disturbances, the generated tin target droplets exhibit differences in velocity and acceleration. These differences in motion result in variations in the final morphology of the tin target droplets, making it impossible to precisely control the quality of the generated droplets. The uniformity of droplet size and spatial position is difficult to improve, and phenomena such as satellite droplets, droplet deviation, and jitter are prone to occur. These phenomena affect the laser bombardment effect, leading to a series of problems such as reduced energy conversion efficiency of the generated EUV light source, limited output power, severe debris contamination resulting in poor reliability of the light source system, and failing to fully meet the requirements of EUV lithography machines. Furthermore, currently, most of the high-throughput droplets generated are directly used for laser bombardment during the usage phase, and droplets not bombarded by the laser are considered as losses. Currently, there is a lack of devices in the relevant field that can effectively collect, buffer, and store raw materials to address the problem of raw material loss, and there are downtime limitations during the heating interval of molten tin droplets in the start-up and shutdown phases of the raw material tin target droplet supply system. Summary of the Invention

[0003] To address the problems existing in the background technology, the present invention provides a motion morphology control and storage device and control method for EUV light source target droplets. It utilizes electromagnetic coupling to achieve non-contact dynamic storage of charged droplets, as well as droplet spacing control and frequency conversion.

[0004] The technical solution adopted in this invention is:

[0005] I. A motion morphology control and storage device for an EUV light source target droplet:

[0006] The motion pattern control storage device includes a droplet sensing and charging component, a droplet biasing component, a droplet storage component, and a tin target droplet ejection cavity. The droplet storage component is located directly below the tin target droplet ejection cavity. A nozzle at the center of the bottom of the tin target droplet ejection cavity is connected to the top of the droplet storage component and communicates with it. The droplet sensing and charging component is installed at the connection between the nozzle of the tin target droplet ejection cavity and the droplet storage component. The droplet biasing component is installed inside the droplet storage component. The tin target droplet ejection cavity and the droplet sensing and charging component are electrically connected to a voltage of V. C A single-channel DC power supply is used, the tin target droplet injection cavity is grounded, and the droplet biasing component is electrically connected to several dual-channel DC power supplies.

[0007] The droplet storage assembly includes an annular channel, an inlet straight channel, and an outlet straight channel. The annular channel is a hollow annular cylindrical structure with its central axis horizontal. The interior of the annular channel is evenly divided along its central axis into a primary annular channel, a secondary annular channel for storing charged droplets, and a tertiary annular channel. The inlet and outlet straight channels are both hollow square tubular structures, vertically arranged on the same side of the annular channel and connected to it. The upper end of the outlet straight channel is connected to and directly faces the tertiary annular channel of the annular channel, and the lower end of the outlet straight channel is connected to the outside. The lower end of the inlet straight channel is connected to and... The first-stage annular channel, directly opposite the annular channel body, has its upper end connected to the nozzle of the tin target droplet injection chamber, thus connecting to the tin target droplet injection chamber. The cross-sectional dimensions of the inlet and outlet straight channels are the same as those of the first-stage annular channel. The side of the inlet and outlet straight channels away from the center of the annular channel body is tangent to the outer annular surface of the annular channel body, while the side of the inlet and outlet straight channels near the center of the annular channel body is tangent to the inner annular surface of the annular channel body. The droplet biasing assembly is installed inside the bottom of the annular channel body. A uniform axial magnetic field is generated along the axis of the annular channel body, with the magnetic field direction extending from the first-stage annular channel to the third-stage annular channel.

[0008] The inlet and outlet straight channels are tangentially connected to and embedded in the annular channel, which primarily serves a storage function. The droplet storage assembly provides further buffering to more precisely adjust the spatial position and motion of the charged droplets and to enable short-term non-contact dynamic storage of the charged droplets. Since the centripetal acceleration experienced by the charged droplet 104 is much greater than the gravitational acceleration, the gravitational potential energy conversion of the charged droplet 104 falling naturally within the storage assembly can be ignored. When precise control is required, a vertical magnetic field that cancels out gravity can be added to the field where the storage assembly is located. The moving charged droplet 104 then undergoes uniform circular motion in a uniform magnetic field perpendicular to the plane of the annular channel 3 under the influence of the Lorentz force.

[0009] The described droplet-inductive charging component includes an insulating sleeve and an annular metal electrode. The insulating sleeve is located directly below and in contact with the nozzle of the tin target droplet injection chamber. The outer surface of the insulating sleeve is in close contact with the inner wall of the inlet section straight channel. The annular metal electrode is a hollow square ring. The inner surface of the lower part of the insulating sleeve is fitted onto the outer ring surface of the annular metal electrode. The outer diameter of the annular metal electrode is equal to the inner diameter of the insulating sleeve. The annular metal electrode, the nozzle, and the inlet section straight channel are kept insulated. The central axis of the nozzle, the central axis of the insulating sleeve, and the central axis of the annular metal electrode are on the same straight line. The nozzle is connected to the inlet section straight channel through the hollow area of ​​the annular metal electrode. The annular metal electrode is electrically connected to the positive terminal of a single-channel DC power supply, and the tin target droplet injection chamber is connected to the negative terminal of the single-channel DC power supply.

[0010] The droplet induction charging component is used to charge the charged droplets after the vertically downward jet is broken in the nozzle of the tin target droplet injection cavity. The difference in droplet motion shape caused by disturbance is eliminated by the Coulomb force between the charged droplets.

[0011] The droplet biasing assembly includes two first electrode plates, two second electrode plates, two third electrode plates, and two fourth electrode plates. Each of the first, second, third, and fourth electrode plates is vertically and parallel to each other, arranged within the bottom of the annular channel. The top edges of each of the first, second, third, and fourth electrode plates are connected to the top surface of the bottom of the annular channel, and the bottom edges are connected to the bottom surface of the bottom of the annular channel. The line connecting the center points of two first electrode plates and two fourth electrode plates is on the same straight line and perpendicular to the surface of the first electrode plate. Two first electrode plates are directly opposite each other arranged within the annular channel. Two fourth electrode plates are arranged opposite each other in the third-level annular channel of the annular channel body, respectively close to and away from the annular end face of the annular channel body; two second electrode plates and two third electrode plates are arranged opposite each other in the second-level annular channel body, respectively located on the symmetrical sides of each first electrode plate and third electrode plate; two second electrode plates are located on the side away from the straight channel body of the entrance section, and are respectively close to the annular end faces of both sides of the annular channel body; two third electrode plates are located on the side close to the straight channel body of the entrance section, and are respectively close to the annular end faces of both sides of the annular channel body.

[0012] Two first electrode plates and two second electrode plates are electrically connected to a first dual-channel DC power supply, and two third electrode plates and two fourth electrode plates are electrically connected to a second dual-channel DC power supply. The first and third electrode plates near the inner side of the annular channel are respectively electrically connected to the positive terminals of the first and second dual-channel DC power supplies, and the first and third electrode plates near the outer side of the annular channel are respectively electrically connected to the negative terminals of the first and second dual-channel DC power supplies. The second and fourth electrode plates near the outer side of the annular channel are respectively electrically connected to the positive terminals of the first and second dual-channel DC power supplies, and each of the second and fourth electrode plates near the inner side of the annular channel is respectively electrically connected to the negative terminals of the first and second dual-channel DC power supplies. The absolute values ​​of the voltages on the two first electrode plates and two second electrode plates are the same, and the absolute values ​​of the voltages on the two third electrode plates and two pairs of electrode plates are the same.

[0013] The droplet biasing assembly has a hollow square shell and is connected to the annular channel body 3 in an embedded manner. The droplet biasing assembly is used to store and transfer charged droplets. After entering the primary annular channel from the inlet section's straight channel, the charged droplet is moved to the secondary annular channel by the electric fields of two first electrode plates and two second electrode plates, thus storing the charged droplet. The charged droplet in the secondary annular channel is then moved to the tertiary annular channel by the electric fields of two third electrode plates and two fourth electrode plates, and ejected from the outlet section's straight channel, thus transferring the charged droplet for use. To facilitate control of the charged droplet's trajectory, the axial trajectory of the charged droplet is centrally symmetrical with the interface between the secondary and tertiary annular channels. The two first electrode plates and two third electrode plates provide the charged droplet with an electric field force in the same direction as the magnetic field, while the two second electrode plates and two fourth electrode plates provide the charged droplet with an electric field force in the opposite direction to the magnetic field, thus counteracting the axial velocity provided by the electric field force in the same direction.

[0014] The distances between the two first electrode plates, the two second electrode plates, the two third electrode plates, and the two fourth electrode plates are all the same.

[0015] The inlet and outlet straight channels are made of magnetically shielded materials, such as iron-aluminum alloys; the annular channel is made of non-metallic materials to avoid electrostatic blocking.

[0016] II. The control method for the motion pattern control storage device is as follows:

[0017] The motion pattern control storage device operates in three modes during the control process: droplet storage mode, droplet usage mode, and droplet frequency conversion mode, all within a vacuum environment, as detailed below:

[0018] When the motion pattern control storage device is in droplet storage mode, the single-channel DC power supply and the first dual-channel DC power supply are turned on. The two first electrode plates generate an electric field force in the same direction as the magnetic field, and the two second electrode plates generate an electric field force in the opposite direction to the magnetic field. After the jet is vertically ejected downward from the nozzle of the liquid-filled tin target droplet injection chamber, it breaks into several droplets. Each droplet passes through the center of the annular metal electrode and becomes a charged droplet. Each charged droplet, after entering the straight channel body of the inlet section, is suspended in a circular motion around the channel axis of the first-stage annular channel under the action of the magnetic field and subjected to the Lorentz force. The droplet enters the primary annular channel as a droplet to be stored. When the droplet passes between the two first electrode plates, it moves from the gap between the two first electrode plates and the two second electrode plates into the secondary annular channel as a droplet to be used under the action of the electric field force of the two first electrode plates. When the droplet to be used exits the second electrode plate, its axial velocity drops to zero. Under the action of the electric field force of the two second electrode plates, the droplet to be used is held at the channel axis of the secondary annular channel. Under the action of the magnetic field, it is subjected to the Lorentz force and makes a suspended circular motion around the channel axis of the secondary annular channel to achieve dynamic storage.

