Indirectly cooled 100-kilowatt power level wobble beam ion beam measurement faraday

Abstract

The present application relates to a kind of indirect cooling type hundred-watt power level swing ion beam measurement Faraday device, including measurement component, swing arm transmission vacuum sealing assembly and cylinder drive assembly, measurement component is used to collect measurement charged ion and shield external interference, and with swing arm transmission vacuum sealing assembly fixed connection, swing together with cylinder drive, swing arm transmission vacuum sealing assembly is used to transmit the action of cylinder drive assembly to measurement component, and realize the vacuum sealing of each signal interface with the vacuum chamber where measurement component is located;Cylinder drive assembly is used to provide driving force for the swing of measurement component.Using the device disclosed in the present application, the external circulating cooling water circuit is completely isolated from the beam receiving measurement part, the heat is removed through indirect radiation heat dissipation and a small amount of heat conduction, which can improve the safety of the accelerator vacuum acquisition equipment, greatly save the safety operation cost of low-energy small beam accelerator, and has the technical advantages of safety and reliability, compact structure, convenient and practical.

Description

Technical Field

[0001] This invention belongs to the field of accelerator ion beam measurement, specifically relating to an indirect-cooled 100-watt power-level oscillating ion beam measurement Faraday device. Background Technology

[0002] With the widespread application of accelerator ion beam technology in various interdisciplinary fields, industrial processing, and civilian medical fields, higher requirements are placed on the long-term working stability and equipment safety and reliability of accelerator ion beam devices, which in turn places higher requirements on the safety and reliability of ion beam intensity measurement devices.

[0003] A Faraday device is a measuring instrument used to measure the intensity of an incident charged ion beam. It typically employs a bottomed metal cylinder insulated from ground potential to intercept and collect the charge, which is then output to a current measuring instrument. Faraday devices operate in a vacuum. Once the beam power exceeds tens of watts, radiative cooling is insufficient to remove the heat accumulated on the device; therefore, water cooling is generally the only option for high-power applications.

[0004] Typically, Faraday accelerators employ direct cooling, where the beam receiving surface is directly connected to the water-cooled heat exchange interface. Low-conductivity deionized water is also used, connected to the measuring (receiving) cylinder via insulated pipes to minimize leakage current across the water circuit load. While this direct cooling method is effective and can withstand power outputs of up to kilowatts, its biggest drawback is the significant potential for leakage in a vacuum due to the welding or connection methods used in the cooling water circuit. A leak would pose a substantial safety risk to equipment within the vacuum chamber and vacuum acquisition devices such as molecular pumps, significantly jeopardizing the stable operation and safety interlocking systems of the entire accelerator.

[0005] Currently, some scientific research and medical accelerators have beam characteristics of medium energy and low current intensity, with beam power ranging from tens to hundreds of watts. They must use water-cooled Faraday measurement devices. However, using directly water-cooled kilowatt-level high-power Faraday devices is costly and bulky, and there is also the possibility of leakage in the vacuum water circuit during long-term use. Therefore, there is a great need for a compact, low-cost, and leak-free water-cooled Faraday measurement device to meet these requirements. Summary of the Invention

[0006] To address the shortcomings of existing technologies, the present invention aims to provide an indirect-cooled, 100-watt power-level oscillating ion beam measurement Faraday device. By completely isolating the external circulating cooling water circuit from the beam receiving and measurement section, and removing heat through indirect radiation and a small amount of heat conduction, it can withstand beam power at the 100-watt level, reduce the probability of vacuum leakage, and has the technical advantages of being safe, reliable, fast, convenient, and portable.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is: an indirect-cooled 100-watt power-level swing-type ion beam measurement Faraday device, the device comprising a measurement component, a swing arm drive vacuum sealing component, and a cylinder drive component. The measurement component is used to collect and measure charged ions and shield external interference. The measurement component is integrally fixed on the mounting base plate and fixedly connected to the swing arm drive vacuum sealing component, and swings together under the drive of the cylinder. The swing arm drive vacuum sealing component is used to transmit the action of the cylinder drive component to the measurement component and realize the vacuum sealing of each signal interface and itself with the vacuum chamber where the measurement component is located. The cylinder drive component is used to provide driving force for the swing of the measurement component.

[0008] Furthermore, the measurement component includes a heat dissipation shielding cylinder, a suppression electrode, and a measurement cylinder. The measurement cylinder and the suppression electrode are coaxially mounted inside the heat dissipation shielding cylinder. The measurement cylinder is used to collect and measure charged ions. The suppression electrode is used to generate an electric field to suppress secondary electrons generated when charged ions bombard the measurement cylinder, causing the secondary electrons to return to the measurement cylinder. The heat dissipation shielding cylinder is used for heat dissipation, shielding the measurement component from external interference, and preventing the internal electric field from leaking out.

