An all-glass laser interferometer assembly and detection mechanism

Abstract

The present invention discloses an all-glass laser interferometer assembly and detection mechanism, which belongs to the field of optical assembly and adjustment technology. The present invention is provided with an assembly and adjustment device, which has a horizontal moving stage capable of horizontal displacement along the Y-axis and the X-axis. The side of the horizontal moving stage clamps a small rectangular block through a clamping mechanism. A turntable capable of driving the horizontal moving stage to rotate along the Z-axis is installed above the horizontal moving stage, and the turntable is equipped with an actuator for driving the turntable to drive the clamping mechanism to adjust the pitch angle; wherein, an optical detection device is installed below the horizontal moving stage for completing the relative position and posture detection of the small rectangular block and the all-glass substrate. The present invention has the beneficial effects of high assembly and adjustment accuracy, good optical bonding firmness, high optical stability, and real-time detection function, which fully meets the production and manufacturing requirements of the all-glass laser interferometer.

Description

Technical Field

[0001] The present invention relates to the technical field of optical assembly and adjustment, and in particular to an assembly and adjustment detection mechanism for an all-glass laser interferometer. Background Art

[0002] When conducting space gravitational wave detection, it is necessary to transmit and receive laser signals at a distance of millions of kilometers. The received laser signals are measured using heterodyne interferometry to detect gravitational waves. In order to achieve interferometry with picometer-level accuracy, an interstellar laser interferometry optical system is used. Among them, the all-glass laser interferometer is an important component of the interstellar laser interferometry optical system. In order to ensure that the optical devices on the all-glass laser interferometer are accurately positioned, firmly fixed, and have ultra-stable optical properties, optical bonding technology is required in the production process of the all-glass laser interferometer.

[0003] Attachment Figure 1 This is a model of an all-glass laser interferometer optical system. It includes a beam splitter 1, a PBS glass plate 2, and a reflector 3 mounted on a glass substrate 4. Most components in an all-glass laser interferometer are rectangular parallelepiped devices of this type, with consistent dimensions. Assembling and adjusting these three types of components is the primary task in manufacturing an all-glass laser interferometer.

[0004] For the rectangular block components in the all-glass laser interferometer: beam splitter 1, PBS glass plate 2 and reflector 3. When optically bonding with the glass substrate 4 of the all-glass laser interferometer, for each rectangular block component (for the convenience of explanation, the following examples are all represented by small rectangular blocks 1), a local coordinate system is established for each small rectangular block component, such as Figure 2 Figure a shows the small rectangular block 1 in its ideal bonding position, with its bottom surface strictly aligned with the top surface of the glass substrate 4. At this point, a drop of etching adhesive solution is placed between the small rectangular block 1 and the glass substrate 4, and the two automatically bond. The coordinate origin is at the center of mass of the rectangular block 1, with the vertical direction pointing upwards to the +z axis. For surfaces perpendicular to the glass substrate 4 with a larger surface area, the surface normal is in the +x axis direction. For surfaces perpendicular to the glass substrate 4 with a smaller surface area, the surface normal is in the +y axis direction.

[0005] The following is an analysis of the various adjustment errors that need to be adjusted when assembling small rectangular blocks;

[0006] When each small rectangular block 1 is bonded to the glass substrate 4, due to the deviation of each small rectangular block 1 from its ideal position, the bottom surface of the small rectangular block 1 cannot be completely in contact with the upper surface of the glass substrate 4, or the position of the small rectangular block 1 is incorrect, so the relative position deviation of the small rectangular block 1 and the glass substrate 4 needs to be adjusted;

[0007] When the small rectangular block 1 has a certain degree of rotation error around the +z axis, the dotted rectangular block represents the ideal position, and the solid rectangular block represents the actual spatial position of the small rectangular block. There is an angle deviation of α between the actual position of the small rectangular block and the ideal position, as shown in Figure 2 As shown in b;

[0008] When the small rectangular block 1 has a certain degree of rotation error around the +x axis, the dotted rectangular block represents the ideal position, and the solid rectangular block represents the actual spatial position of the small rectangular block. There is an angle deviation of β between the actual position of the small rectangular block and the ideal position, as shown in Figure 2 As shown in c;

[0009] When the small rectangular block 1 has a certain degree of rotation error around the +y axis, the dotted rectangular block represents the ideal position, and the solid rectangular block represents the actual spatial position of the small rectangular block. There is an angle deviation of γ between the actual position of the small rectangular block and the ideal position, as shown in Figure 2 As shown in d;

[0010] When the small rectangular block 1 has a certain degree of translation error along the +x axis, the dotted rectangular block represents the ideal position, and the solid rectangular block represents the actual spatial position of the small rectangular block. There is a distance deviation of dX between the actual position of the small rectangular block and the ideal position, as shown in Figure 2 As shown in e.

