A Laser-Induced Breakdown Spectral Correction Method and System Based on Energy Level Radiation Attenuation
By acquiring the temporal resolution spectrum of the calibration sample, determining the correction spectral line, and calculating the energy level radiation attenuation coefficient, the problem of uncertainty in plasma radiation variation during the integration time in laser-induced breakdown spectra is solved, thus improving measurement accuracy and repeatability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANDONG UNIV
- Filing Date
- 2023-03-10
- Publication Date
- 2026-05-26
AI Technical Summary
In existing laser-induced breakdown spectroscopy techniques, the uncertainty of plasma radiation decay during integration time leads to poor measurement repeatability, affecting measurement accuracy, especially in portable applications.
By acquiring the temporal resolution spectrum of the calibration sample, the correction spectral line is determined, the energy level radiation attenuation coefficient is calculated, and the intensity of the correction spectral line is fitted using an exponential or linear function to eliminate the uncertainty in the integration time.
It improves the measurement accuracy of laser-induced breakdown spectroscopy, especially in differential spectrometers composed of multiple CCDs, where the accuracy is higher than that of expensive ICCD spectrometers.
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Figure CN116380874B_ABST
Abstract
Description
Technical Field
[0001] This disclosure belongs to the field of laser-induced breakdown spectroscopy technology, specifically relating to a laser-induced breakdown spectral correction method and system based on energy level radiation attenuation. Background Technology
[0002] The statements in this section are merely background information relating to this disclosure and do not necessarily constitute prior art.
[0003] Laser-induced breakdown spectroscopy (LIBS) is an atomic emission spectroscopy technique that performs qualitative and quantitative analysis of samples by detecting the transient plasma generated by the coupling of a high-energy laser pulse with a micro-region on the sample surface. However, the repeatability problems caused by uncertainties in experimental parameters such as the instability of laser energy, the fluctuation of the focal plane, and changes in the surface of the ablated micro-regions, which lead to plasma differences (internal parameters, morphology, and material distribution), seriously affect the measurement accuracy of laser-induced breakdown spectroscopy.
[0004] Methods for measuring laser-induced breakdown spectroscopy include internal standard method, full spectrum normalization, ablation volume correction, acoustic correction, ionization normalization, and spectral standardization. Although these methods can partially correct the repeatability of laser-induced breakdown spectroscopy and improve the measurement accuracy, they all treat the emission line intensity of the spectral signal obtained by the spectrometer in the LIBS system after a period of integration of energy level radiation as the instantaneous intensity of energy level radiation. They also assume that the spectral line intensity generated by the integration of a certain energy level transition process of atoms or ions during plasma decay is the radiation intensity generated by the energy level transition per unit time, thus ignoring the decay change of energy level transition radiation over the integration time.
[0005] In laboratories, enhanced charge-coupled device (ICCD) cameras with high-speed shutters are commonly used to integrate spectral signals in microseconds or even shorter time intervals to approximate instantaneous energy level radiation. However, the obtained spectral line intensity is still far from equivalent to the instantaneous intensity at the delayed time, relative to the energy level radiation lifetime of the analyte in laser-induced plasma. In field or portable applications, due to the high cost of ICCDs, laser-induced breakdown spectrometers generally use linear or area-array charge-coupled device (CCD) detectors. Their integration time covers the entire plasma evolution process relative to the energy level radiation lifetime, neglecting the uncertainty caused by the energy level radiation decay rate during the integration time. Summary of the Invention
[0006] To address the aforementioned issues, this disclosure proposes a laser-induced breakdown spectroscopy correction method and system based on energy level radiation attenuation. Addressing the challenges of poor repeatability and low measurement accuracy caused by the uncertainty of plasma variation within the integration time in laser-induced breakdown spectroscopy, this method calculates the energy level radiation attenuation rate and corrects the repeatability problems arising from the uncertainty of the energy level radiation attenuation rate within the laser-induced plasma and the uncertainty of radiation attenuation within the integration time, thereby improving measurement accuracy.
[0007] According to some embodiments, the first solution of this disclosure provides a laser-induced breakdown spectral correction method based on energy level radiation attenuation, employing the following technical solution:
[0008] A laser-induced breakdown spectral correction method based on energy level radiation attenuation includes:
[0009] Obtain the temporal resolution spectrum of the calibration sample;
[0010] The calibration spectral lines of the calibration samples are determined based on the acquired temporal resolution spectra.