[0009] Furthermore, the measuring cylinder and the suppression electrode are insulated from each other by an insulating ring, and the measuring cylinder and the suppression electrode are insulated from each other by an insulating ring.

[0010] Furthermore, the insulating ring is made of boron nitride or ceramic material.

[0011] Furthermore, a process groove is provided on the outer wall of the heat dissipation shielding cylinder, and a water-cooled copper tube is wound in the process groove. The process groove on the outer wall of the heat dissipation shielding cylinder and the wound water-cooled copper tube are filled and welded together to achieve sufficient heat conduction.

[0012] Furthermore, the swing arm drive vacuum sealing assembly includes a sealing mounting flange, a swing bellows, and a protective tube. After the water-cooled copper tube is wound around the heat dissipation shielding cylinder, it passes upward through the hole of the sealing welded flange and then upward into the protective tube. The sealing welded flange and the sealing structure on the protective tube together achieve vacuum sealing and fixation. The part of the water-cooled copper tube that extends out of the protective tube is connected to a water pipe joint, which is used to introduce cooling water.

[0013] Furthermore, the water-cooled copper pipe is bent into shape as a single piece.

[0014] Furthermore, the mounting base plate is fixed to the sealing flange of the protective tube, and the measuring component is connected to the protective tube and swing bellows of the swing arm drive vacuum sealing component through the mounting base plate.

[0015] Furthermore, a mounting hole with a vacuum sealing structure is provided on the sealing mounting flange. The mounting hole is used to install a gas-tight signal lead socket and a gas-tight SHV ​​lead socket to realize the extraction of the measured charge signal and the suppression of the introduction of voltage. A CF high vacuum sealing structure is also provided to be connected and installed with the measuring component to realize the sealing and isolation of the vacuum system from the external atmosphere.

[0016] Furthermore, the cylinder drive assembly includes a pen cylinder, a movable joint, a connecting rod, and a ball joint. The cylinder drive assembly is connected to the swing arm transmission vacuum sealing assembly through the ball joint. The pen cylinder is mounted on the sealing flange by a bracket. Through the movable joint, the connecting rod, and the ball joint, the linear motion of the pen cylinder's extension and retraction is converted into the axial swing of the swing bellows, which in turn drives the protective tube, the mounting base plate, and the measuring assembly thereon to perform the swing arm motion together.

[0017] The beneficial technical effect of the present invention is that it completely isolates the external circulating cooling water circuit from the beam receiving and measurement part, and removes heat through indirect radiation and a small amount of heat conduction.

[0018] The measuring components and cooling water circuit are designed as a single unit, which can be easily installed on the vacuum flange. Together with the voltage suppression power supply and current signal transmission interface installed on the vacuum flange, they can be easily removed from the vacuum chamber, making maintenance very convenient.

[0019] The device is designed as a cylinder-driven swing arm, which moves quickly. The cooling water is placed in a protective pipe and moves together with the measuring components, which solves the problem of water circuit affecting moving parts. It greatly simplifies the size of the driving components and the overall size of the device, and has the technical advantages of being safe, reliable, compact, convenient and practical. Attached Figure Description

[0020] Figure 1 This is a front view of an indirect-cooled 100-watt power-level oscillating ion beam measurement Faraday device according to an embodiment of the present invention;

[0021] Figure 2 This is a left cross-sectional view of the measuring component of an indirect-cooled 100-watt power-level oscillating ion beam measurement Faraday device according to an embodiment of the present invention.

[0022] The components are: 1-heat dissipation shielding cylinder, 2-suppression electrode, 3-measuring cylinder, 4-mounting base plate, 5-boron nitride insulating gasket ring, 6-water-cooled copper pipe, 7-lead wire bundle baffle plate, 8-sealed welding flange, 9-protective tube, 10-airtight signal lead wire socket, 11-pen cylinder, 12-moving joint, 13-connecting rod, 14-joint, 15-water pipe connector, 16-corrugated pipe, 17-airtight SHV ​​lead wire socket, 18-sealed mounting flange. Detailed Implementation

[0023] The present invention will now be further described with reference to the accompanying drawings and specific embodiments.

