A method and device for extracting high-purity liquid argon through argon-rich gas

Abstract

This invention relates to the technical field of industrial gas purification, and in particular to an apparatus for extracting high-purity liquid argon using argon-rich gas. The apparatus includes a crude argon tank, a denitrification tower, a drying tower, and an adsorption tower. The crude argon tank is connected to the denitrification tower, the drying tower is connected to the denitrification tower, and the denitrification tower is connected to the adsorption tower. The adsorption tower is connected to a gas-filling assembly. The adsorption tower contains several adsorption plates, with adsorption channels formed between adjacent adsorption plates. The adsorption plates are curved. This invention also provides a method for extracting high-purity liquid argon using argon-rich gas. This invention features a simple structure that significantly improves adsorption efficiency and effect.

Description

Technical Field

[0001] The invention relates to the technical field of industrial gas purification, and in particular to a method and device for extracting high-purity liquid argon through argon-rich gas. Background Art

[0002] Argon is a colorless, odorless, monatomic inert gas that can form a stable gas flow layer above the molten pool and has good protective properties. In addition, during the welding process, less smoke is generated, which is convenient for controlling the welding pool and arc. At the same time, argon has a small cooling effect on the arc, so when the arc burns in argon, the heat loss is small and the stability is relatively good. The thermal contraction effect of argon on the arc is small, and the potential gradient and current density of the argon arc are not large, so the voltage to maintain the burning of the argon arc is low, generally 10V. Therefore, argon is mainly used in welding, stainless steel manufacturing, smelting, and chemical vapor deposition, crystal growth, thermal oxidation, epitaxy, diffusion, polysilicon, tungstenization, ion implantation, current carrying, sintering, etc. in semiconductor manufacturing processes. It is used as a carrier gas, standard gas, balance gas, zero point gas, etc. for instruments such as ICP and gas chromatographs.

[0003] For gases, purity is a criterion for measuring whether the gas is of high quality. Argon is an inert gas and can be used as a protective gas for manufacturing single crystals and polycrystalline materials. In order to improve the quality of silicon crystals, it is very important to choose high-purity argon, which can not only increase the service life of the crystals, but also meet the market demand.

[0004] Because the boiling point of argon is between oxygen and nitrogen, the difference is very small, so a certain amount of impurities often remain in argon. The purification process of argon is mainly through nitrogen removal, oxygen removal and drying. Generally speaking, the purification process of argon is achieved through purification equipment.

[0005] Existing purification technologies either require complex purification equipment or lack precision, making it difficult to achieve both. Summary of the invention

[0006] In view of the shortcomings of the prior art, one of the purposes of the present invention is to provide a method and device for extracting high-purity liquid argon through argon-rich gas with a simple structure and high purification accuracy.

[0007] The above invention purpose of the present invention is achieved through the following technical solutions:

[0008] A device for extracting high-purity liquid argon through argon-rich gas comprises a crude argon tank, a denitrification tower, a drying tower and an adsorption tower. The crude argon tank is connected to the denitrification tower, the drying tower is connected to the denitrification tower, the denitrification tower is connected to the adsorption tower, the adsorption tower is connected to an inflation component, a plurality of adsorption sheets are arranged in the adsorption tower, an adsorption channel is formed between two adjacent adsorption sheets, and the adsorption sheets are curved.

[0009] Furthermore, an adsorption reinforcement piece is provided on the side of the adsorption sheet, and the adsorption reinforcement piece protrudes from the adsorption sheet and is located in the adsorption channel.

[0010] Furthermore, the adsorption enhancement member includes arc-shaped accumulation blocks, and the arc-shaped accumulation blocks are evenly distributed on the adsorption sheet.

[0011] Furthermore, the adsorption enhancement component includes a guide plate and an arc-shaped accumulation block, the guide plate has a guide surface, the guide surface is facing the air intake direction, and the guide direction of the guide surface is toward the arc-shaped accumulation block.

[0012] Furthermore, the side of the guide plate facing away from the air intake direction is a back surface, and the back surface faces the arc-shaped accumulation block.

[0013] Furthermore, a heating element is installed in the adsorption sheet.

[0014] Furthermore, the gas outlet of the adsorption tower is connected with a three-way pipe, one pipe of the three-way pipe is connected with the gas outlet, and the other two pipes of the three-way pipe are respectively connected with the charging component and the denitrification tower and are installed with valves.

[0015] The invention also provides a method for extracting high-purity liquid argon through argon-rich gas, using the aforementioned device for extracting high-purity liquid argon through argon-rich gas.

[0016] Furthermore, before gas purification, the purification device is vacuum evacuated and dried.

[0017] Furthermore, when the purification device is turned on after not being turned on for a long time, the three-way pipe is first connected to the inflation component. At this time, the valve connected to the inflation component is closed. At this time, the crude argon gas in the purification device is in a circulating state. After a preset time, the valve connected to the inflation component is opened and the other valve is closed. At this time, normal purification of the argon gas begins.