[0011] Calculate the energy level radiative attenuation coefficient of the calibration sample's calibration spectral line based on the temporal resolution spectral line intensity of the selected calibration spectral line.
[0012] Based on the energy level radiation attenuation coefficient of the calibration sample correction spectral line, the spectral line intensity of the obtained time resolution spectrum of the calibration sample is corrected, thus completing the correction of the laser-induced breakdown spectrum.
[0013] As a further technical limitation, in the process of obtaining the temporal resolution spectrum of the calibration sample, the calibration sample is detected at different positions and at different delay times using a laser-induced plasma spectroscopy measurement system. At each position, a spectrum containing the characteristic spectral lines of each element ion and atom of the same calibration sample at one delay time is obtained, which is the temporal resolution spectrum of the calibration sample.
[0014] Furthermore, the delay time is the time from the onset of decay to the disappearance of the sample plasma in the acquired temporal resolution spectrum.
[0015] Furthermore, when determining the calibration spectral lines of the calibration samples, the time-resolution spectrum in which the number of excited-state particles in the upper energy level is decreasing during the delay time is selected as the calibration spectral lines of the calibration samples.
[0016] As a further technical limitation, the time-resolution spectral intensity after removing the negative values from the spectral intensity of the selected correction spectral line is fitted with an exponential function, and the resulting fitting exponential coefficient is the energy level radiation attenuation coefficient of the calibration sample.
[0017] As a further technical limitation, a linear function is fitted to the time-resolution spectral intensity that exhibits linearity after removing negative values from the spectral intensity of the selected correction spectral line at time resolution. The resulting linear coefficients are the energy level radiation attenuation coefficients of the calibration sample.
[0018] As a further technical limitation, the difference between the spectral line intensity at the first delay time and the spectral line intensity at the last delay time is calculated, and the difference is multiplied by the energy level radiation attenuation coefficient of the calibration sample spectral line to obtain the corrected spectral line intensity.
[0019] According to some embodiments, the second aspect of this disclosure provides a laser-induced breakdown spectral correction system based on energy level radiation attenuation, employing the following technical solution:
[0020] A laser-induced breakdown spectral correction system based on energy level radiation attenuation includes:
[0021] The acquisition module is used to acquire the temporal resolution spectrum of the calibration sample;
[0022] The determination module is used to determine the correction spectral lines of the calibration sample based on the acquired temporal resolution spectrum;
[0023] The calculation module is used to calculate the energy level radiative attenuation coefficient of the calibration sample calibration spectral line based on the temporal resolution spectral line intensity of the selected calibration spectral line.
[0024] The calibration module is used to correct the spectral intensity of the time resolution spectrum of the obtained calibration sample by correcting the energy level radiation attenuation coefficient of the calibration sample, thereby completing the calibration of the laser-induced breakdown spectrum.
[0025] According to some embodiments, a third aspect of this disclosure provides a computer-readable storage medium, employing the following technical solution:
[0026] A computer-readable storage medium having a program stored thereon that, when executed by a processor, implements the steps of the laser-induced breakdown spectral correction method based on energy level radiative attenuation as described in the first aspect of this disclosure.
[0027] According to some embodiments, the fourth solution of this disclosure provides an electronic device that adopts the following technical solution:
[0028] An electronic device includes a memory, a processor, and a program stored in the memory and executable on the processor, wherein the processor, when executing the program, implements the steps of the laser-induced breakdown spectral correction method based on energy level radiation attenuation as described in the first aspect of this disclosure.
[0029] Compared with the prior art, the beneficial effects of this disclosure are as follows:
[0030] This disclosure obtains a plasma time-resolution spectrum, and uses exponential function fitting or linear fitting after calculating the natural logarithm to obtain an attenuation coefficient that can represent the plasma radiation attenuation. This corrects the uncertainty caused by the plasma variation over integral time, bringing the plasma variation to a uniform level and improving the quantitative analysis capability of laser-induced breakdown spectroscopy. It can be applied to differential spectrometers composed of multiple CCDs, making the accuracy of differential spectrometers higher than that of expensive ICCD spectrometers. Attached Figure Description
[0031] The accompanying drawings, which form part of this disclosure, are used to provide a further understanding of this disclosure. The illustrative embodiments of this disclosure and their descriptions are used to explain this disclosure and do not constitute an undue limitation of this disclosure.