[0024] Example 1

[0025] like Figure 1 As shown, this embodiment of the invention provides an indirect-cooled 100-watt power-level oscillating ion beam measurement Faraday device, including a measurement component, a swing arm drive vacuum sealing component, and a cylinder drive component. The measurement component is used to collect and measure charged ions and shield external interference. The measurement component is integrally fixed on the mounting base plate 4 and fixedly connected to the swing arm drive vacuum sealing component. It is driven by the cylinder to swing together. The swing arm drive vacuum sealing component is used to transmit the action of the cylinder drive component to the measurement component and to achieve vacuum sealing between each signal interface and itself and the vacuum chamber where the measurement component is located. The cylinder drive component is used to provide driving force for the swinging of the measurement component.

[0026] The swing arm drive vacuum sealing assembly transmits the drive to the vacuum chamber and ensures a vacuum seal between the signal interfaces and the chamber itself. The measuring component collects and measures the charge. All components are assembled as a single unit, allowing for easy removal and installation from the vacuum chamber. The measuring component can also be easily separated from the vacuum sealing assembly for partial replacement without affecting the overall operation of the swing arm drive vacuum sealing assembly. Maintenance is very convenient and cost-effective.

[0027] like Figure 2 As shown, the measuring assembly includes a heat dissipation shielding cylinder 1, a suppression electrode 2, and a measuring cylinder 3. The measuring cylinder 3 and the suppression electrode 2, made of molybdenum, are installed inside the copper heat dissipation shielding cylinder 1. The measuring assembly, consisting of the heat dissipation shielding cylinder 1, the measuring cylinder 3, and the suppression electrode 2, is integrally fixed on the mounting base plate 4.

[0028] The measuring cylinder 3 is used to collect and measure charged ions. It employs a thick-walled conical structure to increase the contact area between the ion beam and the cylinder, reduce its power density per unit area, and prevent localized high-temperature melting at the receiving surface, ensuring a gentle and uniform overall temperature rise. Secondary electrons generated when charged ions bombard the measuring cylinder 3 are suppressed back into the cylinder by the electric field generated by the suppression electrode 2 installed at its front, ensuring the accuracy of charge measurement.

[0029] The measuring cylinder 3 and the suppression electrode 2 are coaxially mounted inside the copper heat dissipation shielding cylinder 1. The heat dissipation shielding cylinder 1 is the water-cooled heat exchange carrier of this device, and at the same time, it shields the measuring components to prevent external stray ions from hitting the measuring cylinder 3 and causing measurement errors. It also shields and suppresses the electric field from affecting the outside.

[0030] The insulation between the measuring cylinder 3 and the suppression electrode 2, as well as the insulation between them and the heat dissipation shielding cylinder 1, is achieved using insulating rings 5 ​​made of boron nitride or ceramic. Boron nitride has twice the thermal conductivity of ceramic materials, thus providing better heat dissipation.

[0031] The water-cooled heat exchanger consists of a heat dissipation shielding cylinder 1 and water-cooled copper pipes 6 welded to its outer wall. Process grooves are machined on the outer wall of the heat dissipation shielding cylinder 1, and the water-cooled copper pipes 6 are wound inside these grooves to ensure sufficient contact area. The two are then brazed together, ensuring a robust structure and efficient heat transfer. A temperature switch is also designed on the outside of the heat dissipation shielding cylinder 1 for over-temperature alarms. If the power is too high or a water shortage occurs, preventing the heat from being fully dissipated, the heat dissipation shielding cylinder 1 will overheat and issue an alarm signal, activating the accelerator interlock protection.

[0032] The vacuum seal of the water-cooled heat exchange circuit is achieved by the sealing welded flange 8. After the water-cooled copper pipe 6 is wound around the heat dissipation shielding cylinder 1, the water-cooled copper pipe 6 passes upward through the hole of the sealing welded flange 8, and is welded to the sealing welded flange 8 here to ensure a seal. When the measuring component is connected and assembled with the swing arm drive vacuum sealing component, after the water-cooled copper pipe 6 passes through the protective pipe 9, the vacuum seal and fixation are achieved together by the sealing welded flange and the sealing structure on the protective pipe 9.

[0033] The portion of the water-cooled copper tube 6 that extends beyond the protective tube 9 connects to the water pipe connector 15, which in turn connects to the external PE hose, introducing cooling water circulation. Starting from the water pipe connector 15, the water-cooled copper tube 6 traverses both the atmosphere and vacuum, constructed from a single, bent copper tube without any other joints or welds, thus preventing potential leaks in the vacuum and improving the safety of the accelerator equipment. During operation, the water-cooled copper tube 6 remains stationary relative to the measuring components, having no impact on the vacuum seal. Furthermore, it is not subjected to external forces, ensuring the water circuit is not subject to mechanical damage or fatigue, guaranteeing long-term reliability. The absence of other joints and welds further prevents potential leaks in the vacuum, enhancing the safety of the accelerator equipment.