[0019] When the motion pattern control storage device is in droplet usage mode, the second dual-channel DC power supply is turned on. The two third electrode plates generate an electric field force in the same direction as the magnetic field, and the two fourth electrode plates generate an electric field force in the opposite direction to the magnetic field. When the droplet to be used moves between the two third electrode plates, it moves from the gap between the two third electrode plates and the two fourth electrode plates into the three-level annular channel under the action of the electric field force of the two third electrode plates. When the droplet to be used passes through the fourth electrode plate, its axial velocity drops to zero. Under the action of the electric field force of the two fourth electrode plates, it is held at the channel axis of the three-level annular channel. Under the action of the magnetic field, it is subjected to the Lorentz force and makes a suspended circular motion around the channel axis of the three-level annular channel. Finally, it is ejected from the straight channel body of the outlet section to realize the transfer and use of the charged droplet.

[0020] When the motion pattern control storage device is in droplet frequency switching mode, it initially operates in droplet storage mode. Each droplet to be used is stored in a secondary annular channel, with equal spacing between any two adjacent droplets. Once the secondary annular channel reaches its original droplet generation frequency and reaches its maximum storage capacity, a mode switching process occurs. Specifically, the droplet storage mode is first paused. When the first stored droplet in the secondary annular channel has just passed between two second electrode plates and the next adjacent second stored droplet has not yet reached the two second electrode plates, the droplet storage mode is activated. The droplets to be inserted in the primary annular channel that have moved between the two first electrode plates are then stored in the secondary annular channel. Under the influence of the electric field force of the electrode plates, the droplet moves from the gap between the two first electrode plates and the two second electrode plates into the secondary annular channel. The droplet to be inserted is inserted into the center of the first and second stored droplets. When the second stored droplet just enters between the two second electrode plates, the droplet storage mode is paused. When the second stored droplet just passes between the two second electrode plates and the next droplet to be used adjacent to the second stored droplet has not yet reached the two second electrode plates, the mode switching process is repeated until a droplet to be inserted is inserted between every two adjacent droplets to be used in the secondary annular channel. Then the droplet use mode is activated. Finally, all the droplets to be used and the droplets to be inserted in the secondary annular channel are ejected from the straight channel body of the outlet section to realize the transfer and use of the charged droplets.

[0021] By frequently switching the electrode plates on and off, droplets introduced into the primary annular channel are shifted one by one to the spaces between adjacent droplets in the secondary annular channel, until the spaces between the two droplets in the original secondary annular channel are filled with new droplets introduced from the primary annular channel. The frequency obtained from the storage device outlet is the usage frequency, which is higher than the droplet occurrence frequency. The bias electrode control component can change the droplet spacing by inserting droplets into the secondary annular channel that already stores droplets, changing the original storage spacing n0 to the frequency-modulated spacing nl, where n0 = 2nl, thereby changing the droplet occurrence frequency that finally leaves the storage device from the tertiary annular channel.

[0022] In the droplet biasing assembly, the distance between the first vertical plane containing the sides of the two first electrode plates near each second electrode plate and the second vertical plane containing the sides of the two first electrode plates near each second electrode plate is used as the electrode plate spacing. The electrode plate spacing is equal to the horizontal projection segment of the charged droplet during its axial linear motion from the first-level annular channel to the second-level annular channel or from the second-level annular channel to the third-level annular channel under the Lorentz force of the magnetic field, which can shorten the axial movement distance of the droplet as much as possible.

[0023] Each pair of electrode plates is staggered by a certain distance, so that when the charged droplet is biased by the bias electric field of the previous stage, it can reach the electrode plate of the next stage through linear motion in the axial direction and then decelerate axially. For example, the first electrode plate located on the first-stage annular channel is forward in the horizontal direction relative to the second electrode plate located on the second-stage annular channel, so that the first electrode plate can bias the charged droplet in time relative to the second electrode plate.

[0024] III. A motion morphology control and storage device for an EUV light source target droplet:

[0025] The motion pattern control storage device includes two droplet sensing and charging components, two droplet biasing components, a droplet storage component, and two tin target droplet ejection cavities. The droplet storage component is located directly below the two tin target droplet ejection cavities. The nozzles at the center of the bottom of the two tin target droplet ejection cavities are respectively connected to the top of the droplet storage component and in communication with the droplet storage component. The two droplet sensing and charging components are respectively installed at the connection points between the nozzles of the two tin target droplet ejection cavities and the droplet storage component. The two droplet biasing components are installed inside the droplet storage component. Each tin target droplet ejection cavity and its respective droplet sensing and charging component are electrically connected to a voltage of V. C The single-channel DC power supply is used, the two tin target droplet injection chambers are grounded, and the two droplet biasing components are electrically connected to several dual-channel DC power supplies.

[0026] The droplet storage assembly includes two inlet linear channels, two annular channels, and an outlet linear channel. Each annular channel is a hollow annular cylindrical structure. The outer annular surfaces of the two annular channels are tangent to each other and interconnected. The central axis of the annular channel is horizontal, and the interior of each annular channel is evenly divided into primary, secondary, and tertiary annular channels along its own axis. The tertiary annular channels of the two annular channels are directly opposite each other and connected. Each inlet and outlet linear channel is a hollow square tubular structure. Both inlet and outlet linear channels are vertically arranged between the two annular channels and are connected to them. The upper end of the outlet linear channel is connected to and directly opposite the tertiary annular channels of the two annular channels, and the lower end of the outlet linear channel is connected to the outside. The annular channels overlap spatially above the straight channel body of the outlet section; the lower ends of the two straight channel bodies of the inlet section are respectively connected to and directly opposite the first-stage annular channels of the two annular channels, and the upper ends of the two straight channel bodies of the inlet section are respectively connected to the nozzles of the two tin target droplet injection chambers, thus connecting to the two tin target droplet injection chambers respectively; the cross-sectional dimensions of the two straight channel bodies of the inlet section and the straight channel body of the outlet section are the same as the channel cross-sectional dimensions of the first-stage annular channel; the two sides of the two straight channel bodies of the inlet section and the straight channel body of the outlet section facing the center of the two annular channels are respectively tangent to the inner annular surfaces of the two annular channels; two droplet biasing components are respectively installed in the bottom of the two annular channels; a uniform axial magnetic field is generated at the two annular channels along their own axis, and the direction of the magnetic field is from the first-stage annular channel to the third-stage annular channel, with the magnetic field directions of the two annular channels being opposite.

[0027] The droplet storage assembly has two inlet straight channel sections, namely a double-ring first inlet straight channel section and a double-ring second inlet straight channel section, which are respectively connected to the nozzles of the two tin target droplet ejection chambers; the two annular channels are the double-ring first annular channel section and the double-ring second annular channel section; and the outlet straight channel section is the double-ring outlet straight channel section.

[0028] The described droplet-inductive charging component includes an insulating sleeve and an annular metal electrode. The insulating sleeve is located directly below and in contact with the nozzle of the tin target droplet injection chamber. The outer surface of the insulating sleeve is in close contact with the inner wall of the inlet section straight channel. The annular metal electrode is a hollow square ring. The inner surface of the lower part of the insulating sleeve is fitted onto the outer ring surface of the annular metal electrode. The outer diameter of the annular metal electrode is equal to the inner diameter of the insulating sleeve. The annular metal electrode, the nozzle, and the inlet section straight channel are kept insulated. The central axis of the nozzle, the central axis of the insulating sleeve, and the central axis of the annular metal electrode are on the same straight line. The nozzle is connected to the inlet section straight channel through the hollow area of ​​the annular metal electrode. The annular metal electrode is electrically connected to the positive terminal of a single-channel DC power supply, and the tin target droplet injection chamber is connected to the negative terminal of the single-channel DC power supply.

[0029] Each droplet biasing assembly includes two first electrode plates, two second electrode plates, two third electrode plates, and two fourth electrode plates. Each of the first, second, third, and fourth electrode plates is vertically and parallel to each other, arranged within the bottom of its respective annular channel. The top edges of each of the first, second, third, and fourth electrode plates are connected to the top surface of the bottom of the annular channel, and the bottom edges are connected to the bottom surface of the bottom of the annular channel. The lines connecting the center points of two first electrode plates and two fourth electrode plates are collinear. The first electrode plates are arranged perpendicular to the surface of the first electrode plate; two first electrode plates are arranged opposite each other in the first-level annular channel of the annular channel body, respectively close to and away from the annular end face of the annular channel body; two fourth electrode plates are arranged opposite each other in the third-level annular channel body, respectively close to and away from the annular end face of the annular channel body; two second electrode plates and two third electrode plates are arranged opposite each other in the second-level annular channel body, respectively located on the symmetrical sides of each first electrode plate and third electrode plate, with the two second electrode plates located on the side away from the straight channel body of the entrance section, and the two second electrode plates respectively close to the annular end face of the annular channel body. Two third electrode plates are located on the annular end faces of the channel body, near the entrance section of the straight channel body. These three third electrode plates are positioned close to the annular end faces of the channel body. Two first electrode plates and two second electrode plates are electrically connected to a first dual-channel DC power supply, while two third electrode plates and two fourth electrode plates are electrically connected to a second dual-channel DC power supply. The first and third electrode plates near the inner side of the annular channel body are electrically connected to the positive terminals of both the first and second dual-channel DC power supplies, respectively. The first and third electrode plates near the outer side of the annular channel body are electrically connected to the negative terminals of both the first and second dual-channel DC power supplies, respectively. The second and fourth electrode plates near the outer side of the annular channel are electrically connected to the positive terminals of the first and second dual-channel DC power supplies, respectively, while the second and fourth electrode plates near the inner side of the annular channel are electrically connected to the negative terminals of the first and second dual-channel DC power supplies, respectively. The absolute values ​​of the voltages on the two first electrode plates and the two second electrode plates are the same, as are the absolute values ​​of the voltages on the two third electrode plates and the two pairs of electrode plates. The distances between the two first electrode plates, the two second electrode plates, the two third electrode plates, and the two fourth electrode plates are all the same.