[0032] Figure 1 This is a flowchart of the laser-induced breakdown spectral correction method based on energy level radiation attenuation in Embodiment 1 of this disclosure;
[0033] Figure 2 This is a schematic diagram of the structural principle of the conventional laser-induced plasma spectroscopy measurement device and the differential spectroscopy measurement device in Embodiment 1 of this disclosure;
[0034] Figure 3 This is a schematic diagram illustrating the principle of the repeatability problem caused by the decay rate in Embodiment 1 of this disclosure;
[0035] Figure 4(a) is a schematic diagram of exponential fitting of silicon element in different calibrated samples in Embodiment 1 of this disclosure;
[0036] Figure 4(b) is a schematic diagram of linear fitting of silicon element after taking the natural logarithm in different calibrated samples in Embodiment 1 of this disclosure;
[0037] Figure 5(a) is a comparative diagram of the calibration curves before and after silicon element correction in the calibration sample in Embodiment 1 of this disclosure;
[0038] Figure 5(b) is a comparative diagram of the calibration curves before and after aluminum element correction in the calibration sample in Embodiment 1 of this disclosure;
[0039] Figure 5(c) is a comparative diagram of the calibration curves before and after calcium element correction in the calibration sample in Embodiment 1 of this disclosure;
[0040] Figure 5(d) is a comparative diagram of the calibration curves before and after magnesium element correction in the calibration sample in Embodiment 1 of this disclosure;
[0041] Among them, 1. pulsed laser, 2. laser focusing optical path, 3. calibration sample, 4. acquisition lens, 5. optical fiber, and 6. spectral system. Detailed Implementation
[0042] The present disclosure will be further described below with reference to the accompanying drawings and embodiments.
[0043] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of this disclosure. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains.
[0044] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this disclosure. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms “comprising” and / or “including” are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0045] Where there is no conflict, the embodiments and features described herein can be combined with each other.
[0046] Laser-induced breakdown spectroscopy (LIBS) technology uses an ultrashort pulse laser to focus on the sample surface to form a plasma, and then analyzes the plasma emission spectrum to determine the material composition and content of the sample.
[0047] Time-resolved spectroscopy refers to the process of recording the changes in the spectrum over time to understand the events and processes that occur in an instantaneous process, thereby obtaining information that cannot be obtained from steady-state spectroscopy (integral spectroscopy).
[0048] Spectral line intensity is a physical quantity representing the energy of a spectral line. Due to the inherent properties of atoms and the influence of their surrounding physical environment, any emission or absorption spectral line has a certain width and profile, meaning that the spectral line intensity is distributed within a certain frequency range.
[0049] Example 1
[0050] Embodiment 1 of this disclosure introduces a laser-induced breakdown spectral correction method based on energy level radiation attenuation.
[0051] like Figure 1 The laser-induced breakdown spectral correction method based on energy level radiation attenuation, as shown, includes the following steps:
[0052] Step S01: For a calibration sample with known concentrations of each element, a laser-induced plasma spectroscopy system is used to detect the sample at different locations with different delay times. At each location, a spectrum containing the characteristic spectral lines of each element's atoms and ions is obtained after a delay time. The delay time is the moment the plasma begins to decay and disappears; a smaller delay interval is better. The integration time covers the entire plasma lifetime. The upper and lower limits of the delay time and the delay interval vary depending on the sampling conditions and sample type.
[0053] Step S02: Repeat step S01 for a different set of calibration samples;
[0054] Step S03: Select a correction spectral line to ensure that the number of excited-state particles in the upper energy level of each sample is continuously decreasing during the selected delay time;
[0055] Step S04: Remove the negative values from the temporal resolution intensity of the spectral line of one element to be calibrated in each calibration sample;
[0056] Step S05: Fit the temporal resolution intensity of each element in each sample group, which can be achieved using e -Fx ae -Fx y0+e -Fx The first type of fitting function requires adding zero values to the intensity at the time resolution and normalizing it before fitting. Here, F is the decay coefficient, which can reflect the decay of element energy level radiation.
[0057] Step S06: Or, after completing step S03, take the natural logarithm of the spectral line intensity and then proceed to step S04. Then, use the linear function Fx+c to fit the linear part of the intensity at time resolution, where F is the attenuation coefficient.