[0034] The mounting base plate 4 is fixed to the sealing flange of the protective tube 9 to determine the orientation of the measuring components and to ensure that the water-cooled copper tube 6 is not subjected to external forces. After mounting base plate 4, a movable support and fixed platform are also designed to be installed, so that the Faraday device can also be used vertically, which can be used in the vertical beamline section of the accelerator.

[0035] The measuring assembly, consisting of the heat dissipation shielding cylinder 1, the measuring cylinder 3, and the suppression electrode 2, is fixed on the mounting base plate 4 as a whole. It is also connected to the protective tube 9 and the swing bellows 16 of the swing arm drive vacuum sealing assembly. It swings together under the drive of an external cylinder. During operation, the water-cooled copper pipe 6 has no relative movement, which does not affect the vacuum seal and is not subject to external forces, ensuring that the water circuit will not be subjected to mechanical damage and fatigue.

[0036] The swing arm drive vacuum sealing assembly is a component capable of swinging motion, used to transmit the movement of the cylinder drive assembly to the measuring assembly. The assembly includes a sealing mounting flange 18, a swing bellows 16 with a movable support structure, and a protective tube 9. A vacuum sealing structure is provided at the connection point of the assembly to achieve a vacuum seal for the water-cooled copper tube. During operation, the water-cooled copper tube remains stationary relative to the measuring assembly, having no impact on the vacuum seal. Furthermore, it is not subjected to external forces, ensuring that the water circuit is not subject to mechanical damage or fatigue.

[0037] In one optional embodiment, a mounting hole with a vacuum sealing structure is provided on the sealing mounting flange 18 for mounting the airtight signal lead holder 10 and the airtight SHV ​​lead holder 17, enabling the extraction of the measured charge signal and the suppression of voltage introduction; a CF high-vacuum sealing structure is also provided for connection and installation with the vacuum chamber and measuring components, achieving airtight isolation between the vacuum system and the external atmosphere. The sealing assembly uses a high-quality vacuum-welded bellows with a service life of over one million cycles.

[0038] The cylinder drive assembly includes a pen cylinder 11, a movable joint 12, a connecting rod 13, and a ball joint 14. It is connected to the swing arm drive vacuum sealing assembly via the ball joint 14, providing driving force for the swing of the measuring component. When the cylinder extends or retracts, the connecting rod 13 drives the swing arm drive vacuum sealing assembly within its free range of motion, causing the bellows 16 and the protective tube 9 to swing within a certain angle range. This, in turn, causes the measuring component connected to it to swing, rapidly switching between the working position (beam center) and the standby position (not at the beam center).

[0039] The pen cylinder 11 is mounted on the sealed mounting flange 18 via a bracket. The linear motion of the pen cylinder 11 is converted into the oscillating bellows 16 around the axis by the movable joint 12, connecting rod 13 and ball joint 14. This oscillates the protective tube 9, mounting base plate 4 and the measuring components on it together to make a swing arm movement, switching between the working position and the non-working position.

[0040] The swing arm drive vacuum sealing assembly has a compact structure and uses a high-quality vacuum-welded bellows 16 with a service life of over one million cycles. The vacuum interface, cylinder drive, bellows 16, and various signal connectors are all integrated into one unit, allowing for easy disassembly and assembly from the vacuum chamber. The measuring components can also be easily separated from the vacuum interface for partial replacement without affecting the use of the bellows assembly, making maintenance very convenient and cost-effective.

[0041] Both the hermetic signal lead holder 10 for measuring signal transmission and the hermetic SHV lead holder 17 for suppressing voltage introduction into the vacuum are mounted on the sealed mounting flange 18 using a rubber ring seal, achieving a high degree of integration of the device. This allows for complete assembly and disassembly. A lead wire baffle 7 is designed at the connector of the signal line on the measurement component to eliminate the influence of stray ions in the vacuum, improving measurement accuracy.