[0030] The two inlet and outlet straight channels are made of magnetically shielded material; the two annular channels are made of non-metallic material.

[0031] IV. A control method for a motion pattern control storage device is as follows:

[0032] The aforementioned motion pattern control storage device controls charged droplets in a droplet frequency conversion mode under vacuum, as detailed below:

[0033] Two single-channel DC power supplies and two first dual-channel DC power supplies are turned on. For each inlet section linear channel, annular channel, and outlet section linear channel in the droplet storage assembly, as well as its droplet induction charging component, droplet biasing component, and tin target droplet ejection cavity, the two first electrode plates of the droplet biasing component generate an electric field force in the same direction as the magnetic field at the annular channel where it is located, and the two second electrode plates generate an electric field force in the opposite direction to the magnetic field at the annular channel where it is located. After being vertically ejected downward from the nozzle of the tin target droplet ejection cavity containing liquid, the jet breaks into several droplets. Each droplet originates from the center of the annular metal electrode. After passing through, the liquid becomes a charged droplet. Each charged droplet enters the first-level annular channel as a droplet to be stored, suspending in a circular motion around the channel axis under the influence of the magnetic field after passing through the straight channel body of the inlet section. When the droplet to be stored passes between the two first electrode plates, it moves from the gap between the two first electrode plates and the two second electrode plates to the second-level annular channel as a droplet to be used, under the influence of the electric field of the two second electrode plates. The droplet to be used is held at the channel axis of the second-level annular channel under the influence of the electric field of the two second electrode plates, and then suspends in a circular motion around the channel axis of the second-level annular channel under the influence of the magnetic field for dynamic storage.

[0034] First, one of the second dual-channel DC power supplies is turned on, causing the two third electrode plates of the droplet biasing assembly on one of the annular channels to generate an electric field force in the same direction as the magnetic field at the annular channel itself, and the two fourth electrode plates to generate an electric field force in the opposite direction to the magnetic field at the annular channel itself. When the droplet to be used in one of the annular channels moves between the two third electrode plates, it moves from the gap between the two third electrode plates and the two fourth electrode plates into the three-level annular channel under the action of the electric field force of the two third electrode plates. Under the action of the electric field force of the two fourth electrode plates, it remains at the channel axis of the three-level annular channel and performs a suspended circular motion around the channel axis of the three-level annular channel under the action of the magnetic field. Between the first droplet to be used just moving to the center of the two third electrode plates and the next droplet to be used... At the midpoint of the time difference between the centers of the two third electrode plates, another second dual-channel DC power supply is turned on. This causes the two third electrode plates of the droplet biasing assembly on the other annular channel to generate an electric field force in the same direction as the magnetic field at the annular channel itself, and the two fourth electrode plates to generate an electric field force in the opposite direction to the magnetic field at the annular channel itself. When the droplet to be used in the other annular channel moves between the two third electrode plates, it moves from the gap between the two third electrode plates and the two fourth electrode plates into the third-level annular channel under the action of the electric field force of the two third electrode plates and inserts between the previous droplet to be used and the next droplet to be used in one of the annular channels. Finally, each droplet to be used in the second-level annular channel of the two annular channels is ejected from the straight channel of the outlet section to realize the transfer and use of the charged droplet.

[0035] In each droplet biasing assembly, the distance between the first vertical plane containing the sides of the two first electrode plates closest to each second electrode plate and the second vertical plane containing the sides of the two first electrode plates closest to each second electrode plate is used as the electrode plate spacing. The electrode plate spacing is equal to the horizontal projection segment of the charged droplet during its axial linear motion from the first-level annular channel to the second-level annular channel or from the second-level annular channel to the third-level annular channel, under the influence of the Lorentz force of the magnetic field during its circular motion.

[0036] Droplets stored in two annular channels are transported alternately, eventually forming a droplet flow with frequency changes on the same plane. This flow then passes through a straight channel with the same exit section, resulting in a droplet bundle with a consistent motion pattern. The frequency of this droplet bundle is exactly twice the frequency of its occurrence. Similarly, by using a superposition method, the frequency of the original droplet occurrence can be amplified by inserting droplets from different channels at equally divided time intervals between the original droplet occurrences, thus achieving an integer multiple amplification of the frequency of use.

[0037] The aforementioned dual-ring motion pattern control storage device is a superposition of the structure of the single-ring motion pattern control storage device, and they share a single outlet section linear channel 12 to perform frequency conversion by alternately delivering target droplets through dual channels.

[0038] The beneficial effects of this invention are:

[0039] This invention's device eliminates differences in droplet motion caused by disturbances through the Coulomb force between the droplets by charging them, achieving buffering and state adjustment of the charged target droplets. Simultaneously, utilizing the device's storage channel, droplet biasing components and bias electrode control components arranged in the annular storage device temporarily store and retrieve the target droplets, further buffering the charged droplets to more precisely adjust their spatial position and motion state. The dynamic spatial storage formed by the device's storage channel also solves the downtime problem of the raw material tin target droplet supply system, achieving uninterrupted supply of target droplets during raw material heating and enabling rapid restart after shutdown. Furthermore, the device can switch droplet frequency conversion modes via the bias electrode control component or control the usage mode interval through multiple storage channels with a common outlet, thereby changing the droplet usage frequency. This can meet the needs of high-frequency droplet generation to address defects caused by low-frequency droplets, improving the energy conversion efficiency and output power of the EUV light source, reducing debris contamination, and ultimately improving the reliability of the light source system. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0041] Figure 2 This is a schematic diagram of the straight section of the inlet / outlet pipe of the present invention;

[0042] Figure 3 This is a schematic diagram of the structure of the annular pipe bias electrode plate of the present invention;

[0043] Figure 4 A schematic diagram illustrating the structure and buffering method for controlling the storage device;

[0044] Figure 5 A schematic diagram illustrating the storage and control methods for a storage device;

[0045] Figure 6 A schematic diagram of a method for changing the frequency of droplet usage;

[0046] Figure 7 This is a schematic diagram of the structure of the present invention, which uses superimposed storage channels to perform droplet usage frequency transformation.

[0047] In the diagram: 1. Droplet sensing and charging component; 2. Droplet biasing component; 3. Annular channel body; 4. Inlet section straight channel body; 5. Outlet section straight channel body; 6. Nozzle; 7. Tin target droplet injection cavity; 8. Double-annular first inlet section straight channel body; 9. Double-annular second inlet section straight channel body; 10. Double-annular first annular channel body; 11. Double-annular second annular channel body; 12. Double-annular outlet section straight channel body; 101. Insulating sleeve; 102. Annular metal electrode; 103. Jet; 104. Charged droplet; 201. First electrode plate; 202. Second electrode plate; 203. Third electrode plate; 204. Fourth electrode plate; 205. Droplet to be stored; 206. Droplet to be used; 207. Droplet to be inserted; 208. First stored droplet; 209. Second stored droplet; 301. Primary annular channel; 302. Secondary annular channel; 303. Tertiary annular channel. Detailed Implementation

[0048] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0049] like Figure 1 As shown, the single-ring motion pattern control storage device includes a droplet sensing and charging component 1, a droplet biasing component 2, a droplet storage component, and a tin target droplet ejection cavity 7. The droplet storage component is located directly below the tin target droplet ejection cavity 7. A nozzle 6 at the bottom center of the tin target droplet ejection cavity 7 is connected to the top of the droplet storage component and communicates with the droplet storage component. The droplet sensing and charging component 1 is installed at the connection between the nozzle 6 of the tin target droplet ejection cavity 7 and the droplet storage component. The droplet biasing component 2 is installed inside the droplet storage component. The tin target droplet ejection cavity 7 and the droplet sensing and charging component 1 are electrically connected to a voltage of V. C A single-channel DC power supply is provided, the tin target droplet ejection chamber 7 is grounded, and the droplet biasing component 2 is electrically connected to several dual-channel DC power supplies.

[0050] like Figure 2As shown, the droplet storage assembly includes an annular channel body 3, an inlet straight channel body 4, and an outlet straight channel body 5. The annular channel body 3 is a hollow annular cylindrical structure. The central axis of the annular channel body 3 is horizontal. The interior of the annular channel body 3 is evenly divided along its central axis into a primary annular channel 301, a secondary annular channel 302 for storing charged droplets 104, and a tertiary annular channel 303. The inlet straight channel body 4 and the outlet straight channel body 5 are both hollow square tubular structures. The inlet straight channel body 4 and the outlet straight channel body 5 are vertically arranged on the same side of the annular channel body 3 and connected to the annular channel body 3. The upper end of the outlet straight channel body 5 is connected to and directly faces the tertiary annular channel 303 of the annular channel body 3. The lower end of the outlet straight channel body 5 is connected to the outside. The lower end of the inlet straight channel body 4 is connected to... The first-stage annular channel 301 is directly opposite to the annular channel body 3. The upper end of the inlet section straight channel body 4 is connected to the nozzle 6 of the tin target droplet injection chamber 7, thus connecting to the tin target droplet injection chamber 7. The cross-sectional dimensions of the inlet section straight channel body 4 and the outlet section straight channel body 5 are the same as the channel cross-sectional dimensions of the first-stage annular channel 301. The side of the inlet section straight channel body 4 and the outlet section straight channel body 5 away from the center of the annular channel body 3 is tangent to the outer annular surface of the annular channel body 3, and the side of the inlet section straight channel body 4 and the outlet section straight channel body 5 near the center of the annular channel body 3 is tangent to the inner annular surface of the annular channel body 3. The droplet biasing component 2 is installed inside the bottom of the annular channel body 3. A uniform axial magnetic field is generated at the annular channel body 3 along its own axis, and the direction of the magnetic field is from the first-stage annular channel 301 to the third-stage annular channel 303.