[0058] Step S07: For example Figure 2 For the traditional spectral acquisition system shown, step S06 is used to find the optimal attenuation coefficient, which can find the boundary between noise and spectral line intensity; and the attenuation coefficient is multiplied by the spectral line intensity at any delay time to obtain the corrected intensity.
[0059] Step S08: For spectrometers that can obtain the time series of spectral line intensities of the same plasma, both steps S05 and S06 can be used; the difference between the spectral line intensity at the first delay time and the spectral line intensity at the last delay time is multiplied by the attenuation coefficient to obtain the corrected spectral line intensity.
[0060] Step S09: Verification of calibration results; Establish calibration curves using the concentration of a certain element in a set of different calibration samples from step S02 and the spectral intensity before calibration, and simultaneously establish calibration curves using the concentration of a certain element in a set of different calibration samples from step S02 and the spectral intensity after calibration; Analyze the correlation coefficient R between the two calibration curves. 2 The correction effects can be compared to verify the correction results.
[0061] It should be noted that steps S07 and S08 are for different spectral acquisition systems, so the processing methods are somewhat different. In step S07, the spectral line intensity before correction can be the spectral line intensity at any delay time, and the spectral line intensity after correction is the result of multiplying the spectral line intensity at any delay time by the attenuation coefficient. In step S08, the spectral line intensity before correction is also the spectral line intensity at any time, but the spectral line intensity after correction is the spectral line intensity at the first delay time minus the spectral line intensity at the last delay time, and then multiplied by the attenuation coefficient.
[0062] In step S08, the difference between the spectral line intensity at the first delay time and the spectral line intensity at the last delay time is calculated. The difference is then multiplied by the energy level radiation attenuation coefficient of the calibration sample's corrected spectral line to obtain the corrected spectral line intensity. For example, for a spectrometer that can obtain the same plasma time series, such as a spectrometer that can obtain three spectral line intensities at delay times of 1µs, 2µs, and 3µs, the attenuation coefficient is obtained by fitting the spectral line intensity from 1µs to 3µs. Then, the spectral line intensity from 1µs to 3µs is subtracted from the spectral line intensity from 3µs, and the difference between the two delayed spectral line intensities is multiplied by the attenuation coefficient to obtain the corrected spectral line intensity. At this point, the spectral line intensity before correction is the spectral line intensity at any time from 1µs to 3µs.
[0063] The following analysis, using a practical example, introduces the correction method in this embodiment:
[0064] First, seven standard ore samples with known concentrations of each major element were selected as a set of calibration samples. The major elements in this set of samples include silicon, aluminum, magnesium, and calcium. The labels and element concentrations of each sample are shown in Table 1.
[0065] Table 1 Sample labels and element concentrations
[0066]
[0067] Since traditional spectral acquisition systems cannot obtain the time series of plasma radiation for each single pulse, they cannot directly correct the repeatability problem of single pulses. It can be assumed that the time-resolution spectrum obtained for each sample comes from an average plasma of that sample. The repeatability problem between samples is more prominent than the repeatability problem within samples (such as changes in the focal plane caused by sample replacement and changes in the reflectivity of the sample surface). Therefore, the aim is to correct the repeatability between samples to improve the ability of quantitative analysis.
[0068] like Figure 3 The repeatability problem shown is caused by the uncertainty in the radiation decay rate during the integration time. ul ()1 and I ul ()2 is a curve showing the decay of energy level radiation from two different plasmas at different decay rates over time. and This refers to the spectrometer at the delay time t. d The line intensity collected at each step shows that, with the increase of integration time, and The gaps between them also accumulated, leading to more serious repetitive problems.
[0069] A traditional spectral acquisition system was used to acquire the temporal resolution spectrum of each sample (the spectrum was acquired at different locations of each sample with different delays); the delay time was 1us-65us, covering the process of all spectral lines decaying into noise, the delay interval was 1us, and the integration time was 1ms.
[0070] Secondly, the correction spectral lines selected were Si I 251.61, Al I 309.27, Ca I 527.02, and Mg I 285.17. Within the selected delay time range, the number of excited state particles in the upper energy level decreased for these four spectral lines.