[0011] When the small rectangular block 1 has a certain degree of translation error along the +y axis, the dotted rectangular block represents the ideal position, and the solid rectangular block represents the actual spatial position of the small rectangular block. There is a distance deviation of dY between the actual position of the small rectangular block and the ideal position, as shown in Figure 2 f shown;

[0012] In the prior art, the American LISA (Laser Interferometer Space Antenna) adopts the following installation method: a small rectangular block 1 is directly placed on a full glass substrate, and a plurality of probes 28 are used to move the small rectangular block 1, such as Figure 3 As shown, this adjustment mechanism can only make the small rectangular block 1 translate along the X-axis and Y-axis directions, and rotate on the full-glass substrate 4. These three degrees of freedom correspond to Figures e, f and d respectively. The degrees of freedom in other directions cannot be adjusted, which may easily lead to an excessive gap between the small rectangular block 1 and the full-glass substrate 4, resulting in unreliable chemical corrosion bonding, or the position and posture of the small rectangular block 1 changes during the chemical corrosion bonding process. LISA also uses a hexapod platform to assemble the full-glass laser interferometer, but the hexapod platform is expensive, difficult to repair if damaged, and has high maintenance and use costs. Summary of the Invention

[0013] The purpose of the present invention is to overcome the defects of the prior art and provide an all-glass laser interferometer assembly and detection mechanism, which can realize the assembly and adjustment of the all-glass laser interferometer. The mechanism has high assembly and adjustment accuracy, good optical bonding firmness, high optical stability, and at the same time has real-time detection function, which fully meets the production and manufacturing requirements of the all-glass laser interferometer.

[0014] In order to achieve the above object, the present invention provides the following technical solutions:

[0015] The present invention discloses an all-glass laser interferometer assembly and detection mechanism, comprising:

[0016] The adjustment device comprises a horizontal moving stage capable of horizontal displacement along the Y-axis and the X-axis, a small rectangular block being clamped on the side of the horizontal moving stage by a clamping mechanism, a turntable capable of driving the horizontal moving stage to rotate along the Z-axis being installed above the horizontal moving stage, and an actuator for driving the turntable to drive the clamping mechanism to adjust the pitch angle;

[0017] Wherein, an optical detection device is installed below the horizontal shift stage for detecting the relative position and posture of the small rectangular block and the full glass substrate.

[0018] Furthermore, the clamping mechanism is fixedly connected to the horizontal moving stage via a one-dimensional track displacement platform capable of vertical movement.

[0019] Furthermore, the turntable includes a first base and a second base parallel to the first base;

[0020] The first base is fixedly connected to the first horizontal translation stage of the horizontal translation stage;

[0021] The second base is arranged above the first base, and a flexible hinge and a spring are spaced apart and connected between the second base and the first base;

[0022] Wherein, a pair of the actuators are installed on one side of the second base relative to the two flexible hinges.

[0023] Further, the actuator includes a first actuator and a second actuator;

[0024] The first actuator and a projection of one of the flexible hinges on a horizontal plane form a same virtual axis, and the second actuator and a projection of the other flexible hinge on a horizontal plane form a same virtual axis, and the two virtual axes are perpendicular to each other;

[0025] The first actuator and the second actuator penetrate the second base and contact an upper surface of the first base.

[0026] Furthermore, the horizontal translation stage includes a one-dimensional first horizontal translation stage and a second horizontal translation stage;

[0027] The turntable connection is installed on the upper part of the first horizontal moving platform, and the second horizontal moving platform is installed on the lower part. The lower part of the second horizontal moving platform is installed with a base, and the clamping mechanism is installed on one side of the base.

[0028] Furthermore, the optical detection device emits a collimated laser beam that is incident on the lower surface of the bonded small rectangular block and the upper surface of the glass substrate. The interference light beam reflected by the two surfaces is incident on the beam splitter, and the interference light beam after reflection by the beam splitter is incident on the four-quadrant detector and the CCD camera.

[0029] Furthermore, the optical path system of the optical detection device includes a laser, two spaced-apart beam splitters, a four-quadrant detector, and a CCD camera sequentially arranged on the optical path.

[0030] Furthermore, the beam splitter is a 45° beam splitter.