[0051] The inlet straight channel 4 and the outlet straight channel 5 are tangentially connected to and embedded in the annular channel 3, which mainly serves the storage function. The droplet storage assembly provides further buffering to more precisely adjust the spatial position and motion state of the charged droplet 104 and to enable short-term non-contact dynamic storage of the charged droplet 104. Since the centripetal acceleration experienced by the charged droplet 104 is much greater than the gravitational acceleration, the gravitational potential energy conversion of the charged droplet 104 falling naturally in the control storage assembly can be ignored. When precise control is required, a vertical magnetic field that cancels out gravity can be added to the field where the control storage assembly is located. The moving charged droplet 104 will undergo uniform circular motion in a uniform magnetic field perpendicular to the plane of the annular channel 3 through the Lorentz force.

[0052] like Figure 4As shown, the droplet sensing charged assembly 1 includes an insulating sleeve 101 and an annular metal electrode 102. The insulating sleeve 101 is located directly below and in contact with the nozzle 6 of the tin target droplet injection cavity 7. The outer surface of the insulating sleeve 101 is in close contact with the inner wall of the inlet section straight channel 4. The annular metal electrode 102 is a hollow square ring. The inner surface of the lower part of the insulating sleeve 101 is fitted onto the outer ring surface of the annular metal electrode 102. The outer diameter of the annular metal electrode 102 is equal to the inner diameter of the insulating sleeve 101. The annular metal electrode 102 is insulated from the nozzle 6 and the inlet section straight channel 4. The central axis of the nozzle 6 and the central axis of the insulating sleeve 101 and the annular metal electrode 102 are on the same straight line. The nozzle 6 is connected to the inlet section straight channel 4 through the hollow area of ​​the annular metal electrode 102. The annular metal electrode 102 is electrically connected to the positive terminal of a single-channel DC power supply, and the tin target droplet injection cavity 7 is connected to the negative terminal of the single-channel DC power supply.

[0053] The droplet sensing charging component 1 is used to charge the charged droplets 104 after the vertically downward jet 103 ejected from the nozzle 6 of the tin target droplet ejection cavity 7 breaks, and eliminate the difference in droplet motion shape caused by disturbance through the Coulomb force between the charged droplets 104.

[0054] like Figure 3As shown, the droplet biasing assembly 2 includes two first electrode plates 201, two second electrode plates 202, two third electrode plates 203, and two fourth electrode plates 204. Each of the first electrode plates 201, 202, 203, and 204 is vertically and parallel to each other, arranged within the bottom of the annular channel 3. The top edges of each of the first electrode plates 201, 202, 203, and 204 are connected to the top surface of the bottom of the annular channel 3, and the bottom edges are connected to the bottom surface of the bottom of the annular channel 3. The line connecting the center points of two first electrode plates 201 and two fourth electrode plates 204 is on the same straight line and perpendicular to the surface of the first electrode plate 201. The two first electrode plates 201 are arranged facing each other. Two fourth electrode plates 204 are arranged opposite each other in the third-level annular channel 303 of the annular channel body 3, respectively close to and away from the annular end face of the annular channel body 3; two second electrode plates 202 and two third electrode plates 203 are arranged opposite each other in the second-level annular channel 302 of the annular channel body 3, respectively located on the symmetrical sides of each first electrode plate 201 and third electrode plate 203; the two second electrode plates 202 are located on the side away from the inlet section straight channel body 4, and are respectively close to the two annular end faces of the annular channel body 3; the two third electrode plates 203 are located on the side close to the inlet section straight channel body 4, and are respectively close to the two annular end faces of the annular channel body 3.

[0055] Two first electrode plates 201 and two second electrode plates 202 are electrically connected to a first dual-channel DC power supply, and two third electrode plates 203 and two fourth electrode plates 204 are electrically connected to a second dual-channel DC power supply. The first electrode plates 201 and third electrode plates 203 near the inner side of the annular channel body 3 are respectively electrically connected to the positive terminals of the first dual-channel DC power supply and the second dual-channel DC power supply, and the first electrode plates 201 and third electrode plates 203 near the outer side of the annular channel body 3 are respectively electrically connected to the negative terminals of the first dual-channel DC power supply and the second dual-channel DC power supply. The second electrode plate 202 and the fourth electrode plate 204 near the outer side of the annular channel body 3 are electrically connected to the positive terminals of the first dual-channel DC power supply and the second dual-channel DC power supply, respectively. The second electrode plate 202 and the fourth electrode plate 204 near the inner side of the annular channel body 3 are electrically connected to the negative terminals of the first dual-channel DC power supply and the second dual-channel DC power supply, respectively. The absolute values ​​of the voltage values ​​of the two first electrode plates 201 and the two second electrode plates 202 are the same, and the absolute values ​​of the voltage values ​​of the two third electrode plates 203 and the two pairs of electrode plates 204 are the same.

[0056] The droplet biasing assembly 2 has a hollow square shell and is embedded in the annular channel body 3. The droplet biasing assembly 2 is used to store and transfer charged droplets 104. After entering the primary annular channel 301 from the inlet section linear channel body 4, the charged droplet 104 is moved to the secondary annular channel 302 by the electric field forces of the two first electrode plates 201 and two second electrode plates 202, thus storing the charged droplet 104. The charged droplet 104 located in the secondary annular channel 302 is moved to the tertiary annular channel 303 by the electric field forces of the two third electrode plates 203 and two fourth electrode plates 204, and then ejected from the outlet section linear channel body 5, thus transferring the charged droplet 104. For ease of implementation... The trajectory of the charged droplet 104 is controlled such that its axial trajectory is centrally symmetrical with the interface between the secondary annular channel 302 and the tertiary annular channel 303. The two first electrode plates 201 and the two third electrode plates 203 provide the charged droplet 104 with an electric field force in the same direction as the magnetic field, while the two second electrode plates 202 and the two fourth electrode plates 204 provide the charged droplet 104 with an electric field force in the opposite direction to the magnetic field to counteract the axial velocity provided by the electric field force in the same direction.

[0057] The distances between the two first electrode plates 201, the two second electrode plates 202, the two third electrode plates 203, and the two fourth electrode plates 204 are all the same.

[0058] The inlet section straight channel 4 and the outlet section straight channel 5 are made of magnetic shielding materials, such as iron-aluminum alloy; the annular channel 3 is made of non-metallic materials to avoid electrostatic blocking.

[0059] like Figure 5 and Figure 6 As shown, the control method of the single-ring motion mode control storage device is as follows:

[0060] The motion pattern control storage device operates in three modes during the control process: droplet storage mode, droplet usage mode, and droplet frequency conversion mode, all within a vacuum environment, as detailed below:

[0061] When the motion pattern control storage device is in droplet storage mode, the single-channel DC power supply and the first dual-channel DC power supply are turned on. The two first electrode plates 201 generate an electric field force in the same direction as the magnetic field, and the two second electrode plates 202 generate an electric field force in the opposite direction to the magnetic field. After the jet 103 is vertically ejected from the nozzle 6 of the liquid-filled tin target droplet ejection cavity 7, it breaks into several droplets. Each droplet passes through the center of the annular metal electrode 102 and becomes a charged droplet 104. Each charged droplet 104 enters the first-stage annular channel 301 after entering the straight channel body 4 of the inlet section. Under the action of the magnetic field, it is subjected to the Lorentz force and makes a suspended circular motion around the channel axis of the first-stage annular channel 301. 01 is the droplet to be stored 205. When the droplet to be stored 205 passes between the two first electrode plates 201, under the action of the electric field force of the two first electrode plates 201, it moves from the gap between the two first electrode plates 201 and the two second electrode plates 202 into the secondary annular channel 302 as the droplet to be used 206. When the droplet to be used 206 passes through the second electrode plate 202, its axial velocity drops to zero. Under the action of the electric field force of the two second electrode plates 202, the droplet to be used 206 is held at the channel axis of the secondary annular channel 302. Under the action of the magnetic field, the droplet to be used 206 is subjected to the Lorentz force and makes a suspended circular motion around the channel axis of the secondary annular channel 302 to achieve dynamic storage.

[0062] When the motion mode control storage device is in droplet usage mode, the second dual-channel DC power supply is turned on. The two third electrode plates 203 generate an electric field force in the same direction as the magnetic field, and the two fourth electrode plates 204 generate an electric field force in the opposite direction to the magnetic field. When the droplet 206 moves between the two third electrode plates 203, it moves from the gap between the two third electrode plates 203 and the two fourth electrode plates 204 into the three-level annular channel 303 under the action of the electric field force of the two third electrode plates 203. When the droplet 206 passes through the fourth electrode plate 204, its axial velocity drops to zero. Under the action of the electric field force of the two fourth electrode plates 204, it is held at the channel axis of the three-level annular channel 303. Under the action of the magnetic field, it is subjected to the Lorentz force and makes a suspended circular motion around the channel axis of the three-level annular channel 303. Finally, it is ejected from the straight channel body 5 of the outlet section to realize the transfer and use of the charged droplet 104.