[0018] In summary, the invention has at least one of the following beneficial technical effects:

[0019] 1. The invention creates an adsorption sheet and an adsorption reinforcement member, which has a simple structure but can greatly improve the adsorption efficiency and adsorption effect, thereby reducing repeated adsorption and purification, reducing the production investment of the equipment, and greatly reducing the cost;

[0020] 2. The invention closes the valve connected to the gas-charging assembly before purification, and the crude argon gas in the purification device is in a circulating state, thereby reducing the possibility of the first batch of argon products failing to meet the standards due to the residual air inside the purification at the beginning;

[0021] 3. This method is suitable for the intermittent production mode and ensures the quality of the first few batches of argon products in the intermittent production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of an embodiment of a purification device created by the present invention;

[0023] Figure 2 It is a structural schematic diagram of an adsorption tower of an embodiment of a purification device created by the present invention;

[0024] Figure 3 It is a schematic structural diagram of an adsorption sheet in one embodiment of a purification device created by the present invention;

[0025] Figure 4 This is a schematic diagram of the structure of an adsorption sheet of another embodiment of the purification device created by the present invention.

[0026] In the figure, 1. crude argon tank; 2. denitrification tower; 3. drying tower; 4. adsorption tower; 41. adsorption sheet; 411. heating element; 42. adsorption channel; 43. adsorption enhancement element; 431. arc-shaped accumulation block; 432. guide plate; 5. inflation component; 6. three-way pipe. DETAILED DESCRIPTION

[0027] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0028] Reference Figure 1 The invention discloses a device for extracting high-purity liquid argon through rich argon gas, comprising a crude argon tank 1, a denitrification tower 2, a drying tower 3 and an adsorption tower 4, wherein the crude argon tank 1 is used to place the crude argon gas, the crude argon tank 1 is connected to the denitrification tower 2, the denitrification is carried out through the denitrification tower 2, and then the dehydration treatment is carried out through the drying tower 3, and finally the oxygen in the crude argon gas is reacted by the adsorption tower 4, and then the argon gas is added into the tank body through the charging component 5.

[0029] Reference Figure 2 In the invention, a plurality of adsorption sheets 41 are installed in the adsorption tower 4. The adsorption sheets 41 can be selected as active metals that can react with oxygen. The adsorption sheets 41 are curved, and adsorption channels 42 are formed between adjacent adsorption sheets 41. The crude argon gas flows through the adsorption channels 42. Since the adsorption sheets 41 are curved, the path of the adsorption channels 42 is longer, thereby improving the adsorption effect. The adsorption sheets 41 are installed on the inner wall of the adsorption tower 4 through a bracket, and the position of the adsorption sheets 41 can be closer to the gas outlet of the adsorption tower 4.

[0030] In some feasible embodiments, an adsorption reinforcement member 43 extends from the side of the adsorption sheet 41, and the adsorption reinforcement member 43 protrudes from the adsorption sheet 41 and is located in the adsorption channel 42. Figure 3In the illustrated embodiment, the adsorption enhancement member 43 includes arc-shaped accumulation blocks 431 , which are evenly distributed on the adsorption sheet 41 and are hemispherical.

[0031] The following is a further introduction in conjunction with a specific usage scenario. When the crude argon gas passes through the adsorption channel 42, a more tortuous path is formed between the arc-shaped accumulation blocks 431, and the contact area is increased, thereby improving the adsorption efficiency.

[0032] See also Figure 4 As a specific embodiment of the purification device provided by the invention, the adsorption enhancement member 43 includes a guide plate 432 and an arc-shaped accumulation block 431, wherein the guide plate 432 has a guide surface, the guide surface is facing the air intake direction, and the guide direction of the guide surface is toward the arc-shaped accumulation block 431. The guide direction here should be understood as the flow direction of the crude argon gas after the crude argon gas flows through the guide surface.

[0033] Specifically but not limiting, the guide plate 432 is in a conical shape, wherein the side facing the air intake direction is the guide surface, and the back surface is facing away from the air intake direction. The surface of the back surface passes through the spherical center of the arc-shaped accumulation block 431. The intersection of the guide surface and the back surface, that is, the top of the guide plate 432 is located in the middle position between the back surface and the spherical center. After the above arrangement, the drainage effect is best. Figure 4 As shown, Figure 4 The solid arrow in the middle indicates the general flow pattern of the gas. After the crude argon gas passes through the drainage surface, it flows toward the arc-shaped accumulation block 431 and merges with the gas that flows directly through. At this time, the gas will form a local vortex, so that the crude argon gas can be more fully contacted and the adsorption effect is better.

[0034] In general, by providing the adsorption sheet 41 and the adsorption reinforcement member 43, the adsorption efficiency and the adsorption effect can be greatly improved despite the simple structure, thereby reducing repeated adsorption and purification, reducing the production investment of the equipment, and greatly reducing the cost.