[0031] Furthermore, the clamping mechanism includes a main body fixedly connected to the base of the second horizontal translation platform, and a card slot is opened at the bottom end of the main body, which is clamped and mounted on the 1 / 4 above the small rectangular block through the card slot, and the side of the main body fixes the position of the small rectangular block through a positioning piece.

[0032] Furthermore, the main body is a hollow structure located above the card slot to form an unobstructed laser signal channel.

[0033] In the above technical solution, the present invention provides an all-glass laser interferometer assembly and detection mechanism, which has the beneficial effect of:

[0034] The all-glass laser interferometer adjustment and detection mechanism designed by the present invention has the advantages of high resolution when adjusting the pitch angle, because the adjustment device uses an actuator, so that the small rectangular block 1 can be precisely adjusted.

[0035] Secondly, because the adjustment device uses an actuator and a precision translation stage as its adjustment output, other auxiliary mechanical structures work in conjunction with the actuator to achieve the adjustment. Compared to existing hexapod platforms, the overall structure is simpler, resulting in higher reliability and significantly lower production costs.

[0036] Furthermore, the all-glass laser interferometer assembly and detection mechanism is not only low-cost and easy to use, but also has low production and maintenance costs. It can be completely processed and produced domestically and fully meets the assembly and use requirements of all-glass laser interferometers. Its comprehensive functionality allows for localization, eliminating the need for foreign procurement, resulting in a short manufacturing cycle. It also ensures the assembly and adjustment accuracy of the small rectangular block on the glass substrate, as well as the optical bonding strength and stability. It also provides real-time detection capabilities, fully meeting the manufacturing requirements of all-glass laser interferometers. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments described in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0038] Figure 1 It is a schematic diagram of the structure of an all-glass laser interferometer in the prior art;

[0039] Figure 2 This is a state diagram for analyzing the adjustment error of rectangular components of all-glass laser interferometers in the prior art;

[0040] Figure 3 This is a schematic diagram of the installation and adjustment method used by LISA in the prior art;

[0041] Figure 4 This is a schematic diagram of the overall structure of an all-glass laser interferometer assembly and detection mechanism disclosed in the present invention;

[0042] Figure 5 This is a structural schematic diagram of an adjustment device for an adjustment and detection mechanism of an all-glass laser interferometer disclosed in the present invention;

[0043] Figure 6 This is a structural schematic diagram of a clamping mechanism of an all-glass laser interferometer assembly and detection mechanism disclosed in the present invention;

[0044] Figure 7 This is a structural schematic diagram of an optical detection device for an all-glass laser interferometer assembly and detection mechanism disclosed in the present invention;

[0045] Figure 8 It is a principle diagram of an optical detection device of an all-glass laser interferometer assembly and detection mechanism disclosed by the present invention.

[0046] Description of reference numerals:

[0047] Clamping mechanism 5; screw 6; slot 7; one-dimensional track displacement platform 8; first actuator 9; second actuator 10; spring 11, spring 12, spring 13, spring 14, spring 16, spring 17; first flexible hinge 15; second flexible hinge 18; turntable 19; first horizontal displacement stage 20; second horizontal displacement stage 21; laser 22; beam splitter 23; beam splitter 24; four-quadrant detector 26; CCD camera 27;

[0048] Description of reference numerals of prior art all-glass laser interferometers;

[0049] Small rectangular block 1 (beam splitter 1); PBS glass plate 2; reflector 3; glass substrate 4. DETAILED DESCRIPTION

[0050] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0051] Figure 4 This is a schematic diagram of the overall structure of an all-glass laser interferometer assembly and detection mechanism;

[0052] The all-glass laser interferometer adjustment and detection mechanism, when installed on a robotic arm (not shown), has the advantages of a large travel range and flexible movement. However, the minimum travel distance achievable by the robotic arm does not meet the adjustment accuracy requirements for small rectangular blocks. The all-glass laser interferometer adjustment and detection mechanism is utilized to improve the adjustment accuracy of the robotic arm. The all-glass laser interferometer adjustment and detection mechanism of the present invention has the advantages of high adjustment accuracy and a compact overall structure. The adjustment and detection mechanism is installed on the robotic arm and used in conjunction with the robotic arm. This ensures that the travel of the all-glass laser interferometer adjustment and detection mechanism meets the use requirements and that its adjustment accuracy meets the use requirements.