[0063] When the motion pattern control storage device is in droplet frequency conversion mode, it first operates in droplet storage mode. Each droplet 206 to be used is stored in the secondary annular channel 302, with equal spacing between any two adjacent droplets 206 in the secondary annular channel 302. Once the secondary annular channel 302 reaches its original droplet generation frequency and reaches its maximum storage capacity, a mode switching process is initiated. Specifically, the droplet storage mode is first paused. When the first stored droplet 208 in the secondary annular channel 302 has just passed between the two second electrode plates 202 and the next adjacent second stored droplet 209 has not yet reached the two second electrode plates 202, the droplet storage mode is activated. The droplet 207 to be inserted, moving between the two first electrode plates 201 in the primary annular channel 301, experiences electric field forces on the two first electrode plates 201. Under the action of the liquid, the liquid moves from the gap between the two first electrode plates 201 and the two second electrode plates 202 into the secondary annular channel 302. The droplet to be inserted 207 is inserted into the center of the first stored droplet 208 and the second stored droplet 209. When the second stored droplet 209 just enters between the two second electrode plates 202, the droplet storage mode is paused. When the second stored droplet 209 just passes between the two second electrode plates 202 and the next droplet to be used 206 adjacent to the second stored droplet 209 has not reached the two second electrode plates 202, the mode switching process is repeated until a droplet to be inserted 207 is inserted between every two adjacent droplets to be used 206 in the secondary annular channel 302. Then the droplet use mode is turned on. Each droplet to be used 206 and the droplet to be inserted 207 in the secondary annular channel 302 is finally ejected from the straight channel body 5 of the outlet section to realize the transfer and use of the charged droplet 104.

[0064] By switching the electrode plates on and off at high frequencies, the droplets introduced into the primary annular channel 301 are shifted one by one to the spaces between two adjacent droplets in the secondary annular channel 302, until the spaces between the two droplets in the secondary annular channel 302 are filled with new droplets introduced from the primary annular channel 301. The frequency obtained from the storage device outlet is a higher frequency than the droplet occurrence frequency. The bias electrode control component 2 can change the droplet spacing by inserting droplets into the secondary annular channel 302, which already stores droplets, by controlling the opening and closing of the droplet storage mode and the usage mode. The droplet spacing is changed from the original storage spacing n0 to the frequency-modulated spacing nl, where n0 = 2nl, thereby changing the droplet occurrence frequency that finally leaves the storage device from the tertiary annular channel 303.

[0065] In the droplet biasing assembly 2, the distance between the first vertical plane containing the sides of the two first electrode plates 201 near each second electrode plate 202 and the second vertical plane containing the sides of the two first electrode plates 201 near each second electrode plate 201 is used as the electrode plate spacing. The electrode plate spacing is equal to the horizontal projection segment of the charged droplet 104 during its axial linear motion from the first-level annular channel 301 to the second-level annular channel 302 or from the second-level annular channel 302 to the third-level annular channel 303 under the Lorentz force of the magnetic field, which can shorten the axial movement distance of the droplet as much as possible.

[0066] Each pair of electrode plates is staggered by a certain distance, so that when the charged droplet 104, which is biased by the bias electric field of the previous stage, accelerates axially through the previous stage electrode plate, it can reach the next stage electrode plate through linear motion in the axial direction and then decelerate axially. For example, the first electrode plate 201 located on the first-stage annular channel 301 is forward in the horizontal direction relative to the second electrode plate 202 located on the second-stage annular channel 302, so that the first electrode plate 201 can bias the charged droplet 104 in time relative to the second electrode plate 202.

[0067] like Figure 7 As shown, the motion pattern control storage device includes two droplet sensing charged components 1, two droplet biasing components 2, a droplet storage component, and two tin target droplet ejection cavities 7. The droplet storage component is located directly below the two tin target droplet ejection cavities 7. The nozzles 6 at the center of the bottom of the two tin target droplet ejection cavities 7 are respectively connected to the top of the droplet storage component and communicate with the droplet storage component. The two droplet sensing charged components 1 are respectively installed at the connection between the nozzles 6 of the two tin target droplet ejection cavities 7 and the droplet storage component. The two droplet biasing components 2 are installed inside the droplet storage component. Each tin target droplet ejection cavity 7 and its respective droplet sensing charged component 1 are electrically connected to a voltage of V. C The single-channel DC power supply is used, the two tin target droplet injection chambers 7 are grounded, and the two droplet biasing components 2 are electrically connected to several dual-channel DC power supplies.

[0068] The droplet storage assembly includes two inlet straight channel bodies 4, two annular channel bodies 3, and an outlet straight channel body 5. Each annular channel body 3 is a hollow annular cylindrical structure. The outer annular surfaces of the two annular channel bodies 3 are tangent to each other and interconnected. The central axis of the annular channel body 3 is horizontal. The interior of the annular channel body 3 is evenly divided along its own axis into a primary annular channel 301, a secondary annular channel 302, and a tertiary annular channel 303. The tertiary annular channels 303 of the two annular channel bodies 3 are directly opposite each other and connected. Each inlet straight channel body 4 and outlet straight channel body 5 is a hollow square tubular structure. The two inlet straight channel bodies 4 and outlet straight channel bodies 5 are vertically arranged in the middle of the two annular channel bodies 3 and are connected to the two annular channel bodies 3. The upper end of the outlet straight channel body 5 is connected to and directly opposite the tertiary annular channel 303 of the two annular channel bodies 3. The lower end of the outlet straight channel body 5 is connected to the outside. The annular channel 303 overlaps with the space above the outlet section straight channel body 5; the lower ends of the two inlet section straight channel bodies 4 are respectively connected to and directly opposite the first-stage annular channel 301 of the two annular channel bodies 3, and the upper ends of the two inlet section straight channel bodies 4 are respectively connected to the nozzles 6 of the two tin target droplet injection chambers 7, and thus respectively connected to the two tin target droplet injection chambers 7; the cross-sectional dimensions of the two inlet section straight channel bodies 4 and the outlet section straight channel body 5 are the same as the channel cross-sectional dimensions of the first-stage annular channel 301; the two sides of the two inlet section straight channel bodies 4 and the outlet section straight channel bodies 5 facing the center of the two annular channel bodies 3 are respectively tangent to the inner annular surface of the two annular channel bodies 3; the two droplet biasing components 2 are respectively installed in the bottom of the two annular channel bodies 3; a uniform axial magnetic field is generated at the two annular channel bodies 3 along their own axis, and the direction of the magnetic field is from the first-stage annular channel 301 to the third-stage annular channel 303, and the magnetic field directions of the two annular channel bodies 3 are opposite.

[0069] The two inlet straight channel bodies 4 of the droplet storage component are a double-ring first inlet straight channel body 8 and a double-ring second inlet straight channel body 9, which are respectively connected to the nozzles 6 of the two tin target droplet ejection chambers 7; the two annular channel bodies 3 are a double-ring first annular channel body 10 and a double-ring second annular channel body 11; the outlet straight channel body 5 is a double-ring outlet straight channel body 12.

[0070] The droplet sensing charged assembly 1 includes an insulating sleeve 101 and an annular metal electrode 102. The insulating sleeve 101 is located directly below and in contact with the nozzle 6 of the tin target droplet ejection chamber 7. The outer surface of the insulating sleeve 101 is in close contact with the inner wall of the inlet section straight channel 4. The annular metal electrode 102 is a hollow square ring. The inner surface of the lower part of the insulating sleeve 101 is fitted onto the outer ring surface of the annular metal electrode 102. The outer diameter of the annular metal electrode 102 is equal to the inner diameter of the insulating sleeve 101. The annular metal electrode 102, the nozzle 6, and the inlet section straight channel 4 are kept insulated. The central axis of the nozzle 6 and the central axis of the insulating sleeve 101 and the annular metal electrode 102 are on the same straight line. The nozzle 6 is connected to the inlet section straight channel 4 through the hollow area of ​​the annular metal electrode 102. The annular metal electrode 102 is electrically connected to the positive terminal of a single-channel DC power supply, and the tin target droplet ejection chamber 7 is connected to the negative terminal of the single-channel DC power supply.

[0071] Each droplet biasing assembly 2 includes two first electrode plates 201, two second electrode plates 202, two third electrode plates 203, and two fourth electrode plates 204. Each of the first electrode plates 201, 202, 203, and 204 is vertically and parallel to each other, arranged within the bottom of its respective annular channel 3. The top edges of each of the first electrode plates 201, 202, 203, and 204 are connected to the top surface of the bottom of the annular channel 3, and the bottom edges are connected to the bottom surface of the bottom of the annular channel 3. The two first electrode plates... The line connecting the center points of plate 201 and the two fourth electrode plates 204 is on the same straight line and perpendicular to the surface of the first electrode plate 201; the two first electrode plates 201 are arranged facing each other in the first-level annular channel 301 of the annular channel body 3, respectively close to and away from the annular end face of the annular channel body 3; the two fourth electrode plates 204 are arranged facing each other in the third-level annular channel 303 of the annular channel body 3, respectively close to and away from the annular end face of the annular channel body 3; the two second electrode plates 202 and the two third electrode plates 203 are each arranged facing each other in the second-level annular channel 302 of the annular channel body 3, and the two second electrode plates 202 and the two third electrode plates 203 are respectively located at the respective first electrode plates 201 and third electrode plates 203. On both symmetrical sides, two second electrode plates 202 are located on the side away from the inlet section straight channel body 4, and the two second electrode plates 202 are respectively close to the two annular end faces of the annular channel body 3. Two third electrode plates 203 are located on the side close to the inlet section straight channel body 4, and the two third electrode plates 203 are respectively close to the two annular end faces of the annular channel body 3. The two first electrode plates 201 and the two second electrode plates 202 are electrically connected to the first dual-channel DC power supply, and the two third electrode plates 203 and the two fourth electrode plates 204 are electrically connected to the second dual-channel DC power supply. The first electrode plates 201 and the third electrode plates 203 near the inner side of the annular channel body 3 are respectively electrically connected to the positive terminals of the first dual-channel DC power supply and the second dual-channel DC power supply. The first electrode plate 201 and the third electrode plate 203 near the outer side of the annular channel body 3 are electrically connected to the negative terminals of the first dual-channel DC power supply and the second dual-channel DC power supply, respectively; the second electrode plate 202 and the fourth electrode plate 204 near the outer side of the annular channel body 3 are electrically connected to the positive terminals of the first dual-channel DC power supply and the second dual-channel DC power supply, respectively; and the second electrode plate 202 and the fourth electrode plate 204 near the inner side of the annular channel body 3 are electrically connected to the negative terminals of the first dual-channel DC power supply and the second dual-channel DC power supply, respectively; the absolute values ​​of the voltage values ​​of the two first electrode plates 201 and the two second electrode plates 202 are the same, and the absolute values ​​of the voltage values ​​of the two third electrode plates 203 and the two pairs of electrode plates 204 are the same.The distances between the two first electrode plates 201, the two second electrode plates 202, the two third electrode plates 203, and the two fourth electrode plates 204 are all the same.