[0035] Please understand that Figure 3 as well as Figure 4 The adsorption sheet 41 may be hollow, and a heating element 411 may be installed inside the adsorption sheet 41. The heating element 411 may be an electric heating rod, and the wiring of the electric heating rod is carried out through the bracket on which the adsorption sheet 41 is installed.

[0036] As another specific embodiment of the purification device provided by the invention, the air outlet of the adsorption tower 4 is connected to a tee 6, one pipe of the tee 6 is connected to the air outlet, and the other two pipes of the tee 6 are respectively connected to the inflation component 5 and the denitrification tower 2 and are equipped with valves.

[0037] In combination with specific usage scenarios, before purification, the valve connected to the inflation component 5 is closed. At this time, the crude argon gas in the purification device is in a circulating state, thereby reducing the possibility of the first batch of argon products failing to meet the standards due to internal air residue at the beginning of purification.

[0038] The invention also provides a method for extracting high-purity liquid argon through argon-rich gas, using the aforementioned purification device, first inspecting the purification device and various tanks, etc., and after the inspection is correct, connecting various pipelines, at this time, do not connect the three-way pipe 6 and the gas filling component 5, connect the three-way pipe 6 to the pipeline of the gas filling component 5 to the vacuum pump, and perform negative pressure operation on the entire purification device. At the same time, start the heating element 411, dry the adsorption tower 4, and reduce the retention of air impurities through negative pressure and drying.

[0039] Then connect the three-way pipe 6 to the inflation component 5, and close the valve connected to the inflation component 5. At this time, the crude argon gas in the purification device is in a circulating state. After a preset time, open the valve connected to the inflation component 5 and close the other valve. At this time, start to purify the argon gas normally.

[0040] According to the actual production situation of high-purity argon products, since the air separation equipment needs to go through a long period of operation when producing high-purity argon products, it is not suitable for intermittent production mode. In addition, some oxygen and water impurities will exist in the air separation equipment during long-term operation, and it is impossible to ensure that the production quality of high-purity argon products is consistent with national standards. This method is adapted to the intermittent production mode and ensures the quality of the first few batches of argon products in the intermittent production process.

[0041] The embodiments of this specific implementation method are all preferred embodiments of the invention, and are not intended to limit the protection scope of the invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the invention should be included in the protection scope of the invention.

Claims

1. A device for extracting high-purity liquid argon by using argon-rich gas, comprising a crude argon tank (1), a denitrification tower (2), a drying tower (3) and an adsorption tower (4), wherein the crude argon tank (1) is connected to the denitrification tower (2), the drying tower (3) is connected to the denitrification tower (2), the denitrification tower (2) is connected to the adsorption tower (4), and the adsorption tower (4) is connected to an aeration component (5), characterized in that: The adsorption tower (4) is provided with a plurality of adsorption sheets (41), an adsorption channel (42) is formed between two adjacent adsorption sheets (41), the adsorption sheets (41) are curved, an adsorption reinforcement member (43) is provided on the side of the adsorption sheet (41), the adsorption reinforcement member (43) protrudes from the adsorption sheet (41) and is located in the adsorption channel (42), the adsorption reinforcement member (43) comprises an arc-shaped accumulation block (431), the arc-shaped accumulation blocks (431) are evenly distributed on the adsorption sheet (41), the adsorption reinforcement member (43) comprises a guide plate (432) and an arc-shaped accumulation block (431), the guide plate (432) has a guide surface, the guide surface faces the air intake direction, the guide direction of the guide surface is toward the arc-shaped accumulation block (431), the side of the guide plate (432) that is opposite to the air intake direction is a back surface, and the back surface faces the arc-shaped accumulation block (431).

2. The device for extracting high-purity liquid argon by using argon-rich gas according to claim 1, characterized in that: A heating element (411) is installed in the adsorption sheet (41).

3. The device for extracting high-purity liquid argon by using argon-rich gas according to claim 1, characterized in that: The gas outlet of the adsorption tower (4) is connected to a three-way pipe (6), one pipe of the three-way pipe (6) is in communication with the gas outlet, and the other two pipes of the three-way pipe (6) are respectively connected to the inflation component (5) and the denitrification tower (2) and are provided with valves.

4. A method for extracting high-purity liquid argon by using argon-rich gas, characterized in that: The device for extracting high-purity liquid argon by using rich argon gas as described in any one of claims 1 to 3 is used.

5. The method for extracting high-purity liquid argon by using argon-rich gas according to claim 4, characterized in that: Before gas purification, the purification device is vacuum evacuated and dried.

6. The method for extracting high-purity liquid argon by using argon-rich gas according to claim 5, characterized in that: When the purification device is turned on after not being turned on for a long time, the three-way pipe (6) is first connected to the gas filling component (5), and the valve connected to the gas filling component (5) is closed. At this time, the crude argon gas in the purification device is in a circulating state. After a preset time, the valve connected to the gas filling component (5) is opened, and the other valve is closed. At this time, the normal purification of the argon gas begins.

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