[0053] The all-glass laser interferometer adjustment and detection mechanism comprises: an adjustment device, and an optical detection device installed below the adjustment device;

[0054] The adjustment device has a horizontal moving stage capable of horizontal displacement along the Y-axis and the X-axis. The side of the horizontal moving stage is clamped by a clamping machine 5 to hold a small rectangular block 1 (the small rectangular block 1 is a rectangular block device clamped and bonded to the glass substrate 4). A turntable 19 capable of driving the horizontal moving stage to rotate along the Z-axis is installed above the horizontal moving stage. Actuators are arranged on the Y-axis and the X-axis of the turntable 19 to drive the turntable 19 to drive the clamping machine 5 to adjust the pitch angle.

[0055] The optical detection device emits a collimated laser beam that is incident on the lower surface of the bonded small rectangular block 1 and the upper surface of the glass substrate 4. The interference beam reflected by the two surfaces is incident on the beam splitter. The interference beam after reflection by the beam splitter is incident on the four-quadrant detector 26 and the CCD camera 27. The CCD camera 27 can achieve coarse positioning of the interference beam, and the four-quadrant detector 26 can achieve precise measurement of the interference beam.

[0056] The all-glass laser interferometer assembly and detection mechanism, the assembly and adjustment device is combined with a fine-tuning actuator, and cooperates with corresponding mechanical structures such as a horizontal moving stage and a turntable 19 to complete the assembly and adjustment control of the position and posture of the small rectangular block 1, thereby achieving high-precision assembly and adjustment to meet the position accuracy requirements. At the same time, the interference detection optical path is integrated through the optical detection device to complete the relative position and posture detection of the small rectangular block 1 and the all-glass substrate 4, thereby achieving real-time detection of the assembly and adjustment results.

[0057] Figure 5 It is a structural diagram of the adjustment device;

[0058] The adjustment device has a horizontal translation stage, and a clamping mechanism 5 is arranged on one side of the base of the horizontal translation stage. The small rectangular block 1 is clamped by the clamping mechanism 5 and is used to bond the small rectangular block 1 to the glass substrate 4. The clamping mechanism 5 is fixed on a one-dimensional track displacement platform 8 that can move vertically to achieve movement in the vertical direction. The one-dimensional track displacement platform 8 is installed on the base. The one-dimensional track displacement platform 8 is a high-precision one-dimensional track displacement platform. The clamping mechanism 5 is moved on the vertical track with a step length of 2 nanometers through the one-dimensional track displacement platform 8. In theory, the distance error between the bonded surface of the small rectangular block 1 and the upper surface of the glass substrate 4 can be less than 2 nanometers. This level of distance error can ensure the reliability of chemical corrosion bonding.

[0059] A turntable 19 is installed above the horizontal moving platform. The turntable 19 includes a first base and a second base parallel to the first base.

[0060] The first base is fixedly connected to the first horizontal translation stage 20 of the horizontal translation stage;

[0061] The second base is arranged above the first base, and a flexible hinge and a spring are connected between the second base and the first base at intervals. Specifically, the flexible hinge includes a first flexible hinge 15 and a second flexible hinge 18. The spring includes a spring 11, a spring 12, a spring 13, a spring 14, a spring 16, and a spring 17. The spring is a spring with a high elastic modulus. The use of a spring with a high elastic modulus can ensure that the entire turntable 19 has a certain stability.

[0062] Wherein, a pair of fine-tuning actuators, namely the first actuator 9 and the second actuator 10, are installed on one side of the second base relative to the first flexible hinge 15 and the second flexible hinge 18;

[0063] The projections of the first actuator 9 and the second flexible hinge 18 on the horizontal plane are formed on the same virtual axis, which is the X-axis. The projections of the second actuator 10 and the first flexible hinge 15 on the horizontal plane are formed on the same virtual axis, which is the Y-axis. The two virtual axes are arranged perpendicular to each other.

[0064] The first actuator 9 and the second actuator 10 pass through the second base and contact the upper surface of the first base. By controlling the extension and contraction of the actuator 9 and the actuator 10, the tilt of the bottom surface of the small rectangular block 1 can be controlled, that is, the pitch and yaw of the bottom surface 1 can be controlled. Among them, the actuator 9 controls the bottom surface of the small rectangular block 1 to move in accordance with the Figure 2 The actuator 10 controls the bottom surface of the small rectangular block 1 in accordance with Figure 2 Since the actuator's movement compensation is at the nanometer level, the angle change caused by the actuator's one-step movement distance is very small, which fully meets the requirements. Figure 2 c and Figure 2 The angle in d adjusts the resolution requirement.