[0072] The two inlet straight channel bodies 4 and the outlet straight channel body 5 are made of magnetic shielding material; the two annular channel bodies 3 are made of non-metallic material.

[0073] The control method for the dual-ring motion pattern control storage device is as follows:

[0074] The motion-mode control storage device controls the charged droplet 104 in a droplet frequency conversion mode under vacuum, as follows:

[0075] Two single-channel DC power supplies and two first dual-channel DC power supplies are turned on. For each inlet section linear channel 4, annular channel 3, outlet section linear channel 5, and its droplet induction charging component 1, droplet biasing component 2, and tin target droplet ejection cavity 7 in the droplet storage component, the two first electrode plates 201 of the droplet biasing component 2 generate an electric field force in the same direction as the magnetic field at the annular channel 3 where it is located, and the two second electrode plates 202 generate an electric field force in the opposite direction to the magnetic field at the annular channel 3 where it is located. After the jet 103 is vertically ejected downward from the nozzle 6 of the tin target droplet ejection cavity 7 containing liquid, it breaks into several droplets. Each droplet passes through the center of the annular metal electrode 102 and becomes a charged droplet 104. Each charged droplet 104 enters the first-level annular channel 301 under the influence of a magnetic field, suspending and rotating around the channel axis of the first-level annular channel 301 as a droplet to be stored 205. When the droplet to be stored 205 passes between the two first electrode plates 201, it moves from the gap between the two first electrode plates 201 and the two second electrode plates 202 under the influence of the electric field force of the two first electrode plates 201 to the second-level annular channel 302 as a droplet to be used 206. The droplet to be used 206 is held at the channel axis of the second-level annular channel 302 under the influence of the electric field force of the two second electrode plates 202, and then suspends and rotates around the channel axis of the second-level annular channel 302 under the influence of a magnetic field for dynamic storage.

[0076] First, one of the second dual-channel DC power supplies is turned on, causing the two third electrode plates 203 of the droplet biasing assembly 2 on one of the annular channels 4 to generate an electric field force in the same direction as the magnetic field at the annular channel 3 where they are located, and the two fourth electrode plates 204 to generate an electric field force in the opposite direction to the magnetic field at the annular channel 3 where they are located. When the droplet 206 to be used in one of the annular channels 4 moves between the two third electrode plates 203, it moves from the gap between the two third electrode plates 203 and the two fourth electrode plates 204 into the three-level annular channel 303 under the action of the electric field force of the two third electrode plates 203. Under the action of the electric field force of the two fourth electrode plates 204, it is held at the channel axis of the three-level annular channel 303 and makes a suspended circular motion around the channel axis of the three-level annular channel 303 under the action of the magnetic field. Between the first droplet 206 to be used in one of the annular channels 4 just moved to the center of the two third electrode plates 203 and the next droplet 206 just moved to the center of the annular channel 4, it moves to the center of the annular channel 303. At the midpoint of the time difference between the centers of the two third electrode plates 203, another second dual-channel DC power supply is turned on, causing the two third electrode plates 203 of the droplet biasing assembly 2 on the other annular channel 4 to generate an electric field force in the same direction as the magnetic field at the annular channel 3 where they are located, and the two fourth electrode plates 204 to generate an electric field force in the opposite direction to the magnetic field at the annular channel 3 where they are located. When the droplet 206 to be used in the other annular channel 4 moves between the two third electrode plates 203, under the action of the electric field force of the two third electrode plates 203, it moves from the gap between the two third electrode plates 203 and the two fourth electrode plates 204 into the third-level annular channel 303 and inserts between the previous droplet 206 and the next droplet 206 to be used in one of the annular channels 4. Finally, each droplet 206 to be used in the second-level annular channel 302 of the two annular channels 4 is ejected from the straight channel 5 of the outlet section to realize the transfer and use of the charged droplet 104.

[0077] In each droplet biasing assembly 2, the distance between the first vertical plane containing the sides of the two first electrode plates 201 near each second electrode plate 202 and the second vertical plane containing the sides of the two first electrode plates 201 near each first electrode plate 201 is used as the electrode plate spacing. The electrode plate spacing is equal to the horizontal projection segment of the charged droplet 104 during its axial linear motion from the first-level annular channel 301 to the second-level annular channel 302 or from the second-level annular channel 302 to the third-level annular channel 303, which is subjected to the Lorentz force of the magnetic field during circular motion.

[0078] Droplets stored in two annular channels 4 are transported in an alternating manner, eventually forming a droplet flow with frequency changes that is exactly on the same plane. This flow then passes through a straight channel 5 with the same exit section, resulting in a droplet bundle with a consistent and regular motion pattern. The frequency of this droplet bundle is exactly twice the frequency of its occurrence. Similarly, by using a superposition method, the frequency of the original droplet occurrence can be amplified by inserting different channel droplets into the channel using equal intervals between the original droplet occurrences, thus achieving an integer multiple amplification of the frequency of use.

[0079] The aforementioned dual-ring motion pattern control storage device is a superposition of the structure of the single-ring motion pattern control storage device, and they share a single outlet section linear channel 12 to perform frequency conversion by alternately delivering target droplets through dual channels.

[0080] The examples and descriptions above are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A storage device for controlling the motion pattern of an EUV light source target droplet, characterized by: The device comprises a droplet induction charging component (1), a droplet biasing component (2), a droplet storage component and a tin target droplet ejection cavity (7), the droplet storage component is located directly below the tin target droplet ejection cavity (7), a nozzle (6) at the center of the bottom of the tin target droplet ejection cavity (7) is connected to the top end of the droplet storage component and communicates with the droplet storage component, the droplet induction charging component (1) is installed at the connection between the nozzle (6) of the tin target droplet ejection cavity (7) and the droplet storage component; the droplet biasing component (2) is installed in the droplet storage component; the tin target droplet ejection cavity (7) and the droplet induction charging component (1) are respectively electrically connected to a single-channel direct current power supply, and the droplet biasing component (2) is electrically connected to a plurality of double-channel direct current power supplies. The droplet storage component comprises a ring-shaped channel body (3), an inlet section linear channel body (4) and an outlet section linear channel body (5), the ring-shaped channel body (3) is a hollow ring-shaped cylindrical structure, the central axis of the ring-shaped channel body (3) is in the horizontal direction, and the inside of the ring-shaped channel body (3) is evenly divided into a first-level ring-shaped channel (301), a second-level ring-shaped channel (302) and a third-level ring-shaped channel (303) along the central axis direction of the ring-shaped channel body (3); the inlet section linear channel body (4) and the outlet section linear channel body (5) are both hollow square tubular structures, the inlet section linear channel body (4) and the outlet section linear channel body (5) are vertically arranged on the same side of the ring-shaped channel body (3) and communicate with the ring-shaped channel body (3), the upper end of the outlet section linear channel body (5) communicates with and faces the third-level ring-shaped channel (303) of the ring-shaped channel body (3), the lower end of the outlet section linear channel body (5) communicates with the outside, the lower end of the inlet section linear channel body (4) communicates with and faces the first-level ring-shaped channel (301) of the ring-shaped channel body (3), and the upper end of the inlet section linear channel body (4) is connected to the nozzle (6) of the tin target droplet ejection cavity (7) and further communicates with the tin target droplet ejection cavity (7); the cross-sectional dimension of the inlet section linear channel body (4) and the outlet section linear channel body (5) is the same as the channel cross-sectional dimension of the first-level ring-shaped channel (301); the side face of the inlet section linear channel body (4) and the outlet section linear channel body (5) away from the center of the ring-shaped channel body (3) is tangent to the outer side surface of the ring-shaped channel body (3), and the side face of the inlet section linear channel body (4) and the outlet section linear channel body (5) close to the center of the ring-shaped channel body (3) is tangent to the inner side surface of the ring-shaped channel body (3); the droplet biasing component (2) is installed in the bottom of the ring-shaped channel body (3); a uniform axial magnetic field is generated along the axial direction of the ring-shaped channel body (3), and the magnetic field direction is from the first-level ring-shaped channel (301) to the third-level ring-shaped channel (303).

2. The device according to claim 1, wherein: The liquid drop induction charging assembly (1) comprises an insulating sleeve (101) and a ring-shaped metal electrode (102), the insulating sleeve (101) is located right below the nozzle (6) of the tin target drop spraying cavity (7) and is in contact with each other, the outer side surface of the insulating sleeve (101) is tightly attached to the inner wall surface of the inlet section linear channel body (4), the ring-shaped metal electrode (102) is a hollow square ring, the inner side surface of the lower part of the insulating sleeve (101) is sleeved on the outer side surface of the ring-shaped metal electrode (102); the central axis of the nozzle (6) and the central axes of the insulating sleeve (101) and the ring-shaped metal electrode (102) are located on the same straight line, the nozzle (6) is communicated with the inlet section linear channel body (4) through the hollow area of the ring-shaped metal electrode (102); the ring-shaped metal electrode (102) is electrically connected with the positive electrode of the single-channel direct current power supply, and the tin target drop spraying cavity (7) is connected with the negative electrode of the single-channel direct current power supply.