[0071] Next, all negative values of the above four spectral lines within the range of 1-65 μs were replaced with 0, thus ensuring a consistent lower limit for the time series of spectral line intensities while removing negative values. After normalizing the temporal resolution intensity of each element in each sample, et was used. -bxThe attenuation coefficient F can be obtained. For traditional spectral acquisition systems, since it is impossible to find the boundary between spectral line intensity and noise, exponential fitting will cause the attenuation coefficient F to be fitted with a large amount of noise, as shown in Figure 4(a). As shown in Figure 4(b), the natural logarithm of the spectral line intensity is calculated, and the linear part of the intensity at time resolution is fitted by the linear function Fx+c. By comparing Figure 4(a) and Figure 4(b), it can be seen that the attenuation coefficient F obtained by fitting by the linear function is more accurate. The attenuation coefficient F of the four spectral lines Si I 251.61, Al I 309.27, Ca I 527.02, and Mg I 285.17 obtained for each sample is multiplied by the spectral line intensity under each delay, and the corrected spectral line intensities are shown in Figure 5(a), Figure 5(b), Figure 5(c), and Figure 5(d), respectively.
[0072] Finally, standard curves were established for the intensity of the above four spectral lines before correction in the range of 1-10 μs, and then a standard curve was established for the intensity of the corrected spectral lines. The R² values of the two curves were compared, and the results are shown in Table 2.
[0073] Table 2 Correction results for different elements
[0074]
[0075] This embodiment obtains the plasma time-resolution spectrum, and uses exponential function fitting or linear fitting after taking the natural logarithm to obtain an attenuation coefficient that can represent the plasma radiation attenuation. This corrects the uncertainty caused by the plasma change over the integral time, so that the plasma change reaches the same level, thereby improving the quantitative analysis capability of laser-induced breakdown spectrum.
[0076] Example 2
[0077] Embodiment 2 of this disclosure introduces a laser-induced breakdown spectral correction system based on energy level radiation attenuation.
[0078] A laser-induced breakdown spectral correction system based on energy level radiation attenuation includes:
[0079] The acquisition module is used to acquire the temporal resolution spectrum of the calibration sample;
[0080] The determination module is used to determine the correction spectral lines of the calibration sample based on the acquired temporal resolution spectrum;
[0081] The calculation module is used to calculate the energy level radiative attenuation coefficient of the calibration sample calibration spectral line based on the temporal resolution spectral line intensity of the selected calibration spectral line.
[0082] The calibration module is used to correct the spectral intensity of the time resolution spectrum of the obtained calibration sample by correcting the energy level radiation attenuation coefficient of the calibration sample, thereby completing the calibration of the laser-induced breakdown spectrum.
[0083] The detailed steps are the same as those of the laser-induced breakdown spectral correction method based on energy level radiation attenuation provided in Example 1, and will not be repeated here.
[0084] Example 3
[0085] Embodiment 3 of this disclosure provides a computer-readable storage medium.
[0086] A computer-readable storage medium having a program stored thereon, which, when executed by a processor, implements the steps in the laser-induced breakdown spectral correction method based on energy level radiation attenuation as described in Embodiment 1 of this disclosure.
[0087] The detailed steps are the same as those of the laser-induced breakdown spectral correction method based on energy level radiation attenuation provided in Example 1, and will not be repeated here.
[0088] Example 4
[0089] Embodiment 4 of this disclosure provides an electronic device.
[0090] An electronic device includes a memory, a processor, and a program stored in the memory and executable on the processor. When the processor executes the program, it implements the steps in the laser-induced breakdown spectral correction method based on energy level radiation attenuation as described in Embodiment 1 of this disclosure.
[0091] The detailed steps are the same as those of the laser-induced breakdown spectral correction method based on energy level radiation attenuation provided in Example 1, and will not be repeated here.
[0092] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Various modifications and variations can be made to this disclosure by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.
[0093] While the specific embodiments of this disclosure have been described above in conjunction with the accompanying drawings, this is not intended to limit the scope of protection of this disclosure. Those skilled in the art should understand that various modifications or variations that can be made by those skilled in the art without creative effort based on the technical solutions of this disclosure are still within the scope of protection of this disclosure.