[0065] The turntable 19 is a high-precision turntable that can control the small rectangular block 1 to rotate according to the Figure 2 The direction of b is rotated, thereby controlling the incident angle of the light on the small rectangular block 1 so that it reaches the ideal position;

[0066] The horizontal translation stage includes a one-dimensional first horizontal translation stage 20 and a second horizontal translation stage 21;

[0067] The upper part of the first horizontal platform 20 is connected to the turntable 19 and the lower part is connected to the second horizontal platform 21. The lower part of the second horizontal platform 21 is equipped with a base, and a clamping mechanism 5 is installed on one side of the base. The horizontal platform can control the small rectangular block 1 to move along the first horizontal platform 20. Figure 2 The small rectangular block 1 can be moved in parallel in the direction of e by the second horizontal shifting stage 21. Figure 2 The direction of f moves parallel to the target.

[0068] Figure 7 It is a schematic structural diagram of an optical detection device;

[0069] Figure 8 is a schematic diagram of an optical detection device;

[0070] The optical detection device includes a laser 22, a beam splitter 23, a beam splitter 24, a four-quadrant detector 26 and a CCD camera 27 which are sequentially arranged on the optical path;

[0071] The detection light path of the optical detection device is as follows: Figure 8As shown, a 632nm laser 22 emits a collimated laser beam which passes through 45° beam splitters 23 and 45° beam splitters 24 and then is incident on the lower surface of the bonded small rectangular block 1 and the upper surface of the glass substrate 4 (the two surfaces are represented by 25). The interference beams reflected by the two surfaces 25 are incident on the 45° beam splitters 24 and 45° beam splitters 23. The interference beams reflected by the beam splitter 24 are incident on the four-quadrant detector 26, and the interference beams reflected by the beam splitter 23 are incident on the CCD camera 27. The CCD camera 27 can achieve coarse positioning of the interference beam, and the four-quadrant detector 26 can achieve precise measurement of the interference beam. The relative position of the lower surface of the small rectangular block 1 from the upper surface of the bonded substrate 4, i.e. Figure 2 The angle deviation of β in c, Figure 2 The deviation of the angle γ in d and the deviation of the distance between the bottom surface of the small rectangular block 1 and the upper surface of the full glass substrate 4 will affect the interference fringes between the two coherent light signals, and further affect the interference light signals incident on the four-quadrant detector 26 and the CCD camera 27. Therefore, by adjusting the position of the small rectangular block 1 on the full glass substrate 4 and observing the interference light signals of the CCD camera 27 and the four-quadrant detector 26, the distance between the bottom surface of the small rectangular block 1 and the upper surface of the full glass substrate 4 and the distance between the bottom surface of the small rectangular block 1 and the upper surface of the full glass substrate 4 can be determined. Figure 2 The angle deviation of β in c, Figure 2 The angle deviation of γ in d meets the index requirements.

[0072] Figure 6 Schematic diagram of the structure of the clamping mechanism of the all-glass laser interferometer assembly and detection mechanism;

[0073] The clamping mechanism 5 includes a main body fixedly connected to the base of the second horizontal moving stage 21. The main body of the clamping mechanism 5 is made of metal aluminum. A card slot 7 is provided at the bottom end of the main body of the clamping mechanism 5. The card slot 7 is clamped and grounded at 1 / 4 above the small rectangular block 1, and multiple positioning members are used to fix the small rectangular block 1 from the X-axis and Y-axis directions. The positioning members are 3 nylon screws 6, which can not only fix the small rectangular block 1 well, but also avoid scratches on the surface of the small rectangular block 1. Among them, the main body of the clamping mechanism 5 is located above the card slot 7 and is a hollow structure to form an unobstructed laser signal channel. The structure is designed with a card slot 7 on the clamping mechanism 5, which can limit the top of the small rectangular block 1 so that the position of the small rectangular block 1 clamped by the rectangular block clamping device 5 does not exceed 1 / 4 of the small rectangular block 1. In this way, the laser signal can pass through the center of the small rectangular block 1 smoothly without affecting the installation and adjustment of the system.

[0074] In the above technical solution, the present invention provides an all-glass laser interferometer assembly and detection mechanism, which has the beneficial effect of:

[0075] The all-glass laser interferometer adjustment and detection mechanism designed by the present invention has the advantages of high resolution when adjusting the pitch angle, because the adjustment device uses an actuator, so that the small rectangular block 1 can be precisely adjusted.