3. A storage device for controlling the motion pattern of a target droplet of an EUV light source according to claim 2, characterized in that: The liquid drop biasing assembly (2) comprises two first electrode plates (201), two second electrode plates (202), two third electrode plates (203) and two fourth electrode plates (204), each of the first electrode plate (201), the second electrode plate (202), the third electrode plate (203) and the fourth electrode plate (204) is vertically and parallelly arranged in the bottom of the annular channel body (3), the top edge of each of the first electrode plate (201), the second electrode plate (202), the third electrode plate (203) and the fourth electrode plate (204) is connected with the top surface in the bottom of the annular channel body (3), the bottom edge of each of the first electrode plate (201), the second electrode plate (202), the third electrode plate (203) and the fourth electrode plate (204) is connected with the bottom surface in the bottom of the annular channel body (3), and the connecting line of the center points of the two first electrode plates (201) and the two fourth electrode plates (204) is located on the same straight line and is perpendicular to the plate surface of the first electrode plate (201); the two first electrode plates (201) are oppositely arranged in the first-stage annular channel (301) of the annular channel body (3) and are respectively close to and away from the annular end surface of the annular channel body (3), the two fourth electrode plates (204) are oppositely arranged in the third-stage annular channel (303) of the annular channel body (3) and are respectively close to and away from the annular end surface of the annular channel body (3); the two second electrode plates (202) and the two third electrode plates (203) are respectively oppositely arranged in the second-stage annular channel (302) of the annular channel body (3), the two second electrode plates (202) and the two third electrode plates (203) are respectively located on the symmetrical two sides of each of the first electrode plate (201) and the third electrode plate (203), the two second electrode plates (202) are located on the side away from the inlet section linear channel body (4), the two second electrode plates (202) are respectively close to the two side annular end surfaces of the annular channel body (3), the two third electrode plates (203) are located on the side close to the inlet section linear channel body (4), and the two third electrode plates (203) are respectively close to the two side annular end surfaces of the annular channel body (3). Two pieces of first electrode plate (201) and two pieces of second electrode plate (202) are electrically connected with the first double-channel direct current power supply, two pieces of third electrode plate (203) and two pieces of fourth electrode plate (204) are electrically connected with the second double-channel direct current power supply, the first electrode plate (201) and the third electrode plate (203) close to the inner side of the annular channel body (3) are respectively electrically connected with the positive pole of the first double-channel direct current power supply and the second double-channel direct current power supply, the first electrode plate (201) and the third electrode plate (203) close to the outer side of the annular channel body (3) are respectively electrically connected with the negative pole of the first double-channel direct current power supply and the second double-channel direct current power supply; the second electrode plate (202) and the fourth electrode plate (204) close to the outer side of the annular channel body (3) are respectively electrically connected with the positive pole of the first double-channel direct current power supply and the second double-channel direct current power supply, the second electrode plate (202) and the fourth electrode plate (204) close to the inner side of the annular channel body (3) are respectively electrically connected with the negative pole of the first double-channel direct current power supply and the second double-channel direct current power supply; the absolute value of the voltage of the two pieces of first electrode plate (201) and the two pieces of second electrode plate (202) is the same, and the absolute value of the voltage of the two pieces of third electrode plate (203) and the two pieces of fourth electrode plate (204) is the same.

4. The storage device of claim 3, wherein: The distance between the two pieces of first electrode plate (201), the distance between the two pieces of second electrode plate (202), the distance between the two pieces of third electrode plate (203) and the distance between the two pieces of fourth electrode plate (204) are the same.

5. The storage device of claim 3, wherein: The inlet section straight channel body (4) and the outlet section straight channel body (5) adopt magnetic shielding material; the annular channel body (3) adopts non-metallic material.

6. The control method of the motion mode control storage device according to claim 4, wherein: The working mode of the motion mode control storage device in the control process includes a droplet storage mode, a droplet use mode and a droplet frequency conversion mode, and all are in a vacuum environment, and the specific modes are as follows: When the motion form control storage device is in the liquid drop storage mode, the single-channel direct current power supply and the first double-channel direct current power supply are turned on, two pieces of the first electrode plate (201) generate electric field force in the same direction as the direction of the magnetic field, and two pieces of the second electrode plate (202) generate electric field force in the opposite direction of the magnetic field; After the jet (103) is vertically sprayed downward from the nozzle (6) of the tin target drop ejection cavity (7) filled with liquid, it is broken into a plurality of liquid drops, each liquid drop becomes a charged liquid drop (104) after passing through the center of the annular metal electrode (102), and each charged liquid drop (104) makes a suspended circular motion around the channel axis of the first annular channel (301) after the inlet section linear channel body (4) under the action of the magnetic field to enter the first annular channel (301) as a to-be-stored liquid drop (205), and the to-be-stored liquid drop (205) moves from the interval between the two pieces of the first electrode plate (201) and the two pieces of the second electrode plate (202) to the second annular channel (302) as a to-be-used liquid drop (206) under the action of the electric field force of the two pieces of the first electrode plate (201), and the to-be-used liquid drop (206) is kept at the channel axis of the second annular channel (302) under the action of the electric field force of the two pieces of the second electrode plate (202), and then makes a suspended circular motion around the channel axis of the second annular channel (302) under the action of the magnetic field to realize dynamic storage; When the motion form control storage device is in the liquid drop use mode, the second double-channel direct current power supply is turned on, the two pieces of the third electrode plate (203) generate electric field force in the same direction as the direction of the magnetic field, and the two pieces of the fourth electrode plate (204) generate electric field force in the opposite direction of the magnetic field; When the to-be-used liquid drop (206) moves between the two pieces of the third electrode plate (203), it moves from the interval between the two pieces of the third electrode plate (203) and the two pieces of the fourth electrode plate (204) to the third annular channel (303) under the action of the electric field force of the two pieces of the third electrode plate (203), and is kept at the channel axis of the third annular channel (303) under the action of the electric field force of the two pieces of the fourth electrode plate (204), and then makes a suspended circular motion around the channel axis of the third annular channel (303) under the action of the magnetic field, and finally is ejected from the outlet section linear channel body (5) to realize the transfer and use of the charged liquid drop (104); When the motion form control storage device is in the droplet frequency conversion mode, the motion form control storage device first works in the droplet storage mode, each to-be-used droplet (206) is stored in the secondary annular channel (302), and the distance between each two adjacent to-be-used droplets (206) in the secondary annular channel (302) is the same; then the mode switching process is performed, specifically, first, the droplet storage mode is paused, when the first stored droplet (208) in each to-be-used droplet (206) in the secondary annular channel (302) just passes between the two second electrode plates (202) and the adjacent next second stored droplet (209) of the first stored droplet (208) does not reach between the two second electrode plates (202), the droplet storage mode is started, the to-be-inserted droplet (207) moving to between the two first electrode plates (201) in the primary annular channel (301) moves to the secondary annular channel (302) from the interval between the two first electrode plates (201) and the two second electrode plates (202) under the action of the electric field force of the two first electrode plates (201), the to-be-inserted droplet (207) is inserted into the center of the first stored droplet (208) and the second stored droplet (209), when the second stored droplet (209) just enters between the two second electrode plates (202), the droplet storage mode is paused, when the second stored droplet (209) just passes between the two second electrode plates (202) and the adjacent next to-be-used droplet (206) of the second stored droplet (209) does not reach between the two second electrode plates (202), the mode switching process is repeated, until one to-be-inserted droplet (207) is inserted between each two adjacent to-be-used droplets (206) in the secondary annular channel (302), then the droplet use mode is started, and each to-be-used droplet (206) and the to-be-inserted droplet (207) in the secondary annular channel (302) is finally ejected from the outlet section straight channel body (5) to realize the transfer and use of the charged droplet (104).

7. The control method of a motion mode control storage device according to claim 6, characterized by: In the droplet biasing assembly (2), the distance between the first vertical plane where the side edges of the two first electrode plates (201) close to each second electrode plate (202) and the second vertical plane where the side edges of the two first electrode plates (201) close to each first electrode plate (201) is the electrode plate spacing, which is equal to the horizontal projection segment of the circular motion under the Lorentz force of the magnetic field in the axial linear motion process of the charged droplet (104) from the primary annular channel (301) to the secondary annular channel (302) or from the secondary annular channel (302) to the tertiary annular channel (303).