Claims
1. A laser-induced breakdown spectral correction method based on energy level radiation attenuation, characterized in that, include: Obtain the temporal resolution spectrum of the calibration sample; The calibration spectral lines of the calibration samples are determined based on the acquired temporal resolution spectra. Based on the temporal resolution spectral line intensity of the selected correction spectral line, the energy level radiative attenuation coefficient of the calibration sample's correction spectral line is calculated, specifically as follows: Step S1: Select a correction spectral line to ensure that the number of excited-state particles in the upper energy level of each sample continues to decrease during the selected delay time; Step S2: Remove the negative values from the temporal resolution intensity of the spectral line of one element to be calibrated in each calibration sample; Step S3: Fit the temporal resolution intensity of each element in each sample group, using... , , The first fitting function adds zero values to the intensity at the time resolution and normalizes it before fitting. F is the decay coefficient, which reflects the decay of the element's energy level radiation. Step S4: Alternatively, after completing Step S1, take the natural logarithm of the spectral line intensity and then proceed to Step S2, using a linear function. Fx+c The linear portion of the intensity at temporal resolution is fitted, where F is the attenuation coefficient; Based on the energy level radiation attenuation coefficient of the calibration sample correction spectrum, the spectral intensity of the obtained time resolution spectrum of the calibration sample is corrected to complete the correction of the laser-induced breakdown spectrum. Specifically, the difference between the spectral intensity at the first delay time and the spectral intensity at the last delay time is calculated, and the difference is multiplied by the energy level radiation attenuation coefficient of the calibration sample correction spectrum to obtain the corrected spectral intensity.
2. The laser-induced breakdown spectral correction method based on energy level radiation attenuation as described in claim 1, characterized in that, In the process of obtaining the temporal resolution spectrum of the calibration sample, the calibration sample is detected at different positions and at different delay times using a laser-induced plasma spectroscopy measurement system. At each position, a spectrum containing the characteristic spectral lines of each element ion and atom of the same calibration sample at one delay time is obtained, which is the temporal resolution spectrum of the calibration sample.
3. The laser-induced breakdown spectral correction method based on energy level radiation attenuation as described in claim 2, characterized in that, The delay time is the time from the onset of decay to the disappearance of the calibrated sample plasma in the acquired time-resolution spectrum.
4. The laser-induced breakdown spectral correction method based on energy level radiation attenuation as described in claim 2, characterized in that, When determining the calibration spectral line of the calibration sample, the time-resolution spectrum in which the number of excited state particles in the upper energy level is decreasing during the delay time is selected as the calibration spectral line of the calibration sample.
5. A laser-induced breakdown spectral correction system based on energy level radiation attenuation, characterized in that, include: The acquisition module is used to acquire the temporal resolution spectrum of the calibration sample; The determination module is used to determine the correction spectral lines of the calibration sample based on the acquired temporal resolution spectrum; The calculation module is used to calculate the energy level radiative attenuation coefficient of the calibration sample's calibration spectral line based on the temporal resolution spectral line intensity of the selected calibration spectral line. Specifically: Step S1: Select a correction spectral line to ensure that the number of excited-state particles in the upper energy level of each sample continues to decrease during the selected delay time; Step S2: Remove the negative values from the temporal resolution intensity of the spectral line of one element to be calibrated in each calibration sample; Step S3: Fit the temporal resolution intensity of each element in each sample group, using... , , The first fitting function adds zero values to the intensity at the time resolution and normalizes it before fitting. F is the decay coefficient, which reflects the decay of the element's energy level radiation. Step S4: Alternatively, after completing Step S1, take the natural logarithm of the spectral line intensity and then proceed to Step S2, using a linear function. Fx+c The linear portion of the intensity at temporal resolution is fitted, where F is the attenuation coefficient; The calibration module is used to correct the spectral intensity of the time resolution spectrum of the obtained calibration sample based on the energy level radiation attenuation coefficient of the calibration sample calibration spectral line, and complete the correction of the laser-induced breakdown spectrum. Specifically, the difference between the spectral intensity at the first delay time and the spectral intensity at the last delay time is calculated, and the difference is multiplied by the energy level radiation attenuation coefficient of the calibration sample calibration spectral line to obtain the corrected spectral intensity.
6. A computer-readable storage medium having a program stored thereon, characterized in that, When the program is executed by the processor, it implements the steps in the laser-induced breakdown spectral correction method based on energy level radiation attenuation as described in any one of claims 1-4.
7. An electronic device comprising a memory, a processor, and a program stored in the memory and executable on the processor, characterized in that, When the processor executes the program, it implements the steps in the laser-induced breakdown spectral correction method based on energy level radiation attenuation as described in any one of claims 1-4.