[0042] As can be seen from the above embodiments, the indirect-cooled 100-watt power-level oscillating ion beam measurement Faraday device disclosed in this invention overcomes the technical defect of direct water-cooled Faraday cylinders, which have a high probability of vacuum leakage accidents. It provides a safe and reliable ion beam intensity measurement device, capable of withstanding beam power of up to 400-700 watts. Using the device disclosed in this invention can improve the safety of accelerator vacuum acquisition equipment, reduce the demand for rapid vacuum valves in the interlocking system, and significantly save on the safe operating costs of low- and medium-energy, low-current accelerators. This device adopts an oscillating bellows design. Compared with traditional linear-driven Faraday devices, the bellows is shorter and the structure is simpler, requiring only a short-stroke pen-type cylinder for drive. The manufacturing cost of the device ligands is relatively low, resulting in good economic benefits. This device adopts an integrated design, allowing for easy overall assembly and disassembly. The measurement component with the highest risk of damage can also be replaced individually without affecting the use of other components. It has high maintainability, is very easy to operate, has low operating and maintenance costs, and high efficiency, laying a reliable foundation for the application and development of accelerator ion beam technology.

[0043] The device described in this invention is not limited to the embodiments described in the specific implementation. Other implementation methods derived by those skilled in the art based on the technical solution of this invention also fall within the scope of technical innovation of this invention.

Claims

1. An indirect-cooled, 100-watt power-level oscillating ion beam measurement Faraday device, characterized in that: The device includes a measuring component, a swing arm drive vacuum sealing component, and a cylinder drive component. The measuring component is used to collect and measure charged ions and shield external interference. The measuring component is integrally fixed on the mounting base plate and fixedly connected to the swing arm drive vacuum sealing component. It swings together with the cylinder drive component. The swing arm drive vacuum sealing component is used to transmit the action of the cylinder drive component to the measuring component and realize the vacuum seal between each signal interface and itself and the vacuum chamber where the measuring component is located. The cylinder drive component is used to provide driving force for the swing of the measuring component.

2. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 1, characterized in that: The measurement assembly includes a heat dissipation shielding cylinder, a suppression electrode, and a measurement cylinder. The measurement cylinder and the suppression electrode are coaxially mounted inside the heat dissipation shielding cylinder. The measurement cylinder is used to collect and measure charged ions. The suppression electrode is used to generate an electric field to suppress secondary electrons generated when charged ions bombard the measurement cylinder, causing the secondary electrons to return to the measurement cylinder. The heat dissipation shielding cylinder is used for heat dissipation, shielding the measurement assembly from external interference, and preventing the internal electric field from leaking out.

3. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 2, characterized in that: The measuring cylinder and the suppression electrode are insulated from each other by an insulating ring, and the measuring cylinder and the suppression electrode are insulated from each other by an insulating ring.

4. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 3, characterized in that: The insulating ring is made of boron nitride or ceramic.

5. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 4, characterized in that: A process groove is provided on the outer wall of the heat dissipation shielding cylinder, and a water-cooled copper tube is wound in the process groove. The process groove on the outer wall of the heat dissipation shielding cylinder and the wound water-cooled copper tube are filled and welded together.

6. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 5, characterized in that: The swing arm drive vacuum sealing assembly includes a sealing mounting flange, a swing bellows, and a protective tube. After the water-cooled copper tube is wound around the heat dissipation shielding cylinder, it passes upward through the hole of the sealing mounting flange and then upward into the protective tube. The sealing mounting flange and the sealing structure on the protective tube together achieve vacuum sealing and fixation. The part of the water-cooled copper tube that extends out of the protective tube is connected to a water pipe joint, which is used to introduce cooling water.

7. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 6, characterized in that: The water-cooled copper pipe is bent into shape as a whole.

8. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 7, characterized in that: The mounting base plate is fixed to the sealing flange of the protective tube, and the measuring component is connected to the protective tube and swing bellows of the swing arm drive vacuum sealing component through the mounting base plate.

9. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 8, characterized in that: A mounting hole with a vacuum sealing structure is provided on the sealing mounting flange. The mounting hole is used to install a gas-tight signal lead socket and a gas-tight SHV ​​lead socket to realize the extraction of the measured charge signal and the suppression of the introduction of voltage. A CF high vacuum sealing structure is also provided to be connected and installed with the measuring component to realize the sealing and isolation of the vacuum system from the external atmosphere.

10. The indirectly cooled 100-watt power-level oscillating ion beam measurement Faraday device as described in claim 9, characterized in that: The cylinder drive assembly includes a pen cylinder, a movable joint, a connecting rod, and a ball joint. The cylinder drive assembly is connected to the swing arm transmission vacuum sealing assembly through the ball joint. The pen cylinder is mounted on the sealing flange by a bracket. Through the movable joint, the connecting rod, and the ball joint, the linear motion of the pen cylinder's extension and retraction is converted into the oscillating motion of the swing bellows around its axis, which in turn drives the protective tube, the mounting base plate, and the measuring assembly thereon to perform the swing arm motion together.

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