8. A storage device for controlling the motion pattern of an EUV light source target droplet, characterized by: The device comprises two droplet induction charging assemblies (1), two droplet biasing assemblies (2), a droplet storage assembly and two tin target droplet ejection cavities (7), the droplet storage assembly is located directly below the two tin target droplet ejection cavities (7), the nozzles (6) at the bottom center of the two tin target droplet ejection cavities (7) are connected to the top ends of the droplet storage assembly and communicate with the droplet storage assembly, the two droplet induction charging assemblies (1) are respectively installed at the connection between the nozzles (6) of the two tin target droplet ejection cavities (7) and the droplet storage assembly; the two droplet biasing assemblies (2) are installed in the droplet storage assembly; each tin target droplet ejection cavity (7) and the respective one droplet induction charging assembly (1) are respectively electrically connected to a single-channel direct current power supply, and the two droplet biasing assemblies (2) are electrically connected to a plurality of double-channel direct current power supplies; The droplet storage assembly comprises two inlet section linear channel bodies (4), two annular channel bodies (3) and an outlet section linear channel body (5); each annular channel body (3) is a hollow annular cylindrical structure, the outer lateral surfaces of the two annular channel bodies (3) are tangent to each other and communicate with each other, the central axes of the annular channel bodies (3) are in the horizontal direction, the interiors of the annular channel bodies (3) are evenly divided into first annular channels (301), second annular channels (302) and third annular channels (303) along the axial directions of the annular channel bodies (3), and the third annular channels (303) of the two annular channel bodies (3) are directly opposite and communicate with each other; each inlet section linear channel body (4) and outlet section linear channel body (5) is a hollow square tubular structure, the two inlet section linear channel bodies (4) and outlet section linear channel bodies (5) are vertically arranged in the middle of the two annular channel bodies (3) and communicate with the two annular channel bodies (3); the upper end of the outlet section linear channel body (5) communicates with and is directly opposite the third annular channels (303) of the two annular channel bodies (3), the lower end of the outlet section linear channel body (5) communicates with the outside, the lower ends of the two inlet section linear channel bodies (4) respectively communicate with and are directly opposite the first annular channels (301) of the two annular channel bodies (3), and the upper ends of the two inlet section linear channel bodies (4) are respectively connected to the nozzles (6) of the two tin target droplet ejection cavities (7) and further respectively communicate with the two tin target droplet ejection cavities (7); the cross-sectional dimensions of the two inlet section linear channel bodies (4) and outlet section linear channel bodies (5) are the same as the channel cross-sectional dimension of the first annular channels (301); the two sides of the two inlet section linear channel bodies (4) and outlet section linear channel bodies (5) towards the centers of the two annular channel bodies (3) are respectively tangent to the inner lateral surfaces of the two annular channel bodies (3); the two droplet biasing assemblies (2) are respectively installed at the bottoms of the two annular channel bodies (3); the two annular channel bodies (3) generate uniform axial magnetic fields along the axial directions thereof, the magnetic field directions are from the first annular channels (301) to the third annular channels (303), and the magnetic field directions of the two annular channel bodies (3) are opposite. The liquid drop induction charging assembly (1) comprises an insulating sleeve (101) and a ring-shaped metal electrode (102), the insulating sleeve (101) is located right below the nozzle (6) of the tin target drop ejection cavity (7) and is in contact with each other, the outer side surface of the insulating sleeve (101) is tightly attached to the inner wall surface of the inlet section linear channel body (4), the ring-shaped metal electrode (102) is a hollow square ring, the inner side surface of the lower part of the insulating sleeve (101) is sleeved on the outer side surface of the ring-shaped metal electrode (102); the central axis of the nozzle (6) and the central axes of the insulating sleeve (101) and the ring-shaped metal electrode (102) are located on the same straight line, the nozzle (6) is communicated with the inlet section linear channel body (4) through the hollow area of the ring-shaped metal electrode (102); the ring-shaped metal electrode (102) is electrically connected to the positive electrode of the single-channel direct current power supply, and the tin target drop ejection cavity (7) is connected to the negative electrode of the single-channel direct current power supply. Each of the droplet biasing assemblies (2) comprises two first electrode plates (201), two second electrode plates (202), two third electrode plates (203) and two fourth electrode plates (204), each of the first electrode plates (201), the second electrode plates (202), the third electrode plates (203) and the fourth electrode plates (204) is vertically and parallelly arranged in the bottom of the respective one annular channel body (3), the top edge of each of the first electrode plates (201), the second electrode plates (202), the third electrode plates (203) and the fourth electrode plates (204) is connected to the top surface in the bottom of the annular channel body (3), the bottom edge of each of the first electrode plates (201), the second electrode plates (202), the third electrode plates (203) and the fourth electrode plates (204) is connected to the bottom surface in the bottom of the annular channel body (3), the line connecting the center points of the two first electrode plates (201) and the two fourth electrode plates (204) is on the same straight line and perpendicular to the plate surface of the first electrode plate (201); the two first electrode plates (201) are oppositely arranged in the first-stage annular channel (301) of the annular channel body (3) and are respectively close to and away from the annular end surface of the annular channel body (3), the two fourth electrode plates (204) are oppositely arranged in the third-stage annular channel (303) of the annular channel body (3) and are respectively close to and away from the annular end surface of the annular channel body (3); the two second electrode plates (202) and the two third electrode plates (203) are oppositely arranged in the second-stage annular channel (302) of the annular channel body (3) respectively, the two second electrode plates (202) and the two third electrode plates (203) are respectively located on the symmetrical two sides of each of the first electrode plates (201) and the third electrode plates (203), the two second electrode plates (202) are located on the side away from the inlet section linear channel body (4), the two second electrode plates (202) are respectively close to the two side annular end surfaces of the annular channel body (3), the two third electrode plates (203) are located on the side close to the inlet section linear channel body (4), the two third electrode plates (203) are respectively close to the two side annular end surfaces of the annular channel body (3); the two first electrode plates (201) and the two second electrode plates (202) are electrically connected to the first double-channel direct current power supply, the two third electrode plates (203) and the two fourth electrode plates (204) are electrically connected to the second double-channel direct current power supply, the first electrode plates (201) and the third electrode plates (203) close to the inner side surface of the annular channel body (3) are respectively electrically connected to the positive poles of the first double-channel direct current power supply and the second double-channel direct current power supply, the first electrode plates (201) and the third electrode plates (203) close to the outer side surface of the annular channel body (3) are respectively electrically connected to the negative poles of the first double-channel direct current power supply and the second double-channel direct current power supply.The second electrode plate (202) and the fourth electrode plate (204) close to the outer side surface of the annular channel body (3) are respectively electrically connected to the positive poles of the first double-channel direct current power supply and the second double-channel direct current power supply, and each second electrode plate (202) and fourth electrode plate (204) close to the inner side surface of the annular channel body (3) are respectively electrically connected to the negative poles of the first double-channel direct current power supply and the second double-channel direct current power supply; the absolute values of the voltage values of the two first electrode plates (201) and the two second electrode plates (202) are the same, and the absolute values of the voltage values of the two third electrode plates (203) and the two fourth electrode plates (204) are the same; the distance between the two first electrode plates (201), the distance between the two second electrode plates (202), the distance between the two third electrode plates (203) and the distance between the two fourth electrode plates (204) are all the same. The two inlet section linear channel bodies (4) and the outlet section linear channel body (5) are made of magnetic shielding material; and the two ring-shaped channel bodies (3) are made of non-metallic material.

9. The control method of a motion mode control storage device according to claim 8, characterized by: The method is as follows: The motion form control storage device controls the charged liquid drops (104) in the liquid drop frequency conversion mode under vacuum, and the specific process is as follows: Two single-channel direct current power supplies and two first double-channel direct current power supplies are turned on, and for each inlet section linear channel body (4), ring-shaped channel body (3), outlet section linear channel body (5) and the liquid drop induction charging assembly (1), liquid drop biasing assembly (2) and tin target drop ejection cavity (7) in the liquid drop storage assembly, the two first electrode plates (201) of the liquid drop biasing assembly (2) generate electric field force in the same direction as the magnetic field direction at the ring-shaped channel body (3) where the two first electrode plates (201) are located, and the two second electrode plates (202) generate electric field force in the opposite direction of the magnetic field direction at the ring-shaped channel body (3) where the two second electrode plates (202) are located; after the jet (103) is vertically ejected downward from the nozzle (6) of the tin target drop ejection cavity (7) filled with liquid and broken into a plurality of liquid drops, each liquid drop becomes a charged liquid drop (104) after passing through the center of the ring-shaped metal electrode (102), each charged liquid drop (104) makes a suspended circular motion around the channel axis of the primary ring-shaped channel (301) under the action of the magnetic field after entering the primary ring-shaped channel (301) from the inlet section linear channel body (4) as a to-be-stored liquid drop (205), the to-be-stored liquid drop (205) moves from the interval between the two first electrode plates (201) and the two second electrode plates (202) to the secondary ring-shaped channel (302) as a to-be-used liquid drop (206) under the action of the electric field force of the two first electrode plates (201), and the to-be-used liquid drop (206) remains at the channel axis of the secondary ring-shaped channel (302) under the action of the electric field force of the two second electrode plates (202) and then makes a suspended circular motion around the channel axis of the secondary ring-shaped channel (302) for dynamic storage under the action of the magnetic field. First, open one of the second dual-channel DC power supply to make one of the two third electrode plate (203) of the droplet biasing assembly (2) on the annular channel body (3) produce the same direction of the magnetic field at the place of the annular channel body (3) on the electric field force, two fourth electrode plate (204) produce the opposite direction of the magnetic field at the place of the annular channel body (3) on the electric field force; The droplet (206) to be used in one of the annular channel body (3) moves between the two third electrode plate (203), under the action of the electric field force of the two third electrode plate (203), moves from the interval between the two third electrode plate (203) and the two fourth electrode plate (204) to the third annular channel (303), under the action of the electric field force of the two fourth electrode plate (204), keeps at the channel axis of the third annular channel (303), under the action of the magnetic field, makes a suspended circular motion around the channel axis of the third annular channel (303); When the median of the time difference between the time when the previous droplet (206) to be used in one of the annular channel body (3) just moves between the center of the two third electrode plate (203) and the time when the next droplet (206) to be used just moves between the center of the two third electrode plate (203), open another second dual-channel DC power supply to make the two third electrode plate (203) of the droplet biasing assembly (2) on the other annular channel body (3) produce the same direction of the magnetic field at the place of the annular channel body (3) on the electric field force, two fourth electrode plate (204) produce the opposite direction of the magnetic field at the place of the annular channel body (3) on the electric field force; The droplet (206) to be used in another annular channel body (3) moves between the two third electrode plate (203), under the action of the electric field force of the two third electrode plate (203), moves from the interval between the two third electrode plate (203) and the two fourth electrode plate (204) to the third annular channel (303) and inserts between the previous droplet (206) and the next droplet (206) in one of the annular channel body (3), finally each droplet (206) in the second annular channel (302) of the two annular channel bodies (3) is ejected from the outlet segment straight channel body (5) to realize the transfer and use of the charged droplet (104); In each droplet biasing assembly (2), the distance between the first vertical plane where the side of the two first electrode plates (201) near each second electrode plate (202) is located and the second vertical plane where the side of the two first electrode plates (201) near each first electrode plate (201) is located is the electrode plate spacing, which is equal to the horizontal projection segment of the horizontal projection of the circular motion under the Lorentz force of the magnetic field during the axial linear motion of the charged droplet (104) from the first annular channel (301) to the second annular channel (302) or from the second annular channel (302) to the third annular channel (303).

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