[0076] Secondly, because the adjustment device uses an actuator and a precision translation stage as its adjustment output, other auxiliary mechanical structures work in conjunction with the actuator to achieve the adjustment. Compared to existing hexapod platforms, the overall structure is simpler, resulting in higher reliability and significantly lower production costs.

[0077] Furthermore, the all-glass laser interferometer assembly and detection mechanism is not only low-cost and easy to use, but also has low production and maintenance costs. It can be completely processed and produced domestically and fully meets the assembly and use requirements of all-glass laser interferometers. Its comprehensive functionality allows for localization, eliminating the need for foreign procurement, resulting in a short manufacturing cycle. It also ensures the assembly and adjustment accuracy of the small rectangular block on the glass substrate, as well as the optical bonding strength and stability. It also provides real-time detection capabilities, fully meeting the manufacturing requirements of all-glass laser interferometers.

[0078] The above description is merely illustrative of certain exemplary embodiments of the present invention. It goes without saying that those skilled in the art will be able to modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the claims.

Claims

1. An all-glass laser interferometer assembly and detection mechanism, characterized in that: include: The adjustment device comprises a horizontal moving stage capable of horizontal displacement along the Y-axis and the X-axis, wherein a small rectangular block (1) is clamped on the side of the horizontal moving stage by a clamping mechanism (5), a turntable (19) capable of driving the horizontal moving stage to rotate along the Z-axis is installed above the horizontal moving stage, and an actuator for driving the turntable (19) to drive the clamping mechanism (5) to adjust the pitch angle is installed on the turntable; An optical detection device is installed below the horizontal moving stage for detecting the relative position and posture of the small rectangular block (1) and the full glass substrate (4); The turntable (19) includes a first base and a second base parallel to the first base; The first base is fixedly connected to the first horizontal displacement platform (20) of the horizontal displacement platform; The second base is arranged above the first base, and a flexible hinge and a spring are spaced apart and connected between the second base and the first base; Wherein, a pair of the actuators are installed on one side of the second base relative to the two flexible hinges; The actuator comprises a first actuator (9) and a second actuator (10); The first actuator (9) and a projection of one of the flexible hinges on a horizontal plane are formed on the same virtual axis, and the second actuator (10) and a projection of the other flexible hinge on a horizontal plane are formed on the same virtual axis, and the two virtual axes are arranged perpendicular to each other; The first actuator (9) and the second actuator (10) penetrate the second base and contact the upper surface of the first base.

2. The all-glass laser interferometer assembly and detection mechanism according to claim 1, characterized in that ； The clamping mechanism (5) is fixedly connected to the horizontal moving stage via a one-dimensional track displacement platform (8) capable of vertical movement.

3. The all-glass laser interferometer assembly and detection mechanism according to claim 1 or 2, characterized in that ； The horizontal shift stage comprises a one-dimensional first horizontal shift stage (20) and a second horizontal shift stage (21); The first horizontal platform (20) is connected to the turntable (19) on the upper part and the second horizontal platform (21) is installed on the lower part. The lower part of the second horizontal platform (21) is installed with a base, and the clamping mechanism (5) is installed on one side of the base.

4. The all-glass laser interferometer assembly and detection mechanism according to claim 1 or 2, characterized in that ； The optical detection device emits a collimated laser beam that is incident on the lower surface of the bonded small rectangular block (1) and the upper surface of the glass substrate (4); the interference beam reflected by the two surfaces is incident on a beam splitter; and the interference beam reflected by the beam splitter is incident on a four-quadrant detector (26) and a CCD camera (27).

5. The all-glass laser interferometer assembly and detection mechanism according to claim 4, characterized in that ； The optical detection device has an optical path system which is sequentially provided with a laser (22), two spaced-apart beam splitters, a four-quadrant detector (26) and a CCD camera (27).

6. The all-glass laser interferometer assembly and detection mechanism according to claim 5, characterized in that ； The beam splitter is a 45° beam splitter.

7. The all-glass laser interferometer assembly and detection mechanism according to claim 1 or 2, characterized in that ； The clamping mechanism (5) comprises a main body fixedly connected to the base of the second horizontal moving platform (21), a card slot (7) is provided at the bottom end of the main body, and is clamped and sleeved at the upper 1 / 4 of the small rectangular block (1) through the card slot (7), and the side of the main body fixes the position of the small rectangular block (1) through a positioning piece.

8. The all-glass laser interferometer assembly and detection mechanism according to claim 7, characterized in that ； The main body is located above the card slot (7) and is a hollow structure so as to form an unobstructed laser signal channel.

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